TWI686556B - Heating gate valve - Google Patents

Abstract

A heating gate valve at least comprises a valve body having at least an opening, a gate plate that shifts inside the valve body to open or close the opening, and a heating device that heats the gate plate and shifts along with the gate plate. As a result, the valve body and the gate plate can be heated to a desired temperature to thereby avoiding the deposition of particles in the gas.

Description

Heating gate valve

This creation is a gate valve structure, and in particular relates to a heating gate valve.

Gate valves are often used between fluid lines in the process chamber. They are mainly used to control the opening or closing of fluid lines to regulate the flow and pressure of fluids. However, the temperature of the gate valve is usually lower than the temperature of the process chamber. Therefore, when the high-temperature gas in the process chamber contacts the gate valve, the solid particles in the gas are easily deposited on the gate valve, which may pollute or affect the subsequent process.

In view of this, the purpose of this creation is to provide a heating gate valve to solve the problems of the conventional technology.

In order to achieve the above purpose, the present invention provides a heated gate valve, which at least includes a valve body having at least one valve port; the gate plate is displaced in the valve body to open or close the valve port; and a heating device is used to heat the gate plate and follow the gate The plate is displaced.

The heating gate valve of the present invention preferably further includes a driving module, wherein the driving module drives the gate plate to move away from or close to the valve port via a linkage rod to move up and down.

The heating gate valve of the present invention preferably further includes a sleeve, wherein the lead set of the heating device is inserted into the sleeve, and the first side of the sleeve is connected to the linkage rod or gate plate in the valve body for displacement. The second side extends to the outside of the valve body.

The heating gate valve of the present invention preferably further includes a hose provided on the second side of the sleeve.

The heating gate valve of the present invention preferably further includes a cover body provided on one side of the valve body.

Wherein, the linkage rod and the sleeve respectively pass through the first slot and the second slot on the cover body.

The heating gate valve of the present invention preferably further includes a first hollow guide tube disposed on one side of the first through slot and between the cover body and the driving module, and a linkage rod passes through the first hollow guide tube to connect the driving module, And the second hollow guide tube is provided on one side of the second through slot, and the sleeve passes through the second hollow guide tube.

The heating device includes at least a heating element and a heating lead connected to the heating element.

The heating gate valve of the present invention preferably further includes a heating jacket for covering and heating the valve body, wherein the opening of the heating jacket corresponds to the valve port of the valve body.

Among them, the shutter further includes two plates, and the two-plate system is displaced toward or away from each other to open or close the valve port.

According to the above, the heating gate valve according to this creation can have one or more of the following advantages:

(1) The gate is heated by a heating device to prevent solid particles in the gas from depositing on the gate valve and affecting subsequent processes or causing pollution.

(2) Through the special structure design of the gate, the linkage rod can drive the gate to carry out lateral displacement to open or close the gate. And because the creation is provided with a hose and a sleeve, when the gate is laterally displaced, it can absorb the displacement deviation and provide a buffering effect.

In order to better understand the technical features, content and advantages of this creation and the achievable effects, the creation is combined with the drawings, and the expressions of the embodiments are described in detail below. The purpose of the drawings used is only For the purpose of illustration and supplementary instruction, it may not be the true proportion and precise configuration after the implementation of the creation, so the proportion and configuration relationship of the attached drawings should not be interpreted and limited to the scope of the actual rights of the creation. In addition, for ease of understanding, the same elements in the following embodiments are described with the same symbols. The size ratios of the components shown in the drawings are only for the convenience of explaining the elements and their structures, and are not intended to be limiting.

In addition, the terms used throughout the specification and the scope of patent application, unless otherwise specified, usually have the ordinary meaning that each term is used in this field, in the content disclosed here, and in the special content. Certain terms used to describe this creation will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the creation.

With regard to the use of "first", "second", "third", etc. in this article, it does not specifically mean the order or order, nor is it used to limit the creation, it is only to distinguish the components described in the same technical terms Or just operate.

Secondly, if the words "include", "include", "have", "include", etc. are used in this article, they are all open terms, which means including but not limited to.

Please refer to FIG. 1 to FIG. 10, the heating gate valve of the present invention can be heated to maintain the gate valve at a desired temperature, for example, maintained at 180 ℃ to 200 ℃, in order to prevent the process gas and the particles carried by the cold deposit phenomenon. The heating gate valve of the present invention includes at least the valve body 10, the gate plate 30 and the heating device 50. The valve body 10 is, for example, a rectangular parallelepiped having a hollow interior 12. The top side of the valve body 10 has an opening 14 to communicate with the hollow interior 12, and both sides of the valve body 10 have valve ports 16 to communicate with the hollow interior 12. The valve body 10 and the shutter 30 can be made of metal, alloy, or other suitable materials. The valve port 16 on one side of the valve body 10 is communicated to the process chamber via a process pipe, for example, and the valve port 16 on the other side of the valve body 10 is communicated to a vacuum device or other devices via another process pipe, for example. However, the valve body 10 is not limited to the aforementioned rectangular parallelepiped, and may have other suitable shapes. The power of the heating device 50 may be, for example, in the range of 200w to 240w, preferably 240w, but is not limited thereto.

In addition, the heating gate valve of the present invention may further have a detachable cover 18. The cover body 18 is detachably connected to the top side of the valve body 10 by, for example, screw connection, sleeve connection, snap connection or other connection methods, so as to cover the opening 14 on the top side of the valve body 10. The cover 18 may be, for example, the top side of the airtight connection valve body 10 to seal the opening 14. For example, seals such as O-rings and rubber gaskets can be provided between the cover 18 and the valve body 10 for sealing purposes. For example, the cover 18 penetrates the first through groove 22 and the second through groove 24 (that is, the first through groove 22 and the second through groove 24 penetrate through the upper and lower ends of the cover 18 ). The heating gate valve of the present invention further has a driving module 40 (driving module or driving device) disposed outside the valve body 10, and the driving module 40 is connected to the valve body 10 via the first hollow guide cylinder 42. In the heating gate valve of the present creation, the gate plate 30 is located in the hollow interior 12 of the valve body 10, and the driving module 40 drives the gate plate 30 to displace via the linkage rod 46. The first hollow guide tube 42 is provided on the outer side of the first penetration groove 22 of the cover 18, or the first hollow guide tube 42 may also be penetrated with the first penetration groove 22. For example, as shown in FIG. 3, the first hollow guide tube 42 penetrates the first through slot 22 and one end of the first hollow guide tube 42 may protrude from the first through slot 22.

The heating gate valve of the present invention may optionally include a heating jacket 70, wherein the size of the heating jacket 70 is slightly larger than that of the valve body 10 and the cover body 18, which is a covered heater and may have an adhesive structure such as devil felt , For covering the valve body 10 and the cover 18. The heating jacket 70 has heating elements such as heating wires inside, and the valve body 10 is heated to maintain the temperature of the valve body 10. And the heating jacket 70 has openings 72 on both sides, wherein the shape, size and position of the opening 72 correspond to the valve ports 16 on both sides of the valve body 10. The heating jacket 70 includes, for example, a multi-layer structure such as an outer heat-resistant cloth, an insulating layer, a heating wire, and an inner heat-resistant cloth. The inner heat-resistant cloth contacts the valve body 10, and the heating wire is located between the heat-insulating layer and the inner heat-resistant cloth. The outer layer is heat-resistant The cloth is located outside the insulation layer. However, the structural types of the heating jacket 70 described above are only examples, and are not intended to limit the implementation of this creation and the scope of its rights. That is, the heating jacket 70 can also be of other structural types, as long as it can achieve the effect of heating and/or heat preservation, it can be suitable for this creation.

In detail, the drive module 40 is, for example, a reciprocating pneumatic cylinder, and one side of the linkage rod 46 is, for example, a piston rod connected to the reciprocating pneumatic cylinder, so that the linkage rod 46 reciprocates as the drive module 40 operates Type displacement. In addition, the linking rod 46 also passes through the first hollow guide tube 42 between the driving module 40 and the cover 18 and through the first through slot 22 on the cover 18 (the first hollow guide tube 42 can pass through The first through-slot 22, or located outside the first through-slot 22), so that the other side of the interlocking rod 46 is connected to the shutter 30 located in the hollow interior 12 of the valve body 10. Therefore, when the piston rod of the driving module 40 performs reciprocating displacement, the driving module 40 can drive the shutter 30 via the linkage rod 46 to perform reciprocating displacement (ie, longitudinal displacement) to raise and lower the height, thereby allowing the shutter 30 to be displaced In the process, a longitudinal displacement is performed to change the height toward or away from the valve port 16 of the valve body 10. In detail, the gate 30 of the heating gate valve of the present creation is provided in the hollow interior 12 of the valve body 10, and can be longitudinally displaced in the hollow interior 12 of the valve body 10 by the reciprocating movement of the interlocking rod 46 to move up and down The height, and the structural design of the shutter 30 are laterally displaced during the displacement process to move away from or close to the valve port 16 of the valve body 10 to open or close the valve ports 16 on both sides of the valve body 10.

In detail, when the linkage rod 46 is longitudinally displaced from top to bottom, then in the latter stage of the longitudinal displacement, the two plates 31 of the gate 30 can be laterally displaced toward the valve port 16 to close the valve Mouth 16. Conversely, when the linkage rod 46 is longitudinally displaced from bottom to top, the two plates 31 of the gate 30 can be laterally displaced in a direction away from the valve port 16 in the process of the longitudinal displacement, thereby opening the valve port 16 .

In addition, the heating gate valve of the present invention also includes a heating device 50, which is disposed on one or two plate bodies 31 of the gate plate 30 to heat the gate plate 30 and longitudinally move with the gate plate 30 And the lateral displacement, and the heating device 50 includes, for example, a heating element 52, and may optionally include a temperature sensing element 54. As shown in FIG. 5, the heating element 52 may be, for example, bent on the surface of the plate 31 or in a groove on the surface of the plate 31. The heating element 52 is further connected to an external control device via the heating lead 53, so that the control device can control the heating element 52 to generate heat via the heating lead 53 to increase the temperature of the shutter 30. The temperature-sensing element 54 is further connected to the control device via the temperature-sensing lead 55, thereby transmitting the temperature data measured by the temperature-sensing element 54 to the control device via the temperature-sensing lead 55, whereby the control device can control the heating element 52 according to the temperature data A heat source is generated so that the shutter 30 is maintained at a desired temperature. The heating element 52 may be, for example, a nickel-chromium alloy heating element, the heating lead 53 may be, for example, a metal wire, the temperature sensing element 54 may be, for example, a thermocouple or a thermal resistance, and the temperature-sensing lead 55 may be, for example, a metal wire. With the heating device 50, the shutter 30 can be maintained at a preset temperature, for example, 180°C to 200°C, to prevent the gas from being cold and causing solid particles to deposit on the valve body 10. The aforementioned temperature is just an example. The user can adjust the heating temperature applied to the valve body 10 by the heating device 50 through the control device according to the nature of the gas flowing through the valve body 10 to avoid the deposition phenomenon.

In addition, the heating gate valve of the present invention further includes a hollow sleeve 56, in which the lead group composed of the heating lead 53 and the temperature-sensing lead 55 of the heating device 50 is passed through the sleeve 56, so that the inner edge of the valve body 10 It extends to the outside of the valve body 10. The heating lead 53 and the temperature-sensing lead 55 of the heating device 50 may form an outer side of the lead group, for example, covered with a cylinder, wherein the cylinder and the internal lead group are co-pierced in the sleeve 56. The first side of the sleeve 56 can be directly connected or indirectly connected to the linkage rod 46 or the shutter 30 in the valve body 10 via the connection block 566, and is driven by the linkage rod 46 to be synchronously displaced. Therefore, when the linkage lever 46 moves up and down, the sleeve 56 can also move up and down along with the linkage lever 46. The second side of the sleeve 56 passes through the second through-groove 24 of the cover body 18 to extend to the outside of the valve body 10, wherein the end of the first side of the sleeve 56 preferably has an opening. The ends on both sides are preferably in a sealed state. In the present creation, the second hollow guide tube 57 may be provided on the outer side of the second through slot 24 of the cover 18, or the second hollow guide tube 57 may also be provided with the second through slot 24. For example, as shown in FIG. 3, the second hollow guide tube 57 penetrates the second through slot 24 and one end of the second hollow guide tube 57 may protrude from the second through slot 24.

The sleeve 56 may pass through the second hollow guide tube 57 from the hollow interior 12 of the valve body 10 to protrude to a length outside the valve body 10. When the sleeve 56 gradually rises in height, the protruding length may increase accordingly, and when the sleeve 56 gradually decreases in height, the protruding length may decrease accordingly. In addition, the heating gate valve of the present invention is further provided with a hose 60, preferably a bellow, on the second side of the sleeve 56 to provide a better sealing effect. In addition, the present invention may further include a housing 80 to cover the hose 60 and/or the driving module 40, so as to make the overall appearance more concise. Since the heating device 50 is disposed on one or two plate bodies 31 of the shutter 30, during the process of opening or closing the gate 16, the lead group composed of the heating lead 53 and the temperature-sensing lead 55 of the heating device 50 will also Perform longitudinal displacement and lateral displacement. Therefore, by providing the hose 60 in the present invention, when the longitudinal displacement and lateral displacement of the plate body 31 of the shutter 30 are performed, the lead groups such as the heating lead 53 and the temperature-sensing lead 55 of the absorption heating device 50 are driven by the plate body 31 The resulting longitudinal and lateral displacement deviations provide cushioning. In addition, in the present creation, a sleeve 56 is provided and the lead wire group such as the heating lead 53 and the temperature-sensing lead 55 of the heating device 50 are passed through the sleeve 56 through the opening of the first side of the sleeve 56 and extend to the sleeve 56 On the second side, not only can tolerate the amount of displacement deviation, but also can be applied to gate valves of various sizes, which helps to miniaturize the heating gate valve.

The shutter 30 of the present invention can generate lateral displacement through structural design, and includes, for example, two plate bodies 31, a clamping member 33, a fixed plate 34, and a ball member 35. The outline shape of the two plate bodies 31 is, for example, a circle, and the outer periphery of the plate body 31 is used to adhere to the surface of the valve body 10 around the circular valve port 16, thereby selectively sealing the valve port 16 of the valve body 10, and The inner surface of the plate 31 has one or more limiting grooves 32. In addition, seals such as O-rings and rubber gaskets may be provided on the valve body 10 around the plate body 31 or the valve port 16 for airtight purposes. Wherein, the inner surface of the plate 31 is a flat surface, and the limiting groove 32 is elongated and longitudinally distributed on a part of the inner surface of the plate 31, wherein two sides of the limiting groove 32 each have two slightly arc-shaped The upper limit zone 321 has a deeper depth, while the lower limit zone 322 has a shallower depth (the depth of the limit zone 321 is greater than the limit zone 322), and the two limit zones 321, The depth between 322 shows a gradual change. The fixing plate 34 is connected to the linkage rod 46, and the ball members 35 are provided on the fixing plate 34. The number of the ball members 35 corresponds to the number of the limiting grooves 32. The ball member 35 includes a groove base 351 and a ball 352. The groove base 351 is fixed on the fixing plate 34, and the ball 352 is freely rollably limited in the groove base 351. The clamping member 33 is a clamping piece with elastic force, and the cross-sectional shape is generally U-shaped, the bottom edge of the clamping member 33 is generally arc-shaped (see FIG. 6), and the top edges of both sides of the clamping member 33 are formed by The hook plate 311 of the plate body 31 is hooked below (see FIGS. 7 and 8 ), by which the elastic force of the clamping member 33 can be used to press the two plate bodies 31 against the fixed plate 34, and the balls of the ball member 35 352 is located in the limit slot 32.

When the linkage rod 46 drives the fixed plate 34 to move from top to bottom, the entire shutter 30 will move down simultaneously, and when the bottom of the clamping member 33 is blocked by the bottom of the valve body 10 and cannot continue to move downward ( The bottom of the clamping member 33 abuts the valve body 10). At this time, the fixing plate 34 will continue to move downwards, and the ball 352 of the ball member 35 will move from the upper limiting area 321 to the lower limiting area 322. Since the depth of the limiting area 321 is deeper and the depth of the limiting area 322 is shallower, the two plate bodies 31 will be gradually opened by the ball member 35 to resist the valve port 16 of the valve body 10, which makes the brake The plate 30 seals the valve port 16 of the valve body 10. Conversely, when the linkage rod 46 drives the fixed plate 34 to move from bottom to top, the balls 352 of the ball member 35 will move from the lower limit area 322 to the upper limit area 321, because the depth of the limit area 322 is shallow The depth of the limiting area 321 is deep, so the clamping member 33 will make the distance between the two plate bodies 31 closer, that is, the gate plate 30 opens the valve port 16 of the valve body 10.

In summary, the heating gate valve of the present invention may have one or more of the following advantages: (1) The gate is heated by the heating device to prevent the solid particles in the gas from depositing on the gate valve and affecting the subsequent process. Or cause pollution. (2) Through the special structure design of the gate, the linkage rod can drive the gate to carry out lateral displacement to open or close the gate. And because the creation is provided with a hose and a sleeve, when the gate is laterally displaced, it can absorb the displacement deviation and provide a buffering effect.

The above is only exemplary, and not restrictive. Any equivalent modifications or changes made without departing from the spirit and scope of the present invention shall be included in the scope of the attached patent application.

10: Valve body 12: Hollow interior 14: opening 16: Valve port 18: Cover 22: The first slot 24: second slot 30: gate 31: Board 311: hook board 32: limit slot 321: Limit zone 322: Limit zone 33: clamping piece 34: fixed plate 35: Ball parts 351: Slot 352: Ball 40: drive module 42: The first hollow guide tube 46: linkage 50: heating device 52: Heating element 53: Heating lead 54: temperature sensing element 55: temperature sensitive lead 56: sleeve 57: Second hollow guide tube 566: Connection block 60: hose 70: Heated jacket 72: opening 80: shell I-I, II-II: section line

FIG. 1 is a perspective schematic view of the heating gate valve of this creation.

FIG. 2 is a schematic front view of the heating gate valve of this creation.

FIG. 3 is a schematic cross-sectional view of the heating gate valve of this creation, in which the gate is in a closed state.

FIG. 4 is a schematic cross-sectional view of the heating gate valve of the present invention, in which the gate is in an open state (to simplify the drawing, the heating jacket is not shown in FIG. 4).

FIG. 5 is a schematic front view showing the plate body and heating device of the shutter of the present creation.

FIG. 6 is a schematic front view of the shutter and the heating device of this creation.

7 is a schematic cross-sectional view taken along the I-I section line in FIG. 6, wherein the two plates of the shutter are away from each other.

FIG. 8 is a schematic cross-sectional view taken along the I-I section line in FIG. 6, in which the two plates of the shutter are close to each other.

9 is a schematic cross-sectional view taken along the line II-II in FIG. 6, in which the two plates of the shutter are away from each other.

10 is a schematic cross-sectional view taken along the line II-II in FIG. 6, in which the two plates of the shutter are close to each other.

10: Valve body

12: Hollow interior

14: opening

18: Cover

22: The first slot

24: second slot

30: gate

31: Board

311: hook board

33: clamping piece

34: fixed plate

40: drive module

42: The first hollow guide tube

46: linkage

50: heating device

53: Heating lead

55: temperature sensitive lead

56: sleeve

57: Second hollow guide tube

566: Connection block

60: hose

70: Heated jacket

80: shell

Claims (9)

A heating gate valve at least includes: a valve body with at least one valve port; a cover body, which is provided on one side of the valve body; and a gate plate, which performs a longitudinal displacement in the valve body to raise and lower the height and a lateral displacement To open or close the valve port; a heating device including at least a heating element and a heating lead for heating the gate and the longitudinal displacement and the lateral displacement along with the gate, the heating element is provided on the gate On the board, the heating lead is connected to the heating element; a sleeve performs the longitudinal displacement in the valve body, a first side of the sleeve is located in the valve body, and a second side of the sleeve is located in the valve The outside of the body; and a hose that seals the second side of the sleeve, the heating lead of the heating device is threaded through the sleeve and extends to the second side of the sleeve, wherein the heating device The heating lead performs the longitudinal displacement and the lateral displacement along with the shutter. The heating gate valve described in item 1 of the patent application scope further includes a driving module which drives the gate plate to move away from or close to the valve port through a linkage rod to perform the displacement to raise and lower the height. The heating gate valve described in item 1 of the scope of the patent application further includes a sealing member disposed on the gate plate. The heating gate valve as described in item 1 of the patent application scope, wherein the valve body is a vacuum valve body. The heating gate valve as described in item 1 of the patent application scope, wherein the linkage rod and the sleeve respectively pass through a first slot and a second slot on the cover body. The heating gate valve as described in item 5 of the patent application scope further includes a first hollow guide tube disposed in the first slot, the linkage rod passes through the first hollow guide tube to connect the drive module, and a The second hollow guide cylinder is disposed in the second through slot, and the sleeve passes through the second hollow guide cylinder. The heating gate valve as described in item 1 of the patent application range, wherein the heating device further includes a temperature sensing element and a temperature sensing lead connected to the temperature sensing element, the temperature sensing element is provided on the gate plate, and the temperature sensing lead is Pass through the sleeve and extend to the second side of the sleeve. The heating gate valve as described in item 1 of the patent scope further includes a heating jacket for covering and heating the valve body, wherein an opening of the heating jacket corresponds to the valve port of the valve body. The heating gate valve as described in item 1 of the patent application scope, wherein the gate plate further includes two plate bodies, and the two plate system performs the lateral displacement toward or away from each other to open or close the valve port.

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