TWI686234B - Multi-tube micro-bubble waste gas treatment device - Google Patents

Abstract

A multi-tube micro-bubble exhaust gas treatment device, comprising: a multi-tube exhaust gas transmission unit and a gas-liquid mixing unit; it is a method of stabilizing the liquid surface to rise in a container cavity at a nearly constant height, and transferring it to the same pressure Each water pipe, because the cavity space of the steady flow area is fixed, the liquid is squeezed into each water pipe under the reaction force of the small space, resulting in a rapid flow resulting in the principle of white effort, letting a large pressure of gas in the container A negative pressure is generated on the surface, and the gas is generated by the negative pressure on the surface of the intake pipe, so it is sucked into the intake pipe and mixed with the liquid, and then contacted with the liquid and discharged into the liquid, resulting in micro bubbles. After the micro bubbles burst, the gas is discharged to the outlet At the end, because the device automatically generates negative pressure, the pressure difference between the inlet and the outlet is relatively reduced. Furthermore, by using the product of the cross-sectional area and quantity of the shunt tube and the liquid flow rate, the relative exhaust gas discharge volume to be treated can be calculated, and the large-scale exhaust gas can be treated by liquid-gas mixing.

Description

Multi-tube micro-bubble waste gas treatment device

The invention relates to an exhaust gas treatment device, in particular to a multi-tube micro-bubble exhaust gas treatment device that uses a partial pressure method to overcome a large amount of exhaust gas that cannot be applied to a gas-liquid mixing device.

In general, the exhaust gas generated by the general semiconductor industry mainly comes from the process reaction, such as the etching, deposition, impurity doping of semiconductor components, and the dust and particles generated by the pickling operation of integrated circuit boards. The particle size is extremely small, mostly below microns. The gaseous and granular air pollutants are not easy to capture. Exhaust gas generated by current semiconductor and optoelectronic process machines can generally be pumped into air pollution control equipment through a vacuum pump for combustion treatment and washing of exhaust gas, but it is generated during the reaction Most of the particles are less than the sub-micron range below 1μm, and the commonly used air pollution prevention equipment, such as the venturi scrubber (Venturiscrubber) are designed to deal with larger particles (greater than 1μm), and cannot effectively control the emissions released in the exhaust Submicron particles. As a result, blockage of the ventilation system in the factory often occurs, affecting the progress of the manufacturing process and the safety of maintenance personnel. Therefore, how to effectively deal with the emission of fine particles is a very important issue.

Press twice, when the exhaust gas of the process machine is evacuated from the process chamber, it will first pass through the exhaust gas treatment equipment, and then be further processed and discharged into the atmosphere. Current exhaust gas treatment equipment generally uses high temperature heating in the front stage to oxidize the exhaust gas of the semiconductor process, and then sprays and rinses with clean water through a sprinkler to cool the high temperature exhaust gas while washing the high temperature exhaust gas, so that the particles or acids and alkalis in the exhaust gas are dissolved in the water, and then The waste water is discharged through the drain pipe, and the treated exhaust gas is discharged to the outside through the exhaust pipe through the exhaust device.

Please refer to FIG. 1A, which discloses an internal structure diagram of a conventional Counter-flow Packing Absorption Tower 1. At the bottom of the packed washing tower 1, there is a water tank 12, the water in the water tank 12 can be pumped to the top of the packed washing tower 10 through a pumping pump 14, and sprayed downward through a plurality of spray holes 16, Then, the downward sprayed water will pass through a plurality of Packing 18 disposed in the middle of the packed scrubber tower 1 and then flow down into the water tank 12. When the exhaust gas enters the packed scrubber tower 1 through the pipeline 20, the exhaust gas will pass upward through a plurality of Raschig rings 18 disposed in the middle of the packed scrubber tower 1. At this time, the water sprayed from the water spray holes 16 will also flow downward After the Rasi ring 18, because the function of the Rasi ring 18 is to increase the contact area of water and exhaust gas, some pollutants in the exhaust gas will flow into the water tank 12 after being adsorbed by water, so that a cleaning cycle is completed, The remaining exhaust gas is discharged through the exhaust hole 22 at the top of the packed scrubber tower 1. This type of scrubber 1 has been disclosed in Taiwan Patent No. 542747.

However, this conventional method of treating exhaust gas by the packed scrubber 1 only uses water droplets to absorb pollutants in the exhaust gas. Even with the Lasi ring 18, it cannot really effectively expand the contact area of exhaust gas and water, so that the exhaust gas The pollutants in the system are effectively absorbed by the water, so after the exhaust gas is treated by the packed scrubber 1, its pollutant content is still quite high, and it will still cause a considerable degree of damage to the surrounding environment.

In addition, some companies use the Collision Venturi Scrubber 2 as shown in FIG. 1B. The most common one is the collision type Venturi Scrubber, which is generally used to use a rear-mounted lure windmill 20 (Introduced Fan ), the exhaust gas 21 is accelerated and sucked in, and is vertically opposed to and collided with the fine liquid 23 atomized by the venturi throat 22, and the dust and particles are enclosed in the water droplets to form a particle size thousands of times larger than the original The droplet 24, due to the double increase in volume and mass inertia of the droplet 24, prevents the droplet 24 from flying through the demister 25 (ie, gas/liquid separator) of the scrubber, and is blocked, dropped, and immersed Collected in the water tank, the clean air is separated from the droplets and discharged out of the system, but the acid gas removal efficiency of the Venturi scrubber is only about 50% to 70%, which cannot meet the 99% acid gas removal requirements. In addition, in order to make the scrubber The tower's venturi meets the requirements of accelerated atomization mixing, and the required pressure difference is much higher than other equipment (at least 760~2030mmAq). Since the power consumption of the lure windmill 20 is proportional to the pressure difference, the initial investment and The high cost of operation and maintenance, the high technical requirements of the operation, and the large floor area are all shortcomings. This type of scrubber 2 has been disclosed in Taiwan Patent No. 352007.

Therefore, at present, there is no economical and practical device for treating exhaust gas in the semiconductor industry. In view of this, the inventor is actively researching and improving with a view to a technology with better efficiency and lower cost to meet the requirements of environmental protection regulations, and the above problems can be overcome by the present invention.

The reason is that the main purpose of the present invention is to provide a solution to the conventional exhaust gas treatment device that cannot properly deal with the lack of various exhaust gases in the semiconductor industry. It uses a partial pressure method to overcome the large amount of exhaust gas that cannot be applied to the gas-liquid mixing device. The bubble method can effectively intercept and filter the particles in the exhaust gas and recover it, which can effectively remove the submicron particles harmful to the human body and the environment in the industrial process, and does not need to complicate the existing process, and can effectively remove the Gases that have adverse effects on the human body and the environment.

In order to achieve the above purpose, the technical means adopted by the present invention include: an exhaust gas transmission unit, including: a large-area conveying pipe, having a front end portion and a rear end portion, the front end portion is used to receive the discharge from an external device Exhaust gas; many small cross-section integrative flow tubes are connected to the rear end of the large cross-sectional area conveying pipe, so that the exhaust gas transmitted through the small cross-sectional integrative flow tube produces a shunt; A gas-liquid mixing unit includes: a first container having a closed bottom, and the first container is provided with a first partition and a second partition above the bottom, the first The receiving space between the partition and the bottom forms a water inlet area, the first container is provided with at least one water inlet pipe relative to the side wall of the water inlet area, and the first partition is provided with a plurality of overflow holes; In addition, the accommodating space between the second baffle and the first baffle forms a steady flow area; most of the air intake pipes have an air inlet above the air inlet, and a jet outlet at the bottom, the air inlet The mouth is protruded on the second partition, and its pipe diameter is larger than that of the small-section integrating flow tube. The small-section integrating flow tube can be extended into the air inlet to introduce the exhaust gas that has been diverted. At the same time, an atmospheric pressure contact area is formed between the outer periphery of the small-section integrating flow tube and the inner periphery of the air inlet; most of the water guide tubes have a water guide port above the water guide tube, and a jet port at the bottom, the water guide port It is larger than the air injection port of the air intake pipe, so that the air injection port can extend into the water guide port, and a liquid suction area is formed between the outer wall of the water guide port and the inner wall of the air injection port, and the small cross-sectional integral flow The exhaust gas of the tube is mixed with the liquid flowing in the same direction to flow out, so that the shunted exhaust gas accelerates the flow rate of the liquid under a large pressure, and is sent to the water conduit. Under the action of the white effort principle, the liquid drives the exhaust gas to hit the liquid surface. Forming a water stream containing a large number of pressurized bubbles; and a micro-bubble generating unit, including: a second container having a closed bottom for receiving exhaust gas and liquid introduced by the plurality of water guide pipes, and The liquid level of the liquid is raised above the spout of the water guide tube, so that the spout creates a large number of micro bubbles in the second container.

One of the main principles and features of the present invention is to use multiple holes or channels (overflow holes) to allow multiple cavities (first container) to communicate in layers, and the liquid is discharged into the water inlet area of the cavity below, through several holes or The channel (overflow hole) shunts to the steady flow area of the upper cavity, and the liquid level rises close to the constant height in a pressure-stabilized manner, and is transmitted to each water guide pipe with a uniform pressure, because the cavity space of the steady flow area is fixed, The liquid is squeezed into each aqueduct under the reaction force of this small space, resulting in rapid flow and causing the principle of white effort, allowing a large pressure of gas to produce a negative pressure on the surface of the cavity. The gas is caused by the cavity (first container) The negative pressure is generated on the surface of the intake pipe, so it is sucked into the intake pipe and mixed with the liquid, and then contacted with the liquid and discharged into the liquid, generating micro bubbles. After the micro bubbles burst, the gas is discharged to the outlet end, because the device will automatically generate Negative pressure, so the pressure difference between inlet and outlet is relatively reduced.

The second principle and feature of the present invention is: using the product of the multi-tube small cross-section integrating flow tube and the quantity, and the liquid flow rate, the discharge amount of the exhaust gas to be treated can be calculated, and then the large-scale exhaust gas is processed by the liquid-gas mixing method.

With the aid of the above-mentioned technical means, the present invention mixes and discharges the exhaust gas of the small-section integrating flow tube with the liquid flowing in the same direction, so that the shunted exhaust gas accelerates the liquid flow rate at a large pressure and sends it to the water conduit. Under the action of the white effort principle, The liquid drives the exhaust gas to hit the liquid surface, forming a water flow containing a large number of micro-bubbles. Accordingly, the partial pressure method is used to overcome the problem that a large amount of exhaust gas cannot be applied to the gas-liquid mixing device, and the gas-liquid mixing effect is increased to improve the filtering effect of the exhaust gas.

The following description uses the drawings as an embodiment, but it is not limited thereto. The present invention can be implemented in other embodiments, and well-known steps or elements are not described in details to avoid unnecessary restrictions on the present invention. . It is important to note that the drawings are for illustrative purposes only, and do not represent the actual size or number of components. Some details may not be fully drawn for simplicity.

First of all, please refer to FIG. 2 to FIG. 5, a preferred embodiment of the multi-tube micro-bubble exhaust gas treatment device of the present invention includes: an exhaust gas transmission unit 30, including: a large-area delivery pipe 31, having a Front end portion 311 and a rear end portion 312, the front end portion 312 is used to receive the exhaust gas (A) discharged from an external device (not shown); many small cross-section integrating tubes 32 are connected to the large cross-sectional area for transportation The rear end portion 312 of the tube 31 causes the exhaust gas (A) to be diverted through the small-section integrating tube 32. This is one of the main features of the present invention, that is, the large-sectional area conveying pipe 31 is divided into a multi-pipe type small-section integrating flow pipe 32, and its function will be described in detail later.

A gas-liquid mixing unit 40 includes: a first container 41 having a closed bottom 411, and inside the first container 41 above the bottom 411, a first partition 412 and a first Two partitions 413, the receiving space between the first partition 412 and the bottom 411 forms a water inlet area 42, the first container 41 is provided with at least one water inlet pipe 43 relative to the side wall of the water inlet area 42, and the The first partition 412 is provided with a plurality of overflow holes 414; furthermore, the accommodating space between the second partition 413 and the first partition 412 forms a flow stabilizing region 44, which is another major aspect of the present invention Characteristics, that is, in the gas-liquid mixing unit 40, the water inlet pipe 43 first sends the liquid (W) into the water inlet area 42, and then rises through the overflow hole 414 to enter the steady flow area 44, so-called steady flow The zone 44 refers to the liquid (W) in the zone compared with the bottom inlet zone 42, the water flow is relatively stable and has a certain water level height, which is favorable for subsequent gas-liquid mixing with the divided exhaust gas (A).

There are a plurality of air intake pipes 45. The air intake pipe 45 has an air inlet 451 above the air inlet 452 at the bottom. The air inlet 451 protrudes from the second baffle 413 and has a larger diameter than the air inlet 45 The small-section integrating flow tube 32 is provided for the small-section integrating flow tube 32 to extend into the air inlet 451 for introducing the exhaust gas (A) that has been diverted, and is connected to the outer periphery of the small-section integrating flow tube 32 and the Between the inner periphery of the air inlet 451, an atmospheric pressure contact area 321 is formed. This is also one of the main features of the present invention, that is, the intake pipe 45 is provided in conjunction with a plurality of small cross-sectional integrating tubes 32, which makes the gas-liquid mixing unit 40 of the present invention different from the traditional "single" large Cross-sectional area conveying pipe; the traditional single atmospheric exhaust gas cannot be applied to the gas-liquid mixing device. Therefore, after continuous experiments, the exhaust gas (A) with a small cross-sectional integral flow can be fully mixed with the liquid and filtered. Effect.

There are a plurality of water guide pipes 46. The water guide pipe 46 has a water guide port 461 above and a jet port 462 at the bottom. The water guide port 461 is larger than the air injection port 452 of the air intake pipe 32, so that the air injection port 452 can extend into the guide In the water port 461, a liquid suction area 463 is formed between the outer wall of the water guide port 461 and the inner wall of the air jet port 452, and the exhaust gas (A) of the small-section integrating tube 32 and the liquid flowing in the same direction (W) Mixed outflow, so that the shunted exhaust gas (A) accelerates the flow rate of the liquid (W) at a large pressure, and is sent to the water guide pipe 46. Under the action of the white effort principle, the liquid (W) drives the exhaust gas (A) ) Impact the liquid surface, forming a water flow containing a large number of pressurized bubbles.

A micro-bubble generating unit 50 includes: a second container 51 having a closed bottom 511 for receiving exhaust gas (A) and liquid (W) introduced by the plurality of water guide tubes 46, The liquid level (H) of the liquid is higher than the jet port 462 of the water guide pipe 46, so that the jet port 462 generates numerous micro-bubbles (B) in the second container 51.

The technical method disclosed in the present invention is made up of the white effort principle, the principle of compressibility of gas and Boyle's law. The effect achieved is clarified as follows:

The principle of white effort: let the exhaust gas (A) pass through the transmission path of the large-sectional area conveying pipe 31, and shunt to the path of several small-section integrating flow pipes 32 during the transmission process, so that the exhaust gas (A) is diverted through the small cross-sectional area , The shunted waste gas (A) is mixed with the flowing liquid (W) in the same direction to flow out, so that the shunted waste gas (A) is accelerated to the flow rate of the liquid (W) at a large pressure and sent to the water guide pipe 46. Under the principle of effort, the liquid (W) drives the exhaust gas (A) to hit the liquid surface, forming a large number of pressurized bubbles, so that the exhaust gas can be effectively filtered. In this embodiment, a slightly negative pressure state is generated outside the gas-liquid mixing unit 40. However, when the input exhaust gas pressure increases, the negative pressure on the surface of the gas-liquid mixing unit 40 gradually decreases and becomes a positive pressure, and the number of cross-sectional areas can be designed to increase relatively to overcome the exhaust gas flow limitation.

The principle of gas compressibility and Boyle's law: The volume of compressible gas is inversely proportional to the applied pressure, that is, P ₁ V ₁ =P ₂ V ₂ , when the pressure increases, the volume becomes smaller, the pressure If it decreases, the volume becomes larger. For example: 2P ₁ 1V ₁ =1P ₂ 2V ₂ . Since water is incompressible, but when mixing bubbles in the water flow, it becomes compressible water flow bubbles. Therefore, the water flow containing a large number of microbubbles (B) is compressible and only changes in volume during compression, but Will not break. In the present invention, an atmospheric pressure contact zone 321 is formed between a plurality of intake pipes 45 and the outer circumference of the small-section integrating flow pipe 32 and the inner circumference of the intake port 451, and in the steady flow zone 44, the The outer wall of the water guide port 461 forms a liquid suction area 463 relative to the inner wall of the air injection port 452, and the exhaust gas (A) of the small-section integrating flow tube 32 is mixed with the liquid (W) flowing in the same direction to flow out, so as to split The waste gas (A) accelerates the flow rate of the liquid (W) under a large pressure, and is sent to the water guide pipe 46. Under the action of the white effort principle, the liquid (W) drives the waste gas (A) to hit the liquid surface, forming a large amount of Pressurized water flow with micro bubbles. The bubbles introduced by this compression are compressed and the volume becomes smaller. When the pressure near the jet port 462 is gradually lowered, the pressure difference changes before and after the use and the instantaneous expansion becomes larger. Because the countless pressurized micro-bubbles (B) of the present invention are compressible Therefore, it will not break when compressed. It is the countless pressurized micro-bubbles (B) of the present invention. The volume expansion of the pressurized micro-bubbles in the decompression zone can increase the gas-liquid mixing effect to improve the filtering effect of exhaust gas.

The present invention has the following characteristics and functions that need to be clarified:

1. The present invention uses several overflow holes 414 to make the first container 41 communicate with each other in a layered manner. The liquid (W) is discharged into the lower water inlet area 42 first, and then shunts to the upper stable flow area 44 through the several overflow holes 414 , The liquid level is raised to a near constant height in a pressure-stabilizing manner, and the pressure is transmitted to each water pipe 46 with a uniform pressure. Since the cavity space of the steady flow region 44 is fixed, the reaction force of the liquid (W) in this small space Is squeezed into each water pipe 46, resulting in a rapid flow of white effort principle, allowing a large pressure of gas to create a negative pressure on the surface of the first container 41, the gas is due to the first container 41 on the surface of the intake pipe 45 Negative pressure is generated, so it is sucked into the intake pipe 45 and mixed with the liquid (W) and then discharged into the liquid in contact with the liquid, generating micro bubbles (B). After the micro bubbles burst, the gas is discharged to the outlet end, because the device will automatically A negative pressure is generated, so the pressure difference between the inlet and the outlet is relatively reduced.

2. The present invention uses the product of the multi-tube small-section integral flow tube 32 and the quantity, and the liquid flow rate, to calculate the amount of exhaust gas relative to the exhaust gas to be processed, thereby solving the problem of large-scale exhaust gas using liquid-gas mixing.

3. After the above steps, the particles contained in the exhaust gas, especially the submicron-sized particles and acid gases that are difficult to remove by conventional technology can be controlled, which can effectively remove harmful to the human body and the environment in the industrial process Submicron particles do not need to complicate existing processes, and can effectively remove gases that have adverse effects on the human body and the environment.

In summary, the structure disclosed in the present invention is unprecedented, and it can indeed achieve the improvement of efficiency, and it can be used by the industry. It fully meets the requirements of the invention patent. Pray that the Bureau will approve the patent to encourage innovation , No sense of virtue.

However, the diagrams and descriptions disclosed above are only preferred embodiments of the present invention. Those who are familiar with this art and who make modifications or equivalent changes in accordance with the spirit of this case should still be included in the scope of the patent application in this case.

30: Exhaust gas transmission unit 31: Large-area conveying pipe 311: front end 312: rear end 32: Small cross-section integrating tube 321: Atmospheric pressure contact zone 40: gas-liquid mixing unit 41: The first container 411: bottom 412: The first partition 413: Second partition 414: overflow hole 42: Inlet area 43: Inlet pipe 44: steady flow area 45: Intake pipe 451: Air intake 452: Jet port 46: Water pipe 461: Water inlet 462: spout 463: Liquid suction area 50: Micro bubble generation unit 51: Second container 511 bottom (B): Exhaust gas (B): Micro bubbles (H): Liquid level (W): Liquid

FIG. 1A is a schematic structural view of a conventional packed scrubber. FIG. 1B is a schematic structural view of a conventional Venturi scrubber. 2 is a perspective view of the appearance of a preferred embodiment of the present invention. 3 is a cross-sectional view of a preferred embodiment of the present invention. FIG. 4 is a reference diagram of a use state of a preferred embodiment of the present invention. 5 is an enlarged cross-sectional view of the main structure of the present invention.

32: Small cross-section integrating tube

321: Atmospheric pressure contact zone

40: gas-liquid mixing unit

41: The first container

411: bottom

412: The first partition

413: Second partition

414: overflow hole

42: Inlet area

44: steady flow area

45: Intake pipe

451: Air intake

452: Jet port

46: Water pipe

461: Water inlet

462: spout

463: Liquid suction area

50: Micro bubble generation unit

(A): Exhaust gas

(B): Micro bubbles

(H): Liquid level

(W): Liquid

Claims (1)

A multi-tube micro-bubble waste gas treatment device, including: An exhaust gas transmission unit, including: A large-area conveying pipe with a front end and a rear end, the front end is used to receive the exhaust gas discharged by an external device; Many small cross-section integrating flow tubes are connected to the rear end of the large-sectional area conveying pipe, so that the exhaust gas transmitted through the small cross-sectional integrating flow tube is diverted; A gas-liquid mixing unit, including: A first container, the first container has a closed bottom, and the inside of the first container is above the bottom, a first partition and a second partition are respectively provided between the first partition and the bottom The receiving space forms a water inlet area, the first container is provided with at least one water inlet pipe relative to the side wall of the water inlet area, and the first partition is provided with a plurality of overflow holes; furthermore, the second partition Forming a steady flow area with the accommodating space between the first partition; Most air intake pipes have an air inlet above the air inlet and an air injection outlet at the bottom. The air inlet protrudes from the second baffle and has a pipe diameter larger than that of the small-section integrating flow tube. The small-section integrating flow tube can be extended into the air inlet to introduce the exhaust gas that has been diverted, and an atmospheric pressure is formed between the outer circumference of the small-section integrating flow tube and the inner circumference of the air inlet Contact area Most water guide pipes have a water guide port above the water guide tube and a jet port at the bottom. The water guide port is larger than the air injection port of the air intake pipe, so that the air injection port can extend into the water guide port, according to which The outer wall forms a liquid suction area with respect to the inner wall of the jet port, and the exhaust gas of the small-section integrating flow tube is mixed with the liquid flowing in the same direction to flow out, so that the shunted exhaust gas accelerates the liquid flow rate at a large pressure , Transported into the water pipe, under the action of the principle of white effort, the liquid drives the exhaust gas to hit the liquid surface, forming a water flow containing a large number of pressurized bubbles; and A micro-bubble generating unit, including: A second container, the second container having a closed bottom for receiving the exhaust gas and liquid introduced by the plurality of water guide pipes, and making the liquid level of the liquid higher than the jet outlet of the water guide pipe, so that The jet port generates numerous micro-bubbles in the second container.

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