CN112206612A

CN112206612A - Multi-tube type micro-bubble waste gas treatment device

Info

Publication number: CN112206612A
Application number: CN201910630883.7A
Authority: CN
Inventors: 刘翠萍
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-07-12
Filing date: 2019-07-12
Publication date: 2021-01-12

Abstract

The invention provides a multi-tube type microbubble waste gas treatment device, comprising: a multi-pipe waste gas conveying unit and a gas-liquid mixing unit; the liquid level rises in a nearly equal height mode in a container cavity in a pressure stabilizing mode and is transmitted to each water guide pipe in a pressure equalizing mode, because the cavity space of a pressure stabilizing area is fixed, liquid is extruded into each water guide pipe under the action of the small space reaction force to generate the principle effect of the principle of the rapid flow, gas with one atmosphere generates negative pressure on the surface of the container, the gas is sucked into the air inlet pipe and mixed with the liquid and then is. Furthermore, the product of the sectional area and the number of the shunt pipes and the liquid flow can be used for calculating the relative exhaust emission to be treated, thereby solving the problem that the large-scale exhaust is treated by a liquid-gas mixing mode.

Description

Multi-tube type micro-bubble waste gas treatment device

Technical Field

The present invention relates to a waste gas treatment device, and more particularly, to a multi-tube micro-bubble waste gas treatment device using partial pressure to overcome the problem that a large amount of waste gas cannot be applied to a gas-liquid mixing device.

Background

The exhaust gas generated in the semiconductor industry mainly comes from the process reactions, such as etching, deposition, doping of semiconductor devices, and dust and particles generated during the pickling of integrated circuit boards, the particle size of the exhaust gas is very small, and the particles are mostly gas and granular air pollutants below micron, which are not easy to be captured, the exhaust gas generated by the semiconductor and optoelectronic process machines can be pumped into the air pollution prevention equipment through a vacuum pump for combustion and washing of the exhaust gas, but the particles generated in the reaction process are mostly smaller than the sub-micron range below 1 μm, and the commonly used air pollution prevention equipment, such as a Venturi Scrubber (Venturi Scrubber), can not effectively control the sub-micron particles released in the exhaust gas for treating the larger particles (larger than 1 μm). Therefore, the ventilation system in the factory is blocked frequently, and the safety of the process and the safety of maintenance personnel are affected. Therefore, how to effectively treat the discharge of fine particles is a very important issue.

When the waste gas of the processing machine is extracted from the processing reaction chamber, the waste gas passes through the waste gas treatment equipment and is further treated and then discharged into the atmosphere. Current exhaust-gas treatment equipment generally adopts anterior segment high temperature heating, makes semiconductor processing procedure waste gas oxidation, and the back end is sprayed with the clear water through watering device again and is washed, washes high temperature waste gas with high temperature waste gas cooling while, makes the particle in the waste gas or acid-base dissolve in the aquatic, discharges waste water via the drain pipe again to pass through the blast pipe through updraft ventilator with the waste gas of handling and discharge to the external world.

Referring to fig. 1A, an internal structure diagram of a conventional packed Absorption Tower (Counter-flow Packing Tower)1 is disclosed. The packed tower 1 has a water tank 12 at the bottom, water in the water tank 12 can be pumped to the upper part of the packed tower 10 by a water pump 14 and sprayed downward through a plurality of water spray holes 16, and then the downward sprayed water flows downward into the water tank 12 after passing through a plurality of rastering (Packing)18 disposed at the middle of the packed tower 1. When the exhaust gas enters the packed tower 1 through the pipe 20, the exhaust gas passes upward through the raschig rings 18 disposed in the middle of the packed tower 1, and the water sprayed from the water spray holes 16 also passes downward through the raschig rings 18, because the raschig rings 18 function to increase the contact area between the water and the exhaust gas, some of the pollutants in the exhaust gas flow into the water tank 12 after being adsorbed by the water, thereby completing a cleaning cycle, and the rest of the exhaust gas is discharged through the exhaust hole 22 disposed at the top of the packed tower 1. This type of scrubber 1 is disclosed in taiwan patent No. 542747.

However, the conventional way of treating the exhaust gas by the packed scrubber 1 only adsorbs the pollutants in the exhaust gas by water droplets, and even the raschig ring 18 is not really effective to enlarge the contact area between the exhaust gas and water, so that the pollutants in the exhaust gas are effectively adsorbed by water, and therefore, the content of the pollutants in the exhaust gas after being treated by the packed scrubber 1 is still relatively high, and the exhaust gas still causes considerable damage to the surrounding environment.

Further, there is a Venturi Scrubber (Venturi Scrubber)2 as shown in fig. 1B, and most commonly, a Collision Venturi Scrubber, which is generally a rear-mounted induced wind turbine 20 (induced Fan) to accelerate, suck and draw in the exhaust gas 21, vertically collide and collide with the fine liquid 23 atomized by the Venturi throat 22, and to wrap the dust and fine particles into the water droplets to form liquid droplets 24 having a particle size several thousand times larger than the original size, and as a result of double increase of volume and mass inertia of the liquid droplets 24, the liquid droplets 24 cannot pass through the demister 25 (i.e., gas/liquid separator) of the Scrubber, and are intercepted, dropped, and collected in the water tank, and the clean air is discharged outside the system by separating from the liquid droplets, but the Venturi Scrubber has an acid gas removal efficiency of only about 50% to 70% and cannot reach 99% acid gas removal requirements, and further, in order to achieve Venturi-accelerated atomization mixing requirements of the pipes of the Scrubber, the required pressure difference is much higher than other equipment (at least 760-2030 mmAq), and the power consumption of the induced windmill 20 is in direct proportion to the pressure difference, so the disadvantages of expensive initial investment and operation maintenance cost, high operation technical requirement, large occupied area and the like are all the defects. This type of scrubber 2 is disclosed in taiwan patent No. 352007.

Therefore, the semiconductor industry does not have an economical and practical device for treating waste gas at present. In view of the above, the present inventors have actively studied and improved a technology with better efficiency and lower cost, so as to meet the requirements of environmental regulations, and all the above problems can be overcome by the present invention.

Disclosure of Invention

Accordingly, the present invention is directed to provide a multi-tube microbubble gas treatment device for effectively intercepting and filtering particles in waste gas and recovering the particles, thereby effectively removing sub-micron particles harmful to human body and environment in industrial processes, and effectively removing gases having harmful effects on human body and environment without complicating the existing processes.

To achieve the above object, the technical means adopted by the present invention comprises:

the utility model provides a multitube microbubble exhaust treatment device which characterized in that contains a waste gas conveying unit, a gas-liquid mixing unit and a microbubble and produces the unit, wherein:

the exhaust gas transfer unit includes:

a large-section conveying pipe having a front end portion for receiving exhaust gas discharged from an external device and a rear end portion;

a plurality of small sectional area shunt pipes connected with the rear end part of the large sectional area delivery pipe, so that the delivered waste gas is shunted through the small sectional area shunt pipes;

the gas-liquid mixing unit includes:

the first container is provided with a closed bottom, a first partition plate and a second partition plate are respectively arranged above the bottom in the first container, a water inlet area is formed in an accommodating space between the first partition plate and the bottom, at least one water inlet pipe is arranged on the side wall of the first container relative to the water inlet area, and a plurality of overflow holes are formed in the first partition plate; furthermore, the accommodating space between the second partition plate and the first partition plate forms a stable flow area;

a plurality of air inlet pipes, wherein an air inlet is arranged above the air inlet pipes, an air nozzle is arranged at the bottom of the air inlet pipes, the air inlet pipes protrude and extend on the second partition plate, the pipe diameter of the air inlet pipes is larger than that of the small-section-area flow dividing pipe, the small-section-area flow dividing pipe can extend into the air inlet to guide the divided waste gas into the air inlet, and an atmospheric pressure contact area is formed between the outer periphery of the small-section-area flow dividing pipe and the inner periphery of the air inlet;

a plurality of water guide pipes, wherein a water guide opening is arranged above each water guide pipe, a jet opening is arranged at the bottom of each water guide pipe, the water guide opening is larger than the jet opening of the air inlet pipe, so that the jet opening can extend into the water guide opening, a liquid suction area is formed between the outer wall of the water guide opening and the inner wall of the jet opening, the waste gas of the flow dividing pipe with small cross section area is mixed with the liquid flowing in the same direction and flows out, the flow speed of the divided waste gas is accelerated under the atmospheric pressure and is conveyed into the water guide pipes, and the liquid drives the waste gas to impact the liquid level under the action of the principle of white effort, so that water flow containing a large amount of pressurized bubbles is formed; and

the microbubble generation unit includes:

a second container having a closed bottom for containing the waste gas and liquid introduced by the water conduits and making the liquid level of the liquid higher than the spout of the water conduit, so that the spout generates a plurality of micro-bubbles in the second container.

One of the main principles and features of the present invention is: the multi-cavity (the first container) is communicated in a layered way by utilizing a plurality of holes or channels (overflow holes), the liquid is discharged into the water inlet area of the cavity below, the liquid level is divided to a steady flow area of the upper cavity body through a plurality of holes or channels (overflow holes) to rise in a mode of approaching equal height in a pressure stabilizing mode, the liquid is transmitted to each water guide pipe in a pressure-equalizing way, and the cavity space of the flow stabilizing area is fixed, so that the liquid is extruded into each water guide pipe under the reaction force of the small space to generate a fast flow to cause the action of the principle of the white effort, and the gas with one atmosphere generates negative pressure on the surface of the cavity, the gas is sucked into the air inlet pipe and mixed with the liquid and then is contacted with the liquid and discharged into the liquid due to the negative pressure of the cavity (the first container) on the surface of the air inlet pipe, the micro-bubble is generated, gas is discharged to the outlet end after the micro-bubble is exploded, and negative pressure can be automatically generated by the device, so that the pressure difference generated by the inlet and the outlet is relatively reduced.

The second principle and characteristic of the invention is: the product of the number of the multi-pipe type small-section-area shunt pipes and the liquid flow rate can be used for calculating the relative exhaust emission to be treated, so that the problem that large-scale exhaust is treated by a liquid-gas mixing mode is solved.

By means of the technical measures, the waste gas of the small-section flow dividing pipe and the liquid flowing in the same direction are mixed and flow out, so that the flow speed of the divided waste gas is increased under the atmospheric pressure, the divided waste gas is conveyed into the water guide pipe, and the liquid drives the waste gas to impact the liquid level under the action of the principle of white effort, and water flow containing a large amount of micro bubbles is formed. Therefore, the problem that a large amount of waste gas cannot be applied to the gas-liquid mixing device is solved by utilizing a partial pressure mode, and the effect of increasing gas-liquid mixing is achieved to improve the filtering effect of the waste gas.

Drawings

FIG. 1A is a schematic view of a conventional packed scrubber.

FIG. 1B is a schematic diagram of a prior art venturi scrubber.

Fig. 2 is an external perspective view of the preferred embodiment of the present invention.

Fig. 3 is a cross-sectional view of the preferred embodiment of the present invention.

FIG. 4 is a reference diagram of the usage status of the preferred embodiment of the present invention.

Fig. 5 is an enlarged sectional view of the main structure of the present invention.

Description of reference numerals: 30 an exhaust gas transfer unit; 31 large cross-sectional area delivery pipe; 311 a front end portion; 312 rear end portion; a 32 small cross-sectional area shunt tube; 321 an atmospheric pressure contact zone; 40 gas-liquid mixing unit; 41 a first container; 411 bottom; 412 a first separator plate; 413 a second partition plate; 414 overflow aperture; 42 a water inlet area; 43 a water inlet pipe; 44 a steady flow area; 45, air inlet pipes; 451 air inlets; 452 an air jet; 46 a water conduit; 461 water guide port; 462 jet orifice; 463 a liquid intake zone; 50 microbubble generation units; 51 a second container; 511 bottom; an exhaust gas; a-waste gas; b-microbubbles; h-liquid level; w-liquid.

Detailed Description

The present invention may be practiced in other embodiments that depart from these specific details, and that other known steps or elements may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow. It is noted that the drawings are for illustrative purposes only and do not represent actual sizes or quantities of elements, and some details may not be drawn completely to simplify the drawings.

Referring to fig. 2 to 5, a multi-tube microbubble exhaust gas treatment device according to a preferred embodiment of the present invention includes: an exhaust gas transfer unit 30 comprising: a large-section delivery pipe 31 having a front end 311 and a rear end 312, the front end 312 being used for receiving exhaust gas A from an external device (not shown); a plurality of small-sectional-area branch pipes 32 connected to the rear end 312 of the large-sectional-area duct 31, for branching the exhaust gas a to be delivered through the small-sectional-area branch pipes 32. This is one of the main features of the present invention, that is, the delivery tube 31 with large cross-section is divided into a plurality of tube-type shunts 32 with small cross-section, and the function of which will be described in detail later.

A gas-liquid mixing unit 40, comprising: a first container 41, the first container 41 having a closed bottom 411, and the first container 41 being provided with a first partition 412 and a second partition 413 above the bottom 411, respectively, the accommodating space between the first partition 412 and the bottom 411 forming a water inlet area 42, the first container 41 being provided with at least one water inlet pipe 43 on the side wall opposite to the water inlet area 42, and the first partition 412 being provided with a plurality of overflow holes 414; furthermore, the accommodating space between the second partition 413 and the first partition 412 forms a steady flow region 44, which is another main feature of the present invention, that is, in the gas-liquid mixing unit 40, the water inlet pipe 43 firstly feeds the liquid W into the water inlet region 42, and then rises through the overflow hole 414 into the steady flow region 44, so that the steady flow region 44 means that the liquid W in the region has a relatively steady water flow and a certain water level height compared with the water inlet region 42 at the bottom layer, which is beneficial for the subsequent gas-liquid mixing with the branched waste gas a.

A plurality of air inlet pipes 45, wherein an air inlet 451 is formed above the air inlet pipe 45, an air outlet 452 is formed at the bottom of the air inlet pipe 45, the air inlet 451 is protruded on the second partition 413, and the pipe diameter of the air inlet pipe is larger than that of the small-section shunt pipe 32, so that the small-section shunt pipe 32 can extend into the air inlet 451 to introduce the shunted exhaust gas a, and an atmospheric pressure contact area 321 is formed between the outer periphery of the small-section shunt pipe 32 and the inner periphery of the air inlet 451. This is also one of the main features of the present invention, that is, the gas inlet pipe 45 is configured by matching with a plurality of small sectional area shunt pipes 32, so that the gas-liquid mixing unit 40 of the present invention is different from the conventional single large sectional area delivery pipe; the traditional single large-air-volume waste gas cannot be applied to a gas-liquid mixing device, so that the waste gas A with small-section integral flow can be fully mixed with liquid after continuous experiments, and the filtering effect is achieved.

A plurality of water conduits 46, a water guiding opening 461 is provided above the water conduits 46, a jet opening 462 is provided at the bottom, the water guiding opening 461 is larger than the jet opening 452 of the air inlet pipe 32, so that the jet opening 452 can extend into the water guiding opening 461, a liquid suction area 463 is formed between the outer wall of the water guiding opening 461 and the inner wall of the jet opening 452, the waste gas a of the small cross-section flow dividing pipe 32 is mixed with the liquid W flowing in the same direction to flow out, the flow rate of the liquid W is accelerated under an atmospheric pressure, the liquid W is conveyed into the water conduits 46, and the liquid W drives the waste gas a to impact the liquid surface under the action of the principle of white effort, so as to form a water flow containing a large amount of pressurized bubbles.

A microbubble generation unit 50 comprising: a second container 51, the second container 51 having a closed bottom 511 for containing the exhaust gas A and the liquid W introduced from the plurality of water conduits 46, and making the liquid level (H) of the liquid higher than the spouting port 462 of the water conduit 46, so that the spouting port 462 generates a plurality of micro bubbles B in the second container 51.

The technical means disclosed in the present invention is formed by skillfully utilizing the principle of white effort, the principle of compressibility of gas and Boyle's law, and the achieved efficacy is further clarified as follows:

the principle of white effort is as follows: the exhaust gas a is divided to the paths of the plurality of small cross-sectional area dividing pipes 32 in the process of transmission through the transmission path of the large cross-sectional area transmission pipe 31, the transmitted exhaust gas a is divided through the small cross-sectional area, the divided exhaust gas a is mixed with the flowing liquid W in the same direction and flows out, the flow speed of the liquid W is accelerated under the atmospheric pressure of the divided exhaust gas a, the divided exhaust gas a is transmitted into the water guide pipe 46, and under the action of the principle of white effort, the liquid W drives the exhaust gas a to impact the liquid level to form a large amount of pressurized bubbles, so that the exhaust gas can be effectively filtered. In this embodiment, a slight negative pressure state is generated outside the gas-liquid mixing unit 40. However, when the pressure of the input exhaust gas is increased, the negative pressure on the surface of the gas-liquid mixing unit 40 is gradually reduced to become positive pressure, and the number of the sectional areas thereof can be designed to be relatively increased to overcome the flow restriction of the exhaust gas.

The principle of compressibility of gases and Boyle's law: the volume of the compressible gas is inversely proportional to the applied pressure, i.e. P₁V₁＝P₂V₂When the pressure is increased, the volume is reduced, and when the pressure is reduced, the volume is increased. For example: 2P₁·1V₁＝1P₂·2V₂. Since water is not compressible, but becomes compressible when bubbles are mixed in the water stream, the water stream containing a large amount of microbubbles B of the present invention has compressibility and is compressed only by a change in volume without being broken. The present invention utilizes a plurality of air inlet pipes 45, and an atmospheric pressure contact area 321 is formed between the outer periphery of the small cross-section flow dividing pipe 32 and the inner periphery of the air inlet 451, and a liquid suction area 463 is formed between the outer wall of the water guide opening 461 and the inner wall of the air jet opening 452, and the waste gas A of the small cross-section flow dividing pipe 32 is mixed with the liquid W flowing in the same direction and flows out, so that the flow rate of the liquid W is accelerated by the divided waste gas A under an atmospheric pressure, and the liquid W is conveyed into the water guide pipe 46, and under the action of the principle of white effort, the liquid W drives the waste gas A to collide with the liquid surface, and a water flow containing a large amount of pressurized micro. The introduced bubbles are compressed to reduce their volume, and when the pressure near the jet port 462 is gradually reduced, the bubbles are instantaneously expanded to increase their volume by using the change of the pressure difference between front and back.

The invention has the following characteristics and effects that need to be clarified again:

firstly, the present invention utilizes a plurality of overflow holes 414 to make the first container 41 communicate in layers, the liquid W is discharged into the lower water inlet region 42, the liquid level is divided to the upper steady flow area 44 through a plurality of overflow holes 414, the liquid level rises in a nearly equal height mode in a steady pressure mode, the liquid W is squeezed into each water guiding pipe 46 under the reaction force of the small space because the cavity space of the steady flow area 44 is fixed, and the liquid W flows fast to generate the principle of white effort, so that the gas with one atmosphere generates negative pressure on the surface of the first container 41, the gas is sucked into the gas inlet pipe 45 and mixed with the liquid W due to the negative pressure of the first container 41 on the surface of the gas inlet pipe 45, and then is discharged into the liquid by contacting with the liquid, the micro-bubble B is generated, gas is discharged to the outlet end after the micro-bubble blasting, and negative pressure can be automatically generated by the device, so that the pressure difference generated by the inlet and the outlet is relatively reduced.

The product of the number of the multi-pipe type small-section-area shunt pipes 32 and the liquid flow rate is utilized to calculate the relative exhaust emission to be treated, so that the problem that large-scale exhaust is treated by a liquid-gas mixing mode is solved.

Through the steps, the particles contained in the waste gas, especially the submicron particles and the acid gas which are difficult to remove in the prior art can be controlled, so that the submicron particles which are harmful to human bodies and the environment in the industrial process can be effectively removed, the existing process does not need to be complicated, and the gas which has adverse effects on the human bodies and the environment can be effectively removed.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. The utility model provides a multitube microbubble exhaust treatment device which characterized in that contains a waste gas conveying unit, a gas-liquid mixing unit and a microbubble and produces the unit, wherein:

the exhaust gas transfer unit includes:

the gas-liquid mixing unit includes:

the microbubble generation unit includes: