TWI683700B - CVD or PVD reactor for coating large substrates - Google Patents

Abstract

The invention relates to a CVD or PVD coating device, which comprises a casing (1, 2) and a component (23) with an air inlet mechanism (7) fixed on the casing (1, 2). The gas mechanism includes an exhaust surface (7') with an exhaust port (8) extending in an exhaust plane, and the assembly is fixed on the upper section of the housing (1) through fixing members (13, 14) At a plurality of suspension positions (6'), a temperature regulating member (9) is provided, and the air intake mechanism (7) can pass through the temperature regulating members to substantially correspond to the temperature of the housing (1,2) The first temperature is adjusted to a second temperature different from the temperature of the housing, wherein the fixing members (13, 14) have a force transmission member (26.1, 26.2, 26.3, 26.4; 27, 28, 29), in the When the size of the component (23) caused by temperature adjustment changes, the force transmission members deform or move relative to each other. The assembly includes a holding device (3), the air intake mechanism (7) is fixed on the holding device by a plurality of hangers (6) dispersedly arranged on the entire horizontal extension surface, and the holding device (3) It is fixed to the housing (1) only with its edges through the force transmission members (26.1, 26.2, 26.3, 26.4; 27, 28, 29).

Description

CVD or PVD reactor for coating large substrates

The invention relates to a CVD or PVD coating device, which includes a housing and an air intake mechanism fixed on the housing, the air intake mechanism includes an exhaust surface with an exhaust port, and the coating device further includes A holding device fixed on the upper section of the housing, on which the air intake mechanism is fixed in a plurality of hanging positions.

EP 1 815 493 B1 describes a coating device of the same type. This case shows the housing of the coating device, in which a holding device for holding the air intake mechanism is arranged. US 2008/0317973 A1 describes a similar device.

The same type of coating device has a base for accommodating the substrate to be coated and an air intake mechanism that performs the function of a gas distributor. Process gas can be introduced through the air intake mechanism between the bottom surface of the gas distributor and the base Extended process room. The gas distributor has a plurality of exhaust ports on its bottom surface, and the process gas can enter the process chamber through these exhaust ports. Inside the gas distributor, a chamber for distributing process gas to the exhaust port is provided. DE 10 2013 101 534 A1 describes, for example, a gas distributor of this type.

To accumulate OLED, the gaseous organic starting material is fed into the heated gas distributor by carrier gas. These gaseous starting materials enter the process chamber through the exhaust port to condense on the substrate placed on the cooled pedestal for this purpose. These substrates may have a surface greater than 1 m ² . A CVD or PVD reactor with a pedestal diagonal of 2m to 3m is required. Since this air intake mechanism must extend over the entire surface of the base, it is necessary to provide an air intake mechanism with a diagonal of 2m to 3m. The process chamber has a process chamber height of several centimeters. In order to be able to deposit layers with constant layer thickness and layer quality over the entire surface of the substrate, within tight tolerances, the height of the process chamber must remain constant throughout the range of the process chamber. This deposition process occurs in the low pressure range, that is, in the range where the atmospheric pressure exerts a great deformation force on the shell wall. When the pressure is reduced, the casing inevitably deforms. In addition, the air intake mechanism is heated, so in addition to mechanical forces, thermal expansion needs to be considered.

The purpose of the present invention is to improve the coating device of the same type, so that the height of the process chamber changes only within a close tolerance within the entire surface of the base or the exhaust surface of the intake mechanism.

The solution of the present invention for achieving the above-mentioned object is the invention given by the request item, wherein each request item is in principle an original solution for achieving the above-mentioned object.

A component is fixed on the upper section of the housing. The assembly includes an intake mechanism that includes an exhaust surface with an exhaust port. The exhaust surface extends on a particularly horizontal exhaust plane. The assembly is fixed on the housing through a plurality of hanging positions. A temperature adjusting member is provided, and the air intake mechanism can adjust the temperature from the first temperature substantially corresponding to the temperature of the housing to a second temperature different from the temperature of the housing through the temperature adjusting members. This can be achieved by heating the air intake mechanism. To this end, the air intake mechanism is equipped with a heating device. In an unheated state, the air intake mechanism has the temperature of the housing. In the heated state, the air intake mechanism has a higher temperature than the housing. The air intake mechanism can also be cooled to a temperature lower than the temperature of the housing through the cooling device. The temperature regulating members may be channels for the temperature regulating liquid (that is, hot or cold liquid) to flow through in the air intake mechanism. Due to the adjustment of the components of the component The temperature and the temperature change caused by it change the size of the component. At least the size of the air intake mechanism changes due to the thermal expansion. The fixing members are constructed in a manner such that the fixing members deform when the assembly undergoes such a dimensional change or have elements that move relative to each other when the dimensional change occurs. To this end, the fixtures have a force transmission member that transmits the gravity of the assembly to the housing. In particular, the force transmission members are elastically deformable or have elements that can move relative to one another without wear. The fixing members are preferably fixed only on the outer horizontal edge of the assembly, in particular, only on the holding device. The force transmission member preferably moves/deforms only in the horizontal direction, not in the vertical direction. The fixing is preferably achieved at the corner of a polygon. The polygon refers to a virtual polygon, which defines a number of corner points, which are arranged on the edge of the holding device in a horizontal plane. The fixation is achieved at the corner of the virtual polygon. The polygon can be triangular or quadrilateral. For example, two fixed points can be assigned to the corner points of the holding device, for example the two corner points of a narrow side. The third triangle point may be arranged at the center of the narrow side relative to the narrow side. These fixed points can also be spatially allocated to wide corners or wide sides. The force transmission member may be a bending element. The bending element is connected to the fixing element on the housing side and the fixing element on the component side. The bending element may be a rectangular thin plate. The curved plate arranged in the corner area is oriented in a manner relative to the assembly or the holding device such that the assembly or the holding device can be expanded in both the broad-side extension direction and the narrow-side extension direction. Preferably, the flexurally elastic plate is in a vertical plane and has a surface normal that extends on the angle bisector of the angle between the narrow and wide side walls of the holding device or component. The surface normal is preferably oriented toward the geometric center of gravity, especially the center of gravity of the component in the horizontal plane, so that the direction of thermal expansion of the component at the fixed position coincides with the main bending direction of the force transmitting member. Therefore, in the case of holding devices or components with a square profile, the curved plates are preferably Or the narrow side extends at an angle of 45°. Therefore, the two curved plates respectively arranged at adjacent corners each extend in a plane, wherein the two vertical planes intersect at an angle of 90°. The third fixing plate is arranged approximately at the center of the side wall opposite to the two fixing positions. The curved plate extending there also in a vertical plane extends parallel to the side wall of the holding device or the assembly. As far as the non-square contour is concerned, the main bending direction of the force transmission member, in particular the surface normal of the planar bending element, points to the center of gravity of the assembly, especially the center of gravity of the air intake mechanism or its holding device. Additionally, a floating support structure may be provided transverse to the direction of bending movement. For this purpose, bolts are preferably provided, which extend into an opening through the horizontal movement gap. In particular, there is a fixing pin, in particular the curved plate, through which the force transmission member is fixed on the fixing piece, wherein the fixing pin has a supporting side, which is supported on a slide located on the supporting surface On the element, the fixing pin can move relative to the bearing surface transversely to the main deformation direction of the bending element. In addition, a safety device may be provided, which prevents the assembly (particularly the air intake mechanism) from falling when the force transmission member breaks, especially when the bending element breaks. For this purpose, the safety pin can pass through the safety opening with a vertical and/or horizontal movement distance. During thermal expansion, the safety pin can move freely through the safety opening. The fixing member arranged in the corner area of the holding device or the assembly can be composed of a rod or a rope extending in the vertical direction, and can also fix the fixing member on the holding device or the assembly between the two corner points On the side wall. The solid or hollow rod has an upper end that is preferably fixed on the housing and an upper and lower end that is preferably fixed on the holding device or the assembly. Bending elements in the form of solid or hollow rods can also be arranged on the side walls of the assembly. The curved elements can also have other shapes. It is advantageous when the bending elements allow the assembly or the holding device to move horizontally with minimal friction. This fixation can be achieved through corner elements. The fixing member arranged in the corner area can also be fixed on the shell by the cross beam. In a solution of the invention In these, the fixing elements have elements that are deployed relative to each other. The first element can be firmly fixed on the housing. The second element can be firmly fixed on the assembly or the holding device, and the third element can connect the first and second elements. Two or more elements may also be provided, which connect the fixing element firmly fixed to the housing with the fixing element firmly fixed to the assembly. Here, it is preferably referred to as a chain link. For the arrangement of the unfolded fixing elements, please refer to the implementation of the bending elements. This embodiment relates in particular to the direction of movement of the deployed fixing elements.

The assembly preferably has a holding device fixed on the upper section of the housing. It is a holding device that is stable in temperature and mechanically stable. The air intake mechanism is fixed on the stable holding device through a plurality of hanging positions. The suspension positions are substantially evenly distributed on the entire extension surface of the air intake mechanism. The distance between the suspension positions is reduced by at least 3 times, preferably by 4 times or 5 times, the diagonal extension of the air intake mechanism. The maximum distance between two adjacent hanging positions can also be a maximum of one-tenth of the diagonal extension of the air intake mechanism. To achieve mechanical stability, the holding device may have mechanical stabilization elements. Such mechanical stabilization elements can be formed by vertical walls. The holding device preferably forms a truss composed of intersecting vertical walls. The distance between the two vertical walls, which also extend parallel to each other as appropriate, is reduced by at least 3 times, 4 times, and preferably 5 times the diagonal distance of the intake mechanism. The cylindrical gas chamber extending in the vertical direction has a base surface, which preferably corresponds to at most one percent of the base surface of the air intake mechanism and may have a checkerboard or honeycomb contour. The holding device is preferably fixed to the housing only through horizontal edges. The horizontal edge of the holding device is fixed on the housing. The entire central surface section of the holding device freely tightens the air intake mechanism, and is stably connected to the air intake mechanism at a plurality of positions substantially evenly distributed on the surface. The holding device is stable in temperature. For this purpose, active or passive temperature stabilization devices can be provided. The holding device achieves temperature stabilization in a certain way When the temperature difference changes, the temperature of the holding device does not change significantly in both the horizontal and vertical directions. Preferably, the temperature changes within the entire body composed of the holding device, that is, within the range of +/- 5 degrees within the truss. Preferably, the temperature difference between the coldest spot and the hottest spot is at most 5 degrees. In order to passively stabilize the temperature, the heat shield can be provided with a reflective surface or an insulator, for example. To actively stabilize the temperature, a temperature-regulating medium flowing through the temperature-regulating channel, such as a temperature-regulating liquid, can be used. The temperature adjustment channels may be arranged inside the holding device. The temperature adjustment channels are preferably arranged above or below the holding device. If the temperature of the air intake mechanism is maintained at a higher temperature during the coating process, it is necessary to cool the holding device during temperature adjustment, it is preferable to use an active temperature adjustment element, which is arranged between the air intake mechanism and the holding device In the area. In addition, the honeycomb or box-like structure of the holding device which has the shape of a truss also achieves mechanical stability. The fixing members refer to the aforementioned elastic fixing members, and the edge area of the holding device is fixed to the housing through the elastic fixing members. In a preferred design, there is a vertical gap between the air intake mechanism and the holding device. A plurality of hangers are used to fix the air intake mechanism on the holding device. The hangers may be elongated metal or ceramic tension elements, the tension elements of which are fixed on the holding device with their upper ends and fixed on the fixed position of the air intake mechanism with their lower ends. These hangers can be adjusted in height. In this way, at any suspension position, the distance between the exhaust surface and the top surface of the base, that is, the height of the process chamber, can be adjusted. The hangers are preferably made of materials with a low coefficient of thermal expansion. The wall part of the air intake mechanism is provided with a temperature adjustment channel. In particular, the wall portion of the air intake mechanism forming the exhaust surface and the wall portion far away therefrom are provided with passages through which a temperature control agent (for example, a hot liquid) flows. Not only the shape of the holding device helps to achieve its temperature stability. The holding device is constructed as a lightweight component. Such measures for actively reducing the heat transfer from the air intake mechanism to the holding device may include arranging a or in the gap between the air intake mechanism and the holding device Multiple heat shields. The heat insulating plates are planar objects, which are arranged in the gap in a manner extending parallel to the area of the air intake mechanism. The surface of the planar objects may have high reflectivity. As an alternative, an insulator can also be arranged in the gap. Actively cool at least one insulation board. The actively cooled heat shield is preferably immediately adjacent to the holding device. The actively cooled heat insulation plate may be a plate member whose area extends approximately equal to that of the holding device or that of the air intake mechanism. The coolant passage through which the coolant flows extends inside the plate. Therefore, the holding device can be kept at a constant temperature. If the air intake mechanism is heated, the holding device basically maintains its temperature. The process chamber height can be changed by less than 1 mm during the operation of the device. The surface temperature of the casing is about 30°C. The temperature of the holding device can be stabilized at a value of 50°C. To this end, the active heat shield is cooled to a temperature of about 50°C. When the temperature is, for example, 450°C, the air intake mechanism constructed as a shower head works, and the substrate is cooled to a temperature of 20°C. The heat flux from the air intake mechanism to the actively cooled heat insulation plate is reduced by one or more passive heat insulation plates between the active heat insulation plate and the air intake mechanism. The surface temperature of the heat insulation board adjacent to the air intake mechanism may be 350°C, for example. The heat shield may be composed of metal or ceramic material. Between the passive heat insulation plate and the active heat insulation plate, another passive heat insulation plate may be arranged, which is also composed of a metal plate or a ceramic plate. The temperature of the insulation board is about 270°C during operation. More than two passive heat insulation plates may also be provided between the air intake mechanism and the actively cooled heat insulation plates. The surface of the heat insulation boards may have a small optical emissivity. These surfaces may be polished reflective surfaces. These hangers can be used in order to maintain these insulation boards. It is also possible that only the hangers protrude through the openings of the heat insulation boards, so that the deformation of the heat insulation boards does not affect the position of the air intake mechanism in the chamber. According to the invention, the holding device is not easily deformed. Here it refers to the deformation caused by temperature changes and/or pressure changes. The heat insulation boards can be hung on an independent suspension device, which is fixed on the top of the housing or the holding device on. In addition, the invention also relates to a method of operating such a device.

1‧‧‧Housing upper part

2‧‧‧Lower case parts

3‧‧‧ Holding device

3'‧‧‧Edge of the component

4‧‧‧Vertical wall

5‧‧‧Vertical wall

6‧‧‧ Hanger, fixing element

6'‧‧‧Fixed element

6"‧‧‧Head

7‧‧‧ Intake mechanism

7'‧‧‧ exhaust surface

8‧‧‧Exhaust

9‧‧‧Temperature adjustment channel, temperature adjustment member

10‧‧‧Passive heat insulation board

11‧‧‧Active heat insulation board

12‧‧‧coolant channel

13‧‧‧Fixed parts

13.1‧‧‧Fixed parts

13.2‧‧‧Fixed parts

13.3‧‧‧Fittings

13.4‧‧‧Fixed parts

14‧‧‧Fixed parts

15‧‧‧Dock

16‧‧‧coolant channel

17‧‧‧ tendon

18‧‧‧ tendon

19‧‧‧ opening

20‧‧‧Upper horizontal wall

21‧‧‧Lower horizontal wall

22‧‧‧ opening

23‧‧‧ Components

24.1‧‧‧Fixed element on the shell side

242‧‧‧Fixed element on the shell side

24.3‧‧‧Fixed element on the shell side

24.4‧‧‧Fixed element on the shell side

25.1‧‧‧ Fixing element on the module side

25.2‧‧‧Fixed element on the module side

25.3‧‧‧Fixed element on the module side

25.4‧‧‧Fixed element on the module side

26.1‧‧‧Intermediate element, bending element

26.2‧‧‧Intermediate element, bending element

26.3‧‧‧Intermediate components

26.4‧‧‧Intermediate element, bending element

27‧‧‧Link, shell side

28‧‧‧ link, middle

29‧‧‧Link, component side

30‧‧‧beam

31‧‧‧bolt

32‧‧‧Fixed pin

33‧‧‧ safety pin

34‧‧‧Safe opening

35‧‧‧Fixed opening

36‧‧‧Keep opening

38‧‧‧support side

39‧‧‧Sliding element

40‧‧‧Support surface

41‧‧‧Adjustment

42‧‧‧Adjustment screw

M‧‧‧center, center of gravity

h‧‧‧direction of thermal expansion

The present invention will be further described below with reference to examples.

1 is a schematic cross-sectional view of the PVD coating device taken along line II in FIG. 2; FIG. 2 is a top view of the coating device; FIG. 3 is a cross-sectional view according to line III-III in FIG. 1; 4 is a cross-sectional view of the upper shell part of the PVD reactor of the second embodiment, as shown in FIG. 1; FIG. 5 is a perspective view of the cut upper shell part as shown in FIG. 4; FIG. 6 is the third of the invention 3 is a schematic view of the embodiment; FIG. 7 is a cross-sectional view according to the line VII-VII in FIG. 6; FIG. 8 is a cross-sectional view according to the line VIII-VIII in FIG. 6; FIG. 9 is a fourth embodiment FIG. 10 is a perspective view of another fixing member as the fifth embodiment; FIG. 11 is a perspective view of another fixing member as the sixth embodiment; FIG. 12 is the detail of FIG. 11 in the drawings Fig. XII; Figs. 13a to d are variations of the arrangement of the fixing member 13 on the assembly 23; Fig. 14 is a schematic diagram similar to Fig. 6 of another embodiment; Fig. 15 is a top view of the fixing member 13.2 in Fig. 14; 16 is a cross-sectional view according to the line XVI-XVI in FIG. 15; FIG. 17 is a cross-sectional view according to the line XVII-XVII in FIG. 16; FIG. 18 is a cross-sectional view according to the line XVIII-XVIII in FIG. 16; Fig. 19 is a cross-sectional view according to the line IXX-IXX in Fig. 16; Fig. 19a is an enlarged view of a part of IXXa in Fig. 19; Fig. 20 is a fixing member 13.1 in Fig. 14; Fig. 21 is according to XXI- in Fig. 20 The cross-sectional view of XXI line; FIG. 22 is the cross-sectional view according to XXII-XXII line in FIG. 21; FIG. 23 is the cross-sectional view according to XXIII-XXIII line in FIG. 21; FIG. 24 is according to the XXIV-XXIV line in FIG. 21 Figure 24a is an enlarged view of part XXIVa in Figure 24.

The devices shown in FIGS. 1 to 3 are PVD devices for coating large substrates with organic layers. The substrates may have a rectangular shape with a diagonal greater than 1m, preferably greater than 2m or 3m. The lower part 2 of the housing carries a base 15 for supporting the substrate. The base 15 has a plurality of coolant channels 16 through which coolant can be introduced into the process chamber. The base is maintained at a temperature of approximately 20°C by the coolant.

The housing upper part 1 has a housing top which is mechanically stabilized by rib-like structures 17,18. The housing lower part 2 has a similar rib structure for mechanically stabilizing the housing end cap. A temperature-controlling agent passage through which a liquid temperature-regulating medium flows can be arranged in the top of the housing, so as to maintain the top of the housing at a preset temperature.

Fixing members 13 and 14 are provided on the edge of the top of the casing and on the edge of the side wall of the upper part 1 of the casing. It refers to the elastic fixing pieces 13 and 14 that fix the horizontal edge of the holding device 3 to the upper part 1 of the housing.

The holding device 3 is a lightweight component in the form of a truss or honeycomb structure. The truss has a plurality of surface elements 4, 5 connected along a vertical connecting line. The face elements 4, 5 form a vertical wall. According to this embodiment, the holding device 3 is formed by intersecting vertical walls 4, 5 The holding frame is formed, and the holding frame is fixed on the housing 1 through the fixing members 13 and 14 with the edge 3 ′. The holding device 3 is fixed to the housing 1 only at its edge 3', so when pressure changes occur inside the housing 1, 2, the inevitable deformation of the top of the housing will not cause the holding device 3 to be in the housing 1 2. Related position changes occur inside. The entire central surface area of the holding device 3 surrounded by the edge 3'freely cushions the top wall of the housing upper part 1 extending parallel to this surface area. The fixing members 13 and 14 are fixed to the edge of the top wall of the upper part 1 of the housing. The holding device 3 forms an exposed or closed air chamber structure, wherein the level of these air chambers is reduced by at least 100 times that of the holding device 3. The vertical height of a plane can be in the order of the diagonal equivalent of the circle of the horizontal plane of the air chamber.

The air intake mechanism 7 refers to a hollow body having a temperature regulating channel 9 in a wall portion, and the air intake mechanism is vertically arranged above the base 15. The distance between the bottom surface of the intake mechanism 7 forming the exhaust surface 7'and the top surface of the base 15 is several centimeters. The exhaust surface 7'has a plurality of exhaust ports 8 arranged in the manner of a shower head. Process gas can flow through the exhaust ports from the cavity of the intake mechanism 7 into the top surface of the base 15 and the intake mechanism The process chamber formed by the bottom of 7. The temperature of the air intake mechanism 7 is adjusted to about 450°C.

The air intake mechanism 7 is fixed to the holding device 3 via a mechanical fixing element 6. The mechanical fixing elements 6 are substantially uniformly distributed on the entire extension surface of the air intake mechanism 7. The distance between adjacent fixing elements 6 is smaller than the side length or diagonal of the air intake mechanism 7. Preferably, the maximum distance between two adjacent fixing elements 6 is less than one tenth of the diagonal equivalent of the circle of the air intake mechanism.

The mechanical fixing elements refer to a kind of hanger 6, which is fixed to the holding device 3 through the head 6" and extends within the range of the vertical gap with the air intake mechanism 7. The hanger 6 at the hanging position 6' It is fixed on the air intake mechanism 7 through its feet. The air intake mechanism 7 has two wall portions extending parallel to each other, and each has a temperature regulating channel 9. Preferably, it is preferably constructed that all six sides of the air intake mechanism 7 of the shower head are heated. For this purpose, all six sides of the wall are provided with temperature regulating elements, such as electric heating devices or channels for the temperature regulating liquid to flow through, so that the temperature of the air intake mechanism can be uniformly heated to, for example, 450°C. The fixed position 6'may be provided on the upper wall of the air intake mechanism 7. According to this embodiment, the fixed position 6'is provided on the wall portion of the intake mechanism 7 having the exhaust port 8. That is, the legs of the hanger 6 are fixed on the lower wall of the air intake mechanism 7.

The head 6" of the hanger 6 is installed in an opening or groove 19 on the top surface of the holding device 3. The head 6" can be formed by screws screwed into the thread so that the length of the hanger 6 and the hanging position 6'are vertical The position can be changed by rotating the head 6". The head 6" can also be composed of a nut or other adjusting element, which is used to locally adjust the height of the air intake mechanism. In this way, the height of the process chamber can be pre-adjusted locally. The hanger 6 is preferably composed of a material having only a small thermal expansion coefficient, so that the temperature rise of the hanger 6 does not affect the local height of the process chamber.

In a preferred design that is also realized in the embodiments shown in FIGS. 1 and 3, the holding device 3 is not only a mechanically stable cage, but also a temperature-stabilized cage. For this purpose, a heat-insulating plate 11 with active temperature adjustment is provided directly below the holding device 3. The heat insulating plate 11 refers to a plate made of metal or ceramic and having coolant channels 12. The coolant is introduced through the coolant passage 12, which causes the temperature of the actively cooled heat insulation panel 11 to be about 50°C. The holding device can also be cooled directly.

One or more passive heat insulation plates may be arranged between the actively cooled heat insulation plate 11 and the air intake mechanism 7. According to this embodiment, a passive thermal insulation board 10 is provided, which may also be a metal board or a ceramic board. The temperature of the passive heat shield is between the temperature of the air intake mechanism and the temperature of the active heat shield. The temperature of the passive insulation board may be in the range of 400°C to 200°C. When using multiple passive heat insulation boards arranged parallel to each other, each heat insulation board The temperature can be 270°C or 350°C. Thereby, the temperature of the holding device is kept at about 50°C. In this case, the case temperature is about 30°C. The passive heat shield 10 is preferably a metal plate with a highly reflective surface. The emission coefficient of these surfaces is less than 0.2.

The second embodiment of the upper part 1 of the housing as shown in FIGS. 4 and 5 also has a cage 3 constructed as a light-weight component, which is composed of a truss-shaped chamber structure in which the vertical chamber walls 4, 5 are on the vertical connecting line Connected. Here, the chamber walls 4 and 5 may also be composed of thin metal plates. The cage 3 also has an upper horizontal wall 20 and a lower horizontal wall 21 that extend horizontally.

According to this embodiment, only the vertically surrounding edge 3 ′ of the device 3 is also connected to the housing 1. The fixing member 13 related thereto may be an elastic fixing member. All the wall portions of the holding device 3 are composed of the thinnest surface material (such as plate material). It forms an open air chamber or closed air chamber three-dimensional structure. The holding device 3 is fixed to the edge of the top plate of the upper part 1 of the housing. The holding device 3 can also be made in one piece, for example by milling a truss from a solid block.

The air intake mechanism 7 having a plurality of exhaust ports is fixed to the holding device 3 through a plurality of fixed positions 6 ′ arranged substantially uniformly on the extension surface of the air intake mechanism 7. The air intake mechanism is connected to a mechanical fixing element 6, which here is also formed by a hanger frame. The head 6" of the hanger is connected to the holding device 3. The legs of the hanger 6 are connected to the air intake mechanism 7 at a fixed position 6'. Here, also in the vertical gap between the holding device 3 and the air intake mechanism 7 There are a plurality of heat insulation panels 10, 11. Here, there is also at least one active cooling heat insulation panel 11, which is arranged directly below the holding device and extends parallel to the bottom surface of the holding device 3. The multiple extend parallel to each other The passive heat insulation panel 10 extends between the actively cooled heat insulation panel 11 and the top surface of the air intake mechanism 7.

According to the present embodiment, the heat insulation panels are connected to the hanger 6. Therefore, hanging The frame 6 not only holds the air intake mechanism 7 on the holding device 3, but also holds the heat insulation panels 10, 11 in their vertical positions. The heat insulation panels 10 and 11 can also be fixed to the holding device 3 through independent hangers. These insulation boards have highly reflective surfaces. The plate 11 arranged below the holding device 3 has coolant channels 12 that extend over the entire area of the holding device 3 through which cooling water flows in.

In an unillustrated embodiment, the heat shields 10 and 11 can be directly fixed on the housing 1 through independent suspension devices, and the vertical positions of the heat shields are not critical. These suspension devices may be provided on the edges of the heat insulation panels 10,11. These suspension devices can also be arranged in the central surface area of the heat insulation panels 10, 11 and can pass through the through holes of the holding device 3, for example, in order to be fixed on top of the upper part 1 of the housing.

In the cover of the upper part 1 of the housing, a closable opening 22 is arranged in the area between the reinforcing ribs 17,18. By opening the opening 22, access to the top surface of the holding device 3 and to the horizontal wall 20 can be achieved. Openings 19 are provided in situ, and the head 6" of the hanger 6 is inserted into these openings. The head 6" can be composed of threaded pieces so as to affect the effective length of the hanger 6 by rotating the head 6". Therefore, the The head 6" of the hanger forms an adjustment mechanism, thereby locally affecting the height of the process chamber, that is, the distance between the air intake mechanism 7 and the base 15.

Use the aforementioned device to deposit large substrates. According to this method, a solid powdery starting material is converted into a gaseous state through an evaporator. The organic vapor thus formed is transported to the intake mechanism 7 by the carrier gas, where the vapor escapes from the exhaust port 8 to be condensed on the surface of the substrate placed on the susceptor 15.

According to the aforementioned embodiment, the holding device 3 together with the air intake mechanism 7 forms an assembly 23 which is fixed on the upper section of the housing 1 by fixing members 13, 14.

According to the embodiment shown in FIGS. 6 to 8, only the warranty of the component 23 is shown 持装置3。 Holding device 3. Here, the holding device 3 is also a light-weight body, such as a frame formed by a truss. It has a rectangular outline with four corners and side walls connecting the corners. Fixing members 13.1 are provided at two corners connected by a side wall. In the center of the opposite side wall, another fixing member 13.2 is provided, so that the fixing members 13.1, 13.2 are arranged at the corner points of the isosceles triangle.

The fixing parts 13.1, 13.2 basically consist of three fixing elements. The fixing elements respectively have a fixing element 24.1, 24.2, through which the fixing elements 13.1, 13.2 are fixed on the upper part 1 of the housing. The other fixing elements 25.1, 25.2 are fixed on the holding device 3. The fixing element 25.1 is an angular element, which includes the corner region of the holding device 3 and has corner edges, which are planarly connected to the side wall of the holding device 3. The fixing element 25.2 has a fixing side extending in a plane, which is fixed to the holding device 3 approximately at the center of the side wall.

The two fixing elements 24.1 or 24.2 and 25.1 or 25.2 are connected by intermediate elements 26.1 and 26.2, respectively. The intermediate elements 26.1, 26.2 contribute to force transmission, and the gravity of the fixing elements 25.1, 25.2 is transmitted to the fixing elements 24.1, 24.2 through these intermediate elements. Therefore, the intermediate elements 26.1, 26.2 refer to force transmission members, which are in the form of rectangular plates in the embodiments of FIGS. 6 to 8. The upper sections of the bending elements 26.1 and 26.2 are connected to the fixing elements 24.1 and 24.2 on the housing side, respectively. The sections below the intermediate elements 26.1, 26.2 are connected to the fixing elements 25.1, 25.2 on the assembly side. The bending elements 26.1, 26.2 have a curved surface extending in the vertical direction so that the normal of the surface points in the horizontal direction. The surface normal of the bending element 26.1 points approximately in the direction of the angle bisector of the two side walls of the holding device 3 that intersect at the corner point. In a preferred solution, the surface normal of the bending element 26.1 points to the geometric center of gravity M of the holding device 3 so that the direction of thermal expansion h at the fixed point coincides with the surface normal of the bending element 26.1. The surface normal of the bending element 26.2 extends in a direction transverse to the side wall of the holding device. When the holding device 3 thermally expands, the latter can Swell on the horizontal surface. In this case, the spacing between the corners of the holding device 3 can be increased or decreased. This dimensional change of the holding device 3 is associated with the slight bending of the planar bending elements 26.1, 26.2.

The bending elements may be bending plates having edges parallel to each other, and the edges are respectively fixed to the fixing elements 24.1, 24.2, 25.1, and 25.2 of the housing and the holding device through fixing claws. The force transmission member of the present invention is designed and fixed on the fixing element in such a way that the force transmission member allows the assembly 23 to avoid evasive motion only on the horizontal plane, particularly the air intake mechanism. Therefore, the moving distance of the bending elements is reduced by at least one order (10 times) compared to the length of the bending section of the bending element.

Figure 9 shows a variant of the fixing element 13.4. The flex elastic middle element 26.4 is in the form of a solid or hollow rod, which is connected to the housing 1 by the upper fixing element 24.4 and is connected to the holding device 3 by the lower fixing element 25.4. It can also use rope instead of rods. The rod and the rope are the force transmission members, and the gravity of the holding device 3 and the air intake mechanism is transmitted to the housing through the force transmission members. The fixing elements 24.1 and 25.4 may be corner elements. The intermediate element 26.1 is also preferably composed of metal as the intermediate elements 26.1 and 26.2. The rod 26.4 extends in the vertical direction. It can also extend obliquely to the vertical direction. The rod has a rounded cross section, and may also have another cross section, such as a polygonal cross section.

The embodiment shown in FIG. 10 basically corresponds to the angle fixing frame shown in FIGS. 6 and 8. The figure shows a fixing element 24.1 designed as the housing side of the crossbeam, which is fixed to the inner side wall of the upper part 1 of the housing by screws. The fixing element 25.1 on the module side has two corner edges at an angle of 90° to each other, and these corner edges are fixed to the assembly 23 by screws. The surface extending 45° offset from the corner of the fixing element 25.1 is connected to the flexurally elastic intermediate element 26.1. The intermediate element 26.2 also refers to the force transmission member as the intermediate element 26.1.

The embodiments shown in FIGS. 11 and 12 show the connection of the beam 30, which is carried by the two housing-side fixing elements 24.3, 24.4, and is connected to the assembly-side fixing element 25.3 through the four links 27, 28, 29. The fixing element is a corner element. The uppermost chain element 27 is held by the fixing bolts of the beam 30, and thus is inserted into the gap of the beam 30. The lower chain element 29 is held between the two fixing elements 25.3 and is also penetrated by the fixing bolts. Two intermediate links 28 are provided, which connect the upper link 27 and the lower link 29. The links 27, 28, 29 form a force transmission member in order to transmit the gravity.

As shown in the embodiment shown in FIG. 6, the corner area can also be used to avoid the diagonal movement of the side wall of the component 23, wherein the links 27, 28, and 29 are unfolded relative to each other. The openings of the links 27 and 29 are offset by 90° from each other. The chain links 27, 28, and 29 are circular objects extending on a plane, and they are engaged with each other at a 90° angle.

Similar to the embodiment shown in FIG. 6, a third and unillustrated fixing member may be provided on the center of the side wall opposite to the two corner areas, and it also has a plurality of meshed links 27, 28, 29, so that the narrow wall at that place can avoid in a direction transverse to its extending direction.

Fig. 13a schematically shows the arrangement of the fixing member 13 on the two corner areas and on the center of the opposite side walls of the assembly 23, so that the fixing member 13 is arranged on the corner of an isosceles triangle.

FIG. 13b shows the arrangement of the fixing element 13 at the four corner points of the component having a rectangular outline, where the fixing element 13 is arranged at the corner point of a quadrilateral.

Fig. 13c shows another solution according to which the fixing member 13 is arranged approximately at the center of the mutually perpendicular side walls of the assembly 23. The fixing means here a bending element, which has a bending direction perpendicular to the extending direction of the side walls. Such bending The elements are designed in such a way that the assembly 23 can also expand in a direction lying in the plane of the curved elements. For this reason, the bending elements cannot be constructed as a flat body, but instead, for example, have a comb-like design or have spokes.

The embodiment shown in FIG. 13d shows that the assembly 23 is fixed when four fixing members 13 are used, wherein two fixing members 13 are fixed on two opposite side walls of the assembly 23. In this case, the fixing member 13 is spaced from the isocenter by a certain distance. The distance between the fixing members and the corner points is, for example, one third of the length of the side wall, and the fixing members are allocated to the longer side walls. Here, the bending elements may be formed by rods fixed on the housing through the upper end in a fixed manner, so that the lower end fixed on the assembly 23 can move in a flexible manner on a horizontal plane.

14 to 24a show a particularly preferred embodiment, according to this embodiment, the assembly 23 is fixed to the housing in three fixed positions, the assembly can be a holding device 3, which has an air intake mechanism fixed on it 7, or just intake mechanism 7. For this purpose, three fixing members 13.1, 13.2 are provided, which are clamped on the horizontal edges of the assembly 23, thereby forming fixing elements 25.1 and 25.2 on the assembly side. The assembly 23 has a non-square rectangular outline. The fixing elements 25.1 on the two component sides are fixed to the two corners of the shorter side of the rectangle. Either of the two component-side fixing elements 25.1 is connected to the casing-side fixing element 24.1 fixed on the casing, and on the shorter rectangular side opposite the shorter rectangular side, the third fixing member 13.1 Set at the center of the rectangular side, the third fixing member also has a fixing member 25.2 on the component side and a fixing member 24.2 on the housing side.

As shown in FIGS. 16 and 21 and the cross-sections drawn therein, all the fixing elements 25.1 and 25.2 on the component side are connected to the fixing elements 24.1 and 24.2 on the housing side through the intermediate elements 26.1 and 26.2. Intermediate elements 26.1, 26.2 refer to force transmission members in the form of curved plates. The curved plate basically has a rectangular cross-section and at its top and bottom The surface has a thickened material. The upper parts of the intermediate elements 26.1, 26.2 are thickened with screw holes, and the fixing screws are screwed through the screw holes, and the intermediate elements 26.1, 26.2 are screwed to the fixing elements 24.1 on the housing side through the fixing screws 24.2 on. For this purpose, the fixing elements 24.1, 24.2 on the housing side have a vertically movable adjusting body 41 on which the force transmission member is fixed. The adjusting screw 42 supporting the adjusting body 41 can adjust the height of the adjusting body 41 so as to adjust the distance between the intake mechanism 7 and the base 15 in this way.

The lower element of the intermediate elements 26.1, 26.2 is thickened and has a bearing opening 36. The support opening 36 is penetrated by a fixing pin 32 which is firmly connected to the fixing elements 25.1, 25.2 on the assembly side. For this purpose, the fixing elements 25.1, 25.2 on the module side have a vertically extending slit into which the thickening of the lower part of the intermediate elements 26.1, 26.2 is inserted. The gap intersects the fixing port 35 into which the fixing pin 32 is inserted. The fixing pin is a part of the bolt 31.

The holding opening 36 has a support surface 40 extending in the horizontal direction, on which a sliding element 39 is provided. The supporting side 38 of the fixing pin 32 is supported on the sliding element 39 in a manner such that the supporting side 38 can move slightly in the horizontal direction relative to the supporting surface 40. It is therefore possible to balance the motion component of the thermal expansion movement, which does not extend in the direction of the main bending direction of the intermediate elements 26.1, 26.2 constructed as bending elements.

In order to prevent the intermediate elements 26.1, 26.2 from breaking, safety devices 34, 33 are provided. The safety device refers to a safety pin 33 that is firmly fixed to one of the two components 24, 25 and snaps into the eye 34 of the other fixing element. According to the present embodiment, the safety pin 33 is assigned to the fixing elements 25.1, 25.2 on the assembly side in a fixed manner. Specifically, the safety pin 33 is composed of the aforementioned bolt 31. The safety eye consists of a safety opening 34 which is provided on the protrusions of the fixing elements 24.1, 24.2 on the housing side.

The diameter of the safety opening 34 is larger than the diameter of the safety pin 33 so that the safety pin 33 freely extends into the opening 34. The circumferential surface of the safety pin 33 is spaced a certain distance from the inner wall of the safety opening 34 over its entire circumference, so that the safety pin 33 extends into the safety opening 34 freely and non-contactly.

If the flexural elastic force transmitting member needs to be broken, the assembly 23 only falls down to such an extent that the safety pin 33 hits the wall of the opening 34.

The safety device of the present invention has a safety pin 33 that extends into the safety opening 34 with a certain distance around it, wherein the safety pin 33 is assigned to the fixing element on the housing side or the assembly side, and the safety opening 34 is assigned to the other fixing Elements, among which the fixing element on the assembly side and the fixing element on the casing side are only connected by an intermediate element that realizes a horizontal avoidance movement.

The above-mentioned embodiments help to explain the inventions summarized in this application, and these inventions also make original improvements to the prior art by at least the following feature combinations, namely: a CVD or PVD coating device, characterized in that The fixing members 13 and 14 have force transmission members 26.1, 26.2, 26.3, and 26.4; 27, 28, and 29. When the size of the assembly 23 caused by the temperature adjustment changes, the force transmission members deform or move relative to each other.

A CVD or PVD coating device, characterized in that the assembly 23 is fixed to the housing 1, 2 only with its horizontal edge 3'.

A CVD or PVD coating device, characterized in that the assembly 23 is fixed to the housing 1, 2 through elastically deformable force transmission members 26.1, 26.2, 26.4, and the force transmission members have a level toward the assembly 23 The main deformation direction of the center of gravity M of the plane.

A CVD or PVD coating device, characterized in that the air inlet mechanism 7 is fixed to the assembly 23 through a plurality of hangers 6 dispersedly arranged on the entire extension surface, and is fixed to the housing through the fixing members 13, 14 1, on the holding device 3 on which the hangers 6 extend from the hanging positions 6'to the holding device 3 in the vertical direction, and there are adjustments in the vertical gap between the air intake mechanism 7 and the holding device 3 Temperature devices 11, 12 and/or one or more heat insulation panels 10, 11.

A CVD or PVD coating device, characterized in that the fixing members 13, 14, 13.1, 13.2, 13.3, 13.4 are arranged on a corner of a polygon on the edge of the component 23 with a rectangular outline, the polygon is particularly It is triangular or quadrilateral.

A CVD or PVD coating device, characterized in that at least one force transmission member is an elastically deformable bending element 26.1, 26.2, 26.4.

A CVD or PVD coating device, characterized in that the force transmitting members 26.1, 26.2 are rectangular plates, or the bending element 26.4 is a solid or hollow rod, or the bending element is a rope.

A CVD or PVD coating device, characterized in that at least one force transmission member has elements 27, 28, 29 that are unfolded relative to each other.

A CVD or PVD coating device, characterized in that, among the components unfolded relative to each other, a first component 27 is firmly fixed on the housing 1, 2 and a second component 29 is firmly fixed on the assembly Above, and, at least one third element 28 connects the first and second elements 27, 29.

A CVD or PVD coating device, characterized in that the elements 27, 28, 29 which are unfolded relative to each other are chain links.

A CVD or PVD coating device, characterized in that the force transmission The component is an intermediate element 26.1, 26.3, 26.4, especially at least one of the fixing elements 24.1, 24.2, 24.3, 24.4 arranged in the corner area is fixed to the assembly 23 through the intermediate element 26.1, 26.3, 26.4 The fixed elements 25.1, 25.3, 25.4.

A CVD or PVD coating device, characterized in that the end of the bending element 26.4 can be fixed on the component side through the end of the fixing element 25.4 on the horizontal surface in a flexural elastic manner relative to the fixing of the bending element on the housing side The end on element 24.4 moves.

A CVD or PVD coating device, characterized in that the fixing element 24.1-24.3 on the side of the housing is approximately at the same vertical height as the fixing element 25.1-25.3 on the component side to which it belongs.

A CVD or PVD coating device, characterized by a safety device that acts when the force transmitting member 26.1, 26.2, 26.3, 26.4; 27, 28, 29 breaks, thereby holding the assembly 23 in the shell On the body 1, in particular, the fixing element 25.1-25.4 on the assembly side is held on the fixing elements 24.1, 24.2, 24.3, 24.4 on the housing side, wherein in particular, the safety pin 33 snaps into the safety opening in a non-contact manner 34.

All the disclosed features (by itself or a combination of multiple features) are the essence of the invention. Therefore, the disclosure content of this application also includes all the contents disclosed in the relevant/attached priority files (copies of previous applications), and the features described in these files are also included in the claims of this application. The subsidiary item describes the improvement scheme of the present invention with respect to the prior art based on its characteristics, and its main purpose is to make a divisional application on the basis of these request items.

1‧‧‧Housing upper part

3‧‧‧ Holding device

3'‧‧‧Edge of the component

13.1‧‧‧Fixed parts

13.2‧‧‧Fixed parts

23‧‧‧ Components

24.1‧‧‧Fixed element on the shell side

24.2‧‧‧Fixed element on the shell side

25.1‧‧‧ Fixing element on the module side

25.2‧‧‧Fixed element on the module side

26.1‧‧‧Intermediate element, bending element

26.2‧‧‧Intermediate element, bending element

Claims (14)

A CVD or PVD coating device, which includes a housing (1, 2) and a component (23) with an air intake mechanism (7) fixed on the housing (1, 2) The exhaust surface (7') of the air port (8) extending in an exhaust plane, the assembly is fixed in a plurality of hanging positions on the upper section of the housing (1) through the fixing members (13, 14) (6'), in which a temperature regulating member (9) is provided, through which the air intake mechanism (7) can adjust the temperature from a first temperature substantially equivalent to the temperature of the housing (1, 2) through the temperature regulating members Temperature to a second temperature different from the temperature of the housing, wherein the fixing members (13, 14) have force transmission members (26.1, 26.2, 26.3, 26.4; 27, 28, 29), caused by the temperature adjustment When the size of the assembly (23) changes, the force transmission members deform or move relative to each other, characterized in that the assembly includes a holding device (3), and the air intake mechanism (7) is arranged in the The hanger (6) on the entire horizontal extension surface is fixed to the holding device, and the holding device (3) is fixed to the holding device through the force transmission members (26.1, 26.2, 26.3, 26.4; 27, 28, 29) On the shell (1). The CVD or PVD coating device according to claim 1, wherein the holding device (3) is fixed to the housing (1, 2) only with its horizontal edge (3'). The CVD or PVD coating device according to claim 2, wherein the holding device (3) is fixed to the housing (1, 2) through an elastically deformable force transmission member (26.1, 26.2, 26.4), and these forces The transmission member has a main deformation direction towards the center of gravity (M) of the horizontal plane of the assembly (23). The CVD or PVD coating device according to claim 2, wherein the hangers (6) extend from the suspending positions (6') to the holding device (3) in the vertical direction. The CVD or PVD coating device according to claim 1, wherein a temperature regulating device (11, 12) and/or one or more are arranged in the vertical gap between the air inlet mechanism (7) and the holding device (3) Heat insulation panels (10, 11). The CVD or PVD coating device according to claim 1, wherein the fixing members (13, 14, 13.1, 13.2, 13.3, 13.4) are arranged at a corner of a polygon on the edge of the component (23) having a rectangular outline At a point, the polygon is a triangle or a quadrangle. The CVD or PVD coating device according to claim 1, wherein at least one force transmission member is an elastically deformable bending element (26.1, 26.2, 26.4). The CVD or PVD coating device according to claim 7, wherein the remaining force transmitting members (26.1, 26.2) are rectangular plates, or the bending element (26.4) is a solid or hollow rod, or the bending element For the rope. The CVD or PVD coating device according to claim 1, wherein at least one of the force transmission members has elements (27, 28, 29) that are deployed relative to each other. The CVD or PVD coating device according to claim 9, wherein, among the components unfolded relative to each other, a first component (27) is firmly fixed on the housing (1, 2), and a second component ( 29) Securely fixed to the assembly, and at least a third element (28) connects the first and second elements (27, 29). The CVD or PVD coating device according to claim 9, wherein the elements (27, 28, 29) unfolded relative to each other are chain links. The CVD or PVD coating device according to claim 1, wherein the force transmission member is an intermediate element (26.1, 26.3, 26.4), and at least one of the fixed elements (24.1, 24.2, 24.3, 24.4) arranged in the corner zone penetrates The intermediate element is fixed on a fixing element (25.1, 25.3, 25.4) fixed on the assembly (23). The CVD or PVD coating device according to claim 1, wherein the end of the bending element (26.4) can be fixed to the fixing element (25.4) on the component side through the end of the fixing element (25.4) on the horizontal surface in a flexural elastic manner relative to the bending element On the fixing element (24.4) on the housing side Move to the end. The CVD or PVD coating device according to claim 2, wherein the fixing element (24.1-24.3) on the casing side is approximately at the same vertical height as the fixing element (25.1-25.3) on the component side to which it belongs.

Images