TWI680558B - Apparatus for bonding semiconductor chip and method for bonding semiconductor chip - Google Patents

Abstract

The present invention provides a semiconductor wafer bonding apparatus and a semiconductor wafer bonding method, and more specifically, an apparatus and method for bonding a semiconductor wafer to an upper surface of a substrate or another semiconductor wafer. According to the semiconductor wafer bonding apparatus and the semiconductor wafer bonding method, the yield can be increased by quickly and accurately bonding a semiconductor wafer to a substrate or another semiconductor wafer.

Description

Device for bonding semiconductor wafers and method for bonding semiconductor wafers

One or more embodiments relate to a semiconductor wafer bonding device and a semiconductor wafer bonding method, and more specifically to a device and method for bonding a semiconductor wafer to an upper surface of a substrate or another semiconductor wafer.

As electronic products become compact, semiconductor wafers in the form of flip-chips without wire bonding are widely used. The semiconductor wafer in the flip-chip form as described above includes a plurality of electrodes in the form of solder bumps on the lower surface of the semiconductor wafer, and by bonding the electrodes to positions corresponding to the positions of the solder bumps also formed on the substrate, The semiconductor wafer is bonded to a substrate. In addition, as for a semiconductor wafer in the form of a through silicon via (TSV), the semiconductor wafer is stacked on another semiconductor wafer (chip-on-chip) to join the upper semiconductor wafer and the lower semiconductor Solder bumps on the wafer.

As a method of bonding a thin semiconductor wafer to a substrate or another semiconductor wafer, a thermal compression bonding (TCB) method is used according to the related art. In the TCB method, a bonding head including a heater that heats a semiconductor wafer is used to adsorb an upper surface of the semiconductor wafer to thereby place the semiconductor wafer on a substrate, and then heat the semiconductor wafer while pressing the semiconductor wafer. When the semiconductor wafer is heated, the bonding is performed as the solder bump on the semiconductor wafer or the substrate is melted. After the semiconductor wafer is heated to a temperature of at most molten solder bumps by using the bonding head, the semiconductor wafer needs to be kept in a pressurized state by using the bonding head until the solder bump is hardened again. Here, the operation of the heater of the bonding head is stopped to lower the temperature of the semiconductor wafer.

As described above, the semiconductor wafer in the TCB method must be maintained in a pressurized state by using a bonding head during heating and cooling of the semiconductor wafer, and therefore its operation time is long. In addition, because the thermal conduction method is used to heat a semiconductor wafer by using a bonding head, it takes a relatively long period of time to heat the semiconductor wafer again and cool the semiconductor wafer. Generally, it takes tens or more seconds to bond a semiconductor wafer by using the TCB method.

In addition, since the semiconductor wafer is heated for a relatively long time, the semiconductor wafer is also damaged.

One or more embodiments include a semiconductor wafer bonding apparatus and a semiconductor wafer bonding method in which a semiconductor wafer can be quickly and stably bonded to a substrate or another semiconductor wafer.

Additional aspects will be set forth in part and will be apparent from the description in part, or may be learned through practice of the presented embodiments.

According to one or more embodiments of the present disclosure, a semiconductor wafer bonding apparatus includes a fixing member for fixing a lower surface of a plurality of wafer-substrate elements, in which the non-conductive resin layer and the semiconductor wafer depend on each other. Are stacked on the substrate in sequence; the pressing member is arranged above the fixing member, and the pressing member includes a transparent portion penetrated by the laser beam; the lifting member is used to raise or lower the fixing member and the pressing member relative to one of the fixing member and the pressing member The other to pressurize the semiconductor wafer of the plurality of wafer-substrate elements so that the solder bump of one of the semiconductor wafer and the substrate penetrates the non-conductive resin layer to electrically contact the other of the semiconductor wafer and the substrate; And a laser head for irradiating a laser beam to a wafer-substrate element pressurized by using the pressing member by a transparent portion of the pressing member to bond a solder bump of one of the semiconductor wafer and the substrate to the semiconductor wafer And the other of the substrates.

According to one or more embodiments of the present disclosure, a semiconductor wafer bonding method includes: (a) forming a non-conductive resin layer on one of a lower surface of a semiconductor wafer and an upper surface of a substrate; (b) placing a semiconductor wafer on a substrate To provide a plurality of wafer-substrate elements in which a substrate, a non-conductive resin layer, and a semiconductor wafer are sequentially stacked; (c) used by placing a plurality of wafer-substrate elements on a fixed member Fixing a plurality of wafer-substrate elements by a fixing member; (d) One of the pressing member and the fixing member is brought closer to the other of the pressing member and the fixing member by using a lifting member, so that the semiconductor wafer and the substrate are soldered The bump penetrates the non-conductive resin layer to make electrical contact with the other of the semiconductor wafer and the substrate, wherein the pressing member is disposed above the fixed member and includes a transparent portion penetrated by the laser beam; and (e) by using a laser head The laser beam passes through the transparent part of the pressing member and irradiates the wafer-substrate element between the pressing member and the fixed member to guide the semiconductor The solder bump of one of the bulk wafer and the substrate is bonded to the other of the semiconductor wafer and the substrate.

These and / or other aspects will become apparent and easier to understand by following the description of the embodiments with reference to the accompanying drawings.

Hereinafter, a semiconductor wafer bonding apparatus according to an embodiment of the present disclosure will be described in detail with reference to the accompanying drawings.

FIG. 1 is a conceptual diagram of a semiconductor wafer bonding apparatus according to an embodiment of the present disclosure, and FIG. 2 is a plan view of a pressing member 200 of the semiconductor wafer bonding apparatus shown in FIG. 1. FIG. 3 shows an example of a wafer-substrate element 10 bonded by using the semiconductor wafer bonding apparatus shown in FIG. 1.

The semiconductor wafer bonding apparatus according to the present embodiment is manufactured for bonding through-silicon via (TSV) forms by bonding the semiconductor wafer 13 to the substrate 11 using a laser beam or by stacking the semiconductor wafers 13 on top of each other. Device for semiconductor wafer 13. Hereinafter, first, an example in which the semiconductor wafer 13 is bonded to the substrate 11 will be described.

The solder bump 111 and the solder bump 131 are respectively formed on the substrate 11 and the semiconductor wafer 13, and as the solder bump 111 and the solder bump 131 are immediately melted by the energy transmitted by the laser beam and then hardened, the semiconductor wafer 13 Bonded to the substrate 11. Here, the non-conductive resin layer 12 and the semiconductor wafer 13 are sequentially stacked on the substrate 11 as shown in FIG. 3. That is, the non-conductive resin layer 12 is disposed between the substrate 11 and the semiconductor wafer 13. The non-conductive resin layer 12 may be a non-conductive film (NCF) or a non-conductive paste (NCP). When NCF is used, the semiconductor wafer 13 is stacked on the substrate 11 and the NCF is attached to the upper surface of the substrate 11 or the lower surface of the semiconductor wafer 13. When NCP is used, NCP is coated on the upper surface of the substrate 11, and then the semiconductor wafer 13 is stacked on the substrate 11. In the present embodiment, a wafer-substrate element 10 forming a non-conductive resin layer 12 in the form of an NCF attached to the lower surface of the semiconductor wafer 13 will be described as an example.

1 and 2, a semiconductor wafer bonding apparatus according to the present embodiment includes a fixing member 100, a pressing member 200, a lifting member 300, and a laser head 400.

The fixing member 100 is a device for fixing the lower surface of a plurality of wafer-substrate elements 10. In the present embodiment, a bonding operation performed on the wafer-substrate element 10 where the substrates 11 of the plurality of wafer-substrate elements 10 are connected to each other will be described as an example.

The fixing member 100 according to the present embodiment fixes the substrate 11 by supporting the lower surface of the substrate 11 using a vacuum suction method. The wafer-substrate element 10 in which the semiconductor wafer 13 is arranged on the non-conductive resin layer 12 according to the position where the solder bump 111 of the substrate 11 is formed is supplied to the fixing member 100 and fixed by suction. Due to the tackiness or adhesion characteristics of the non-conductive resin layer 12, the semiconductor wafer 13 is temporarily adhered to the substrate 11. Unless a relatively large amount of vibration or a relatively large external force is applied, the semiconductor wafer 13 placed on the substrate 11 is not shaken by the action of the non-conductive resin layer 12 but remains in its position.

The pressing member 200 is disposed above the fixing member 100. Referring to FIG. 2, the pressing member 200 includes a transparent portion 210 and a mask portion 220. The transparent portion 210 may be formed of a transparent material penetrated by a laser beam. Quartz, which is widely used for transmitting laser beams, can be used as the material of the transparent portion 210. The mask portion 220 may be formed of an opaque material that cannot be penetrated by the laser beam. The mask portion 220 is used to support the transparent portion 210. Referring to FIG. 3, the transparent portions 210 are arranged in an area in a one-to-one manner to correspond to the semiconductor wafers 13 of the wafer-substrate element 10, respectively, wherein the wafer-substrate element 10 is fixed under the transparent portion 210 by using a fixing member 100.

The mask portion 220 is used to planarly support the transparent portion 210. In addition, the mask portion 220 is formed of an opaque material. The mask portion 220 is disposed in a corresponding region between the wafer-substrate element 10. The mask portion 220 prevents the laser beam from passing through an area other than the transparent portion 210. The lower surface of the transparent portion 210 is flat. When the semiconductor wafer 13 of the wafer-substrate element 10 (which will be described later) is pressed by using the pressing member 200 via the operation lifting member 300 (which will be described later), the semiconductor wafer 13 is uniformly and flatly pressed through the transparent portion 210 having a flat lower surface .

The lifting member 300 performs a function of vertically lifting the fixing member 100 up and down. When the substrate 11 of the wafer-substrate element 10 is attracted to and fixed to the fixing member 100 by the fixing member 100, the lifting member 300 lifts the fixing member 100 upward to closely contact the fixing member 100 with the pressing member 200, and thus the wafer -The semiconductor wafer 13 of the substrate element 10 is pressurized. When the lifting member 300 presses the fixing member 100 against the pressing member 200, the solder bump 131 of the semiconductor wafer 13 and the solder bump 111 of the substrate 11 penetrate the non-conductive resin layer 12 to make electrical contact with each other.

The laser head 400 is disposed above the pressing member 200. The laser head 400 generates a laser beam and transmits the laser beam through the transparent portion 210 of the pressing member 200 to the semiconductor wafer 13 below the transparent portion 210 of the pressing member 200. As the solder bump 111 of the substrate 11 and the solder bump 131 of the semiconductor wafer 13 are immediately melted by the energy transmitted by the laser beam, the semiconductor wafer 13 is bonded to the substrate 11.

The laser head 400 is mounted on the head transfer member 500. The head transfer part 500 transfers the laser head 400 in a horizontal direction. From above the pressing member 200, the laser head 400 may simultaneously transmit the laser beam to the plurality of transparent portions 210 or may sequentially irradiate the laser beam to each of the transparent portions 210. The head transfer part 500 may transfer the laser head 400 to a position where the laser beam is to be irradiated.

Hereinafter, a semiconductor wafer bonding method for bonding the semiconductor wafer 13 to the substrate 11 by using the semiconductor wafer bonding apparatus according to the present embodiment configured as described above will be described.

First, NCF is attached to the lower surface of the semiconductor wafer 13 to form a non-conductive resin layer 12 (step (a)). As described above, the NCF may also be attached to the upper surface of the substrate 11. In this embodiment, an example in which a non-conductive resin layer 12 is formed by attaching NCF to the lower surface of the semiconductor wafer 13 as shown in FIG. 3 will be described.

By mounting each semiconductor wafer 13 having a non-conductive resin layer 12 to a lower surface on the substrate 11, a plurality of wafer-substrate elements 10 in which the substrate 11, the non-conductive resin layer 12 and the semiconductor wafer 13 are sequentially stacked are provided. (Step (b)). Referring to FIG. 1, a plurality of wafer-substrate elements 10 provided by stacking a plurality of non-conductive resin layers 12 and a plurality of semiconductor wafers 13 on a substrate 11 are shown. FIG. 3 shows an enlarged cross-sectional view of one of the plurality of wafer-substrate elements 10. Here, the solder bumps 111 of the substrate 11 and the solder bumps 131 of the semiconductor wafer 13 are arranged at positions corresponding to each other so as to face each other. Due to the adhesive force of the non-conductive resin layer 12, the semiconductor wafer 13 is temporarily attached to the upper surface of the substrate 11.

After step (b) is completed, a plurality of wafer-substrate elements 10 are arranged on the fixing member 100 as shown in FIGS. 1 and 3 to fix the lower surface of the substrate 11 by using the fixing member 100 (step (c) ). The fixing member 100 fixes the wafer-substrate element 10 by sucking the lower surface of the substrate 11 using a vacuum suction method.

When the wafer-substrate element 10 is fixed to the fixing member 100, the fixing member 100 is lifted upward by using the lifting member 300 to bring the semiconductor wafer 13 close to the pressing member 200, thereby pressing the wafer-substrate element 10 against the substrate 11 (Step (d)). According to the operation of the lifting member 300, the solder bump 111 or the solder bump 131 of one of the semiconductor wafer 13 and the substrate 11 penetrates the non-conductive resin layer 12 so as to electrically contact the other of the semiconductor wafer 13 and the substrate 11. According to the present embodiment, the solder bumps 131 of the semiconductor wafer 13 and the solder bumps 111 of the substrate 11 respectively penetrate the non-conductive resin layer 12 to contact each other as shown in FIG. 4. Therefore, the solder bump 131 of the semiconductor wafer 13 and the solder bump 111 of the substrate 11 are electrically connected to each other. In addition, the solder bumps 131 of the semiconductor wafer 13 are electrically insulated from each other via the non-conductive resin layer 12, and the solder bumps 111 of the substrate 11 are also electrically insulated from each other via the non-conductive resin layer 12. The non-conductive resin layer 12 performs a function of dissipating heat generated from the semiconductor wafer 13 and a function of reducing an impact force that can be applied to the semiconductor wafer 13 and the substrate 11.

In this state, the laser head 400 irradiates a laser beam to join the solder bumps 131 of the semiconductor wafer 13 and the solder bumps 111 of the substrate 11 to each other (step (e)). The laser beam emitted from the laser head 400 is transmitted to the wafer-substrate element 10 via the transparent portion 210 of the pressing member 200. As the solder bumps 111 of the substrate 11 and the solder bumps 131 of the semiconductor wafer 13 are immediately melted and then hardened by the energy transmitted by the laser beam, the semiconductor wafer 13 is bonded to the substrate 11 as shown in FIG. 4. When thermal deformation may occur in accordance with the transient temperature rise of the semiconductor wafer 13 or the substrate 11 (due to the laser beam), the semiconductor wafer 13 is stably bonded because the transparent portion 210 of the pressing member 200 presses the semiconductor wafer 13 downward. To the substrate 11 while preventing the semiconductor wafer 13 from being deformed or bent due to thermal deformation. According to this method, the bonding failure of the solder bump 111 and the solder bump 131 can be prevented. In addition, the semiconductor wafer bonding apparatus and the semiconductor wafer bonding method according to the present embodiment are different from the method of heating a semiconductor wafer by a thermal conduction method performed by using a heating block according to the related art, using a laser beam to heat the semiconductor wafer 13 and solder The bump 111 and the solder bump 131, and therefore, the bonding operation of the wafer-substrate element 10 can be performed in a very short period of time. In addition, since the direct energy transfer method of the laser beam is used instead of the thermal conduction method, the temperature of the solder bump 111 and the solder bump 131 can be increased significantly more rapidly than the thermal conduction method, and the solder bump 111 and the solder The temperature of the bump 131 can be reduced very quickly by stopping the irradiation of the laser beam. By using the method described above, according to the apparatus and method for bonding a semiconductor wafer of the present disclosure, a bonding operation of a semiconductor wafer can be performed several tens of times faster than the related art method. In addition, the semiconductor wafer 13 is heated only for an extremely short period of time, and thus the semiconductor wafer 13 can be prevented from being damaged due to heating.

As described above, the pressing member 200 includes the transparent portion 210 and the mask portion 220, and the laser beam penetrates only the transparent portion 210. Therefore, the laser beam emitted from the laser head 400 passes through the transparent portion 210 of the pressing member 200 and is transmitted only to the wafer-substrate element 10 disposed under the transparent portion 210. By using the pressing member 200 including the transparent portion 210 and the cover portion 220 as described above, it is possible to prevent the laser beam from being irradiated onto the portion of the substrate 11 that is not required to be transferred by the laser beam energy.

In addition, step (e) may also be performed so that a plurality of wafer-substrate elements 10 are simultaneously bonded to the substrate 11 by using the pressing member 200 as described above. By operating the laser head 400 to increase the irradiation area of the laser beam, the laser beam can be irradiated onto two or more wafer-substrate elements 10 simultaneously. Since the cover portion 220 of the pressing member 200 prevents the laser beam from passing through a region other than the region corresponding to the semiconductor wafer 13 of the wafer-substrate element 10 as described above, even when the laser beam is irradiated on a relatively wide area At this time, the energy of the laser beam can still be transferred only to the semiconductor wafer 13 to be bonded. By simultaneously bonding a plurality of semiconductor wafers 13 to the substrate 11 using the method described above, the overall process yield can be improved. As the case may be, step (e) may be performed so that all wafer-substrate elements 10 pressurized by using the pressing member 200 are simultaneously bonded by irradiating a laser beam to the entire pressing member 200 as shown in FIG. 2. To the substrate 11.

In addition, as the case may be, step (e) may be performed by transferring the laser head 400 using the head transferring part 500 described above. Step (e) may be performed so that each semiconductor wafer 13 is sequentially bonded to the substrate 11 at the same time by transferring the laser head 400 using the head transfer part 500. Similarly, step (e) can be performed by simultaneously bonding the semiconductor wafers 13 of the two wafer-substrate elements 10 to the substrate 11 or by radiating a laser beam to the semiconductor wafers 13 of a row of wafer-substrate elements 10.

As described above, when a plurality of wafer-substrate elements 10 are simultaneously pressurized by using the pressing member 200, only a region to be irradiated by the laser beam can be modified by increasing or decreasing the laser beam irradiation region, and therefore According to the semiconductor wafer bonding apparatus and the semiconductor wafer bonding method of the present disclosure, the bonding operation of the wafer-substrate element 10 can be performed quickly.

Meanwhile, even when the head transfer member 500 is not used, the bonding operation may be sequentially performed on one or more wafer-substrate elements 10. Even if the laser head 400 is fixed, when the position and area where the laser beam is irradiated are configured to perform optical adjustment according to the internal operation of the laser head 400, step (e) can still be performed by using the laser head 400 in a fixed state. The semiconductor wafer bonding apparatus is implemented by sequentially irradiating a laser beam to the wafer-substrate element 10.

Although the present disclosure has been described with reference to preferred embodiments, the scope of the present disclosure is not limited to the structures described and illustrated above.

For example, although it is described above that the non-conductive resin layer 12 in the form of NCF is attached to the lower surface of the semiconductor wafer 13 and then stacked on the substrate 11, steps (a) and (b) are determined as the case may be. It can also be performed by attaching the NCF on a substrate and then placing the semiconductor wafer on the NCF.

In addition, step (a) can be performed by coating the substrate with a non-conductive resin layer in the form of NCP as described above. FIG. 5 is a cross-sectional view showing an operation in which the wafer-substrate element 60 is completed by coating a substrate 61 with a non-conductive paste as a non-conductive resin layer 62 and then stacking a semiconductor wafer 63 thereon, and The wafer-substrate element 60 is fixed by using the fixing member 100, and the fixing member 100 is lifted upward by using the lifting member 300. In this state, the solder bumps 611 of the substrate 61 and the solder bumps 631 of the semiconductor wafer 63 are bonded by using a laser beam.

In addition, although the wafer-substrate element 10 in which the solder bump 111 and the solder bump 131 are respectively formed on the lower surface of the semiconductor wafer 13 and the upper surface of the substrate 11 has been described as examples, the semiconductor wafer bonding apparatus and semiconductor of the present disclosure The wafer bonding method is also applicable to a wafer-substrate element in which a solder bump is formed only on a semiconductor wafer or only on a substrate and an electrode corresponding to the solder bump is formed on the other of the semiconductor wafer and the substrate. In this case, the solder bump penetrates the non-conductive resin layer to the corresponding electrode to be bonded.

In addition, although the semiconductor wafer 13 and the semiconductor wafer 63 are stacked in the form of a printed circuit board (PCB) or a flexible printed circuit board (FPCB) to be bonded, described above with reference to FIGS. 3 to 5. Examples on the substrate 11 and the substrate 61, but the semiconductor wafer bonding device and method according to the present disclosure can also be used to stack a semiconductor wafer 71 and a semiconductor wafer 73 manufactured as through-silicon vias (TSVs) on each other and adjacent semiconductors The wafer 71 and the adjacent semiconductor wafer 73 are bonded to each other. In this case, as shown in FIG. 6, the semiconductor wafer 73 at the uppermost position corresponds to the semiconductor wafer 13 of the wafer-substrate element 10 described above, and the above-mentioned semiconductor wafer 73 and the elements of the semiconductor wafer below the substrate The substrate 11 corresponds to the wafer-substrate element 10 described above. Meanwhile, the solder bump 711 and the solder bump 731 are bonded to each other by using a laser beam while pressing the wafer-substrate element 70 such that the solder bump 711 and the solder bump 731 penetrate the non-conductive resin layer 72 to each other contact.

In addition, although the lifting member 300 is described above to lift or lower the fixing member 100, the semiconductor wafer bonding apparatus may also be configured such that the lifting member raises or lowers the pressing member. In this case, step (d) is performed so that when the substrate is fixed to the fixing member, the lifting member lowers the pressing member to press the semiconductor wafer against the substrate.

In addition, although it is described above that all the wafer-substrate elements 10 are bonded by simultaneously or sequentially irradiating a laser beam thereon, all the wafer-substrate elements 10 are simultaneously pressurized by using the lifting member 300 to lift the fixing member 100. However, the semiconductor wafer bonding apparatus may also be configured such that the wafer-substrate elements are grouped into a plurality of groups and sequentially pressed by using a pressing member and then bonded by using a laser head. In this case, the semiconductor wafer bonding apparatus according to the present disclosure further includes a fixing unit transfer member that horizontally transfers the fixing member. According to the semiconductor wafer bonding apparatus configured as described above, the semiconductor wafer is bonded to the substrate by: repeatedly performing sequential transfer of the fixing members in a horizontal direction by using the fixing unit transfer member; and lifting the fixing member by using a lifting member Press with some of the groups of semiconductor wafers to be bonded; by using a pressing member; and then lower the fixing member.

In addition, although the pressing member 200 is described above as including the transparent portion 210 and the mask portion 220, a pressing member having no mask portion may also be used. In this case, the entire main portion of the pressing member may be formed of a transparent portion and used to press the plurality of wafer-substrate elements, and a laser beam may be irradiated to all of the plurality of wafer-substrate elements.

According to the semiconductor wafer bonding apparatus and the semiconductor wafer bonding method of the present disclosure, a semiconductor wafer can be quickly and accurately bonded to a substrate or another semiconductor wafer, thereby improving productivity.

It should be understood that the embodiments described herein should be considered only in a descriptive sense and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as available for other similar features or aspects in other embodiments.

Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that embodiments can be modified in form and without departing from the spirit and scope of the inventive concept as defined by the scope of the appended patent application. Various changes were made in the details.

10, 60, 70‧‧‧‧ Wafer-substrate components

11, 61‧‧‧ substrate

12, 62, 72‧‧‧ non-conductive resin layer

13, 63, 71, 73‧‧‧ semiconductor wafers

100‧‧‧Fixed parts

111, 131, 611, 631, 711, 731‧‧‧ solder bumps

200‧‧‧Pressing parts

210‧‧‧Transparent part

220‧‧‧ curtain

300‧‧‧Lifting parts

400‧‧‧laser head

500‧‧‧Head Transmission Unit

FIG. 1 is a conceptual diagram of a semiconductor wafer bonding apparatus according to an embodiment of the present disclosure. FIG. 2 is a plan view of a pressing member of the semiconductor wafer bonding apparatus shown in FIG. 1. 3 and 4 show examples of a wafer-substrate element bonded by using the semiconductor wafer bonding apparatus shown in FIG. 1. 5 and 6 each show another example of a wafer-substrate element bonded by using the semiconductor wafer bonding apparatus shown in FIG. 1.

Claims (9)

A semiconductor wafer bonding device includes a fixing member for fixing the lower surfaces of a plurality of wafer-substrate elements, in which a non-conductive resin layer and a semiconductor wafer are sequentially stacked on a substrate; a pressing member, Arranged above the fixing member, the pressing member includes a transparent portion penetrated by the laser beam; a lifting member for raising or lowering the fixing member and the lifting member relative to one of the fixing member and the pressing member; The other of the pressing members to press the semiconductor wafer of the plurality of wafer-substrate elements such that a solder bump of one of the semiconductor wafer and the substrate penetrates the non-conductive resin layer To electrically contact the other one of the semiconductor wafer and the substrate; and a laser head for irradiating the laser beam through the transparent portion of the pressing member by using the pressing member The wafer-substrate element under pressure to bond the semiconductor wafer and a solder bump of one of the substrates to the semiconductor wafer to And the other of the substrates, wherein the pressing member further includes a mask portion formed of an opaque material and supporting the transparent portion, wherein the transparent portion of the pressing member is disposed on In the regions respectively corresponding to the plurality of wafer-substrate elements, the mask portions are disposed in corresponding regions between the plurality of wafer-substrate elements. The semiconductor wafer bonding apparatus according to item 1 of the scope of patent application, wherein the laser head sequentially irradiates a laser beam to each of the plurality of wafer-substrate elements. The semiconductor wafer bonding apparatus according to item 1 of the scope of patent application, wherein the laser head simultaneously irradiates a laser beam to at least two of the plurality of wafer-substrate elements. The semiconductor wafer bonding apparatus according to item 2 of the patent application scope, further comprising a head transfer member for transferring the laser head. A semiconductor wafer bonding method includes: step a, forming a non-conductive resin layer on one of a lower surface of a semiconductor wafer and an upper surface of a substrate; and step b, placing the semiconductor wafer on the substrate to provide a plurality of A wafer-substrate element, in which the substrate, the non-conductive resin layer, and the semiconductor wafer are sequentially stacked; step c, by placing the plurality of wafer-substrate elements on a fixed substrate The plurality of wafer-substrate elements are fixed by using the fixing member; step d, one of the pressing member and the fixing member is brought close to the pressing member and the fixing member by using a lifting member. Another, the solder bump of one of the semiconductor wafer and the substrate penetrates the non-conductive resin layer to make electrical contact with the other of the semiconductor wafer and the substrate, wherein the pressing member is disposed Over the fixing member and including a transparent portion penetrated by the laser beam; and step e, by using the laser head to pass the laser beam through the The wafer-substrate element between the pressing member and the fixing member is pressed by pressing the transparent portion of the member to bond the semiconductor wafer and a solder bump of one of the substrates to the semiconductor The other of the wafer and the substrate, wherein step d is performed by using the pressing member including the transparent portion and the mask portion, the transparent portions being disposed on the wafer-substrate elements corresponding to the plurality of wafer-substrate elements, respectively And the mask portion is disposed in a corresponding region between the plurality of wafer-substrate elements, the mask portion is formed of an opaque material and supports the transparent portion. The semiconductor wafer bonding method according to item 5 of the scope of patent application, wherein step e is performed by sequentially irradiating a laser beam to each of the wafer-substrate elements by using the laser head. The method for bonding a semiconductor wafer according to item 5 of the scope of patent application, wherein step e is performed by simultaneously irradiating a laser beam to at least two of the wafer-substrate elements using the laser head. The method for bonding a semiconductor wafer according to item 5 of the scope of patent application, wherein step a is performed by stacking the non-conductive resin layer on the upper surface of the substrate while fixing the substrate to the fixing member. Performed, and wherein step b is performed by disposing each of a plurality of semiconductor wafers on the non-conductive resin layer on the substrate after completing step a, and wherein step c is performed by performing steps a and b To be done. The semiconductor wafer bonding method according to item 5 of the patent application scope, wherein step a is performed by attaching the non-conductive resin layer to the lower surface of the semiconductor wafer, and wherein step b is performed by applying The plurality of semiconductor wafers to which the non-conductive resin layer is attached in step a is disposed on the upper surface of the substrate while fixing the substrate to the fixing member, and wherein step c is performed by Perform steps a and b.