TWI679376B - Heat recovery device and plasma torch heat recovery equipment - Google Patents

Abstract

A heat recovery device and a plasma torch heat recovery device. The plasma torch heat recovery device includes a plasma torch device and a heat recovery device. The plasma torch device can combust gas before processing to generate processed gas. The heat recovery device includes a plasma source heat exchange unit and an exhaust gas heat exchange unit. The plasma source heat exchange unit surrounds the periphery of the plasma torch device, and receives the thermal energy transmitted by the plasma torch device to heat the gas before processing. The exhaust gas heat exchange unit can receive the thermal energy transferred from the processed gas to heat the pre-processed gas. The invention can recover the thermal energy generated by the combustion treatment of the plasma torch device, and heat the gas and the washing liquid before the treatment to reduce the burden of the plasma torch device through heat exchange.

Description

Heat recovery device and plasma torch heat recovery equipment

The invention relates to a plasma torch device, in particular to a heat recovery device and a plasma torch heat recovery device.

Generally, the industrial waste gas treatment means is carried out by a combustion method. The flame is heated and oxidized to crack the waste gas, thereby removing toxicity. The aforementioned combustion method can usually only deal with compounds with weak bonding force. For example, compounds with strong bonding force, such as perfluorocarbons, are difficult to be cracked only by the combustion method. Therefore, in order to process the aforementioned compounds with stronger bonding force, a higher energy cracking treatment method is usually used, such as a plasma torch.

Because the existing plasma torch device must provide sufficient voltage in order to generate the energy required to break the key, and in order to process a large amount of gas, sufficient current must be passed in, so that the plasma torch device must consume a large amount of power when burning However, the existing plasma torch device often does not make good use of the thermal energy generated during combustion, and it is discharged directly after the exhaust gas is cracked, which causes a lot of energy loss, which is a pity.

Therefore, an object of the present invention is to provide a heat recovery device capable of reducing energy consumption.

Therefore, the heat recovery device of the present invention is suitable for being installed in a plasma torch device and a gas-liquid washing device. The plasma torch device includes an electrode unit defining a central channel, and the electrode unit can The pre-treatment gas is subjected to combustion treatment to generate post-treatment gas, and is discharged from a channel outlet of the central channel. The heat recovery device includes a plasma source heat exchange unit and an exhaust gas heat exchange unit. The plasma source heat exchange unit defines a first air flow channel surrounding the electrode unit. The first air flow channel can be used to feed in the pre-treatment gas and receive the heat energy transmitted by the electrode unit to heat the pre-treatment gas. And communicates with the central channel so that the pre-treatment gas can flow into the central channel. The exhaust gas heat exchange unit defines a second airflow channel through which the pre-treatment gas can flow. The second airflow channel can receive the heat energy transmitted by the post-treatment gas to heat the pre-treatment gas and supply it to the first Airflow channel.

Therefore, another object of the present invention is to provide a plasma torch heat recovery device capable of reducing energy consumption.

Therefore, the plasma torch heat recovery device of the present invention includes a plasma torch device, a gas-liquid washing device, and a heat recovery device installed on the plasma torch device and the gas-liquid washing device. The plasma torch device includes an electrode unit that defines a central channel through which gas can flow before processing. The central channel has a channel outlet. The electrode unit can be driven to discharge in the central channel to generate an arc. A flame is formed and ejected from the outlet of the channel to perform a combustion treatment on the pre-treatment gas flowing into the central channel to generate a post-treatment gas. The gas-liquid washing device includes a housing seat defining a mixing space communicating with the outlet of the channel.

The effect of the present invention is that through the plasma source heat exchange unit and the tail gas heat exchange unit, the thermal energy generated by the combustion treatment of the plasma torch device can be recovered, and then the gas and washing liquid before the treatment are heated, thereby allowing the heat to pass The exchange mode reduces the load on the electrode unit to reduce energy consumption.

Referring to FIG. 1 and FIG. 2, an embodiment of a plasma torch heat recovery device according to the present invention includes a plasma torch device 1, a gas-liquid washing device 2, and a heat recovery device 3.

Referring to FIGS. 2, 3 and 4, the plasma torch device 1 includes an electrode unit 11, an air supply unit 12, and a cooling unit 13. The electrode unit 11 has a first electrode 14 and a second electrode 15 which are opposite to each other and spaced apart from each other, and a central channel 16 extending in a longitudinal direction along an axis L.

The first electrode 14 has a first base wall 141, a first tube wall 142 extending downward from the first base wall 141, and an extension tube wall 143 screwed to the bottom side of the first tube wall 142. The first base wall 141 has an inner ring portion 144 located in the middle, and an outer ring portion 145 extending radially from the inner ring portion 144. The first tube wall 142 has a plurality of central air inlets 146 extending radially around the axis L and adjacent to the first base wall 141. Of course, the first pipe wall 142 may have only one central air inlet 146, which is not limited to this embodiment. The second electrode 15 has a second base wall 151 and a second tube wall 152 extending upward from the second base wall 151. The material of the first electrode 14 and the second electrode 15 may be copper (Cu), hafnium (Hf), tungsten (W), zirconium (Zr), or an alloy of a combination thereof.

In practice, of course, the electrode unit 11 also has an excitation generator (not shown) that can apply pulsed high voltage or radio frequency high voltage to the first electrode 14 and the second electrode 15 to apply the first electrode 14 and the second electrode 15. An electrode 14 is positively charged with the first electrode, and a second electrode 15 is negatively charged. Then, the first electrode 14 and the second electrode 15 are driven through the excitation generator, so that the first electrode 14 and the second electrode 15 are discharged in the central channel 16, and the first electrode 14 and the first electrode 14 are discharged. An arc occurs between the two electrodes 15. As for the specific structure and working principle of the excitation generator, which is not the focus of the improvement of the present invention, it will not be described in detail.

The central channel 16 has a first base wall 141 penetrating the first electrode 14, a lower channel section 161 of the first tube wall 142 and the extension tube wall 143, and a second base wall penetrating the second electrode 15. The upper channel section 162 of the second tube wall 151 and the second tube wall 152 and a channel outlet 163 located at the bottom end of the extension tube wall 143 and a top port 164 opposite to the channel outlet 163 and located at the top of the second tube wall 152. In practice, the electrode unit 11 may further have a see-through member (not shown) mounted on the top port 164, thereby observing the arc condition in the central channel 16, and the material of the see-through member may be quartz glass or the like. .

The air supply unit 12 is installed in combination with the electrode unit 11 and can send working gas such as nitrogen or argon into the central channel 16. The air supply unit 12 has a first base wall 141 and a second base wall. The peripheral edge of 151 cooperates with the first base wall 141 and the second base wall 151 to surround a ring shell seat 121 that defines an air supply space 120, and a plurality of ring shell seats 121 are installed in combination with the ring shell seat 121 to separately send working gas. The air supply pipe 122 is inserted into the air supply space 120. The air supply space 120 is interposed between the lower channel section 161 and the upper channel section 162, and communicates with the lower channel section 161 and the upper channel section 162, so that the working gas is sent into the lower channel section 161 and the Upper channel segment 162. In practice, the ring shell seat 121 is made of an insulating material, and specifically, it can be Teflon (Polytetrafluoroethene (PTFE), Polyetheretherketone (PEEK), ceramic or quartz, etc.) without limitation.

The cooling unit 13 has a first cooling jacket 131 surrounding the first tube wall 142 and a second cooling jacket 132 surrounding the second tube wall 152. The first cooling jacket 131 surrounds the first electrode 14 and defines a first cooling space 133 for reducing the temperature of the first electrode 14. The second cooling jacket 132 surrounds the first electrode 14 and defines a second cooling space 134 to reduce the temperature of the second electrode 15.

In this embodiment, the cooling unit 13 is water-cooled, and cooling water is injected into the first cooling space 133 and the second cooling space 134 through a pump (not shown), thereby cooling the first electrode. 14 and the second electrode 15 generate high temperatures during arc discharge, and the heated cooling water is pumped away from the first cooling space 133 and the second cooling space 134 through the aforementioned pumps, respectively, so as to maintain continuous cooling. Water injection and hot water discharge. As for the aforementioned water pipe circuit design is not the focus of the present invention, it will not be described in detail. Of course, in terms of implementation, the means for cooling the first electrode 14 and the second electrode 15 is not limited to the examples described in this embodiment, but may also be cooled by gas or other media (such as oil), without limitation.

Referring to FIG. 2, FIG. 3 and FIG. 5, the gas-liquid washing device 2 has a housing base 21 installed below the first electrode 14 of the plasma torch device 1, and a housing base 21 surrounding the housing base 21 and communicating with the housing base 21. The mixing space 22 of the channel outlet 163, a plurality of water spray heads 23 capable of spraying water on the mixing space 22, a collecting bucket 24 for containing the washing liquid falling in the mixing space 22, and a water delivery mechanism 25. The water supply mechanism 25 can pump the washing liquid in the collecting bucket 24 to the water spray heads 23 through a pump, and the washing liquid is sprayed from the water spray heads 23, thereby recycling water resources to avoid waste.

The heat recovery device 3 includes a plasma source heat exchange unit 4 installed in the plasma torch device 1 and an exhaust gas heat exchange unit 5 installed in the gas-liquid washing device 2.

The plasma source heat exchange unit 4 has an air ring sleeve 41 sleeved on the periphery of the first tube wall 142, an air inlet tube 413 far from the first base wall 141, and a plurality of first air flow channels 414. The heat-conducting particles 42 used for conducting the thermal energy of the electrode unit 11, a liquid ring sleeve 43 sleeved around the extension tube wall 143, and a liquid inlet pipe 432.

The air ring sleeve 41 has a ring blocking wall 411 extending radially outward from the bottom end of the first pipe wall 142, and a ring blocking wall 411 extends upward from the periphery of the ring blocking wall 411 and abuts the outer ring portion 145 and A first surrounding wall 412 between the inner ring portions 144. The annular blocking wall 411, the first annular surrounding wall 412, the first tube wall 142 and the inner ring portion 144 cooperate to define a first airflow channel 414 surrounding the first tube wall 142. The air inlet pipe 413 communicates with the first air flow passage 414 and can send gas into the first air flow passage 414.

The thermally conductive particles 42 may be made of, for example, a ceramic material, which can effectively distribute the thermal energy of the first base wall 141 and the first tube wall 142 to the entire space of the first airflow channel 414, so that the flow passes through the first The gas in a gas flow channel 414 can be uniformly heated.

The liquid ring sleeve 43 has a second ring surrounding wall 431 extending downward from the periphery of the ring blocking wall 411 and a vapor outlet 433 adjacent to the passage outlet 163. The annular blocking wall 411, the second annular surrounding wall 431 and the extension pipe wall 143 cooperate to surround and define a first liquid circulation surrounding the extension pipe wall 143 and not communicating with the first air flow channel 414. Road 434. The liquid inlet pipe 432 is far from the channel outlet 163 and communicates with the first liquid flow channel 434, and the washing liquid can be sent into the first liquid flow channel 434. In addition, the plasma source heat exchange unit 4 may also have a plurality of liquid inlet pipes 432 or a plurality of air inlet pipes 413, which is not limited to this embodiment.

The exhaust gas heat exchange unit 5 has a heat-conducting gas pipe 51 spirally surrounding the housing base 21 and a heat-conducting liquid pipe 52 spirally surrounding the housing base 21. The heat-conducting gas pipe 51 is connected between a gas input source (not shown) and the air-intake pipe 413, and defines a second airflow channel 511 through which the gas before processing can flow. The thermally conductive liquid pipe 52 is connected between the water supply mechanism 25 and the liquid inlet pipe 432 and defines a second liquid flow channel 521 through which the washing liquid can flow. In fact, the thermally conductive gas pipe 51 and the thermally conductive liquid pipe 52 can be introduced into the spherical concave and convex wall structure, so that the gas flowing through the thermally conductive gas pipe 51 and the liquid flowing through the thermally conductive liquid pipe 52 are converted into turbulent flow, Increase the heat transfer effect, or use fins to increase the heat exchange area.

Referring to FIG. 1, FIG. 3, and FIG. 5, the plasma torch heat recovery device of the present invention, when in use, the first electrode 14 and the second electrode 15 of the plasma torch device 1 can be driven to generate electricity in the central channel 16. At the same time, the gas supply pipes 122 send working gas into the gas supply space 120 and flow into the central channel 16 for excitation to form a plasma.

Next, the pre-treatment gas flows from the second air flow channel 511 into the first air flow channel 414 through the air inlet pipe 413, and when the pre-treatment gas flows in the first air flow channel 414, it is subjected to the first base wall 141 and The heating of the first tube wall 142 flows into the central channel 16 through the central air inlets 146, and is decomposed into processed gas through high-temperature combustion of the arc. Due to the temperature of the first base wall 141 and the first tube wall 142, It is quite high, so when the pre-treatment gas passes through the first air flow channel 414, it can use the high-temperature thermal energy conducted by the first electrode 14 to be cracked in advance, and then enter the central channel 16 for the subsequent stage of combustion cracking. Increasing the gas processing capacity of the plasma torch device 1, in addition, the thermal energy transmitted to the first electrode 14 through combustion to pre-heat the pre-processing gas can also reduce the thermal energy required for the temperature of the pre-processing gas to increase, so as to reduce the electrode unit. 11 load while achieving power saving effect. Conversely, when the gas before the treatment enters the first air flow channel 414, it also takes away the thermal energy of the first base wall 141 and the first tube wall 142, and the first electrode 14 is cooled to slow down the temperature. The burden of the first electrode 14 not only enables the plasma torch device 1 to run stably for a long time, but also improves the service life and maintenance cycle of the first electrode 14.

Next, the treated gas is burned and dissociated in the central channel 16 at a high temperature, and then enters the mixing space 22 of the gas-liquid washing device 2 for water washing treatment. At this time, the washing liquid used for the water washing treatment flows from the second liquid flow channel 521 into the first liquid flow channel 434 through the liquid inlet pipe 432. When the washing liquid flows through the first liquid flow channel 434, it is subject to the The extension tube wall 143 is heated and boiled to evaporate into water vapor, and then flows into the mixing space 22 from the vapor outlet 433 to perform water washing treatment on the treated gas. The water vapor can be used to dissolve water-soluble gas and particles after combustion in the treated gas. Capturing and mixing, and then falling into the collection bucket 24, and since the activity of the gaseous washing solution is much greater than that of the liquid washing solution, the particles in the treated gas can be effectively adsorbed to improve the efficiency of the water washing treatment. Conversely, when the washing liquid enters the first liquid flow channel 434 and is vaporized, a large amount of thermal energy of the extension tube wall 143 is also taken away, and the first electrode 14 is cooled to slow down the first electrode. The burden of 14 can not only make the plasma torch device 1 run stably for a long time, but also improve the service life and maintenance cycle of the first electrode 14.

For example, when the gas before treatment is a fluorocarbon gas (such as CF4, C2F6, etc.), the fluorocarbon gas may be combusted and thermally cracked in the central channel 16 to generate hydrogen fluoride (HF) and carbon monoxide ( CO) or other particles treated gas. Then, the aforementioned product enters the gas-liquid washing device 2, and the hydrogen fluoride and the fine particles are mixed in water vapor to be cooled at the same time to achieve a water washing treatment.

When the processed gas is washed in the mixing space 22, residual heat will still be dissipated in the mixing space 22. At this time, the heat conducting gas pipe 51 and the heat conducting liquid pipe 52 of the exhaust gas heat exchange unit 5 will absorb the mixing space 22 Waste heat, the pre-treatment gas flowing in the second air flow channel 511 is preliminarily heated and then sent to the first air flow channel 414, and the washing liquid flowing in the second liquid flow channel 521 is preliminarily heated and then sent to the first air flow channel 521. A liquid flow channel 434, during implementation, the residual heat emitted by the treated gas can heat the pre-treated gas and the washing liquid to about 350 ° C. In this way, not only the processed gas in the mixed space 22 can be cooled down, but also the waste heat can be recovered to achieve the function of heat exchange.

It is worth mentioning that, because the exhaust gas heat exchange unit 5 has effectively washed the treated gas through water vapor, the number of the water spray heads 23 and the amount of water sprayed can be greatly reduced, and the water supply mechanism can be reduced. 25 pumps to reduce power consumption. In addition, the electrode unit 11 is also cooled by the plasma source heat exchange unit 4, so the amount of circulating water supplied by the cooling unit 13 to the first cooling space 133 can also be reduced, and the pumped water volume of the cooling unit 13 can be reduced. To reduce power consumption.

It is added that, in this embodiment, the plasma source heat exchange unit 4 is only installed on the first electrode 14, but it can also be installed on the second electrode 15 in practice, or the first electrode 14 and the first electrode 14 are simultaneously installed. The two electrodes 15 are used for reducing the temperature of the first electrode 14 and the second electrode 15 at the same time, which is not limited to this embodiment.

In summary, the plasma torch heat recovery device of the present invention can recover the thermal energy generated by the combustion treatment of the plasma torch device 1 through the plasma source heat exchange unit 4 and the exhaust gas heat exchange unit 5, and then heat treatment. The front gas and the washing liquid can reduce the load of the electrode unit 11 through heat exchange, and increase the gas processing capacity of the plasma torch device 1 to reduce the load of the electrode unit 11 and effectively transfer the thermal energy. Recycling, in this way, can reduce the operating cost and energy consumption of the plasma torch heat recovery equipment, so it can indeed achieve the purpose of cost invention.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited in this way, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the content of the patent specification of the present invention are still Within the scope of the invention patent.

1‧‧‧ Plasma Torch Device

11‧‧‧ electrode unit

12‧‧‧Air supply unit

120‧‧‧Aspirating space

121‧‧‧ Ring Shell

122‧‧‧Air pipe

13‧‧‧cooling unit

131‧‧‧The first cooling jacket

132‧‧‧Second cooling jacket

133‧‧‧First cooling space

134‧‧‧Second cooling space

14‧‧‧first electrode

141‧‧‧First base wall

142‧‧‧The first tube wall

143‧‧‧Extension tube wall

144‧‧‧Inner Ring Department

145‧‧‧Outer Ring Department

146‧‧‧Central air inlet

15‧‧‧Second electrode

151‧‧‧Second base wall

152‧‧‧Second pipe wall

16‧‧‧ Central Channel

161‧‧‧ lower passage

162‧‧‧Upper section

163‧‧‧Channel exit

164‧‧‧Top port

2‧‧‧Gas-liquid washing device

21‧‧‧ Housing

22‧‧‧ Mixed Space

23‧‧‧Sprinkler

24‧‧‧ collection bucket

25‧‧‧Water delivery agency

3‧‧‧heat recovery device

4‧‧‧ Plasma source heat exchange unit

41‧‧‧air ring sleeve

411‧‧‧Ring retaining wall

412‧‧‧The first ring wall

413‧‧‧Air inlet pipe

414‧‧‧first air channel

42‧‧‧Conductive particles

43‧‧‧Liquid ring sleeve

431‧‧‧Second Ring Surrounding Wall

432‧‧‧Inlet pipe

433‧‧‧Steam outlet

434‧‧‧First liquid flow channel

5‧‧‧ tail gas heat exchange unit

51‧‧‧Conductive air pipe

511‧‧‧second air flow channel

52‧‧‧Heat conduction liquid tube

521‧‧‧Second liquid flow channel

L‧‧‧ axis

Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a functional block diagram showing the system architecture of an embodiment of the plasma torch heat recovery device of the present invention; FIG. 2 Is a side view illustrating the embodiment; FIG. 3 is an incomplete cross-sectional view illustrating the structure of a plasma torch device and a plasma source heat exchange unit of the embodiment; FIG. 4 is a view along FIG. 3 A cross-sectional view taken along line 4-4; and FIG. 5 is an incomplete cross-sectional view illustrating the structure of a gas-liquid washing device and an exhaust gas heat exchange unit in this embodiment.

Claims (8)

A heat recovery device is suitable for being installed in a plasma torch device and a gas-liquid washing device. The plasma torch device includes an electrode unit defining a central channel, and the electrode unit can use the pre-treatment gas in the central channel. Combustion treatment generates processed gas and is discharged from a channel outlet of the central channel. The heat recovery device includes a plasma source heat exchange unit defining a first air flow channel surrounding the electrode unit. The first air flow channel can be used to send in the pre-treatment gas, and receive the heat energy transmitted by the electrode unit to heat the pre-treatment gas, and communicate with the central channel so that the pre-treatment gas can flow into the central channel; and an exhaust gas heat exchange A unit defining a second air flow channel in which the pre-processing gas can flow, and the second air flow channel can receive the heat energy transmitted by the post-processing gas to heat the pre-processing gas and supply it to the first air flow channel; Wherein, the plasma source heat exchange unit includes a plurality of filled in the first air flow channel and used to conduct the electrode unit. Heat thermally conductive particles. The heat recovery device according to claim 1, the gas-liquid washing device includes a housing base defining a mixing space communicating with the outlet of the channel, wherein the plasma source heat exchange unit further defines a surrounding the electrode unit A first liquid flow channel around the first liquid flow channel, the first liquid flow channel can be used for feeding washing liquid, and receives the heat energy transmitted from the electrode unit to heat the washing liquid to boil to generate steam, and communicates with the mixing space for steam spray Into the mixing space to perform water washing treatment on the treated gas. The heat recovery device according to claim 2, wherein the exhaust gas heat exchange unit further defines a second liquid flow channel through which the washing liquid can flow, and the second air flow channel can receive the processed air in the mixed space. The heat energy transferred from the gas heats the washing liquid and is supplied to the first liquid flow channel, and the second gas flow channel receives the heat energy transferred from the processed gas in the mixing space. The heat recovery device according to claim 3, wherein the exhaust gas heat exchange unit includes a heat conducting gas pipe spirally surrounding the housing seat and defining the second air flow channel, and a spiral surrounding the housing seat A thermally conductive liquid tube defining the second liquid flow channel is defined. A plasma torch heat recovery device includes: a plasma torch device, including an electrode unit, the electrode unit defining a central channel through which gas before processing can flow in, the central channel having a channel outlet, and the electrode unit can be Driven to generate an arc in the central channel by discharging, and forming a flame, which is ejected from the outlet of the channel to burn the pre-processing gas flowing into the central channel to generate a processed gas; a gas-liquid washing device includes a defined An outer shell seat communicating with the mixing space of the outlet of the passage; and a heat recovery device according to any one of claims 1 to 4 installed on the plasma torch device and the gas-liquid washing device; wherein the electrode unit A first electrode and a second electrode are sequentially arranged along the central channel. The first electrode has a first base wall and a first tube extending from the first base wall in a direction away from the second electrode. Wall, the first base wall has an inner ring portion surrounding the central channel, and an outer ring portion extending radially from the inner ring portion. Source heat exchange unit having a sleeve disposed around the first wall and cooperating with the inner ring and the first wall portion defines a first gas flow passage of the air collar. The plasma torch heat recovery device according to claim 5, wherein the plasma torch device further includes a cooling unit having a first cooling jacket surrounding the air ring jacket, the first cooling jacket The outer ring portion cooperates with the air ring sleeve to define a first cooling space for reducing the temperature of the outer ring portion. The plasma torch heat recovery device according to claim 6, wherein the plasma source heat exchange unit further has an air inlet pipe that communicates with the first air flow channel and can send pre-treatment gas into the first air flow channel, The first tube wall has a plurality of central air inlets that communicate with the first airflow channel and the central channel and can send gas into the central channel. The air inlet tube is far from the first base wall and the central air inlets. Adjacent to the first base wall. The plasma torch heat recovery device according to claim 7, wherein the first electrode further has an extended tube wall connected to one side of the first tube wall away from the first base wall, and the plasma source heat exchange The unit also includes a liquid ring sleeve which is sleeved on the extension pipe wall and cooperates with the extension pipe wall to define the first liquid flow channel. The plasma source heat exchange unit also has a communication tube connected to the first liquid flow channel. The washing liquid can be sent to a liquid inlet pipe of the first liquid flow channel. The liquid ring sleeve has a vapor outlet for steam to be ejected. The liquid inlet pipe is far from the channel outlet, and the vapor outlet is adjacent to the channel outlet.