TWI675885B - Polyimine film for graphite sheet and manufacturing method thereof - Google Patents

Polyimine film for graphite sheet and manufacturing method thereof Download PDF

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TWI675885B
TWI675885B TW104122213A TW104122213A TWI675885B TW I675885 B TWI675885 B TW I675885B TW 104122213 A TW104122213 A TW 104122213A TW 104122213 A TW104122213 A TW 104122213A TW I675885 B TWI675885 B TW I675885B
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polyimide film
inorganic particles
film
graphite sheet
phenylenediamine
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TW201609970A (en
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戶井田紀子
Noriko TOIDA
澤崎孔一
Kouichi Sawasaki
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日商東麗 杜邦股份有限公司
Du Pont-Toray Co., Ltd.
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003Preparatory processes
    • C08G73/1007Preparatory processes from tetracarboxylic acids or derivatives and diamines
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
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    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
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    • C08K3/00Use of inorganic substances as compounding ingredients
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Abstract

本發明提供一種聚醯亞胺膜,其於藉由熱處理進行石墨化時膜之發泡良好,且已石墨化之片材具有優異之導熱性、柔軟性及耐彎曲性。 The invention provides a polyimide film, which foams well when graphitized by heat treatment, and the graphitized sheet has excellent thermal conductivity, softness, and bending resistance.

本發明係一種聚醯亞胺膜,其線膨脹係數為20ppm/℃以下,其特徵在於:其係將對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐包含於原料中製造而成並且分散有無機粒子者,且將該聚醯亞胺膜於2000℃以上之溫度下進行熱處理而製造石墨片。 The present invention is a polyfluorene imide film with a linear expansion coefficient of 20 ppm / ° C. or less, and is characterized in that it uses p-phenylenediamine or p-phenylenediamine with 4,4'-diaminodiphenyl ether, And one or more types of acid anhydrides selected from the group consisting of pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride are contained in raw materials and are dispersed with inorganic particles And heat treating the polyfluoreneimide film at a temperature of 2000 ° C. or higher to produce a graphite sheet.

Description

石墨片用聚醯亞胺膜及其製造方法 Polyimide film for graphite sheet and manufacturing method thereof

本發明係關於一種用於製造以電導體或熱導體之形式用作散熱材、均熱材之具有柔軟性及耐彎曲性之石墨片的聚醯亞胺膜及其製造方法。 The present invention relates to a polyimide film for manufacturing graphite sheets having flexibility and bending resistance, which are used as heat dissipating materials and soaking materials in the form of electrical or thermal conductors, and a method for manufacturing the same.

已知聚醯亞胺膜於耐熱性、耐寒性、耐化學品性、電氣絕緣性及機械強度等方面具有優異之特性,其廣泛利用於電線之電氣絕緣材料、隔熱材、軟性印刷配線基板(FPC)之基底膜、IC(Integrated Circuit,積體電路)之捲帶式自動接合(TAB)用之載帶膜、及IC之引線框架固定用膠帶等。 Polyimide film is known to have excellent characteristics in terms of heat resistance, cold resistance, chemical resistance, electrical insulation, and mechanical strength. It is widely used in electrical insulation materials, heat insulation materials, and flexible printed wiring boards for electric wires. (FPC) base film, IC (Integrated Circuit) tape carrier tape (TAB) carrier film, and IC lead frame fixing tape.

聚醯亞胺膜於用於該等用途時,重要之實用特性為膜之滑動性(易滑性)。藉由於各種膜加工步驟中確保膜支持體(例如,輥)與膜之易滑性、以及膜彼此之易滑性,可使各步驟之操作性、處理性提昇,進而避免於膜上產生皺褶等不良部位。 When a polyimide film is used in such applications, an important practical characteristic is the sliding property (easy sliding property) of the film. By ensuring the slippage of the film support (for example, a roller) and the film and the slippage of the film with each other in various film processing steps, the operability and handling of each step can be improved, thereby avoiding the occurrence of wrinkles on the film Bad spots such as folds.

先前之聚醯亞胺膜之易滑化技術已知有將惰性無機化合物(例如,鹼土金屬之正磷酸鹽、無水磷酸氫鈣、焦磷酸鈣、二氧化矽、滑石)添加於聚醯胺酸中之方法(參照專利文獻1)。 Prior slip technology for polyimide films has been known to add inert inorganic compounds (e.g., orthophosphate of alkaline earth metals, anhydrous calcium hydrogen phosphate, calcium pyrophosphate, silicon dioxide, talc) to polyamic acid (See Patent Document 1).

又,關於將聚醯亞胺膜於惰性氣體中且於2400℃以上之溫度下進行熱處理並視需要進行壓延而獲得之石墨片,已知藉由進行高溫熱處理而製作出均勻發泡狀態,並對其進行壓延處理,藉此可獲得具有柔軟性及彈性之可撓性之石墨片(參照專利文獻2及3)。石墨片由於具 有高於銅或鋁等金屬片之熱導率,故而近年來作為電子機器之散熱構件受到關注。 In addition, as for a graphite sheet obtained by subjecting a polyimide film to an inert gas and heat-treating it at a temperature of 2400 ° C or higher and rolling as necessary, it is known that a uniformly foamed state is produced by performing high-temperature heat treatment, and This is calendered to obtain a flexible graphite sheet having flexibility and elasticity (see Patent Documents 2 and 3). Graphite sheet due to It has higher thermal conductivity than metal sheets such as copper or aluminum, so it has attracted attention as a heat dissipation member of electronic equipment in recent years.

已知:為將聚醯亞胺等高分子化合物進行石墨化,較佳為添加無機質或有機質之填料(參照專利文獻3及專利文獻4)。填料之作用在於將熱處理後之膜設為均勻發泡之狀態。即,所添加之填料於加熱中產生氣體,產生該氣體之後之空洞成為通路,幫助分解氣體自膜內部平穩地通過。填料以此方式對製造均勻發泡狀態起作用。 It is known that in order to graphitize a polymer compound such as polyimide, it is preferable to add an inorganic or organic filler (see Patent Document 3 and Patent Document 4). The function of the filler is to make the film after heat treatment uniformly foamed. That is, the added filler generates a gas during heating, and the cavity after the generation of the gas becomes a path, helping the decomposition gas to pass smoothly from the inside of the membrane. The filler works in this way to produce a uniform foamed state.

作為控制該發泡之程度之方法,已知有控制石墨化時之升溫速度之方法(參照專利文獻5)。 As a method of controlling the degree of this foaming, a method of controlling the temperature increase rate during graphitization is known (see Patent Document 5).

然而,僅控制石墨化時之升溫速度,有膜之發泡之程度不充分之情況,從而有所獲得之石墨片之導熱性、柔軟性、耐彎曲性作為電子機器之散熱構件不充分之情況。 However, only by controlling the rate of temperature increase during graphitization, the degree of foaming of the film may be insufficient, so that the thermal conductivity, flexibility, and bending resistance of the obtained graphite sheet may be insufficient as a heat dissipation member of an electronic device. .

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開昭62-68852號公報 [Patent Document 1] Japanese Patent Laid-Open No. 62-68852

[專利文獻2]日本專利特開平3-75211號公報 [Patent Document 2] Japanese Patent Laid-Open No. 3-75211

[專利文獻3]日本專利特開平4-21508號公報 [Patent Document 3] Japanese Patent Laid-Open No. 4-21508

[專利文獻4]日本專利特開平8-267647號公報 [Patent Document 4] Japanese Patent Laid-Open No. 8-267647

[專利文獻5]日本專利特開2008-024571號公報 [Patent Document 5] Japanese Patent Laid-Open No. 2008-024571

鑒於上述現狀,本發明之目的在於提供一種聚醯亞胺膜,其無機粒子之量、分散得到適當控制,於藉由熱處理進行石墨化時膜之發泡良好,且已石墨化之片材具有優異之導熱性、柔軟性及耐彎曲性。 In view of the above-mentioned current situation, an object of the present invention is to provide a polyimide film in which the amount and dispersion of inorganic particles are appropriately controlled, the film foams well when graphitized by heat treatment, and the graphitized sheet has Excellent thermal conductivity, flexibility and bending resistance.

本發明者等人為解決上述問題,反覆進行努力研究,結果發 現,線膨脹係數為20ppm/℃以下、將對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐包含於原料中製造而成、且分散有無機粒子之聚醯亞胺膜於2000℃以上之溫度下進行熱處理而進行石墨化時之發泡良好,且藉由該熱處理而獲得之石墨片之導熱性、柔軟性及耐彎曲性優異,基於該見解進一步推進研究,從而完成本發明。 The present inventors and others made diligent efforts to solve the above problems, and the results were At present, the linear expansion coefficient is 20 ppm / ° C or lower, p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether, and selected from pyromellitic dianhydride and 3,3 ', One or more types of acid anhydrides in a group consisting of 4,4'-biphenyltetracarboxylic dianhydride are contained in raw materials, and the polyimide film in which inorganic particles are dispersed is heat-treated at a temperature of 2000 ° C or higher The graphitization has good foaming, and the graphite sheet obtained by the heat treatment has excellent thermal conductivity, softness, and bending resistance. Based on this knowledge, research is further advanced to complete the present invention.

本發明係關於以下發明。 The present invention relates to the following inventions.

[1]一種聚醯亞胺膜,其線膨脹係數為20ppm/℃以下,其特徵在於:其係將對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐包含於原料中製造而成並且分散有無機粒子者,且將該聚醯亞胺膜於2000℃以上之溫度下進行熱處理而製造石墨片。 [1] A polyimide film having a linear expansion coefficient of 20 ppm / ° C. or less, characterized in that it comprises p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether, And one or more types of acid anhydrides selected from the group consisting of pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride are contained in raw materials and are dispersed with inorganic particles And heat treating the polyfluoreneimide film at a temperature of 2000 ° C. or higher to produce a graphite sheet.

[2]如上述[1]記載之聚醯亞胺膜,其特徵在於:以相對於膜樹脂每1重量為0.03~1.00重量%之比率含有無機粒子。 [2] The polyfluorene imide film according to the above [1], characterized in that it contains inorganic particles in a ratio of 0.03 to 1.00% by weight based on 1 weight of the film resin.

[3]如上述[1]或[2]記載之聚醯亞胺膜,其特徵在於:無機粒子之平均粒徑為0.1~2.0μm。 [3] The polyimide film according to the above [1] or [2], wherein the average particle diameter of the inorganic particles is 0.1 to 2.0 μm.

[4]如上述[1]至[3]中任一項記載之聚醯亞胺膜,其特徵在於:粒徑為0.5~2.5μm之無機粒子相對於全部無機粒子占80體積%以上之比率。 [4] The polyimide film according to any one of the above [1] to [3], characterized in that the ratio of the inorganic particles having a particle diameter of 0.5 to 2.5 μm to 80% by volume of the entire inorganic particles .

[5]如上述[1]至[4]中任一項記載之聚醯亞胺膜,其特徵在於:無機粒子以磷酸氫鈣為主成分。 [5] The polyimide film according to any one of the above [1] to [4], wherein the inorganic particles include calcium hydrogen phosphate as a main component.

[6]如上述[1]至[5]中任一項記載之聚醯亞胺膜,其特徵在於:對苯二胺與4,4'-二胺基二苯基醚之莫耳比為40/60~10/90。 [6] The polyfluoreneimide film according to any one of the above [1] to [5], characterized in that the molar ratio of p-phenylenediamine to 4,4'-diaminodiphenyl ether is 40/60 ~ 10/90.

[7]如上述[1]至[5]中任一項記載之聚醯亞胺膜,其特徵在於:均苯四甲酸二酐與3,3',4,4'-聯苯四羧酸二酐之莫耳比為80/20~60/40。 [7] The polyimide film according to any one of the above [1] to [5], characterized in that pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic acid The molar ratio of dianhydride is 80/20 ~ 60/40.

[8]一種如上述[1]至[7]中任一項記載之聚醯亞胺膜之製造方法, 其特徵在於:於使對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐於極性有機溶劑中進行反應而製造聚醯胺酸,並對上述聚醯胺酸進行加熱而成形為膜時,使平均粒徑為0.1~2.0μm並且具有粒徑為0.5~2.5μm之無機粒子占全部粒子中80體積%以上之比率之粒度分佈的無機粒子分散於與上述極性有機溶劑相同之極性有機溶劑中,將如此所得之漿料以於上述聚醯胺酸溶液中上述無機粒子成為相對於樹脂每1重量為0.03~1.00重量%之比率之方式添加於聚醯胺酸中。 [8] A method for producing a polyimide film according to any one of the above [1] to [7], It is characterized in that p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether are selected from the group consisting of pyromellitic dianhydride and 3,3 ', 4,4'-diamine. When one or more types of acid anhydrides in a group consisting of pyromellitic dianhydride are reacted in a polar organic solvent to produce a polyamic acid, and the polyamino acid is heated to form a film, the average particle diameter is Inorganic particles having a particle size distribution of 0.1 to 2.0 μm and having a particle size distribution of inorganic particles having a particle size of 0.5 to 2.5 μm occupying 80% by volume or more of all particles are dispersed in the same polar organic solvent as the above-mentioned polar organic solvent. The slurry is added to the polyamine so that the inorganic particles in the polyamino acid solution become a ratio of 0.03 to 1.00% by weight based on 1 weight of the resin.

[9]一種石墨片,其特徵在於:其係將如上述[1]至[7]中任一項記載之聚醯亞胺膜進行煅燒而獲得。 [9] A graphite sheet, which is obtained by firing the polyimide film according to any one of the above [1] to [7].

[10]一種石墨片之製造方法,其特徵在於:其係對如上述[1]至[7]中任一項記載之聚醯亞胺膜進行煅燒。 [10] A method for producing a graphite sheet, which is characterized in that the polyimide film described in any one of [1] to [7] above is calcined.

本發明之聚醯亞胺膜於藉由熱處理進行石墨化時之發泡良好,對本發明之聚醯亞胺膜進行熱處理而製造之石墨片具有優異之導熱性、柔軟性及耐彎曲性。 The polyimide film of the present invention foams well when graphitized by heat treatment, and the graphite sheet produced by heat treatment of the polyimide film of the present invention has excellent thermal conductivity, softness, and bending resistance.

以下,進一步詳細說明本發明。 Hereinafter, the present invention will be described in more detail.

本發明之聚醯亞胺膜係線膨脹係數為20ppm/℃以下、將對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐包含於原料中製造而成、且分散有無機粒子者,其特徵在於:將該聚醯亞胺膜於2000℃以上之溫度下進行熱處理而製造石墨片。 The polyimide film system of the present invention has a linear expansion coefficient of 20 ppm / ° C or lower, selected from p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether, and is selected from the group consisting of An acid anhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, in which one or more types of acid anhydrides are contained in raw materials and are dispersed with inorganic particles, are characterized in that: The polyimide film is heat-treated at a temperature of 2000 ° C. or higher to produce a graphite sheet.

[聚醯胺酸] [Polyamic acid]

於獲得本發明之聚醯亞胺膜時,首先,藉由使芳香族二胺成分及芳香族酸酐成分於有機溶劑中進行聚合,而獲得聚醯胺酸溶液(以下,亦稱為聚醯胺酸溶液)。以下,對聚醯胺酸溶液進行說明。 When the polyimide film of the present invention is obtained, first, an aromatic diamine component and an aromatic acid anhydride component are polymerized in an organic solvent to obtain a polyamidic acid solution (hereinafter, also referred to as polyamidoamine). Acid solution). The polyamine solution is described below.

於本發明中,聚醯胺酸溶液可藉由使原料之芳香族二胺成分與芳香族酸二酐成分或以此兩者為主成分之化學物質於有機溶劑中進行聚合而獲得。 In the present invention, the polyamic acid solution can be obtained by polymerizing a chemical substance having an aromatic diamine component and an aromatic acid dianhydride component or both as a main component in an organic solvent.

作為芳香族二胺成分,較佳為包含對苯二胺作為必需成分,且包含4,4'-二胺基二苯基醚作為其他芳香族二胺成分。 As the aromatic diamine component, it is preferable to include p-phenylenediamine as an essential component, and to include 4,4'-diaminodiphenyl ether as another aromatic diamine component.

作為芳香族酐成分,較佳為均苯四甲酸二酐及/或3,3',4,4'-聯苯四羧酸二酐。 The aromatic anhydride component is preferably pyromellitic dianhydride and / or 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride.

於本發明中,用作膜之原料之對苯二胺與4,4'-二胺基二苯基醚之莫耳比較佳為40/60~10/90,更佳為30/70~15/85。 In the present invention, the moles of p-phenylenediamine and 4,4'-diaminodiphenyl ether used as raw materials of the film are preferably 40/60 ~ 10/90, and more preferably 30/70 ~ 15 / 85.

於本發明中,用作膜之原料之均苯四甲酸二酐與3,3',4,4'-聯苯四羧酸二酐之莫耳比較佳為80/20~60/40,更佳為75/25~65/35。 In the present invention, the molar ratio of pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride used as the raw materials of the film is preferably 80/20 ~ 60/40, more It is preferably 75/25 ~ 65/35.

於本發明中,除對苯二胺及4,4'-二胺基二苯基醚以外,亦可於不妨礙本發明之效果之範圍內添加1種或2種以上之少量其他二胺。又,除均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐以外,亦可於不妨礙本發明之效果之範圍內添加1種或2種以上之少量其他酸二酐。作為具體之其他二胺及酸二酐,可列舉以下者,但並不限定於該等。 In the present invention, in addition to p-phenylenediamine and 4,4'-diaminodiphenyl ether, a small amount of one or two or more other diamines may be added within a range that does not prevent the effect of the present invention. Furthermore, in addition to pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, a small amount of one or two or more kinds may be added within a range not hindering the effect of the present invention. Other acid dianhydrides. Specific examples of other diamines and acid dianhydrides include the following, but they are not limited thereto.

作為上述其他二胺,可列舉:3,3'-二胺基二苯基醚、間苯二胺、4,4'-二胺基二苯基丙烷、3,4'-二胺基二苯基丙烷、3,3'-二胺基二苯基丙烷、4,4'-二胺基二苯基甲烷、3,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基甲烷、聯苯胺、4,4'-二胺基二苯基硫醚、3,4'-二胺基二苯基硫醚、3,3'-二胺基二苯基硫醚、4,4'-二胺基二苯基碸、3,4'-二胺基二苯基碸、3,3'-二胺基二苯基碸、2,6-二胺基吡啶、雙-(4-胺基苯基)二乙 基矽烷、3,3'-二氯聯苯胺、雙-(4-胺基苯基)乙基氧化膦、雙-(4-胺基苯基)苯基氧化膦、雙-(4-胺基苯基)-N-苯基胺、雙-(4-胺基苯基)-N-甲基胺、1,5-二胺基萘、3,3'-二甲基-4,4'-二胺基聯苯、3,4'-二甲基-3',4-二胺基聯苯基-3,3'-二甲氧基聯苯胺、2,4-雙(對β-胺基-第三丁基苯基)醚、雙(對β-胺基-第三丁基苯基)醚、對雙(2-甲基-4-胺基戊基)苯、對雙-(1,1-二甲基-5-胺基戊基)苯、間苯二甲胺、對苯二甲胺、1,3-二胺基金剛烷、3,3'-二胺基-1,1'-二胺基金剛烷、3,3'-二胺基甲基-1,1'-二金剛烷、雙(對胺基環己基)甲烷、六亞甲基二胺、七亞甲基二胺、八亞甲基二胺、九亞甲基二胺、十亞甲基二胺、3-甲基七亞甲基二胺、4,4'-二甲基七亞甲基二胺、2,11-二胺基十二烷、1,2-雙(3-胺基丙氧基)乙烷、2,2-二甲基伸丙基二胺、3-甲氧基六伸乙基二胺、2,5-二甲基六亞甲基二胺、2,5-二甲基七亞甲基二胺、5-甲基九亞甲基二胺、1,4-二胺基環己烷、1,12-二胺基十八烷、2,5-二胺基-1,3,4-

Figure TWI675885B_D0001
二唑、2,2-雙(4-胺基苯基)六氟丙烷、N-(3-胺基苯基)-4-胺基苯甲醯胺、4-胺基苯基-3-胺基苯甲酸酯等。 Examples of the other diamines include 3,3'-diaminodiphenyl ether, m-phenylenediamine, 4,4'-diaminodiphenylpropane, and 3,4'-diaminodiphenyl. Propane, 3,3'-diaminodiphenylpropane, 4,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 3,3'-diamine Diphenylmethane, benzidine, 4,4'-diaminodiphenylsulfide, 3,4'-diaminodiphenylsulfide, 3,3'-diaminodiphenylsulfide, 4,4'-diaminodiphenylphosphonium, 3,4'-diaminodiphenylphosphonium, 3,3'-diaminodiphenylphosphonium, 2,6-diaminopyridine, bis- (4-aminophenyl) diethylsilane, 3,3'-dichlorobenzidine, bis- (4-aminophenyl) ethylphosphine oxide, bis- (4-aminophenyl) phenyl Phosphine oxide, bis- (4-aminophenyl) -N-phenylamine, bis- (4-aminophenyl) -N-methylamine, 1,5-diaminonaphthalene, 3,3 '-Dimethyl-4,4'-diaminobiphenyl,3,4'-dimethyl-3',4-diaminobiphenyl-3,3'-dimethoxybenzidine, 2 4-bis (p-β-amino-third butylphenyl) ether, bis (p-β-amino-third butylphenyl) ether, p-bis (2-methyl-4-aminopentyl) Phenyl) benzene, p-bis- (1,1-dimethyl-5-aminopentyl) benzene, m-benzene Methylamine, p-xylylenediamine, 1,3-diamine fund adamantane, 3,3'-diamino-1,1'-diamine fund adamantane, 3,3'-diaminomethyl- 1,1'-Diadamantane, bis (p-aminocyclohexyl) methane, hexamethylenediamine, heptamethylenediamine, octamethylenediamine, nonamethylenediamine, decamethylene Diamine, 3-methylheptamethylenediamine, 4,4'-dimethylheptamethylenediamine, 2,11-diaminododecane, 1,2-bis (3-amine Propylpropoxy) ethane, 2,2-dimethylpropanediamine, 3-methoxyhexamethylenediamine, 2,5-dimethylhexamethylenediamine, 2,5 -Dimethylheptamethylene diamine, 5-methyl nonamethylene diamine, 1,4-diaminocyclohexane, 1,12-diaminooctadecane, 2,5-diamine Base-1,3,4-
Figure TWI675885B_D0001
Diazole, 2,2-bis (4-aminophenyl) hexafluoropropane, N- (3-aminophenyl) -4-aminobenzamide, 4-aminophenyl-3-amine Benzoate.

作為上述其他酸二酐,可列舉:2,3',3,4'-聯苯基四羧酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐、2,3,6,7-萘二甲酸二酐、2,2-雙(3,4-二羧基苯基)醚、吡啶-2,3,5,6-四羧酸二酐、1,2,4,5-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、1,4,5,8-十氫萘四羧酸二酐、4,8-二甲基-1,2,5,6-六氫萘四羧酸二酐、2,6-二氯-1,4,5,8-萘四羧酸二酐、2,7-二氯-1,4,5,8-萘四羧酸二酐、2,3,6,7-四氯-1,4,5,8-萘四羧酸二酐、1,8,9,10-菲四羧酸二酐、2,2-雙(2,3-二羧基苯基)丙烷二酐、1,1-雙(3,4-二羧基苯基)乙烷二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐、雙(2,3-二羧基苯基)甲烷二酐、雙(3,4-二羧基苯基)甲烷二酐、雙(3,4-二羧基苯基)碸二酐、苯-1,2,3,4-四羧酸二酐、3,4,3',4'-二苯甲酮四羧酸二酐等。 Examples of the other acid dianhydride include 2,3 ', 3,4'-biphenyltetracarboxylic dianhydride, 3,3', 4,4'-benzophenonetetracarboxylic dianhydride, 2 , 3,6,7-naphthalenedicarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) ether, pyridine-2,3,5,6-tetracarboxylic dianhydride, 1,2, 4,5-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 1,4,5,8-decahydronaphthalenetetracarboxylic dianhydride, 4,8-dimethyl -1,2,5,6-hexahydronaphthalenetetracarboxylic dianhydride, 2,6-dichloro-1,4,5,8-naphthalenetetracarboxylic dianhydride, 2,7-dichloro-1,4 , 5,8-naphthalenetetracarboxylic dianhydride, 2,3,6,7-tetrachloro-1,4,5,8-naphthalenetetracarboxylic dianhydride, 1,8,9,10-phenanthrenetetracarboxylic acid Dianhydride, 2,2-bis (2,3-dicarboxyphenyl) propane dianhydride, 1,1-bis (3,4-dicarboxyphenyl) ethane dianhydride, 1,1-bis (2, 3-dicarboxyphenyl) ethane dianhydride, bis (2,3-dicarboxyphenyl) methane dianhydride, bis (3,4-dicarboxyphenyl) methane dianhydride, bis (3,4-dicarboxyl Phenyl) fluorene dianhydride, benzene-1,2,3,4-tetracarboxylic dianhydride, 3,4,3 ', 4'-benzophenone tetracarboxylic dianhydride, and the like.

又,於本發明中,作為形成聚醯胺酸溶液所使用之有機溶劑之 具體例,例如可列舉:二甲基亞碸、二乙基亞碸等亞碸系溶劑;N,N-二甲基甲醯胺、N,N-二乙基甲醯胺等甲醯胺系溶劑;N,N-二甲基乙醯胺、N,N-二乙基乙醯胺等乙醯胺系溶劑;N-甲基-2-吡咯啶酮、N-乙烯基-2-吡咯啶酮等吡咯啶酮系溶劑;苯酚、鄰甲酚、間甲酚或對甲酚、二甲苯酚、鹵代苯酚、鄰苯二酚等酚系溶劑;或六甲基磷醯胺、γ-丁內酯等非質子性極性溶劑等。該等可單獨使用或將2種以上組合使用,進而,可與二甲苯、甲苯等芳香族烴組合使用。 In the present invention, as the organic solvent used to form the polyamino acid solution, Specific examples include, for example, fluorene-based solvents such as dimethyl fluorene and diethyl fluorene; and methylformamides such as N, N-dimethylformamide and N, N-diethylformamide. Solvents; acetamide solvents such as N, N-dimethylacetamide, N, N-diethylacetamide; N-methyl-2-pyrrolidone, N-vinyl-2-pyrrolidine Pyrrolidone solvents such as ketones; phenol solvents such as phenol, o-cresol, m-cresol or p-cresol, xylenol, halogenated phenol, and catechol; or hexamethylphosphamide, γ-butane Aprotic polar solvents such as lactones. These can be used individually or in combination of 2 or more types, and can also be used in combination with aromatic hydrocarbons, such as xylene and toluene.

聚醯胺酸溶液之聚合方法可利用公知之任一方法進行,例如可列舉如下方法等: The polymerization method of the polyamic acid solution can be performed by any known method, and examples thereof include the following methods:

(1)首先將芳香族二胺成分全量加入溶劑中,其後以成為與芳香族二胺成分全量為當量之方式加入芳香族酸酐成分並進行聚合。 (1) First, the entire amount of the aromatic diamine component is added to the solvent, and then the aromatic anhydride component is added so as to be equivalent to the total amount of the aromatic diamine component, and polymerization is performed.

(2)首先將芳香族酸酐成分全量加入溶劑中,其後以成為與芳香族酸酐成分為當量之方式加入芳香族二胺成分並進行聚合。 (2) First, the entire amount of the aromatic acid anhydride component is added to the solvent, and then the aromatic diamine component is added so as to be equivalent to the aromatic acid anhydride component, and polymerization is performed.

(3)將一芳香族二胺化合物加入溶劑中,其後,以芳香族酸酐化合物相對於反應成分成為95~105莫耳%之比率混合反應所需之時間後,添加另一芳香族二胺化合物,繼而,以全部芳香族二胺成分與全部芳香族酸酐成分成為大致當量之方式添加另一芳香族酸酐化合物並進行聚合。 (3) One aromatic diamine compound is added to the solvent, and then the time required for the reaction is mixed at a ratio of 95 to 105 mol% of the aromatic anhydride compound with respect to the reaction component, and then another aromatic diamine is added. The compound is further polymerized by adding another aromatic acid anhydride compound so that all the aromatic diamine components and all the aromatic acid anhydride components become approximately equivalent.

(4)將芳香族酸酐化合物加入溶劑中,其後,以一芳香族二胺化合物相對於反應成分成為95~105莫耳%之比率混合反應所需之時間後,添加另一芳香族酸酐化合物,繼而,以全部芳香族二胺成分與全部芳香族酸酐成分成為大致當量之方式添加另一芳香族二胺化合物並進行聚合。 (4) Add the aromatic acid anhydride compound to the solvent, and then add another aromatic acid anhydride compound after the time required for the reaction is mixed at a ratio of 95 to 105 mol% of one aromatic diamine compound relative to the reaction component. Then, another aromatic diamine compound is added and polymerized so that all the aromatic diamine components and all the aromatic acid anhydride components become approximately equivalent.

(5)於溶劑中使一芳香族二胺成分與芳香族酸酐成分以任一者變為過量之方式進行反應而調整聚醯胺酸溶液(A),於另外之溶劑中使另一芳香族二胺成分與芳香族酸酐成分以任一者變為過量之方式進行 反應而調整聚醯胺酸溶液(B)。將以此方式所獲得之各聚醯胺酸溶液(A)與(B)混合,完成聚合。此時,於調整聚醯胺酸溶液(A)時芳香族二胺成分過量之情形時,於聚醯胺酸溶液(B)中將芳香族酸酐成分設為過量,又,於聚醯胺酸溶液(A)中芳香族酸酐成分過量之情形時,於聚醯胺酸溶液(B)中將芳香族二胺成分設為過量,將聚醯胺酸溶液(A)與(B)混合,且以用於該等反應之全部芳香族二胺成分與全部芳香族酸酐成分成為大致當量之方式進行調整。 (5) A polyamic acid solution (A) is adjusted by reacting an aromatic diamine component and an aromatic anhydride component in an excess amount in a solvent, and another aromatic solvent is made in another solvent Diamine component and aromatic anhydride component are performed so that either may become excess The reaction adjusts the polyamic acid solution (B). Each of the polyamic acid solutions (A) and (B) obtained in this manner was mixed to complete the polymerization. At this time, when the aromatic diamine component is excessive when the polyamic acid solution (A) is adjusted, the aromatic acid anhydride component is made excessive in the polyamino acid solution (B). When the aromatic acid anhydride component in the solution (A) is excessive, the aromatic diamine component is made excessive in the polyamine solution (B), and the polyamino acid solution (A) and (B) are mixed, and It adjusted so that all the aromatic diamine components and all the aromatic acid anhydride components used for these reactions might become equivalent.

再者,聚合方法並不限定於該等,亦可使用此外公知之方法。 The polymerization method is not limited to these, and a method known in the art may be used.

於本發明中,構成聚醯胺酸之芳香族酸酐成分與芳香族二胺成分係以各者之莫耳數大致相等之比率進行聚合,但亦可將其中一者在10莫耳%、較佳為5莫耳%之範圍內相對於另一者過量地調配。 In the present invention, the aromatic acid anhydride component and the aromatic diamine component constituting the polyamino acid are polymerized at a ratio of approximately equal to the mole number of each, but one of them may be polymerized at 10 mole% or less. It is more preferable that it is blended in an excessive amount in the range of 5 mol% relative to the other.

聚合反應較佳為於有機溶劑中一面攪拌、混合,一面進行。聚合溫度並無特別限定,通常於反應溶液之內溫0~80℃下進行。聚合時間並無特別限定,較佳為連續進行10分鐘~30小時。關於聚合反應,可根據需要對聚合反應進行分割,或使溫度上升或下降。對於兩反應體之添加順序並無特別限制,較佳為於芳香族二胺成分之溶液中添加芳香族酸酐。於聚合反應中進行真空消泡對於製造優質之聚醯胺酸之有機溶劑溶液為有效之方法。又,可藉由於聚合反應之前於芳香族二胺類中添加少量之末端封端劑而控制聚合反應。上述末端封端劑並無特別限定,可使用公知者。 The polymerization reaction is preferably carried out while stirring and mixing in an organic solvent. The polymerization temperature is not particularly limited, and it is usually carried out at an internal temperature of the reaction solution of 0 to 80 ° C. The polymerization time is not particularly limited, but it is preferably performed continuously for 10 minutes to 30 hours. Regarding the polymerization reaction, the polymerization reaction may be divided as necessary, or the temperature may be increased or decreased. The order of adding the two reactants is not particularly limited, and it is preferable to add an aromatic acid anhydride to the solution of the aromatic diamine component. Vacuum defoaming during polymerization is an effective method for producing high quality organic solvent solutions of polyamic acid. In addition, the polymerization reaction can be controlled by adding a small amount of a terminal blocking agent to the aromatic diamines before the polymerization reaction. The said terminal blocking agent is not specifically limited, A well-known thing can be used.

以此方式所獲得之聚醯胺酸溶液含有通常為5~40重量%、較佳為10~30重量%之固形物成分。又,其黏度係藉由布氏黏度計所得之測定值,並無特別限定,通常為10~2000Pa‧s,為進行穩定之送液,較佳為100~1000Pa‧s。再者,有機溶劑溶液中之聚醯胺酸可部分地醯亞胺化。 The polyamic acid solution obtained in this way contains a solid content of usually 5 to 40% by weight, preferably 10 to 30% by weight. In addition, the viscosity is a measurement value obtained by a Brookfield viscometer, and is not particularly limited. Usually, it is 10 to 2000 Pa · s. For stable liquid delivery, it is preferably 100 to 1000 Pa · s. Furthermore, the polyamidic acid in the organic solvent solution can be partially imidized.

[無機粒子] [Inorganic particles]

分散於本發明之聚醯亞胺膜之無機粒子較佳為對於本發明之聚醯亞胺膜製造步驟中要接觸之所有化學物質不溶解。 The inorganic particles dispersed in the polyimide film of the present invention are preferably insoluble to all chemical substances to be contacted in the polyimide film manufacturing step of the present invention.

作為可於本發明中使用之無機粒子,可較佳地列舉:SiO2(二氧化矽)、TiO2(氧化鈦)、CaHPO4(磷酸氫鈣)、Ca2P2O7(焦磷酸鈣)等。其中,CaHPO4由於藉由自聚醯亞胺膜內部昇華時產生之氣體而產生良好之膨脹,獲得導熱性優異之良好之石墨片,故而尤佳為以CaHPO4為主成分。 Examples of the inorganic particles that can be used in the present invention include SiO 2 (silicon dioxide), TiO 2 (titanium oxide), CaHPO 4 (calcium hydrogen phosphate), and Ca 2 P 2 O 7 (calcium pyrophosphate). )Wait. Among them, CaHPO 4 has good expansion due to gas generated during sublimation from the inside of the polyimide film, and obtains a graphite sheet with excellent thermal conductivity. Therefore, CaHPO 4 is particularly preferred as the main component.

聚醯亞胺膜中之無機粒子之含量較佳為相對於膜樹脂每1重量為0.03~1.0重量%之比率,更佳為0.1~0.8重量%之比率。若為0.03重量%以下,則將聚醯亞胺膜進行煅燒而獲得之石墨片之機械強度或導熱性變低,故而欠佳。又,反之,若為1.0重量%以上,則石墨化時之發泡之均勻性降低,故而欠佳。 The content of the inorganic particles in the polyimide film is preferably a ratio of 0.03 to 1.0% by weight, and more preferably a ratio of 0.1 to 0.8% by weight, based on 1 weight of the film resin. If it is 0.03% by weight or less, the graphite sheet obtained by calcining the polyfluorene imide film has low mechanical strength or thermal conductivity, which is not preferable. On the other hand, if it is 1.0% by weight or more, the uniformity of foaming during graphitization decreases, which is not preferable.

關於無機粒子之平均粒徑,就石墨化時之發泡更均勻之方面而言,較佳為0.1~2.0μm,更佳為0.5~1.5μm,進而較佳為0.8~1.2μm。 The average particle diameter of the inorganic particles is preferably 0.1 to 2.0 μm, more preferably 0.5 to 1.5 μm, and still more preferably 0.8 to 1.2 μm in terms of more uniform foaming during graphitization.

關於無機粒子之粒度分佈,較佳為狹小之分佈,即類似之大小之粒子占全部粒子之比率較高,具體而言,較佳為粒徑為0.5~2.5μm之無機粒子相對於全部無機粒子占80體積%以上之比率。若低於該範圍且為0.5μm以下之粒子所占之比率變高,則石墨片之機械強度變弱,導熱性亦變低,故而欠佳。又,於無機粒子送液時,可藉由5μm截斷過濾器或20μm截斷過濾器去除粗粒,若超過6.0μm之大小之無機粒子所占之比率變高,則會使過濾器之孔堵塞頻發,有損步驟穩定性,而且變得容易產生無機粒子之粗大凝聚,故而欠佳。因此,作為無機粒子,較佳為全部粒徑處於6.0μm以下之範圍內。上述平均粒徑、粒徑及粒度分佈係以後述實施例之方式使用堀場製作所之雷射繞射/散射式粒度分佈測定裝置LA-910而測得之值。 Regarding the particle size distribution of the inorganic particles, a narrow distribution is preferable, that is, a ratio of particles of a similar size to all particles is high, and specifically, it is preferable that the inorganic particles having a particle diameter of 0.5 to 2.5 μm are relative to all the inorganic particles. A ratio of 80% by volume or more. If the ratio of particles smaller than this range and below 0.5 μm becomes higher, the mechanical strength of the graphite sheet becomes weaker and the thermal conductivity becomes lower, which is not good. In addition, when feeding inorganic particles, coarse particles can be removed by a 5 μm cut-off filter or a 20 μm cut-off filter. If the ratio of inorganic particles larger than 6.0 μm becomes higher, the pores of the filter will be blocked frequently. It is not good because the stability of the step is impaired, and coarse aggregation of inorganic particles becomes easy to occur. Therefore, as the inorganic particles, it is preferable that the total particle diameter is in a range of 6.0 μm or less. The average particle diameter, the particle diameter, and the particle size distribution are values measured using a laser diffraction / scattering particle size distribution measuring device LA-910 of Horiba, in the manner described in the examples described later.

無機粒子以均勻地分散於N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、二甲亞碸、N-甲基吡咯啶酮等極性溶劑中之漿料之形式使用時可防止該粒子之凝聚,故而較佳。該漿料由於粒徑非常小,故而沈澱速度緩慢且穩定。又,即便沈澱,藉由再攪拌亦可容易地再分散。再者,無機粒子漿料可使用常規方法而獲得。 Inorganic particles are in the form of a slurry uniformly dispersed in a polar solvent such as N, N-dimethylformamide, N, N-dimethylacetamide, dimethylarsine, N-methylpyrrolidone, etc. It is preferred to prevent aggregation of the particles during use. Since the slurry has a very small particle size, the precipitation rate is slow and stable. Moreover, even if it precipitates, it can be easily redispersed by re-stirring. The inorganic particle slurry can be obtained by a conventional method.

於本發明中,作為使無機粒子分散於聚醯亞胺膜中之方法,並無特別限定,為防止無機粒子漿料之沈澱、凝聚,較佳為添加於預先聚合成之聚醯胺酸溶液之後,使其去環化去溶劑化,而獲得聚醯亞胺膜。又,亦可將無機粒子漿料添加於聚醯胺酸聚合前之有機溶劑中之後,經過聚醯胺酸聚合、去環化去溶劑化而獲得聚醯亞胺膜。只要為去環化去溶劑化前之步驟,便於製造聚醯亞胺膜之任一步驟添加無機粒子漿料。又,無機粒子漿料中所使用之極性溶劑較佳為與製造聚醯胺酸所使用之有機溶劑相同之極性溶劑。 In the present invention, the method for dispersing the inorganic particles in the polyimide film is not particularly limited. In order to prevent precipitation and aggregation of the inorganic particle slurry, it is preferably added to a polyamic acid solution polymerized in advance. Then, it was decyclized and desolvated, and the polyfluorene imide film was obtained. Alternatively, the inorganic particle slurry may be added to an organic solvent before the polyamic acid polymerization, and then the polyfluorine acid is polymerized, decyclized and desolvated to obtain a polyimide film. As long as it is a step before decyclization and desolvation, it is convenient to add an inorganic particle slurry in any step of manufacturing a polyimide film. The polar solvent used in the inorganic particle slurry is preferably the same polar solvent as the organic solvent used in the production of polyamic acid.

為使填料均勻地分散,上述分散較佳為使用均質機、磨碎型研磨機進行。均質機、磨碎型研磨機並無特別限定,可使用先前公知者。 In order to disperse the filler uniformly, the dispersion is preferably performed using a homogenizer or a grinding mill. The homogenizer and the grinding mill are not particularly limited, and a conventionally known one can be used.

本發明中所使用之上述聚醯胺酸溶液可包含1種或2種以上之上述無機粒子以外之化合物。作為無機粒子以外之化合物,例如可列舉:碳、氧化鋁或氧化鈦等金屬氧化物、氮化硼等硼化合物等。 The polyamino acid solution used in the present invention may contain one or more compounds other than the above-mentioned inorganic particles. Examples of compounds other than the inorganic particles include carbon oxides, metal oxides such as alumina and titanium oxide, and boron compounds such as boron nitride.

[聚醯亞胺膜] [Polyimide film]

繼而,對本發明之聚醯亞胺膜之製造方法進行說明。 Next, the manufacturing method of the polyfluorene imide film of this invention is demonstrated.

聚醯亞胺膜係藉由將聚醯胺酸溶液進行加熱而製造,以下詳細地記載。 The polyimide film is produced by heating a polyamic acid solution, and is described in detail below.

作為製造聚醯亞胺膜之方法,可列舉如下方法:將聚醯胺酸溶液澆鑄成膜狀並使其熱地進行去環化去溶劑化而獲得聚醯亞胺膜;及於聚醯胺酸溶液中混合環化觸媒及脫水劑使其化學性地進行去環化而 製作凝膠膜,並對其進行加熱去溶劑化,藉此獲得聚醯亞胺膜;後者因可將所獲得之聚醯亞胺膜之熱膨脹係數抑制為較低,且膜面方向之配向性提高,故可獲得良好之石墨之導熱性或厚度,因此較佳。 As a method for manufacturing a polyimide film, the following methods can be mentioned: a polyimide solution is casted into a film shape and thermally decyclized and desolvated to obtain a polyimide film; and polyimide film; and The cyclization catalyst and dehydrating agent are mixed in the acid solution to chemically decyclize and Making a gel film and heating and desolvating it to obtain a polyimide film; the latter can suppress the thermal expansion coefficient of the obtained polyimide film to be low and the orientation of the film surface direction It is better because it can improve the thermal conductivity or thickness of graphite.

於化學性地進行去環化之方法中,首先製備上述聚醯胺酸溶液。上述聚醯胺酸溶液可含有環化觸媒(醯亞胺化觸媒)、脫水劑及凝膠化延遲劑等。 In the method of chemically performing decyclization, the above-mentioned polyamidic acid solution is first prepared. The polyfluorinated acid solution may contain a cyclization catalyst (fluorinated imidization catalyst), a dehydrating agent, a gelling retarder, and the like.

作為本發明中所使用之環化觸媒之具體例,可列舉三甲基胺、三伸乙基二胺等脂肪族三級胺、二甲基苯胺等芳香族三級胺、及異喹啉、吡啶、β-甲基吡啶等雜環式三級胺等,該等可單獨使用或將2種以上併用。其中,較佳為至少使用一種以上雜環式三級胺之態樣。 Specific examples of the cyclization catalyst used in the present invention include aliphatic tertiary amines such as trimethylamine and triethylenediamine, aromatic tertiary amines such as dimethylaniline, and isoquinoline. Heterocyclic tertiary amines such as pyridine, β-methylpyridine, and the like can be used alone or in combination of two or more kinds. Among these, it is preferable to use at least one heterocyclic tertiary amine.

作為本發明中所使用之脫水劑之具體例,可列舉乙酸酐、丙酸酐、丁酸酐等脂肪族羧酸酐、及苯甲酸酐等芳香族羧酸酐等,其中,較佳為乙酸酐及/或苯甲酸酐。 Specific examples of the dehydrating agent used in the present invention include aliphatic carboxylic anhydrides such as acetic anhydride, propionic anhydride, and butyric anhydride, and aromatic carboxylic anhydrides such as benzoic anhydride. Among them, acetic anhydride and / or Benzoic anhydride.

作為自聚醯胺酸溶液製造聚醯亞胺膜之方法,將含有環化觸媒及脫水劑之聚醯胺酸溶液自附狹縫之口模流延於支持體上成形為膜狀,並於支持體上部分地進行醯亞胺化而製成具有自我支持性之凝膠膜後,自支持體剝離,進行加熱乾燥/醯亞胺化,並進行熱處理。 As a method for producing a polyimide film from a polyacrylic acid solution, a polyamidic acid solution containing a cyclization catalyst and a dehydrating agent is cast on a support by a slit die attached to a support, and formed into a film shape, and After being partially imidized on the support to form a self-supporting gel film, the support is peeled off, dried and heat-treated by imidization.

上述聚醯胺酸溶液係通過狹縫狀口模成形為膜狀,並流延於已加熱之支持體上,於支持體上進行熱閉環反應,成為具有自我支持性之凝膠膜,並自支持體剝離。 The polyamic acid solution is formed into a film shape through a slit die, and is cast on a heated support. A thermal ring-closing reaction is performed on the support to form a self-supporting gel film. Peel off the support.

所謂上述支持體係金屬製旋轉滾筒或環帶,其溫度可藉由液體或氣體之熱媒、及/或電加熱器等之輻射熱而控制。 The temperature of the above-mentioned support system metal rotating drum or endless belt can be controlled by the radiant heat of a liquid or gas heat medium and / or an electric heater.

上述凝膠膜藉由自支持體之受熱及/或自熱風或電加熱器等之熱源之受熱,通常加熱至30~200℃,較佳為加熱至40~150℃進行閉環反應,且使游離之有機溶劑等揮發分乾燥,藉此具有自我支持性,且自支持體剝離。 The gel film is heated by a self-supporting body and / or by a heat source such as hot air or an electric heater, and is usually heated to 30 to 200 ° C, preferably to 40 to 150 ° C for closed-loop reaction and freed. Volatile components such as organic solvents are dried, thereby being self-supporting and peeling from the support.

自上述支持體剝離之凝膠膜通常藉由旋轉輥一面限制行走速度一面向行走方向延伸。延伸通常於140℃以下之溫度下以1.01~1.90倍、較佳為1.05~1.60倍、進而較佳為1.10~1.50倍之倍率實施。向行走方向延伸過之凝膠膜被導入至拉幅裝置,且被拉幅夾抓持寬度方向兩端部,一面與拉幅夾一起行走,一面向寬度方向延伸。 The gel film peeled from the above-mentioned support is usually extended toward the walking direction by rotating the roller while restricting the walking speed. Stretching is usually performed at a temperature below 140 ° C at a magnification of 1.01 to 1.90 times, preferably 1.05 to 1.60 times, and further preferably 1.10 to 1.50 times. The gel film extending in the walking direction is introduced into the tenter device, and the two ends in the width direction are grasped by the tenter clip, while one side travels with the tenter clip and extends in the width direction.

上述於乾燥區域乾燥後之膜通常利用風、紅外加熱器等加熱15秒至30分鐘。繼而,藉由熱風及/或電加熱器等,通常於250~500之溫度下進行15秒至30分鐘熱處理。一面調整向行走方向之延伸倍率及向寬度方向之延伸倍率,一面調整聚醯亞胺膜之厚度。 The film dried in the drying area is usually heated by wind, infrared heater, or the like for 15 seconds to 30 minutes. Then, by hot air and / or an electric heater, the heat treatment is usually performed at a temperature of 250 to 500 for 15 seconds to 30 minutes. While adjusting the stretch magnification in the walking direction and the stretch magnification in the width direction, adjust the thickness of the polyimide film.

本發明中所使用之聚醯亞胺膜之厚度並無特別限定,較佳為5μm以上且200μm以下之範圍,更佳為10μm以上且150μm以下之範圍。 The thickness of the polyimide film used in the present invention is not particularly limited, but is preferably in a range of 5 μm or more and 200 μm or less, and more preferably in a range of 10 μm or more and 150 μm or less.

以如上述之方式所製造之本發明之聚醯亞胺膜之線膨脹係數通常約為20ppm/℃以下,較佳為約18ppm/℃以下。再者,線膨脹係數係藉由後述之實施例記載之方法所測得之值,通常為聚醯亞胺膜之寬度方向(TD)與機械搬送方向(MD)之值之平均值。 The linear expansion coefficient of the polyfluorene imide film of the present invention manufactured in the manner as described above is usually about 20 ppm / ° C or lower, preferably about 18 ppm / ° C or lower. In addition, the coefficient of linear expansion is a value measured by a method described in the examples described later, and is generally an average value of the width direction (TD) and the machine transport direction (MD) of the polyimide film.

[石墨片] [Graphite sheet]

本發明之石墨片可藉由將本發明之聚醯亞胺膜煅燒進行石墨化而獲得。 The graphite sheet of the present invention can be obtained by calcining and calcining the polyfluorene imide film of the present invention.

以下,對本發明之石墨片之製造方法進行說明。 Hereinafter, the manufacturing method of the graphite sheet of this invention is demonstrated.

於獲得本發明之石墨片時,首先,將聚醯亞胺膜切斷成特定之尺寸,將聚醯亞胺膜之膜面水平地或將膜面豎立地放入石墨製保持容器。 When obtaining the graphite sheet of the present invention, first, the polyimide film is cut to a specific size, and the film surface of the polyimide film is placed horizontally or the film surface is placed upright into a graphite holding container.

石墨化之煅燒(以下,亦稱為正式加熱處理)之溫度通常為2000℃以上,較佳為2400℃以上,更佳為2600℃以上。最終煅燒溫度較佳為2700℃以上,更佳為2800℃以上,進而較佳為3000℃附近。若煅燒溫 度大於3500℃,則煅燒爐之耐熱劣化較大,較難進行長時間之生產。於最高煅燒溫度未達2000℃之情形時,所獲得之石墨片有變硬且變脆之傾向。煅燒時之升溫速度並無特別限定,例如以1~10℃/分鐘左右進行。煅燒可使用公知之加熱器件。又,煅燒時間並無特別限定。 The temperature of the calcination of graphitization (hereinafter, also referred to as formal heating treatment) is usually 2000 ° C or higher, preferably 2400 ° C or higher, and more preferably 2600 ° C or higher. The final calcination temperature is preferably 2700 ° C or higher, more preferably 2800 ° C or higher, and even more preferably around 3000 ° C. If calcined If the temperature is greater than 3500 ° C, the heat resistance of the calcining furnace is large, and it is difficult to carry out long-term production. When the maximum calcination temperature does not reach 2000 ° C, the obtained graphite sheet tends to become hard and brittle. The rate of temperature increase during firing is not particularly limited, and it is carried out at, for example, about 1 to 10 ° C./minute. For the calcination, a known heating device can be used. The firing time is not particularly limited.

煅燒通常於惰性氣體中進行。作為惰性氣體,並無特別限定,可列舉氦氣、氬氣、氮氣等,較佳為使用氬氣。又,煅燒時之壓力為常壓即可。 Calcination is usually carried out in an inert gas. The inert gas is not particularly limited, and examples thereof include helium, argon, and nitrogen, and argon is preferably used. The pressure during the calcination may be normal pressure.

於上述煅燒(正式加熱處理)之前,可視需要進行預加熱處理。預加熱處理之溫度較佳為較正式加熱處理之溫度低之溫度。具體而言,較佳為900℃以上且1500℃以下左右。預加熱處理之升溫速度並無特別限定,例如以1~15℃/分鐘左右進行。預加熱處理亦通常於惰性氣體中進行。作為上述惰性氣體,可使用與上述相同者。預加熱處理之時間並無特別限定。 Before the above calcination (formal heat treatment), a preheating treatment may be performed as necessary. The temperature of the preheating treatment is preferably lower than the temperature of the formal heat treatment. Specifically, it is preferably about 900 ° C to 1500 ° C. The heating rate of the preheating treatment is not particularly limited, and it is performed at, for example, about 1 to 15 ° C./minute. The preheating treatment is also usually performed in an inert gas. As the inert gas, the same as described above can be used. The time for the preheating treatment is not particularly limited.

煅燒後之石墨片較佳為由壓延輥夾著進行壓延處理。藉由壓延處理,可減小因煅燒後之石墨片之膨脹所產生之厚度不均。又,藉由壓延處理,可增大煅燒後之石墨片之密度,提高導熱性。 The calcined graphite sheet is preferably calendered by being sandwiched between calender rolls. Through the calendering process, it is possible to reduce the thickness unevenness caused by the expansion of the calcined graphite sheet. In addition, the calendering process can increase the density of the calcined graphite sheet and improve the thermal conductivity.

以上述方式所製造之本發明之石墨片由於熱擴散係數較大,故而具有優異之導熱性。熱擴散係數係藉由後述實施例記載之方法所測得之值。 The graphite sheet of the present invention manufactured in the above manner has excellent thermal conductivity due to a large thermal diffusion coefficient. The thermal diffusion coefficient is a value measured by a method described in Examples described later.

本發明之石墨片之熱擴散係數並無特別限定,較佳為7.0(cm2/s)以上。 The thermal diffusion coefficient of the graphite sheet of the present invention is not particularly limited, but is preferably 7.0 (cm 2 / s) or more.

又,本發明之石墨片之斷裂強度通常為10MPa以上,較佳為15MPa以上,更佳為20MPa以上。斷裂強度係藉由後述實施例記載之方法所測得之值。 The breaking strength of the graphite sheet of the present invention is usually 10 MPa or more, preferably 15 MPa or more, and more preferably 20 MPa or more. The breaking strength is a value measured by a method described in Examples described later.

[實施例] [Example]

繼而,列舉實施例進一步具體地說明本發明,但本發明不受該 等實施例任何限定,具有本領域中通常之知識者可於本發明之技術思想內進行多種變化。 Next, the present invention will be described more specifically with reference to examples, but the present invention is not limited to this. Such as any limitation of the embodiment, those having ordinary knowledge in the art can make various changes in the technical idea of the present invention.

以下,對本發明之測定方法進行說明。 The measurement method of the present invention will be described below.

[無機粒子之評價] [Evaluation of Inorganic Particles]

使用堀場製作所之雷射繞射/散射式粒度分佈測定裝置LA-910,對分散於極性溶劑之試樣進行測定,根據分析之結果,讀取粒徑範圍、平均粒徑、粒徑為0.5~2.5μm之粒子相對於全部粒子之佔有率。 Laser-diffraction / scattering particle size distribution measuring device LA-910 from HORIBA, Ltd. was used to measure samples dispersed in a polar solvent. Based on the analysis results, read the particle size range, average particle size, and particle size from 0.5 to Occupancy ratio of 2.5 μm particles to all particles.

[線膨脹係數] [Linear expansion coefficient]

採取寬度5mm×長度10mm之尺寸之樣品,並使用島津製作所製造之TMA-50,對各樣品於下述條件下進行加熱。 A sample having a width of 5 mm and a length of 10 mm was taken, and each sample was heated under the following conditions using TMA-50 manufactured by Shimadzu Corporation.

第1次升溫:室溫→300℃(升溫速度10℃/分鐘) First temperature increase: room temperature → 300 ° C (temperature increase rate: 10 ° C / min)

降溫:300℃→35℃(降溫速度5℃/分鐘) Cooling: 300 ℃ → 35 ℃ (cooling speed 5 ℃ / min)

第2次升溫:35℃→220℃(升溫速度10℃/分鐘) Second temperature increase: 35 ° C → 220 ° C (temperature increase rate: 10 ° C / min)

線膨脹係數之分析於第2次升溫中之溫度範圍50℃~200℃之條件下進行。 The analysis of the linear expansion coefficient was performed under the conditions of a temperature range of 50 ° C to 200 ° C during the second temperature increase.

再者,線膨脹係數係將聚醯亞胺膜之寬度方向(TD)與機械搬送方向(MD)之值之平均值作為平均線膨脹係數而求出。 In addition, a linear expansion coefficient is calculated | required as the average linear expansion coefficient by the average value of the width direction (TD) and the machine conveyance direction (MD) of a polyimide film.

[密度] [density]

測定方法:阿基米德法 Measurement method: Archimedes method

測定裝置:島津製作所(股)製造 電子分析天平AUX-120 Measuring device: made by Shimadzu Corporation AUX-120 electronic analytical balance

測定溫度:25℃ Measurement temperature: 25 ° C

浸漬液:水 Dipping solution: water

[熱擴散係數] [Thermal diffusion coefficient]

測定方法:氙燈閃光法 Measurement method: Xenon flash method

測定裝置:NETZSCH公司製造 熱傳導測定裝置LFA447 Measuring device: Thermal conductivity measuring device LFA447 made by NETZSCH

測定溫度:25℃ Measurement temperature: 25 ° C

光源:氙閃光燈 Light source: Xenon flash

IR檢測器:InSb檢測器(液態氮冷卻) IR detector: InSb detector (liquid nitrogen cooling)

[斷裂強度] [Breaking strength]

測定裝置:島津製作所(股)製造 Autograph AGS-X Measuring device: Autograph AGS-X manufactured by Shimadzu Corporation

測定溫度:25℃ Measurement temperature: 25 ° C

夾頭間距:50mm Chuck spacing: 50mm

拉伸速度:25mm/min Stretching speed: 25mm / min

試片:寬度10mm Test piece: width 10mm

[聚醯亞胺膜及石墨片之厚度] [Thickness of polyimide film and graphite sheet]

使用Mitutoyo製造之LITEMATIC(318系列)進行測定。 The measurement was performed using LITEMATIC (318 series) manufactured by Mitutoyo.

[發泡] [Foaming]

藉由目視並利用以下評價基準對100mm見方之石墨片進行評價。 A 100-mm square graphite sheet was evaluated visually and using the following evaluation criteria.

良好(○):發泡整體均勻 Good (○): uniform foaming overall

不良(×):不發泡、或存在不均 Bad (×): No foaming or unevenness

[柔軟性] [Softness]

將100mm(縱)×100mm(寬)之石墨片以縱向之端部彼此或寬度方向之端部彼此恰好重合之方式彎折之後,對片材之折縫之中央部按壓100g之負荷3秒鐘,使卸下負荷之後之片材恢復成原本之狀態,藉由目視並利用以下評價基準進行評價。於本發明中,所謂柔軟性係指於該評價方法中,片材大致恢復成原本之狀態。 After bending a graphite sheet of 100 mm (longitudinal) × 100 mm (wide) such that the longitudinal end portions thereof or the widthwise end portions coincide with each other, press the load of 100 g on the central portion of the crease of the sheet for 3 seconds. The sheet was restored to its original state after unloading, and was evaluated visually using the following evaluation criteria. In the present invention, the term "flexibility" means that, in the evaluation method, the sheet is substantially restored to its original state.

良好(○):片材大致恢復成原本之狀態 Good (○): The sheet is almost restored to its original state

不良(×):片材局部變形 Bad (×): local deformation of the sheet

[聚醯胺酸合成例] [Polyamic acid synthesis example]

以莫耳比計為65/35/80/20之比率準備均苯四甲酸二酐(分子量218.12)/3,3',4,4'-聯苯基四羧酸二酐(分子量294.22)/4,4'-二胺基二苯基 醚(分子量200.24)/對苯二胺(分子量108.14),於DMAc(N,N-二甲基乙醯胺)中成為20重量%溶液並進行聚合,獲得3500泊之聚醯胺酸溶液。 Prepare a pyromellitic dianhydride (molecular weight 218.12) / 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride (molecular weight 294.22) / based on a molar ratio of 65/35/80/20 / 4,4'-diaminodiphenyl Ether (molecular weight: 200.24) / p-phenylenediamine (molecular weight: 108.14) was polymerized into a 20% by weight solution in DMAc (N, N-dimethylacetamide) to obtain a polyamic acid solution of 3,500 poise.

[實施例1] [Example 1]

將無機粒子全部粒子之粒徑處於0.01μm以上且6.0μm以下、平均粒徑為0.87μm、且粒徑為0.5~2.5μm之粒子於全部粒子中為81.5體積%之磷酸氫鈣的N,N-二甲基乙醯胺漿料向合成例中所獲得之聚醯胺酸溶液中添加相對於該溶液樹脂每1重量為0.15重量%,並充分攪拌使其分散。於該聚醯胺酸溶液中,將包含乙酸酐(分子量102.09)及β-甲基吡啶之轉化劑以相對於聚醯胺酸分別為2.0莫耳當量之比率進行混合並攪拌。將所獲得之混合物自口模澆鑄至進行旋轉之65℃之不鏽鋼製滾筒上,獲得具有自我支持性之凝膠膜。將該凝膠膜自滾筒剝離,並抓持其兩端,利用加熱爐進行250℃×30秒、400℃×30秒、550℃×30秒處理,獲得厚度為50μm之聚醯亞胺膜。 The particle size of all inorganic particles is 0.01 μm or more and 6.0 μm or less, the average particle size is 0.87 μm, and the particle size of 0.5 to 2.5 μm is 81.5% by volume of N, N of calcium hydrogen phosphate in all particles. -Dimethylacetamide slurry is added to the polyamic acid solution obtained in the synthesis example at 0.15% by weight based on 1 weight of the resin in the solution, and is sufficiently stirred to disperse. In this polyamic acid solution, a conversion agent containing acetic anhydride (molecular weight 102.09) and β-methylpyridine was mixed and stirred at a ratio of 2.0 mol equivalents to the polyamino acid. The obtained mixture was casted from a die onto a rotating stainless steel drum at 65 ° C to obtain a self-supporting gel film. The gel film was peeled from the drum, and both ends were grasped, and treated at 250 ° C. × 30 seconds, 400 ° C. × 30 seconds, and 550 ° C. × 30 seconds in a heating furnace to obtain a polyimide film having a thickness of 50 μm.

將如以上方式所獲得之聚醯亞胺膜切斷為寬250mm×600mm之尺寸,將膜面豎立放入石墨製圓筒形之有底保持容器。繼而,於氬氣中以3℃/分鐘升溫至1000℃並保持1小時,進而以3℃/分鐘升溫至2800℃並保持1小時,而對聚醯亞胺膜煅燒,進行石墨化。將所獲得之石墨片夾入2個壓延輥之間,進行壓延處理而壓延,製作厚度為25μm之石墨片。 The polyimide film obtained in the above manner was cut into a size of 250 mm × 600 mm in width, and the film surface was erected into a graphite cylindrical bottomed holding container. Then, the temperature was raised to 1000 ° C. at 3 ° C./min for 1 hour in argon, and further heated to 2800 ° C. for 3 hours at 3 ° C./minute, and the polyimide film was calcined and graphitized. The obtained graphite sheet was sandwiched between two calender rolls and subjected to a calendering treatment to be calendered to produce a graphite sheet having a thickness of 25 μm.

[實施例2、3] [Examples 2 and 3]

將滾筒之旋轉速度、及加熱爐中之凝膠膜之搬送速度(製膜速度)即各加熱溫度之加熱時間以所獲得之聚醯亞胺膜之厚度成為25μm、75μm之方式進行調整,除此以外,以與實施例1相同之方式獲得聚醯亞胺膜。對所獲得之聚醯亞胺膜以與實施例1相同之方式進行煅燒,獲得石墨片。以與實施例1相同之方式進行壓延處理,製作各種厚度 之石墨片。 Adjust the rotation speed of the drum and the transfer speed (film-forming speed) of the gel film in the heating furnace, that is, the heating time of each heating temperature, so that the thickness of the obtained polyimide film becomes 25 μm and 75 μm. Otherwise, a polyfluorene film was obtained in the same manner as in Example 1. The obtained polyfluoreneimide film was calcined in the same manner as in Example 1 to obtain a graphite sheet. The calendering was performed in the same manner as in Example 1 to produce various thicknesses. Graphite sheet.

[比較例1] [Comparative Example 1]

將聚醯胺酸溶液中所添加之相對於該溶液樹脂每1重量之磷酸氫鈣添加量設為0.02重量%,除此以外,以與實施例1相同之方式獲得聚醯亞胺膜。對所獲得之聚醯亞胺膜以與實施例1相同之方式進行煅燒,獲得石墨片。以與實施例1相同之方式進行壓延處理,製作厚度為25μm之石墨片。 A polyimide film was obtained in the same manner as in Example 1 except that the amount of calcium hydrogen phosphate added to the polyamic acid solution per 1 weight of the solution resin was 0.02% by weight. The obtained polyfluoreneimide film was calcined in the same manner as in Example 1 to obtain a graphite sheet. The rolling process was performed in the same manner as in Example 1 to produce a graphite sheet having a thickness of 25 μm.

將實施例1~3及比較例1所獲得之聚醯亞胺膜之特性示於表1,將對聚醯亞胺膜進行煅燒、壓延後之石墨片之厚度、密度、熱擴散係數、斷裂強度及柔軟性、將聚醯亞胺膜石墨化時之發泡性示於表2。熱擴散係數係片材面方向之熱擴散係數。 The properties of the polyimide film obtained in Examples 1 to 3 and Comparative Example 1 are shown in Table 1. The thickness, density, thermal diffusion coefficient, and fracture of the graphite sheet after the polyimide film was calcined and rolled. Table 2 shows the strength and flexibility, and the foamability when the polyfluorene film is graphitized. The thermal diffusivity is the thermal diffusivity in the direction of the sheet surface.

根據比較例1之結果可知,未包含相當於膜樹脂每1重量為0.03重量%以上之無機粒子之聚醯亞胺膜於石墨化時之膜之發泡性較差,自該聚醯亞胺膜所獲得之石墨片之斷裂強度較弱,熱擴散係數亦較低。另一方面,根據實施例1~3之結果可知,包含相對於膜樹脂每1重量為0.03重量%以上之無機粒子之聚醯亞胺膜於石墨化時之膜之發泡性良好,自該聚醯亞胺膜所獲得之石墨片之斷裂強度較強,又,具有優異之導熱性、柔軟性、及耐彎曲性。 From the results of Comparative Example 1, it can be seen that the polyimide film that does not contain inorganic particles equivalent to 0.03% by weight or more of the weight of the film resin at the time of graphitization has poor foaming properties. From this polyimide film, The fracture strength of the obtained graphite sheet is weak, and the thermal diffusion coefficient is also low. On the other hand, according to the results of Examples 1 to 3, it can be seen that the polyimide film containing inorganic particles in an amount of 0.03% by weight or more relative to 1 weight of the film resin has good foamability during graphitization. The graphite sheet obtained from the polyfluorene film has a strong breaking strength, and has excellent thermal conductivity, softness, and bending resistance.

[產業上之可利用性] [Industrial availability]

本發明之聚醯亞胺膜於藉由熱處理進行石墨化時之發泡性良好,將該聚醯亞胺膜進行熱處理而製造之石墨片具有優異之導熱性、柔軟性及耐彎曲性,故而適宜作為電子機器之散熱構件。 The polyimide film of the present invention has good foaming properties when graphitized by heat treatment. The graphite sheet produced by heat-treating the polyimide film has excellent thermal conductivity, softness, and bending resistance. Suitable as heat dissipation component of electronic equipment.

Claims (7)

一種聚醯亞胺膜,其線膨脹係數為20ppm/℃以下,其特徵在於:其係將對苯二胺或對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐包含於原料中製造而成、並且分散有無機粒子者,其中,無機粒子之平均粒徑為0.1~2.0μm,以相對於聚醯亞胺膜樹脂每1重量為0.03~1.00重量%之比率含有無機粒子,粒徑為0.5~2.5μm之無機粒子相對於全部無機粒子占80體積%以上之比率,且將該聚醯亞胺膜於2000℃~3500℃之溫度下進行熱處理而製造石墨片。A polyimide film having a linear expansion coefficient of 20 ppm / ° C or less is characterized in that it comprises p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether, and is selected from the group consisting of Pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. One or more types of acid anhydrides are produced by including raw materials and dispersed with inorganic particles, among which The average particle diameter of the inorganic particles is 0.1 to 2.0 μm, and the inorganic particles are contained in a ratio of 0.03 to 1.00% by weight relative to 1 weight of the polyimide film resin, and the inorganic particles having a particle diameter of 0.5 to 2.5 μm are relative to all The inorganic particles occupy a ratio of 80% by volume or more, and the polyimide film is heat-treated at a temperature of 2000 ° C. to 3500 ° C. to produce a graphite sheet. 如請求項1之聚醯亞胺膜,其中無機粒子以磷酸氫鈣為主成分。For example, the polyimide film of claim 1, wherein the inorganic particles mainly include calcium hydrogen phosphate. 如請求項1或2之聚醯亞胺膜,其中對苯二胺與4,4'-二胺基二苯基醚之莫耳比為40/60~10/90。For example, the polyimide film of claim 1 or 2, wherein the molar ratio of p-phenylenediamine to 4,4'-diaminodiphenyl ether is 40/60 ~ 10/90. 如請求項1或2之聚醯亞胺膜,其中均苯四甲酸二酐與3,3',4,4'-聯苯四羧酸二酐之莫耳比為80/20~60/40。For example, the polyimide film of claim 1 or 2, wherein the molar ratio of pyromellitic dianhydride to 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride is 80/20 ~ 60/40 . 一種聚醯亞胺膜之製造方法,該聚醯亞胺膜係如請求項1至4中任一項之聚醯亞胺膜,其特徵在於:於使對苯二胺或者對苯二胺與4,4'-二胺基二苯基醚、以及選自由均苯四甲酸二酐及3,3',4,4'-聯苯四羧酸二酐所組成之群中之1種以上酸酐於極性有機溶劑中進行反應而製造聚醯胺酸,並對上述聚醯胺酸進行加熱而成形為膜時,使平均粒徑為0.1~2.0μm並且具有粒徑為0.5~2.5μm之無機粒子占全部粒子中80體積%以上之比率之粒度分佈的無機粒子分散於與上述極性有機溶劑相同之極性有機溶劑中,將如此所得之漿料以於上述聚醯胺酸溶液中上述無機粒子成為相對於樹脂每1重量為0.03~1.00重量%之比率之方式添加於聚醯胺酸中。A method for manufacturing a polyimide film, the polyimide film is the polyimide film according to any one of claims 1 to 4, and is characterized in that p-phenylenediamine or p-phenylenediamine and 4,4'-diaminodiphenyl ether and one or more acid anhydrides selected from the group consisting of pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride When a polyamine is produced by reacting in a polar organic solvent, and the polyamine is heated to form a film, the average particle diameter is 0.1 to 2.0 μm and the inorganic particles have a particle diameter of 0.5 to 2.5 μm. The inorganic particles having a particle size distribution with a ratio of 80% by volume or more of all the particles are dispersed in the same polar organic solvent as the above-mentioned polar organic solvent, and the slurry thus obtained is used to make the above-mentioned inorganic particles relatively in the polyamic acid solution. The resin is added to the polyamic acid in a ratio of 0.03 to 1.00% by weight per 1 weight of the resin. 一種石墨片,其特徵在於:其係將如請求項1至4中任一項之聚醯亞胺膜進行煅燒而獲得。A graphite sheet, characterized in that it is obtained by calcining a polyfluorene imine film according to any one of claims 1 to 4. 一種石墨片之製造方法,其特徵在於:其係對如請求項1至4中任一項之聚醯亞胺膜進行煅燒。A method for manufacturing a graphite sheet, which is characterized in that it is a method of calcining a polyfluorene film according to any one of claims 1 to 4.
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