TWI671262B - Ammonia concentration lifting device - Google Patents

Abstract

The invention is an ammonia gas concentration increasing device, which comprises an outer shell, a plurality of plate grooves and a cooling unit. The plurality of plate grooves are arranged in the accommodating space of the outer shell in a stacked manner, and the accommodating space is separated into a flowing space. At least one gas input end and at least one liquid output end are connected below the outer casing, and at least one gas output end is connected above the outer casing. The low-concentration ammonia gas entering from the gas input end will be transmitted to the gas output end through the flow space. The temperature of the low-concentration ammonia gas will gradually decrease as it is transported along the flow space, so that the water vapor in the low-concentration ammonia gas will condense to increase the ammonia Gas concentration, and high-concentration ammonia can be output from the gas output.

Description

Ammonia concentration raising device

The invention relates to an ammonia concentration increasing device, in which the temperature of a low-concentration ammonia gas gradually decreases during transmission, so that the water gas in the ammonia gas condenses into an aqueous solution, thereby increasing the ammonia gas concentration.

Ammonia is an important material in the semiconductor manufacturing process. Taking light emitting diodes (LEDs) as an example, pure ammonia is an important material for the manufacture of gallium nitride crystals for LEDs. Although the pure ammonia used in LED factories is generally 6N5 (99.99995%) or more Grade, but pure ammonia still cannot avoid traces of organic matter, such as acetone, isopropanol, methane, ethane, propane, ethylene, propylene and so on. When LED factories synthesize gallium nitride at a high temperature (750 ~ 1050 ° C) in the MOCVD process, organic substances will be cracked into derived impurities such as alkanes, olefins, carbon monoxide, carbon dioxide, carbon particles, ketene, and the like. These derivatized impurities will cause differential rows of gallium nitride crystals and form crystal defects, which will reduce the production yield of gallium nitride. However, it is still a very difficult technical problem to remove the trace organic compounds contained in pure ammonia.

On the other hand, for every 100 kilograms of pure ammonia supplied to the LED process, 80 kilograms of ammonia will be discharged from the process, and the ammonia concentration in the general discharge process is about 10% to 15%, and includes hydrogen, nitrogen, Methane, trace gases (carbon monoxide, carbon dioxide, ketene) and particulate matter (carbon particles and metallic gallium) are generally regarded as waste and are no longer used.

The invention proposes an ammonia gas concentration increasing device, which can be used to process low-concentration ammonia gas generated in a semiconductor manufacturing process and generate high-concentration ammonia gas. In this way, low-concentration ammonia can be recovered and reused, and the aqueous solution produced during the treatment process is more in compliance with the discharge standards of environmental protection regulations. For this reason, the invention can not only reduce the cost of the semiconductor manufacturing process, but also reduce the environmental pollution caused by the exhaust gas.

The invention provides an ammonia gas concentration increasing device, which mainly includes a plurality of plate grooves arranged in a stack, and forms a flow space between the plate grooves. In addition, the upper surface of the plate tank is provided with an accommodating tank, which can be used for containing the condensed aqueous solution. The aqueous solution in the accommodating tank can reduce the temperature of the lower surface of the plate tank, and is beneficial to the condensation of water vapor in the low-concentration ammonia gas in the plate tank. The lower surface and increase the ammonia concentration.

The invention proposes an ammonia gas concentration increasing device. A plurality of stacked plate grooves are mainly arranged in an outer shell body, and the accommodation space in the outer shell body is divided into a flow space through the plate grooves. At least one gas input end and at least one liquid output end are disposed below the outer casing, and at least one gas output end is disposed above the outer casing. The low-concentration ammonia gas entering from the gas input end is transported to the gas output end through the flow space, and the low-concentration ammonia gas is gradually cooled through the aqueous solution in the cooling unit, plate tank and / or accommodating tank, so that the The water gas is condensed into an aqueous solution, thereby removing the water gas in the low-concentration ammonia gas, and outputting a high-concentration ammonia gas at the gas output end. In addition, the ammonia content in the condensed aqueous solution is very low, meets the discharge standards of environmental protection regulations, and can be discharged from the liquid output end.

The invention proposes an ammonia concentration increasing device, comprising: a plurality of plate grooves, which are arranged in a stacked manner, the plate grooves include a plate body and at least one side plate, wherein the plate body includes an upper surface and a lower surface, and the side plate is provided on the plate The upper surface of the body, so that at least one receiving groove is formed between the side plate and the upper surface of the plate body; an outer shell includes an accommodating space, at least one gas input end, at least one gas output end, and at least one liquid output end, The stacked grooves are arranged in the accommodating space, and the accommodating space is separated into a flow space, wherein the gas input end, the gas output end, and the liquid output end are in fluid communication with the flow space; and a cooling unit is located in the cascade set Above the plurality of plate slots.

In an embodiment of the ammonia concentration increasing device of the present invention, a space exists between adjacent plate grooves.

In an embodiment of the ammonia concentration increasing device of the present invention, the outer shell includes a plurality of shell plates, and the accommodating space is located in the plurality of shell plates. Adjacent plate slots are respectively connected to two opposite sides of the outer shell. The shell plate forms a continuous channel between the plate groove and the shell plate, and the space and the open channel constitute a flow space.

In an embodiment of the ammonia concentration increasing device of the present invention, the side plate, the upper surface of the plate body, and the outer shell body form an accommodation groove.

In an embodiment of the ammonia concentration increasing device of the present invention, the gas input end is an input port of low-concentration ammonia gas, the gas output end is an output port of high-concentration ammonia gas, and the liquid output end is an output of an aqueous solution. mouth.

In an embodiment of the ammonia concentration increasing device of the present invention, the flowing space is fluidly connected to the gas input end and the gas output end, and the low-concentration ammonia gas entering from the gas input end is transmitted to the gas output end through the flow space.

In an embodiment of the ammonia concentration increasing device of the present invention, the gas input end and the liquid output end are near the bottom of the outer shell, and the gas output end is near the top of the outer shell.

In an embodiment of the ammonia concentration increasing device of the present invention, the upper surface and the lower surface of the plate body each have a plurality of recessed portions.

In an embodiment of the ammonia concentration increasing device of the present invention, the side plate provided on the upper surface of the plate body and the recessed portion on the upper surface of the plate body form an accommodation groove.

In an embodiment of the ammonia concentration increasing device of the present invention, a space exists between the recessed portions of adjacent plate grooves, and the cross-section of the space is hexagonal, regular hexagon, quadrilateral, polygonal, circular, or Oval.

Please refer to FIG. 1, which is a schematic structural diagram of an embodiment of an ammonia concentration increasing device according to the present invention. As shown in the figure, the ammonia concentration increasing device 10 according to the present invention mainly includes an outer shell 11, a plurality of plate grooves 13, and a cooling unit 17.

The outer shell 11 includes a plurality of shell plates 110, and an accommodating space 111 is formed in the plurality of shell plates 110. The plurality of plate bodies 13 are disposed in the accommodating space 111 of the outer shell 11. In an embodiment of the present invention, the outer casing 11 may be a cube or a rectangular parallelepiped. Of course, in actual application, the outer casing 11 may also be a three-dimensional structure with different shapes.

The outer casing 11 includes at least one gas input terminal 151, at least one gas output terminal 153, and at least one liquid output terminal 155. The gas input terminal 151, the gas output terminal 153, and the liquid output terminal 155 are in fluid communication with the contents of the outer casing 11. Space 111. In an embodiment of the present invention, the gas input terminal 151 and the liquid output terminal 155 are near the bottom of the outer casing 11, and the gas output terminal 153 is near the top of the outer casing 11.

In an embodiment of the present invention, the installation height of the gas output terminal 153 is higher than the gas input terminal 151 and the liquid output terminal 155, and the installation height of the gas input terminal 151 is higher than the liquid output terminal 155. During use, the gas entering from the lower gas input terminal 151 will naturally pass through the accommodation space 111 in the outer casing 11 and be output by the upper gas output terminal 153.

The plurality of plate grooves 13 are arranged in a stacked manner, and a space 113 is formed between adjacent plate grooves 13, for example, the lower surface 134 of the upper plate groove 13 and the upper surface 132 of the lower plate groove 13. There is a space 113 between them. In addition, each plate groove 13 includes a plate body 131 and a side plate 133, wherein the plate body 131 includes an upper surface 132 and a lower surface 134, and the side plate 133 is disposed on the upper surface 132 of the plate body 131, and the side plate 133 and the plate body 131 A receiving groove 135 is formed between the upper surfaces 132.

In an embodiment of the present invention, the side plates 133 of the plate groove 13 may be disposed around the plate body 131. As shown in FIG. 2, the plate body 131 is rectangular, and the side plates 133 are provided on all four sides of the plate body 131. An accommodation groove 135 is formed between the plate body 131 and the side plate 133. The dotted line in FIG. 3 is configured as the outer shell 11. When the plate groove 13 is provided inside the outer shell 11, one end of the adjacent plate groove 13 can be connected to different shell plates 110 of the outer shell 11 or two facing plates.壳 板 110。 The shell plate 110. For example, if one end of the lowermost plate groove 13 is connected to the right shell plate 112 of the outer casing 11, one end of another plate groove 13 adjacent to the lowermost plate groove 13 is connected to the left shell plate 114 of the outer casing 11, and The other plate grooves 13 above are connected to the two shell plates 110 facing each other in a staggered manner, so that one end of the plate groove 13 and the shell plate 110 of the outer body 11 will form a connecting channel 115, such as Shown in Figure 3.

In another embodiment of the present invention, the side plate 133 of the plate groove 13 may be disposed on at least one side of the plate body 131. As shown in FIG. 4, the plate body 131 is rectangular, and a side plate is provided on one side of the plate body 131. 133. The dashed line in FIG. 5 is configured as an outer casing. After the plate groove 13 is connected to the inner surface of the outer casing 11, an accommodation groove 135 will be formed between the plate 131, the side plate 133 and the outer casing 11, as shown in FIG. 5.

The separation space 113 is fluidly connected to the communication channel 115 and forms a flow space 117 fluidly connecting the gas input end 151 and the gas output end 153. Specifically, in the present invention, the stacked plate grooves 13 are arranged in the accommodation space 111 of the outer casing 11, and the accommodation space 111 is separated into a flow space 117, wherein the gas input end 151, the gas output end 153, and the liquid The output end 155 is in fluid communication with the flow space 117. The gas entering from the gas input terminal 151 below the outer casing 11 is transmitted to the gas output terminal 153 above the outer casing 11 through the flow space 117. In addition, the gas will come into contact with the plate groove 13 during the transfer.

The cooling unit 17 is disposed above the stacked plate grooves 13. For example, the cooling unit 17 may be disposed on the top of the outer casing 11. The cooling unit 17 can be used to reduce the temperature of the gas and the liquid inside the plate groove 13 and the accommodating space 111, and cause the water vapor in the gas to condense into an aqueous solution.

In an embodiment of the present invention, the gas input 151 is an input of a low-concentration ammonia 121, the gas output 153 is an output of a high-concentration ammonia 123, and the liquid output 155 is an output of an aqueous solution 125 mouth. In practical applications, the low-concentration ammonia gas 121 can be input into the outer casing 11 through the gas input terminal 151. After entering the outer casing 11, the low-concentration ammonia gas 121 is transmitted to the gas output terminal 153 through the flow space 117.

Due to the cooling unit 17, the temperature of the plate groove 13 in the outer casing 11 is lower than the temperature of the outside. After the low-concentration ammonia gas 121 contacts the plate tank 13, the water gas in the low-concentration ammonia gas 121 will condense on the lower surface 134 of the plate tank 13 due to the temperature drop, thereby removing the water gas in the ammonia gas. In addition, the condensed aqueous solution 125 will flow into the receiving groove 135 of the lower plate groove 13 due to the effect of gravity, so that the aqueous solution 125 in the receiving groove 135 of the plate groove 13 gradually increases.

Since the accommodating tank 135 of the plate tank 13 has an aqueous solution 125 therein, the lower surface 134 of the plate tank 13 can be maintained at a relatively low temperature. After the low-concentration ammonia gas 121 is in contact with the lower surface 134 of the plate tank 13, the temperature will also drop, so that the moisture in the low-concentration ammonia gas 121 condenses on the lower surface 134 of the plate tank 13 and flows to the capacity of the lower plate tank 13. Set in the groove 135.

In addition, when the height of the aqueous solution 125 accumulated in the containing tank 135 exceeds the side plate 133, the aqueous solution 125 will overflow to the bottom of the plate tank 13 and / or the bottom of the outer casing 11 and then be discharged from the liquid output end 155 of the outer casing 11 .

Specifically, in the present invention, a plurality of plate grooves 13 are arranged inside the outer casing 11 in a stacked manner, and a flow space 117 is formed inside the outer casing 11. The low-concentration ammonia gas 121 entering from the gas input terminal 151 will move along the flow space 117. The water gas in the low-concentration ammonia gas 121 will condense on the lower surface 134 of each plate groove 13 due to the temperature drop, and accumulate on the The accommodating grooves 135 of each plate groove 13 are used to achieve the purpose of increasing the ammonia gas concentration.

In the embodiment of the present invention, the closer to the space of the cooling unit 17, the temperature of the aqueous solution 125 in the plate tank 13 and the containing tank 135 is, the further away from the space of the cooling unit 17, the plate tank 13 and the containing tank 135 is. The temperature of the aqueous solution 125 is higher.

Therefore, the temperature of the ammonia gas 121 will gradually decrease as it approaches the cooling unit 17, and the water content of the ammonia gas 121 will gradually decrease, while the concentration of the ammonia gas will gradually increase. Specifically, when the ammonia gas is delivered to the uppermost plate groove 13 and the cooling unit 17, most of the water gas in the ammonia gas will be precipitated due to the temperature drop and condensed on the lower surface of the cooling unit 17. In addition, the condensed aqueous solution 125 will accumulate in the accommodating tank 135 closest to the plate tank 13 of the cooling unit 17, and a high-concentration ammonia gas 123 will be output to the outer casing 11 through the gas output terminal 123.

In an embodiment of the present invention, the pressure in the outer casing 11 may be between 1.0 and 9.0 atm, and the mass concentration of the low-concentration ammonia 121 entering from the gas input terminal 151 may be between 10% and 90% or 10 % To 99%, and the temperature of the cooling unit 17 may be below 10 degrees Celsius. When the number of the plate grooves 13 is three layers and the temperature of the cooling unit 17 is 10 degrees Celsius, the low-concentration ammonia with a mass concentration of 40% can pass through the ammonia gas concentration increasing device 10, and the gas output terminal 123 can output a mass concentration of 99%. Of high concentration ammonia 123. Of course, the above data is only an embodiment of the present invention, and is not a limitation on the scope of rights of the present invention.

Specifically, the concentration of the high-concentration ammonia gas 123 output by the ammonia gas concentration increasing device 10 will change with the temperature of the cooling unit 17 and the number and area of the plate grooves 13, and the user can adjust it according to demand. Therefore, the temperature of the cooling unit 17 and the number and area of the plate grooves 13 are not limited by the scope of the present invention.

In addition, the cooling unit 17 may be a common compressor cooling system or a liquid cooling circulation system. For example, the cooling unit 17 may include at least one input terminal 171 and at least one output terminal 173. The cooling liquid enters the cooling unit 17 from the input terminal 171. And output from the output terminal 173.

Please refer to FIG. 6, which is a schematic structural diagram of another embodiment of an ammonia concentration increasing device according to the present invention. As shown in the figure, the ammonia concentration increasing device 20 according to the present invention mainly includes an outer shell 21, a plurality of plate grooves 23, and a cooling unit 27. The cross-sectional direction of the embodiment of the present invention is the same as that of the embodiment of FIG. vertical.

In the embodiment of the present invention, as shown in FIGS. 7 and 8, the plate groove 23 includes a plate body 231 and at least one side plate 233. The plate body 231 includes an upper surface 232 and a lower surface 234, and the upper surface 232 and A plurality of recessed portions 237 are formed on the lower surface 234. Specifically, the flat plate may be bent or press-molded to form a plurality of recessed portions 237 on the plate body 231. One or both ends of the recessed portion 237 of the upper surface 232 of the plate 231 may be provided with a side plate 233, so that the side plate 233 and the recessed portion 237 of the upper surface 232 of the plate 231 form an accommodation groove 235.

The plurality of plate grooves 23 are arranged in a stacked manner. As shown in FIGS. 9 and 10, when two plate grooves 23 overlap, at least one space 213 may be formed between the recessed portions 237 of two adjacent plate grooves 23. In addition, two ends of two adjacent plate grooves 23 do not overlap, and a continuous passage 215 is formed between one end of the plate groove 23 and the outer casing 21, so that the space 213 and the connection passage 215 are fluidly connected to form a flow space 217, for example, The side edges of the two plate grooves 23 provided with the side plates 233 do not overlap.

In the above embodiment of the present invention, the cross-section of the space 213 formed by the recessed portions 237 of two adjacent plate grooves 23 is a hexagon or a regular hexagon, so that the space 213 forms a hexagon or a regular hexagon. Columnar body. In different embodiments, the cross-section of the space 213 formed by the two plate grooves 23 may also have other geometric shapes, such as a circle, an oval, a circular arc, a semicircle, a quadrangle, a diamond, and the like.

In the embodiment of the present invention, in two adjacent plate grooves 23, the lower surface 234 of the upper plate groove 23 contacts the upper surface 232 of the lower plate groove 23, but in actual application, the adjacent plate groove 23 It is not necessary to make contact with each other, and there may be a gap between the lower surface 234 of the upper plate groove 23 and the upper surface 232 of the lower plate groove 23.

The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of implementation of the present invention, that is, any change in shape, structure, characteristics, and spirit according to the scope of the patent application for the present invention is equivalent to Modifications shall all be included in the scope of patent application of the present invention.

10‧‧‧Ammonia concentration raising device

11‧‧‧ Outer shell

110‧‧‧Shell plate

111‧‧‧accommodation space

112‧‧‧Right shell plate

113‧‧‧ Space

114‧‧‧Left shell plate

115‧‧‧ with access

117‧‧‧mobile space

121‧‧‧ low concentration ammonia

123‧‧‧High concentration ammonia

125‧‧‧ water solution

13‧‧‧Slot

131‧‧‧ plate

132‧‧‧upper surface

133‧‧‧Side panel

134‧‧‧ lower surface

135‧‧‧Receiving slot

151‧‧‧Gas input

153‧‧‧Gas output

155‧‧‧Liquid output terminal

17‧‧‧cooling unit

171‧‧‧input

173‧‧‧output

20‧‧‧Ammonia concentration raising device

21‧‧‧ outer shell

213‧‧‧space

215‧‧‧ with access

217‧‧‧mobile space

23‧‧‧Slot

231‧‧‧board

232‧‧‧upper surface

233‧‧‧Side

234‧‧‧ lower surface

235‧‧‧Receiving slot

237‧‧‧ Depression

27‧‧‧cooling unit

FIG. 1 is a schematic structural diagram of an embodiment of an ammonia concentration increasing device according to the present invention.

FIG. 2 is a schematic perspective view of an embodiment of a plate groove of the ammonia concentration increasing device of the present invention.

FIG. 3 is a schematic perspective view of an embodiment of a plate groove and a casing of the ammonia concentration increasing device of the present invention.

FIG. 4 is a schematic perspective view of another embodiment of a plate groove of the ammonia concentration increasing device of the present invention.

FIG. 5 is a schematic perspective view of another embodiment of a plate groove and a casing of the ammonia concentration increasing device of the present invention.

FIG. 6 is a schematic structural diagram of another embodiment of an ammonia concentration increasing device according to the present invention.

FIG. 7 is a schematic cross-sectional view of another embodiment of a plate groove of the ammonia concentration increasing device of the present invention.

FIG. 8 is a schematic perspective view of another embodiment of a plate groove of the ammonia concentration increasing device of the present invention.

FIG. 9 is a schematic cross-sectional view of an embodiment of plate grooves stacked in an ammonia gas concentration increasing device of the present invention.

FIG. 10 is a schematic perspective view of an embodiment of plate grooves arranged in a stack in the ammonia concentration increasing device of the present invention.

Claims (9)

An ammonia gas concentration increasing device includes a plurality of plate grooves arranged in a stacked manner. The plate groove includes a plate body and at least one side plate, wherein the plate body includes an upper surface and a lower surface, and the side plate is disposed on the side plate. The upper surface of the plate body, so that at least one receiving groove is formed between the side plate and the upper surface of the plate body; an outer shell body including a plurality of shell plates, at least one gas input end, at least one gas output end, and at least A liquid output end, the plurality of shell plates have an accommodation space, the stacked plate slots are disposed in the accommodation space, and the accommodation space is separated into a flow space, wherein the gas input end, The gas output end and the liquid output end are in fluid communication with the flow space, and there is a space between the adjacent plate grooves, and the adjacent plate grooves respectively connect the two shell plates facing each other of the outer shell. And a connecting channel is formed between the plate groove and the shell plate, and the space and the connecting channel form the flow space; and a cooling unit is disposed on the top of the outer shell. According to the ammonia concentration increasing device according to item 1 of the scope of patent application, wherein the side plate, the upper surface of the plate body, and the shell plate of the outer shell form the containing groove. According to the ammonia concentration increasing device according to item 1 of the scope of the patent application, the gas input end is an input port of low-concentration ammonia gas, the gas output end is an output port of high-concentration ammonia gas, and the liquid output end It is an outlet for an aqueous solution. The ammonia gas concentration increasing device according to item 3 of the scope of patent application, wherein the flow space is fluidly connected to the gas input end and the gas output end, and the low-concentration ammonia gas entering from the gas input end is transmitted to the flow space to The gas output. The ammonia gas concentration increasing device according to item 1 of the scope of the patent application, wherein the gas input end and the liquid output end are near the bottom of the outer casing, and the gas output end is near the top of the outer casing. According to the ammonia concentration increasing device described in the first item of the patent application scope, the upper surface and the lower surface of the plate body each have a plurality of depressions. According to the ammonia concentration increasing device according to item 6 of the scope of the patent application, wherein the side plate and the recessed portion on the upper surface of the plate body form the accommodation groove. According to the ammonia concentration increasing device according to item 6 of the scope of the patent application, wherein the space exists between the recessed portions of the adjacent plate grooves, and the space of the space has a hexagonal or quadrangular cross section. According to the ammonia gas concentration increasing device according to item 6 of the scope of the patent application, wherein the space exists between the recessed portions of the adjacent plate grooves, and the space of the space has a polygonal, circular, or arc-shaped cross section.