CN202363434U

CN202363434U - Cover plate, wet etching slot and wet etching device

Info

Publication number: CN202363434U
Application number: CN 201120516758
Authority: CN
Inventors: 周伯柱; 郑载润; 吴代吾; 王世凯; 訾玉宝; 张洪波; 耿军; 刘剑钊
Original assignee: BOE Technology Group Co Ltd; Hefei BOE Optoelectronics Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Hefei BOE Optoelectronics Technology Co Ltd
Priority date: 2011-12-12
Filing date: 2011-12-12
Publication date: 2012-08-01
Anticipated expiration: 2021-12-12

Abstract

The utility model discloses a cover plate, a wet etching slot and a wet etching device. The cover plate comprises an upper cover plate and a lower cover plate which are arranged in an involution manner. According to the cover plate, the wet etching slot and the wet etching device which are disclosed by the utility model, acid mist is drawn from the through holes of the lower cover plate and the air exhaust ports of the upper cover plate, so that the influence of acid liquid drips on base plate etching due to a condition that the acid mist condenses on the upper cover plate and the lower cover plate to form acid liquid drips to drop on a base plate can be avoided, so that the etching on the base plate can be uniform, and the qualified rate of products is improved.

Description

A kind of cover plate, wet etching groove and wet etching equipment

Technical field

The utility model relates to the technical field of wet etching, relates in particular to a kind of cover plate, wet etching groove and wet etching equipment.

Background technology

Wet-etching technology mainly is meant the lithographic technique that adopts the liquid chemical medicine that the etching thing is removed.Wet etching is with suitable etching liquid; Carry out chemical reaction with the etching thing, change the structure of etching thing, the part that no photoresist is covered breaks away from substrate surface; And, so just obtained needed figure at substrate surface there being the photoresist region covered to preserve.

Be in the wet etching groove, to utilize acidic liquid that substrate is carried out etching in the wet etching equipment; In the production process; On the cover plate attached to the wet etching groove, the acid droplet that adheres on the cover board will condense into big acid drop to the acid mist that acidic liquid volatilization forms gradually, when big acid drop drops on the substrate gradually; To cause the etching of substrate inhomogeneously, influence the product yield.

The utility model content

For addressing the above problem, the utility model provides a kind of cover plate, wet etching groove and wet etching equipment, and when being used to solve the wet etching substrate, acid drop drops on and causes problem inhomogeneous to the etching of substrate, that the product yield is low on the substrate.

For this reason, the utility model provides a kind of cover plate, comprising: upper cover plate and lower cover.

Wherein, the involutory setting of said upper cover plate and lower cover, the said upper cover plate of involutory setting and lower cover peripheral airtight keeps pre-set space between said upper cover plate and the lower cover.

Wherein, said upper cover plate is provided with exhaust pipe mouth, and said exhaust pipe mouth is connected to outside air extractor.

Wherein, said lower cover is provided with through hole.

Wherein, said lower cover is a concaveconvex structure with the surface of the corresponding side of said upper cover plate, and said through hole runs through the raised position in the said concaveconvex structure.

Wherein, said concaveconvex structure comprises at least two row's male members, is groove between adjacent two row's male members.

Wherein, said through hole is a circular port, and the diameter of said circular port is between 3-15mm.

The utility model also provides a kind of wet etching groove, comprising any one above-mentioned cover plate.

The utility model also provides a kind of wet etching equipment, comprising above-mentioned wet etching groove.

The utlity model has following beneficial effect:

In the cover plate that the utility model provides, wet etching groove and the wet etching apparatus embodiments; Acid mist is detached out the wet etching groove through the through hole of lower cover and the exhaust pipe mouth of upper cover plate; Avoid acid mist to become acid drop and drop on the substrate in the surface condensation of upper cover plate and lower cover; Prevent of the influence of acid drop to base plate carving and corrosion, make the etching of substrate more even, thereby improve the product yield.

Description of drawings

Fig. 1 is the utility model cover plate first embodiment stereogram;

Fig. 2 is the sectional drawing of A-A direction among Fig. 1;

Fig. 3 is the stereogram of the lower cover in the cover plate shown in Figure 1;

Fig. 4 is the stereogram of the utility model cover plate second embodiment;

Fig. 5 is the sectional drawing of B-B direction among Fig. 4;

Fig. 6 is the stereogram of upper cover plate in the cover plate shown in Figure 4;

Fig. 7 is the stereogram of lower cover in the cover plate shown in Figure 4.

Embodiment

For making those skilled in the art understand the technical scheme of the utility model better, the cover plate, wet etching groove and the wet etching equipment that the utility model are provided below in conjunction with accompanying drawing are described in detail.

Fig. 1 is the utility model cover plate first embodiment stereogram, and Fig. 2 is the sectional drawing of A-A direction among Fig. 1, and Fig. 3 is the stereogram of the lower cover in Fig. 1 cover plate.Like Fig. 1, shown in 2 and 3; The present embodiment cover plate comprises upper cover plate 101, lower cover 102; Upper cover plate 101 is provided with exhaust pipe mouth 1011, and exhaust pipe mouth 1011 is used to be connected to outside devices such as air exhauster, and exhaust pipe mouth 1011 can be positioned at arbitrary side of upper cover plate 101; Lower cover 102 is provided with through hole 1021; After upper cover plate 101 and lower cover 102 are involutory, keep pre-set space between upper cover plate 101 and the lower cover 102, through hole 1021 is communicated with exhaust pipe mouth 1011 through pre-set space, and upper cover plate after involutory 101 and lower cover 102 is peripheral airtight.

Fig. 4 is the stereogram of the utility model cover plate second embodiment, and Fig. 5 is the sectional drawing of B-B direction among Fig. 4, and Fig. 6 is the stereogram of upper cover plate in the cover plate shown in Figure 4, and Fig. 7 is the stereogram of lower cover in the cover plate shown in Figure 4.Like Fig. 4,5, shown in 6 and 7, the lower cover 102 in the present embodiment is a concaveconvex structure with the surface of upper cover plate 101 corresponding sides, and through hole 1021 is through lower cover 102, so that the wet etching groove is communicated with exhaust pipe mouth 1011 in the upper cover plate 101.In the present embodiment, the raised position in the concaveconvex structure on the lower cover 102 comprises the male member 1022 of at least two row's rules, is groove 1023 between adjacent two row's male members 1022, and through hole 1021 is through male member 1022.

In practical application; Upper cover plate 101 and lower cover 102 are placed on the wet etching groove after involutory, wherein, upper cover plate 101 and lower cover 102 peripheral airtight; Keep pre-set space between the two; Pre-set space comprises space and the space between upper cover plate 101 and the groove 1023 between upper cover plate 101 and the male member 1022, and the exhaust pipe mouth 1011 of upper cover plate 101 is connected with outside air extractor, wherein; The periphery of upper cover plate 101 and lower cover 102 agrees with airtight, so that the pre-set space between upper cover plate 101 and the lower cover 102 only is communicated with outside air extractor through exhaust pipe mouth 1011.When in the wet etching groove, substrate being carried out etching process; The top of wet etching groove will be full of acid mist; Open air exhauster so that the space between upper cover plate 101 and the lower cover 102 keeps negative pressure state with respect to the wet etching slot space; So that near the acid mist the lower cover 102 can be through lower cover 102 through hole 1021, upper cover plate 102 exhaust pipe mouth 1011 and detached out the wet etching groove; Groove 1023 can reclaim the acid drop that condenses in upper cover plate 102, and in follow-up pumping process, acid drop is detached out the pre-set space between upper cover plate 101 and the lower cover 102, falls into the wet etching groove to prevent the acid drop on the upper cover plate 102.

In the present embodiment; Acid mist is detached out the wet etching groove through the through hole of lower cover and the exhaust pipe mouth of upper cover plate; Avoid acid mist to become acid drop and drop on the substrate in the surface condensation of upper cover plate and lower cover; Prevent of the influence of acid drop to base plate carving and corrosion, make the etching of substrate more even, thereby improve the product yield.

In practical application, through hole 1021 is a circular port, and the diameter of circular port is between 3-15mm, and through hole 1021 also can be other shape, like hexagon through hole etc.

The utility model also provides a kind of wet etching groove, comprises Fig. 1 or cover plate shown in Figure 2.

The utility model also provides a kind of wet etching equipment; Comprise air exhauster and wet etching groove; The wet etching groove comprises Fig. 1 or cover plate shown in Figure 2, upper cover plate 101 and lower cover 102 is placed on the wet etching groove upper cover plate 101 and lower cover 102 peripheral airtight after involutory; Reveal away from the upper cover plate 101 and the slit of lower cover 102 peripheries to prevent the acid mist in the wet etching groove; Making the pre-set space between upper cover plate 101 and the lower cover 102 through the air exhauster extracting gases is negative pressure, so that the acid mist near lower cover 102 in the wet etching groove is detached away, is beneficial to acid mist is handled to prevent the acid mist pollution environment; Avoid acid mist to become acid drop and drop on the substrate again in the surface condensation of lower cover 102; Reduce of the influence of acid drop to base plate carving and corrosion, so that more even to the etching of substrate, thus the product yield can be improved.

It is understandable that above execution mode only is the illustrative embodiments that adopts for the principle that the utility model is described, yet the utility model is not limited thereto.For the one of ordinary skilled in the art, under the situation of spirit that does not break away from the utility model and essence, can make various modification and improvement, these modification and improvement also are regarded as the protection range of the utility model.

Claims

1. a cover plate is characterized in that comprising: upper cover plate and lower cover.

2. cover plate according to claim 1 is characterized in that, the involutory setting of said upper cover plate and lower cover, and the said upper cover plate of involutory setting and lower cover peripheral airtight keeps pre-set space between said upper cover plate and the lower cover.

3. cover plate according to claim 2 is characterized in that said upper cover plate is provided with exhaust pipe mouth, and said exhaust pipe mouth is connected to outside air extractor.

4. cover plate according to claim 3 is characterized in that said lower cover is provided with through hole.

5. cover plate according to claim 4 is characterized in that, said lower cover is a concaveconvex structure with the surface of the corresponding side of said upper cover plate, and said through hole runs through the raised position in the said concaveconvex structure.

6. cover plate according to claim 5 is characterized in that, said concaveconvex structure comprises at least two row's male members, is groove between adjacent two row's male members.

7. according to the arbitrary described cover plate of claim 1-6, it is characterized in that said through hole is a circular port, the diameter of said circular port is between 3-15mm.

8. a wet etching groove is characterized in that comprising the arbitrary described cover plate of claim 1-7.

9. a wet etching equipment is characterized in that comprising the described wet etching groove of claim 8.