CN202226922U - Water dropping system - Google Patents
Water dropping system Download PDFInfo
- Publication number
- CN202226922U CN202226922U CN2011202994206U CN201120299420U CN202226922U CN 202226922 U CN202226922 U CN 202226922U CN 2011202994206 U CN2011202994206 U CN 2011202994206U CN 201120299420 U CN201120299420 U CN 201120299420U CN 202226922 U CN202226922 U CN 202226922U
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- Prior art keywords
- silicon chip
- water
- water dropping
- volumes
- dripping
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Abstract
The utility model discloses a water dropping system for cleaning equipment and wet process treatment equipment. The water dropping system comprises a constant-pressure barrel (3) and a plurality of valves (4) connected with the bottom of the constant-pressure barrel (3) in parallel through a pipeline (1), wherein water outlets of all the valves (4) are connected with water dropping knives (5). The water dropping system can uniformly and fully drop water on the whole upper surface of a silicon chip, protect the upper surface of the silicon chip from being corroded by acid gas, and prevent liquid medicine in a reaction tank from spreading to the upper surface of the silicon chip. The width of an etching line is reduced and the periphery of the silicon chip can also be guaranteed to be etched. Therefore, the production process is improved and the production cost is reduced.
Description
Technical field
The utility model relates to processing treatment equipment, relates in particular to a kind of system of dripping of the silicon chip erosion operation that is used for cleaning equipment and wet processing apparatus.
Background technology
Microelectronics is in high speed development in modern times, and little chip is performed meritorious deeds never to be obliterated.The condition that in the process for processing of silicon chip, requires is very harsh, and particularly the requirement of the etching procedure of silicon chip is very high, guarantee that the etched line of silicon chip surface is more carefully good more.Yet at present on the market processing units is difficult to accomplish that the etched line of silicon chip surface is thin as far as possible, causes product rejection rate high thereby can guarantee again can both be etched around the silicon chip, hinders the development of technology.
The utility model content
The utility model is to solve prior art fails to make silicon chip surface in the etching procedure of silicon chip the thin as far as possible technical problem that can both be etched with assurance silicon chip tow sides of etched line, proposes a kind of system of dripping.
For solveing the technical problem, a kind of system of dripping that the utility model proposes, it comprises a plurality of valves that constant voltage bucket, the bottom through a pipeline and this constant voltage bucket are connected in parallel, water cutter of water outlet connection of each valve.The cutter that drips comprises a volumes, and the upper end of this volumes is connected with the water outlet of said valve, and the volumes lower end is dull and stereotyped, and this flat board is evenly equipped with a plurality of weepers.Described volumes is the flattened rectangular cylinder, and constant voltage bucket one side has liquid level tube.
The utility model connects constant voltage bucket and valve through pipeline, and drips cutter with even full silicon chip entire upper surface of water by valve control, has protection silicon chip upper surface acid and alkali gas corrosion, and the soup of reactive tank can not spread to the silicon chip upper surface.So just can reduce the etched line width as far as possible, guarantee to be etched around the silicon chip, improve the progress of producing and reduce production costs thereby have.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is made detailed explanation, wherein:
Fig. 1 is the structural representation of the utility model preferred embodiment.
Embodiment
The utility model preferred embodiment as shown in Figure 1, described a kind of system of dripping, it comprises five valves 4 that constant voltage bucket 3, the bottom through a pipeline 1 and this constant voltage bucket 3 are connected in parallel, the water outlet of each valve 4 connects a water cutter 5.The cutter 5 that drips comprises a volumes 7, and the upper end of this volumes is connected with the water outlet of said valve 4, and the lower end of this volumes is dull and stereotyped, and this flat board is evenly equipped with a plurality of weepers 6.Volumes 7 is the flattened rectangular cylinder.Said constant voltage bucket 3 one sides are provided with liquid level tube 2.
Like Fig. 1, there is a constant voltage bucket 3 on the top, and water flows out from constant voltage bucket 3 bottoms through pipeline 1, according to processing requirement, and the switching of system control valve door 4.When current get into the cutter 5 that drips, current ooze through the weeper 6 on the flat board of cutter 5 lower ends of dripping, and drip equably on the surface of the silicon chip of cutter 5 belows of dripping.The drip quantity and the installation site of cutter 5, configuration as required.
The utility model connects constant voltage bucket and valve through pipeline, and drips cutter with even full silicon chip entire upper surface of water by valve control, has protection silicon chip upper surface acid and alkali gas corrosion, and the soup of reactive tank can not spread to the silicon chip upper surface.So just can reduce the etched line width as far as possible, guarantee to be etched around the silicon chip, improve the progress of producing and reduce production costs thereby have.
More than engage preferred embodiments the utility model is specifically described, but those skilled in the art can make numerous variations or variation to these embodiments, these changes and variation should fall within the scope of the utility model protection.
Claims (4)
1. the system of dripping is characterized in that, comprises a plurality of valves (4) that constant voltage bucket (3), the bottom through a pipeline (1) and this constant voltage bucket (3) are connected in parallel, and the water outlet of each valve (4) connects a water cutter (5).
2. the system of dripping according to claim 1; It is characterized in that the described cutter that drips (5) comprises a volumes (7), the upper end of this volumes is connected with the water outlet of said valve (4); The lower end of this volumes is dull and stereotyped, and this flat board is evenly equipped with a plurality of weepers (6).
3. according to the described system of dripping of claim 2, it is characterized in that described volumes (7) is the flattened rectangular cylinder.
4. according to the described system of dripping of claim 1, it is characterized in that said constant voltage bucket (3) one sides are provided with liquid level tube (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202994206U CN202226922U (en) | 2011-08-17 | 2011-08-17 | Water dropping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202994206U CN202226922U (en) | 2011-08-17 | 2011-08-17 | Water dropping system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202226922U true CN202226922U (en) | 2012-05-23 |
Family
ID=46077520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202994206U Expired - Lifetime CN202226922U (en) | 2011-08-17 | 2011-08-17 | Water dropping system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202226922U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800581A (en) * | 2012-08-28 | 2012-11-28 | 常州捷佳创精密机械有限公司 | Equipment and method for softly etching and cleaning solar cell slice |
-
2011
- 2011-08-17 CN CN2011202994206U patent/CN202226922U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800581A (en) * | 2012-08-28 | 2012-11-28 | 常州捷佳创精密机械有限公司 | Equipment and method for softly etching and cleaning solar cell slice |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120523 |
|
| CX01 | Expiry of patent term |