CN202845409U - Etching air exhaust device - Google Patents
Etching air exhaust device Download PDFInfo
- Publication number
- CN202845409U CN202845409U CN2012203933543U CN201220393354U CN202845409U CN 202845409 U CN202845409 U CN 202845409U CN 2012203933543 U CN2012203933543 U CN 2012203933543U CN 201220393354 U CN201220393354 U CN 201220393354U CN 202845409 U CN202845409 U CN 202845409U
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- CN
- China
- Prior art keywords
- air exhaust
- etching
- exhaust device
- utility
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Drying Of Semiconductors (AREA)
Abstract
The utility model discloses an etching air exhaust device with good utilization effect. The etching air exhaust device comprises idler wheels, an air exhaust tube is arranged below the idler wheels, and air exhaust holes are formed in the air exhaust tube. The etching air exhaust device is applied to air exhaust of a wet etching process of a solar battery piece.
Description
Technical field
The utility model relates to a kind of solar battery sheet manufacturing equipment, relates in particular to a kind of device for having the exhausting function on the solar battery sheet etching apparatus.
Background technology
The crystal silicon solar energy battery manufacturing has the wet etching operation one, the general design of this processing apparatus is divided into pickling section, etching section, washing section, alkali cleaning section, washing section, pickling section, washing section, the section of drying up, wherein the etching section is generally the transmission of " Overwater-floating " roller, contact with corrosive liquid below the silicon chip and all around in the etching process, not contact corrosion of the above liquid, but between etching section and washing section, silicon chip all breaks away from corrosive liquid, at this moment, can below silicon chip, produce corrosive fume, this flue gas has corrosiveness to the silicon chip upper surface of humidity, should in time remove.Generally all be to adopt to add suction opeing at etching section loam cake, still this design can not be taken corrosive gas away the very first time, easily is interfered, cause silicon slice corrosion inhomogeneous, square resistance rises unstable, easily forms large " fog " in equipment cover plate inboard, thereby affects product quality.
The utility model content
The technical problems to be solved in the utility model provides the good etching extractor fan of a kind of result of use.
In order to solve the problems of the technologies described above, the utility model is achieved through the following technical solutions:
The utility model comprises the roller of being located in the cell body, and described roller below is provided with exhaust column, and described exhaust column is provided with wind inlet.
Because the utility model adopts the exhaust column that is provided with wind inlet below roller, because exhausting is positioned at the silicon chip below, be conducive in time take away corrosive gas, avoid " fog " to waft to the silicon chip upper surface, guarantee the uniformity of upper surface, improved the exhausting effect, improved product quality.
Description of drawings
Accompanying drawing is structural representation of the present utility model.
The specific embodiment
Below in conjunction with the drawings and the specific embodiments the utility model is described in further detail:
As shown in drawings: the utility model comprises the roller 2 of being located in the cell body 1, and roller 2 belows are provided with exhaust column 3, and exhaust column 3 is provided with wind inlet 5.
The utility model in use, one end of exhaust column is connected with outside blower fan, by regulating the distance between outside blower fan exhausting amount or adjustment exhaust column and the silicon chip, the corrosive gas very first time that silicon chip is produced is pumped, can not waft to the silicon chip upper surface, thus the uniformity of assurance upper surface.
Claims (1)
1. an etching extractor fan comprises the roller of being located in the cell body, it is characterized in that described roller below is provided with exhaust column, and described exhaust column is provided with wind inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203933543U CN202845409U (en) | 2012-08-08 | 2012-08-08 | Etching air exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203933543U CN202845409U (en) | 2012-08-08 | 2012-08-08 | Etching air exhaust device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202845409U true CN202845409U (en) | 2013-04-03 |
Family
ID=47976645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012203933543U Expired - Fee Related CN202845409U (en) | 2012-08-08 | 2012-08-08 | Etching air exhaust device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202845409U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986344A (en) * | 2019-11-22 | 2020-04-10 | 亢慧慧 | Air draft structure for fresh air system |
-
2012
- 2012-08-08 CN CN2012203933543U patent/CN202845409U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986344A (en) * | 2019-11-22 | 2020-04-10 | 亢慧慧 | Air draft structure for fresh air system |
| CN110986344B (en) * | 2019-11-22 | 2021-08-03 | 牛墨石墨烯应用科技有限公司 | Air draft structure for fresh air system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130403 Termination date: 20140808 |
|
| EXPY | Termination of patent right or utility model |