TWI668782B - Width adjustable moving mechanism - Google Patents

Abstract

The present invention is directed to providing a width-adjustable moving mechanism that can avoid collision with a wafer while moving. The technical means: in order to be compatible with the wafer production equipment application, the width-adjustable moving mechanism comprises a seat body having a vertical portion and a horizontal portion; a guide rail disposed on the edge of the horizontal surface; and a top portion of the guide rail a first bracket group at one end of the side; a second bracket group disposed at the other end of the top side of the rail; a passive wheel disposed at one end of the front side of the vertical portion; and a driving wheel disposed at the other end of the front side of the vertical portion; a flexible belt body annularly disposed outside the passive and driving wheels and forming a top and a bottom side section; and a driving device axially coupled to the driving wheel; the top side section is coupled to the first carrier arm set, and the bottom side zone is The segment is connected to the second carrier arm set, and the driving device can drive the flexible belt body to synchronize the first and second carrier arm groups in the opposite direction.

Description

Width adjustable moving mechanism

The invention relates to a wafer moving structure on a wafer manufacturing process, in particular to a width adjustable moving mechanism.

Wafer manufacturing is the most important upstream industry in the entire semiconductor industry. As semiconductors develop rapidly, the wafer size is getting bigger and bigger, but the relative line width is getting smaller and smaller. In order to improve the wafer production yield, it is necessary. Avoiding contamination by particles during the production process, and the largest source of particles is the human body, so all fabs are doing everything they can to reduce the chance of field operators accessing the wafers, and at the same time, to reduce manufacturing costs, import Automated production equipment and automated material handling systems are inevitable trends in the industry.

However, the conventional width-fixed moving mechanism, when transferring the wafer from the production line to the wafer carrier, is easy to impact or rub into the edge of the adjacent wafer due to the slight deformation of the wafer itself, and the overall wafer production is good. The rate is an adverse effect.

In view of the above, it is an object of the present invention to provide a width-adjustable moving mechanism that solves the aforementioned problems and minimizes the impact or collision with the wafer.

It is an object of the present invention to provide a width-adjustable moving mechanism that avoids collision with a wafer while moving.

In order to solve the above problems and achieve the object of the present invention, the technical means of the present invention, This is achieved by a width-adjustable moving mechanism that can be used in conjunction with a wafer production equipment, characterized in that the width-adjustable moving mechanism (100) includes a body (1) having one side that overlaps each other. a vertical portion (11), and a horizontal portion (12); a guide rail (2) disposed on a surface edge of the horizontal portion (12); a first carrier arm group (3) disposed on the guide rail (2) one end of the top side; a second set of bracket arms (4) disposed at the other end of the top side of the guide rail (2), capable of cooperating with the first set of support arms (3), and absorbing and positioning the wafer together (10) a stable carrier (10); a passive wheel (5) disposed at one end of the front side of the vertical portion (11); a driving wheel (6), which is disposed at the vertical portion (11) The other end of the front side; a flexible belt body (7) wound around the passive wheel (5) and the driving wheel (6) in an annular shape, and forming a top side section (71) and a bottom side Section (72), and the top side section (71) is coupled to the first set of arm groups (3), and the bottom side section (72) is coupled to the second set of arm sets (4) to constitute a linkage relationship; and a driving device (8) that is coupled to the driving wheel (6) for Moving the flexible strip (7) so that the first set of the supporting arm (3) synchronized with the second interlocking set of carriage arm (4), in the opposite direction movement.

More preferably, the first set of support arms (3) further includes a slide (A) that can be stacked from bottom to top and can be engaged with the guide rail (2), and is disposed on the slide a support block (B) at the top of the seat (A), a connecting plate (C) disposed at the top end of the support block (B) and capable of cooperating with the flexible band body (7), and a connecting plate (C) disposed on the connecting plate (C) a top air seat (D), a support arm plate (E) having one end disposed at a top end of the air seat (D), and a sealing ring disposed between the air seat (D) and the support arm plate (E) ( F); the second set of brackets (4) further comprising a slide (A) that can be stacked from bottom to top and can be engaged with the guide rail (2), and a slide (A) is disposed on the slide ( A) a connecting plate (C) having a top end and being engageable with the flexible strip body (7), a supporting block (B) disposed at a top end of the connecting plate (C), and a top portion disposed on the top end of the connecting plate (C) a gas seat (D), a support arm plate (E) having one end disposed at a top end of the air seat (D), and a sealing ring (F) disposed between the air seat (D) and the support arm plate (E) .

More preferably, the flexible tape body (7) is a belt or chain structure.

More preferably, the connecting plate (C), which is connected to the flexible strip body (7), is further provided with a groove (C1) for receiving a corresponding portion of the flexible strip body (7), and A positioning piece (C2) capable of cooperating with the flexible strip body (7) is further disposed at a top end opening of the groove (C1); and the air seat (D) is further provided with a gas seat (D) a vent (D1) at the top end corresponding to the seal ring (F), an air passage (D2) provided in the air seat (D) and allowing the air hole (D1) to communicate with an external vacuum pump, and a a positioning groove (D3) that cooperates with one end of the supporting arm plate (E); the supporting arm plate (E) further includes a supporting arm body (E1) which is disposed from the fixed end to the outside and is widened and narrowed, And a closing piece (E2) embedded in the bottom end surface of the arm body (E1), the free end of the arm body (E1) is provided with an air suction positioning hole (E11), and the arm body (E1) is inside the arm body (E1) Provided by the suction positioning hole (E11), extending to a venting groove (E12) corresponding to the air hole (D1), and the supporting arm body (E1) is engaged with the closing piece (E2) a recessed groove (E121) communicating with the venting groove (E12) is further recessed, and the closing piece (E2) corresponds to the gas (D1), the further provided with a passage hole (E21).

More preferably, the armrest plate (E) has a positioning suction groove (E111) communicating with the suction positioning hole (E11) at the suction positioning hole (E11).

More preferably, the support arm plate (E) is formed with a support pedestal (E13) protruding upward corresponding to the positioning suction groove (E111).

More preferably, the base body (1) further includes a limit sensing portion (13), the limit sensing portion (13) is disposed at the vertical portion (11), corresponding to the first arm group (3) one end side of the rear side; the first arm group (3) further includes a touch piece (G), and the touch piece (G) is disposed on the connecting plate (C) corresponding to the limit sensing part At one side of (13), it can be engaged with the limit sensing portion (13).

More preferably, the base body (1) further includes a central stop (14), a a first stopper (15) and a second stopper (16), the central stopper (14) is disposed at a center of an edge of the horizontal portion (12), and the first stopper (15) is disposed at the horizontal portion ( 12) The edge is adjacent to one end of the first carrier arm group (3), and the second stopper (16) is disposed at an edge of the horizontal portion (12) adjacent to one end of the second carrier arm group (4).

The beneficial effects of the invention are:

The first point: the width-adjustable moving mechanism (100) of the present invention passes through the seat body (1), the guide rail (2), the first support arm set (3), the second support arm set (4), and the passive wheel (5) The cooperation of the driving wheel (6), the flexible belt body (7) and the driving device (8) can be applied with different sizes of wafers (10) to allow the first carrier arm group (3) and the second carrier arm Group (4) can be moved closer to the edge of the wafer (10), avoiding bumping or bumping when moving the wafer (10) into the wafer carrier (20) on the premise of moving the wafer (10) stably To the adjacent wafer (10).

The second point: the width-adjustable moving mechanism (100) of the present invention applies the cooperation of the flexible belt body (7) and the driving device (8), and in addition to being convenient for production and application, the most important thing is that it can be easily controlled and allowed The first set of armrests (3) and the second set of armrests (4) move stably, move correctly to a predetermined position, and are not displaced during movement.

1‧‧‧ body

11‧‧‧Vertical

12‧‧‧ horizontal department

13‧‧‧ Extreme Sensing Department

14‧‧‧Central stop

15‧‧‧First stop

16‧‧‧second stop

2‧‧‧rail

3‧‧‧First arm group

4‧‧‧second arm group

5‧‧‧French wheel

6‧‧‧Drive wheel

7‧‧‧Flexible belt

71‧‧‧Top side section

72‧‧‧Bottom section

8‧‧‧ drive

9‧‧‧Shell

10‧‧‧ wafer

20‧‧‧ wafer carrier

A‧‧‧ slide

B‧‧‧Support block

C‧‧‧Connecting plate

C1‧‧‧ trench

C2‧‧‧ Positioning sheet

D‧‧‧ air seat

D1‧‧‧ stomata

D2‧‧‧ airway

D3‧‧‧ positioning groove

E‧‧‧托臂板

E1‧‧‧ bracket arm body

E11‧‧‧Intake positioning hole

E111‧‧‧ Positioning suction slot

E12‧‧‧Ventilation slot

E121‧‧‧ slotted

E13‧‧‧Support pedestal

E2‧‧‧Closed sheet

E21‧‧‧Channel hole

F‧‧‧ sealing ring

G‧‧‧Touching piece

100‧‧‧Width adjustable moving mechanism

Figure 1 is a perspective view of the present invention.

Fig. 2 is an exploded perspective view of the present invention.

Figure 3 is an exploded perspective view of the first carrier arm set of the present invention.

Figure 4 is an exploded perspective view of the second carrier arm set of the present invention.

Fig. 5 is a schematic view showing the X-X cross section in Fig. 1.

Figure 6 is a schematic perspective view of the present invention.

Figure 7: Schematic diagram of a rear view of the present invention.

Figure 8 is a schematic view showing the implementation of the present invention.

Figure 9 is a front elevational view of the present invention when placing a wafer-to-wafer carrier.

The following is a detailed description of the embodiments shown in the drawings: as shown in FIGS. 1 to 5 and 9 , the figure discloses a width-adjustable moving mechanism that can be used in conjunction with wafer production equipment. The utility model is characterized in that: the width adjustable moving mechanism (100) comprises a body (1) having a vertical portion (11) and a horizontal portion (12) which are mutually connected to each other; a guide rail (2) Provided on the surface edge of the horizontal portion (12); a first support arm group (3) disposed at one end of the top side of the guide rail (2); and a second support arm group (4) disposed thereon The other end of the top side of the guide rail (2) can cooperate with the first support arm group (3) to adsorb and position the wafer (10) together to stably carry the wafer (10); a passive wheel (5) a driving wheel (6) is disposed at one end of the front side of the vertical portion (11); a flexible belt body (7) is annularly wound around The passive wheel (5) and the driving wheel (6) are externally formed and form a top side section (71) and a bottom side section (72), and the top side section (71) and the first bracket arm Group (3) is connected, and the bottom side section (72) is connected to the second bracket group (4) To form a linkage relationship; and a driving device (8) axially coupled to the driving wheel (6) for driving the flexible belt body (7) such that the first carrier arm group (3) and the first The two carrier arm groups (4) are synchronously linked and moved in the opposite direction.

Wherein, the application base (1), the guide rail (2), the first support arm set (3), the second support arm set (4), the passive wheel (5), the drive wheel (6), the flexible belt body (7) And the cooperation of the driving device (8) constitutes a width-adjustable moving mechanism (100) of the present invention capable of cooperating with the wafer production equipment, and solves the general width fixed moving mechanism as shown in Fig. 9, which is easy to impact or rub. Hit the problem of the adjacent wafer (10), can With the different size wafers (10), the first carrier arm group (3) and the second carrier arm group (4) can be moved to the wafer near the edge of the wafer (10) and close to the wafer carrier (20). The support site, under the premise of stabilizing the moving wafer (10), effectively prevents the wafer (10) from colliding or rubbing into the adjacent wafer (10) when moving into the wafer carrier (20).

Secondly, because of the application requirements of the first carrier arm group (3) and the second carrier arm group (4), in order to stably reverse the movement, the cooperation of the flexible belt body (7) and the driving device (8) is not only It can be easily controlled, more convenient for production and maintenance, low failure rate, very durable, and in the dust-free environment, it is not easy to produce harmful substances that contaminate the wafer (10), and ensure the yield of the wafer (10).

On the other hand, the width-adjustable moving mechanism (100) of the present invention can cooperate with a casing (9) in order to avoid cross-contamination with the external environment, and further reduce the failure rate.

As shown in FIGS. 6 to 8, the figure shows that the width-adjustable moving mechanism (100) of the present invention can drive the flexible belt body (7) through the driving device (8) to allow the first supporting arm group. (3) The second carrier arm group (4) moves along the guide rail (2) in the opposite direction, so that the two arm plates (E) move closer to the edge of the wafer (10), close to the wafer carrier box. (20) The wafer support area, so that it is not easy to impact or scratch the adjacent wafer (10), greatly reducing the probability of wafer damage during wafer transportation.

Referring to Figures 3 and 4, the first set of armrests (3) further includes a slide (A) that can be stacked from bottom to top and can be engaged with the guide rail (2), a support block (B) disposed at a top end of the carriage (A), a connecting plate (C) disposed at a top end of the support block (B) and capable of cooperating with the flexible belt body (7), and a a gas seat (D) at the top of the connecting plate (C), a support arm plate (E) having one end disposed at the top end of the air seat (D), and one of the air seat (D) and the support arm plate (E) a second sealing arm (F); the second supporting arm set (4) further includes a sliding seat (A) and a set of the sliding rails (2) which are arranged in a stack from bottom to top. a connecting plate (C) at the top end of the sliding seat (A) and capable of cooperating with the flexible belt body (7) a support block (B) at the top end of the connecting plate (C), a gas seat (D) disposed at the top end of the connecting plate (C), and a support arm plate (E) provided at one end of the air seat (D) And a sealing ring (F) disposed between the air seat (D) and the arm plate (E).

Wherein, both the first support arm set (3) and the second support arm set (4) comprise a slide seat (A), a support block (B), a connecting plate (C), a air seat (D), and a support The arm plate (E) and the sealing ring (F), the main difference is the setting position of the connecting plate (C), and the first supporting arm group (3) and the second supporting arm group are applied by the application of the connecting plate (C) (4) It can be combined with the flexible belt body (7) to realize the synchronous reverse stable displacement efficiently, and it is more convenient for production and maintenance.

Referring to Figure 2, the flexible tape body (7) is a belt or chain structure [not disclosed in the drawings).

Among them, the application of the belt or the chain structure can stably drive the first support arm group (3) and the second support arm group (4), and the reverse synchronization operation can be smoothly carried out without complicated and cumbersome structure. Easy to apply and easy to maintain.

Secondly, among the two applications of belt structure and chain structure, the belt structure is the preferred application.

Referring to FIG. 3 and FIG. 4, the connecting plate (C) is connected to the flexible strip body (7), and is provided with a groove for receiving a corresponding portion of the flexible strip body (7). (C1), and at the top opening of the groove (C1), a positioning piece body (C2) capable of cooperating with the flexible tape body (7); the air seat (D) further provided with a positioning piece body (C2) a gas hole (D1) disposed at a top end of the air seat (D) corresponding to the sealing ring (F), and an air passage disposed in the air seat (D) and allowing the air hole (D1) to communicate with an external vacuum pump ( D2), and a positioning groove (D3) that cooperates with one end of the supporting arm plate (E); the supporting arm plate (E) further includes a supporting arm that is widened and narrowed from the fixed end to the outside. a body (E1), and a body embedded in the carrier body (E1) a closing piece (E2) of the bottom end surface, the suction arm body (E1) is provided with a suction positioning hole (E11) at the free end, and the suction arm body (E1) is provided with a suction positioning hole ( E11) is extended to a venting groove (E12) corresponding to the air hole (D1), and the bracket body (E1) is fitted with the closing piece (E2), and a venting groove is further recessed (E12) a communicating recess (E121) corresponding to the air hole (D1) and a passage hole (E21).

The groove (C1) and the positioning piece (C2) are matched with the flexible belt body (7), and can be stably displaced by the flexible belt body (7); through the air hole (D1) And the airway (D2) cooperates, so that the external vacuum pump can smoothly inhale, and at the same time, the positioning groove (D3) can be used to match the end of the arm plate (E) to avoid the problem of misalignment with the air hole (D1). Provide stable support through the arm body (E1); cooperate with the venting groove (E12) through the suction positioning hole (E11) to allow the suction positioning hole (E11) to operate smoothly; through the groove (E121) and the closing piece The body (E2) is fitted to close the venting groove (E12); through the passage hole (E21), the external vacuum pump can pass through the air passage (D2), the vent hole (D1), the venting groove (E12), and the suction positioning hole (E11). ) Coordination, smooth functioning, inhalation positioning of the wafer.

Referring to FIGS. 3 to 5, the armrest plate (E) further defines a positioning suction slot (FIG. E111).

Among them, by positioning the suction groove (E111), the suction positioning hole (E11) is expanded in the suction positioning range, and the wafer can be sucked more stably, ensuring the wafer in the width-adjustable moving mechanism of the present invention (100). During the movement, no displacement occurs and accidental fall is avoided.

Referring to FIGS. 3 to 5, the armrest plate (E) is further provided with a support pedestal (E13) protruding upward corresponding to the positioning suction groove (E111).

Among them, through the application of the support pedestal (E13), sufficient support is provided, and too much contact with the support arm (E) is avoided, affecting the wafer, and at the same time avoiding the situation of being difficult to detach, The width-adjustable moving mechanism (100) of the present invention allows the wafer to be moved smoothly and quickly.

Referring to FIG. 1 and FIG. 2, the base body (1) further includes a limit sensing portion (13), and the limit sensing portion (13) is disposed at the vertical portion (11), corresponding to the One end of the rear side of the first arm group (3); the first arm group (3) further includes a touch piece (G), and the touch piece (G) is disposed on the connecting plate (C) corresponding to One side of the limit sensing portion (13) can be engaged with the limit sensing portion (13).

Wherein, by the cooperation of the limit sensing portion (13) and the touch piece (G), the operation of the driving device (8) can be prevented from being abnormal, and the flexible belt body (7) is excessively actuated, so that the first supporting arm group (3) The second carrier arm group (4) generates a problem of excessive movement, and can force the driving device (8) to stop operating, effectively protecting the device and avoiding damage to the device.

Referring to Figures 1 and 2, the base (1) further includes a central stop (14), a first stop (15), and a second stop (16). a stopper (14) is disposed at a center of an edge of the horizontal portion (12), and the first stopper (15) is disposed at an edge of the horizontal portion (12) adjacent to an end of the first bracket group (3), the second The stopper (16) is disposed at an edge of the horizontal portion (12) adjacent to one end of the second bracket group (4).

Wherein, by the application of the central stopper (14), when the first bracket arm group (3) and the second bracket arm group (4) are returned to the center, the first stopper (15) is utilized due to accidental collision with each other. The second stopper (16) prevents the first bracket arm group (3) and the second bracket arm group (4) from being accidentally disengaged from the guide rail (2) when moving to both sides.

The structure, features and effects of the present invention are described in detail above with reference to the embodiments shown in the drawings. However, the above description is only the preferred embodiment of the present invention, but the present invention does not limit the scope of implementation as shown in the drawings. Modification changes consistent with the intent of the present invention, as long as they are equivalent The scope of the fruit should be within the scope of the invention.

Claims (7)

A width-adjustable moving mechanism capable of cooperating with a wafer production equipment, characterized in that: the width-adjustable moving mechanism (100) comprises a body (1) having a vertical portion that is mutually connected to each other (11) And a horizontal portion (12); a guide rail (2) disposed on a surface edge of the horizontal portion (12); a first support arm group (3) disposed at a top side of the guide rail (2) a second support arm set (4) disposed at the other end of the top side of the guide rail (2), capable of supporting the first support arm set (3), and absorbing and positioning the wafer (10) together to stabilize the load The wafer (10); a passive wheel (5) disposed at one end of the front side of the vertical portion (11); a driving wheel (6) disposed at the other end of the front side of the vertical portion (11); a strip body (7) that is annularly disposed outside the driven wheel (5) and the driving wheel (6) and forms a top side section (71) and a bottom side section (72), and The top side section (71) is coupled to the first set of arm groups (3), and the bottom side section (72) is coupled to the second set of arm sets (4) to form a linked relationship; and a driving device (8), which is coupled to the driving wheel (6) and can be used to drive the flexible belt body (7). The first set of support arms (3) and the second set of support arms (4) are synchronously moved to move in opposite directions; the first set of support arms (3) further includes a sequence from bottom to top a sliding seat (A) capable of cooperating with the guide rail (2), a supporting block (B) disposed at a top end of the sliding seat (A), and a top portion of the supporting block (B) and capable of a flexible strip (7) mating connecting plate (C), a gas seat (D) disposed at a top end of the connecting plate (C), and a supporting arm plate (E) having one end disposed at a top end of the air bearing (D) And a sealing ring (F) disposed between the air seat (D) and the supporting arm plate (E); the second supporting arm group (4) further comprising a stacking step from bottom to top a carriage (A) capable of cooperating with the guide rail (2), a joint disposed at the top end of the carriage (A) and capable of cooperating with the flexible belt body (7) a support plate (C), a support block (B) disposed at a top end of the connection plate (C), a gas seat (D) disposed at a top end of the connection plate (C), and one end of the air block (D) A top arm plate (E) and a sealing ring (F) disposed between the air block (D) and the arm plate (E). The width-adjustable moving mechanism according to claim 1, wherein the flexible belt body (7) is a belt or chain structure. The width-adjustable moving mechanism according to claim 2, wherein: the connecting plate (C) is connected to the flexible tape body (7), and is further provided with a flexible tape body (7). Corresponding part of the groove (C1), and the top end opening of the groove (C1) is further provided with a positioning piece body (C2) capable of cooperating with the flexible tape body (7); the air seat (D) The utility model further comprises a gas hole (D1) disposed at the top end of the air seat (D) and corresponding to the sealing ring (F), and a gas hole (D) disposed in the air seat (D) and allowing the air hole (D1) and the external vacuum pump a communicating air passage (D2), and a positioning groove (D3) cooperating with one end of the supporting arm plate (E); the supporting arm plate (E) further comprising a width narrowing from the fixed end to the outside a supporting arm body (E1) and a closing piece body (E2) embedded in a bottom end surface of the supporting arm body (E1), wherein the free end of the supporting arm body (E1) is provided with an air suction positioning hole (E11) And the support arm body (E1) is provided with a ventilation groove (E11) extending from the suction positioning hole (E11) to the ventilation groove (E12) corresponding to the air hole (D1), and the support arm body (E1) is The closing piece (E2) is fitted with a recessed groove communicating with the venting groove (E12) ( E121), the closing piece (E2) corresponds to the air hole (D1), and a passage hole (E21) is further provided. The width-adjustable moving mechanism according to claim 3, wherein: the armrest plate (E) is further provided with a suction positioning hole (E11) at the suction positioning hole (E11). Position the suction slot (E111). The width-adjustable moving mechanism according to claim 4, wherein: the armrest plate (E) is in the pair A support pedestal (E13) is formed to protrude upward from the positioning suction groove (E111). The width-adjustable moving mechanism according to claim 5, wherein: the base body (1) further includes an limit sensing portion (13), and the limit sensing portion (13) is disposed at the vertical portion (11) Corresponding to one end of the rear side of the first arm group (3); the first arm group (3) further includes a touch piece (G), and the touch piece (G) is disposed on the connecting plate (C) corresponding to the limit sensing portion (13), can be engaged with the limit sensing portion (13). The width-adjustable moving mechanism of claim 6, wherein: the base body (1) further includes a central stop (14), a first stop (15), and a second stop ( 16) The central stop (14) is disposed at the center of the edge of the horizontal portion (12), and the first stop (15) is disposed at an edge of the horizontal portion (12) adjacent to the first support arm group (3) At one end, the second stopper (16) is disposed at an edge of the horizontal portion (12) adjacent to one end of the second bracket group (4).