TWI668548B - Fluid control device - Google Patents

Abstract

A fluid control device includes a transmission pipeline, a flow control unit, and a fluid output unit. The conveying pipeline is provided with a fluid flow, and the conveying pipeline includes a first pipe section and a second pipe section. The flow control unit is connected between the first pipe section and the second pipe section, and can be operatively switched between a circulation state and a blocking state. The fluid output unit is disposed at an end of the second pipe section remote from the flow control unit, and can control a state in which the fluid is output through the second pipe section. Wherein, when the flow control unit switches from the circulation state to the blocking state after a delay time, a pressure difference between the pressure of the fluid in the second pipe section and the external pressure is passed to the The fluid is sucked back, and the fluid output unit prevents the fluid from being output.

Description

Fluid control device

The invention relates to a fluid control device, in particular to a fluid control device suitable for supplying a fluid.

Generally, in a semiconductor wet process, when a substrate is etched or cleaned, a processing solution needs to be sent to the outlet end of a pipeline to flow out, so as to process the surface of the substrate. However, when the supply of the processing liquid from the original supply state to the substrate is stopped, due to the weight of the processing liquid or the foam, the dripping phenomenon is easy to occur at the outlet end of the pipeline, which will cause the substrate to be subjected to the process. Contamination, which in turn affects the quality of the substrate.

It is therefore an object of the present invention to provide a fluid control device capable of overcoming at least one of the disadvantages of the prior art.

Therefore, in some embodiments, the fluid control device of the present invention includes a delivery pipeline, a flow control unit, and a fluid output unit. The conveying pipe is used for a fluid to flow inside, and the conveying pipe includes a first pipe section and a second pipe section. The flow control unit is connected between the first pipe section and the second pipe section, and is operable to flow the fluid from the first pipe section to the second pipe section. Switching between a flow state of the pipe section and a blocking state that prevents the fluid from flowing from the first pipe section to the second pipe section. The fluid output unit is disposed at an end of the second pipe section remote from the flow control unit, and can control a state in which the fluid is output through the second pipe section. Wherein, when the flow control unit switches from the circulation state to the blocking state after a delay time, a pressure difference between the pressure of the fluid in the second pipe section and the external pressure (that is, the ambient air pressure) is passed to the The fluid in the second pipe section is sucked back in the direction of the flow control unit, and the fluid output unit prevents the fluid from being output.

In some embodiments, the flow control unit includes a first two-way valve connected between the first pipe section and the second pipe section. The flow rate is controlled by controlling a valve opening of the first two-way valve. The control unit switches between the circulation state and the blocking state.

In some embodiments, the method further includes a recovery pipeline, and the flow control unit further includes a second two-way valve and a trigger module connected between the first pipeline section of the transport pipeline and the recovery pipeline. A connection pipeline connected between the first two-way valve and the second two-way valve and the trigger module, and a connection pipeline provided on the connection pipeline and located between the trigger module and the first double A flow control valve between the on-off valves, the trigger module is used to provide a trigger source to the first two-way valve and the second two-way valve, so that the flow control unit is opened when the first two-way valve is opened and the Switching between the flow state in which the second two-way valve is closed and the blocking state in which the first two-way valve is closed and the second two-way valve is open to control the flow of the fluid from the first pipe section to the second pipe section or Flowing toward the recovery line, the flow control valve can be operative to change the flow rate through which the trigger source passes to adjust the length of the delay time.

In some embodiments, a recovery line is further included. The flow control unit includes a three-way valve, the three-way valve has an input end connected to the first pipe section, and a A first output end and a second output end connected to the recovery pipeline; when the flow control unit is in the circulation state, the first output end is opened and the second output end is closed, so that the fluid flows from the fluid The first output end of the three-way valve is output to the second pipe section. When the flow control unit is in the blocking state, the first output end is closed and the second output end is opened to enable the fluid from the three-way valve. The second output end is output to the recovery pipeline.

In some embodiments, the flow control unit further includes a trigger module, a connection pipeline connected between the trigger module and the three-way valve, and a trigger pipeline provided on the connection pipeline and located in the trigger module. The flow control valve between the group and the three-way valve, the trigger module is used to provide a trigger source to the three-way valve, so that the flow control unit switches between the circulation state and the blocking state, and the flow rate The control valve is operable to change the flow rate through which the trigger source passes to adjust the length of the delay time.

In some embodiments, the fluid output unit includes a pipe member and a moving member, the pipe member forms an output flow passage which communicates with the second pipe section and is used for outputting the fluid, and a communication flow passage The moving member is movably disposed in the pipe member and can move between a first position closer to the output flow channel and a second position farther from the output flow channel in the suction space, When the moving member is moved from the first position to the second position, the fluid in the output flow channel is at least partially sucked into the suction space.

In some embodiments, the moving member includes a flexible portion and a rod portion. The flexible portion is disposed on the tube and is located in the suction space. The rod portion is connected to one side of the flexible portion and The flexible part is driven to move between the first position and the second position.

In some embodiments, the fluid output unit includes a tube, and a mobile The pipe member forms an output flow passage which is in communication with the second pipe section and is used to output the fluid. The moving member is movably disposed in the pipe piece and can enable the fluid to flow without blocking the output flow passage. A first position of the output, and a second position of the output flow path to prevent the fluid from moving.

In some embodiments, the fluid output unit further includes a driving module connected to the pipe, and the driving module is configured to provide a gas pressure to drive the moving member between the first position and the second position. mobile.

In some embodiments, the fluid output unit further includes a driving module and an elastic member. The driving module is connected to the pipe and is used to provide a gas pressure to drive the moving member in the first position and the Moving between two positions, the elastic member is connected between the pipe member and the moving member.

In some embodiments, the output stream prop has a curved curved section, and the moving member is disposed on the pipe member and corresponds to the curved section.

In some embodiments, the flow control unit is first switched from the circulation state to the blocking state, so that the fluid is sucked back toward the flow control unit along the second pipe section, and the fluid output unit controls the fluid. To prevent the fluid from being output through the second pipe section.

In some embodiments, a suction valve is further provided in the second pipe section and interposed between the flow control unit and the fluid output unit.

In some embodiments, the flow control unit is first switched from the circulation state to the blocking state, so that the fluid is sucked back along the second pipe section toward the flow control unit, and then the suction valve The fluid in the second pipe section is sucked back in a direction away from the fluid output unit, and finally the fluid output unit controls the fluid to prevent the fluid from being output through the second pipe section.

In some embodiments, the fluid output unit includes a pipe member and a moving member. The pipe member forms an output flow channel which is in communication with the second pipe section and used to output the fluid. The moving member is movably disposed on the pipe member. The tube can be moved between a first position in which the output flow channel is not blocked to allow the fluid to be output, and a second position in which the output flow channel is blocked to prevent the fluid output, the flow control unit and the After the suction valve sucks back the fluid, the fluid in the output flow path is spaced apart from the moving member, and the moving member is moved from the first position to the second position at this time, so that the fluid is moved by the moving member. Interrupted.

In some embodiments, the length of the delay time ranges from 0.1 second to 5 seconds.

The invention has at least the following effects: by the flow control unit switching from the circulation state to the blocking state within the delay time, the fluid in the second pipe section is caused by the pressure of the fluid in the second pipe section and the external pressure (I.e., ambient air pressure), suck back along the second pipe section toward the flow control unit, and prevent the fluid from being output by the fluid output unit, so that when the fluid is switched from the supply state to the stop supply state, This prevents the fluid in the second pipe section from dripping onto the substrate to be processed, thereby effectively improving the substrate process quality.

10‧‧‧ fluid control device

20‧‧‧ Fluid supply source

1‧‧‧conveying pipeline

1a‧‧‧ Casing

11‧‧‧ the first section

12‧‧‧Second Section

2‧‧‧ flow control unit

21‧‧‧The first two-way valve

22‧‧‧Second two-way valve

23‧‧‧Trigger Module

231‧‧‧Solenoid valve

232‧‧‧ compressed gas supply source

24‧‧‧Connecting pipeline

241‧‧‧connection pipe section

242‧‧‧ connecting pipe section

25‧‧‧Flow control valve

251‧‧‧Speed regulating valve department

252‧‧‧One-way valve section

26‧‧‧Three-way valve

261‧‧‧input

262‧‧‧first output

263‧‧‧Second output

3‧‧‧ fluid output unit

30‧‧‧Drive Module

301‧‧‧pipe

302‧‧‧pipe

31‧‧‧Pipe Fittings

311‧‧‧output runner

311a‧‧‧curved section

312‧‧‧Back suction space

313‧‧‧Setup space

32‧‧‧ moving parts

321‧‧‧Piston

322‧‧‧ lever

323‧‧‧pole

324‧‧‧Flexible

33‧‧‧ convex

34‧‧‧ Recess

36‧‧‧Gas channel

36a‧‧‧First gas channel

36b‧‧‧Second gas channel

37‧‧‧Elastic piece

4‧‧‧ needle valve

5‧‧‧ Recovery line

6‧‧‧Back suction valve

61‧‧‧Close the valve body

62‧‧‧Back suction valve body

7‧‧‧Trigger Module

71‧‧‧Solenoid valve

72‧‧‧ compressed gas supply source

8‧‧‧ connecting pipeline

81‧‧‧ connecting pipe section

9‧‧‧ flow control valve

Steps S1 ~ S3‧‧‧‧

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: FIG. 1 is a schematic diagram of a first embodiment, a second embodiment, and a fourth embodiment of the fluid control device of the present invention; 2 is a schematic cross-sectional view illustrating the state of the fluid output unit of the first embodiment in the first position; FIG. 3 is a schematic cross-sectional view illustrating the state of the fluid output unit of the first embodiment in the second position; A block diagram illustrating the operation steps of the first embodiment of the fluid control device of the present invention; FIG. 5 is a schematic cross-sectional view illustrating the state of the fluid output unit of the second embodiment in the first position; FIG. 6 is a schematic cross-sectional view illustrating the first The state of the fluid output unit of the second embodiment in the second position; FIG. 7 is a schematic diagram of the third embodiment of the fluid control device of the present invention; FIG. 8 is a schematic cross-sectional view illustrating the fluid output unit of the third embodiment in the first position FIG. 9 is a schematic cross-sectional view illustrating the state of the fluid output unit of the third embodiment in the second position; FIG. 10 is a schematic cross-sectional view illustrating the state of the fluid output unit of the fourth embodiment in the first position; and 11 is a schematic cross-sectional view illustrating a state where the fluid output unit of the fourth embodiment is in a second position.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are represented by the same numbers.

Referring to FIG. 1, a first embodiment of a fluid control device 10 according to the present invention includes a delivery line 1, a flow control unit 2, a fluid output unit 3, a needle valve 4, and a recovery line 5.

The conveying pipeline 1 is suitable for a fluid (not shown) to flow inside, and includes a first pipe section 11 and a second pipe section 12. In the first embodiment, the first pipe section 11 is connected to a fluid supply source 20 for supplying the fluid. The needle valve 4 is disposed on the first pipe section 11 to restrict the fluid from flowing. The flow rate of the fluid supply source 20 into the first pipe section 11. In addition, the fluid in the first embodiment may be a hydrogen peroxide (hydrogen peroxide) liquid containing bubbles, water, a highly viscous treatment liquid, or other chemical liquids.

The flow control unit 2 is connected between the first pipe section 11 and the second pipe section 12 and is operable to allow the fluid to flow from the first pipe section 11 to the second pipe section 12 in a circulation state, and The fluid cannot be switched between a blocked state flowing from the first pipe section 11 to the second pipe section 12. When the flow control unit 2 switches from the circulation state to the blocking state after a delay time, a pressure difference between the pressure of the fluid in the second pipe section 12 and the external pressure is passed to the inside of the second pipe section 12 The fluid is sucked back in the direction of the flow control unit 2. Here, the external pressure refers to the ambient air pressure at the location where the fluid output unit 3 is located. If it is not a closed environment, it is the atmospheric pressure at the location. Furthermore, gradually switching from the circulation state to the blocking state during the delay time can prevent a sharp pressure difference change due to the pressure of the fluid in the second pipe section 12, and the delay time is, for example, 2 Seconds, but not as a limitation. Thereby, it is possible to prevent the fluid from continuously dripping after the flow control unit 2 is switched to the blocking state.

The flow control unit 2 includes a first two-way valve 21 communicating between the first pipe section 11 and the second pipe section 12, a first pipe section 11 and the recovery pipe 5 communicating with the conveying pipe 1. A second two-way valve 22 between the two, a trigger module 23, a connection line 24 connected to both the first two-way valve 21 and the second two-way valve 22, and the trigger module 23, And a flow control valve 25 provided on the connecting pipeline 24 and located between the trigger module 23 and the first two-way valve 21. The trigger module 23 is used to provide a trigger source to the first two-way valve 21 and the second two-way valve 22, so that the flow control unit 2 is opened when the first two-way valve 21 is opened and the second two-way valve is opened. The flow state in which the valve 22 is closed and the first two-way valve 21 is closed The closed state is switched while the second two-way valve 22 is opened to control the flow of the fluid from the first pipe section 11 to the second pipe section 12 or to the recovery pipe 5. In the first embodiment, in the circulating state, the fluid flows from the fluid supply source 20 to the first pipe section 11 and flows through the first two-way valve 21 to the second pipe section 12; In the off state, the fluid flows from the fluid supply source 20 to the first pipe section 11 and flows to the recovery pipeline 5 through the second two-way valve 22, and finally returns to the fluid along the recovery pipeline 5 Supply source 20. The flow control valve 25 can be operated to change the flow rate of the trigger source, and the length of the delay time is adjusted by changing the flow rate of the trigger source through the flow control valve 25. In a variation, The recovery line 5 and the second two-way valve 22 can also be omitted together. At this time, the fluid in the first pipe section 11 will not be recovered to the fluid supply source 20, and this first implementation is not used. Examples are restrictions. In the first embodiment, the length of the delay time ranges from 0.1 second to 5 seconds, and the length of the delay time can be determined by referring to the present invention based on the diameter of the second pipe section 12, the characteristics of the fluid and The flow rate is determined. In addition, in the first embodiment, the pipe diameter of the second pipe section 12 is, for example, 0.25 to 0.375 inches, but in other embodiments, a pipe diameter larger or smaller than the aforementioned size may be used, for example, 0.125 to 0.25. Inches, or between 0.375 and 1 inch, are all applicable pipe diameter sizes in this field, and are not limited to this. Generally, if the pipe diameter of the second pipe section 12 is larger, the delay time is generally longer. If the pipe diameter of the second pipe section 12 is smaller, the delay time is shorter, but not necessarily, this delay time can be based on Fluid viscosity, temperature, etc. may need to be adjusted.

To further explain, in the first embodiment, the trigger source is a compressed gas. The trigger module 23 has a solenoid valve 231 for controlling whether the compressed gas is delivered to the connection pipe 24 and a compressed gas supply source 232 connected to the solenoid valve 231 to supply the compressed gas. in In the first embodiment, the first two-way valve 21 is a normally-closed two-way pneumatic ball valve that will conduct after receiving the compressed gas, and the second two-way valve 22 is a normally open but after receiving the compressed gas A two-way pneumatic ball valve that will close. The connecting pipe 24 has two connecting pipe sections 241 and 242. The connecting pipe section 241 communicates between the first two-way valve 21 and the solenoid valve 231 of the trigger module 23. The other connecting pipe section 242 communicates with the second Between the two-way valve 22 and the solenoid valve 231 of the trigger module 23, and the flow control valve 25 is a one-way flow control valve, the flow control valve 25 has an adjustable limit to the compressed gas from the first The speed regulating valve portion 251 of the flow rate of the two-way valve 21 to the solenoid valve 231 and a one-way valve portion 252 for the compressed gas flowing from the solenoid valve 231 to the first two-way valve 21. When the solenoid valve 231 is in an intake state, it controls the compressed gas to be sent to the first two-way valve 21 and the first through two-way valve 21 and the connecting pipe sections 241 and 242 of the flow control valve 25, respectively. Two two-way valves 22, the first two-way valve 21 receives the compressed gas and conducts it, and the second two-way valve 22 receives the compressed gas and closes, at this time the flow control unit 2 is in the circulating state. When the solenoid valve 231 is switched from the intake state to an exhaust state, it controls that the compressed gas is not sent to the first two-way valve 21 and the first two-way valve 21 and the first two-way valve 21 through the flow control valve 25 and the connecting pipe sections 241 and 242, respectively. Two two-way valves 22, so that the compressed gas flow rate in the first two-way valve 21 is restricted to flow through the speed regulating valve portion 251 of the flow control valve 25 and released by the solenoid valve 231 to gradually return to closed State, and the compressed gas in the second two-way valve 22 is released by the solenoid valve 231 to return to the open state, whereby the flow control unit 2 can be gradually switched to the blocking state.

Referring to FIG. 1 to FIG. 3, in the first embodiment, the fluid control device 10 further includes a sleeve 1 a covering the second pipe section 12. The fluid output unit 3 is disposed at an end of the second pipe section 12 away from the flow control unit 2 and is fixed on the sleeve 1 a, and can control the fluid to pass through the second pipe section 12. The state of the output can prevent the output of the fluid. In the first embodiment, the fluid output unit 3 includes a pipe member 31, a moving member 32, and a driving module 30. The pipe member 31 forms an output flow passage 311 that communicates with the second pipe section 12 and outputs the fluid, and the output flow passage 311 has a curved section 311 a that is curved. The moving member 32 is movably disposed in the pipe member 31 and corresponds to the position of the curved section 311a, and the moving member 32 can be in a first position that does not block the output flow channel 311 so that the fluid can be output (such as (Shown in FIG. 2), and a second position (shown in FIG. 3) that blocks the output flow passage 311 to prevent the fluid output. The driving module 30 is connected to the pipe member 31 and is used to provide a gas pressure to drive the moving member 32 to move between the first position and the second position. More specifically, the pipe member 31 has a convex portion 33 and a concave portion 34 corresponding to the position of the curved section 311 a. The moving member 32 is an elastic diaphragm and is disposed at the recessed portion 34 of the pipe member 31 with a gap from the convex portion 33. The pipe member 31 further forms a gas passage 36 communicating with the curved section 311a and used to connect the driving module 30. In the first embodiment, the gas passage 36 of the pipe member 31 and the driving module 30 are connected via a pipe. Road 301 is connected. When the moving member 32 is located in the first position, the moving member 32 is spaced from the convex portion 33 and the fluid can pass through the gap between the moving member 32 and the convex portion 33 so that the fluid can pass through This output flow path 311 is output. When the gas pressure generated by the driving module 30 is introduced from the gas passage 36 to the recessed portion 34, the moving member 32 is pushed by the gas pressure and deformed to the second position. At this time, the moving member 32 is pushed up. The convex portion 33 blocks the output flow channel 311 and prevents the fluid from being output. After the gas pressure is removed, the moving member 32 is reset to the first position where the fluid can be output due to elasticity.

Referring to FIG. 1 to FIG. 4, the operation steps of the fluid control device 10 include the following steps: Step S1, switching the flow control unit 2 to a circulating state, so that the fluid flows along the conveying pipeline 1. Flow and output through the fluid output unit 3; step S2, the flow control unit 2 switches from the circulation state to the blocking state after a delay time, and the pressure of the fluid in the transport pipeline 1 and the external pressure A pressure difference to suck back the fluid in the transportation pipeline 1 toward the flow control unit 2; and step S3, control the fluid output unit 3 to block the transportation pipeline 1 to prevent the fluid from being output.

In more detail, in the first embodiment, the operation steps of the fluid control device 10 are roughly as follows. In step S1, the flow control unit 2 is switched so that the fluid flows from the first pipe section 11 to the second pipe section 12. The flow state; then proceed to step S2, through the cooperation of the trigger module 23, the connection pipeline 24 and the flow control valve 25, switch the flow control unit 2 within the delay time to make the fluid from the The first pipe section 11 flows to the recovery pipe 5 and finally flows back to the blocked state of the fluid supply source 20, so that the pressure difference caused by the fluid returns along the second pipe section 12 toward the flow control unit 2 At last, step S3 is performed. The moving member 32 of the fluid output unit 3 is moved from the first position to the second position that blocks the output flow path 311 to control the fluid and prevent it from passing through the conveying pipe 1. The second pipe section 12 is output, thereby preventing dripping at the pipe outlet.

Referring to FIG. 1, FIG. 5 and FIG. 6, a second embodiment of a fluid control device 10 according to the present invention is substantially the same as the first embodiment. However, the fluid output unit 3 and This first embodiment is different.

In the second embodiment, the fluid output unit 3 includes a pipe member 31 and a moving member 32. The pipe member 31 forms an output flow passage 311 which is in communication with the second pipe section 12 and outputs the fluid, and A suction space 312 is connected to the output flow channel 311. The moving member 32 is movably disposed At the pipe 31 and at a first position (as shown in FIG. 5) that blocks the suction space 312 and is closer to the output flow channel 311, and a distance from the output flow channel 311 and moves away from the suction The second position of the space 312 (shown in FIG. 6) moves between them. When the moving member 32 is moved from the first position to the second position, the fluid in the output flow channel 311 is at least partially sucked into the suction space 312. The fluid output unit 3 further includes the driving module 30 and an elastic member 37. The driving module 30 is connected to the pipe member 31 and is used to provide a gas pressure to drive the moving member 32 to move between the first position and the second position. The elastic member 37 is connected to the pipe member 31 and the moving member 32. So that the moving member 32 can be reset from the second position to the first position when the driving module 30 does not provide the gas pressure. That is, the second embodiment differs from the first embodiment in that the specific manner of performing step S3 by the two is different. In the first embodiment, the fluid output unit 3 is controlled to prevent the fluid output The means is to block the conveying pipeline 1 by the fluid output unit 3. In this second embodiment, the fluid in the conveying pipeline 1 is sucked back toward the flow control unit 2. To prevent this fluid output.

In more detail, the pipe member 31 also forms a setting space 313 connected to the suction space 312, and a first gas passage 36 a connected to both sides of the setting space 313 and used to connect the driving module 30 and A second gas passage 36b. In the second embodiment, the first gas passage 36a of the pipe member 31 and the driving module 30 are connected via a pipeline 302. The moving member 32 has a piston portion 321 disposed in the installation space 313 and isolated between the first gas passage 36a and the second gas passage 36b, and is connected to the piston portion 321 and is closer to the output flow passage. A pole portion 322 of 311. When the moving member 32 is located in the first position, the rod portion 322 of the moving member 32 is adjacent to the output flow path 311 and blocks the suck-back space 312. At this time, the driving module 30 is controlled to supply the gas from the first gas channel 36a. Pressure to move the piston portion 321 of the moving member 32 toward the setting space 313 adjacent to the second gas passage 36b, and then move the moving member 32 to the second position. The moving member 32 compresses the elastic member 37 so that It deforms and accumulates resetting spring force. At this time, the rod portion 322 of the moving member 32 is farther away from the output flow channel 311 and away from the suction space 312, so that the fluid is at least partially sucked into the suction space 312, thereby preventing the fluid from being controlled by the flow rate. Unit 2 drips again after switching to this blocking state. When the driving module 30 does not provide the gas pressure from the first gas channel 36a, the elastic member 37 drives the moving member 32 to return from the second position to the first position by a reset elastic force.

It should be noted that, in other modified embodiments, the fluid output unit 3 may not have the elastic member 37. In this embodiment, the driving module 30 is connected to the first gas passage 36a and The second gas channel 36b, and when the driving module 30 provides the gas pressure to the second gas channel 36b, the moving member 32 will move to the first position, and when the driving module 30 provides the gas pressure When the first gas passage 36a is reached, the moving member 32 will move to the second position, not limited by the content disclosed in the second embodiment. In addition, the fluid suitable for this second embodiment may be a general chemical liquid such as a copper etchant or other chemical liquid.

Referring to FIG. 7, a third embodiment of a fluid control device 10 according to the present invention is substantially the same as the second embodiment. However, in the third embodiment, the flow control unit 2 includes a The first two-way valve 21 and the three-way valve 26 of the second two-way valve 22, and the three-way valve 26 is a three-way pneumatic valve that will switch from the blocked state to the circulating state after receiving the compressed gas. .

The three-way valve 26 has an input terminal 261 connected to the first pipe section 11, a first output terminal 262 connected to the second pipe section 12, and a second output terminal connected to the recovery pipe 5. 263. When the flow control unit 2 is in the circulation state, the first output terminal 262 is opened and the second output terminal 263 is closed, so that the fluid is output from the first output terminal 262 of the three-way valve 26 to the second Pipe section 12. When the flow control unit 2 is in the blocking state, the first output terminal 262 is closed and the second output terminal 263 is opened, so that the fluid is output from the second output terminal 263 of the three-way valve 26 to the recovery Pipeline 5. The connection pipeline 24 is connected between the trigger module 23 and the three-way valve 26, and the flow control unit 2 includes a trigger pipeline 23 and the trigger module 23 and the three-way valve. The flow control valve 25 between 26, the speed control valve portion 251 of the flow control valve 25 can be adjusted to restrict the flow rate of the compressed gas from the three-way valve 26 to the solenoid valve 231 of the trigger module 23 The one-way valve portion 252 of the flow control valve 25 can only flow the compressed gas from the solenoid valve 231 of the trigger module 23 to the three-way valve 26. In more detail, when the solenoid valve 231 is in the intake state, it controls the compressed gas to be sent to the three-way valve 26 through the connection pipe 24 and the one-way valve portion 252 of the flow control valve 25. The valve 26 receives the compressed gas and assumes the circulating state; when the solenoid valve 231 is in the exhausted state, it controls the compressed gas not to be delivered through the connection line 24 and the one-way valve portion 252 of the flow control valve 25 To the three-way valve 26, the compressed gas flow rate in the three-way valve 26 is restricted to flow through the speed regulating valve portion 251 of the flow control valve 25 and sent to the solenoid valve 231 for release, so that the three-way valve 26 gradually switches from the circulation state to the blocking state.

In addition, in the third embodiment, the fluid control device 10 further includes a suction valve 6 provided in the second pipe section 12 and interposed between the flow control unit 2 and the fluid output unit 3, so that After the flow control unit 2 switches from the circulation state to the blocking state, it further sucks back the fluid in the second pipe section 12 to prevent the fluid from being output from the second pipe section 12. Furthermore, the suction valve 6 From the flow control unit 2 toward the flow output unit 3, a closing valve body 61 capable of circulating or blocking the fluid and a return valve body 62 capable of sucking back the fluid are sequentially included. The fluid control device 10 further includes another trigger module 7 and another connection line 8 connected to the suction valve 6 and the trigger module 7. The connecting pipe 8 includes two connecting pipe sections 81, 82, which are connected between the closing valve body 61 of the suction valve 6 and the trigger module 7, and the connecting pipe section 82 is connected with the suction valve 6 between the suction valve body 62 and the trigger module 7, the trigger module 7 includes a solenoid valve 71 for controlling whether a compressed gas is delivered to the connection pipe 8 or not, and a connection to the solenoid The valve 71 is a compressed gas supply source 72 that supplies the compressed gas. The fluid control device 10 further includes a flow control valve 9 connected to the connection pipe section 81 between the trigger module 7 and the closing valve body 61. The flow control valve 9 and the trigger module 7 enable the flow control valve 9 The closed valve body 61 can be gradually switched from a state where the fluid is circulated to a state where the fluid is blocked.

The operation flow of the third embodiment is roughly that the flow control unit 2 is first switched from the circulation state to the blocking state, so that the fluid is sucked back along the second pipe section 12 toward the flow control unit 2, Then, the fluid in the second pipe section 12 is sucked back by the suction valve 6 away from the fluid output unit 3. Finally, the fluid output unit 3 controls the fluid to prevent the fluid from being output through the second pipe section 12. It can be noticed that the operation flow of the third embodiment is different from that of the first embodiment and the second embodiment in that the suction valve 6 is operated before the fluid output unit 3 of the third embodiment is operated. The fluid in the second pipe section 12 is sucked back further away from the fluid output unit 3. Furthermore, when the flow control unit 2 is abnormal, the closing valve body 61 of the suction valve 6 may be gradually switched from a state in which the fluid is circulated to a state in which the fluid is blocked, so that the fluid is caused by the pressure difference. It is sucked back first, and then a part of the fluid is sucked back by the sucking valve body 61 to further prevent the fluid from flowing from the The second pipe section 12 is output.

Refer to FIGS. 8 to 9 for cooperation. In addition, the third embodiment is also different from the second embodiment in that in the third embodiment, the moving member 32 of the fluid output unit 3 is movably movable. A first position (as shown in FIG. 8) provided in the pipe member 31 and capable of outputting the fluid without blocking the output flow channel 311, and a blockage of the output flow channel 311 to prevent the output of the fluid The second position (as shown in FIG. 9) is moved. The moving member 32 includes the piston portion 321 and a rod portion 323 extending from the piston portion 321 toward the output flow path 311. The moving member 32 can be at a first position where the rod portion 323 does not block the output flow channel 311 to allow the fluid to be output, and a second position where the rod portion 323 blocks the output flow channel 311 to prevent the fluid output. Move between positions so that the fluid output unit 3 can selectively block the output flow channel 311 to prevent the fluid from being output. In addition, it should be noted that, in the third embodiment, when the driving unit provides the gas pressure to the second gas passage 36b, the moving member 32 moves from the first position to the second position to block In the output flow channel 311, when the driving unit does not provide the gas pressure to the pipe 31, the elastic restoring force of the elastic member 37 drives the moving member 32 to return to the first position so that the fluid can pass through the output flow channel. 311 output, but not as a limitation.

Moreover, in the third embodiment, after the flow control unit 2 and the suction valve 6 suck back the fluid, the fluid in the output flow channel 311 is spaced apart from the moving member 32 by a distance, in other words, It is the fluid in the output flow channel 311 that is higher than the moving member 32. At this time, the moving member 32 moves from the first position to the second position, so that the fluid is blocked by the moving member 32 without dripping. drop. In addition, the fluid applicable to the third embodiment may be a titanium etching solution, a hydrogen peroxide solution containing a large number of bubbles, or other chemical liquids.

Referring to FIG. 1, FIG. 10 and FIG. 11, a fourth embodiment of a fluid control device 10 according to the present invention is substantially the same as the second embodiment. However, the fluid output unit 3 of the fourth embodiment and This second embodiment is different.

In the fourth embodiment, the moving member 32 further has a flexible portion 324 disposed on the pipe member 31 and located in the suction space 312. The rod portion 322 is disposed on one side connected to the flexible portion 324. The control drives the flexible portion 324 to move between the first position and the second position. In more detail, the flexible portion 324 is a film with one side edge disposed on the pipe member 31 and connected to the rod portion 322 at the center. In the first position, the flexible portion 324 is closer to the output flow channel 311 and is isolated between the output flow channel 311 and the suction space 312. In the second position, the flexible portion 324 is farther away. The output flow channel 311 is moved away from the suction space 312, so that the fluid in the output flow channel 311 is at least partially sucked into the suction space 312.

In addition, it should be noted that, the flow output unit 3 in the above embodiments is to prevent the flow control unit 2 from switching from the circulation state to the blocking state, and the fluid in the second pipe section 12 flows from the second pipe section. 12 drops, so the above-mentioned flow output units 3 can be replaced with each other, and should not be limited by the above embodiment.

The substrate mentioned in the present invention may be a carrier board form, a wafer form, a wafer form, and the like, and may be a round shape or a square shape, but is not limited thereto. And the fluid control device of the present invention can be applied to a substrate wet process (etching, cleaning, drying, etc.), for example, a single substrate wet process, a multi-substrate wet process, a single square wafer solder ball metal etching, thin wafer support Stripping, attaching / stripping process, silicon carbide recycled wafer, recycled silicon wafer, etc., but not limited to this.

In summary, the fluid control device 10 of the present invention The flow state is switched to the blocked state within the delay time, so that the fluid in the second pipe section 12 moves along the first section due to a pressure difference between the pressure of the fluid in the second pipe section 12 and the external pressure (that is, the atmospheric pressure). The second pipe section 12 sucks back in the direction of the flow control unit 2 and prevents the fluid output by the fluid output unit 3 to avoid the fluid in the second pipe section 12 when the fluid is switched from the supply state to the stopped supply state. Dropped on the substrate to be processed, effectively improving the quality of the substrate process.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited in this way, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the content of the patent specification of the present invention are still Within the scope of the invention patent.

Claims (17)

A fluid control device includes: a conveying pipeline for a fluid to flow inside, the conveying pipeline includes a first pipe section and a second pipe section; a flow control unit communicating between the first pipe section and the second pipe section; Between the pipe sections, and a operative state in which the fluid flows from the first pipe section to the second pipe section and a blocking state in which the fluid cannot flow from the first pipe section to the second pipe section Switching between, wherein the flow control unit includes a first two-way valve; and a fluid output unit disposed at an end of the second pipe section remote from the flow control unit and capable of controlling the output of the fluid through the second pipe section State; wherein, when the first two-way valve of the flow control unit is switched to the blocking state after a delay time from the circulation state, a pressure difference between the pressure of the fluid in the second pipe section and the external pressure To suck back the fluid in the second pipe section toward the flow control unit, and the fluid output unit prevents the fluid from being output. The fluid control device according to claim 1, wherein the flow control unit is switched between the flow state and the blocking state by controlling a valve opening degree of the first two-way valve. The fluid control device according to claim 2, further comprising a recovery pipeline, and the flow control unit further includes a second two-way valve connected between the first pipe section of the transport pipeline and the recovery pipeline, A trigger module, a connection pipeline communicating between the first two-way valve and the second two-way valve, and the trigger module, and a trigger pipeline provided on the connection pipeline and located between the trigger module and the trigger module A flow control valve between the first two-way valve and the trigger module is used to provide a trigger source to the first two-way valve and the second two-way valve, so that the flow control unit is in the first two-way valve. The flow state in which the valve is opened and the second two-way valve is closed and the blocked state in which the first two-way valve is closed and the second two-way valve is opened are switched to control the flow of the fluid from the first pipe section to the The second pipe section may flow to the recovery pipe, and the flow control valve may be operative to change the flow rate of the trigger source to adjust the length of the delay time. A fluid control device includes: a conveying pipeline for a fluid to flow inside, the conveying pipeline includes a first pipe section and a second pipe section; a flow control unit communicating between the first pipe section and the second pipe section; Between the pipe sections, and a operative state in which the fluid flows from the first pipe section to the second pipe section and a blocking state in which the fluid cannot flow from the first pipe section to the second pipe section Switching between, wherein the flow control unit includes a three-way valve; and a fluid output unit, which is disposed at an end of the second pipe section away from the flow control unit and can control the state of the fluid output through the second pipe section; Wherein, when the three-way valve of the flow control unit is switched from the circulation state to the blocking state after a delay time, a pressure difference between the pressure of the fluid in the second pipe section and the external pressure is passed to the The fluid in the second pipe section is sucked back in the direction of the flow control unit, and the fluid output unit prevents the fluid from being output. The fluid control device according to claim 4, further comprising a recovery line, the three-way valve has an input end connected to the first pipe section, a first output end connected to the second pipe section, and a communication At the second output end of the recovery pipeline, when the flow control unit is in the circulation state, the first output end is opened and the second output end is closed, so that the fluid is output from the first output of the three-way valve Output to the second pipe section, when the flow control unit is in the blocking state, the first output end is closed and the second output end is opened, so that the fluid is output from the second output end of the three-way valve to The recovery line. The fluid control device according to claim 5, wherein the flow control unit further includes a trigger module, a connection pipeline connected between the trigger module and the three-way valve, and a connection pipe A flow control valve on the road between the trigger module and the three-way valve, the trigger module is used to provide a trigger source to the three-way valve, so that the flow control unit is in the circulation state and the blocking state Switching between, the flow control valve can be operative to change the flow rate through the trigger source to adjust the length of the delay time. A fluid control device includes: a conveying pipeline for a fluid to flow inside, the conveying pipeline includes a first pipe section and a second pipe section; a flow control unit communicating between the first pipe section and the second pipe section; Between the pipe sections, and a operative state in which the fluid flows from the first pipe section to the second pipe section and a blocking state in which the fluid cannot flow from the first pipe section to the second pipe section Switching between; and a fluid output unit disposed at an end of the second pipe section away from the flow control unit and capable of controlling a state in which the fluid is output through the second pipe section; wherein the flow control unit passes the circulation state through a When switching to the blocking state after a delay time, a pressure difference between the pressure of the fluid in the second pipe section and the external pressure is passed to suck back the fluid in the second pipe section toward the flow control unit, and The fluid output unit prevents the fluid from being output, and the length of the delay time ranges from 0.1 second to 5 seconds. The fluid control device according to claim 1, 4, or 7, wherein the fluid output unit includes a pipe member and a moving member, the pipe member forms an output stream that is in communication with the second pipe section and is used to output the fluid Channel, and a suction space communicating with the output flow channel, the moving member is movably disposed on the pipe and can be located in the suction space at a first position closer to the output flow channel, and a distance away from the flow channel The output flow channel moves between the second positions. When the moving member moves from the first position to the second position, the fluid in the output flow channel is at least partially sucked into the suction space. The fluid control device according to claim 8, wherein the moving member includes a flexible portion and a rod portion, the flexible portion is disposed on the tube and is located in the suction space, and the rod portion is connected to the flexible portion One side of the flexible portion drives the flexible portion to move between the first position and the second position. The fluid control device according to claim 1, 4, or 7, wherein the fluid output unit includes a pipe member and a moving member, the pipe member forms an output stream that is in communication with the second pipe section and is used to output the fluid Channel, the moving member is movably disposed in the tube and can be in a first position that does not block the output flow channel to enable the fluid to output, and a second position that blocks the output flow channel to prevent the fluid from being output Move between positions. The fluid control device according to claim 8, wherein the fluid output unit further comprises a driving module connected to the pipe, the driving module is used to provide a gas pressure to drive the moving member in the first position and Move between the second positions. The fluid control device according to claim 8, wherein the fluid output unit further includes a driving module and an elastic member, the driving module is connected to the pipe and is used to provide a gas pressure to drive the moving member to The first position is moved between the two positions, and the elastic member is connected between the pipe member and the moving member. The fluid control device according to claim 8, wherein the output stream prop has a curved curved section, and the moving member is disposed on the pipe and corresponds to the curved section. The fluid control device according to claim 1, 4, or 7, wherein the flow control unit is first switched from the circulation state to the blocking state so that the fluid returns along the second pipe section toward the flow control unit. Suction, the fluid output unit then controls the fluid to prevent the fluid from being output via the second pipe section. The fluid control device according to claim 1, 4 or 7, further comprising a suction valve provided in the second pipe section and interposed between the flow control unit and the fluid output unit. The fluid control device according to claim 15, wherein the flow control unit is first switched from the circulation state to the blocked state so that the fluid is sucked back along the second pipe section toward the flow control unit, and then The suction valve sucks back the fluid in the second pipe section away from the fluid output unit, and finally the fluid output unit controls the fluid to prevent the fluid from being output through the second pipe section. The fluid control device according to claim 15, wherein the fluid output unit includes a pipe member and a moving member, the pipe member forms an output flow channel which communicates with the second pipe section and is used to output the fluid, and the movement A piece is movably disposed in the tube and can move between a first position that does not block the output flow path to enable the fluid to output, and a second position that blocks the output flow path to prevent the fluid from outputting, After the flow control unit and the suction valve suck back the fluid, the fluid in the output flow path is separated from the moving member by a distance. At this time, the moving member moves from the first position to the second position, so that The fluid is blocked by the moving member.