TWI651486B - Fluid supply control device - Google Patents

Abstract

It can maintain good maintainability and make the device more compact or centralized.

The fluid supply control device of the present invention has a flow block and a plurality of modules. The plurality of modules include at least one loading and unloading module that can be loaded and unloaded in the flow block, and are arranged in a substantially straight line along a predetermined arrangement direction. The flow path block is formed with a flow path and a pair of female screw portions. A pair of female screw portions are provided to allow the mounting and dismounting module to be detachably mounted. The connection flow path is configured to connect different modules. The connecting flow path and the female screw portion are arranged in a substantially straight line along the arrangement direction of the flow direction of the fluid in the flow path block.

Description

Fluid supply control device Field of invention

The present invention relates to a fluid supply control device including a flow path block forming a flow path of a fluid inside, and a plurality of modules installed in the flow path block.

Background of the invention

Such a device is used, for example, as a gas supply device in a semiconductor process. Specifically, for example, it is disclosed in the gas supply unit of Patent Document 1 below that a plurality of fluid control devices (such as a fluid control valve or a flow controller) are fixed to a flow block having a gas flow path inside by bolts. In addition, the plurality of fluid control devices are arranged in a line along the long side direction of the flow path block.

However, the above-mentioned gas supply device used in a semiconductor process is sometimes configured to supply most types of gas. In this case, a plurality of gas supply units as described above are provided in parallel (see, for example, Patent Document 2 below).

Advance technical literature Patent literature

[Patent Document 1] Japanese Patent Laid-Open No. 2001-227657

[Patent Document 2] Japanese Patent Laid-Open No. 2006-46494

Summary of invention

Such a device (especially a gas supply device used in a semiconductor process as described above) has requirements for maintaining good maintainability and for making the device smaller or more centralized. The present invention has been made in view of the above-mentioned matters and the like.

The fluid supply control device of the present invention includes a flow block and a plurality of modules. A fluid flow path is formed inside the flow path block. A plurality of the aforementioned molds are assembled and arranged on the aforementioned flow path block. Specifically, the plurality of the aforementioned modules are arranged in a substantially straight line along a predetermined arrangement direction. The aforementioned module is typically a fluid control machine such as a fluid control valve or a flow controller. In addition, at least one of the plurality of the aforementioned modules is an attachable / detachable module which can be attached to and detached from the aforementioned flow path block.

The flow path block is formed with a connection flow path as the flow path and a pair of female screw portions. The pair of the female screw portions is provided to be capable of detachably mounting the mounting module. The connection flow paths are configured to connect different modules. In addition, in this specification, "free loading and unloading" means not only simply "removable", but also means that the person in charge of maintenance of the fluid supply control device can perform simple loading and unloading operations (such as screwing or disengaging bolts) Easy to load and unload.

The first structure of the present invention is characterized in that the flow path block is A plurality of the modules arranged in the arrangement direction are formed integrally and inseparably, and the connection flow path and the female screw portion are arranged along the arrangement direction (typically parallel to the arrangement direction) in a substantially straight line. Here, the alignment direction is a direction parallel to the flow direction of the fluid in the flow path block. The connection flow path is typically formed along the alignment direction, and the fluid is circulated in the alignment direction. That is, the flow path block is typically configured so that the fluid flows in the alignment direction (a direction parallel to the alignment direction).

According to the first configuration, the plurality of modules are arranged in the arrangement direction and installed in one of the flow channel blocks. In particular, the mounting and dismounting module of the plurality of modules can be detachably mounted (fixed) on the flow path block by a pair of the female screw portions. In addition, the different modules are connected through the connection flow path.

However, in the conventional technology, in order to fix the aforementioned module (for example, a fluid control valve) to the aforementioned flow path block, four bolts are used. The four bolts are screwed to the flow path block in a state of being arranged in a rectangular shape in a plan view. Therefore, in this conventional technique, in order to provide a flange portion or a screw hole corresponding to the arrangement of the four bolts, there is a need to restrict a predetermined area in a plan view. Therefore, in the conventional technology, no matter how small the width of the aforementioned module is, it is limited to reduce the width of the entire device. In the extreme, if the width of the aforementioned module is reduced to the limit, a situation where the screw holes exceed the width of the aforementioned module will also occur.

In this regard, in the aforementioned flow path block of the first configuration of the present invention as described above, a pair of the aforementioned loading and unloading modules is detachably mounted in a pair. The connection screw paths of the female screw portions for connecting the different modules are arranged in a substantially straight line along the arrangement direction. Accordingly, it is possible to suppress as much as possible the hindrance to the miniaturization of the device caused by the limitations of the conventional technology. Therefore, according to this configuration, at least one of the plurality of modules can be freely attached to and detached from the flow path block, and the width of the flow path block and the fluid supply control device can be reduced as much as possible (with the shaft of the female screw portion). Direction and the direction perpendicular to the alignment direction). Therefore, according to this configuration, the aforementioned fluid supply control device can maintain good maintainability, and can be further miniaturized or centralized.

In the second configuration of the present invention, the loading / unloading module is mounted on a surface of the flow path block. Specifically, the female screw portion is formed as a non-through hole that is opened on the surface. The connection flow path is formed to bypass the female screw portion in a depth direction of the non-through hole. Therefore, according to this second configuration, the widths of the flow path block and the fluid supply control device can be made as small as possible, and thereby, it can well meet the requirements for further miniaturization or concentration of the fluid supply control device.

In a third configuration of the present invention, the plurality of the aforementioned modules include a fluid control valve and a flow controller. Here, the aforementioned fluid control valve as the aforementioned module is configured to switch the flow and block of the aforementioned fluid. The flow controller as the module is configured to control the flow rate of the fluid. Furthermore, in the third configuration, the flow channel block is formed with one of the fluid control valves for freely attaching and detaching the fluid control valve as the attaching and detaching module, and the female screw portion and freely attaching and detaching as the aforementioned One of the aforementioned flow controllers for attaching and detaching a module is the aforementioned female screw portion.

According to this third configuration, the fluid control valve and the flow controller can be detachably attached to the flow path block. Therefore, according to this configuration, the fluid supply control device with good maintainability of the fluid control valve and the flow controller can be realized with a width as small as possible.

In a fourth configuration of the present invention, the plurality of modules include the fluid control valve and the flow controller. In addition, the flow path block is formed by one of the flow controllers that are freely attachable and detachable as the attaching / detaching module to the female screw portion. That is, the flow controller is detachably mounted on the flow path block by the pair of the female screw portions. On the other hand, in the fourth configuration, the fluid control valve (at least one when there are a plurality of them) is integrated with the flow block without the female screw portion.

According to this fourth configuration, the flow controller, which is the attachment / detachment module, can be detachably installed on the flow path block provided with the fluid control valve integrally by a pair of the female screw portions. Therefore, according to this configuration, the fluid supply control device with easy assembly and good maintainability of the flow controller can be realized with a width as small as possible. In addition, the fluid control valve is integrated with the flow path block without using the female screw portion, so that miniaturization in a direction different from the width direction can be achieved satisfactorily.

According to a fifth aspect of the present invention, the fluid control valve and the flow controller are collectively installed on an upper surface side of one surface of the flow path block. Therefore, according to this configuration, the fluid supply control device in which the fluid control valve and the flow controller are collectively installed on the upper surface side can maintain good maintenance in the fluid control valve and the flow controller. Performance, and achieve as small a width as possible.

In a sixth aspect of the present invention, the flow controller is provided on an upper surface side of a surface of the flow path block. Specifically, the flow controller is detachably mounted on the upper surface side of the flow path block. The fluid control valve is provided on a lower surface side of a surface opposite to the upper surface. Therefore, according to this configuration, the well-maintained fluid supply control device of the flow controller can be realized with a width as small as possible and a length as small as possible in the arrangement direction.

In a seventh configuration of the present invention, the flow channel block is configured to arrange a group of the plurality of modules arranged in the arrangement direction and install the module in a width direction orthogonal to the arrangement direction. In the eighth configuration of the present invention, the flow channel block is formed as a whole and is inseparable across a plurality of the groups. In the ninth configuration of the present invention, the flow channel block type is formed so as to be divided in correspondence with each of the plurality of groups. According to such a configuration, the plurality of the aforementioned groups are arranged in parallel, whereby the aforementioned fluid supply control device capable of supplying plural kinds of the aforementioned fluids can be realized with a width as small as possible.

The above-mentioned fluid control valve has the following configuration.

(1) A fluid control valve in which a piston slides by the pressure of an operating fluid, and a valve body abuts or leaves a valve seat, is characterized by having a first piston and a second piston coaxially, and facing the valve body A first compression spring that imparts potential energy in the direction abutting the valve seat is mounted on the first piston coaxially, and a second compression spring that imparts potential energy in the direction that the valve body abuts the valve seat is coaxial. The upper part is attached to the second piston.

(2) The fluid control valve according to (1), preferably: The first piston and the second piston have the same shape, and the first compression spring and the second compression spring have the same shape.

(3) In the fluid control valve according to (1) or (2), preferably, the sum of the potential energy of the first compression spring and the potential energy of the second compression spring is such that the valve body can abut the valve seat. force.

(4) In the fluid control valve described in any one of (1) to (3), it is preferable that the bracket is fixed to the upper part of the body forming the valve seat, and is arranged between the valve body and the bracket. There are telescopic hoses.

(5) In the fluid control valve described in any one of (1) to (4), it is preferable that the bracket is fixed to the upper portion of the body forming the valve seat by welding.

(6) In the fluid control valve according to (5), preferably, the actuator portion having the piston can be attached to and detached from the bracket.

(7) In the fluid control valve according to any one of (1) to (6), it is preferable that the fluid control valve has a pipe-shaped exterior member.

(8) In the fluid control valve according to (7), preferably, the upper surface of the cover body mounted on the front end of the exterior member has a one-touch joint.

The fluid control valve described above has the following functions and effects.

According to the aspect (1) above, the first compression spring and the second compression spring are mounted on the first piston and the second piston in-line on the same axis, respectively. Therefore, the width of one fluid control valve can be reduced and the size can be reduced. This can reduce the overall installation area.

Here, in recent years, in order to switch a plurality of gases in a semiconductor manufacturing apparatus, the number of valves to be installed has been increased, and the entire set has to be installed. The reduction in area has become an issue. According to the fluid control valve of the present invention, since it is not only two pistons (first piston, second piston), even if, for example, six pistons are added to increase the sealing force for closing the valve, only the height of the actuator portion is increased. That is, when the sealing force is increased, the width of the fluid control valve itself is kept thin, and the installation area does not change. Therefore, regardless of the number of pistons, the size of the fluid control valve can be reduced, and the overall installation area can be reduced. In addition, regardless of the number of pistons, as long as any number of pistons are combined according to the material or shape of the valve body, the necessary Cv value, etc., the sealing force required to close the valve can be easily set. Furthermore, even if any one of the compression springs deteriorates, the potential energy of the other compression springs can ensure a uniform sealing force against the valve seat, and the valve body will not be unbalanced and tilted.

According to the aspect (2) above, when a plurality of pistons are combined with a compression spring, the parts are common because the parts are the same shape. This eliminates the need to prepare pistons and compression springs of other shapes. Moreover, when manufacturing a part by a die, the manufacturing cost can be reduced. Furthermore, by sharing parts, the efficiency of work can be improved during assembly.

According to the aspect (3) above, the sum of the respective potential energy of the first compression spring and the second compression spring becomes the sealing force for closing the fluid control valve, so the spring stress of the compression spring can be reduced individually. Therefore, the durability of the spring can be improved. In addition, the degree of freedom in designing the spring is improved, and design and manufacturing become easier. Furthermore, even if the tolerance is not uniform, the sealing force necessary for closing the valve can be ensured.

According to the aspect (4) above, since a telescopic hose is arranged between the valve body and the seat, compared with the diaphragm valve body, it can be obtained in a smaller diameter. To long strokes.

According to the aspect (5), since the main body and the bracket are fixed and sealed by welding, the actuator can be easily disassembled during assembly or maintenance, thereby improving the efficiency of the operation. In addition, since the body and the holder are sealed, the control fluid does not leak, and safety can be improved.

According to the aspect (6), since the actuator portion can be detached from the bracket, the actuator portion can be easily replaced during assembly or maintenance, which can improve the efficiency of the operation.

According to the aspect (7), since the exterior member is in the shape of a tube, the assembly of the fluid control valve can be easily performed.

According to the aspect (8) above, the one-touch joint is arranged on the cover body installed at the front end of the exterior member, and the air pipe can be connected to the cover, so that the installation area can be prevented from increasing.

1‧‧‧Piping connector

1A‧‧‧Piping connector

1C‧‧‧Piping connector

1V‧‧‧Fluid Control Valve

2‧‧‧Body

2a‧‧‧Joint surface

2b‧‧‧Top

2c‧‧‧first end

2d‧‧‧Second end face

2e‧‧‧first side

2f‧‧‧ second side

2g‧‧‧first opening

2k‧‧‧First bolt insertion hole

2m‧‧‧second bolt insertion hole

2p‧‧‧second opening

2V‧‧‧Fluid Control Valve

3‧‧‧ Management Department

3V‧‧‧ Fluid Control Valve

4‧‧‧ the first path

4V‧‧‧Fluid Control Valve

5‧‧‧Second Access

6‧‧‧ open side access

7‧‧‧ Intermediate access

7a‧‧‧ cover

8a‧‧‧Connecting Department

8b‧‧‧Connecting Department

9a‧‧‧First bolt insertion hole

9b‧‧‧Second bolt insertion hole

10‧‧‧Gas supply device

10A ~ 10H‧‧‧Gas supply unit

11‧‧‧ process gas flows into the pipeline

11A ~ 11H‧‧‧Process gas flows into the pipeline

11AV‧‧‧The first piston

11BV‧‧‧The second piston

11CV‧‧‧3rd Piston

11DV‧‧‧The fourth piston

11EV‧‧‧5th piston

11FV‧‧‧6th piston

11aV‧‧‧Piston

11bV‧‧‧Piston rod

11cV‧‧‧ trench

11dV‧‧‧Internal flow path

11eV‧‧‧Concave

11fV‧‧‧flow

11V‧‧‧Piston

12‧‧‧ Flushing gas flows into the pipeline

12V‧‧‧Compression spring

12AV‧‧‧The first compression spring

12BV‧‧‧ 2nd compression spring

12CV‧‧‧3rd compression spring

12DV‧‧‧4th compression spring

12EV‧‧‧5th compression spring

12FV‧‧‧6th compression spring

13‧‧‧Process gas supply line

13V‧‧‧Piston chamber

13AV‧‧‧Piston chamber

13BV‧‧‧Piston chamber

13CV‧‧‧Piston chamber

13DV‧‧‧Piston chamber

13EV‧‧‧Piston chamber

13FV‧‧‧Piston chamber

13aV‧‧‧Pressure chamber

13bV‧‧‧Back pressure chamber

14‧‧‧ Internal main gas flow path

14V‧‧‧Body

14aV‧‧‧Valve seat

14bV‧‧‧Inlet flow path

14cV‧‧‧Exit flow path

14dV‧‧‧Mounting hole

15‧‧‧ Internal flushing gas flow path

15V‧‧‧Adapter

15aV‧‧‧Female Screw

16‧‧‧Flow controller

16V‧‧‧ bracket

16aV‧‧‧Male Screw

17‧‧‧ fluid control valve

17a‧‧‧Fluid control valve actuator

17V‧‧‧ Telescopic Hose

18‧‧‧ fluid control valve

18a‧‧‧ fluid control valve actuator

18V‧‧‧Valve body

19‧‧‧ fluid control valve

19a‧‧‧ fluid control valve actuator

19V‧‧‧Compression spring

20‧‧‧flow block

20a‧‧‧upper surface

20b‧‧‧ underside surface

20aV‧‧‧Air supply and exhaust port

20c‧‧‧face

20d‧‧‧Connecting surface

20V‧‧‧ Cover

21‧‧‧ connected to the flow path

21a‧‧‧Inlet port

21b‧‧‧Export

21c‧‧‧Entrance

21d‧‧‧Exit

21e‧‧‧Link

21f‧‧‧ Cover

21V‧‧‧One-touch connector

22‧‧‧ connected to the flow path

22a‧‧‧Inlet port

22b‧‧‧Export

22c‧‧‧Entrance

22d‧‧‧Exit access

22e‧‧‧Link

22f‧‧‧ Cover

22V‧‧‧ Exterior components

23‧‧‧ connected to the flow path

23a‧‧‧Inlet port

23b‧‧‧Export

23c‧‧‧Entrance

23d‧‧‧Exit

23e‧‧‧Link

23f‧‧‧ Cover

23V‧‧‧built-in parts

23AV‧‧‧ Interior parts

23BV‧‧‧ Interior parts

23aV‧‧‧Cylinder

24‧‧‧ Flushing gas supply port

24aV‧‧‧Valve body holding part

24V‧‧‧ lever

25‧‧‧ Internal flushing gas line

25AV‧‧‧Sealing member

26‧‧‧Process gas supply port

26AV‧‧‧O ring

26BV‧‧‧O ring

27‧‧‧ Supply-side internal gas line

27V‧‧‧O ring

28a ~ 28d‧‧‧female screw

28a1, 28a2‧‧‧female screw

28V‧‧‧Spring mounting plate

29V‧‧‧ Welding Department

30‧‧‧Inlet side flange

30V‧‧‧ lever

31‧‧‧ flange

31V‧‧‧ diaphragm valve body

32‧‧‧ Management Department

32V‧‧‧Valve seat

33‧‧‧Mounting bolt

33V‧‧‧ coupler

34V‧‧‧ bracket

35V‧‧‧Parts

40‧‧‧Valve installation block

41‧‧‧Mounting bolt

50‧‧‧MFC installation department

51‧‧‧Mounting bolt

60‧‧‧Valve installation block

61‧‧‧Mounting bolt

100V‧‧‧Pneumatic valve

101AV, 101BV, 101CV‧‧‧Piston

102AV, 102BV, 102CV‧‧‧ Coil Spring

200V‧‧‧Pneumatic valve

201、201’‧‧‧first connecting piece

201A‧‧‧First Flow Block

201B‧‧‧face

201V‧‧‧The first piston

202、202’‧‧‧Second connecting piece

202A‧‧‧Second channel block

202V‧‧‧The second piston

203V, 204V‧‧‧ Coil Spring

211, 211a, 211b‧‧‧ first connection opening

211H‧‧‧Threaded hole for connection

212‧‧‧First Link

212H‧‧‧Connecting bolt insertion hole

213‧‧‧Straight Tube Department

213A‧‧‧Flushing line sealing section

214‧‧‧Straight Tube Department

214A‧‧‧supply pipeline sealing section

215‧‧‧Connection channel

216‧‧‧ Cover

217‧‧‧Screw bolt holes

215A, 216A, 217A‧‧‧‧Mounting hole for actuator

221, 221a, 221b‧‧‧Second connection opening

222‧‧‧Second Link

222A‧‧‧ connected to the flow path

222a‧‧‧Inlet port

222b‧‧‧Export

222c‧‧‧First Entrance Path

222d‧‧‧Second Entrance Path

222e‧‧‧Link

222g‧‧‧Exit

222h‧‧‧ Confluence Path

223a‧‧‧Inlet port

223b‧‧‧Export

223c‧‧‧First Entrance Path

223d‧‧‧Second Entrance Path

223e‧‧‧Link

227‧‧‧Connecting bolt insertion hole

230‧‧‧Screw bolt holes

290‧‧‧ split pipe

291‧‧‧ flange

292‧‧‧connection pipe department

B‧‧‧Connecting bolt

C1‧‧‧center axis

C2‧‧‧center axis

d‧‧‧interval

d1‧‧‧ interval

D‧‧‧ Center distance

D1‧‧‧ Center distance

P11‧‧‧Piping

P12‧‧‧Piping

P21‧‧‧Piping

P22‧‧‧Piping

P31‧‧‧Piping

P32‧‧‧Piping

P41‧‧‧connection piping

P42‧‧‧Piping

PJ‧‧‧Piping connection structure

XV‧‧‧Actuator

YV‧‧‧Valve Department

FIG. 1 is a flowchart showing a schematic configuration of a fluid flow path in a gas supply device according to an embodiment of a fluid supply control device of the present invention.

FIG. 2 is a plan view showing an example of the configuration of the gas supply device shown in FIG. 1. FIG.

Fig. 3 is a front view of the gas supply device shown in Fig. 2 (including an embodiment of the flow block of the present invention).

FIG. 4 is an enlarged front view of an embodiment of the flow block of the present invention shown in FIG. 3. FIG.

FIG. 5 is a plan view of the flow path block shown in FIG. 4.

FIG. 6 is a side view of the flow path block shown in FIG. 5.

FIG. 7 is a sectional view taken along the line 7-7 in FIG. 5. FIG.

FIG. 8 is a plan view of a modification of the flow path block of the present invention.

FIG. 9 is a front view of the flow path block shown in FIG. 8. FIG.

Fig. 10 is a side view of the flow path block shown in Fig. 8.

Fig. 11 is a plan view showing a schematic configuration of a fluid supply control device according to the present invention.

Fig. 12 is a front view of the fluid supply control device shown in Fig. 11.

Fig. 13 is a bottom view of the fluid supply control device shown in Fig. 11.

Fig. 14 is an enlarged front view of the flow path block shown in Fig. 11.

Fig. 15 is a plan view showing a schematic configuration of a fluid supply control device according to the present invention.

Fig. 16 is a front view of the fluid supply control device shown in Fig. 15.

Fig. 17 is a bottom view of the fluid supply control device shown in Fig. 15.

FIG. 18 is an enlarged front view of the flow path block shown in FIG. 15.

19 is a perspective view showing a schematic configuration of a fluid supply control device according to a modification of the present invention.

20 is an exploded perspective view of a fluid supply control device according to another modification of the present invention.

FIG. 21 is an enlarged perspective view of a first flow path block shown in FIG. 20. FIG.

FIG. 22 is a perspective view of another perspective of the first flow path block shown in FIG. 21.

Fig. 23 is a plan view showing an example of a pipe joint according to an embodiment of the present invention.

Fig. 24 is a side view of the pipe joint shown in Fig. 23.

FIG. 25 is a bottom view of the pipe joint shown in FIG. 23.

Fig. 26 is a plan view showing another example of a pipe joint according to an embodiment of the present invention.

FIG. 27 is a side view of the pipe joint shown in FIG. 26.

FIG. 28 is a bottom view of the pipe joint shown in FIG. 26.

FIG. 29 is a side view showing a schematic configuration of a piping joint structure according to an embodiment of the present invention formed by connecting the piping joint shown in FIGS. 23 to 25 and the piping joint shown in FIGS. 26 to 28. FIG.

30 is a plan view showing a schematic configuration of a piping joint structure according to an embodiment of the present invention formed by connecting the piping joints shown in FIGS. 23 to 25 and the piping joints shown in FIGS. 26 to 28.

Fig. 31 is a plan view showing the structure of a piping joint of a conventional technique as a comparative example.

Fig. 32 is a plan view showing an example of a configuration of a fluid supply control device according to an embodiment of the present invention.

FIG. 33 is a side view of the fluid supply control device shown in FIG. 32.

FIG. 34 is an enlarged side view of the flow path block shown in FIG. 33.

Fig. 35 is a side view showing another example of the configuration of the fluid supply control device of the present invention.

Fig. 36 is a plan view showing the structure of a modification of the piping joint of the present invention.

Fig. 37 is a side view of the pipe joint shown in Fig. 36.

FIG. 38 is a bottom view of the pipe joint shown in FIG. 36.

Fig. 39 is a diagram showing the structure of another modification of the pipe joint of the present invention; Floor plan.

FIG. 40 is a side view of the pipe joint shown in FIG. 39.

FIG. 41 is a bottom view of the pipe joint shown in FIG. 39. FIG.

Fig. 42 is a sectional view of a fluid control valve.

FIG. 43 is an enlarged sectional view of a PV portion of FIG. 42.

Fig. 44 is a sectional view of a valve portion.

Fig. 45 is a sectional view of a piston.

Fig. 46 is a perspective view of a piston.

Fig. 47 is an exploded view when the fluid control valve is assembled.

FIG. 48 is a sectional view of a modification of the fluid control valve.

Fig. 49 is a sectional view of another modification of the fluid control valve.

Fig. 50 is a sectional view of a reference example of a fluid control valve.

FIG. 51 is a cross-sectional view of a periphery of a flow path in a valve mounting block.

Fig. 52 is a cross-sectional view of the periphery of a flow path in a valve mounting block.

Fig. 53 is a sectional view of a conventional fluid control valve.

Fig. 54 is a sectional view of a conventional fluid control valve.

Detailed description of the preferred embodiment

Hereinafter, one embodiment of the present invention will be described based on the drawings. In addition, when the modified example is inserted into the description of one embodiment, it will hinder the understanding of the description of the consistent embodiment from the beginning to the end, so the description is organized at the end.

<Overall Structure of Gas Supply Device of Embodiment>

First, a flow path of a fluid in a gas supply device 10 which is an example (one embodiment) of a fluid supply control device according to the present invention will be described with reference to FIG. 1. The approximate composition. The gas supply device 10 is used in a semiconductor process (for example, an etching process), and is configured to use a plurality of process gases (eight in the diagram in FIG. 1). That is, the gas supply device 10 is configured to supply a supply gas (a mixed gas in which a plurality of process gases are mixed, or a single process gas) to a supply destination (process processing chamber) (not shown).

Specifically, in the gas supply device 10, the gas supply units 10A, 10B, 10C, 10D, 10E, 10F, 10G, and 10H are arranged in parallel. The gas supply units 10A to 10H are connected to different process gas inflow lines 11 (process gas inflow lines 11A, 11B, 11C, 11D, 11E, 11F, 11G, and 11H). The process gas inflow lines 11A to 11H are configured to introduce different kinds of process gases, respectively.

The flushing gas inflow line 12 is connected to the gas supply units 10A to 10H. The flushing gas inflow line 12 is provided to supply a flushing gas of an inert gas (for example, nitrogen) to the gas supply units 10A to 10H. Furthermore, the process gas supply line 13 is connected to the gas supply units 10A to 10H.

That is, the gas supply units 10A to 10H are configured to selectively allow a process gas supplied through a process gas inflow line 11 to be supplied from a process gas supply source (not shown), and a purge gas into a line 12 through a purge gas (not shown). The flushing gas supplied from the supply source flows to the process gas supply line 13. Further, the gas supply device 10 is configured to operate the gas supply units 10A to 10H to supply the process gas to the process gas supply line 13, thereby allowing the supply gas described above to pass through the process gas supply line 13 to be supplied to the above. Supply destination.

In addition, the gas supply units 10A to 10H have the same Make up. Therefore, the following description focuses on the configuration of the gas supply unit 10A.

An internal main gas flow path 14 and an internal flushing gas flow path 15 are formed in the gas supply unit 10A. The internal main gas flow path 14 and the internal flushing gas flow path 15 are gas flow paths formed inside the gas supply unit 10A. The internal main gas flow path 14 is provided between the process gas inflow line 11 and the process gas supply line 13. That is, the process gas inflow line 11 is connected to the process gas supply line 13 via the internal main gas flow path 14. The internal flushing gas flow path 15 is a flow path of the flushing gas, and is provided to connect the flushing gas inflow line 12 and the internal main gas flow path 14.

The gas supply unit 10A includes a flow controller 16 as a module. The flow controller 16 is installed in the internal main gas flow path 14 closer to the downstream side of the flow direction of the process gas than the connection point with the internal flushing gas flow path 15 (process gas supply line 13 side). The flow direction of the process gas in the gas supply unit 10A and the like is hereinafter referred to as a "gas flow direction". The flow controller 16 is called a so-called "mass flow controller", and is configured to output a detection signal corresponding to the mass flow rate of the gas in the internal main gas flow path 14, and can be supplied from the outside ( A microcomputer (mirco computer, etc.) control signal controls the aforementioned mass flow.

The gas supply unit 10A includes a fluid control valve 17 (including a fluid control valve actuator 17a), a fluid control valve 18 (including a fluid control valve actuator 18a), and a fluid control valve 19 (including a fluid control valve) as modules. Actuator 19a). The fluid control valve 17 is installed closer to the upstream side of the gas flow direction (the process gas inflow line 11 side) than the connection point described above, and is installed inside Main gas flow path 14. The fluid control valve 18 is installed in the internal flushing gas flow path 15. The fluid control valve 19 is installed on the internal main gas flow path 14 on the downstream side closer to the gas flow direction than the flow controller 16.

The fluid control valve 17 is an on-off valve having a structure called a “pneumatic valve”, and a joint portion (a fluid control valve 18 and 19 is the same). The fluid control valve 17 is provided to switch the flow of the process gas from the process gas inflow line 11 toward the flow controller 16 and block it. The fluid control valve 18 is provided to switch the inflow of the flushing gas to the internal main gas flow path 14 and block it. The fluid control valve 19 is provided to switch the flow of the gas toward the process gas supply line 13 and block it.

Referring to FIG. 2, in the gas supply units 10A to 10H, the fluid control valve 17, the fluid control valve 18, the flow controller 16, and the fluid control valve 19 are sequentially arranged in the gas flow direction. The fluid control valves 17 to 19 and the flow rate controller 16 are arranged in a substantially straight line along the gas flow direction (specifically, parallel to the gas flow direction). In addition, the direction in which the fluid control valve 17, the fluid control valve 18, the flow controller 16, and the fluid control valve 19 are arranged in the gas supply unit 10A and the like is hereinafter referred to as a “machine arrangement direction”. In this configuration, the gas flow direction is parallel to the machine arrangement direction, and is set in a one-way direction from the fluid control valve 17 through the fluid control valve 18 and the flow controller 16 to the fluid control valve 19 (direction from left to right in FIG. 2).

In this configuration, each of the flow controllers 16 in the gas supply units 10A to 10D is arranged at approximately the same position in the gas flow direction (the same applies to the fluid control valves 17 to 19). That is, in the gas supply units 10A to 10D, The flow controllers 16 are arranged in a substantially straight line along the width direction (the direction orthogonal to the gas flow direction and the thickness direction of the flow path block 20 to be described later: the up-down direction in FIG. 2). Similarly, the flow controllers 16 in the gas supply units 10E to 10H are arranged at substantially the same position in the gas flow direction (the same applies to the fluid control valves 17, 18, and 19).

The gas supply device 10 (gas supply unit 10A) is a substantially flat plate-shaped member and has the above-mentioned flow path block 20 (installation target). In this configuration, the flow controller 16 and the fluid control valves 17, 18, and 19 are arranged in the machine arrangement direction and are detachably mounted (fixed) on the flow path block 20. The fluid control valve 17, the fluid control valve 18, the flow controller 16 and the fluid control valve 19 are arranged in this order in the machine arrangement direction and are installed on the flow path block 20. Thus, by forming on the flow path block 20, An internal gas flow path (described later in detail) is connected to receive gas. That is, the flow path block 20 is configured to install the fluid control valve 17, the fluid control valve 18, the flow controller 16 and the fluid control valve 19 in a state of being arranged in the machine arrangement direction, thereby connecting these components in this order.

In addition, the flow path block 20 is configured so that a plurality of (four in this specific example) fluid control valves 17, fluid control valves 18, flow controllers 16, and fluids arranged in the machine arrangement direction described above can be installed in the width direction. Group of control valves 19. Specifically, in this configuration, one flow path block 20 is structured such that a plurality of gas supply units 10A to 10D can be aligned and installed in the width direction. The flow path block 20 is formed integrally and cannot be separated across a plurality of gas supply units 10A to 10D (specifically, it is integrated without joints). Similarly, there is one flow path block 20 configured to supply a plurality of gas supply units 10E to 10H. Arranged and installed in the width direction. The flow path block 20 is formed integrally across a plurality of gas supply units 10E to 10H and cannot be separated (specifically, integrated without joints).

That is, in this configuration, the gas supply device 10 includes a flow path block 20 (integrated and inseparable) corresponding to the gas supply units 10A to 10D, and a flow path block 20 (integrated) corresponding to the gas supply units 10E to 10H. And cannot be separated). The two are combined with each other in a state of being adjacent to each other and can receive a supply gas or a flushing gas.

<Schematic configuration of flow block of the embodiment>

3 to 7 show a detailed structure of the flow path block 20 according to an embodiment of the present invention. Hereinafter, the specific structure of the flow path block 20 of this embodiment will be described in detail using FIGS. 3 to 7 and referring to other drawings as needed.

2 and 3, in the gas supply units 10A to 10D and 10E to 10H, the flow controller 16 and the fluid control valves 17, 18, and 19 are collectively installed on an upper surface 20a of one of the surfaces of the flow path block 20 (installed Let surface) side. In addition, hereinafter, one surface of the flow path block 20 opposite to the upper surface 20a is referred to as a "lower surface 20b". In addition, the surface of the flow path block 20 which is orthogonal to the upper surface 20a and the lower surface 20b and whose normal direction is the width direction is hereinafter referred to as "end surface 20c".

Hereinafter, referring to FIG. 2 to FIG. 4, the connection between the fluid control valve 17, the fluid control valve 18, the flow controller 16 and the fluid control valve 19 and the gas supply units 10A to 10D in one flow block 20 The schematic configuration of the internal gas flow paths connected to each other will be described.

The flow path block 20 is a slightly plate-shaped member formed of stainless steel, and It is structured so that the process gas circulates in the above-mentioned gas flow direction, that is, the machine arrangement direction. Specifically, a slightly U-shaped connecting flow path 21 is formed inside the flow path block 20. The connection flow path 21 constituting the “first flow path” of the present invention is provided at a position upstream of the gas flow direction of the flow path block 20 (a position near the end portion on the upstream side in the gas flow direction).

The connection flow path 21 is formed in a substantially straight line along the gas flow direction when viewed in plan (when viewed in the thickness direction of the flow block 20) so that the process gas flows in the above-mentioned gas flow direction. Specifically, the connection flow path 21 includes an inlet port 21a and an outlet port 21b that are opened on the upper surface 20a. That is, the inlet port 21 a is an inflow port of a process gas from the process gas inflow line 11, and is provided at an end on the upstream side of the gas flow direction connected to the flow path 21. Similarly, the outlet port 21b is an outflow port of a process gas flowing from the inlet port 21a, and is provided at an end on the downstream side of the gas flow direction connected to the flow path 21.

An entrance passage 21c is formed from the entrance port 21a toward the lower side surface 20b. Similarly, an outlet passage 21d is formed from the outlet port 21b toward the lower side surface 20b. The inlet passage 21c and the outlet passage 21d are cylindrical holes, and are provided in parallel with the thickness direction of the flow path block 20.

End portions of the inlet passage 21c and the outlet passage 21d on the lower surface 20b side are connected to each other by a connection passage 21e. The connection path 21e is a flat plate (the plane is regarded as an oblong shape) made of stainless steel, and the cover portion 21f hermetically closes the groove formed from the lower surface 20b side by welding (such as laser welding or electron beam welding). The formed space is arranged parallel to the gas flow direction.

A downstream side closer to the gas flow direction than the connection flow path 21 is provided between the fluid control valves 17 and 18 and the flow controller 16. 接 流 路 22。 Access flow path 22. The connection flow path 22 constituting the “first flow path” of the present invention is a gas flow path formed along the gas flow direction inside the flow path block 20 so that the gas flows in the above-mentioned gas flow direction. The connection flow path 22 has the same structure as the connection flow path 21 described above, and is provided to connect the fluid control valve 17 or 18 and the flow controller 16.

Specifically, the connection channel 22 includes an inlet port 22a, an outlet port 22b, an inlet channel 22c, an outlet channel 22d, a connection channel 22e, and a cover portion 22f similarly to the connection channel 21 described above. The connection flow path 22 is provided so that the gas that has flowed into the inlet port 22a through the fluid control valve 17 or 18 is transmitted to the outlet port 22b through the inlet path 22c, the connection path 22e, and the outlet path 22d, and then discharged from the outlet port 22b. This gas can flow from the fluid control valve 17 or 18 toward the flow controller 16.

A connection flow path 23 is provided at a position of the flow path block 20 further downstream than the connection flow paths 21 and 22 in the gas flow direction. That is, the connection flow path 23 is provided at a position on the downstream side (a position near the end portion on the downstream side) in the gas flow direction of the flow path block 20. The connection flow path 23 constituting the "first flow path" of the present invention is formed in the flow path block 20 along the gas flow direction, and allows the gas to flow in the above-mentioned gas flow direction, and has a flow path similar to that described above. The connection channels 21 and 22 have the same structure. The connection flow path 23 is provided to connect the flow controller 16 and the fluid control valve 19.

Specifically, the connection flow path 23 includes an inlet port 23a, an outlet port 23b, an inlet path 23c, an outlet path 23d, a connection path 23e, and a cover portion 23f similarly to the connection flow paths 21 and 22 described above. The connection flow path 23 is provided so that the gas flowing into the inlet port 23a through the flow controller 16 passes through the inlet passage 23c, The connection 23e and the outlet passage 23d are transmitted to the outlet port 23b and discharged from the outlet port 23b, thereby allowing the gas to flow from the flow controller 16 to the fluid control valve 19.

As described above, the connection flow paths 21, 22, and 23 are formed in a substantially straight line along the gas flow direction in plan view. In addition, the connection flow paths 21, 22, and 23 are arranged in a substantially straight line along the gas flow direction in plan view. In the following, the so-called connection flow paths 21, 22, and 23 are "arranged in a substantially straight line", which does not necessarily require that the center when viewed in a plane such as this is located on a specific straight line. That is, for example, if they are arranged so as to overlap a specific straight line in a plan view, they may be referred to as "arranged into a substantially straight line".

The flushing gas supply port 24 is provided at the position corresponding to the fluid control valve 18 in the upper side surface 20 a of the flow path block 20 so as to open toward the fluid control valve 18. The flushing gas supply port 24 is arranged in a plan view, and the inlet port 22a in the connection flow path 22 and the outlet port 21b in the connection flow path 21 are slightly point symmetrical. That is, the outlet port 21b, the flushing gas supply port 24, and the inlet port 22a in the connection flow path 21 are arranged in a substantially straight line along the gas flow direction in this order in plan view.

The flushing gas supply port 24 is formed so that the flushing gas can be supplied to the fluid control valve 18 by communicating with an internal flushing gas line 25 formed across the plurality of gas supply units 10A, 10B, ... along the width direction of the device. . The internal flushing gas line 25 constituting the "second flow path" of the present invention is a flushing gas flow path formed inside the flow path block 20, and is connected to the flushing gas inflow line 12 (see FIG. 1). Further, between the flushing gas supply port 24 and the internal flushing gas line 25, a thickness equal to that of the flow path block 20 is formed. To parallel and short gas flow paths. That is, each of the flushing gas supply ports 24 corresponding to the gas supply units 10A to 10D is connected to the internal flushing gas line 25 via the short gas flow path described above.

In this embodiment, the internal flushing gas line 25 is provided at a position corresponding to the fluid control valve 18 (just below the fluid control valve 18). Specifically, the internal flushing gas line 25 is arranged so as to be substantially coincident with the flushing gas supply port 24 in a plan view position in the machine arrangement direction.

The process gas supply port 26 is provided at the position corresponding to the fluid control valve 19 in the upper side surface 20 a of the flow path block 20 so as to open toward the fluid control valve 19. The process gas supply port 26 is formed to communicate with a supply-side internal gas line 27 formed along the width direction of the device by crossing a plurality of gas supply units 10A, 10B,... To the supply-side internal gas line 27.

The supply-side internal gas line 27 constituting the "second flow path" of the present invention is a gas flow path formed inside the flow path block 20, and is connected to the process gas supply line 13 (see FIG. 1). Further, a short gas flow path is formed between the process gas supply port 26 and the supply-side internal gas line 27 in parallel with the thickness direction of the flow path block 20. That is, the process gas supply ports 26 corresponding to the gas supply units 10A to 10D are connected to the supply-side internal gas lines 27 through the short gas flow paths, respectively.

In this embodiment, the supply-side internal gas line 27 is provided at a position corresponding to the fluid control valve 19 (just below the fluid control valve 19). Specifically, the supply-side internal gas line 27 is arranged so as to be slightly coincident with the process gas supply port 26 in the position of the machine arrangement direction in plan view.

As described above, the gas supply unit 10A and the like are configured so that the self-made process gas flows into the pipeline 11 and the process gas or the self-flushing gas flows into the inlet port 21a in the flow path 21 through the fluid control valves 17 and 18. The flushing gas flowing from the line 12 into the internal flushing gas line 25 is supplied to the supply-side internal gas line 27 through the connection flow path 22, the flow controller 16, the connection flow path 23, and the fluid control valve 19. That is, the gas supply units 10A to 10D (10E to 10H) are connected through the internal flushing gas line 25 and the supply-side internal gas line 27 so as to be able to receive gas from each other.

On the upper surface 20a side of the flow path block 20, female screw portions 28a, 28b, 28c, and 28d are provided. The female screw portions 28 a, 28 b, 28 c, and 28 d are so-called “thread holes”, and are formed so that the axial direction (depth direction) is parallel to the thickness direction of the flow path block 20.

A pair of female screw portions 28 a are provided at positions corresponding to the inflow-side flange 30. A pair of female screw portions 28 b are provided at positions corresponding to the fluid control valves 17 and 18. A pair of female screw portions 28 c are provided at positions corresponding to the flow controller 16. A pair of female screw portions 28 d are provided at positions corresponding to the fluid control valve 19. The pair of female screw portions 28a, the pair of female screw portions 28b, the pair of female screw portions 28c, and the pair of female screw portions 28d are aligned in this order along the gas flow direction (machine arrangement direction) in a substantially straight line.

A pair of female screw portions 28 a corresponding to one of the inflow-side flanges 30 are arranged on both sides of the inlet port 21 a in the connection flow path 21, and are arranged in the machine arrangement direction. The inflow-side flanges 30 are provided in each of the gas supply units 10A to 10H. The inflow side flange 30 in the gas supply unit 10A is a piping flange for connecting the process gas inflow line 11A and the inlet port 21a, and is formed to The front view has a slightly inverted T shape (the inflow-side flange 30 in the gas supply units 10B to 10H also has the same structure).

The inflow-side flange 30 corresponding to one of the modules is composed of a flange portion 31 and a pipe portion 32. The flange portion 31 is a plate-shaped member having a substantially I-shape in plan view, and is configured to be air-tightly joined to the upper side surface 20 a of the flow path block 20. The tube portion 32 is erected slightly perpendicularly from the flange portion 31. The flange portion 31 is formed so that its width (the above-mentioned widthwise dimensions: the same below) is slightly larger than the outer diameter of the pipe portion 32 and the mounting bolt 33, and the width of the flow controller 16 and the fluid control valves 17 to 19 (fluid control The widths of the valve actuators 17a to 19a are slightly the same.

A through hole (not shown) is formed in the flange portion 31 at a position corresponding to the female screw portion 28 a to insert the mounting bolt 33. Further, the inflow-side flange 30 can be air-tightly installed on the upper surface 20a side of the flow path block 20 by screwing the mounting bolts 33 to the pair of female screw portions 28a (the air-tight seal structure of the installation place Since it is a well-known technology, illustration or description is omitted (the same applies hereinafter). That is, the pair of female screw portions 28 a are provided so that the inflow-side flange 30 can be detachably attached to the flow path block 20.

Corresponding to one of the pair of female screw portions 28b of one of the fluid control valves 17 and 18, it is provided on the downstream side (in FIG. 4) of the gas flow direction connecting the outlet port 21b in the flow path 21 and the pair of female screw portions 28a. To the right). The other of the pair of female screw portions 28 b is provided between the flushing gas supply port 24 and the outlet port 22 b in the connection flow path 22.

In this embodiment, the fluid control valves 17 and 18 are integrated through a common valve mounting block 40 and are fixed to the flow path block 20. That is, the fluid control valve actuators 17a and 18a are mounted in the same valve mounting block 40 in advance. The valve mounting block 40 is formed in a substantially I shape in plan view. In addition, the valve mounting block 40 is formed to have a width slightly larger than the outer diameter of the mounting bolt 41, and is slightly the same as the width of the flow controller 16 and the fluid control valve actuators 17a to 19a. The valve mounting block 40 is formed with a portion near the valve body of the fluid control valve actuator 17a from the outlet port 21b of the connection flow path 21 (the structure of the foregoing portion is a well-known technology, so illustration or explanation is omitted: The same applies hereinafter) to the internal gas flow path (not shown) connected to the inlet port 22a in the flow path 22, and to the connection flow from the flushing gas supply port 24 through the vicinity of the valve body in the fluid control valve actuator 18a. The internal gas flow path (not shown) of the inlet port 22a in the path 22. The fluid control valve 17 (18) is configured by attaching a fluid control valve actuator 17a (18a) to the valve mounting block 40 having the configuration described above.

In addition, a through hole (not shown) is formed in the valve mounting block 40 at a position corresponding to the female screw portion 28b for the mounting bolt 41 to pass through. In addition, the fluid control valves 17 and 18 can be air-tightly installed on the upper surface 20a side of the flow path block 20 through the common valve mounting block 40 by screwing the mounting bolt 41 to a pair of female screw portions 28b. That is, in this embodiment, the fluid control valves 17 and 18 are integrated, in other words, the fluid control valve actuators 17a and 18a and the valve mounting block 40 in which these are installed in advance constitute a mold that can be freely attached to the flow path block 20. Group (loading module). In addition, the pair of female screw portions 28b are provided to allow the fluid control valves 17 and 18 (valve mounting blocks 40 of the fluid control valve actuators 17a, 18a to be installed in advance) to be freely attached to the flow path block 20.

One of the pair of female screw portions 28c corresponding to one of the flow controllers 16 is provided on the downstream side in the gas flow direction in the pair of female screw portions 28b. And the outlet port 22b in the connection flow path 22. The other of the pair of female screw portions 28 c is provided between the inlet port 23 a and the outlet port 23 b in the connection flow path 23.

In this embodiment, the flow controller 16 is provided with an MFC mounting portion 50. The MFC mounting portion 50 is formed in a substantially I shape in plan view. Further, the MFC mounting portion 50 is formed so that its width is slightly larger than the outer diameter of the mounting bolt 51, and the portion above the MFC mounting portion 50 in the flow controller 16 and the fluid control valves 17 to 19 (fluid control valve actuator 17a) ~ 19a) are slightly the same width. The MFC mounting portion 50 is formed with an internal gas flow path (not shown) from the outlet port 22 b in the connection flow path 22 to the flow controller 16, and a gas flow path through the inside of the flow controller 16 to the connection flow path. Internal gas flow path (not shown) of the inlet port 23a in 23.

In addition, a through hole (not shown) is formed in the MFC mounting portion 50 at a position corresponding to the female screw portion 28c to allow the mounting bolt 51 to pass through. In addition, the flow controller 16 can be air-tightly installed on the upper side surface 20 a side of the flow path block 20 by screwing the mounting bolt 51 to the pair of female screw portions 28 c. That is, the pair of female screw portions 28 c are provided to allow the flow controller 16 (MFC mounting portion 50) to be detachably attached to the flow path block 20.

Corresponding to one of the pair of female screw portions 28d of one of the fluid control valves 19 is provided between the pair of female screw portions 28c on the downstream side in the gas flow direction and the outlet port 23b in the connection flow path 23 position. The other of the pair of female screw portions 28 d is provided on the downstream side closer to the gas flow direction than the process gas supply port 26, that is, the end portion provided on the downstream side in the gas flow direction of the flow path block 20.

In the present embodiment, the fluid control valve 19 is configured by previously mounting the fluid control valve actuator 19 a on the valve mounting block 60. The valve mounting block 60 is formed in a substantially I shape in plan view. The valve mounting block 60 is formed to have a width slightly larger than the outer diameter of the mounting bolt 61, and is slightly the same as the width of the flow controller 16 and the fluid control valve actuators 17a to 19a. In the valve mounting block 60, an internal gas flow path (not shown in the figure) is formed from the outlet port 23b of the connection flow path 23 through the vicinity of the valve body in the fluid control valve actuator 19a to the process gas supply port 26. ).

Further, a through hole (not shown) is formed in the valve mounting block 60 at a position corresponding to the female screw portion 28d, through which the mounting bolt 61 can be inserted. In addition, the fluid control valve 19 is air-tightly installed on the upper surface 20 a side of the flow path block 20 through the valve mounting block 60 by screwing the mounting bolt 61 to a pair of female screw portions 28 d. That is, the pair of female screw portions 28d are provided to allow the fluid control valve 19 (the valve mounting block 60 in which the fluid control valve actuator 19a is installed in advance) to be detachably attached to the flow path block 20.

In this embodiment, the female screw portion 28a, the connection channel 21 (including the inlet port 21a, the inlet channel 21c, the connection channel 21e, the outlet channel 21d, and the outlet port 21b), the female screw portion 28b, and the connection channel 22 (ibid.) The flushing gas supply port 24, the female screw portion 28c, the connection flow path 23 (ibid.), The process gas supply port 26, and the female screw portion 28d are arranged in a substantially straight line along the machine arrangement direction. The female screw portions 28a, 28b, 28c, and 28d are formed as non-through holes that are opened in the upper surface 20a. That is, the connection flow paths 21, 22, and 23 are formed in the depth direction of the female screw portions 28a to 28d, bypassing the female screw portions 28a to 28d. Specifically, the female screw portions 28a to 28d are formed so as to communicate with the connection flow path. 21 ~ 23 are not connected.

In addition, the internal main gas flow path 14 in FIG. 1 corresponds to the connection flow paths 21 to 23 and the internal gas flow path formed in the fluid control valve 17 (the internal gas flow path formed in the valve installation block 40 is a slave connection). The outlet port 21b of the flow path 21 is connected to the inlet port 22a of the flow path 22 via the fluid control valve actuator 17a), the internal gas flow path formed in the flow controller 16, and the internal gas formed in the fluid control valve 19. A flow path (an internal gas flow path formed in the valve mounting block 60 and a flow path from an outlet port 23b connected to the flow path 23 through a fluid control valve actuator 19a to a process gas supply port 26), and from a process gas The gas flow path from the supply port 26 to the supply-side internal gas line 27. In addition, the internal flushing gas flow path 15 in FIG. 1 corresponds to the flushing gas flow path from the internal flushing gas line 25 to the flushing gas supply port 24, and is an internal gas flow path formed in the valve mounting block 40 and is a flushing gas from the flushing gas. The supply port 24 passes through the fluid control valve 18 to a flow path connecting the inlet port 22 a of the flow path 22 and the internal flushing gas line 25.

<The main part of the flow block of the embodiment>

Next, regarding the configuration of connecting the internal flushing gas lines 25 and the supply-side internal gas lines 27 in the adjacent flow path blocks 20 that are arranged adjacent to each other in the width direction in parallel to the plurality of flow path blocks 20, Description will be made with reference to FIGS. 5 to 7. In addition, FIG. 7 is an enlarged cross-sectional view showing only the connection portions of the internal flushing gas lines 25 in the adjacent flow path blocks 20. Furthermore, since the connection portions of the supply-side internal gas lines 27 in the adjacent flow path blocks 20 have the same structure, the illustration of the enlarged cross-sectional views of the relevant portions is omitted.

The flow path block 20 includes a first connection piece 201 and a second connection piece 202 which constitute a "connection portion" of the present invention. The first connection piece 201 is provided on the lower side surface 20b side and protrudes from one end portion in the width direction (the right end portion in FIG. 6) in the width direction (that is, faces outward). The second connection piece 202 is provided on the upper surface 20a side and protrudes from the other end portion in the width direction in the width direction. That is, as shown in FIG. 6, the first connecting piece 201 and the second connecting piece 202 are disposed at diagonal positions when viewed along the machine arrangement direction.

In addition, in this embodiment, the first connection piece 201 and the second connection piece 202 are the main part of the flow path block 20 (a part of the cube that constitutes the main part of the flow path block 20 and a part except for the cover part 21f) The seamless terrain becomes one. The first connection piece 201 and the second connection piece 202 are provided across the entire length of the flow path block 20 in the machine arrangement direction. The internal flushing gas line 25 is a substantially cylindrical sealing member formed of stainless steel, and air-tightly closes the non-linear portion formed by the second connecting piece 202 side in the width direction by welding (such as laser welding or electron beam welding). It is formed by the opening portion of the through hole. The supply-side internal gas line 27 is similarly formed.

The first connection opening portion 211 is formed at a position corresponding to the internal flushing gas line 25 and the supply-side internal gas line 27 in the machine arrangement direction on the surface of the first connection piece 201 (the surface opposite to the lower surface 20b). The first connection opening portion 211 is provided to be opened in a direction from the lower side surface 20b side toward the upper side surface 20a side (that is, toward the upper side in FIG. 6).

In addition, the first connection opening portion 211 corresponding to the internal flushing gas line 25 is shown as "211a" in the drawing, and may be referred to as "first connection opening portion 211a" in the following description. Similarly, corresponding to the inside of the supply side The first connection opening portion 211 of the gas line 27 is shown as "211b" in the drawing, and may be referred to as "first connection opening portion 211b" in the following description. In the following description, the "first connection opening portion 211a" and the "first connection opening portion 211b" may be collectively referred to as the "first connection opening portion 211".

The first connection opening portion 211 a is connected to one end portion (the end portion on the side of the first connection piece 201) in the width direction of the internal flushing gas line 25 via the first connection path 212. That is, the internal purge gas line 25 is formed as a non-through hole in the width direction. Further, the first connection path 212 is an internal gas passage of the flow path block 20 and is formed to connect one of the aforementioned one end portions of the internal flushing gas line 25 and the first connection opening portion 211 a.

In the present embodiment, the first connection path 212 is formed in a substantially U-shape as viewed from the side cross section similarly to the above-mentioned connection flow path 21 and the like. Specifically, the first connection path 212 includes a straight pipe portion 213, a straight pipe portion 214, and a connection passage portion 215. The straight pipe portion 213 is a gas passage having a substantially cylindrical shape formed from the first connection opening portion 211 a toward the lower surface 20 b side, and is connected to one end portion of the connection passage portion 215. The straight pipe portion 214 is a gas passage having a substantially cylindrical shape formed from one of the above-mentioned one end portions of the internal flushing gas line 25 toward the lower surface 20 b side, and is connected to the other end portion of the connection passage portion 215. The connection path portion 215 is formed by a cover portion 216 in a flat plate shape (oblong shape in plan view) made of stainless steel, and is formed to be airtightly sealed from the lower surface 20b side by welding (such as laser welding or electron beam welding). The space formed by the trench is formed along the width direction.

In this embodiment, the connection configuration between the first connection opening portion 211b and the supply-side internal gas line 27 is the same as the first connection opening portion described above. The connection between 211a and the internal flushing gas line 25 is the same. Therefore, the first connection opening portion 211 b is connected to one end portion (the end portion on the first connection piece 201 side) in the width direction of the supply-side internal gas line 27 via the first connection path 212. That is, the supply-side internal gas line 27 is formed as a non-through hole in the width direction. The first connection path 212 connecting the first connection opening portion 211b and the supply-side internal gas line 27 is formed in the same manner as described above.

As shown in FIG. 5 and FIG. 7, connecting bolt screwing holes 217 are respectively provided on both sides of the first connection opening portion 211. The connecting bolt screwing hole 217 is a screw hole (through-hole) provided along the thickness direction of the first connecting piece 201, and is formed so as to be able to screw (bolt) the connecting bolt B. In this embodiment, a pair of connecting bolt screwing holes 217 are aligned along the machine arrangement direction. In other words, the pair of connecting bolt screwing holes 217 are provided to be slightly symmetrical around the first connection opening portion 211.

A second connection opening 221 is formed on the bottom surface of the second connection piece 202 (the surface opposite to the upper surface 20a) corresponding to the internal flushing gas line 25 and the supply-side internal gas line 27 in the machine arrangement direction. . The second connection opening portion 221 is provided to open in a direction in which the upper side surface 20a side faces the lower side surface 20b side (that is, toward the lower side in FIG. 6).

The second connection opening 221 corresponding to the internal flushing gas line 25 is shown as "221a" in the drawing and may be referred to as "second connection opening 221a" in the following description. Similarly, the second connection opening portion 221 corresponding to the supply-side internal gas line 27 is shown as "221b" in the figure and may be referred to as "second connection opening portion 221b" in the following description. In the following description, the "second connection opening portion 221a" and the "second connection opening portion 221b" may be collectively referred to as the "second connection opening portion 221".

The second connection opening portion 221 a is connected to a position near the other end portion in the width direction of the internal flushing gas line 25 via the second connection path 222. In addition, the second connection path 222 is a gas passage formed inside the flow path block 20 to connect the other end portion in the internal flushing gas line 25 described above to the second connection opening portion 221a. Specifically, in this embodiment, the second connection path 222 is a gas passage having a substantially cylindrical shape, and the second connection opening 221 a is formed toward the internal flushing gas line 25 (that is, toward the upper surface 20 a side).

In this embodiment, the connection configuration between the second connection opening portion 221b and the supply-side internal gas line 27 is the same as the connection configuration between the second connection opening portion 221a and the internal flushing gas line 25. Therefore, the second connection opening portion 221 b is connected to the other end portion (the end portion on the second connection piece 202 side) in the width direction of the supply-side internal gas line 27 via the second connection path 222. The second connection path 222 for connecting the second connection opening portion 221b and the supply-side internal gas line 27 is formed in the same manner as described above.

As shown in FIGS. 5 and 7, connecting bolt insertion holes 227 are provided on both sides of the second connection opening portion 221. The connection bolt insertion hole 227 is a through-hole provided along the thickness direction of the second connection piece 202, and the connection bolt B described above is formed to be insertable. Specifically, the connecting bolt insertion hole 227 is formed so that its inner diameter is slightly larger than the outer diameter of the connecting bolt B. In this embodiment, a pair of connecting bolt insertion holes 227 are aligned along the machine arrangement direction. That is, the pair of connection bolt insertion holes 227 are provided to be slightly symmetrical around the second connection opening portion 221.

In this embodiment, the first connection piece 201 and the second connection piece 202 are formed such that the first connection opening portion 211 and the second connection opening portion 221 are arranged in a machine. It is the same position in the column direction. In other words, the first connection opening portion 211 and the second connection opening portion 221 are provided so that the two flow path blocks 20 are arranged in the machine arrangement direction slightly adjacent to each other in the width direction, and one of the first connection pieces 201 and another In a state where a second connection piece 202 is overlapped, in a plan view, the first connection opening portion 211a and the second connection opening portion 221a will face each other, and the first connection opening portion 211b and the second connection opening portion 221b will face each other. Facing each other. Similarly, the connection bolt insertion hole 227 is provided so as to surround the connection bolt screwing hole 217 in a plan view in the state described above.

In addition, in this embodiment, the first connection opening portion 211 and the second connection opening portion 221 are respectively provided with drop portions that can accommodate a sealing member when the two are opposed to each other and are hermetically joined. In this way, the first connection piece 201 and the second connection piece 202 are configured such that the first connection opening portion 211 and the second connection opening portion 221 overlap with each other in the thickness direction, and the interior of the adjacent flow path block 20 is flushed. The gas lines 25 and the supply-side internal gas lines 27 are connected to each other.

<Functions and Effects of the Structure of the Embodiment>

The configuration of this embodiment as described above includes the fluid control valve 17, the fluid control valve 18, the flow controller 16, and the fluid control valve 19 arranged in the machine arrangement direction (these components are installed in the flow path block 20 and The gas supply units 10A to 10D are connected to the flow channel block 20 while being arranged in the width direction. Then, the gas supply units 10A to 10D are connected to receive gas by an internal flushing gas line 25 and a supply-side internal gas line 27 provided inside the flow path block 20. The same applies to the gas supply units 10E to 10H.

Here, in the aforementioned configuration, the flow path blocks 20 provided with the gas supply units 10A to 10D and the flow path blocks 20 provided with the gas supply units 10E to 10H are arranged adjacent to each other in the width direction. Then, in the gas supply units 10A to 10H, the respective flow controllers 16 are arranged at substantially the same position in the gas flow direction, that is, the machine arrangement direction (the same applies to the fluid control valves 17 to 19).

In this state, the two adjacent flow path blocks 20 are joined (connected) to each other by the first connection piece 201 and the second connection piece 202. Thereby, the internal flushing gas line 25 and the supply-side internal gas line 27 of the two are connected to receive gas.

Specifically, the first connection piece 201 and the second connection piece 202 overlap in the thickness direction so that the first connection opening portion 211 in the first flow path block 20 and the second connection opening portion 221 in the other flow path block 20 hold the above. The sealing members face each other. The connection bolt B is inserted into the connection bolt insertion hole 227 and is screwed into the connection bolt screwing hole 217. Thereby, the flow block 20 provided with the gas supply units 10A to 10D and the flow block 20 provided with the gas supply units 10E to 10H can be connected (combined).

In this way, according to the structure of the embodiment described above, the plurality of flow path blocks 20 are arranged next to each other in parallel, and the two are connected by the first connection piece 201 and the second connection piece 202, thereby correspondingly responding to the process. The increase in the type of gas requires a large number of gas supply units 10A and the like to be arranged in parallel. Therefore, according to the above-mentioned configuration, the gas supply device 10 can maintain good maintainability and can be miniaturized or centralized well.

Specifically, according to the configuration of this embodiment as described above, The piping length of the entire gas supply device 10 is minimized. In the configuration of this embodiment, the first connection opening portion 211 and the second connection opening portion 221 may be provided at the same position in the machine arrangement direction. Therefore, according to the foregoing configuration, the size of the entire gas supply device 10 in the machine arrangement direction can be further reduced compared to the conventional one.

In addition, in the configuration of this embodiment, the inflow-side flange 30 can be detachably attached to the flow path block 20 by a pair of female screw portions 28a. Similarly, the fluid control valves 17 and 18 are detachably attached to the flow path block 20 by a pair of female screw portions 28b. The flow controller 16 is detachably attached to the flow path block 20 by a pair of female screw portions 28c. Further, the fluid control valve 19 is detachably attached to the flow path block 20 by a pair of female screw portions 28d.

Then, the inflow-side flange 30 and the fluid control valves 17 and 18 are connected by a connection flow path 21. Similarly, the fluid control valves 17 and 18 and the flow controller 16 are connected by a connection flow path 22. Furthermore, the flow controller 16 and the fluid control valve 19 are connected by a connection flow path 23. Further, the connection flow paths 21 to 23 and the female screw portions 28 a to 28 d are arranged on substantially the same straight line, and are formed so as to bypass these in the depth direction.

Therefore, according to the above configuration, even if the widths of the inflow-side flange 30, the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are set to a minimum (specifically, the widths of the flow controller 16 and the fluid control valve The widths of the actuators 17a to 19a are slightly the same.) The flow controller 16 and the fluid control valves 17 to 19 can also be freely attached to and detached from the flow path block 20. In other words, these components can be freely attached and detached to and from the flow path block 20 without having to use each four mounting bolts to be made slightly rectangular in plan view. Therefore, according to the foregoing configuration As a result, the width of each gas supply unit 10A and the like or the width of the entire gas supply device 10 can be reduced as much as possible. Therefore, in the gas supply device 10, good maintainability can be maintained and further downsizing can be achieved.

In the configuration of this embodiment, the inflow-side flange 30, the flow controller 16, and the fluid control valves 17 to 19 are concentrated on the upper surface 20a side of the flow path block 20. Therefore, according to the above-mentioned configuration, the inflow-side flange 30, the flow controller 16, and the fluid control valves 17 to 19 are collectively installed on the upper surface 20a side. 17 ~ 19, the gas supply unit 10A, etc., or the gas supply device 10 can be kept as small as possible during maintenance (tightening or loosening of the mounting bolt 41, etc.) because it can be performed from the upper surface 20a side. The width is achieved without compromising good maintainability.

In particular, as the number of process gases increases and the plurality of gas supply units 10A and the like are centralized, the increase in the size of the flow path block 20 becomes a major problem. That is, an increase in the size of the flow path block 20 is accompanied by an increase in the weight and installation area of the gas supply device 10. Therefore, in the enlarged flow path block 20 and the gas supply device 10, the degree of freedom in installation is very narrow.

At this point, miniaturization of the flow path block 20 can be achieved by the structure described above, thereby increasing the degree of freedom in setting the gas supply device 10, and thereby achieving a high-performance semiconductor process. Specifically, for example, the gas supply device 10 may be disposed near the process processing chamber. At this time, the piping length of the process gas supply line 13 can be shortened as much as possible. Therefore, the supply of process gas can be performed with high frequency and high accuracy (high responsiveness and controllability). In addition, by reducing the switching time of the process gas, productivity is improved.

In addition, in the configuration of this embodiment, assembly, storage, and transportation can be performed for each flow path block 20. In addition, various requirements for the number of groups of the gas supply unit 10A and the like can be achieved by the number of installation of the convection block 20 such as the gas supply unit 10A or the parallel connection between the plurality of flow block 20 Ground correspondence. Therefore, according to this embodiment, it is possible to improve the ease of handling at the time of manufacturing the gas supply device 10 and to reduce the number of parts.

<Modifications>

Hereinafter, a few representative modifications will be exemplified. In the description of the following modification examples, portions having the same configuration and function as those described in the above-mentioned embodiment are denoted by the same reference numerals as those in the above-mentioned embodiment. In addition, the description of the relevant part is within the scope not technically contradictory, and the description in the above-mentioned embodiment can be appropriately referred to. It should be understood that the modifications are not limited to those listed below. In addition, all and a part of the plurality of modified examples may be appropriately combined and applied within a range that is not technically contradictory.

The "upper surface 20a" is a name given to facilitate the description of each embodiment, and is not necessarily limited to the surface on the upper side in the vertical direction. That is, depending on the installation state of the gas supply device 10, the upper surface 20a may be set such that its normal line faces downward in the horizontal direction or the vertical direction.

The fluid control valve 17 and the fluid control valve 18 are installed in a common valve mounting block 40 in advance, but the present invention is not limited to this aspect. That is, the fluid control valve 17 and the fluid control valve 18 can be independently and independently attached to the flow path block 20 like the fluid control valve 19.

The number of the fluid control valves 17 and the like included in one gas supply unit 10A and the like is not limited to the embodiment described above. The fluid control valve 17 It is also possible to integrate the flow block 20 in advance without using a female screw portion or a bolt.

A part of the fluid control valve 17 and the like can also be installed in the flow path block 20 in advance, and the remaining part can be freely attached to and detached from the flow path block 20. The fluid control valve 17 and the like may be the "pneumatic valve" as described above, but may be a solenoid valve or a piezoelectric valve.

The number of gas supply units 10A and the like that can be installed in parallel in one flow path block 20 is not limited to four. That is, for example, a flow block 20 in which two gas supply units 10A and the like can be installed in parallel, and a flow block 20 in which three gas supply units 10A and the like can be installed in parallel can be prepared. Moreover, the number of parallel flow block 20 is not limited to two. That is, the connection of the three or more flow path blocks 20 is performed in the same manner as in the description of each of the embodiments described above.

8 to 10 show the structure of a modification of the flow path block 20 of the present invention. 8 to 10, in this modification, first connection pieces 201 and 201 'and second connection pieces 202 and 202' are formed in the flow path block 20. In this modification, the first connecting pieces 201, 201 'and the second connecting pieces 202, 202' are formed to have the same thickness as the body portion of the flow path block 20 described above. The first connection opening portion 211a, the first connection opening portion 211b, the second connection opening portion 221a, and the second connection opening portion 221b are all provided so as to open on the upper surface 20a.

The first connection piece 201 is provided so as to protrude in the width direction corresponding to the first connection opening portion 211a. The first connection piece 201 'is provided so as to protrude in the width direction corresponding to the first connection opening portion 211b. The second connection piece 202 is provided so as to protrude in the width direction corresponding to the second connection opening portion 221a. Second connection The piece 202 'protrudes in the width direction corresponding to the second connection opening portion 221b.

The first connecting pieces 201, 201 'and the second connecting pieces 202, 202' are formed so as to have the same amount of protrusion. That is, the first connection piece 201 and 201 'and the second connection piece 202 and 202' are formed such that the first connection piece 201 and the second connection piece 202 are arranged adjacent to each other in the width direction. The first connection piece 201 ′ and the second connection piece 202 ′ are arranged in a straight line and arranged adjacent to each other in the machine arrangement direction in this order (at the same time, the first connection opening portion 211 a, the second connection opening portion 221 a, (A connection opening portion 211b and a second connection opening portion 221b are aligned in a straight line in the machine arrangement direction in this order).

As shown in FIG. 10, the first connection opening portion 211 a is connected to an end portion on the first connection piece 201 side in the width direction of the internal flushing gas line 25 via the first connection path 212. That is, the internal purge gas line 25 is formed with a non-through hole in the width direction. In addition, in this modification, the first connection path 212 is a substantially cylindrical gas passage formed from the first connection opening portion 211a toward the side surface 20b, similar to the straight pipe portion 213 in the first embodiment described above. And it is connected to the edge part of the said 1st connection piece 201 side in the width direction of the internal flushing gas line 25.

Further, the second connection opening portion 221a is connected to a position near the end portion of the second connection piece 202 side in the width direction of the internal flushing gas line 25 via the second connection path 222. The second connection path 222 is a gas path formed inside the flow path block 20 to connect the end portion on the second connection piece 202 side in the internal flushing gas line 25 to the second connection opening portion 221a. Specifically, the second connecting path 222 is a gas passage having a substantially cylindrical shape, and The connection opening portion 221a is formed toward the internal flushing gas line 25 (that is, toward the lower surface 20b side).

On both sides of the first connection opening portion 211, a connection bolt screwing hole 230 is provided in the same manner as the connection bolt screwing hole 217 (see FIG. 5) in the first embodiment described above. In addition, in this modification, connecting bolt screwing holes 230 are also provided on both sides of the second connection opening portion 221a. Further, the flow path block 20 is configured to be installed in a state where the first connection piece 201, the second connection piece 202, the first connection piece 201 ', and the second connection piece 202' are adjacently arranged in the machine arrangement direction as described above. The shunt pipe 290 connects between the internal flushing gas lines 25 and the supply-side internal gas lines 27 in the adjacent flow path blocks 20.

Specifically, the branch pipe 290 includes a flange portion 291 and a connection pipe portion 292. The flange portion 291 is configured in the same manner as the flange portion 31 (see FIG. 2 and the like) in the inflow-side flange 30 described above. In addition, the flange portion 291 is arranged to face the first connection opening portion 211 or the second connection opening portion 221, and the connection bolt B is screwed to the connection bolt screwing hole 230, thereby communicating with the flow path block. 20 airtight joints. The connection pipe portion 292 is formed in a reverse U shape in front view to connect the two flange portions 291.

In the configuration of this modified example, the shunt piping 290 is installed so as to span the first connection piece 201 and the second connection piece 202 in a state where the first connection piece 201 and the second connection piece 202 are arranged adjacent to each other in the machine arrangement direction. Thereby, the internal flushing gas lines 25 in the flow path blocks 20 adjacent to each other are connected to each other. Similarly, the shunt piping 290 is installed so as to cross the first connection piece 201 'and the second connection piece 202' in a state where the first connection piece 201 'and the second connection piece 202' are arranged adjacent to each other. The connecting piece 201 'and the second connecting piece 202'. Thereby, the supply-side internal gas lines 27 in the adjacently arranged flow path blocks 20 are connected to each other.

Here, as shown in FIG. 8, in a state where the two flow path blocks 20 are arranged adjacent to each other, the second connection piece 202 is accommodated in a space between the first connection piece 201 and the first connection piece 201 '. Similarly, the first connection piece 201 'is accommodated in the space between the second connection piece 202 and the second connection piece 202'. Therefore, according to this configuration, if a large number of gas supply units 10A and the like are provided in parallel as the type of process gas increases, the size in the width direction of the entire gas supply device 10 can be suppressed as much as possible.

The first connection pieces 201 and 201 'and the second connection pieces 202 and 202' may be formed in a tongue shape (cantilever shape) only near the first connection opening portion 211 or the second connection opening portion 221. In particular, in this embodiment, the size of the first connection piece 201 corresponding to the first connection opening portion 211a and the first connection piece 201 'corresponding to the first connection opening portion 211b in the machine arrangement direction are also necessary. The narrowest range is formed (specifically, the connection bolt screwing hole 230 is as narrow as possible within a range that can be well formed on both sides of the first connection opening portion 211a). The same applies to the second connection piece 202 corresponding to the second connection opening portion 221a.

<Modified Example of Schematic Configuration of Fluid Supply Control Device>

Next, a description will be given of a related configuration of another example (other embodiment) of the present invention. In the following description of other examples, parts having the same configuration and function as those described in the above-mentioned embodiment are given the same reference numerals as those in the above-mentioned embodiment. In addition, as far as the description of the relevant parts is concerned, to the extent not technically contradictory, the drawings in the above-mentioned embodiment can be appropriately used. Formula or description.

11 to FIG. 14, in this embodiment, the flow controller 16 is detachably mounted on the upper side surface 20 a side of the flow path block 20. On the other hand, the fluid control valves 17 to 19 and the inflow-side flange 30 are detachably mounted on the lower surface 20b side opposite to the upper surface 20a. The fluid control valve 18, the fluid control valve 17, the inflow-side flange 30, and the fluid control valve 19 are arranged in this order in the machine arrangement direction (direction parallel to the connection path 21e in the connection flow path 21). Therefore, the flow path configuration inside the flow path block 20 is changed from the above-mentioned embodiment.

Except for the above, the flow controller 16, the fluid control valves 17 to 19, and the inflow-side flange 30 are provided in the flow path block 20 in the same manner as the embodiment described above. That is, the configurations of the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are substantially the same as those of the above-described embodiment.

The configuration of the flow path block 20 in this embodiment will be described. Unlike the above-mentioned embodiment, the connection flow path 21 is provided so that the inlet port 21a and the outlet port 21b are opened on the lower surface 20b side. In addition, the connection flow path 21 is provided between the connection flow path 22 and the connection flow path 23 in the machine arrangement direction. Specifically, the inlet port 21a in the connection flow path 21 is provided at a slightly central portion of the flow block 20 in terms of the arrangement direction of the devices. Except for this, the connection flow path 21 is formed in a substantially U-shape similar to the embodiment described above.

The inlet port 22a in the connection flow path 22 is provided so as to open on the extension line of the directional line segment drawn from the inlet port 21a to the outlet port 21b in the connection flow path 21 toward the lower side surface 20b. On the other hand, the outlet port 22b is provided so as to open toward the upper surface 20a side. Further, the connection flow path 22 is formed to connect the inlet port 22a and the outlet port 22b are connected in a straight line. Specifically, in the present embodiment, the outlet port 22b is arranged at a position which is slightly coincident with the inlet port 22a in a plan view. That is, the connection flow path 22 is provided parallel to the thickness direction of the flow path block 20.

The outlet port 23b in the connection flow path 23 is provided so as to open on the extension line of the directional line segment drawn from the outlet port 21b toward the inlet port 21a in the connection flow path 21 toward the lower side surface 20b. On the other hand, the inlet port 23a is provided to open toward the upper surface 20a side. The connection flow path 23 is formed so as to connect the inlet port 23a and the outlet port 23b. Connected in a straight line. Specifically, in this embodiment, the exit port 23b is disposed at a position that is slightly coincident with the entry port 23a in a plan view. That is, the connection flow path 23 is provided parallel to the thickness direction of the flow path block 20.

The flushing gas supply port 24 is provided so as to open toward the lower surface 20b side on an extension line of the directional line drawn from the outlet port 21b of the connection flow path 21 to the inlet port 22a of the connection flow path 22. Specifically, the flushing gas supply port 24 is arranged near one end portion in the machine arrangement direction of the flow path block 20. The purge gas supply port 24 is connected to the internal purge gas line 25 in the same manner as in the above embodiment.

In addition, the process gas supply port 26 is provided so as to open toward the lower surface 20b side on an extension line of the directional line drawn from the inlet port 21a of the connection flow path 21 to the outlet port 23b of the connection flow path 23. Specifically, the process gas supply port 26 is arranged near the other end portion in the machine arrangement direction of the flow path block 20 to be close to (adjacent to) the outlet port 23 b connected to the flow path 23. This process gas supply port 26 is connected to the supply-side internal gas in the same manner as the above-mentioned embodiment. 体 线 27。 Body line 27.

Further, in this embodiment, the flushing gas supply port 24, the connection flow path 22, the outlet port 21b of the connection flow path 21, the same inlet port 21a, the connection flow path 23, and the process gas supply port 26 are arranged along the machine in this order. The directions are aligned slightly straight.

In this embodiment, the connection flow paths 21 to 23 are also formed so as to bypass the female screw portions 28a to 28d. Specifically, the pair of female screw portions 28c are non-penetrating screw holes opened in the upper side surface 20a of the flow path block 20, and are provided on the outside of the connection flow paths 21 to 23 in terms of the machine arrangement direction. In addition, one of the pair of female screw portions 28 c is disposed on the side of the connection flow path 22 so as not to communicate with the internal flushing gas line 25. Similarly, it is the other one of a pair of female screw parts 28c and it is arrange | positioned on the connection flow path 23 side, and it is provided so that it may not communicate with the supply side internal gas line 27.

The female screw portions 28 a, 28 b, and 28 d are non-penetrating screw holes, and are formed to open in the lower side surface 20 b in the flow path block 20. One of the pair of female screw portions 28a and one of the pair of female screw portions 28b are provided at a position between the inlet port 21a and the outlet port 21b in the connection flow path 21 so as to be in a non-connectable connection path 21e. The other of the pair of female screw portions 28 a and one of the pair of female screw portions 28 d are provided in a region where the internal flow path is not formed between the inlet port 21 a in the connection flow path 21 and the connection flow path 23. The other of the pair of female screw portions 28 b and the other of the pair of female screw portions 28 d are provided in areas where internal flow paths are not formed at both end portions in the machine arrangement direction.

As described above, in the configuration of the present embodiment, the flow controller 16 is detachably mounted on the upper side surface 20 a of one of the surfaces of the flow path block 20. side. On the other hand, the fluid control valves 17 to 19 are detachably provided on the lower side surface 20b side opposite to the upper side surface 20a. Therefore, according to this configuration, it is possible to realize that the flow controller 16 and the fluid control valves 17 to 19 are excellent in maintainability, and the gas supply unit 10A or the like or the gas supply device 10 can be realized with a width as small as possible and a length in the machine arrangement direction.

In addition, referring to FIG. 12 and FIG. 14, in the embodiment, the process gas supplied to the inlet port 21a in the connection flow path 21 flows from the right to the left in the connection flow path 21 and the valve installation block 40, and the other On the other hand, the flow controller 16 and the valve installation block 60 flow from left to right in the figure. Therefore, in the embodiment, the "gas flow direction" is not a one-way direction, but a state of reciprocating (or a "loop") along the machine arrangement direction.

<Modified Example of Schematic Configuration of Fluid Supply Control Device>

15 to 18, the configuration of the embodiment is an addition and change to the above embodiment. Specifically, in the present embodiment, the inflow-side flange 30 is attached to the end surface 20 c of the flow path block 20. Here, the end surface 20c is one surface of the flow path block 20, and is a surface orthogonal to the upper surface 20a and the lower surface 20b. The end surface 20c is provided on one end side in the machine arrangement direction of the flow path block 20.

Therefore, in this embodiment, the positional relationship between the fluid control valve 17 and the fluid control valve 18 in the machine arrangement direction is opposite to that of the above embodiment. That is, the fluid control valve 17 is disposed closer to the end surface 20 c than the fluid control valve 18. Furthermore, due to the above-mentioned changes, the flow path structure inside the flow path block 20 has been changed from the above-mentioned embodiment.

The inlet port 21a in the connection flow path 21 is provided to open at the end face 20c. mouth. On the other hand, the exit port 21b is provided so as to open at a position closer to the end face 20c side (specifically, a position closer to the one end in the machine arrangement direction) than the central portion in the machine arrangement direction of the lower surface 20b. Further, as shown in FIGS. 16 and 18, the connection flow path 21 is formed in a shape (slightly L-shaped) bent at a right angle to connect the inlet port 21 a and the outlet port 21 b.

The flushing gas supply port 24 is provided to be opened near the center in the machine arrangement direction of the lower surface 20b. The purge gas supply port 24 is connected to the internal purge gas line 25 in the same manner as the first and the embodiments described above.

The inlet port 22a in the connection flow path 22 is provided between the outlet port 21b and the flushing gas supply port 24 in the connection flow path 21, and opens in the lower surface 20b. On the other hand, the outlet port 22b is provided so as to open in the machine arrangement direction of the upper surface 20a closer to the end surface 20c side than the central portion. Specifically, the outlet port 22 b is arranged at a position slightly coincident with the outlet port 21 b in the connection flow path 21 in plan view. The connection flow path 22 is formed to connect the inlet port 22a and the outlet port 22b in a straight line. More specifically, in the present embodiment, the connection flow path 22 is obliquely arranged in a direction oblique to the thickness direction of the flow path block 20 when viewed from the front.

The connection flow path 23 is provided at the position close to the other end in the machine arrangement direction of the flow path block 20 in the same manner as the embodiment described above. That is, the inlet port 23a in the connection flow path 23 is provided near the end portion on the side opposite to the end surface 20c in the machine arrangement direction, and is opened on the upper surface 20a side. On the other hand, the outlet port 23b is provided on the extension of the directed line drawn from the outlet port 21b in the connection flow path 21 to the inlet port 22a and the flushing gas supply port 24 in the connection flow path 22 on the lower side. The surface 20b is open on the side. in particular, The exit port 23b is provided in the same position as the above-mentioned embodiment, and is opened at a position slightly coincident with the entry port 23a in a plan view, and is opened on the lower surface 20b side. The connection flow path 23 is formed to connect the inlet port 23a and the outlet port 23b in a straight line.

The process gas supply port 26 is provided at a position between the flushing gas supply port 24 and the outlet port 23 b in the connection flow path 23, and opens on the lower surface 20 b side. Specifically, the process gas supply port 26 is arranged close to (adjacent to) the outlet port 23 b in the connection flow path 23. This process gas supply port 26 is connected to the supply-side internal gas line 27 in the same manner as the above-mentioned embodiment.

The pair of female screw portions 28 a are formed as non-through holes that are not communicated with the connection channels 21 and 22 and are opened on the end surface 20 c side. The female screw portions 28 b and 28 d are non-penetrating screw holes, and are formed to open in the lower side surface 20 b in the flow path block 20.

One of the pair of female screw portions 28 b is formed so as to be not connected to the connection flow path 21 in the connection flow path 21 closer to the end surface 20 c side than the outlet port 21 b. The other of the pair of female screw portions 28 b and one of the pair of female screw portions 28 d are provided in the flushing gas supply port 24 and the internal flushing gas line 25, and the process gas supply port 26 and the supply-side internal gas line 27. There is no area where an internal flow path is formed.

A pair of female screw portions 28c are non-penetrating screw holes opened in the upper side surface 20a of the flow path block 20, and are provided at the outlet port 22b in the connection flow path 22 and the inlet port in the connection flow path 23 in the machine arrangement direction. 23a outside. Specifically, one of the pair of female screw portions 28c is formed closer to the end surface 20c side than the outlet port 22b in the connection flow path 22 and is not connected to the connection flow path. twenty one. The other of the pair of female screw portions 28c is provided in a region where an internal flow path is not formed at the end portion on the side opposite to the end surface 20c in the machine arrangement direction, like the other of the pair of female screw portions 28d.

As described above, in the embodiment, a pair of female screw portions 28c, an outlet port 22b in the connection flow path 22, and an inlet port 23a in the connection flow path 23 are arranged along the machine arrangement direction on the upper side surface 20a side of the flow path block 20. Into a slightly straight line. On the side of the lower side surface 20b in the flow path block 20, female screw portions 28b and 28d, an outlet port 21b in the connection flow path 21, an inlet port 22a in the connection flow path 22, a flushing gas supply port 24, and a process gas The supply port 26 and the outlet port 23b in the connection flow path 23 are arranged in a substantially straight line along the machine arrangement direction.

That is, also in this embodiment, the connection flow paths 21 to 23 and the female screw portions 28a to 28d are arranged in a substantially straight line along the machine arrangement direction. The connection flow paths 21 to 23 are provided so as to bypass the female screw portions 28 a to 28 d.

According to the configuration of the present embodiment, the inflow-side flange 30 is provided on the end face 20c of the flow path block 20, so that the size of the flow path block 20 in the machine arrangement direction is compared with the configuration of the above-mentioned embodiment. miniaturization.

As shown in FIG. 19, the fluid control valve 17 and the like may be provided on an end surface (a surface different from the upper surface 20 a and the lower surface 20 b) in the flow path block 20.

When the gas supply device 10 is provided with a plurality of gas supply units 10A, 10B ..., the present invention is not limited to the above-mentioned embodiments, and is not limited to one flow path block 20 across the plurality of gas supply units 10A, 10B ... It is a common (integrated) structure. That is, the flow path block 20 may be configured to be divided corresponding to each of the plurality of gas supply units 10A, 10B,....

The number of fluid control valves 17 and the like included in one gas supply unit 10A and the like is not limited to the above-described embodiment. The fluid control valve 17 and the like may be integrated with the flow path block 20 in advance without using a female screw portion or a bolt.

20 to 22 show configurations corresponding to these modifications. In this modified example shown in FIGS. 20 to 22, the gas supply units 10A, 10B,... Are configured as individual units, and are configured to be connected to each other in the width direction. Although only two gas supply units 10A and 10B are shown in FIG. 20 for simplicity of illustration, an arbitrary number of gas supply units 10A and the like can be connected in this modification.

In each of the gas supply units 10A and the like of this modification, similar to the above-mentioned embodiments, the flow controller 16 is detachably mounted on the upper side surface 20 a of the flow path block 20. On the other hand, the fluid control valve 17 and the like are not integrated with the flow path block 20 in advance by the mounting bolts as described above. That is, the convection channel block 20 such as the fluid control valve actuator 17a is directly fixed. In this modification, the fluid control valve 17 and the like are provided on the lower side surface 20b side of the flow path block 20 (however, in FIG. 20, the lower side surface 20b side is shown as the upper side in the figure.).

Here, in the plurality of gas supply units 10A, 10B, ... arranged in parallel, the connection between adjacent units is through the side surface (surface having a normal line parallel to the width direction) in the adjacent flow path block 20 The connecting surface 20d is formed. Hereinafter, details of the configuration for connecting the adjacent flow path blocks 20 will be described. The structure for connecting the above-mentioned connected bodies will be described later.

In the gas supply device 10 of this modification, two types of flow path blocks 20 are provided, that is, a first flow path block 201A and a second flow path block 202A. In the connected body of the plurality of gas supply units 10A, 10B, ... arranged in parallel, the first flow path block 201A and the second flow path block 202A are arranged alternately. That is, for example, the first flow path block 201A is provided in the gas supply unit 10A, and the second flow path block 202A is provided in the gas supply unit 10B.

In the first flow path block 201A and the second flow path block 202A, the flushing gas supply port 24 and the process gas supply port 26 are provided so as to open on each of a pair of connection surfaces 20d. The first flow path block 201A and the second flow path block 202A are provided with a connection screw hole 211H and a connection bolt insertion hole 212H. The connection screw hole 211H is a screw hole penetrating in the width direction, and is formed so that the connection bolt B can be screwed. The connecting bolt insertion hole 212H is a through-hole having a section portion capable of accommodating the head of the connecting bolt B, and the male screw portion of the connecting bolt B can be inserted through.

In this modified example, a pair of connection screw holes 211H are provided at diagonal positions of the flushing gas supply port 24. In addition, a pair of connection bolt insertion holes 212H are provided at diagonal positions of the flushing gas supply port 24. In addition, the pair of connection screw holes 211H and the pair of connection bolt insertion holes 212H are arranged to be substantially rectangular when viewed from the front (that is, when viewed parallel to the width direction). Similarly, a pair of connection screw holes 211H and a pair of connection bolt insertion holes 212H are also arranged around the process gas supply port 26 in a substantially rectangular shape when viewed from the front.

In this modification, the positional relationship between the connecting screw holes 211H and the connecting bolt insertion holes 212H of the second flow path block 202A is different from that of the first flow path block 201A, and it has the same configuration as the first flow path block 201A. Specifically, in a front view, the first flow path is formed as follows Block 201A and second flow path block 202A: The position of the first flow path block 201A provided with a connection screw hole 211H is the same as the position of the second flow path block 202A provided with a connection bolt insertion hole 212H, and the first flow path block The position where the connection bolt insertion hole 212H is provided in 201A is consistent with the position where the connection screw hole 211H is provided in the second flow path block 202A. Therefore, in the following, referring to Figs. 21 and 22 of the perspective view of the first flow path block 201A, the detailed configuration of the first flow path block 201A and the second flow path block 202A will be described.

The flushing gas supply port 24 in the connection surface 20d of the first flow path block 201A (the second flow path block 202A) is further inside than the connection screw hole 211H and the connection bolt insertion hole 212H (the flushing gas supply port). 24 side) is provided with a flushing line sealing section 213A. The rinsing line sealing section 213A is formed as a sealing member (not shown) that can be installed to hermetically connect the adjacent second flow path block 202A (first flow path block 201A) and the flushing gas supply port 24.

Similarly, the periphery of the process gas supply port 26 in the connection surface 20d of the first flow path block 201A (the second flow path block 202A) is further inside than the connection screw hole 211H and the connection bolt insertion hole 212H (process gas Supply port 26 side) is provided with a supply line sealing section 214A. The supply line sealing section 214A forms a sealing member (not shown) that can be installed to hermetically connect the adjacent second flow path block 202A (first flow path block 201A) and the process gas supply port 26.

The first flow path block 201A and the second flow path block 202A are provided with actuator mounting holes 215A, 216A, and 217A that are substantially cylindrical non-through holes that are opened on the lower surface 20b. In this modification, the actuator mounting hole 215A, 216A, and 217A are arranged in a straight line along the machine arrangement direction in this order. That is, the actuator mounting hole 215A is provided at a position close to one (left side in FIG. 21) of the first flow path block 201A and the second flow path block 202A in the machine arrangement direction. On the other hand, the actuator mounting hole 217A is provided near the other (right side in FIG. 21) end portion in the machine arrangement direction of the first flow path block 201A and the second flow path block 202A.

The actuator mounting holes 215A, 216A, and 217A are formed to fix the fluid control valve actuators 18a, 17a, and 19a, respectively. The actuator mounting holes 215A, 216A, and 217A are provided at the ends in the depth direction to form the valve chambers of the fluid control valves 18, 17, and 19 after the fluid control valve actuators 18a, 17a, and 19a are installed.

Hereinafter, the internal flow path configuration in the first flow path block 201A and the second flow path block 202A will be described. In this embodiment, the inlet port 23a in the connection flow path 23 is provided at a position overlapping the actuator mounting hole 217A in a plan view (more specifically, a position coaxial with the central axis of the actuator mounting hole 217A). ) To open in the upper surface 20a. The outlet port 23b in the connection flow path 23 is provided so as to open at a slightly central portion in a plan view of the actuator mounting hole 217A. The connection flow path 23 is formed as a substantially cylindrical through hole from the inlet port 23a to the outlet port 23b. That is, the connection flow path 23 is formed so that the gas flowing in from the inlet port 23 a through the flow controller 16 is discharged to the process gas supply port 26 through the actuator mounting hole 217A (fluid control valve 19).

The first flow path block 201A and the second flow path block 202A are provided with a connection flow path 223 for connecting the inflow-side flange 30 and the fluid control valve 17 (actuator mounting hole 216A). The connection flow path 223 has an inlet port 223a, The port 223b, the first entrance passage 223c, the second entrance passage 223d, and the connection passage 223e.

The inlet port 223a is provided at an intermediate position of a pair of female screw portions 28a for detachably mounting one of the inflow-side flanges 30 so as to open toward the lower side surface 20b side. The outlet port 223b is provided so as to open in the actuator mounting hole 216A. The first inlet passage 223c is a substantially cylindrical non-through hole, and is provided to extend from the inlet port 223a toward the upper surface 20a side. The second inlet passage 223d is provided to extend in the width direction from an end portion on the side opposite to the inlet port 223a in the first inlet passage 223c.

The connection path 223e is a flat plate (not shown in plan view) formed by stainless steel, and a cover portion (not shown) is hermetically closed from the second entrance by welding (such as laser welding or electron beam welding). The space formed by the groove formed on the connection surface 20d side of the extending object of the passage 223d is provided in parallel with the gas flow direction. One end portion of the connection path 223e is connected to the second inlet passage 223d. The other end of the connection path 223e is connected to the exit port 223b.

Further, the first flow path block 201A and the second flow path block 202A are provided with a connection flow path 222A for connecting the fluid control valves 17 and 18 (actuator mounting holes 216A and 215A) and the flow controller 16. In this embodiment, the connection flow path 222A includes an inlet port 222a, an outlet port 222b, a first inlet path 222c, a second inlet path 222d, a connection path 222e, an outlet path 222g, and a merge path 222h.

The inlet port 222a is provided to be opened at a substantially central portion of the actuator mounting hole 216A in a plan view. The exit port 222b is opened at the upper surface 20a. It is arranged at a position overlapping the actuator mounting hole 215A in plan view (more specifically, a position coaxial with the central axis of the actuator mounting hole 215A). In addition, one of the pair of female screw portions 28c is provided closer to the outer side in the machine arrangement direction than the outlet port 222b so as to open on the upper surface 20a side. The other of the pair of female screw portions 28c is provided on the upper surface 20a side, and is provided closer to the outer side in the machine arrangement direction than the inlet port 23a in the connection flow path 23.

The first inlet passage 222c is a non-through hole having a substantially cylindrical shape, and is provided to extend from the inlet port 222a toward the upper surface 20a side. The second inlet passage 222d is provided to extend in the width direction from an end portion on the side opposite to the inlet port 222a of the first inlet passage 222c.

The connection path 222e is a flat cover (not shown in plan view) made of stainless steel, and a cover portion (not shown) is hermetically sealed from the second entrance by welding (such as laser welding or electron beam welding). The space formed by the groove formed on the connection surface 20d side of the extension destination of the passage 222d is provided in parallel with the gas flow direction. One end of the connection path 222e is connected to the second inlet passage 222d. The other end of the connection path 222e is connected to the outlet path 222g.

The outlet passage 222g extends along the width direction and extends from the other end portion of the connection passage 222e to the side opposite to the second inlet passage 222d. This outlet passage 222g is connected to the merge passage 222h. The merging passage 222h is a substantially cylindrical through hole, and is provided to connect the slightly central portion of the actuator mounting hole 215A and the outlet port 222b in a plan view.

In this modification, the connection flow path 222A is formed as follows: The process gas flowing from the outlet port 223b in the flow path 223 into the actuator mounting hole 216A (fluid control valve 17) flows from the inlet port 222a through the first inlet passage 222c, the second inlet passage 222d, the connection passage 222e, and the outlet passage 222g and the confluence path 222h are discharged from the outlet port 222b, whereby the aforementioned process gas can be supplied to the flow controller 16. The connection flow path 222A is formed so that the flushing gas flowing in from the flushing gas supply port 24 can be discharged from the outlet port 222b through the actuator mounting hole 215A (fluid control valve 18) and the merge passage 222h to flush the aforementioned flush The gas is supplied to the flow controller 16.

In this modification, the flushing gas supply port 24, the actuator mounting hole 215A (fluid control valve 18) provided on one of the pair of connection surfaces 20d, and the pair of connection surfaces 20d are connected by connection. The flushing gas flow path of the other flushing gas supply port 24 is equivalent to the internal flushing gas line in the above embodiment. Similarly, by the process gas supply port 26 provided on one of the pair of connection surfaces 20d, the actuator mounting hole 217A (fluid control valve 19), and the other of the pair of connection surfaces 20d, The process gas supply flow path of the process gas supply port 26 forms a supply-side internal gas line corresponding to the embodiment described above.

Furthermore, in this modification, the female screw portions 28a and 28c, the connection flow path 23, the inlet port 223a and the first inlet passage 223c in the connection flow path 223, the inlet port 222a, the outlet port 223b, and the first connection port 223a in the connection flow path 222A. The inlet passage 222c and the connection passage 223e are arranged in a substantially straight line along the gas flow direction in plan view. In addition, the connection flow paths 223 and 222A are provided so that the female screw portions 28a and 28c are not communicated.

In this way, a plurality of gas supply units 10A are arranged in parallel, In the connecting body of 10B ..., the adjacent first flow path block 201A and the second flow path block 202A are joined using the connecting bolt B and the above-mentioned sealing member (not shown), thereby causing the flushing gas supply port 24 to be opposite to the flushing gas supply port 24 Air-tight connections are provided between each other and the process gas supply ports 26 facing each other. Thereby, an internal flushing gas line passing through the plurality of flushing gas supply ports 24 and the plurality of actuator mounting holes 215A (fluid control valve 18) is formed. Similarly, a supply-side internal gas line passing through the plurality of process gas supply ports 26 and the plurality of actuator mounting holes 217A (fluid control valve 19) is formed.

In this configuration, the flow controller 16 is detachably mounted on the flow path block 20 integrally provided with the fluid control valve 17 and the like. Therefore, according to this configuration, it is possible to favorably achieve miniaturization of the gas supply unit 10A or the like or the gas supply device 10 in the height direction of FIG. 20. Further, the gas supply unit 10A or the like or the gas supply device 10 which is easy to assemble and has good maintainability of the flow controller 16 can be realized with a width as small as possible. Further, by providing a plurality of gas supply units 10A, 10B, ... in parallel, the gas supply device 10 capable of supplying a plurality of types of process gases can be realized with a width as small as possible.

In addition, a part of the fluid control valve 17 and the like can be installed in the flow block 20 in advance, and the remaining part can be freely attached to the flow block 20.

According to the configuration described in each of the above embodiments and modifications, as described above, the gas supply device 10 capable of supplying a plurality of types of process gases can be miniaturized as much as possible. In particular, according to the structure described in each of the above-mentioned embodiments and modification examples, a fluid control device (such as a fluid control valve 17 having a body part whose width dimension is designed to be as small as possible) (for example, to reduce the installation area described later as much as possible) Gas supply valve) In element 10A and the like, it is possible to effectively suppress an increase in width due to an installation structure in which the fluid control device is detachably installed in the flow path block 20 or a flow path structure for connecting a plurality of fluid control devices.

<Composition of piping joint and piping connection structure>

23 to 30, piping joints 1 and 1A according to an embodiment of the present invention and a piping connection structure PJ according to an embodiment of the present invention will be described. The piping joint 1 and the piping joint 1A have substantially the same structure. Therefore, first, the configuration of the piping joint 1 will be described in detail using FIGS. 23 to 25. In addition, FIG. 31 shows a conventional piping joint structure 1C as a comparative example.

The piping joint 1 includes a body portion 2. The main body portion 2 is formed in a shape of a substantially cubic shape with a longitudinal direction parallel to the left-right direction in FIGS. 23 to 25. That is, the piping joint 1 has six planar surfaces including a joint surface 2a, a top surface 2b, a first end surface 2c, a second end surface 2d, a first side surface 2e, and a second side surface 2f.

The joint surface 2a (specifically, the bottom surface) is a plane whose normal direction is a height direction perpendicular to both the long side direction and the width direction (upper and lower directions in FIG. 23). This joining surface 2a is a plane provided to join the installation target of the piping joint 1, and is formed in a substantially rectangular shape. The top surface 2b is provided parallel to the joint surface 2a.

The first end surface 2c and the second end surface 2d are end surfaces of the body portion 2 with the longitudinal direction as a normal line, and are provided in parallel with each other. The first side surface 2e and the second side surface 2f are side surfaces of the body portion 2 with the width direction as a normal line, and are provided in parallel with each other.

The bonding surface 2a is formed with a first opening portion 2g and a seal drop portion 2h. That is, the first opening portion 2g is provided so as to open on the joint surface 2a. In this embodiment, the first opening portion 2g is provided at a slightly central portion of the joint surface 2a in the width direction. The sealing gap portion 2h is formed around the first opening portion 2g so as to accommodate a sealing member (not shown). Here, the so-called sealing member is a fluid passage formed in the piping joint 1 and a fluid passage formed in the piping joint 1 when the piping joint 1 is installed (joined and fixed) to the installation object. (Detailed later) Air-tight or liquid-tight connection member. In addition, since the structure of the sealing member is well known, the illustration or more detailed description of the structure is omitted in this specification.

The first bolt insertion hole 2k and the second bolt insertion hole 2m are formed in the body portion 2 along the height direction. In this embodiment, the first bolt insertion hole 2k and the second bolt insertion hole 2m are through holes without a screw portion, and are used for screws (bolts: for example, FIG. 29) when the pipe joint 1 is installed on an installation object. The illustrated bolts B, etc.) are inserted through and are provided so as to open at the joint surface 2a and the top surface 2b.

In the present invention, the first bolt insertion hole 2k corresponding to the "flow-path-side screw insertion hole" is provided closer to the first end surface 2c than the first opening portion 2g. That is, the first bolt insertion hole 2k is provided in a position in the longitudinal direction of the main body portion 2 near the end portion on the side where the second opening portion 2p described later is provided. On the other hand, the second bolt insertion hole 2m is disposed at an end portion on the second end surface 2d side in the longitudinal direction of the main body portion 2. Specifically, the first bolt insertion hole 2k and the second bolt insertion hole 2m are provided in a symmetrical position around the first opening 2g in plan view.

A second opening portion 2p is formed in the first end surface 2c. That is, the second opening The mouth portion 2 p is provided so as to open at an end portion on the first end surface 2 c side in the longitudinal direction of the body portion 2. In this embodiment, the second opening portion 2p is provided at a slightly central portion in the width direction of the main body portion 2 (that is, substantially the same position as the first opening portion 2g in the width direction). In addition, in this embodiment, the second opening portion 2 p is covered by the tube portion 3. The tube portion 3 is a slightly cylindrical member provided to protrude outward from the first end surface 2c toward the normal direction of the first end surface 2c, and its outer diameter is formed to be larger than the width of the main body portion 2 (size in the width direction: The same applies hereinafter).

A fluid passage (typically a gas passage) that communicates the first opening portion 2g and the second opening portion 2p (tube portion 3) is formed inside the main body portion 2. Specifically, a first passage 4 and a second passage 5 are provided inside the body portion 2.

The first passage 4 is provided along the height direction by the first opening portion 2g. In this embodiment, the first passage 4 is formed as a non-through hole. The second passage 5 is provided along the longitudinal direction so as to pass through the second opening portion 2 p and is connected to the first passage 4. Specifically, in the present embodiment, the second passage 5 is provided along the longitudinal direction so as to connect the second passage 5 at a position farther from the joint surface 2a than the first opening 2g in the first passage 4 and the second opening 2p. That is, the second passage 5 is provided so as to connect the end portion on the opposite side to the first opening portion 2g in the first passage 4 and the second opening portion 2p.

The second passage 5 is provided on the side of the first bolt insertion hole 2k (that is, a position that does not interfere with the second bolt insertion hole 2m). In particular, the second passage 5 is formed so as to bypass the first bolt insertion hole 2k. Specifically, in the present embodiment, the second passage 5 includes an opening-side passage 6 and an intermediate passage 7.

The opening-side passage 6 is a non-through hole provided in the longitudinal direction from the second opening portion 2p, and is formed so as not to reach the first bolt insertion hole 2k. The intermediate passage 7 does not communicate with the first bolt insertion hole 2k, passes through the side thereof, and extends along the long side Direction formed. That is, the intermediate passage 7 is provided in the width direction at a position closer to the first side surface 2e in the main body portion 2 than the first bolt insertion hole 2k. Specifically, the intermediate passage 7 is a flat plate-shaped cover (elongated in plan view) made of stainless steel, and the cover portion 7a is hermetically or liquid-tightly sealed by welding (such as laser welding or electron beam welding). A space formed by a groove formed on one side 2e side is provided in parallel with the longitudinal direction.

The intermediate passage 7 is provided so that one end thereof communicates with an end portion on the top surface 2b side of the first passage 4 via a communication portion 8a of an extremely short fluid passage. Similarly, the intermediate passage 7 is provided such that the other end thereof communicates with the end portion on the 2k side of the first bolt insertion hole 6 in the open-side passage 6 via the communication portion 8b of the extremely short fluid passage. In this way, inside the body portion 2, a fluid passage from the second opening portion 2p to the first opening portion 2g will bypass the first bolt insertion hole 2k and be formed in a slightly L shape along the longitudinal direction.

The piping joint 1A has a first bolt insertion hole 9a instead of the first bolt insertion hole 2k, and has a second bolt insertion hole 9b instead of the second bolt insertion hole 2m. The same composition. Therefore, for the description of parts other than the first bolt insertion hole 9a and the second bolt insertion hole 9b in the configuration of the piping joint 1A shown in FIGS. 26 to 28, the description of the piping joint 1 described above is referred to.

The first bolt insertion hole 9a has a screw portion capable of screwing the above-mentioned screw screwed into the first bolt insertion hole 2k. In this embodiment, the first bolt insertion hole 9a is formed as a non-through hole that is opened only at the joint surface 2a. Similarly, the second bolt insertion hole 9b has a screw portion that can be screwed into the second screw insertion hole 2m. In this embodiment, the second bolt is inserted The hole 9b is also formed as a non-through hole that opens only at the joint surface 2a.

The piping joints 1 and 1A are configured such that the central axis C1 of the second opening portion 2p along the longitudinal direction (specifically parallel to the longitudinal direction) and the first opening along the height direction (specifically parallel to the height direction). The central axis C2 of the portion 2g is staggered (specifically, orthogonal) at a slightly central portion in the width direction of the body portion 2.

The piping connection structure PJ shown in FIG. 29 includes a piping joint 1 and a piping joint 1A. The pipe portion 3 of the piping joint 1 is air-tightly or liquid-tightly connected to a pipe-like pipe P11 formed of stainless steel by welding (for example, TIG welding) or the like. Similarly, the pipe part 3 in the piping joint 1A is air-tightly or liquid-tightly connected to a pipe-like pipe P12 formed of stainless steel by welding (for example, TIG welding) or the like. The first openings 2 g of the piping joint 1 and the piping joint 1A are overlapped and joined to each other at a joint surface 2 a. In addition, as described above, the piping connection structure PJ is to join the first bolt insertion hole 2k and the first bolt insertion hole 2k by screwing the joint surface 2a of the pipe joint 1 and the joint surface 2a of the pipe joint 1A to each other. A bolt insertion hole 9a is formed, and another bolt B is inserted into the second bolt insertion hole 2m and is screwed into the second bolt insertion hole 9b.

The piping connection structure PJ shown in FIG. 30 has four sets of piping connection structure PJ shown in FIG. 29 to connect the piping P11 and the piping P12, connect the piping P21 and the piping P22, connect the piping P31 and the piping P32, and connect the piping P41 and Piping P42.

<Action, effect>

In the structure of the above-mentioned embodiment, the first bolt-hole insertion hole 2k (9a) and the second bolt-hole insertion hole 2m (9b) are provided along the height direction. The fluid passage between the passage 4 and the second opening portion 2p (the pipe portion 3) bypasses the first bolt insertion hole 2k (9a) and is formed along the longitudinal direction. The piping joint 1 configured as described above fixes (installs) an installation object by inserting screws (bolts B, etc.) into the first bolt insertion hole 2k and the second bolt insertion hole 2m along the height direction.

Here, the first passage 4 and the second passage 5 are as close as possible in the width direction, and the first bolt insertion hole 2k (9a) and the second passage 5 are as close as possible in the width direction to the extent that they are not connected to each other. Therefore, the dimension in the width direction of the main body portion 2 can be made as small as possible. Therefore, according to this configuration, the device configuration can be favorably miniaturized or integrated in the width direction.

Furthermore, in the pipe joints 1 and 1A, the center axis C1 of the second opening portion 2p along the longitudinal direction and the center axis C2 of the first opening portion 2g along the height direction are slightly centered in the width direction of the main body portion 2. The parts are staggered (specifically, they are orthogonal on the same side). In this configuration, the central axis C1 in the piping joint 1 and the central axis C1 in the piping joint 1A are almost uniform in the width direction. Therefore, according to this structure, piping design becomes easy. Specifically, the two pipes P11 and P12 can be arranged on a substantially straight line in the width direction and connected. In addition, when the piping joint 1 is installed on any installation object by using screws, interference between the pipe portion 3 and the piping connected to the pipe portion 3, the above-mentioned screw, or a tool for tying the same can be satisfactorily avoided.

In particular, in the piping connection structure PJ formed by connecting (connecting) the piping joint 1 and the piping joint 1A, as shown in FIG. 29 and FIG. 30, the top surface 2b side of the piping joint 1 can be along the height Insert the operation bolt B such as a rod-shaped hexagonal screwdriver in the direction to perform piping joint 1 and piping joint 1A knotting (linking) or separation operation. Therefore, according to the said structure, even if the width | variety of the piping joint 1 and the piping joint 1A is made as small as possible, favorable maintainability (operability of the said work) can be ensured.

As shown in FIG. 30, when a plurality of pipes P11, P21, ... arranged in parallel are connected to each other, a piping connection structure for forming the connection is connected to each other. Compared with the conventional piping joint structure 1C (refer to FIG. 31) of the conventional technology, PJ can be well integrated in the width direction.

That is, "d" shown in FIG. 30 is the space | interval between the adjacent piping required when operating the bolt B from the top surface 2b side of the piping joint 1 in the height direction as mentioned above. Here, in FIG. 30, the four pipes P11 to P41 arranged in parallel and the four pipes P12 to P42 arranged in parallel are connected, so the distance between the centers of P11 and P41 (the distance between the centers of P12 and P42) D is 3d. .

In this regard, in the piping joint structure 1C (refer to FIG. 31) of the conventional technology, the maintenance work for tying or separation is to insert a wrench from a direction orthogonal to the piping P11 and the like, and rotate it around the axis direction of the piping P11 and the like. get on. Therefore, when the piping joint structure 1C using the conventional technology is used to connect the piping P11 to P41 and the piping P12 to P42 in the same manner as in FIG. 30, it is also shown in FIG. 31. The interval d of 30 is large, and the distance between the centers of P11 and P41 (the distance between the centers of P12 and P42) D1 is also much larger than the distance D between the centers of FIG. 30.

Next, a specific example when the above-mentioned piping joint 1 (see FIGS. 23 to 25) is used as the gas supply device 10 as the “fluid supply control device” of the present invention will be described with reference to FIGS. 32 to 34.

A pair of female screw portions 28 a 1 and 28 a 2 are provided at positions corresponding to the pipe joint 1. Specifically, the pair of female screw portions 28 a 1 and 28 a 2 corresponding to one of the piping joints 1 are arranged in the machine arrangement direction on both sides of the inlet port 21 a in the connection flow path 21. That is, the female screw portion 28 a 1 (the upstream side in the gas flow direction) is provided at a position on the most upstream side in the gas flow direction of the flow path block 20. A pair of female screw portions 28 b are provided at positions corresponding to the fluid control valves 17 and 18. A pair of female screw portions 28 c are provided at positions corresponding to the flow controller 16. A pair of female screw portions 28 d are provided at positions corresponding to the fluid control valve 19.

In this embodiment, a pair of female screw portions 28a1, 28a2, a pair of female screw portions 28b, a pair of female screw portions 28c, and a pair of female screw portions 28d are provided in this order along the gas flow direction (machine arrangement direction). Arranged on the rough line. Specifically, the female screw portions 28 b and 28 c and the female screw portion 28 d are provided in a plan view and are located on a center line C (see a one-point chain line in FIG. 32) of a straight line whose center is parallel to the gas flow direction. The pair of female screw portions 28a1 and 28a2 are provided in a plan view, and a circle constituting the inner diameter overlaps the center line C.

In addition, in the present embodiment, the female screw portion 28a1 is provided such that the center thereof is offset from one of the device width directions (the opposite side to the gas supply unit 10B to 10D) from the center line C described above. Similarly, the female screw part 28a2 is provided so that the center may deviate from the other side (gas supply unit 10B-10D side) of the apparatus width direction from the center line C mentioned above.

The piping joints 1 are respectively provided in the gas supply units 10A, 10B, 10C, and 10D. The piping joint 1 of the gas supply unit 10A is configured to be connected to the inlet port 21a (corresponding to the present invention) of the connection flow path 21 "Entrance"). That is, the piping joint 1 is hermetically joined to the upper side surface 20a of the flow path block 20 at a position facing the inlet port 21a, thereby connecting the process gas inflow line 11A and the inlet port 21a (gas supply units 10B, 10C, and 10D). The pipe joint 1 also has the same structure).

The piping joint 1 is such that the longitudinal direction of the main body portion 2 can be the direction along the machine arrangement direction (specifically, parallel), and the width direction of the main body portion 2 can be the direction along the width direction of the device (specifically, (Parallel), and the height direction of the main body portion 2 may be a direction (specifically, parallel) along the thickness direction of the flow path block 20, and installed on the flow path block 20. Further, in the main body portion 2, the first bolt insertion hole 2k and the second bolt insertion hole 2m are formed so that the piping joint 1 is installed in the flow path block 20, and the bolt B is in a plan view in accordance with the above. The centerline C is staggered. The joint surface 2 a in the main body portion 2 is joined to the upper side surface 20 a in the flow path block 20.

The piping joint 1 is installed on the flow path block 20 so that the first end surface 2c can be positioned on the upstream side in the gas flow direction. A pipe portion 3 is provided for connecting with the process gas inflow line 11, and the pipe portion 3 can protrude from the first end surface 2c in a slightly horizontal direction.

The first side surface 2e is provided on the female screw portion 28a2 side in a state where the piping joint 1 is mounted on the flow path block 20. The second side surface 2f is provided on the female screw portion 28a1 side in a state where the piping joint 1 is mounted on the flow path block 20.

The piping joint 1 is screwed to a pair of female screw portions 28a1 and 28a2 by inserting a pair of bolts B into the first bolt insertion hole 2k and the second bolt insertion hole 2m, thereby detachably attaching to the flow Road block 20. Here, in this embodiment, the body portion 2 is formed to have a width slightly smaller than the outer diameter of the pipe portion 3 and the bolt B. Is large, and is slightly the same as the width of the flow controller 16 and the fluid control valves 17 to 19 (the width of the fluid control valve actuators 17a to 19a).

The first bolt insertion hole 2k is disposed on the pipe portion 3 side in plan view so as to correspond to the female screw portion 28a1. On the other hand, the second bolt insertion hole 2m is an end portion disposed on the second end surface 2d side in the above-mentioned longitudinal direction so as to correspond to the female screw portion 28a2. The first opening portion 2g is disposed at a position in the flow path block 20 facing the inlet port 21a of the connection flow path 21 corresponding to the inlet of the process gas in a state where the piping joint 1 is installed in the flow path block 20.

The seal drop portion 2h is formed to accommodate a gas seal member. This gas sealing member is hermetically connected to the connection path 21 of the flow path 21 at the junction between the upper side surface 20a of the flow path block 20 and the joint surface 2a of the main body 2 in a state where the piping joint 1 is installed on the flow path block 20. The entrance port 21a and the first opening 2g. The second opening portion 2p is provided so as to open at an end on the upstream side in the gas flow direction of the main body portion 2 in a state where the piping joint 1 is mounted on the flow path block 20.

One of the pair of female screw portions 28 b corresponding to one of the fluid control valves 17 and 18 is provided between the outlet port 21 b and the female screw portion 28 a 2 in the connection flow path 21. The other of the pair of female screw portions 28b is provided between the flushing gas supply port 24 and the outlet port 22b connected to the flow path 22 (more strictly, the other of the pair of female screw portions 28b is provided in the flushing gas). The supply port 24, one of the pair of female screw portions 28c described later, and the flushing gas supply port 24. However, at this stage of explanation, the positions of the pair of female screw portions 28c have not been determined. Therefore, the pair of female screw portions For the position of 28c, please refer to the description below.).

Corresponds to one of the pair of female screw portions 28c of the flow controller 16. One is provided between the pair of female screw portions 28 b located on the downstream side in the gas flow direction and the outlet port 22 b of the connection flow path 22. The other of the pair of female screw portions 28c is provided between the inlet port 23a and the outlet port 23b of the flow path 23 (more strictly, the other of the pair of female screw portions 28c is provided at the inlet port 23a, Between one of the pair of female screw portions 28d described later. However, at this stage of description, the position of the pair of female screw portions 28d has not been determined. Therefore, for the position of the pair of female screw portions 28d, please refer to the description below. .).

In addition, a through hole (not shown) is formed in the MFC mounting portion 50 at a position corresponding to the female screw portion 28c to insert the mounting bolt 51. The flow controller 16 is air-tightly installed on the upper surface 20 a side of the flow path block 20 by screwing the mounting bolt 51 to a pair of female screw portions 28 c. That is, the pair of female screw portions 28 c are provided to be able to detachably attach the flow controller 16 (MFC mounting portion 50) to the flow path block 20. In addition, a configuration in which the flow controller 16 (MFC mounting portion 50) is hermetically bonded to the upper side surface 20a side of the flow path block 20 is well known. Therefore, in this specification, the configuration is illustrated or more detailed. The description is omitted.

As described above, in this embodiment, the female screw portions 28a1, 28a2, the connection flow path 21 (including the inlet port 21a, the inlet path 21c, the connection path 21e, the outlet path 21d, and the outlet port 21b), the female screw portion 28b, and the connection flow The channel 22 (ibid.), The flushing gas supply port 24, the female screw portion 28c, the connection flow path 23 (ibid.), The process gas supply port 26, and the female screw portion 28d are arranged in a substantially straight line along the machine arrangement direction. The female screw portions 28a1, 28a2, 28b, 28c, and 28d are formed as non-through holes that are opened in the upper surface 20a. That is, connect The flow paths 21, 22, and 23 are formed in the depth direction of the female screw portions 28a1 to 28d to bypass the female screw portions 28a1 to 28d. Specifically, the female screw portions 28a1 to 28d are formed so as not to communicate with the connection flow paths 21 to 23.

<Action, effect>

In the configuration of this embodiment as described above, the piping joint 1 is detachably mounted on the flow path block 20 by a pair of female screw portions 28a1 and 28a2. Similarly, the fluid control valves 17 and 18 are detachably mounted on the flow path block 20 by a pair of female screw portions 28b. The flow controller 16 is detachably mounted on the flow path block 20 by a pair of female screw portions 28c. Furthermore, the fluid control valve 19 is detachably mounted on the flow path block 20 by a pair of female screw portions 28d.

Then, the piping joint 1 and the fluid control valves 17 and 18 are connected by the connection flow path 21. Similarly, the fluid control valves 17 and 18 and the flow controller 16 are connected by a connection flow path 22. Furthermore, the flow controller 16 and the fluid control valve 19 are connected by a connection flow path 23. In addition, the connection flow paths 21 to 23 of these are arranged on approximately the same straight line as the female screw portions 28a to 28d, and are formed to bypass these in the depth direction.

Therefore, according to the configuration described above, even if the widths of the piping joint 1, the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are set to the minimum (specifically, the widths of the flow controller 16 and the fluid control valve) The widths of the actuators 17a to 19a are slightly the same), and the flow controller 16 and the fluid control valves 17 to 19 can freely attach and detach the flow path block 20. In other words, these components can be freely attached and detached to and from the flow path block 20 without having to use every four mounting bolts to make a rectangular shape in a plan view. Therefore, according to this constitution, The width of each of the gas supply units 10A and the like or the width of the entire gas supply device 10 can be reduced as much as possible, whereby the gas supply device 10 can maintain good maintainability and be more compact.

In particular, focusing on the configuration of the convection channel block 20 of the piping portion, the piping joint 1 is formed on the main body portion 2 having a shape outside the long-side direction in a plan view, and the second opening portion 2p side in the long-side direction. A first bolt insertion hole 2k is provided at the end on the opposite side. In addition, the first bolt insertion hole 2k and the second bolt insertion hole 2m are provided at slightly symmetrical positions with the first opening portion 2g and the first passage 4 opening toward the flow path block 20. Using the first bolt insertion hole 2k, the second bolt insertion hole 2m, and the bolt B, the piping joint 1 is installed on the flow path block 20.

Here, in the inside of the main body portion 2, the first passage 4 is provided in the height direction from the first opening portion 2 g. Furthermore, the second passage 5 is provided so as to bypass the first bolt insertion hole 2k in the longitudinal direction from a position away from the first opening 2g in the first passage 4.

That is, in this configuration, a gas passage having a substantially L-shape in a side cross section is formed between the first opening portion 2g and the second opening portion 2p inside the main body portion 2. In addition, the first passage 4 and the second passage 5 are as close as possible in the width direction, and the second passage 5m is as close as possible in the width direction to the extent that the second bolt insertion hole 2m and the second passage 5 are not connected to each other. The width dimension of the portion 2 can be made as small as possible.

In this configuration, the configuration of the piping portion convection block 20 is miniaturized as much as possible. That is, the piping joint 1 has a structure (female) for installing the flow controller 16 and the fluid control valves 17 to 19 and installing the flow controller 20 on the flow block 20. The screw portion 28b, etc. and the mounting bolt 41, etc.) are mounted on the flow path block 20 along with the female screw portions 28a1, 28a2 and a pair of bolts B arranged in a substantially straight line along the gas flow direction.

At this time, starting from the piping joint 1, the gas passage structure (the gas passage inside the body portion 2 and the pipe portion 3) for connecting to the process gas inflow line 11 is set to be slightly horizontal from the body portion 2 in the gas flow direction. The upstream side extends. Therefore, as shown in FIG. 32 and FIG. 33, a part near the piping joint 1 of the process gas inflow line 11 is provided without being bent in the device width direction or height direction.

In addition, when the piping joint 1 is attached to and detached from the flow path block 20, the first bolt insertion hole 2k and the second bolt insertion hole 2m are located at positions in the process gas inflow pipeline 11 that do not interfere with the vicinity of the piping joint 1. Therefore, on the upper side of the first bolt insertion hole 2k and the second bolt insertion hole 2m, the piping design does not need to make (ensure) a relatively large space for the bolting operation of the bolt B. That is, it is not necessary to specifically bypass the piping portion to secure the space for attaching and detaching work of the piping joint 1. Therefore, the piping portion can be shortened as much as possible.

In the configuration of this embodiment, the piping joint 1, the flow controller 16, and the fluid control valves 17 to 19 are concentrated on the upper surface 20a side of the flow path block 20. Therefore, according to this configuration, the piping joint 1, the flow controller 16, and the fluid control valves 17 to 19 are collectively installed on the upper surface 20a side. (According to this configuration, all of the piping joint 1, the flow controller 16, and the fluid control valve. 17 ~ 19 The gas supply unit 10A, etc., or the gas supply device 10 can be maintained without damage during the maintenance (bolting of the bolt B and the mounting bolt 41, etc.) from the upper surface 20a side, so the maintainability is extremely good. Yu Haowei Repairability is achieved with the smallest width possible.

The structure shown in FIG. 29 and FIG. 30 is well applicable to the piping of the piping portion before the flow path block 20 in the process gas inflow line 11 (process gas inflow lines 11A, 11B, 11C and 11D) shown in FIG. Connection structure.

The fluid control valves 17 to 19 can also be detachably installed on the lower surface 20b side. FIG. 35 corresponds to the aforementioned modification. In this modification, the piping joint 1 has the same configuration as the above-described embodiment, and the pipe portion 3 is attached to the end surface 201B of the flow path block 20 so as to protrude downward (the lower surface 20b side). Here, the end surface 201B is one surface of the flow path block 20 and is a surface orthogonal to the upper surface 20a and the lower surface 20b. The end surface 201B is provided on one end side in the machine arrangement direction of the flow path block 20.

In this modification, the fluid control valves 17, 18, and 19 are arranged in this order from the end surface 201B side in this order. Due to these changes, the internal flow path structure of the flow path block 20 has been changed from the above-mentioned embodiment. Except for the above, the flow controller 16, the fluid control valves 17 to 19, and the piping joint 1 are installed in the flow block 20 in the same manner as the above-mentioned embodiment. That is, the configurations of the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are substantially the same as those of the above-described embodiment.

The inlet port 21a in the connection flow path 21 is provided so as to open at a substantially central portion in the thickness direction of the end surface 201B. On the other hand, the exit port 21b is provided so as to open in a machine arrangement direction of the lower surface 20b closer to the end surface 201B side than the central portion. Furthermore, the connection flow path 21 is formed in a shape (slightly L-shaped) that connects the inlet port 21a and the outlet port 21b and is bent at a right angle.

The pair of female screw portions 28a1, 28a2 are formed as non-through holes that are not communicated with the connection channels 21 and 22, and are open at the end surface 201B side. Specifically, the female screw portion 28 a 1 is provided above the inlet port 21 a of the connection flow path 21 (on the upper surface 20 a side). On the other hand, the female screw portion 28a2 is provided below the inlet port 21a (on the lower surface 20b side) in the connection channel 21. Furthermore, the female screw portion 28a1, the inlet port 21a of the connection flow path 21, and the female screw portion 28a2 are arranged from above to below in this order.

The female screw portions 28 b and 28 d are non-penetrating screw holes, and are formed so as to open on the lower surface 20 b of the flow path block 20. One of the pair of female screw portions 28 b is formed in the connection flow path 21 closer to the end surface 201B side than the outlet port 21 b and is not connected to the connection flow path 21. The other one of the pair of female screw portions 28b and one of the pair of female screw portions 28d are provided between the flushing gas supply port 24 and the internal flushing gas line 25, the process gas supply port 26, and the supply-side internal gas line 27 The area where no internal flow path is formed.

In this way, in this modification, a pair of female screw portions 28c, an outlet port 22b connected to the flow path 22, and an inlet port 23a connected to the flow path 23 are arranged along the machine arrangement direction on the upper side surface 20a side of the flow path block 20. A straight line. On the lower surface 20b side of the flow path block 20, female screw portions 28b and 28d, an outlet port 21b connected to the flow path 21, an inlet port 22a connected to the flow path 22, a flushing gas supply port 24, and a process gas supply port 26 They are arranged in a straight line along the machine arrangement direction.

In addition, in the configuration of this modification, the pipe portion 3 in the piping joint 1 is provided so as to protrude toward the lower side (the lower surface 20b side). Therefore, the part near the piping joint 1 in the process gas inflow line 11 does not face the device width direction Set flexibly. Thereby, the piping part can be made as short as possible.

Furthermore, according to the configuration of the present modified example, by arranging the piping joint 1 on the end surface 201B of the flow path block 20, the size of the flow path block 20 in the machine arrangement direction is reduced. Thereby, the flow path block 20 can be made lighter.

In addition, the flow state of the process gas in this modification will be described with reference to FIG. 35. First, the process gas convection flow block 20 is supplied to the inlet port 21a in the connection flow path 21 provided on the end surface 201B thereof. This process gas moves downward in the connection flow path 21 after moving to the right direction in the figure. Then, the process gas flows from the outlet port 21b in the connection flow path 21 to the inlet port 22a of the connection flow path 22 through the fluid control valve 17, and flows in the valve installation block 40. So far, the flow of the process gas is from the left to the right in the figure with respect to the machine arrangement direction.

On the other hand, the outlet port 22b in the connection flow path 22 is more on the left side in the figure than the inlet port 22a in the machine arrangement direction. Therefore, the flow of the process gas in the connecting flow path 22 is from right to left in the drawing in the arrangement direction of the machines. Then, the process gas flows in the flow controller 16 (including the MFC mounting portion 50) from the left to the right in the arrangement direction of the machine.

Furthermore, the process gas supplied to the inlet port 23 a of the connection flow path 23 through the flow controller 16 (including the MFC mounting portion 50) flows downward in the connection flow path 23 and reaches the valve installation block 60. In the valve installation block 60, the process gas passes between the fluid control valve 19 and the process gas supply port 26, and the machine arrangement direction is from right to left in the figure. As such, in this modification, the "gas flow direction" is not only a direction in the machine arrangement direction, but also a form of reciprocating (or drawing a "loop") along the machine arrangement direction.

The present invention is not limited to the embodiments or modifications described above. Piping composition. Therefore, the configuration of the piping joint 1 may be appropriately changed according to the piping configuration of the entire device.

For example, as shown in FIGS. 36 to 38, the first passage 4 may be formed as a through hole from the bonding surface 2 a to the top surface 2 b. In this case, the pipe surface 3 may be provided in the top surface 2b. Furthermore, as shown in FIGS. 39 to 41, the pipe portion 3 and the second opening portion 2p may be provided on the second end surface 2d side. In this case, the second passages 5 are formed in a pair with the first opening portion 2g (the first passage 4) in a plan view. Typically, in this case, the pair of second passages 5 may be arranged to be slightly point-symmetrical with the first opening portion 2g (first passage 4).

The tube portion 3 may be appropriately omitted.

The first bolt insertion hole 2k and the second bolt insertion hole 2m may not be provided in a symmetrical position around the first opening portion 2g in plan view. In other words, the positions of the first bolt insertion hole 2k and the second bolt insertion hole 2m can be appropriately changed within a range where a good seal of the first opening portion 2g can be ensured.

The present invention is not limited to a place where fluid is supplied to the flow path block 20. That is, the present invention is also applicable to the outflow place (outflow side joint) of the fluid from the flow path block 20.

Conventionally, in a pneumatic valve that slides two or more pistons by operating the pressure of the air, the valve body is brought into contact with the valve seat or separated from the valve seat. Potential energy compression spring. In the semiconductor manufacturing process, since dangerous gas is handled, even if the gas leaks slightly from the pneumatic valve for semiconductor manufacturing, it must be prevented. Therefore, high air tightness is required when closing the pneumatic valve. For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 04-248085) includes a pneumatic valve as shown in FIG. 53. 100.

However, the pneumatic valve 100V has the following problems.

That is, the pneumatic valve 100V includes pistons 101AV, 101BV, and 101CV. Each coil is provided with 8 coil springs 102AV ~ 102AV, 102BV ~ 102BV, 102CV ~ 102CV in a circular shape and used. Of the eight coil springs, for example, if any one of the coil springs deteriorates, the balance of the valve body will collapse, and the sealing force required when the pneumatic valve is closed at 100V may deteriorate.

In order to solve the above problems, in the pneumatic valve 200V described in Patent Document 2 (Japanese Patent Application Laid-Open No. 2008-144819), as shown in FIG. 54, among the first piston 201V and the second piston 202V, the first piston 201V is closed. When the valve is sealed, two coil springs 203V and 204V have two on the same plane.

However, the pneumatic valve 200V described in Patent Document 2 has the following problems.

(1) In order to obtain the sealing force required to close the valve, if the two coil springs 203V and 204V are installed on the same plane as the 200V pneumatic valve, the valve may become larger. In recent years, in a semiconductor manufacturing apparatus, as a manufacturing process of a semiconductor wafer becomes complicated, a variety of gases must be switched. As a result, the number of valves to be installed has increased. Therefore, if a plurality of pneumatic valves are provided, a problem arises that the overall installation area increases. Therefore, the demand for miniaturization of each valve is also increased.

(2) If the valve is downsized, the installation area is limited, and the degree of freedom of the diameter of the spring or the diameter of the spring disappears. The reason is that when the installation area is limited, the diameter of the spring has to be thin, and only the diameter of the spring can be used. The smaller. Therefore, the stress applied to one spring is increased, which causes a problem in the durability of the spring. In particular, in the semiconductor manufacturing process, since dangerous gas is handled, securing of a sealing force required for closing a valve of a fluid control valve for semiconductor manufacturing, performance of a valve, and durability are major issues.

The present invention is to solve the above problems, and its object is to provide a fluid control valve that can reduce the size of the valve, reduce the overall installation area, and improve the design freedom of the compression spring, and can ensure the sealing force required for closing the valve. .

<Configuration of Fluid Control Valve>

As shown in FIG. 42, the fluid control valve 1V (the aforementioned fluid control valves 17 to 19) includes a valve portion YV for controlling a fluid, and an actuator portion XV for giving a driving force to the valve portion YV. The fluid control valve 1V connects the actuator portion XV to the main body 14V through the adapter 15V. The fluid control valve 1V has the same diameter as a pencil and has a cylindrical appearance.

As shown in FIG. 44, the valve portion YV includes a main body 14V and a holder 16V. Below the body 14V, an inlet flow path 14bV for controlling the flow of fluid and an outlet flow path 14cV for controlling the flow of fluid are formed. Above the body 14V, a mounting hole 14dV is formed in a cylindrical shape. A valve seat 14aV is formed in a central portion of the body 14V, and the inlet flow path 14bV and the outlet flow path 14cV are communicated through a valve hole in the valve seat 14aV.

Above the main body 14V, the holder 16V is fixed by welding in the welding portion 29V. Thereby, the main body 14V and the bracket 16V are integrated and sealed. As shown in FIG. 42, an adapter 15V is mounted on the upper portion of the bracket 16V. A male screw portion 16aV is provided on the outer peripheral surface above the holder 16V, and the adapter 15V A female screw portion 15aV is provided on the inner peripheral surface. The cylindrical handle 24V is slidably held on the inner peripheral surface of the holder 16V. An opening is formed on the upper surface of the holder 16V, and a compression spring 19V is accommodated. The upper end surface of the telescopic hose 17V is mounted below the bracket 16V. The lower end face of the retractable hose 17V is mounted on a valve body holding portion 24aV formed below the handle 24V. The valve body 18V made of an elastic body is attached to the valve body holding portion 24aV. That is, a telescopic hose 17V is disposed between the valve body 18V and the holder 16V.

The valve body 18V abuts on the valve seat 14aV or leaves. When the valve body 18V abuts on the valve seat 14aV, the inlet flow path 14bV and the outlet flow path 14cV are blocked; when the valve body 18V leaves the valve seat 14aV, the inlet flow path 14bV and the outlet flow path 14cV are communicated. A spring mounting plate 28V is attached to the lever 24V, and the upper end surface of the compression spring 19V abuts the lower side of the spring mounting plate 28V. The lower end surface of the compression spring 19V is in contact with the upper surface of the opening of the bracket 16V. The compression spring 19V imparts potential energy in a direction that separates the valve body 18V from the valve seat 14aV. As shown in FIG. 43, an O-ring 27V is installed between the outer peripheral portion above the lever 24V and the inner peripheral surface of the built-in component 23AV to prevent air leakage.

As shown in FIG. 43, the actuator unit XV has the first piston 11AV and the second piston 11BV arranged in-line on the same axis. By coaxial, it means that the axes are the same. In addition, a first compression spring 12AV that imparts potential energy to the valve body 18V in contact with the valve seat 14aV is attached to the first piston 11AV, and the second piston 11BV is in contact with the valve seat toward the valve body 18V. A second compression spring 12BV that imparts potential energy in the direction of 14aV is mounted on the coaxial. Since they are mounted in-line on the same axis, the valve can be reduced in size and reduced in size. The first piston 11AV and the second piston 11BV, the first compression spring 12AV and the second compression spring 12BV, And the internal component 23AV and the internal component 23BV are respectively the same shape. Therefore, parts can be made common, and manufacturing costs can be reduced. In addition, the efficiency of work is improved during assembly.

Further, the actuator unit XV includes a built-in component 23AV and a built-in component 23BV, an exterior member 22V, and a cover 20V.

In addition, among the parts of the same shape, one part is described, and the description of other parts is omitted. In addition, since the description is complicated, "A" and "B" of parts of the same shape are appropriately omitted.

As shown in FIG. 43, the actuator part XV is filled with two built-in parts 23AV and 23BV in the tube-shaped exterior member 22V. The side surface of the built-in component 23V is formed in a cylindrical shape. A cylinder 23aV is formed inside the upper part 23V. The outer diameter of the internal component 23V is approximately the same as the internal diameter of the external component 22V. An opening portion smaller than the inner diameter dimension of the exterior member 22V is formed in the interior below the interior component 23V. A cover 20V is attached to the front end of the exterior member 22V, and an adapter 15V is attached to the other end. Thereby, between the adapter 15V and the cover 20V, the built-in parts 23AV and 23BV are inserted and held. The internal components 23AV and 23BV are fixed in an overlapping state inside the external component 22V, and a first piston chamber 13AV and a second piston chamber 13BV are formed to house the first piston 11AV and the second piston 11BV, respectively.

The piston 11V is slidably filled in the piston chamber 13V, and the piston chamber 13V area is drawn as a pressurizing chamber 13aV and a back pressure chamber 13bV. In the back pressure chamber 13bV, the compression spring 12V is disposed coaxially with the piston 11V in a state where potential energy is applied in a direction to bring the piston 11V closer to the valve seat 14aV.

As shown in Figure 45 and Figure 46, the piston 11V is integrated with the piston rod 11bV Is formed on the piston portion 11aV. The piston portion 11aV is cylindrical and has an outer diameter slightly smaller than the inner diameter of the internal component 23V. An installation groove 11cV of an O-ring 25V formed of a flexible body such as rubber is provided in the piston portion 11aV in a ring shape along the outer peripheral surface. A recess 11eV is formed below the piston 11V. An internal flow path 11dV is formed inside the piston 11V. A flow path 11fV is formed below the internal flow path 11dV so as to communicate with the pressurizing chamber 13aV. The flow path 11fV communicates with the internal flow path 11dV. That is, the air supply and exhaust port 20aV formed on the inner peripheral surface of the cover 20V communicates with the pressurizing chamber 13aV of the piston 11V via the internal flow path 11dV and the flow path 11fV of the piston 11V.

In the fluid control valve 1V, the piston 11V having two pistons has a stem 24V disposed in a recessed portion 11eV of the first piston 11AV located at the lower end. On the other hand, the upper end of the piston rod 11bV of the first piston 11AV is arranged in the recessed portion 11eV of the second piston 11BV located at the upper end. Further, among the two pistons 11V, an O-ring 26AV for preventing air leakage is arranged on the outer peripheral surface of the piston rod 11bV of the first piston 11AV located at the lower end and the inner peripheral portion below the built-in component 23BV. On the other hand, an O-ring 26BV is arranged between the outer peripheral surface of the piston rod 11bV of the second piston 11BV located at the upper end and the inner peripheral portion below the cover 20V.

The lower end faces of the compression springs 12AV and 12BV that impart potential energy toward the valve body 18V in contact with the valve seat 14aV abut the upper surfaces of the piston portions 11aV of the first piston 11AV and second piston 11BV, respectively. The upper end surface of the first compression spring 12AV is in contact with the lower surface of the built-in component 23BV, and the upper end surface of the second compression spring 12BV is in contact with the lower surface of the cover 20V.

Here, the potential energy (F1) generated by the first compression spring 12AV, the second The sum of the potential energy (F2) generated by the compression spring 12BV (F1 + F2) becomes the force (F = F1 + F2) that makes the valve body 18V abut the valve seat 14aV, that is, the sealing force used to close the fluid control valve 1V . The resistance of the compression spring 19V is smaller than the force (F) that causes the valve body 18V to abut the valve seat 14aV. Therefore, the resistance of the compression spring 19V is omitted in the description. In addition, in the fluid control valves 2V, 3V of other embodiments described later, the description of the resistance of the compression spring 19V is similarly omitted.

Since the first compression spring 12AV and the second compression spring 12BV have the same shape, they have the same potential energy (F1 = F2). That is, the potential energy required for one spring is F / 2 = F1 = F2 when two pistons overlap. Thereby, the potential energy of each spring can be reduced. That is, it is possible to reduce the stress applied to one spring and improve the durability of the spring. In addition, the degree of freedom in designing the spring can be improved.

In addition, in the fluid control valve 2V of another embodiment described later, although there are six first compression springs 12AV to 6th compression spring 12FV, the total potential energy of each compression spring 12V (F1 + F2 + F3 + F4 + F5 + F6) is the force that causes the valve body 18V to abut the valve seat 14aV (F = F1 + F2 + F3 + F4 + F5 + F6). In addition, the potential energy required for one spring is F / 6 = F1 = F2 = F3 = F4 = F5 = F6. In addition, since the number of pistons of the fluid control valve 3V of other embodiments described later is the same as the number of pistons of the fluid control valve 2V of other embodiments, the description is omitted.

The fluid control valve 1V supplies or discharges air through a supply / exhaust port 20aV formed on the inner peripheral surface of the cover 20V. The outer peripheral surface of the cover 20V is covered by an exterior member 22V, and a one-touch type is installed on the top of the cover 20V Connector 21V. Although not shown, an air pipe is connected to the one-touch joint 21V. In this way, since the air pipe can be connected to it, the installation area can be prevented from increasing.

(Assembly of fluid control valve)

Next, the assembly of the fluid control valve 1 according to this embodiment will be described with reference to FIG. 47. The actuator portion XV and the valve portion YV are separately assembled. Therefore, the actuator portion XV can be attached and detached by the bracket 16V constituting the valve portion YV.

First, assembly of the actuator portion XV will be described. A seal member 25AV is installed in the installation groove 11cV of the first piston 11AV and the second piston 11BV. The adapter 15V is pressed into the opening of one end of the exterior member 22V. The internal component 23AV, the piston 11AV, the compression spring 12AV, the internal component 23BV, the piston 11BV, and the compression spring 12BV are charged into the external component 22V. At this time, the piston rod 11bV of the piston 11V penetrates the through hole of the built-in component 23V and the through hole of the cover 20V. The cover 20V is fitted to the open end portion of the exterior member 22V so that the piston rod 11bV flying out from the through hole of the interior component 23V penetrates. At this stage, the internal component 23V, the piston 11V, and the compression spring 12V are temporarily held in the external component 22V. Both ends of the exterior member 22V are fixed and fixed along the convergence groove of the adapter 15V and the cover 20V.

Next, the assembly of the valve portion YV will be described. As shown in FIG. 47, the mounting hole 14dV of the main body 14V is inserted into the bracket 16V, and the bracket 16V embedded in the handle 24V is arranged inside the mounting hole 14dV. The main body 14V and the holder 16V are fixed by welding in a welding portion 29V. Thereby, the body 14V and the bracket 16V are integrally formed and sealed. In addition, the method of fixing the main body 14V and the holder 16V can also be inserted by pressing or screwing the metal gasket and the like.

Next, the actuator portion XV is connected to the valve portion YV. The female screw portion 15aV of the adapter 15V screwed on the main body 14V is screwed into the male screw portion 16aV of the bracket 16V. At this time, the lever 24V protruding from the bracket 16V will abut the recess 11eV of the piston 11V, and the spring force of the compression spring 12V acting on the piston 11V will be transmitted to the valve body 18V through the lever 24V, and the valve body 18V will abut In the valve seat 14aV. The above is assembled.

In recent years, the demand for miniaturization of fluid control valves has increased. However, with miniaturization, the components of the fluid control valve have become smaller, so it has been difficult to maintain sufficient strength. Therefore, when press-fitting to fix the main body 14V and the bracket 16V, there is a possibility that the component parts may be damaged.

In the fluid control valve 1V of the present invention having the same degree of diameter as a pencil (for example, a diameter of about 10 mm), the main body 14V and the holder 16V are fixed by welding, so there is no risk of damage due to pressing or screwing, And the body 14V and the bracket 16V can be sealed. Therefore, the size of the fluid control valve can be reduced, and the strength of the valve portion Y can be secured. At the time of assembly or maintenance, the actuator portion X can be easily detached from the valve portion Y, so that the work efficiency can be improved. In addition, since the main body 14V and the bracket 16V are sealed, the control fluid does not leak and safety can be improved.

(Description of operation of fluid control valve)

Next, the operation of the fluid control valve 1V of this embodiment will be described.

When the fluid control valve 1V does not supply air to the air supply and exhaust port 20aV, the compression force of the compression spring 12V will resist the compression spring 19V and the piston 11V will be pushed down to the seat 14aV, and the valve will be passed through the handle 24V. The body 18V is in contact with the valve seat 14aV. Therefore, the supply of 14bV to the inlet flow path is controlled The brake fluid cannot flow from the valve seat 14aV to the outlet flow path 14cV.

When air is supplied from the supply / exhaust port 20aV, the air flows from the internal flow path 11dV through the flow path 11fV and flows into the pressurized chamber 13aV. If the air flowing into the pressure chamber 13aV exceeds the elastic force of the compression spring 12V located in the back pressure chamber 13bV, the compression spring 12V will start to contract. Thereby, the piston 11V rises. When the piston 11V rises, as shown in FIG. 42, the compression spring 19V attached to the stem 24V cannot be pushed in the direction of the valve seat 14aV, and the stem 24V will rise by the elastic force of the compression spring 19V. The extended telescopic hose 17V will shrink, and the valve body 18V leaves the valve seat 14aV. When the control fluid is supplied to the inlet flow path 14bV in this state, the control fluid flows from the inlet flow path 14bV to the outlet flow path 14cV through the valve hole in the valve seat 14aV.

<Modification of Fluid Control Valve>

Referring to the drawings, another embodiment of the fluid control valve according to the present invention will be described. Fig. 48 is a sectional view of a fluid control valve 2V according to another embodiment of the present invention. In addition, the structures common to the above-mentioned embodiment are given the same reference numerals as those of the above-mentioned embodiment in the drawings, and description thereof is omitted.

In the fluid control valve 2V of the present embodiment (the fluid control valves 17 to 19 described above), as shown in FIG. 48, the inner shape of 23V of the same shape is overlapped by 6 and fixed in the 22V of the exterior member. Six first, second, third, fourth, fifth, and sixth pistons 11AV, 11BV, 11CV, 11DV, 11EV, and 11FV (hereinafter referred to as 11AV to 11FV) are provided, and six first, second, and second pistons are provided. 3rd, 4th, 5th, and 6th compression springs 12AV, 12BV, 12CV, 12DV, 12EV, and 12FV (hereinafter referred to as 12AV to 12FV.). The first to sixth compression springs 12AV to 12FV are mounted on the first to sixth jobs one by one, respectively. Plug 11AV ~ 11FV on the coaxial. By overlapping six pistons 11V, six piston chambers 13AV, 13BV, 13CV, 13DV, 13EV, and 13FV are formed, and a six-stage fluid control valve is formed.

Here, in recent years, since a plurality of gases are switched in a semiconductor manufacturing apparatus, the number of valves to be installed has increased, and a reduction in the overall installation area has become a problem. In order to miniaturize the valve, a fluid control valve having the same diameter as a pencil was developed. In this case, the spring diameter of the compression spring 12V mounted on the piston 11V must be small. Therefore, in order to ensure a certain sealing force when the valve is closed, a plurality of pistons 11V must be overlapped.

The applicant has conducted several experiments to understand that in order to ensure a certain sealing force when the valve is closed, it is necessary to overlap four or more pistons 11V. Compression springs 12V are mounted on four or more pistons 11V coaxially one by one. In addition, for a fluid control valve 2V, if 6 pistons 11V are overlapped, and 6 compression springs 12V are installed one by one, it can be seen that a certain sealing force can be surely ensured, and the durability of the compression spring 12V can be improved.

As described above, according to the fluid control valves 1V and 2V of the present invention, (1) the piston 11V is slid by the pressure of the operating fluid, and the valve body 18V abuts or leaves the valve seat 14aV in the fluid control valves 1V and 2V It is characterized in that it has a first piston 11AV and a second piston 11BV on the same axis; a first compression spring 12AV that imparts potential energy in a direction in which the valve body 18V abuts the valve seat 14aV is mounted on the first piston 11AV on the same axis ; A second compression spring 12BV that imparts potential energy in a direction in which the valve body 18V abuts on the valve seat 14aV is coaxially mounted on the second piston 11BV. Therefore, the first compression spring 12AV and the second compression spring 12BV are connected in series to each other. The first piston 11AV and the second piston 11BV, so The width of the fluid control valve can be reduced by 1V and 2V, and the size can be reduced. This can reduce the overall installation area.

Since not only the two pistons 11V (the first piston 11AV, the second piston 11BV), even if, for example, six pistons 11V are added to increase the sealing force for closing the valve, the height of the actuator portion X is only increased. That is, when the sealing force is increased and the width of the fluid control valve itself is kept small, the installation area can be kept unchanged. Therefore, irrespective of the number of pistons 11V, the size of the fluid control valve can be reduced, and the entire installation area can be reduced. In addition, regardless of the number of pistons 11V, only any number of pistons 11V can be combined according to the material or shape of the valve body 18V, the necessary Cv value, etc., and the sealing force required for closing the valve can be easily set. Furthermore, even if any one compression spring 12V deteriorates, the potential energy of the other compression spring 12V can ensure a uniform sealing force to the valve seat 14aV, and the valve body 18V will not be unbalanced and tilt.

(2) The fluid control valves 1V and 2V according to (1) are characterized in that the first piston 11AV and the second piston 11BV have the same shape; the first compression spring 12AV and the second compression spring 12BV have the same shape, so When a plurality of pistons 11V and a compression spring 12V are combined, they are respectively the same shape, so parts can be used in common. Thereby, it is not necessary to prepare pistons and compression springs of other shapes separately, and the manufacturing cost can be reduced when manufacturing parts by die forming. Furthermore, by sharing parts, the efficiency of work can be improved during assembly.

(3) The fluid control valves 1V and 2V according to (1) or (2), characterized in that the sum of the potential energy of the first compression spring 12AV and the potential energy of the second compression spring 12BV enables the valve body 18V to abut Valve seat 14aV, so the first The sum of the respective potential energies of the compression spring 12AV and the second compression spring 12BV becomes the sealing force for closing the fluid control valve 1V and 2V, so the spring stress of the compression spring 12V can be reduced individually. Therefore, the durability of the compression spring 12V can be improved. In addition, the degree of freedom in designing the compression spring 12V is improved, and design and manufacturing become easier. Furthermore, even if the tolerance is not uniform, the sealing force necessary for closing the valve can be ensured.

(4) The fluid control valves 1V and 2V according to any one of (1) to (3), characterized in that the holder 16V is fixed to the upper part of the body 14V forming the valve seat 14aV, and the valve body 18V and A telescopic hose 17V is arranged between the brackets 16V, so compared with the diaphragm valve body, a long stroke can be obtained in a smaller diameter.

(5) The fluid control valves 1V and 2V according to any one of (1) to (4), characterized in that the holder 16V is fixed to the upper part of the body 14V forming the valve seat 14aV by welding, so it is assembled During maintenance or repair, the actuator XV can be easily disassembled, which improves the work efficiency. In addition, since the main body 14V and the bracket 16V are sealed, the control fluid does not leak and safety can be improved.

(6) The fluid control valve according to (5), characterized in that the actuator portion XV having the piston 11V can be detached from the bracket 16V, so the actuator portion X can be immediately replaced during assembly or maintenance. Can improve the efficiency of operations.

(7) The fluid control valves 1V and 2V according to any one of (1) to (6) are characterized in that the fluid control valves 1V and 2V have a tube-shaped exterior member 22V, and therefore can be easily assembled.

(8) In the fluid control valves 1V and 2V according to (7), It is characterized in that a one-touch connector 21V is provided on the cover 20V installed at the front end of the exterior member 22V, so a one-touch connector 21V is provided on the cover 20V installed at the front end of the exterior member The air pipe is connected, so the increase in installation area can be prevented.

<Other Modifications of Fluid Control Valve>

Regarding another embodiment of the fluid control valve according to the present invention, a description will be given with reference to the drawings. FIG. 49 is a cross-sectional view of a fluid control valve 3V (the aforementioned fluid control valves 17 to 19) according to another embodiment of the present invention. In addition, regarding the common structure with the said embodiment, the same code | symbol is attached to the figure, and description is abbreviate | omitted.

In the above-mentioned embodiment, it was explained that the valve portion YV of the fluid control valve 1 uses a telescopic hose 17V. However, in the fluid control valve 3V of this embodiment, as shown in FIG. 49, the valve portion YV does not use a telescopic hose 17V, but uses a diaphragm valve body 31V to constitute the fluid control valve 3V.

Below the body 14V of the valve portion Y, an inlet flow path 14bV and an outlet flow path 14cV are provided. The mounting hole 14dV is formed in a cylindrical shape above the main body 14V. The valve seat 32V is provided annularly in the center of the bottom wall of the mounting hole 14dV, and the inlet flow path 14bV and the outlet flow path 14cV are communicated through the valve seat 32V.

The valve portion YV is provided with a diaphragm valve body 31V in the mounting hole 14dV of the main body 14V, and the outer edge portion of the diaphragm valve body 31V is pressed with the bracket 34V to be inserted into the inner peripheral surface of the mounting hole 14dV and the outer peripheral surface of the bracket 34V. The inter-connector 33V is plugged into the main body 14V, thereby holding the outer edge portion of the diaphragm valve body 31V between the main body 14V and the bracket 34V. The diaphragm valve body 31V is formed by forming a thin film of resin, metal, or the like, and making it deformable. Moreover, the bracket 34V is connected with The material of the device 33V is a metal having heat resistance or rigidity. The bracket 34V is filled with a metal stem 30V, which can be contacted with the diaphragm valve body 31V, and the driving force of the actuator portion XV is transmitted to the diaphragm valve body 31V through the stem 30V.

As explained above, according to the fluid control valve 3V of the present invention, (1) the fluid control valve 3V that slides the piston 11V by the pressure of the operating fluid and makes the diaphragm valve body 31V abut or leave the valve seat 32V, It is characterized in that it has a first piston 11AV and a second piston 11BV on the coaxial; a first compression spring 12AV that imparts potential energy in the direction of the diaphragm valve body 31V abutting the valve seat 32V is coaxially mounted on the first piston 11AV; A second compression spring 12BV that imparts potential energy in a direction in which the diaphragm valve body 31V abuts against the valve seat 32V is coaxially mounted on the second piston 11BV. Therefore, the first compression spring 12AV and the second compression spring 12BV are mounted in parallel to each other. Since the first piston 11AV and the second piston 11BV can reduce the width of the fluid control valve 3V, the size can be reduced. This can reduce the overall installation area.

<Reference Example of Fluid Control Valve>

The same shape piston 11V can also be applied to NO type fluid control valve. FIG. 50 is a cross-sectional view of a reference example of a fluid control valve 4V (the aforementioned fluid control valves 17 to 19). Compared with NC type fluid control valves 1V, 2V, and 3V, the point at which the compression spring 12V does not give potential energy to the direction in which the valve body 18V abuts the valve seat 14aV, and the compression spring 12V does not depend on multiple pistons 11V The mounting points for each piston are also different. In addition, the structures common to the above-mentioned embodiment are given the same reference numerals as the above-mentioned embodiment in the drawings, and description thereof is omitted.

In the fluid control valve 4V, compared with the NC type fluid control valve 1V, 2V, and 3V, the piston portion 11aV of the piston 11V is mounted on the upper portion, and The piston rod 11bV is mounted on the lower portion. The compression spring 12AV is attached only to the first piston 11AV arranged at the bottom. One end of the compression spring 12AV is in contact with the first piston 11AV, and the other end of the compression spring 12AV is in contact with a 35V part attached to the adapter 15V. The compression spring 12AV imparts potential energy in a direction in which the valve body 18V leaves the valve seat 14aV. Therefore, the piston 11V of the same shape can be used not only for the NC type but also for the NO type.

In addition, among the NO type fluid control valves, only one compression spring 12AV is used in the fluid control valve 4V of the reference example, but when a plurality of pistons are used, one compression spring 12V can be mounted on one piston 11V. For example, in the fluid control valve 4V of the reference example, a compression spring 12V may be mounted on each of the pistons 11AV to 11FV.

In addition, this embodiment is merely a mere illustration, and is not intended to limit the present invention. Therefore, it is needless to say that the present invention can be variously improved and modified without departing from the gist thereof.

For example, in the above embodiment, two pistons 11V are superimposed, and in other embodiments, six pistons 11V are superimposed, but several pistons 11V may be superimposed.

For example, in the above embodiment, air is used as the operating fluid, but the operating fluid may be an inert gas.

<Flow path in valve installation block>

FIG. 51 is a cross-sectional view showing the periphery of a flow path in the valve mounting block 60. An inlet flow path 14bV into which the process gas or flushing gas flows in, an outlet flow path 14cV from which the process gas or flushing gas flows, and a mounting hole 14dV (valve connected to the inlet flow path 14bV and the outlet flow path 14cV) are formed in the valve installation block 60 room).

The inlet flow path 14bV is connected to the connection flow path through the outlet port 23b twenty three. The outlet flow path 14 cV is connected to a supply-side internal gas line 27 via a process gas supply port 26. Further, the valve body 18V of the fluid control valve 19 leaves and abuts against the valve seat 14aV, thereby driving and communicating with and blocking the mounting hole 14dV and the outlet flow path 14cV. That is, on the upstream side of the blocking portion, a large-volume and complicated-shaped mounting hole 14dV and a telescopic hose 17V are arranged. With this configuration, in a state where the valve body 18V blocks the mounting hole 14dV and the outlet flow path 14cV, the amount of gas remaining between the supply-side internal gas line 27 on the downstream side of the blocking portion and the valve body 18V can be reduced. .

FIG. 52 is a sectional view showing the periphery of a flow path in the valve mounting block 40. An inlet flow path 14bV (first inlet flow path) into which the process gas (first fluid) flows, and an outlet flow path 14cV (first outlet flow path) into which the process gas flows out are formed in the valve mounting block 40 (on the left in the figure). ), A mounting hole 14dV (first valve chamber) communicating with the inlet flow path 14bV and the outlet flow path 14cV. An inlet flow path 14bV (second inlet flow path) into which the flushing gas (second fluid) flows, and an outlet flow path 14cV (second outlet) through which the flushing gas flows out are formed in the valve mounting block 40 (right side in the figure). Flow path), and a mounting hole 14dV (second valve chamber) communicating with the inlet flow path 14bV and the outlet flow path 14cV.

The left inlet flow path 14bV is connected to the connection flow path 21 through the outlet port 21b. The outlet flow path 14cV is connected to the connection flow path 22 through the inlet port 22a. The right inlet flow path 14bV is connected to the internal flushing gas line 25 via a flushing gas supply port 24. The outlet flow path 14cV is connected to the connection flow path 22 through the inlet port 22a. The two outlet flow paths 14cV are in communication with each other.

Moreover, in the left side of the same figure, the valve body 18V of the fluid control valve 17 (one of the fluid control valves) leaves and abuts against the valve seat 14aV, thereby driving The opening 14dV (first valve chamber) and the outlet flow path 14cV (first outlet flow path) are communicated and blocked. Also, in the right side of the same figure, the valve body 18V of the fluid control valve 18 (other fluid control valve) leaves and abuts against the valve seat 14aV, thereby driving the mounting hole 14dV (the second valve chamber) and the outlet flow path. 14cV (second outlet flow path) is connected and blocked.

That is, a large-volume and complicated-shaped mounting hole 14dV and a telescopic hose 17V are arranged upstream of the blocking portion. With this configuration, in the state where the fluid control valves 17, 18 on both sides block the mounting hole 14dV and the outlet flow path 14cV of the valve body 18, the amount of gas trapped on the downstream side of the blocking portion can be reduced. Therefore, when the process gas and the flushing gas are switched, it is possible to reduce the amount of the gas remaining before the switching and the gas mixed after the switching.

In addition, as for the modification which is not specifically mentioned, it is a matter of course that it is also included in the technical scope of the present invention as long as it does not change the essential part of the present invention. In addition, among the elements constituting the means for solving the problems of the present invention, the elements expressing their functions and functions include the specific structures and their equivalents disclosed in the above-mentioned embodiments or modifications, as well as the means for realizing the same. Any composition of function and function.

Claims (27)

A fluid supply control device includes: a flow path block forming a flow path of a fluid inside, and a plurality of modules installed in the flow path block, characterized in that the plurality of the aforementioned modules include at least one The aforementioned flow path block is a loading and unloading module for mounting and dismounting, said flow path block is a connection of a pair of female screw parts which can be freely detachably mounted on said mounting block, and said flow path provided for connecting different said modules. The flow path is arranged in a substantially straight line along the alignment direction of the plurality of the aforementioned modules in the flow path block parallel to the flow direction of the fluid, and the plurality of the aforementioned modules arranged in the aforementioned alignment direction are formed integrally and inseparably. For example, the fluid supply control device according to claim 1, wherein the female screw portion is formed as a non-through hole opening on the surface in order to make the mounting and dismounting module mountable on the surface of the flow path block, and the connection flow path is formed. To bypass the female screw portion in the depth direction of the non-through hole. For example, the fluid supply control device of claim 1, wherein the plurality of the aforementioned modules include: a fluid control valve configured to switch the circulation and blocking of the aforementioned fluid, and a flow controller configured to control the circulation of the aforementioned fluid, The flow path block is formed with one of the female screw portions for freely attaching and detaching the fluid control valve as the attaching and detaching module, and freely attaching and detaching the flow controller as the attaching and detaching module. Install one pair of the aforementioned female screw portions. For example, the fluid supply control device of claim 2, wherein the plurality of the aforementioned modules include: a fluid control valve configured to switch the flow and block of the fluid, and a flow controller configured to control the flow of the fluid, The flow path block is formed with one of the female screw portions for freely attaching and detaching the fluid control valve as the attaching and detaching module, and freely attaching and detaching the flow controller as the attaching and detaching module. Install one pair of the aforementioned female screw portions. If the fluid supply control device of item 3 or 4 is requested, two actuators of the aforementioned fluid control valve are installed on the aforementioned flow path block through a common installation block. The fluid supply control device according to claim 5, wherein a first inlet flow path in which the first fluid flows in, a first outlet flow path in which the first fluid flows out, and the first inlet are formed inside the installation block. The first valve chamber of the flow path and the first outlet flow path, the second inlet flow path in which the second fluid flows in, the second outlet flow path in which the second fluid flows out, and the second inlet flow path and the first The second valve chamber of the 2 outlet flow path, in which one of the valve bodies of the fluid control valve is driven to communicate and block the first valve chamber and the first outlet flow path, and the other valve body of the fluid control valve is driven to communicate And blocking the second valve chamber and the second outlet flow path, and the first outlet flow path is in communication with the second outlet flow path. The fluid supply control device according to claim 5, wherein the width of the installation block is formed to be slightly the same as the width of the fluid control valve in a direction orthogonal to the alignment direction. For example, the fluid supply control device of claim 1, wherein the plurality of the aforementioned modules include: a fluid control valve configured to switch the circulation and blocking of the aforementioned fluid, and a flow controller configured to control the circulation of the aforementioned fluid, The flow channel block is formed to freely install one pair of the female screw portions of the flow controller as the loading and unloading module, and the fluid control valve may be integrated with the flow channel block without the female screw portion. . For example, the fluid supply control device of claim 2, wherein the plurality of the aforementioned modules include: a fluid control valve configured to switch the flow and block of the fluid, and a flow controller configured to control the flow of the fluid, The flow channel block is formed to freely install one pair of the female screw portions of the flow controller as the loading and unloading module, and the fluid control valve may be integrated with the flow channel block without the female screw portion. The fluid supply control device according to any one of claims 3, 4, 8, and 9, wherein the fluid control valve and the flow controller are collectively installed on an upper surface side of one surface of the flow path block. The fluid supply control device according to any one of claims 3, 4, 8, and 9, wherein the flow controller is provided on an upper surface side of one surface of the flow path block, and the fluid control valve is provided on the upper surface. It is the lower surface side of one of the opposite surfaces. For example, the fluid supply control device according to any one of claims 1 to 4, 8, and 9, wherein the flow channel block is configured to arrange a group of a plurality of the modules arranged in the direction of the arrangement, and install the modules in the arrangement. The direction is perpendicular to the width direction. For example, the fluid supply control device of claim 12, wherein the flow channel block is formed as a whole and includes a plurality of the aforementioned groups. The fluid supply control device according to claim 12, wherein the flow channel block may be divided and formed corresponding to each of the plurality of the aforementioned groups. The fluid supply control device according to any one of claims 3, 4, 8, and 9, wherein the aforementioned fluid control valve slides the piston by operating the pressure of the fluid, and causes the valve body to abut or leave the valve seat, and is coaxial with the valve body. A first piston and a second piston are provided as the piston, and a first compression spring that imparts potential energy to a direction in which the valve body abuts the valve seat is mounted on a coaxial shaft. 2 pistons, a second compression spring that imparts potential energy in a direction in which the valve body abuts the valve seat is mounted on a coaxial shaft. The fluid supply control device according to claim 15, wherein the first piston and the second piston have the same shape, and the first compression spring and the second compression spring have the same shape. The fluid supply control device according to claim 15, wherein the potential energy of the first compression spring and the potential energy of the second compression spring act as a force for causing the valve body to abut the valve seat. The fluid supply control device according to claim 15, which has a tube-shaped exterior member, and a cover is installed at one end of the aforementioned exterior member, an adapter is installed at the other end of the aforementioned exterior member, and The inside is filled with a cylindrical first internal component and a cylindrical second internal component. The first and second internal components are fixed inside the exterior member in an overlapping state. One end of the first compression spring is in contact with the first piston, the other end of the first compression spring is in contact with the second built-in component, one end of the second compression spring is in contact with the second piston, and the first 2 The other end of the compression spring is in contact with the cover. For example, the fluid supply control device of claim 18, wherein the cover body is provided with a supply and exhaust port for the operation fluid, and a flow path for the operation fluid is formed inside the first piston and the second piston, respectively. The air port communicates with the pressurizing chamber where the pressure of the operating fluid acts on the second piston and the pressurizing chamber where the pressure of the operating fluid acts on the first piston through the flow path. The fluid supply control device according to claim 18, wherein a recess is formed in each of the first piston and the second piston, and the lever is provided with the valve body at one end and the other end disposed at the recess of the first piston. One end of the first piston is disposed in the concave portion of the second piston. The fluid supply control device according to any one of claims 3, 4, 8, and 9, wherein the fluid control valve slides the piston by the pressure of the operating fluid and causes the valve body to abut or leave the valve seat, and the piston is coaxial There are four or more compression springs on the piston, and the compression springs that impart potential energy to the valve body in contact with the valve seat are respectively mounted on the coaxial. The fluid supply control device according to claim 21, wherein the total of the potential energy of the compression spring is a force that causes the valve body to abut the valve seat. The fluid supply control device according to claim 15, wherein the bracket is fixed on the upper part of the body forming the valve seat, and a telescopic hose is arranged between the valve body and the bracket. The fluid supply control device according to claim 15, wherein the bracket is fixed by welding on the upper part of the body forming the valve seat. The fluid supply control device according to claim 24, wherein the actuator portion having the aforementioned piston can be attached to and detached from the aforementioned bracket. The fluid supply control device according to claim 15, which has a tube-shaped exterior member. The fluid supply control device according to claim 26, wherein the upper surface of the cover body mounted on the front end of the exterior member has a one-touch joint.