JP4261559B2 - Air operated valve - Google Patents

Description

  The present invention relates to an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air.

  An air operated valve 1100 shown in FIG. 30 is an example of an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air.

  The air operated valve 1100 has an external appearance by attaching an actuator part 1110 to a body 1101 and further attaching a manual mechanism 1120 for forcibly driving the actuator part 1110 to the actuator part 1110.

  The body 1101 is provided with a valve seat 1104 between the primary side flow path 1102 and the secondary side flow path 1103. The diaphragm 1105 is nipped between the body 1101 and the holder 1106 by screwing an adapter 1107 through the holder 1106 into the body 1101. The stem 1108 is slidably loaded in the holder 1106 and is in contact with the back pressure surface of the diaphragm 1105. The actuator unit 1110 is screwed into the adapter 1107 so that the center rod 1118 abuts against the stem 1108 and is attached to the body 1101.

  In the actuator unit 1110, in order to ensure the pressure resistance of the operation air, components other than the O-ring are formed of a metal having rigidity such as stainless steel. The actuator portion 1110 constitutes a cylinder by screwing and connecting a hollow base 1111 and a cap 1112. The base 1111 and the cap 1112 sandwich and hold the partition plate 1113 to form a first piston chamber 1114 and a second piston chamber 1115 partitioned by the partition plate 1113. The first piston chamber 1114 and the second piston chamber 1115 are slidably loaded with the first piston 1116 and the second piston 1117, and are hermetically partitioned into pressurizing chambers 1114a and 1115a and back pressure chambers 1114b and 1115b.

  The center rod 1118 penetrates from the first piston 1116 through the partition plate 1113 to the second piston 1117 and is fixed to the first and second pistons 1116 and 1117. A compression spring 1119 is contracted in the back pressure chamber 1114b of the first piston chamber 1114, and the elastic force of the compression spring 1119 acts on the stem 1108 via the first piston 1116 and the center rod 1118, and the diaphragm 1105 is moved to the valve seat 1104. Abut.

  In the center rod 1118, a main channel 1118a is bored along the axis from the upper end surface to the vicinity of the center, and branch channels 1118b and 1118c are formed so as to be orthogonal to the main channel 1118a. The branch channels 1118b and 1118c are formed so as to communicate with the pressurizing chambers 1114a and 1115a. The center rod 1118 has an upper end located in an air supply / exhaust flow path 1112b formed in the cap 1112, and supplies operation air to the pressurizing chambers 1114a, 1115a via the flow paths 1118a, 1118b, 1118c, or adds air. Operation air is discharged from the pressure chambers 1114a and 1115a. On the other hand, a first breathing hole 1112a is formed in the cap 1112 so as to communicate with the back pressure chamber 1114b. The base 1111 is formed with a second breathing hole 1111a so as to communicate with the back pressure chamber 1115b. Therefore, in the actuator portion 1110, the center rod 1118 moves in the vertical direction in the drawing according to the balance between the elastic force of the compression spring 1119 and the pressure of the operation air acting on the pressurizing chambers 1114a and 1115a.

  In the air operated valve 1100 having such a configuration, when operating air is not supplied to the air supply / exhaust flow path 1112b, the elastic force of the compression spring 1119 is applied to the diaphragm 1105 via the first piston 1116, the center rod 1118, and the stem 1108. Acts to bring the diaphragm 1105 into contact with the valve seat 1104. In this case, the control fluid supplied to the primary flow path 1102 is blocked and does not flow from the valve seat 1104 to the secondary flow path 1103.

  On the other hand, when the operation air is supplied to the air supply / exhaust flow path 1112b and the internal pressure of the pressurizing chambers 1114a and 1115a overcomes the elastic force of the compression spring 1119, the center rod 1118 rises upward in the figure and moves from the stem 1108. Separate. The diaphragm 1105 is not pressurized in the valve seat direction, and is separated from the valve seat 1104 by its own reaction force. In this state, when the control fluid is supplied to the primary side flow path 1102, the control fluid flows from the primary side flow path 1102 to the secondary side flow path 1103 via the valve seat 1104.

  Thereafter, when operating air in the pressurizing chambers 1114a and 1115a is discharged from the air supply / exhaust flow path 1112b, the elastic force of the compression spring 1119 overcomes the internal pressure of the pressurizing chambers 1114a and 1115a, and the center rod 1118 descends. The center rod 1118 pressurizes the diaphragm 1105 in the valve seat direction via the stem 1108 and brings the diaphragm 1105 into contact with the valve seat 1104. As a result, the flow path is blocked and the control fluid supplied to the primary side flow path 1102 does not flow from the valve seat 1104 to the secondary side flow path 1103.

JP-A-2005-214231

  However, the conventional air operated valve 1100 has a cylinder formed by fitting screws of a base 1111 made of a highly rigid metal and a cap 1112 to form the first and second piston chambers 1114 and 1115. A large hollow portion was cut out on the base 1111 and the cap 1112. In addition, if the sliding surface on which the first and second pistons 1116 and 1117 slide is rough, the O-rings attached to the first and second pistons 1116 and 1117 are damaged, and the operating air is pressurized. Since this may cause leakage from the chambers 1114a and 1115a to the back pressure chambers 1114b and 1115b, the sliding surfaces of the base 1111 and the cap 1112 provided by cutting have been cut to further increase the surface roughness. As described above, the conventional air operated valve is costly because a large number of cutting processes are performed on the base 1111 and the cap 1112 that ensure pressure resistance using a metal material, and the metal material is wasted.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide an inexpensive air operated valve.

The air operated valve according to the present invention has the following configuration.
(1) In an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air, the cylinder is loaded into an exterior member having a hollow portion and a hollow portion of the exterior member And an interior member that forms a piston chamber in which the piston slides.

(2) In the invention described in (1), the interior member is formed in a hollow shape that opens to one side, and a plurality of interior parts in which a through hole for penetrating the piston rod of the piston is formed on the closed end surface are combined. The piston chamber is formed.

(3) In the invention described in (1) or (2), the interior member is any one of a resin molded product, an aluminum die cast molded product, and a lost wax molded product, and the exterior member is a drawing process or an extrusion process. It is characterized by being a metal pipe formed by.

(4) In the invention according to any one of (1) to (3), a conduction flow path for conducting the piston chamber to one breathing hole is provided between the interior member and the exterior member. It is characterized by.

(5) In the invention according to any one of (1) to (4), the piston is any one of a resin molded product, an aluminum die-cast molded product, and a lost wax molded product.

(6) In the invention described in (5), the piston is provided with a piston rod integrally, and a wear-resistant member having wear resistance is attached to a tip portion of the rod portion.

(7) In the invention according to any one of (1) to (6), the piston includes a main channel formed along an axial direction, and a branch channel provided to intersect the main channel. The flow path cross section of the branch flow path is characterized in that the horizontal dimension in the direction intersecting the main flow path is longer than the vertical dimension in the axial direction.

  The air operated valve of the present invention having the above-described configuration is divided into a function of sliding a piston and a function as a structure for ensuring pressure resistance against operation air, and the former function is achieved as a member for achieving the former function. An interior member is provided, and an exterior member is provided as a component that achieves the latter function. Therefore, the structure of the interior member is more complicated than that of the exterior member because it constitutes the piston chamber. Therefore, according to the air operated valve of the present invention, the materials can be appropriately used by using different materials for the exterior member and the interior member, and the cost can be reduced.

  In addition, the air operated valve of the present invention forms a piston chamber partitioned by the closed end face of the interior part connected continuously by abutting the open end face of the interior part with the open end face or the closed end face of another interior part. To do. The piston passes through a piston rod through a through hole provided in the closed end face of the interior part, and is allowed to slide in the piston chamber. Thus, it is possible to provide an interior member by providing one or two or more piston chambers by combining a plurality of interior parts. Therefore, according to the air operated valve of the present invention, it is possible to provide a plurality of piston chambers by sharing the interior parts, thereby reducing the cost.

  In the air operated valve of the present invention, the interior member is a resin molded product, an aluminum die cast molded product, or a lost wax molded product with a small number of cutting processes, and the exterior member is easily obtained by drawing or extrusion. Since the metal pipe is formed, the interior member and the exterior member can be manufactured at low cost to reduce the cost. In addition, since the interior member is loaded into the exterior member and the strength of the interior member is complemented by the exterior member, the cylinder can be made smaller by making the interior member thinner. Therefore, according to the air operated valve of the present invention, both reduction in size of the cylinder and cost reduction can be achieved.

  In addition, according to the air operated valve of the present invention, since there is a conduction channel for connecting the piston chamber to one breathing hole between the interior member and the exterior member, the number of processing for forming the breathing hole is minimized. Can be suppressed.

  Further, according to the air operated valve of the present invention, since the piston is any one of a resin molded product, an aluminum die cast molded product, and a lost wax molded product, the number of cutting processes in manufacturing the piston can be reduced and the cost can be reduced. In addition, the weight of the valve can be reduced.

  Further, according to the air operated valve of the present invention, the wear-resistant member is attached to the tip of the piston rod provided integrally with the piston, and the wear resistance and strength of the piston tip are increased. However, even when the driving force is transmitted by pushing the tip portion against the valve portion, the piston can be prevented from deteriorating.

  Further, according to the air operated valve of the present invention, the flow passage cross section of the branch flow passage for supplying the operation air flowing through the main flow passage to the piston chamber has a main flow passage that is longer than the longitudinal dimension in the axial direction, such as a rectangle or an ellipse. Since the horizontal dimension in the direction that intersects the channel has a longer shape, good responsiveness can be achieved by adjusting the vertical and horizontal widths in the cross section of the branch flow path to increase the cross section area of the branch flow path. Can be obtained.

  Next, an embodiment of an air operated valve according to the present invention will be described with reference to the drawings.

(First embodiment)
First, a first embodiment of the air operated valve of the present invention will be described. FIG. 1 is a cross-sectional view of an air operated valve 1A according to the first embodiment of the present invention. FIG. 2 is a top view of the air operated valve 1A shown in FIG.
The air operated valve 1A according to the first embodiment is characterized in that a cylinder wall has a double structure by loading a plurality of interior parts 22 on an exterior member 21.

<Overall configuration>
As shown in FIG. 1, the air operated valve 1 </ b> A according to the first embodiment includes a valve unit 2 that controls a control fluid and an actuator unit 3 </ b> A that applies a driving force to the valve unit 2. The air operated valve 1 </ b> A has a cylindrical appearance by connecting the actuator portion 3 </ b> A to the body 4 via the adapter 11.

  The valve unit 2 is built in the body 4. The body 4 is formed of a metal material having rigidity and heat resistance, such as stainless steel or aluminum, in a cylindrical shape. A primary side port 5 and a secondary side port 6 are provided on the lower surface of the body 4. On the other hand, a mounting hole 7 is formed in a cylindrical shape on the upper side surface of the body 4. A valve seat 8 is provided in an annular shape at the center of the bottom wall of the mounting hole 7, and the primary side port 5 and the secondary side port 6 communicate with each other through the valve seat 8.

  The valve portion 2 has an adapter 11 in which a diaphragm 9 is mounted in the mounting hole 7 of the body 4, the outer edge portion of the diaphragm 9 is pressed by the holder 10, and inserted between the inner peripheral surface of the mounting hole 7 and the outer peripheral surface of the holder 10. Is screwed into the body 4 so that the outer edge of the diaphragm 9 is held between the body 4 and the holder 10. The diaphragm 9 is made of a thin film made of resin or metal so that it can be deformed. The holder 10 and the adapter 11 are made of a metal having heat resistance and rigidity. The holder 10 is loaded with a stem 13 so as to come into contact with the diaphragm 9, and the driving force of the actuator portion 3 </ b> A is transmitted to the diaphragm 9 via the stem 13.

  The actuator portion 3A has a cylindrical shape as shown in FIGS. As shown in FIG. 1, the actuator portion 3A has a normally closed type air cylinder structure. The actuator unit 3A is configured by dividing a cylinder that houses the pistons 23 and 24 into a plurality of parts, specifically, an exterior member 21, an interior part 22, a base 25, and a cap 26A.

  As shown in FIG. 1, the actuator portion 3 </ b> A is configured by alternately loading interior parts 22 </ b> A, 22 </ b> B, 22 </ b> C and pistons 23, 24 on a pipe-shaped exterior member 21. It is attached. The interior parts 22 </ b> A, 22 </ b> B, and 22 </ b> C are fixed while being overlapped inside the exterior member 21, and form a first piston chamber 27 and a second piston chamber 28. The pistons 23 and 24 are slidably loaded in the first and second piston chambers 27 and 28, and the first and second piston chambers 27 and 28 are made into pressure chambers 27a and 28a and back pressure chambers 27b and 28b. Each is divided. A compression spring 29A is contracted in the back pressure chamber 28b of the second piston chamber 28, and a downward force (valve seat direction) in the figure is always applied to the pistons 23 and 24.

  Thus, the actuator part 3A is configured by combining the exterior member 21, the interior parts 22A, 22B, and 22C, the pistons 23 and 24, the base 25, and the cap 26A that are individually provided. The actuator portion 3A is fixed to the body 4 via the adapter 11. Therefore, the pistons 23 and 24 may not be arranged coaxially with respect to the valve seat 8 depending on the dimensions of parts and assembly variations. However, the pistons 23 and 24 transmit driving force to the diaphragm 9 via the columnar stem 13. Therefore, even when the position where the piston 23 abuts on the stem 13 is slightly deviated from the axis, the stem 13 is in surface contact with the diaphragm 9 and transmits the driving force in a distributed manner. It can be brought into close contact with a uniform force in the circumferential direction.

  In addition, since the actuator part 3A forms the first and second piston chambers 27 and 28 in which the pistons 23 and 24 slide by the interior parts 22A, 22B and 22C, the interior parts 22A, 22B and 22C Is configured.

  The air operated valve 1A is supplied and exhausted with operating air through a supply / exhaust port 85 provided at the center of the upper end surface of the cap 26A. The supply / exhaust port 85 communicates with the pressurizing chambers 27a, 28a of the first and second piston chambers 27, 28 via internal flow paths (described later) formed in the pistons 23, 24. Further, the air operated valve 1A has a breathing hole in which back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 are formed in the adapter 11 between the exterior member 21 and the interior components 22A, 22B, 22C. A plurality of conduction channels 31 for communicating with 12 are formed. Therefore, in the air operated valve 1A, the pistons 23 and 24 move in the axial direction according to the balance between the elastic force (repulsive force) of the compression spring 29A and the internal pressure of the pressurizing chambers 27a and 28a, and the valve portion 2 The driving force can be transmitted to.

  Next, components constituting the cylinder of the air operated valve 1A will be described.

<Piston configuration>
FIG. 3 is a central longitudinal sectional view of the first piston 23 and the second piston 24 shown in FIG.
Pistons 23 and 24 are made by injection-molding a heat-resistant and lightweight resin such as PPS (polyphenylene sulfide), PBT (polybutylene terephthalate), POM (polyacetal), PA (polyamide), PVDF (polyvinyl fluoride), etc. It is a molded product.

  The piston 23 is formed by integrally forming a piston rod 42 and a piston rod 43 in the piston portion 41. The piston portion 41 has a columnar shape, and the outer diameter dimension is substantially the same as the inner diameter dimension of the interior part 22. A mounting groove 44 for mounting a sealing member 33 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided in the piston portion 41 along the outer peripheral surface. The piston rods 42 and 43 also have mounting grooves 45 and 46 for mounting sealing members 32 and 34 (see FIG. 1) such as O-rings made of an elastic material such as rubber or resin along the outer peripheral surface. It is provided in a ring shape.

  As shown in FIGS. 1 and 3, the piston 23 is provided with an internal channel in which a main channel 47 and a branch channel 48 are formed in a T shape. The main flow path 47 is formed from the center of the end face of the piston rod 43 to the branch flow path 48 along the axis. The branch channel 48 corresponds to the pressurizing chamber 27 a and is provided between the mounting groove 45 of the piston rod 42 and the base end portion where the piston rod 42 connects to the piston portion 41. The branch channel 48 is formed so as to penetrate in the radial direction of the piston rod 42. The branch channel 48 has a rectangular shape with a wide cross section.

  On the other hand, the piston 24 is obtained by integrally forming a piston rod 52 in the piston portion 51. The piston portion 51 has a cylindrical shape, and the outer diameter dimension is substantially the same as the inner diameter dimension of the interior part 22. A mounting groove 53 for mounting a sealing member 35 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided in the piston portion 51 along the outer peripheral surface. The piston rod 52 is also provided with a mounting groove 54 for mounting a seal member 36 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin, along the outer peripheral surface. Yes.

  As shown in FIGS. 1 and 3, the piston 24 is provided with an internal flow path in which a main flow path 55 and a branch flow path 56 are formed in a T shape. The main channel 55 is formed from the center of the end surface of the piston portion 51 to the branch channel 56 along the axis. The branch flow path 56 corresponds to the insertion hole 81 of the cap 26 </ b> A, and is provided on the distal end side from the mounting groove 53 of the piston rod 52. The branch flow path 56 is formed so as to penetrate in the radial direction of the piston rod 52. The branch channel 56 has a rectangular shape with a wide cross section.

The piston 24 is provided with a fitting recess 57 concentrically with the main channel 55 at the opening of the main channel 55. A communication passage 58 is formed in a band shape on the bottom wall of the fitting recess 57, and a part of the operation air flowing through the main flow path 55 is guided to the fitting recess 57 via the communication passage 58.
The piston 24 is provided with a guide portion 59 by expanding the base end portion of the piston rod 24. The guide portion 59 is inserted into the compression spring 29A and is provided to stably expand and contract the compression spring 29A in the axial direction.

  Such pistons 23 and 24 are configured such that the piston rod 43 of the piston 23 is fitted into the fitting recess 57 of the piston 24 and the end surfaces thereof are brought into contact with each other, thereby causing the main flow path 55 of the piston 24 and the main flow path 47 of the piston 23 to Communicate.

<Composition of interior parts>
Interior parts 22A, 22B, and 22C shown in FIG. 1 are resin molded products obtained by injection molding a resin having heat resistance and rigidity, such as PPS, PBT, POM, PA, and PVDF. Since the interior parts 22A, 22B, and 22C have the same shape, the interior part 22B will be described here for convenience of description, and the description of the interior parts 22A and 22C will be omitted.

  As shown in FIG. 1, the interior part 22 </ b> B has a bag shape. The interior part 22B has a side surface formed in a cylindrical shape, and is provided with a closed end surface so as to close one end opening of the side surface. The interior part 22 </ b> B has an outer diameter that is substantially the same as the inner diameter of the exterior member 21, and the inner diameter of the side surface corresponds to the piston portion 51. The side surface of the interior component 22B is supported by being in contact with and supported by the inner peripheral surface of the exterior member 21 when the interior component 22B is loaded on the exterior member 21. On the other hand, the closed end face of the interior part 22B includes a partition plate that partitions the hollow portion of the exterior member 21 to form the first and second piston chambers 27 and 28 when the interior part 22B is loaded into the exterior member 21. Therefore, it is made thick so as to ensure pressure resistance against the operation air.

FIG. 4 is an external perspective view of the interior component 22B shown in FIG.
The interior part 22 </ b> B is provided with a through hole 61 for passing through the piston rod 43 of the piston 23 at the center of the closed end surface. An annular groove 62 is formed concentrically with the through hole 61 on the outer surface of the closed end face. A plurality of guide grooves 63 are formed on the outer surface of the closed end surface so as to be longer in the outer diameter direction from between the through hole 61 and the annular groove 62. A D-cut passage 64 is formed on the outer peripheral surface of the interior part 22 </ b> B in parallel with the axis so as to continue from the guide groove 63. The interior part 22 </ b> B has a notch 65 formed so as to be continuous with the D-cut passage 64 at the opening end of the side surface.

<Configuration of exterior member, base, cap>
As shown in FIG. 1, the base 25 and the cap 26 </ b> A are caulked and fixed at both ends of the exterior member 21 to configure the appearance of the actuator portion 3 </ b> A. The exterior member 21, the base 25, and the cap 26A surround the interior parts 22A, 22B, and 22C to supplement the strength of the interior parts 22A, 22B, and 22C.

5 is a cross-sectional view showing the relationship among the cap 26A, the base 25, and the exterior member 21 shown in FIG.
The exterior member 21 has a cylindrical shape with both ends open. The exterior member 21 is formed by forming a metal having rigidity such as stainless steel into a thin pipe shape by drawing or extruding, and cutting the drawn tube or the extruded tube to a predetermined length. The total length of the exterior member 21 is determined by how many piston chambers are provided by overlapping the interior components 22. Further, the thickness of the exterior member 21 is determined in consideration of pressure resistance against the operation air. In the first embodiment, it is 0.5 mm.

<Base cap>
The base 25 and the cap 26A close both ends of the exterior member 21 so that the interior components 22A, 22B, and 22C are stacked and housed in the exterior member 21 against the elastic force of the compression spring 29A. A space (gap) is formed inside. The cap 26A and the base 25 abut against the closed end surfaces of the interior parts 22A and 22C and support the interior parts 22A and 22C. Therefore, the base and cap 26A have a cylindrical shape made of a rigid metal such as stainless steel or aluminum.

  The base 25 has a columnar shape whose outermost diameter is the same as or larger than the outer diameter of the exterior member 21, and is provided with a connecting hole 71 penetrating in the center. A female screw for screwing a male screw provided on the outer peripheral surface of the adapter 11 is formed on the inner peripheral surface of the connecting hole 71. On one end surface of the base 25, a positioning recess 72 for positioning the interior component 22A is provided coaxially with the connecting hole 71. A press-fitting portion 73 having a press-fitting allowance is provided on the outer periphery of the end surface where the positioning recess 72 is formed in order to press-fit the open end portion of the exterior member 21. Further, on the outer peripheral surface of the base 25, a caulking groove 74 for caulking the end portion of the exterior member 21 to deform inward is formed inside the press-fit portion 73.

  The cap 26 </ b> A has a columnar shape whose outermost diameter is the same as or larger than the outer diameter of the exterior member 21. In the cap 26A, an insertion hole 81 is formed in a columnar shape at the center of one end surface. The insertion hole 81 is formed so that the piston rod 25 of the piston 24 can be inserted without contact. A mounting groove 82 for mounting a sealing member 37 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided around the insertion hole 81 on one end surface of the cap 26A. Yes. The mounting groove 82 corresponds to the annular groove 62 of the interior part 22C. A press-fitting portion 83 having a press-fitting allowance is provided on the outer periphery of one end surface of the cap 26 </ b> A in order to press-fit the open end portion of the exterior member 21. A caulking groove 84 is formed on the outer peripheral surface of the cap 26 </ b> A in an annular shape inside the press-fit portion 83 for caulking the end portion of the exterior member 21 and deforming it inward. Such a cap 26 </ b> A is provided with a supply / exhaust port 85 so as to communicate with the insertion hole 81 from the center of the other end surface.

<How to assemble an air operated valve>
Next, an example of a method for assembling the air operated valve 1A including the above components will be described.
First, the valve seat 8 is fixed to the mounting hole 7 of the body 4, and the diaphragm 9 is set in the mounting hole 7. Then, the holder 10 is inserted into the mounting hole 7 of the body 4 so as to hold the outer edge of the diaphragm 9, and the stem 13 is fitted into the holder 10, and then the adapter 11 is screwed into the body 4 and fixed. Thereby, the valve part 2 is assembled.

  Then, the actuator unit 3A is assembled. Seal members 32, 33, 34, 35, and 36 are mounted in the mounting grooves 44, 45, 46, 53, and 54 of the pistons 23 and 24, respectively. Then, the press-fit portion 73 of the base 25 is press-fitted into the one end opening of the exterior member 21. Then, the exterior member 21 is loaded with the interior component 22A, the piston 23, the interior component 22B, the piston 24, the compression spring 29A, and the interior component 22C. Then, the press-fit portion 83 of the cap 26A is press-fitted into the other end opening of the exterior member 21 so as to crush the seal member 37 between the annular groove 62 of the interior part 22C and the mounting groove 82 of the cap 26A. At this stage, the interior parts 22A, 22B, 22C, the pistons 23, 24, and the compression spring 29A are temporarily held in the exterior member 21. Then, both end portions of the exterior member 21 are fixed by caulking along the caulking grooves 74 and 84 of the base 25 and the cap 26A.

  Thereafter, the actuator part 3 </ b> A is connected to the valve part 2. That is, the adapter 11 screwed on the body 4 is screwed into the connection hole 71 of the base 25. At this time, the piston rod 42 of the piston 23 hits the stem 13, and the elastic force of the compression spring 29 </ b> A acting on the pistons 23, 24 is transmitted to the diaphragm 9 via the stem 13, and the diaphragm 9 is brought into contact with the valve seat 8. . This completes the assembly.

<Channel structure>
The flow path structure of the air operated valve 1A assembled as described above will be described. FIG. 6 is a diagram showing the flow path structure of the air operated valve 1A shown in FIG.
The air supply / exhaust port 85 is connected to the pressurizing chamber 27a of the first piston chamber 27 through the insertion hole 81 of the cap 26A, the branch channel 56 of the piston 24, the main channel 55, the main channel 47 of the piston 23, and the branch channel 48. Communicate. The air supply / exhaust port 85 communicates with the pressurizing chamber 28a of the second piston chamber 28 through the insertion hole 81 of the cap 26A, the branch channel 56 of the piston 24, the main channel 55, the communication channel 58, and the fitting recess 57. is doing.

  As described above, in the air operated valve 1A, the flow paths 47, 48, 55, and 56 provided in the pistons 23 and 24 form a flow path for supplying and exhausting operation air to and from the pressurizing chambers 27a and 28a. .

  Further, the air operated valve 1A causes the back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 to be connected to one breathing hole 12 provided in the adapter 11, as indicated by dot hatching in the drawing. The conduction channel 31 is provided.

  The interior parts 22A, 22B, and 22C form a space with the exterior member 21 by the D-cut passage 64 formed on the outer peripheral surface. The back pressure chamber 27b of the first piston chamber 27 communicates with the space provided by the D-cut passage 64 of the interior part 22A via the notch 65 of the interior part 22A and the guide groove 63 of the interior part 22B. The back pressure chamber 28b of the second piston chamber 28 communicates with a space provided by the D-cut passage 64 of the interior parts 22B and 22C via a notch 65 provided in the interior parts 22B and 22C.

  A gap is formed between the closed end face of the interior part 22A and the base 25 by an annular groove 62 and a guide groove 63 provided in the interior part 22A. The gap communicates with a space formed between the interior parts 22A, 22B, 22C and the exterior member 21, and communicates with a hollow hole provided in the adapter 11. A breathing hole 12 is formed in the adapter 11 so as to communicate with the hollow hole.

  As described above, the air operated valve 1A includes a space formed between the interior parts 22A, 22B, and 22C, a space formed between the interior parts 22A, 22B, and 22C and the exterior member 21, and the interior part 22A. A space formed between the base 25 and the base 25 forms a conduction channel 31 for communicating the back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 to the breathing hole 12 of the adapter 11. .

<Operation of air operated valve>
Next, the operation of the air operated valve 1A according to the first embodiment will be described.
As shown in FIG. 2, the air operated valve 1A is installed and fixed by inserting a bolt (not shown) through a mounting hole 14 provided in the body 4 and fastening the bolt to a mounting plate or a semiconductor manufacturing apparatus. Is done. In the air operated valve 1A, the supply / exhaust port 85 is connected to a supply / exhaust control device (not shown) via a supply / exhaust pipe (not shown), and the supply / exhaust of operation air is controlled.

  In the air operated valve 1A, when operating air is not supplied to the air supply / exhaust port 85, the pistons 23 and 24 are pushed down toward the valve seat by the elastic force of the compression spring 29A, and the diaphragm 9 is moved to the valve seat 8 via the stem 13. Make contact. Therefore, the control fluid supplied to the primary side port 5 does not flow from the valve seat 8 to the secondary side port 6.

  Thereafter, when operating air is supplied to the air supply / exhaust port 85, the operating air is added to the first piston chamber 27 via the branch flow path 56, the main flow path 55, the main flow path 47, and the branch flow path 48 of the piston 23. It is supplied to the pressure chamber 27a. Further, the operation air is supplied to the pressurizing chamber 28 a via the branch flow path 56, the main flow path 55, the communication path 58, and the fitting recess 57 of the piston 24. When the pressurizing chambers 27a and 28a are pressurized and overcome the elastic force of the compression spring 29A, the pistons 23 and 24 rise smoothly in the upward direction in the figure (the direction opposite to the valve seat 8), and the piston rod 42 is moved to the stem 13 Separate from. As a result, the diaphragm 9 is not pressurized in the valve seat direction and is separated from the valve seat 8 by its own reaction force. When the control fluid is supplied to the primary port 5 in this state, the control fluid flows from the primary port 5 to the secondary port 6 through the valve seat 8.

  After that, when the operating air of the pressurizing chambers 27a and 28a is discharged from the air supply / exhaust port 85 and the elastic force of the compression spring 29A becomes larger than the internal pressure of the pressurizing chambers 27a and 28a, the pistons 23 and 24 descend and the piston rod 42 is abutted against the stem 13, and a force in the valve seat direction is applied to the diaphragm 9 through the stem 13. As a result, the diaphragm 9 contacts the valve seat 8 to block the flow path, and the control fluid does not flow from the valve seat 8 to the secondary side port 6.

<Effect>
Therefore, the air operated valve 1A of the first embodiment achieves the former function by dividing the function of the cylinder into a function of sliding the piston and a function as a structural body such as ensuring pressure resistance against operating air. The interior parts 22A, 22B, and 22C are provided as members to perform, and the exterior member 21 is provided as a part that achieves the latter function. Therefore, the structure of the interior parts 22A, 22B, and 22C is more complicated than that of the exterior member 21 by the amount constituting the first and second piston chambers 27 and 28. Therefore, according to the air operated valve 1A of the first embodiment, the exterior member 21 and the interior member 22A, such as using an expensive material for the exterior member 21 and using an inexpensive material for the interior members 22A, 22B, 22C, etc. By using different materials for 22B and 22C, the material can be used appropriately and the cost can be reduced.

  In addition, the air operated valve 1A of the first embodiment has the opening end surfaces of the interior parts 22A, 22B, and 22C as the openings of the other interior parts 22A, 22B, and 22C without providing a separate partition plate as in the prior art. The first and second piston chambers 27 and 28 partitioned by the closed end surfaces of the interior parts 22A, 22B, and 22C are formed by overlapping the end surfaces or the closed end surfaces. The pistons 23 and 24 are allowed to slide in the first and second piston chambers 27 and 28 through the piston rods 42, 43 and 52 through the through holes 61 provided in the closed end surfaces of the interior parts 22A, 22B and 22C. The As described above, the first and second piston chambers 27 and 28 can be provided by combining the plurality of interior parts 22A, 22B, and 22C to constitute an interior member. Therefore, according to the air operated valve 1A of the first embodiment, the interior parts 22A, 22B, and 22C can be shared, and the first and second piston chambers 27 and 28 can be provided, thereby reducing the cost. .

  In the air operated valve 1A of the first embodiment, since the interior parts 22A, 22B, and 22C are resin molded products by injection molding, the processing time and the number of cutting processes are small, and the pistons 23 and 24 are in sliding contact. The surface roughness of the side inner wall can be easily improved without performing cutting or the like, and the processing cost is low. On the other hand, since the exterior member 21 is a metal pipe that is easily formed by drawing or extrusion, the interior components 22A, 22B, 22C and the exterior member 21 can be manufactured at low cost. In addition to this, the air operated valve 1A loads the interior parts 22A, 22B, and 22C into the exterior member 21, and supplements the strength of the interior parts 22A, 22B, and 22C with the exterior member 21, so the interior parts 22A and 22B The side can be made thinner and smaller. Therefore, according to the air operated valve 1A of the first embodiment, the interior parts 22A, 22B, and 22C are reduced while reducing the size of the cylinder by thinning the side surfaces of the exterior member 21 and the interior parts 22A, 22B, and 22C. And the processing cost of the exterior member 21 can be suppressed, and cost reduction can be aimed at.

  In the air operated valve 1A of the first embodiment, the interior parts 22A, 22B, and 22C are made of resin, and the exterior member 21, the base 25, and the cap 26A that support the interior parts 22A, 22B, and 22C are rigid metals. Therefore, the weight can be reduced compared to the conventional air operated valve 1100 in which the cylinder is entirely made of metal. Specifically, the air operated valve 1A of the first embodiment was able to reduce the valve weight by 10% compared to the conventional air operated valve 1100 excluding the manual mechanism 1120.

  In the air operated valve 1A of the first embodiment, both ends of the pipe-shaped exterior member 21 are caulked and fixed to the columnar base 25 and the cap 26A so as to support the interior parts 22A, 22B, and 22C. Therefore, unlike the conventional air operated valve 1100, it is not necessary to perform cutting or the like for providing a hollow portion on the base 25 and the cap 26A, and the cost can be reduced. Moreover, the exterior member 21 can be made thin as long as the pressure resistance against the operation air can be secured. Therefore, the air operated valve 1A of the first embodiment can increase the piston diameters of the pistons 23 and 24 without changing the outer diameter of the actuator part 1110 constituting the conventional air operated valve 1100. Thereby, the spring load of the compression spring 29A can be increased to improve the sealing performance. That is, it is possible to control a control fluid having a larger pressure.

  Further, the air operated valve 1A of the first embodiment includes the back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 between the interior components 22A, 22B, 22C and the exterior member 21. Since it has the conduction | electrical_connection flow path 31 connected with the respiratory hole 12, the processing number which forms the respiratory hole 12 can be suppressed to the minimum.

  In addition, since the air operated valve 1A of the first embodiment is a resin molded product in which the piston is injection-molded, it is possible to reduce the cost by reducing the number of cutting operations at the time of manufacturing the piston. The weight can be reduced.

  Further, in the air operated valve 1A of the first embodiment, the flow passage section of the branch flow passage 48 that supplies the operation air flowing through the main flow passage 47 to the pressurizing chamber 27a of the first piston chamber 27 is rectangular. When the valve is downsized, the width (height) in the axial direction of the pressurizing chamber 27a is reduced accordingly. When the flow channel cross section of the branch flow channel 48 is round, the diameter of the flow channel cross section is limited to the height of the pressurizing chamber 27a, and the flow channel cross-sectional area is difficult to expand. However, in the air operated valve 1A of the first embodiment, if the cross-sectional width of the branch flow channel 48 is increased, the cross-sectional area of the flow channel is not limited to the height of the pressurizing chamber 27a. Can be spread. Specifically, when the axial width of the branch channel 48 can be only 1 mm, a rectangular channel having a vertical width of 1 mm and a horizontal width of 2.5 mm is used instead of the branch channel 48 having a circular channel cross section having a diameter of 1 mm. The cross section can secure a flow path cross-sectional area approximately three times larger. Therefore, according to the air operated valve 1A of the first embodiment, the operation air can be efficiently supplied to and exhausted from the pressurizing chamber 27a via the branch flow path 48, and good responsiveness can be maintained. Moreover, the air operated valve 1A of the first embodiment does not require an increase in the total length of the piston 23 or an increase in the volume of the pressurizing chamber 27a in order to increase the flow path cross-sectional area.

(Second Embodiment)
Next, a second embodiment of the air operated valve of the present invention will be described. FIG. 7 is a cross-sectional view of an air operated valve 1B according to the second embodiment of the present invention.
In the air operated valve 1B of the second embodiment, several components of the air operated valve 1A of the first embodiment are changed, and the exterior member 21 and the interior components 22A, 22B, and 22C are turned upside down together with the pistons 23 and 24. Thus, the feature is that the normally closed type actuator unit 3A is changed to the normally open type actuator unit 3B. Therefore, the air operated valve 1B of the second embodiment has many parts in common with the air operated valve 1A of the first embodiment. Therefore, here, it demonstrates centering on the point which is different from 1st Embodiment, attaches | subjects a common point to drawing, and omits description suitably.

<Overall configuration>
In the air operated valve 1B, an interior component 22C, a piston 24, an interior component 22B, a piston 23, and an interior component 22A are stacked on the exterior member 21 in order from the lower side, and the upper and lower ends of the exterior member 21 are connected to the cap 26A and the base 25. The actuator portion 3B is configured by caulking and fixing. In the air operated valve 1 </ b> B, a compression spring 29 </ b> B is contracted in the back pressure chamber 28 b of the second piston chamber 28. Since the compression spring 29B only needs to secure a force necessary for separating the piston 24 from the stem 13, a compression spring 29B having a smaller elastic force than the compression spring 29A of the first embodiment is used. In such an air operated valve 1B, the pistons 23 and 24 are pushed up by the elastic force of the compression spring 29B, and the piston rod 52 is separated from the stem 13. Therefore, the diaphragm 9 is not given a force in the valve seat direction.

  The piston 23 is inserted into the insertion hole 81 of the cap 26 </ b> A in a state where the piston rod 42 does not mount the seal member 32 in the mounting groove 45. Therefore, a clearance is provided between the outer peripheral surface of the piston rod 42 and the inner peripheral surface of the insertion hole 81, and the air supply / exhaust port 85 communicates with the pressurizing chamber 27 a of the first piston chamber 27 through the clearance. ing.

  On the other hand, in the piston 24, a stop plug 90 having a spherical shape of a steel ball or an elastic member is press-fitted into the main flow path 55, and the main flow path 55 is hermetically closed. Therefore, the air supply / exhaust port 85 of the cap 26 </ b> A is connected to the pressurizing chamber of the second piston chamber 28 from the insertion hole 81 through the branch flow path 48 of the piston 23, the main flow path 47, the communication path 58 of the piston 24, and the fitting recess 57. It communicates with 28a.

  In the air operated valve 1B, a plurality of conduction channels are provided between the interior parts 22A, 22B, 22C and the exterior member 21 by the D-cut passages 64 formed on the outer peripheral surfaces of the interior parts 22A, 22B, 22C. 31 is formed, and the back pressure chambers 27 b and 28 b of the first and second piston chambers 27 and 28 are connected to the breathing hole 12.

<Operation of air operated valve>
In such an air operated valve 1B, when operating air is not supplied to the air supply / exhaust port 85, the piston 24 and the piston 23 are pushed up by the elastic force of the compression spring 29B. Therefore, the diaphragm 9 is not pressurized in the valve seat direction via the stem 13 and is separated from the valve seat 8 by its own reaction force. When the control fluid is supplied to the primary port 5 in this state, the control fluid supplied to the primary port 5 flows to the secondary port 6 through the valve seat 8.

  On the other hand, when operating air is supplied to the air supply / exhaust port 85, the operating air is supplied from the insertion hole 81 to the pressurizing chamber 27a of the first piston chamber 27, and the branch flow of the piston 23 from the insertion hole 81. The pressure is supplied to the pressurizing chamber 28a of the second piston chamber 28 through the passage 48, the main channel 47, the communication passage 58 of the piston 24, and the fitting recess 57, and the pressurizing chambers 27a and 28a are pressurized. When the internal pressure of the pressurizing chambers 27a and 28a overcomes the elastic force of the compression spring 29B, the pistons 23 and 24 descend, the piston rod 52 of the piston 24 abuts on the stem 13, and the valve seat is placed on the diaphragm 9 via the stem 13. Apply direction force. When the diaphragm 9 comes into contact with the valve seat 8, the control fluid does not flow from the primary side port 5 to the secondary side port 6 via the valve seat 8.

  After that, when the operation air of the pressurizing chambers 27a and 28a is discharged from the air supply / exhaust port 85 and the elastic force of the compression spring 29B overcomes the internal pressure of the pressurizing chambers 27a and 28a, the pistons 23 and 24 rise and the stem 13 Separate from. The diaphragm 9 is not pressurized in the valve seat direction, and is separated from the valve seat 8 by its own reaction force. Therefore, when the control fluid is supplied to the primary side port 5, the control fluid flows from the primary side port 5 to the secondary side port 6 through the valve seat 8.

<Effect>
Therefore, according to the air operated valve 1B of the second embodiment, the interior parts 22A, 22B, 22C forming the first and second piston chambers 27, 28 are loaded in the hollow portion of the exterior member 21, and the cylinder Since the wall has a double structure, the cost can be reduced similarly to the air operated valve 1A of the first embodiment.

  Further, the air operated valve 1B of the second embodiment applies a driving force to the valve portion by moving the piston in the cylinder using operating air, and is loaded into the hollow portion of the exterior member 21. By reversing the interior members (interior parts 22A, 22B, 22C) in the axial direction, the normal open type and the normal close type are changed. As described above, the air operated valve 1B uses the interior members (interior parts 22A, 22B, 22C) in common and changes between the normal open type and the normal close type, so that it is normal like the conventional air operated valve 1100. There is no need to stock an open type base or cap, or a normally closed type base or cap. Therefore, according to the air operated valve 1B of the second embodiment, the valve components can be shared between the normally open type and the normally closed type, and the cost can be reduced.

  Further, in the air operated valve 1B of the second embodiment, the compression springs 29A and 29B having different elastic characteristics are changed between the normal close type and the normal open type, so that the valve closing force of the normal open type and the normal close type is used. Can be equivalent.

  Further, in the air operated valve 1B of the second embodiment, the piston 23 is formed with the main flow path 47 along the axis, and the branch flow path 48 is formed so as to be orthogonal to the main flow path 47. The main flow path 55 is formed along the axis, the branch flow path 56 is formed so as to be orthogonal to the main flow path 55, and a stopper plug 90 is attached to the main flow path 55 of the piston 24 to branch the main flow path 55. By closing the passage 56, the flow path for supplying the operation air to the pressurizing chambers 27a and 28a is switched between the normal opening and the normal closing. Therefore, according to the air operated valve 1B of the second embodiment, the operation air is supplied to the pressurizing chambers 27a and 28a during normal close and normal open while reducing the cost by using the pistons 23 and 24 in common. Is possible.

(Third embodiment)
Next, a third embodiment of the air operated valve of the present invention will be described with reference to the drawings. FIG. 8 is a cross-sectional view of an air operated valve 1 </ b> C according to the third embodiment of the present invention, in which the cap 26 </ b> B includes a valve opening / closing detection sensor 91. FIG. 9 is a top view of the air operated valve 1C shown in FIG.
In the air operated valve 1C of the third embodiment, the pistons 23 and 24 are fixed to metal parts 105 and 106, which are examples of wear-resistant parts, and the functions are changed by replacing the caps 26B and 26C. This is different from the air operated valve 1A of the first embodiment. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and attaches | subjects the same code | symbol as 1st Embodiment to drawing in common, and omits description suitably.

<Overall configuration>
As shown in FIG. 8, the external appearance of the air operated valve 1 </ b> C is configured by connecting the actuator portion 3 </ b> C to the valve portion 2. In the exterior member 21, the base 25 and the cap 26B are caulked and fixed to the upper and lower open ends in a state where the interior components 22A, 22B, and 22C, the pistons 23 and 24, and the compression spring 29A are accommodated.

  The cap 26 </ b> B is provided with a cylindrical recess 101 in a cylindrical shape at the opening of the insertion hole 81. An air supply / exhaust port 85 is provided outside the insertion hole 81 on the upper end surface of the cap 26B in the figure. The air supply / exhaust port 85 communicates with the cylindrical recess 101 via the bypass flow path 102. Further, a connection hole 103 is provided on the upper end surface of the cap 26B in the figure so as to overlap the insertion hole 81 while shifting the axis line from the insertion hole 81. A female screw is formed on the inner peripheral surface of the connection hole 103, and the valve opening / closing detection sensor 91 is screwed. The valve opening / closing detection sensor 91 is screwed and fixed to the connection hole 103 so that the detection portion protrudes into the insertion hole 81.

  In the air operated valve 1 </ b> C, metal parts 105 and 106 are fixed to the tip of the piston rod 42 of the piston 23 and the tip of the piston rod 52 of the piston 24. The metal parts 105 and 106 are made of a metal material having high rigidity and strength, such as stainless steel and brass, and having magnetism. The metal parts 105 and 106 are fixed to the resin piston rods 42 and 52 by press-fitting, insert molding, adhesion, welding or the like.

<Assembly of air operated valve>
The air operated valve 1 </ b> C is assembled to a mounting plate, a semiconductor manufacturing apparatus, or the like using a bolt (not shown) inserted through the mounting hole 14. The supply / exhaust pipe is connected to the supply / exhaust port 85 from above. At this time, if the air supply / exhaust port 85 is displaced from the position of the air supply / exhaust pipe, the piping work takes time. However, the air operated valve 1C is caulked and fixed so that the cap 26B can rotate with respect to the exterior member 21. Therefore, when the air supply / exhaust port 85 is deviated from the position of the air supply / exhaust pipe, after the air operated valve 1C is assembled to a mounting plate or the like, only the cap 26B is rotated to adjust the position of the air supply / exhaust port 85. be able to.

<Operation of air operated valve>
When the operating air is not supplied to the air supply / exhaust port 85, the air operated valve 1C causes the pistons 23 and 24 to be pushed down by the elastic force of the compression spring 29A and causes the diaphragm 9 to contact the valve seat 8 via the stem 13.

  Thereafter, when operating air is supplied to the air supply / exhaust port 85, the operating air passes through the bypass channel 102, the cylindrical recess 101, the branch channel 56 of the piston 24, the main channel 55, the main channel 47 of the piston 23, and the branch channel 48. In addition to being supplied to the pressurizing chamber 27 a, the pressure is supplied from the main channel 55 of the piston 24 to the pressurizing chamber 28 a through the communication passage 58 and the fitting recess 57. When the internal pressure of the pressurizing chambers 27a and 28a overcomes the elastic force of the compression spring 29A, the pistons 23 and 24 rise, and the force in the valve seat direction applied to the diaphragm 9 via the stem 13 is released. Thereby, the diaphragm 9 separates from the valve seat 8 by its own reaction force. When the control fluid is supplied to the primary port 5 in this state, the control fluid flows from the primary port 5 to the secondary port 6 through the valve seat 8.

  After that, when the operation air in the pressurizing chambers 27a and 28a is exhausted from the supply / exhaust port 85, the pistons 23 and 24 are lowered by the elastic force of the compression spring 29A, and the piston rod 42 of the piston 23 abuts against the stem 13 to Apply a force in the valve seat direction to 9. Due to this force, the diaphragm 9 comes into contact with the valve seat 8, and the control fluid supplied to the primary side port 5 does not flow from the valve seat 8 to the secondary side port 6.

  In the air operated valve 1 </ b> C that opens and closes in this manner, the valve opening / closing state is detected by the valve opening / closing detection sensor 91. That is, in the air operated valve 1 </ b> C, when the pistons 23 and 24 are lifted to open the valve, the metal part 106 of the piston rod 52 provided on the piston 24 approaches the valve opening / closing detection sensor 91. The valve opening / closing detection sensor 91 recognizes the metal part 106 and detects that the air operated valve 1C is in the valve open state. On the other hand, in the air operated valve 1 </ b> C, when the pistons 23 and 24 are lowered and the valves are closed, the metal part 106 moves away from the valve opening / closing detection sensor 91. When it becomes difficult to recognize the metal part 106, the valve opening / closing detection sensor 91 detects that the air operated valve 1C is in the valve closed state.

<Function change>
By the way, the valve opening / closing detection sensor 91 is detachably attached to the connection hole 103 of the cap 26B. Therefore, if the device attached to the connection hole 103 is replaced, the function of the air operated valve 1C can be easily changed.

FIG. 10 is a view in which a stroke adjustment knob 92 is attached to the cap 26B of the air operated valve 1C shown in FIG. FIG. 11 is a top view of the air operated valve 1C shown in FIG.
In the air operated valve 1C shown in FIGS. 10 and 11, a stroke adjusting knob 92 is screwed into the connection hole 103 of the cap 26B. The stroke adjustment knob 92 adjusts the position of the lower end portion protruding from the insertion hole 81 by adjusting the rotation amount. The air operated valve 1 </ b> C moves the pistons 23 and 24 until the piston rod 52 comes into contact with the stroke adjustment knob 92, and adjusts the amount (stroke) by which the diaphragm 9 is separated from the valve seat 8. At this time, the tip of the piston rod 52 is pressed against the stroke adjustment knob 92, but since the metal part 106 is fixed to the tip, the piston rod 52 is worn or deformed by an impact hitting the stroke adjustment knob 92. There is no. If a memory is provided around the stroke adjustment knob 92 as in the cap 26B shown in FIG. 11, the flow rate can be adjusted easily.

FIG. 12 is a view in which an open / close indicator 93 is attached to the cap 26B of the air operated valve 1C shown in FIG. 8, and shows a valve closed state. FIG. 13 shows the open state of the air operated valve 1C shown in FIG.
In the air operated valve 1 </ b> C shown in FIGS. 12 and 13, an open / close indicator 93 is screwed into the connection hole 103. The open / close indicator 93 is provided so that the rod 94 can protrude to the outside, and the rod 94 is abutted against the piston rod 52 of the piston 24 by a coil spring 95. According to the air operated valve 1 </ b> C, when the pistons 23 and 24 move upward, the rod 94 is pushed up against the elastic force of the coil spring 95. Further, when the pistons 23 and 24 are lowered, the rod 94 is lowered by the elastic force of the coil spring 95. Therefore, the user can determine the valve open / close state based on the amount by which the rod 94 projects from the cap 26B. In this case, since the metal member 52 is fixed to the piston rod 52, the piston rod 52 is not rubbed and worn by the rod 94.

FIG. 14 is a diagram in which the cap 26B of the air operated valve 1C shown in FIG. 8 is replaced with a cap 26C having a one-touch joint 96.
The air operated valve 1C shown in FIG. 14 includes a cap 26C fitted with a one-touch joint 96. The cap 26 </ b> C is provided with a supply / exhaust port 85 at a position shifted outward from the insertion hole 81 so that the one-touch joint 96 can be attached. The air supply / exhaust port 85 communicates with the cylindrical recess 101 via the bypass flow path 102. Since the air operated valve 1C can connect the supply / exhaust pipe to the one-touch joint 96 with one touch, piping is easy.

<Effect>
Therefore, in the air operated valve 1 </ b> C of the third embodiment, the metal part 106 is attached to the tip of the piston rod 42 provided on the piston 23, and the wear resistance and strength of the piston rod 42 are increased. Therefore, deterioration of the piston 23 can be prevented even when the piston rod 42 is pressed against the stem 13 to transmit the driving force to the diaphragm 9. In the air operated valve 1C, since the piston rod 42 is not worn or the like, the stroke for the pistons 23 and 24 to operate the valve unit 2 does not change, and the flow rate characteristic is hardly changed.

  Further, according to the air operated valve 1C of the third embodiment, the exterior member 21 is caulked to the base 25 and the caps 26B and 26C so that the base 25 and the caps 26B and 26C can be rotated. It is not necessary to provide a rotation mechanism at 26C, and the overall height can be lowered. Further, it is not necessary to cut a screw or the like on the exterior member 21, and the cost can be reduced.

  In the air operated valve 1C of the third embodiment, caps 26B and 26C to which fluid control components such as a valve open / close detection sensor 91, a stroke adjustment knob 92, an open / close indicator 93, and a one-touch joint 96 are attached include an air supply / exhaust port 85. The same outer shape as the cap 26A of the first embodiment is provided. Therefore, functions such as a valve opening / closing detection function and an indicator function can be arbitrarily set only by changing the caps 26A, 26B, and 26C attached to the exterior member 21. Therefore, according to the air operated valve 1C of the third embodiment, parts other than the cap 26 can be shared and functions can be added and changed, and costs can be reduced.

  This has a remarkable effect as compared with the conventional air operated valve 1100. That is, when the conventional air operated valve 1100 has a valve opening / closing detection function, the entire cap 1112 has to be replaced with a cap including a valve opening / closing detection sensor. Since the cap is provided with a hollow portion for forming the piston chamber 1114, processing costs and wasteful material costs are incurred. On the other hand, the air operated valve 1C of the third embodiment has a simple cylindrical shape with the cap 26B and is simply provided with the air supply / exhaust port 85 and the connection hole 103. Material is not wasted by processing. Therefore, the function of the air operated valve 1C of the third embodiment can be changed if the exterior member 21 and the interior part 22 are shared and only the cap 26 that can be manufactured at low cost is replaced. Therefore, the air operated valve 1 </ b> C of the third embodiment can reduce the parts required for the function change compared to the conventional air operated valve 1100. In addition, since the cap 26 of 3rd Embodiment is small compared with the cap 1112 of a prior art, it does not choose a stock location.

  In the air operated valve 1C of the third embodiment, the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93 can be screwed into the connection hole 103 of the cap 26B. The stroke adjustment knob 92 and the open / close indicator 93 can be arbitrarily attached and detached, and the function can be easily changed.

  In the air operated valve 1C of the third embodiment, the caps 26B and 26C are provided with the supply / exhaust port 85, and the supply / exhaust pipe is connected to the supply / exhaust port 85 from above. There is no need to consider interference with parts, and the degree of freedom in design can be increased. In addition, since no joint piping is provided on the side surface of the air operated valve 1C, the installation space for the air operated valve 1C can be small, and the air operated valves 1C can be densely arranged.

(Fourth embodiment)
Next, a fourth embodiment of the air operated valve of the present invention will be described with reference to the drawings. FIG. 15 is a cross-sectional view of an air operated valve 1D according to the fourth embodiment of the present invention, in which the cap 26D includes only the air supply / exhaust port 85. FIG. 16 is a top view of the air operated valve 1D shown in FIG.
The air operated valve 1D of the fourth embodiment is different from the air operated valve 1C of the third embodiment in that the cap 26D is divided into two parts. Therefore, here, it demonstrates centering on a different point from 3rd Embodiment, about the structure which is common in 3rd Embodiment, the code | symbol same as 3rd Embodiment is attached | subjected to drawing, and description is omitted suitably.

  As shown in FIG. 15, in the air operated valve 1D, the cap 26D is divided into a fixed plate 111 and an option plate 112A, and as shown in FIG. 16, the fixed plate 111 and the option plate 112A are separated from above by two bolts 113. , 113.

  The fixing plate 111 is provided with an insertion hole 81 in a columnar shape, and a cylindrical recess 101 is formed in the opening of the insertion hole 81. Further, a bypass passage 102 is provided through the fixed plate 111 so as to connect to the cylindrical recess 101. A mounting groove 82 for mounting the seal member 37 is formed on the end surface of the fixed plate 111 so as to surround the insertion hole 81, the cylindrical recess 101, and the bypass passage 102. The fixing plate 111 is provided with a first connection hole 115 so as to overlap the insertion hole 81 while being displaced from the insertion hole 81. A mounting groove 114 for mounting the seal member 38 is formed in an annular shape on the inner wall of the insertion hole 81 and airtightly partitions between the piston rod 52 of the piston 24 and the inner peripheral surface of the insertion hole 81. The fixed plate 111 also includes a press-fit portion 83 and a caulking groove 84.

  On the other hand, the option plate 112 </ b> A is provided with a supply / exhaust port 85 corresponding to the bypass flow path 102 of the fixed plate 111. The option plate 112 </ b> A has a mounting groove 117 for mounting the seal member 39 around one end opening of the air supply / exhaust port 85.

  In such an air operated valve 1D, the exterior member 21 is caulked and fixed to the fixing plate 111. The option plate 112 </ b> A is fixed to the fixing plate 111 with bolts 113 and 113 and covers the first connection hole 115. Therefore, as shown in FIG. 15, the cap 26 </ b> D including the option plate 112 </ b> A has only a function of supplying / exhausting operation air from the supply / exhaust port 85.

  In the air operated valve 1D of the fourth embodiment, since the option plate 112A is detachably provided to the fixed plate 111, the function is changed by replacing the option plate 112A with the other option plates 112B and 112C. Is possible.

FIG. 17 is a diagram in which the option plate 112A of the air operated valve 1D shown in FIG. 15 is replaced with an option plate 112B including a valve opening / closing detection sensor 91. FIG. 18 is a top view of the air operated valve 1D shown in FIG.
As shown in FIGS. 17 and 18, in the air operated valve 1 </ b> D, the option plate 112 </ b> B is fixed to the fixed plate 111 with bolts 113. In the option plate 112B, an air supply / exhaust port 85 corresponding to the bypass flow path 102 of the fixed plate 111 is provided off the center. In addition, the option plate 112B is provided with a second connection hole 116 corresponding to the first connection hole 115 shifted from the center. A female screw is formed on the inner peripheral surface of the second connection hole 116 so that the valve opening / closing detection sensor 92 can be screwed. Therefore, the air operated valve 1D can have a valve opening / closing detection function simply by removing the bolt 113 and replacing the option plate 112A with the option plate 112B.

FIG. 19 is a cross-sectional view when the stroke adjusting knob 92 is attached to the air operated valve 1D shown in FIG. FIG. 20 is a cross-sectional view when the open / close indicator 93 is attached to the air operated valve 1D shown in FIG.
In the air operated valve 1D shown in FIG. 17, a valve opening / closing detection sensor 91 is detachably attached to the second connection hole. Therefore, the air operated valve 1D can be provided with a stroke adjustment function by screwing the stroke adjustment knob 92 into the second connection hole 116 as shown in FIG. Further, as shown in FIG. 20, the air operated valve 1D can be provided with an indicator function for visually recognizing the valve open / close state by screwing an open / close indicator 93 into the second connection hole 116.

FIG. 21 is a diagram in which the option plate 112A constituting the cap 26D of the air operated valve shown in FIG. 15 is replaced with an option plate 112C equipped with a one-touch joint 96.
The option plate 112C has a step by providing the air supply / exhaust port 85 shallower than the option plate 112A, and the one-touch joint 96 is attached so that the one-touch joint 96 abuts the step. The air operated valve 1D shown in FIG. 21 including the option plate 112C can connect the supply / exhaust pipe to the supply / exhaust port 85 with a single touch from above.

<Effect>
Therefore, the air operated valve 1D of the fourth embodiment uses the operating air to slide the piston in the cylinder, and closes the end of the cylinder in the air operated valve 1D that applies driving force to the valve portion. The cap 26D is divided and members (fixed plate 111 and option plates 112A, 112B, 112C) divided by using bolts 113, 113 are provided so as to be connectable. Then, fluid control members such as a one-touch joint 96, a valve opening / closing detection sensor 91, a stroke adjustment knob 92, and an opening / closing indicator 93 are attached to the option plates 112A, 112B, and 112C which are one of the divided members. Therefore, the air operated valve 1D of the fourth embodiment can perform additional changes in function by replacing the option plates 112A, 112B, and 112C while the fixing plate 111 is fixed to the exterior member 21. Moreover, since the air operated valve 1D of the fourth embodiment can be shared up to the fixed plate 111, further cost reduction can be achieved.

  In particular, in the air operated valve 1C of the third embodiment described above, the cap 26C including the one-touch joint 96 and the cap 26B including the valve opening / closing detection sensor 91 are used before the air operated valve 1D is assembled. However, in the air operated valve 1D of the fourth embodiment, if the option plates 112B and 112C are replaced, a specification including the one-touch joint 96 and a specification including the valve opening / closing detection sensor 91 are provided. It can be easily changed at the place of use.

  Furthermore, in the air operated valve 1D, since the option plate 112B is arbitrarily connected to the second connection hole 116 with the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93, the option plate 112B is replaced. Even if not, the function can be changed by simply replacing the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93.

  Further, in the air operated valve 1D of the fourth embodiment, the bolts 113 and 113 are fastened from above to fix the option plates 112A, 112B, and 112C to the fixed plate 111. Therefore, the air operated valve 1D is assembled to the line. Even in this state, it is possible to easily replace the option plates 112A, 112B, and 112C.

  Note that the present invention is not limited to the above-described embodiment, and various applications are possible.

(1) For example, in the above embodiment, the two-stage air operated valve 1A has been described. However, as shown in FIG. 22, three piston chambers 27, 28, 121 are formed by stacking and fixing four interior parts 22A, 22B, 22C, 22D having the same shape in the exterior member 21, A three-stage air operated valve 1E can be configured. In this case, a convex piston 122 may be interposed between the pistons 23 and 24. The piston 122 may be formed with a main channel 123, a fitting recess 124 may be provided in the opening of the main channel 123, and a communication path 125 may be formed on the inner peripheral surface of the fitting recess 124. This is to make the air supply / exhaust port 85 communicate with the pressurizing chamber 121a of the piston chamber 121.

  Further, as shown in FIG. 23, two interior parts 22B and 22C having the same shape are stacked and fixed in the exterior member 21, thereby forming one piston chamber 28 and a one-stage air operated valve. 1F can be configured. In this case, it is preferable to provide two branch channels 128 and 129 in the piston 126 so as to communicate with each other via the main channel 127. This is because the supply / exhaust port 85 is communicated with the pressurizing chamber 28a of the piston chamber 28 via the branch channel 128, the main channel 127, and the branch channel 129.

  Therefore, as shown in the air operated valves 1E and 1F, it is possible to make any number of air operated valves just by changing the number of the interior parts 22 to be stacked. Can do.

  Further, for example, the air operated valve 1G shown in FIG. 24 replaces the compression spring 29A shown in FIG. 23 with the compression spring 29B, removes the seal member 34, and attaches a stopper plug 90 to the main flow path 127 of the piston 126. By changing the interior parts 22B and 22C together with the piston 126 in the axial direction in the exterior member 21, the normal close type is changed to the normal open type. Therefore, also in this modified example, parts other than the compression springs 29A and 29B and the seal member 34 can be shared, so that the normal close type and the normal open type can be changed, and the cost can be reduced.

(2) For example, in the above embodiment, the D-cut passage 64 is formed on the outer peripheral surface of the interior parts 22A, 22B, 22C, so that the conduction flow path is provided between the interior parts 22A, 22B, 22C and the exterior member 21. 31 was formed. On the other hand, instead of the D-cut passage 64, a plurality of conductive grooves 131 having a rectangular cross section may be formed on the outer peripheral surfaces of the interior parts 22A, 22B, 22C. In this case, a conduction flow path 31 is formed between the conduction groove 131 of the interior part 22A, 22B, 22C and the inner peripheral surface of the exterior member 21. Further, the D-cut passage 64 is not provided on the outer peripheral surfaces of the interior parts 22A, 22B, and 22C, and a conduction groove 132 is formed on the inner peripheral surface of the exterior member 21, so that a conduction channel is provided between the interior part 22 and the exterior member 21. 31 may be formed. The conduction groove 132 can be formed together when the exterior member 21 is drawn or extruded, and the processing cost is low. Furthermore, the conduction groove 131 may be provided in the interior parts 22A, 22B, and 22C, and the conduction groove 132 may be provided in the exterior member 21.

(3) For example, in the above embodiment, the both ends of the exterior member 21 are crimped and fixed after being press-fitted into the base 25 and the cap 26A. On the other hand, as shown in part P of FIG. 27, after both ends of the exterior member 21 are press-fitted into the base 25 and the cap 26A, both ends of the exterior member 21 are welded and fixed to the base 25 and the cap 26A. Good. According to this method, the base 25 and the cap 26A are firmly fixed to the exterior member 21, and fluid leakage can be reliably prevented. Further, like the cap 26E shown in FIG. 28, the caulking grooves 74 and 84 are not formed in the base 25 and the cap 26E, both ends of the exterior member 21 are press-fitted into the base 25 and the cap 26E, and the further press-fitted portions are adhesives. It may be adhered by such as. According to this method, the trouble of processing the caulking grooves 74 and 84 can be saved. 29, male screws are formed on the outer peripheral surfaces of the lower ends of the base 135 and the cap 136, while female screws are formed on the inner peripheral surface of the opening end of the exterior member 137. 135 and the cap 136 may be screwed together. Although this method requires screw processing and increases costs, since both ends of the exterior member 137 are not press-fitted, there is an advantage that the base 135, the cap 136, and the exterior member 137 can be easily detached and reused.

(4) In the above embodiment, the interior parts 22A, 22B, 22C and the pistons 23, 24 are made of resin molded products. However, such as aluminum die-cast molded products or lost wax molded products, the number of cutting processes is small and can be molded at low cost. You may comprise an interior part and a piston with a molded article. When the air operated valves 1A, 1B, 1C, 1D control a high-temperature control fluid or when heated, the overall temperature exceeds 80 degrees, and the interior parts 22A, 22B, 22C and the pistons 23, 24 As a result, resin molded products may not be used. In this case, the interior parts 22A, 22B, 22C and the pistons 23, 24 are constituted by aluminum die-cast moldings or lost wax moldings, which are metal, even in an environment where the overall temperature exceeds the heat resistance temperature exceeding 80 degrees. It is preferable that the air operated valves 1A, 1B, 1C, 1D can be used.

(5) In the above embodiment, the interior parts 22A, 22B, 22C are all the same shape. On the other hand, the shape of the interior parts 22A, 22B, and 22C may be changed according to the position where the exterior member 21 is mounted. In other words, the interior parts 22A, 22B, and 22C serve as partition plates that partition the first and second piston chambers 27 and 28 because the closed end faces increase the thickness of the closed end faces, while the interior parts 22A and 22C. Since the closed end face is supported by the base 25 and the cap 26 to supplement the strength, the thickness of the closed end face may be reduced. Thus, by changing the shapes of the interior parts 22A, 22B, and 22C according to the purpose, the materials of the interior parts 22A, 22B, and 22C can be used appropriately without waste. Further, by reducing the thickness of unnecessary portions, the valve can be reduced in size and weight.

(6) In the above embodiment, the exterior member 21 is a metal pipe. On the other hand, the exterior member 21 may be a resin molded product. In this case, in order to ensure the pressure resistance by increasing the thickness of the exterior member 21, the valve is increased in size. However, cost can be reduced because it can be easily manufactured by injection molding or the like. In addition, the weight can be reduced.

(7) In the above-described embodiment, the shapes of the branch flow channels 48 and 56 are rectangular. The branch channel may have a channel cross-sectional area that is longer than the vertical dimension in the axial direction and longer than the horizontal dimension in the direction intersecting (orthogonal) with respect to the main channel. . Therefore, the channel cross-sectional shape of the branch channel may be an elliptical shape that is long in the lateral direction or a shape in which a plurality of round holes are connected in a circumferential direction of the piston rod.

(8) In the third and fourth embodiments, the metal parts 105 and 106 are provided on the pistons 23 and 24. On the other hand, if the pistons 23 and 24 do not come into contact with other parts, a metal part may be provided only at the tip part in contact with the stem 13.

(9) In the above embodiment, the outer diameters of the air operated valves 1A, 1B, 1C, and 1D are cylindrical, but the outer diameter may be a polygonal shape. In this case, the exterior member 21 may have a polygonal outer peripheral surface shape and a cylindrical inner peripheral surface shape so that the interior part 22 can be loaded. Both may be polygonal, and the outer peripheral surface shape of the interior part 22 may be polygonal. Even in such a case, since the exterior member 21 has a pipe shape, the exterior member 21 can be easily manufactured by providing a polygonal pipe by drawing or extruding and cutting it to a predetermined length. Can do.

(10) In the above embodiment, the driving force of the actuator portions 3A, 3B, 3C is transmitted to the diaphragm 9 via the stem 13. On the other hand, the diaphragm 9 may be fixed to the tip portions of the pistons 23 and 24 so that the driving force is directly transmitted to the diaphragm 9.

(11) In the above embodiment, the air operated valve 1 is a two-way valve that switches the communication state between the primary side port 5 and the secondary side port 6. On the other hand, you may apply the structure of actuator part 3A, 3B, 3C demonstrated in the said embodiment to multiway valves, such as a three-way valve. Moreover, although the air operated valve 1 of the said embodiment is a diaphragm valve, a poppet valve may be sufficient.

(12) In the third embodiment, the exterior member 21 is caulked to the caps 26B and 26C so that the caps 26B and 26C can be rotated. On the other hand, an O-ring may be mounted between the press-fit portion 83 of the caps 26B and 26C and the exterior member 21. In this case, when the caps 26B and 26C are rotated, the O-ring generates resistance, and an appropriate operational feeling can be given to the user.
(13) In the above embodiment, the control fluid flows from the primary port 5 to the secondary port 6, but the air operated valve 1 </ b> A so that the control fluid flows from the secondary port 6 to the primary port 5. , 1B, 1C, 1D may be used.

It is sectional drawing of the air operated valve which concerns on 1st Embodiment of this invention. Similarly, it is a top view of the air operated valve shown in FIG. Similarly, it is the center longitudinal cross-sectional view of the 1st piston and 2nd piston which are shown in FIG. Similarly, it is an external appearance perspective view of the interior component shown in FIG. Similarly, it is sectional drawing which shows the relationship between the cap shown in FIG. 1, a base, and an exterior member. Similarly, it is an air operated valve shown in FIG. 1, and is a view showing a flow path structure. It is sectional drawing of the air operated valve which concerns on 2nd Embodiment of this invention. It is sectional drawing of the air operated valve which concerns on 3rd Embodiment of this invention, Comprising: The cap is provided with a valve opening / closing detection sensor. It is a top view of the air operated valve shown in FIG. It is the figure which attached the stroke adjustment knob to the cap of the air operated valve shown in FIG. FIG. 11 is a top view of the air operated valve shown in FIG. 10. FIG. 9 is a view in which an open / close indicator is attached to the cap of the air operated valve shown in FIG. 8 and shows a valve closed state. Fig. 13 shows the open state of the air operated valve shown in Fig. 12. It is the figure which replaced the cap of the air operated valve shown in FIG. 8 with the cap provided with a one-touch coupling. It is sectional drawing of the air operated valve which concerns on 4th Embodiment of this invention, Comprising: A cap is provided with only an air supply / exhaust port. FIG. 16 is a top view of the air operated valve shown in FIG. 15. It is the figure which replaced the option plate of the air operated valve shown in FIG. 15 with the option plate provided with a valve opening / closing detection sensor. FIG. 18 is a top view of the air operated valve shown in FIG. 17. FIG. 18 is a cross-sectional view when a stroke adjustment knob is attached to the air operated valve shown in FIG. 17. FIG. 18 is a cross-sectional view when an open / close indicator is attached to the air operated valve shown in FIG. 17. It is the figure which replaced the option plate which comprises the cap of the air operated valve shown in FIG. 15 with the option plate which attached the one-touch coupling. It is a figure which shows the internal structure of a 3-stage type air operated valve of a normally closed type air operated valve of this invention. It is a figure which shows an internal structure when the air operated valve of this invention is deform | transformed into the normally closed type 1 step | paragraph type air operated valve. It is a figure which shows an internal structure when the normally closed type 1 step | paragraph type air operated valve shown in FIG. 23 is changed into a normal open type. It is a figure which shows the modification of the interior components which comprise the air operated valve of this invention. It is a figure which shows the modification of the exterior member which comprises the air operated valve of this invention. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. It is sectional drawing of the conventional air operated valve.

Explanation of symbols

1A, 1B, 1C, 1D, 1E, 1F, 1G Air operated valve 2 Valve portion 21 Exterior member 22 Interior component (interior member)
23 piston 24 piston 27 first piston chamber 28 second piston chamber 31 conduction channel 42 piston rod 47 main channel 48 branch channel 55 main channel 56 branch channel 61 through hole

Claims (5)

In the air operated valve that drives the valve by sliding the piston in the cylinder using operating air,
The cylinder is
A metal pipe formed by drawing or extrusion; and
An interior member that is loaded into the pipe and forms a piston chamber in which the piston slides ;
The interior member is a resin molded product,
A hollow shape opened on one side, and a plurality of interior parts in which a through hole for penetrating the piston rod of the piston is formed on the closed end surface, and the piston chamber is formed;
Between the interior member and the pipe, there is a conduction channel that connects the piston chamber to one breathing hole,
The piston rod contacts the diaphragm with the intervention of a cylindrical stem guided by a holder;
The guided length of the cylindrical stem and the diameter of the cylindrical stem are approximately the same length;
Air operated valve featuring In the air operated valve according to claim 1 ,
The air operated valve, wherein the piston is any one of a resin molded product, an aluminum die cast molded product, and a lost wax molded product. In the air operated valve according to claim 2 ,
2. The air operated valve according to claim 1, wherein a piston rod is provided integrally with the piston, and a wear-resistant member having wear resistance is attached to a tip portion of the rod portion. In the air operated valve according to any one of claims 1 to 3 ,
The piston has a main flow path formed along the axial direction, and a branch flow path provided to intersect the main flow path,
The air operated valve according to claim 1, wherein a cross section of the branch flow path has a longer horizontal dimension in a direction intersecting the main flow path than a vertical dimension in the axial direction. In the air operated valve according to any one of claims 1 to 4 ,
An air operated valve characterized in that a base and a cap are fixed by caulking at both ends of the pipe.

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