JP3553526B2 - Variable flow valve - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a variable flow valve which is used for adjusting a flow rate of a fluid, and particularly suitable for use in an exhaust system of a manufacturing apparatus for semiconductors, liquid crystals, etc., for adjusting the flow rate of exhaust gas.
[0002]
[Prior art]
Conventionally, in a piping system in which a fluid is adjusted to flow at a constant flow rate or closed, a manual flow control valve and an air valve are arranged in series, and a constant flow rate of fluid is caused to flow by opening and closing the air valve. .
[0003]
[Problems to be solved by the invention]
However, when two valves are used in combination as in the above-described conventional example, the flow path becomes long, and the compactness of the entire apparatus is restricted by itself, and the assembling work requires time and effort, and the assembling work efficiency is reduced. Inferior, and further increase the cost.
[0004]
SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the conventional example as described above, and the flow rate of the fluid can be adjusted and flowed with one valve, and therefore, the flow path can be shortened. The whole apparatus can be made compact, the assembly work can be performed easily and in a short time, the efficiency of the assembly work can be improved, and the number of parts is small and the configuration is simplified. Accordingly, an object of the present invention is to provide a variable flow valve which can reduce the cost.
[0005]
[Means for Solving the Problems]
In order to solve the above problems, a variable flow valve according to the present invention includes a valve body having a flow path, an opening / closing element for opening and closing the flow path, an air cylinder for operating the opening / closing element by supplying and discharging air, and a handle. Adjusting means for adjusting the position of the stopper by screwing and rotating a screw part provided on the housing body of the air cylinder with a screw part of the air cylinder, and an opening / closing lift of the opening / closing element by the air cylinder to adjust a flow rate of fluid. A variable flow valve provided with an actuator having the stopper, wherein the stopper is formed in a cylindrical shape and provided integrally with a central portion of the handle, and an air supply port provided in the central portion of the handle has the cylindrical shape. A set screw attached to the inside of the stopper and screwably provided in the handle is pressed against the top surface of the housing main body to make contact with the screw portion of the handle during non-adjustment. It is obtained so as to hold the threaded portion of the managing body in a fixed state.
[0006]
According to another aspect of the present invention, there is provided a variable flow valve according to the present invention, wherein the variable flow valve includes an external heating means.
[0008]
The adjusting means may include an opening / closing lift adjusting display means on an outer peripheral portion of the handle and an outer peripheral portion of a housing body of the air cylinder.
[0009]
According to the present invention configured as described above, by adjusting the position of the stopper by rotating the handle of the adjusting means, the opening / closing lift of the opening / closing element by the air cylinder can be adjusted to adjust the flow rate of the fluid. it can. In this way, the flow rate of the fluid can be adjusted and flowed by one valve. In addition, the number of parts of the adjusting means can be reduced to simplify the configuration.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First, a first embodiment of the present invention will be described. 1 to 6 show a variable flow valve according to a first embodiment of the present invention. FIG. 1 is a longitudinal sectional view showing a state in which an external heating means is removed, and FIGS. 2 and 3 show a state in which the external heating means is removed. 4, 5, and 6 are a front view, a side view, and a bottom view in a state where the external heating means is attached.
[0011]
The variable flow valve of the present embodiment shown in FIGS. 1 to 6 is an application example of a normally closed type, in which a first flow path 2 is formed on one side of a valve body 1 and on the other side of the valve body 1. The second flow path 3 is formed, the first flow path 2 is formed continuously with the hole 5 of the valve seat 4 formed in the vertical direction, and the first flow path 2 and the second flow path 3 , Hole 5 and valve chamber 6.
[0012]
A valve body 7 serving as an opening / closing element is provided in the valve chamber 6. In the present embodiment, the valve body 7 is provided integrally with the valve rod 8, the holding portion 10 is provided integrally with the outer peripheral edge on the front side of the main body 9, and the central portion of the main body 9 is provided. A countersunk screw 12 is screwed into the screw hole 11 from the front side, and an annular groove 13 gradually narrowing between the holding portion 10 and the head of the screw 12 from the back side to the front open side is provided between the holding portion 10 and the head of the screw 12. The seal ring (O-ring) 14 is formed and held in the annular groove 13 in such a manner that the seal ring (O-ring) 14 is prevented from coming off with its outer peripheral top part protruding. Then, the seal ring 14 comes into contact with the valve seat 4.
[0013]
An air cylinder 16 is used as an actuator 15 for operating the valve rod 8 and the valve element 7. The inner periphery of the cylindrical portion 18 at the tip end of the bonnet 17 also serving as the bottom of the housing of the air cylinder 16 is screwed to the outer periphery of the cylindrical portion 19 of the valve body 1. An outer peripheral portion of a ring-shaped bellows receiver 20 is sandwiched between a stepped portion on the inner peripheral side on the open side of the cylindrical portion 19 and the bonnet 17 via a gasket 21, and a valve stem 8 is provided with a hole at a central portion of the bellows receiver 20. Has been inserted. Both ends of a bellows 22 provided on the outer peripheral portion of the valve rod 8 are fixed to the main body 9 and the bellows receiver 20 of the valve body 7, and the bellows 22 expands and contracts as the valve rod 8 and the valve body 7 move. It has become.
[0014]
An inner periphery of a distal end portion of a housing body 23 having a top portion of the air cylinder 16 is screwed to an outer peripheral portion of a base side of the bonnet 17, and a seal ring (O-ring) 24 housed in an annular groove of the outer periphery of the bonnet 17 is provided. The body 23 is pressed against the inner peripheral surface of the distal end portion to seal between the two. Inside the housing body 23, a piston 25 and shafts 26, 27 integral with the piston 25 are movably supported along the axial direction, and are accommodated in annular grooves on the outer periphery of the piston 25 and the shaft 26. Seal rings (O-rings) 28 and 29 are pressed against the inner peripheral surfaces of the housing body 23 and the bonnet 17 to seal between them. A screw hole 30 is formed at the center of the shaft portion 26, and a screw portion on the base side of the valve stem 8 is screwed into the screw hole 30.
[0015]
A compression spring 31 is interposed between the piston 25 and the inner surface of the top of the housing main body 23 at the outer peripheral portion of the shaft portion 27, and the elasticity of the compression spring 31 urges the piston 25 and the shaft portions 26, 27 forward. I have. Along with this, the valve rod 8 and the valve element 7 are advanced (downward), the seal ring 14 of the valve element 7 is pressed against the valve seat 4, the hole 5 is closed, and the space between the flow paths 2 and 3 is closed. I have. An air supply hole 32 is formed in the shaft portion 27 from the base end thereof along the axial direction, and the piston 25 communicates with the air supply hole 32 through a chamber 33 between the piston 25 and the bonnet 17 and the air supply hole 32. A hole 34 is formed. The housing body 23 has an air vent hole 36 for opening a chamber 35 between the top and the piston 25 to the atmosphere.
[0016]
Then, the compressed air is supplied to the chamber 33 through the air supply holes 32 and 34, whereby the piston 25 and the shaft portions 26 and 27 are retracted against the elasticity of the compression spring 31. Along with this, the valve rod 8 and the valve body 7 are retracted (upward) by contracting the bellows 22, the seal ring 14 of the valve body 7 is separated from the valve seat 4, the hole 5 is opened, and the flow paths 2, 3 Are communicated (opened). Conversely, the air in the chamber 33 is exhausted through the air supply holes 34 and 32, so that the piston 25, the shafts 26 and 27, the valve rod 8 and the valve body 7 The valve is moved forward (downward) by the repulsive force of 31, and the seal ring 14 of the valve body 7 is pressed against the valve seat 4 to close the hole 5 so that the space between the flow paths 2 and 3 is closed.
[0017]
A screw portion 37 is formed on the outer peripheral surface on the top side of the housing body 23, and a screw portion 39 formed on the inner peripheral surface at the tip end of a cap-shaped handle 38 is screwed into the screw portion 37, and the handle 38 is rotated. This allows the housing body 23 to advance and retreat via the screw portions 39 and 37. A cylindrical stopper 42 is rotatably and slidably inserted into a hole 40 formed at the center of the top of the housing body 23, and a cylindrical stopper is inserted into a hole 41 formed at the center of the handle 38. 42 bases are fitted. A screw hole 43 is formed in the handle 38 at one or a plurality of positions, which is opened to the outside in a hole 41 in the radial direction. A set screw 44 is screwed into the screw hole 43, and a tip end thereof is a stopper 42. The stopper 42 is integrated with the handle 38 by engaging with a recess 45 formed on the outer periphery of the base. The distal end of the stopper 42 is rotatably and slidably fitted to the outer periphery of the small diameter portion of the shaft portion 27, and a seal ring (O-ring) 46 housed in an annular groove on the outer periphery of the shaft portion 27 is It is pressed against the inner peripheral surface, and the space therebetween is sealed.
[0018]
A thrust washer 47 is provided on the outer periphery of the shaft portion 27 of the piston 25, and the thrust washer 47 faces the distal end surface of the stopper 42. As described above, when the piston 25, the shaft portions 26 and 27, the valve rod 8 and the valve body 7 retreat, and the hole 5 is opened to communicate the flow paths 2 and 3, the thrust washer 47 contacts the stopper 42. Contact is regulated. Therefore, the interval A between the thrust washer 47 and the stopper 42 serves as an opening / closing lift of the valve element 7. A screw hole 48 is formed in the outer periphery of the handle 38 in a direction parallel to the axis, and a set screw 49 is screwed into the screw hole 48. Then, when the set screw 49 is pressed against the top surface of the housing main body 23, the screw portion 37 of the housing main body 23 and the screw portion 39 of the handle 38 are pressed against each other, and both can be held in a fixed state.
[0019]
A screw portion 50 is formed on the inner periphery of the base of the stopper 42, a joint 51 serving as an air supply port is connected to the screw portion 50, and one end of an air supply pipe (not shown) is connected to the joint 51 to supply air. The other end of the pipe is switched between a compressed air supply source and the atmosphere. Display means for adjusting the valve lift is provided on the outer peripheral surface of the handle 38 and the outer peripheral surface of the housing body 23. As an example, a reference indicator 52 is provided on the outer peripheral surface of the handle 38, and a scale indicator 53 is provided on the outer peripheral surface on the top side of the housing body 23. Then, the adjustment amount of the interval A can be known based on which scale display 53 the reference display 52 corresponds to.
[0020]
A heating means, for example, a jacket heater 54 is provided outside the valve body 1 and the actuator 15, and the jacket heater 54 is connected to a power supply (not shown) by a cord 55 and a connector 56.
[0021]
The operation of the above configuration will be described below.
Now, as shown in FIG. 1, it is assumed that the seal ring 14 of the valve body 7 is pressed against the valve seat 4 and the passages 2 and 3 are shut off. In this state, compressed air is supplied from the compressed air supply source to the chamber 33 of the air cylinder 16 through the air supply pipe, the joint 51, the stopper 42, and the air supply holes 32 and 34. Accordingly, the piston 25, the shaft portions 26 and 27, the valve rod 8 and the valve body 7 are retracted (upward) against the elasticity of the compression spring 31, and the seal ring 14 of the valve body 7 is separated from the valve seat 4. By doing so, the hole 5 can be opened and the flow paths 2 and 3 can be communicated via the hole 5. Therefore, a fluid, for example, exhaust gas can flow through the flow path 2, the hole 5, and the flow path 3. At this time, the thrust washer 47 on the side of the piston 25 abuts on the distal end surface of the stopper 42, whereby the retreat of the piston 25, the shafts 26 and 27, the valve rod 8 and the valve body 7 is regulated. The amount of exhaust gas flowing through the passage 2, the hole 5, and the passage 3 is determined.
[0022]
Conversely, by releasing the air supply pipe to the atmosphere, the air in the chamber 33 of the air cylinder 16 is released to the atmosphere via the air supply holes 34 and 32, the stopper 42, the joint 51, and the air supply pipe. The piston 25, the shafts 26 and 27, the valve rod 8 and the valve element 7 are advanced (downward) by the repulsive force of the compression spring 31, and the seal ring 14 of the valve element 7 is pressed against the valve seat 4. , The hole 5, that is, the flow paths 2, 3 can be blocked to block the flow of the exhaust gas.
[0023]
Further, by heating the valve body 1 and the actuator 15 by the jacket heater 54, it is possible to prevent by-products contained in the exhaust gas from adhering to the valve body 7, the bellows 22, and the like. Therefore, the valve body 7, the bellows 22 and the like can be operated smoothly, and the maintenance cost can be reduced.
[0024]
Then, the set screw 49 is loosened to release the handle 38 from the fixed state with respect to the housing body 23, and the handle 38 and the stopper 42 are integrally rotated, and the handle 38 and the stopper 42 are rotated via the screw portions 39 and 37. The stopper 42 is moved forward or backward to adjust the position of the stopper 42, that is, the distance A between the distal end surface of the stopper 42 and the thrust washer 47 to a desired amount. Thereby, the amount of exhaust gas flowing through the flow path 2, the hole 5, and the flow path 3 can be adjusted by adjusting the lift amount of the valve body 7. At this time, adjustment can be easily made by the reference display 52 and the scale display 53. After the adjustment, the set screw 49 is tightened and its tip is pressed against the top surface of the housing main body 23, so that the handle 8 can be held in a fixed state with respect to the housing main body 23. Can be opened and closed.
[0025]
According to the present embodiment, since the stopper 42 and the joint 51 serving as an air supply port are disposed at the center of the handle 38, the jacket heater 54 that is heated from the outside as described above is heated up to the actuator 15 portion. Even if the jacket heater 54 is provided, the jacket heater 54 can be easily attached without interfering with the lift adjustment work. Even when the jacket heater 54 is not provided, the air supply pipe is guided from the side of the air cylinder. Since there is no portion protruding to the peripheral side, the adjustment operation can be easily performed. Further, since the handle 38 and the stopper 42 are used, the number of parts is small, and the configuration can be simplified. Further, the lift can be easily adjusted by the display means including the large handle 38, the reference display 52, the scale display 53, and the like.
[0026]
Next, a second embodiment of the present invention will be described. FIG. 7 shows a variable flow valve according to the second embodiment of the present invention, and is a longitudinal sectional view in a state where an external heating means is removed.
[0027]
The variable flow valve of the present embodiment shown in FIG. 7 is an application example of a normally open type, and the basic configuration is the same as that of the normally closed type variable flow valve according to the first embodiment. Hereinafter, portions having different configurations will be mainly described, and the same portions will be denoted by the same reference numerals and description thereof will be omitted.
[0028]
In the present embodiment, a compression spring 57 is interposed between the piston 25 and the bonnet 17 in the chamber 33 of the air cylinder 16, and the elasticity of the compression spring 57 causes the piston 25, the shaft portion 26, the valve rod 8, and the valve body 7. Is urged rearward (upward), the seal ring 14 of the valve body 7 is separated from the valve seat 4, the hole 5 is opened, the flow paths 2 and 3 are communicated through the hole 5, and the exhaust gas flows. Has become. On the other hand, the fitting relationship between the stopper 42 and the shaft 27 in the first embodiment is abolished so that compressed air can be supplied from the inside of the stopper 42 to the chamber 35 side. An air supply hole 58 is formed at right angles to the inside of the stopper 42 and communicates with the chamber 35. A seal ring (O-ring) 59 is accommodated in an annular groove on the outer peripheral surface of the intermediate portion of the stopper 42. It is pressed against the peripheral surface of the hole 40 of the main body 23, and the two are held rotatably and slidably in a sealed state. Further, an air vent hole 60 for opening the chamber 33 to the atmosphere is formed in an intermediate portion of the housing main body 23.
[0029]
Then, the compressed air is supplied from the compressed air supply source to the chamber 35 through the air supply pipe, the joint 51 (see FIGS. 4 and 5), the stopper 42, and the air supply hole 58, so that the piston 25, the shaft 26 , The valve rod 8 and the valve element 7 are advanced (downward) against the elasticity of the compression spring 57, the seal ring 14 of the valve element 7 is pressed against the valve seat 4, and the hole 5, that is, the flow path 2, 3 is closed. It is designed to be shut off.
[0030]
The piston 25 is provided with a thrust washer 62 at an outer peripheral portion of the projection 61. As described above, the valve body 7 is retracted by the elasticity of the compression spring 57, and the thrust washer 62 is opened in a state where the flow paths 2, 3 are opened. Is brought into contact with the distal end surface of the stopper 42, the valve body 7 is advanced by the elasticity of the compression spring 57, and the thrust washer 62 is separated from the distal end surface of the stopper 42 in a state where the flow paths 2, 3 are shut off. , The valve body lift, that is, the flow rate of the fluid is defined. Then, the valve body lift, that is, the flow rate of the fluid is adjusted by rotating the handle 38 and the stopper 42 integrally and moving forward or backward as in the first embodiment, and adjusting the position of the stopper 42. Can be adjusted.
[0031]
In each of the above embodiments, an example in which the invention is applied to a bellows valve has been described. However, the invention can be applied to a diaphragm valve using a diaphragm as an opening / closing element. Further, the stopper 42 and the air supply port can be provided at arbitrary positions. Further, external heating means need not be provided. In addition, the present invention can be variously modified without departing from the basic technical concept thereof.
[0032]
【The invention's effect】
As described above, according to the present invention, by adjusting the position of the stopper by rotating the handle of the adjusting means, the opening / closing lift of the opening / closing element by the air cylinder can be adjusted to adjust the flow rate of the fluid. In this way, the flow rate of the fluid can be adjusted and flowed by one valve, and therefore, the flow path can be shortened, the whole apparatus can be made compact, the assembling work can be simplified, and It can be performed in a short time, and the efficiency of assembly work can be improved. Further, the configuration can be simplified by reducing the number of components of the adjusting means, and therefore, the cost can be reduced.
In addition, since the screw portion of the housing and the screw portion of the handle can be held in a fixed state after the adjustment by rotating the handle, not only can the flow rate be set accurately, but also the flow rate of the fluid can be adjusted with high precision. In particular, it is suitable for a variable flow valve used for exhaust or the like in a manufacturing apparatus for semiconductors, liquid crystals and the like.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing a variable flow valve according to a first embodiment of the present invention, with an external heating unit removed.
FIG. 2 is a plan view showing the same variable flow valve in a state where an external heating means is removed.
FIG. 3 is a front view showing the same variable flow valve in a state where an external heating means is removed.
FIG. 4 is a front view showing the variable flow valve, with an external heating means attached.
FIG. 5 is a side view showing the same variable flow valve, with an external heating means attached.
FIG. 6 is a bottom view of the variable flow valve with the external heating means attached.
FIG. 7 is a longitudinal sectional view showing a variable flow valve according to a second embodiment of the present invention, with an external heating unit removed.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Valve body 2 Flow path 3 Flow path 4 Valve seat 7 Valve body (opening / closing element)
8 Valve rod 15 Actuator 16 Air cylinder 25 Piston 31 Compression spring 38 Handle 42 Stopper 51 Joint (air supply port)
54 External heating means 57 Compression spring

Claims (3)

A valve body having a flow path, an opening / closing element for opening and closing the flow path, an air cylinder for operating the opening / closing element by supplying and discharging air, a screw part of a handle and a screw part provided on a housing body of the air cylinder. adjust the position of the stopper by screwing rotation, a variable flow valve and an actuator having an adjusting means capable of adjusting the flow rate of the adjustment to the fluid opening and closing lift of the switching element by the air cylinder, the stopper Is formed in a cylindrical shape and provided integrally with the center of the handle, and an air supply port provided in the center of the handle is mounted inside the cylindrical stopper, and is provided so as to be screwable into the handle. A set screw is pressed against the top surface of the housing body to hold the screw portion of the handle and the housing body screw portion at the time of non-adjustment in a fixed state. Variable flow valve, characterized in that. 2. The variable flow valve according to claim 1, further comprising a heating means provided outside. 3. The variable flow valve according to claim 1, wherein the adjusting means includes an opening / closing lift adjusting display means on an outer peripheral portion of the handle and an outer peripheral portion of the housing body of the air cylinder .

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