TWI644326B - Irradiation apparatus - Google Patents

Abstract

The invention provides an irradiation device capable of easily attaching and detaching a photomask holder holding a photomask to a device body.

The structure of the irradiation device includes a device body, a guide portion 82 provided on the device body, a photomask holder 40 that is freely drawn along the guide portion 82 to the front side, and a photomask holder 40 that is driven and supported on the photomask. Alignment drive sections 60 and 70 for finely adjusting the position of the mask 50 on the stand. The alignment drive sections 60 and 70 are provided on the front side and the back side. The front side alignment drive section 60 includes a drive motor 61 and a link drive. The connecting shaft 62 of the motor 61 and the mask holder 40 is detachable from the driving motor 61, and the driving motor 61 is disposed at a position deviated from the pull-out trajectory of the mask holder 40.

Description

Irradiation device

The present invention relates to an irradiating device provided with a reticle holder holding a reticle.

Conventionally, as an irradiation device, it is known that a sealing material containing an ultraviolet curable resin is provided between two transparent substrates, and a liquid crystal panel in which a liquid crystal is sealed in the sealing material is irradiated with ultraviolet rays to harden the sealing material to two pieces. Irradiation device for substrate bonding (for example, refer to Patent Document 1). When the sealing material is irradiated with ultraviolet rays, if the ultraviolet rays are irradiated to the liquid crystal, the characteristics of the liquid crystal will change. Therefore, in the irradiation device, a mask for shielding light from the light source is arranged at a position corresponding to the liquid crystal.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2004-77583

The irradiation device may be irradiated without using a photomask. In this case, consider, for example, a reticle holder that holds the reticle is detachably configured from the device body. However, if the reticle holder is detachable from the device body, the reticle holder needs to be driven and the position of the reticle must be adjusted. Alignment drive section for fine adjustment. The alignment drive section and the photomask support It is difficult to attach and detach the photomask holder from the device body while maintaining this state.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an irradiation device capable of easily attaching and detaching a photomask holder holding a photomask to the apparatus body.

In order to achieve the above object, the irradiation device of the present invention is characterized by having: a device body; a guide portion provided on the device body; a photomask holder that is freely drawn along the guide portion to the front side; and alignment A driving unit that drives the photomask support and finely adjusts the position of the photomask supported on the photomask support; and the registration driving unit is provided on the front side and the rear side, and the front side registration driving unit is provided with a drive A motor and a connecting shaft connecting the driving motor and the mask holder. The connecting shaft is detachable from the driving motor, and the driving motor is disposed at a position deviated from a drawing trajectory of the mask holder.

In the above configuration, a plurality of holding rods including a light-transmitting material are arranged on a support frame constituting the photomask holder, and the photomask is adsorbed and held by the plurality of holding rods.

In addition, the irradiation device of the present invention is characterized by comprising: a device body; a guide portion provided on the device body; a photomask holder that is freely drawn toward the front side along the guide portion; and an alignment drive portion, It drives the photomask holder, and finely adjusts the position of the photomask supported by the photomask holder; and the registration driving section is provided on the front side and the back side, and the front registration driving section is provided with a driving motor and a connection A connecting shaft of the driving motor and the photomask support, the connecting shaft is freely detachable from the photomask support, and the driving motor is disposed at a position deviated from a drawing track of the photomask support.

In the above configuration, it is arranged on a holder frame constituting the photomask holder. There are a plurality of holding rods including a light-transmitting material, and the photomask is adsorbed and held by the plurality of holding rods.

According to the present invention, the mask holder holding the mask can be easily attached to and detached from the apparatus body.

1‧‧‧ irradiation device

1A ~ 1C‧‧‧Illuminator

2‧‧‧ Workpiece

2A‧‧‧ Irradiated surface

2B‧‧‧ substrate

2C‧‧‧sealing material

2D‧‧‧ LCD

3A‧‧‧ opening

4‧‧‧ irradiation platform

10‧‧‧ UV Light

11‧‧‧shell

12‧‧‧ main reflector

13‧‧‧ Wavelength Selective Filter

14‧‧‧Auxiliary reflector

14A‧‧‧Auxiliary reflector fixing member

20‧‧‧Auxiliary end plate

21‧‧‧Auxiliary side plate

30‧‧‧device body

30A‧‧‧Front

30B‧‧‧Back

30C‧‧‧Side

31‧‧‧ Frontal 扉

32‧‧‧ back 扉

33‧‧‧ Bezel

40‧‧‧Mask holder

40A‧‧‧ lower surface

41‧‧‧Bracket frame

42‧‧‧ stick

43, 46‧‧‧ tube

44‧‧‧ connector

45‧‧‧pipe connection

47, 85‧‧‧ sliding section

47A‧‧‧ round

48‧‧‧handle

49‧‧‧bearing department

50‧‧‧Mask

51‧‧‧Shading Department

52‧‧‧Transmission Department

60‧‧‧Front side registration drive unit (alignment drive unit)

61‧‧‧Drive motor

61A‧‧‧Drive shaft

61B‧‧‧pedestal

62‧‧‧Connecting shaft

62A‧‧‧Shaft

62B‧‧‧ Tablet

63, 67, 74, 78‧‧‧ Fixtures

64, 75‧‧‧ positioning pins

65, 76‧‧‧ positioning holes

66‧‧‧ Front side drive unit housing

68‧‧‧ Linear Motion Guide

70‧‧‧Back side registration drive unit (alignment drive unit)

70A‧‧‧ (the entire back side registration drive unit 70)

71, 72‧‧‧Drive motor

71A, 72A‧‧‧Drive shaft

71B, 72B‧‧‧Driver body

73‧‧‧ Link

77‧‧‧Back side drive unit housing

79‧‧‧bearing

80‧‧‧Photomask support

81, 86‧‧‧ track

82‧‧‧Guide

85A‧‧‧Lifting mechanism

90‧‧‧control device

P1‧‧‧ separation position

P2‧‧‧ Position of the joint surface between the lower section drive section and the upper section drive section

X1, X2‧‧‧Width direction

Y‧‧‧ depth direction

δ‧‧‧ clearance

FIG. 1 is a front view showing an irradiation apparatus according to an embodiment of the present invention.

FIG. 2 is a rear view of the irradiation device.

Fig. 3 is a right side view showing the irradiation device.

FIG. 4 is a diagram showing a workpiece and a photomask, (A) is a sectional view of the workpiece, and (B) is a perspective view of the workpiece and the mask.

Fig. 5 is a view showing a mask holder provided on the device body, (A) is a top view, (B) is a front view, and (C) is a side view.

Fig. 6 is a view showing a mask holder, (A) is a top view, (B) is a front view, and (C) is a side view.

FIG. 7 is an enlarged view of part A of FIG. 5.

Fig. 8 is a view showing the front-side registration driving part, (A) is a front view, (B) is a side view, (C) is a plan view of a state after the connecting shaft is removed, and (D) is a view after the removal Top view of the connecting shaft.

Fig. 9 is a view showing a back side registration drive part, (A) is a front view, (B) is a rear view, (C) is a side view, and (D) is a state where an upper Y-axis drive part is removed. The top view of the X1-axis drive section, (E) is the top view of the Y-axis drive section after removal.

FIG. 10 is a schematic illustration of a mask holder and a mask supporting table according to a modification of the present invention; Front view.

Fig. 11 is a side view of Fig. 10, (A) shows a state when the alignment is used, and (B) shows a state when the photomask holder is pulled out.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of the irradiation device of this embodiment, FIG. 2 is a rear view of the irradiation device, and FIG. 3 is a right side view of the irradiation device.

As shown in FIG. 1 and FIG. 2, the irradiation device 1 is a device in which the ultraviolet lamp 10 is built in the device body 30 and can irradiate the entire area of the workpiece 2 located in the irradiation area with uniform illuminance (that is, good uniformity). . In addition, the irradiation device 1 is also used as a light-curing device in which a substrate such as a liquid crystal panel is used as the workpiece 2 and the workpiece 2 is irradiated with light to harden the light-curable resin used for the workpiece 2. The irradiation device 1 irradiates the workpiece 2 with a plurality of (three in this embodiment) linear light sources. In the irradiation device 1, the above-mentioned ultraviolet lamp 10 of a straight tube type and high output is used as an ultraviolet light source.

As shown in FIG. 1 to FIG. 3, the device body 30 is box-shaped, and includes a front face 31 and a back face 32 on the front face 30A and the rear face 30B, respectively. The front surface 扉 31 and the rear surface 扉 32 are provided at positions facing the photomask holder 40 described below, and the front surface 扉 31 and the rear surface 扉 32 are opened to expose the photomask holder 40 to the outside. In addition, the front face 31 is formed in a size that can be pulled out of the mask holder 40. In addition, in this embodiment, the side where the mask holder 40 is pulled out is set to the front. Maintenance spaces are provided on the front side and the back side of the device body 30.

It should be noted that the following directions (front, back), left and right, and up and down directions described below indicate the directions when viewed from the front side in a state where the irradiation device 1 is installed.

The irradiation apparatus 1 includes at least one (three in this embodiment) irradiators 1A to 1C in the apparatus body 30. Each of the illuminators 1A to 1C includes one ultraviolet lamp 10 and a main reflection plate (main reflection mirror) 12 for controlling the radiated light of the ultraviolet lamp 10 in the casing 11, and are arranged in parallel to the axis direction of the ultraviolet lamp 10 The width direction (light source side-by-side direction) W of the intersection. The irradiation device 1 includes an auxiliary reflection plate (auxiliary reflection mirror) 14 below the irradiators 1A to 1C. The main reflection plate 12 and the auxiliary reflection plate 14 constitute a reflection mirror of the irradiation device 1. Furthermore, the irradiation device 1 includes a mask holder 40 below the irradiators 1A to 1C, and a mask 50 (see FIG. 4) for shielding the ultraviolet rays of the ultraviolet lamp 10 is held on the mask holder 40.

The work 2 is formed in a rectangular shape in a plan view. The workpiece 2 is placed on an irradiation platform 4 which can be raised and lowered, and an openable and closable baffle 33 formed on a side surface 30C of the apparatus body 30 is applied to the apparatus body 30 by a transporting means (not shown) such as a transport robot. Carry in and out. In this embodiment, a baffle 33 is provided on the right side, and the workpiece 2 is carried in and out of the device body 30 by the transfer robot from the baffle 33. However, the position of the baffle 33 or the moving direction of the work 2 It is not limited to this. The irradiation platform 4 on which the workpiece 2 is mounted is raised to a specific irradiation position (in this embodiment, the distance between the mask 50 and the workpiece 2 is about 2 mm). At this time, the irradiation platform passes through the opening 3A of the mask support table described below.

The ultraviolet lamps 10 extend in parallel directly above the work 2. Further, by using a long-arc lamp with a long tube length as the ultraviolet lamp 10, the area of the work 2 can be increased. The workpiece 2 may be arranged so that the long edge thereof is the tube axis of the ultraviolet lamp 10 or may be arranged so that the short edge is the tube axis of the ultraviolet lamp 10.

As described above, the irradiation device 1 includes the main reflection plate 12 and the auxiliary reflection plate 14, and the direct light from the ultraviolet lamp 10, the main reflection plate 12, and the auxiliary reflection plate can be used. The reflected light of 14 irradiates the workpiece 2 with a uniform illuminance.

Here, when the workpiece 2 is irradiated with only the direct light of the ultraviolet lamp 10, the luminance distribution of the workpiece 2 in the illuminance distribution of the ultraviolet lamp 10 is reflected approximately directly.

Therefore, the light radiated from the ultraviolet lamp 10 and deviated from the workpiece 2 is reflected by the main reflecting plate 12 and the auxiliary reflecting plate 14 and is irradiated in a manner to supplement the illuminance distribution of the direct light in the workpiece 2, thereby improving the uniformity of the workpiece .

The main reflecting plate 12 reflects the light radiated to the surroundings of the ultraviolet lamp 10 (more accurately, the upward direction and the horizontal direction) toward the workpiece 2 to increase the illuminance of the illuminated surface 2A (FIG. 4) of the workpiece 2 and Those seeking uniformity of illumination. The main reflecting plate 12 is formed in a water-conducting groove shape extending along the tube axis of the ultraviolet lamp 10, and a surface facing the ultraviolet lamp 10 is formed as a reflecting surface.

A radiation opening having a rectangular shape in a plan view is formed on the housing 11 directly below the ultraviolet lamp 10, and is provided so that the longitudinal direction is consistent with the longitudinal direction (axial direction) of the ultraviolet lamp 10. A wavelength selection filter 13 for selecting a wavelength of light to be transmitted is provided inside the irradiation opening, and the irradiation device 1 irradiates light of a desired wavelength through the wavelength selection filter 13. In addition, although the wavelength selection filter 13 is provided in this embodiment, when the ultraviolet lamp 10 itself can emit light of a desired wavelength, the wavelength selection filter 13 may be omitted. A wavelength-selective filter may be disposed between the ultraviolet lamp 10 and the opening 3A. The casing 11 may be omitted.

The auxiliary reflection plate 14 is disposed between the main reflection plate 12 and the workpiece 2 and compensates the illumination distribution of the ultraviolet lamp 10 and the main reflection plate 12 by reflecting light leaking out of the workpiece 2 toward the workpiece 2.

Specifically, the auxiliary reflection plate 14 has one opposite to both ends of the ultraviolet lamp 10 A pair of auxiliary end plates 20 (FIG. 6) and a pair of auxiliary side plates 21 (FIG. 6) opposite to the two sides of the ultraviolet lamp 10. The auxiliary end plates 20 and the auxiliary side plates 21 constitute a substantially quadrangular columnar shape surrounding the periphery of the workpiece 2, and the inner wall surface is configured as a reflecting surface. In the present embodiment, the auxiliary reflection plate 14 is provided inside the mask holder 40, but it is not limited to this. For example, the auxiliary reflection plate 14 may be provided above the mask holder 40. In addition, in this embodiment, the auxiliary reflection plate 14 is configured to be supported by the mask holder 40 via an auxiliary reflection plate fixing member 14A (FIG. 7) provided on the mask holder 40. And pulled out from the device body 30. In a case where the auxiliary reflection plate 14 and the mask holder 40 do not partially overlap in the height direction, the auxiliary reflection plate 14 may also be fixed on the device body 30.

Under this configuration, the radiation distribution of the ultraviolet lamp 10 and the main reflection plate 12 is compensated by the reflected light of the pair of auxiliary end plates 20 and the pair of auxiliary side plates 21.

Although the auxiliary reflection plate 14 is provided in this embodiment, the auxiliary reflection plate 14 may be omitted.

FIG. 4 is a diagram showing the workpiece 2 and the reticle 50, FIG. 4 (A) is a sectional view of the workpiece 2, and FIG. 4 (B) is a perspective view of the workpiece 2 and the reticle 50.

As shown in FIG. 4, the work 2 is a liquid crystal panel in which a sealing material (liquid crystal sealing material) 2C containing an ultraviolet curable resin is disposed between two substrates 2B, and a liquid crystal 2D is sealed in the sealing material 2C. The workpiece 2 is formed by irradiating ultraviolet rays to the sealing material 2C to harden the sealing material 2C and bonding two substrates 2B together. One substrate 2B is an array substrate having a TFT (thin film transistor) circuit (not shown) at a position corresponding to the liquid crystal 2D, and the other substrate 2B is provided with a color filter (not shown) at a position corresponding to the liquid crystal 2D. Color filter substrate. FIG. 4 shows the workpiece 2 arranged so that the substrate 2B having the TFT circuit becomes the irradiated surface 2A. Here, the sealing material 2C is irradiated When ultraviolet rays are irradiated to the liquid crystal 2D, the characteristics of the liquid crystal 2D will change. Therefore, the irradiating device 1 is provided with a photomask 50 that blocks light directed to the liquid crystal 2D.

The photomask 50 includes a light-shielding portion 51 formed at a position corresponding to the liquid crystal 2D, and a light-transmitting portion 52 formed at a position corresponding to the sealing material 2C. The mask 50 is formed using a transparent material (glass in this embodiment). In the transparent material, a light-shielding material (such as a metal coating) is provided at a portion where light-shielding is required to form the light-shielding portion 51, and the light-shielding portion is formed. Portions other than 51 are formed as the light-transmitting portion 52 that maintains the transparent material as it is. As shown in FIG. 1, the photomask 50 is adsorbed and held on the lower surface of the holding rod 42 of the photomask holder 40.

FIG. 5 is a view showing a mask holder 40 provided on the apparatus body 30, FIG. 5 (A) is a top view, FIG. 5 (B) is a front view, and FIG. 5 (C) is a side view. FIG. 6 is a view showing a mask holder 40, FIG. 6 (A) is a top view, FIG. 6 (B) is a front view, and FIG. 6 (C) is a side view. FIG. 7 is an enlarged view of part A of FIG. 5.

As shown in FIG. 5 and FIG. 6, the mask holder 40 includes a bracket frame (frame body) 41 formed in a substantially rectangular frame shape in plan view, and holds a plurality of rod-shaped (six in this embodiment) rods. The (holding portion) 42 is configured to be supported on the holder frame 41. The bracket frame 41 is formed using a rigid material (for example, metal such as aluminum, stainless steel, iron, or aluminum in this embodiment) that can support the holding rod 42.

The plurality of holding rods 42 are formed using a light-transmitting material (preferably a transparent member, and quartz in this embodiment) so as to span the length of the opening 3A, and both ends are supported by the bracket frame 41. In the present embodiment, the plurality of holding rods 42 are arranged in the width direction W, but may be arranged in the depth direction (Y direction).

In this way, the mask holder 40 is constituted by using a plurality of holding rods 42 without using 1 Since a large quartz plate with high processing accuracy can be used, the components constituting the mask holder 40 can be miniaturized, and as a result, weight reduction and cost reduction can be achieved. Furthermore, in this embodiment, the holding rods 42 are arranged at regular intervals, but the arrangement interval is not limited to the regular intervals, and can be appropriately set according to the size of the work 2 and the arrangement of the liquid crystal cells inside the work 2.

The holding rod 42 is formed in a substantially angular columnar shape, and although not shown, it has suction grooves on the lower surface (the surface on the side to be irradiated 2A), and passages communicating with the suction grooves on both end surfaces. As shown in FIG. 6, a tube 43 is connected to the passage, and the tubes 43 of the plurality of holding rods 42 are assembled into one through a joint 44 on the front side and the back side, respectively, and are connected to the tube connection portion 45. A tube 46 connected to a pressure reducer (not shown) is connected to the tube connection portion 45. When the pressure reducer is driven, the path of the holding rod 42 is reduced in pressure, and the photomask 50 is sucked and held on the holding rod 42 by suction from the adsorption tank.

As shown in FIG. 5, the irradiation device 1 has a front-side registration driving unit (alignment-driving unit) 60 and a back side that drive the mask holder 40 and finely adjust the position of the mask 50 on the front side and the back side, respectively. Registration drive unit (alignment drive unit) 70.

The front-side registration driving unit 60 may be configured to drive the mask holder 40 in the width direction W (X2 direction).

The back side registration driving unit 70 can be configured to drive the mask holder 40 in the width direction W (X1 direction) and the depth direction (Y direction).

The front-side registration driving unit 60 and the back-side registration driving unit 70 are respectively provided at substantially the center in the width direction W, but the arrangement position is not limited to this.

The ultraviolet lamp 10, the pressure reducer, and the registration drive units 60 and 70 are connected to a control device 90 (FIG. 1) of the irradiation device 1. Under the control of the control device 90, the lighting of the ultraviolet lamp 10, or the driving of the pressure reducer and the alignment drive units 60 and 70 is controlled.

In the irradiation device 1 shown in FIG. 1, for example, a color When the substrate 2B of the filter is used as the irradiated surface 2A and the workpiece 2 is arranged, the ultraviolet rays may be irradiated without using the mask 50. In this case, if the holding rod 42 is located on the upper side of the workpiece 2, the uniformity of the illuminance of the illuminated surface 2A is deteriorated by the influence of the light reflected or refracted by the holding rod 42. In particular, when the ultraviolet rays reflected or refracted by the holding rod 42 are condensed on the liquid crystal 2D, the characteristics of the liquid crystal 2D are changed, which is a problem. Therefore, it is necessary to remove the holding rod 42 when the photomask 50 is not used, but the operation of removing the holding rod 42 is complicated, and there is a risk that the holding rod 42 with a high price may be damaged during removal.

Therefore, in this embodiment, the photomask holder 40 is easily detachably configured, and the photomask 50 is held in the photomask holder 40. More specifically, the photomask holder 40 is configured to be freely pulled out from the device body 30, and the photomask holder 40 is easily configured to be detachable from the front-side registration driving unit 60 and the back-side registration driving unit 70.

As shown in FIG. 5, the irradiation device 1 includes a mask support table 80 on which the mask holder 40 is placed, and the mask support table 80 is configured to be freely pulled out toward the front side.

Specifically, the photomask support base 80 is formed in a substantially rectangular frame shape in a plan view, and an inner surface thereof constitutes an opening 3A. As shown in FIGS. 5 and 7, the mask support base 80 has a track 81 for sliding the mask holder 40 on the upper surfaces of the left and right side portions, and a guide portion 82 for guiding the mask holder 40. The rail 81 extends in the front-rear direction with the plane facing upward, and a guide portion 82 is provided on the side of the rail 81. The guide portion 82 is provided on the lateral outer side of the rail 81, and the photomask holder 40 is prevented from falling off by the guide portion 82.

The photomask holder 40 is provided on both sides of the holder frame 41 and includes a plurality of sliding portions (three left and right in this embodiment, six in total) that can slide on the rail 81. 47. The sliding portion 47 is configured to reduce friction with the rail 81 when the mask holder 40 slides. In the present embodiment, the sliding portion 47 is constituted by a roller, and is arranged such that the wheel 47A faces downward and abuts on the rail 81. As described above, by providing the sliding portion 47, even if the mask holder 40 is formed to be heavy (in this embodiment, it exceeds 30 kg), the mask holder 40 can be easily pulled out. The configuration of the sliding portion 47 is not limited to a roller.

On the photomask support 40, handles 48 that can be held when the photomask support 40 is pulled out are provided on both sides.

FIG. 8 is a view showing the front-side registration driving unit 60, FIG. 8 (A) is a front view, FIG. 8 (B) is a side view, and FIG. 8 (C) is a plan view of a state after the connecting shaft is removed. 8 (D) is a top view of the connecting shaft after removal.

As shown in FIG. 8, the front-side registration driving unit 60 includes a driving motor 61 fixed to a mask support table 80 of the device body 30, and a connecting shaft 62 that connects the driving motor 61 and the mask holder 40. The drive motor 61 includes a drive shaft 61A that is movable in the axial direction, and a base portion 61B fixed to the drive shaft 61A.

The drive shaft 61A is arranged in the width direction W (X2 direction), and thereby the photomask holder 40 is driven in the width direction W (X2 direction). A connecting shaft 62 is fixed to the pedestal portion 61B.

The connecting shaft 62 is provided with a shaft portion 62A along the upper and lower sides, and a flat plate 62B is provided at the base end of the shaft portion 62A via a linear motion guide 68. The flat plate 62B has at least one (two in this embodiment) fixing device. 63 (for example, screws) and fixed to the pedestal portion 61B. The connecting shaft 62 is configured to be slidable in the depth direction (Y direction) along the linear motion guide 68.

At least one positioning pin 64 (two in this embodiment) is formed in the flat plate 62B, and a positioning hole 65 is formed in the base portion 61B. Connecting shaft 62 at During fixing, positioning is performed by fitting the positioning pin 64 into the positioning hole 65.

The shaft portion 62A of the connecting shaft 62 is inserted into a bearing portion 49 provided on the mask holder 40. For the bearing portion 49, for example, a rotary sliding bush is used, and a gap δ is formed between the bearing portion 49 and the base portion of the connecting shaft 62 so that the positioning pin 64 can be pulled out from the positioning hole 65.

The front-side registration drive unit 60 includes a front-side drive unit housing 66 that covers the base of the drive motor 61 and the connecting shaft 62. The front-side drive unit housing 66 is fixed to the mask support base 80 of the apparatus body 30 by at least one (four in this embodiment) fixture 67 (for example, a screw).

The front-side registration drive unit 60 is separated from the separation position P1 corresponding to the joint surface of the upper surface of the pedestal portion 61B and the lower surface of the flat plate 62B of the connecting shaft 62 with the front-side drive portion housing 66 removed. The separation position P1 of the front-side registration driving unit 60 is disposed below the lower surface 40A (the lower surface of the bracket frame 41) of the photomask holder 40, that is, a position deviating from the pull-out trajectory of the photomask holder 40. Thereby, it is not necessary to remove the driving motor 61 when the photomask holder 40 is pulled out, so the photomask holder 40 can be easily attached and detached.

FIG. 9 is a view showing the back side registration driving section 70, FIG. 9 (A) is a front view, FIG. 9 (B) is a rear view, FIG. 9 (C) is a side view, and FIG. 9 (D) is an upper side view. The top view of the state of the driving motor and the driving part after removal, FIG. 9 (E) is a top view of the driving motor and the driving part after removal.

As shown in FIG. 9, the back-side registration drive unit 70 includes two drive motors 71 and 72 fixed on a mask support table 80 of the device body 30, and bearings 79 and light connected by the drive motors 71 and 72. Connected body 73 of the cover bracket 40. The drive motors 71 and 72 have drive shafts 71A and 72A, respectively, which are movable in the axial direction, and are fixed to the drive shaft 71A, The drive body 71B, 72B on 72A. A driving motor 72, a driving shaft 72A, and a driving unit body 72B are supported on an upper surface of a driving unit body 71B. In FIG. 9, reference numeral 70A indicates the base of the entire rear-side registration drive unit 70, and reference symbol P2 indicates the position of the joint surface between the lower-stage drive unit and the upper-stage drive unit.

The drive shaft 71A is arranged in the width direction W (X1 direction), and the drive shaft 72A of the drive motor 72 is arranged in the depth direction (Y direction). Thereby, the mask holder 40 is arranged in the width direction W (XI direction) and the depth direction (Y Direction) drive. As described above, the connecting shaft 62 is configured to be slidable in the depth direction (Y direction), and the position of the connecting shaft 62 in the depth direction (Y direction) is adjusted by the drive motor 72.

The coupling body 73 is supported by the upper drive motor 72 via a bearing 79, and the photomask holder 40 is fixed to the coupling body 73 by at least one (two in this embodiment) fixture 74 (for example, a screw). The coupling body 73 is externally fitted into a substantially cylindrical bearing 79 extending vertically, and is configured to be rotatable around a central axis of the bearing 79.

A positioning pin 75 is formed on the back surface of the mask holder 40 at approximately the center of the width direction W, and a positioning hole 76 is formed on the front surface of the coupling body 73. When the photomask holder 40 is fixed, it is positioned by fitting a positioning pin 75 into the positioning hole 76.

In addition, the back-side registration drive unit 70 includes a back-side drive unit housing 77 that covers the drive motors 71 and 72. The front-side drive unit housing 66 is fixed to the mask support base 80 of the apparatus main body 30 by at least one (four in this embodiment) fixture 78 (for example, a screw).

In this way, since the positioning pins 64 and the positioning pins 75 are provided on the front side and the back side of the photomask holder 40, even if the photomask holder 40 is removed, the photomask holder 40 can be returned to the original position without the photomask. The position of the bracket 40 is readjusted. The positioning pins 64 and 75 are not limited to pins, and various positioning members can be used.

Next, a procedure for attaching and detaching the photomask holder 40 will be described.

In this embodiment, since the mask holder 40 is formed relatively heavy, two or more workers need to mount and remove the mask holder 40.

When removing the photomask holder 40, first, the back face 32 is opened, the tube 46 on the back side is pulled out, and the fixture 74 is removed. Next, the front cymbal 31 is opened, the tube 46 on the front side is pulled out, and the fixture 67 is removed to remove the front-side drive portion housing 66. Next, the fixture 63 is removed, and the connecting shaft 62 is lifted up and separated from the base portion 61B. Then, the photomask holder 40 is pulled out toward the front side until the bearing portion 49 is positioned closer to the front side than the photomask support base 80, and the connecting shaft 62 is pulled out from the bearing portion 49 downward. Finally, the entire mask holder 40 is pulled out toward the front side and carried out. The photomask 50 is attached to and detached from the photomask holder 40 by a robot (not shown).

When mounting the photomask holder 40, first, the photomask holder 40 is carried into the photomask support base 80 from the front side. Next, the connection shaft 62 is inserted into the bearing portion 49, and with the connection shaft 62 raised, the photomask holder 40 is inserted deep, and the positioning pin 75 on the back side is inserted into the positioning hole 76. Next, the connecting shaft 62 is lowered, the front-side positioning pin 64 is inserted into the positioning hole 65, and the front side of the mask holder 40 is fixed by the fixture 63. Next, the front-side drive portion housing 66 is fixed by the fixture 67, and the front-side pipe 46 is connected to the pipe connection portion 45, and the front face 31 is closed. Next, the rear surface side of the photomask holder 40 is fixed by the fixture 74, and the tube 46 on the rear surface side is connected to the tube connection part 45, and the rear surface 32 is closed.

The order is not limited as long as the photomask holder 40 can be attached and detached similarly.

As described above, according to the present embodiment, it is configured as follows: the device main body 30, the guide portion 82 provided on the mask support table 80 of the device main body 30, and the front side can be freely drawn along the guide portion 82. Mask holder 40, and driving the mask holder 40 and finely adjusting the position of the mask 50 supported on the mask holder 40 The registration drive units 60 and 70 are provided on the front side and the back side, and the front side registration drive unit 60 includes a drive motor 61 and a connecting shaft 62 that connects the drive motor 61 and the mask holder 40. , The connecting shaft 62 is detachable from the driving motor 61. According to this configuration, the photomask holder 40 can be easily disengaged from the driving motor 61 and the photomask holder 40 can be easily pulled out. Therefore, the holding rod 42 can be easily corresponding to each photomask holder 40 and relatively easy to the apparatus body 30. Loading and unloading.

In addition, since the drive motor 61 is disposed at a position deviated from the drawing trajectory of the photomask holder 40, the photomotor holder 40 does not need to be removed when the photomask holder 40 is pulled out, and thus the photomask holder 40 can be easily pulled out.

In addition, according to the present embodiment, a configuration is adopted in which a plurality of holding rods 42 including a light-transmitting material are arranged on a holder frame 41 constituting a mask holder 40, and the photomask 50 is adsorbed by the plurality of holding rods 42 maintain. According to this configuration, since the photomask 50 can be stably held by the plurality of holding rods 42, the position of the photomask 50 can be accurately adjusted. In addition, when the photomask 50 is attached to or detached from the device body 30, the holder frame 41 that can be formed more firmly than the holding rod 42 can be handled, so that damage to the holding rod 42 can be suppressed.

However, the above-mentioned embodiment is one aspect of the present invention, and it is needless to say that the present invention can be appropriately modified without departing from the scope of the present invention.

For example, in the above-mentioned embodiment, it is configured as follows: a rail 81 is provided on the upper surface of the mask support base 80, and the sliding portion 47 is arranged such that the wheel 47A faces downward and abuts on the rail 81. . However, the arrangement configuration of the track 81 and the wheel 47A is not limited to this. Instead of or in addition to this arrangement, the track may be provided on the mask holder 40, and the sliding portion 47 may be provided on the apparatus body such that the wheel 47A faces upward and the wheel 47A abuts against the track A mask support table 80 on the 30 side is provided.

Moreover, in the above-mentioned embodiment, the coupling shaft 62 is detachable from the drive motor 61, but the attachment and detachment of the mask holder 40 and the drive motor 61 are not limited to this. For example, as shown in FIGS. 10 and 11, a configuration may be adopted in which the connecting shaft 62 is fixed to the drive motor 61 and can be detached from the bearing portion 49 of the mask holder 40.

FIG. 10 is a front view schematically showing a mask holder 40 and a mask support base 80 according to a modification. FIG. 11 is a side view of FIG. 10, FIG. 11 (A) shows a state when the alignment is used, and FIG. 11 (B) shows a state when the mask holder 40 is pulled out.

In the examples of FIGS. 10 and 11, the back-side registration driving unit and the front-side registration driving unit 60 are configured substantially the same. In addition, a plurality of sliding sections 85 (5 in each of the left and right in this embodiment, a total of 10) are provided on the left and right side portions of the reticle support base 80, and are in contact with the sliding portion 85. The rail 86 is provided on the lower surface 40A of the bracket frame 41. The sliding portion 85 is provided with an elevating mechanism 85A for vertically lifting and lowering the mask holder 40, and the tip portion is made of, for example, a roller so as to reduce friction with the rail 86 when the mask holder 40 slides. The lifting mechanism 85A is connected to the control device 90 and is configured to expand and contract according to the control of the control device 90. Regarding the rail 86, the flat surface extends downward in the front-rear direction.

When the photomask holder 40 is removed, as shown in FIG. 11 (B), the connecting shaft 62 is pulled up from the bearing portion 49 by raising all the sliding portions 85, so that the photomask holder 40 faces from the front side and the rear side. The bit driving section 60 is disengaged. Thereby, the mask holder 40 can be pulled out to the front side.

Furthermore, in the examples of FIGS. 10 and 11, it is not necessary to dispose the driving motor 61 at a position deviating from the pull-out trajectory of the photomask holder 40, so that the degree of freedom in disposing the driving motor 61 is improved. In this embodiment, the front and back coupling shafts 62 are inserted into the front and back bearing portions (rotary slide bushing) of the mask holder 40. The position of the photomask holder 40 is determined in the sleeve) 49, so that a coupling body such as a positioning pin or a screw is not required.

Moreover, in the said embodiment, although the registration drive parts 60 and 70 were provided in the front side and the back side, for example, they may be provided in both sides. In this case, it is not necessary to dispose the motor 61 at a position deviating from the pull-out trajectory of the mask holder 40.

In the above embodiment, the photomask 50 is held by a plurality of holding rods 42 including a light-transmitting material. However, a plurality of holding rods may be formed by a flat plate (for example, a quartz plate) including a light-transmitting material. 42. The configuration of holding the photomask 50 in the photomask holder 40 is not limited to the holding rod 42 or the flat plate, and may be held by other members.

Moreover, in the said embodiment, although three ultraviolet lamps 10 were used for a linear light source, the number of linear light sources is not limited to this. In addition, instead of the ultraviolet lamp 10, a linear light source in which light emitting elements such as ultraviolet LEDs are linearly arranged may be used. The light irradiating the linear light source is not limited to ultraviolet rays.

Moreover, in the said embodiment, although the irradiation apparatus 1 was demonstrated as a photocuring apparatus, this invention is applicable to various irradiation apparatuses.

Claims (4)

An irradiation device is characterized by having: a device body; a guide portion provided on the device body; a photomask holder that is freely drawn toward the front side along the guide portion; and an alignment driving portion that drives the above The photomask support, and finely adjust the position of the photomask supported on the photomask support; and the registration driving unit is provided on the front side and the back side, and the front registration driving unit is provided with a driving motor and is connected to the above. The connecting shaft of the driving motor and the photomask bracket is free from the driving motor, and the driving motor is disposed at a position deviated from the drawing track of the photomask holder. According to the irradiation device of claim 1, a plurality of holding rods including a light-transmitting material are arranged on a support frame constituting the photomask holder, and the photomask is held by the plurality of holding rods. An irradiation device is characterized by having: a device body; a guide portion provided on the device body; a photomask holder that is freely drawn toward the front side along the guide portion; and an alignment driving portion that drives the above The photomask support, and finely adjust the position of the photomask supported on the photomask support; and the registration driving unit is provided on the front side and the back side, and the front registration driving unit is provided with a driving motor and is connected to the above. The connecting shaft of the driving motor and the photomask support, the connecting shaft is free from the photomask support, and the driving motor is disposed at a position deviated from the drawing track of the photomask support. According to the irradiation device of claim 3, a plurality of holding rods including a light-transmitting material are arranged on a support frame constituting the photomask holder, and the photomask is held by the plurality of holding rods.