CN105372880A - Irradiation device - Google Patents
Irradiation device Download PDFInfo
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- CN105372880A CN105372880A CN201510484946.4A CN201510484946A CN105372880A CN 105372880 A CN105372880 A CN 105372880A CN 201510484946 A CN201510484946 A CN 201510484946A CN 105372880 A CN105372880 A CN 105372880A
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- Prior art keywords
- mask holder
- mask
- drive motor
- driven
- face side
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
The invention provides an irradiation device. The irradiation device has a mask holding rack and a maintaining mask can be easily assembled or disassembled relative to the main body of the irradiation device. The irradiation device has a device body; a guiding part (82), which is arranged on the device body; a mask holding rack (40), which is introduced from the guiding part (82) to the front side; and an aligning driving parts (60,70), which drive the mask holding rack (40) to slightly adjust the position of a mask (50), which is supported by the mask holding rack. The aligning driving parts (60,70) are respectively arranged on the front side and back side. The aligning driving part (60), which is arranged on the front side, comprises a driving motor (61) and a connection shaft (62), which connects the driving motor (61) and the mask holding rack (40); the connection shaft (62) can be freely removed from the driving motor (61); and the driving motor (61) is arranged on a position that is deviated from the introduction track of the mask holding rack (40).
Description
Technical field
The present invention relates to the irradiation unit possessing the mask holder keeping mask.
Background technology
In the past, as irradiation unit, known following lighting device: to arranging the seal that is made up of uv-hardening resin and make seal harden the liquid crystal panel irradiation ultraviolet radiation of sealing liquid crystal in seal between two light-transmitting substrates, thus by two baseplate-laminatings (for example, referring to patent documentation 1).When to seal irradiation ultraviolet radiation, if the illuminated ultraviolet of liquid crystal, the characteristic of liquid crystal will change, and therefore, in this irradiation unit, the position corresponding with liquid crystal phase configure the mask light of light source being carried out to shading.Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2004-77583 publication
Summary of the invention
Problem to be solved by this invention
Irradiation unit irradiates when not using mask sometimes.In this situation, such as can consider to keep the mask holder of mask to be configured to relative to apparatus main body dismounting freely, but, when mask holder being configured to relative to apparatus main body dismounting freely, need to drive mask holder the position of mask to be carried out to the driven in registry portion of inching.This driven in registry portion and mask holder link, and therefore, are difficult in such a state relative to apparatus main body dismounting mask holder.
The present invention makes in view of the foregoing, its objective is the irradiation unit providing and can keep the mask holder of mask relative to apparatus main body easily dismounting.
In order to realize above-mentioned object, the feature of irradiation unit of the present invention is to have: apparatus main body; Be located at the guide portion of described apparatus main body; Along described guide portion to and face side draws mask holder freely; And drive described mask holder and the position of the mask being supported in described mask holder carried out to the driven in registry portion of inching, described driven in registry portion is located at face side and rear side, face side driven in registry portion possesses drive motor and links the connection shaft of described drive motor and described mask holder, described connection shaft is set to and departs from freely with described drive motor, and described drive motor is configured at the position of the extraction track departing from described mask holder.
In such a configuration, also passable, the retainer framework forming described mask holder is configured with the many maintenance bars be made up of light transmission starting material, and adsorbs the described mask of maintenance by many maintenance bars.
In addition, the feature of irradiation unit of the present invention is to have: apparatus main body; Be located at the guide portion of described apparatus main body; Along described guide portion to face side extraction mask holder freely; And drive described mask holder and the position of the mask being supported in described mask holder carried out to the driven in registry portion of inching, described driven in registry portion is located at face side and rear side, face side driven in registry portion possesses drive motor and links the connection shaft of described drive motor and described mask holder, described connection shaft is set to and departs from freely with described mask holder, and described drive motor is configured at the position of the extraction track departing from described mask holder.
In such a configuration, also passable, the retainer framework forming described mask holder is configured with the many maintenance bars be made up of light transmission starting material, and adsorbs the described mask of maintenance by many maintenance bars.Invention effect
According to the present invention, the mask holder of mask can be kept relative to apparatus main body easily dismounting.
Accompanying drawing explanation
Fig. 1 is the front view of the irradiation unit represented involved by embodiments of the present invention.
Fig. 2 is the rear view representing irradiation unit.
Fig. 3 is the right side view representing irradiation unit.
The cut-open view of Fig. 4 to be the figure representing workpiece and mask, Fig. 4 (A) be workpiece, Fig. 4 (B) is the stereographic map representing workpiece and mask.
Fig. 5 is the figure representing the mask holder be arranged on apparatus main body, Fig. 5 (A) is vertical view, and Fig. 5 (B) is front view, and Fig. 5 (C) is side view.
Fig. 6 is the figure representing mask holder, Fig. 6 (A) is vertical view, and Fig. 6 (B) is front view, and Fig. 6 (C) is side view.
Fig. 7 is the enlarged drawing of the part A of Fig. 5.
Fig. 8 is the figure representing face side driven in registry portion, Fig. 8 (A) is front view, Fig. 8 (B) is side view, Fig. 8 (C) be unload connection shaft after the vertical view of state, Fig. 8 (D) is the vertical view of the connection shaft unloaded.
Fig. 9 is the figure representing rear side driven in registry portion, Fig. 9 (A) is front view, Fig. 9 (B) is rear view, Fig. 9 (C) is side view, Fig. 9 (D) is the vertical view of X1 axle drive division of the state after the Y-axis drive division unloading upside, and Fig. 9 (E) is the vertical view of the Y-axis drive division unloaded.
Figure 10 is the front view schematically showing mask holder involved by variation of the present invention and mask supporting table.
Figure 11 is the side view of Figure 10, and Figure 11 (A) represents the state of aiming at when using, and Figure 11 (B) represents the state during extraction of mask holder.
Drawing reference numeral explanation
1 irradiation unit
30 apparatus main bodies
40 mask holders
41 retainer frameworks
42 keep bar
50 masks
60 face side driven in registry portions (driven in registry portion)
61 drive motor
62 connection shafts
70 rear side driven in registry portions (driven in registry portion)
82 guide portion
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
Fig. 1 is the front view of the irradiation unit represented involved by present embodiment, and Fig. 2 is the rear view representing irradiation unit, and Fig. 3 is the right side view representing irradiation unit.
As depicted in figs. 1 and 2, irradiation unit 1 is built-in UV-lamp 10, the device that can irradiate with uniform illumination (that is, good uniformity coefficient) the whole region of the workpiece 2 as irradiation area in apparatus main body 30.In addition, irradiation unit 1 is also used as substrates such as liquid crystal panels as workpiece 2 and by irradiating light to this workpiece 2 thus the photo-hardening device of the ray hardening resin making workpiece 2 use sclerosis.Irradiation unit 1 utilizes multiple (being three in the present embodiment) linear light source to irradiate the device of workpiece 2, in this irradiation unit 1, as ultraviolet light source, uses the above-mentioned UV-lamp 10 that straight pipe type height exports.
As shown in Figure 1 to Figure 3, apparatus main body 30 in box like, and possesses front door 31 and back gate 32 respectively on front 30A and back side 30B.Described front door 31 and back gate 32 are arranged on the position opposed with following mask holder 40, by front door 31 and back gate 32 being opened, make mask holder 40 be exposed to outside.In addition, front door 31 is formed as the size can drawing mask holder 40.In addition, in the present embodiment, using the outlet side of mask holder 40 as front.Be provided with in the face side of apparatus main body 30 and rear side and safeguard space.
In addition, following front and back (front, the back side), left and right, direction so up and down represent direction when observing irradiation unit 1 from the face side of irradiation unit 1 under the state setting irradiation unit 1.
Irradiation unit 1 possesses at least one (being three in the present embodiment) irradiator 1A to 1C in apparatus main body 30.Each irradiator 1A to 1C has the principal reflection plate (principal reflection mirror) 12 of the radiating light of a UV-lamp 10 and control UV-lamp 10 in housing 11, and is arranged side by side along Width (light source the is direction side by side) W orthogonal with the axis direction of UV-lamp 10.In addition, irradiation unit 1 possesses auxiliary reflecting plate (auxiliary mirror) 14 in the below of irradiator 1A to 1C.Described principal reflection plate 12 and auxiliary reflecting plate 14 form the catoptron of irradiation unit 1.In addition, irradiation unit 1 also possesses mask holder 40 in the below of irradiator 1A to 1C, and this mask holder 40 maintains the mask 50 (Fig. 4) ultraviolet of UV-lamp 10 being carried out to shading.
Workpiece 2 is formed as overlooking rectangular.This workpiece 2 by be positioned in there is the structure that can be elevated irradiation worktable 4 on, and by the opening and closing of the handling unit such as transfer robot (not shown) from the side 30C being formed in apparatus main body 30 shutter 33 freely to carrying-in/carrying-out in apparatus main body 30.In the present embodiment, shutter 33 is set at right flank, and by transfer robot by workpiece 2 from this shutter 33 to carrying-in/carrying-out in apparatus main body 30, but the moving direction of the position of shutter 33 and workpiece 2 is not limited thereto.The irradiation worktable 4 being equipped with workpiece 2 rises to the irradiation position of regulation (in the present embodiment, the position being spaced apart about 2mm of mask 50 and workpiece 2).Now, the opening 3A of worktable by following mask supporting table is irradiated.
UV-lamp 10 extend side by side directly over workpiece 2.In addition, by the long arc lamp using fluorescent tube long to UV-lamp 10, the large area of workpiece 2 can be realized.Workpiece 2 can be configured to the tubular axis that long edge UV-lamp 10, also can be configured to the tubular axis of minor face along UV-lamp 10.
As mentioned above, irradiation unit 1 possesses principal reflection plate 12 and auxiliary reflecting plate 14, and the reflected light of the direct light of UV-lamp 10, principal reflection plate 12 and auxiliary reflecting plate 14 can be utilized to irradiate workpiece 2 with uniform illumination.
At this, when only utilizing the direct light of UV-lamp 10 to irradiate workpiece 2, the briliancy distribution of the fluorescent tube axial (length direction) of UV-lamp 10 is roughly directly reflected in the Illumination Distribution of workpiece 2.
Therefore, reflect by utilizing principal reflection plate 12 and auxiliary reflecting plate 14 and to radiate from UV-lamp 10 and to depart from the light of workpiece 2, irradiate in the mode of the Illumination Distribution of the direct light of supplementary workpiece 2, thus the uniformity coefficient of workpiece 2 is improved.
The light that principal reflection plate 12 makes the surrounding's (more accurately, top and horizontal direction) to UV-lamp 10 radiate reflects towards workpiece 2, improves the illumination of the plane of illumination 2A (Fig. 4) of workpiece 2, and realizes the homogenising of illumination.Principal reflection plate 12 is formed as the channel-shaped extended along the tubular axis of UV-lamp 10, and the face opposed with UV-lamp 10 is formed as reflecting surface.
On housing 11, be formed immediately below UV-lamp 10 and overlook rectangular irradiation opening, and the length direction being set to irradiate opening is consistent with the length direction (axis) of UV-lamp 10.Irradiate the inner side of opening be provided with to will transmitted through the wavelength selecting filter 13 selected of the wavelength of light, by this wavelength selecting filter 13, irradiation unit 1 irradiates the light of desired wavelength.In addition, in the present embodiment, be provided with wavelength selecting filter 13, but when UV-lamp 10 self can penetrate the light of desired wavelength, also can omit wavelength selecting filter 13.In addition, also a wavelength selecting filter can be configured between UV-lamp 10 to opening 3A.In addition, also housing 11 can be omitted.
Auxiliary reflecting plate 14 is arranged between principal reflection plate 12 and workpiece 2, and by reflect towards workpiece 2 light leaked into outside workpiece 2, thus supplements the Illumination Distribution of the irradiation formation based on UV-lamp 10 and principal reflection plate 12.
Specifically, auxiliary reflecting plate 14 has: a pair auxiliary end plate 20 (Fig. 6) aspectant with the two ends of UV-lamp 10; And a pair auxiliary side plates 21 (Fig. 6) aspectant with the both sides of UV-lamp 10.These auxiliary end plates 20 and auxiliary side plates 21 are assembled into the roughly corner tubular in the four directions surrounding workpiece 2, and inner wall surface thereof is configured to reflecting surface.In the present embodiment, auxiliary reflecting plate 14 is arranged on the inner side of mask holder 40, but is not limited thereto, such as, also can be arranged on the top of mask holder 40.In addition, in the present embodiment, auxiliary reflecting plate 14 is supported in mask holder 40 via the auxiliary reflecting plate fixed part 14A (Fig. 7) be arranged in mask holder 40, and is configured to draw from apparatus main body 30 together with mask holder 40.When auxiliary reflecting plate 14 and mask holder 40 do not overlap etc. in the height direction, auxiliary reflecting plate 14 also can be fixed on apparatus main body 30.
Under this configuration, the irradiation distribution of assisting the reflected light of end plate 20 and a pair auxiliary side plates 21 to come supplementary UV-lamp 10 and principal reflection plate 12 by a pair.
In addition, in the present embodiment, be provided with auxiliary reflecting plate 14, but also can omit auxiliary reflecting plate 14.
The cut-open view of Fig. 4 to be the figure representing workpiece 2 and mask 50, Fig. 4 (A) be workpiece 2, Fig. 4 (B) is the stereographic map representing workpiece 2 and mask 50.
As shown in Figure 4, workpiece 2 between two substrate 2B, arranges seal (sealing liquid crystal part) 2C that is made up of uv-hardening resin and liquid crystal 2D is sealed in the liquid crystal panel in seal 2C.Workpiece 2 is by making to seal 2C irradiation ultraviolet radiation seal 2C harden thus being fitted by two substrate 2B and formed.A substrate 2B is the array base palte on the position corresponding with liquid crystal 2D with TFT (thin film transistor (TFT)) circuit (not shown), and another substrate 2B is the colored optical filtering substrates on the position corresponding with liquid crystal 2D with colored filter (not shown).Fig. 4 represents the workpiece 2 being configured to the substrate 2B with TFT circuit to become plane of illumination 2A.At this, when to seal 2C irradiation ultraviolet radiation, if the illuminated ultraviolet of liquid crystal 2D, the characteristic of liquid crystal 2D will change.Therefore, in irradiation unit 1, be provided with the mask 50 light towards liquid crystal 2D being carried out to shading.
Mask 50 possesses and is formed in light shielding part on the position corresponding with liquid crystal 2D 51 and is formed in the transmittance section 52 on the position corresponding with seal 2C and forms.Mask 50 uses transparent starting material (being glass in the present embodiment) to be formed, in these transparent starting material, in the part needing shading, shading starting material are set (such as, metallic coating etc.), thus form light shielding part 51, and the part beyond light shielding part 51 is formed as remain transparent raw-material transmittance section 52.As shown in Figure 1, this mask 50 is held in the lower surface of the maintenance bar 42 of mask holder 40 by absorption.
Fig. 5 is the figure representing the mask holder 40 be arranged in apparatus main body 30, and Fig. 5 (A) is vertical view, and Fig. 5 (B) is front view, and Fig. 5 (C) is side view.Fig. 6 is the figure representing mask holder 40, Fig. 6 (A) is vertical view, and Fig. 6 (B) is front view, and Fig. 6 (C) is side view.Fig. 7 is the enlarged drawing of the part A of Fig. 5.
As shown in Figure 5 and Figure 6, mask holder 40 possesses the retainer framework (framework) 41 being formed as overlooking frame-shaped in the form of a substantially rectangular, and on this retainer framework 41, supports many (being the six roots of sensation in the present embodiment) bar-shaped maintenance bars (maintaining part) 42 and form.Retainer framework 41 uses to have to support and keeps material metals such as (, be aluminium in present embodiment) such as aluminium, stainless steel, iron of the rigidity of bar 42 and formed.
Many maintenance bars 42 use the starting material of light transmission (preferably clear parts are quartz in present embodiment) and are formed as the length of whole opening 3A, and two ends are supported in retainer framework 41.In the present embodiment, by the W arrangement in the width direction of many maintenance bars 42, but also can arrange along depth direction (Y-direction).
So, by using many maintenance bars 42 to form mask holder 40, not needing the large quartz plate that use machining precision is high, therefore, it is possible to make the parts miniaturization of formation mask holder 40, its result, lightweight and cost reduction can be realized.In addition, in the present embodiment, maintenance bar 42 is configured at equal intervals, but arrangement pitch is not limited at equal intervals, suitably can sets according to the configuration of the liquid crystal cell of the size of workpiece 2 and workpiece 2 inside.
Keep bar 42 to be formed as roughly square tube shape, diagram is omitted, but possesses adsorption tank at lower surface (face of plane of illumination 2A side), and possesses the path be communicated with adsorption tank in both ends of the surface.As shown in Figure 6, be linked with pipe 43 at this path, in each face side and rear side, the pipe 43 of many maintenance bars 42 accumulates one via joint 44, and is connected with pipe jointing part 45.The pipe 46 be connected with decompressor (not shown) is connected with pipe jointing part 45.When driving decompressor, keep the path of bar 42 to be depressurized, mask 50 is held in by absorption by the attraction from adsorption tank and keeps bar 42.
As shown in Figure 5, irradiation unit 1 has the face side driven in registry portion (driven in registry portion) 60 and rear side driven in registry portion (the driven in registry portion) 70 that drive the position of mask holder 40 pairs of masks 50 to carry out inching respectively in face side and rear side.
Face side driven in registry portion 60 is configured to can at Width W (X2 direction) upper driving mask holder 40.
Rear side driven in registry portion 70 is configured to can at Width W (X1 direction) and depth direction (Y-direction) upper driving mask holder 40.
In addition, face side driven in registry portion 60 and rear side driven in registry portion 70 are separately positioned on the substantial middle of Width W, but allocation position is not limited thereto.
UV-lamp 10, decompressor and driven in registry portion 60,70 are connected with the control device 90 (Fig. 1) of irradiation unit 1.Under the control of this control device 90, control the driving in the bright light of UV-lamp 10, decompressor and driven in registry portion 60,70.
In irradiation unit 1 as shown in Figure 1, such as, when configuring workpiece 2 in the mode making the substrate 2B with colored filter become plane of illumination 2A etc., the irradiation ultraviolet radiation when not using mask 50 sometimes.In this situation, when the upside of workpiece 2 have keep bar 42 time, owing to being kept the impact of light that bar 42 reflects or reflect, the uniformity of illuminance deterioration of plane of illumination 2A.Particularly, when be kept bar 42 reflect or the ultraviolet rays collection that reflects in liquid crystal 2D, the characteristic of liquid crystal 2D will change, and have problems thus.Therefore, need to unload maintenance bar 42 when not using mask 50, but it is complicated to unload the operation keeping bar 42, and there is the risk of the maintenance bar 42 of damage comparison costliness when unloading and keeping bar 42.
Therefore, in the present embodiment, mask holder 40 easily dismounting is formed freely, and keeps mask 50 on this mask holder 40.More specifically, mask holder 40 is drawn freely from apparatus main body 30 and forms, and mask holder 40 and the easy dismounting in face side driven in registry portion 60 and rear side driven in registry portion 70 are formed freely.
As shown in Figure 5, irradiation unit 1 possesses the mask supporting table 80 of mounting mask holder 40, and is formed freely to face side extraction by mask holder 40 on this mask supporting table 80.
Specifically, mask supporting table 80 is formed as the frame-shaped of overlooking in the form of a substantially rectangular, and its inside surface forms opening 3A.As shown in figure 5 and figure 7, this mask supporting table 80 has the track 81 that mask holder 40 is slided and the guide portion 82 guiding mask holder 40 at the upper surface of two sidepieces of left and right.Track 81 makes plane extend along the longitudinal direction upward, erects be provided with guide portion 82 in the side of this track 81.Guide portion 82 is arranged on outside the side of track 81, prevents coming off of mask holder 40 by guide portion 82.
Mask holder 40 possesses multiple (being each three of left and right in the present embodiment, the totally six) sliding part 47 that can slide on track 81 in two sides of retainer framework 41.Sliding part 47 is configured to reduce when mask holder 40 slides and the friction of track 81.In the present embodiment, sliding part 47 is made up of ball roller, and roller 47A is configured to abut with track 81 down.So, by arranging sliding part 47, even if mask holder 40 is formed as heavier (in the present embodiment more than 30kg), also can easily draw mask holder 40.In addition, the structure of sliding part 47 is not limited to ball roller.
Mask holder 40 is provided with the handle 48 that can hold when mask holder 40 is drawn two sides.
Fig. 8 is the figure representing face side driven in registry portion 60, Fig. 8 (A) is front view, Fig. 8 (B) is side view, Fig. 8 (C) be connection shaft is unloaded after the vertical view of state, Fig. 8 (D) is the vertical view of the connection shaft unloaded.
As shown in Figure 8, face side driven in registry portion 60 possesses the drive motor 61 be fixed on the mask supporting table 80 of apparatus main body 30 and the connection shaft 62 linking drive motor 61 and mask holder 40.Drive motor 61 have can movement vertically driving shaft 61A and be fixed on the pedestal portion 61B1 of driving shaft 61A.
Driving shaft 61A is along Width W (X2 direction) configuration, and thus, mask holder 40 is driven on Width W (X2 direction).Connection shaft 62 is fixed on pedestal portion 61B1.
Connection shaft 62 by axle portion 62A along being equipped with up and down, and be equipped with plate 62B at the cardinal extremity of axle portion 62A via direct acting guiding piece 68, this plate 62B is fixed on pedestal portion 61B1 by least one (being two in the present embodiment) fixture 63 (such as, screw).Connection shaft 62 slidably can be formed on depth direction (Y-direction) along direct acting guiding piece 68.
Plate 62B is formed at least one (being two in the present embodiment) register pin 64, and is formed with pilot hole 65 on pedestal portion 61B1.Connection shaft 62 is chimeric with pilot hole 65 and located by register pin 64 when fixing.
The axle portion 62A of connection shaft 62 is inserted into and is located in the axle receiving portion 49 of mask holder 40.Axle receiving portion 49 such as uses revolution-sliding sleeve, and between axle receiving portion 49 and the base portion of connection shaft 62, be formed with the gap delta can pulling out the degree of register pin 64 from pilot hole 65.
In addition, face side driven in registry portion 60 possesses the face side drive division cover 66 of the base portion covering drive motor 61 and connection shaft 62.Face side drive division cover 66 is fixed on the mask supporting table 80 of apparatus main body 30 by least one (being four in the present embodiment) holding appliance 67 (such as, screw).
Under the state that face side driven in registry portion 60 is removed at face side drive division cover 66, be separated with the separation point position P1 on the composition surface of the lower surface of the plate 62B of the upper surface with connection shaft 62 that are equivalent to pedestal portion 61B1.The separation point position P1 in face side driven in registry portion 60 is configured in the below of the lower surface 40A (lower surface of retainer framework 41) of mask holder 40, namely departs from the position of the extraction track of mask holder 40.Thus, do not need when mask holder 40 is drawn to unload drive motor 61, therefore, it is possible to easy dismounting mask holder 40.
Fig. 9 is the figure representing rear side driven in registry portion 70, Fig. 9 (A) is front view, Fig. 9 (B) is rear view, Fig. 9 (C) is side view, Fig. 9 (D) is the vertical view of the drive motor on the upside of unloading and the state after drive part, and Fig. 9 (E) is the vertical view of drive motor and the drive part unloaded.
As shown in Figure 9, rear side driven in registry portion 70 possesses: be fixed on two drive motor 71,72 on the mask supporting table 80 of apparatus main body 30; And link the union body 73 of the bearing 79 and mask holder 40 driven by drive motor 71,72.Drive motor 71,72 have respectively can movement vertically driving shaft 71A, 72A and be fixed on drive division main body 71B, the 72B of driving shaft 71A, 72A.Another drive motor 72, driving shaft 72A and drive division main body 72B is supported with at the upper surface of a drive division main body 71B.In Fig. 9, Reference numeral 70A represents the pedestal of rear side driven in registry portion 70 entirety, and Reference numeral P2 represents the position on the composition surface of subordinate's side drive division and higher level side drive division.
Driving shaft 71A configures along Width W (X1 direction), the driving shaft 72A of drive motor 72 configures along depth direction (Y-direction), thus, mask holder 40 is driven on Width W (X1 direction) and depth direction (Y-direction).As mentioned above, connection shaft 62 slidably can be formed on depth direction (Y-direction), is adjusted the position of the depth direction (Y-direction) of connection shaft 62 by this drive motor 72.
Union body 73 is supported on the drive motor 72 of upside via bearing 79, and mask holder 40 is fixed on this union body 73 by least one (being two in the present embodiment) fixture 74 (such as, screw).Be embedded in the roughly columned bearing 79 extended up and down outside union body 73, and rotatably formed centered by the central shaft of bearing 79.
At the back side of mask holder 40, be formed with register pin 75 in the substantial middle of Width W, and be formed with pilot hole 76 in the front of union body 73.Mask holder 40 is chimeric with pilot hole 76 and located by register pin 75 when fixing.
In addition, rear side driven in registry portion 70 possesses the rear side drive division cover 77 covering drive motor 71,72.Face side drive division cover 66 is fixed on the mask supporting table 80 of apparatus main body 30 by least one (being four in the present embodiment) holding appliance 78 (such as, screw).
So, by arranging register pin 64 and register pin 75 in the face side of mask holder 40 and rear side, even if unload mask holder 40, mask holder 40 return-to-home position can also be made, without the need to adjusting the position of mask holder 40 again.In addition, register pin 64 and register pin 75 are not limited to pin, and can use various positioning element.
Next, the dismounting step of mask holder 40 is described.
In the present embodiment, because mask holder 40 is formed as heavier, therefore dismounting mask holder 40 is carried out by operators more than two people.
When mask holder 40 will be unloaded, first, open back gate 32, extract the pipe 46 of rear side, and remove fixture 74.Next, open front door 31, extract the pipe 46 of face side, and remove holding appliance 67 to unload face side drive division cover 66.Next, remove fixture 63, connection shaft 62 is lifted and is separated with pedestal portion 61B1.Then, mask holder 40 is drawn to face side, until axle receiving portion 49 is positioned at than mask supporting table 80 more by the position of face side, and pull out connection shaft 62 downwards from axle receiving portion 49.Finally, mask holder 40 entirety drawn to face side and take out of.In addition, mask 50 carries out dismounting by robot (not shown) relative to mask holder 40.
When mask holder 40 will be installed, first, mask holder 40 is moved to mask supporting table 80 from face side.Next, connection shaft 62 is inserted in axle receiving portion 49, under the state lifting connection shaft 62, mask holder 40 is pressed into inboard, and the register pin 75 of rear side is inserted into pilot hole 76.Next, fall connection shaft 62, the register pin 64 of face side is inserted into pilot hole 65, and pass through the face side of fixture 63 permanent mask retainer 40.Next, use holding appliance 67 to be fixed by face side drive division cover 66, and the pipe 46 of face side is connected with pipe jointing part 45, front door 31 is closed.Next, use fixture 74 rear side of mask holder 40 to be fixed, and the pipe 46 of rear side is connected with pipe jointing part 45, back gate 32 is closed.
In addition, as long as can similarly dismounting mask holder 40, then step be not limited thereto.
As mentioned above, according to the present embodiment, have: apparatus main body 30; Be located at the guide portion 82 on the mask supporting table 80 of apparatus main body 30; Along guide portion 82 to face side extraction mask holder 40 freely; And drive mask holder 40 and the position of the mask 50 being supported in mask holder 40 carried out to the driven in registry portion 60,70 of inching, driven in registry portion 60,70 is located at face side and rear side, face side driven in registry portion 60 possesses drive motor 61 and links the connection shaft 62 of drive motor 61 and mask holder 40, and connection shaft 62 is set to depart from drive motor 61 and forms freely.By this structure, mask holder 40 can be made easily to come off drive motor 61, and can easily draw mask holder 40, therefore, it is possible to bar 42 will be kept according to each mask holder 40 relative to apparatus main body 30 easily dismounting.
In addition, because drive motor 61 is configured on the position of the extraction track departing from mask holder 40, therefore, when mask holder 40 is drawn, without the need to unloading drive motor 61, therefore, it is possible to easily draw mask holder 40.
In addition, according to the present embodiment, the retainer framework 41 forming mask holder 40 be configured with the many maintenance bars 42 be made up of light transmission starting material and adsorb maintenance mask 50 by many maintenance bars 42 and form.By this structure, many maintenance bars 42 can be used stably to keep mask 50, therefore, it is possible to adjust the position of mask 50 accurately.In addition, in the dismounting of mask 50 relative to apparatus main body 30, can process be formed than keeping the retainer framework 41 that bar 42 is firm, therefore, it is possible to suppress the breakage keeping bar 42.
But above-mentioned embodiment is a mode of the present invention, certainly, can suitably change without departing from the spirit and scope of the invention.
Such as, in the above-described embodiment, track 81 is set at the upper surface of mask supporting table 80, sliding part 47 is set to the configuration structure that roller 47A is configured to abut down and with track 81.But the configuration structure of track 81 and roller 47A is not limited thereto.Also can replace this configuration structure or on the basis of this configuration structure, mask holder 40 arrange track, by sliding part 47, to make roller 47A upward, the mode that roller 47A abuts with this track is arranged on the mask supporting table 80 of apparatus main body 30 side.
In addition, in the above-described embodiment, be set to connection shaft 62 and depart from freely with drive motor 61, but the dismounting of mask holder 40 and drive motor 61 is not limited thereto.Such as, as shown in Figure 10 and Figure 11, also can be set to connection shaft 62 be fixed on drive motor 61 and can depart from from the axle receiving portion 49 of mask holder 40.
Figure 10 is the front view schematically showing mask holder 40 involved by variation and mask supporting table 80.Figure 11 is the side view of Figure 10, and Figure 11 (A) represents the state of aiming at when using, and Figure 11 (B) represents the state during extraction of mask holder 40.
In the example of Figure 10 and Figure 11, rear side driven in registry portion and face side driven in registry portion 60 are formed substantially in the same manner.In addition, multiple (about present embodiment each five are arranged at two, the left and right of mask supporting table 80 sidepiece, totally ten) upper and lower retractile sliding part 85, and the track 86 abutted with sliding part 85 is set at the lower surface 40A of retainer framework 41.Sliding part 85 possesses the elevating mechanism 85A making mask holder 40 be elevated up and down elastically, and leading section is such as made up of ball roller, to reduce when mask holder 40 slides and the friction of track 86.Elevating mechanism 85A is connected with control device 90 and control based on control device 90 is telescopically formed.Track 86 makes plane extend along the longitudinal direction downward.
As shown in Figure 11 (B), when unloading mask holder 40, make all sliding parts 85 increase, connection shaft 62 is deviate from from axle receiving portion 49 thus, and mask holder 40 departs from face side and rear side driven in registry portion 60.Thereby, it is possible to mask holder 40 is drawn to face side.
In addition, in the example of Figure 10 and Figure 11, without the need to being configured in by drive motor 61 on the position of the extraction track departing from mask holder 40, the configuration degree of freedom of drive motor 61 improves thus.In addition, in this embodiment, by the axle receiving portion (revolution-sliding sleeve) 49 of the face side and rear side that the connection shaft 62 of face side and rear side are inserted into mask holder 40, determine the position of mask holder 40 thus, therefore do not need the union body such as register pin and screw.
In addition, in the above-described embodiment, driven in registry portion 60,70 is arranged on face side and rear side, but, such as also can be arranged on two sides.In this situation, without the need to drive motor 61 is configured on the position of the extraction track departing from mask holder 40.
In addition, in the above-described embodiment, mask 50 is maintained by the many maintenance bars 42 be made up of light transmission starting material, but flat board (such as, the quartz plate) formation that many maintenance bars 42 also can be formed by light transmission starting material.In addition, structure mask 50 being held in mask holder 40 is not limited to keep bar 42 or flat board, also can be kept by miscellaneous part.
In addition, in the above-described embodiment, linear light source employs three UV-lamp 10, but the number of linear light source is not limited thereto.In addition, also can replace UV-lamp 10, use the linear light source of the shape that to be arranged in a straight line by the light-emitting components such as ultraviolet LED.In addition, the light that linear light source irradiates is not limited to ultraviolet.
In addition, in the above-described embodiment, irradiation unit 1 is illustrated as photo-hardening device, but the present invention can be applied to various irradiation unit.
Claims (4)
1. an irradiation unit, is characterized in that, has:
Apparatus main body;
Be located at the guide portion of described apparatus main body;
Along described guide portion to face side extraction mask holder freely; And
Drive described mask holder and the position of the mask being supported in described mask holder carried out to the driven in registry portion of inching,
Described driven in registry portion is located at face side and rear side, face side driven in registry portion possesses drive motor and links the connection shaft of described drive motor and described mask holder, described connection shaft is set to and departs from freely with described drive motor, and described drive motor is configured at the position of the extraction track departing from described mask holder.
2. irradiation unit according to claim 1, is characterized in that,
The retainer framework forming described mask holder is configured with the many maintenance bars be made up of light transmission starting material, and adsorbs the described mask of maintenance by many maintenance bars.
3. an irradiation unit, is characterized in that, has:
Apparatus main body;
Be located at the guide portion of described apparatus main body;
Along described guide portion to face side extraction mask holder freely; And
Drive described mask holder and the position of the mask being supported in described mask holder carried out to the driven in registry portion of inching,
Described driven in registry portion is located at face side and rear side, face side driven in registry portion possesses drive motor and links the connection shaft of described drive motor and described mask holder, described connection shaft is set to and departs from freely with described mask holder, and described drive motor is configured at the position of the extraction track departing from described mask holder.
4. irradiation unit according to claim 3, is characterized in that,
The retainer framework forming described mask holder is configured with the many maintenance bars be made up of light transmission starting material, and adsorbs the described mask of maintenance by many maintenance bars.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-165922 | 2014-08-18 | ||
| JP2014165922A JP6365105B2 (en) | 2014-08-18 | 2014-08-18 | Irradiation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105372880A true CN105372880A (en) | 2016-03-02 |
Family
ID=55375211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510484946.4A Withdrawn CN105372880A (en) | 2014-08-18 | 2015-08-07 | Irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6365105B2 (en) |
| KR (1) | KR20160021720A (en) |
| CN (1) | CN105372880A (en) |
| TW (1) | TWI644326B (en) |
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| JPS61286841A (en) * | 1985-06-14 | 1986-12-17 | Ricoh Co Ltd | Slit exposure lighting device |
| JP2004077583A (en) * | 2002-08-12 | 2004-03-11 | Ushio Inc | Laminate device for display panel |
| JP2004101951A (en) * | 2002-09-10 | 2004-04-02 | Orc Mfg Co Ltd | Exposing device and method thereof |
| CN1673859A (en) * | 2003-10-27 | 2005-09-28 | Asml荷兰有限公司 | Assembly of a reticle holder and a reticle |
| CN101256352A (en) * | 2007-02-26 | 2008-09-03 | 中芯国际集成电路制造(上海)有限公司 | Protective film and bracket thereof |
| CN101635253A (en) * | 2008-06-14 | 2010-01-27 | 因特维克有限公司 | System and method for processing substrates with detachable mask |
| CN201402365Y (en) * | 2009-01-15 | 2010-02-10 | 上海微电子装备有限公司 | Mask plate clamping mechanism |
| WO2010131485A1 (en) * | 2009-05-15 | 2010-11-18 | 株式会社ニコン | Mobile apparatus, power transmission apparatus, exposure apparatus, and device manufacturing method |
| JP2013119198A (en) * | 2011-12-07 | 2013-06-17 | Panasonic Corp | Mask holder |
| US20140322852A1 (en) * | 2013-04-26 | 2014-10-30 | Samsung Display Co., Ltd. | Deposition apparatus and method of manufacturing organic light emitting diode display |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003100619A (en) * | 2001-09-27 | 2003-04-04 | Nikon Corp | Mask holding apparatus and method, and exposing apparatus |
| TWI288305B (en) * | 2003-10-27 | 2007-10-11 | Asml Netherlands Bv | Assembly of a reticle holder and a reticle |
| JP4214085B2 (en) * | 2004-06-01 | 2009-01-28 | 株式会社オーク製作所 | Mask frame transfer apparatus and exposure apparatus |
| JP4943345B2 (en) * | 2004-12-23 | 2012-05-30 | エーエスエムエル ネザーランズ ビー．ブイ． | Lithographic apparatus |
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2014
- 2014-08-18 JP JP2014165922A patent/JP6365105B2/en not_active Expired - Fee Related
-
2015
- 2015-08-07 CN CN201510484946.4A patent/CN105372880A/en not_active Withdrawn
- 2015-08-11 TW TW104126096A patent/TWI644326B/en not_active IP Right Cessation
- 2015-08-13 KR KR1020150114388A patent/KR20160021720A/en unknown
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61286841A (en) * | 1985-06-14 | 1986-12-17 | Ricoh Co Ltd | Slit exposure lighting device |
| JP2004077583A (en) * | 2002-08-12 | 2004-03-11 | Ushio Inc | Laminate device for display panel |
| JP2004101951A (en) * | 2002-09-10 | 2004-04-02 | Orc Mfg Co Ltd | Exposing device and method thereof |
| CN1673859A (en) * | 2003-10-27 | 2005-09-28 | Asml荷兰有限公司 | Assembly of a reticle holder and a reticle |
| CN101256352A (en) * | 2007-02-26 | 2008-09-03 | 中芯国际集成电路制造(上海)有限公司 | Protective film and bracket thereof |
| CN101635253A (en) * | 2008-06-14 | 2010-01-27 | 因特维克有限公司 | System and method for processing substrates with detachable mask |
| CN201402365Y (en) * | 2009-01-15 | 2010-02-10 | 上海微电子装备有限公司 | Mask plate clamping mechanism |
| WO2010131485A1 (en) * | 2009-05-15 | 2010-11-18 | 株式会社ニコン | Mobile apparatus, power transmission apparatus, exposure apparatus, and device manufacturing method |
| JP2013119198A (en) * | 2011-12-07 | 2013-06-17 | Panasonic Corp | Mask holder |
| US20140053743A1 (en) * | 2011-12-07 | 2014-02-27 | Panasonic Corporation | Mask holder |
| US20140322852A1 (en) * | 2013-04-26 | 2014-10-30 | Samsung Display Co., Ltd. | Deposition apparatus and method of manufacturing organic light emitting diode display |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016042147A (en) | 2016-03-31 |
| KR20160021720A (en) | 2016-02-26 |
| TW201616513A (en) | 2016-05-01 |
| TWI644326B (en) | 2018-12-11 |
| JP6365105B2 (en) | 2018-08-01 |
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| C06 | Publication | ||
| PB01 | Publication | ||
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Application publication date: 20160302 |