TWI644078B - Slit light source, and vision inspection apparatus having the same - Google Patents

Abstract

The present invention relates to a slit light source, and more particularly to a slit light source that illuminates a slit-shaped light and a visual inspection device having a slit light source. The present invention discloses a slit light source, comprising: a light source portion (100) for generating light; a slit portion (200) disposed in front of the light source portion (100) and to be from the light source portion (100) The generated light is converted into light of a slit shape; and the optical system (300) collects light passing through the slit portion (200) with the slit light set in advance in the object to be inspected (10) on the object to be inspected ( 10).

Description

Slit light source and visual inspection device with slit light source

The present invention relates to a slit light source, and more particularly to a slit light source that illuminates a slit-shaped light and a visual inspection device having a slit light source.

For semiconductor components and the like, it is necessary to perform various inspections in the process and after the process to improve the process qualification rate and the like.

Further, there is at least one of the following 2D inspections and 3D inspections: in the inspection of the visual inspection object (semiconductor element or the like), the light is irradiated onto the object to be inspected, and the object to be inspected is irradiated. The image is analyzed by the acquired image.

Here, the structure of the visual inspection apparatus generally used for performing visual inspection includes: generating a fixed pattern of light from a light source, and irradiating the light to the light source of the object to be inspected; and acquiring an image of the object to be inspected by the light source being illuminated by the light source Image acquisition device (camera or scanner).

Further, the light source may use a point light source, a slit light source or the like according to the inspection shape.

However, as disclosed in Japanese Laid-Open Patent Publication No. 10-2011-17158, a slit light source in a light source is generally constituted by a light source portion, a telecentric lens, and a slit member interposed between the light source portion and the telecentric lens.

However, in the conventional slit light source, since the light source unit, the telecentric lens, and the slit member are integrally formed, the running distance to the object to be inspected cannot be controlled.

Further, since the conventional slit light source uses a laser or an optical fiber as the light source portion, the light loss is large, and it is not possible to use the diffusion member for uniformizing the light, or to use a light source portion having a relatively large electric power.

An object of the present invention is to provide a slit light source and a slit light source visual inspection device which are simple in structure and capable of replacing a part of a structure, and thus can control a running distance.

The present invention has been made in order to achieve the object of the present invention as described above, and a slit light source comprising: a light source unit 100 that generates light; and a slit portion 200 disposed in the light source unit In front of 100, light generated from the light source unit 100 is converted into slit-shaped light; and optical system 300 collects slit light set in advance by the slit portion 200 on the object to be inspected 10.

A light diffusing member 130 for diffusing light generated from the light source unit 100 may be disposed between the light source unit 100 and the slit unit 200.

The light diffusing member 130 may be attached to a surface of the slit portion 200 that faces the light source portion 100.

The light source unit 100 may include a substrate 120 and a plurality of LED elements 110 disposed on the substrate 120 along a longitudinal direction of the slit light.

The optical system 300 can be located at an operating distance in which the depth of the slit light is set in advance from the optical system 300.

The optical system 300 may include: a first cylindrical lens 320 that collects light diffused through the slit portion 200; and a second cylindrical lens 310 that collects light passing through the first cylindrical lens 320 to be inspected Body 10.

The optical system 300 may include a diaphragm member 330 disposed between the first cylindrical lens 320 and the second cylindrical lens 310, and cut off the short axis set in advance in the light passing through the first cylindrical lens 320. Light outside the light.

The present invention may include a frame member 190 detachably coupled to the light source portion 100, the slit portion 200, and the optical system 300, and fixing the light source portion 100, the slit portion 200, and the optical system 300 s position.

The light source unit 100, the slit unit 200, and the optical system 300 can be inserted and removed along the longitudinal direction of the slit light.

The present invention discloses a visual inspection apparatus comprising: a slit light source 20 having the above-described structure as a light source that illuminates the object 10 to be inspected; and an image acquisition unit 30 that acquires a slit that passes through the slit light source 20. An image of the object 10 to be inspected by light.

The subject 10 is linearly moved in the horizontal direction with respect to the slit light source 20, and the three-dimensional shape of the subject 10 can be measured from the image acquired by the image acquiring unit 30.

The slit light source and the visual inspection device having the slit light source according to the present invention are composed of a light source unit, a slit portion, and an optical system, and have an advantage that the structure is simple and easy to manufacture.

Further, the slit light source and the visual inspection device having the slit light source according to the present invention use a plurality of LED elements arranged along the longitudinal direction of the slit light as a light source, and further, a diffusion member can be used, so that a more uniform narrow shape can be formed. The advantages of stitching light.

Further, the slit light source and the visual inspection device having the slit light source according to the present invention are composed of a light source portion, a slit portion, and an optical system, and two cylindrical lenses are used for the structure of the optical system and are disposed between the two cylindrical lenses. The aperture, in turn, has the advantage that the overall structure is simple and easy to manufacture.

In particular, it is possible to replace the cylindrical lens of at least one of the two cylindrical lenses, and further has an advantage of being able to control the running distance to the test object.

10‧‧‧Inspected body

20‧‧‧Slit light source

30‧‧‧Image Acquisition Department

100‧‧‧Light source department

110‧‧‧LED components

120‧‧‧Substrate

130‧‧‧Light diffusing elements

190‧‧‧Frame parts

200‧‧‧Slits

210‧‧‧ slit opening

220‧‧‧Expansion Department

300‧‧‧Optical system

310‧‧‧Second cylindrical lens

320‧‧‧First cylindrical lens

330‧‧‧ aperture components

331‧‧‧through

WD‧‧‧ running distance

1 is a conceptual view showing an example of a visual inspection device of the present invention; FIG. 2 is a perspective view showing a slit light source according to the present invention; and FIG. 3 is a longitudinal sectional view showing the slit light source of FIG.

Hereinafter, a description will be given of a slit light source and a visual inspection device according to the present invention with reference to the accompanying drawings.

As shown in FIG. 1, a visual inspection apparatus according to the present invention includes: a slit light source 20 as a light source that illuminates light to the subject 10; and an object 10 to be inspected which is irradiated with slit light passing through the slit light source 20. Image acquisition unit 30 of the image.

The slit light source 20 has a configuration in which slit light is irradiated onto the test object 10, and will be described in detail later.

The image acquisition unit 30 is configured to acquire an image of the subject 10 that is irradiated with the slit light by the slit light source 20, and may be a digital camera, a scanner, or the like, as long as it is a structure capable of acquiring an image. Yes.

The visual inspection apparatus having the structure as described above performs the irradiation of the slit light by the slit light source 20 and the acquisition of the image by the image acquisition section 30, and is integrated with the image acquisition section 30 or another control section (not shown). The image is analyzed, and the acquired image is analyzed, and a two-dimensional inspection such as a planar shape, a height of the bump, a three-dimensional inspection such as formation of a crack, or the like is performed.

As an example, the subject 10 is linearly moved in the horizontal direction with respect to the slit light source 20, and the visual inspection device can measure the three-dimensional shape of the subject 10 from the image acquired by the image acquisition unit 30.

On the other hand, in the visual inspection device or the like as described above, it is necessary to irradiate the subject 10 with the slit light, and it is necessary to have the running distance (measured distance) to the subject 10 depending on the type of the subject 10, the type of the examination, and the like. Slit light source 20.

Accordingly, as shown in FIGS. 2 and 3, the slit light source 20 according to the present invention includes: a light source unit 100 that generates light; and light that is provided in front of the light source unit 100 to convert light generated by the light source unit 100 into a slit shape. The slit portion 200; and the slit light that is set in advance by the light passing through the slit portion 200 is collected by the optical system 300 of the test object 10.

The light source unit 100 is configured to generate light to form slit light, and may be any device such as a laser generating device or an LED lighting device as long as it can generate light.

As an example, the light source part 100 may use one or more LED elements, as shown in FIG. 2, and may include a substrate 120 and a plurality of LED elements 110, wherein the plurality of LED elements 110 are disposed along the length direction of the slit light. Substrate 120.

As long as the substrate 120 is a substrate on which the LED element 110 can be disposed, any substrate can be used, and a PCB, an FPCB, a metal PCB, or the like can be used.

A plurality of the LED elements 110 are arranged on the substrate 120 along the longitudinal direction of the slit light, and slit light can be formed by transmitting the light diffusion member 130 and the slit portion 200 which will be described later.

Further, the LED element 110 can use various LED elements such as monochromatic light and white light depending on the intended use such as visual inspection.

On the other hand, the light generated from the light source unit 100 differs in the amount of light along the longitudinal direction of the slit light (brightness), and in order to improve this phenomenon, it is preferable that the light source unit 100 and the narrow portion are as shown in FIG. Light diffusing members 130 are provided between the slits 200 to diffuse light generated from the light source section 100.

The light diffusing member 130 has a structure in which light transmitted through the slit is uniformly irradiated with light along the longitudinal direction of the slit light, and may be various structures such as a light diffusing film and a transparent member to which the light diffusing material is applied.

On the other hand, the light diffusing member 130 may be provided in various structures, may be attached to the surface of the slit portion 200 toward the light source portion 100, or may be joined by a fastening member such as a bolt.

The slit portion 200 has a configuration in which light generated from the light source unit 100 is converted into a slit shape in front of the light source unit 100, and various configurations can be realized according to the design.

As an example, the slit portion 200 may be constituted by a plate member formed with a slit opening 210 of a previously set width to form slit light.

Further, it is preferable that the plate member is formed with an expansion portion 220 that expands the vertical width (Z-axis direction) toward the light source unit 100 with the optical axis (Y-axis direction) as a standard to be irradiated from the light source unit 100. A large amount of light.

The optical system 300 has a configuration in which slit light set in advance by the light passing through the slit portion 200 is collected on the test object 10, and various structures can be realized.

In particular, the optical system 300 may include: a first cylindrical lens 320 that collects light diffused through the slit portion 200; and a second cylindrical lens 310 that collects light passing through the first cylindrical lens 320 to the subject 10 .

The first cylindrical lens 320 and the second cylindrical lens 310 are cylindrical lenses that form a part of a cylindrical shape in the longitudinal direction (X-axis direction) of the slit light, and each cylindrical lens is operated according to a running distance (WD) to the object to be inspected. The appropriate curvature (R1, R2) can be selected.

On the other hand, the optical system 300 is preferably designed to be located at a running distance (WD) in which the depth of the slit light is set in advance from the optical system 300.

Here, the running distance (WD) may be controlled, and in the case where the running distance (WD) is to be changed, at least one of the first cylindrical lens 320 and the second cylindrical lens 310 is replaced, preferably the second column is replaced. The lens 310, in turn, can vary the travel distance (WD).

To this end, the first cylindrical lens 320 and the second cylindrical lens 310 may be disposed to replace at least one of the first cylindrical lens 320 and the second cylindrical lens 310, in particular, the second cylindrical lens 310.

Specifically, the slit light source 20 according to the present invention may include a frame member 190 detachably coupled to the light source portion 100, the slit portion 200, and the optical system 300, and fixing the light source portion 100, the slit portion 200, and the optical The location of system 300.

Here, the light source unit 100, the slit unit 200, and the optical system 300 can be inserted and removed in the longitudinal direction of the slit light in the frame member 190.

In particular, the optical system 300 can be inserted and removed in the frame member 190 to replace at least one of the first cylindrical lens 320 and the second cylindrical lens 310 instead of all, and in particular, the second cylindrical lens 310 can be replaced.

On the other hand, the optical system 300 may include a diaphragm member 330 disposed between the first cylindrical lens 320 and the second cylindrical lens 310, and cut off in the light passing through the first cylindrical lens 320 except for being set in advance. Light other than paraxial rays.

The diaphragm member 330 can be realized as a member that cuts off the rest of the light other than the paraxial rays within the approximate value set in advance.

As an example, as shown in FIGS. 2 and 3, the diaphragm member 330 may be formed of a plate member having a through hole 331 in which the through hole 331 is located at a position corresponding to the paraxial ray, thereby allowing only the paraxial ray to pass therethrough.

The above description is only a part of a preferred embodiment that can be implemented by the present invention, and the scope of the present invention is not limited by the above embodiments, and the technical idea of the present invention and its fundamental technical idea described above should be included in Within the scope of the invention.

Claims (11)

A slit light source comprising: a light source portion (100) for generating light; a slit portion (200) disposed in front of the light source portion (100) and converting light generated from the light source portion (100) into a narrow a slit-shaped light; an optical system (300) for collecting slit light set in advance to the object to be inspected (10), the slit light being light passing through the slit portion (200); and a frame member (190) detachably coupled to the light source portion (100), the slit portion (200), and the optical system (300), and fixing the light source portion (100) and the slit portion (200) And a position of the optical system (300); wherein a light diffusing member (130) is disposed between the light source portion (100) and the slit portion (200) for diffusing from the light source portion (100) The light diffusing member (130) is attached to the surface of the slit portion (200) facing the light source portion (100); the light source portion (100) includes: a substrate (120); And a plurality of LED elements (110) disposed on the substrate (120) along a longitudinal direction of the slit light; wherein the slit portion (200) is a slit opening (210) formed with a width set in advance ) a plate member that forms slit light; the optical system (300) includes: a first cylindrical lens (320) that collects light diffused through the slit portion (200); and a second cylindrical lens (310) that passes through the The light of the first cylindrical lens (320) is collected on the object to be inspected (10); and the aperture member (330) is disposed on the first cylindrical lens (320) and the second cylindrical lens (310) Between the light passing through the first cylindrical lens (320), light other than the paraxial rays set in advance is cut out; wherein the second cylindrical lens (310) can be replaced, and in the frame member ( 190) The second cylindrical lens (310) is inserted and removed in the longitudinal direction of the slit light to control the running distance (WD) to the object to be inspected (10). The slit light source according to claim 1, wherein the optical system (300) is located at an operating distance in which the depth of the slit light is set in advance from the optical system (300). The slit light source according to the first aspect of the invention, wherein the light source portion (100) and the slit portion (200) are inserted and removed from the frame member (190) along a longitudinal direction of the slit light. And the optical system (300). A visual inspection device comprising: a slit light source (20) as a light source that illuminates light to an object to be inspected (10), having a structure according to item 1 of the patent application; and an image acquisition unit (30) for acquiring An image of the object to be inspected (10) illuminated by the slit light of the slit light source (20). The visual inspection device according to claim 4, wherein the object to be inspected (10) is linearly moved in the horizontal direction with respect to the slit light source (20), and passes through the image acquisition unit (30). The acquired image measures the three-dimensional shape of the object to be inspected (10). The visual inspection device according to claim 4, wherein the light source unit (100) includes a substrate (120), and a plurality of LED elements (110) are disposed along a longitudinal direction of the slit light. The substrate (120). The visual inspection apparatus according to claim 4, wherein the optical system (300) is located at an operating distance in which the depth of the slit light is set in advance from the optical system (300). The visual inspection apparatus according to claim 4, wherein the optical system (300) includes: a first cylindrical lens (320) that collects light diffused through the slit portion (200); and a second column A lens (310) collects light passing through the first cylindrical lens (320) to the object to be inspected (10). The visual inspection device of claim 8, wherein the optical system (300) comprises: an aperture member (330) disposed on the first cylindrical lens (320) and the second cylindrical lens ( Between 310), light other than the paraxial rays set in advance is cut out in the light passing through the first cylindrical lens (320). The visual inspection device according to claim 4, further comprising: a frame member (190) detachably coupled to the light source portion (100), the slit portion (200), and the optical system ( 300) and fixing the positions of the light source unit (100), the slit portion (200), and the optical system (300). The visual inspection device according to claim 10, wherein the light source portion (100) and the slit portion (200) are inserted and removed from the frame member (190) along a longitudinal direction of the slit light. And the optical system (300).