TWI635558B - Temporary expansion fixture after wafer cutting - Google Patents

Abstract

The present invention is a post-wafer temporary expansion fixture comprising an expansion ring and a set of fittings, the expansion ring comprising a body and a film, the body being annular, the set of accessories being combined with the expansion ring The set of accessories includes a base and a set of matching rings. The base includes a base ring and at least three carriers. The bottom surface of the base ring is provided with a plurality of convex portions, and the outer periphery of the outer ring of the expansion ring is a plurality of protrusions of the base ring, the at least three carriers are circumferentially fixed to the bottom surface of the base ring, and the set of ring rings are rotatably mounted on the at least three carriers, whereby the expansion ring is opposite to the set of accessories The combination precision is improved to achieve the effect of reducing the damage rate of the expansion ring.

Description

Temporary expansion fixture after wafer cutting

The invention relates to a fixture, in particular to a temporary expansion fixture after wafer cutting.

In a typical semiconductor wafer, after the test is completed, the wafer is divided into a plurality of wafers. After cutting, the plurality of wafers are closely attached. However, in the process of cutting into a plurality of wafers, the wafer is Powder waste is generated. During the process, the dust must be removed, otherwise the cleanness of the packaging process will be affected.

Therefore, the prior art has developed an expansion ring to remove the dust during the process. The expansion ring includes an annular body and a film. The film is elastic and shrinks when heated, and has elasticity through the film. The person can use the machine to expand the film to enlarge the gap between the plurality of wafers. Further, the operator can clean the expansion ring to remove the dust on the film. However, in the process of expanding the film by the machine, The jig is not used, so that the damage rate of the expansion ring is high during the operation of the operator. Therefore, the development of a jig suitable for the expansion ring is an important issue.

In order to solve the problem that the damage rate of the expansion ring is improved without using the jig in the process of expanding the film by the existing machine, the main object of the present invention is to provide a temporary expansion jig after wafer cutting, which is The assembly of the assembly allows the expansion ring to be accurately aligned with the assembly of the assembly, thereby reducing the chance of damage to the expansion ring.

The present invention solves the prior art problem of the post-wafer temporary expansion fixture, which comprises: an expansion ring, the expansion ring includes a body and a film, the body is annular, and the film is closely attached to the film a surface of the body; and a set of accessories, the set of accessories being combined with the expansion ring, the set of accessories comprising a base and a set of rings, the base comprising a base ring and at least three carriers, the base ring The bottom surface is provided with a plurality of convex portions, the outer peripheral edge of the outer ring of the expansion ring is engaged with the plurality of convex portions of the base ring, and the at least three bearing seats are circumferentially fixed to the bottom surface of the base ring, and the set of ring rings is rotatably The card is disposed on the at least three carriers.

In the foregoing wafer-cutting temporary expansion fixture, the outer periphery of the body is recessed with at least two notches, and the at least two notches are circumferentially spaced.

In the foregoing wafer post-cutting temporary expansion fixture, wherein the outer periphery of the body is provided with at least three fractures, each fracture being a linear opening.

In the foregoing wafer, the temporary expansion fixture is cut, wherein a peripheral portion of the outer ring of the base ring protrudes outwardly with a pushing portion.

In the above-mentioned wafer-cutting temporary expansion fixture, the outer circumferential surface of the base ring is convexly provided with two positioning portions, and the two positioning portions and the pushing portion are circumferentially spaced apart.

In the above-mentioned wafer-cutting temporary expansion fixture, a peripheral portion of the outer ring of the base ring is convexly disposed outwardly, and the latching portion and the two positioning portions and the pushing portion are circumferentially spaced apart.

In the above-mentioned wafer-cutting temporary expansion jig, the plurality of convex portions are two combined convex portions, one pushing convex portion and one engaging convex portion, and the two combined convex portions are respectively disposed on the bottom surface of the corresponding positioning portion and are An L-shaped bent piece body, wherein the opening of the engaging convex portion faces the center of the base ring, the pushing convex portion is disposed on the bottom surface of the pushing portion and is also an L-shaped bent piece body, and the pushing convex portion The opening of the card is disposed at a center of the base ring, and the latching portion is disposed on the bottom surface of the latching portion and is also an L-shaped bent sheet body, and the opening of the latching convex portion faces the center of the base ring.

The above-mentioned wafer is temporarily expanded after the chip is cut, wherein each of the bearing blocks is a block having a trapezoidal cross section, and a bottom surface of each of the bearing blocks is recessed with a mounting groove, and each of the mounting grooves is an arc-shaped cutting groove. The assembly ring is rotatably mounted on the mounting groove of the at least three carriers.

In the foregoing wafer, the temporary expansion fixture is cut, wherein the base ring has a positioning long hole penetratingly between two adjacent carriers.

The efficacies obtainable by the technical means of the present invention are: the present invention is designed to include a base and a set of rings, and the base is rotatable relative to the set of rings such that the outer circumference of the expanded ring The two combined protrusions, the pushing protrusions and the engaging protrusions of the base ring can be combined or disengaged, so that the precision of the combination of the expansion ring with respect to the set of accessories is improved, and the effect of reducing the damage rate of the expansion ring is achieved.

In order to understand the technical features and practical effects of the present invention in detail, and in accordance with the present invention, further details are shown in the following preferred embodiments.

A preferred embodiment of the post-wafer temporary expansion jig provided by the present invention is shown in FIGS. 1 to 3, and includes an expansion ring 10 and a set of fittings 20, wherein:

The expansion ring 10 includes a metal body 11 and a film 12 . The body 11 has an annular shape, and the outer periphery of the body 11 is recessed with at least two notches 111 and at least three fractures 112 . The at least two notches 111 . The surrounding gaps are all arranged in a circumferential shape, and the at least two notches 111 are all in the shape of a triangular groove, and each of the fractures 112 is a linear opening. The film 12 is closely attached to the surface of the body 11, so that the film 12 is in a tight state, the bottom surface of the film 12 is viscous, and the film 12 has elasticity. Further, the film 12 is at a high temperature. Will present a tight state.

The set of fittings 20 is combined with the expansion ring 10, the set of fittings 20 includes a base 21 and a set of mating rings 22, the base 21 including a base ring 211 and at least three carriers 212, the bottom of the base ring 211 A plurality of convex portions are formed to face downwardly. Further, the plurality of convex portions are two combined convex portions 2132, a pushing convex portion 2141 and a locking convex portion 2151. The outer circumferential surface of the base ring 211 is radially outward. Two positioning portions 213, a pushing portion 214 and a latching portion 215 are disposed, and a positioning groove 2131 is recessed in the outer circumferential surface of the positioning portions 213, and the bottom surface of each positioning portion 213 is convexly disposed downward. The engaging convex portion 2132 is an L-shaped bent piece body, and the opening of the connecting convex portion 2132 faces the center of the base ring 211, and the pushing convex portion 2141 is convexly formed on the bottom surface of the pushing portion 214. The pushing protrusion 2141 is also an L-shaped bent piece, and the opening of the pushing protrusion 2141 faces the center of the base ring 211, and the positioning convex portion 2151 is convexly disposed on the top surface of the engaging portion 215. The latching portion 2151 is also an L-shaped bent sheet body, and the opening of the latching convex portion 2151 faces the center of the base ring 211. The outer periphery of the body 11 of the expansion ring 10 is engaged with the two coupling protrusions 2132, the pushing protrusions 2141, and the carding protrusions 2151 of the base ring 211.

The at least three carriers 212 are circumferentially fixed to the bottom surface of the base ring 211. Each of the bearing blocks 212 is a plastic block having a trapezoidal cross section, and a bottom surface of each of the bearing blocks 212 is recessed with a mounting groove 2121. 2121 is an arc-shaped grooving groove, and the base ring 211 is erected through the positioning long hole 216 between the two adjacent bearing blocks 212. The grouping ring 22 is rotatably mounted on the at least three bearing blocks 212. The groove 2121 is installed.

As shown in FIG. 4 to FIG. 6 , the operating ring of the present invention is first placed on a machine table 30 , wherein the machine table 30 includes a platform 31 , two tracks 32 , a sliding table 33 , and a first a pressure cylinder 34, a second pressure cylinder 35 and a pressure seat 36. The platform 31 is a horizontally disposed rectangular plate body. The two rails 32 are horizontally spaced apart from the top surface of the platform 31. The slide table 33 is slidable. A locating pin 332 is disposed on the periphery of the accommodating hole 331, and the locating pin 33 is protruded from the periphery of the accommodating hole 331. 34 and the second pressure cylinder 35 are disposed on the top surface of the sliding table 33 and located at the rear side of the hole 331 , and the first pressure cylinder 34 is spaced apart from the second pressure cylinder 35 , and the pressure seat 36 is disposed. It is disposed on the platform 31 and above the sliding table 33. The pressure seat 36 includes a supporting base 361, a lifting and lowering cylinder 362 and a pressing unit 363. The support base 361 is a U-shaped seat body with an opening downward. The lift cylinder 362 is erected on the top surface of the support base 361, and the press unit 363 and the press cylinder of the lift cylinder 362 are fixed. Then, the pressing unit 363 includes a four-pressing member 3631, a four-pressing member 3632, and a four-pressing member 3633.

When the operation of the present invention is used, as shown in FIG. 6, the expansion ring 10 is first placed on the sliding table 33, and the expansion ring 10 is located above the hole 331, and the cut wafer 60 is adhered to The bottom surface of the film 12 of the expansion ring 10, as shown in FIG. 7 and FIG. 8, is then placed on the top surface of the film 12 of the expansion ring 10, so that the set of ring rings 22 are attached to the top of the film 12. As shown in FIG. 9, the cylinder rod of the first cylinder 34 pushes the pushing portion 214 of the base ring 211 to the right. Referring to FIG. 1 and FIG. 2, the base 21 is opposite to the ring of the group. 22 rotates clockwise, so that the positioning groove 2131 of one of the positioning portions 213 is engaged with the positioning pin 332 of the sliding table 33, and then, as shown in FIG. 5 and FIG. 10, the pressure seat 36 is The pressure cylinder of the lift cylinder 362 is axially extended, so that the press unit 363 is pressed into the present invention, that is, the four press members 3631 respectively pass through the positioning long holes 216 of the base ring 211 to press the four press members 3631. On the set of rings 22, and the four pressing members 3632 are pressed on the outer periphery of the body 11 of the expanding ring 10, the four-pressing member 3633 is pressed against the base ring. At the outer periphery of 211, at the same time, the film 12 of the expansion ring 10 is expanded downward to be expanded.

Next, as shown in FIG. 1 and FIG. 11, the cylinder rod of the second cylinder 35 pushes the pushing portion 214 of the base ring 211 to the left, so that the base 21 rotates counterclockwise with respect to the group ring 22. Further, the outer circumference of the body 11 of the expansion ring 10 is engaged with the two coupling protrusions 2132 of the base ring 211, the pushing protrusions 2141 and the engaging protrusions 2151, so that the film 12 of the expansion ring 10 is continuously maintained downward. Expanded and expanded, and then, as shown in FIG. 12, the assembly of the set of fittings 20 and the expansion ring 10 is removed relative to the machine table 30, and the set of fittings 20 is combined with the expansion ring 10. The component is flipped so that the cut wafer 60 is placed upward. At this time, since the film 12 is in an expanded state, the gap of each wafer in the cut wafer 60 is enlarged, and the rinsing step can be started. As shown in FIG. 13, the assembly of the assembly 20 and the expansion ring 10 is placed on a cleaning station 40, wherein the cleaning station 40 includes a cylinder 41 and a plurality of peripheral members 41 are attached to the circumference of the cylinder 41. The claw portion 42 at this time, the film 12 of the expansion ring 10 is attached to the top surface of the cylinder 41, and The two positioning portions 213, the pushing portion 214 and the locking portion 215 of the base 21 of the assembly 20 are coupled to the claw portion 42 of the cleaning table 40, and the wafer 60 on the film 12 can be rinsed with a water column to The fines in the gaps of the wafers in the circle 60 are washed away.

After the cleaning is completed, the expansion ring 10 needs to be detached from the set of accessories 20, and the steps are as follows. As shown in FIG. 5, FIG. 14 and FIG. 15, the assembly of the assembly 20 and the expansion ring 10 is first placed. On the sliding table 33 of the machine table 30, the cylinder of the lifting and lowering cylinder 362 of the pressure seat 36 is axially extended downward, so that the pressing unit 363 is pressed on the present invention, that is, the four pressing members 3631 respectively The positioning hole 216 of the base ring 211 is inserted to press the four pressing member 3631 on the ring 22, and the four pressing members 3632 are pressed on the outer periphery of the body 11 of the expanding ring 10. The member 3633 is pressed against the outer circumference of the base ring 211, and the cylinder rod of the first cylinder 34 pushes the pushing portion 214 of the base ring 211 to the right, so that the base 21 rotates clockwise relative to the group ring 22 The outer peripheral edge of the body 11 of the expansion ring 10 is separated from the two coupling protrusions 2132, the pushing protrusions 2141 and the carding protrusions 2151 of the base ring 211, so that the expansion ring 10 is disengaged from the set of accessories 20, and then the The expansion ring 10 is placed in a baking box (not shown), and the film 12 of the expansion ring 10 is returned to a taut state.

The present invention is mainly designed to include a base 21 and a set of mating rings 22, and the base 21 is rotatable relative to the set of mating rings 22 such that the outer periphery of the body 11 of the expanding ring 10 can be coupled or disengaged. The two coupling protrusions 2132, the pushing protrusions 2141 and the engaging protrusions 2151 of the base ring 211 improve the bonding precision of the expansion ring 10 with respect to the set of fittings 20, thereby reducing the damage rate of the expansion ring 10.

The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the invention may be made without departing from the technical scope of the present invention.

10‧‧‧ expansion ring
11‧‧‧Ontology
111‧‧‧ gap
112‧‧‧Fracture
12‧‧‧ Film
20‧‧‧Group accessories
21‧‧‧Base
211‧‧‧Base ring
212‧‧‧ bearing seat
213‧‧‧ Positioning Department
2131‧‧‧ positioning groove
2132‧‧‧Combined convex
214‧‧‧Promotion Department
2141‧‧‧Promoting the convex part
215‧‧‧Card Department
2151‧‧‧ Carded convex
2121‧‧‧ installation trench
216‧‧‧Locating long holes
30‧‧‧ machine
31‧‧‧ platform
32‧‧‧ Track
33‧‧‧ slide table
331‧‧‧ hole
332‧‧‧Locating pins
34‧‧‧First pressure cylinder
35‧‧‧Second pressure cylinder
36‧‧‧压座
361‧‧‧ support
362‧‧‧Lifting and lowering cylinder
363‧‧‧Compression unit
3631‧‧‧Sold parts
3632‧‧‧Pressing parts
3633‧‧‧ according to the parts
40‧‧‧ cleaning station
41‧‧‧Cylinder
42‧‧‧ claws
60‧‧‧ wafer

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view showing the appearance of a preferred embodiment of the present invention. Figure 2 is an exploded perspective view of the preferred embodiment of the present invention. Figure 3 is an exploded perspective view showing the appearance of the assembly of the preferred embodiment of the present invention. Figure 4 is a perspective view showing the appearance of the machine in the operation of the present invention. Figure 5 is a bottom perspective view of the pressure seat of the machine during operation of the present invention. Figure 6 is a perspective view showing the operation of the present invention. Fig. 7 is a perspective view showing another operation of the present invention. Figure 8 is a top plan view of the operation of the present invention. Figure 9 is a top plan view of another operation of the present invention. Figure 10 is a front view of the operation of the present invention. Figure 11 is a top plan view of still another operation of the present invention. Figure 12 is an exploded perspective view showing the operation of the present invention and a cleaning station. Figure 13 is a perspective view showing the operation of the present invention and a cleaning station. Figure 14 is a top plan view of the operation of the present invention. Figure 15 is a front elevational view of the operational section of the present invention.

Claims (9)

A wafer post-cutting temporary expansion fixture comprising: an expansion ring comprising a body and a film, the body being annular, the film being closely attached to a surface of the body; and a set An accessory, the set of accessories is combined with the expansion ring, the set of accessories includes a base and a set of rings, the base includes a base ring and at least three carriers, and the bottom surface of the base ring is provided with a plurality of protrusions. The outer circumference of the outer ring of the expansion ring is disposed on the plurality of convex portions of the base ring, and the at least three carrier seats are circumferentially fixed to the bottom surface of the base ring, and the set of ring rings are rotatably mounted on the at least three carrier . The wafer is post-cut temporary expansion fixture according to claim 1, wherein the outer periphery of the body is recessed with at least two notches, and the at least two notches are circumferentially spaced. The temporary expansion fixture after wafer cutting according to claim 2, wherein the outer periphery of the body is provided with at least three fractures, each fracture being a linear opening. The temporary dilating fixture after wafer cutting according to claim 3, wherein a peripheral portion of the outer ring of the base ring is convexly provided with a pushing portion. The temporary expansion fixture after the wafer is cut according to claim 4, wherein the outer circumferential surface of the base ring is convexly provided with two positioning portions, and the two positioning portions and the pushing portion are circumferentially spaced apart. The temporary expansion fixture after the wafer is cut according to claim 5, wherein a peripheral portion of the outer ring of the base ring protrudes outwardly, and the latching portion and the two positioning portions and the pushing portion are surrounded. Interval setting. The temporary expansion fixture after wafer cutting according to claim 6, wherein the plurality of convex portions are two combined convex portions, one pushing convex portion and one engaging convex portion, and the two combined convex portions are respectively disposed corresponding to each other. The bottom surface of the positioning portion is an L-shaped bent piece body, and the opening of the coupling convex portion faces the center of the base ring, and the pushing convex portion is disposed on the bottom surface of the pushing portion and is also an L-shaped bent piece body. The opening of the protruding protrusion is opposite to the center of the base ring, and the engaging protrusion is disposed on the bottom surface of the engaging portion and is also an L-shaped bent piece, and the opening of the engaging convex portion faces the base ring center. The wafer post-cutting temporary expansion jig according to any one of claims 1 to 7, wherein each of the carrier seats is a block having a trapezoidal cross section, and a bottom surface of each of the carrier seats is recessed with a mounting groove, The installation groove is an arc-shaped cutting groove, and the set of ring rings is rotatably mounted on the installation groove of the at least three bearing seats. The wafer-to-wafer temporary expansion jig according to claim 8, wherein the base ring has a positioning long hole penetratingly between two adjacent carriers.