TWI624096B - Organic light-emitting display device and method of manufacturing the same - Google Patents

Organic light-emitting display device and method of manufacturing the same Download PDF

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TWI624096B
TWI624096B TW106114304A TW106114304A TWI624096B TW I624096 B TWI624096 B TW I624096B TW 106114304 A TW106114304 A TW 106114304A TW 106114304 A TW106114304 A TW 106114304A TW I624096 B TWI624096 B TW I624096B
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opening
auxiliary electrode
organic light
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emitting
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TW201739081A (en
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許峻瑛
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樂金顯示科技股份有限公司
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/824Cathodes combined with auxiliary electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/124Insulating layers formed between TFT elements and OLED elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • H10K59/1315Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/88Dummy elements, i.e. elements having non-functional features
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

一種有機發光顯示裝置及其製造方法,可改善陰極與輔助電極之間的電性連接,進而減少覆蓋多個子畫素的陰極的電阻值,此結構也可防止側漏電流。有機發光顯示裝置包含:基板包含顯示區域和圍繞顯示區域的邊緣區域,在顯示區域內有多個子畫素排列成陣列,這些子畫素包含發光區域和位於發光區域周圍的非發光區域;非發光區域內的輔助電極;絕緣單位,具有用以顯露出輔助電極的第一開孔;第一凸出圖案,位於絕緣單位上,深入至第一開孔內,並且重疊於被顯露出的輔助電極;以及陰極,直接接觸被顯露出的輔助電極,並且重疊於第一凸出圖案。An organic light-emitting display device and a method of fabricating the same can improve electrical connection between a cathode and an auxiliary electrode, thereby reducing a resistance value of a cathode covering a plurality of sub-pixels, and the structure can also prevent side leakage current. The organic light emitting display device includes: a substrate comprising a display area and an edge area surrounding the display area, wherein a plurality of sub-pixels are arranged in an array, the sub-pixels comprise a light-emitting area and a non-light-emitting area around the light-emitting area; An auxiliary electrode in the region; an insulating unit having a first opening for exposing the auxiliary electrode; the first protruding pattern being located on the insulating unit, deep into the first opening, and overlapping the exposed auxiliary electrode And a cathode that directly contacts the exposed auxiliary electrode and overlaps the first convex pattern.

Description

有機發光顯示裝置及其製造方法Organic light emitting display device and method of manufacturing same

本發明係關於一種有機發光顯示裝置,特別是一種包含輔助電極的有機發光顯示裝置及其製造方法,以減少覆蓋多個子畫素的陰極的電阻值,進而改善陰極與輔助電極之間的電性連接,防止側面漏電流。The present invention relates to an organic light emitting display device, and more particularly to an organic light emitting display device including an auxiliary electrode and a method of fabricating the same, to reduce the resistance value of a cathode covering a plurality of subpixels, thereby improving electrical properties between the cathode and the auxiliary electrode. Connect to prevent side leakage current.

隨著資訊導向社會的發展,對於可顯示影像的顯示裝置的需求是越來越高。目前各式各樣已在使用的顯示裝置例如有液晶顯示器、電漿顯示面板和有機發光顯示器或有機場效發光顯示裝置等。在這些不同的顯示裝置中,包含了相對應的顯示面板。With the development of information-oriented society, the demand for display devices capable of displaying images is increasing. A wide variety of display devices that are currently in use include, for example, liquid crystal displays, plasma display panels, and organic light emitting displays or organic light emitting display devices. Among these different display devices, corresponding display panels are included.

在這些顯示裝置中,由於有機發光顯示裝置為不需要獨立的光源單元的自發光裝置,因此其設計具有輕薄、可饒性、色純度高的優勢。Among these display devices, since the organic light-emitting display device is a self-luminous device that does not require an independent light source unit, its design is advantageous in that it is light, thin, and has high color purity.

上述的有機發光顯示裝置包含用以實現光發射的一發光二極體(OLED)。有機發光二極體包含兩個不同的電極以及位於兩電極之間的一發光層。當任一電極產生的電子與其他電極產生的電洞被引進發光層時,被引進的電洞和電子會彼此結合而形成激子(或稱激發光子)。透過產生的激子由激發態變遷至基態,即可實現光發射。The above organic light emitting display device includes a light emitting diode (OLED) for realizing light emission. The organic light emitting diode comprises two different electrodes and a light emitting layer between the two electrodes. When electrons generated by any of the electrodes and holes generated by other electrodes are introduced into the light-emitting layer, the introduced holes and electrons combine with each other to form excitons (or excited photons). Light emission can be achieved by the generated excitons moving from the excited state to the ground state.

其中一種類型的有機發光顯示裝置是主動型有機發光顯示裝置。在主動型有機發光顯示裝置中,有多個有機發光二極體各別包含於多個子畫素中,而這些子畫素在基板上排列成一矩陣;以及有多個驅動薄膜電晶體分別包含於多個子畫素中,用以控制有機發光二極體。One type of organic light emitting display device is an active organic light emitting display device. In an active organic light-emitting display device, a plurality of organic light-emitting diodes are respectively included in a plurality of sub-pixels, and the sub-pixels are arranged in a matrix on a substrate; and a plurality of driving thin film transistors are respectively included in Among the plurality of sub-pixels, the organic light-emitting diode is controlled.

在主動型有機發光顯示裝置中,有機發光二極體包含彼此相對的第一電極和第二電極以及置於兩電極之間的一有機發光層。在每一個子畫素中,第一電極被圖案化;第二電極則整合成足以覆蓋所述多個子畫素。In the active organic light emitting display device, the organic light emitting diode includes first and second electrodes opposed to each other and an organic light emitting layer interposed between the electrodes. In each sub-pixel, the first electrode is patterned; the second electrode is integrated enough to cover the plurality of sub-pixels.

以下,將說明現有技術中的有機發光顯示裝置。Hereinafter, an organic light-emitting display device of the prior art will be described.

圖1為現有技術中有機發光顯示裝置從一側至相對的另一側量測獲得的亮度變化的示意圖。FIG. 1 is a schematic diagram showing changes in luminance obtained by measuring an organic light-emitting display device from one side to the opposite side in the related art.

如圖1所示,可知現有技術中的有機發光顯示裝置的形狀為矩形平面,並且在量測從一側到相對的另一側的亮度變化時,現有技術中的有機發光顯示裝置會出現亮度不均的情形,使得亮度在相對兩側之間的中央處最小,並且隨著距離其中一側(一側或相對的另一側)越遠,亮度逐漸變大。這意味著,隨著與邊緣之間的距離的增加或是與中央之間的距離變小,亮度會逐漸下降。As shown in FIG. 1, it can be seen that the shape of the organic light-emitting display device in the prior art is a rectangular plane, and the brightness of the organic light-emitting display device of the prior art occurs when the brightness changes from one side to the other side are measured. In the case of unevenness, the brightness is minimized at the center between the opposite sides, and the brightness gradually becomes larger as the distance from one side (one side or the opposite side) is further. This means that as the distance from the edge increases or the distance from the center becomes smaller, the brightness gradually decreases.

經過分析上述亮度不均勻的原因之後,得知在有機發光顯示裝置中,由於材料特性的緣故,使得所形成用以覆蓋多個子畫素的有機發光二極體的第二電極(例如上電極)具有大電阻值。實際上,對於上發光裝置來說,由於上電極的厚度縮減,因而使得其電阻值大。更具體來說,雖然會供應定電壓或接地電壓至第二電極的邊緣,但由於第二電極距離電壓供應單元相對較遠而距離中央相對較近,使得第二電極的電阻值增加,並且第二電極的電壓穩定性會隨著距離邊緣越遠或距離中心越近而逐漸下降。這對於大尺寸顯示器來說更是關係重大。因此,在不同區域之間會有亮度差異的情形發生,如圖1所示。After analyzing the cause of the luminance unevenness described above, it is known that in the organic light-emitting display device, the second electrode (for example, the upper electrode) of the organic light-emitting diode that covers the plurality of sub-pixels is formed due to material properties. Has a large resistance value. In fact, for the upper light-emitting device, since the thickness of the upper electrode is reduced, the resistance value thereof is made large. More specifically, although a constant voltage or a ground voltage is supplied to the edge of the second electrode, since the second electrode is relatively far from the voltage supply unit and relatively close to the center, the resistance value of the second electrode increases, and The voltage stability of the two electrodes will gradually decrease as the distance from the edge is further or closer to the center. This is even more important for large displays. Therefore, there is a case where there is a difference in luminance between different regions, as shown in FIG.

由於觀賞者可能容易感知察覺到現有技術中的顯示裝置會有亮度差異的情形發生,因此需要解決這樣的問題。Since the viewer may easily perceive that a situation in which the display device of the prior art has a brightness difference occurs, it is necessary to solve such a problem.

有鑑於此,本發明意旨在提供一種有機發光顯示裝置及其製造方法,藉以實質上排除目前技術領域中的限制和缺失所引起的一或多個問題。In view of this, the present invention is intended to provide an organic light emitting display device and a method of fabricating the same, thereby substantially obscuring one or more problems caused by limitations and omissions in the prior art.

本發明的其中一目的在於提供一種有機發光顯示裝置及其製造方法,並且此有機發光顯示裝置包含用以減少有機發光二極體的陰極的電阻值的一輔助電極,並且陰極覆蓋多個子畫素,藉以改善陰極與輔助電極之間的電性連接。An object of the present invention is to provide an organic light emitting display device and a method of fabricating the same, and the organic light emitting display device includes an auxiliary electrode for reducing the resistance value of the cathode of the organic light emitting diode, and the cathode covers the plurality of subpixels In order to improve the electrical connection between the cathode and the auxiliary electrode.

本發明的其它優點、目的和特徵將在下述說明書中部分地闡述且其部分可以根據對下述內容的察看結果而由本領域具有通常知識者理解,或可以從本發明的實踐中獲知。通過在書面陳述和其專利申請範圍以及附圖中特別指出的結構可以予以實現到並達到本發明的目的和其它優點。The other advantages, objects, and features of the invention will be set forth in part in the description in the appended claims. The objectives and other advantages of the invention will be realized and attained by the <RTIgt;

根據其中一個觀點,在一絕緣單位中提供一底切結構,並且輔助電極和陰極可選擇性地在底切結構所定義的區域內彼此相接,藉此可提升面板的亮度。此外,當這樣的結構應用於一非發光區域時,可防止例如有機發光二極體內的一電荷產生層所導致的側漏電流。在此應用中,絕緣單位可為單層結構或者可為至少包含2層的一絕緣堆疊結構,較佳為多個上下堆疊的絕緣層,例如一層間絕緣層、一保護膜和/或一外塗層。也就是說,絕緣單位可包含一層間絕緣堆疊。According to one aspect, an undercut structure is provided in an insulating unit, and the auxiliary electrode and the cathode are selectively connectable to each other in a region defined by the undercut structure, whereby the brightness of the panel can be improved. Further, when such a structure is applied to a non-light-emitting region, side leakage current caused by, for example, a charge generating layer in the organic light-emitting diode can be prevented. In this application, the insulating unit may be a single layer structure or may be an insulating stack structure comprising at least 2 layers, preferably a plurality of insulating layers stacked on top of each other, such as an interlayer insulating layer, a protective film and/or an outer layer. coating. That is, the insulation unit can comprise an inter-layer insulation stack.

根據一示例,有機發光顯示裝置包含一基板、一輔助電極、一絕緣單位、一第一凸出圖案以及一陰極。基板包含一顯示區域和圍繞顯示區域的一邊緣區域。在顯示區域內有多個子畫素排列成一矩陣,而這些多個子畫素分別包含一發光區域和位於發光區域周圍的一非發光區域。輔助電極是於基板的非發光區域內提供。絕緣單位具有用以暴露部分的輔助電極的一第一開孔。第一凸出圖案位於絕緣單位上,且第一凸出圖案的至少一表面深入至第一開孔內,以便於重疊於部分的輔助電極。陰極接觸到重疊於第一凸出圖案的部分輔助電極。According to an example, an organic light emitting display device includes a substrate, an auxiliary electrode, an insulating unit, a first protruding pattern, and a cathode. The substrate includes a display area and an edge area surrounding the display area. A plurality of sub-pixels are arranged in a matrix in the display area, and the plurality of sub-pixels respectively comprise a light-emitting area and a non-light-emitting area located around the light-emitting area. The auxiliary electrode is provided in a non-light emitting region of the substrate. The insulating unit has a first opening for exposing a portion of the auxiliary electrode. The first protruding pattern is located on the insulating unit, and at least one surface of the first protruding pattern penetrates into the first opening to facilitate overlapping with a portion of the auxiliary electrode. The cathode contacts a portion of the auxiliary electrode that overlaps the first convex pattern.

根據另一個示例,有機發光顯示裝置包含一基板、一輔助電極、一絕緣單位、一第一凸出圖案以及一陰極。基板包含一顯示區域和圍繞顯示區域的一邊緣區域。在顯示區域內有多個子畫素被排列成一矩陣,這些子畫素各別包含一發光區域和圍繞發光區域的一非發光區域。輔助電極位於所述多個子畫素的非發光區域內。絕緣單位具有一第一開孔,此第一開孔暴露部分的輔助電極。第一凸出圖案位於絕緣單位上,且第一凸出圖案深入至第一開孔內且重疊於部分的輔助電極。陰極直接連接重疊於第一凸出圖案的部分輔助電極。According to another example, an organic light emitting display device includes a substrate, an auxiliary electrode, an insulating unit, a first protruding pattern, and a cathode. The substrate includes a display area and an edge area surrounding the display area. A plurality of sub-pixels are arranged in a matrix in the display area, and each of the sub-pixels respectively includes a light-emitting area and a non-light-emitting area surrounding the light-emitting area. The auxiliary electrode is located in a non-light emitting region of the plurality of subpixels. The insulating unit has a first opening that exposes a portion of the auxiliary electrode. The first protruding pattern is on the insulating unit, and the first protruding pattern penetrates into the first opening and overlaps the portion of the auxiliary electrode. The cathode is directly connected to a portion of the auxiliary electrode that overlaps the first convex pattern.

根據另一個示例,有機發光顯示裝置包含:一基板,包含一顯示區域和圍繞顯示區域的一邊緣區域,在顯示區域內有多個子畫素排列成一陣列,並且子畫素包含一發光區域和位於發光區域周圍的一非發光區域;一輔助電極,位於非發光區域內;一絕緣單元具有一第一開孔,第一開孔暴露出輔助電極;一第一凸出圖案,位於絕緣單元上,深入至第一開孔內,並且重疊於被暴露出的輔助電極;以及一陰極,直接接觸被暴露出的輔助電極,並且重疊於第一凸出圖案。According to another example, an organic light emitting display device includes: a substrate including a display area and an edge area surrounding the display area, wherein the plurality of sub pixels are arranged in an array in the display area, and the subpixel includes a light emitting area and is located a non-light-emitting area around the light-emitting area; an auxiliary electrode located in the non-light-emitting area; an insulating unit having a first opening, the first opening exposing the auxiliary electrode; and a first protruding pattern on the insulating unit Drilling into the first opening and overlapping the exposed auxiliary electrode; and a cathode directly contacting the exposed auxiliary electrode and overlapping the first protruding pattern.

換句話說,所述第一凸出圖案可凸出所述絕緣單位的第一開孔或重疊第一開孔。也就是說,第一凸出圖案和絕緣單位可形成一底切結構。藉這些手段,輔助電極與凸出圖案之間可形成一間隙。陰極可因此在所述凸出圖案下方形成。此時的陰極可為所述裝置的一發光二極體的一部分,所述有機發光二極體可在所述的發光區域內被提供。陰極可在非發光區域內延伸。因此,陰極可對應多個子畫素。所述絕緣單位較佳地是至少部分被製作在所述輔助電極上。絕緣單位和凸出圖案可採用相同材料或不同材料來製作。In other words, the first protruding pattern may protrude from the first opening of the insulating unit or overlap the first opening. That is, the first protruding pattern and the insulating unit may form an undercut structure. By these means, a gap can be formed between the auxiliary electrode and the protruding pattern. The cathode can thus be formed below the raised pattern. The cathode at this time may be part of a light-emitting diode of the device, and the organic light-emitting diode may be provided in the light-emitting region. The cathode can extend within the non-luminescent region. Therefore, the cathode can correspond to a plurality of sub-pixels. The insulating unit is preferably at least partially fabricated on the auxiliary electrode. The insulating unit and the protruding pattern can be made of the same material or different materials.

所述有機發光顯示裝置可進一步包含一有機發光層,所述有機發光層位於未重疊於第一凸出圖案的部分輔助電極的上表面上,以及位於發光區域內的絕緣單位上。The organic light emitting display device may further include an organic light emitting layer on an upper surface of a portion of the auxiliary electrode not overlapping the first protruding pattern, and an insulating unit located in the light emitting region.

所述陰極可被設置於重疊於第一凸出圖案的部分輔助電極的上表面,以及被設置在位於發光區域內的絕緣單位上的該有機發光層上。The cathode may be disposed on an upper surface of a portion of the auxiliary electrode overlapping the first convex pattern, and on the organic light-emitting layer disposed on an insulating unit located in the light-emitting region.

所述有機發光顯示裝置在絕緣單位上可更包含一第二開孔和一第二凸出圖案。第二開孔是形成於排除第一開孔的非發光區域內的絕緣單位內。第二凸出圖案的至少一表面深入至第二開孔的區域內。因此,第二開孔可與第一開孔透過相同的製成步驟同時形成。The organic light emitting display device may further include a second opening and a second protruding pattern on the insulating unit. The second opening is formed in an insulating unit in the non-light emitting region excluding the first opening. At least one surface of the second protruding pattern penetrates into a region of the second opening. Therefore, the second opening can be formed simultaneously with the same manufacturing step as the first opening.

第一凸出圖案和第二凸出圖案可在同一層和/或以相同材料製作。因此,第二凸出圖案與第一凸出圖案可同時藉由相同的製程步驟來製作。The first raised pattern and the second raised pattern can be made in the same layer and/or in the same material. Therefore, the second protruding pattern and the first protruding pattern can be simultaneously produced by the same process steps.

有機發光顯示裝置可更包含位於第二開孔下方的一非有機絕緣層。非有機絕緣層的蝕刻率不同於構成絕緣單位的下絕緣層的蝕刻率。The organic light emitting display device may further include a non-organic insulating layer under the second opening. The etching rate of the non-organic insulating layer is different from the etching rate of the lower insulating layer constituting the insulating unit.

第二開孔可沿著發光區域的一側。較佳的作法是,沿著發光區域的不同側分別形成第一開孔和第二開孔。因此,第一開孔與第二開孔可分別朝不同方向延伸,例如實質上彼此垂直。較佳的作法是,利用第一開孔和/或第二開孔來分割有機發光層。例如藉由多個發光層中例如為電荷產生層的傳導層來製作第二開孔,即可進一步減少漏電流,而無須增加例如用以分割各個畫素之間的發光層的壁壘等額外圖案。實際上,可在排列於垂直方向上的多個子畫素之間提供第一開孔,在排列於水平方向上的多個子畫素之間提供第二開孔。介於排列在水平方向上的子畫素之間的隔堤寬度可小於排列在垂直方向上的子畫素之間的隔堤寬度。The second opening may be along one side of the light emitting area. Preferably, the first opening and the second opening are respectively formed along different sides of the light-emitting area. Thus, the first aperture and the second aperture may each extend in different directions, for example substantially perpendicular to each other. Preferably, the first opening and/or the second opening are used to divide the organic light-emitting layer. For example, by forming the second opening by a conductive layer such as a charge generating layer among the plurality of light emitting layers, the leakage current can be further reduced without adding an additional pattern such as a barrier for dividing the light emitting layer between the respective pixels. . Actually, a first opening may be provided between a plurality of sub-pixels arranged in a vertical direction, and a second opening may be provided between a plurality of sub-pixels arranged in a horizontal direction. The bank width between the sub-pixels arranged in the horizontal direction may be smaller than the bank width between the sub-pixels arranged in the vertical direction.

第二開孔可被塑造,以圍繞發光區域的周圍。這對於隔堤寬度非常小的高解析度裝置來說具有特殊優勢。The second opening can be shaped to surround the perimeter of the illuminated area. This has particular advantages for high resolution devices with very small bank widths.

第一凸出圖案可為一隔堤,隔堤在輔助電極上方具有一第一子開孔。第一子開孔小於第一開孔。也就是說,第一凸出圖案和/或第二凸出圖案可包含部分的隔堤。The first protruding pattern may be a bank, and the bank has a first sub-opening above the auxiliary electrode. The first sub-opening is smaller than the first opening. That is, the first raised pattern and/or the second raised pattern may comprise partial banks.

絕緣單位可包含一非有機絕緣層和一有機絕緣層。非有機絕緣層和有機絕緣層依序由絕緣單位接近基板的一端開始堆疊。此結構也可稱為絕緣堆疊(絕緣堆疊)。The insulating unit may comprise a non-organic insulating layer and an organic insulating layer. The non-organic insulating layer and the organic insulating layer are sequentially stacked by the insulating unit close to one end of the substrate. This structure can also be referred to as an insulating stack (insulation stack).

非有機絕緣層可具有第一開孔和第二開孔,而有機絕緣層可具有第一子開孔和第二子開孔。第一子開孔和第二子開孔分別小於第一開孔和第二開孔。第一凸出圖案和第二凸出圖案是藉由深入至第一開孔和第二開孔內的有機絕緣層來定義。The non-organic insulating layer may have a first opening and a second opening, and the organic insulating layer may have a first sub-opening and a second sub-opening. The first sub-opening and the second sub-opening are smaller than the first opening and the second opening, respectively. The first raised pattern and the second raised pattern are defined by an organic insulating layer that penetrates into the first opening and the second opening.

位於輔助電極上方的非有機絕緣層與有機絕緣層在兩者之間的交界處可具有相同直徑的多個開孔。The non-organic insulating layer over the auxiliary electrode and the organic insulating layer may have a plurality of openings of the same diameter at the interface therebetween.

有機發光顯示裝置可包含一隔堤。此隔堤在發光區域內可具有一開口。有機發光顯示裝置可包含一有機發光二極體,此有機發光二極體包含一陽極、所述有機發光層與所述陰極。The organic light emitting display device may include a bank. This bank may have an opening in the illuminating area. The organic light emitting display device may include an organic light emitting diode including an anode, the organic light emitting layer and the cathode.

第一凸出圖案與第二凸出圖案中至少其中之一可為與陽極位於同一層的一陽極傀儡圖案。這裡的陽極傀儡圖案可關聯於與有機發光二極體的陽極一起位於同一層且與有機發光二極體的陽極一樣用相同材料製作的一圖案。因此,陽極傀儡圖案可以跟陽極一起在相同的製程步驟中形成。At least one of the first convex pattern and the second convex pattern may be an anode 傀儡 pattern in the same layer as the anode. The anode ruthenium pattern herein may be associated with a pattern which is formed in the same layer as the anode of the organic light-emitting diode and which is made of the same material as the anode of the organic light-emitting diode. Therefore, the anode ruthenium pattern can be formed in the same process step as the anode.

陽極傀儡圖案可透過絕緣單位內的一接觸孔電性連接至輔助電極。當陽極材料的電阻值可低於陰極材料的電阻值時,藉由輔助電極與陽極傀儡圖案的接觸,可以更進一步降低陰極的電阻值。The anode 傀儡 pattern is electrically connected to the auxiliary electrode through a contact hole in the insulating unit. When the resistance value of the anode material can be lower than the resistance value of the cathode material, the resistance value of the cathode can be further reduced by the contact of the auxiliary electrode with the anode ruthenium pattern.

第一凸出圖案與第二凸出圖案中至少其中之一可為一有機絕緣層。At least one of the first protruding pattern and the second protruding pattern may be an organic insulating layer.

輔助電極可與每一個子畫素中構成一薄膜電晶體的一電極位於同一層。The auxiliary electrode may be located in the same layer as an electrode constituting a thin film transistor in each sub-pixel.

輔助電極可與邊緣區域內的一片狀電極位於同一層。The auxiliary electrode may be in the same layer as the one piece of the electrode in the edge region.

絕緣單位可具有用以暴露片狀電極的部分上表面的一開口區域,開口區域可藉由非有機絕緣層中的一開孔定義。The insulating unit may have an open area for exposing a portion of the upper surface of the sheet electrode, and the open area may be defined by an opening in the non-organic insulating layer.

根據另一個示例,有機發光顯示裝置的製造方法包含:預備一基板,基板包含一顯示區域和圍繞顯示區域的一邊緣區域,在顯示區域有多個子畫素排列成一矩陣,且這些子畫素各別包含一發光區域和圍繞發光區域的一非發光區域;在非發光區域內提供一輔助電極;提供一絕緣單位,絕緣單位具有用以暴露部分的輔助電極的一第一開孔;在絕緣單位上提供一第一凸出圖案,第一凸出圖案的至少一表面深入至第一開孔內,以便於覆蓋部分的輔助電極;在輔助電極的上表面上除了被第一凸出圖案覆蓋的部分輔助電極以外的其餘部分,形成一有機發光層;以及形成一陰極,以覆蓋有機發光層並接觸被第一凸出圖案覆蓋的部分輔助電極。According to another example, a method of fabricating an organic light emitting display device includes: preparing a substrate, the substrate comprising a display area and an edge area surrounding the display area, wherein the plurality of sub-pixels are arranged in a matrix, and the sub-pixels are each a light-emitting region and a non-light-emitting region surrounding the light-emitting region; an auxiliary electrode is provided in the non-light-emitting region; an insulating unit is provided, and the insulating unit has a first opening for exposing a portion of the auxiliary electrode; Providing a first protruding pattern, at least one surface of the first protruding pattern penetrates into the first opening to facilitate covering the auxiliary electrode of the portion; and the upper surface of the auxiliary electrode is covered by the first protruding pattern a portion other than the portion of the auxiliary electrode forms an organic light-emitting layer; and a cathode is formed to cover the organic light-emitting layer and contact a portion of the auxiliary electrode covered by the first convex pattern.

上述提供絕緣單位的步驟可包含在非發光區域內絕緣單位中除了第一開孔以外的其餘位置形成一第二開孔。The step of providing the insulating unit may include forming a second opening in the insulating unit other than the first opening in the non-light emitting region.

上述提供第一凸出圖案可包含在絕緣單位上形成一第二凸出圖案,第二凸出圖案的至少一表面深入至第二開孔的區域內。The providing the first protruding pattern may include forming a second protruding pattern on the insulating unit, and at least one surface of the second protruding pattern penetrates into a region of the second opening.

根據本發明的另一觀點,一種有機發光顯示裝置的製造方法包含:準備包含一顯示區域和圍繞顯示區域的一邊緣區域的一基板,在顯示區域內有多個子畫素排列成一矩陣,各別的子畫素包含一發光區域和圍繞發光區域的一非發光區域;在非發光區域中提供一輔助電極,在每一個子畫素中提供一薄膜電晶體,以及在邊緣區域內提供一片狀電極;依序形成用以覆蓋輔助電極、薄膜電晶體和片狀電極的一非有機絕緣層和一有機絕緣層,然後共同地移除非有機絕緣層和有機絕緣層而形成用以顯露出薄膜電晶體的其中一個電極的一第一接觸孔,以及移除有機絕緣層而形成一有機絕緣層開孔;在有機絕緣層上形成一陽極,使陽極透過第一接觸孔連接於薄膜電晶體的電極;形成一隔堤,以覆蓋部分的陽極,隔堤在有機絕緣層開孔的區域內和發光區域內具有一開口;以及利用一光阻圖案選擇性地去除非有機絕緣層,以同時使片狀電極和輔助電極顯露出來。較佳的是,有機絕緣層開孔對應於輔助電極的頂部。較佳的是,可進一步地使輔助電極的頂部和片狀電極的頂部顯露出來。According to another aspect of the present invention, a method of fabricating an organic light emitting display device includes: preparing a substrate including a display area and an edge area surrounding the display area, wherein the plurality of sub pixels are arranged in a matrix in the display area, respectively The sub-pixel includes a light-emitting region and a non-light-emitting region surrounding the light-emitting region; an auxiliary electrode is provided in the non-light-emitting region, a thin film transistor is provided in each of the sub-pixels, and a sheet is provided in the edge region An electrode; a non-organic insulating layer and an organic insulating layer for covering the auxiliary electrode, the thin film transistor and the sheet electrode are sequentially formed, and then the non-organic insulating layer and the organic insulating layer are collectively removed to form a thin film a first contact hole of one of the electrodes of the transistor, and an organic insulating layer is removed to form an organic insulating layer opening; an anode is formed on the organic insulating layer, and the anode is connected to the thin film transistor through the first contact hole An electrode; forming a bank to cover a portion of the anode, the bank having an opening in the region of the opening of the organic insulating layer and in the light emitting region And using a photoresist pattern to selectively remove non-organic insulating layer to a sheet while the exposed electrode and the auxiliary electrode. Preferably, the organic insulating layer opening corresponds to the top of the auxiliary electrode. Preferably, the top of the auxiliary electrode and the top of the sheet electrode are further exposed.

根據另一個示例,一種有機發光顯示裝置的製造方法包含以下步驟:預備一基板,基板包含一顯示區域和圍繞顯示區域的一邊緣區域,其中在顯示區域內有多個子畫素排列成一陣列,並且子畫素包含一發光區域和位於發光區域周圍的一非發光區域;在非發光區域內形成一輔助電極;在輔助電極上形成一絕緣單元;在絕緣單元上形成一第一凸出圖案;在絕緣單元內形成一第一開孔,第一開孔暴露出輔助電極,其中第一凸出圖案深入至第一開孔內且重疊於被暴露出的輔助電極;以及形成一陰極,陰極直接接觸與被暴露出的輔助電極並且重疊於第一凸出圖案。According to another example, a method of fabricating an organic light emitting display device includes the steps of: preparing a substrate, the substrate comprising a display area and an edge area surrounding the display area, wherein a plurality of sub pixels are arranged in an array in the display area, and The sub-pixel includes a light-emitting region and a non-light-emitting region around the light-emitting region; an auxiliary electrode is formed in the non-light-emitting region; an insulating unit is formed on the auxiliary electrode; and a first convex pattern is formed on the insulating unit; Forming a first opening in the insulating unit, the first opening exposing the auxiliary electrode, wherein the first protruding pattern penetrates into the first opening and overlaps the exposed auxiliary electrode; and forms a cathode, and the cathode is in direct contact And the auxiliary electrode that is exposed and overlaps the first convex pattern.

在形成隔堤的過程中,隔堤可深入至有機絕緣層開孔中,藉以對應於並重疊於輔助電極。片狀電極的頂部和輔助電極的頂部可受非有機絕緣層的保護。In the process of forming the bank, the bank may penetrate into the opening of the organic insulating layer to correspond to and overlap the auxiliary electrode. The top of the sheet electrode and the top of the auxiliary electrode may be protected by a non-organic insulating layer.

此方法更包含在輔助電極上除了重疊於隔堤和有機絕緣層的部分以外的其餘部分,形成一有機發光層。此方法更包含一陰極,此陰極可覆蓋有機發光層和進而接觸輔助電極中被隔堤覆蓋的部分。The method further includes forming an organic light-emitting layer on the auxiliary electrode except for the portion overlapping the partition and the organic insulating layer. The method further includes a cathode that covers the organic light-emitting layer and thereby contacts the portion of the auxiliary electrode that is covered by the bank.

在形成陽極的步驟中可包含在有機絕緣層上形成一陽極傀儡圖案,以便深入至有機絕緣層開孔內。In the step of forming the anode, an anode ruthenium pattern may be formed on the organic insulating layer so as to penetrate into the opening of the organic insulating layer.

在形成第一接觸孔的步驟中,可進一步形成一第二接觸孔,以便於與第一接觸孔相隔開,以及顯露出至少部分的輔助電極。在形成陽極傀儡圖案的步驟中,陽極傀儡圖案可透過第二接觸孔連接於輔助電極的頂部。In the step of forming the first contact hole, a second contact hole may be further formed to be spaced apart from the first contact hole and to expose at least a portion of the auxiliary electrode. In the step of forming the anode ruthenium pattern, the anode ruthenium pattern may be connected to the top of the auxiliary electrode through the second contact hole.

光阻圖案可深入至待形成的片狀電極上方的一開口區域內以及輔助電極上方的一開口區域內。The photoresist pattern may penetrate into an open area above the sheet electrode to be formed and an open area above the auxiliary electrode.

應當理解的是,本發明的前面的一般描述和以下的詳細描述皆是作為示例和解釋性說明,且力圖提供如所要求保護的本發明的進一步解釋。The foregoing description of the preferred embodiments of the present invention

以下將參照附圖詳述本發明實施例。Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

以下實施例僅通過示例的方式來說明,從而可向本領域技術人員充分地傳達本發明的精神。因此,本發明不限於將在下面描述的實施例,而是可以以其他形式來實施。此外,在附圖中,舉例來說,爲了方便起見,裝置的構成要件的尺寸和厚度可被誇示性地呈現。在說明書全文中,相同的附圖標記將用來指代相同或相似的構成要件。The following examples are merely illustrative, and the spirit of the invention may be fully conveyed by those skilled in the art. Therefore, the invention is not limited to the embodiments to be described below, but may be embodied in other forms. Moreover, in the drawings, for example, the size and thickness of the constituent elements of the device may be presented exaggerated for convenience. Throughout the specification, the same reference numerals will be used to refer to the same or similar constituent elements.

本發明的優點和特徵以及其實現的方法可以通過參考以下實施方式的詳細描述和附圖而被更容易地理解。然而,本發明可以不同的形式實現,且不應被理解爲侷限于此處闡述的實施方式。反而,提供這些實施方式將使得本公開可以全面和完整,並且向本領域的技術人員全面傳達本發明的原理。本發明應由專利請求範圍來定義。只要可能,在所有附圖中都將使用相同的附圖標記來表示相同或相似的部件。在附圖中,爲了描述的清楚,各個層和各個區域的尺寸以及相對尺寸關係可以被誇示性地呈現。The advantages and features of the present invention, as well as the method of the present invention, can be more readily understood by referring to the detailed description of the embodiments below and the accompanying drawings. However, the invention may be embodied in different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. The invention should be defined by the scope of the patent claims. Wherever possible, the same reference numerals,,,, In the drawings, the size and relative size of the various layers and the various regions may be exaggerated for clarity of the description.

應理解的是,當元件或層被稱作“在”另一元件或層“上”時,該元件或層可以直接在所述另一元件或層上,或者也可以存在一個或多個中間元件或中間層。相反地,當元件被稱作是“直接”在另一元件“上”時,則不會有中間元件的存在。It will be understood that when an element or layer is referred to as "on" another element or layer, the element or layer may be directly on the other element or layer, or one or more Component or intermediate layer. In contrast, when an element is referred to as being "directly on" another element, the <RTIgt;

空間相關性術語,例如“在…之下”、“下方”、“下部”、“上方”、“上部”等等可被用來表示如圖所示的在一個組件和/或特徵與另一或其它組件和或特徵之間的關係。應當理解的是,空間相關性術語除了意圖涵蓋圖中所繪示的方位以外,也涵蓋了裝置在使用過程中所呈現之不同方位。例如,圖中的元件被反轉時,被稱作被設置在另一元件“下面”或“下方”的元件可能會變成被設置在此另一器件的“上方”。因此,示例性術語“下方”可能同時包括向上和向下的方向。Spatially relative terms such as "under", "lower", "lower", "above", "upper" and the like may be used to mean one component and/or feature as shown in the figure. Or the relationship between other components and or features. It will be understood that spatially relative terms are intended to encompass different orientations of the device as it is employed, in addition to the orientation depicted in the drawings. For example, when the elements in the figures are reversed, the elements referred to as "below" or "below" the other element may become "above" the other device. Thus, the exemplary term "lower" may encompass both an upward and a downward direction.

本文所用的術語僅爲了描述特定實施例的目的,非意圖限制示例實施例。如本文中所採用的單數形式意旨在同樣包括複數形式,除非上下文另有明確說明。還應理解的是,當說明書中使用術語“包含”和/或“包括”時,乃是要指明所述要素、步驟、操作和/或部件的存在,但不排除一種或多種其他要素、步驟、操作和/或部件的存在或添加。The terminology used herein is for the purpose of describing particular embodiments, and is not intended to The singular forms as used herein are intended to include the plural, unless the context clearly dictates otherwise. It is also to be understood that the terms "comprising" and """ The presence or addition of operations, operations, and/or components.

圖2為本發明之有機發光顯示裝置的示意圖,圖3為圖2中所述的每一子畫素的電路示意圖,以及圖4為圖2的每一子畫素的平面示意圖。2 is a schematic diagram of an organic light emitting display device of the present invention, FIG. 3 is a circuit diagram of each subpixel illustrated in FIG. 2, and FIG. 4 is a schematic plan view of each subpixel of FIG.

首先,為了了解將於以下說明的剖面圖的結構配置,關於本發明有機發光顯示裝置的空間分割與區域定義將參照圖2至圖4來說明。First, in order to understand the structural configuration of a cross-sectional view to be described below, the spatial division and region definition of the organic light-emitting display device of the present invention will be described with reference to FIGS. 2 to 4.

如圖2至圖4所示,本發明標示為參考數字10的有機發光顯示裝置包含一基板100。基板100為多邊形,較佳為矩形。基板100具有位於基板100上的構成元件。As shown in FIGS. 2 to 4, the organic light-emitting display device of the present invention, which is designated by reference numeral 10, includes a substrate 100. The substrate 100 is polygonal, preferably rectangular. The substrate 100 has constituent elements on the substrate 100.

基板100大致地區分成一中央顯示區域AA與位於中央顯示區域AA周圍的一邊緣區域。在顯示區域AA中,有多個子畫素SP被排列成一矩陣。在顯示區域AA中,每一個子畫素包含一發光區域EA和一非發光區域NEA。The substrate 100 is roughly divided into a central display area AA and an edge area located around the central display area AA. In the display area AA, a plurality of sub-pixels SP are arranged in a matrix. In the display area AA, each sub-pixel includes a light-emitting area EA and a non-light-emitting area NEA.

所述的子畫素SP是藉由交錯的閘極線GL和資料線DL所定義。此外,在顯示區域AA中在與資料線DL相同的方向上進一步提供用以接收一驅動電壓的一驅動電壓線VDDL,藉此驅動每一個子畫素SP內提供的一畫素電路PC。驅動電壓線VDDL連接至一驅動薄膜電晶體D-Tr,藉以構成所述的畫素電路PC。The sub-pixel SP is defined by the interleaved gate line GL and the data line DL. Further, a driving voltage line VDDL for receiving a driving voltage is further provided in the display area AA in the same direction as the data line DL, thereby driving a pixel circuit PC provided in each sub-pixel SP. The driving voltage line VDDL is connected to a driving thin film transistor D-Tr to constitute the pixel circuit PC.

現在將參考圖3來說明連接至前述的連接線的畫素電路PC。畫素電路PC包含設置在閘極線GL與資料線DL的相交點上的一開關薄膜電晶體S-Tr、上述設置在開關薄膜電晶體S-Tr與驅動電壓線VDDL之間的驅動薄膜電晶體D-Tr、連接至驅動薄膜電晶體D-Tr的一發光二極體OLED以及設置在驅動薄膜電晶體D-Tr的閘極與汲極(或源極)之間的一儲存電容Cst。A pixel circuit PC connected to the aforementioned connection line will now be described with reference to FIG. The pixel circuit PC includes a switching thin film transistor S-Tr disposed at an intersection of the gate line GL and the data line DL, and the driving thin film electrically disposed between the switching thin film transistor S-Tr and the driving voltage line VDDL. The crystal D-Tr, a light-emitting diode OLED connected to the driving thin film transistor D-Tr, and a storage capacitor Cst disposed between the gate and the drain (or source) of the driving thin film transistor D-Tr.

這裡的開關薄膜電晶體S-Tr是設置在閘極線GL與資料線DL相交所在的區域內,並且用以選擇一對應的子畫素。此外,驅動薄膜電晶體D-Tr則用以驅動此子畫素的有機發光二極體,也就是說,被開關薄膜電晶體S-Tr選擇的有機發光二極體。Here, the switching thin film transistor S-Tr is disposed in an area where the gate line GL and the data line DL intersect, and is used to select a corresponding sub-pixel. In addition, the driving thin film transistor D-Tr is used to drive the organic light emitting diode of the subpixel, that is, the organic light emitting diode selected by the switching thin film transistor S-Tr.

此外,邊緣區域包含用以供應一掃描訊號至閘極線GL的一閘極驅動器GD,以及用以供應一資料訊號至資料線DL的一資料驅動器DD。此外,驅動電壓線VDDL可接收位於邊緣區域內一第一電源供應單元VDD提供的一驅動電壓,或者也可透過資料驅動器DD接收一驅動電壓。In addition, the edge region includes a gate driver GD for supplying a scan signal to the gate line GL, and a data driver DD for supplying a data signal to the data line DL. In addition, the driving voltage line VDDL can receive a driving voltage provided by a first power supply unit VDD in the edge region, or can also receive a driving voltage through the data driver DD.

當薄膜電晶體是設置在顯示區域AA內,或者當薄膜電晶體是藉由將一薄膜或任何具有一印刷電路板的構件貼附至基板100的邊緣區域而形成時,這裡所述的閘極驅動器GD和資料驅動器DD或第一電源供應單元VDD可直接埋入基板100的邊緣區域中。於任一實施態樣中,將這些電路驅動器設置在顯示區域周圍的邊緣區域內;為此,顯示區域AA可被定義為位於基板100的邊緣內側。When the thin film transistor is disposed in the display area AA, or when the thin film transistor is formed by attaching a film or any member having a printed circuit board to an edge region of the substrate 100, the gate described herein The driver GD and the data driver DD or the first power supply unit VDD may be buried directly in the edge region of the substrate 100. In either embodiment, the circuit drivers are disposed within an edge region around the display area; for this purpose, the display area AA can be defined to be located inside the edge of the substrate 100.

閘極驅動器GD依序提供一掃描訊號至多個閘極線GL。舉例來說,閘極驅動器GD為用以因應一控制訊號(亦即例如接收自一計時控制器(未繪示)的訊號)而供應一掃描訊號至所述多個閘極線GL的一控制電路。The gate driver GD sequentially supplies a scan signal to the plurality of gate lines GL. For example, the gate driver GD is a control for supplying a scan signal to the plurality of gate lines GL in response to a control signal (that is, for example, a signal received from a timing controller (not shown)). Circuit.

此外,資料驅動器DD因應一控制訊號(亦即接收自例如為一計時控制器(未繪示)的一外部裝置的訊號)而供應一資料訊號至從多個資料線DL中選擇的資料線DL1~DLm。每當一掃描訊號供應至閘極線GL1~GLn時,供應至資料線DL1~DLm的資料訊號會因應此掃描訊號而被供應至選擇的多個子畫素SP。藉此,對應於此資料訊號的電壓會對所述多個子畫素SP進行充電,使得所述多個子畫素SP可以發出對應此電壓的亮度的光線。In addition, the data driver DD supplies a data signal to the data line DL1 selected from the plurality of data lines DL in response to a control signal (that is, a signal received from an external device such as a timing controller (not shown)). ~DLm. Whenever a scan signal is supplied to the gate lines GL1 GL GLn, the data signals supplied to the data lines DL1 DL DLm are supplied to the selected plurality of sub-pixels SP in response to the scan signals. Thereby, the voltage corresponding to the data signal charges the plurality of sub-pixels SP, so that the plurality of sub-pixels SP can emit light corresponding to the brightness of the voltage.

同時,基板100可為一絕緣基板,其材料可例如為塑膠、玻璃或陶瓷。當基板100的材料為塑膠時,基板100的厚度可薄並且基板100具有可撓性,以便於彎折,然而基板100的材料並不限於此。基板100可由金屬製成,基板100可在金屬線和一陣列所在的一側具有一絕緣緩衝層。Meanwhile, the substrate 100 may be an insulating substrate, and the material thereof may be, for example, plastic, glass or ceramic. When the material of the substrate 100 is plastic, the thickness of the substrate 100 may be thin and the substrate 100 has flexibility to facilitate bending, but the material of the substrate 100 is not limited thereto. The substrate 100 can be made of metal, and the substrate 100 can have an insulating buffer layer on the side where the metal lines and an array are located.

此外,一組三個或四個例如分別發出不同顏色光線的子畫素SP可定義為一畫素。In addition, a set of three or four sub-pixels SP, for example, respectively emitting light of different colors, may be defined as one pixel.

子畫素SP是指有一特定種類的彩色濾光片形成於內部的一單元,或者子畫素SP是指有一發光二極體可發出一特定顏色光線的一單元。雖然關於子畫素SP所定義的顏色可包含紅色(R)、綠色(G)和藍色(B),但在一些實施態樣中,可選擇性地增加白色W,而本發明並不限於此。The sub-pixel SP is a unit in which a specific type of color filter is formed, or the sub-pixel SP is a unit in which a light-emitting diode emits a specific color of light. Although the color defined by the sub-pixel SP may include red (R), green (G), and blue (B), in some embodiments, the white W may be selectively added, and the present invention is not limited thereto. this.

有機發光二極體OLED在一第一節點A連接至驅動薄膜電晶體D-Tr,且有機發光二極體包含在每一個子畫素內形成的一陽極、位於陽極對面的一陰極以及位於陽極與陰極之間的一有機發光層。The organic light emitting diode OLED is connected to the driving thin film transistor D-Tr at a first node A, and the organic light emitting diode comprises an anode formed in each subpixel, a cathode opposite the anode, and an anode. An organic light-emitting layer between the cathode and the cathode.

同時,有機發光顯示裝置10可例如為上發射型、下發射型或雙發射型顯示裝置。此時,對於大尺寸顯示面板來說,在一顯示區域內鋪設陰極的過程中未考量顯示面板的發光型態的情況下,可能會發生有機發光二極體的陰極的電壓下降的問題。因此,本發明在非發光區域內提供一輔助電極130,以直接接觸陰極,進而防止如圖4所述電壓下降的問題。Meanwhile, the organic light-emitting display device 10 may be, for example, an up-emission type, a down-emission type, or a dual-emission type display device. At this time, in the case where the large-size display panel does not consider the light-emitting type of the display panel in the process of laying the cathode in one display region, the voltage drop of the cathode of the organic light-emitting diode may occur. Therefore, the present invention provides an auxiliary electrode 130 in the non-light-emitting region to directly contact the cathode, thereby preventing the voltage drop as described in FIG.

這裡輔助電極130的材料為金屬,與資料線DL設置在同一層,以及包含陰極的一接觸點(參見參考標號1800b:在圖4的一節點B上的第一開孔)。確切地說,導電率良好的輔助電極130連接至個別子畫素或畫素內的陰極,可在輔助電極130的進行方向上減少陰極的電阻值,藉此防止陰極的電壓下降情形從邊緣到中央處逐漸惡化。Here, the material of the auxiliary electrode 130 is metal, disposed in the same layer as the data line DL, and a contact point including the cathode (see reference numeral 1800b: the first opening on a node B of FIG. 4). Specifically, the auxiliary electrode 130 having good conductivity is connected to the individual sub-pixel or the cathode in the pixel, and the resistance value of the cathode can be reduced in the proceeding direction of the auxiliary electrode 130, thereby preventing the voltage drop of the cathode from the edge to The central part gradually deteriorated.

在上述的示例中,雖然輔助電極130包含沿著閘極線GL的第一方向的一第一金屬線131以及沿著資料線DL的第二方向的一第二金屬線132,但本發明並不限於此,輔助電極130可只在其中一個方向上排列。In the above example, although the auxiliary electrode 130 includes a first metal line 131 along the first direction of the gate line GL and a second metal line 132 along the second direction of the data line DL, the present invention Without being limited thereto, the auxiliary electrodes 130 may be arranged in only one of the directions.

同時,上述的輔助電極130可與資料線DL在同一層形成,例如與構成薄膜電晶體的一電極位於同一層。輔助電極130與資料線DL或此電極一起被圖案化。輔助電極130可由材料為銅、錳、鋁、銀或鈦的單層結構所形成,或者也可由材料為前述材料的任意組合而成的多層結構所形成。輔助電極130在第二節點B連接陰極,藉此可用於減少陰極的電阻值。Meanwhile, the auxiliary electrode 130 described above may be formed in the same layer as the data line DL, for example, in the same layer as an electrode constituting the thin film transistor. The auxiliary electrode 130 is patterned together with the data line DL or this electrode. The auxiliary electrode 130 may be formed of a single layer structure of copper, manganese, aluminum, silver or titanium, or may be formed of a multilayer structure in which the material is any combination of the foregoing materials. The auxiliary electrode 130 is connected to the cathode at the second node B, whereby it can be used to reduce the resistance value of the cathode.

雖然以下實施例將以上發光型有機發光顯示裝置作為示範說明,然而本發明實施例並不限於上發光型有機發光顯示裝置,而是可被應用於顯示裝置的所有結構,以防止陰極的電壓下降。Although the following embodiments exemplify the above-described light-emitting type organic light-emitting display device, the embodiment of the present invention is not limited to the upper light-emitting type organic light-emitting display device, but can be applied to all structures of the display device to prevent voltage drop of the cathode. .

在以下要說明的實施例中,有機發光顯示裝置可包含至少一些以下元件:基板100,基板100包含顯示區域AA和圍繞顯示區域AA的邊緣區域,顯示區域AA內有多個子畫素SP排列成一矩陣,每一個子畫素都包含發光區域EA和在發光區域EA周圍的非發光區域NEA;位於基板100上的每一個子畫素SP中所提供的驅動薄膜電晶體D-Tr;包含在第一節點A連接驅動薄膜電晶體D-Tr進而覆蓋發光區域EA的一陽極120的有機發光二極體OLED;遍及顯示區域AA的一陰極122;位於陽極120與陰極122之間的一有機發光層121;連接在非發光區域NEA內第二節點B的陰極122的部分底部的輔助電極130;以及設置在驅動薄膜電晶體D-Tr與陽極120之間的一絕緣單位1800,絕緣單位1800具有分別對應於第一節點A和第二節點B的一第一接觸孔1800a和一第一開孔1800b,第一接觸孔1800a和第一開孔1800b用以分別暴露部分的驅動薄膜電晶體D-Tr和部分的輔助電極130。此外,關於絕緣單位1800內的第一開孔1800b,第一開孔1800b內部有一凸出圖案,因此具有一底切形狀。輔助電極130與陰極122之間的選擇性連接可在所產生的底切結構下方被實現。In an embodiment to be described below, the organic light emitting display device may include at least some of the following components: a substrate 100 including a display area AA and an edge area surrounding the display area AA, and a plurality of sub-pixels SP in the display area AA are arranged in one a matrix, each sub-pixel comprising a light-emitting area EA and a non-light-emitting area NEA around the light-emitting area EA; a driving film transistor D-Tr provided in each of the sub-pixels SP on the substrate 100; A node A is connected to drive the thin film transistor D-Tr to cover the organic light emitting diode OLED of an anode 120 of the light emitting region EA; a cathode 122 extending through the display area AA; and an organic light emitting layer between the anode 120 and the cathode 122. 121; an auxiliary electrode 130 connected to a bottom portion of the cathode 122 of the second node B in the non-light emitting region NEA; and an insulating unit 1800 disposed between the driving film transistor D-Tr and the anode 120, the insulating unit 1800 has a difference Corresponding to a first contact hole 1800a and a first opening 1800b of the first node A and the second node B, the first contact hole 1800a and the first opening 1800b are respectively used to expose a part of the driving D-Tr film transistor 130 and the auxiliary electrode portion. Further, with respect to the first opening 1800b in the insulating unit 1800, the first opening 1800b has a convex pattern inside and thus has an undercut shape. The selective connection between the auxiliary electrode 130 and the cathode 122 can be achieved under the undercut structure produced.

以下,將參照附上的剖面圖詳細說明本發明不同實施例的有機發光顯示裝置及其製造方法。Hereinafter, an organic light-emitting display device and a method of manufacturing the same according to various embodiments of the present invention will be described in detail with reference to the accompanying sectional drawings.

(第一實施例)(First Embodiment)

圖5為根據本發明第一實施例所繪示的有機發光顯示裝置的剖面示意圖。FIG. 5 is a cross-sectional view of an organic light emitting display device according to a first embodiment of the present invention.

如圖5所示,本發明有機發光顯示裝置包含:基板100,包含有多個子畫素SP排列成一矩陣且每一個子畫素SP包含發光區域EA和在發光區域EA周圍的非發光區域NEA的顯示區域AA以及圍繞顯示區域AA的邊緣區域;基板100的非發光區域NEA內所提供的輔助電極130、131與132(如圖4所示);以及絕緣單位1800,內有可暴露輔助電極130的第一開孔1800b。第一開孔1800b可完全暴露輔助電極130的上表面或只暴露輔助電極130的部分上表面。As shown in FIG. 5, the organic light-emitting display device of the present invention comprises: a substrate 100 comprising a plurality of sub-pixels SP arranged in a matrix and each sub-pixel SP comprising a light-emitting area EA and a non-light-emitting area NEA around the light-emitting area EA The display area AA and the edge area surrounding the display area AA; the auxiliary electrodes 130, 131 and 132 (shown in FIG. 4) provided in the non-light-emitting area NEA of the substrate 100; and the insulating unit 1800 having the auxiliary electrode 130 exposed therein The first opening 1800b. The first opening 1800b may completely expose the upper surface of the auxiliary electrode 130 or only a portion of the upper surface of the auxiliary electrode 130.

此外,在絕緣單位1800的表面上設置有一隔堤150。隔堤150呈某種形狀,使得隔堤150的至少一部份的表面橫向地深入第一開孔1800b,進而在被第一開孔1800b顯露的區域內重疊於部分的輔助電極130。可在第一開孔1800b內的絕緣單元1800的側表面上提供隔堤150。這裡的隔堤150可只設置在絕緣單位1800的上方,或者可如上所述地設置在絕緣單位1800的上方和部分側壁上,藉以達到使隔堤150與輔助電極130之間重疊面積大於絕緣單位1800與輔助電極130之間的重疊面積。隔堤150可垂直地與第一開孔1800b的下方隔開。也就是說,隔堤150與輔助電極130之間有一垂直間隙。Further, a bank 150 is provided on the surface of the insulating unit 1800. The bank 150 is shaped such that at least a portion of the surface of the bank 150 extends laterally deep into the first opening 1800b, thereby overlapping a portion of the auxiliary electrode 130 in the region exposed by the first opening 1800b. A bank 150 may be provided on a side surface of the insulating unit 1800 in the first opening 1800b. The bank 150 here may be disposed only above the insulation unit 1800, or may be disposed above the insulation unit 1800 and a portion of the side wall as described above, so that the overlapping area between the bank 150 and the auxiliary electrode 130 is greater than the insulation unit. The area of overlap between 1800 and auxiliary electrode 130. The bank 150 may be vertically spaced from below the first opening 1800b. That is, there is a vertical gap between the bank 150 and the auxiliary electrode 130.

在第一開孔1800b中未與隔堤150重疊的敞開區域內,有機發光層121可設置在輔助電極130的上表面上,接著設置陰極122,使陰極122覆蓋有機發光層121。In the open region of the first opening 1800b that is not overlapped with the bank 150, the organic light-emitting layer 121 may be disposed on the upper surface of the auxiliary electrode 130, and then the cathode 122 is disposed such that the cathode 122 covers the organic light-emitting layer 121.

由於有機發光材料易於直接沉澱,只有有機發光層121中很少數的材料會進入與隔堤150重疊的第一開孔1800b的敞開區域內,因此有機發光層121中幾乎沒有材料會設置在與隔堤150重疊的部分輔助電極130上。因此,陰極122可進入於輔助電極130上隔堤150重疊輔助電極130並且沒有設置有機發光層121的一區域中,藉此陰極122可進而與輔助電極130有聯繫,並且陰極122可直接接觸輔助電極130。Since the organic light-emitting material is easily precipitated directly, only a small amount of the material in the organic light-emitting layer 121 enters the open region of the first opening 1800b overlapping the bank 150, so that almost no material is disposed in the organic light-emitting layer 121. Part of the auxiliary electrode 130 overlaps the bank 150. Therefore, the cathode 122 can enter a region on the auxiliary electrode 130 where the bank 150 overlaps the auxiliary electrode 130 and is not provided with the organic light-emitting layer 121, whereby the cathode 122 can be further associated with the auxiliary electrode 130, and the cathode 122 can be directly contacted with the auxiliary Electrode 130.

本發明的有機發光顯示裝置中設置在輔助電極130上方而形成一底切結構的一凸出圖案可為一外塗層108或一陽極材料層,除了上述的隔堤150以外,以下將說明其他具體的示例。同時,本發明中所述的“底切”一詞是指被移除的下圖案比被移除的上圖案多。因此,在底切結構中,在上圖案與下圖案間的界面上,下圖案被去除的面積會較大。In the organic light-emitting display device of the present invention, a convex pattern formed on the auxiliary electrode 130 to form an undercut structure may be an outer coating layer 108 or an anode material layer. In addition to the above-described bank 150, other descriptions will be described below. Specific example. Meanwhile, the term "undercut" as used in the present invention means that the lower pattern to be removed is more than the upper pattern to be removed. Therefore, in the undercut structure, the area where the lower pattern is removed is large at the interface between the upper pattern and the lower pattern.

明確地說,就在一保護膜107上設置隔堤150以便在輔助電極130上方形成一凸出圖案的例子來說,無需任何光罩即可沉積形成的有機發光層121不會在突出的隔堤150所在的區域下方充分地積聚,並且由於有機發光層121非常易於直向沉積,使得有機發光層121的厚度可能會不均勻。因此,雖然在部分輔助電極130的上表面以及未重疊於隔堤150的發光區域EA內的絕緣單位1800上可均勻形成有機發光層121,然而有機發光層121實質上可能不會設置在隔堤150與輔助電極130重疊的區域內。相比之下,藉由濺鍍的方式形成的陰極122可沉積在輔助電極130上,甚至是突出的隔堤150下方,其原因在於透過漫反射沉積的金屬粒子可藉由漫反射而沿著底切區域移動。也就是說,陰極122是設置在重疊於深入第一開孔1800b的隔堤150的部分輔助電極130的上表面上,以及設置在發光區域EA內絕緣單位1800上的有機發光層121上。因此,作為有機發光二極體的上電極的陰極122會進而接觸凸出的隔堤150下方的部分輔助電極130。藉由此接觸部,可減少陰極122的電阻值,並且也可防止陰極122的電壓下降。Specifically, in the case where the bank 150 is provided on a protective film 107 to form a convex pattern over the auxiliary electrode 130, the organic light-emitting layer 121 which is deposited without any mask can be formed without protruding. The area under which the bank 150 is located is sufficiently accumulated, and since the organic light-emitting layer 121 is very easily deposited straight, the thickness of the organic light-emitting layer 121 may be uneven. Therefore, although the organic light-emitting layer 121 may be uniformly formed on the upper surface of the partial auxiliary electrode 130 and the insulating unit 1800 not overlapping the light-emitting area EA of the bank 150, the organic light-emitting layer 121 may not be substantially disposed in the bank 150 is in a region overlapping the auxiliary electrode 130. In contrast, the cathode 122 formed by sputtering can be deposited on the auxiliary electrode 130, even under the protruding bank 150, because the metal particles deposited by diffuse reflection can be diffused along the The undercut area moves. That is, the cathode 122 is disposed on the upper surface of the portion of the auxiliary electrode 130 that overlaps the bank 150 deep in the first opening 1800b, and is disposed on the organic light-emitting layer 121 on the insulating unit 1800 in the light-emitting region EA. Therefore, the cathode 122, which is the upper electrode of the organic light-emitting diode, further contacts a portion of the auxiliary electrode 130 below the convex bank 150. By this contact portion, the resistance value of the cathode 122 can be reduced, and the voltage drop of the cathode 122 can also be prevented.

同時,絕緣單位1800可利用作為保護膜107的一非有機絕緣層以及作為外塗層108的一有機絕緣層由靠近基板100的一側開始依序相疊而成。例如,保護膜107可為氧化物層、氮化物層或氮氧化物層,並且可沉積為這些薄膜的單層或多層結構。外塗層108可藉由一有機材料來製作而成,且厚度足以使其表面上的凸出部或凹陷部平坦化;外塗層108也可藉由例如一光壓克力膜(photo acryl film)的有機薄膜來製作。Meanwhile, the insulating unit 1800 can be formed by sequentially stacking a non-organic insulating layer as the protective film 107 and an organic insulating layer as the overcoat layer 108 from the side close to the substrate 100. For example, the protective film 107 may be an oxide layer, a nitride layer, or an oxynitride layer, and may be deposited as a single layer or a multilayer structure of these films. The outer coating layer 108 can be made of an organic material and has a thickness sufficient to planarize the protrusions or depressions on the surface; the outer coating layer 108 can also be formed by, for example, a photo acryl film (photo acryl) Film) made of organic film.

本發明第一實施例的有機發光顯示裝置中,每一個子畫素的輔助電極130上方保護膜107與外塗層108的交界處有多個可具有相同直徑的開孔,這些開孔可用以定義第一開孔1800b。在上述的第一實施例中,由於絕緣單位1800的配置使得保護膜107及其外塗層108沒有凸出圖案,而設置在外塗層108上的隔堤150則可作為一凸出圖案。In the organic light-emitting display device of the first embodiment of the present invention, at the boundary between the protective film 107 and the overcoat layer 108 on the auxiliary electrode 130 of each sub-pixel, there are a plurality of openings having the same diameter, and the openings can be used. A first opening 1800b is defined. In the first embodiment described above, the protective film 107 and its overcoat layer 108 have no convex pattern due to the arrangement of the insulating unit 1800, and the bank 150 disposed on the overcoat layer 108 can serve as a convex pattern.

此外,絕緣單位1800具有一開口區域,此開口區域用以暴露一片狀電極230的部分上表面。此開口區域可透過由一非有機絕緣層形成的保護膜107的一開孔來定義。Further, the insulating unit 1800 has an opening area for exposing a portion of the upper surface of the one-piece electrode 230. This open area can be defined by an opening of the protective film 107 formed of a non-organic insulating layer.

這裡的隔堤150在發光區域EA內具有一開口。在發光區域EA內,有機發光二極體包含陽極120、有機發光層121和陰極122,而陽極120、有機發光層121和陰極122可由接近基板100的一側開始依序設置。The bank 150 here has an opening in the light-emitting area EA. In the light-emitting region EA, the organic light-emitting diode includes an anode 120, an organic light-emitting layer 121, and a cathode 122, and the anode 120, the organic light-emitting layer 121, and the cathode 122 may be sequentially disposed from a side close to the substrate 100.

雖然圖5的架構中隔堤150從其一側凸出並深入至絕緣單位1800中的第一開孔1800b內(在圖面上從其右側深入至第一開孔1800b內),但本發明並不限於此。隔堤150的多個部分可對稱地或不對稱地深入至第一開孔1800b中。在此情況下,所有的凸出部可防止有機發光層121的沉積但可允許沉積陰極122。Although the bank 150 of the structure of FIG. 5 protrudes from one side thereof and penetrates into the first opening 1800b of the insulating unit 1800 (during the right side of the drawing from the right side thereof into the first opening 1800b), the present invention Not limited to this. Portions of the bank 150 may penetrate into the first opening 1800b symmetrically or asymmetrically. In this case, all of the protrusions can prevent deposition of the organic light-emitting layer 121 but can allow deposition of the cathode 122.

此外,由於陽極120是在製作絕緣單位1800(亦即保護膜107和外塗層108)之後才製作的,因此不會在製作絕緣單位1800之後,就立即形成隔堤150。在完成外塗層108的製作後,可在發光區域EA內製作陽極120;接著,在不包含發光區域EA的部分非發光區域NEA內設置隔堤150。不同於現有技術中沒有設置輔助電極並且整個非發光區域被隔堤覆蓋的結構,在本發明有機發光顯示裝置中,隔堤150是在非發光區域內部分的輔助電極130上方被圖案化,使得隔堤150會比絕緣單位1800更深入至第一開孔1800b中,藉此絕緣單位1800中的第一開孔1800b和隔堤150皆會在輔助電極130上方形成一底切結構。在此情況下,由於隔堤150是在形成外塗層108之後才形成,因此隔堤150不只可以覆蓋外塗層108的頂部,也可以覆蓋外塗層108的側壁。Further, since the anode 120 is fabricated after the insulating unit 1800 (i.e., the protective film 107 and the overcoat layer 108) is formed, the bank 150 is not formed immediately after the insulating unit 1800 is fabricated. After the fabrication of the overcoat layer 108 is completed, the anode 120 can be fabricated in the light-emitting region EA; then, the bank 150 is disposed in a portion of the non-light-emitting region NEA that does not include the light-emitting region EA. Unlike the structure in which the auxiliary electrode is not provided in the prior art and the entire non-light-emitting region is covered by the bank, in the organic light-emitting display device of the present invention, the bank 150 is patterned over the auxiliary electrode 130 in the non-light-emitting region portion, so that The bank 150 will penetrate deeper into the first opening 1800b than the insulating unit 1800, whereby the first opening 1800b and the bank 150 in the insulating unit 1800 will form an undercut structure above the auxiliary electrode 130. In this case, since the bank 150 is formed after the overcoat layer 108 is formed, the bank 150 can cover not only the top of the overcoat layer 108 but also the side wall of the overcoat layer 108.

同時,除了形成有第一開孔1800b以外,絕緣單位1800內也形成有第一接觸孔1800a。第一接觸孔1800a是藉由選擇性地移除外塗層108和保護膜107來定義,以將有機發光二極體的陽極120連接至其下方的一薄膜電晶體TFT。在此示例中,薄膜電晶體TFT對應於圖3的驅動薄膜電晶體D-Tr,薄膜電晶體中暴露於第一接觸孔1800a的電極為源極106b的一部分。At the same time, in addition to the first opening 1800b, a first contact hole 1800a is formed in the insulating unit 1800. The first contact hole 1800a is defined by selectively removing the overcoat layer 108 and the protective film 107 to connect the anode 120 of the organic light emitting diode to a thin film transistor TFT therebelow. In this example, the thin film transistor TFT corresponds to the driving thin film transistor D-Tr of FIG. 3, and the electrode exposed to the first contact hole 1800a in the thin film transistor is a part of the source 106b.

此外,在發光區域EA內,陽極120、有機發光層121與陰極122是依序設置在絕緣單位1800上,以形成有機發光二極體。第一接觸孔1800a內側的陽極120可連接至其下方的薄膜電晶體TFT的源極106b,第一接觸孔1800a則可位於部分的非發光區域NEA內,隔堤150可位於第一接觸孔1800a內的陽極120上。Further, in the light-emitting region EA, the anode 120, the organic light-emitting layer 121, and the cathode 122 are sequentially disposed on the insulating unit 1800 to form an organic light-emitting diode. The anode 120 inside the first contact hole 1800a may be connected to the source 106b of the thin film transistor TFT under the first contact hole 1800a, the first contact hole 1800a may be located in a part of the non-light emitting area NEA, and the bank 150 may be located in the first contact hole 1800a. Inside the anode 120.

現在來說明圖5中絕緣單位1800下方的結構。The structure below the insulation unit 1800 in Fig. 5 will now be explained.

本發明有機發光顯示裝置包含薄膜電晶體TFT,薄膜電晶體TFT是在基板100上的一特定區域形成,且包含一主動層102、一閘極103和源極106b。以上發光型來說,由於光是從陽極120的上端發射,使得薄膜電晶體TFT可位於發光區域或非發光區域內。以下發光型來說,由於光發射可能受限於薄膜電晶體TFT的電極,使得薄膜電晶體可能不會位於發光區域內。The organic light emitting display device of the present invention comprises a thin film transistor TFT formed on a specific region on the substrate 100 and including an active layer 102, a gate 103 and a source 106b. In the above illuminating type, since light is emitted from the upper end of the anode 120, the thin film transistor TFT can be located in the light emitting region or the non-light emitting region. In the case of the following illuminating type, since the light emission may be limited to the electrode of the thin film transistor TFT, the thin film transistor may not be located in the light emitting region.

主動層102可為一非結晶矽層、多晶矽層或氧化物半導體層,並且在基板100與主動層102之間可提供一緩衝層101,以防止外界物質由基板100傳入主動層102。The active layer 102 can be an amorphous germanium layer, a poly germanium layer or an oxide semiconductor layer, and a buffer layer 101 can be provided between the substrate 100 and the active layer 102 to prevent foreign matter from being introduced into the active layer 102 from the substrate 100.

同時,在閘極103與主動層102之間可提供一閘極絕緣層105,以維持電性絕緣。At the same time, a gate insulating layer 105 may be provided between the gate 103 and the active layer 102 to maintain electrical insulation.

此外,在緩衝層101上可進一步提供一層間絕緣層104,以覆蓋堆疊在主動層102上的閘極絕緣層105和閘極103。Further, an interlayer insulating layer 104 may be further provided on the buffer layer 101 to cover the gate insulating layer 105 and the gate 103 stacked on the active layer 102.

主動層102在其部分的相對兩側暴露於製作在層間絕緣層104中的一接觸孔,使得源極106b和汲極106a可連接主動層102的部分的相對兩側。The active layer 102 is exposed on a relatively opposite side of its portion to a contact hole made in the interlayer insulating layer 104 such that the source 106b and the drain 106a can be connected to opposite sides of the portion of the active layer 102.

此時,輔助電極130與源極106b和汲極106a一起設置在同一層,並且片狀電極230則與基板100的邊緣區域內的輔助電極130一起設置在同一層。At this time, the auxiliary electrode 130 is disposed in the same layer as the source 106b and the drain 106a, and the sheet electrode 230 is disposed in the same layer together with the auxiliary electrode 130 in the edge region of the substrate 100.

為了接收電訊號,可以將邊緣區域內的片狀電極230接合至例如一FPC層;並且為了這個目的,片狀電極230也可以包含一顯露部。如上所述,為了暴露片狀電極230的部分上表面,可由片狀電極230的上表面移除外塗層108和隔堤150,但不包括由非有機絕緣層所形成的保護膜107。In order to receive the electrical signal, the sheet electrode 230 in the edge region may be bonded to, for example, an FPC layer; and for this purpose, the sheet electrode 230 may also include a revealing portion. As described above, in order to expose a part of the upper surface of the sheet electrode 230, the overcoat layer 108 and the bank 150 may be removed from the upper surface of the sheet electrode 230, but the protective film 107 formed of the non-organic insulating layer is not included.

以下,將參照製程剖面圖來說明本發明第一實施例的有機發光顯示裝置的製造方法。Hereinafter, a method of manufacturing the organic light-emitting display device according to the first embodiment of the present invention will be described with reference to a process sectional view.

圖6A至圖6E可為圖5中有機發光顯示裝置的製程剖面圖,圖7為本發明的有機發光顯示裝置的製程流程圖。6A to 6E are process cross-sectional views of the organic light-emitting display device of FIG. 5, and FIG. 7 is a process flow diagram of the organic light-emitting display device of the present invention.

在本發明有機發光顯示裝置的製造程序中,重要的是從製作絕緣單位開始的製程步驟,因此以下將省略在製作絕緣單位之前的薄膜電晶體的相關製程細節。In the manufacturing procedure of the organic light-emitting display device of the present invention, it is important to carry out the process steps from the fabrication of the insulating unit, so that the relevant process details of the thin film transistor before the insulating unit is fabricated will be omitted below.

如圖6A所示,在基板100上形成緩衝層101,在子畫素的一特定區域內形成主動層102。然後,在主動層102上方的特定部分上依序形成閘極絕緣層105和閘極103;形成具有用以暴露主動層102的部分的相對兩側的一接觸孔並且可覆蓋主動層102的剩餘部分的層間絕緣層104。As shown in FIG. 6A, a buffer layer 101 is formed on the substrate 100, and an active layer 102 is formed in a specific region of the sub-pixel. Then, a gate insulating layer 105 and a gate 103 are sequentially formed on a specific portion above the active layer 102; a contact hole having opposite sides of a portion for exposing the active layer 102 is formed and the remaining of the active layer 102 may be covered Part of the interlayer insulating layer 104.

接著,沉積一金屬,並選擇性地將沉積的金屬圖案化,以形成源極106b、汲極106a、輔助電極130和片狀電極230。源極106b與汲極106a分別連接至主動層102中暴露於接觸孔的部分相對兩側。輔助電極130形成於部分非發光區域NEA內,並且有圖4所示的形狀。片狀電極230則位於邊緣區域內。透過這個流程,可製作包含主動層102、閘極103、源極106b和汲極106a的薄膜電晶體TFT。Next, a metal is deposited, and the deposited metal is selectively patterned to form a source 106b, a drain 106a, an auxiliary electrode 130, and a sheet electrode 230. The source 106b and the drain 106a are respectively connected to opposite sides of the active layer 102 exposed to the contact holes. The auxiliary electrode 130 is formed in the partial non-light-emitting area NEA and has the shape shown in FIG. The sheet electrode 230 is located in the edge region. Through this flow, a thin film transistor TFT including the active layer 102, the gate 103, the source 106b, and the drain 106a can be fabricated.

此時,薄膜電晶體TFT的源極106b與汲極106a的平坦部、輔助電極130及片狀電極230會設置在層間絕緣層104上的同一層。At this time, the source 106b of the thin film transistor TFT and the flat portion of the drain 106a, the auxiliary electrode 130, and the sheet electrode 230 are provided on the same layer on the interlayer insulating layer 104.

接著,在包含薄膜電晶體TFT、輔助電極130和片狀電極230的層間絕緣層104上形成保護膜107。保護膜107可由非有機絕緣材料製作。Next, a protective film 107 is formed on the interlayer insulating layer 104 including the thin film transistor TFT, the auxiliary electrode 130, and the sheet electrode 230. The protective film 107 may be made of a non-organic insulating material.

隨後,在保護膜107上形成外塗層108。外塗層108可由有機絕緣材料製作。Subsequently, an overcoat layer 108 is formed on the protective film 107. The overcoat layer 108 can be made of an organic insulating material.

外塗層108和保護膜107是由一光阻圖案所定義,此光阻圖案是藉由在光阻圖案上鋪設一光阻劑(未繪示),接著利用曝光技術以及使用單一光罩的顯影流程,將光阻劑圖案化後所形成。此時,當使用的光阻劑為正光阻劑,光罩中用以遺留所有外塗層108和保護膜107的部分定義為一屏蔽部,光罩中用以只移除外塗層108的部分則定義為一半穿透部,光罩中用以移除全部的外塗層108和保護膜107的部分定義為一穿透部。此外,當使用的光阻劑屬於負光阻劑時,其屏蔽部和穿透部則相反於正光阻劑的屏蔽部和穿透部。The overcoat layer 108 and the protective film 107 are defined by a photoresist pattern by using a photoresist (not shown) on the photoresist pattern, followed by exposure techniques and using a single mask. The development process is formed by patterning a photoresist. At this time, when the photoresist used is a positive photoresist, a portion of the mask for leaving all of the overcoat layer 108 and the protective film 107 is defined as a shield portion for removing only the overcoat layer 108 in the mask. The portion is defined as a half penetration portion, and a portion of the reticle for removing all of the overcoat layer 108 and the protective film 107 is defined as a penetration portion. Further, when the photoresist used is a negative photoresist, the shield portion and the penetrating portion are opposite to the shield portion and the penetrating portion of the positive photoresist.

因此,外塗層108上的光阻圖案會完全暴露源極106b的部分上表面,並些微地存留在源極106b上被完全暴露的部分的周圍以及在對應於片狀電極230和輔助電極130的區域上。Therefore, the photoresist pattern on the overcoat layer 108 completely exposes a portion of the upper surface of the source 106b and remains slightly around the fully exposed portion of the source 106b and corresponds to the sheet electrode 230 and the auxiliary electrode 130. On the area.

藉由使用光阻圖案,外塗層108上被暴露的部分以及保護膜107會首先被移除,如圖6B所示。藉此,被光阻圖案完全暴露的區域內會形成第一接觸孔1800a。By using the photoresist pattern, the exposed portion of the overcoat layer 108 and the protective film 107 are first removed, as shown in Fig. 6B. Thereby, the first contact hole 1800a is formed in a region where the photoresist pattern is completely exposed.

接著,在去除稀疏存留的光阻圖案後,去除外塗層108中位於輔助電極130和片狀電極230上方且位於第一接觸孔1800a周圍的被暴露部分。藉此,即可形成包含外塗層108和保護膜107的絕緣單位1800。此時,在輔助電極130上方會形成直徑h1近似於或小於輔助電極130的寬度的一外塗層開孔108b,而在片狀電極230上方的部分外塗層108會被去除。此時,輔助電極130的上方和片狀電極230的上方會被保護膜107覆蓋。Next, after removing the sparsely remaining photoresist pattern, the exposed portion of the overcoat layer 108 above the auxiliary electrode 130 and the tab electrode 230 and located around the first contact hole 1800a is removed. Thereby, the insulating unit 1800 including the overcoat layer 108 and the protective film 107 can be formed. At this time, an overcoat opening 108b having a diameter h1 which is approximately equal to or smaller than the width of the auxiliary electrode 130 is formed over the auxiliary electrode 130, and a portion of the overcoat layer 108 above the sheet electrode 230 is removed. At this time, the upper side of the auxiliary electrode 130 and the upper side of the sheet electrode 230 are covered by the protective film 107.

然後,在包含第一接觸孔1800a的整個表面上鋪設一陽極材料,並且透過一第一光阻圖案211,使陽極120保留在發光區域EA中包含第一接觸孔1800a的一特定部分上(101S)。陽極120繼續留在外塗層108上以及第一接觸孔1800a內側。Then, an anode material is laid on the entire surface including the first contact hole 1800a, and the anode 120 is left in a specific portion of the light-emitting area EA including the first contact hole 1800a through the first photoresist pattern 211 (101S) ). The anode 120 continues to remain on the outer coating 108 and inside the first contact hole 1800a.

隨後,去除第一光阻圖案211。Subsequently, the first photoresist pattern 211 is removed.

接著,如圖6C所示,在鋪設一隔堤材料之後,會留下隔堤150,使隔堤150位於非發光區域NEA內部分外塗層開孔108b中(102S)。於此,會在外塗層開孔108b內側形成一隔堤開孔150c,而隔堤開孔150c的直徑h2小於外塗層開孔108b的直徑h1。在此情況下,隔堤150被塑造成在外塗層開孔108b的一側(例如圖示的右側)圍繞外塗層108。Next, as shown in FIG. 6C, after laying a bank material, the bank 150 is left, so that the bank 150 is located in a portion of the overcoat opening 108b (102S) in the non-light emitting region NEA. Here, a bank opening 150c is formed inside the outer coating opening 108b, and the diameter h2 of the bank opening 150c is smaller than the diameter h1 of the outer coating opening 108b. In this case, the bank 150 is shaped to surround the outer coating 108 on one side (e.g., the right side of the illustration) of the outer coating opening 108b.

隨後,如圖6D所示,利用一第二光阻圖案212去除保護膜107,以暴露出片狀電極230和輔助電極130。第二光阻圖案212具有一第一光阻圖案開孔212a和一第二光阻圖案開孔212b。第一光阻圖案開孔212a會暴露出片狀電極230的部分上表面,而已被暴露出的部分的寬度小於待暴露的片狀電極230的寬度。第二光阻圖案開孔212b暴露出側壁和暴露出圍繞外塗層108且深入至第二光阻圖案開孔212b內進而覆蓋部分輔助電極130的隔堤150的部分上表面。這裡由於利用第二光阻圖案212對保護膜107進行蝕刻的方法是採用可選擇性地只蝕刻保護膜107的同向性濕式蝕刻,使得這樣的蝕刻可在一寬度上執行,此寬度大於設置在輔助電極130上方的保護膜107的上表面的隔堤150與第二光阻圖案212之間的間距,藉此在絕緣單位1800內定義第一開孔1800b(103S)。在這過程中,蝕刻標的是保護膜107,隔堤150不受針對保護膜107的蝕刻程序影響。也就是說,輔助電極130上的保護膜107會被蝕刻而形成一開孔,此開孔在保護膜107上表面的直徑大致為圖6B中所定義的h1,並且向下逐漸減少。已完成蝕刻的保護膜107的上表面中有直徑h1的開孔,而隔堤150的表面位於此開孔內。此外,藉由在移除保護膜107後所遺留的空間,隔堤150可垂直地與輔助電極130相隔開,並且從平面來看,隔堤150重疊部分的輔助電極130。Subsequently, as shown in FIG. 6D, the protective film 107 is removed by a second photoresist pattern 212 to expose the sheet electrode 230 and the auxiliary electrode 130. The second photoresist pattern 212 has a first photoresist pattern opening 212a and a second photoresist pattern opening 212b. The first photoresist pattern opening 212a exposes a portion of the upper surface of the sheet electrode 230, and the width of the exposed portion is smaller than the width of the sheet electrode 230 to be exposed. The second photoresist pattern opening 212b exposes the sidewall and a portion of the upper surface of the bank 150 that exposes the overcoat layer 108 and penetrates into the second photoresist pattern opening 212b to cover a portion of the auxiliary electrode 130. Here, the method of etching the protective film 107 by the second photoresist pattern 212 is to employ a isotropic wet etching which selectively etches only the protective film 107, so that such etching can be performed over a width which is larger than The spacing between the bank 150 and the second photoresist pattern 212 on the upper surface of the protective film 107 disposed above the auxiliary electrode 130, thereby defining the first opening 1800b (103S) in the insulating unit 1800. In this process, the etching target is the protective film 107, and the bank 150 is not affected by the etching process for the protective film 107. That is, the protective film 107 on the auxiliary electrode 130 is etched to form an opening whose diameter on the upper surface of the protective film 107 is substantially h1 as defined in Fig. 6B, and gradually decreases downward. The upper surface of the protective film 107 which has been etched has an opening of diameter h1, and the surface of the bank 150 is located in this opening. Further, the bank 150 can be vertically separated from the auxiliary electrode 130 by the space left after the protective film 107 is removed, and the bank 150 overlaps the auxiliary electrode 130 in a plan view.

然後,移除第二光阻圖案212。Then, the second photoresist pattern 212 is removed.

接著,如圖6E所示,在發光區域EA和非發光區域NEA內形成有機發光層121(104S)。在這過程中,由於有機發光材料傾向直線沉積並且隔堤150凸出於輔助電極130上方的絕緣單位1800,因此有機發光材料實質上不會沉積在隔堤150重疊於輔助電極130的重疊區域上。同時,有機發光層121可沉積在未重疊於隔堤150的部分輔助電極130的上表面。Next, as shown in FIG. 6E, an organic light-emitting layer 121 (104S) is formed in the light-emitting area EA and the non-light-emitting area NEA. In this process, since the organic light-emitting material tends to be linearly deposited and the bank 150 protrudes from the insulating unit 1800 above the auxiliary electrode 130, the organic light-emitting material is not substantially deposited on the overlapping region where the bank 150 overlaps the auxiliary electrode 130. . Meanwhile, the organic light emitting layer 121 may be deposited on the upper surface of the portion of the auxiliary electrode 130 that is not overlapped with the bank 150.

隨後,形成陰極122,以覆蓋有機發光層122(105S)。在發光區域EA內,陰極122設置在有機發光層121上,並與其下方的有機發光層121和陽極120一起構成有機發光二極體。此外,在非發光區域NEA內,陰極122設置在隔堤150與輔助電極130未重疊的區域內的有機發光層121上。然而,在隔堤150與輔助電極130重疊的區域內,因為沒有有機發光層121在其中,使得陰極122可直接接觸輔助電極130。Subsequently, a cathode 122 is formed to cover the organic light-emitting layer 122 (105S). In the light-emitting region EA, the cathode 122 is disposed on the organic light-emitting layer 121, and together with the organic light-emitting layer 121 and the anode 120 below it constitutes an organic light-emitting diode. Further, in the non-light-emitting region NEA, the cathode 122 is disposed on the organic light-emitting layer 121 in a region where the bank 150 and the auxiliary electrode 130 do not overlap. However, in the region where the bank 150 overlaps the auxiliary electrode 130, since the organic light-emitting layer 121 is not present therein, the cathode 122 can directly contact the auxiliary electrode 130.

在上述本發明有機發光顯示裝置的製造方法中,由於在輔助電極130上沒有設立隔牆,因此由圖7可知,形成一發光二極體陣列只需要數量較少的光罩,具體來說是3個光罩分別用以形成陽極、隔堤的開口和片狀電極。In the above manufacturing method of the organic light-emitting display device of the present invention, since no partition wall is provided on the auxiliary electrode 130, it can be seen from FIG. 7 that only a small number of photomasks are required to form a light-emitting diode array, specifically Three masks are used to form the anode, the opening of the bank, and the sheet electrode, respectively.

(第二實施例)(Second embodiment)

圖8為根據本發明第二實施例所繪示的有機發光顯示裝置的剖面示意圖。FIG. 8 is a cross-sectional view of an organic light emitting display device according to a second embodiment of the present invention.

請參考圖8,在本發明第二實施例的有機發光顯示裝置中,藉由一外塗層208,製作深入至位於輔助電極130上方的第一開孔1800b內的一凸出圖案。並且,在此實施例中,當要製作有機發光層121和陰極122時,因垂直沉積和漫散反射沉積的緣故,使得陰極122是直接沉積在一底切結構下方的輔助電極130上,藉此可減少大面積的陰極122的電阻值。Referring to FIG. 8, in the organic light emitting display device of the second embodiment of the present invention, a protruding pattern deep into the first opening 1800b above the auxiliary electrode 130 is formed by an overcoat layer 208. Moreover, in this embodiment, when the organic light-emitting layer 121 and the cathode 122 are to be formed, the cathode 122 is directly deposited on the auxiliary electrode 130 under the undercut structure due to the vertical deposition and the diffuse reflection deposition. This can reduce the resistance value of the cathode 122 of a large area.

這裡的保護膜107為一非有機絕緣層,而外塗層208為一有機絕緣層。Here, the protective film 107 is a non-organic insulating layer, and the overcoat layer 208 is an organic insulating layer.

此外,根據本發明第二實施例的有機發光顯示裝置中,保護膜107具有第一開孔1800b,有機絕緣層208具有小於第一開孔1800b的一第一子開孔。因此,可藉由深入至第一開孔1800b內的有機絕緣層208來定義一凸出圖案。在此過程中所形成的開孔的形狀將參考圖9C詳細說明如下。Further, in the organic light-emitting display device according to the second embodiment of the present invention, the protective film 107 has a first opening 1800b, and the organic insulating layer 208 has a first sub-opening smaller than the first opening 1800b. Therefore, a convex pattern can be defined by deepening into the organic insulating layer 208 in the first opening 1800b. The shape of the opening formed in this process will be described in detail below with reference to Fig. 9C.

在此情況下,絕緣單位可視為被製作成內部具有第一開孔1800b和第一接觸孔1800a的一單層結構的非有機絕緣層107;位於非有機絕緣層107上方且作為一有機絕緣層的外塗層208可視為絕緣單位上提供的一凸出圖案。In this case, the insulating unit can be regarded as a non-organic insulating layer 107 which is formed into a single-layer structure having the first opening 1800b and the first contact hole 1800a therein; is located above the non-organic insulating layer 107 and serves as an organic insulating layer The outer coating 208 can be viewed as a raised pattern provided on the insulating unit.

圖9A至圖9D為圖8中所述之有機發光顯示裝置的製程剖面示意圖。9A to 9D are schematic cross-sectional views showing a process of the organic light emitting display device illustrated in Fig. 8.

同樣地,在本發明第二實施例的有機發光顯示裝置中,由於薄膜電晶體的製作方式為已知,因此其相關說明即不再贅述。Similarly, in the organic light-emitting display device of the second embodiment of the present invention, since the manufacturing method of the thin film transistor is known, the related description will not be repeated.

如圖9A所示,預備基板100。基板100包含薄膜電晶體TFT、輔助電極130和片狀電極230,如圖6A所示。As shown in FIG. 9A, the substrate 100 is prepared. The substrate 100 includes a thin film transistor TFT, an auxiliary electrode 130, and a sheet electrode 230 as shown in FIG. 6A.

輔助電極130、片狀電極230以及薄膜電晶體TFT中源極106b和汲極106a的平坦化部分設置在層間絕緣層104上的同一層內。The auxiliary electrode 130, the sheet electrode 230, and the planarization portion of the source 106b and the drain 106a in the thin film transistor TFT are disposed in the same layer on the interlayer insulating layer 104.

接著,在包含薄膜電晶體TFT、輔助電極130和片狀電極230的層間絕緣層上,設置以一非有機絕緣材料製作而成的保護膜107。Next, on the interlayer insulating layer including the thin film transistor TFT, the auxiliary electrode 130, and the sheet electrode 230, a protective film 107 made of a non-organic insulating material is provided.

然後,在保護膜107上製作外塗層208。Then, an overcoat layer 208 is formed on the protective film 107.

外塗層208和保護膜107是藉由一光阻圖案來定義。此光阻圖案是藉由在光阻圖案上鋪設一光阻劑(未繪示),然後透過曝光與顯影程序並搭配單一光罩將光阻劑圖案化所形成。此時,當採用的光阻劑是一正光阻劑時,在所採用的光罩中,用以留下全部的外塗層208和保護膜107的部分定義為一屏蔽部,用以只移除外塗層208的部分定義為一半穿透部,以及用以移除全部的外塗層208和保護膜107的部分定義為一穿透部。此外,當採用的光阻劑為一負光阻劑時,屏蔽部和穿透部則相反。The overcoat layer 208 and the protective film 107 are defined by a photoresist pattern. The photoresist pattern is formed by laying a photoresist (not shown) on the photoresist pattern and then patterning the photoresist through an exposure and development process with a single mask. At this time, when the photoresist used is a positive photoresist, in the reticle used, a portion for leaving all of the overcoat layer 208 and the protective film 107 is defined as a shield for shifting only A portion of the exclusion coating 208 is defined as a half penetration, and a portion for removing all of the outer coating 208 and the protective film 107 is defined as a penetration. In addition, when the photoresist is a negative photoresist, the shield and the penetration are reversed.

因此,外塗層208中的光阻圖案可使源極106b的部分上表面完全曝光,但些微地餘留在源極106b中被完全曝光的部分的周圍以及在對應於片狀電極230和輔助電極130的區域上。Therefore, the photoresist pattern in the overcoat layer 208 can completely expose a portion of the upper surface of the source 106b, but remains slightly around the portion of the source 106b that is completely exposed and corresponds to the sheet electrode 230 and the auxiliary. On the area of the electrode 130.

藉由光阻圖案,外塗層208和保護膜107中被曝光的部分會先被移除,如圖9A所示。藉此,在藉由光阻圖案完全暴露的區域內,即可形成第一接觸孔1800a。With the photoresist pattern, the exposed portions of the overcoat layer 208 and the protective film 107 are removed first, as shown in Fig. 9A. Thereby, the first contact hole 1800a can be formed in a region completely exposed by the photoresist pattern.

之後,先去除些微地餘留的光阻圖案,再去除設置在輔助電極130和片狀電極230上方以及第一接觸孔1800a周圍的外塗層208中被曝光的部分。於此,藉由移除輔助電極130上方的外塗層208,便可定義出一外塗層開孔208b。Thereafter, some of the remaining photoresist pattern is removed, and the exposed portion of the overcoat layer 208 disposed over the auxiliary electrode 130 and the tab electrode 230 and around the first contact hole 1800a is removed. Here, an outer coating opening 208b can be defined by removing the outer coating 208 above the auxiliary electrode 130.

將保護膜107覆蓋輔助電極130和片狀電極230。The protective film 107 covers the auxiliary electrode 130 and the sheet electrode 230.

然後,在包含第一接觸孔1800a的整個表面上沉積一陽極材料,並透過一第一光阻圖案261,使陽極120留在發光區域EA中包含第一接觸孔1800a的一特定部分內。陽極120會留在第一接觸孔1800a內側以及外塗層208的上面,並且會連接至薄膜電晶體TFT的源極106b。Then, an anode material is deposited on the entire surface including the first contact hole 1800a, and is passed through a first photoresist pattern 261 to leave the anode 120 in a specific portion of the light-emitting region EA including the first contact hole 1800a. The anode 120 will remain inside the first contact hole 1800a and above the overcoat layer 208 and will be connected to the source 106b of the thin film transistor TFT.

接著,去除第一光阻圖案261。Next, the first photoresist pattern 261 is removed.

隨後,在鋪設一隔堤材料之後,如圖9B所示,在非發光區域NEA內會留下一隔堤250。在此過程中,在輔助電極130上方部分的隔堤材料會由非發光區域NEA內外塗層開孔208b所在的區域中的一隔堤開孔208c移除。在此情況下,部分的隔堤250會位於外塗層開孔208b內側,如圖9A所示,因此隔堤開孔208c會小於外塗層開孔208b。也就是說,外塗開孔層208b的一側可被隔堤250覆蓋,外塗開孔層208b的另一側則可不被隔堤250覆蓋。在此之後,如圖9C所示,去除保護膜107,以透過一第二光阻圖案262,使片狀電極230和輔助電極130曝光。塑造第二光阻圖案262,使其覆蓋外塗層208上的隔堤250,以及暴露出外塗層208上未設置隔堤250的部分。也就是說,由輔助電極130上方的第二光阻圖案262和外塗層208所定義的一第二光阻圖案開孔262b具有一第五直徑h5,第五直徑h5小於圖9B中定義的隔堤開孔208c的第四直徑h4。此外,在片狀電極230上方,形成一第一光阻圖案開孔262a,使片狀電極230的曝光寬度小於待曝光的片狀電極230的寬度。Subsequently, after laying a bank material, as shown in Fig. 9B, a bank 250 is left in the non-light-emitting area NEA. During this process, the bank material in the upper portion of the auxiliary electrode 130 is removed by a bank opening 208c in the region where the overcoat opening 208b is located in the non-light emitting region NEA. In this case, a portion of the bank 250 will be located inside the outer coating opening 208b, as shown in Figure 9A, so the bank opening 208c will be smaller than the outer coating opening 208b. That is, one side of the outer coated aperture layer 208b may be covered by the bank 250, and the other side of the outer coated aperture layer 208b may not be covered by the bank 250. After that, as shown in FIG. 9C, the protective film 107 is removed to pass through the second photoresist pattern 262 to expose the sheet electrode 230 and the auxiliary electrode 130. The second photoresist pattern 262 is shaped to cover the bank 250 on the outer coating 208 and expose portions of the outer coating 208 where the bank 250 is not disposed. That is, a second photoresist pattern opening 262b defined by the second photoresist pattern 262 and the overcoat layer 208 above the auxiliary electrode 130 has a fifth diameter h5 which is smaller than that defined in FIG. 9B. The fourth diameter h4 of the bank opening 208c. Further, above the sheet electrode 230, a first photoresist pattern opening 262a is formed such that the exposure width of the sheet electrode 230 is smaller than the width of the sheet electrode 230 to be exposed.

此時,由於利用第二光阻圖案262對保護膜107進行蝕刻的方法是同向性濕式蝕刻,在此蝕刻方式下所形成的開孔會大於利用第二光阻圖案262在保護膜107的上表面所形成的開孔262a和262b。因此,在輔助電極130上已蝕刻的保護膜107中的第一開孔1800b具有一第三直徑h3,第三直徑h3大於第二光阻圖案262中的第二光阻圖案開孔262b的第五直徑h5;以及保護膜107上的外塗層208會有直徑小於保護膜107中第一開孔1800b的第三直徑h3的一界面開孔(第一子開孔)。在此情況下,從右側觀看,蝕刻完保護膜107後,外塗層208會從保護膜107向內凸出。因此,可定義出一底切結構,並且在此底切結構中,會有一上圖案凸出於一下圖案。At this time, since the method of etching the protective film 107 by the second photoresist pattern 262 is isotropic wet etching, the opening formed in the etching mode may be larger than the protective film 107 using the second photoresist pattern 262. Openings 262a and 262b formed by the upper surface. Therefore, the first opening 1800b of the protective film 107 etched on the auxiliary electrode 130 has a third diameter h3, and the third diameter h3 is larger than the second photoresist pattern opening 262b of the second photoresist pattern 262. The five diameters h5; and the outer coating 208 on the protective film 107 have an interface opening (first sub-opening) having a diameter smaller than the third diameter h3 of the first opening 1800b in the protective film 107. In this case, when viewed from the right side, after the protective film 107 is etched, the overcoat layer 208 protrudes inward from the protective film 107. Therefore, an undercut structure can be defined, and in this undercut structure, an upper pattern is projected out of the pattern.

這裡,在以一單層結構製作而成的保護膜107中定義第一開孔1800b,以及根據外塗層208與保護膜107之間的關係定義底切結構,其中保護膜107被蝕刻掉的程度大於外塗層208被蝕刻掉的程度。Here, the first opening 1800b is defined in the protective film 107 fabricated in a single layer structure, and the undercut structure is defined according to the relationship between the overcoat layer 208 and the protective film 107, wherein the protective film 107 is etched away. To a greater extent than the outer coating 208 is etched away.

接著,去除第二光阻圖案262。Next, the second photoresist pattern 262 is removed.

然後,如圖9D所示,在發光區域EA和非發光區域NEA內形成有機發光層121。關於非發光區域NEA,由於有機發光層傾向於直線沉積,因此實質上不會有有機發光層121在深入至輔助電極130上方的第一開孔1800b內的外塗層208重疊於輔助電極130的區域內形成。已完全沉積的有機發光材料121是設置在發光區域EA內的陽極120上以及on非發光區域NEA內的隔堤250上。Then, as shown in FIG. 9D, the organic light-emitting layer 121 is formed in the light-emitting area EA and the non-light-emitting area NEA. Regarding the non-light-emitting region NEA, since the organic light-emitting layer tends to be linearly deposited, substantially no organic light-emitting layer 121 overlaps the auxiliary electrode 130 in the first opening 1800b deep in the upper opening 1800b above the auxiliary electrode 130. Formed within the area. The fully deposited organic light-emitting material 121 is disposed on the anode 120 in the light-emitting area EA and on the bank 250 in the non-light-emitting area NEA.

隨後,在發光區域EA和非發光區域NEA內的有機發光層121上形成陰極122。此時,因漫射反射和用以構成陰極122的金屬粒子的隨機表面沉積的緣故,使得陰極122可沉積在非發光區域NEA中外塗層208與輔助電極130彼此重疊並且內無設置有機發光層121的區域內。因此,輔助電極130與陰極122之間可直接接觸。Subsequently, a cathode 122 is formed on the organic light-emitting layer 121 in the light-emitting area EA and the non-light-emitting area NEA. At this time, due to the diffuse reflection and the random surface deposition of the metal particles constituting the cathode 122, the cathode 122 can be deposited in the non-light-emitting region NEA, and the overcoat layer 208 and the auxiliary electrode 130 overlap each other and no organic light-emitting layer is disposed therein. Within the area of 121. Therefore, the auxiliary electrode 130 and the cathode 122 can be in direct contact.

上述的第二實施例中,由於片狀電極230是在製作在保護膜107的隔堤250被第二光阻圖案262覆蓋的情形下被曝光,因而可防止在加熱過程(例如將隔堤250固化)中外塗層208回焊的情形發生。也就是說,由於絕緣單位1800內的一底切結構是在一熱製程中製作隔堤250後,藉由將外塗層208下方的非有機保護膜107圖形化所形成,因此可防止外塗層208崩塌或可防止部分的隔堤250殘留在底切區域上。在此情況下,在製作隔堤250的步驟過程中,非有機保護膜107會保護片狀電極230和輔助電極130。In the second embodiment described above, since the sheet electrode 230 is exposed in the case where the bank 250 formed on the protective film 107 is covered by the second photoresist pattern 262, it is possible to prevent the heating process (for example, the bank 250) Curing) The intermediate coating 208 is reflowed. That is, since an undercut structure in the insulating unit 1800 is formed by forming the bank 250 in a thermal process, by patterning the non-organic protective film 107 under the overcoat layer 208, it is possible to prevent overcoating. The layer 208 collapses or prevents a portion of the bank 250 from remaining on the undercut region. In this case, the non-organic protective film 107 protects the sheet electrode 230 and the auxiliary electrode 130 during the step of fabricating the bank 250.

(第三實施例)(Third embodiment)

圖10為本發明第三實施例所繪示的有機發光顯示裝置的剖面示意圖。FIG. 10 is a cross-sectional view of an organic light emitting display device according to a third embodiment of the present invention.

如圖10所述,在第三實施例的有機發光顯示裝置中,利用一陽極傀儡圖案220,製作可深入至輔助電極130上方的第一開孔1800b內的一凸出圖案。即使在此情況下,在製作有機發光層121和陰極122時,因垂直沉積和漫散反射沉積的緣故,陰極122可被直接沉積在輔助電極130與陽極傀儡圖案220彼此重疊的區域內的一底切結構下方的輔助電極130上,藉以降低大面積的陰極122的電阻值。As shown in FIG. 10, in the organic light-emitting display device of the third embodiment, a embossed pattern which can penetrate into the first opening 1800b above the auxiliary electrode 130 is formed by using an anode ruthenium pattern 220. Even in this case, at the time of fabricating the organic light-emitting layer 121 and the cathode 122, the cathode 122 can be directly deposited in a region in which the auxiliary electrode 130 and the anode-turn pattern 220 overlap each other due to the vertical deposition and the diffuse reflection deposition. The auxiliary electrode 130 under the undercut structure is used to reduce the resistance value of the cathode 122 of a large area.

圖11A至圖11D為圖10中所述的有機發光顯示裝置的製程剖面示意圖。11A to 11D are schematic cross-sectional views showing a process of the organic light emitting display device illustrated in FIG. 10.

同樣地,在本發明第三實施例的有機發光顯示裝置中,由於薄膜電晶體的製作方法為已知,因此其相關敘述將不再贅述。Similarly, in the organic light-emitting display device of the third embodiment of the present invention, since the fabrication method of the thin film transistor is known, the related description will not be repeated.

如圖11A所示,預備如圖6A中的基板100,基板100包含薄膜電晶體TFT、輔助電極130和片狀電極230。As shown in FIG. 11A, a substrate 100 as shown in FIG. 6A is prepared. The substrate 100 includes a thin film transistor TFT, an auxiliary electrode 130, and a sheet electrode 230.

在層間絕緣層104上的同一層中,設置輔助電極130、片狀電極230以及薄膜電晶體TFT的源極106b與汲極106a的平坦化的部分。In the same layer on the interlayer insulating layer 104, the auxiliary electrode 130, the tab electrode 230, and the source 106b of the thin film transistor TFT and the flattened portion of the drain 106a are provided.

接著,在包含薄膜電晶體TFT、輔助電極130和片狀電極230的層間絕緣層104上設置以一非有機絕緣材料製作而成的保護膜107。Next, a protective film 107 made of a non-organic insulating material is provided on the interlayer insulating layer 104 including the thin film transistor TFT, the auxiliary electrode 130, and the sheet electrode 230.

然後,在保護膜107上形成外塗層108。Then, an overcoat layer 108 is formed on the protective film 107.

外塗層108和保護膜107是藉由一光阻圖案來定義,而此光阻圖案是以藉由鋪設一光阻劑(未繪示)在光阻圖案上,然後再透過曝光和顯影程序並搭配單一光罩將光阻劑圖形化所形成。此時,當光阻劑為正光阻劑時,光罩中將用以保留所有外塗層108和保護膜107的部分定義為一屏蔽部,將用以只移除外塗層108的部分定義為一半穿透部以及將用以移除全部的外塗層108和保護膜107的部分定義為一穿透部。此外,當光阻劑為負光阻劑時,屏蔽部和穿透部則相反。The overcoat layer 108 and the protective film 107 are defined by a photoresist pattern which is formed by laying a photoresist (not shown) on the photoresist pattern and then transmitting the exposure and development process. It is formed by patterning a photoresist with a single mask. At this time, when the photoresist is a positive photoresist, a portion of the photomask that is used to retain all of the overcoat layer 108 and the protective film 107 is defined as a shield portion, which will be used to remove only the portion of the overcoat layer 108. A portion that is a translucent portion and a portion to remove all of the overcoat layer 108 and the protective film 107 is defined as a penetrating portion. In addition, when the photoresist is a negative photoresist, the shield and the penetration are reversed.

因此,外塗層108中的光阻圖案可使源極106b的部分上表面完全曝光,而些微地餘留在已完全曝光的部分源極106b周圍以及在對應於片狀電極230和輔助電極130的區域上。透過光阻圖案,如圖11A所示,可先移除外塗層108和保護膜107中已曝光的部分,藉此在藉由光阻圖案而被完全曝光的區域內形成第一接觸孔1800a。Therefore, the photoresist pattern in the overcoat layer 108 can completely expose a portion of the upper surface of the source 106b, while remaining slightly around the partially exposed source 106b and corresponding to the tab electrode 230 and the auxiliary electrode 130. On the area. Through the photoresist pattern, as shown in FIG. 11A, the exposed portions of the overcoat layer 108 and the protective film 107 may be removed first, thereby forming the first contact hole 1800a in the region completely exposed by the photoresist pattern. .

之後,先去除些微地餘留的光阻圖案,再去除設置在輔助電極130和片狀電極230上方以及第一接觸孔1800a周圍的已曝光的部分外塗層108。Thereafter, some of the remaining photoresist pattern is removed, and the exposed partial overcoat layer 108 disposed over the auxiliary electrode 130 and the tab electrode 230 and around the first contact hole 1800a is removed.

此時,保護膜107偕同外塗層108構成絕緣單位1800。此時,可由非有機保護膜107上移除位於輔助電極130上方且比輔助電極130寬的部分外塗層108。At this time, the protective film 107 and the overcoat layer 108 constitute an insulating unit 1800. At this time, a portion of the overcoat layer 108 located above the auxiliary electrode 130 and wider than the auxiliary electrode 130 may be removed from the non-organic protective film 107.

用保護膜107覆蓋輔助電極130和片狀電極230。The auxiliary electrode 130 and the sheet electrode 230 are covered with a protective film 107.

隨後,將一陽極材料沉積在包含第一接觸孔1800a的整個表面上,以及透過具有一第一光阻圖案開孔281a的一第一光阻圖案281,使陽極120可以留在發光區域EA中包含第一接觸孔1800a的對應區域內以及在非發光區域NEA中與部分輔助電極130重疊的區域內。此外,陽極傀儡圖案220可留在非發光區域NEA內形成的第一光阻圖案281下方。陽極傀儡圖案220可留在非發光區域NEA內輔助電極130上方的保護膜107的上表面以及外塗層108的部分上表面和部分側壁。此外,陽極120可留在外塗層108的上面以及第一接觸孔1800a內。Subsequently, an anode material is deposited on the entire surface including the first contact hole 1800a, and through a first photoresist pattern 281 having a first photoresist pattern opening 281a, so that the anode 120 can remain in the light-emitting area EA. The region including the first contact hole 1800a and the portion overlapping the partial auxiliary electrode 130 in the non-light-emitting region NEA. Further, the anode meander pattern 220 may remain under the first photoresist pattern 281 formed in the non-light emitting region NEA. The anode ruthenium pattern 220 may remain on the upper surface of the protective film 107 above the auxiliary electrode 130 in the non-light-emitting region NEA and a portion of the upper surface and a portion of the sidewall of the overcoat layer 108. Additionally, the anode 120 can remain on top of the overcoat layer 108 and within the first contact hole 1800a.

接著,去除第一光阻圖案281。Next, the first photoresist pattern 281 is removed.

然後,在鋪設一隔堤材料後,如圖11B所示,使一隔堤350覆蓋住非發光區域NEA內被曝光的外塗層108,並且隔堤350在輔助電極130上方的保護膜107上有一開口區域350b。此時,藉由移除隔堤350,陽極傀儡圖案220中凸出於外塗層108的區域可被包含於開口區域350b中。此時,在輔助電極130上方的保護膜107的上表面,隔堤350與陽極傀儡圖案220之間相隔一第六直徑h6。Then, after laying a bank material, as shown in FIG. 11B, a bank 350 is covered to cover the exposed overcoat layer 108 in the non-light emitting region NEA, and the bank 350 is on the protective film 107 above the auxiliary electrode 130. There is an open area 350b. At this time, by removing the bank 350, a region of the anode ruthenium pattern 220 protruding from the overcoat layer 108 may be included in the opening region 350b. At this time, on the upper surface of the protective film 107 above the auxiliary electrode 130, the bank 350 and the anode crucible pattern 220 are separated by a sixth diameter h6.

接下來,如圖11C所示,去除保護膜107,以透過一第二光阻圖案282,使片狀電極230和輔助電極130曝光。第二光阻圖案282具有對應於片狀電極230的一第二光阻圖案開孔282a和對應於輔助電極130的一第三光阻圖案開孔282b。當移除保護膜107時,第二光阻圖案282會覆蓋位於輔助電極130尚且已被曝光的隔堤350,並且第二光阻圖案282可使輔助電極130上的陽極傀儡圖案220曝光。此外,由於第二光阻圖案282覆蓋了隔堤350的一側,因此在輔助電極130上的陽極傀儡圖案220與第二光阻圖案282之間的間隔小於圖11B中所定義的第六直徑h6。Next, as shown in FIG. 11C, the protective film 107 is removed to pass through the second photoresist pattern 282 to expose the sheet electrode 230 and the auxiliary electrode 130. The second photoresist pattern 282 has a second photoresist pattern opening 282a corresponding to the chip electrode 230 and a third photoresist pattern opening 282b corresponding to the auxiliary electrode 130. When the protective film 107 is removed, the second photoresist pattern 282 covers the bank 350 that is still exposed by the auxiliary electrode 130, and the second photoresist pattern 282 exposes the anode erb pattern 220 on the auxiliary electrode 130. In addition, since the second photoresist pattern 282 covers one side of the bank 350, the interval between the anode 傀儡 pattern 220 and the second photoresist pattern 282 on the auxiliary electrode 130 is smaller than the sixth diameter defined in FIG. 11B. H6.

然而,對輔助電極130上的非有機保護膜107進行同向性蝕刻,以形成具有一第七直徑h7的第一開孔1800b。第七直徑h7大於第二光阻圖案282與陽極傀儡圖案220之間的間隔。However, the non-organic protective film 107 on the auxiliary electrode 130 is subjected to isotropic etching to form a first opening 1800b having a seventh diameter h7. The seventh diameter h7 is larger than the interval between the second photoresist pattern 282 and the anode meander pattern 220.

也就是說,陽極傀儡圖案220會深入至第一開孔1800b,使得一底切結構可在第一開孔1800b的一側上,藉由相對於輔助電極130的陽極傀儡圖案220的凸出部以及其下方的保護膜107來形成。此外,雖然在片狀電極230上會形成寬度小於待曝光的片狀電極230的寬度的第二光阻圖案開孔282a,但透過對保護膜107進行同向性蝕刻,使得第二光阻圖案開孔282a可在一直徑下被蝕刻,此直徑大於在保護膜107的上表面的第一開孔1800b的直徑。That is, the anode crucible pattern 220 will penetrate into the first opening 1800b such that an undercut structure may be on one side of the first opening 1800b by the projection of the anode 傀儡 pattern 220 with respect to the auxiliary electrode 130. And a protective film 107 underneath it is formed. In addition, although the second photoresist pattern opening 282a having a width smaller than the width of the sheet electrode 230 to be exposed is formed on the sheet electrode 230, the second photoresist pattern is formed by isotropic etching the protective film 107. The opening 282a may be etched under a diameter which is larger than the diameter of the first opening 1800b at the upper surface of the protective film 107.

接著,去除第二光阻圖案282。Next, the second photoresist pattern 282 is removed.

隨後,如圖11D所示,在發光區域EA和非發光區域NEA內形成有機發光層121。關於非發光區域NEA,由於有機發光材料傾向直向沉積,因此在深入至輔助電極130上第一開孔1800b的陽極傀儡圖案220與輔助電極130相重疊的區域內,實質上不會形成有機發光層121。已完全沉積的有機發光層121是設置在發光區域EA內的陽極120上以及在非發光區域NEA內的隔堤350上。Subsequently, as shown in FIG. 11D, the organic light-emitting layer 121 is formed in the light-emitting area EA and the non-light-emitting area NEA. Regarding the non-light-emitting region NEA, since the organic light-emitting material tends to be deposited in a straight direction, substantially no organic light is formed in a region deep in the region where the anode-turn pattern 220 of the first opening 1800b overlaps the auxiliary electrode 130 on the auxiliary electrode 130. Layer 121. The fully deposited organic light-emitting layer 121 is disposed on the anode 120 in the light-emitting area EA and on the bank 350 in the non-light-emitting area NEA.

然後,在發光區域EA和非發光區域NEA內的有機發光層121上形成陰極122。此時,由於要構成陰極122的金屬粒子會漫射反射和隨機表面沉積,因此陰極122可沉積在非發光區域NEA中陽極傀儡圖案220與輔助電極130相重疊且未設置有機發光層121的區域內。因此,在第一開孔1800b中陽極傀儡圖案220與輔助電極130相重疊的的區域內,輔助電極130可直接連接陰極122。Then, a cathode 122 is formed on the organic light-emitting layer 121 in the light-emitting area EA and the non-light-emitting area NEA. At this time, since the metal particles constituting the cathode 122 are diffusely reflected and randomly surface-deposited, the cathode 122 may be deposited in the non-light-emitting region NEA where the anode 傀儡 pattern 220 overlaps the auxiliary electrode 130 and the organic light-emitting layer 121 is not disposed. Inside. Therefore, in the region of the first opening 1800b where the anode 傀儡 pattern 220 overlaps the auxiliary electrode 130, the auxiliary electrode 130 can be directly connected to the cathode 122.

在發光區域EA內的陽極120、有機發光層121和陰極122可作為一有機發光二極體。The anode 120, the organic light-emitting layer 121, and the cathode 122 in the light-emitting region EA can function as an organic light-emitting diode.

在上述的第三實施例中,在保護膜107上形成隔堤350後針對保護膜107進行濕式蝕刻,以暴露出片狀電極230並形成具有底切形狀的第一開孔1800b,藉此可防止在例如固化隔堤350等的加熱期間外塗層108回焊的情形發生。也就是說,在一熱製程中形成隔堤350後,會在外塗層108下面形成包含外塗層108和保護膜107的絕緣單位1800內的一底切結構,因此可防止外塗層108的崩塌。In the third embodiment described above, the protective film 107 is wet-etched after the bank 350 is formed on the protective film 107 to expose the sheet electrode 230 and form the first opening 1800b having an undercut shape. The occurrence of reflow of the overcoat layer 108 during heating such as curing of the bank 350 or the like can be prevented. That is, after the bank 350 is formed in a thermal process, an undercut structure in the insulating unit 1800 including the overcoat layer 108 and the protective film 107 is formed under the overcoat layer 108, thereby preventing the overcoat layer 108 from being formed. collapse.

圖12為輔助電極與陰極之間的連接部的喪失底切結構的SEM圖。Fig. 12 is an SEM image showing the loss of the undercut structure of the joint between the auxiliary electrode and the cathode.

圖12為一SEM圖,用以說明當輔助電極的邊緣上的外塗層中完全形成一底切結構後,一般形成隔堤的方法。如圖所示,在已完成的底切結構上形成隔堤所需的一熱製程的進行期間,外塗層不再有此底切結構。在其他例子中,當應用上述的一般方法時,除了會喪失底切結構以外,以有機材料製成的隔堤也可能會餘留在此底切結構上,或者外塗層可能因發生回焊而導致無法保留底切結構。這意思是陰極與輔助電極之間將無法正常地連接。Figure 12 is an SEM image for explaining a method of forming a bank after the undercut structure is completely formed in the overcoat layer on the edge of the auxiliary electrode. As shown, the overcoat no longer has this undercut during the thermal process required to form the bank on the completed undercut structure. In other examples, when the general method described above is applied, in addition to the loss of the undercut structure, the bank made of organic material may remain on the undercut structure, or the outer coating may be reflowed. As a result, the undercut structure cannot be retained. This means that the cathode and the auxiliary electrode will not be properly connected.

本發明可藉由改變製程的順序來避免這個問題。也就是說,在隔堤完全形成之後,可對非有機保護膜進行蝕刻,進而定義出底切結構以及暴露出片狀電極。也就是說,本發明第一實施例和第二實施例的有機發光顯示裝置的製造方法可解決圖12中在形成隔堤之後利用對非有機保護膜進行濕式蝕刻的方式來定義底切結構所造成的問題。The present invention can avoid this problem by changing the order of the processes. That is, after the bank is completely formed, the non-organic protective film can be etched to define an undercut structure and expose the sheet electrode. That is, the manufacturing method of the organic light emitting display device of the first embodiment and the second embodiment of the present invention can solve the problem of defining the undercut structure by wet etching the non-organic protective film after forming the bank in FIG. The problem caused.

此外,上述本發明的有機發光顯示裝置的製造方法中,由於無須在輔助電極130上製作任何隔間牆,因此形成一發光二極體陣列的步驟只需要較少數量的光罩即可,具體來說,是3個分別用以形成陽極、暴露隔堤和暴露片狀電極的光罩。In addition, in the above method for fabricating the organic light-emitting display device of the present invention, since it is not necessary to fabricate any spacer walls on the auxiliary electrode 130, the step of forming an array of light-emitting diodes requires only a small number of masks, specifically In other words, there are three masks for forming an anode, exposing a bank, and exposing a sheet electrode, respectively.

圖13為圖12中輔助電極和陰極之間的連接部的SEM圖。Figure 13 is an SEM image of the joint between the auxiliary electrode and the cathode of Figure 12 .

如圖13所示,在使用與第三實施例相同的方式提供凸出的陽極圖案220時,凸出的陽極圖案220可用以支撐其上方的圖案,進而防止這些圖案向下垂,藉此可防止外塗層發生回焊的情形。As shown in FIG. 13, when the convex anode pattern 220 is provided in the same manner as the third embodiment, the convex anode pattern 220 can be used to support the pattern above it, thereby preventing the patterns from hanging down, thereby preventing The case where the outer coating is reflowed.

(第四實施例)(Fourth embodiment)

圖14為本發明第四實施例的有機發光顯示裝置的剖面示意圖。Figure 14 is a cross-sectional view showing an organic light emitting display device in accordance with a fourth embodiment of the present invention.

如圖14所示,本發明第四實施例的有機發光顯示裝置中,透過陽極傀儡圖案220來形成一凸出圖案,此凸出圖案深入至輔助電極130上方的第一開孔1800b。甚至在此實施例中,在形成有機發光層121和陰極122時,垂直沉積和漫散反射沉積會使得陰極122可直接沉積在一底切結構下方的輔助電極130上,藉此可使大面積的陰極122的電阻值下降。此外,在形成用以暴露出源極106b的第一接觸孔1800a時,可移除絕緣單位1800中的外塗層108和保護膜107,以形成與第一接觸孔1800a相隔開且可暴露出部分輔助電極130的第二接觸孔220c。接著,在形成陽極120和陽極傀儡圖案220時,陽極傀儡圖案220可透過第二接觸孔220c連接至輔助電極130,藉此可增加電的穩定性。As shown in FIG. 14, in the organic light-emitting display device of the fourth embodiment of the present invention, a convex pattern is formed through the anode crucible pattern 220, and the convex pattern penetrates into the first opening 1800b above the auxiliary electrode 130. Even in this embodiment, when the organic light-emitting layer 121 and the cathode 122 are formed, the vertical deposition and the diffuse reflection deposition allow the cathode 122 to be directly deposited on the auxiliary electrode 130 under the undercut structure, thereby enabling a large area. The resistance value of the cathode 122 is lowered. Further, when the first contact hole 1800a for exposing the source 106b is formed, the overcoat layer 108 and the protective film 107 in the insulating unit 1800 may be removed to be spaced apart from the first contact hole 1800a and exposed The second contact hole 220c of the partial auxiliary electrode 130. Next, when the anode 120 and the anode ruthenium pattern 220 are formed, the anode ruthenium pattern 220 may be connected to the auxiliary electrode 130 through the second contact hole 220c, whereby electrical stability may be increased.

上述實施例中相同的構成元件的相關說明將不再贅述。The related description of the same constituent elements in the above embodiments will not be described again.

同時,上述有機發光顯示裝置內所使用的底切結構也可應用於有機發光顯示裝置的其他區域。Meanwhile, the undercut structure used in the above organic light-emitting display device can also be applied to other regions of the organic light-emitting display device.

圖15為根據一對照示例所繪示的有機發光顯示裝置的剖面示意圖。15 is a schematic cross-sectional view of an organic light emitting display device according to a comparative example.

如圖15所示,對照示例的有機發光顯示裝置中,各別的陽極11是位於基板1上的各個子畫素中,而一有機發光層13和一陰極14可共同地在多個子畫素中提供。As shown in FIG. 15, in the organic light-emitting display device of the comparative example, the respective anodes 11 are located in respective sub-pixels on the substrate 1, and an organic light-emitting layer 13 and a cathode 14 are commonly used in a plurality of sub-pixels. Provided in.

同時,在上述的實施例和對照示例中,雖然有機發光層121或13是以單層結構作為示範性說明,但在陽極120或11與有機發光層121或13之間可提供一電洞導入層和一電洞傳輸層,以及在有機發光層121或13與陰極122或14之間可提供一電子傳輸層和一電子導入層。圖15中未說明的參考標記12為一隔堤。在一些例子中,在陽極和陰極之間提供一串連式的有機發光二極體時,可提供多個堆疊,以及可在這些堆疊之間提供一電荷產生層。Meanwhile, in the above-described embodiment and the comparative example, although the organic light-emitting layer 121 or 13 is exemplified as a single-layer structure, a hole introduction may be provided between the anode 120 or 11 and the organic light-emitting layer 121 or 13. A layer and a hole transport layer, and an electron transport layer and an electron introduction layer are provided between the organic light-emitting layer 121 or 13 and the cathode 122 or 14. Reference numeral 12, which is not illustrated in Fig. 15, is a bank. In some examples, when a series of organic light emitting diodes are provided between the anode and the cathode, a plurality of stacks can be provided, and a charge generating layer can be provided between the stacks.

為了將電洞由陽極11導入有機發光層13,電洞導入層可能包含電洞遷移率相對較高的摻雜物。此外,由於多個子畫素共享其中包含電洞導入層的多個共同層,因此即使當供應一訊號至各別的陽極11以驅動特定子畫素時,電洞遷移率高的電洞導入層中的摻雜物可能會導致側漏電流的發生。此外,在此串聯式的結構中,電荷產生層也有傳導性高的摻雜物,因而造成類似的問題。In order to introduce a hole from the anode 11 into the organic light-emitting layer 13, the hole introduction layer may contain a dopant having a relatively high hole mobility. In addition, since a plurality of sub-pixels share a plurality of common layers in which the hole introduction layer is included, even when a signal is supplied to the respective anodes 11 to drive the specific sub-pixels, the hole introduction layer having a high hole mobility is provided. The dopant in the middle may cause side leakage current to occur. Further, in this tandem structure, the charge generating layer also has a highly conductive dopant, thus causing similar problems.

由於電洞導入層和電荷產生層是所有子畫素共同提供而未照發光區域和非發光區域來做區隔,因此即使在試圖驅動多個特定子畫素時,這些傳導性高的共同層會導致側漏電流的發生。因此,當試圖驅動多個特定的子畫素時,相鄰的子畫素會被導通,因而導致色純度降低。Since the hole introduction layer and the charge generation layer are provided together by all the sub-pixels and are not separated by the illuminating area and the non-light-emitting area, these highly conductive common layers are even when attempting to drive a plurality of specific sub-pixels. Will cause side leakage current to occur. Therefore, when attempting to drive a plurality of specific sub-pixels, adjacent sub-pixels are turned on, resulting in a decrease in color purity.

對照示例的有機發光顯示裝置中所發生側漏電流的問題可藉由上述的底切結構來解決。底切結構可藉由可連結上述的輔助電極130的第一開孔1800b以及絕緣單位1800內的一第二開孔1800c(如圖16所示)來定義。這將於以下的實施例來說明。The problem of side leakage current occurring in the organic light-emitting display device of the comparative example can be solved by the undercut structure described above. The undercut structure can be defined by a first opening 1800b that can be coupled to the auxiliary electrode 130 described above and a second opening 1800c (shown in FIG. 16) within the insulating unit 1800. This will be explained in the following examples.

(第五實施例)(Fifth Embodiment)

圖16為根據本發明第五實施例所繪示的有機發光顯示裝置的平面示意圖,圖17A至圖17C為圖16的有機發光顯示裝置的不同實施例的剖面示意圖。16 is a schematic plan view of an organic light emitting display device according to a fifth embodiment of the present invention, and FIGS. 17A to 17C are schematic cross-sectional views showing different embodiments of the organic light emitting display device of FIG. 16.

如圖16所示,本發明第五實施例的有機發光顯示裝置包含在非發光區域NEA未設置輔助電極的一側的絕緣單位1800內的底切結構的第二開孔1800c。在此情況下,第五實施例的第二開孔1800c沿著發光區域EA的一或多側延長,並且比發光區域EA的該側的長度長。在此結構中,第二開孔1800c在發光區域EA的水平方向上賦予包含一有機發光層的一共通層在多個子畫素之間電性絕緣。第二開孔1800c可只在其中一側包含如圖所示之形狀的一凸出圖案,或者可在其每一側分別包含凸出圖案。也就是說,一凸出圖案可從第二開孔1800c的至少一側深入至第二開孔1800c中。As shown in FIG. 16, an organic light-emitting display device according to a fifth embodiment of the present invention includes a second opening 1800c of an undercut structure in an insulating unit 1800 on a side where the auxiliary electrode is not provided with the non-light-emitting region NEA. In this case, the second opening 1800c of the fifth embodiment is elongated along one or more sides of the light emitting area EA and is longer than the length of the side of the light emitting area EA. In this configuration, the second opening 1800c imparts a common layer including an organic light-emitting layer electrically insulated between the plurality of sub-pixels in the horizontal direction of the light-emitting area EA. The second opening 1800c may include a convex pattern having a shape as shown in one side only, or may include a convex pattern on each side thereof. That is, a convex pattern may penetrate from at least one side of the second opening 1800c into the second opening 1800c.

底切結構的形狀可有不同的變化,如圖17A至圖17C所示。這些不同的實施例具有共同的特徵,亦即在底切結構的第二開孔1800c的一個或兩個表面上,包含有機發光層121的共通層會被隔開,使得在陽極120和陰極122之間包含有機發光層121的一有機層會形成多個子畫素之間的電性絕緣體。因此,可避免有機材料所引起的側漏電流,進而可實現選擇性驅動子畫素,以及防止子畫素所發出有顏色的光線之間被混光。The shape of the undercut structure can vary differently, as shown in Figures 17A-17C. These various embodiments have the common feature that the common layer comprising the organic light-emitting layer 121 is spaced apart on one or both surfaces of the second opening 1800c of the undercut structure such that at the anode 120 and the cathode 122 An organic layer including the organic light-emitting layer 121 between them forms an electrical insulator between the plurality of sub-pixels. Therefore, the side leakage current caused by the organic material can be avoided, and thus the selective driving of the sub-pixels can be realized, and the light of the colored light emitted by the sub-pixels can be prevented from being mixed.

以下將參照不同實施例的剖面示意圖,來具體說明在絕緣單位1800中底切結構的第二開孔1800c。The second opening 1800c of the undercut structure in the insulating unit 1800 will be specifically described below with reference to cross-sectional schematic views of different embodiments.

底切結構的第二開孔1800c可透過同一個製程步驟與第一開孔1800b一起形成,此製程步驟請參照圖5至圖14的說明。此外,在第一開孔1800b內的凸出圖案(例如隔堤、有機絕緣層或陽極傀儡圖案)以及在第二開孔1800c內的凸出圖案可設置在同一層,以將製程步驟減至最少。The second opening 1800c of the undercut structure can be formed together with the first opening 1800b through the same process step. For the process steps, please refer to the description of FIG. 5 to FIG. In addition, a convex pattern (for example, a bank, an organic insulating layer or an anode ruthenium pattern) in the first opening 1800b and a convex pattern in the second opening 1800c may be disposed on the same layer to reduce the process steps to least.

在圖17A的實施例中,第二開孔1800c未重疊於非發光區域內的第一接觸孔1800a或第一開孔1800b,並且第二開孔1800c與絕緣單位1800之間相隔大於發光區域EA的其中一邊的距離。In the embodiment of FIG. 17A, the second opening 1800c does not overlap the first contact hole 1800a or the first opening 1800b in the non-light emitting region, and the second opening 1800c is separated from the insulating unit 1800 by more than the light emitting area EA. The distance of one side of it.

絕緣單位1800具有第二開孔1800c,第二開孔1800c用以暴露出層間絕緣層104的部分表面。在絕緣單位1800上,有所提供的隔堤150、有機發光層121和陰極122;其中隔堤150的至少其中一個表面深入至第二開孔1800c內,以覆蓋第二開孔1800c內的部分層間絕緣層104;有機發光層121設置在第二開孔1800c內的層間絕緣層104中除了被隔堤150覆蓋的部分以外的其餘部分上;陰極122覆蓋有機發光層121並且可與層間絕緣層104上被隔堤150覆蓋的部分聯繫。The insulating unit 1800 has a second opening 1800c for exposing a portion of the surface of the interlayer insulating layer 104. On the insulating unit 1800, there are provided banks 150, an organic light-emitting layer 121 and a cathode 122; wherein at least one surface of the bank 150 penetrates into the second opening 1800c to cover a portion of the second opening 1800c An interlayer insulating layer 104; the organic light-emitting layer 121 is disposed on the remaining portion of the interlayer insulating layer 104 in the second opening 1800c except for the portion covered by the bank 150; the cathode 122 covers the organic light-emitting layer 121 and is capable of interposing with the interlayer insulating layer The portion of 104 that is covered by the bank 150 is in contact.

這裡可透過非發光區域NEA內的隔堤150,使所述的有機發光層121從第二開孔1800c的其中一個或多個側面被隔開。倘若從第二開孔1800c的四個側面將第二開孔1800c內的有機發光層121隔開,則有機發光層121可在第二開孔1800c內被隔離。由於有機發光層121不會在第二開孔1800c內的部分凸出的隔堤150下方形成,因此當有機發光層121由第二開孔1800c的其中一或多個側表面隔開時,有機發光層121會在相鄰的子畫素之間不連續地形成,以便於斷去多個子畫素與在其上方或其下方推疊的有機發光層121或任何共通層之間的共享關係,藉此可防止側漏電流。於是,當選擇性地提供電訊號至任一子畫素的陽極120時,可獨立地操控對應的子畫素,藉此可防止子畫素誤導通,進而防止混光而能有純色的表現。Here, the organic light-emitting layer 121 may be separated from one or more sides of the second opening 1800c through the banks 150 in the non-light-emitting area NEA. If the organic light-emitting layer 121 in the second opening 1800c is separated from the four sides of the second opening 1800c, the organic light-emitting layer 121 can be isolated in the second opening 1800c. Since the organic light-emitting layer 121 is not formed under the partially protruded bank 150 in the second opening 1800c, when the organic light-emitting layer 121 is separated by one or more side surfaces of the second opening 1800c, organic The light-emitting layer 121 may be discontinuously formed between adjacent sub-pixels in order to break the sharing relationship between the plurality of sub-pixels and the organic light-emitting layer 121 or any common layer pushed up above or below it. This prevents side leakage current. Therefore, when the electrical signal is selectively supplied to the anode 120 of any sub-pixel, the corresponding sub-pixel can be independently controlled, thereby preventing the sub-pixel from being mis-conducted, thereby preventing the mixed light and having a solid color expression. .

在此結構中,在層間絕緣層104上設置由隔堤150深入至第二開孔1800c中的一凸出圖案時,由於無須曝光光罩即可沉積的有機發光層121傾向直向沉積,因此有機發光層121無法穿過被隔堤150覆蓋的區域。因此,在第二開孔1800c上被隔堤150覆蓋的區域內不會設置有機材料,進而使有機發光層121分開。In this structure, when a protruding pattern extending from the bank 150 into the second opening 1800c is provided on the interlayer insulating layer 104, since the organic light-emitting layer 121 which is deposited without exposing the mask tends to be deposited straight, The organic light-emitting layer 121 cannot pass through the area covered by the bank 150. Therefore, no organic material is provided in the region covered by the bank 150 on the second opening 1800c, and the organic light-emitting layer 121 is separated.

同時,在第二開孔1800c下方可形成蝕刻速率不同於非有機保護膜107的層間絕緣層104,層間絕緣層104為一非有機絕緣層,而非有機保護膜107為形成絕緣單位1800的下層的一絕緣層。這足以在形成第二開孔1800c時,區別非有機保護膜107和層間絕緣層104,以達到對非有機保護膜107進行蝕刻,同時也保留層間絕緣層104的目的。Meanwhile, an interlayer insulating layer 104 having an etching rate different from that of the non-organic protective film 107 may be formed under the second opening 1800c, and the interlayer insulating layer 104 is a non-organic insulating layer, and the non-organic protective film 107 is a lower layer forming the insulating unit 1800. An insulating layer. This is sufficient to distinguish the non-organic protective film 107 and the interlayer insulating layer 104 when the second opening 1800c is formed to achieve the purpose of etching the non-organic protective film 107 while also retaining the interlayer insulating layer 104.

在本發明有機發光顯示裝置中,除了上述的隔堤150以外,還可藉由外塗層108或208或藉由一陽極材料層,在層間絕緣層104上方形成具有一底切結構的凸出圖案,而其他具體的示例將於後續說明。In the organic light-emitting display device of the present invention, in addition to the above-described bank 150, a protrusion having an undercut structure may be formed over the interlayer insulating layer 104 by the overcoat layer 108 or 208 or by an anode material layer. Patterns, while other specific examples will be explained later.

在圖17B的實施例中,藉由外塗層208形成一凸出圖案,此凸出圖案由絕緣單位1800深入至第二開孔1800c內。相較於保護膜107,外塗層208更深入至第二開孔1800c內。由於有機發光層121非常易於直線沉積,因此有機發光層121不一定會在凸出的外塗層208下方積聚。並且,在凸出的外塗層208和其下方的層間絕緣層104之間的垂直空間中,可直接形成陰極122。因此,甚至在此實施例中還可使有機發光層121在多個子畫素之間產生隔絕。這裡的保護膜10具有第一開孔1800b(如圖8)和第二開孔1800c(如圖17B),外塗層208具有一第一子開孔和一第二子開孔。保護膜107是由一非有機絕緣材料製成,外塗層208則是由一有機絕緣層製成。第一子開孔和第二子開孔分別小於第一開孔和第二開孔。在此情況下,可藉由上面的外塗層208和下面的保護膜107定義一底切結構。經過同向性蝕刻的保護膜107在界面處的開口區域比外塗層208的開口區域寬。In the embodiment of FIG. 17B, a raised pattern is formed by the overcoat layer 208, which protrudes from the insulating unit 1800 into the second opening 1800c. The outer coating 208 penetrates deeper into the second opening 1800c than the protective film 107. Since the organic light-emitting layer 121 is very easily deposited in a straight line, the organic light-emitting layer 121 does not necessarily accumulate under the convex overcoat layer 208. Also, in the vertical space between the convex overcoat layer 208 and the interlayer insulating layer 104 therebelow, the cathode 122 can be directly formed. Therefore, the organic light-emitting layer 121 can be made to insulate between a plurality of sub-pixels even in this embodiment. The protective film 10 herein has a first opening 1800b (as shown in FIG. 8) and a second opening 1800c (FIG. 17B). The outer coating 208 has a first sub-opening and a second sub-opening. The protective film 107 is made of a non-organic insulating material, and the outer coating 208 is made of an organic insulating layer. The first sub-opening and the second sub-opening are smaller than the first opening and the second opening, respectively. In this case, an undercut structure can be defined by the upper overcoat layer 208 and the underlying protective film 107. The isotropic etching of the protective film 107 at the interface is wider than the opening area of the overcoat layer 208.

在圖17C的實施例中,在絕緣單位1800上方,利用陽極傀儡圖案220來製作可深入至第二開孔1800c內的一凸出圖案。甚至在此情況下,陽極傀儡圖案220下方的保護膜107在絕緣單位1800內的第二開孔1800c中具有一底切結構。因此,有機發光層121不會設置在垂直相隔於陽極傀儡圖案220的部分層間絕緣層104上。藉此,在多個子畫素之間不連續地形成有機發光層121可防止側漏電流。In the embodiment of FIG. 17C, an anode pattern is formed over the insulating unit 1800 to form a raised pattern that can penetrate into the second opening 1800c. Even in this case, the protective film 107 under the anode meander pattern 220 has an undercut structure in the second opening 1800c in the insulating unit 1800. Therefore, the organic light-emitting layer 121 is not disposed on a portion of the interlayer insulating layer 104 that is vertically separated from the anode-turn pattern 220. Thereby, the discontinuous formation of the organic light-emitting layer 121 between the plurality of sub-pixels prevents side leakage current.

同時,以每一個子畫素為基礎,用來防止側漏電流的第二開孔可塑造成足以圍繞每一發光部的形狀。At the same time, based on each sub-pixel, the second opening for preventing side leakage current can be shaped into a shape sufficient to surround each of the light-emitting portions.

(第六實施例)(Sixth embodiment)

圖18為根據本發明第六實施例所繪示的有機發光顯示裝置的平面圖。FIG. 18 is a plan view of an organic light emitting display device according to a sixth embodiment of the present invention.

如圖18所示,本發明第六實施例的有機發光顯示裝置以每一個子畫素為基礎可包含圍繞發光區域EA或者圍繞發光區域EA周圍的非發光區域NEA內的一第二開孔1800d,第二開孔1800d如第五實施例和其他實施例所述。此時,第二開孔1800d可具有封閉迴路的形狀,也可位於可與上述的第一開孔1800b連通的位置。As shown in FIG. 18, the organic light-emitting display device of the sixth embodiment of the present invention may include, around each sub-pixel, a second opening 1800d surrounding the light-emitting area EA or surrounding the non-light-emitting area NEA around the light-emitting area EA. The second opening 1800d is as described in the fifth embodiment and other embodiments. At this time, the second opening 1800d may have a shape of a closed circuit or may be located at a position connectable with the first opening 1800b.

在此情況下,一有機發光層被每一個子畫素中具有封閉迴路形狀的第二開孔1800d分割,藉此可獨立驅動這些子畫素。In this case, an organic light-emitting layer is divided by the second opening 1800d having a closed loop shape in each sub-pixel, whereby these sub-pixels can be independently driven.

此外,藉由層間絕緣層104和其上方的隔堤150、外塗層208或深入至第二開孔1800d一側的陽極傀儡圖案220之間的垂直間隔,使絕緣單位1800中的第二開孔1800d內部定義有一底切結構。第二開孔1800d內側的凸出圖案可實現在多個子畫素之間分割有機發光層。In addition, the second opening in the insulating unit 1800 is caused by the vertical separation between the interlayer insulating layer 104 and the bank 150, the overcoat layer 208 or the anode ruthenium pattern 220 on the side of the second opening 1800d. An undercut structure is defined inside the hole 1800d. The convex pattern on the inner side of the second opening 1800d can realize division of the organic light-emitting layer between the plurality of sub-pixels.

同時,如上所述,本發明有機發光顯示裝置包含:用以連接陰極與輔助電極的一連接結構,以減少陰極的電阻值;以及用以隔開多個子畫素的一底切結構,以避免漏電流的一有機發光層。由於在顯示裝置中提供的一層間絕緣層、一隔堤或一陽極材料會形成底切結構而無須任何的隔間牆,可減少光罩的使用數量,也可節省為了製作隔間牆所使用的製程步驟或材料,因此可提升有機發光顯示裝置的生產良率以及可靠度。Meanwhile, as described above, the organic light-emitting display device of the present invention comprises: a connection structure for connecting the cathode and the auxiliary electrode to reduce the resistance value of the cathode; and an undercut structure for separating the plurality of sub-pixels to avoid An organic light-emitting layer that leaks current. Since the interlayer insulating layer, a bank or an anode material provided in the display device forms an undercut structure without any partition wall, the number of the reticle can be reduced, and the use of the partition wall can be saved. The process steps or materials can improve the production yield and reliability of the organic light-emitting display device.

由上述的說明可知,本發明的有機發光顯示裝置及其製造方法具有以下功效。As apparent from the above description, the organic light-emitting display device of the present invention and the method of manufacturing the same have the following effects.

在包含有一保護膜(非有機絕緣層)和一絕緣層或設置在保護膜上但性質不同於保護膜的一金屬膜的一絕緣單位中,絕緣單位的至少其中一個表面會形成一底切結構。確切而言,無須在輔助電極上方提供任何隔間牆,即可在一輔助電極上定義出未設置有機發光層的區域,並且可在所述未設置有機發光層的區域內,實現輔助電極與一陰極之間直接的電性連接。因此,可降低製作在一面板上的一單一圖案中的陰極的電阻值,進而提升整個面板的亮度均勻性以及電氣可靠度。In an insulating unit comprising a protective film (non-organic insulating layer) and an insulating layer or a metal film disposed on the protective film but having a property different from that of the protective film, at least one of the surfaces of the insulating unit forms an undercut structure . Specifically, it is not necessary to provide any partition wall above the auxiliary electrode, and an area where the organic light emitting layer is not disposed may be defined on an auxiliary electrode, and the auxiliary electrode and the auxiliary electrode may be realized in the area where the organic light emitting layer is not disposed. A direct electrical connection between the cathodes. Therefore, the resistance value of the cathode in a single pattern formed on one panel can be reduced, thereby improving the brightness uniformity and electrical reliability of the entire panel.

此外,一外塗層、一隔堤和/或一陽極材料可設置在保護膜上,並且外塗層、隔堤和陽極材料中的至少其中之一在輔助電極上方的一開孔內會形成一凸出圖案。在形成這些材料層之後,去除凸出圖案下方的保護膜,以定義出底切結構。因此,可去除底切結構中的殘餘粒子,並且防止凸出圖案回焊。Furthermore, an outer coating, a bank and/or an anode material may be disposed on the protective film, and at least one of the outer coating, the bank and the anode material may be formed in an opening above the auxiliary electrode. A protruding pattern. After forming these layers of material, the protective film under the raised pattern is removed to define an undercut structure. Therefore, residual particles in the undercut structure can be removed, and the embossed pattern can be prevented from being reflowed.

此外,由於無需使用隔間牆,因此可減少需要的光照數量,進而可減少製程所需的時間及成本。In addition, because the compartment wall is not required, the amount of light required can be reduced, which in turn reduces the time and cost required for the process.

此外,當保護膜上的外塗層或陽極材料圖案位於輔助電極上方的一接觸孔內側時,輔助電極的部分區域會被底切結構覆蓋,藉此陰極可經由此區域選擇性地沉積。Further, when the overcoat or anode material pattern on the protective film is located inside a contact hole above the auxiliary electrode, a partial region of the auxiliary electrode is covered by the undercut structure, whereby the cathode can be selectively deposited via this region.

綜上所述,藉由穩固輔助電極與陰極之間的電性連接,可減少大面積的陰極的電阻值,使整個面板的亮度均勻。In summary, by stabilizing the electrical connection between the auxiliary electrode and the cathode, the resistance value of the cathode of a large area can be reduced, and the brightness of the entire panel can be made uniform.

此外,當利用上述絕緣單位內的底切結構來隔離多個子畫素之間的一有機發光層時,可防止有機發光層或一共有層所引起的側漏電流。Further, when the underlying structure in the above-described insulating unit is used to isolate an organic light-emitting layer between the plurality of sub-pixels, side leakage current caused by the organic light-emitting layer or a common layer can be prevented.

所述的實施例的特徵、結構、功效等已涵蓋於本發明的至少一實施例中,而不應被理解為受限於只有一個實施例。此外,所述的實施例的特徵、結構、功效等可由本領域的技術人員在其他實施例中加以結合或予以調整。這些結合和調整的內容應被理解為落入本發明的範疇內。The features, structures, utilities, and the like of the described embodiments are intended to be encompassed in at least one embodiment of the invention, and are not construed as being limited to only one embodiment. Furthermore, the features, structures, utilities, and the like of the described embodiments can be combined or adjusted in other embodiments by those skilled in the art. The contents of these combinations and adjustments should be understood as falling within the scope of the present invention.

1‧‧‧基板1‧‧‧Substrate

10‧‧‧有機發光顯示裝置10‧‧‧Organic light-emitting display device

11‧‧‧陽極11‧‧‧Anode

12‧‧‧有機發光層12‧‧‧Organic light-emitting layer

13‧‧‧陰極13‧‧‧ cathode

14‧‧‧陰極14‧‧‧ cathode

100‧‧‧基板100‧‧‧Substrate

101‧‧‧緩衝層101‧‧‧buffer layer

102‧‧‧主動層102‧‧‧Active layer

103‧‧‧閘極103‧‧‧ gate

104‧‧‧層間絕緣層104‧‧‧Interlayer insulation

105‧‧‧閘極絕緣層105‧‧‧gate insulation

106a‧‧‧汲極106a‧‧‧Bungee

106b‧‧‧源極106b‧‧‧ source

107‧‧‧保護膜107‧‧‧Protective film

108‧‧‧外塗層108‧‧‧Overcoat

120‧‧‧有機發光二極體的陽極120‧‧‧Anode of organic light-emitting diode

121‧‧‧有機發光層121‧‧‧Organic light-emitting layer

122‧‧‧有機發光二極體的陰極122‧‧‧The cathode of the organic light-emitting diode

130‧‧‧輔助電極130‧‧‧Auxiliary electrode

131‧‧‧第一金屬線131‧‧‧First metal wire

132‧‧‧第二金屬線132‧‧‧second metal wire

150‧‧‧隔堤150‧‧‧ estuary

150c‧‧‧隔堤開孔150c‧‧‧divide opening

208‧‧‧外塗層208‧‧‧Overcoat

208b‧‧‧外塗層開孔208b‧‧‧Overcoat opening

208c‧‧‧隔堤開孔208c‧‧‧divide opening

211‧‧‧第一光阻圖案211‧‧‧First photoresist pattern

212‧‧‧第二光阻圖案212‧‧‧second photoresist pattern

212a‧‧‧第一光阻圖案開孔212a‧‧‧First photoresist pattern opening

212b‧‧‧第二光阻圖案開孔212b‧‧‧Second photoresist pattern opening

220‧‧‧陽極傀儡圖案220‧‧‧Anode 傀儡 pattern

220c‧‧‧第二接觸孔220c‧‧‧second contact hole

230‧‧‧片狀電極230‧‧‧Sheet electrode

250‧‧‧隔堤250‧‧‧Sediment

261‧‧‧第一光阻圖案261‧‧‧First photoresist pattern

262‧‧‧第二光阻圖案262‧‧‧second photoresist pattern

262a‧‧‧第一光阻圖案開孔262a‧‧‧First photoresist pattern opening

262b‧‧‧第二光阻圖案開孔262b‧‧‧Second photoresist pattern opening

281‧‧‧第一光阻圖案281‧‧‧First photoresist pattern

281a‧‧‧第一光阻圖案開孔281a‧‧‧First photoresist pattern opening

282‧‧‧第二光阻圖案282‧‧‧second photoresist pattern

282a‧‧‧第二光阻圖案開孔282a‧‧‧Second photoresist pattern opening

282b‧‧‧第三光阻圖案開孔282b‧‧‧ Third photoresist pattern opening

350‧‧‧隔堤350‧‧‧Sediment

350b‧‧‧隔堤的開口區域350b‧‧‧opening area of the bank

1800‧‧‧絕緣單位1800‧‧‧Insulation unit

1800a‧‧‧絕緣單位內的第一接觸孔1800a‧‧‧first contact hole in the insulation unit

1800b‧‧‧輔助電極的第一開孔1800b‧‧‧first opening of the auxiliary electrode

1800c‧‧‧絕緣單位內的第二開孔1800c‧‧‧Second opening in the insulation unit

1800d‧‧‧第二開孔1800d‧‧‧second opening

A‧‧‧第一節點A‧‧‧first node

AA‧‧‧基板上的顯示區域AA‧‧‧ display area on the substrate

B‧‧‧第二節點B‧‧‧second node

Cst‧‧‧儲存電容Cst‧‧‧ storage capacitor

DD‧‧‧資料驅動器DD‧‧‧Data Drive

DL、DL1~DLm‧‧‧資料線DL, DL1~DLm‧‧‧ data line

D-Tr‧‧‧驅動薄膜電晶體D-Tr‧‧‧Drive Film Transistor

EA‧‧‧子畫素內的發光區域Illuminated area within the EA‧‧ sub-pixel

GL、GL1~GLn‧‧‧閘極線GL, GL 1 ~ GL n ‧‧ ‧ gate line

GD‧‧‧閘極驅動器GD‧‧ ‧ gate driver

h1‧‧‧外塗層開孔的直徑h 1 ‧‧‧Drop diameter of the outer coating

h2‧‧‧隔堤開孔的直徑h 2 ‧‧‧diameter of the opening of the embankment

h3‧‧‧第一開孔的第三直徑h 3 ‧‧‧The third diameter of the first opening

h4‧‧‧隔堤開孔的第四直徑h 4 ‧‧‧fourth diameter of the dike opening

h5‧‧‧第二光阻圖案開孔的第五直徑h 5 ‧‧‧The fifth diameter of the second photoresist pattern opening

h6‧‧‧隔堤350與陽極傀儡圖案220之間相隔一第六直徑h6h 6 ‧‧ ‧ the partition 350 is separated from the anode 傀儡 pattern 220 by a sixth diameter h6

h7‧‧‧第一開孔的第七直徑h 7 ‧‧‧ seventh diameter of the first opening

NEA‧‧‧子畫素內的非發光區域Non-lighting area in the NEA‧‧ subpixel

OLED‧‧‧有機發光二極體OLED‧‧ Organic Light Emitting Diode

PC‧‧‧畫素電路PC‧‧‧ pixel circuit

TFT‧‧‧薄膜電晶體TFT‧‧‧thin film transistor

VDD‧‧‧第一電源供應單元VDD‧‧‧First Power Supply Unit

VDDL‧‧‧驅動電壓線VDDL‧‧‧ drive voltage line

SP‧‧‧子畫素SP‧‧‧Subpixel

S-Tr‧‧‧開關薄膜電晶體S-Tr‧‧‧ Switching Film Transistor

所包括的附圖提供對本發明的進一步理解,並且被納入和構成了本申請的一部分,以圖解方式說明本發明的實施例,並搭配說明來解釋本發明的原理。The accompanying drawings are included to provide a

圖1為用以說明所屬技術領域中有機發光顯示裝置的一側至另一相對側所量測獲得的亮度變化示意圖。1 is a schematic view for explaining changes in luminance obtained by measuring one side to the other opposite side of an organic light-emitting display device in the related art.

圖2為本發明的有機發光顯示裝置的示意圖。2 is a schematic view of an organic light emitting display device of the present invention.

圖3為圖2中一子畫素的電路示意圖。3 is a circuit diagram of a sub-pixel in FIG. 2.

圖4為圖2中一子畫素的平面示意圖。4 is a schematic plan view of a sub-pixel in FIG. 2.

圖5為根據本發明一第一實施例所繪示之有機發光顯示裝置的剖面示意圖。FIG. 5 is a cross-sectional view of an organic light emitting display device according to a first embodiment of the present invention.

圖6A至6E為圖5中所述的有機發光顯示裝置的製程步驟的剖面示意圖。6A to 6E are schematic cross-sectional views showing a process of the organic light emitting display device of Fig. 5.

圖7為根據本發明所述之有機發光顯示裝置的製程流程圖。FIG. 7 is a flow chart showing the process of the organic light emitting display device according to the present invention.

圖8為根據本發明一第二實施例所繪示之有機發光顯示裝置的剖面示意圖。FIG. 8 is a cross-sectional view of an organic light emitting display device according to a second embodiment of the present invention.

圖9A至9D為圖8中所述的有機發光顯示裝置的製程步驟的剖面示意圖。9A to 9D are schematic cross-sectional views showing a manufacturing process of the organic light emitting display device illustrated in Fig. 8.

圖10本發明第三實施例所繪示的有機發光顯示裝置的剖面示意圖。FIG. 10 is a cross-sectional view showing an organic light emitting display device according to a third embodiment of the present invention.

圖11A至11D為圖10中所述的有機發光顯示裝置的製程步驟的剖面示意。11A to 11D are cross-sectional views showing a manufacturing process of the organic light emitting display device described in Fig. 10.

圖12為一輔助電極與一陰極之間的連接部中的喪失底切結構的SEM示意圖。Figure 12 is a SEM diagram showing the loss of undercut structure in the junction between an auxiliary electrode and a cathode.

圖13為圖12中輔助電極與陰極之間的連接部的SEM示意圖。Figure 13 is a SEM schematic view of the joint between the auxiliary electrode and the cathode of Figure 12.

圖14為根據本發明第四實施例所繪示的有機發光顯示裝置的剖面示意圖。FIG. 14 is a cross-sectional view of an organic light emitting display device according to a fourth embodiment of the present invention.

圖15為根據一對照示例所繪示的有機發光顯示裝置的剖面示意圖。15 is a schematic cross-sectional view of an organic light emitting display device according to a comparative example.

圖16為根據本發明第五實施例所繪示的有機發光顯示裝置平面示意圖。FIG. 16 is a schematic plan view of an organic light emitting display device according to a fifth embodiment of the present invention.

圖17A至17C為圖16中所述的有機發光顯示裝置之不同實施例的剖面示意圖。17A to 17C are schematic cross-sectional views showing different embodiments of the organic light emitting display device illustrated in Fig. 16.

圖18為根據本發明第六實施例所繪示的有機發光顯示裝置平面示意圖。FIG. 18 is a schematic plan view of an organic light emitting display device according to a sixth embodiment of the present invention.

Claims (15)

一種有機發光顯示裝置,包含:一基板,包含一顯示區域和圍繞該顯示區域的一邊緣區域,其中在該顯示區域中,有多個子畫素排列成一矩陣,並且每一該子畫素包含一發光區域和位於該發光區域周圍的一非發光區域;一輔助電極,位於該非發光區域內;一絕緣單位,具有一第一開孔,該第一開孔暴露該輔助電極;一第一凸出圖案,位於該絕緣單位上,其中該第一凸出圖案伸入該第一開孔並重疊於被暴露的該輔助電極,該第一凸出圖案與該輔助電極之間具有一垂直間隙;以及一陰極,直接接觸在該垂直間隙中被暴露的該輔助電極,並且重疊於該第一凸出圖案。 An organic light emitting display device comprising: a substrate comprising a display area and an edge area surrounding the display area, wherein in the display area, a plurality of sub-pixels are arranged in a matrix, and each of the sub-pixels comprises a a light emitting region and a non-light emitting region around the light emitting region; an auxiliary electrode located in the non-light emitting region; an insulating unit having a first opening, the first opening exposing the auxiliary electrode; and a first protruding a pattern on the insulating unit, wherein the first protruding pattern extends into the first opening and overlaps the exposed auxiliary electrode, the first protruding pattern and the auxiliary electrode have a vertical gap; A cathode directly contacts the auxiliary electrode exposed in the vertical gap and overlaps the first protruding pattern. 如請求項1所述的有機發光顯示裝置,更包含:一有機發光層,設置於除了重疊於該第一凸出圖案的被暴露的該輔助電極以外之其餘被暴露的該輔助電極上。 The organic light-emitting display device of claim 1, further comprising: an organic light-emitting layer disposed on the auxiliary electrode that is exposed except for the exposed auxiliary electrode that is overlapped with the first convex pattern. 如請求項2所述的有機發光顯示裝置,其中該陰極設置於該有機發光層上以及設置在重疊該第一凸出圖案的被暴露的該輔助電極上。 The organic light-emitting display device of claim 2, wherein the cathode is disposed on the organic light-emitting layer and disposed on the exposed auxiliary electrode overlapping the first convex pattern. 如請求項1所述的有機發光顯示裝置,更包含:一第二開孔,位於該非發光區域內的該絕緣單位中;以及一第二凸出圖案,位於該絕緣單位上,且該第二凸出圖案伸入該第二開孔,以在多個子畫素間分隔一有機發光層。 The organic light emitting display device of claim 1, further comprising: a second opening in the insulating unit in the non-light emitting region; and a second protruding pattern on the insulating unit, and the second A protruding pattern extends into the second opening to separate an organic light-emitting layer between the plurality of sub-pixels. 如請求項4所述的有機發光顯示裝置,其中該第一凸出圖案與該第二凸出圖案係製作在同一層,及/或採用相同材料製作。The organic light-emitting display device of claim 4, wherein the first protruding pattern and the second protruding pattern are formed in the same layer, and/or are made of the same material. 如請求項4所述的有機發光顯示裝置,其中該非發光區域內的該第二開孔沿著該發光區域的一側延伸或圍繞該發光區域的周圍。The organic light-emitting display device of claim 4, wherein the second opening in the non-light-emitting region extends along or around a side of the light-emitting region. 如請求項1所述的有機發光顯示裝置,其中該第一凸出圖案包含一隔堤的一部份,該隔堤具有一第一子開孔,該第一子開孔對應該輔助電極,且該第一子開孔小於該絕緣單位內的該第一開孔。The organic light-emitting display device of claim 1, wherein the first protruding pattern comprises a portion of a bank, the bank has a first sub-opening, the first sub-opening corresponding to the auxiliary electrode, And the first sub-opening is smaller than the first opening in the insulating unit. 如請求項7所述的有機發光顯示裝置,其中該絕緣單位包含一非有機絕緣層與一有機絕緣層,且該非有機絕緣層與該有機絕緣層實質上相堆疊。The organic light-emitting display device of claim 7, wherein the insulating unit comprises a non-organic insulating layer and an organic insulating layer, and the non-organic insulating layer is substantially stacked with the organic insulating layer. 如請求項8所述的有機發光顯示裝置,其中該隔堤設置在該第一開孔內的該絕緣單位的一側表面上。The organic light-emitting display device of claim 8, wherein the bank is disposed on a side surface of the insulating unit in the first opening. 如請求項1所述的有機發光顯示裝置,其中該絕緣單位包含一非有機絕緣層,該非有機絕緣層包含該第一開孔,並且該第一凸出圖案包含一有機絕緣層,該有機絕緣層具有一第一子開孔,該第一子開孔小於該第一開孔。The organic light-emitting display device of claim 1, wherein the insulating unit comprises a non-organic insulating layer, the non-organic insulating layer comprises the first opening, and the first protruding pattern comprises an organic insulating layer, the organic insulating layer The layer has a first sub-opening, the first sub-opening being smaller than the first opening. 如請求項1所述的有機發光顯示裝置,更包含:一發光二極體,包含該陰極與一陽極,其中該第一凸出圖案是與該陽極位於同一層內的一陽極傀儡圖案。The organic light-emitting display device of claim 1, further comprising: a light-emitting diode comprising the cathode and an anode, wherein the first protruding pattern is an anode-turn pattern in the same layer as the anode. 如請求項11所述的有機發光顯示裝置,其中該陽極傀儡圖案透過該絕緣單位內的一接觸孔電性連接於該輔助電極。The OLED display device of claim 11, wherein the anode 傀儡 pattern is electrically connected to the auxiliary electrode through a contact hole in the insulating unit. 如請求項1所述的有機發光顯示裝置,其中該輔助電極與一子畫素的一薄膜電晶體的一源極或汲極位於同一層。 The organic light-emitting display device of claim 1, wherein the auxiliary electrode is in the same layer as a source or a drain of a thin film transistor of a sub-pixel. 一種有機發光顯示裝置的製造方法,該製造方法包含:準備一基板,該基板包含一顯示區域和圍繞該顯示區域的一邊緣區域,其中在該顯示區域內,多個子畫素排列成一矩陣且包含一發光區域和位於該發光區域周圍的一非發光區域;在該非發光區域內形成一輔助電極;在該輔助電極上形成一絕緣單位;在該絕緣單位上形成一第一凸出圖案;在該絕緣單位中形成一第一開孔,該第一開孔暴露該輔助電極,其中該第一凸出圖案伸入該第一開孔且重疊於被暴露的該輔助電極;以及形成一陰極,該陰極接觸被暴露的該輔助電極且垂疊於該第一凸出圖案。 A manufacturing method of an organic light emitting display device, comprising: preparing a substrate, the substrate comprising a display area and an edge area surrounding the display area, wherein a plurality of sub pixels are arranged in a matrix and included in the display area a light emitting region and a non-light emitting region around the light emitting region; forming an auxiliary electrode in the non-light emitting region; forming an insulating unit on the auxiliary electrode; forming a first protruding pattern on the insulating unit; Forming a first opening in the insulating unit, the first opening exposing the auxiliary electrode, wherein the first protruding pattern extends into the first opening and overlaps the exposed auxiliary electrode; and forms a cathode, The cathode contacts the auxiliary electrode that is exposed and hangs over the first protruding pattern. 如請求項14所述的製造方法,其中形成該第一凸出圖案包含在該第一凸出圖案中形成一子開孔,其中形成該第一開孔包含選擇性地蝕刻該絕緣單位,以形成該第一開孔,並且該子開孔的直徑小於該第一開孔的直徑。 The manufacturing method of claim 14, wherein the forming the first protruding pattern comprises forming a sub-opening in the first protruding pattern, wherein forming the first opening comprises selectively etching the insulating unit to The first opening is formed, and the diameter of the sub-opening is smaller than the diameter of the first opening.
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