TWI619662B - Communication device and control method thereof - Google Patents

Abstract

The communication device (10) includes a parallel interface (11) for communicating with the mounting cassette (20), a network communication unit (14) for communicating with the transport vehicle (30) through the network, and Controlling the parallel interface (11) and the control unit (13) of the network communication unit (14), the control unit (13) for transferring the object to be transported between the placement cassette (20) and the transport carriage (30) In the chain sequence, after the signal of the load 埠 (20) is input, the predetermined standby period is changed between the time period in which the packet is transported to the transport vehicle (30), and the predetermined standby period is changed according to the presence or absence of the error.

Description

Communication device and control method thereof

The present invention relates to a communication device, and more particularly to a communication device that communicates between a load port on which a workpiece is placed and a transport carriage that transports and transports the object to be transported, and a control method therefor.

The E84 communication sequence of SEMI (Semiconductor Equipment and Materials International) is applied to the communication between the mounting rafts installed in the semiconductor manufacturing equipment and the transportation trolleys such as overhead traveling vehicles. When a storage box (wad) containing a wafer or the like is transported as an object to be transported, and is transported to the mounting raft by the overhead traveling vehicle, and when the storage cassette is carried out by the loading raft, the E84 communication sequence is used. Control signals are transmitted between the overhead walking trolley and the mounting raft. For example, when the storage box is transferred from the overhead traveling trolley to the mounting cymbal, a plurality of projects that do not move to the next project when the specific signal (L_REQ) is not formed as an off (off) are used. Interlock sequence (see, for example, Patent Document 1). Thereby, the storage box can be safely and surely carried by the overhead traveling trolley Transfer to the load 埠.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-130023

[Patent Document 2] Japanese Laid-Open Patent Publication No. 62-55704

[Patent Document 3] Japanese Patent Publication No. 09-261233

The communication between the mounting 埠 and the overhead traveling trolley in the E84 communication sequence uses an 8-bit (one-way 8-bit, two-way 16-bit) parallel interface. An optical communication device is disposed in the traveling path of the overhead traveling trolley. The optical communication device and the overhead traveling vehicle exchange light with light. In addition, the optical communication device and the mounting raft are connected by a parallel interface cable. When the parallel interface and the optical communication device as described above are used, the communication device must be arranged in units of mounting, so that the cost rises.

Therefore, it is conceivable to communicate the information of the input/output port (hereinafter referred to as IO port) by replacing the parallel interface by network communication such as LAN (Local Area Network). In this configuration, the parallel signal as the information of the IO is converted into a packet and transmitted via the network.

When the information is conveyed by the parallel interface, the information of the IO埠 of the parallel interface is always transmitted to the connection destination. On the other hand, in the configuration using network communication, packets are transmitted at a predetermined timing. In the configuration using the network communication, the timing at which the information of the IO 发生 is changed is considered as a timing at which the information of the input and output of the parallel interface is transmitted to the destination of the transmission by network communication (refer to, for example, Patent Document 2). ). At this time, since the information is not transmitted until the information is changed, there is a problem that it is impossible to determine whether or not the information is actually changed or whether the information cannot be transmitted due to a failure or the like.

In addition, in order to transmit the information of the IO埠 to the target of the destination of the transmission, it is conceivable to adopt a timing of a predetermined time interval (see, for example, Patent Document 3). At this time, since the communication is continued for a certain time interval, the state of the object can be periodically checked. However, in order to sense an error without delay, it is necessary to shorten the time interval and there is a problem that the amount of communication data increases.

The present invention has been made to solve the above problems, and an object of the present invention is to suppress communication while performing communication between a mounting magazine on which a workpiece is placed and a transport vehicle that carries and transports the object to be transported. The amount of information increased and the error message was conveyed without delay.

In order to solve the above problems, a communication device according to an aspect of the present invention includes: a parallel interface that communicates with a mounting magazine on which a workpiece is placed; and a network communication portion that transmits through the network. And in the foregoing And a transport unit that transports the object to be transported between the stacks for communication; and a control unit that controls the parallel interface and the network communication unit, wherein the control unit is configured to mount the transport vehicle and the transport vehicle In the interlocking sequence of transferring the object to be transported, communication processing with the loading cassette and the transporting carriage is repeated, and the communication processing includes converting the first packet received by the network communication unit into Processing of the first parallel signal; processing for outputting the first parallel signal by the parallel interface; processing for converting the second parallel signal input by the parallel interface into the second packet; and the foregoing a process of transmitting a packet to the transport carriage by the network communication unit; determining whether an error in the linkage sequence occurs due to the first packet or the second parallel signal; and if the linkage sequence does not occur In the case of an error, the predetermined standby period is set to the first time interval, and if an error in the interlocking sequence occurs, the predetermined standby is performed. A process of setting the ratio between the first time interval to a shorter second time interval.

Thereby, if an error occurs in the interlocking sequence, since the communication cycle between the transporting carriage and the mounting raft can be shortened, the error information can be transmitted without delay. Further, if an error does not occur, the communication period between the transport trolley and the mounting cassette can be lengthened compared to the case where an error occurs, so that the amount of communication data can be suppressed.

Further, in the communication device according to an aspect of the present invention, the parallel interface may have a configuration according to the SEMI E84 standard.

In this way, a chain sequence of the SEMI E84 specification can be used.

Furthermore, the communication device according to one aspect of the present invention may be configured to further include a configuration for modifying at least one of the first time interval and the second time interval from the outside.

Thereby, the first time interval and the second time interval can be externally adjusted to an appropriate value at any time.

Further, in the communication device according to an aspect of the present invention, the control unit may be configured to change the second time interval in accordance with the type of error in the interlocking sequence.

As a result, the second time interval can be set to a necessary and sufficient value in accordance with the risk of erroneousness, urgency, etc., so that the amount of communication data can be further suppressed.

In order to solve the above problems, a control method for a communication device according to an aspect of the present invention includes: a parallel interface that communicates with a mounting magazine on which a workpiece is placed; and a network communication portion that transmits The network communicates with a transport carriage that transports the object to be transported between the transporter; and a control unit that controls the communication device of the parallel interface and the network communication unit, including a communication processing project with the loading cassette and the transport carriage that is repeatedly performed in a chain sequence for transferring the object to be transported between the loading cassette and the transport carriage, wherein the communication processing engineering includes: Converting the first packet received by the network communication unit into a first parallel signal; outputting the first parallel signal from the parallel interface; converting the second parallel signal input by the parallel interface into The second package is carried out; the second packet is transmitted from the network communication unit to the predetermined standby period. The operation of the transporting trolley; determining whether an error in the interlocking sequence occurs due to the first packet or the second parallel signal; and if the error in the interlocking sequence does not occur, setting the predetermined standby period to When an error in the interlocking sequence occurs in the first time interval, the predetermined waiting period is set to a second time interval shorter than the first time interval.

Thereby, if an error occurs in the interlocking sequence, since the communication interval between the transporting carriage and the mounting raft can be shortened, the error information can be transmitted without delay. Further, if an error does not occur, the communication interval between the transport trolley and the mounting cassette can be lengthened as compared with the case where an error occurs, so that the amount of communication data can be suppressed.

However, the present invention can be realized not only as a device and a control method but also as a program for causing a computer to execute a project in a control method. Further, it is also possible to realize a computer-readable recording medium on which the program is recorded, and to realize information, materials, or signals indicating the program. The programs, information, materials and signals can then be distributed via a communication network such as the Internet.

According to the present invention, it is possible to prevent the increase in the amount of communication data while suppressing the increase in the amount of communication data in the communication device for carrying the communication between the placed object and the transporting vehicle on which the object to be transported is carried. Communicate error messages.

1‧‧‧Semiconductor Manufacturing System

2‧‧‧Travel route

10‧‧‧Communication device

11‧‧‧Parallel interface

12‧‧‧LAN埠

13‧‧‧Control Department

14‧‧‧Network Communication Department

20‧‧‧Loading

21‧‧‧Parallel interface

22‧‧‧LP Control Department

30‧‧‧Transportation trolley

31‧‧‧The Department of Control

32‧‧‧Trolley Control Department

33‧‧‧Trolley Communications Department

40‧‧‧ access point

50‧‧‧Semiconductor manufacturing equipment

51‧‧‧FOUP moved into and out

60‧‧‧parallel cable

70‧‧‧LAN cable

100‧‧‧FOUP

Fig. 1 is an external view showing an outline of a semiconductor manufacturing system including a communication device according to an embodiment of the present invention.

Fig. 2 is a block diagram showing the functional configuration of a semiconductor manufacturing system including a communication device according to an embodiment of the present invention.

Fig. 3 is a view showing an example of a processing procedure of a communication device according to an embodiment of the present invention.

Fig. 4 is a flow chart showing a detailed processing procedure of the Active side interlocking execution project according to the embodiment of the present invention.

Fig. 5 is a flow chart showing the detailed processing of the Passive side interlocking execution project according to the embodiment of the present invention.

Fig. 6 is a flow chart showing the detailed processing of the Passive signal receiving project of the communication device according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail using the drawings. The embodiments described below are all preferred embodiments of the present invention. The numerical values, shapes, materials, constituent elements, arrangement positions and connection forms of the constituent elements, engineering, engineering order, and the like, which are shown in the following embodiments, are merely examples, and the present invention is not intended to limit the present invention. In addition, among the constituent elements of the following embodiments, constituent elements not described in the independent request item indicating the most superior concept of the present invention are described as being preferable. Any constituent element of the form.

In the above, the same components are denoted by the same reference numerals, and the description thereof will be omitted.

First, an outline of an embodiment of a semiconductor manufacturing system including the communication device of the present invention will be described. Fig. 1 is an external view showing an outline of a semiconductor manufacturing system. As shown in FIG. 1, the semiconductor manufacturing system 1 is mainly composed of a communication device 10, a semiconductor manufacturing device 50, a mounting cassette 20, a traveling path 2, a transport carriage 30, and an access point 40.

The semiconductor manufacturing apparatus 50 shown in FIG. 1 is a device for processing a wafer, and is provided with a FOUP for loading and unloading a FOUP (Front Opening Unified Pod) 100 in which a wafer is stored. Exit 51.

The mounting 埠 20 is placed in the vicinity of the FOUP loading/unloading port 51 of the semiconductor manufacturing apparatus 50, and the FOUP 100 is received by the semiconductor manufacturing apparatus 50. Further, the placement 埠 20 is used to transfer the FOUP 100 between the transport carriage 30 and the transport vehicle 30 . Further, the mounting cassette 20 has a parallel interface 21 and transmits a reception signal to and from the communication device 10 through the parallel cable 60.

The transport carriage 30 is a trolley that transports the FOUP 100 between the loading cassettes 20 and transports along the traveling path 2, and has a grip portion 31 for holding the FOUP 100 therein. The grip portion 31 is configured to be movable up and down, and is lowered to the vicinity of the placement cymbal 20 when the FOUP 100 is transferred between the placement 埠20.

The communication device 10 is a device for transmitting and receiving signals between the magazine 20 and the transport carriage 30. The communication device 10 is provided with a parallel interface 11 that transmits and receives parallel signals between the parallel interface 21 of the mounting cassette 20 through the parallel cable 60. Further, the communication device 10 is additionally provided with a LAN port 12, and transmits and receives a packet to and from the transport vehicle 30 through the LAN cable 70 and the access point 40.

The access point 40 is a device for transmitting and receiving packets between the intermediary transport cart 30 and the communication device 10. The access point 40 receives the packet transmitted by the communication device 10 through the LAN cable 70, transmits it to the transport trolley 30 by wireless communication (for example, IEEE 802.11), and the access point 40 receives the wireless communication by the transport trolley 30 ( The packet transmitted by, for example, IEEE 802.11) is transmitted to the communication device 10 via the LAN cable 70.

Next, the functional configuration of the semiconductor manufacturing apparatus of the present embodiment will be described. 2 is a block diagram showing the functional configuration of features of a semiconductor manufacturing apparatus including a communication device.

First, the functional configuration of the transport trolley 30 shown in Fig. 2 will be described. The transport trolley 30 functionally includes a trolley control unit 32 and a trolley communication unit 33. The truck control unit 32 receives the signal indicating the information on the cassette 20 by the vehicle communication unit 33, and controls the operation of the transport vehicle 30. Further, the trolley control unit 32 transmits a packet indicating the state of the transporting carriage 30 to the trolley communication unit 33. The trolley communication unit 33 transmits the packet indicating the state of the transport carriage 30 transmitted by the carriage control unit 32 to the access point 40 by wireless communication. Further, the trolley communication unit 33 receives the packet transmitted by the access point 40 and transmits it to the trolley control unit 32.

Next, the functional configuration of the mounting cassette 20 shown in Fig. 2 will be described. The placement cassette 20 functionally includes an LP control unit 22 and a parallel interface 21. The LP control unit 22 receives the parallel signals indicating the state of the conveyance cart 30 from the parallel interface 21 to control the placement 埠20. Further, the LP control unit 22 transmits a parallel signal indicating the state in which the crucible 20 is placed to the parallel interface 21. The parallel interface 21 is an input/output portion for inputting parallel signals, and includes a receptacle for connecting a connector (Dsub-25pin) provided in the parallel cable 60.

Next, the functional configuration of the communication device 10 shown in Fig. 2 will be described. The communication device 10 functionally includes a parallel interface 11, a LAN port 12, a control unit 13, and a network communication unit 14. The parallel interface 11 is an interface for communication with the mounting cassette 20, and includes a unidirectional 8-bit, 16-bit bidirectional IO, and a parallel cable 60. The control unit 13 is a processing unit that repeatedly performs communication processing with the placement cassette 20 and the transport carriage 30 in a predetermined communication cycle in a chain sequence for transferring the FOUP 100 between the placement cassette 20 and the transport carriage 30. The control unit 13 performs at least the following six processes in the communication process.

(1) A process of converting a packet transmitted by the network communication unit 14 into a parallel signal.

(2) The parallel signal converted by the packet is written in each IO 埠 (WRITE), and the output is performed by the parallel interface 11.

(3) A parallel signal (READ) input from the parallel interface 11 is read by each IO, and converted into a packet.

(4) Transfer the packet converted by the parallel signal to the network communication The processing of the portion 14.

(5) Based on the received packet and the parallel signal, it is determined whether or not an erroneous processing in the interlocking sequence of the FOUP 100 transfer between the raft 20 and the transport carriage 30 has occurred.

(6) If an error has not occurred, the standby period is set to the first time interval, and when an error in the interlock sequence occurs, the standby period is set to a second time interval shorter than the first time interval.

The control unit 13 includes a CPU, a memory unit, and the like that are used to perform the above-described communication processing.

The network communication unit 14 is a communication unit that communicates with the transport vehicle 30 via the network. The LAN port 12 is an input/output unit that outputs a packet, and is connected to the LAN cable 70.

Next, the operation of the communication processing of the semiconductor manufacturing system 1 of the present embodiment will be described. 3 is a view showing an example of a processing procedure when the communication device 10 performs communication processing according to the E84 interlock sequence when the FOUP 100 is transferred between the mounting cassette 20 and the transport carriage 30. In this communication processing, the Passive side of the E84 interlocking sequence is the mounting 埠20, and the Active side is the transporting trolley 30. The E84 chain sequence is composed of a plurality of projects. When the projects on the Active side and the Passive side are completed without errors, the values of the bits of the parallel signals of the 8-bit or the 8-bit parallel side of the Active side are updated. Next, if it is determined by the parallel signal that no error has occurred in the previous project, the next project is executed, and if it is determined that an error has occurred, the interlock sequence is interrupted. In the present embodiment, the packet corresponding to the parallel signal of the 8 bit on the active side and the 8 bit on the passive side is included. It is transmitted and received between the transport carriage 30 on the active side and the communication device 10.

In the present embodiment, when an error in the E84 interlocking sequence does not occur on the active side and the Passive side, the communication device 10 repeats the communication processing of the processing items S1 to S6 of Fig. 3 . Further, for example, if an error occurs on the Passive side, the communication processing of the processing items S6 to S11 of Fig. 3 is executed. Each processing project will be described below.

First, a description will be given of a processing procedure when an error in the E84 linkage sequence shown in the processing items S1 to S6 is not generated in FIG. In the Passive signal transmission project (S1), the communication device 10 transmits the packet indicating the state of the load port 20 on the Passive side, and transmits it to the transport vehicle 30 as the active side by wireless communication. In the next active side interlock execution project (S2), the transport vehicle 30 as the active side receives the packet from the communication device 10, and senses the state on the Passive side. Next, when the transport carriage 30 confirms that an error in the E84 interlock sequence has not occurred, the next project of the E84 interlock sequence is executed, and the packet indicating the state of the transport trolley 30 after execution is transmitted to the communication device by wireless communication. 10. In the next Active Signal Transfer Project (S3), the communication device 10 receives the packet transmitted by the transport carriage 30, converts it into a parallel signal, and transmits it to the load port 20 on the Passive side through the parallel interface 11. In the next Passive side interlocking execution project (S4), the loading unit 20 receives the parallel signal indicating the state of the active side by the communication device 10, and senses the state of the active side. Next, if it is confirmed that an error in the E84 linkage sequence has not occurred, the placement of the 埠20 system is followed by the execution of the E84 linkage sequence. In the project, the parallel signal indicating the state of the mounted cymbal 20 after execution is transmitted by the parallel interface 21. Next, in the Passive signal receiving project (S5), the communication device 10 receives the parallel signals from the mounting cassette 20 and converts them into packets. Further, the state in which the crucible 20 is placed is determined based on the parallel signals received by the placement cassette 20. Here, the communication device 10 is placed on the loading cassette 20, and when it is determined that an error in the E84 interlocking sequence has not occurred, the communication device 10 is in a standby state. Then, after the first time interval has elapsed from the parallel signal reception, the communication device 10 executes the Passive side signal transmission project (S6). In the Passive side signal transmission project, the communication device 10 is connected to the transport vehicle 30, and the packet indicating the state in which the cymbal 20 is placed is transmitted to the transport vehicle 30 by wireless communication. As described above, if an error has not occurred, the communication device 10, the loading cassette 20, and the transport carriage 30 perform the processing of S1 to S6, and as shown in FIG. 3, the execution of all the interlocking sequences is repeated. Among them, in the first time interval, it is preferable to set the amount of communication data to be suppressed, and the execution of the chain sequence is not too time-consuming.

Next, a description will be given of a processing procedure when an error in the E84 interlock sequence shown in the processing items S6 to S12 is generated in FIG. First, in the processing projects S6 to S8, the processing is performed in the same manner as the above-described processing projects S1 to S3. Next, in the Passive side interlocking execution project (S9), the loading unit 20 receives the parallel signal indicating the state of the active side by the communication device 10, and senses the state of the active side. Next, if it is confirmed that an error in the E84 linkage sequence has not occurred, the placement of the 埠20 system is followed by the execution of the E84 linkage sequence. Here, if it is assumed to occur in the engineering of the chain sequence In error, the load 埠 20 is transmitted by the parallel interface 21 to transmit a parallel signal indicating a state in which an error has occurred. Next, in the Passive signal reception project (S10), the communication device 10 receives the parallel signal from the mounting cassette 20 and senses the state of the placement cassette 20. Here, when the communication device 10 confirms that an error in the E84 interlock sequence occurs in the placement cassette 20, the parallel signal received by the placement cassette 20 is converted into a packet and stands by. Next, after the parallel signal reception passes the second time interval shorter than the first time interval, the communication device 10 executes the Passive side signal transmission process (S11). In the Passive side signal transmission project, similarly to the above-described processing procedure S6, the communication device 10 transmits the packet indicating the state of the magazine 20 to the transportation vehicle 30 by wireless communication. As described above, when the communication device 10, the mounting cassette 20, and the transporting carriage 30 are erroneous in the E84 interlocking sequence, the processing of S6 to S11 is executed in the second cycle which is shorter than the first cycle. Next, in the active side interlock execution project (S12), the transport trolley 30 receives the packet from the communication device 10 and senses the state on the Passive side. Next, when it is confirmed that an error in the E84 linkage sequence occurs on the Passive side, the transport carriage 30 interrupts the E84 interlock sequence. In the second time interval of the present embodiment, the reception of the signal on the Passive side is surely performed (the time of the chattering cancel processing when the signal for reading the IO 确保 is secured). While ensuring the safe value of the linkage sequence.

Further, in the present embodiment, the standby period is set in the Passive signal reception project, but it may be set in the other side such as the active side chain execution project or the Passive side chain execution project, or may be set in the Several projects.

The above time interval may also not be fixed. For example, the communication device 10 may be provided with an input interface through which the external input device can change the time interval and period of the memory portion stored in the control unit 13. With this configuration, each time interval and period can be adjusted to an appropriate value at any time.

Further, it is also possible to form a configuration in which the first time interval is changed in accordance with the processing of each interlocking sequence. According to this configuration, since the appropriate time interval and period can be adopted in accordance with the time required for each processing of the interlocking sequence, etc., it is possible to avoid communication in a shorter period than necessary, and it is possible to suppress the amount of communication data. For example, if an error is unlikely to occur in the chain sequence, and there is a need for a process that is sufficiently longer than the first time interval, the first time interval may be lengthened in accordance with the time required for the process.

Further, it is also possible to form a configuration in which the second time interval is changed in accordance with the type of the error. For example, in the case where a dangerous error such as a situation in which the worker approaches the placement of the 埠 20 is sensed, the second time interval is shortened as much as possible, and if a slight error such as a communication error occurs, the length is lengthened. The composition of the second time interval. According to this configuration, since the appropriate second time interval can be adopted in accordance with the risk of erroneousness, urgency, and the like, communication can be avoided at a shorter interval than necessary, and the amount of communication data can be suppressed.

Next, a detailed processing project in the Active side interlocking execution project shown in Fig. 3 will be described using Fig. 4 . Figure 4 shows the Active side Flowchart of detailed processing of the chain execution project.

First, when the active side interlocking execution is started, the transport vehicle 30 on the active side receives the packet indicating the state of the placement 埠 20 on the Passive side (S21). Next, the transport carriage 30 updates the signal indicating the state in which the inside of the load cassette 20 is stored (S22). Next, the conveyance trolley 30 determines whether or not an error has occurred in the placement cassette 20 based on a signal indicating the state of the placed load cassette 20 (S23). When it is determined in the processing operation S23 that an error has occurred, the transport carriage 30 interrupts the interlock sequence (S26). Further, when it is determined in the processing procedure S23 that no error has occurred, the interlocking sequence on the active side is continued (S24). Next, in the interlocking sequence, it is determined whether or not an error has occurred in the transport carriage 30 as the active side (S25). If it is determined in the processing project S25 that an error has occurred, the interlock sequence is interrupted (S26). In addition, when the processing item S25 is determined that no error has occurred, and the interlock sequence is interrupted in the processing item S26, the signal indicating the state of the transporting carriage 30 stored in the transporting vehicle 30 on the active side is updated (S27). ). Next, the updated packet indicating the state of the transporting carriage 30 is transported to the communication device 10 by the transport vehicle 30 (S28), and the active side interlocking execution is completed.

Next, a detailed processing project in the Passive side interlocking execution project shown in Fig. 3 will be described using Fig. 5 . Figure 5 is a flow chart showing the detailed processing of the Passive side interlocking execution project.

First, if the Passive side interlocking execution project is started, the placement 埠20 system on the Passive side receives the representation through the parallel interface 21. It is a parallel signal of the state of the conveyance trolley 30 on the active side (S31). Next, based on the received parallel signal indicating the state of the conveyance cart 30, the placement 埠20 determines whether or not an error has occurred in the conveyance carriage 30 (S32). If it is determined in the processing S32 that an error has occurred, the 埠20 system interrupt interlock sequence is placed (S35). Further, if it is determined in the processing project S32 that no error has occurred, the interlocking sequence on the Passive side is continued (S33). Next, in the interlocking sequence, it is determined whether or not an error has occurred in the placement cassette 20 on the Passive side (S34). If it is determined in the processing project S34 that an error has occurred, the interlock sequence is interrupted (S35). If it is determined in the process S34 that no error has occurred and the interlock sequence is interrupted in the process S35, the parallel signal indicating the state in which the 埠20 is placed is updated and transmitted to the communication device 10 by the parallel interface 21 (S36) ). The above concludes the Passive side chain execution project.

Next, a detailed processing project of the Passive signal receiving project shown in FIG. 3 will be described using FIG. Figure 6 is a flow chart showing the detailed processing of the Passive signal receiving project.

First, when the Passive signal reception process is started, the communication device 10 receives a parallel signal indicating the state of the placement cassette 20 on the Passive side (S41). Next, the received parallel signal is converted into a packet (S42). Next, based on the received parallel signals, the communication device 10 determines whether or not an error has occurred in the placement cassette 20 (S43). When it is determined in the processing S43 that no error has occurred, the communication device 10 waits until the first time interval has elapsed from the time when the parallel signal is received by the mounting cassette 20 (S44). In addition, if it is determined in the processing project S43 When an error occurs, the communication device 10 waits until the second time interval shorter than the first time interval elapses from the time when the parallel signal is received by the loading cassette 20 (S45), and the Passive signal reception process ends.

As described above, according to the communication device of the present embodiment, when an E84 interlocking sequence is executed, if an error occurs, the communication interval between the transporting carriage and the mounting cassette can be shortened, so that the error information can be transmitted without delay. Further, if an error does not occur, the communication period between the transport trolley and the mounting cassette can be lengthened compared to the case where an error occurs, so that the amount of communication data can be suppressed.

The communication device of the present invention has been described above based on the embodiments, but the present invention is not limited to the embodiments. It is also within the scope of the present invention to incorporate various modifications of those skilled in the art to those skilled in the art, or a combination of constituent elements in different embodiments, without departing from the spirit and scope of the invention. .

For example, in the processing example shown in FIGS. 3 to 5, if an error occurs, the chain sequence is interrupted, but there is also a case where the chain sequence is tried again depending on the type of error. For example, if only a communication error occurs, there is a case where the chain sequence can be communicated and tried again without interruption.

Further, in the present embodiment, an example in which a chain sequence according to the SEMI E84 specification is executed is shown, but the present invention can also be employed in a chain sequence other than the SEMI E84 specification.

[Industrial availability]

The present invention is applicable to the placement of the object to be transported 通讯, a communication device that communicates with the transport trolley that transports and transports the object to be transported.

Claims (6)

A communication device comprising: a parallel interface for communicating with a mounting magazine on which the object to be transported is placed; and a network communication portion passing through the network and between the mounting pocket And a control unit that controls the parallel interface and the network communication unit, wherein the control unit is configured to transfer the carrier between the loading cassette and the transport vehicle. In the interlocking sequence of the object to be transported, communication processing with the loading cassette and the transporting carriage is repeated, and the communication processing includes converting the first packet received by the network communication unit into the first parallel signal. Processing for outputting the first parallel signal by the parallel interface; converting the second parallel signal input by the parallel interface into a second packet; and the second packet is formed by the predetermined waiting period The network communication unit transmits the processing to the transportation trolley; and determines whether the processing of the error in the interlocking sequence occurs according to the first packet or the second parallel signal; and When an error in the interlocking sequence is generated, the predetermined waiting period is set to a first time interval, and when an error in the interlocking sequence occurs, the predetermined waiting period is set to be shorter than the first time interval. The processing of the second time interval. The communication device of claim 1, wherein the parallel interface has a configuration according to the SEMI E84 specification. The communication device according to the first or second aspect of the invention, wherein the communication device is configured to change at least one of the first time interval and the second time interval from the outside. The communication device according to claim 1 or 2, wherein the control unit changes the second time interval in accordance with a type of error in the interlocking sequence. The communication device of claim 3, wherein the control unit changes the second time interval in accordance with a type of error in the interlocking sequence. A control method for a communication device, comprising: a parallel interface, a network communication unit, and a control method of a communication device of the control unit, wherein the parallel interface communicates with a mounting magazine on which the object to be transported is placed; The network communication unit communicates with the transport vehicle that transports the object to be transported between the loading cassette via the network; the control unit controls the parallel interface and the network communication unit, and the communication device controls The control method includes: a communication processing project with the loading cassette and the transport carriage that is repeatedly performed in a interlocking sequence for transferring the object to be transported between the loading cassette and the transport carriage, and the communication processing The engineering department includes: converting the first packet received by the network communication unit into the first a parallel signal project; a process of outputting the first parallel signal from the parallel interface; converting a second parallel signal input by the parallel interface into a second packet; and the second packet is separated by a predetermined standby period a process of transmitting to the transporting trolley by the network communication unit; determining whether an error in the interlocking sequence occurs due to the first packet or the second parallel signal; and if an error in the interlocking sequence does not occur The predetermined waiting period is set to the first time interval, and when an error in the interlocking sequence occurs, the predetermined waiting period is set to a second time interval shorter than the first time interval.