JP6052132B2 - Communication device and control method thereof - Google Patents

Description

  The present invention relates to a communication device, and more particularly, to a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and transfers the transported object, and a control method thereof.

  An S84 (Semiconductor Equipment and Materials International) E84 communication sequence is applied to communication between a mounting port provided in a semiconductor manufacturing apparatus and a transporting carriage such as an overhead traveling carriage. When transporting a pod containing a wafer or the like as an object to be transported by an overhead traveling carriage and transferring it to the mounting port, and when unloading the pod from the mounting port, the overhead traveling carriage is performed in an E84 communication sequence. A control signal is exchanged between the and the loading port. For example, when transferring a pod from an overhead traveling carriage to a mounting port, an interlock sequence consisting of a plurality of processes is adopted so that the process does not proceed to the next process unless a specific signal (L_REQ) is turned off. (For example, refer to Patent Document 1). As a result, the pod is transferred from the overhead traveling carriage to the placement port safely and reliably.

JP 2009-130023 A JP-A-62-55704 JP 09-261233 A

  The communication between the mounting port and the overhead traveling carriage in the E84 communication sequence uses a parallel interface of 8 bits (one direction is 8 bits, bidirectional is 16 bits). An optical communication device is disposed on the traveling route of the overhead traveling vehicle, and the optical communication device and the overhead traveling vehicle exchange signals with light. The optical communication device and the placement port are connected by a parallel interface cable. When such a parallel interface and an optical communication device are used, there is a problem that the cost increases because it is necessary to arrange the communication device for each mounting port.

  Therefore, instead of the parallel interface, a configuration in which information of input / output ports (hereinafter referred to as IO ports) is transmitted through network communication such as a LAN (Local Area Network). In this configuration, a parallel signal, which is information on the IO port, is converted into a packet and transmitted via a network.

  When information is transmitted through the parallel interface, information on the IO port of the parallel interface is always transmitted to the connection destination. On the other hand, in a configuration using network communication, a packet is transmitted at a predetermined timing. In a configuration using network communication, it is conceivable to adopt a timing at which information on an IO port has changed as one timing at which information on an input / output port of a parallel interface is transmitted to a transmission destination by network communication (for example, Patent Documents). 2). In this case, since the information is not transmitted until the information changes, there is a problem that it cannot be determined whether the information has actually changed or whether the information cannot be transmitted due to a failure or the like.

  In addition, it is conceivable to employ a predetermined time interval as another timing for transmitting the information of the IO port to the destination partner (for example, see Patent Document 3). In this case, since communication is continued at regular time intervals, the status of the other party can be checked periodically, but in order to detect errors without delay, the time interval must be shortened and the amount of communication data increases. There is a problem of doing.

  The present invention is for solving the above-mentioned problem, in a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and transfers the transported object. An object is to transmit error information without delay while suppressing an increase in the amount of communication data.

  In order to solve the above-described problem, a communication device according to an aspect of the present invention includes a parallel interface that communicates with a placement port on which a transported object is placed, and the placement port between the placement interface and the placement port. A network communication unit that communicates via a network with a transport cart that transfers a transported object, and a control unit that controls the parallel interface and the network communication unit, wherein the control unit includes the placement port and the transport In the interlock sequence for transferring the object to be transferred to and from the carriage, the communication process with the placement port and the carriage is repeated, and the communication process is received by the network communication unit. A process of converting one packet into a first parallel signal, a process of outputting the first parallel signal from the parallel interface, and the parameter A process of converting the second parallel signal input from the network interface into a second packet; a process of transmitting the second packet from the network communication unit to the transport carriage after a predetermined waiting period; Based on the first packet or the second parallel signal, a process for determining whether an error in the interlock sequence has occurred, and when no error has occurred in the interlock sequence, the predetermined waiting period Is set to a first time interval, and when an error occurs in the interlock sequence, a process of setting the predetermined waiting period to a second time interval shorter than the first time interval, Including.

  According to this, when an error occurs in the interlock sequence, the communication cycle between the transport carriage and the placement port can be shortened, so that error information can be transmitted without delay. Further, when no error has occurred, the communication cycle between the transport carriage and the placement port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.

  Further, as a communication device according to an aspect of the present invention, the parallel interface may have a configuration based on the SEMI E84 standard.

  According to this, the interlock sequence of SEMI E84 standard can be adopted.

  The communication device according to one embodiment of the present invention may further include an interface for changing at least one of the first time interval and the second time interval from the outside.

  According to this, the first time interval and the second time interval can be adjusted to appropriate values as needed from the outside.

  Moreover, as a communication device according to an aspect of the present invention, the control unit may change the second time interval according to the type of error in the interlock sequence.

  According to this, since the second time interval can be set to a necessary and sufficient value according to the risk of error, urgency, etc., the amount of communication data can be further suppressed.

  In order to solve the above-described problem, a communication device control method according to an aspect of the present invention includes a parallel interface that communicates with a placement port on which an object to be transported is placed, and the placement port described above. A communication device control method comprising: a network communication unit that communicates via a network with a transport carriage that transfers the object to be transferred in a network; and a control unit that controls the parallel interface and the network communication unit. Including a communication process between the placement port and the transport carriage, which is repeated in an interlock sequence for transferring the object to be transported between the placement port and the transport carriage, and the communication process includes the network Processing for converting the first packet received by the communication unit into a first parallel signal; and converting the first parallel signal into the parallel interface. A process of outputting from the network interface, a process of converting the second parallel signal input from the parallel interface into a second packet, and a predetermined waiting period, the second packet is sent from the network communication unit Processing for transmitting to the carriage, processing for determining whether an error in the interlock sequence has occurred based on the first packet or the second parallel signal, and no error in the interlock sequence has occurred In some cases, the predetermined waiting period is set to a first time interval, and when an error occurs in the interlock sequence, the predetermined waiting period is set to a second time interval shorter than the first time interval. And processing for setting the time interval.

  According to this, when an error occurs in the interlock sequence, the communication interval between the transport carriage and the placement port can be shortened, so that error information can be transmitted without delay. Further, when no error has occurred, the communication interval between the transport carriage and the loading port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.

  The present invention can be realized not only as an apparatus and a control method, but also as a program that causes a computer to execute steps in the control method. Further, it can be realized as a computer-readable recording medium in which the program is recorded, and can be realized as information, data, or a signal indicating the program. These programs, information, data, and signals may be distributed via a communication network such as the Internet.

  According to the present invention, in a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and delivers the transported object, an increase in the amount of communication data is suppressed without delay. Error information can be transmitted.

1 is an external view showing an outline of a semiconductor manufacturing system including a communication device according to an embodiment of the present invention. It is a block diagram which shows the function structure of the semiconductor manufacturing system containing the communication device which concerns on embodiment of this invention. It is a figure which shows an example of the process sequence of the communication device which concerns on embodiment of this invention. It is a flowchart which shows the detailed process process of the Active side interlock execution process which concerns on embodiment of this invention. It is a flowchart which shows the detailed process process of the Passive side interlock execution process which concerns on embodiment of this invention. It is a flowchart which shows the detailed process process of the Passive signal reception process of the communication device which concerns on embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Each of the embodiments described below shows a preferred specific example of the present invention. The numerical values, shapes, materials, constituent elements, arrangement positions and connecting forms of the constituent elements, steps, order of steps, and the like shown in the following embodiments are merely examples, and are not intended to limit the present invention. In addition, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims indicating the highest concept of the present invention are described as optional constituent elements that constitute a more preferable embodiment.

  In addition, the same code | symbol is attached | subjected to the same component and description may be abbreviate | omitted.

  First, an outline of an embodiment of a semiconductor manufacturing system including a communication device according to the present invention will be described. FIG. 1 is an external view showing an outline of a semiconductor manufacturing system. As shown in FIG. 1, the semiconductor manufacturing system 1 mainly includes a communication device 10, a semiconductor manufacturing apparatus 50, a mounting port 20, a travel route 2, a transport cart 30, and an access point 40.

  A semiconductor manufacturing apparatus 50 shown in FIG. 1 is an apparatus for processing a wafer, and includes a FOUP loading / unloading port 51 for loading and unloading a FOUP (Front Opening Unified Pod) 100 in which the wafer is stored.

  The mounting port 20 is a port on which the FOUP 100 that is the object to be transported is placed, and is placed near the FOUP loading / unloading port 51 of the semiconductor manufacturing apparatus 50 and delivers the semiconductor manufacturing apparatus 50 and the FOUP 100. The mounting port 20 transfers the FOUP 100 to and from the transport cart 30. The placement port 20 includes a parallel interface 21 and transmits / receives a signal to / from the communication device 10 via the parallel cable 60.

  The conveyance carriage 30 is a carriage that transfers the FOUP 100 to and from the placement port 20 and conveys the FOUP 100 along the travel route 2, and includes a grip portion 31 that grips the FOUP 100 inside. The grip portion 31 is provided so as to be movable up and down, and is lowered to the vicinity of the placement port 20 when the FOUP 100 is transferred to and from the placement port 20.

  The communication device 10 is a device that mediates transmission and reception of signals between the placement port 20 and the transport carriage 30. The communication device 10 includes a parallel interface 11 and transmits / receives a parallel signal to / from the parallel interface 21 of the placement port 20 via the parallel cable 60. The communication device 10 further includes a LAN port 12 and transmits / receives packets to / from the transport carriage 30 via the LAN cable 70 and the access point 40.

  The access point 40 is a device that mediates transmission and reception of packets between the transport cart 30 and the communication device 10. The access point 40 transmits the packet received from the communication device 10 via the LAN cable 70 to the transport cart 30 by wireless communication (for example, IEEE 802.11), and the packet received from the transport cart 30 by wireless communication is transmitted to the LAN. The data is transmitted to the communication device 10 via the cable 70.

  Next, the functional configuration of the semiconductor manufacturing apparatus according to the present embodiment will be described. FIG. 2 is a block diagram showing a characteristic functional configuration of a semiconductor manufacturing apparatus including a communication device.

  First, the functional configuration of the transport carriage 30 shown in FIG. 2 will be described. As shown in FIG. 2, the transport cart 30 functionally includes a cart control unit 32 and a cart communication unit 33. The carriage control unit 32 receives a signal indicating information on the placement port 20 from the carriage communication unit 33 and controls the operation of the transport carriage 30. Further, the carriage control unit 32 transmits a packet indicating the state of the transport carriage 30 to the carriage communication unit 33. The cart communication unit 33 transmits the packet indicating the state of the transport cart 30 transmitted from the cart control unit 32 to the access point 40 by wireless communication. In addition, the cart communication unit 33 receives the packet transmitted from the access point 40 and transmits the packet to the cart control unit 32.

  Next, the functional configuration of the mounting port 20 shown in FIG. 2 will be described. As shown in FIG. 2, the placement port 20 functionally includes an LP control unit 22 and a parallel interface 21. The LP control unit 22 receives a parallel signal indicating the state of the transport carriage 30 from the parallel interface 21 and controls the placement port 20. In addition, the LP control unit 22 transmits a parallel signal indicating the state of the placement port 20 to the parallel interface 21. The parallel interface 21 is an input / output unit that inputs and outputs parallel signals, and includes a receptacle for connecting a connector (Dsub-25pin) included in the parallel cable 60.

  Next, the functional configuration of the communication device 10 shown in FIG. 2 will be described. As shown in FIG. 2, the communication device 10 functionally includes a parallel interface 11, a LAN port 12, a control unit 13, and a network communication unit 14. The parallel interface 11 is an interface that communicates with the placement port 20, and includes an 8-bit one-way and bi-directional 16-bit IO port to which a parallel cable 60 is connected. In the interlock sequence for transferring the FOUP 100 between the placement port 20 and the transport carriage 30, the control unit 13 repeatedly performs communication processing between the placement port 20 and the transport carriage 30 at a predetermined communication cycle. It is a processing unit. The control unit 13 performs at least the following six processes in the communication process.

(1) Processing for converting a packet transmitted from the network communication unit 14 into a parallel signal.
(2) A process of writing a parallel signal converted from a packet to each IO port (WRITE) and outputting from the parallel interface 11.
(3) A process of reading parallel signals input from the parallel interface 11 from each IO port (READ) and converting them into packets.
(4) Processing for transmitting the packet converted from the parallel signal to the network communication unit 14.
(5) A process of determining whether an error has occurred in the interlock sequence of the FOUP 100 transfer between the mounting port 20 and the transport carriage 30 based on the received packet and the parallel signal.
(6) When no error occurs, the standby period is set to the first time interval, and when an error occurs in the interlock sequence, the standby period is set to the second time interval shorter than the first time interval. The process to set for the time interval.

  The control unit 13 includes a CPU, a storage unit, and the like for performing the communication process.

  The network communication unit 14 is a communication unit that communicates with the transport cart 30 via a network. The LAN port 12 is an input / output unit that inputs and outputs packets, and is connected to a LAN cable 70.

  Next, the communication processing operation of the semiconductor manufacturing system 1 of the present embodiment will be described. FIG. 3 is a diagram illustrating an example of a processing procedure when the communication device performs communication processing based on the E84 interlock sequence when transferring the FOUP 100 between the mounting port 20 and the transport carriage 30. . In this communication process, the Passive side in the E84 interlock sequence is the placement port 20, and the Active side is the transport carriage 30. The E84 interlock sequence is composed of a plurality of steps, and each time the steps on the Active side and the Passive side are completed without error, the value of each bit of the parallel signal of the Active side 8 bits or the Passive side 8 bits is updated. When it is determined by the parallel signal that no error has occurred in the previous process, the next process is executed, and when it is determined that an error has occurred, the interlock sequence is interrupted. In the present embodiment, packets corresponding to the parallel signals of the active side 8 bits and the passive side 8 bits are transmitted and received between the active transport cart 30 and the communication device 10.

  In the present embodiment, when an error on the E84 interlock sequence has not occurred on the Active side and the Passive side, the communication device 10 repeats the communication process of the process steps S1 to S6 of FIG. Further, for example, when an error has occurred on the Passive side, the communication process of the process steps S6 to S11 in FIG. 3 is executed. Hereinafter, each processing step will be described.

  First, the processing steps in the case where no error occurs in the E84 interlock sequence shown in the processing steps S1 to S6 in FIG. 3 will be described. In the Passive signal transmission step (S1), the communication device 10 transmits a packet indicating the state of the placement port 20 on the Passive side to the transport carriage 30 on the Active side by wireless communication. In the subsequent Active side interlock execution step (S2), the transport carriage 30 on the Active side receives the packet from the communication device 10 and detects the state on the Passive side. And if the conveyance trolley 30 confirms that the error on the E84 interlock sequence has not occurred, the next step of the E84 interlock sequence is executed, and the packet indicating the state of the conveyance trolley 30 after the execution is transmitted to the communication device. 10 is transmitted by wireless communication. In the next Active signal transfer step (S 3), the communication device 10 receives the packet transmitted from the transport carriage 30, converts it into a parallel signal, and transmits it to the mounting port 20 on the Passive side via the parallel interface 11. To do. In the subsequent Passive side interlock execution step (S4), the placement port 20 receives a parallel signal indicating the state of the Active side from the communication device 10, and detects the state of the Active side. When it is confirmed that no error has occurred in the E84 interlock sequence, the placement port 20 executes the next step of the E84 interlock sequence, and a parallel signal indicating the state of the placement port 20 after execution. Is transmitted from the parallel interface 21. Next, in the Passive signal receiving step (S5), the communication device 10 receives the parallel signal from the placement port 20 and converts it into a packet. Furthermore, the state of the mounting port 20 is determined based on the parallel signal received from the mounting port 20. Here, when the communication device 10 determines that an error in the E84 interlock sequence has not occurred in the placement port 20, the communication device 10 enters a standby state. And after the 1st time interval passes since parallel signal reception, the communication device 10 performs the Passive side signal transmission process (S6). In the Passive side signal transmission process, the communication device 10 transmits a packet indicating the state of the placement port 20 to the transport carriage 30 by wireless communication. As described above, when an error does not occur, the communication device 10, the loading port 20, and the transport carriage 30 perform the processing steps from S1 to S6 until all the steps of the interlock sequence are completed as shown in FIG. Run repeatedly. The first time interval is preferably set to a value that suppresses the communication data amount and does not take too much time to execute the interlock sequence.

  Next, processing steps in the case where an error on the E84 interlock sequence shown in processing steps S6 to S12 in FIG. 3 occurs will be described. First, in the processing steps S6 to S8, processing is performed in the same manner as the processing steps S1 to S3 described above. Next, in the Passive side interlock execution step (S9), the placement port 20 receives a parallel signal indicating the state on the Active side from the communication device 10, and detects the state on the Active side. When it is confirmed that no error has occurred in the E84 interlock sequence, the mounting port 20 executes the next step of the E84 interlock sequence. Here, if it is assumed that an error occurs in the process of this interlock sequence, the mounting port 20 transmits a parallel signal indicating a state where the error has occurred from the parallel interface 21. Next, in the Passive signal receiving step (S10), the communication device 10 receives the parallel signal from the mounting port 20 and detects the state of the mounting port 20. Here, when the communication device 10 confirms that an error in the E84 interlock sequence has occurred in the placement port 20, the communication device 10 converts the parallel signal received from the placement port 20 into a packet and waits. And after the 2nd time interval shorter than a 1st time interval passes since parallel signal reception, the communication device 10 performs a Passive side signal transmission process (S11). In the Passive side signal transmission step, the communication device 10 transmits a packet indicating the state of the placement port 20 to the transport carriage 30 by wireless communication, similarly to the processing step S6 described above. As described above, when an error occurs in the E84 interlock sequence, the communication device 10, the loading port 20, and the transport carriage 30 perform the processing steps from S6 to S11 in the second cycle shorter than the first cycle. Run. Then, in the active side interlock execution step (S12), the transport carriage 30 receives the packet from the communication device 10 and detects the state on the passive side. Then, when it is confirmed on the Passive side that an error on the E84 interlock sequence has occurred, the transport carriage 30 interrupts the E84 interlock sequence. In the present embodiment, the second time interval is an interlock sequence while reliably receiving a signal on the Passive side (while ensuring a time for chattering processing when reading a signal of an IO port). It is set to a value that ensures the safety.

  Further, in this embodiment, the standby period is provided in the Passive signal reception process, but it may be provided in other processes such as the Active side interlock execution process or Passive side interlock execution process, or in a plurality of processes. May be.

  Note that the above-described time interval may not be fixed. For example, an interface for input may be provided in the communication device 10, and each time interval and period stored in the storage unit in the control unit 13 may be changed from an external input device via this interface. According to this configuration, each time interval and cycle can be adjusted to appropriate values as needed.

  Moreover, it is good also as a structure which changes the above-mentioned 1st time interval according to the process process of each interlock sequence. According to this configuration, since an appropriate time interval and cycle can be adopted according to the time required for each processing step of the interlock sequence, it is possible to avoid performing communication with a cycle shorter than necessary, and communication data The amount can be suppressed. For example, in the interlock sequence, when there is a process that is unlikely to cause an error and requires a time sufficiently longer than the first time interval, the first time interval is set according to the time required for the process. It may be longer.

  Moreover, it is good also as a structure which changes the above-mentioned 2nd time interval according to the kind of error. For example, in the case of a dangerous error such as when it is detected that an operator approaches the mounting port 20, the second time interval is shortened as much as possible, and in the case of a minor error such as a communication error, It is good also as a structure which lengthens a 2nd time interval. According to this configuration, it is possible to adopt an appropriate second time interval according to the risk of error, urgency, etc., so it is possible to avoid performing communication at intervals shorter than necessary, and to reduce the amount of communication data Can be suppressed.

  Next, detailed processing steps in the active side interlock execution step shown in FIG. 3 will be described with reference to FIG. FIG. 4 is a flowchart showing detailed processing steps of the active side interlock execution step.

  First, when the Active side interlock execution process is started, the transport carriage 30 on the Active side receives a packet indicating the state of the loading port 20 on the Passive side (S21). Next, the transport carriage 30 updates a signal indicating the state of the mounting port stored therein (S22). Subsequently, based on the updated signal indicating the state of the loading port 20, it is determined whether or not an error has occurred in the loading port 20 (S23). If it is determined in the processing step S23 that an error has occurred, the transport carriage 30 interrupts the interlock sequence (S26). If it is determined in the processing step S23 that no error has occurred, the Active side interlock sequence is continued (S24). Then, in the interlock sequence, it is determined whether or not an error has occurred in the transport carriage 30 on the active side (S25). When it is determined in the processing step S25 that an error has occurred, the interlock sequence is interrupted (S26). When it is determined that no error has occurred in the process step S25, and when the interlock sequence is interrupted in the process step S26, the state of the transport cart 30 stored in the transport cart 30 on the active side is changed. The indicated signal is updated (S27). And the packet which shows the state of the updated conveyance trolley 30 is transmitted to the communication device 10 from the conveyance trolley 30 (S28), and an Active side interlock execution process is complete | finished.

  Next, detailed processing steps in the Passive side interlock execution step shown in FIG. 3 will be described with reference to FIG. FIG. 5 is a flowchart showing detailed processing steps of the Passive side interlock execution step.

  First, when the Passive side interlock execution process is started, the placement port 20 on the Passive side receives a parallel signal indicating the state of the transport carriage 30 on the Active side via the parallel interface 21 (S31). Next, based on the received parallel signal indicating the state of the transport carriage 30, it is determined whether or not an error has occurred in the transport carriage 30 (S32). If it is determined in the processing step S32 that an error has occurred, the placement port 20 interrupts the interlock sequence (S35). If it is determined in the processing step S32 that no error has occurred, the Passive side interlock sequence is continued (S33). Then, in the interlock sequence, it is determined whether or not an error has occurred in the mounting port 20 on the Passive side (S34). If it is determined in the processing step S34 that an error has occurred, the interlock sequence is interrupted (S35). When it is determined in the processing step S34 that no error has occurred, and when the interlock sequence is interrupted in the processing step S35, the parallel signal indicating the state of the placement port 20 is updated and the parallel interface 21 It is transmitted to the communication device 10 (S36). This completes the Passive side interlock execution process.

  Next, detailed processing steps of the Passive signal receiving step shown in FIG. 3 will be described with reference to FIG. FIG. 6 is a flowchart showing detailed processing steps of the Passive signal receiving step.

  First, when the Passive signal reception process is started, the communication device 10 receives a parallel signal indicating the state of the placement port 20 on the Passive side (S41). Next, the received parallel signal is converted into a packet (S42). Then, based on the received parallel signal, it is determined whether or not an error has occurred in the placement port 20 (S43). If it is determined in the processing step S43 that no error has occurred, the communication device 10 waits until the first time interval elapses from the time when the parallel signal is received from the placement port 20 (S44). If it is determined in the processing step S43 that an error has occurred, the communication device 10 has passed a second time interval shorter than the first time interval from the time when the parallel signal was received from the placement port 20. (S45), and the Passive signal reception process ends.

  As described above, according to the communication device of the present embodiment, when an error occurs when executing the E84 interlock sequence, the communication interval between the transport carriage and the placement port is set. Since it can be shortened, error information can be transmitted without delay. Further, when no error has occurred, the communication cycle between the transport carriage and the placement port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.

  While the communication device of the present invention has been described based on the embodiment, the present invention is not limited to this embodiment. Unless it deviates from the meaning of this invention, the form which carried out the various deformation | transformation which those skilled in the art can think to this embodiment, and the structure constructed | assembled combining the component in different embodiment is also contained in the scope of the present invention. .

  For example, in the processing examples illustrated in FIGS. 3 to 5, the interlock sequence is interrupted when an error occurs, but the interlock sequence may be tried again depending on the type of error. For example, when only a communication error occurs, the communication may be retried without interrupting the interlock sequence.

  In the present embodiment, an example of executing an interlock sequence based on the SEMI E84 standard has been shown. However, the present invention can also be adopted in an interlock sequence other than the SEMI E84 standard.

  INDUSTRIAL APPLICABILITY The present invention can be used for a communication device that performs communication between a placement port for placing an object to be conveyed and a conveyance carriage that conveys and transfers the object to be conveyed.

DESCRIPTION OF SYMBOLS 1 Semiconductor manufacturing system 2 Travel route 10 Communication device 11, 21 Parallel interface 12 LAN port 13 Control part 14 Network communication part 20 Mounting port 22 LP control part 30 Carriage cart 31 Gripping part 32 Carriage control part 33 Carriage communication part 40 Access point 50 Semiconductor manufacturing equipment 51 FOUP loading / unloading port 60 Parallel cable 70 LAN cable 100 FOUP

Claims (5)

A parallel interface that communicates with a placement port on which the object is placed;
A network communication unit that communicates via a network with a transport carriage that transfers the transported object to and from the placement port;
A control unit for controlling the parallel interface and the network communication unit,
In the interlock sequence for transferring the object to be transferred between the placement port and the transport carriage, the control unit repeats the communication process between the placement port and the transport carriage,
The communication process includes
A process of converting the first packet received by the network communication unit into a first parallel signal;
Processing to output the first parallel signal from the parallel interface;
A process of converting a second parallel signal input from the parallel interface into a second packet;
A process of transmitting the second packet from the network communication unit to the transport carriage after a predetermined waiting period;
A process of determining whether an error in the interlock sequence has occurred based on the first packet or the second parallel signal;
When no error occurs in the interlock sequence, the predetermined waiting period is set to a first time interval, and when an error occurs in the interlock sequence, the predetermined waiting period is set to the first time interval. A process of setting a second time interval shorter than the first time interval;
Including communication devices. The communication device according to claim 1, wherein the parallel interface has a configuration based on a SEMI E84 standard. The communication device according to claim 1, further comprising an interface for changing at least one of the first time interval and the second time interval from the outside. The communication device according to claim 1, wherein the control unit changes the second time interval according to an error type in the interlock sequence. A parallel interface that communicates with a placement port on which the object is placed;
A network communication unit that communicates via a network with a transport carriage that transfers the transported object to and from the placement port;
A control unit for controlling the parallel interface and the network communication unit, and a communication device control method comprising:
Repeated in an interlock sequence for transferring the object to be transferred between the placement port and the transport carriage, including communication processing between the placement port and the transport carriage,
The communication process includes
A process of converting the first packet received by the network communication unit into a first parallel signal;
Processing to output the first parallel signal from the parallel interface;
A process of converting a second parallel signal input from the parallel interface into a second packet;
A process of transmitting the second packet from the network communication unit to the transport carriage after a predetermined waiting period;
A process of determining whether an error in the interlock sequence has occurred based on the first packet or the second parallel signal;
When no error occurs in the interlock sequence, the predetermined waiting period is set to a first time interval. When an error occurs in the interlock sequence, the predetermined waiting period is set to the first time interval. A process of setting a second time interval shorter than the first time interval;
Including a communication device control method.

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