TWI618914B - Electro-conductive film thickness detection apparatus - Google Patents

Abstract

The invention relates to a conductive film thickness detecting device, which comprises a stage, a light source and a spectrometer. The receiving slot of the loading platform is provided with a first port and a second port, and is respectively connected to the first port and the second port. The light source and the spectrometer are provided; thereby, the conductive film is placed above the spectrometer, and when the light emitted by the light source penetrates the conductive film, the spectrometer can receive and analyze the specific band signal to obtain the film thickness information, and complete the film. The measurement of the thickness.

Description

Conductive film thickness detecting device

The invention relates to a conductive film thickness detecting device, in particular to a device capable of quickly detecting and judging a film thickness by a spectrometer when the conductive film exhibits different transmittances by irradiation with a light source.

According to the current, transparent conductive oxides (TCOs) have been widely used in various types of optoelectronic products such as smart phones, tablet computers, flat panel displays and solar chips. Among them, Indium tin oxide (ITO) has excellent electrical conductivity and high light transmittance, so it is the most important transparent conductive film material. The photoelectric properties and uniformity of the transparent conductive film have a great influence on the performance of the product. Therefore, how to quickly detect the quality of the transparent conductive film is an urgent issue.

The prior art for detecting a transparent conductive film, such as the Republic of China Publication No. 428079, discloses a "film thickness measuring device using an optical interference method" which uses a light receiving unit to guide light to a light source and an optical fiber. The substrate is vertical and receives the light reflected by the substrate, and the thickness of the film on the substrate is analyzed and calculated by separating the intensity of each wavelength according to the intensity of the reflected light through a beam splitter of an analyzing unit.

The Republic of China Announcement No. M453837, which is a patent previously developed by the inventors, discloses a "film thickness line detecting device" which is provided with a light source and an optical sensing element corresponding to each other in the path of transporting the film, and The optical sensing component is electrically connected to the calculated film thickness unit, so that after the light of the light source penetrates the transparent conductive film, the transparent conductive film has different degrees of attenuation with different thicknesses, and after being absorbed by the optical sensing component, the absorbed light is absorbed. The light source is converted into a corresponding voltage signal to obtain a thickness value of the film by calculating the voltage signal.

The Republic of China Publication No. 201420993 discloses a "multifunctional film element detector" which causes a reference surface to receive a first light of a light source to generate first reflected light and to receive a light source of the film element to be tested. The second light is generated to generate the second reflected light, and the first reflected light and the second reflected light form a plurality of interference light, which can be received by the light sensor and processed by the processor according to the complex reflection phase or the reflectivity of the film to be tested. Calculate to know the surface profile or thickness information of the surface of the film element to be tested.

The Republic of China Announcement No. I386638 discloses a "thin film optical detecting device" which provides a beam having a plurality of wavelength bands to a spectroscopic collimating module by means of a multi-wavelength light source, and splits the beam by a spectroscopic collimating module. The sub-beams having the corresponding wavelength bands are respectively adjusted by the multi-channel polarization rotation module to adjust the azimuth angle of the sub-beam polarization, so that the sub-beams are combined into a convergent beam by the combined light collimation module, and then incident on the film product, The detection of the module limits the penetration of different polarization states of the converged beam, so that the image spectrometer can receive the multi-wavelength image of the converged beam.

Although the above prior art can achieve the effect of detecting film thickness or uniformity, there is still room for improvement in the measurement procedure, subsequent calculation, measurement accuracy, and application in the production line.

In view of the fact that most of the conventional transparent conductive films are applied by optical interference, X-ray or eddy current, laser ultrasonic wave, etc., and the thickness of the technique is mostly detected by the reflectance of light, it can only be used for fixed point. Measurement can not be applied to the production line or the machine that will vibrate, and has the lack of measurement time.

Therefore, the object of the present invention is based on the Beer-Lambert Law. When a transparent conductive film is irradiated with a light source, the transmittance thereof changes with the thickness of the conductive film, and the signal of the specific wavelength band can be analyzed by the spectrometer to obtain the film. The thickness information, and the spectrometer to improve the measurement accuracy.

Another object of the present invention is to form a film thickness detecting device by a simple structure, so that the device can be applied to a conveying device or assembled to an existing equipment machine, thereby achieving on-line detection and reducing equipment cost.

In order to achieve the foregoing, the present invention provides a conductive film thickness detecting device, comprising: a carrier having a receiving slot and having a first port and a second port extending through the receiving slot; a light source, a first port disposed on the stage; and a spectrometer disposed at the second port of the stage and capable of absorbing signals of 330 to 400 nm.

Based on the above principle, the transparent conductive film absorbs ultraviolet light, and the conductive film is placed above the spectrometer. When the light emitted by the light source penetrates the conductive film, the spectrometer can receive and perform signal analysis of a specific band for analysis. As a result, the film thickness information was obtained, and the film thickness measurement was completed.

In order to make the reviewers aware of the techniques, means and effects of the present invention in order to achieve the objectives, the remainder of the present invention will be described in detail with reference to the drawings.

First, referring to Fig. 1, an exploded perspective view of the present invention includes a stage 11, a light source 12, a filter 13, and a spectrometer 14; the stage 11 has a receiving slot The first port 112 and the second port 113 are disposed through the accommodating groove 111. The light source 12 is a halogen lamp and is disposed on the first port 112 of the stage 11; the filter 13 is placed on the stage 11 The accommodating groove 111 is connected to the light source 12; the spectrometer 14 is disposed at the second port 113 of the stage 11 and can absorb signals of 330 to 400 nm.

Next, please refer to FIG. 1 and in conjunction with FIG. 2, when assembling, the light source 12 and the spectrometer 14 are respectively disposed on the first port 112 and the second port 113 of the stage 11, and the light source 12 faces the receiving groove. A filter 13 is disposed at a position of 111 to filter out light having a wavelength range of 200 nm to 400 nm, particularly light having a wavelength other than 380 nm, and the conductive film 3 (not shown) can be placed in the filter 13 and the spectrometer 14. Between, for testing. In addition, in order to be able to cooperate with the detection device 1 of the online machine, a first optical fiber 15 can be disposed between the first port 112 of the stage 11 and the light source 12 (refer to FIG. 3), and the first stage of the stage 11 A second optical fiber 16 is disposed between the two ports 113 and the spectrometer 14 to enable transmission and reception of light to be transmitted through the first optical fiber 15 and the second optical fiber 16, and the detecting device 1 can be placed on the production line machine. Reduce the space occupied.

Next, referring to FIG. 4, a schematic view of the present invention assembled on a transport device, the detection device 1 can be mounted on a transport device 2, the transport device 2 including a platform 21, and a slide is fixed on the platform 21 The rails 22 are respectively provided with a rotating shaft 23 at two ends of the sliding rails 22, and a motor 24 is assembled to one of the rotating shafts 23, and a belt 25 is disposed between the two rotating shafts 23. A clamping member 26 is fixed on the belt 25, The motor 24 can be used to rotate the shaft 23 in a clockwise or counterclockwise direction, and the belt 25 is rotated to rotate the clip 26 horizontally on the slide rail 22. The stage 21 on the conveyor 2 is provided for the stage 11 of the detecting unit 1, and the clip 26 is placed between the filter 13 and the second optical fiber 16.

For the detection, please refer to the figures 5-6, which are placed above the clip 26 of the transport device 2, so that the light emitted by the light source 12 is transmitted through the first optical fiber 15 through the filter 13 Filtering out the light outside the defined wavelength range, allowing the remaining band of light to penetrate the conductive film 3, and transmitting the transmitted light to the spectrometer 14 via the second fiber 16 to transmit the transmission spectrum to the spectrometer 14 The back-end working computer performs film thickness analysis to know the thickness information of the conductive film 3 and complete the detection of the thickness of the conductive film 3. In addition to the static detection of the thickness of the conductive film 3, the motor 24 of the transport device 2 can be driven to rotate the belt 23 to rotate the belt 25 while the clip member 26 is horizontally reciprocated on the slide rail 22, thereby conveying the conductive film 3 and supplying it. Perform on-line dynamic film thickness detection.

Since the transparent conductive film 3 has the property of absorbing ultraviolet light, when the ultraviolet light penetrates the conductive film 3, different transmittances are generated due to different thicknesses of the conductive film 3. Therefore, the present invention seeks through advance The conductivity of the conductive film 3 is correlated with the film thickness (as shown in Fig. 7) to obtain a regression formula of film thickness and transmittance, and the actual test is performed based on the above structure, and the results of the test are as follows .. It is firstly sputtered to form an indium tin oxide film (ITO) with a film thickness of 80 to 115 nm and an indium tin oxide film (ITO) having a thickness of 88 to 115 nm on a Corning glass to form a sample substrate, which is used after sputtering. The multi-angle spectroscopic ellipsometer measures the sample substrate to obtain accurate film thickness data of the nano unit, and accordingly, serves as a basis for determining the film thickness of the sample substrate. When a sample substrate having a film thickness of 80 to 115 nm was placed on the detecting device 1 and subjected to static detection, the measurement error (absolute value average) was 0.87 nm, and the standard deviation was 1.3 nm. When the sample substrate having a thickness of 88 to 115 nm is placed on the detecting device 1 and subjected to on-line dynamic detection through the transport device 2, the measurement error (absolute value average) is 3.88 nm, and the standard deviation is 4.38 nm (eg, As shown in Fig. 8 , it can be seen from the above test results that the detecting device 1 of the present invention can achieve the purpose of detecting the thickness of the film.

Therefore, the detection device of the present invention can obviously achieve the following effects: 1. The detection device of the present invention utilizes a transparent conductive film to absorb ultraviolet light, and the conductive film is provided by a light source, a filter, and a spectrometer. When the thickness is changed and the transmittance is changed, the signal can be analyzed by the spectrometer, and the effect of detecting the thickness of the conductive film can be achieved. 2. The detecting device of the present invention uses a spectrometer to perform signal analysis for a specific wavelength band, thereby improving detection accuracy to nanometer units, and using the spectrometer to select a specific band function to effectively solve the problem of insufficient dynamic response of the sensor. 3. The detecting device of the invention has a simple structure and is easy to assemble, and further, the detecting device is not affected by the vibration of the machine due to the change of the transmittance, and can be integrated into various machine equipment or used in the production line. In order to achieve significant cost reduction and automated testing.

The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. All changes and modifications that do not depart from the technical spirit of the present invention are covered by the scope of the present invention.

In summary, the present invention has indeed broken through the tradition and has improved and innovative creation content and can be specifically implemented, which should meet the statutory requirements of the invention patent, and file a patent application according to law, and invite the examination committee of the bureau to grant legal patent rights. Creation, to the sense of virtue.

this invention︰

1‧‧‧Detection device

11‧‧‧ stage

111‧‧‧ accommodating slots

112‧‧‧First port

113‧‧‧second port

12‧‧‧Light source

13‧‧‧ filter

14‧‧‧ Spectrometer

15‧‧‧First fiber

16‧‧‧second fiber

2‧‧‧Conveyor

21‧‧‧ platform

22‧‧‧Slide rails

23‧‧‧ shaft

24‧‧‧Motor

25‧‧‧Land

26‧‧‧Clamps

3‧‧‧Electrical film

Figure 1 is a perspective exploded view of the present invention. Figure 2 is a perspective view of the present invention. Figure 3 is a perspective view of another embodiment of the present invention. Figure 4 is a schematic illustration of the assembly of the present invention in a delivery device. Figures 5 to 6 are schematic views of the measurement of the present invention. Fig. 7 is a graph showing the relationship between the film thickness and the transmittance of the present invention. Figure 8 is a comparison of actual measurement results of the present invention.

Claims (6)

The invention relates to a conductive film thickness detecting device, comprising: a loading platform having a receiving slot and a first port and a second port extending through the receiving slot; a light source disposed at the first port of the loading platform; a spectrometer disposed at the second port of the stage and capable of absorbing signals of 330 to 400 nm; and a filter disposed in the accommodating groove for filtering out light having a wavelength range of 200 nm to 400 nm, and The filter is attached to the light source. The conductive film thickness detecting device according to claim 1, wherein a first optical fiber is disposed between the first port of the stage and the light source. The conductive film thickness detecting device according to claim 1, wherein a second optical fiber is disposed between the second port of the stage and the spectrometer. The conductive film thickness detecting device according to claim 1, wherein the light source is a halogen lamp. The invention relates to a conductive film thickness detecting device, comprising: a loading platform having a receiving groove, and a first port and a second port extending through the receiving groove; a light source; a first optical fiber, one end of which is disposed on the loading platform a first port, the other end is connected to the light source; a filter is disposed in the receiving groove, and is configured to filter out light having a wavelength range of 200 nm to 400 nm and is connected to the first optical fiber; A signal of 330 to 400 nm is absorbed; and a second optical fiber is disposed at one end of the second port of the stage and connected to the spectrometer at the other end. The conductive film thickness detecting device according to claim 5, wherein the light source is a halogen lamp.