TWI618178B - Wafer handling device improved structure - Google Patents

Abstract

The invention relates to an improved structure of a wafer handling device. The main structure comprises a moving carrier with a plurality of moving wheels, a movable swing arm pivoted on the moving carrier and oscillated by a driving motor, and a pivoting swinging arm. The clamping device with the arm facing away from one end of the driving motor and a transmission component disposed in the movable swing arm include a fixed wheel, a rotating wheel disposed on one side of the clamping device for rotating the clamping device, and a connecting rotating wheel And the transmission belt of the fixed wheel, the movable swing arm and the rotating wheel are synchronously reversely rotated. Thereby, the moving wheel is used to increase the mobility convenience of the moving carrier, and the wafer is conveniently transferred to other devices, and the driving assembly is used to synchronously rotate the clamping device and the movable swing arm to maintain a stable level of the handling process.

Description

Wafer handling device improved structure

The present invention provides an improved structure of a wafer transfer device, and more particularly to an improved structure of a wafer transfer device which is simple in structure, good in mobility, and stably maintained in a conveyance process.

According to the development of industry and the rapid advancement of technology, automation technology is widely used in the modern manufacturing industry, and most of the automation technology is through the mechanical arm device for material movement or material processing.

For example, wafer and wafer loading wafer cassettes are often used to move from one operating platform to another during production. Also, to match different production needs, the two platforms sometimes do not lie on a single plane. Conventional wafer handling devices often use a three-dimensional motion platform to drive the claws to achieve product movement, or use a robotic arm to achieve product movement. However, these two transportation methods are easy to shake due to the handling process for the wafer, and the wafer is a high-precision technology product, and the smoothness must be ensured during the handling process, so the handling method still has its discomfort.

Furthermore, such a handling device is usually complicated in structure, large in size, and extremely inferior in mobility. If it is necessary to change the position after being placed at a designated position, it is necessary to carry it with a crane or the like, which is time consuming and laborious.

Therefore, when the above-mentioned wafer transfer device is used, the following problems and defects are indeed to be improved:

First, the structure is complex, the volume is large, and the mobility is extremely poor.

Second, the handling process is easy to shake and the degree of smoothness is low.

Therefore, how to solve the above-mentioned problems and deficiencies of the above-mentioned applications is the applicant who is interested in researching and improving the direction of the applicants and related manufacturers engaged in the industry.

Therefore, in view of the above-mentioned deficiencies, the applicant of the present invention collects relevant materials, and through multi-party evaluation and consideration, and through years of experience accumulated in the industry, through continuous trial and modification, the design is simple and mobile. Improved structure of the wafer handling device that is stable and maintains the level of handling Invention patents.

The main object of the present invention is to simplify the structural composition, impart good mobility, and ensure the smoothness of the operation of the wafer handling process.

In order to achieve the above object, the structure of the present invention comprises: a moving carrier having a plurality of moving wheels for free movement of the moving carrier on one side of the moving carrier, and pivoting a driving motor on the moving carrier An oscillating movable swing arm is disposed, and a clamping device is pivoted from one end of the movable swing arm away from the moving carrier, and a transmission component is disposed in the movable swing arm, the transmission component includes a coaxial with the driving motor a pivoting fixed wheel, a rotating wheel disposed on one side of the clamping device for rotating the clamping device, and a driving belt connecting the rotating wheel and the fixed wheel, the movable swing arm and the rotating wheel are synchronized Rotating, thereby maintaining the clamping device level; when the user performs the wafer handling operation by the present invention, the moving carrier can be moved to the carrying target side by the moving wheel, and then driven by the driving motor The movable swing arm rotates, and when the movable swing arm rotates, the fixed wheel does not rotate synchronously with the movable swing arm, so that the transmission belt is pinned by the fixed wheel and reversely rotated with the movable swing arm, thereby being moved by the transmission belt The rotating wheel rotates, so that the clamping device rotates synchronously and reversely with the rotation of the movable swing arm. Therefore, regardless of the swinging angle position of the movable swing arm, the clamping device is kept horizontally with the moving carrier to maintain the handling stability of the boat box. .

With the above technology, it is possible to make breakthroughs in the problems of complicated structure, large volume, extremely poor mobility, easy swaying of the handling process, and low smoothness of the conventional wafer handling device, and the practical progress of the above advantages is achieved. Sex.

1‧‧‧ wafer handling device

2‧‧‧Mobile Vehicles

21‧‧‧Mobile wheels

22‧‧‧ activity lift

221‧‧‧Pushing screw

222‧‧‧ Lift motor

23‧‧‧ Positioning stand

231‧‧‧Locking components

24‧‧ ‧ Positioning Department

3‧‧‧ Activity swing arm

31‧‧‧Drive motor

4‧‧‧Clamping device

5‧‧‧Transmission components

51‧‧‧Fixed wheel

52‧‧‧Rotating wheel

53‧‧‧ drive belt

54‧‧‧Adjustment wheel

6‧‧‧ Carrying device

7‧‧‧

The first figure is a perspective view of a preferred embodiment of the invention.

The second figure is a schematic structural view of the movable swing arm of the present invention.

The third figure is a schematic structural view of the movable lifting platform of the present invention.

The fourth figure is a schematic view (1) of the operation of the preferred embodiment of the present invention.

Figure 5 is a schematic view (2) of the operation of the preferred embodiment of the present invention.

Figure 6 is a schematic view (3) of the operation of the preferred embodiment of the present invention.

Figure 7 is a schematic view (4) of the operation of the preferred embodiment of the present invention.

In order to achieve the above objects and effects, the technical means and the structure of the present invention will be described in detail with reference to the preferred embodiments of the present invention.

Please refer to the first, second, third and fourth figures, which are perspective views of the preferred embodiment of the present invention, a schematic view of the movable swing arm, a schematic structural view of the movable lifting platform and an action diagram (1) It will be apparent from the drawings that the wafer handling device 1 of the present invention comprises: a moving carrier 2 comprising a movable lifting platform 22, and the movable lifting platform 22 comprises a pushing screw 221, and a lifting motor 222 disposed on a side of the jacking screw 221 for driving the jacking screw 221; at least one positioning leg 23 disposed on a side of the moving carrier 2, and the positioning bracket 23 includes a locking component 231 for adjusting the length of the positioning bracket 23; at least one positioning portion 24 defined on the moving carrier 2 for carrying and fixing an object 7; a plurality of the moving carrier The moving wheel 21 on the one side is for free movement of the mobile vehicle 2; the movable swing arm 3 pivoted on the moving carrier 2 and the movable lifting platform 22 is directly disposed on the movable lifting platform. The driving motor 31 on the 22 swings; the pivoting arm 3 is disposed away from the driving motor 3 a clamping device 4 at one end; and a transmission assembly 5 disposed in the movable swing arm 3, the transmission assembly 5 includes a fixed wheel 51 disposed coaxially with the driving motor 31, and a clamping device 4 disposed on the clamping device 4 A rotating wheel 52 for rotating the clamping device 4, a driving belt 53 connecting the rotating wheel 52 and the fixed wheel 51, and an adjusting wheel 54 disposed on a side of the driving belt 53 for adjusting the tightness of the driving belt 53 By the transmission belt 53, the movable swing arm 3 and the rotating wheel 52 are synchronously reversely rotated, thereby maintaining the clamping device 4 horizontal.

A carrier device 6 is coupled to the wafer transfer device 1 side, and the clamp device 4 is placed on the clamp device 4.

With the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the advantages of simple structure, good mobility, and stable maintenance of the handling process can be achieved, and the detailed explanation will be as follows. Description.

Please refer to the first to seventh figures at the same time, which are a perspective view of a preferred embodiment of the present invention, a schematic structural view of the movable swing arm, a structural schematic diagram of the movable lifting platform, a schematic diagram of the action (1), and a schematic diagram of the action (2) The operation diagram (3) and the operation diagram (4), when the above components are assembled, it can be clearly seen from the figure that the wafer carrier device 1 of the present invention is constructed on a moving carrier 2, so that it can be used when Freely moving to the side of a carrying device 6 by the moving wheel 21, and adjusting the positioning stand by the locking member 231 The length of 23 is used to fix the mobile carrier 2 to the side of the carrying device 6 and then cooperate with the movable swing arm 3 and the clamping device 4 for the clamping device 4 to place an object 7 (in this embodiment) The object 7 is a wafer boat box.

The actual transport operation is divided into two steps. First, it is the lifting operation of the movable lifting platform 22 and the positioning operation of the object 7 to be clamped. When the movable swing arm 3 is swung to the corresponding position of the positioning portion 24, the jacking screw 221 can be driven by the lifting motor 222, so that the jacking screw 221 drives the movable lifting platform 22 to descend, so that the clamping device 4 can be clamped. The object 7, and when the clamping operation is completed, the reverse driving movable lifting platform 22 is raised back to the original corresponding position height. Thereby, before the object 7 is transferred to the carrier device 6 or received back to the mobile carrier 2, the pairing operation is performed, and the stability and accuracy of the clamping and placing are ensured by the vertical lifting operation; It is a swing transfer action of the movable swing arm 3. After the movable lifting platform 22 is raised, the movable swing arm 3 is directly swung by a driving motor 31. At the same time, the fixed wheel 51 of the transmission assembly 5 is coaxially disposed with the driving motor 31, but does not rotate synchronously with the driving motor 31. Therefore, when the movable swing arm 3 swings in the forward direction, the fixed wheel 51 which should be rotated synchronously with the movable swing arm 3 becomes the reverse driving effect of the reverse driving belt 53 due to the fixing effect thereof, and also because the reverse rotation of the transmission belt 53 When the rotating wheel 52 is reversely rotated by the driving belt 53, the clamping device 4 on the side of the rotating wheel 52 is rotated in the reverse direction, thereby rotating the movable swing arm 3 and the clamping device 4 in opposite directions, thereby regardless of the activity. Regarding the swinging arm 3 swinging angular position, the holding device 4 is kept horizontal with the moving carrier 2 to maintain the handling stability of the wafer cassette.

Therefore, when the user wants to transport the object 7 from the moving carrier 2 to the carrying device 6, the swinging arm 3 is first swung to position the holding device 4 above the object 7 and then lifted by the activity. The lifting and lowering of the table 22 will be vertically clamped by the object 7, and then the object 7 will be transferred to the upper side of the carrying device 6 by the movable swing arm 3, and finally placed vertically and placed smoothly; otherwise, the object 7 will be sandwiched by the carrying device 6. It is transported to the positioning portion 24 of the mobile carrier 2, and the object 7 is transported to other target positions by moving the carrier 2.

However, the above description is only the preferred embodiment of the present invention, and thus it is not intended to limit the scope of the present invention. Therefore, the simple modification and equivalent structural changes of the present specification and the drawings should be treated similarly. It is included in the scope of the patent of the present invention and is combined with Chen Ming.

Therefore, referring to all the drawings, when using the present invention, compared with the conventional technology, the following advantages exist:

First, the mobility is good, and it is free to move to the side of the carrier device 6 to carry the wafer.

Second, with a simple transmission structure, the movable swing arm 3 and the clamping device 4 are synchronously rotated in the opposite direction, so that the clamp of the clamping device 4 is kept horizontal during the handling process.

In summary, the improved structure of the wafer handling device of the present invention can achieve its efficacy and purpose when it is used. Therefore, the present invention is an invention with excellent practicability, and is an application for conforming to the invention patent, and is proposed according to law. To apply, I hope that the trial committee will grant the invention as soon as possible to protect the applicant's hard work. If there is any doubt in the trial committee, please do not hesitate to give instructions. The creator will try his best to cooperate with him.

Claims (9)

An improved structure of a wafer handling device, the wafer handling device comprising: a moving carrier; a plurality of moving wheels disposed on one side of the moving carrier for free movement of the moving carrier; a pivoting movement The movable swing arm of the vehicle is directly oscillated by a driving motor; a clamping device pivoted from the movable swing arm away from one end of the driving motor; and a transmission component disposed in the movable swing arm, the transmission The assembly includes a fixed wheel disposed coaxially with the drive motor, a rotating wheel disposed on a side of the clamping device for rotating the clamping device, and a transmission belt connecting the rotating wheel and the fixed wheel to enable the activity The swing arm and the rotating wheel rotate in opposite directions synchronously, thereby maintaining the clamping device level. The improved structure of the wafer handling device of claim 1, wherein the moving carrier comprises a movable lifting platform, and the movable swing arm is pivotally disposed on the movable lifting platform. The improved structure of the wafer handling device according to the second aspect of the invention, wherein the movable lifting platform comprises a pushing screw and an lifting motor disposed on a side of the pushing screw for driving the pushing screw. The improved structure of the wafer handling device of claim 2, wherein the driving motor is disposed on the movable lifting platform. The wafer carrier device improved structure of claim 1, wherein the mobile carrier has at least one positioning stand on one side. The improved structure of the wafer handling device of claim 5, wherein the positioning frame comprises a locking component for adjusting the length of the positioning bracket. The wafer carrier device improved structure of claim 1, wherein the mobile carrier has at least one positioning portion for carrying and fixing an object. The improved structure of the wafer handling device according to claim 7, wherein the carrier handling device is coupled to a carrier device for the clamping device to place the object. The improved structure of the wafer handling device according to claim 1, wherein the transmission component comprises an adjusting wheel disposed on one side of the transmission belt for adjusting the tightness of the transmission belt.