TWM535399U - Improved wafer carrying device structure - Google Patents

Description

Wafer handling device improved structure

The present invention provides an improved structure of a wafer transfer device, and more particularly to an improved structure of a wafer transfer device which is simple in structure, good in mobility, and capable of maintaining a stable level during transportation.

According to the development of industry and the rapid advancement of technology, automation technology is widely used in the modern manufacturing industry, and most of the automation technology is through the mechanical arm device for material movement or material processing.

For example, wafer and wafer loading wafer cassettes are often used to move from one operating platform to another during production. Also, to match different production needs, the two platforms sometimes do not lie on a single plane. Conventional wafer handling devices often use a three-dimensional motion platform to drive the claws to achieve product movement, or use a robotic arm to achieve product movement. However, these two transportation methods are easy to shake due to the handling process for the wafer, and the wafer is a high-precision technology product, and the smoothness must be ensured during the handling process, so the handling method still has its discomfort.

Furthermore, such a handling device is usually complicated in structure, large in size, and extremely inferior in mobility. If it is necessary to change the position after being placed at a designated position, it is necessary to carry it with a crane or the like, which is time consuming and laborious.

Therefore, when the above-mentioned wafer transfer device is used, the following problems and defects are indeed to be improved:

First, the structure is complex, the volume is large, and the mobility is extremely poor.

Second, the handling process is easy to shake and the degree of smoothness is low.

Therefore, how to solve the above problems and deficiencies in the past, that is, the applicants of the new type and the relevant manufacturers engaged in this industry are eager to study the direction of improvement.

Therefore, in view of the above-mentioned shortcomings, the applicants of this new type have collected relevant information, and through multi-party evaluation and consideration, and through years of experience in the industry, through continuous trial and modification, they have designed such a simple structure and mobility. Improved structure of the wafer handling device that is stable and maintains the level of handling New patent holder.

The main purpose of the novel is to simplify the structural composition, impart good mobility, and ensure the smooth operation of the wafer handling process.

In order to achieve the above object, the structure of the present invention comprises: a moving carrier having a plurality of moving wheels for free movement of the moving carrier on one side of the moving carrier, and pivoting a driving motor on the moving carrier An oscillating movable swing arm is disposed, and a clamping device is pivoted from one end of the movable swing arm away from the moving carrier, and a transmission component is disposed in the movable swing arm, the transmission component includes a coaxial with the driving motor a pivoting fixed wheel, a rotating wheel disposed on one side of the clamping device for rotating the clamping device, and a driving belt connecting the rotating wheel and the fixed wheel, the movable swing arm and the rotating wheel are synchronized Rotating, thereby maintaining the clamping device to maintain the level; when the user performs the wafer handling operation by the present invention, the moving carrier can be moved to the carrying target side by the moving wheel, and then driven by the driving motor The movable swing arm rotates, and when the movable swing arm rotates, the fixed wheel does not rotate synchronously with the movable swing arm, so that the transmission belt is pinned by the fixed wheel and reversely rotated with the movable swing arm, thereby being moved by the transmission belt The rotating wheel rotates, so that the clamping device rotates synchronously and reversely with the rotation of the movable swing arm. Therefore, regardless of the swinging angle position of the movable swing arm, the clamping device is kept horizontally with the moving carrier to maintain the handling stability of the boat box. .

With the above technology, it is possible to make breakthroughs in the problems of complicated structure, large volume, extremely poor mobility, easy swaying of the handling process, and low smoothness of the conventional wafer handling device, and the practical progress of the above advantages is achieved. Sex.

1‧‧‧ wafer handling device

2‧‧‧Mobile Vehicles

21‧‧‧Mobile wheels

22‧‧‧ activity lift

221‧‧‧Pushing screw

222‧‧‧ Lift motor

23‧‧‧ Positioning stand

231‧‧‧Locking components

24‧‧ ‧ Positioning Department

3‧‧‧ Activity swing arm

31‧‧‧Drive motor

4‧‧‧Clamping device

5‧‧‧Transmission components

51‧‧‧Fixed wheel

52‧‧‧Rotating wheel

53‧‧‧ drive belt

54‧‧‧Adjustment wheel

6‧‧‧ Carrying device

7‧‧‧

The first figure is a perspective view of a preferred embodiment of the present invention.

The second figure is a schematic diagram of the structure of the new movable swing arm.

The third figure is a schematic diagram of the structure of the new movable lifting platform.

The fourth figure is a schematic diagram of the action of the preferred embodiment of the present invention (1).

The fifth figure is a schematic diagram of the action of the preferred embodiment of the present invention (2).

Figure 6 is a schematic view of the action of the preferred embodiment of the present invention (3).

Figure 7 is a schematic view of the action of the preferred embodiment of the present invention (4).

In order to achieve the above objects and effects, the technical means and structure adopted by the present invention are described in detail in the preferred embodiment of the present invention, and the features and functions thereof are as follows.

Please refer to the first, second, third and fourth figures, which are a perspective view of the preferred embodiment of the present invention, a schematic diagram of the structure of the movable swing arm, a schematic structural view of the movable lifting platform and an action diagram (1) It can be clearly seen from the figure that the wafer handling device 1 of the present invention comprises: a mobile carrier 2 comprising a movable lifting platform 22, and the movable lifting platform 22 comprises a pushing screw 221, and a lifting motor 222 disposed on a side of the jacking screw 221 for driving the jacking screw 221; at least one positioning leg 23 disposed on a side of the moving carrier 2, and the positioning bracket 23 includes a locking component 231 for adjusting the length of the positioning bracket 23; at least one positioning portion 24 defined on the moving carrier 2 for carrying and fixing an object 7; a plurality of the moving carrier The moving wheel 21 on the one side is for free movement of the mobile vehicle 2; the movable swing arm 3 pivoted on the moving carrier 2 and the movable lifting platform 22 is directly disposed on the movable lifting platform. The driving motor 31 on the 22 swings; the pivoting arm 3 is disposed away from the driving motor 3 a clamping device 4 at one end; and a transmission assembly 5 disposed in the movable swing arm 3, the transmission assembly 5 includes a fixed wheel 51 disposed coaxially with the driving motor 31, and a clamping device 4 disposed on the clamping device 4 A rotating wheel 52 for rotating the clamping device 4, a driving belt 53 connecting the rotating wheel 52 and the fixed wheel 51, and an adjusting wheel 54 disposed on a side of the driving belt 53 for adjusting the tightness of the driving belt 53 By the transmission belt 53, the movable swing arm 3 and the rotating wheel 52 are synchronously reversely rotated, thereby maintaining the clamping device 4 horizontal.

A carrier device 6 is coupled to the wafer transfer device 1 side, and the clamp device 4 is placed on the clamp device 4.

With the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the advantages of simple structure, good mobility, and stable maintenance of the handling process can be achieved, and the detailed explanation will be as follows. Description.

Please refer to the first to seventh figures at the same time, which is a perspective view of the preferred embodiment of the present invention, a schematic diagram of the structure of the movable swing arm, a schematic structural view of the movable lifting platform, a schematic diagram of the action (1), and a schematic diagram of the action (2) The operation diagram (3) and the operation diagram (4), when the above components are assembled, it can be clearly seen from the figure that the wafer carrier apparatus 1 of the present invention is constructed on a mobile vehicle 2, so that it can be used when Freely moving to the side of a carrying device 6 by the moving wheel 21, and adjusting the positioning stand by the locking member 231 The length of 23 is used to fix the mobile carrier 2 to the side of the carrying device 6 and then cooperate with the movable swing arm 3 and the clamping device 4 for the clamping device 4 to place an object 7 (in this embodiment) The object 7 is a wafer boat box.

The actual transport operation is divided into two steps. First, it is the lifting operation of the movable lifting platform 22 and the positioning operation of the object 7 to be clamped. When the movable swing arm 3 is swung to the corresponding position of the positioning portion 24, the jacking screw 221 can be driven by the lifting motor 222, so that the jacking screw 221 drives the movable lifting platform 22 to descend, so that the clamping device 4 can be clamped. The object 7, and when the clamping operation is completed, the reverse driving movable lifting platform 22 is raised back to the original corresponding position height. Thereby, before the object 7 is transferred to the carrier device 6 or received back to the mobile carrier 2, the pairing operation is performed, and the stability and accuracy of the clamping and placing are ensured by the vertical lifting operation; It is a swing transfer action of the movable swing arm 3. After the movable lifting platform 22 is raised, the movable swing arm 3 is directly swung by a driving motor 31. At the same time, the fixed wheel 51 of the transmission assembly 5 is coaxially disposed with the driving motor 31, but does not rotate synchronously with the driving motor 31. Therefore, when the movable swing arm 3 swings in the forward direction, the fixed wheel 51 which should be rotated synchronously with the movable swing arm 3 becomes the reverse driving effect of the reverse driving belt 53 due to the fixing effect thereof, and also because the reverse rotation of the transmission belt 53 When the rotating wheel 52 is reversely rotated by the driving belt 53, the clamping device 4 on the side of the rotating wheel 52 is rotated in the reverse direction, thereby rotating the movable swing arm 3 and the clamping device 4 in opposite directions, thereby regardless of the activity. Regarding the swinging arm 3 swinging angular position, the holding device 4 is kept horizontal with the moving carrier 2 to maintain the handling stability of the wafer cassette.

Therefore, when the user wants to transport the object 7 from the moving carrier 2 to the carrying device 6, the swinging arm 3 is first swung to position the holding device 4 above the object 7 and then lifted by the activity. The lifting and lowering of the table 22 will be vertically clamped by the object 7, and then the object 7 will be transferred to the upper side of the carrying device 6 by the movable swing arm 3, and finally placed vertically and placed smoothly; otherwise, the object 7 will be sandwiched by the carrying device 6. It is transported to the positioning portion 24 of the mobile carrier 2, and the object 7 is transported to other target positions by moving the carrier 2.

However, the above description is only the preferred embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, all the simple modifications and equivalent structural changes that are made by using the present specification and the drawings are the same. It is included in the scope of this new patent and is given to Chen Ming.

Therefore, please refer to all the drawings, when compared with the conventional technology, the present invention has the following advantages:

First, the mobility is good, and it is free to move to the side of the carrier device 6 to carry the wafer.

Second, with a simple transmission structure, the movable swing arm 3 and the clamping device 4 are synchronously rotated in the opposite direction, so that the clamp of the clamping device 4 is kept horizontal during the handling process.

In summary, the improved structure of the wafer handling device of the present invention can achieve its efficacy and purpose when used. Therefore, the novel is a new type of application with excellent practicability, which is in accordance with the requirements of the new patent. To apply, I hope that the trial committee will grant this new type as soon as possible to protect the applicant's hard work. If there is any doubt in the trial committee, please do not hesitate to give instructions, the creator will try his best to cooperate and feel good.

2‧‧‧Mobile Vehicles

21‧‧‧Mobile wheels

23‧‧‧ Positioning stand

231‧‧‧Locking components

3‧‧‧ Activity swing arm

4‧‧‧Clamping device

5‧‧‧Transmission components

51‧‧‧Fixed wheel

52‧‧‧Rotating wheel

53‧‧‧ drive belt

54‧‧‧Adjustment wheel

Claims (9)

An improved structure of a wafer handling device, the wafer handling device comprising: a moving carrier; a plurality of moving wheels disposed on one side of the moving carrier for free movement of the moving carrier; a pivoting movement The movable swing arm of the vehicle is directly oscillated by a driving motor; a clamping device pivoted from the movable swing arm away from one end of the driving motor; and a transmission component disposed in the movable swing arm, the transmission The assembly includes a fixed wheel disposed coaxially with the drive motor, a rotating wheel disposed on a side of the clamping device for rotating the clamping device, and a transmission belt connecting the rotating wheel and the fixed wheel to enable the activity The swing arm and the rotating wheel rotate in opposite directions synchronously, thereby maintaining the clamping device level. The improved structure of the wafer handling device of claim 1, wherein the moving carrier comprises a movable lifting platform, and the movable swing arm is pivotally disposed on the movable lifting platform. The improved structure of the wafer handling device according to the second aspect of the invention, wherein the movable lifting platform comprises a pushing screw and an lifting motor disposed on a side of the pushing screw for driving the pushing screw. The improved structure of the wafer handling device of claim 2, wherein the driving motor is disposed on the movable lifting platform. The wafer carrier device improved structure of claim 1, wherein the mobile carrier has at least one positioning stand on one side. The improved structure of the wafer handling device of claim 5, wherein the positioning frame comprises a locking component for adjusting the length of the positioning bracket. The wafer carrier device improved structure of claim 1, wherein the mobile carrier has at least one positioning portion for carrying and fixing an object. The improved structure of the wafer handling device according to claim 7, wherein the carrier handling device is coupled to a carrier device for the clamping device to place the object. The improved structure of the wafer handling device according to claim 1, wherein the transmission component comprises an adjusting wheel disposed on one side of the transmission belt for adjusting the tightness of the transmission belt.