TWI615678B - Photosensitive resin composition, black column spacer using the same, and color filter - Google Patents

Photosensitive resin composition, black column spacer using the same, and color filter Download PDF

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TWI615678B
TWI615678B TW105143260A TW105143260A TWI615678B TW I615678 B TWI615678 B TW I615678B TW 105143260 A TW105143260 A TW 105143260A TW 105143260 A TW105143260 A TW 105143260A TW I615678 B TWI615678 B TW I615678B
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resin composition
photosensitive resin
weight
pigment
photopolymerization initiator
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TW201732432A (en
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柳娥凜
金煜
金貞延
朴眞佑
李俊昊
崔玄武
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三星Sdi股份有限公司
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials For Photolithography (AREA)

Abstract

提供一種感光樹脂組成物、藉由使用所述感光樹脂組成物而製造的黑色柱狀間隙物及包括所述黑色柱狀間隙物的彩色濾光片,所述感光樹脂組成物包含:(A)著色劑,在360奈米至410奈米下具有最大透射率;(B)光聚合起始劑,在360奈米至410奈米下具有最大吸光度;(C)光可聚合單體;以及(D)溶劑。Provided is a photosensitive resin composition, a black columnar spacer manufactured by using the photosensitive resin composition, and a color filter including the black columnar spacer, the photosensitive resin composition comprising: (A) a colorant having a maximum transmittance at 360 nm to 410 nm; (B) a photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm; (C) a photopolymerizable monomer; D) Solvent.

Description

感光樹脂組成物、使用其的黑色柱狀間隙物及彩色濾光片Photosensitive resin composition, black column spacers and color filters using the same

[相關申請案的交叉參考] 本申請案主張於2016年3月8日在韓國智慧財產局提出申請的韓國專利申請案第10-2016-0027786號的優先權及權利,所述韓國專利申請案的全部內容併入本案供參考。[CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the priority and the benefit of the Korean Patent Application No. 10-2016-0027786, filed on March 8, 2016 in the Korean Intellectual Property Office, the Korean Patent Application The entire contents of this article are incorporated by reference.

本發明是有關於一種感光樹脂組成物、使用其的黑色柱狀間隙物及包括所述黑色柱狀間隙物的彩色濾光片。The present invention relates to a photosensitive resin composition, a black columnar spacer using the same, and a color filter including the black columnar spacer.

顯示裝置中必需使用感光樹脂組成物,例如彩色濾光片、液晶顯示材料、有機發光二極體或顯示面板材料等。舉例而言,彩色液晶顯示器等彩色濾光片需要在例如紅色、綠色、藍色等著色層之間的邊界上具有黑色矩陣,以增強顯示對比度或發色團效果(chromophore effect)。此種擋光層可主要由感光樹脂組成物形成。It is necessary to use a photosensitive resin composition such as a color filter, a liquid crystal display material, an organic light emitting diode, or a display panel material in the display device. For example, a color filter such as a color liquid crystal display needs to have a black matrix at a boundary between colored layers such as red, green, blue, etc. to enhance display contrast or chromophore effect. Such a light blocking layer can be mainly formed of a photosensitive resin composition.

近來,已嘗試使用黑色矩陣材料作為支撐其間具有液晶層的兩個薄膜電晶體(TFT)與彩色濾光片(C/F)基板的柱狀間隙物,且此種柱狀間隙物被稱作黑色柱狀間隙物。Recently, attempts have been made to use a black matrix material as a columnar spacer supporting two thin film transistor (TFT) and color filter (C/F) substrates having a liquid crystal layer therebetween, and such a column spacer is called Black columnar spacer.

所述黑色柱狀間隙物選擇性地使用能夠增大光學密度(optical density,OD)的顏料來獲得擋光性質,但由於紫外線(UV)透射率亦劣化,因此所述黑色柱狀間隙物可能不利於光固化。具體而言,黑色柱狀間隙物的最常用顏料(碳黑)具有優異的擋光性質,而紫外線透射率為0且因此具有使製程裕度(process margin)劣化的缺點,乃因僅發生表面固化而未發生僅在黑暗中進行的內部固化,便執行顯影。The black columnar spacer selectively uses a pigment capable of increasing an optical density (OD) to obtain a light blocking property, but since the ultraviolet (UV) transmittance is also deteriorated, the black columnar spacer may Not conducive to light curing. In particular, the most commonly used pigment (carbon black) of the black columnar spacer has excellent light blocking properties, and the ultraviolet transmittance is 0 and thus has a disadvantage of deteriorating the process margin because only the surface occurs. Development was performed by curing without internal solidification performed only in the dark.

因此,已對能夠解決所述缺點的黑色柱狀間隙物的感光樹脂組成物進行了研究。Therefore, research has been conducted on a photosensitive resin composition of a black columnar spacer which can solve the above disadvantages.

一實施例提供一種能夠保證在可見光區域中的擋光性質且同時保證在紫外線(ultraviolet,UV)區域中的透射率的感光樹脂組成物。An embodiment provides a photosensitive resin composition capable of ensuring light blocking properties in a visible light region while ensuring transmittance in an ultraviolet (UV) region.

另一實施例提供一種使用所述感光樹脂組成物的黑色柱狀間隙物。Another embodiment provides a black columnar spacer using the photosensitive resin composition.

又一實施例提供一種包括所述黑色柱狀間隙物的彩色濾光片。Yet another embodiment provides a color filter including the black columnar spacer.

一實施例提供一種感光樹脂組成物,所述感光樹脂組成物包含:(A)著色劑,在360奈米至410奈米下具有最大透射率;(B)光聚合起始劑,在360奈米至410奈米下具有最大吸光度;(C)光可聚合單體;以及(D)溶劑。An embodiment provides a photosensitive resin composition comprising: (A) a colorant having a maximum transmittance at 360 nm to 410 nm; and (B) a photopolymerization initiator at 360 The maximum absorbance at meters to 410 nm; (C) photopolymerizable monomer; and (D) solvent.

所述著色劑可為顏料、染料或其組合。The colorant can be a pigment, a dye, or a combination thereof.

所述顏料可為有機顏料。The pigment may be an organic pigment.

所述有機顏料可包含選自紅色顏料、綠色顏料、藍色顏料及黃色顏料中的兩個或更多的混合物。The organic pigment may comprise a mixture of two or more selected from the group consisting of a red pigment, a green pigment, a blue pigment, and a yellow pigment.

所述光聚合起始劑可在370奈米至410奈米下具有最大吸光度。The photopolymerization initiator may have a maximum absorbance at from 370 nm to 410 nm.

所述光聚合起始劑可為肟系化合物。The photopolymerization initiator may be a lanthanide compound.

所述感光樹脂組成物可更包含在310奈米至360奈米下具有最大吸光度的光聚合起始劑。The photosensitive resin composition may further comprise a photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm.

在310奈米至360奈米下具有最大吸光度的所述光聚合起始劑可為三嗪系化合物或苯乙酮系化合物。The photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm may be a triazine compound or an acetophenone compound.

可以1:4至4:1的重量比包含在360奈米至410奈米下具有最大吸光度的光聚合起始劑及在310奈米至360奈米下具有最大吸光度的光聚合起始劑。The photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm and a photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm may be contained in a weight ratio of 1:4 to 4:1.

以所述感光樹脂組成物的總量計,可以0.01重量%至5重量%的量包含在310奈米至360奈米下具有最大吸光度的光聚合起始劑。The photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm may be contained in an amount of from 0.01% by weight to 5% by weight based on the total amount of the photosensitive resin composition.

所述感光樹脂組成物可更包含(E)黏合劑樹脂。The photosensitive resin composition may further comprise (E) a binder resin.

所述黏合劑樹脂可包括丙烯酸系黏合劑樹脂、卡多系黏合劑樹脂或其組合。The binder resin may include an acrylic binder resin, a card multi-adhesive resin, or a combination thereof.

以所述感光樹脂組成物的總量計,所述感光樹脂組成物可包含:5重量%至50重量%的所述著色劑;0.1重量%至5重量%的在360奈米至410奈米下具有最大吸光度的光聚合起始劑;1重量%至10重量%的所述光可聚合單體;5重量%至20重量%的所述黏合劑樹脂;以及餘量的所述溶劑。The photosensitive resin composition may include: 5% by weight to 50% by weight of the coloring agent; and 0.1% by weight to 5% by weight of 360 nm to 410 nm, based on the total amount of the photosensitive resin composition The photopolymerization initiator having the maximum absorbance; 1% by weight to 10% by weight of the photopolymerizable monomer; 5% by weight to 20% by weight of the binder resin; and the balance of the solvent.

所述感光樹脂組成物可更包含以下添加劑:丙二酸、3-胺基-1,2-丙二醇、矽烷系偶合劑、調平劑、氟系界面活性劑、自由基聚合起始劑或其組合。The photosensitive resin composition may further comprise the following additives: malonic acid, 3-amino-1,2-propanediol, decane-based coupling agent, leveling agent, fluorine-based surfactant, radical polymerization initiator or combination.

另一實施例提供一種藉由將所述感光樹脂組成物曝光及顯影而製造的黑色柱狀間隙物。Another embodiment provides a black columnar spacer manufactured by exposing and developing the photosensitive resin composition.

又一實施例提供一種包括所述黑色柱狀間隙物的彩色濾光片。Yet another embodiment provides a color filter including the black columnar spacer.

在以下詳細說明中包括本發明的其他實施例。Other embodiments of the invention are included in the detailed description which follows.

根據一實施例的所述感光樹脂組成物提供一種黑色柱狀間隙物及包括所述黑色柱狀間隙物的彩色濾光片,所述黑色柱狀間隙物在可見光區域具有擋光性質且具有製程裕度,所述彩色濾光片因黑色著色劑而在可見光區域中具有擋光性質且在紫外線(UV)區域中具有光透射率。The photosensitive resin composition according to an embodiment provides a black columnar spacer and a color filter including the black columnar spacer, the black column spacer having a light blocking property in a visible light region and having a process The margin, the color filter has a light blocking property in a visible light region and a light transmittance in an ultraviolet (UV) region due to a black colorant.

在下文中,詳細闡述本發明的實施例。然而,該些實施例為示範性的,本發明並非僅限於此,且本發明由申請專利範圍的範圍來界定。In the following, embodiments of the invention are explained in detail. However, the embodiments are exemplary, and the invention is not limited thereto, and the invention is defined by the scope of the claims.

在本說明書中,當不另外提供定義時,「烷基」是指C1至C20烷基,「烯基」是指C2至C20烯基,「環烯基」是指C3至C20環烯基,「雜環烯基」是指C3至C20雜環烯基,術語「芳基」是指C6至C20芳基,「芳基烷基」是指C6至C20芳基烷基,「伸烷基」是指C1至C20伸烷基,「伸芳基」是指C6至C20伸芳基,「烷基伸芳基」是指C6至C20烷基伸芳基,「伸雜芳基」是指C3至C20伸雜芳基,且「伸烷氧基」是指C1至C20伸烷氧基。In the present specification, when no definition is provided, "alkyl" means a C1 to C20 alkyl group, "alkenyl" means a C2 to C20 alkenyl group, and "cycloalkenyl" means a C3 to C20 cycloalkenyl group. "Heterocyclenyl" means C3 to C20 heterocycloalkenyl, the term "aryl" means C6 to C20 aryl, "arylalkyl" means C6 to C20 arylalkyl, "alkyl" Refers to C1 to C20 alkylene, "extended aryl" means C6 to C20 extended aryl, "alkyl extended aryl" means C6 to C20 alkyl extended aryl, "extended aryl" means C3 to C20 Heteroaryl, and "alkylalkoxy" means C1 to C20 alkoxy.

在本說明書中,當不另外提供定義時,「經取代」是指經以下取代基取代以替代至少一個氫:鹵素原子(F、Cl、Br、I)、羥基、C1至C20烷氧基、硝基、氰基、胺基、亞胺基、疊氮基、脒基、肼基、腙基、羰基、胺甲醯基、硫醇基、酯基、醚基、羧基或其鹽、磺酸基或其鹽、磷酸基或其鹽、C1至C20烷基、C2至C20烯基、C2至C20炔基、C6至C20芳基、C3至C20環烷基、C3至C20環烯基、C3至C20環炔基、C2至C20雜環烷基、C2至C20雜環烯基、C2至C20雜環炔基、C3至C20雜芳基或其組合。 In the present specification, when a definition is not additionally provided, "substituted" means substitution of at least one hydrogen by a substituent: a halogen atom (F, Cl, Br, I), a hydroxyl group, a C1 to C20 alkoxy group, Nitro, cyano, amine, imido, azide, sulfhydryl, fluorenyl, fluorenyl, carbonyl, amine carbaryl, thiol, ester, ether, carboxyl or its salts, sulfonic acid Or a salt thereof, a phosphate group or a salt thereof, a C1 to C20 alkyl group, a C2 to C20 alkenyl group, a C2 to C20 alkynyl group, a C6 to C20 aryl group, a C3 to C20 cycloalkyl group, a C3 to C20 cycloalkenyl group, C3 To C20 cycloalkynyl, C2 to C20 heterocycloalkyl, C2 to C20 heterocycloalkenyl, C2 to C20 heterocycloalkynyl, C3 to C20 heteroaryl or a combination thereof.

在本說明書中,當不另外提供具體定義時,「雜」是指在一個官能基中包含選自由N、O、S及P組成的群組中的至少一個雜原子且其餘為碳者。 In the present specification, when a specific definition is not additionally provided, "hetero" means that at least one hetero atom selected from the group consisting of N, O, S, and P is contained in one functional group and the remainder is carbon.

在本說明書中,當不另外提供具體定義時,「(甲基)丙烯酸酯」是指「丙烯酸酯」及「甲基丙烯酸酯」兩者,且「(甲基)丙烯酸」是指「丙烯酸」及「甲基丙烯酸」。 In the present specification, "(meth)acrylate" means both "acrylate" and "methacrylate", and "(meth)acrylic" means "acrylic acid" when no specific definition is provided. And "methacrylic acid".

在本說明書中,當不另外提供具體定義時,術語「組合」是指混合或共聚合。 In the present specification, the term "combination" means mixing or copolymerization when a specific definition is not additionally provided.

在本說明書中,當不另外提供具體定義時,不飽和鍵包括其他原子之間的鍵,例如羰基鍵或偶氮基鍵以及碳-碳原子之間的多鍵(multi-bond)。 In the present specification, when a specific definition is not additionally provided, the unsaturated bond includes a bond between other atoms, such as a carbonyl bond or an azo bond, and a multi-bond between carbon-carbon atoms.

在本說明書中,卡多系樹脂(cardo-based resin)是指在骨架中包含選自化學式1-1至化學式1-11中的至少一個官能基的樹脂。In the present specification, a cardo-based resin refers to a resin containing at least one functional group selected from the chemical formula 1-1 to the chemical formula 1-11 in the skeleton.

在本說明書中,當不另外提供具體定義時,最大透射率及最大吸光度範圍是指300奈米至700奈米的區域範圍,而不考慮小於300奈米的範圍與大於700奈米的範圍。In the present specification, when a specific definition is not additionally provided, the maximum transmittance and the maximum absorbance range refer to a region ranging from 300 nm to 700 nm, regardless of a range of less than 300 nm and a range of more than 700 nm.

在本說明書中,當不另外提供具體定義時,「*」指示連接相同或不同原子或化學式的點。In the present specification, when a specific definition is not additionally provided, "*" indicates a point connecting the same or different atoms or chemical formulas.

根據一實施例的感光樹脂組成物包含:(A)著色劑;(B)光聚合起始劑;(C)光可聚合單體;以及(D)溶劑,其中所述著色劑在360奈米至410奈米下具有最大透射率,且所述光聚合起始劑在360奈米至410奈米下具有最大吸光度。The photosensitive resin composition according to an embodiment comprises: (A) a colorant; (B) a photopolymerization initiator; (C) a photopolymerizable monomer; and (D) a solvent, wherein the colorant is at 360 nm The maximum transmittance is up to 410 nm, and the photopolymerization initiator has a maximum absorbance at 360 nm to 410 nm.

一種用於傳統黑色矩陣或黑色柱狀間隙物的感光樹脂組成物包含黑色顏料(例如具有高光學密度的無機顏料(例如,碳黑))以達成優異的擋光性質。然而,所述黑色顏料(例如碳黑)雖具有改良的擋光性質但具有在紫外線(UV)區域中顯著減小的透射率,因此製程裕度無法變大。A photosensitive resin composition for a conventional black matrix or black columnar spacer contains a black pigment (for example, an inorganic pigment having a high optical density (for example, carbon black)) to achieve excellent light blocking properties. However, the black pigment (for example, carbon black) has improved light blocking properties but has a significantly reduced transmittance in the ultraviolet (UV) region, so the process margin cannot be increased.

然而,根據一實施例的感光樹脂組成物可提供一種藉由以下方式而同時具有感光性質及擋光性質的黑色柱狀間隙物:包含在360奈米至410奈米下具有最大透射率的著色劑以及在360奈米至410奈米下具有最大吸光度的光聚合起始劑。However, the photosensitive resin composition according to an embodiment can provide a black columnar spacer having both photosensitive properties and light blocking properties by including coloring having a maximum transmittance at 360 nm to 410 nm. And a photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm.

在下文中,具體闡述每一組分。 A )著色劑 In the following, each component is specifically illustrated. ( A ) colorant

著色劑可包含顏料、染料或其組合,且在紫外線(UV)區域中具有高透射率並同時在可見光區域中具有高擋光性質。The colorant may contain a pigment, a dye, or a combination thereof, and has high transmittance in an ultraviolet (UV) region while having high light blocking properties in a visible light region.

舉例而言,所述著色劑可在300奈米至410奈米(例如,360奈米至410奈米)下具有最大透射率。For example, the colorant can have a maximum transmission at 300 nm to 410 nm (eg, 360 nm to 410 nm).

在製備感光樹脂組成物期間,當所述著色劑與在300奈米至410奈米(例如,360奈米至410奈米)下具有最大吸光度的後述光聚合起始劑一起使用時,在可見光區域中的擋光性質得到改良,且同時光可固化性得到提高。During the preparation of the photosensitive resin composition, when the coloring agent is used together with a photopolymerization initiator described later having a maximum absorbance at 300 nm to 410 nm (for example, 360 nm to 410 nm), in visible light The light blocking properties in the area are improved and at the same time the photocurability is improved.

舉例而言,著色劑可為有機顏料、染料或其組合。For example, the colorant can be an organic pigment, a dye, or a combination thereof.

舉例而言,所述有機顏料可為選自紅色顏料、綠色顏料、藍色顏料及黃色顏料中的兩個或更多的混合物。舉例而言,所述有機顏料可為紅色顏料、綠色顏料及藍色顏料的組合。舉例而言,所述有機顏料可為紅色顏料、藍色顏料及黃色顏料的組合。For example, the organic pigment may be a mixture of two or more selected from the group consisting of a red pigment, a green pigment, a blue pigment, and a yellow pigment. For example, the organic pigment may be a combination of a red pigment, a green pigment, and a blue pigment. For example, the organic pigment may be a combination of a red pigment, a blue pigment, and a yellow pigment.

當使用例如苯胺黑、苝黑、鈦黑、碳黑等無機顏料作為著色劑時,可達成優異的擋光性質,但無法使製程裕度最大化,乃因在僅表面固化而內部未固化後便進行顯影。When an inorganic pigment such as aniline black, phthalocyanine, titanium black, or carbon black is used as a coloring agent, excellent light blocking properties can be achieved, but process margin cannot be maximized because the surface is cured and the interior is not cured. Development is carried out.

紅色顏料可為比色指數(color index)中的C.I.紅色顏料179、C.I.紅色顏料254、C.I.紅色顏料255、C.I.紅色顏料264、C.I.紅色顏料270、C.I.紅色顏料272、C.I.紅色顏料177、C.I.紅色顏料89等,且紅色顏料可單獨使用或者以兩個或更多的混合物形式使用,但並非僅限於此。The red pigment may be CI red pigment 179, CI red pigment 254, CI red pigment 255, CI red pigment 264, CI red pigment 270, CI red pigment 272, CI red pigment 177, CI red in the color index. Pigment 89 or the like, and the red pigment may be used singly or in the form of a mixture of two or more, but is not limited thereto.

綠色顏料可為例如C.I.綠色顏料59、C.I.綠色顏料58、C.I.綠色顏料36、C.I.綠色顏料7等經鹵素取代的銅酞青顏料,且綠色顏料可單獨使用或者以兩個或更多的混合物形式使用,但並非僅限於此。The green pigment may be a halogen-substituted copper indigo pigment such as CI green pigment 59, CI green pigment 58, CI green pigment 36, CI green pigment 7, etc., and the green pigment may be used singly or in the form of a mixture of two or more. Use, but not limited to this.

藍色顏料可為比色指數中的C.I.藍色顏料15:6、C.I.藍色顏料15:0、C.I.藍色顏料15:1、C.I.藍色顏料15:2、C.I.藍色顏料15:3、C.I.藍色顏料15:4、C.I.藍色顏料15:5、C.I.藍色顏料15:6、C.I.藍色顏料16,且藍色顏料可單獨使用或者以兩個或更多的混合物形式使用,但並非僅限於此。The blue pigment may be a CI blue pigment 15:6 in a colorimetric index, a CI blue pigment 15:0, a CI blue pigment 15:1, a CI blue pigment 15:2, a CI blue pigment 15:3, CI blue pigment 15:4, CI blue pigment 15:5, CI blue pigment 15:6, CI blue pigment 16, and the blue pigment may be used alone or in the form of a mixture of two or more, but Not limited to this.

黃色顏料可為比色指數中的異吲哚啉系顏料(例如C.I.黃色顏料139)、喹酞酮系顏料(例如C.I.黃色顏料138)、鎳錯合物顏料(例如C.I.黃色顏料150、C.I.黃色顏料100)等,且黃色顏料可單獨使用或者以兩個或更多的混合物形式使用,但並非僅限於此。The yellow pigment may be an isoporphyrin pigment (for example, CI yellow pigment 139), a quinophthalone pigment (for example, CI yellow pigment 138), a nickel complex pigment (for example, CI yellow pigment 150, CI yellow) in the color index. Pigment 100) and the like, and the yellow pigment may be used singly or in the form of a mixture of two or more, but is not limited thereto.

當著色劑為顏料時,可與所述顏料一起使用分散劑以分散所述顏料。具體而言,所述顏料可利用分散劑而在表面上進行預處理或與所述分散劑一起添加,以製備組成物。When the colorant is a pigment, a dispersing agent may be used together with the pigment to disperse the pigment. Specifically, the pigment may be pretreated on the surface with a dispersing agent or added together with the dispersing agent to prepare a composition.

分散劑可為非離子型分散劑、陰離子型分散劑、陽離子型分散劑等。分散劑的具體實例可為聚烷二醇及其酯、聚氧化烯烴、多元醇酯環氧烷加成產物、醇環氧烷加成產物、磺酸酯、磺酸鹽、羧酸酯、羧酸鹽、烷基醯胺環氧烷加成產物、烷基胺等,且該些分散劑可單獨使用或者以兩個或更多的混合物形式使用。The dispersant may be a nonionic dispersant, an anionic dispersant, a cationic dispersant or the like. Specific examples of the dispersant may be a polyalkylene glycol and its ester, a polyalkylene oxide, a polyol ester alkylene oxide addition product, an alcohol alkylene oxide addition product, a sulfonate, a sulfonate, a carboxylate, a carboxylate The acid salt, the alkylguanamine alkylene oxide addition product, the alkylamine or the like, and the dispersing agents may be used singly or in the form of a mixture of two or more.

分散劑的市售實例可包括由畢克有限公司(BYK Co., Ltd.)製作的迪斯帕畢克(DISPERBYK)-101、DISPERBYK-130、DISPERBYK-140、DISPERBYK-160、DISPERBYK-161、DISPERBYK-162、DISPERBYK-163、DISPERBYK-164、DISPERBYK-165、DISPERBYK-166、DISPERBYK-170、DISPERBYK-171、DISPERBYK-182、DISPERBYK-2000、DISPERBYK-2001;由埃夫卡化學公司(EFKA Chemicals Co.)製作的埃夫卡(EFKA)-47、EFKA-47EA、EFKA-48、EFKA-49、EFKA-100、EFKA-400、EFKA-450;由澤尼卡公司(Zeneka Co.)製作的索思帕(Solsperse)5000、Solsperse 12000、Solsperse 13240、Solsperse 13940、Solsperse 17000、Solsperse 20000、Solsperse 24000GR、Solsperse 27000、Solsperse 28000等;或由味之素公司(Ajinomoto Inc.)製作的PB711、PB821等。Commercially available examples of dispersants may include DISPERBYK-101, DISPERBYK-130, DISPERBYK-140, DISPERBYK-160, DISPERBYK-161, manufactured by BYK Co., Ltd. DISPERBYK-162, DISPERBYK-163, DISPERBYK-164, DISPERBYK-165, DISPERBYK-166, DISPERBYK-170, DISPERBYK-171, DISPERBYK-182, DISPERBYK-2000, DISPERBYK-2001; by EFKA Chemicals Co .) produced by EFKA-47, EFKA-47EA, EFKA-48, EFKA-49, EFKA-100, EFKA-400, EFKA-450; manufactured by Zeneka Co. Solsperse 5000, Solsperse 12000, Solsperse 13240, Solsperse 13940, Solsperse 17000, Solsperse 20000, Solsperse 24000 GR, Solsperse 27000, Solsperse 28000, etc.; or PB711, PB821, etc., manufactured by Ajinomoto Inc.

以感光性樹脂組成物的總量計,可以0.1重量%至15重量%的量包含分散劑。當包含處於所述範圍內的分散劑時,所述組成物因在製造黑色柱狀間隙物期間的改良分散性質而具有優異的穩定性、顯影性及圖案形成能力。The dispersing agent may be contained in an amount of 0.1% by weight to 15% by weight based on the total amount of the photosensitive resin composition. When the dispersant in the range is contained, the composition has excellent stability, developability, and pattern forming ability due to improved dispersion properties during the production of the black columnar spacer.

可使用水溶性無機鹽及濕潤劑對所述顏料進行預處理。當對所述顏料進行預處理時,所述顏料的平均粒徑可變得更精細。The pigment can be pretreated with a water soluble inorganic salt and a wetting agent. When the pigment is pretreated, the average particle diameter of the pigment may become finer.

可藉由以水溶性無機鹽及濕潤劑對所述顏料進行捏合以及然後將所捏合顏料進行過濾及洗滌而執行預處理。The pretreatment can be carried out by kneading the pigment with a water-soluble inorganic salt and a wetting agent and then filtering and washing the kneaded pigment.

所述捏合可在40℃至100℃的溫度下執行,且可藉由在利用水等洗滌掉無機鹽之後對所述顏料進行過濾而執行所述過濾及洗滌。The kneading can be performed at a temperature of 40 ° C to 100 ° C, and the filtration and washing can be performed by filtering the pigment after washing off the inorganic salt with water or the like.

水溶性無機鹽的實例可為氯化鈉、氯化鉀等,但並非僅限於此。濕潤劑可使得所述顏料與水溶性無機鹽均勻地混合並被粉碎。濕潤劑的實例包括:烷二醇單烷基醚,例如乙二醇單乙醚、丙二醇單甲醚、二乙二醇單甲醚等;以及醇,例如乙醇、異丙醇、丁醇、己醇、環己醇、乙二醇、二乙二醇、聚乙二醇、甘油聚乙二醇等,且該些濕潤劑可單獨使用或者以兩個或更多的混合物形式使用。Examples of the water-soluble inorganic salt may be sodium chloride, potassium chloride or the like, but are not limited thereto. The humectant allows the pigment to be uniformly mixed with the water-soluble inorganic salt and pulverized. Examples of the humectant include: alkylene glycol monoalkyl ethers such as ethylene glycol monoethyl ether, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, and the like; and alcohols such as ethanol, isopropanol, butanol, hexanol And cyclohexanol, ethylene glycol, diethylene glycol, polyethylene glycol, glycerol polyethylene glycol, and the like, and the humectants may be used singly or in the form of a mixture of two or more.

捏合後的顏料可具有介於5奈米至200奈米(例如5奈米至150奈米)範圍的平均粒徑。當顏料具有處於所述範圍內的平均粒徑時,顏料分散體的穩定性可得到提高,且畫素解析度可不被劣化。The kneaded pigment may have an average particle diameter ranging from 5 nm to 200 nm (for example, 5 nm to 150 nm). When the pigment has an average particle diameter within the range, the stability of the pigment dispersion can be improved, and the pixel resolution can be not deteriorated.

具體而言,所述顏料可以顏料分散體的形式使用,所述顏料分散體包含分散劑及隨後將闡述的溶劑,且所述顏料分散體可包含固體顏料、分散劑及溶劑。以所述顏料分散液的總量計,可以5重量%至20重量%(例如,8重量%至15重量%)的量包含固體顏料。In particular, the pigment may be used in the form of a pigment dispersion comprising a dispersant and a solvent to be described later, and the pigment dispersion may comprise a solid pigment, a dispersant, and a solvent. The solid pigment may be contained in an amount of from 5% by weight to 20% by weight (for example, from 8% by weight to 15% by weight) based on the total amount of the pigment dispersion.

以感光樹脂組成物的總量計,可以5重量%至50重量%(例如5重量%至45重量%)的量包含著色劑。當包含處於所述範圍內的著色劑時,著色效果及顯影效能可得到提高。 B )光聚合起始劑 The colorant may be contained in an amount of 5 to 50% by weight (e.g., 5 to 45% by weight) based on the total amount of the photosensitive resin composition. When the coloring agent within the range is included, the coloring effect and development efficiency can be improved. ( B ) Photopolymerization initiator

光聚合起始劑在360奈米至410奈米下具有最大吸光度。舉例而言,光聚合起始劑可在370奈米至410奈米下具有最大吸光度。The photopolymerization initiator has a maximum absorbance at 360 nm to 410 nm. For example, the photopolymerization initiator can have a maximum absorbance from 370 nm to 410 nm.

當光聚合起始劑與以上著色劑一起使用以製備感光樹脂組成物時,感光樹脂組成物可不僅達成黑色,且亦使得感光樹脂組成物的內部固化,因此可使製程裕度最大化。When a photopolymerization initiator is used together with the above colorant to prepare a photosensitive resin composition, the photosensitive resin composition can not only achieve black color but also internal solidification of the photosensitive resin composition, thereby maximizing process margin.

另外,根據一實施例的所述感光樹脂組成物可更包含在310奈米至360奈米下具有最大吸光度的光聚合起始劑以及在360奈米至410奈米下具有最大吸光度的光聚合起始劑。Further, the photosensitive resin composition according to an embodiment may further comprise a photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm and a photopolymerization having a maximum absorbance at 360 nm to 410 nm. Starting agent.

可分別以1:4至4:1(例如,1:3至3:1)的重量比包含在360奈米至410奈米下具有最大吸光度的光聚合起始劑以及在310奈米至360奈米下具有最大吸光度的光聚合起始劑。當包含處於所述重量比範圍內的在不同範圍內具有最大吸光度的光聚合起始劑時,可在曝光期間使用更寬的波長,因此促進光固化。The photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm and a ratio of 310 nm to 360 may be contained in a weight ratio of 1:4 to 4:1 (for example, 1:3 to 3:1), respectively. A photopolymerization initiator with maximum absorbance under the nano. When a photopolymerization initiator having a maximum absorbance in a different range within the range of the weight ratio is contained, a wider wavelength can be used during exposure, thus promoting photocuring.

光聚合起始劑可為二苯甲酮系化合物、噻噸酮系化合物、安息香系化合物、三嗪系化合物、肟系化合物、苯乙酮系化合物或其組合。The photopolymerization initiator may be a benzophenone-based compound, a thioxanthone-based compound, a benzoin-based compound, a triazine-based compound, an anthraquinone-based compound, an acetophenone-based compound, or a combination thereof.

二苯甲酮系化合物的實例可為二苯甲酮、苯甲醯基苯甲酸酯、苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、羥基二苯甲酮、丙烯酸化二苯甲酮、4,4'-雙(二甲基胺基)二苯甲酮、4,4'-雙(二乙基胺基)二苯甲酮、4,4'-二甲基胺基二苯甲酮、4,4'-二氯二苯甲酮、3,3'-二甲基-2-甲氧基二苯甲酮等。Examples of the benzophenone compound may be benzophenone, benzhydryl benzoate, methyl benzomethionate, 4-phenylbenzophenone, hydroxybenzophenone, acrylated Benzophenone, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, 4,4'-dimethylamine Benzobenzophenone, 4,4'-dichlorobenzophenone, 3,3'-dimethyl-2-methoxybenzophenone, and the like.

噻噸酮系化合物的實例可為噻噸酮、2-甲基噻噸酮、異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二異丙基噻噸酮、2-氯噻噸酮等。Examples of the thioxanthone-based compound may be thioxanthone, 2-methylthioxanthone, isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone , 2-chlorothioxanthone and the like.

安息香系化合物的實例可為安息香、安息香甲醚、安息香乙醚、安息香異丙醚、安息香異丁醚、苯甲基二甲基縮酮等。Examples of the benzoin-based compound may be benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyl dimethyl ketal or the like.

三嗪系化合物的實例可為2,4,6-三氯-s-三嗪、2-苯基-4,6-雙(三氯甲基)-s-三嗪、2-(3',4'-二甲氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4'-甲氧基萘基)-4,6-雙(三氯甲基)-s-三嗪、2-(對甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(對甲苯基)-4,6-雙(三氯甲基)-s-三嗪、2-聯苯基-4,6-雙(三氯甲基)-s-三嗪、雙(三氯甲基)-6-苯乙烯基-s-三嗪、2-(萘酚1-基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基萘酚1-基)-4,6-雙(三氯甲基)-s-三嗪、2-4-雙(三氯甲基)-6-胡椒基-s-三嗪、2-4-雙(三氯甲基)-6-(4-甲氧基苯乙烯基)-s-三嗪、2-[4-(4-乙基苯基)-苯基]-4,6-雙(三氯甲基)-1,3,5-三嗪等。Examples of the triazine-based compound may be 2,4,6-trichloro-s-triazine, 2-phenyl-4,6-bis(trichloromethyl)-s-triazine, 2-(3', 4'-dimethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4'-methoxynaphthyl)-4,6-bis(trichloro) Methyl)-s-triazine, 2-(p-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(p-tolyl)-4,6-double (trichloromethyl)-s-triazine, 2-biphenyl-4,6-bis(trichloromethyl)-s-triazine, bis(trichloromethyl)-6-styryl-s -triazine, 2-(naphthol 1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxynaphthol-1-yl)-4,6- Bis(trichloromethyl)-s-triazine, 2-4-bis(trichloromethyl)-6-piperidinyl-s-triazine, 2-4-bis(trichloromethyl)-6-( 4-methoxystyryl)-s-triazine, 2-[4-(4-ethylphenyl)-phenyl]-4,6-bis(trichloromethyl)-1,3,5 - Triazine and the like.

肟系化合物的實例可為O-醯基肟系化合物、2-(O-苯甲醯基肟)-1-[4-(苯硫基)苯基]-1,2-辛二酮、1-(O-乙醯基肟)-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-哢唑-3-基]乙酮、O-乙氧基羰基-α-氧基胺基-1-苯基丙-1-酮等。O-醯基肟系化合物的具體實例可為1,2-辛二酮、2-二甲基胺基-2-(4-甲基苯甲基)-1-(4-嗎啉-4-基-苯基)-丁-1-酮、1-(4-苯硫基苯基)-丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-苯硫基苯基)-辛烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-苯硫基苯基)-辛-1-酮肟-O-乙酸酯、1-(4-苯硫基苯基)-丁-1-酮肟- O-乙酸酯等。An example of the lanthanoid compound may be an O-mercapto lanthanide compound, 2-(O-benzylidene fluorenyl)-1-[4-(phenylthio)phenyl]-1,2-octanedione, 1 -(O-ethylhydrazinyl)-1-[9-ethyl-6-(2-methylbenzylidenyl)-9H-indazol-3-yl]ethanone, O-ethoxycarbonyl- Α-oxyamino-1-phenylpropan-1-one and the like. A specific example of the O-mercapto lanthanide compound may be 1,2-octanedione, 2-dimethylamino-2-(4-methylbenzyl)-1-(4-morpholin-4- -Phenyl)-butan-1-one, 1-(4-phenylthiophenyl)-butane-1,2-dione-2-indole-O-benzoate, 1-(4- Phenylthiophenyl)-octane-1,2-dione-2-indole-O-benzoate, 1-(4-phenylthiophenyl)-oct-1-one oxime-O-B An acid ester, 1-(4-phenylthiophenyl)-butan-1-one oxime-O-acetate or the like.

舉例而言,在360奈米至410奈米下具有最大吸光度的光聚合起始劑可為肟系化合物。舉例而言,在360奈米至410奈米下具有最大吸光度的光聚合起始劑可為O-醯基肟系化合物,但並非僅限於此。For example, a photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm may be a lanthanide compound. For example, the photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm may be an O-mercapto lanthanide compound, but is not limited thereto.

苯乙酮系化合物的實例可為2,2'-二乙氧基苯乙酮、2,2'-二丁氧基苯乙酮、2-羥基-2-甲基苯丙酮、對第三丁基三氯苯乙酮、對第三丁基二氯苯乙酮、4-氯苯乙酮、2,2'-二氯-4-苯氧基苯乙酮、2-甲基-1-(4-(甲硫基)苯基)-2-嗎啉基丙-1-酮、2-苯甲基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁-1-酮等。Examples of the acetophenone-based compound may be 2,2'-diethoxyacetophenone, 2,2'-dibutoxyacetophenone, 2-hydroxy-2-methylpropiophenone, and a third butyl group. Trichloroacetophenone, p-tert-butyldichloroacetophenone, 4-chloroacetophenone, 2,2'-dichloro-4-phenoxyacetophenone, 2-methyl-1-( 4-(methylthio)phenyl)-2-morpholinylpropan-1-one, 2-benzyl-2-ethylamino-1-(4-morpholinylphenyl)-butyl- 1-ketone and the like.

舉例而言,在310奈米至360奈米下具有最大吸光度的光聚合起始劑可為三嗪系化合物或苯乙酮系化合物,但並非僅限於此。For example, the photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm may be a triazine compound or an acetophenone compound, but is not limited thereto.

光聚合起始劑除所述化合物之外可更包含哢唑系化合物、二酮系化合物、硼酸鋶系化合物、疊氮系化合物、咪唑系化合物、聯咪唑系化合物等。The photopolymerization initiator may further contain an oxazole compound, a diketone compound, a lanthanum borate compound, an azide compound, an imidazole compound, a biimidazole compound or the like in addition to the above compound.

光聚合起始劑可與能夠藉由吸收光引起化學反應且變得激發並隨後傳輸其能量的感光劑一起使用。The photopolymerization initiator can be used together with a sensitizer capable of causing a chemical reaction by absorbing light and becoming excited and then transmitting its energy.

感光劑的實例可為四乙二醇雙-3-巰基丙酸酯、季戊四醇四-3-巰基丙酸酯、二季戊四醇四-3-巰基丙酸酯等。Examples of the sensitizer may be tetraethylene glycol bis-3-mercaptopropionate, pentaerythritol tetrakis-mercaptopropionate, dipentaerythritol tetrakis-mercaptopropionate or the like.

以感光樹脂組成物的總量計,可以0.1重量%至5重量%(例如0.1重量%至3重量%)的量包含在360奈米至410奈米下具有最大吸光度的光聚合起始劑,且以感光樹脂組成物的總量計,可以0.01重量%至5重量%(例如0.01重量%至3重量%)的量包含在310奈米至360奈米下具有最大吸光度的光聚合起始劑。舉例而言,根據一實施例的所述感光樹脂組成物包含0.11重量%至10重量%(例如0.11重量%至6重量%)的光聚合起始劑。當包含處於所述範圍內的光聚合起始劑時,可由於在圖案形成製程中的曝光期間充分固化而保證優異的可靠性,圖案可具有優異的解析度及緊密接觸性質以及優異的耐熱性、耐光性及耐化學性,且由於非反應起始劑而可防止透射率劣化。 C )光可聚合單體 The photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm may be contained in an amount of 0.1% by weight to 5% by weight (for example, 0.1% by weight to 3% by weight) based on the total amount of the photosensitive resin composition. And a photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm in an amount of 0.01% by weight to 5% by weight (for example, 0.01% by weight to 3% by weight) based on the total amount of the photosensitive resin composition . For example, the photosensitive resin composition according to an embodiment contains 0.11% by weight to 10% by weight (for example, 0.11% by weight to 6% by weight) of a photopolymerization initiator. When the photopolymerization initiator in the range is contained, excellent reliability can be ensured due to sufficient curing during exposure in the pattern forming process, and the pattern can have excellent resolution and close contact properties as well as excellent heat resistance. It has light resistance and chemical resistance, and can prevent deterioration of transmittance due to a non-reactive starter. ( C ) photopolymerizable monomer

光可聚合單體可為包含至少一個烯系不飽和雙鍵的(甲基)丙烯酸的單官能酯或多官能酯。The photopolymerizable monomer may be a monofunctional ester or a polyfunctional ester of (meth)acrylic acid containing at least one ethylenically unsaturated double bond.

光可聚合單體具有烯系不飽和雙鍵,因此可在圖案形成製程中的曝光期間引起充分聚合並形成具有優異耐熱性、耐光性及耐化學性的圖案。The photopolymerizable monomer has an ethylenically unsaturated double bond, and thus can cause sufficient polymerization during the exposure in the pattern forming process and form a pattern having excellent heat resistance, light resistance, and chemical resistance.

光可聚合單體可為例如乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、雙酚A二(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、季戊四醇六(甲基)丙烯酸酯、二季戊四醇二(甲基)丙烯酸酯、二季戊四醇三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、雙酚A環氧(甲基)丙烯酸酯、乙二醇單甲醚(甲基)丙烯酸酯、三羥甲基丙烷三(甲基) 丙烯酸酯、三(甲基)丙烯醯氧基磷酸乙酯、酚醛清漆環氧(甲基)丙烯酸酯或其組合。The photopolymerizable monomer may be, for example, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylic acid. Ester, neopentyl glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, bisphenol A di(A) Acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, pentaerythritol hexa(meth)acrylate, dipentaerythritol di(meth)acrylate , dipentaerythritol tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, bisphenol A epoxy (meth) acrylate, ethylene glycol monomethyl ether ( Methyl) acrylate, trimethylolpropane tri(meth) acrylate, tris(meth) propylene decyl oxyphosphate, novolac epoxy (meth) acrylate or a combination thereof.

光可聚合單體的市售實例如下。單官能(甲基)丙烯酸酯可包括:亞羅尼斯(Aronix)M-101® 、M-111® 、M-114® (東亞合成化工有限公司(Toagosei Chemistry Industry Co., Ltd.));卡亞拉得(KAYARAD)TC-110S® 、TC-120S® (日本化藥有限公司(Nippon Kayaku Co., Ltd.));V-158® 、V-2311® (大阪有機化工有限公司(Osaka Organic Chemical Ind., Ltd.))等。二官能(甲基)丙烯酸酯的實例可包括:Aronix M-210® 、M-240® 、M-6200® (東亞合成化工有限公司),KAYARAD HDDA® 、HX-220® 、R-604® (日本化藥有限公司),V-260® 、V-312® 、V-335 HP® (大阪有機化工有限公司)等。三官能(甲基)丙烯酸酯的實例可包括:Aronix M-309® 、M-400® 、M-405® 、M-450® 、M-7100® 、M-8030® 、M-8060® (東亞合成化工有限公司),KAYARAD TMPTA® 、DPCA-20® 、DPCA-30® 、DPCA-60® 、DPCA-120® (日本化藥有限公司),V-295® 、V-300® 、V-360® 、V-GPT® 、V-3PA® 、V-400® (大阪有機化工有限公司(Osaka Yuki Kayaku Kogyo Co. Ltd.))等。該些產品可單獨使用或以兩個或更多的混合物形式使用。Commercially available examples of photopolymerizable monomers are as follows. Monofunctional (meth) acrylates may include: Aronix M-101 ® , M-111 ® , M-114 ® (Toagosei Chemistry Industry Co., Ltd.); KAYARAD TC-110S ® , TC-120S ® (Nippon Kayaku Co., Ltd.); V-158 ® , V-2311 ® (Osaka Organic) Chemical Ind., Ltd.)). Examples of difunctional (meth) acrylates may include: Aronix M-210 ® , M-240 ® , M-6200 ® (East Asia Synthetic Chemical Co., Ltd.), KAYARAD HDDA ® , HX-220 ® , R-604 ® ( Nippon Kayaku Co., Ltd.), V-260 ® , V-312 ® , V-335 HP ® (Osaka Organic Chemical Co., Ltd.), etc. Examples of trifunctional (meth) acrylates may include: Aronix M-309 ® , M-400 ® , M-405 ® , M-450 ® , M-7100 ® , M-8030 ® , M-8060 ® (East Asia Synthetic Chemical Co., Ltd.), KAYARAD TMPTA ® , DPCA-20 ® , DPCA-30 ® , DPCA-60 ® , DPCA-120 ® (Nippon Chemical Co., Ltd.), V-295 ® , V-300 ® , V-360 ® , V-GPT ® , V-3PA ® , V-400 ® (Osaka Yuki Kayaku Kogyo Co. Ltd.). These products may be used singly or in the form of a mixture of two or more.

光可聚合單體可用酸酐處理以改良顯影性。The photopolymerizable monomer can be treated with an acid anhydride to improve developability.

以感光樹脂組成物的總量計,可以1重量%至10重量%(例如1重量%至8重量%)的量包含光可聚合單體。當包含處於所述範圍內的光可聚合單體時,反應性不飽和化合物在圖案形成製程中的曝光期間充分固化,且具有優異的可靠性,因此可形成具有優異的耐熱性、耐光性及耐化學性並且亦具有優異的解析度及緊密接觸性質的圖案。 E )黏合劑樹脂 The photopolymerizable monomer may be contained in an amount of from 1% by weight to 10% by weight (for example, from 1% by weight to 8% by weight) based on the total amount of the photosensitive resin composition. When the photopolymerizable monomer in the range is contained, the reactive unsaturated compound is sufficiently cured during the exposure in the pattern forming process, and has excellent reliability, so that it can be formed to have excellent heat resistance and light resistance. A pattern that is chemically resistant and also has excellent resolution and close contact properties. ( E ) binder resin

根據一實施例的所述感光樹脂組成物可更包含黏合劑樹脂。舉例而言,黏合劑樹脂可包括卡多系黏合劑樹脂、丙烯酸系黏合劑樹脂或其組合。The photosensitive resin composition according to an embodiment may further comprise a binder resin. For example, the binder resin may include a cardo-based adhesive resin, an acrylic-based adhesive resin, or a combination thereof.

當感光樹脂組成物中的黏合劑樹脂為卡多系黏合劑樹脂時,所述組成物在光固化期間具有優異的顯影性及敏感度,且因此具有精細圖案形成能力。當使用卡多系黏合劑樹脂時,可確保黑色柱狀間隙物的可靠性。When the binder resin in the photosensitive resin composition is a cardo-based binder resin, the composition has excellent developability and sensitivity during photocuring, and thus has a fine pattern forming ability. When a cardo-based adhesive resin is used, the reliability of the black columnar spacer can be ensured.

卡多系黏合劑樹脂可包含由化學式1表示的重複單元。 [化學式1]

Figure TWI615678BD00001
The card multi-adhesive resin may contain a repeating unit represented by Chemical Formula 1. [Chemical Formula 1]
Figure TWI615678BD00001

在化學式1中, R11 及R12 獨立地為氫原子或者經取代或未經取代的(甲基)丙烯醯氧基烷基, R13 及R14 獨立地為氫原子、鹵素原子、或者經取代或未經取代的C1至C20烷基,且 Z1 選自單鍵、O、CO、SO2 、CR7 R8 、SiR9 R10 (其中,R7 至R10 獨立地為氫原子或者經取代或未經取代的C1至C20烷基)或由化學式1-1至化學式1-11中的一者表示的連接基, [化學式1-1]

Figure TWI615678BD00002
[化學式1-2]
Figure TWI615678BD00003
[化學式1-3]
Figure TWI615678BD00004
[化學式1-4]
Figure TWI615678BD00005
[化學式1-5]
Figure TWI615678BD00006
在化學式1-5中, Ra 為氫原子、乙基、C2 H4 Cl、C2 H4 OH、CH2 CH=CH2 或苯基。 [化學式1-6]
Figure TWI615678BD00007
[化學式1-7]
Figure TWI615678BD00008
[化學式1-8]
Figure TWI615678BD00009
[化學式1-9]
Figure TWI615678BD00010
[化學式1-10]
Figure TWI615678BD00011
[化學式1-11]
Figure TWI615678BD00012
In Chemical Formula 1, R 11 and R 12 are independently a hydrogen atom or a substituted or unsubstituted (meth) acryloxyalkyl group, and R 13 and R 14 are independently a hydrogen atom, a halogen atom, or a a substituted or unsubstituted C1 to C20 alkyl group, and Z 1 is selected from the group consisting of a single bond, O, CO, SO 2 , CR 7 R 8 , SiR 9 R 10 (wherein R 7 to R 10 are independently a hydrogen atom or a substituted or unsubstituted C1 to C20 alkyl group) or a linking group represented by one of Chemical Formula 1-1 to Chemical Formula 1-11, [Chemical Formula 1-1]
Figure TWI615678BD00002
[Chemical Formula 1-2]
Figure TWI615678BD00003
[Chemical Formula 1-3]
Figure TWI615678BD00004
[Chemical Formula 1-4]
Figure TWI615678BD00005
[Chemical Formula 1-5]
Figure TWI615678BD00006
In Chemical Formula 1-5, R a is a hydrogen atom, an ethyl group, C 2 H 4 Cl, C 2 H 4 OH, CH 2 CH=CH 2 or a phenyl group. [Chemical Formula 1-6]
Figure TWI615678BD00007
[Chemical Formula 1-7]
Figure TWI615678BD00008
[Chemical Formula 1-8]
Figure TWI615678BD00009
[Chemical Formula 1-9]
Figure TWI615678BD00010
[Chemical Formula 1-10]
Figure TWI615678BD00011
[Chemical Formula 1-11]
Figure TWI615678BD00012

Z2 為酸酐殘基,且 m1及m2獨立地為介於0至4範圍內的整數。Z 2 is an acid anhydride residue, and m1 and m2 are independently an integer ranging from 0 to 4.

卡多系黏合劑樹脂可在兩個末端中的至少一個末端處包含由化學式2表示的官能基。 [化學式2]

Figure TWI615678BD00013
在化學式2中, Z3 由化學式2-1至化學式2-7表示。 [化學式2-1]
Figure TWI615678BD00014
在化學式2-1中,Rb 及Rc 獨立地為氫原子、經取代或未經取代的C1至C20烷基、酯基或醚基。 [化學式2-2]
Figure TWI615678BD00015
[化學式2-3]
Figure TWI615678BD00016
[化學式2-4]
Figure TWI615678BD00017
[化學式2-5]
Figure TWI615678BD00018
在化學式2-5中,Rd 為O、S、NH、經取代或未經取代的C1至C20伸烷基、C1至C20烷基胺基或C2至C20烯基胺基。 [化學式2-6]
Figure TWI615678BD00019
[化學式2-7]
Figure TWI615678BD00020
The card multi-adhesive resin may contain a functional group represented by Chemical Formula 2 at at least one of the two ends. [Chemical Formula 2]
Figure TWI615678BD00013
In Chemical Formula 2, Z 3 is represented by Chemical Formula 2-1 to Chemical Formula 2-7. [Chemical Formula 2-1]
Figure TWI615678BD00014
In Chemical Formula 2-1, R b and R c are independently a hydrogen atom, a substituted or unsubstituted C1 to C20 alkyl group, an ester group or an ether group. [Chemical Formula 2-2]
Figure TWI615678BD00015
[Chemical Formula 2-3]
Figure TWI615678BD00016
[Chemical Formula 2-4]
Figure TWI615678BD00017
[Chemical Formula 2-5]
Figure TWI615678BD00018
In Chemical Formula 2-5, R d is O, S, NH, a substituted or unsubstituted C1 to C20 alkyl group, a C1 to C20 alkylamino group or a C2 to C20 alkenylamino group. [Chemical Formula 2-6]
Figure TWI615678BD00019
[Chemical Formula 2-7]
Figure TWI615678BD00020

卡多系樹脂可例如藉由將以下化合物中的至少兩者進行混合來製備:含茀化合物,例如9,9-雙(4-氧雜環丙基甲氧苯基)茀等;酸酐化合物,例如苯四甲酸二酐、萘四甲酸二酐、聯苯基四甲酸二酐、二苯甲酮四甲酸二酐、均苯四甲酸二酐、環丁烷四甲酸二酐、苝四甲酸二酐、四氫呋喃四甲酸二酐、四氫鄰苯二甲酸酐等;二醇化合物,例如乙二醇、丙二醇、聚乙二醇等;醇化合物,例如甲醇、乙醇、丙醇、正丁醇、環己醇、苯甲醇等;溶劑系化合物,例如丙二醇甲基乙酸乙酯、N-甲基吡咯啶酮等;磷化合物,例如三苯基膦等;以及胺或銨鹽化合物,例如氯化四甲基銨、溴化四乙基銨、苯甲基二乙胺、三乙胺、三丁胺、氯化苯甲基三乙基銨等。The cardo-based resin can be prepared, for example, by mixing at least two of the following compounds: a ruthenium-containing compound such as 9,9-bis(4-oxecyclopropylmethoxyphenyl)anthracene or the like; an acid anhydride compound, For example, pyromellitic dianhydride, naphthalene tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, pyromellitic dianhydride, cyclobutane tetracarboxylic dianhydride, perylenetetracarboxylic dianhydride , tetrahydrofuran tetracarboxylic dianhydride, tetrahydrophthalic anhydride, etc.; diol compounds, such as ethylene glycol, propylene glycol, polyethylene glycol, etc.; alcohol compounds, such as methanol, ethanol, propanol, n-butanol, cyclohexane Alcohol, benzyl alcohol, etc.; solvent-based compounds such as propylene glycol methyl ethyl acetate, N-methylpyrrolidone, etc.; phosphorus compounds such as triphenylphosphine; and amine or ammonium salt compounds such as tetramethyl chloride Ammonium, tetraethylammonium bromide, benzyldiethylamine, triethylamine, tributylamine, benzyltriethylammonium chloride, and the like.

卡多系黏合劑樹脂可具有500克/莫耳至50,000克/莫耳(例如1,000克/莫耳至30,000克/莫耳)的重量平均分子量。當卡多系黏合劑樹脂具有處於所述範圍內的重量平均分子量時,可在製造黑色柱狀間隙物期間很好地形成圖案而無殘餘物且在顯影期間不會損耗膜厚度。The card multi-adhesive resin may have a weight average molecular weight of from 500 g/m to 50,000 g/mole (for example, from 1,000 g/m to 30,000 g/mole). When the card multi-adhesive resin has a weight average molecular weight within the range, a pattern can be well formed during the production of the black columnar spacer without residue and the film thickness is not lost during development.

以感光樹脂組成物的總量計,可以5重量%至20重量%(例如5重量%至15重量%)的量包含卡多系黏合劑樹脂。當包含處於所述範圍內的卡多系黏合劑樹脂時,可獲得優異的敏感度、顯影性、解析度及圖案線性度(linearity)。The cardo-based binder resin may be contained in an amount of from 5% by weight to 20% by weight (for example, from 5% by weight to 15% by weight) based on the total amount of the photosensitive resin composition. When the card multi-adhesive resin in the range is contained, excellent sensitivity, developability, resolution, and pattern linearity can be obtained.

丙烯酸系黏合劑樹脂為第一烯系不飽和單體及可與其共聚合的第二烯系不飽和單體的共聚物,且為包含至少一個丙烯酸系重複單元的樹脂。The acrylic binder resin is a copolymer of a first ethylenically unsaturated monomer and a second ethylenically unsaturated monomer copolymerizable therewith, and is a resin containing at least one acrylic repeating unit.

第一烯系不飽和單體為包含至少一個羧基的烯系不飽和單體。所述單體的實例包含(甲基)丙烯酸、順丁烯二酸、衣康酸、反丁烯二酸或其組合。The first ethylenically unsaturated monomer is an ethylenically unsaturated monomer comprising at least one carboxyl group. Examples of the monomer include (meth)acrylic acid, maleic acid, itaconic acid, fumaric acid, or a combination thereof.

以丙烯酸系黏合劑樹脂的總量計,可以5重量%至50重量%(例如10重量%至40重量%)的量包含第一烯系不飽和單體。The first ethylenically unsaturated monomer may be included in an amount of from 5% by weight to 50% by weight (for example, from 10% by weight to 40% by weight) based on the total of the acrylic binder resin.

第二烯系不飽和單體可為芳族乙烯基化合物,例如苯乙烯、α-甲基苯乙烯、乙烯基甲苯、乙烯基苯甲基甲醚等;不飽和羧酸酯化合物,例如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸苯甲酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苯酯等;不飽和羧酸胺基烷基酯化合物,例如(甲基)丙烯酸2-胺基乙酯、(甲基)丙烯酸2-二甲基胺基乙酯等;羧酸乙烯酯化合物,例如乙酸乙烯酯、苯甲酸乙烯酯等;不飽和羧酸縮水甘油基酯化合物,例如(甲基)丙烯酸縮水甘油基酯等;氰化乙烯化合物,例如(甲基)丙烯腈等;不飽和醯胺化合物,例如(甲基)丙烯醯胺等。該些可單獨使用或者以兩個或更多的混合物形式使用。The diene unsaturated monomer may be an aromatic vinyl compound such as styrene, α-methylstyrene, vinyltoluene, vinylbenzyl methyl ether or the like; an unsaturated carboxylic acid ester compound such as (A) Methyl acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, benzene (meth) acrylate Methyl ester, cyclohexyl (meth)acrylate, phenyl (meth)acrylate, etc.; aminoalkyl ester of unsaturated carboxylic acid, such as 2-aminoethyl (meth)acrylate, (meth)acrylic acid 2-dimethylaminoethyl ester or the like; a vinyl carboxylate compound such as vinyl acetate, vinyl benzoate or the like; an unsaturated carboxylic acid glycidyl ester compound such as glycidyl (meth)acrylate; A vinyl cyanide compound such as (meth)acrylonitrile or the like; an unsaturated guanamine compound such as (meth)acrylamide or the like. These may be used singly or in the form of a mixture of two or more.

丙烯酸系黏合劑樹脂的具體實例可為丙烯酸/甲基丙烯酸苯甲酯共聚物、甲基丙烯酸/甲基丙烯酸苯甲酯共聚物、甲基丙烯酸/甲基丙烯酸苯甲酯/苯乙烯共聚物、甲基丙烯酸/甲基丙烯酸苯甲酯/甲基丙烯酸2-羥基乙酯共聚物、甲基丙烯酸/甲基丙烯酸苯甲酯/苯乙烯/甲基丙烯酸2-羥基乙酯共聚物等,但並不僅限於此,且該些可單獨使用或者以兩個或更多的混合物形式使用。Specific examples of the acrylic adhesive resin may be acrylic acid/benzyl methacrylate copolymer, methacrylic acid/benzyl methacrylate copolymer, methacrylic acid/benzyl methacrylate/styrene copolymer, Methyl methacrylate / benzyl methacrylate / 2-hydroxyethyl methacrylate copolymer, methacrylic acid / benzyl methacrylate / styrene / 2-hydroxyethyl methacrylate copolymer, etc. It is not limited thereto, and these may be used alone or in the form of a mixture of two or more.

以感光樹脂組成物的總量計,可以1重量%至20重量%(例如1重量%至15重量%、例如1重量%至10重量%)的量包含丙烯酸系黏合劑樹脂。當包含處於所述範圍內的丙烯酸系黏合劑樹脂時,可達成優異的敏感度、顯影性、解析度及圖案線性度。The acrylic adhesive resin may be contained in an amount of from 1% by weight to 20% by weight (for example, from 1% by weight to 15% by weight, for example, from 1% by weight to 10% by weight) based on the total amount of the photosensitive resin composition. When the acrylic adhesive resin in the range is contained, excellent sensitivity, developability, resolution, and pattern linearity can be achieved.

另一方面,根據一實施例的感光樹脂組成物可僅包含卡多系黏合劑樹脂作為黏合劑樹脂,且可不包含丙烯酸系黏合劑樹脂。 D )溶劑 On the other hand, the photosensitive resin composition according to an embodiment may contain only a cardo-based adhesive resin as a binder resin, and may not contain an acrylic-based binder resin. ( D ) solvent

溶劑為與著色劑、光聚合起始劑、光可聚合單體及黏合劑樹脂具有相容性但不與著色劑、光聚合起始劑、光可聚合單體及黏合劑樹脂反應的材料。The solvent is a material which is compatible with a color former, a photopolymerization initiator, a photopolymerizable monomer, and a binder resin but does not react with a color former, a photopolymerization initiator, a photopolymerizable monomer, and a binder resin.

溶劑的實例可包括醇,例如甲醇、乙醇等;醚,例如二氯乙醚、正丁醚、二異戊醚、甲基苯基醚、四氫呋喃等;二醇醚,例如乙二醇單甲醚、乙二醇單乙醚、乙二醇二甲醚(ethylene glycoldimethylether,EDM)等;乙酸溶纖劑(cellosolve acetate),例如甲基溶纖劑乙酸酯(methyl cellosolve acetate)、乙基溶纖劑乙酸酯(ethyl cellosolve acetate)、二乙基溶纖劑乙酸酯(diethyl cellosolve acetate)等;卡必醇,例如甲基乙基卡必醇、二乙基卡必醇、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇二甲醚、二乙二醇甲乙醚、二乙二醇二乙醚等;丙二醇烷基醚乙酸酯,例如丙二醇甲醚乙酸酯、丙二醇丙醚乙酸酯等;芳族烴,例如甲苯、二甲苯等;酮,例如甲乙酮、環己酮、4-羥基-4-甲基-2-戊酮、甲基正丙基酮、甲基正丁基酮、甲基正戊基酮、2-庚酮等;飽和脂族單羧酸烷基酯,例如乙酸乙酯、乙酸正丁酯、乙酸異丁酯等;乳酸酯,例如乳酸甲酯、乳酸乙酯等;氧基乙酸烷基酯,例如氧基乙酸甲酯、氧基乙酸乙酯、氧基乙酸丁酯等;烷氧基乙酸烷基酯,例如甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯等;3-氧基丙酸烷基酯,例如3-氧基丙酸甲酯、3-氧基丙酸乙酯等;3-烷氧基丙酸烷基酯,例如3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯等;2-氧基丙酸烷基酯,例如2-氧基丙酸甲酯、2-氧基丙酸乙酯、2-氧基丙酸丙酯等;2-烷氧基丙酸烷基酯,例如2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸甲酯等;2-氧基-2-甲基丙酸酯,例如2-氧基-2-甲基丙酸甲酯、2-氧基-2-甲基丙酸乙酯等;單氧基單羧酸烷基酯的2-烷氧基-2-甲基丙酸烷基酯,例如2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯等;酯,例如丙酸2-羥基乙酯、丙酸2-羥基-2-甲基乙酯、乙酸羥基乙酯、丁酸2-羥基-3-甲基甲酯等;酮酸酯,例如丙酮酸乙酯等。另外,亦可使用高沸點溶劑,例如N-甲基甲醯胺、N,N-二甲基甲醯胺、N-甲基甲醯苯胺、N-甲基乙醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮、二甲亞碸、苯甲基乙基醚、二己基醚、乙醯丙酮、異佛爾酮、己酸、辛酸、1-辛醇、1-壬醇、苯甲醇、乙酸苯甲酯、苯甲酸乙酯、乙二酸二乙酯、順丁烯二酸二乙酯、γ-丁內酯、碳酸伸乙酯、碳酸伸丙酯、苯基纖維素乙酸酯等。Examples of the solvent may include an alcohol such as methanol, ethanol, etc.; an ether such as dichloroethyl ether, n-butyl ether, diisoamyl ether, methylphenyl ether, tetrahydrofuran or the like; a glycol ether such as ethylene glycol monomethyl ether, Ethylene glycol monoethyl ether, ethylene glycol dimethyl ether (EDM), etc.; cellosolve acetate, such as methyl cellosolve acetate, ethyl cellosolve B Ethyl acetate (ethyl cellosolve acetate), diethyl cellosolve acetate, etc.; carbitol, such as methyl ethyl carbitol, diethyl carbitol, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol diethyl ether, etc.; propylene glycol alkyl ether acetate, such as propylene glycol methyl ether acetate, propylene glycol Ether acetate or the like; aromatic hydrocarbons such as toluene, xylene, etc.; ketones such as methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone, methyl n-propyl ketone, methyl positive Butyl ketone, methyl n-amyl ketone, 2-heptanone, etc.; saturated aliphatic monocarboxylic acid alkyl ester, for example Ethyl acetate, n-butyl acetate, isobutyl acetate, etc.; lactate esters such as methyl lactate, ethyl lactate, etc.; alkyl oxyacetate, such as methyl oxyacetate, ethyl oxyacetate, oxygen Butyl acetate and the like; alkyl alkoxyacetate, such as methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, etc. An alkyl 3-oxopropionate such as methyl 3-oxypropionate, ethyl 3-oxypropionate or the like; an alkyl 3-alkoxypropionate such as 3-methoxypropionic acid Methyl ester, ethyl 3-methoxypropionate, ethyl 3-ethoxypropionate, methyl 3-ethoxypropionate, etc.; alkyl 2-oxopropionate, such as 2-oxypropane Methyl ester, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.; alkyl 2-alkoxypropionate, such as methyl 2-methoxypropionate, 2-methoxy Ethyl propionate, ethyl 2-ethoxypropionate, methyl 2-ethoxypropionate, etc.; 2-oxy-2-methylpropionate, such as 2-oxy-2-methylpropane Methyl ester, 2-oxy-2-methylpropionic acid ethyl ester, etc.; 2-alkoxy-2-methylpropionic acid alkyl ester of monooxymonocarboxylic acid alkyl ester, examples Such as methyl 2-methoxy-2-methylpropanoate, ethyl 2-ethoxy-2-methylpropionate, etc.; esters, such as 2-hydroxyethyl propionate, 2-hydroxy-2 propionate - methyl ethyl ester, hydroxyethyl acetate, 2-hydroxy-3-methyl methyl butyrate, etc.; keto esters such as ethyl pyruvate. In addition, high boiling solvents such as N-methylformamide, N,N-dimethylformamide, N-methylformamide, N-methylacetamide, N,N-di can also be used. Methylacetamide, N-methylpyrrolidone, dimethyl hydrazine, benzyl ethyl ether, dihexyl ether, acetamidine, isophorone, hexanoic acid, octanoic acid, 1-octanol, 1 - decyl alcohol, benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethyl carbonate, propyl carbonate, benzene Cellulose acetate and the like.

考慮到溶混性及反應性,可較佳地使用二醇醚,例如乙二醇單乙醚、乙二醇二甲醚、乙二醇二乙醚等;乙二醇烷基醚乙酸酯,例如乙基溶纖劑乙酸酯等;酯,例如丙酸2-羥基乙酯等;卡必醇,例如二乙二醇單甲醚等;丙二醇烷基醚乙酸酯,例如丙二醇甲基醚乙酸酯、丙二醇丙基醚乙酸酯等。In view of miscibility and reactivity, a glycol ether such as ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether or the like; ethylene glycol alkyl ether acetate, for example, may be preferably used. Ethyl cellosolve acetate, etc.; esters, such as 2-hydroxyethyl propionate; carbitol, such as diethylene glycol monomethyl ether; propylene glycol alkyl ether acetate, such as propylene glycol methyl ether Acid ester, propylene glycol propyl ether acetate, and the like.

以感光樹脂組成物的總量計,以餘量(例如30重量%至90重量%、例如40重量%至85重量%)使用溶劑。當包含處於所述範圍內的溶劑時,感光樹脂組成物可具有適當黏度,因而改良黑色柱狀間隙物的塗佈特性。 F )其他添加劑 The solvent is used in the balance (for example, 30% by weight to 90% by weight, for example, 40% by weight to 85% by weight) based on the total amount of the photosensitive resin composition. When the solvent in the range is contained, the photosensitive resin composition may have an appropriate viscosity, thereby improving the coating characteristics of the black columnar spacer. ( F ) other additives

感光樹脂組成物可更包含以下添加劑:丙二酸;3-胺基-1,2-丙二醇;矽烷系偶合劑;調平劑;氟系界面活性劑;自由基聚合起始劑;或其組合。The photosensitive resin composition may further comprise the following additives: malonic acid; 3-amino-1,2-propanediol; decane-based coupling agent; leveling agent; fluorine-based surfactant; radical polymerization initiator; .

矽烷系偶合劑可具有以下反應性取代基以改良與基板的緊密接觸性質:乙烯基、羧基、甲基丙烯醯氧基、異氰酸酯基、環氧基等。The decane coupling agent may have the following reactive substituents to improve the intimate contact properties with the substrate: vinyl, carboxyl, methacryloxy, isocyanate, epoxy, and the like.

矽烷系偶合劑的實例可包括三甲氧基矽烷基苯甲酸、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、乙烯基三乙醯氧基矽烷、乙烯基三甲氧基矽烷、γ-異氰酸酯丙基三乙氧基矽烷、γ-縮水甘油氧基丙基三甲氧基矽烷、β-(3,4-環氧環己基)乙基三甲氧基矽烷等等。該些可單獨使用或者以兩個或更多的混合物形式使用。Examples of the decane coupling agent may include trimethoxydecyl benzoic acid, γ-methyl propylene methoxy propyl trimethoxy decane, vinyl triethoxy decane, vinyl trimethoxy decane, γ-isocyanate. Propyltriethoxydecane, γ-glycidoxypropyltrimethoxydecane, β-(3,4-epoxycyclohexyl)ethyltrimethoxydecane, and the like. These may be used singly or in the form of a mixture of two or more.

以100重量份(parts by weight)的感光樹脂組成物計,可以0.01重量份至10重量份的量包含矽烷系偶合劑。當包含處於所述範圍內的矽烷系偶合劑時,可改良緊密接觸性質、儲存性質等。The decane-based coupling agent may be contained in an amount of from 0.01 part by weight to 10 parts by weight based on 100 parts by weight of the photosensitive resin composition. When the decane-based coupling agent in the range is contained, the close contact property, the storage property, and the like can be improved.

感光樹脂組成物可更包含界面活性劑(例如氟系界面活性劑)以改良塗佈性質並在必要時防止缺陷。The photosensitive resin composition may further contain a surfactant (for example, a fluorine-based surfactant) to improve coating properties and prevent defects if necessary.

氟系界面活性劑的實例可為市售氟系界面活性劑,例如BM-1000® 及BM-1100® (BM化學公司(BM Chemie Inc.));MEGAFACE F 142D® 、F 172® 、F 173® 、F 183® 及F 554® (大日本油墨化工有限公司(Dainippon Ink Kagaku Kogyo Co., Ltd.));FULORAD FC-135® 、FULORAD FC-170C® 、FULORAD FC-430® 及FULORAD FC-431® (住友3M有限公司(Sumitomo 3M Co., Ltd.));沙福隆(SURFLON)S-112® 、SURFLON S-113® 、SURFLON S-131® 、SURFLON S-141® 及SURFLON S-145® (旭硝子玻璃有限公司(Asahi Glass Co., Ltd.));以及SH-28PA® 、SH-190® 、SH-193® 、SZ-6032® 及SF-8428® 等(東麗矽酮有限公司(Toray Silicone Co., Ltd.))。Examples of the fluorine-based surfactant may be commercially available fluorine-based surfactants such as BM-1000 ® and BM-1100 ® (BM Chemie Inc.); MEGAFACE F 142D ® , F 172 ® , F 173 ® , F 183 ® and F 554 ® (Dainippon Ink Kagaku Kogyo Co., Ltd.); FULORAD FC-135 ® , FULORAD FC-170C ® , FULORAD FC-430 ® and FULORAD FC- 431 ® (Sumitomo 3M Co., Ltd.); SURFLON S-112 ® , SURFLON S-113 ® , SURFLON S-131 ® , SURFLON S-141 ® and SURFLON S- 145 ® (Asahi Glass Co., Ltd.); and SH-28PA ® , SH-190 ® , SH-193 ® , SZ-6032 ® and SF-8428 ® (Toray Ketone Limited) Toray Silicone Co., Ltd.).

以100重量份的感光樹脂組成物計,可以0.001重量份至5重量份的量使用氟系界面活性劑。當包含處於所述範圍內的界面活性劑時,可保證IZO基板或玻璃基板上的優異的濕潤以及塗佈均勻性,且不會產生汙點。The fluorine-based surfactant may be used in an amount of from 0.001 part by weight to 5 parts by weight based on 100 parts by weight of the photosensitive resin composition. When the surfactant in the range is contained, excellent wetting and coating uniformity on the IZO substrate or the glass substrate can be ensured without staining.

此外,除非其他添加劑使得感光樹脂組成物的性質劣化,否則所述感光樹脂組成物可以預定量包含其他添加劑(例如抗氧化劑、穩定劑等)。Further, the photosensitive resin composition may contain other additives (for example, an antioxidant, a stabilizer, etc.) in a predetermined amount unless other additives deteriorate the properties of the photosensitive resin composition.

另一實施例提供一種藉由將感光樹脂組成物曝光、顯影及固化而製造的黑色柱狀間隙物。Another embodiment provides a black columnar spacer manufactured by exposing, developing, and curing a photosensitive resin composition.

黑色柱狀間隙物中的圖案可具有小於或等於5°(例如小於或等於5°且大於或等於60°)的錐角。The pattern in the black columnar spacer may have a taper angle of less than or equal to 5° (eg, less than or equal to 5° and greater than or equal to 60°).

一種製造黑色柱狀間隙物的方法如下。 (1)塗佈及膜形成A method of manufacturing a black columnar spacer is as follows. (1) Coating and film formation

利用旋塗或狹縫塗佈方法、輥塗方法、網版印刷方法、塗料器方法等在經受預定預先處理的基板(例如玻璃基板或IZO基板)上將感光樹脂組成物塗佈成具有所需厚度,並藉由真空乾燥(vacuum dry,VCD)製程在70℃至100℃下將所述感光樹脂組成物加熱1分鐘至10分鐘以移除溶劑,從而形成感光樹脂膜。 (2)曝光Coating the photosensitive resin composition onto a substrate (for example, a glass substrate or an IZO substrate) subjected to a predetermined pretreatment by a spin coating or slit coating method, a roll coating method, a screen printing method, a coater method, or the like The photosensitive resin composition is heated by a vacuum dry (VCD) process at 70 ° C to 100 ° C for 1 minute to 10 minutes to remove the solvent, thereby forming a photosensitive resin film. (2) exposure

藉由以下方式對感光樹脂膜進行圖案化:安置由用於達成黑色矩陣圖案的半色調(half tone)部分及用於達成柱狀間隙物圖案的全色調(full tone)組成的遮罩,然後照射介於200奈米至500奈米範圍的光化射線(actinic ray)。藉由使用例如具有低壓、高壓或超高壓的水銀燈、金屬鹵素燈、氬氣雷射等光源來執行照射。端視情形而定,亦可使用X射線、電子束等。The photosensitive resin film is patterned by: arranging a mask composed of a half tone portion for achieving a black matrix pattern and a full tone for achieving a columnar spacer pattern, and then Irradiating actinic ray ranging from 200 nm to 500 nm. Irradiation is performed by using, for example, a mercury lamp having a low pressure, a high pressure, or an ultrahigh pressure, a metal halide lamp, an argon laser, or the like. Depending on the situation, X-rays, electron beams, etc. may also be used.

當使用高壓水銀燈時,曝光製程使用例如500毫焦/平方公分或小於500毫焦/平方公分的光劑量(利用365奈米感測器)。然而,所述光劑量可依據每一組分的種類、其組合比率及乾膜厚度而變化。 (3)顯影When a high pressure mercury lamp is used, the exposure process uses, for example, a light dose of 500 mJ/cm 2 or less than 500 mJ/cm 2 (using a 365 nm sensor). However, the light dose may vary depending on the kind of each component, the combination ratio thereof, and the dry film thickness. (3) Development

在曝光製程之後,使用鹼性水溶液藉由溶解並移除除被曝光部分外的多餘部分而將被曝光膜顯影,以形成圖案。 (4)後處理After the exposure process, the exposed film is developed using an alkaline aqueous solution by dissolving and removing excess portions other than the exposed portion to form a pattern. (4) Post processing

可對被顯影影像圖案進行後加熱,以達成耐熱性、耐光性、緊密接觸性質、抗裂性、耐化學性、高強度、儲存穩定性等方面的優異品質。The developed image pattern can be post-heated to achieve excellent quality in terms of heat resistance, light resistance, close contact properties, crack resistance, chemical resistance, high strength, storage stability, and the like.

另一實施例提供一種包括黑色柱狀間隙物的彩色濾光片。Another embodiment provides a color filter comprising a black columnar spacer.

在下文中,闡述本發明的示例性實例。然而,該些實例不應在任何意義上被解釋為限制本發明的範圍。(實例) (感光樹脂組成物的製備) 實例 1 In the following, illustrative examples of the invention are set forth. However, the examples are not to be construed as limiting the scope of the invention in any way. (Example) (Preparation of photosensitive resin composition) Example 1

在表1中所提供的組成物中的溶劑中溶解了光聚合起始劑,且在室溫下將所述溶液攪拌了2小時。隨後,向其中添加了黏合劑樹脂及光可聚合單體,且在室溫下將所述混合物再次攪拌了2小時。然後,向其中添加了著色劑,在室溫下將所述混合物攪拌了1小時,向其中添加了矽烷系偶合劑作為其他添加劑,且在室溫下將所獲得的混合物攪拌了1小時。將所得溶液過濾了三次以移除雜質,從而製備了根據實例1的感光樹脂組成物。 (表1) (單位:克)

Figure TWI615678BD00021
(在表1中,NCI831在380奈米下具有最大吸光度(如在圖1中所示),而TEB在345奈米下具有最大吸光度(如在圖2中所示)) (在表1中,著色劑在400奈米下具有最大透射率(如在圖4中所示)) (在表1中,以顏料分散液的總量計,以15重量%的量包含顏料固體)實例 2 The photopolymerization initiator was dissolved in the solvent in the composition provided in Table 1, and the solution was stirred at room temperature for 2 hours. Subsequently, a binder resin and a photopolymerizable monomer were added thereto, and the mixture was stirred again for 2 hours at room temperature. Then, a coloring agent was added thereto, the mixture was stirred at room temperature for 1 hour, a decane coupling agent was added thereto as another additive, and the obtained mixture was stirred at room temperature for 1 hour. The resulting solution was filtered three times to remove impurities, thereby preparing a photosensitive resin composition according to Example 1. (Table 1) (Unit: gram)
Figure TWI615678BD00021
(In Table 1, NCI831 has maximum absorbance at 380 nm (as shown in Figure 1), while TEB has maximum absorbance at 345 nm (as shown in Figure 2)) (in Table 1) The colorant has a maximum transmittance at 400 nm (as shown in Fig. 4)) (In Table 1, the pigment solid is contained in an amount of 15% by weight based on the total amount of the pigment dispersion) Example 2

除使用以下組分以具有表2中所示的組成外,根據與實例1相同的方法製備根據實例2的感光樹脂組成物。 (表2) (單位:克)

Figure TWI615678BD00022
(在表2中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表2中,著色劑在400奈米下具有最大透射率(如在表5中所示)) (在表2中,以顏料分散液的總量計,以10重量%的量包含顏料固體)實例 3 A photosensitive resin composition according to Example 2 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 2. (Table 2) (Unit: gram)
Figure TWI615678BD00022
(In Table 2, NCI831 has maximum absorbance at 380 nm, while TEB has maximum absorbance at 345 nm) (In Table 2, the colorant has maximum transmittance at 400 nm (as in Table 5). Shown)) (In Table 2, pigment solids are contained in an amount of 10% by weight based on the total amount of the pigment dispersion) Example 3

除使用以下組分以具有表3中所示的組成外,根據與實例1相同的方法製備根據實例3的感光樹脂組成物。 (表3) (單位:克)

Figure TWI615678BD00023
(在表3中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表3中,著色劑在400奈米下具有最大透射率) (在表3中,以顏料分散液的總量計,以10重量%的量包含顏料固體)實例 4 The photosensitive resin composition according to Example 3 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 3. (Table 3) (Unit: gram)
Figure TWI615678BD00023
(In Table 3, NCI831 has maximum absorbance at 380 nm, while TEB has maximum absorbance at 345 nm) (in Table 3, the colorant has maximum transmittance at 400 nm) (in Table 3) , including pigment solids in an amount of 10% by weight based on the total amount of the pigment dispersion) Example 4

除使用以下組分以具有表4中所示的組成外,根據與實例1相同的方法製備根據實例4的感光樹脂組成物。 (表4) (單位:克)

Figure TWI615678BD00024
(在表4中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表4中,著色劑在400奈米下具有最大透射率) (在表4中,以顏料分散液的總量計,以10重量%的量包含顏料固體)實例 5 The photosensitive resin composition according to Example 4 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 4. (Table 4) (Unit: gram)
Figure TWI615678BD00024
(In Table 4, NCI831 has maximum absorbance at 380 nm, while TEB has maximum absorbance at 345 nm) (in Table 4, the colorant has maximum transmittance at 400 nm) (in Table 4) , including pigment solids in an amount of 10% by weight based on the total amount of the pigment dispersion) Example 5

除使用以下組分以具有表5中所示的組成外,根據與實例1相同的方法製備根據實例5的感光樹脂組成物。 (表5) (單位:克)

Figure TWI615678BD00025
(在表5中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表5中,著色劑在400奈米下具有最大透射率) (在表5中,以顏料分散液的總量計,以10重量%的量包含顏料固體)實例 6 The photosensitive resin composition according to Example 5 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 5. (Table 5) (Unit: gram)
Figure TWI615678BD00025
(In Table 5, NCI831 has maximum absorbance at 380 nm, while TEB has maximum absorbance at 345 nm) (in Table 5, the colorant has maximum transmittance at 400 nm) (in Table 5) , including pigment solids in an amount of 10% by weight based on the total amount of the pigment dispersion) Example 6

除使用以下組分以具有表6中所示的組成外,根據與實例1相同的方法製備根據實例6的感光樹脂組成物。 (表6) (單位:克)

Figure TWI615678BD00026
(在表6中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表6中,著色劑在400奈米下具有最大透射率) (在表6中,以顏料分散液的總量計,以10重量%的量包含顏料固體。)比較例 1 The photosensitive resin composition according to Example 6 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 6. (Table 6) (Unit: gram)
Figure TWI615678BD00026
(In Table 6, NCI831 has maximum absorbance at 380 nm, while TEB has maximum absorbance at 345 nm) (in Table 6, the colorant has maximum transmittance at 400 nm) (in Table 6) The pigment solid was contained in an amount of 10% by weight based on the total amount of the pigment dispersion.) Comparative Example 1

除使用以下組分以具有表7中所示的組成外,根據與實例1相同的方法製備根據比較例1的感光樹脂組成物。 (表7) (單位:克)

Figure TWI615678BD00027
(在表7中,TEB在345奈米下具有最大吸光度) (在表7中,著色劑在400奈米下具有最大透射率) (在表7中,以顏料分散液的總量計,以10重量%的量包含顏料固體)比較例 2 The photosensitive resin composition according to Comparative Example 1 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 7. (Table 7) (Unit: gram)
Figure TWI615678BD00027
(In Table 7, TEB has maximum absorbance at 345 nm) (In Table 7, the colorant has maximum transmittance at 400 nm) (in Table 7, based on the total amount of pigment dispersion, 10% by weight of the amount contains the pigment solid) Comparative Example 2

除使用以下組分以具有表8中所示的組成外,根據與實例1相同的方法製備根據比較例2的感光樹脂組成物。 (表8) (單位:克)

Figure TWI615678BD00028
(在表8中,OXE01在260奈米及330奈米下具有最大吸光度(如在圖3中所示),而TEB在345奈米下具有最大吸光度) (在表8中,著色劑在400奈米下具有最大透射率) (在表8中,以顏料分散液的總量計,以10重量%的量包含顏料固體)比較例 3 The photosensitive resin composition according to Comparative Example 2 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 8. (Table 8) (Unit: gram)
Figure TWI615678BD00028
(In Table 8, OXE01 has maximum absorbance at 260 nm and 330 nm (as shown in Figure 3), while TEB has maximum absorbance at 345 nm) (in Table 8, the colorant is at 400) The maximum transmittance under the nanometer (in Table 8, the pigment solid is contained in an amount of 10% by weight based on the total amount of the pigment dispersion) Comparative Example 3

除使用以下組分以具有表9中所示的組成外,根據與實例1相同的方法製備了根據比較例3的感光樹脂組成物。 (表9) (單位:克)

Figure TWI615678BD00029
(在表9中,NCI831在380奈米下具有最大吸光度,而TEB在345奈米下具有最大吸光度) (在表9中,以顏料分散液的總量計,以15重量%的量包含顏料固體)(評估) 評估:顯影裕度 A photosensitive resin composition according to Comparative Example 3 was prepared according to the same method as Example 1 except that the following components were used to have the composition shown in Table 9. (Table 9) (Unit: gram)
Figure TWI615678BD00029
(In Table 9, NCI831 has the maximum absorbance at 380 nm, and TEB has the maximum absorbance at 345 nm) (In Table 9, the pigment is contained in an amount of 15% by weight based on the total amount of the pigment dispersion. Solid) (Evaluation) Assessment: Development Margin

分別對根據實例1至實例6以及比較例1至比較例3的感光樹脂組成物進行塗佈、曝光(藉由使用半色調遮罩)、顯影、並進行後烘烤,以獲得圖案化樣品,且表10示出了柱狀間隙物圖案的10微米圖案的擋光層的台階厚度(step thickness)在10秒的顯影時間內的斜率變化,其中所述厚度是藉由使用非接觸型厚度計(三維(3-D)剖面儀)量測。 (表10)

Figure TWI615678BD00030
(在表10中,擋光區域中的顯影裕度指示半色調區域的在10秒的顯影時間內變化的厚度)The photosensitive resin compositions according to Examples 1 to 6 and Comparative Examples 1 to 3 were respectively coated, exposed (by using a halftone mask), developed, and post-baked to obtain a patterned sample. And Table 10 shows the slope change of the step thickness of the 10 μm pattern of the light barrier layer of the column spacer pattern in the development time of 10 seconds, wherein the thickness is by using a non-contact type thickness gauge (Three-dimensional (3-D) profiler) measurement. (Table 10)
Figure TWI615678BD00030
(In Table 10, the development margin in the light blocking area indicates the thickness of the halftone area which varies within a development time of 10 seconds)

參考表10,包含在360奈米至410奈米下具有最大透射率的著色劑以及在360奈米至410奈米下具有最大吸光度的光聚合起始劑的感光樹脂組成物示出了:與不包含所述著色劑的感光樹脂組成物相比,儘管具有相同的中央曝光劑量但在擋光區域中具有優異的顯影裕度。另外,分別以1:4至4:1(例如,1:3至3:1)的重量比包含所述著色劑及光聚合起始劑的感光樹脂組成物示出了:與不以1:4至4:1(例如,1:3至3:1)的重量比包含所述著色劑及光聚合起始劑的感光樹脂組成物相比,在擋光區域中具有優異的顯影裕度。Referring to Table 10, a photosensitive resin composition comprising a color former having a maximum transmittance at 360 nm to 410 nm and a photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm is shown: The photosensitive resin composition not containing the colorant has an excellent development margin in the light blocking region despite having the same central exposure amount. Further, the photosensitive resin composition containing the colorant and the photopolymerization initiator in a weight ratio of 1:4 to 4:1 (for example, 1:3 to 3:1), respectively, is shown as: The weight of 4 to 4:1 (for example, 1:3 to 3:1) has an excellent development margin in the light blocking region as compared with the photosensitive resin composition containing the coloring agent and the photopolymerization initiator.

雖然本發明已結合目前視為實用的示例性實施例加以闡述,但應理解,本發明不限於所揭露的實施例,而是相反地意欲涵蓋包含在隨附申請專利範圍的精神及範圍內的各種潤飾及等效配置。因此,應理解上述實施例為示範性的,而不以任何方式限制本發明。Although the present invention has been described in connection with the exemplary embodiments of the present invention, it is understood that the invention is not to be construed as limited Various finishes and equivalent configurations. Therefore, the above embodiments are to be considered as illustrative and not restrictive.

no

圖1是示出光聚合起始劑(NCI831)的吸光度依據波長而變化的曲線圖。 圖2是示出光聚合起始劑(TEB)的吸光度依據波長而變化的曲線圖。 圖3是示出光聚合起始劑(OXE01)的吸光度依據波長而變化的曲線圖。 圖4是示出包含849R、100Y及614B的顏料分散液的透射率依據波長而變化的曲線圖。 圖5是示出包含含有849R、100Y及614B的顏料分散液以及染料的著色劑的透射率依據波長而變化的曲線圖。Fig. 1 is a graph showing changes in absorbance of a photopolymerization initiator (NCI831) according to wavelength. Fig. 2 is a graph showing changes in absorbance of a photopolymerization initiator (TEB) depending on wavelength. Fig. 3 is a graph showing changes in absorbance of a photopolymerization initiator (OXE01) according to wavelength. 4 is a graph showing changes in transmittance of a pigment dispersion containing 849R, 100Y, and 614B depending on wavelength. Fig. 5 is a graph showing changes in transmittance of a coloring agent containing a pigment dispersion liquid containing 849R, 100Y, and 614B and a dye according to wavelength.

Claims (11)

一種感光樹脂組成物,包括:(A)著色劑,在360奈米至410奈米下具有最大透射率;(B)肟系光聚合起始劑以及三嗪系光聚合起始劑,其中所述肟系光聚合起始劑在360奈米至410奈米下具有最大吸光度,所述三嗪系光聚合起始劑在310奈米至360奈米下具有最大吸光度;(C)光可聚合單體;以及(D)溶劑;以及(E)黏合劑樹脂,其中以所述感光樹脂組成物的總量計,以0.01重量%至5重量%的量包含在310奈米至360奈米下具有最大吸光度的所述三嗪系光聚合起始劑。 A photosensitive resin composition comprising: (A) a colorant having a maximum transmittance at 360 nm to 410 nm; (B) a lanthanide photopolymerization initiator and a triazine-based photopolymerization initiator, wherein The lanthanide photopolymerization initiator has a maximum absorbance at 360 nm to 410 nm, and the triazine-based photopolymerization initiator has a maximum absorbance at 310 nm to 360 nm; (C) Photopolymerizable a monomer; and (D) a solvent; and (E) a binder resin, which is contained in an amount of from 0.01 nm to 360 nm in an amount of from 0.01% by weight to 5% by weight based on the total amount of the photosensitive resin composition The triazine-based photopolymerization initiator having the maximum absorbance. 如申請專利範圍第1項所述的感光樹脂組成物,其中所述著色劑是顏料、染料或其組合。 The photosensitive resin composition according to claim 1, wherein the colorant is a pigment, a dye, or a combination thereof. 如申請專利範圍第2項所述的感光樹脂組成物,其中所述顏料是有機顏料。 The photosensitive resin composition according to claim 2, wherein the pigment is an organic pigment. 如申請專利範圍第3項所述的感光樹脂組成物,其中所述有機顏料包含選自紅色顏料、綠色顏料、藍色顏料及黃色顏料中的兩個或更多的混合物。 The photosensitive resin composition according to claim 3, wherein the organic pigment comprises a mixture of two or more selected from the group consisting of a red pigment, a green pigment, a blue pigment, and a yellow pigment. 如申請專利範圍第1項所述的感光樹脂組成物,其中所述光聚合起始劑在370奈米至410奈米下具有最大吸光度。 The photosensitive resin composition according to claim 1, wherein the photopolymerization initiator has a maximum absorbance at from 370 nm to 410 nm. 如申請專利範圍第1項所述的感光樹脂組成物,其中以1:4至4:1的重量比包含在360奈米至410奈米下具有最大吸光度的所述肟系光聚合起始劑及在310奈米至360奈米下具有最大吸光度的所述三嗪系光聚合起始劑。 The photosensitive resin composition according to claim 1, wherein the oxime-based photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm is contained in a weight ratio of 1:4 to 4:1. And the triazine-based photopolymerization initiator having a maximum absorbance at 310 nm to 360 nm. 如申請專利範圍第1項所述的感光樹脂組成物,其中所述黏合劑樹脂包括丙烯酸系黏合劑樹脂、卡多系黏合劑樹脂或其組合。 The photosensitive resin composition according to claim 1, wherein the binder resin comprises an acrylic binder resin, a cardo binder resin, or a combination thereof. 如申請專利範圍第1項所述的感光樹脂組成物,其中以所述感光樹脂組成物的總量計,所述感光樹脂組成物包含:5重量%至50重量%的所述著色劑;0.1重量%至5重量%的在360奈米至410奈米下具有最大吸光度的光聚合起始劑;1重量%至10重量%的所述光可聚合單體;5重量%至20重量%的所述黏合劑樹脂;以及餘量的所述溶劑。 The photosensitive resin composition according to claim 1, wherein the photosensitive resin composition comprises: 5% by weight to 50% by weight of the coloring agent based on the total amount of the photosensitive resin composition; From 0% by weight to 5% by weight of the photopolymerization initiator having a maximum absorbance at 360 nm to 410 nm; 1% by weight to 10% by weight of the photopolymerizable monomer; 5% by weight to 20% by weight The binder resin; and the balance of the solvent. 如申請專利範圍第1項所述的感光樹脂組成物,其中所述感光樹脂組成物更包含以下添加劑:丙二酸、3-胺基-1,2-丙二醇、矽烷系偶合劑、調平劑、氟系界面活性劑、自由基聚合起始劑或其組合。 The photosensitive resin composition according to claim 1, wherein the photosensitive resin composition further comprises the following additives: malonic acid, 3-amino-1,2-propanediol, decane coupling agent, leveling agent A fluorine-based surfactant, a radical polymerization initiator, or a combination thereof. 一種黑色柱狀間隙物,藉由將如申請專利範圍第1項至申請專利範圍第9項中任一項所述的感光樹脂組成物曝光及顯影而製造。 A black columnar spacer is produced by exposing and developing a photosensitive resin composition as described in any one of the above-mentioned claims. 一種彩色濾光片,包括如申請專利範圍第10項所述的黑色柱狀間隙物。A color filter comprising the black columnar spacer as described in claim 10 of the patent application.
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