TWI615350B - Steady-state clamping system with non-contact release function - Google Patents

Abstract

A steady state clamping system having a non-contact release function includes two clamps, a flexible element unit connecting the clamps, and an actuator. The flexible element unit includes a first flexible element having a force that is subjected to a force to be flexibly deformed between a first steady state position and a second steady state position and coupled to the actuator Twisting department. When the bending portion is located at the first steady state position, the clamps reduce the spacing to clamp a minute component, and the trigger member forms a gap with the clamps, and the first portion is formed by the first portion. During the deflection of the steady state position to the second steady state position, the clamps expand the spacing to release the tiny component, and the trigger strikes the clamps and generates a vibration force that causes the tiny component to withstand the vibration Force off the clamps. Thereby, the non-contact vibration force can prevent the micro component from sticking to any of the clamps without contacting the micro component, thereby improving the smoothness of releasing the micro component.

Description

Steady-state clamping system with non-contact release function

The present invention relates to a steady state clamping system, and more particularly to a steady state clamping system that acts on a small component and has a non-contact release function.

Microelectromechanical systems (MEMS) are machines that are less than 1 mm in size and capable of performing precision and specific operations in a very small space. Since the components to be operated are relatively small and lightweight, it is easy for the structure and structure of the component to be "stiction" due to surface adhesion, resulting in failure of the MEMS component.

Referring to FIG. 1, an example of the invention patent of the "active steady-state clamping release system" of the Republic of China Patent No. I515162 includes a pushing member 11, two clamps 12 formed on two sides of the pushing member 11, and a connection. The clamp 12 is coupled to a first flexible member 13 of the push member 11 and a second flexible member 14. The first flexible element 13 and the second flexible element 14 can be used to reduce the spacing of the clamps 12 to clamp a small element 2 during the flexible deformation, or to enlarge the spacing to release the minute element 2, And when the clamp 12 releases the minute element 2, the pusher 11 is pushed to push the tiny element 2 away from the clamp 12. Thereby, the minute element 2 is prevented from sticking to any of the clamps 12.

However, since the case No. I515162 releases the minute element 2, the pusher 11 contacts the minute element 2 during the process of pushing the minute element 2, although it does not affect the action of releasing the minute element 2, but There is still room for improvement in the smoothness of the release action.

Accordingly, it is an object of the present invention to provide a steady state clamping system having a non-contact release function that can further enhance the smoothness of the release action.

Thus, the present invention has a non-contact release function steady state clamping system that acts on a tiny component that includes: two clamps, one flexible component unit, and one actuator.

The clamps are separated by a spacing.

The flexible component unit is coupled to the clamps and includes a first flexible component having two fixed ends and a flexible portion formed between the fixed ends, the flexible portion Subjecting a force to a flexural deformation between a first steady state position and a second steady state position, wherein the clamps reduce the spacing to clamp the minute element in the first steady state position, in the second In the steady state position, the clamps expand the spacing to release the tiny element.

The actuating member is coupled to the flexing portion of the first flexible member, and when the flexing portion is located at the first steady state position, an interval is formed between the trigger member and the clamp member a gap, in the process of the flexing portion being deflected from the first steady state position to the second steady state position, the trigger member impacts the clamps and generates a vibration force to cause the tiny component to withstand the vibration force Get detached from the clamps.

The utility model has the advantages that the non-contact vibration force can prevent the micro component from sticking to any of the clamps without contacting the micro component, thereby improving the smoothness of releasing the micro component.

3‧‧‧Micro components

4‧‧‧Clamps

41‧‧‧ convex

5‧‧‧Flexible element unit

51‧‧‧First flexible element

511‧‧‧ fixed end

512‧‧‧Tipping Department

52‧‧‧Second flexible element

521‧‧‧ fixed end

522‧‧‧Tip Department

6‧‧‧Touching parts

61‧‧‧Connecting Department

62‧‧‧Touching Department

621‧‧‧Bumps

7‧‧‧Acoustic

D‧‧‧ spacing

D1‧‧‧ gap

D2‧‧‧ gap

X‧‧‧ direction

Y‧‧‧ direction

f‧‧‧Magnetic force

F‧‧‧ reaction

F1‧‧‧ limit value

F2‧‧‧ limit value

A‧‧‧ position

B‧‧‧ position

C‧‧‧ position

Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 is a top plan view illustrating the Republic of China Patent No. I515162; FIG. 2 is a plan view showing the present invention having An embodiment of a steady-state clamping system with a non-contact release function; FIG. 3 is a top plan view showing that two of the flexure elements of a flexible component unit are in a first steady state position, and The clamp clamps a small component; FIG. 4 is a top plan view showing that the flexures in the flexible component unit are flexed from the first steady state position to the second steady state position in the embodiment, And the clamp releases the tiny component, and a touch member strikes the clamp; FIG. 5 is a top plan view illustrating the flexible component unit in the embodiment. The flexures are in a second steady state position and the minute elements are disengaged from the clamps; and FIG. 6 is the first steady state position of the flexures in the flexible element unit in the embodiment. A reaction force-displacement amount curve that is flexed to the second steady state position.

Referring to Figures 2 and 3, an embodiment of the steady-state clamping system of the present invention having a non-contact release function acts on a tiny component 3, including two clamps 4, a flexible component unit 5, and an actuator. 6, and an actuating member 7.

The clamps 4 are separated by a distance D, and each of the clamps 4 has a convex portion 41 formed on one inner side.

In the present embodiment, the flexible element unit 5 is an electrical conductor comprising a first flexible element 51 connecting the clamps 4 and extending in an X direction, and a second flexible element 52 extending in the X direction. The first flexible element 51 has two fixed ends 511 and a bending portion 512 formed between the fixed ends 511. The second flexible member 52 has two fixed ends 521 and a flexible portion 522 formed between the fixed ends 521. The flexures 512, 522 are subjected to a force F that is flexibly deformed between a first steady state position (Fig. 3) and a second steady state position (Fig. 5, Fig. 1). In the first steady state position, the clamps 4 reduce the spacing D to clamp the minute element 3, in the second steady state In the position, the clamps 4 enlarge the spacing D to release the minute element 3.

The trigger member 6 includes a connecting portion 61 connected to the bending portion 512 of the first flexible member 51, the bending portion 522 of the second flexible member 52, and extending in a Y direction, and is formed at the connecting portion. 61 is a proximity portion 62 adjacent one end of the clamps 4. The contact portion 62 has two projections 621 facing the convex portion 41 of the clamps 4 and separated by a distance. When the bending portions 512 and 522 are located at the first steady state position, the protrusions 621 form a dislocation relationship with the convex portions 41 of the clamps 4, and form a gap with one side of the convex portions 41. The gap d1, when the bending portions 512, 522 are located at the second steady state position, the bumps 621 form a dislocation relationship with the convex portions 41 of the clamps 4, and the other convex portions 41 Another gap d2 is formed between one side.

The actuating member 7 is a magnetic element in this embodiment and is located below or above the flexible element unit 5.

It should be noted that the manufacturing method of the present invention is similar to the case of the Republic of China Patent No. I515162, and the prototype of the flexible element unit 5 is also produced by an etching process. Since the general knowledge in the art can infer the details of the expansion based on the above description, it will not be explained.

In the present embodiment, the flexible element unit 5 is a tantalum material, and in the linear elastic and isotropic model, the Young's modulus E is 150 GPa, "Strain in the X direction" and "Y direction". The ratio of the strain (Poisson's ratio) was 0.28.

Referring to FIG. 2 and FIG. 3, since the flexible component unit 5 is a conductor, the actuating member 7 generates an electromagnetic effect with the first flexible component 51 and the second flexible component 51 after the current is turned on. Producing a magnetic force f perpendicular to the direction of the current (X direction). In this case, the currents are only required to flow in a clockwise direction, so that the bending portions 512, 522 can be flexibly deformed in the -Y direction to the first The steady state position causes the current to flow in a counterclockwise direction, so that the flexing portions 512, 522 can be flexibly deformed to the second steady state position in the +Y direction, so that the clamps 4 follow the flexing portion 512. The change in position reduces the pitch D or enlarges the pitch D.

Referring to FIG. 2 and FIG. 6, when the flexible element unit 5 is not conducting current, the first flexible element 51 and the second flexible element 52 are not subjected to the magnetic force f, so no reaction force is generated. F, therefore, the reaction force F is 0 mN and is stabilized at the second steady state position.

Referring to FIG. 3 and FIG. 6 , when the bending portion 512 of the first flexible element 51 and the bending portion 522 of the second flexible element 52 are subjected to the magnetic force, the Y-direction is flexibly deformed to the In the first steady state position, it can be found that the reaction force F generated by the flexing portion 512 of the first flexible element 51 and the flexing portion 522 of the second flexible element 52 is along with the solid line in the figure. The displacement amount increases and increases. After the position a reaches a limit value F1, the generated reaction force F falls to 0 mN of the position b. At this time, the bending portion 512 of the first flexible member 51 and the second flexibility The flexing portion 522 of the element 52 is still in an unstable, elastic state, and the reaction occurs when the displacement is further increased. The force F decreases, and after reaching the other limit value F2, it is again increased to 0 mN of the position c. Thereby, the bending portion 512 of the first flexible element 51 and the bending portion 522 of the second flexible element 52 can be generated as a constant reaction force F(0mN) by simply stopping the supply current, and stable. In the first steady state position.

At the same time, the clamps 4 cooperate with the concave arc of the flexure 512 of the first flexible element 51, and the clamp portion 512 of the first flexible element 51 is clamped along the X direction by the narrowing distance D. The minute element 3 is formed with the gap d1 between the bump 621 of the touch portion 62 of the actuator 6 and the convex portion 41 of the clamp 4 without touching the convex portion 41.

Referring to FIG. 3, FIG. 4, FIG. 5, and FIG. 6, when the current direction is changed, the bending portion 512 of the first flexible member 51 and the bending portion 522 of the second flexible member 52 are subjected to the magnetic force. When the action of the +Y direction is deformed to the second steady state position, it can be found that the reaction portion 512 of the first flexible element 51 and the deflection portion 522 of the second flexible element 52 generate a reaction. The absolute value of the force F also increases as the displacement increases. After reaching the limit value F2, the reaction force F gradually decreases, and a reaction force F such as a constant of the position b and equal to 0 mN is generated. The flexing portion 512 of the flexible member 51 and the flexing portion 522 of the second flexible member 52 are still in an unstable elastic state. When the displacement is further increased, the absolute value of the generated reaction force F increases. After reaching the limit value F1, it is again lowered to 0 mN of the position a, whereby the bending portion 512 of the first flexible element 51 and the second flexible element 52 can be flexed by simply stopping the supply current. The moving portion 522 is generated as a constant and equal to a reaction force F of 0 mN, and is stable. A second steady state position that is opposite to the first steady state position.

At the same time, the clamps 4 cooperate with the convex curvature of the first flexible element 5, and the first flexible element 51 expands the spacing D along the X direction to release the minute element 3, and in the clamps 4 as the flexing portion 512 is deflected from the first steady state position toward the second steady state position, the trigger member 6 is displaced in the +Y direction, and the bumps 621 are impacted at the relative positions. The portion 41 generates a vibration force that causes the minute element 3 to receive the vibration force and disengage from the clamps 4.

After the flexing portions 512, 522 are flexed from the first steady state position to the second steady state position, the bumps 621 of the actuation portion 62 of the actuator 6 are reappeared as shown in FIG. The gap d2 is formed by being displaced from the convex portion 411 of the clamp 4.

Through the above description, the advantages of the foregoing embodiments can be summarized as follows: The present invention can simultaneously use the trigger member 6 to strike the clamp 4 during the process of clamping or releasing the micro-component 3 by the pair of clamps 4, thereby utilizing The non-contact type vibration force prevents the minute element 3 from sticking to any of the clamps 4 without contacting the minute element 3, thereby further improving the smoothness of releasing the minute element 3.

However, the above is only the embodiment of the present invention, and the scope of the invention is not limited thereto, and all the simple equivalent changes and modifications according to the scope of the patent application and the patent specification of the present invention are still Within the scope of the invention patent.

3‧‧‧Micro components

4‧‧‧Clamps

41‧‧‧ convex

5‧‧‧Flexible element unit

51‧‧‧First flexible element

D2‧‧‧ gap

X‧‧‧ direction

Y‧‧‧ direction

522‧‧‧Tip Department

6‧‧‧Touching parts

511‧‧‧ fixed end

512‧‧‧Tipping Department

52‧‧‧Second flexible element

521‧‧‧ fixed end

61‧‧‧Connecting Department

62‧‧‧Touching Department

621‧‧‧Bumps

Claims (7)

A steady-state clamping system with a non-contact release function, acting on a tiny component, the steady-state clamping system comprising: two clamps spaced apart by a distance; a flexible component unit connecting the clamps, and The first flexible element has two fixed ends, and a flexible portion formed between the fixed ends, the bending portion receiving a force in a first steady state position a second steady state position between which the jaws reduce the spacing to clamp the minute element, and in the second steady state position, the jaws expand the spacing And releasing the tiny component; and a touch component is coupled to the flexible portion of the first flexible component, and when the flexible portion is located at the first steady state position, the trigger member and the clamp are formed with a gap, in the process of the flexing portion being deflected from the first steady state position to the second steady state position, the trigger member impacts the clamps and generates a vibration force to cause the micro-component to withstand the vibration force And leave the clamps. A steady-state clamping system having a non-contact release function as claimed in claim 1, wherein each of the clamps has a convex portion facing the trigger member, and the flexible portion is biased by the first steady-state position During the second steady state position, the actuator strikes the projections of the jaws. A steady-state clamping system having a non-contact release function according to claim 2, wherein the actuator comprises two projections formed at one end facing the clamps and separated by a distance, at the bending portion During the flexing of the first steady state position to the second steady state position, the bumps of the actuator respectively impact the convex portions of the clamps. The steady-state clamping system with non-contact release function according to claim 3, wherein the protrusion of the trigger member and the convex portion of the clamp when the bending portion is located at the first steady state position The gap is formed between one side, and when the bending portion is located at the second steady state position, the protrusion of the trigger member forms another gap with the other side of the convex portion of the clamp. A steady-state clamping system having a non-contact release function according to claim 1, wherein the flexible element unit further comprises a second flexible member having two fixed ends and forming a slanting portion between the fixed ends of the second flexible member and connected to the actuator. The steady-state clamping system with non-contact release function according to claim 5, wherein the trigger member comprises a connecting portion of the first flexible element and a flexible portion of the second flexible member. a connecting portion and a touch portion formed at one end of the connecting portion adjacent to the clamps. The steady-state clamping system with non-contact release function according to claim 1, further comprising an actuating member, the actuating member being a magnetic component, the flexible component unit being an electrical conductor, after conducting current The actuating member generates an electromagnetic effect that causes the flexing portion to be flexibly deformed by the magnetic force at the first steady state position and the second steady state position.