TWI726703B - Steady-state clamping device moving in linear direction - Google Patents

Abstract

A steady-state clamping device that moves in a linear direction, comprising a first clamping member and a second clamping member that are displaced along a first axis direction, connected to the first clamping member and at a first stable position At least one flexure unit flexibly deformed between a second stable position, a flexure unit connected to the second clamp, and a connection unit connected to the flexure unit and supported at a fixed point. When the at least one flexing unit is located at the first stable position, the first clamping piece and the second clamping piece are relatively close to each other and clamp a tiny portion through the linkage relationship between the flexing unit and the connecting unit. When the at least one flexing unit is located at the second stable position, the first clamping member is relatively far away from the second clamping member and the minute member is released. Thereby, the first clamping member and the second clamping member that move relatively in a straight line can prevent the tiny component from sticking or damage, and improve the smoothness and practicability of releasing the tiny component.

Description

Steady-state clamping device moving in linear direction

The invention relates to a clamping device, in particular to a steady-state clamping device that moves in a linear direction.

Micro-Electro-Mechanical System (MEMS) refers to a machine that is less than 1mm in size and can perform precise and specific operations in a very small space. Since the operating components are very small and light in weight, the structure and structure of the component are prone to "stiction" due to surface adhesion, which may lead to failure of the MEMS component.

Referring to Figure 1, it illustrates a conventional active steady-state clamping and releasing system disclosed in the Republic of China Patent No. 1515162, which includes a pusher 11, two clamps 12 formed on two sides of the pusher 11, and are connected to the A first flexible element 13 and a second flexible element 14 are equal to the clamp 12 and the pushing member 11. The first flexible element 13 and the second flexible element 14 can rotate the clamps 12 to reduce the distance and clamp a small element 2 during the process of flexible deformation, or rotate in the opposite direction to enlarge The small component 2 is released and the small component 2 is released, and when the clamps 12 release the small component 2, the pushing member 11 pushes the small component 2 away from the clamps 12. In this way, the tiny element 2 is prevented from sticking to any clamp 12.

However, the clamps 12 moving in a rotating manner will generate a biasing force on the tiny component 2 at the moment when the tiny component 2 is released, which may damage the tiny component 2. In addition, although the pushing member 11 can push the tiny component 2 to avoid sticking, the pushing action may also cause damage to the tiny component 2.

Therefore, the object of the present invention is to provide a steady-state clamping device that can move in a linear direction that can avoid sticking or damage.

Therefore, the steady-state clamping device moving in a linear direction of the present invention is connected to two fixed points and is suitable for clamping a small component, and includes a clamping unit, at least one flexing unit, a flexing unit, and a connecting unit .

The clamping unit includes a first clamping member and a second clamping member that can be displaced along a first axis direction.

The at least one flexible unit has at least one flexible portion connected to the first clamping member, and the at least one flexible portion is suitable for bending between a first stable position and a second stable position with respect to the tiny element The dynamic deformation is suitable for being adjacent to the tiny component when in the first stable position, and suitable for being away from the tiny component when in the second stable position.

The flexure unit includes a first flexure element and a second flexure element. The first flexure element has at least one first flexure portion connected to the first clamping member and flexibly deformable. At least one first flexure portion has two first flexure ends formed at opposite ends of the first clamping member and flexibly deformable, and the second flexible linkage member is connected to the second clamping member At least one second flexure part that is flexibly deformable, the at least one second flexure part has two second flexure ends that are formed at opposite ends of the second clamping part and are flexibly deformable .

The connecting unit includes two connecting pieces, and each connecting piece is connected to the flexing unit and supported at a respective fixed point, so that the clamping unit, the at least one flexing unit, and the flexing unit form a linkage.

Thereby, when the at least one flexible portion is located at the first stable position, the at least one first flexible portion and the at least one second flexible portion are close to each other, and the first clamping member and the second The clamping member is suitable for clamping the tiny element. When the at least one flexible portion is located at the second stable position, the at least one first flexible portion and the at least one second flexible portion are far away from each other, and the first flexible portion The clamping piece and the second clamping piece are suitable for releasing the tiny element.

The effect of the present invention is that the first clamping member and the second clamping member that move relatively in a straight line can prevent the tiny component from sticking or damage, and improve the smoothness and practicability of releasing the tiny component.

2 and 3, an embodiment of the steady-state clamping device moving in a linear direction of the present invention is connected to two fixed points 3, and is suitable for clamping a small component 4, and includes a clamping unit 5 and two flexures Unit 6, a flexure unit 7, and a connection unit 8.

The clamping unit 5 includes a first clamping member 51 and a second clamping member 52 that can be displaced along a first axis X direction. The first clamping member 51 includes a first clamping surface 511 extending along a second axis Y direction. The second clamping member 52 includes a second clamping surface 521 parallel to the first clamping surface 511. The second axis Y is perpendicular to the first axis X.

The flexible units 6 are arranged along the second axis Y direction and extend along the first axis X direction. Each flexing unit 6 includes a flexing element 61. The flexible element 61 has two flexible portions 611 connected to two sides of the first clamping member 51. Each flexible portion 611 has a connecting end 612 formed at an end opposite to the first clamping member 51 and connected to the corresponding fixed point 3.

The flexure portions 611 are suitable for flexing and deforming between a first stable position (as shown in FIG. 3) and a second stable position (as shown in FIG. 4) relative to the tiny element 4. When in the first stable position , Suitable for being adjacent to the tiny component 4, and suitable for being far away from the tiny component 4 when in the second stable position.

The flexible unit 7 includes a first flexible element 71 and a second flexible element 72.

The first flexible element 71 has two first flexible portions 711 that are connected to two sides of the first clamping member 51 and can be flexibly deformed. Each first flexure portion 711 has a first flexure end 712 formed at an end opposite to the first clamping member 51 and can be flexibly deformed.

The second flexible element 72 has two second flexible portions 721 that are connected to two sides of the second clamping member 52 and can be flexibly deformed. Each second flexure portion 721 has a second flexure end 722 formed at an end opposite to the second clamping member 52 and can be flexibly deformed.

The connecting unit 8 includes two connecting pieces 81. In this embodiment, each connecting piece 81 has a first connecting end 811 connected to a respective first flexible end 712 and a respective second flexible end 722. , And a second connecting end 812 opposite to the first connecting end 811 and flexibly connected to the respective fixed points 3, so that the second connecting end 812 is supported at the respective fixed points 3. Thereby, through the connecting unit 8, the clamping unit 5, the flexing units 6, and the flexing unit 7 are linked together.

It is worth noting that the manufacturing method of this case is similar to that of the Republic of China Patent No. 1515162. The clamping unit 5, the flexing units 6, the flexing units 7 and the connecting unit 8 are also produced through an etching process. Prototype. Since those with ordinary knowledge in the field can deduce the details of the expansion based on the above description, no further description will be given.

2 and 5, when the flexure parts 611 of the flexure elements 61 are not subjected to any force f, the flexure parts 611 of the flexure elements 61 will not generate a reaction force F. Therefore, the reaction force F It is 0mN and is stable at the first steady-state position.

3, 4, and 5, when the flexure portions 611 of the flexure elements 61 receive a force f along the first axis X direction, and the first steady state position follows the first axis X direction When flexing and deforming to the second steady-state position, it can be found that the reaction force F generated by the flexure portions 611 of the flexure elements 61 will increase with the increase of the displacement, and reach a limit value F1 from the position a. After that, the generated reaction force F gradually drops to 0 mN at position b. At this time, the flexure parts 611 of the flexure elements 61 are still in an unstable and elastic state. When the displacement is further increased, The generated reaction force F decreases, and after reaching another limit value F2, it increases again to 0 mN at position c. Thereby, only by stopping the force applied to the flexible portions 611, the flexible portions 611 of the flexible elements 61 can generate a constant reaction force F (0 mN), which is stable in the second stable state. State location.

At the same time, when the flexible parts 611 of the flexible elements 61 are displaced from the first stable position to the second stable position, in addition to pushing the first clamping member 51 along the first axis In addition to the displacement of the tiny element 4 in the X direction, the first clamping member 51 will also push the first flexible parts 711 of the first flexible element 71 to bend and deform, so that the first flexible parts 711 In the process of bending and deformation, the connection relationship between the connecting pieces 81 and the fixed points 3 and the second flexible element 72, and the first flexible ends 712 and the second flexible ends 722 With the flexible change of the second connecting ends 812, the second flexible portions 721 of the second flexible element 72 are driven to bend and deform simultaneously, and the second clamping member 52 is driven along the first axis. The X-direction is displaced toward the micro-element 4 direction, whereby the first clamping member 51 and the second clamping member 52 are respectively displaced relative to each other by the first clamping surface 511 and the second clamping surface 521. Ways to reduce the spacing to clamp the tiny component 4.

When the direction of the force f is changed so that the flexure portions 611 of the flexure elements 61 receive the aforementioned reverse force f and flex and deform to the first stable position in the direction of the first axis X, it can be found that , The absolute value of the reaction force F generated by the flexure portion 611 of the flexure elements 61 will also increase with the increase of the displacement. After reaching the limit value F2, the reaction force F gradually decreases, and a position such as b The constant and equal to the reaction force F of 0mN. At this time, the flexure parts 611 of the flexure elements 61 are still in an unstable and elastic state. When the displacement is further increased, the absolute value of the reaction force F generated increases , After reaching the limit value F1, it is lowered to 0 mN of position a again, so that the same only need to stop the force applied to the flexible parts 611, the flexible parts 611 of the flexible elements 61 can be generated as The reaction force F, which is constant and equal to 0 mN, is stable at the first steady-state position opposite to the second steady-state position.

At the same time, when the flexible parts 611 of the flexible elements 61 are displaced from the second stable position to the first stable position, in addition to driving the first clamping member 51 along the first axis In addition to the displacement in the X direction opposite to the direction of the tiny element 4, the first clamping member 51 will also drive the first flexible parts 711 of the first flexible element 71 to bend and deform, so that the first In the process of bending and deforming, the flexure portion 711 passes through the connection relationship between the connecting members 81 and the fixed points 3 and the second flexible element 72, and the first flexure ends 712 and the second flexure The flexible changes of the movable end 722 and the second connecting ends 812 synchronously drive the second flexible portions 721 of the second flexible element 72 to bend and deform, and drive the second clamping member 52 along the The first axis X is displaced in the direction away from the micro element 4, thereby causing the first clamping member 51 and the second clamping member 52 to respectively expand the first clamping surface 511 and the second clamping surface At the same time, the distance of 521 is separated from the micro component 4, and the micro component 4 is released.

It should be noted that the second connecting end 812 of each connecting member 81 is not limited to be connected to a respective fixed point 3. In other variations of this embodiment, it can also be connected to the corresponding flexure as shown in FIG. The portion 611 is adjacent to the position of the connecting end 612, whereby the connecting position can also be connected to the position of the connecting end 612 to achieve the effect of support and bending. Since those with ordinary knowledge in the field can deduce the details of the expansion based on the above description, no further description will be given.

Based on the above description, the advantages of the foregoing embodiments can be summarized as follows:

In the present invention, the first clamping piece 51 and the second clamping piece 52, which can move relatively in a straight line, are separated from the small component 4 synchronously and immediately in the process of moving away from the small component 4 to prevent the small component 4 from sticking or sticking. Damage, thereby improving the smoothness and practicability of releasing the micro element 4.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

3: fixed point

4: Tiny components

5: Clamping unit

51: The first clamping piece

511: The first clamping surface

52: The second clamping piece

521: second clamping surface

6: Deflection unit

61: Flexing element

611: Twisting part

612: link end

7: Flex unit

71: The first flexible element

711: first flexure part

712: first flexible end

72: second flexible element

721: second flexure part

722: second flexible end

8: Connection unit

81: connecting piece

811: first connection end

812: second connection end

X: first axis

Y: second axis

f: force

F: reaction force

F1: limit value

F2: limit value

a: location

b: location

c: location

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a schematic top view illustrating a conventional active steady-state clamping and releasing system disclosed in the Republic of China Patent No. 1515162; Figure 2 is a schematic top view illustrating an embodiment of the steady-state clamping device moving in a linear direction according to the present invention; 3 is a schematic top view illustrating that the two flexible portions in this embodiment are located at a first stable position, and a first clamping member and a second clamping member clamp a tiny element; FIG. 4 is a schematic top view similar to FIG. 3, but the flexible portions are located in a second stable position, and the first clamping member and the second clamping member release the tiny element; Fig. 5 is a reaction force-displacement curve diagram of the flexure portions from the first stable position to the second stable position in the embodiment; and Fig. 6 is a schematic top view illustrating a variation of a connecting unit in this embodiment.

3: fixed point

5: Clamping unit

51: The first clamping piece

511: The first clamping surface

52: The second clamping piece

521: second clamping surface

6: Deflection unit

61: Flexing element

611: Twisting part

612: connection end

7: Flex unit

71: The first flexible element

711: first flexure part

712: first flexible end

72: second flexible element

721: second flexure part

722: second flexible end

8: Connection unit

81: connecting piece

811: first connection end

812: second connection end

X: first axis

Y: second axis

Claims (9)

A steady-state clamping device that moves in a linear direction is connected to two fixed points and is suitable for clamping a small component, and includes: a clamping unit, including a first clamping member that can be displaced along a first axis direction, and A second clamping member; at least one flexible unit having at least one flexible portion connected to the first clamping member, and the at least one flexible portion is suitable for a first stable position and a first stable position relative to the tiny element The second stable position is flexurally deformed. When in the first stable position, it is suitable for being adjacent to the tiny component, and when in the second stable position, it is suitable for being far away from the tiny component; a flexure unit, including a first A flexible element, and a second flexible element, the first flexible element has at least one first flexure connected to the first clamp and flexibly deformable, and the second flexible link has At least one second flexure portion connected to the second clamping piece and flexibly deformable, the at least one first flexure portion having two ends formed opposite to the first clamping piece and flexibly deformable The at least one second flexure portion has two second flexure ends that are formed at opposite ends of the second clamping member and are flexibly deformable; and a connecting unit, including Two connecting pieces, each connecting piece has a first connecting end connected to a respective first flexible end and a respective second flexible end, and is opposite to the first connecting end and supported by each A fixed-point second connecting end enables the clamping unit, the at least one flexing unit, and the flexing unit to form a linkage; thereby, when the at least one flexing portion is located at the first stable position, The at least one first flexible portion and the at least one second flexible portion are close to each other, and the first clamping member and the second clamping member are adapted to clamp the minute element, when the at least one flexible portion is located at the In the second stable position, the at least one first flexible portion and the at least one second flexible portion are far away from each other, and the first clamping member and the second clamping member are suitable for releasing the tiny element. The steady-state clamping device moving in a linear direction according to claim 1, wherein the first clamping member includes a first clamping surface, and the second clamping member includes a second clamping surface parallel to the first clamping surface. Clamping surface. The steady-state clamping device moving in a linear direction according to claim 1, wherein the flexible element has two flexible portions connected to two sides of the first clamping member. The steady-state clamping device moving in a linear direction according to claim 1 or 3 includes two flexible units arranged along a second axis direction, and the second axis is perpendicular to the first axis. The steady-state clamping device moving in a linear direction according to claim 1, wherein the first flexible element has two first flexure portions connected to two sides of the first clamping member and flexibly deformable. The steady-state clamping device moving in a linear direction according to claim 1 or 5, wherein the second flexible element has two second flexure portions that are connected to two sides of the second clamping member and are flexibly deformable . The steady-state clamping device moving in a linear direction according to claim 1, wherein the second connecting end is flexibly connected to respective fixed points. The steady-state clamping device moving in a linear direction according to claim 1, wherein the second connecting end is flexibly connected to the at least one flexing unit. The steady-state clamping device moving in a linear direction according to claim 8, wherein the at least one flexure unit includes a flexure element, the flexure element has the at least one flexure portion, and the at least one flexure portion has It is formed at the two opposite ends and connected to the two connecting ends of the fixed points.

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