TWI614550B - 液晶顯示裝置用陣列基板的製備方法及其多層膜用蝕刻液組合物 - Google Patents

液晶顯示裝置用陣列基板的製備方法及其多層膜用蝕刻液組合物 Download PDF

Info

Publication number
TWI614550B
TWI614550B TW103128514A TW103128514A TWI614550B TW I614550 B TWI614550 B TW I614550B TW 103128514 A TW103128514 A TW 103128514A TW 103128514 A TW103128514 A TW 103128514A TW I614550 B TWI614550 B TW I614550B
Authority
TW
Taiwan
Prior art keywords
weight
molybdenum
copper
etching
item
Prior art date
Application number
TW103128514A
Other languages
English (en)
Chinese (zh)
Other versions
TW201508383A (zh
Inventor
李恩遠
李智娟
權五柄
崔容碩
Original Assignee
東友精細化工有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東友精細化工有限公司 filed Critical 東友精細化工有限公司
Publication of TW201508383A publication Critical patent/TW201508383A/zh
Application granted granted Critical
Publication of TWI614550B publication Critical patent/TWI614550B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
TW103128514A 2013-08-27 2014-08-19 液晶顯示裝置用陣列基板的製備方法及其多層膜用蝕刻液組合物 TWI614550B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20130101901 2013-08-27
??10-2013-0101901 2013-08-27
KR1020140080710A KR102091847B1 (ko) 2013-08-27 2014-06-30 액정표시장치용 어레이 기판의 제조방법
??10-2014-0080710 2014-06-30

Publications (2)

Publication Number Publication Date
TW201508383A TW201508383A (zh) 2015-03-01
TWI614550B true TWI614550B (zh) 2018-02-11

Family

ID=53021266

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103128514A TWI614550B (zh) 2013-08-27 2014-08-19 液晶顯示裝置用陣列基板的製備方法及其多層膜用蝕刻液組合物

Country Status (2)

Country Link
KR (1) KR102091847B1 (ko)
TW (1) TWI614550B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102293675B1 (ko) * 2015-03-24 2021-08-25 동우 화인켐 주식회사 구리계 금속막 식각액 조성물 및 이를 이용한 액정 표시 장치용 어레이 기판의 제조방법
KR102310097B1 (ko) * 2015-12-10 2021-10-08 동우 화인켐 주식회사 액정표시장치용 어레이 기판의 제조방법
KR102603630B1 (ko) * 2016-04-25 2023-11-17 동우 화인켐 주식회사 표시장치용 어레이 기판의 제조방법
KR102379073B1 (ko) * 2017-03-28 2022-03-28 동우 화인켐 주식회사 식각액 조성물

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200916606A (en) * 2007-09-19 2009-04-16 Nagase Chemtex Corp Etching composition
CN100494499C (zh) * 2002-12-12 2009-06-03 乐金显示有限公司 用于多层铜和钼的蚀刻溶液及使用该蚀刻溶液的蚀刻方法
TW201224211A (en) * 2010-12-10 2012-06-16 Dongwoo Fine Chem Co Ltd Composition solution and method of manufacturing an arrayed substrate for LCD, etching copper-based metal layer using the same, and arrayed substrate of LCD
CN103052907A (zh) * 2010-07-30 2013-04-17 东友Fine-Chem股份有限公司 用于制造液晶显示装置用阵列基板的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101495683B1 (ko) 2008-09-26 2015-02-26 솔브레인 주식회사 액정표시장치의 구리 및 구리/몰리브데늄 또는 구리/몰리브데늄합금 전극용 식각조성물
KR101495619B1 (ko) * 2008-10-10 2015-02-26 솔브레인 주식회사 고선택비를 갖는 구리(구리합금) 식각액 및 이를 이용한 액정표시장치의 제조방법
KR101529733B1 (ko) 2009-02-06 2015-06-19 동우 화인켐 주식회사 액정표시장치용 어레이 기판의 제조방법
KR101702129B1 (ko) * 2010-05-20 2017-02-06 동우 화인켐 주식회사 액정표시장치용 어레이 기판의 제조방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100494499C (zh) * 2002-12-12 2009-06-03 乐金显示有限公司 用于多层铜和钼的蚀刻溶液及使用该蚀刻溶液的蚀刻方法
TW200916606A (en) * 2007-09-19 2009-04-16 Nagase Chemtex Corp Etching composition
CN103052907A (zh) * 2010-07-30 2013-04-17 东友Fine-Chem股份有限公司 用于制造液晶显示装置用阵列基板的方法
TW201224211A (en) * 2010-12-10 2012-06-16 Dongwoo Fine Chem Co Ltd Composition solution and method of manufacturing an arrayed substrate for LCD, etching copper-based metal layer using the same, and arrayed substrate of LCD

Also Published As

Publication number Publication date
KR102091847B1 (ko) 2020-03-20
TW201508383A (zh) 2015-03-01
KR20150024764A (ko) 2015-03-09

Similar Documents

Publication Publication Date Title
KR101529733B1 (ko) 액정표시장치용 어레이 기판의 제조방법
TWI598467B (zh) 製備薄膜電晶體通道蝕刻組合物及製備薄膜電晶體通道方法
TWI524428B (zh) 液晶顯示器用之陣列基板及其製造方法以及蝕刻銅系金屬層之方法及其蝕刻劑組成物
KR101475954B1 (ko) 액정표시장치용 어레이 기판의 제조 방법
TW201518545A (zh) 液晶顯示器用陣列基板的製造方法
CN104419930A (zh) 蚀刻液组合物及液晶显示装置用阵列基板的制造方法
TWI512832B (zh) 用以製造液晶顯示裝置用之陣列基板的方法以及蝕刻銅系金屬層之方法及其蝕刻劑組成物
KR102137013B1 (ko) 표시장치용 어레이 기판의 제조방법
KR101933529B1 (ko) 구리계 금속막의 식각액 조성물 및 이를 이용한 액정표시장치용 어레이 기판의 제조방법
TWI614550B (zh) 液晶顯示裝置用陣列基板的製備方法及其多層膜用蝕刻液組合物
TWI632670B (zh) 用於銅基金屬膜的蝕刻劑組合物及製造液晶顯示器用陣列基板的方法
CN107630219B (zh) 金属膜蚀刻液组合物及显示装置用阵列基板的制造方法
KR20160112470A (ko) 식각액 조성물 및 액정표시장치용 어레이 기판의 제조방법
KR101586865B1 (ko) 액정표시장치용 어레이 기판의 제조방법
KR101539765B1 (ko) 액정표시장치용 어레이 기판의 제조 방법
TWI510848B (zh) 蝕刻劑組成物、蝕刻銅系金屬層之方法及用以製造液晶顯示裝置用之陣列基板的方法
KR20170112886A (ko) 구리계 금속막용 식각액 조성물, 이를 이용한 표시장치용 어레이 기판의 제조방법
KR20180077610A (ko) 금속막 식각액 조성물 및 표시장치용 어레이 기판의 제조방법
CN103107130A (zh) 用于液晶显示器的阵列基板及其制造方法，蚀刻液组合物和形成金属配线的方法
CN107236956B (zh) 用于铜基金属层的蚀刻剂组合物及用其制造显示设备的阵列基板的方法
KR102505196B1 (ko) 구리계 금속막의 식각액 조성물 및 이를 이용한 액정표시장치용 어레이 기판의 제조방법
CN111755461A (zh) 液晶显示装置用阵列基板的制造方法及用于其的铜系金属膜蚀刻液组合物
KR20150035213A (ko) 액정표시장치용 어레이 기판의 제조방법
KR20160114825A (ko) 구리계 금속막의 식각액 조성물 및 이를 이용한 액정표시장치용 어레이 기판의 제조방법
KR102058168B1 (ko) 액정표시장치용 어레이 기판의 제조방법