TWI613078B - Used in laminated bodies for fabricating electronic parts, thin film sensors, and touch panel devices having thin film sensors - Google Patents

Description

Used in laminated bodies for fabricating electronic parts, thin film sensors, and touch panel devices having thin film sensors

The present invention relates to a laminate used for fabricating electronic components such as thin film sensors. Furthermore, the present invention relates to a thin film sensor and a touch panel device having the same.

Touch panel devices are widely used as input means today. The touch panel device includes a thin film sensor (touch panel sensor), a control circuit for detecting a contact position on the thin film sensor, wiring, and an FPC (Flexible Printed Substrate). In most cases, the touch panel device is used together with the display device as various devices (such as ticket vending machines, ATM devices, mobile phones, game machines) that are incorporated into display devices such as liquid crystal displays or plasma displays. ) the means of input. In the device as shown above, the film sensor is disposed on the display surface of the display device, whereby extremely direct input to the display device can be performed. The area of the film sensor opposite the display area of the display device is transparent, and the area of the film sensor constitutes an active area where the contact position (proximity position) can be detected.

Electronic components such as thin film sensors are generally composed of a plurality of layers such as a layer for realizing optical characteristics or a layer for realizing electrical characteristics. In the method for producing the electronic component as described above, it is known to prepare a laminate including a substrate film and a transparent conductive layer or a metal-containing light-shielding conductive layer, and then, any of the laminates A method in which a layer is patterned by photolithography or the like.

In one of the methods for producing a laminate, it is known to prepare a substrate film first, and then use a physical vapor deposition film formation method such as a sputtering method or an EB vapor deposition method to laminate a transparent conductive layer or a light-shielding film on the substrate film. A method of conducting a layer. For example, Patent Document 1 discloses a laminated body in which a buffer layer, a functional layer, and a transparent conductive layer are sequentially provided on one side of a base film, and a resistive film type touch panel sensing is manufactured using the laminated body. Device.

[Previous Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-91406

In recent years, the required characteristics of electronic components such as touch panel sensors have become increasingly high. Therefore, the structure of the electronic component is complicated, and accordingly, the layer configuration used for the laminated body for producing the electronic component is complicated. The complication of the structure of the electronic component or the layer composition of the laminated body means that the manufacturing process is complicated by this, and as a result, the product is formed in the manufacturing process. The layer on the outermost surface of the layer has a greater chance of being damaged. For example, when a laminated body is conveyed by using a roller, some foreign matter is interposed between the roller and the laminated body, and as a result, an indentation due to foreign matter may be formed on the surface of the laminated body. In order to prevent the formation of the indentation as described above, it is preferable to provide a layer having a suitable hardness which can absorb the pressure from the foreign matter without leaving an indentation on the surface of the laminated body on the surface of the base film in the laminated system.

On the other hand, the laminated body used in the touch panel sensor for manufacturing a resistive film method as disclosed in the above Patent Document 1 is generally not designed to have a degree of preventing the formation of an indentation. Hardness. The touch panel sensor based on the resistive film method detects the contact position according to the pressure applied by the pen or the finger, and therefore is disposed on the surface of the base film between the substrate film and the transparent conductive layer. The layer system is required to have a certain degree of softness. For example, Patent Document 1 discloses that the Martens hardness in the surface of the functional layer when the transparent conductive layer is peeled off from the laminate is 100 N/mm ² or less.

However, in recent years, capacitive coupling type touch panel sensors have attracted attention for reasons such as being optically bright, design-oriented, easy to construct, and excellent in function. A capacitively coupled touch panel sensor utilizes parasitic capacitance due to contact or proximity of an external conductor to detect a contact position. Therefore, the flexibility of the capacitive touch panel touch panel sensor does not require a touch panel sensor such as a resistive film type. However, since the touch panel sensor of the resistive film type is popular, the history of the capacitive coupling type touch panel sensor is slow, and the touch panel sensor for manufacturing the capacitive coupling method is used. Lamination In the past, it has been mainly used in the same manner as or similar to the laminated body of the touch panel sensor for manufacturing a resistive film method. At this time, since the characteristics of the capacitively coupled touch panel sensor are not particularly required, that is, the flexibility of the inner layer of the laminated body, it is easy to form an indentation on the surface of the laminated body.

The present invention has been made in view of the circumstances as described above, and it is an object of the invention to provide a laminated body which is configured to prevent formation of an indentation. Further, an object of the present invention is to provide a thin film sensor obtained by patterning the laminated body, and a touch panel device including the same.

The present invention is a laminated body which is used in a laminated body for producing a thin film sensor for a touch panel, the laminated body having a surface on one side and a side on the other side, the laminated system having a base film; a first hard coat layer provided on a surface of one side of the base film; and a first surface provided on a surface of one of the first hard coat layers In the layer, the thickness of the first surface layer is less than 1 μm, and the total thickness of the first surface layer and the thickness of the first hard coat layer is more than 1 μm, and the Vickers pressure is applied from one side of the laminated body. The Vickers indenter is pressed into the laminate to have a Martens hardness of 270 N/mm ² or more when the maximum indentation amount of the Vickers indenter is 1 μm.

In the laminate of the present invention, the first surface layer may include a first index matching layer provided on the first hard coat layer. this In addition, the first surface layer may further include a first transparent conductive layer which is provided on one side of the first refractive index matching layer and has translucency and conductivity. Further, the first surface layer may further include a first ruthenium oxide layer formed of ruthenium oxide provided between the first refractive index matching layer and the first transparent conductive layer. Further, the first surface layer may further include a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity.

In the laminated body of the present invention, the first surface layer may further include a first ruthenium oxide layer which is provided on the first hard coat layer and is made of ruthenium oxide. In this case, the first surface layer may further include a first transparent conductive layer which is provided on one side of the first ruthenium oxide layer and has translucency and conductivity. Further, the first surface layer may further include a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity.

In the laminate of the present invention, it is preferable that the thickness of the first hard coat layer is in the range of 0.8 μm to 7.0 μm.

In the laminate of the present invention, the first surface layer may include at least a first transparent conductive layer having light transmissivity and conductivity. In this case, the first surface layer may further include a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity.

The laminate of the present invention may further include: a second hard coat layer provided on the other side of the base film; and a surface provided on the other side of the second hard coat layer The second surface layer on the top. In this case, the thickness of the second surface layer is less than 1 μm, and the total thickness of the second surface layer and the thickness of the second hard coat layer is more than 1 μm, and the Vickers is formed by the other side of the laminate. When the maximum indentation amount of the Vickers indenter is 1 μm, the Martens hardness measured by the indentation of the laminate is 270 N/mm ² or more.

The present invention relates to a film sensor comprising: a base film; a first hard coat layer provided on a side of one side of the base film; and a first hard coat set in a predetermined pattern a first transparent conductive pattern having a light transmissive property and a conductive property on one side of the layer; and a first extraction pattern provided on the first transparent conductive pattern in a predetermined pattern and having light blocking properties and conductivity; The first transparent conductive pattern and the front extraction pattern are obtained by patterning the first transparent conductive layer and the first light-shielding conductive layer of the laminated body described above.

The present invention relates to a touch panel device, comprising: a thin film sensor, and a touch panel device for detecting a control circuit on a contact position on the thin film sensor, wherein the thin film sensor is provided with The film sensor described above.

According to the present invention, the laminated system is configured such that the Martens hardness measured by pressing the Vickers indenter into the laminated body from one side of the laminated body becomes 270 N when the maximum pressing amount of the Vickers indenter is 1 μm. Mm ² or more. Therefore, it is possible to suppress the formation of an indentation on the surface of the laminated body in the manufacturing process.

1‧‧ ‧ laminated body

1a‧‧‧ Surface of the side of one of the laminated bodies 1

1b‧‧‧ Surface of the other side of the laminated body 1

2‧‧‧Substrate film

2a‧‧‧Side on the side of one of the base film 2

2b‧‧‧ is provided on the other side of the base film 2

3a, 3b‧‧‧ hard coating

4a, 4b‧‧‧ high refractive index layer

5a, 5b‧‧‧ low refractive index layer

6a, 6b‧‧‧ yttrium oxide layer

7a, 7b‧‧‧ transparent conductive layer

8a, 8b‧‧‧ shading conductive layer

10‧‧‧Intermediate laminate

11a, 11b‧‧‧index matching layer

12a, 12b‧‧‧ surface layer

15‧‧‧Laminated manufacturing equipment

20‧‧‧ Unwinding device

21‧‧‧Axis

30‧‧‧ Film forming device

31‧‧‧1st area

31a‧‧‧Exhaust means

32a‧‧‧ Target

33‧‧‧2nd area

33a‧‧‧Exhaust means

35‧‧‧3rd area

35a‧‧‧Exhaust means

38‧‧‧Transport drum

39, 59‧‧‧ Guide roller

50‧‧‧ Winding device

51‧‧‧Axis

53‧‧‧ Near roller

60‧‧‧Touch panel sensor

62a, 62b‧‧‧ transparent conductive pattern

64a, 64b‧‧‧ take out the pattern

65a, 65b‧‧‧ Terminals

70‧‧‧Vickers head

Fig. 1 is a view showing a laminated body manufacturing apparatus in an embodiment of the present invention.

Fig. 2 is a view showing a film forming apparatus of the laminated body manufacturing apparatus shown in Fig. 1;

Fig. 3 is a view showing a winding device of the laminated body manufacturing apparatus shown in Fig. 1;

Fig. 4 is a cross-sectional view showing a laminated body in an embodiment of the present invention.

Fig. 5 is a cross-sectional view showing a modification of the laminated body shown in Fig. 4;

6(a) and 6(b) are views for explaining a method of measuring the Martens hardness of a laminate.

Fig. 7 is a view showing an example of a method of calculating the Martens hardness when the maximum pressing amount of the Vickers indenter is 1 μm.

Fig. 8 is a plan view showing a film sensor obtained by patterning the laminated body shown in Fig. 5.

Figure 9 is a cross-sectional view taken along line IX-IX of the film sensor shown in Figure 8.

Fig. 10 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 11 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 12 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 13 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 14 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 15 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 16 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 17 is a cross-sectional view showing a modification of one of the laminates.

Fig. 18 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 19 is a cross-sectional view showing a modification of one of the laminated bodies.

Fig. 20 (a) and (b) are views showing an indentation formed on the surface of the layered product of the sample A1.

Fig. 21 is a graph showing the results of evaluation of the Martens hardness and the density of the indentations in each of the samples of the examples.

Embodiments of the present invention will be described below with reference to Figs. 1 to 7 . First, the laminated body 1 manufactured in the present embodiment will be described with reference to Fig. 4 .

Laminated body

4 is a cross-sectional view showing the laminated body 1. As shown in FIG. 4, the laminated body 1 is provided with a base film 2, a first hard coat layer 3a provided on the surface 2a of one side of the base film 2, and a first hard coat layer 3a. The first surface layer 12a on the side of one of the sides. The base film 2, the first hard coat layer 3a, and the first surface layer 12a will be described below.

(substrate film)

In the case of the base film 2, a film having sufficient light transmittance is used. Examples of the material constituting the base film 2 include, for example, polyethylene terephthalate (PET), cycloolefin polymer (COP), cyclic olefin copolymer (COC), polycarbonate (PC), and triacetic acid. Cellulose (TAC), polymethyl methacrylate (PMMA), and the like. The thickness of the base film 2 is, for example, in the range of 25 μm to 200 μm.

(hard coating)

The first hard coat layer 3a is a layer provided for the purpose of preventing scratching or the like, or preventing the appearance of a low molecular weight polymer (oligomer) at the interface between the layers and looking cloudy. For the first hard coat layer 3a, for example, an acrylic resin or the like is used. Further, as shown in FIG. 4, a second hard coat layer 3b made of the same material as the first hard coat layer 3a may be additionally provided on the other surface 2b of the base film 2.

(surface layer)

In the present embodiment, the "surface layer" is used in a term used to collectively denote a layer which is provided on the outer side of the hard coat layers 3a and 3b. For example, in the example shown in FIG. 4, a plurality of layers located outside the first hard coat layer 3a, that is, a plurality of layers provided on one side of the first hard coat layer 3a are collectively referred to as a first surface. Layer 12a. Further, as shown in FIG. 5 which will be described later, when a plurality of layers are provided on the outer side of the second hard coat layer 3b, that is, on the other side of the second hard coat layer 3b, the layers are collectively referred to as 2 surface layer 12b.

The first surface layer 12a is as shown in FIG. 4 and includes: The first refractive index matching layer 11a on the surface on the side of one of the first hard coat layers 3a and the first ruthenium oxide layer 6a on the surface on the side of one of the first refractive index matching layers 11a are provided. The first transparent conductive layer 7a on the surface on one side of the first ruthenium oxide layer 6a and the first light-shielding conductive layer 8a on the surface on the side of one of the first transparent conductive layers 7a. Each layer 11a, 6a, 7a, 8a will be described below.

[index matching layer]

The first index matching layer 11a is a layer provided to adjust the optical characteristics of the layered body 1 such as reflectance or transmittance. For example, when the first transparent conductive layer 7a of the laminated body 1 is patterned to form a transparent conductive pattern of the thin film sensor, the first refractive index matching layer 11a is formed to reduce the area in which the transparent conductive pattern is provided, and The function of the difference in transmittance and reflectance of light between the regions provided with the transparent conductive pattern functions. The specific configuration of the first refractive index matching layer 11a is not particularly limited as long as the optical characteristics of the laminated body 1 can be adjusted. For example, the first refractive index matching layer 11a includes the first high refractive index layer 4a and the first The first low refractive index layer 5a on the side of one of the high refractive index layers 4a. Further, the thickness of the first index matching layer 11a is, for example, 100 nm.

The first high refractive index layer 4a is made of a material having a layer which is in contact with the first refractive index matching layer 11a on the side of the base film 2 which is the other side of the first refractive index matching layer 11a. A layer of a material of refractive index. In the present embodiment, the first high refractive index layer 4a is made of a material having a higher refractive index than the material constituting the first hard coat layer 3a. The layer of composition. As the material of the first high refractive index layer 4a, a high refractive index material such as cerium oxide or zirconium oxide is used. A specific method of forming the first high refractive index layer 4a using a high refractive index material is not particularly limited. For example, the first high refractive index layer 4a may be a film composed of a single high refractive index material, or may be composed of an organic resin and particles of a high refractive index material dispersed in the organic resin. The use of the organic resin is extremely effective in improving the production efficiency of the first high refractive index layer 4a.

The first low refractive index layer 5a has a lower material than a layer that is in contact with the first refractive index matching layer 11a on the side of the base film 2 which is the other side of the first refractive index matching layer 11a. A layer of a material of refractive index. In the present embodiment, the first low refractive index layer 5a is a layer composed of a material having a lower refractive index than a material constituting the first hard coat layer 3a. As the material of the first low refractive index layer 5a, a low refractive index material such as cerium oxide or MgF (magnesium fluoride) is used. A specific method of forming the first low refractive index layer 5a using a low refractive index material is not particularly limited. For example, the first low refractive index layer 5a may be a film made of a monomer having a low refractive index material, or may be composed of an organic resin and particles of a low refractive index material dispersed in the organic resin. For example, by applying a coating liquid containing particles of an organic resin and a low refractive index material by using a coater, the first low refractive index layer 5a can be formed, and production efficiency can be improved.

[矽 矽 layer]

The first hafnium oxide layer 6a is a layer formed as a film of hafnium oxide. The composition of the cerium oxide contained in the first cerium oxide layer 6a is not particularly limited, and various cerium oxide having a composition of SiO _x (x is an arbitrary number) is used, and for example, x=1.8. The thickness of the first hafnium oxide layer 6a is, for example, 5 nm.

The first hafnium oxide layer 6a is formed by a physical vapor phase growth method such as a sputtering method or a vacuum deposition method. Therefore, the surface roughness of the first ruthenium oxide layer 6a is smaller than the surface roughness of the first low refractive index layer 5a when formed by coating. Therefore, by providing the first hafnium oxide layer 6a as described above between the first low refractive index layer 5a and the first transparent conductive layer 7a, the first transparent conductive layer 7a can be stably held.

The refractive index of the cerium oxide constituting the first cerium oxide layer 6a is lower than the refractive index of the first hard coat layer 3a made of an acrylic resin or the like. In other words, the refractive index of the first hafnium oxide layer 6a is lower than that of the first low-refractive-index layer 5a as compared with the first hard-coat layer 3a. At this time, by sufficiently reducing the difference between the refractive index of the first low refractive index layer 5a and the refractive index of the first hafnium oxide layer 6a, the first low refractive index layer 5a and the first hafnium oxide layer 6a can have The layer having a lower refractive index than the first hard coat layer 3a functions optically integrally.

In the present embodiment, the first surface layer 12a includes the first high refractive index layer 4a, the first low refractive index layer 5a, and the first ruthenium oxide layer 6a. However, the first high layer may not be provided. The refractive index layer 4a, the first low refractive index layer 5a, and the first ruthenium oxide layer 6a. Therefore, the first transparent conductive layer 7a may be provided so as to be in direct contact with the surface on the side of one of the first hard coat layers 3a. In the present embodiment, an example in which the first light-shielding conductive layer 8a is provided on one side of the first transparent conductive layer 7a will be described, but the invention is not limited thereto, and the first transparent conductive layer 7a may be used. The first light-shielding conductive layer 8a is not provided on one of the sides.

[transparent conductive layer]

In the material constituting the first transparent conductive layer 7a, a material which exhibits light transmittance while having conductivity is used, and for example, a metal oxide such as indium tin oxide (ITO) is used. The thickness of the first transparent conductive layer 7a is, for example, 20 nm.

[shading conductive layer]

The first light-shielding conductive layer 8a is used in an electronic component such as a touch panel to form a layer for taking out a pattern or an electrode for taking out a signal to the outside. In other words, the first light-shielding conductive layer 8a is a layer used as a so-called wiring material or electrode material. Therefore, a metal material having high conductivity and light blocking property is used as the material constituting the first light-shielding conductive layer 8a. Specifically, an Ag-Pd-Cu-based silver alloy containing silver as a main component and containing copper and palladium is used, and an APC alloy is used. The thickness of the first light-shielding conductive layer 8a is, for example, in the range of 100 to 250 nm, and more specifically 150 nm.

However, as described above, in the manufacturing process of the laminated body 1 or the manufacturing process of the electronic component using the laminated body 1, the surface of the laminated body 1 may be pressed by some foreign matter. At this time, the surface of the laminated body 1 is deformed in accordance with the pressing force from the foreign matter or the mechanical properties of the laminated body 1 in accordance with the shape of the foreign matter. When the degree of deformation at this time reaches the plastic deformation region in the first surface layer 12a of the laminated body 1, it will be in the laminated body 1 The surface of the first surface layer 12a is formed with an indentation.

In this case, the degree of deformation will reach the plastic deformation region in the first surface layer 12a. As described above, the number of layers constituting the first surface layer 12a is about several layers, and the thickness of each layer is also about one hundred tens of nm at the maximum. Therefore, the thickness of the entire first surface layer 12a is also less than 1 μm at most, and is usually less than 0.5 μm. In this case, when the surface of the laminated body 1 is pressed by a foreign material having a thickness comparable to the entire thickness of the first surface layer 12a or the thickness of the entire first surface layer 12a, the surface of the laminated body 1 corresponds to the foreign matter. The shape is deformed to reach the plastic deformation region. For example, it is considered that when foreign matter of about several μm is sandwiched between the surface of the laminated body 1 and the drum, it is easy to form an indentation on the surface of the laminated body 1. Further, it is generally difficult to detect or remove minute foreign matter as shown above before the foreign matter contacts the laminated body 1. Therefore, in order to prevent the formation of an indentation on the surface of the laminated body 1, even when the foreign matter of the surface layer factor μm of the laminated body 1 is pressed, the deformation of the first surface layer 12a does not reach the plastic deformation region. It is extremely important to form the laminated body 1.

Here, the inventor of the present invention focused on the first hard coat layer 3a described above. As described above, the first hard coat layer 3a is originally a layer which is formed to be turbid in order to prevent scratching of the base film 2 or to prevent precipitation of a low molecular weight polymer (oligomer). As described below, the inventors of the present invention can realize a laminate 1 in which an indentation is formed on the surface by appropriately adjusting the thickness of the first hard coat layer 3a and the like.

In the present embodiment, the first hard coat layer 3a is designed such that the total thickness of the first surface layer 12a and the thickness of the first hard coat layer 3a are larger than 1 μm. For example, the thickness of the first hard coat layer 3a is in the range of 0.8 μm to 7.0 μm. By forming the thickness of the first hard coat layer 3a to 0.8 μm or more, it is possible to effectively suppress the formation of an indentation on the surface 1a on the side of one of the laminated bodies 1. In addition, when the thickness of the first hard coat layer 3a is 7.0 μm or less, it is possible to suppress the occurrence of cracks in the first hard coat layer 3a when the laminated body 1 is wound. On the other hand, as described above, the thickness of the entire first surface layer 12a is also less than 1 μm at the maximum, and is usually less than 0.5 μm. Further, since the first hard coat layer 3a is made of a synthetic resin such as an acrylic resin, the hardness of the first hard coat layer 3a is generally lower than the hardness of the entire first surface layer 12a. At this time, the degree of deformation of the laminated body 1 when the foreign matter having a surface factor μm of the laminated body 1 is pressed, for example, a foreign matter of 1 μm, is mainly determined depending on the characteristics of the first hard coat layer 3a.

Here, the inventors of the present invention have continually studied carefully, and have found that the horse is measured by pressing the Vickers indenter into the laminated body 1 by the side of one of the laminated bodies 1 as supported by the later-described embodiment. When the maximum intrusion amount of the Vickers indenter is 1 μm, the first hard coat layer 3a is designed to have a thickness of 270 N/mm ² or more, whereby the formation of an indentation on the surface of the laminated body 1 can be effectively suppressed. In addition, since the first hard coat layer 3a is present at a position 1 μm from the surface 1a of one of the laminated bodies 1, the Martens hardness when the maximum pressing amount of the Vickers indenter is 1 μm is mainly based on the first hard coat layer. The hardness of 3a is determined. In the laminated body 1 having the Martens hardness as described above, even when the surface 1a on the side of one of the laminated bodies 1 is pressed by a foreign matter having a factor of about μm, the first hard coat layer 3a can be used. The case where the deformation of the first surface layer 12a reaches the plastic deformation region is suppressed. Thereby, it is possible to suppress the formation of an indentation on the surface 1a on the side of one of the laminated bodies 1. In other words, according to the present embodiment, the formation of the indentation can be suppressed by using the first hard coat layer 3a provided in the related art. Therefore, the number of layers or the production cost of the laminated body 1 is kept substantially the same as in the related art, and the yield of the electronic component obtained by the laminated body 1 or the laminated body 1 can be improved.

Hereinafter, an example of a method of measuring the Martens hardness of the laminated body 1 will be described with reference to FIGS. 6(a), (b) and 7.

First, as shown in FIG. 6(a), a first hard coat layer 3a including a base film 2, a surface provided on one side of the base film 2, and a first hard coat layer are provided. The laminated body 1 of the first surface layer 12a on the surface on the side of one of the 3a. Further, a Vickers indenter 70 for press-fitting the surface 1a on the side of one of the laminated bodies 1 is prepared.

Next, as shown in FIG. 6(b), the Vickers indenter 70 is pressed into the surface 1a on the side of one of the laminated bodies 1. At this time, the Martens hardness of the surface 1a of the laminated body 1 can be calculated by measuring the load F required to set the maximum pressing amount h of the Vickers indenter 70 to 1 μm. For example, the Martens hardness HM is calculated by the following formula.

F-loading Vickers indenter test force (load, unit is N), h is the depth to which the surface 1a on the side of one of the laminated bodies 1 is pressed into the Vickers indenter (injection amount, in mm) .

Wherein, the maximum indentation amount of the Vickers indenter 70 is calculated as In the method of the Martens hardness of the laminated body 1 at 1 μm, the example in which the maximum pressing amount of the Vickers indenter 70 at the time of the test is actually formed to 1 μm is described, but the invention is not limited thereto. For example, as shown in FIG. 7, the maximum pressing amount of the Vickers indenter 70 is varied, and the Martens hardness of the laminated body 1 is measured. Based on the result, the maximum pressing amount of the Vickers indenter 70 is estimated to be 1 μm. The Martens hardness HM (1) of the laminated body 1 at the time.

As shown in FIG. 5, the laminated body 1 may be further provided with the second surface layer 12b provided on the other side of the second hard coat layer 3b. Similarly to the first surface layer 12a, the second surface layer 12b includes a second index matching layer 11b provided on the other side of the second hard coat layer 3b, and a second index matching layer. a second ruthenium oxide layer 6b on the other side of the layer 11b, a second transparent conductive layer 7b provided on the other side of the second ruthenium oxide layer 6b, and a second transparent conductive layer. The second light-shielding conductive layer 8b on the surface on the other side of 7b. Similarly to the first index matching layer 11a, the second index matching layer 11b includes the second high refractive index layer 4b and the second low refractive index provided on the other side of the second high refractive index layer 4b. Rate layer 5b. The material constituting the second high refractive index layer 4b, the second low refractive index layer 5b, the second yttria layer 6b, the second transparent conductive layer 7b, and the second light-shielding conductive layer 8b is configured to constitute the first high refractive index layer 4a, Since the materials of the first low refractive index layer 5a, the first hafnium oxide layer 6a, the first transparent conductive layer 7a, and the first light-shielding conductive layer 8a are the same, detailed description thereof will be omitted.

In the example shown in FIG. 5, the thickness of the second surface layer 12b is less than 1 μm as in the case of the first surface layer 12a. Further, the second hard coat layer 3b is designed such that the total thickness of the second surface layer 12b and the thickness of the second hard coat layer 3b are more than 1 μm. For example, the thickness of the second hard coat layer 3b is in the range of 0.8 μm to 7.0 μm. Further, the second hard coat layer 3b is designed such that the maximum indentation amount of the Vickers indenter measured by the Vickers hardness measured by pressing the Vickers indenter into the laminated body 1 from the other side of the laminated body 1 is When it is 1 μm, it becomes 270 N/mm ² or more. Therefore, even when the surface 1b on the other side of the laminated body 1 is pressed by foreign matter, the deformation of the second surface layer 12b can be suppressed from reaching the plastic deformation region by the second hard coat layer 3b. Thereby, it is possible to suppress the formation of an indentation on the surface 1b on the other side of the laminated body 1.

Next, the operation and effect of the embodiment made up of the above configuration will be described. Here, first, an example of a method of manufacturing the laminated body 1 using the laminated body manufacturing apparatus 15 will be described with reference to FIGS. 1 to 3. Next, a film sensor 60 obtained by patterning the laminated body 1 will be described with reference to FIGS. 8 and 9.

Manufacturing method of laminated body

First, the base film 2 is prepared. Next, a coating liquid containing an acrylic resin is applied to both sides of the base film 2 by using a coater. Thereby, the hard coat layers 3a and 3b are formed on both sides of the base film 2. Then, a coating liquid containing particles of a high refractive index material dispersed in the organic resin, for example, particles of zirconia, is applied to one side of the first hard coat layer 3a by using a coater. On the surface. Thereby, the first high refractive index layer 4a is formed on the first hard coat layer 3a. After that, using a coater, it will contain organic The resin and the particles of the low refractive index material dispersed in the organic resin, for example, the coating liquid of the particles of cerium oxide are applied to the surface on one side of the first high refractive index layer 4a. Thereby, the first low refractive index layer 5a is formed on the first high refractive index layer 4a. Thereafter, the first hafnium oxide layer 6a is formed on the first low refractive index layer 5a by a vacuum film formation method such as sputtering. Similarly, the first transparent conductive layer 7a is formed on the first ruthenium oxide layer 6a by a vacuum film formation method such as sputtering. The substrate film 2, the hard coat layers 3a and 3b, the first high refractive index layer 4a, the first low refractive index layer 5a, the first hafnium oxide layer 6a, and the first transparent conductive layer 7a obtained as described above are also obtained. The laminated body is referred to as the intermediate laminated body 10 (refer to FIG. 4).

Next, as shown in FIG. 1, in the unwinding device 20, the shaft 21 around which the intermediate laminated body 10 is wound is prepared, and then the intermediate laminated body 10 is unwound toward the film forming apparatus 30.

Next, using the film forming apparatus 30, a film forming process in which the first light-shielding conductive layer 8a is provided on one side of the intermediate laminated body 10 is performed. In the film forming process, first, the gas inside the first region 31 is discharged to the outside by the exhaust means 31a, whereby the inside of the first region 31 is formed into a vacuum state. At this time, the second region 33 and the third region 35 are also formed into a vacuum state by using the exhaust means 33a and the exhaust means 35a. Then, an inert gas such as argon is introduced into the first region 31 by an inert gas supply device (not shown), and then discharge electric power is applied to the target 32a by the discharge device. Thereby, the first light-shielding conductive layer 8a made of the APC alloy constituting the target 32a can be provided on the first transparent conductive layer 7a of the intermediate laminated body 10 by the sputtering phenomenon. Among them, the discharge during sputtering Conditions such as the electric power or discharge time and the partial pressure of the inert gas are appropriately set depending on the desired film thickness, the rotational speed of the transport drum 38, and the like.

Thereafter, in the winding device 50, the laminated body 1 including the intermediate laminated body 10 and the first light-shielding conductive layer 8a formed on the intermediate laminated body 10 is wound by the shaft 51. Thereby, the wound body of the laminated body 1 is obtained.

However, as shown in FIG. 2 and FIG. 3, the surface of the first light-shielding conductive layer 8a formed in the film forming apparatus 30 is in contact with the guide rolls 39, 59 until the laminated body 1 is wound by the shaft 51. . At this time, when foreign matter is interposed between the laminated body 1 and the guide rolls 39 and 59, the surface 1a of the laminated body 1, that is, the surface of the first light-shielding conductive layer 8a is pressed by foreign matter. Here, in the present embodiment, the total thickness of the first surface layer 12a and the thickness of the first hard coat layer 3a are more than 1 μm, and the Vickers indenter 70 is pressed by the side of one of the laminated bodies 1. The Martens hardness measured in the laminated body 1 is 270 N/mm ² or more when the maximum pressing amount of the Vickers indenter 70 is 1 μm. Therefore, the deformation of the first surface layer 12a can be suppressed from reaching the plastic deformation region by the first hard coat layer 3a. Thereby, it is possible to suppress the formation of an indentation on the surface 1a on the side of one of the laminated bodies 1.

In addition, the second surface layer 12b may be separately provided on the other side of the laminated body 1 obtained as described above, whereby the laminated body 1 shown in FIG. 5 may be produced. At this time, the front and back of the laminated body in which the first light-shielding conductive layer 8a has been formed may be reversed, and the laminated body may be carried again into the laminated body manufacturing apparatus 15 to form the second light-shielding conductive layer 8b. At this time, the first light-shielding conductive layer 8a which has been formed is contact-transported between manufacturing processes. The drum 38, the guide roller 59 or adjacent to the drum 53. Therefore, in the process of manufacturing the laminated body 1 shown in FIG. 5, the chance of the surface of the first light-shielding conductive layer 8a being pressed by foreign matter is greatly increased as compared with the case of manufacturing the laminated body 1 shown in FIG. At this time, in the present embodiment, the thickness of the first hard coat layer 3a or the like is appropriately adjusted, whereby the formation of an indentation on the surface of the first light-shielding conductive layer 8a can be suppressed. The adjacent roller 53 means that the distance between the outermost surface of the laminated body 1 wound around the shaft 51 and the surface facing the shaft 51 adjacent to the roller 51 is movably smaller than the thickness of the laminated body 1 Big roller.

Touch panel sensor manufacturing method

Next, a thin film sensor (touch panel sensor) 60 obtained by patterning the laminated body 1 will be described as an example of the use of the laminated body 1. The film sensor 60 is provided on the observer side of a display panel such as a liquid crystal display panel or an organic EL display panel, and includes a sensor for detecting a transparent conductive pattern such as a contact position of a subject such as a human body. In the case of the film sensor 60, a thin film sensor in which a resistive film is detected based on pressure from a subject, or a static touch from a subject such as a human body is known to detect a touched portion. Various types of capacitive sensor type thin film sensors, etc., however, an example of forming a capacitive thin film sensor 60 by patterning the laminated body 1 will be described with reference to FIGS. 8 and 9. 8 is a plan view showing the film sensor 60, and FIG. 9 is a cross-sectional view taken along line IX-IX of the film sensor 60 shown in FIG. In FIG. 8 and FIG. 9, the first surface layer 12a and the first surface layer are provided by using FIG. The laminated body 1 of the surface layer 12b is used to fabricate a thin film sensor 60.

As shown in FIG. 8, the film sensor 60 is provided with transparent conductive patterns 62a and 62b for detecting a change in electrostatic capacitance due to the proximity of an external conductor such as a finger. The transparent conductive patterns 62a and 62b are disposed on the one side of the base film 2, the first transparent conductive pattern 62a extending in the lateral direction of FIG. 8, and the other side of the base film 2 The second transparent conductive pattern 62b extending in the longitudinal direction of FIG. 8 is formed. Further, the film sensor 60 further includes a first extraction pattern 64a connected to the first transparent conductive pattern 62a and a second extraction pattern 64b connected to the second transparent conductive pattern 62b. Further, terminal portions 65a and 65b for connecting the respective extraction patterns 64a and 64b and for extracting signals from the respective transparent conductive patterns 62a and 62b to the outside may be additionally provided.

As shown in FIG. 9, the transparent conductive patterns 62a and 62b are obtained by patterning the transparent conductive layers 7a and 7b of the laminated body 1. Similarly, the first extraction pattern 64a is obtained by patterning the first light-shielding conductive layer 8a of the laminated body 1. Further, although not shown in FIG. 9, the first terminal portion 65a is formed by patterning the first light-shielding conductive layer 8a of the laminated body 1, and the second extraction pattern 64b and the second terminal portion are also provided. 65b is obtained by patterning the second light-shielding conductive layer 8b of the laminated body 1. For the method of patterning the transparent conductive layers 7a and 7b and the light-shielding conductive layers 8a and 8b, for example, a photolithography method is used. Here, as shown in FIG. 9, the yttrium oxide layers 6a, 6b of the laminated body 1 may be patterned in such a manner as to correspond to the transparent conductive patterns 62a, 62b or the patterns of the extraction patterns 64a, 64b. Chemical.

According to the present embodiment, the maximum indentation amount of the Vickers indenter 70 is 1 μm by the Martens hardness measured by pressing the Vickers indenter 70 onto the laminated body 1 from the front surface 1a and the surface 1b of the laminated body 1. In the case of 270 N/mm ² or more, the first hard coat layer 3a and the second hard coat layer 3b are designed. Therefore, it is possible to suppress the formation of an indentation on the surfaces of the light-shielding conductive layers 8a and 8b between the processes of patterning the laminated body 1. Thereby, the yield of the film sensor 60 can be improved. The film sensor 60 may be provided with a protective layer for protecting the extraction patterns 64a and 64b obtained by patterning the light-shielding conductive layers 8a and 8b, although not shown.

In addition, it is considered that when the Martens hardness is excessively large, the adhesion between the hard coat layers 3a and 3b and the surface layers 12a and 12b may be insufficient, or the hard coat layers 3a and 3b may be easily cracked. Therefore, it is preferable to design the hard coat layers 3a and 3b so that the Martens hardness measured as described above becomes equal to or less than a predetermined upper limit value. The above limit is, for example, 500 N/mm ² .

(Modification of layer structure of laminated body)

In the above-described embodiment, the laminated body 1 including the final form of the first transparent conductive layer 7a or the first light-shielding conductive layer 8a is suitably used in the laminated body for producing an electronic component. The thickness of the first hard coat layer 3a or the like is adjusted to suppress the formation of an indentation on the surface 1a of the laminated body 1. However, the effect of suppressing the formation of the indentation obtained by the first hard coat layer 3a of the present embodiment is not particularly dependent on the first The layer on the side of one of the hard coat layers 3a, that is, the first surface layer 12a. In other words, if the first surface layer 12a provided on one of the first hard coat layers 3a includes at least one arbitrary layer, the first surface layer 12a can be suppressed by the first surface layer 12a. The surface 1a of the laminated body 1 formed is formed as an indentation.

The layer configuration of the first surface layer 12a of the laminated body 1 which can suppress the effect of the first hard coat layer 3a for forming an indentation is exemplified below. However, the layer configuration of the first surface layer 12a is not limited to the examples shown below.

As shown in FIG. 10, the first surface layer 12a provided on one side of the first hard coat layer 3a in the laminated body 1 may include the first index matching layer 11a, and does not include other first cerium oxide. The layer 6a, the first transparent conductive layer 7a, the first light-shielding conductive layer 8a, and the like. FIG. 10 shows an example in which the first index matching layer 11a includes the first high refractive index layer 4a and does not include the first low refractive index layer 5a. However, the configuration of the first index matching layer 11a is not particularly limited. As shown in FIG. 11, the first index matching layer 11a may include the first low refractive index layer 5a and may not include the first high refractive index layer. 4a. Further, as shown in FIG. 12, the first refractive index matching layer 11a may be a first low refractive index layer 5a including the first high refractive index layer 4a and one side of the first high refractive index layer 4a. .

As shown in FIG. 13, the first surface layer 12a may include a first transparent conductive layer 7a provided on one side of the first index matching layer 11a in addition to the first index matching layer 11a. FIG. 13 shows an example in which the first index matching layer 11a includes both the first high refractive index layer 4a and the first low refractive index layer 5a, but is not limited thereto. In the same manner as in the case of FIG. 10 and FIG. 11, the first refractive index matching layer 11a may include at least one of the first high refractive index layer 4a or the first low refractive index layer 5a. Similarly to the first surface layer 12a of the laminated body 1 shown in FIG. 14 to FIG. 16, the specific configuration of the first refractive index matching layer 11a is not particularly limited.

Further, as shown in FIG. 14, the first surface layer 12a may be provided separately between the first refractive index matching layer 11a and the first transparent conductive layer 7a in addition to the respective layers of the first surface layer 12a shown in FIG. The first yttria layer 6a.

Further, as shown in FIG. 15, the first surface layer 12a may include the first light-shielding conductive layer provided on one side of the first transparent conductive layer 7a in addition to the respective layers of the first surface layer 12a shown in FIG. Layer 8a.

Further, as shown in FIG. 16, the first surface layer 12a may include the first light-shielding conductive layer provided on one side of the first transparent conductive layer 7a in addition to the respective layers of the first surface layer 12a shown in FIG. Layer 8a.

Further, as shown in FIG. 17, the first surface layer 12a provided on one side of the first hard coat layer 3a in the laminated body 1 may include the first ruthenium oxide layer 6a and does not include other first refracting layers. The rate matching layer 11a, the first transparent conductive layer 7a, the first light-shielding conductive layer 8a, and the like.

Further, as shown in FIG. 18, the first surface layer 12a may further include a first transparent conductive layer provided on one side of the first ruthenium oxide layer 6a in addition to the first ruthenium oxide layer 6a shown in FIG. 7a.

Further, as shown in FIG. 19, the first surface layer 12a may include a first light-shielding conductive layer provided on one side of the first transparent conductive layer 7a in addition to the respective layers of the first surface layer 12a shown in FIG. Layer 8a.

In any of the laminated bodies 1 shown in FIG. 10 to FIG. 19, the first hard coat layer 3a of the present embodiment is provided on one side of the base film 2, so that the laminated body 1 can be suppressed. The surface 1a forms an indentation. Although not shown, the laminated body 1 shown in FIG. 10 to FIG. 19 may be provided on the other side of the second hard coat layer 3b in the same manner as the laminated body 1 shown in FIG. The second surface layer 12b composed of the same layer as the first surface layer 12a. In addition, the second surface layer 12b provided on the other side of the second hard coat layer 3b may have the same layer as the first surface layer 12a provided on one of the first hard coat layers 3a. It may be constructed or may have a different layer composition. For example, the second surface layer 12b may have any of various layer configurations of the first surface layer 12a described in the above-described embodiment or modification.

[Examples]

The present invention will be more specifically described by the examples, but the present invention is not limited to the description of the following examples, unless the scope of the invention is exceeded.

(Sample A1)

Produced with: a substrate film, and sequentially disposed on the substrate film A layered body of a hard coat layer, a high refractive index layer, a low refractive index layer, a ruthenium oxide layer, a transparent conductive layer, and a light-shielding conductive layer on the side of the other side and the other side. The thicknesses of the base film, the hard coat layer, the high refractive index layer, the low refractive index layer, the ruthenium oxide layer, the transparent conductive layer, and the light-shielding conductive layer were 188 μm, 1.5 μm, 45 nm, 40 nm, 5 nm, 30 nm, and 150 nm, respectively.

[Evaluation 1 Martens hardness]

The Martens hardness of the laminate when the maximum indentation amount of the Vickers indenter was 1 μm was measured by the method described with reference to Fig. 6 (a) and (b). As a result, the Martens hardness was 250 N/mm ² .

[Evaluation 2 indentation]

Under the condition that the tension applied to the laminated body was set to 125 N, the sheet-like laminated body was conveyed using a guide roller, and it was evaluated whether or not an indentation was formed on the surface of the laminated body at this time. As a result, the indentation was confirmed at a density of 40/m ² on the surface of the laminate. For reference, the result of photographing the surface on which the indentation is formed by a digital camera is shown in Fig. 20 (a) and (b). Fig. 20 (a) is a photograph showing the surface of the light-shielding conductive layer of the laminate in which the indentation is formed, and Fig. 20 (b) shows the surface of the light-shielding conductive layer peeled off from the laminate shown in Fig. 20 (a). photo.

(Sample A2)

In the same manner as in the case of the sample A1, the measurement of the Martens hardness was performed in the same manner as in the case of the sample A1 except that the thickness of the ruthenium oxide layer was 7 nm, and it was evaluated whether or not an indentation was formed on the surface of the laminate. . As a result, the Martens hardness was 255 N/mm ² . Further, indentations were confirmed at a density of 39/m ² on the surface of the laminate.

(sample B1)

a laminate comprising a base film, a hard coat layer, a high refractive index layer, a ruthenium oxide layer, a transparent conductive layer, and a light-shielding conductive layer, and each layer having a thickness of 188 μm, 4.5 μm, 45 nm, 45 nm, 30 nm, and 150 nm, respectively In the same manner as in the sample A1, the measurement of the Martens hardness was measured, and it was evaluated whether or not an indentation was formed on the surface of the laminate. As a result, the Martens hardness was 295 N/mm ² . Further, no indentation was confirmed on the surface of the laminate.

(sample B2)

The substrate film, the hard coat layer, the high refractive index layer, the low refractive index layer, the hafnium oxide layer, the transparent conductive layer, and the light-shielding conductive layer are included, and the thickness of each layer is 188 μm, 4.5 μm, 45 nm, 40 nm, 5 nm, and 30 nm, respectively. In the same manner as in the case of the sample A1, the laminate of 150 nm was measured for the measurement of the Martens hardness, and it was evaluated whether or not an indentation was formed on the surface of the laminate. As a result, the Martens hardness was 290 N/mm ² . Further, no indentation was confirmed on the surface of the laminate.

(other samples)

Fig. 21 shows the results of evaluation of the Martens hardness and the density of the indentations in the samples A1, A2, B1 and B2. Further, the thickness of each layer constituting the laminate of the samples A1, A2, B1, and B2 is shown together in FIG. In addition, a laminate having various layer configurations was prepared, and the measurement of the Martens hardness was measured for each of the laminates in the same manner as in the case of the sample A1, and it was evaluated whether or not an indentation was formed on the surface of the laminate. The results are shown together in Figure 21. Among the samples shown in Fig. 21, the samples B3 to B17 contained a hard coat layer having a thickness of 2.0 μm or more, and the measurement result of the Martens hardness was 270 N/mm ² or more. On the other hand, the samples A3 to A17 contained a hard coat layer having a thickness of 0.7 μm, and the measurement result of the Martens hardness was 235 N/mm ² or less.

From the comparison of the samples A1 to A17 and the samples B1 to B17, it is understood that the hard coat layer is designed such that the Martens hardness of the laminate is 270 N/mm ² or more, more preferably 290 N/mm ² or more, thereby preventing or Inhibition is formed on the surface of the laminate.

1‧‧ ‧ laminated body

1a‧‧‧ Surface of the side of one of the laminated bodies 1

1b‧‧‧ Surface of the other side of the laminated body 1

2‧‧‧Substrate film

2a‧‧‧Side on the side of one of the base film 2

2b‧‧‧ is provided on the other side of the base film 2

3a, 3b‧‧‧ hard coating

4a‧‧‧High refractive index layer

5a‧‧‧Low refractive index layer

6a‧‧‧Oxide layer

7a‧‧‧Transparent conductive layer

8a‧‧‧ shading conductive layer

10‧‧‧Intermediate laminate

11a‧‧‧index matching layer

12a‧‧‧Surface

Claims (15)

A laminated body which is used in a laminated body for producing a thin film sensor for a touch panel, wherein the laminated body has a surface on one side and a side on the other side, and the laminated system is provided with a base a first hard coat layer provided on a surface of one side of the base film; and a first surface layer provided on a surface of one side of the first hard coat layer, The thickness of the first surface layer is less than 1 μm, and the total thickness of the first surface layer and the thickness of the first hard coat layer is more than 1 μm, and the Vickers indenter is provided by one side of the laminated body (Vickers) Indenter) The Martens hardness measured by the laminate is 270 N/mm ² or more when the maximum indentation amount of the Vickers indenter is 1 μm. The laminate according to the first aspect of the invention, wherein the first surface layer comprises a first index matching layer provided on the first hard coat layer. The laminate according to the second aspect of the invention, wherein the first surface layer further comprises a first transparent conductive layer provided on one side of the first index matching layer and having translucency and conductivity. . The laminate according to claim 3, wherein the first surface layer further includes a first refractive index matching layer and the first A first ruthenium oxide layer composed of ruthenium oxide between the transparent conductive layers. The laminate according to the fourth aspect of the invention, wherein the first surface layer further includes a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity. The laminate according to the third aspect of the invention, wherein the first surface layer further includes a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity. The laminate according to the first aspect of the invention, wherein the first surface layer further comprises a first ruthenium oxide layer formed of the ruthenium oxide and provided on the first hard coat layer. The laminate according to the seventh aspect of the invention, wherein the first surface layer further comprises a first transparent conductive layer provided on one side of the first ruthenium oxide layer and having light transmissivity and conductivity . The laminate according to the eighth aspect of the invention, wherein the first surface layer further comprises a first light-shielding conductive layer provided on one side of the first transparent conductive layer and having light-shielding properties and conductivity. The laminate of any one of the first to the ninth aspects, wherein the thickness of the first hard coat layer is in the range of 0.8 μm to 7.0 μm. The laminate according to claim 1, wherein the first surface layer contains at least a first transparent conductive layer having light transmissivity and conductivity. The laminate according to claim 11, wherein the first surface layer further comprises one of the first transparent conductive layers. A first light-shielding conductive layer having a light-shielding property and a conductive property on the side of the square. The laminated body according to any one of the items 1 to 9, further comprising: a second hard coat layer provided on a surface of the other side of the base film; and In the second surface layer on the other side of the second hard coat layer, the thickness of the second surface layer is less than 1 μm, and the thickness of the second surface layer and the thickness of the second hard coat layer are total It is greater than 1 μm, and the Martens hardness measured by pressing the Vickers indenter into the laminated body from the other side of the laminated body becomes 270 N/mm when the maximum pressing amount of the Vickers indenter is 1 μm. ² or more. A film sensor comprising: a base film; a first hard coat layer provided on a side of one of the base film; and a first hard coat layer in a predetermined pattern a first transparent conductive pattern having light transmissivity and conductivity on one side, and a first extraction pattern provided on the first transparent conductive pattern in a predetermined pattern and having light blocking properties and conductivity, and the first transparent pattern The conductive pattern and the extraction pattern are obtained by patterning the first transparent conductive layer and the first light-shielding conductive layer of the laminate according to any one of claims 5, 9, or 12. By. A touch panel device comprising: a thin film sensor and a touch panel device for detecting a control circuit on a contact position of the thin film sensor, wherein the thin film sensor is provided with a patent application scope Film sensor of item 14.