TWI600628B - Manufacturing method of a glass substrate, and manufacturing apparatus of a glass substrate - Google Patents

Description

Method for producing glass substrate and device for manufacturing glass substrate

The present invention relates to a method for producing a glass substrate and a device for producing a glass substrate.

The industry uses a flat glass plate as a component of a display portion of a display such as a liquid crystal display device or a plasma display device. In the following description, such a glass plate is referred to as a glass substrate for a display or simply as a glass substrate. For example, in a liquid crystal display device, the alignment of the liquid crystal is changed by changing the electric field applied to the liquid crystal sealed between the glass substrates, whereby dynamic image display can be realized. The liquid crystal display device needs to change the electric field when displaying an image, and thus a transparent electrode for applying a voltage is formed on the glass substrate.

Further, in order to control the turning on and off of the voltage applied to the electrodes on the glass substrate, a liquid crystal display device used for a television receiver or the like which requires high-quality display uses an active matrix method using a thin film transistor (TFT). control. The TFT is also formed on a glass substrate. Specifically, the liquid crystal display is composed of a TFT (Thin Film Transistor) that controls the amount of light transmitted, a liquid crystal, and a color filter. In the method of manufacturing a color filter panel in a liquid crystal display, a method is generally used in which a black matrix is formed on the surface of a glass substrate, and then different hue of red, green, and blue are sequentially formed in a color pattern such as a strip or a mosaic.

As the display is HD, the line width and pitch of the black matrix disposed on the surface of the glass substrate are reduced. For example, in order to achieve high contrast of the display, it is necessary to increase the aperture ratio by the high thinning and high definition of the black matrix (specifically, the line width of less than 20 μm). High and improved by the high dimensional accuracy of the black matrix. Further, as the number of pixels of the display is increased, the size of the pattern varies depending on the use of the color filter and the color. As an example, the size of one of the pixels of red, green, and blue is advanced from 200 to 300 μm to 100 μm. The size of the matrix has progressed from 20 μm to 10 μm and further 5 μm, and a thin line technique has been developed in response to this.

Thus, in order to form an electrode or an active element using a very thin metal film or semiconductor on the glass surface of the glass substrate for a display, it is required that the glass surface of the glass substrate has extremely high flatness and extremely high cleanability.

However, if the glass substrate for a display is, for example, a user of a liquid crystal display device (hereinafter referred to as a glass substrate for liquid crystal), it has a thin rectangular plate shape. The glass substrate for liquid crystal is usually thinner than 1 mm to a thickness of 0.05 mm to 0.7 mm, and the demand for size increase in the industry is increasing year by year.

The glass substrate for liquid crystal is supplied to a liquid crystal display device in a form called a mother glass, and the size of the mother glass corresponds to the size of a glass substrate having a size required for one liquid crystal display device. The size of the mother glass is expressed by the name "generation". For example, the size of the 6th generation mother glass is 1500 mm × 1850 mm. The mother glass is obtained by cutting a glass plate formed into a plate shape into a specific size. Further, in order to remove stains, cutting chips, and the like which are generated when the glass sheet is cut, it is necessary to clean the mother glass, that is, the glass substrate for liquid crystal.

In the cleaning of the glass surface of the liquid crystal glass substrate which is carried out under the above-mentioned conditions, various liquids such as a washing agent such as pure water or a surfactant, and a fluorine compound are used. The liquid used for cleaning the surface of the glass is removed by the discharge airflow, and after the completion of the cleaning step, it is shipped after the lotion removal step, the inspection step, etc., but the surface of the liquid crystal glass substrate which has become the product is fixed with the lotion. The situation of ingredients.

The lotion component remains, and the fixation of the lotion component causes defects in the electrode or element formed on the glass substrate, causing malfunction of the liquid crystal display device. Also, the liquid crystal display When the member required for the formation is formed on the glass substrate for liquid crystal, it is also cleaned. However, even in the case of cleaning in this case, there is a problem that the lotion component is fixed. Further, there is a possibility that the high adhesion of the black matrix resin to the surface of the glass substrate cannot be sufficiently achieved.

Therefore, in order to prevent the occurrence of the washing agent component, the thinner planar airflow such as an air knife is used to remove the lotion from the glass surface of the liquid crystal glass substrate after cleaning, for example. liquid.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-6299

However, in the above technique, since the jetted airflow is formed by the air knife, even if the liquid used for washing is removed from the surface of the glass substrate by the jetted airflow, the fixation of the lotion component cannot be completely prevented. When the discharge speed of the jet stream from the air knife is increased, the water in the liquid used for washing is volatilized, and the lotion component is linearly fixed along the discharge direction of the jet stream from the air knife. When a black matrix or a color filter is formed on the glass substrate to which the lotion component is fixed, there is a problem that the subsequent state is deteriorated and peeling occurs. On the other hand, if the discharge speed of the jet stream from the air knife is slowed down, the liquid containing the lotion remains on the glass substrate, and the lotion cannot be completely removed in the lotion removal step of removing the lotion, and the lotion remains. On the case of a glass substrate. When a black matrix or a color filter is formed in a state in which a lotion remains on the glass substrate, there is a problem in that the subsequent state is deteriorated and peeling occurs.

Accordingly, an object of the present invention is to provide a method for producing a glass substrate and a glass substrate manufacturing apparatus capable of suppressing peeling of a black matrix by removing a liquid containing a lotion on a glass substrate by a cleaning unit.

One aspect of the present invention is a method for producing a glass substrate for a color filter having a black matrix resin formed on its surface, which has the following embodiment.

[Form 1]

A method for producing a glass substrate for a color filter, comprising the steps of: supplying a cleaning liquid containing an inorganic alkali-based cleaning agent to which an interface active material is added to a glass substrate, and performing washing, rinsing step, and rinsing The liquid penetrates into the cleaning liquid adhered to the surface of the glass substrate in the cleaning step, and the removing step is performed by passing the cleaning liquid infiltrated with the rinsing liquid in the rinsing step into one end from the glass substrate to the other The cleaning unit is provided at one end to remove the cleaning liquid.

[Form 2]

According to the manufacturing method of the first aspect, in the removing step, in the step of passing the glass substrate before and after the cleaning unit, the liquid is supplied to the surface of the glass substrate at least in a subsequent step in order to prevent drying of the cleaning liquid.

[Form 3]

The manufacturing method of the aspect 1 or 2, wherein in the removing step, the cleaning liquid that has been washed with the glass substrate is recovered, and the concentration of the recovered cleaning liquid is measured, and the lower the concentration of the cleaning liquid is measured, the more enhanced The force of pressing the cleaning unit against the surface.

[Form 4]

The production method according to any one of the aspects 1 to 3, wherein, in the subsequent step of removing the cleaning liquid by the cleaning unit, water is added to the surface to suppress drying of the surface.

[Form 5]

The manufacturing method according to any one of the aspects 1 to 4, wherein, in the removing step, after the cleaning liquid is removed by the cleaning unit, the glass substrate is washed with the liquid, and the conductivity of the cleaned liquid is measured. The higher the conductivity of the above liquid, the stronger the force that presses the cleaning unit against the surface.

[Form 6]

The manufacturing method according to any one of the aspects 1 to 5, wherein the cleaning unit is configured to cause a rinsing liquid having a temperature difference of 0 ° C or more and 25 ° C or less with respect to a temperature of the cleaning liquid immediately before the rinsing step. It is removed by infiltration at the beginning.

Another aspect of the present invention is a manufacturing apparatus for a glass substrate for forming a color filter of a black matrix resin on the surface, which has the following embodiment.

[Form 7]

A manufacturing apparatus for a glass substrate for a color filter, comprising: a cleaning device that supplies a cleaning liquid containing an inorganic alkali-based cleaning agent to which an interface active material is added to a glass substrate, and performs cleaning; and a removing device And allowing the rinsing liquid to permeate into the cleaning liquid attached to the surface of the glass substrate, and passing the cleaning liquid penetrating the rinsing liquid into the cleaning unit disposed from one end of the glass substrate to the other end Remove the above cleaning solution.

According to the present invention, the cleaning unit can be used to physically remove the liquid containing the lotion on the glass substrate, and the peeling of the black matrix can be suppressed.

1‧‧‧Single sheet cleaning device

10‧‧‧cleaning unit

12‧‧‧ brush unit

12a‧‧‧Washing brush roller

12b‧‧‧Washing brush roller

14‧‧‧Sponge unit

14a‧‧‧Clean sponge roller

14b‧‧‧Clean sponge roller

15‧‧‧Pinch roller

16‧‧‧Spray unit

17‧‧‧Pinch roller

18‧‧‧cleaning agent tank

18a‧‧‧Nozzles

18b‧‧‧Nozzles

18c‧‧‧ nozzle

18d‧‧‧ nozzle

19‧‧‧ Pure water tank

19a‧‧‧Nozzles

19b‧‧‧Nozzles

G‧‧‧glass sheet

Fig. 1 is a flow chart for explaining an outline of an example of a method for producing a glass substrate of the embodiment.

Fig. 2 is a schematic view showing an example of the one-chip cleaning apparatus of the embodiment.

Fig. 3 is a plan view showing an example of the cleaning unit of the embodiment.

Figure 4 is a side view of the cleaning unit shown in Figure 3.

Fig. 5 is a plan view showing an example of a rivet used in the embodiment.

Fig. 6 is a graph showing an example of the relationship between the concentration of the cleaning liquid recovered in the cleaning agent recovery tank and the force for pressing the nip rolls against the glass sheet.

<Composition of glass sheets>

A glass sheet (glass substrate) is used for, for example, glass manufactured by a display including a flat panel display (FPD) such as a liquid crystal display. Hereinafter, a glass sheet for FPD will be described as an example. The glass sheet is formed into a color filter by arranging a black matrix and RGB pixels which are wavelength selective elements for transmitting light of red (R)/green (G)/blue (B). The black matrix improves the display contrast by blocking the light leakage of the backlight device other than the RGB pixel region and preventing the color mixture of adjacent RGB pixels. That is, the light transmission region of the color filter is determined by the shape and arrangement of the black matrix. The thickness of the glass sheet is, for example, 0.1 mm to 0.7 mm. The size of the glass sheet is, for example, 680 mm × 880 mm (G4 size), 2200 mm × 2500 mm (G8 size).

The glass sheet used for the production of FPD is preferably an alkali-free glass or a slightly alkali glass. When the glass sheet is an alkali-free glass, the composition of the glass is, for example, SiO ₂ 50% by mass to 70% by mass, Al ₂ O ₃ 0% by mass to 25% by mass, and B ₂ O ₃ 1% by mass to 15% by mass. MgO 0% by mass to 10% by mass, CaO 0% by mass to 20% by mass, SrO 0% by mass to 20% by mass, and BaO 0% by mass to 10% by mass.

Here, the total content of MgO, CaO, SrO, and BaO is 5% by mass to 30% by mass.

When the glass sheet is a micro alkali glass containing a trace amount of an alkali metal, the composition of the glass further contains 0.1% by mass to 0.5% by mass of R' ₂ O, preferably 0.2% by mass to 0.5% by mass of R' _{2 .} O. Here, R' is at least one selected from the group consisting of Li, Na, and K. Further, the total content of R' ₂ O may be less than 0.1% by mass.

Further, the glass sheet may further contain, in addition to the above components, 0.01% by mass to 1% by mass of SnO ₂ (preferably 0.01% by mass to 0.5% by mass), and Fe ₂ O ₃ 0% by mass to 0.2% by mass. It is preferably 0.01% by mass to 0.08% by mass), and may contain substantially no As ₂ O ₃ , Sb ₂ O ₃ and PbO in consideration of environmental burden.

<Flow of Manufacturing Method of Glass Sheet>

Fig. 1 is a flow chart showing an example of a flow of a method for producing a glass sheet. Hereinafter, each of the steps S1 to S10 of the flowchart will be described.

First, in step S1, the glass raw material prepared by producing the glass sheet having the above composition is heated to form molten glass, and the molten glass or the preform glass is used by a down-draw method, a re-drawing method, a floating method, or the like. Continuously formed into a glass ribbon having a specific thickness. In step S2, the glass ribbon produced in step S1 is cut to obtain a plain glass having a specific size. In the step S3, the plain glass obtained in the step S2 is placed in the form of a laminate which is laminated with the spacer paper for protecting the surface of the plain glass, and is placed in the form of a laminate for transporting and storing the plain glass. On the pallet.

Then, in step S4, the plain glass is taken out from the laminated body of the plain glass, and the plain glass is cut into the size of the glass sheet as the product. In step S5, the glass sheet obtained in step S4 is subjected to end surface processing such as grinding, polishing, and etching of the end faces.

Then, in step S6, the glass sheet is cleaned. Cleaning of glass sheets In the step, glass pieces, dust, stains, adhesive foreign matter, and the like which are small pieces of glass adhering to the surface of the glass sheet are removed. Further, in the step of washing the glass sheet, an inorganic alkali-based cleaning agent containing a surfactant is used in order to prevent the foreign matter from adhering to the surface of the washed glass sheet.

Then, in step S7, the glass sheet subjected to cleaning in step S6 is optically inspected. In step S8, the glass sheets which have passed the inspection in step S7 are placed on the pallet in the form of a laminate which is alternately laminated with the spacer paper for protecting the surface of the glass sheet, and is packaged. In step S9, the laminated body of the packaged glass sheet is shipped to the receiving address of the FPD manufacturer. From the viewpoint of preventing foreign matter from the spacer paper from adhering to the surface of the glass sheet, the spacer paper sandwiched between the laminated sheets of the glass sheets used is a pulp paper containing no recycled paper.

Further, the laminate of the plain glass placed on the pallet in the step S3 can be stored for a long time of several weeks or several months in the step S10. At this time, from the viewpoint of cost and environmental protection, the spacer paper sandwiched between the laminated sheets of the preserved plain glass uses recycled paper. The laminate system of the plain glass which has been stored for a long period of time is shipped in the step S9 through the cutting step from the step S4 to the packaging step of the step S8 as described above. Further, the laminate of the glass sheets placed on the pallet and packed in step S8 can be stored for a long period of several weeks or months in step S10.

<Flow of cleaning step of glass sheet>

Next, the details of the cleaning step of the glass sheet performed in step S6 of Fig. 1 will be described. In the washing step of the glass sheet, the surface of the glass sheet is cleaned using an inorganic alkali-based cleaning agent to which a surfactant is added.

In the washing step, for example, the surface of the glass sheet is washed using an inorganic alkali-based detergent to which a surfactant is added. The inorganic alkali-based cleaning agent is produced by adding an alkaline component to a dilution liquid obtained by diluting a commercially available glass sheet with a washing liquid with water. As the cleaning liquid for the glass sheet, for example, PK-manufactured by Parker Corporation can be used. LCG series, or the SemiClean series manufactured by Yokohama Oil & Fats Co., Ltd., etc. More specifically, a cleaning liquid to which a polyoxyalkylene ether or a polyoxyethylene alkylene ether is added as a surfactant can be used. A polyoxyalkylene ether or a polyoxyethylene alkylene ether is a nonionic surfactant (nonionic surfactant), and another anionic surfactant (anionic surfactant) used in the cleaning solution is, for example, Compared with the alkanesulfonic acid, it tends to remain on the surface of the glass sheet, causing peeling of the black matrix. Nonionic surfactants do not exhibit ionicity even when dissolved in water. However, when a black matrix is formed on the surface of a glass sheet, a non-ionic surfactant is not formed because a strong bond such as a covalent bond cannot be formed on the surface of the glass. The black matrix coated on it will be peeled off due to development. However, the nonionic surfactant is used in order to satisfy the cleaning power. The glass sheet cleaning liquid is diluted with water so as to have a concentration of, for example, 1% by mass to 5% by mass. The concentration of the alkaline component of the diluent is, for example, 0.02% by mass to 0.15% by mass in terms of the concentration of potassium hydroxide (KOH). In terms of keeping the surface of the glass sheet clean, the water for diluting the cleaning agent is preferably subjected to ion exchange treatment, EDI (Electrodeionization) treatment, filtration treatment using a reverse osmosis membrane (RO membrane), and Pure water or ultrapure water obtained by decarbonation treatment of a decarbonation device. Further, in order to remove the soluble organic matter, it is preferred to treat the water to the activated carbon. Specifically, it is preferable to remove a foreign substance such as fine particles from water using a filter, and then pass the water to the activated carbon to remove the organic substance, and then perform an ion exchange treatment, an EDI treatment, a filtration treatment using a reverse osmosis membrane, and Decarbonation treatment by a carbon dioxide removal unit. In the ion exchange treatment, an ionic substance such as chloride ion or sodium ion contained in water is removed from the water using an ion exchange resin membrane. In the EDI treatment, an ion exchange resin film is used, and a potential gradient formed by applying a potential to the electrode is used to remove the ionic substance from the water with high precision. In the filtration treatment using a reverse osmosis membrane, ionic substances, salts, and organic substances are removed from the water. In the decarbonation treatment, carbon dioxide is removed from the water using a decarbonation device.

In the present embodiment, the diluent for the cleaning liquid for the glass sheet is selected from the group consisting of One or more alkaline components of a group consisting of KOH, NaOH, ETDA (ethylenediaminetetraacetic acid)-4Na, ETDA-4K, Na4P2O7 (tetrasodium pyrophosphate) and K4P2O7 (tetrapotassium pyrophosphate) are thereby produced The cleaning agent used in the cleaning step. The concentration of the alkaline component of the cleaning agent is 1% by mass or more in terms of potassium hydroxide (KOH). The alkaline component is more etchable to glass than the other alkaline components, and is excellent in solubility. In particular, KOH is preferably used as an alkaline component from the viewpoint of etchability, solubility, and prevention of adverse effects on the thin film transistor formed on the glass sheet. Further, KOH and NaOH are advantageous in drainage treatment as compared with other alkaline components.

Further, regarding the cleaning agent used in the cleaning step, the higher the concentration of the alkaline component, the stronger the cleaning power for removing foreign matter from the glass sheet. However, if the concentration of the alkaline component is too high, there is a problem that the cleaning device of the glass sheet is corroded and crystals are formed in the cleaning agent. Therefore, the concentration of the alkaline component of the cleaning agent is preferably not more than 10% by mass. Further, in order to facilitate the operation of the cleaning agent, the concentration of the alkaline component of the cleaning agent is more preferably not more than 5% by mass.

In the present embodiment, the glass sheet cleaning method includes a single sheet cleaning method and a batch cleaning method. First, a cleaning method of a glass sheet which is cleaned by a single piece will be described. Fig. 2 is a schematic view showing an example of a single-piece cleaning device for glass sheet G which is subjected to single-piece cleaning. The single-chip cleaning apparatus 1 includes a cleaning unit 10 that performs a cleaning step. The glass sheet G is washed in the cleaning unit 10 by an inorganic alkali-based cleaning agent to which a surfactant is added.

3 is a plan view of the cleaning unit 10, and FIG. 4 is a side view of the cleaning unit 10. In FIG. 3 and FIG. 4, the conveyance apparatus which conveys the glass sheet G is abbreviate|omitted.

As shown in FIG. 3, the cleaning unit 10 includes a brush unit 12, a sponge unit 14, a shower unit 16, and nip rollers 15, 17. These units are arranged in order from the upstream side to the downstream side in the conveying direction of the glass sheet G. As shown in FIG. 4, the cleaning unit 10 further includes a cleaning agent tank 18, a pure water tank 19, and nozzles 18a, 18b, 18c, 18d, 19a, and 19b.

The brush unit 12 has cleaning brush rollers 12a, 12b. Cleaning brush rollers 12a, 12b are along the glass The conveying direction of the sheet G is arranged. The cleaning brush rollers 12a and 12b are disposed in pairs above and below the glass sheet G so that the two surfaces of the glass sheet G to be conveyed can be cleaned, respectively. The cleaning brush rollers 12a and 12b are disposed so as to straddle the conveying direction of the glass sheet G as shown in Fig. 3, respectively. A plurality of cleaning brushes are attached to the outer peripheral surface of the cleaning brush rollers 12a and 12b. The surface of the glass sheet G is cleaned by the rotation of the washing brush rolls 12a and 12b so that the cleaning brush contacts the surface of the glass sheet G to be conveyed. In FIG. 3, the cleaning brush rolls 12a and 12b are arranged in two rows along the conveying direction of the glass sheet G, and may be arranged in only one row or three rows or more.

The sponge unit 14 has cleaning sponge rolls 14a, 14b. The cleaning sponge rolls 14a and 14b are arranged along the conveying direction of the glass sheet G. The cleaning sponge rolls 14a and 14b are disposed in pairs above and below the glass sheet G so as to wash both surfaces of the conveyed glass sheet G, respectively. The cleaning sponge rolls 14a and 14b are arranged so as to straddle the conveying direction of the glass sheet G as shown in Fig. 3, respectively. A cleaning sponge is attached to the outer peripheral surface of the cleaning sponge rolls 14a and 14b. The surface of the glass sheet G is cleaned by the rotation of the shafts of the cleaning sponge rolls 14a and 14b so that the cleaning sponge contacts the surface of the conveyed glass sheet G. In FIG. 3, the cleaning sponge rolls 14a and 14b are arranged in two rows along the conveying direction of the glass sheet G, and may be arranged in only one row or three rows or more.

The nip rolls 15 and 17 are disposed so as to be disposed above the glass sheet G in order to remove the lotion and liquid adhering to the front and back surfaces of the glass sheet G, and are oriented in a direction orthogonal to the direction in which the glass sheet G is conveyed. A portion of the sponge-equipped cleaning device disposed from one end of the glass sheet G to the other end. The nip rolls 15, 17 are a cleaning unit (physical cleaning unit) that removes the lotion or liquid by contacting the glass sheet G. Figure 5 is a plan view of an example of a nip roller. As shown in the figure, the nip rolls 15 and 17 are disposed so as to straddle the conveying direction of the glass sheet G in the same manner as the cleaning sponge rolls 14a and 14b. A cleaning sponge is attached to the outer peripheral surface of the nip rolls 15, 17. The nip rolls 15 and 17 mainly remove the cleaning agent adhered to the glass sheet G by washing with a cleaning agent. The distance between the nip rollers 15, 17 and the glass sheet G is controlled by the position of the nip rollers 15, 17 (not shown) According to an appropriate control, the nip rolls 15 and 17 are rotated by the shaft in contact with the glass sheet G, and the cleaning sponge contacts the surface of the conveyed glass sheet G to adhere the surface of the glass sheet G to the lotion. , liquid removal. The nip roller 15 is disposed between the sponge unit 14 and the shower unit 16, and the nip roller 17 is disposed on the downstream side of the shower unit 16. A shower device (not shown) is provided on the upstream side and/or the downstream side of the nip roller 15 to prevent drying of the glass sheet G. The shower device, for example, sprays pure water or ultrapure water to wet the glass sheet G, thereby preventing the glass sheet G from being dried during the washing step. When the glass sheet G is dried, the cleaning agent adhering to the glass sheet G is fixed, and it is difficult to remove even if the nip rolls 15 and 17 and the shower unit 16 are used. Therefore, by dampening the glass sheet G to prevent drying, it is easy to remove the cleaning agent using the nip roller 15 or the like. Further, the shower device is preferably disposed such that the rinse liquid such as pure water or ultrapure water sprayed from the shower device is not directly exposed to the nip rolls 15, 17 within the range of the nip rolls 15, 17. Moreover, the size of the nip rolls 15 and 17 can cover the entire front surface and the back surface of the sheet glass G during the conveyance of the sheet glass G, and can be appropriately changed according to the size of the glass sheet G. Further, the shape, thickness, and material of the sponge covering the outer peripheral surfaces of the nip rolls 15 and 17 can be appropriately changed depending on the cleaning agent to be used, the amount of pure water sprayed from the shower device, and the like.

The cleaning agent tank 18 of the cleaning unit 10 stores the inorganic alkali-based cleaning agent added with the surfactant used in the cleaning step. The cleaning agent tank 18 has a function of heating the cleaning agent to a temperature range of, for example, 50 ° C to 80 ° C and maintaining the temperature. The nozzles 18a and 18b spray the cleaning agent supplied from the cleaning agent tank 18 onto both surfaces of the glass sheet G conveyed in the brush unit 12. The nozzles 18c and 18d spray the cleaning agent supplied from the cleaning agent tank 18 onto both surfaces of the glass sheet G conveyed in the sponge unit 14. The cleaning agent supplied from the cleaning agent tank 18 and sprayed onto both surfaces of the glass sheet G flows from the glass sheet G and is recovered in a cleaning agent recovery tank (not shown).

The pure water tank 19 stores the above pure water or ultrapure water. The pure water tank 19 has a function of heating pure water or ultrapure water to a temperature range of, for example, 25 ° C to 80 ° C and maintaining the temperature. The nozzles 19a and 19b spray the pure water or ultrapure water supplied from the pure water tank 19 to the shower unit 16 for transport. Two surfaces of the glass sheet G. Pure water or ultrapure water supplied from the pure water tank 19 and sprayed onto both surfaces of the glass sheet G flows from the glass sheet G, and is recovered into a pure water recovery tank (not shown).

Further, in the present embodiment, as shown in Fig. 4, the brush unit 12 and the sponge unit 14 share the cleaning agent tank 18, but the respective cleaning agent tanks 18 may be used. At this time, the brush unit 12 and the sponge unit 14 can clean the glass sheet G using different concentrations of the cleaning agent.

Next, the cleaning process of the glass sheet G of the single-chip cleaning apparatus 1 will be described. First, the brush cleaning of the glass sheet G is performed in the brush unit 12 of the cleaning unit 10. Specifically, the inorganic alkali-based cleaning agent sprayed from the nozzles 18a and 18b is attached to both surfaces of the glass sheet G, and the two surfaces of the glass sheet G are subjected to rotation by the shafts of the cleaning brush rollers 12a and 12b. Cleaning.

Then, in the sponge unit 14 of the cleaning unit 10, sponge cleaning of the glass sheet G is performed. Specifically, the inorganic alkali-based cleaning agent sprayed from the nozzles 18c and 18d is attached to both surfaces of the glass sheet G, and the two surfaces of the glass sheet G are subjected to rotation by the shafts of the cleaning sponge rolls 14a and 14b. Cleaning.

Then, sponge cleaning of the glass sheet G is performed on the nip roller 15 of the cleaning unit 10. Specifically, the rinsing liquid (for example, pure water or ultrapure water) sprayed from a shower device (not shown) provided on the upstream side of the nip roller 15 wets the front and back surfaces of the glass sheet G to prevent drying. The fixing of the cleaning agent attached to the front and back surfaces which is not removed by the sponge unit 14 can be suppressed. When the glass sheet G travels from the upstream to the downstream, one of the front surface and the back surface of the glass sheet G is rotated by the nip roller 15, and the adhering matter adhering to the front surface and the back surface of the glass sheet G is removed. The nip roller 15 presses (presses) the sponge portion against the glass sheet G, and removes the cleaning agent remaining on both surfaces of the glass sheet G by the shaft rotation. The force for pressing the nip roller 15 against the glass sheet G is controlled based on the concentration of the cleaning liquid containing the cleaning agent supplied to the glass sheet G and recovered in the cleaning agent recovery tank (not shown). The liquid containing the cleaning liquid is recovered in the cleaning agent recovery tank, but if the cleaning liquid adheres to the glass sheet G, it is recovered to the cleaning agent recovery The amount of cleaning fluid in the tank is reduced. That is, the concentration of the cleaning liquid recovered into the cleaning agent recovery tank becomes lower than the concentration of the cleaning liquid before the supply stored in the cleaning agent tank 18. Therefore, by measuring the concentration of the cleaning liquid recovered in the cleaning agent recovery tank, the degree of contamination of the glass sheet G due to the adhesion of the cleaning liquid to the glass sheet G can be measured. When the degree of contamination of the glass sheet G is high, that is, when the concentration of the cleaning liquid recovered into the cleaning agent recovery tank is low, the force of pressing the nip roller 15 against the glass sheet G is enhanced to increase the nip roller. The cleaning power of 15 is such that when the contamination degree of the glass sheet G is low, that is, when the concentration of the cleaning liquid recovered in the cleaning agent recovery tank is high, the force for pressing the nip roller 15 against the glass sheet G is weakened. To reduce the cleaning force of the nip roller 15. Fig. 6 is a graph showing an example of the relationship between the concentration of the cleaning liquid recovered in the cleaning agent recovery tank and the force for pressing the nip roller 15 against the glass sheet G. As shown in the figure, the lower the concentration of the cleaning liquid, the more the cleaning liquid adheres to the glass sheet G, and the front and back surfaces of the glass sheet G are contaminated, thereby enhancing the pressing of the nip roller 15 against the glass sheet. G is used to clean the glass sheet G. On the other hand, the higher the concentration of the cleaning liquid, the less the cleaning liquid adheres to the glass sheet G, and the front and back surfaces of the glass sheet G are less contaminated, so that the nip roller 15 is weakened against the glass sheet G. The force is used to clean the glass sheet G. The lower the concentration of the cleaning liquid recovered into the cleaning agent recovery tank, the shorter the distance between the nip roller 15 and the glass sheet G is, and the force for pressing the nip roller 15 against the glass sheet G is enhanced. Thereby, the cleaning agent adhering to the glass sheet G can be removed, and the fixation of the lotion component can be suppressed. Further, the pure water or ultrapure water sprayed from the shower device (not shown) provided on the downstream side of the nip roller 15 prevents the glass sheet G from being dried while the glass sheet G is dried while the glass sheet G is dried. The sheet G is moved downstream.

Then, in the shower unit 16 of the cleaning unit 10, a rinsing step of removing the inorganic alkali-based cleaning agent adhering to the surface of the glass sheet G is performed. Specifically, the temperature-controlled rinsing liquid (for example, pure water or ultrapure water) ejected from the nozzles 19a and 19b is attached to both surfaces of the glass sheet G, whereby the surface of the glass sheet G is pure water. Or rinsing with ultrapure water, and the inorganic alkali cleaning agent attached to the surface is washed away. Here, the so-called temperature control refers to the phase The rinse liquid immediately before the rinsing step, for example, the rinsing liquid having a temperature difference of 0 ° C or more and 25 ° C or less is infiltrated at the beginning of the rinsing step. The cleaning unit 10 removes the rinsing liquid having a temperature difference (washing agent temperature - rinsing liquid temperature) of 0 ° C or more and 25 ° C or less at the beginning of the rinsing step with respect to the temperature of the cleaning agent immediately before the rinsing step. Thereby, the removal efficiency of the inorganic alkali-based cleaning agent adhering to the surface of the glass sheet G can be improved. Further, the surface of the glass sheet G passing through the shower unit 16 is in a state of being wetted by adhering pure water or ultrapure water. The glass sheet G of the cleaning unit 10 is conveyed to a position where the nip roller 17 is provided while keeping the surface wet. Similarly to the nip roller 15, the nip roller 17 cleans the glass sheet G in a state of being wetted by a shower device (not shown). The removal step of removing pure water or ultrapure water is performed by the nip roller 17. The force for pressing the nip roller 17 against the glass sheet G is controlled based on the conductivity of the pure water supplied to the glass sheet G and recovered in a pure water recovery tank (not shown). The pure water containing the cleaning agent is recovered in the pure water recovery tank, and if the cleaning agent adhering to the glass sheet G is removed by the nip roller 17, the amount of the cleaning agent contained in the pure water recovered in the pure water recovery tank is increased, so The conductivity of the recovered pure water is increased. Therefore, the cleanliness of the glass sheet G can be measured by measuring the conductivity of the pure water recovered in the pure water recovery tank. When the cleanliness of the glass sheet G is high, that is, when the cleaning agent adhering to the glass sheet G can be removed by the nip roller 15 on the upstream side and the electrical conductivity is low, the nip roller 17 is weakened against the glass sheet. Cleaning with the force of the material G, when the cleanliness of the glass sheet G is low, that is, when the cleaning agent flows into the pure water recovery tank and the electrical conductivity is high, the force for pressing the nip roller 17 against the glass sheet G is enhanced. And the cleaning force of the nip roller 17 is increased. The higher the electrical conductivity of the pure water recovered into the pure water recovery tank, the shorter the distance between the nip roller 17 and the glass sheet G is, and the force for pressing the nip roller 17 against the glass sheet G is enhanced. Thereby, the cleaning agent adhering to the glass sheet G can be removed, and the fixation of the lotion component can be suppressed. Since the cleaning agent can be removed from the glass sheet G and the fixation of the lotion component is suppressed, when a black matrix or the like is formed on the glass sheet G, it is possible to suppress the subsequent failure of the black matrix and the subsequent peeling. The pure water or ultrapure water sprayed by the shower device (not shown) disposed on the downstream side of the nip roller 17 is pressed by the wet glass sheet G The surface and the back surface prevent drying of the glass sheet G, and the glass sheet G is moved downstream. The glass sheet G of the cleaning unit 10 is conveyed while keeping the surface wet. Thereby, the amount of foreign matter adhering to the surface of the glass sheet G passing through the cleaning unit 10 can be controlled.

The method for measuring the concentration of the cleaning liquid and the conductivity of the pure water can be measured by a general method using any measuring instrument. Further, the force of the nip rolls 15 and 17 pressed against the glass sheet G can be appropriately changed depending on the transport speed of the glass sheet G, the concentration of the cleaning liquid, the conductivity of pure water, and the like. Further, a pure water washing step of cleaning the glass sheet G with pure water may be provided after washing with the nip rolls 15 and 17.

The cleaning method of the glass sheet for single-chip cleaning will be described above. By the above cleaning, the cleaning agent adhering to the glass sheet can be removed, and since the air knife is not used, drying of the sheet glass can be suppressed, and the lotion component which occurs due to the residual cleaning agent on the sheet glass can be suppressed. Fixed. Further, when a black matrix or the like is formed on the glass sheet, the subsequent defects of the black matrix and the subsequent peeling can be suppressed.

<Features>

Previously, in order to remove the organic matter adhering to the surface of the glass sheet, a method of cleaning the surface of the glass sheet with an inorganic alkali-based cleaning agent was employed. A semiconductor element such as a TFT is formed on the surface of the glass sheet used for FPD manufacturing. The glass sheet is required to have an extremely high degree of cleanliness on the surface in order to suppress destruction of the semiconductor element due to peeling off static electricity or short circuit. Therefore, a method of producing a glass sheet having an extremely high degree of cleanliness by washing the surface of a glass sheet with an inorganic alkali-based cleaning agent is used.

However, in order to obtain high cleanliness, the glass sheet was cleaned using a KOH or NaOH-based inorganic alkali-based cleaning agent, and the adhesion of the black matrix resin to the surface of the glass sheet was low, and it was found that the black matrix was peeled off from the surface of the glass sheet. problem. In particular, in recent years, as the display is high-definition, the line width and pitch of the black matrix disposed on the surface of the glass sheet are gradually reduced, so that the adhesion of the black matrix resin to the surface of the glass sheet is an important problem.

Moreover, the specific organic matter attached to the surface of the glass sheet (especially the interface contained in the lotion) The agent may be a cause of a decrease in the adhesion of the black matrix resin to the surface of the glass sheet. Specifically, when the surface of the glass sheet is washed with an inorganic alkali-based cleaning agent to which a surfactant is added, the adhesion of the black matrix resin to the surface of the glass sheet is lowered. Therefore, the organic substance derived from the surfactant may cause a decrease in the adhesion of the black matrix resin. Further, the organic substance which causes a decrease in the adhesion of the black matrix resin may include, for example, an organic substance derived from a spacer paper contained in the glass sheet laminate, and an organic substance in a gas atmosphere in a storage and transport environment of the glass sheet laminate.

In the present embodiment, in the washing step of washing the surface of the glass sheet with the inorganic alkali-based cleaning agent to which the surfactant is added, the glass sheet is cleaned by the nip rolls without using an air knife. The following glass sheets were produced: the fixing of the lotion component was suppressed, and the cleaning agent was removed, which had extremely high cleanliness, and the adhesion of the black matrix resin was not lowered. The organic material from the surfactant contained in the cleaning agent used in the cleaning step is removed from the surface of the glass sheet by a washing step. This organic substance is an organic substance which causes a decrease in the adhesion of the black matrix resin to the surface of the glass sheet. The organic substance is an organic substance having a holding time of 18 minutes or longer in a GC/MS (Gas Chromatography Mass Spectrometer), and is, for example, an aromatic compound or a nonionic surfactant. The manufacturing method of this embodiment can improve the adhesion of the black matrix resin to the surface of the glass sheet. Further, a non-polar column TC-1 manufactured by GL Science Co., Ltd. was used as a capillary column used in GC/MS.

In the present embodiment, the mass of the specific organic substance (especially the surfactant contained in the lotion) adhering to the surface of the glass sheet after the cleaning step of the glass sheet is preferably 0.05 ng per 1 cm ^{2 of the} surface of the glass sheet. 0.50 ng, more preferably 0.05 ng to 0.25 ng. The more the quality of the organic substance, the lower the adhesion of the black matrix resin to the surface of the glass sheet, so that the quality of the specific organic substance adhering to the surface of the glass sheet is preferably as small as possible. In the present embodiment, the glass sheet is controlled by the glass sheet. The surface is 0.05 ng to 0.50 ng per 1 cm ² , which improves the adhesion of the black matrix resin.

Thus, the cleanliness of the glass sheet G can be measured by measuring the concentration of the cleaning liquid recovered in the cleaning agent recovery tank and the conductivity of the pure water recovered in the pure water recovery tank. Therefore, the adhesion of the black matrix resin can be improved by controlling the concentration of the cleaning liquid and the conductivity of the pure water by controlling the surface of the glass sheet to be 0.05 ng to 0.50 ng per 1 cm ² .

Further, the manufacturing method of the present embodiment is particularly effective when manufacturing a color filter panel having a line width and a small pitch of a black matrix. The color filter panel is a glass sheet in which a black matrix and RGB pixels are arranged on the surface to form a color filter. The glass sheet produced by the production method of the present embodiment sufficiently suppresses black matrix peeling even if a black matrix having a line width of less than 10 μm is disposed on the surface. Therefore, the glass sheet can be provided with a high-definition black matrix having a line width of 3 μm to 5 μm on the surface.

In the present embodiment, the surface of the glass sheet G is cleaned by the inorganic alkali-based cleaning agent in the brush unit 12 and the sponge unit 14 of the cleaning unit 10, and then washed by the nip rolls 15. In the nip roller 15, the inorganic alkali-based cleaning agent adhering to the surface of the glass sheet G is washed away by pure water or ultrapure water and removed. Further, in the shower unit 16 of the cleaning unit 10, the surface of the glass sheet G is cleaned and then washed by the nip rolls 17. Since the air knife is not used, the drying of the glass sheet G is suppressed, and the inorganic alkali-based cleaning agent adhering to the surface of the glass sheet G is removed by the nip rolls 15, 17. Further, by setting the difference between the temperature of the lotion immediately before the nip roller 15 and the temperature of the pure water immediately after leaving the nip roller 15 to 0 ° C or more and 25 ° C or less, the inorganic matter adhering to the surface of the glass sheet G is improved. The removal efficiency of the alkali cleaning agent.

The inorganic base cleaning agent used in the washing step contains a surfactant. As described above, the surfactant is an organic substance which causes a decrease in the adhesion of the black matrix resin to the surface of the glass sheet. When a nonionic surfactant (nonionic surfactant) is used for the surfactant, the surfactant is likely to remain on the surface of the glass sheet compared to when an anionic surfactant (anionic surfactant) is used. And cause the black matrix to peel off. At the end of the cleaning step, the glass sheet is cleaned by a nip roller, and the glass piece is rinsed with pure water or ultrapure water whose temperature difference is controlled to 0 ° C or more and 25 ° C or less with respect to the temperature of the lotion immediately before the nip roll is reached. The surface of the material, and the cleaning agent attached to the surface of the glass sheet G is washed away, thereby The removal effect of organic matter attached to the surface of the glass sheet.

In the present embodiment, the cleaning agent used in the washing step is formed by diluting a commercially available glass substrate with a washing liquid, and adding an alkaline component such as KOH to the obtained diluent. Specifically, an alkaline component such as KOH is added to the diluted solution of the cleaning liquid for a glass substrate to form a cleaning agent having a concentration of 1% by mass or more. By adding an alkaline component, it is possible to easily produce a cleaning agent having a high alkaline component concentration without using and using a cleaning liquid having a very high basic component concentration. The cleaning agent having a high concentration of an alkaline component can improve the etching property of the glass sheet, and peel off foreign matter such as glass dust or dust, and adhesive foreign matter adhering to the surface of the glass sheet under load, and peel off from the surface of the glass sheet. And effectively remove it.

Further, by adding an alkaline component to the diluted solution of the cleaning liquid for the glass substrate, a cleaning agent is formed, and the surface tension is lower than that of the diluent. In other words, by adding an alkaline component such as KOH to a diluent for a cleaning liquid for a glass substrate containing a surfactant, an effect of lowering the surface tension of the cleaning agent can be obtained, and the effect is that the alkaline component is separately added to the pure water. It is almost impossible to get in the middle. Thereby, the cleaning agent easily penetrates between the adhesive foreign matter and the glass plate. Further, by utilizing the above-described effects and the synergistic effect of the improvement of the etchability of the glass sheet obtained by the cleaning agent, the foreign matter adhering to the glass sheet is more effectively removed.

The glass sheet (glass substrate) produced by the present embodiment is suitable as a glass substrate for a flat panel display, for example, a glass substrate for a liquid crystal display or a glass substrate for an organic EL (Electroluminescence) display. Further, the glass substrate produced by the present embodiment is particularly suitable as a glass substrate for LTPS (Low-temperature polysilicon)-TFT display for high-definition display or a glass substrate for an oxide semiconductor-TFT display.

In the above, the method and the apparatus for producing the glass substrate of the present invention are described in detail. However, the present invention is not limited to the above-described embodiments and examples, and various modifications and changes can be made without departing from the spirit and scope of the invention. .

10‧‧‧cleaning unit

12‧‧‧ brush unit

12a‧‧‧Washing brush roller

12b‧‧‧Washing brush roller

14‧‧‧Sponge unit

14a‧‧‧Clean sponge roller

14b‧‧‧Clean sponge roller

15‧‧‧Pinch roller

16‧‧‧Spray unit

17‧‧‧Pinch roller

18‧‧‧cleaning agent tank

18a‧‧‧Nozzles

18b‧‧‧Nozzles

18c‧‧‧ nozzle

18d‧‧‧ nozzle

19‧‧‧ Pure water tank

19a‧‧‧Nozzles

19b‧‧‧Nozzles

G‧‧‧glass sheet

Claims (6)

A method for producing a glass substrate, comprising: a method for producing a glass substrate for a color filter having a black matrix resin; and comprising: a cleaning step of supplying the glass substrate with an interface material added thereto The cleaning solution of the inorganic alkali cleaning agent is washed, the rinsing step is performed, the rinsing liquid is permeated into the cleaning liquid adhered to the surface of the glass substrate in the cleaning step, and the removing step is performed, and the rinsing liquid is permeated in the rinsing step The cleaning liquid is removed by a cleaning unit comprising a first roller disposed from one end of the glass substrate to the other end and contacting the surface of the glass substrate; and the cleaning unit is attached to the above The amount of the organic substance derived from the surfactant in the glass substrate is 0.05 ng to 0.50 ng per 1 cm ² of the surface of the glass substrate, and the force for pressing the first roll against the glass substrate is adjusted. The method for producing a glass substrate according to claim 1, wherein in the removing step, the surface of the glass substrate is supplied to prevent drying of the cleaning liquid at least in a subsequent step in a step of passing the glass substrate through the cleaning unit. liquid. The method for producing a glass substrate according to claim 1 or 2, further comprising the step of: adhering the cleaning agent attached to a surface of the glass substrate in the cleaning step by passing from one end of the glass substrate to the other end And removing the second roller in contact with the glass substrate; and removing the cleaning liquid that has been washed through the glass substrate in the step of removing the cleaning agent through the second roller, and measuring the recovered The concentration of the cleaning liquid is measured such that the lower the concentration of the cleaning liquid is, the stronger the force for pressing the second roller against the surface is enhanced. The method for producing a glass substrate according to claim 1 or 2, wherein, in the removing step, the cleaning liquid is removed by the cleaning unit, and the glass substrate is cleaned by the liquid, and the conductive conductivity of the liquid is measured. The higher the conductivity of the above liquid is measured, the stronger the force of pressing the cleaning unit against the surface is enhanced. The method for producing a glass substrate according to claim 1 or 2, wherein the cleaning unit is configured to cause a rinsing liquid having a temperature difference of 0 ° C or more and 25 ° C or less with respect to a temperature difference of a temperature of the cleaning liquid immediately before the rinsing step. It is removed by infiltration at the beginning. A manufacturing apparatus for a glass substrate, comprising: a manufacturing apparatus for a glass substrate for a color filter of a black matrix resin; and a cleaning apparatus, wherein the glass substrate is supplied with an interface active material; a cleaning solution of the inorganic alkali-based cleaning agent, and a cleaning device, wherein the rinsing liquid is infiltrated into the cleaning liquid adhering to the surface of the glass substrate, and the cleaning liquid infiltrated with the rinsing liquid is passed through a cleaning unit configured such that a first roller of the glass substrate is connected to the other end of the glass substrate and the surface of the glass substrate is removed; and the cleaning unit is configured to adhere to the glass substrate and is derived from a surfactant. The amount of adhesion of the organic substance is 0.05 ng to 0.50 ng per 1 cm ² of the surface of the glass substrate, and the force for pressing the first roll against the glass substrate is adjusted.