TWI600542B - Lamination device and lamination method - Google Patents

Description

Laminating equipment and bonding method

The invention relates to a bonding device and a bonding method, in particular to a bonding device and a bonding method for a bearing fixture between an upper cavity and an image capturing device.

In recent years, with the advancement of technology, many electronic devices, such as tablet computers, smart phones, All-In-One Computers, digital cameras, watches, music players or handheld game consoles, can be equipped. A touch display panel allows a user to input a signal to an electronic device by means of touch. In this way, the user can interact with the electronic device without using other input devices such as a mouse or a keyboard. In this way, the volume and weight of the electronic device can be greatly reduced because it does not need to be equipped with a mouse or a keyboard.

In general, the touch display panel comprises a touch layer film set which is formed by laminating a plurality of layers of film. In the current fitting process, it is mainly to use a single Alignment Stage (Single Alignment Stage) for fitting. The above-mentioned alignment compensation platform comprises a lower cavity, a carrying platform, a correction module and an upper cavity. The carrying platform is disposed in the lower cavity, and the calibration module is located beside the carrying platform. The upper cavity is located above the carrying platform and can close the lower cavity. When the bonding is performed, firstly, one of the films is firstly positionally corrected in the calibration module and then moved to the carrier stack, and then the other film is fixed to the upper cavity, and finally the upper cavity is opposite to the lower cavity. Close together to fit the two films. However, although the positional relationship between the two films should be almost error-free after being corrected by the calibration module, The film set on the carrying platform is placed on the carrying platform after being corrected by the calibration module and subjected to a displacement program such as traverse and lifting. As a result, the alignment accuracy between the two films is bound to be reduced by the corrected displacement program.

The invention provides a bonding device and a bonding method, so as to avoid the problem that the alignment accuracy between the two films is reduced by the influence of the corrected displacement program.

The bonding device disclosed in the present invention comprises a lower cavity, a carrying fixture, an upper cavity and an image capturing device. The lower cavity comprises a transparent bottom plate and a side plate. The side plates protrude from the transparent bottom plate to form an accommodation space and an opening. The opening communicates with the accommodating space. The bearing fixture is located in the accommodating space and is used to carry a first workpiece. The bearing fixture is located between the transparent bottom plate and the upper cavity. The upper cavity has a fixed surface and at least one fixed mark. The fixing surface faces the carrying fixture and is used to fix a second workpiece. The fixed mark is on the fixed side. The upper cavity can have a first position and a second position relative to the lower cavity. In the first position, the upper chamber is separated from the lower chamber. In the second position, the upper cavity covers the opening to close the accommodating space. The lower cavity is interposed between the image capturing device and the upper cavity, and is configured to capture at least one first image containing the image of the bearing fixture and the image of the first processing component or capture the image containing the bearing fixture Fixing at least one second image of the marked image.

The bonding method disclosed in the present invention comprises the steps of providing a bonding apparatus as described above. The first workpiece is stacked on the carrier that carries the fixture. The first image including the image bearing the jig and the image of the first processed piece is captured by the image capturing device. And obtaining, according to the first image, position information of the workpiece between the bearing fixture and the first processing component, and causing the calibration device to correct the relative position of the first processing component and the bearing fixture according to the workpiece position information. Fixing the second workpiece to the upper cavity Fixed surface. The first workpiece and the second workpiece are attached.

According to the bonding apparatus and the bonding method disclosed in the above embodiments, the upper cavity, the bearing fixture and the image capturing device are sequentially arranged in the longitudinal direction, and the bottom plate of the lower cavity is made of a transparent material, so that the image capturing device can The positional relationship between the first workpiece and the carrier is obtained when the first workpiece is placed on the platform. Therefore, the problem that the conventional workpiece can be offset during the process of moving the workpiece to the loading table after the position correction can be avoided, thereby improving the bonding quality of the bonding device disclosed in the above embodiment. .

In addition, since the upper cavity, the bearing fixture and the image capturing device are arranged in the longitudinal direction, and the bottom plate of the lower cavity is made of a transparent material, the image capturing device can directly obtain the positional relationship between the carrying platform and the fixed mark, thereby enabling The positioning table and the first processing member are aligned on the basis of the fixed mark to further improve the alignment accuracy between the first workpiece and the second workpiece.

The above description of the present invention and the following description of the embodiments are intended to illustrate and explain the principles of the invention, and to provide a further explanation of the scope of the invention.

10‧‧‧Fitting equipment

20‧‧‧First processed parts

30‧‧‧Second processed parts

100‧‧‧ lower cavity

110‧‧‧Transparent backplane

120‧‧‧ side panels

130‧‧‧ accommodating space

140‧‧‧ openings

200‧‧‧bearing fixture

210‧‧‧Frame

211‧‧‧through slot

220‧‧‧bearing station

221‧‧‧ bearing surface

300‧‧‧Upper cavity

310‧‧‧Fixed surface

320‧‧‧fixed mark

400‧‧‧Image capture device

410‧‧‧ camera

500‧‧‧First mobile device

600‧‧‧ calibration device

700‧‧‧Second mobile device

Fig. 1 is a partial cross-sectional view showing a laminating apparatus according to a first embodiment of the present invention.

Fig. 2 is a schematic bottom view of the bearing fixture of Fig. 1.

Figure 3 is a partial bottom plan view of the cavity above Figure 1.

Figures 4 through 9 are the operational intent of the bonding apparatus of Figure 1.

The detailed features and advantages of the present invention are set forth in the Detailed Description of the Detailed Description of the <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> </ RTI> <RTIgt; The objects and advantages associated with the present invention can be readily understood by those skilled in the art. The following examples are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention.

Please refer to Figures 1 to 3. Fig. 1 is a partial cross-sectional view showing a laminating apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic bottom view of the bearing fixture of Fig. 1. Figure 3 is a partial bottom plan view of the cavity above Figure 1.

As shown in FIG. 1 , the bonding apparatus 10 of the present embodiment includes a lower cavity 100 , a bearing fixture 200 , an upper cavity 300 , an image capturing device 400 , and a calibration device 600 . In this embodiment, the bonding device 10 further includes a first mobile device 500 and a second mobile device 700 to drive the image capturing device 400 and the correcting device 600 to be respectively displaced.

The lower cavity 100 includes a transparent bottom plate 110 and a plurality of side plates 120. The transparent substrate 110 is, for example, glass. The side plates 120 protrude and surround the transparent bottom plate 110 to form an accommodating space 130 and an opening 140. The opening 140 communicates with the accommodating space 130.

As shown in FIG. 2, the bearing fixture 200 is located in the accommodating space 130 and is used to carry a first processing member 20. In detail, the carrying fixture 200 includes a frame 210 and a plurality of carrying platforms 220. The frame 210 has a plurality of arrayed through slots 211. These carriers 220 are located in these slots 211, respectively. These carriers 220 each have a bearing surface 221 . The bearing surface is used to carry the first workpiece 20 . For example, the first workpiece 20 can be a touch film, but is not intended to limit the invention. In other embodiments, the first workpiece 20 is, for example, a sensor glass.

As shown in FIG. 3, the upper chamber 300 is movably positioned above the load fixture 200. In detail, the bearing fixture 200 is located between the transparent bottom plate 110 of the lower cavity 100 and the upper cavity 300. The upper cavity 300 has a fixing surface 310 and a plurality of fixing marks 320. The fixing surface 310 faces the bearing surface 221 of the loading platform 220 and is used to fix a second processing member 30. In this embodiment, the second processing member 30 is, for example, a cover glass, but is not intended to limit the present invention. These fixed marks 320 are located on the fixed surface 310. Each of the fixed marks 320 is, for example, two L-shaped lines located diagonally opposite to each other. However, it is not limited thereto. In other embodiments, each of the fixed marks 320 may also be a square line or a type in which the line type is changed to a plurality of points. For example, the fixed mark 320 is formed on the fixing surface 310 of the upper cavity 300 through an exposure process, whereby the accuracy of the fixed mark 320 can be made to a micron-level precision.

In addition, the upper cavity 300 can be moved relative to the lower cavity 100 to have a first position (as shown in FIG. 1) and a second position (please refer to FIG. 9 for details). In the first position, the upper chamber 300 is separated from the lower chamber 100. In the second position, the upper cavity 300 covers the opening 140 to close the accommodating space 130, and the fixing marks 320 correspond to the carrying platforms 220 of the carrying fixture 200, respectively. In this embodiment and other embodiments, the upper cavity 300 or the lower cavity 100 may further have an air vent (not shown), and the air vent may be connected to an air suction device (not shown) to The accommodating space is subjected to a vacuum process to bond the first workpiece 20 and the second workpiece 30 in a vacuum environment, thereby improving the bonding quality of the first workpiece 20 and the second workpiece 30.

It should be noted that, in this embodiment, the upper cavity 300 is movable and the lower cavity 100 is fixed, but it is not limited thereto. In other embodiments, the lower cavity may also be changed. The body 100 is movable and the upper chamber 300 is stationary, or both the upper chamber 300 and the lower chamber 100 are movable.

Furthermore, in this embodiment, the carrying platform 220, the through slot 211 and the fixed mark 320 The number is 32, and is arranged in a 4 by 8 array, but is not limited thereto. In other embodiments, the number of the carrier 220, the through slot 211 and the fixed mark 320 may also be one or different arrays. Arranged in a way.

Please refer to Figure 1 again. The lower cavity 100 is interposed between the image capturing device 400 and the upper cavity 300. In detail, the upper cavity 300, the bearing fixture 200 and the image capturing device 400 are sequentially arranged in the longitudinal direction, so that the image capturing device 400 can directly capture the image containing the bearing fixture 200 from below the lower cavity 100. a first image of the image of the first processing component 20 (such as FIGS. 7A and 7B), or a second image (eg, 5A) directly capturing the image of the image bearing the fixture 200 and the fixed marker 320 Figure and Figure 5B). In addition, the image capturing device 400 is coupled to the first mobile device 500 such that the image capturing device 400 can be moved relative to the lower cavity 100 by the first mobile device 500.

In this embodiment, the image capturing device 400 is exemplified by two single-lens cameras 410. However, in other embodiments, the image capturing device 400 may also be a two-lens camera. Or a single-lens wide-angle camera.

In addition, the image capturing device 400 is located outside the accommodating space 130 of the lower cavity 100, and can reduce the accommodating space 130, thereby shortening the time for the vacuum device to evacuate the accommodating space 130.

The calibration device 600 is coupled to the second mobile device 700 such that the calibration device 600 is movably movable between the upper and lower chambers through the second mobile device 700. The correcting device 600 is, for example, a nozzle type robot arm for sucking the first workpiece 20 by suction. Thereby, the first workpiece 20 is moved and the position of the first workpiece 20 is corrected. The correcting device 600 is configured to correct the relative position of the first workpiece 20 and the carrier 220 of the bearing fixture 200 according to the positional relationship between the bearing fixture 200 and the first workpiece 20 in the first image.

Please refer to Figures 4 to 9. Figures 4 through 9 are the operational intent of the bonding apparatus of Figure 1.

As shown in Fig. 4, the upper chamber 300 is driven to descend toward the lower chamber 100 in the direction indicated by the arrow a. Then, the second image (including the image taken in the direction indicated by the arrow L) containing the image of the fixture 200 and the fixed mark 320 is captured by the image capturing device 400. Since the upper cavity 300 is closer to the lower cavity 100 when the image is captured, the imaging quality of the image capturing device 400 can be improved to improve the accuracy of subsequent bonding.

Then, the position information of the bearing fixture between the bearing fixture 200 and the fixed mark 320 is obtained according to the second image, and the coordinate data used by the correcting device 600 for placing the first processing component 20 is updated according to the bearing fixture position information. In detail, as shown in FIG. 5A, if the X-axis pitch X1 and the Y-axis pitch Y1 between the frame 210 and the fixed mark 320 are not equal to the preset value, it is determined that the frame 210 is skewed compared to the fixed mark 320. At this time, when the calibration device 600 subsequently places the first workpiece 20, an error compensation value is added to update the placement position of the first workpiece 20. In addition, as shown in FIG. 5B, if the X-axis spacing X1 and the Y-axis spacing Y1 between the frame 210 and the fixed mark 320 are equal to a preset value, it is determined that the frame 210 is not skewed compared to the fixed mark 320. At this time, when the correcting device 600 subsequently places the first workpiece 20, it is not necessary to add an error compensation value. In other words, the correcting device 600 can be placed on the carrying platform 220 directly according to the preset position.

Then, after the correction of all the frames 210 and the fixed marks 320 is completed, the upper cavity 300 is reset (returned to the first position) in the direction indicated by the arrow b, and transmitted through the driving of the second moving device 700, so that the correcting device The 600 is displaced in the direction indicated by the arrow c to superpose the first workpieces 20 on the respective stages 220, respectively.

Then, the image capturing device 400 is used to capture the image of the bearing fixture 200. The first image of the image of the first workpiece 20.

Then, the position information of the workpiece between the bearing fixture 200 and the first processing component 20 is obtained according to the first image, and the calibration device 600 corrects the relative position of the first processing component 20 and the bearing fixture 200 according to the workpiece position information. In detail, as shown in FIG. 7A, if the X-axis spacing X3 and the Y-axis spacing Y3 between the frame 210 and the first workpiece 20 are not equal to the preset value, it is determined that the first workpiece 20 is compared to the frame. 210 has a skew. At this time, the relative position of the first workpiece 20 and the frame 210 can be corrected directly by the correction device 600. In addition, as shown in FIG. 7B, if the X-axis distance X4 and the Y-axis spacing Y4 between the frame 210 and the first workpiece 20 are equal to a preset value, it is determined that the first workpiece 20 is not skewed compared to the frame 210. . At this time, the correction device 600 does not need to perform correction.

After the correction of all the frames 210 and the first workpiece 20 is completed, as shown in FIG. 8, the correction device 600 and the image capturing device 400 are retracted in the direction indicated by the arrow d, and the second workpiece 30 is fixed to The fixed surface 310 of the upper cavity 300.

Next, as shown in FIG. 9, the upper cavity 300 is pressed down in the direction indicated by the arrow e to complete the bonding of the first workpiece 20 and the second workpiece 30.

It should be noted that the above embodiments are respectively corrected by the positional relationship between the frame 210 and the fixed mark 320 and the positional relationship between the frame 210 and the first workpiece 20, but not limited thereto, in other embodiments. In this case, the positional relationship between the stage 220 and the fixed mark 320 and the position between the stage 220 and the first workpiece 20 may be corrected.

According to the bonding apparatus and the bonding method disclosed in the above embodiments, the upper cavity, the bearing fixture and the image capturing device are sequentially arranged in the longitudinal direction, and the bottom plate of the lower cavity is made of a transparent material, so that the image capturing device can The positional relationship between the first workpiece and the carrier is obtained when the first workpiece is placed on the platform. Thereby, it can be avoided that the conventional workpiece is still after the position correction The problem of offset may occur during the process of moving the workpiece to the stage, and the bonding quality of the bonding apparatus disclosed in the above embodiments may be improved.

In addition, since the upper cavity, the bearing fixture and the image capturing device are arranged in the longitudinal direction, and the bottom plate of the lower cavity is made of a transparent material, the image capturing device can directly obtain the positional relationship between the carrying platform and the fixed mark, thereby enabling The positioning table and the first processing member are aligned on the basis of the fixed mark to further improve the alignment accuracy between the first workpiece and the second workpiece.

10‧‧‧Fitting equipment

20‧‧‧First processed parts

30‧‧‧Second processed parts

100‧‧‧ lower cavity

110‧‧‧Transparent backplane

120‧‧‧ side panels

130‧‧‧ accommodating space

140‧‧‧ openings

200‧‧‧bearing fixture

210‧‧‧Frame

211‧‧‧through slot

220‧‧‧bearing station

221‧‧‧ bearing surface

300‧‧‧Upper cavity

310‧‧‧Fixed surface

400‧‧‧Image capture device

410‧‧‧ camera

500‧‧‧First mobile device

600‧‧‧ calibration device

700‧‧‧Second mobile device

Claims (10)

A bonding device comprising: a lower cavity, comprising a transparent bottom plate and a side plate, the side plate protruding from the transparent bottom plate to form a receiving space and an opening, the opening communicating with the receiving space; Located in the accommodating space and configured to carry a first processing component; an upper cavity, the bearing fixture is located between the transparent bottom plate and the upper cavity, the upper cavity has a fixing surface and at least one fixing mark The fixing surface faces the supporting fixture, and is configured to fix a second processing component, the fixing mark is located on the fixing surface, and the upper cavity is movable relative to the lower cavity to have a first position and a second position. In the first position, the upper cavity is separated from the lower cavity. In the second position, the upper cavity covers the opening to close the accommodating space; and an image capturing device, The lower cavity is disposed between the image capturing device and the upper cavity, and is configured to capture at least one first image or the image containing the image of the bearing fixture and the image of the first processing component Image of the jig and the fixed mark At least a second video image. The bonding apparatus of claim 1, wherein the upper cavity, the bearing fixture and the image capturing device are sequentially arranged in a longitudinal direction. The bonding apparatus of claim 1, wherein the number of the at least one fixed mark is plural, the carrying fixture comprises a frame and a plurality of carrying platforms, the frame has a plurality of arrayed through slots, The carrying platforms are respectively located in the through slots, and the corresponding marks are fixed. The bonding device of claim 3, wherein the image capturing device is movably located on one side of the lower cavity to respectively capture the first image and the second image corresponding to the frame. The bonding device of claim 4, further comprising a first mobile device, wherein the first mobile device is coupled to the image capturing device to drive the image capturing device to move. The bonding apparatus of claim 5, further comprising a correcting device movably located between the upper cavity and the lower cavity for correcting the position of the first workpiece, the correcting device The first workpiece is corrected according to a positional relationship between the bearing fixture and the first workpiece in the first image. The bonding device of claim 6, further comprising a second mobile device, wherein the second mobile device is coupled to the correcting device to drive the image capturing device to move. The bonding apparatus of claim 1, wherein the fixing mark is formed on the fixing surface of the upper cavity through an exposure process. A bonding method, the method comprising: providing a bonding device according to any one of claim 1 to claim 8; stacking the first processing member on the bearing fixture; and transmitting the image capturing device Extracting the first image including the image of the bearing fixture and the image of the first processing component; obtaining, according to the first image, position information of a workpiece between the bearing fixture and the first processing component, and Correcting device corrects the relative position of the first workpiece and the bearing fixture according to the workpiece position information; fixing the second workpiece to the fixing surface of the upper cavity; and fitting the first workpiece with the The second machined part. The method of claim 9, wherein before the step of stacking the first workpiece on the carrying fixture, the method further comprises: And acquiring, by the image capturing device, the second image including the image of the bearing fixture and the image of the fixed marking; and obtaining a position information of the bearing fixture between the bearing fixture and the fixed marking according to the second image And correcting the correction device according to the bearing fixture position information.