TWI598604B - Printed circuit board inspection apparatus and method - Google Patents

Printed circuit board inspection apparatus and method Download PDF

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TWI598604B
TWI598604B TW104124154A TW104124154A TWI598604B TW I598604 B TWI598604 B TW I598604B TW 104124154 A TW104124154 A TW 104124154A TW 104124154 A TW104124154 A TW 104124154A TW I598604 B TWI598604 B TW I598604B
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probe
circuit board
printed circuit
current source
potential
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TW104124154A
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TW201604564A (en
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土田憲吾
三宅康志
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山葉汎提克股份有限公司
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  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
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Description

印刷基板檢查裝置及檢查方法 Printed substrate inspection device and inspection method

本發明係關於一種檢查印刷基板之導體圖案之電性狀態之裝置及其檢查方法。 The present invention relates to an apparatus for inspecting an electrical state of a conductor pattern of a printed substrate and an inspection method thereof.

本案係基於2014年7月29日於日本申請之特願2014-153493號而主張優先權,並將其內容引用於此。 The present application claims priority based on Japanese Patent Application No. 2014-153493, filed on Jan. 29, 2014.

於檢查印刷基板之導體圖案之斷線等電性狀態之情形時,一般而言,使檢查探針接觸於導體圖案之兩端而進行導通檢查,但存在導體圖案之終端之一側被絕緣膜覆蓋之情形、或形成於觸控面板等之情形等,無法使檢查探針直接接觸導體圖案之情形。於此種情形時,如專利文獻1及專利文獻2所揭示般,可將檢查探針對於導體圖案以非接觸狀態進行檢查。 When inspecting the disconnection electric isoelectric state of the conductor pattern of the printed circuit board, generally, the inspection probe is brought into contact with both ends of the conductor pattern to conduct conduction inspection, but one end of the conductor pattern is insulated by the insulating film. In the case of covering, or in the case of a touch panel or the like, it is impossible to directly contact the inspection probe with the conductor pattern. In such a case, as disclosed in Patent Document 1 and Patent Document 2, the inspection probe can be inspected in a non-contact state with respect to the conductor pattern.

於專利文獻1中揭示有,於適用於可撓性印刷基板等之基板檢查中,使探針對於導體圖案之一側之檢查對象電極群逐個接觸,使非接觸感測器接近該導體圖案之另一側之檢查對象電極群而配置,藉由該非接觸感測器對於檢查對象電極捕捉微弱之電磁場(或電磁波),判定各導體圖案之斷線等良否。 In the substrate inspection applied to a flexible printed circuit board or the like, the probe is brought into contact with the inspection target electrode group on one side of the conductor pattern one by one, and the non-contact sensor is brought close to the conductor pattern. The other side of the inspection target electrode group is disposed, and the non-contact sensor captures a weak electromagnetic field (or electromagnetic wave) with respect to the inspection target electrode, and determines whether or not the disconnection of each conductor pattern is good or not.

於專利文獻2中揭示有,將探針電性連接於印刷基板上之複數個導體圖案之各者,使檢測檢查信號之感測器對於複數個導體圖案以非 接觸之形式靜電電容耦合,對探針依序輸入具有急遽之變化之電信號,根據流經感測器之暫態電流之最大值而判定導體圖案之導通狀態。 Patent Document 2 discloses that the probe is electrically connected to each of the plurality of conductor patterns on the printed substrate, so that the sensor for detecting the inspection signal is non-transparent for the plurality of conductor patterns. In the form of contact, the capacitive coupling is performed, and an electrical signal having a rapid change is sequentially input to the probe, and the conduction state of the conductor pattern is determined according to the maximum value of the transient current flowing through the sensor.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利第2994259號公報 [Patent Document 1] Japanese Patent No. 2994259

[專利文獻2]日本專利第3361311號公報 [Patent Document 2] Japanese Patent No. 3361311

然而,於任一專利文獻記載之方法中,均係檢測電信號之探針對於導體圖案以非接觸之形式配置,由於不直接接觸導體圖案,故存在無法確實地檢測出信號之可能性。 However, in the method described in any of the patent documents, the probe for detecting an electric signal is disposed in a non-contact manner with respect to the conductor pattern, and since the conductor pattern is not directly contacted, there is a possibility that the signal cannot be reliably detected.

本發明係鑒於此種狀況而完成者,提供一種將檢測電信號之探針設為對於導體圖案直接接觸之狀態,可確實地檢測信號,從而可進行準確之檢查的印刷基板檢查裝置及檢查方法。 The present invention has been made in view of such a situation, and provides a printed circuit board inspection device and an inspection method capable of accurately detecting a signal by detecting a signal in which a probe for detecting an electrical signal is in direct contact with a conductor pattern, thereby enabling accurate inspection. .

本發明之印刷基板檢查裝置係對形成於印刷基板之導體圖案施加電信號而檢查導體圖案之良否之印刷基板之電性檢測裝置,具備:第1探針,其接觸於上述導體圖案之一端;第2探針,其介隔絕緣體配置於上述導體圖案之另一端;定電流源;第1連接裝置,其用以將上述第1探針連接於上述定電流源;第2連接裝置,其用以使相對於上述定電流源之基準電位之上述第2探針之電性連接狀態變化;及測量電路,其用以測量相對於上述定電流源之基準電位之上述第1探針之電位。 The printed circuit board inspection apparatus of the present invention is characterized in that the electrical detection device for applying a signal to the conductor pattern of the printed circuit board to inspect the conductor pattern is provided with a first probe that is in contact with one end of the conductor pattern; a second probe, wherein the isolation barrier is disposed at the other end of the conductor pattern; a constant current source; the first connection device is configured to connect the first probe to the constant current source; and the second connection device is used The electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, and the measuring circuit is configured to measure the potential of the first probe with respect to the reference potential of the constant current source.

而且,本發明之印刷基板檢查方法係使第1探針直接接觸導體圖案之一端,將第2探針介隔絕緣體配置於上述導體圖案之另一端,於 時刻T1,開始使電流自定電流源流向上述第1探針,於自時刻T1經過特定之時間t12後之時刻T2,使相對於上述定電流源之基準電位之上述第2探針之電性連接狀態變化,根據該變化時之相對於上述定電流源之基準電位之上述第1探針之電位之測量結果來判定上述導體圖案之良否。 Further, in the printed circuit board inspection method of the present invention, the first probe is directly in contact with one end of the conductor pattern, and the second probe dielectric barrier is disposed at the other end of the conductor pattern. At time T1, the current source current source is caused to flow to the first probe, and the second probe is electrically connected to the reference potential of the constant current source at time T2 after a predetermined time t12 elapses from time T1. The connection state is changed, and the quality of the conductor pattern is determined based on the measurement result of the potential of the first probe with respect to the reference potential of the constant current source at the time of the change.

於該印刷基板檢查方法中,當相對於上述定電流源之基準電位之上述第2探針之電性連接狀態變化時,於每特定之單位時間tu之上述導體圖案之一端之電位位移量變化之情形時,可判定導體圖案為良品。 In the printed circuit board inspection method, when the electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, the potential displacement amount of one end of the conductor pattern at a specific unit time tu changes. In the case of the case, it can be determined that the conductor pattern is good.

於本發明中,使第1探針接觸於導體圖案之一端,使第2探針介隔絕緣體配置於導體圖案之另一端,使該第2探針側之電性連接狀態變化,測量第1探針之電位。亦即,由於檢測與導體圖案接觸之狀態之第1探針之電信號,故可確實地檢測該電信號,從而可實施準確之基板檢查。 In the present invention, the first probe is brought into contact with one end of the conductor pattern, and the second probe is disposed at the other end of the conductor pattern, and the electrical connection state of the second probe side is changed, and the first measurement is performed. The potential of the probe. In other words, since the electrical signal of the first probe in the state of being in contact with the conductor pattern is detected, the electrical signal can be reliably detected, and accurate substrate inspection can be performed.

於該情形時,配置於印刷基板之導體圖案之另一端之絕緣體係於導體圖案之另一端露出於印刷基板之表面之情形時,適當地於導體圖案之另一端上配置已準備者,但於導體圖案之另一端由絕緣膜覆蓋之情形時,亦可將該絕緣膜設為絕緣體,於該絕緣膜配置第2探針。 In this case, when the insulating system disposed at the other end of the conductor pattern of the printed circuit board is exposed on the surface of the printed circuit board at the other end of the conductor pattern, the prepared person is disposed on the other end of the conductor pattern as appropriate. When the other end of the conductor pattern is covered with an insulating film, the insulating film may be an insulator, and the second probe may be disposed on the insulating film.

又,第2連接裝置係藉由相對於定電流源之基準電位連接或遮斷第2探針,可使第2探針之連接狀態變化。 Further, the second connection device can change the connection state of the second probe by connecting or blocking the second probe with respect to the reference potential of the constant current source.

又,第1探針與第2探針均存在配置於印刷基板之一面側之情形、與相互配置於印刷基板之相反面之情形。 In addition, both the first probe and the second probe are disposed on one surface side of the printed circuit board, and are disposed on the opposite side of the printed circuit board.

於本發明之印刷基板檢查裝置中,將具有特定之靜電電容之電容器連接於上述第2探針與上述第2連接裝置之間、或上述第2探針與上述定電流源之基準電位之間之任一者或兩者即可。 In the printed circuit board inspection apparatus of the present invention, a capacitor having a specific electrostatic capacitance is connected between the second probe and the second connection device, or between the second probe and a reference potential of the constant current source. Either or both.

藉由電容器之存在,可增大第1探針側之電位位移量,可實施更 準確之檢查。 By the presence of a capacitor, the amount of potential displacement on the first probe side can be increased, and more can be implemented. Accurate inspection.

於本發明之印刷基板檢查裝置中,亦可設為具有用以將上述第1探針經由上述第1連接裝置連接於上述定電流源之基準電位之第3連接裝置之構成。 In the printed circuit board inspection device of the present invention, a third connection device for connecting the first probe to the reference potential of the constant current source via the first connection device may be provided.

於本發明之印刷基板檢查方法中,亦可於自上述時刻T1起特定之時間t31前之時刻T3,將上述第1探針連接於上述定電流源之基準電位,於自上述時刻T1經過特定之時間t14而在上述時刻T2之前之時刻T4,將上述第1探針與上述基準電位設為遮斷狀態。 In the method of inspecting a printed circuit board according to the present invention, the first probe may be connected to a reference potential of the constant current source at a time T3 before a predetermined time t31 from the time T1, and may be specified from the time T1. At time t14, at time T4 before time T2, the first probe and the reference potential are set to an off state.

於電位之測量之前,藉由將第1探針連接於基準電位,使於配線部等帶電之電荷放電,可消除帶電之影響,且使來自定電流源之電流於短時間內穩定,從而迅速地實施準確之檢查。 By connecting the first probe to the reference potential and discharging the charged charge such as the wiring portion before the potential measurement, the influence of charging can be eliminated, and the current from the constant current source can be stabilized in a short time. Implement an accurate inspection.

於本發明之印刷基板檢查裝置中,亦可設為對於上述印刷基板之上述導體圖案隔著絕緣板而與之接觸之導體板連接於上述定電流源之基準電位之構成。 In the printed circuit board inspection apparatus of the present invention, the conductor pattern that is in contact with the conductor pattern of the printed circuit board via the insulating plate may be connected to the reference potential of the constant current source.

亦可檢查對於導體圖案之第1探針之接觸狀態之良否,能以使第1探針確實地接觸於導體圖案之狀態實施準確之檢查。 It is also possible to check whether the contact state of the first probe of the conductor pattern is good or not, and it is possible to perform an accurate inspection in a state where the first probe is surely brought into contact with the conductor pattern.

於該情形時,絕緣板可使用與印刷基板分開地準備者,但只要於印刷基板之表面有被絕緣膜覆蓋之部分,則亦可將該絕緣膜作為絕緣板,使導體板接觸於其上。 In this case, the insulating plate may be prepared separately from the printed substrate. However, if the surface of the printed substrate has a portion covered with the insulating film, the insulating film may be used as an insulating plate to bring the conductive plate into contact with the insulating plate. .

根據本發明,由於將檢測電信號之探針設為對於導體圖案直接接觸之狀態進行檢查,故可確實地檢測信號,而可進行準確之檢查。 According to the present invention, since the probe for detecting the electric signal is inspected to be in direct contact with the conductor pattern, the signal can be reliably detected, and an accurate inspection can be performed.

1‧‧‧印刷基板 1‧‧‧Printing substrate

2‧‧‧絕緣層 2‧‧‧Insulation

11‧‧‧印刷基板檢查裝置 11‧‧‧Printed substrate inspection device

12‧‧‧定電流源 12‧‧‧Constant current source

13‧‧‧絕緣體 13‧‧‧Insulator

14‧‧‧第1連接裝置 14‧‧‧1st connection device

14'‧‧‧第1連接裝置 14'‧‧‧1st connection device

15‧‧‧第2連接裝置 15‧‧‧2nd connection device

15'‧‧‧第2連接裝置 15'‧‧‧2nd connection device

16‧‧‧測量電路 16‧‧‧Measurement circuit

17‧‧‧定電流源控制部 17‧‧‧Constant current source control unit

18‧‧‧連接裝置控制部 18‧‧‧Connected Device Control Department

19‧‧‧A/D轉換部 19‧‧‧A/D conversion department

20‧‧‧電位測量部 20‧‧‧ Potential Measurement Department

21‧‧‧主控制裝置 21‧‧‧Main control unit

22‧‧‧顯示裝置 22‧‧‧ display device

23‧‧‧第3連接裝置 23‧‧‧3rd connection device

25‧‧‧導體板 25‧‧‧Conductor board

31‧‧‧印刷基板檢查裝置 31‧‧‧Printed substrate inspection device

41‧‧‧印刷基板檢查裝置 41‧‧‧Printed substrate inspection device

51‧‧‧印刷基板檢查裝置 51‧‧‧Printed substrate inspection device

61‧‧‧印刷基板檢查裝置 61‧‧‧Printed substrate inspection device

71‧‧‧印刷基板檢查裝置 71‧‧‧Printed substrate inspection device

81‧‧‧印刷基板檢查裝置 81‧‧‧Printed substrate inspection device

A1~A4‧‧‧切換開關 A1~A4‧‧‧Toggle switch

B1~B4‧‧‧切換開關 B1~B4‧‧‧Toggle switch

C1~C4‧‧‧電容器 C1~C4‧‧‧ capacitor

C5~C8‧‧‧電容器 C5~C8‧‧‧ capacitor

E1~E4‧‧‧導體圖案 E1~E4‧‧‧ conductor pattern

P1~P4‧‧‧第1探針 P1~P4‧‧‧1st probe

P5~P8‧‧‧第2探針 P5~P8‧‧‧2nd probe

S‧‧‧切換開關 S‧‧‧Toggle switch

T1‧‧‧時刻 T1‧‧‧ moments

T2‧‧‧時刻 T2‧‧‧ moments

T3‧‧‧時刻 T3‧‧‧ moments

T4‧‧‧時刻 T4‧‧‧ moments

V0‧‧‧導體圖案一端之電位 V 0 ‧‧‧ Potential at one end of the conductor pattern

S1~S8‧‧‧步驟 S1~S8‧‧‧Steps

S11、S12‧‧‧步驟 S11, S12‧‧‧ steps

S15‧‧‧步驟 S15‧‧‧ steps

圖1係表示本發明之印刷基板檢查裝置之第1實施形態之概略構成之方塊圖。 Fig. 1 is a block diagram showing a schematic configuration of a first embodiment of a printed circuit board inspection device according to the present invention.

圖2係表示於圖1之印刷基板檢查裝置中對於印刷基板之配線狀 態之側視圖。 2 is a view showing a wiring shape of a printed circuit board in the printed circuit board inspection apparatus of FIG. Side view of the state.

圖3係表示第1實施形態之印刷基板檢查方法之流程圖。 Fig. 3 is a flow chart showing a method of inspecting a printed circuit board according to the first embodiment.

圖4係表示於第1實施形態中導體圖案為良品之情形時之第1探針之電位之隨時間之變化的電特性圖。 Fig. 4 is a graph showing the electrical characteristics of the potential of the first probe as a function of time when the conductor pattern is good in the first embodiment.

圖5係表示於第1實施形態中導體圖案為不良品之情形時之第1探針之電位之隨時間之變化的電特性圖。 Fig. 5 is a graph showing the electrical characteristics of the potential of the first probe as a function of time when the conductor pattern is a defective product in the first embodiment.

圖6係於第1實施形態中導體圖案為良品之情形時之另一電特性圖。 Fig. 6 is another electric characteristic diagram when the conductor pattern is good in the first embodiment.

圖7係於第1實施形態中導體圖案為不良品之情形時之另一電特性圖。 Fig. 7 is another electric characteristic diagram in the case where the conductor pattern is a defective product in the first embodiment.

圖8係表示本發明之印刷基板檢查裝置之第2實施形態之概略構成之方塊圖。 Fig. 8 is a block diagram showing a schematic configuration of a second embodiment of the printed circuit board inspection device of the present invention.

圖9係表示於圖8之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 9 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 8.

圖10係表示本發明之印刷基板檢查裝置之第3實施形態之概略構成之方塊圖。 Fig. 10 is a block diagram showing a schematic configuration of a third embodiment of the printed circuit board inspection device of the present invention.

圖11係表示於圖10之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 11 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 10.

圖12係表示本發明之印刷基板檢查裝置之第4實施形態之概略構成之方塊圖。 Fig. 12 is a block diagram showing a schematic configuration of a fourth embodiment of the printed circuit board inspection device of the present invention.

圖13係表示於圖12之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 13 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 12.

圖14係表示第4實施形態中之印刷基板檢查方法之流程圖。 Fig. 14 is a flow chart showing a method of inspecting a printed circuit board in the fourth embodiment.

圖15係表示於第4實施形態中導體圖案為良品之情形時之第1探針之電位之隨時間之變化的電特性圖。 Fig. 15 is a graph showing the electrical characteristics of the potential of the first probe as a function of time when the conductor pattern is good in the fourth embodiment.

圖16係表示於第4實施形態中導體圖案為不良品之情形時之第1 探針之電位之隨時間之變化的電特性圖。 Figure 16 is a view showing the first case when the conductor pattern is a defective product in the fourth embodiment. An electrical characteristic diagram of the potential of the probe as a function of time.

圖17係於第4實施形態中導體圖案為良品之情形時之另一電特性圖。 Fig. 17 is another electric characteristic diagram in the case where the conductor pattern is good in the fourth embodiment.

圖18係於第4實施形態中導體圖案為不良品之情形時之另一電特性圖。 Fig. 18 is another electric characteristic diagram in the case where the conductor pattern is a defective product in the fourth embodiment.

圖19係表示本發明之印刷基板檢查裝置之第5實施形態之概略構成之方塊圖。 Fig. 19 is a block diagram showing a schematic configuration of a fifth embodiment of the printed circuit board inspection device of the present invention.

圖20係表示於圖19之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 20 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 19.

圖21係表示第5實施形態中之印刷基板檢查方法之流程圖。 Fig. 21 is a flow chart showing a method of inspecting a printed circuit board in the fifth embodiment.

圖22係表示於第5實施形態中導體圖案為良品之情形時之第1探針之電位之隨時間之變化的電特性圖。 Fig. 22 is a graph showing the electrical characteristics of the potential of the first probe as a function of time when the conductor pattern is good in the fifth embodiment.

圖23係表示於第5實施形態中導體圖案為不良品之情形時之第1探針之電位之隨時間之變化的電特性圖。 Fig. 23 is a graph showing the electrical characteristics of the potential of the first probe as a function of time when the conductor pattern is a defective product in the fifth embodiment.

圖24係於第5實施形態中導體圖案為良品之情形時之另一電特性圖。 Fig. 24 is a view showing another electrical characteristic when the conductor pattern is good in the fifth embodiment.

圖25係於第5實施形態中導體圖案為不良品之情形時之另一電特性圖。 Fig. 25 is another electric characteristic diagram in the case where the conductor pattern is a defective product in the fifth embodiment.

圖26係於第5實施形態中第1探針對於導體圖案接觸不良之情形時之電特性圖。 Fig. 26 is a view showing electrical characteristics of the case where the first probe is in poor contact with the conductor pattern in the fifth embodiment.

圖27係於第5實施形態中第1探針對於導體圖案接觸不良之情形時之另一電特性圖。 Fig. 27 is a view showing another electrical characteristic of the case where the first probe is in poor contact with the conductor pattern in the fifth embodiment.

圖28係表示本發明之印刷基板檢查裝置之第6實施形態之構成之方塊圖。 Fig. 28 is a block diagram showing the configuration of a sixth embodiment of the printed circuit board inspection device of the present invention.

圖29係表示於圖28之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 29 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 28.

圖30係表示本發明之印刷基板檢查裝置之第7實施形態之構成之方塊圖。 Fig. 30 is a block diagram showing the configuration of a seventh embodiment of the printed circuit board inspection device of the present invention.

圖31係表示於圖30之印刷基板檢查裝置中對於印刷基板之配線狀態之側視圖。 Fig. 31 is a side view showing the state of wiring of the printed circuit board in the printed circuit board inspection apparatus of Fig. 30;

以下,一面參照圖式,一面對本發明之實施形態進行說明。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[關於印刷基板] [About printed substrate]

於以下之實施形態中成為檢查對象之印刷基板1係於平板狀之絕緣層2之表面或內部形成有各種導體圖案E1~E4。絕緣層2既有單層之情形,亦有包含複數層之情形。於絕緣層2包含複數層之情形時,導體圖案E1~E4亦具有多層構造,藉由導通孔(via)或通孔(through hole)而於上下層間連接。而且,將各導體圖案E1~E4之兩端(電極部)設於絕緣層2之表面。於該情形時,導體圖案E1~E4之兩端有僅設置於印刷基板1之一面或另一面之任一者之情形、與分開設置於兩面之情形。又,導體圖案E1~E4之至少一端部係露出於印刷基板1之表面。另一端部既有露出於印刷基板1之表面之情形,亦有成為由絕緣膜覆蓋之狀態之情形。 In the printed circuit board 1 to be inspected in the following embodiments, various conductor patterns E1 to E4 are formed on the surface or inside the flat insulating layer 2. The insulating layer 2 has both a single layer and a plurality of layers. In the case where the insulating layer 2 includes a plurality of layers, the conductor patterns E1 to E4 also have a multilayer structure, and are connected between the upper and lower layers by vias or through holes. Further, both ends (electrode portions) of the respective conductor patterns E1 to E4 are provided on the surface of the insulating layer 2. In this case, both ends of the conductor patterns E1 to E4 may be provided only on one of the one surface or the other surface of the printed circuit board 1 and may be provided separately on both surfaces. Further, at least one end portion of the conductor patterns E1 to E4 is exposed on the surface of the printed circuit board 1. The other end portion may be exposed to the surface of the printed substrate 1, or may be in a state of being covered by the insulating film.

於以下之實施形態之圖中,印刷基板1係作為於絕緣層2之上表面形成導體圖案E1~E4,且各導體圖案E1~E4均兩端部露出於印刷基板1之絕緣層2之表面者而示出。 In the following embodiments, the printed circuit board 1 is formed with conductor patterns E1 to E4 on the upper surface of the insulating layer 2, and both end portions of each of the conductor patterns E1 to E4 are exposed on the surface of the insulating layer 2 of the printed circuit board 1. Shown.

[第1實施形態] [First Embodiment]

如圖1及圖2所示,第1實施形態之印刷基板檢查裝置11係對印刷基板1之複數個導體圖案E1~E4進行檢查者,其包含:產生特定電流之定電流源12;與露出於印刷基板1上之各導體圖案E1~E4之一端部分別直接接觸之複數個第1探針P1~P4及隔著絕緣體13分別接觸於導體圖案E1~E4之另一端部之複數個第2探針P5~P8;具有用以將各第 1探針P1~P4分別連接於定電流源12之複數個切換開關A1~A4之第l連接裝置14及具有用以將第2探針P5~P8分別連接於定電流源12之基準電位(通常為接地電位)之複數個切換開關B1~B4之第2連接裝置15;用以測量相對於定電流源12之基準電位之第1探針P1~P4之電位之測量電路16;用以控制定電流源12之定電流源控制部17;用以控制各連接裝置之連接裝置控制部18;連接於測量電路16之A/D(analog to digital,類比/數位)轉換部19及電位測量部20;用以控制該等控制部及電位測量部之主控制裝置21及顯示裝置22。於主控制裝置設置有CPU(Central Processing Unit,中央處理單元)、記憶體、檢查條件設定部、檢查判定部、及與各部之資料通信部。 As shown in FIG. 1 and FIG. 2, the printed circuit board inspection apparatus 11 of the first embodiment inspects a plurality of conductor patterns E1 to E4 of the printed circuit board 1 including a constant current source 12 that generates a specific current; a plurality of first probes P1 to P4 directly contacting one end portion of each of the conductor patterns E1 to E4 on the printed circuit board 1 and a plurality of second ends respectively contacting the other end portions of the conductor patterns E1 to E4 via the insulator 13 Probes P5~P8; have The probes P1 to P4 are respectively connected to the first connection device 14 of the plurality of switches A1 to A4 of the constant current source 12 and have a reference potential for connecting the second probes P5 to P8 to the constant current source 12 ( a second connecting device 15 of a plurality of switching switches B1 to B4, usually a ground potential); a measuring circuit 16 for measuring the potential of the first probes P1 to P4 with respect to a reference potential of the constant current source 12; The constant current source control unit 17 of the constant current source 12; the connection device control unit 18 for controlling each of the connection devices; and the A/D (analog to digital) conversion unit 19 and the potential measurement unit connected to the measurement circuit 16 20; a main control device 21 and a display device 22 for controlling the control unit and the potential measuring unit. The main control device is provided with a CPU (Central Processing Unit), a memory, an inspection condition setting unit, an inspection determination unit, and a data communication unit with each unit.

該印刷基板檢查裝置11使第1探針P1~P4直接接觸自印刷基板1之絕緣層2露出之導體圖案E1~E4之一端,且於導體圖案E1~E4之另一端介隔絕緣體13而配置第2探針P5~P8。 The printed circuit board inspection apparatus 11 causes the first probes P1 to P4 to directly contact one end of the conductor patterns E1 to E4 exposed from the insulating layer 2 of the printed circuit board 1, and is disposed at the other end of the conductor patterns E1 to E4 to isolate the edge body 13 Second probe P5~P8.

如上所述,導體圖案E1~E4之另一端部有露出於印刷基板1之表面之情形與由絕緣膜覆蓋之情形時,於露出於印刷基板1之表面之情形時,介置適當之絕緣體13而配置第2探針P5~P8,於導體圖案E1~E4之另一端部由絕緣膜覆蓋之情形時,將該絕緣膜作為此處所指之絕緣體13,藉由使第2探針P5~P8接觸該絕緣膜,設為介隔絕緣體13而配置之狀態。於圖示例中,於導體圖案E1~E4之端部介隔絕緣體13而配置有第2探針P5~P8。 As described above, when the other end portions of the conductor patterns E1 to E4 are exposed on the surface of the printed substrate 1 and covered by the insulating film, when exposed to the surface of the printed substrate 1, a suitable insulator 13 is interposed. When the second probes P5 to P8 are disposed and the other end portions of the conductor patterns E1 to E4 are covered with an insulating film, the insulating film is used as the insulator 13 referred to herein by the second probes P5 to P8. The insulating film is placed in contact with the separator 13 and placed in a state in which it is placed. In the example of the figure, the second probes P5 to P8 are disposed at the ends of the conductor patterns E1 to E4 by blocking the edge body 13.

藉由如此般配置第1探針P1~P4及第2探針P5~P8,並將第1連接裝置14之切換開關A1~A4之任一個設為連接狀態,而設為使電流自定電流源12流向第1探針P1~P4之任一個之狀態。藉此,於包含導體圖案E1~E4之任一個之裝置之配線部等所具有之靜電電容中蓄電,其結果,由連接於第1探針P1~P4之任一個之狀態之測量電路16測量之電位(相對於定電流源12之基準電位之第1探針P1~P4之任一個之電 位)上升。 By arranging the first probes P1 to P4 and the second probes P5 to P8 in this manner, and setting any one of the switches A1 to A4 of the first connection device 14 to be in a connected state, the current is set to a constant current. The source 12 flows to the state of any of the first probes P1 to P4. Thereby, electricity is stored in the capacitance of the wiring portion or the like of the device including any one of the conductor patterns E1 to E4, and as a result, the measurement circuit 16 connected to the state of any of the first probes P1 to P4 is measured. The potential of the first probe P1 to P4 relative to the reference potential of the constant current source 12 Bit) rises.

繼而,使第2連接裝置15之切換開關B1~B4中之與連接於定電流源12之任一個導體圖案(所選擇之導體圖案)連接的任一個切換開關B1、B2、B3或B4作動。只要所選擇之導體圖案E1~E4正常,則藉由該第2連接裝置15之作動,由測量電路16測量之電位產生變化。於所選擇之導體圖案E1~E4產生斷線之情形時,即便使第2連接裝置15作動,由測量電路16測量之電位亦不會產生變化。藉由檢測該電位有無變化,能夠以如此之方式,依序選擇作為檢查對象之導體圖案E1~E4之任一個,識別所選擇之導體圖案E1~E4之良否。 Then, any of the changeover switches B1, B2, B3 or B4 connected to any one of the conductor patterns (selected conductor patterns) connected to the constant current source 12 among the change switches B1 to B4 of the second connection device 15 is activated. As long as the selected conductor patterns E1 to E4 are normal, the potential measured by the measuring circuit 16 changes due to the operation of the second connecting means 15. When the selected conductor patterns E1 to E4 are broken, even if the second connecting device 15 is activated, the potential measured by the measuring circuit 16 does not change. By detecting whether or not the potential is changed, any one of the conductor patterns E1 to E4 to be inspected can be sequentially selected in such a manner, and the quality of the selected conductor patterns E1 to E4 can be identified.

根據圖3之流程圖對該檢查之詳細情況進行說明。於以下之說明中,藉由對流程圖之各步驟標註之符號,對每個步驟進行說明。 The details of the inspection will be described based on the flowchart of FIG. In the following description, each step will be described by referring to the symbols of the respective steps of the flowchart.

步驟S1:首先,使第1探針P1~P4直接接觸導體圖案E1~E4之一端。又,亦於導體圖案E1~E4之另一端介隔絕緣體13配置第2探針P5~P8。 Step S1: First, the first probes P1 to P4 are directly brought into contact with one of the conductor patterns E1 to E4. Further, the second probes P5 to P8 are disposed on the other end of the conductor patterns E1 to E4.

步驟S2:配置兩探針P1~P4、P5~P8後,於時刻T1(參照圖4等),將第1連接裝置14之切換開關A1~A4之任一個設為導通狀態,使電流自定電流源12流向第1探針P1~P4之任一個。藉此,於連接於被供給有電流之第1探針之導體圖案E1~E4之任一個及被供給有電流之第1探針P1~P4之任一個等之配線部所具有之靜電電容開始充電,由測量電路16測量之電位上升。 Step S2: After the two probes P1 to P4 and P5 to P8 are arranged, at any time T1 (see FIG. 4 and the like), any one of the switches A1 to A4 of the first connection device 14 is turned on, and the current is self-determined. The current source 12 flows to any of the first probes P1 to P4. Thereby, the electrostatic capacitance of the wiring portion connected to any one of the conductor patterns E1 to E4 of the first probe to which the current is supplied and the first probes P1 to P4 to which the current is supplied is started. During charging, the potential measured by the measuring circuit 16 rises.

步驟S3:於自時刻T1起經過特定時間t12後之時刻T2,使第2連接裝置15之切換開關B1~B4中之連接於所選擇之導體圖案E1、E2、E3或E4之切換開關B1、B2、B3或B4作動,使相對於定電流源12之基準電位之第2探針P5~P8之任一個之連接狀態變化。所謂使該連接狀態變化係指於第2連接裝置15之切換開關B1~B4為斷開(OFF)之狀態時,將該等中之一個設為接通(ON)之狀態,或於切換開關B1~B4為 接通之狀態時,將該等中之一個設為斷開之狀態。 Step S3: The switching switch B1 connected to the selected conductor pattern E1, E2, E3 or E4 of the switching switches B1 to B4 of the second connecting device 15 is made at time T2 after the lapse of the specific time t12 from the time T1. B2, B3 or B4 is actuated to change the connection state of any of the second probes P5 to P8 with respect to the reference potential of the constant current source 12. When the change of the connection state is in a state in which the changeover switches B1 to B4 of the second connection device 15 are in an OFF state, one of the switches is turned ON, or the switch is switched. B1~B4 are When the state is turned on, one of the states is set to the off state.

步驟S4:根據測量電路16之測量結果,判斷所選擇之導體圖案E1、E2、E3或E4之一端之每單位時間tu之電位位移量是否已變化,於判斷每單位時間tu之電位位移量已變化之情形(是(YES)之情形)時,前進至S5,於未判斷出每單位時間tu之電位位移量已變化之情形(否(NO)之情形)時,前進至S8。 Step S4: judging whether the potential displacement amount per unit time tu of one end of the selected conductor pattern E1, E2, E3 or E4 has changed according to the measurement result of the measuring circuit 16, and determining the potential displacement amount of tu per unit time has been determined In the case of the change (in the case of (YES)), the process proceeds to S5, and when it is not determined that the potential displacement amount per unit time has changed (NO (NO)), the process proceeds to S8.

若藉由圖4及圖5之電特性曲線進行說明,則如圖4所示,於所選擇之導體圖案E1、E2、E3或E4之一端之電位上升中途之時刻T2,電位位移量(電特性曲線之斜率)變化之情形(於圖4中電位位移量變小)時,前進至步驟S5,於如圖5所示,電位位移量並無變化之情形時,前進至步驟S8。電位位移量變化之原因在於相對於導體圖案E1~E4之基準電位之靜電電容變化,圖4係表示靜電電容增加之例。 As will be explained by the electric characteristic curves of FIGS. 4 and 5, as shown in FIG. 4, the potential displacement amount (electricity) at the time T2 in the middle of the rise of the potential of one of the selected conductor patterns E1, E2, E3 or E4. When the slope of the characteristic curve changes (in the case where the potential displacement amount in FIG. 4 becomes small), the process proceeds to step S5. If the potential displacement amount does not change as shown in FIG. 5, the process proceeds to step S8. The reason why the potential displacement amount changes is the change in electrostatic capacitance with respect to the reference potential of the conductor patterns E1 to E4, and FIG. 4 shows an example in which the electrostatic capacitance is increased.

另一方面,圖5表示即便於時刻T2使第2連接裝置15作動、亦未確認電位位移量有變化之情形,於此種情形時,前進至步驟S8。 On the other hand, FIG. 5 shows a case where the potential displacement amount is not changed even if the second connecting device 15 is actuated at time T2. In this case, the process proceeds to step S8.

再者,關於第2連接裝置15之作動,可根據檢查對象基板1之特性而選擇將切換開關B1~B4之任一個自斷開設為接通,或自接通設為斷開,只要採用使電位位移量之變化變大之操作方法即可。 In addition, depending on the characteristics of the inspection target substrate 1, it is possible to select whether any of the changeover switches B1 to B4 is turned off from the disconnection or from the turn-on according to the characteristics of the substrate 1 to be inspected, and The operation method in which the change in the potential displacement amount becomes large can be performed.

步驟S5:判斷於即將使第2連接裝置15作動之前,所選擇之導體圖案E1、E2、E3或E4之一端之電位是否曾達到定電流源12之開路電壓V0,於判斷曾達到開路電壓V0之情形(是之情形)時,前進至步驟S6,於未判斷出曾達到開路電壓V0之情形(否之情形)時,前進至步驟S7。 Step S5: determining whether the potential of one end of the selected conductor pattern E1, E2, E3 or E4 has reached the open circuit voltage V 0 of the constant current source 12 before the second connecting device 15 is actuated, and judges that the open circuit voltage has been reached. In the case of V 0 (in the case of the case), the process proceeds to step S6, and when it is not determined that the open circuit voltage V 0 has been reached (in the case of NO), the process proceeds to step S7.

於圖4及圖5所示之例中,於時刻T2之時點,電位未達到開路電壓V0,但於圖6及圖7所示之例中,於時刻T2之前,電位達到開路電壓V0,於此種情形時,前進至步驟S6。 In the example shown in FIGS. 4 and 5, the potential does not reach the open circuit voltage V 0 at the time T2, but in the example shown in FIGS. 6 and 7, the potential reaches the open circuit voltage V 0 before the time T2. In this case, the process proceeds to step S6.

步驟S6:判斷所選擇之導體圖案E1、E2、E3或E4之一端之電位 是否已向下降方向位移,於判斷為已向下降方向位移之情形(是之情形)時,前進至步驟S7,於未判斷出已向下降方向位移之情形(否之情形)時,前進至步驟S8。 Step S6: determining the potential of one end of the selected conductor pattern E1, E2, E3 or E4 Whether it has been displaced in the downward direction, and when it is determined that it has been displaced in the descending direction (in the case of the case), the process proceeds to step S7, and when it is not determined that the displacement has been made in the descending direction (in the case of no), the process proceeds to the step. S8.

於圖6中,於時刻T2之前,電位達到定電流源12之開路電壓V0,藉由第2連接裝置15之作動,電位瞬間下降(亦即,電位位移量為「0」者之電位向下降之方向變化)。只要如該圖6所示般電位下降,則前進至步驟S7。若相對於導體圖案E1~E4之基準電位之靜電電容變化,則電位變化。圖6係表示靜電電容增加之例。 In FIG. 6, before the time T2, the potential reaches the open circuit voltage V 0 of the constant current source 12, and the potential is instantaneously decreased by the operation of the second connecting means 15 (that is, the potential of the potential shift amount is "0". The direction of the decline changes). As long as the potential drops as shown in FIG. 6, the process proceeds to step S7. When the electrostatic capacitance with respect to the reference potential of the conductor patterns E1 to E4 changes, the potential changes. Fig. 6 shows an example in which the electrostatic capacitance is increased.

另一方面,如圖7所示,於即便使第2連接裝置15作動,亦未自開路電壓V0之變化之情形時,前進至步驟S8。 On the other hand, as shown in FIG 7, even in the second connecting means 15 is actuated to open the case of the self nor the variation of the voltage V 0, the process proceeds to step S8.

步驟S7:判定所選擇之導體圖案E1、E2、E3或E4為良品。 Step S7: It is determined that the selected conductor pattern E1, E2, E3 or E4 is a good product.

步驟S8:判定所選擇之導體圖案E1、E2、E3或E4為不良品。 Step S8: It is determined that the selected conductor pattern E1, E2, E3 or E4 is a defective product.

即,只要第1探針P1~P4直接接觸之導體圖案E1~E4之一端之電位位移量因介隔絕緣體13而配置於導體圖案E1~E4之另一端之第2探針P5~P8側之第2連接裝置15之作動而變化,則該導體圖案E1~E4為良品,於不產生電位位移量之變化之情形時,因斷線等而判斷為不良品。 In other words, the potential displacement amount at one end of the conductor patterns E1 to E4 directly contacting the first probes P1 to P4 is disposed on the second probes P5 to P8 side of the other ends of the conductor patterns E1 to E4 due to the isolation of the edge body 13. When the operation of the second connecting device 15 is changed, the conductor patterns E1 to E4 are good, and when the potential displacement amount is not changed, it is determined as a defective product due to disconnection or the like.

如此,由於在直接接觸於導體圖案E1~E4之第1探針P1~P4側測量電位,故可確實地檢測出電位位移量,而可實施準確之檢查。 In this manner, since the potential is measured on the side of the first probes P1 to P4 that are in direct contact with the conductor patterns E1 to E4, the potential displacement amount can be surely detected, and an accurate inspection can be performed.

再者,於上述之第1實施形態中係示出以下之例:藉由依序關閉第1連接裝置14之切換開關A1~A4之任一個,選擇導體圖案E1~E4之任一個,使連接於所選擇之導電圖案E1、E2、E3或E4之切換開關B1、B2、B3或B4作動而逐一檢查所選擇之導電圖案E1、E2、E3或E4之導通狀態。然而,亦可同時關閉全部第1連接裝置之切換開關A1~A4,其後,使第2連接裝置15之切換開關B1~B4依序作動,藉由測量電路16檢測此時之電位之變化,藉此逐一檢查導電圖案E1、E2、E3 或E4之導通狀態。又,亦可藉由依序關閉第1連接裝置14之切換開關A1~A4之任一個,選擇導電圖案E1~E4之任一個,每次係使第2連接裝置15之切換開關B1~B4全部同時作動,藉由測量電路16檢測此時之電位之變化,藉此逐一檢查導電圖案E1、E2、E3或E4之導通狀態。 Further, in the first embodiment described above, the following example is shown in which any one of the switching switches A1 to A4 of the first connecting device 14 is sequentially closed, and any one of the conductor patterns E1 to E4 is selected to be connected to The switch B1, B2, B3 or B4 of the selected conductive pattern E1, E2, E3 or E4 is actuated to check the conduction state of the selected conductive pattern E1, E2, E3 or E4 one by one. However, the switches A1 to A4 of all the first connecting devices can be simultaneously turned off, and then the switching switches B1 to B4 of the second connecting device 15 are sequentially operated, and the change of the potential at this time is detected by the measuring circuit 16. Thereby checking the conductive patterns E1, E2, E3 one by one Or the conduction state of E4. Alternatively, any one of the switches A1 to A4 of the first connecting device 14 may be turned off in sequence, and any one of the conductive patterns E1 to E4 may be selected, and the switching switches B1 to B4 of the second connecting device 15 may be simultaneously provided at the same time. Actuation, by detecting the change of the potential at this time by the measuring circuit 16, thereby checking the conduction state of the conductive pattern E1, E2, E3 or E4 one by one.

進而,又,於檢查印刷基板1之導電圖案E1~E4之全部是否為良品之情形時,亦可將第1連接裝置之切換開關A1~A4全部同時關閉,其後,使第2連接裝置15之切換開關B1~B4全部同時作動,藉由測量電路16檢測此時之電位之變化。以上於下述第2~第5實施例中亦相同。 Further, when it is checked whether all of the conductive patterns E1 to E4 of the printed circuit board 1 are good, the switches A1 to A4 of the first connection device may be simultaneously turned off, and then the second connection device 15 may be turned on. All of the changeover switches B1 to B4 are simultaneously operated, and the change of the potential at this time is detected by the measurement circuit 16. The above is also the same in the second to fifth embodiments described below.

[第2實施形態] [Second Embodiment]

圖8及圖9表示第2實施形態之印刷基板檢查裝置31,於該印刷基板檢查裝置31中,於第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間分別設置有具有特定之靜電電容之電容器C1~C4。 8 and 9 show a printed circuit board inspection device 31 according to the second embodiment. In the printed circuit board inspection device 31, between the second probes P5 to P8 and the respective switching switches B1 to B4 of the second connection device 15, respectively. Capacitors C1 to C4 having specific electrostatic capacitances are provided.

於該第2實施形態中,其他之構成係與第1實施形態相同,標註同一符號並省略說明。又,利用該第2實施形態之印刷基板檢查裝置31之印刷基板檢查方法係與圖3所示之第1實施形態之情形相同,第1探針P1~P4之電位之隨時間之變化狀態亦係其絕對值等不同,但由於與圖4~圖7所示之第1實施形態之情形共通,故省略其說明。於以下各實施形態中亦同樣地,對與前文敍述之實施形態共通部分標註同一符號並使說明簡化。 In the second embodiment, the other components are the same as in the first embodiment, and the same reference numerals will be given thereto, and the description thereof will be omitted. In addition, the printed circuit board inspection method of the printed circuit board inspection apparatus 31 of the second embodiment is the same as that of the first embodiment shown in FIG. 3, and the potential of the first probes P1 to P4 changes with time. Although the absolute value or the like is different, it is common to the first embodiment shown in FIGS. 4 to 7, and therefore the description thereof will be omitted. In the following embodiments, the same portions as those of the above-described embodiments are denoted by the same reference numerals, and the description will be simplified.

於第1實施形態中,因包含浮動靜電電容之配線部自身所具有之靜電電容,而使第2連接裝置15作動時之電位位移產生變化,但於第2實施形態中,藉由於第2探針P5~P8與第2連接裝置15之間設置具有特定之靜電電容之電容器C1~C4,可增大使第2連接裝置15作動時之靜電電容之變化,相應地增大電位位移量,可實施更準確之檢查。 In the first embodiment, the potential displacement of the second connecting device 15 is changed by the electrostatic capacitance of the wiring portion itself including the floating electrostatic capacitance. However, in the second embodiment, the second probe is used. Capacitors C1 to C4 having specific electrostatic capacitances are provided between the pins P5 to P8 and the second connecting device 15, and the change in electrostatic capacitance when the second connecting device 15 is actuated can be increased, and the potential displacement amount can be increased accordingly. More accurate inspection.

[第3實施形態] [Third embodiment]

圖10及圖11表示第3實施形態之印刷基板檢查裝置41,於上述之第2實施形態中係於第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間分別設置有電容器C1~C4,與此相對,於該印刷基板檢查裝置41中係於第2連接裝置15之各切換開關B1~B4與定電流源12之基準電位之間分別設置有具有特定之靜電電容之電容器C5~C8。僅設置該電容器C5~C8之位置與第2實施形態不同,其他構成與第2實施形態相同。 10 and FIG. 11 show a printed circuit board inspection device 41 according to the third embodiment, respectively, in the second embodiment, between the second probes P5 to P8 and the respective switching switches B1 to B4 of the second connection device 15, respectively. Capacitors C1 to C4 are provided, and in the printed circuit board inspection device 41, specific static electricity is provided between the respective switching switches B1 to B4 of the second connection device 15 and the reference potential of the constant current source 12, respectively. Capacitor capacitors C5~C8. The position where only the capacitors C5 to C8 are provided is different from that of the second embodiment, and other configurations are the same as those of the second embodiment.

因此,於該第3實施形態中,藉由於第2連接裝置15與定電流源12之基準電位之間之設置之電容器C5~C8,可增大使第2連接裝置15作動時之靜電電容之變化,增大電位位移量,實施更準確之檢查。 Therefore, in the third embodiment, the capacitance C5 to C8 provided between the second connection device 15 and the reference potential of the constant current source 12 can increase the change in electrostatic capacitance when the second connection device 15 is activated. Increase the potential displacement and perform a more accurate inspection.

再者,亦可設為以下構成:合併上述之第2實施形態與該第3實施形態,於第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間、以及第2連接裝置15之各切換開關B1~B4與定電流源12之基準電位之間之兩者,分別設置有電容器C1~C4、C5~C8。 In addition, the second embodiment and the third embodiment may be combined between the second probes P5 to P8 and the respective switches S1 to B4 of the second connection device 15, and The capacitors C1 to C4 and C5 to C8 are respectively provided between the respective switching switches B1 to B4 of the connection device 15 and the reference potential of the constant current source 12.

[第4實施形態] [Fourth embodiment]

圖12及圖13表示第4實施形態之印刷基板檢查裝置51。該印刷基板檢查裝置51相對於第1實施形態之印刷基板檢查裝置11係構成為於第1連接裝置14與定電流源12之基準電位之間設置具有切換開關S之第3連接裝置23。其他構成與第1實施形態之情形相同。 Fig. 12 and Fig. 13 show a printed circuit board inspection device 51 according to the fourth embodiment. The printed circuit board inspection device 51 is configured such that the third connection device 23 having the changeover switch S is provided between the first connection device 14 and the reference potential of the constant current source 12 with respect to the printed circuit board inspection device 11 of the first embodiment. The other configuration is the same as that in the first embodiment.

圖14表示使用第4實施形態之印刷基板檢查裝置51之印刷基板檢查方法之流程圖。於該流程圖中,對與圖3之流程圖相同之步驟標註同一符號並使說明簡化,主要說明不同之步驟。 Fig. 14 is a flow chart showing a method of inspecting a printed circuit board using the printed circuit board inspection apparatus 51 of the fourth embodiment. In the flowchart, the same steps as those in the flowchart of FIG. 3 are denoted by the same reference numerals and the description is simplified, and the different steps are mainly explained.

又,關於第1探針(導體圖案之一端)之電位之變化係於圖15~圖18中示出,該等圖15~圖18係與第1實施形態之圖4~圖7對應。 Further, the change in potential of the first probe (one end of the conductor pattern) is shown in Figs. 15 to 18, and Figs. 15 to 18 correspond to Figs. 4 to 7 of the first embodiment.

S11:於自時刻T1起t31前之時刻T3,將第3連接裝置23設為導通 狀態。藉此,第3連接裝置23之切換開關成為接通之狀態,於在第1連接裝置14等之配線部電荷帶電之情形時,該電荷被釋放。 S11: Turning on the third connecting device 23 at time T3 before t31 from time T1 status. As a result, the switch of the third connection device 23 is turned on, and the charge is released when the wiring portion of the first connection device 14 or the like is charged.

S12:於自時刻T1起經過特定時間t14後之時刻、且在時刻T2之前之時刻T4,將第3連接裝置23設為遮斷狀態(斷開切換開關S)。由於在該S12之前之S2將第1連接裝置14設為導通狀態,故於該S12,藉由將第3連接裝置23設為遮斷狀態,而於第1探針P1~P4側開始充電,如圖15~圖18所示,第1探針P1~P4側之電位上升。 S12: The third connecting device 23 is placed in the blocking state (the switching switch S is turned off) at the time T11 after the lapse of the specific time t14 from the time T1 and at the time T4 before the time T2. Since the first connection device 14 is turned on in S2 before S12, the third connection device 23 is turned off in the S12 state, and charging is started on the first probes P1 to P4 side. As shown in FIGS. 15 to 18, the potential on the side of the first probes P1 to P4 rises.

圖15及圖16係使第2連接裝置15作動時第1探針P1~P4之電位上升中途之狀態之情形,於圖15所示之情形時,在時刻T2,電位位移量變化,故前進至S5,於圖16所示之情形時,在時刻T2,電位位移量並未變化,故前進至S8。 15 and FIG. 16 show the state in which the potential of the first probes P1 to P4 rises when the second connecting device 15 is actuated. In the case shown in FIG. 15, the potential displacement amount changes at time T2, so the progress is made. Up to S5, in the case shown in Fig. 16, at time T2, the potential displacement amount does not change, so the process proceeds to S8.

圖17及圖18係即將使第2連接裝置15作動之前,導體圖案E1~E4之一端之電位曾達到定電流源12之開路電壓V0之情形,於如圖17所示般在時刻T2確認有電位之下降之情形時,前進至S7,於如圖18所示般在時刻T2電位無變化之情形時,前進至S8。 17 and FIG. 18 are the cases where the potential of one of the conductor patterns E1 to E4 reaches the open circuit voltage V 0 of the constant current source 12 immediately before the second connection device 15 is actuated, and is confirmed at time T2 as shown in FIG. When there is a drop in potential, the process proceeds to S7, and if there is no change in the potential at time T2 as shown in FIG. 18, the process proceeds to S8.

該第4實施形態中,藉由設置第3連接裝置23,即便於在配線部等中之靜電電容部分帶電之情形時,由於可藉由第3連接裝置23使其放電而開始檢查,故亦可更準確地測定第1探針P1~P4之電位。又,由於藉由第3連接裝置23以將第1探針P1~P4連接於基準電位之狀態連接第1連接裝置14,其後遮斷第3連接裝置23,故可使對於導體圖案E1~E4之來自定電流源12之電流之值於短時間穩定,而可實施更迅速之檢查。 In the fourth embodiment, when the third connection device 23 is provided, even when the capacitance portion of the wiring portion or the like is charged, the third connection device 23 can be discharged to start the inspection. The potential of the first probes P1 to P4 can be measured more accurately. Further, since the third connecting device 23 connects the first connecting device 14 with the first probes P1 to P4 connected to the reference potential, and then the third connecting device 23 is blocked, the conductor pattern E1 can be removed. The value of the current from the constant current source 12 of E4 is stable for a short period of time, and a more rapid inspection can be performed.

[第4實施形態之變化形態] [Modification of Fourth Embodiment]

亦可將圖12及圖13所示之第4實施形態之印刷基板檢查裝置51設為基本構成,並於其上,如圖8及圖9所示之第2實施形態般,於第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間分別配設電容器 C1~C4。 The printed circuit board inspection device 51 of the fourth embodiment shown in FIG. 12 and FIG. 13 can be basically configured, and the second embodiment can be used as shown in FIG. 8 and FIG. Capacitors are respectively provided between the pins P5 to P8 and the respective switches B1 to B4 of the second connecting device 15 C1~C4.

又,亦可如圖10及圖11所示之第3實施形態般,於第2連接裝置15之各切換開關B1~B4與定電流源12之基準電位之間分別配設電容器C5~C8。 Further, as in the third embodiment shown in FIGS. 10 and 11, capacitors C5 to C8 may be disposed between the respective switching switches B1 to B4 of the second connection device 15 and the reference potential of the constant current source 12.

又,亦可配設該等兩者之電容器C1~C4、C5~C8。 Further, capacitors C1 to C4 and C5 to C8 of the two may be provided.

於任一情形時,亦可與設置電容器C1~C4或C5~C8相應地,增大電位位移量,實施更準確之檢查。 In either case, it is also possible to increase the potential displacement amount in accordance with the setting of the capacitors C1 to C4 or C5 to C8, and perform a more accurate inspection.

[第5實施形態] [Fifth Embodiment]

圖19及圖20表示第5實施形態之印刷基板檢查裝置61。於該印刷基板檢查裝置61中,直接接觸於印刷基板1之導體圖案E1~E4之一端之第1探針P1~P4及介隔絕緣體13而配置於導體圖案E1~E4之另一端之第2探針P5~P8係分開具有連接於定電流源12之基準電位之導體板25。而且,於該圖19及圖20所示之例中,第1探針P1~P4及第2探針P5~P8均配置於印刷基板1之一面側,導體板25係接觸於印刷基板1之另一面之絕緣層2,且連接於定電流源12之基準電位。於該情形時,導體板25形成為可接觸印刷基板1之絕緣層2之全體之大小,但只要至少形成為可介隔絕緣層2而與檢查對象之導體圖案E1~E4之一部分對向之大小即可。 19 and 20 show a printed circuit board inspection device 61 according to the fifth embodiment. In the printed circuit board inspection device 61, the first probes P1 to P4 and the isolation barrier 13 which are in direct contact with one of the conductor patterns E1 to E4 of the printed circuit board 1 are disposed on the other end of the other ends of the conductor patterns E1 to E4. The probes P5 to P8 are separated from the conductor plate 25 having a reference potential connected to the constant current source 12. Further, in the example shown in FIGS. 19 and 20, the first probes P1 to P4 and the second probes P5 to P8 are disposed on one surface side of the printed circuit board 1, and the conductor plate 25 is in contact with the printed circuit board 1. The other side of the insulating layer 2 is connected to the reference potential of the constant current source 12. In this case, the conductor plate 25 is formed to be in contact with the entire thickness of the insulating layer 2 of the printed substrate 1, but it is formed so as to be at least partially shieldable from the edge layer 2 and opposed to one of the conductor patterns E1 to E4 of the inspection object. The size is fine.

如上述之「關於印刷基板」一欄所說明般,於導體圖案E1~E4之兩端分開設置於印刷基板1之兩面之情形時,第2探針P5~P8係介隔絕緣層而配置於與導體板25同側且避開導體板25之位置。 When the two ends of the conductor patterns E1 to E4 are separately provided on both surfaces of the printed circuit board 1 as described in the section on "Printed substrate", the second probes P5 to P8 are disposed on the edge layer. It is on the same side as the conductor plate 25 and avoids the position of the conductor plate 25.

藉由該印刷基板檢查裝置61進行基板檢查之情形時之流程圖係如圖21所示般,於檢查最初之準備中,將第1探針P1~P4直接接觸於導體圖案E1~E4之一端,亦將第2探針P5~P8介隔絕緣體13配置於導體圖案E1~E4之另一端時,除了於印刷基板1之絕緣層2之面配置導體板25(S15)以外,與圖3之流程圖之S2以後相同。 The flow chart when the substrate inspection is performed by the printed circuit board inspection device 61 is as shown in FIG. 21. In the first preparation for inspection, the first probes P1 to P4 are directly in contact with one of the conductor patterns E1 to E4. When the second probes P5 to P8 are disposed on the other ends of the conductor patterns E1 to E4, the conductor plates 25 are disposed on the surface of the insulating layer 2 of the printed circuit board 1 (S15), and FIG. The flow chart is the same after S2.

藉由配置該導體板25,若於時刻T1將第1連接裝置14設為導通狀態,使電流自定電流源12流向第1探針P1~P4(S2),則存在於導體圖案E1~E4與導體板25之間之靜電電容被充電,由測量電路16檢測之電位上升。繼而,於時刻T2使第2連接裝置15作動,使相對於定電流源12之基準電位之第2探針P5~P8之連接狀態變化。 By arranging the conductor plate 25, when the first connection device 14 is turned on at time T1 and the current self-regulated current source 12 flows to the first probes P1 to P4 (S2), it exists in the conductor patterns E1 to E4. The electrostatic capacitance between the conductor plate 25 and the conductor plate 25 is charged, and the potential detected by the measuring circuit 16 rises. Then, at time T2, the second connection device 15 is actuated to change the connection state of the second probes P5 to P8 with respect to the reference potential of the constant current source 12.

圖22表示於與導體圖案E1~E4和導電板25之間之靜電電容相比配線部之靜電電容極端小之情形時,使第2連接裝置15作動時之第1探針P1~P4之電位之變化,相對於導體圖案E1~E4與導電板25之間之靜電電容,藉由包含導體圖案E1~E4之配線部之靜電電容之連接狀態變化,只要導體圖案E1~E4為良品,則伴隨著外觀上之靜電電容之變化,每單位時間tu之電位位移量減少。若相對於導體圖案E1~E4之基準電位之靜電電容變化,則電位位移量變化。圖22表示靜電電容增加之例。 FIG. 22 shows potentials of the first probes P1 to P4 when the second connection device 15 is activated when the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25 is extremely smaller than the capacitance of the wiring portion. The change in the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25 is changed by the connection state of the capacitance of the wiring portion including the conductor patterns E1 to E4, and the conductor patterns E1 to E4 are good as long as they are good. The change in electrostatic capacitance in appearance reduces the amount of potential displacement per unit of time. When the electrostatic capacitance with respect to the reference potential of the conductor patterns E1 to E4 changes, the potential displacement amount changes. Fig. 22 shows an example in which the electrostatic capacitance is increased.

於導體圖案E1~E4為不良品之情形時,如圖23所示般,即便使第2連接裝置15作動,於電位位移量亦無變化,維持使第2連接裝置15作動之前之狀態。 When the conductor patterns E1 to E4 are defective, as shown in FIG. 23, even if the second connecting device 15 is actuated, the potential displacement amount does not change, and the state before the second connecting device 15 is actuated is maintained.

與此相對,於配線部之靜電電容大於導體圖案E1~E4與導電板25之間之靜電電容之情形時,或導體圖案E1~E4與導電板25之間之靜電電容與配線部之靜電電容之間差別不大之情形時,如圖24所示,藉由使第2連接裝置15作動,只要導體圖案E1~E4為良品,則於第1探針P1~P4之電位稍微下降後,電位以較連接前之電位位移量小之電位位移量上升。若相對於導體圖案E1~E4之基準電位之靜電電容變化,則電位變化。圖24表示靜電電容增加之例。 On the other hand, when the electrostatic capacitance of the wiring portion is larger than the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25, or the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25 and the electrostatic capacitance of the wiring portion When there is little difference between them, as shown in FIG. 24, when the second connection device 15 is activated, if the conductor patterns E1 to E4 are good, the potential of the first probes P1 to P4 is slightly lowered, and then the potential is increased. The potential displacement amount which is smaller than the potential displacement amount before the connection rises. When the electrostatic capacitance with respect to the reference potential of the conductor patterns E1 to E4 changes, the potential changes. Fig. 24 shows an example in which the electrostatic capacitance is increased.

於導體圖案E1~E4為不良品之情形時,如圖25所示,即便使第2連接裝置15作動,於電位位移量亦無變化,維持使第2連接裝置15作動之前之狀態。 When the conductor patterns E1 to E4 are defective, as shown in FIG. 25, even if the second connecting device 15 is actuated, the potential displacement amount does not change, and the state before the second connecting device 15 is actuated is maintained.

於配線部之靜電電容大於該導體圖案E1~E4與導電板25之間之靜電電容之情形時,或導體圖案E1~E4與導電板25之間之靜電電容與配線部之靜電電容之間差別不大之情形時,使第2連接裝置15作動之前之每時間tu之電位位移量較小,因此,第1探針P1~P4達到開路電壓V0前會耗費時間,故未例示於時刻T2之前,電位達到定電流源12之開路電壓V0之情形,但於時刻T2之前,電位達到定電流源12之開路電壓V0之情形係與第1實施形態等之情形相同,於導體圖案E1~E4為良品之情形時,以自開路電壓V0下降之方式變化,於自開路電壓V0無變化之情形時,導體圖案E1~E4為不良品。 When the electrostatic capacitance of the wiring portion is larger than the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25, or the difference between the electrostatic capacitance between the conductor patterns E1 to E4 and the conductive plate 25 and the electrostatic capacitance of the wiring portion In the case of a small amount, the potential displacement amount per time tu before the second connecting device 15 is actuated is small. Therefore, it takes time before the first probes P1 to P4 reach the open circuit voltage V 0 , so it is not illustrated at time T2. before potential reached the case the constant current source open-circuit 12 of the voltage V 0 of, but before the time T2, the potential reached the case the constant current source open-circuit 12 of the voltage V 0 of the system and the case of the first embodiment and the like of the same, to the conductor pattern E1 When ~E4 is a good product, the self-opening voltage V 0 changes, and when the self-opening voltage V 0 does not change, the conductor patterns E1 to E4 are defective products.

[第5實施形態之變化形態] [Modification of the fifth embodiment]

於圖19及圖20所示之第5實施形態之情形時,亦可將該等之圖所示之印刷基板檢查裝置61設為基本構成,並於其上,如圖8及圖9所示之第2實施形態般,於第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間分別配設電容器C1~C4。 In the case of the fifth embodiment shown in FIG. 19 and FIG. 20, the printed circuit board inspection device 61 shown in the drawings may be basically configured, and as shown in FIGS. 8 and 9, In the second embodiment, capacitors C1 to C4 are disposed between the second probes P5 to P8 and the respective switches S1 to B4 of the second connection device 15.

又,亦可如圖10及圖11所示之第3實施形態般,於第2連接裝置15之各切換開關B1~B4與定電流源12之基準電位之間分別配設電容器C5~C8。 Further, as in the third embodiment shown in FIGS. 10 and 11, capacitors C5 to C8 may be disposed between the respective switching switches B1 to B4 of the second connection device 15 and the reference potential of the constant current source 12.

又,亦可配設該等兩者之電容器C1~C4、C5~C8。 Further, capacitors C1 to C4 and C5 to C8 of the two may be provided.

於任一情形時,均可與設置電容器C1~C4或C5~C8相應地,增大電位位移量,實施更準確之檢查。 In either case, the potential displacement amount can be increased in accordance with the setting of the capacitors C1 to C4 or C5 to C8, and a more accurate inspection can be performed.

進而,亦可如圖12及圖13所示之第4實施形態般,於第1連接裝置14與定電流源12之基準電位之間設置具有切換開關S之第3連接裝置23。 Further, as in the fourth embodiment shown in FIGS. 12 and 13, the third connection device 23 having the changeover switch S may be provided between the first connection device 14 and the reference potential of the constant current source 12.

藉由設置第3連接裝置23,即便於導體圖案E1~E4等之靜電電容部分帶電之情形時,由於可藉由第3連接裝置23使其放電而開始檢查,故亦可更準確地測定電位,又,由於可使對於導體圖案E1~E4 之來自定電流源12之電流之值於短時間內穩定,故可實施更迅速之檢查,且可實施更準確之檢查。 When the third connection device 23 is provided, even when the capacitance portions such as the conductor patterns E1 to E4 are charged, since the third connection device 23 can be discharged to start the inspection, the potential can be more accurately measured. And, again, because of the conductor pattern E1~E4 The value of the current from the constant current source 12 is stable for a short period of time, so that a more rapid inspection can be performed and a more accurate inspection can be performed.

且說,於第5實施形態及其變化形態中,亦可檢測第1探針P1~P4是否確實地接觸導體圖案E1~E4。 Further, in the fifth embodiment and its modifications, it is also possible to detect whether or not the first probes P1 to P4 are surely in contact with the conductor patterns E1 to E4.

圖26係圖19及圖20所示之第5實施形態,於其第2探針P5~P8與第2連接裝置15之各切換開關B1~B4之間分別配設電容器C1~C4之情形,或於第2連接裝置15之各切換開關B1~B4與定電流源12之基準電位之間分別配設電容器C5~C8之情形之任一情形時之裝置中,在第1探針P1~P4與導體圖案E1~E4接觸不良之情形時,因第1探針P1~P4與導體圖案E1~E4間之靜電電容,外觀上之整體靜電電容變小,故於時刻T1,電位急遽地上升,瞬間達到開路電壓V0。藉由檢測該電位之上升狀態,可檢測第1探針P1~P4之接觸狀態。 FIG. 26 is a view showing a case where the capacitors C1 to C4 are disposed between the second probes P5 to P8 and the respective switches S1 to B4 of the second connection device 15 in the fifth embodiment shown in FIG. 19 and FIG. In the case where the capacitors C5 to C8 are respectively disposed between the respective switching switches B1 to B4 of the second connection device 15 and the reference potential of the constant current source 12, the first probes P1 to P4 are provided in the device. When the contact with the conductor patterns E1 to E4 is poor, the electrostatic capacitance between the first probes P1 to P4 and the conductor patterns E1 to E4 is small in appearance, so that the potential rises sharply at time T1. The open circuit voltage V 0 is reached instantaneously. By detecting the rising state of the potential, the contact state of the first probes P1 to P4 can be detected.

圖27表示於第5實施形態組入有第3連接裝置23之情形,若遮斷第3連接裝置23而使第1探針P1~P4流通電流(時刻T4),則於第1探針P1~P4接觸不良之情形時與圖26同樣地,電位急遽地上升,故可檢測其上升狀態而檢測第1探針P1~P4之接觸狀態。 FIG. 27 shows a case where the third connection device 23 is incorporated in the fifth embodiment. When the third connection device 23 is blocked and the first probes P1 to P4 are caused to flow a current (time T4), the first probe P1 is placed. In the case where the contact with PB is poor, the potential rises sharply as in Fig. 26, so that the rising state can be detected and the contact state of the first probes P1 to P4 can be detected.

自該電位之上升狀態檢測第1探針P1~P4之接觸不良後,只要再次調整第1探針P1~P4之接觸位置、姿勢等即可。 After detecting the contact failure of the first probes P1 to P4 from the rising state of the potential, the contact position, posture, and the like of the first probes P1 to P4 may be adjusted again.

[第6實施形態] [Sixth embodiment]

繼而,參照圖28及圖29,對第6實施形態之印刷基板檢查裝置71進行說明。 Next, the printed circuit board inspection device 71 of the sixth embodiment will be described with reference to FIGS. 28 and 29.

第6實施形態之印刷基板檢查裝置71具有將第1實施形態之印刷基板檢查裝置11中之第1連接裝置14之切換開關A1~A4概括為單一之切換開關A1之第1連接裝置14'。即,複數個第1探針P1~P4係並聯地連接於切換開關A1。藉由關閉該切換開關A1,複數個第1探針P1~P4同時成為連接狀態,電流自定電流源12同時供給至複數個第1探針P1 ~P4。 The printed circuit board inspection device 71 of the sixth embodiment has the first connection device 14' in which the change switches A1 to A4 of the first connection device 14 in the printed circuit board inspection device 11 of the first embodiment are summarized as a single changeover switch A1. That is, the plurality of first probes P1 to P4 are connected in parallel to the changeover switch A1. By turning off the changeover switch A1, the plurality of first probes P1 to P4 are simultaneously connected, and the current self-contained current source 12 is simultaneously supplied to the plurality of first probes P1. ~P4.

藉此,於包含導體圖案E1~E4之裝置之配線部等所具有之靜電電容蓄電,其結果,由與第1探針P1~P4連接之狀態之測量電路16測量之電位(相對於定電流源12之基準電位之第1探針P1~P4之電位)上升。 Thereby, the capacitance of the wiring portion or the like of the device including the conductor patterns E1 to E4 is stored, and as a result, the potential measured by the measuring circuit 16 connected to the first probes P1 to P4 (relative to the constant current) The potential of the first probes P1 to P4 of the reference potential of the source 12 rises.

繼而,使第2連接裝置15之切換開關B1~B4依序作動。只要導體圖案E1~E4正常,則藉由該第2連接裝置15之作動,於由測量電路16測量之電位產生變化。於導體圖案E1~E4產生斷線之情形時,即便使第2連接裝置15作動,由測量電路16測量之電位亦不產生變化。藉由檢測該電位有無變化,可識別導體圖案E1~E4之良否。 Then, the change switches B1 to B4 of the second connecting device 15 are sequentially operated. As long as the conductor patterns E1 to E4 are normal, the potential measured by the measuring circuit 16 changes due to the operation of the second connecting means 15. When the conductor patterns E1 to E4 are disconnected, even if the second connecting device 15 is activated, the potential measured by the measuring circuit 16 does not change. By detecting whether or not the potential changes, it is possible to identify the quality of the conductor patterns E1 to E4.

於上述之第6實施形態中,具有將第1實施形態之印刷基板檢查裝置11中之第1連接裝置14之切換開關A1~A4概括為單一之切換開關A1之第1連接裝置14'。該構成亦可適用於上述之第2實施形態(圖8)、第3實施形態(圖10)、第4實施形態(圖12)、及第5實施形態(圖19)之印刷基板檢查裝置之第1連接裝置14。 In the sixth embodiment, the first connection device 14' in which the changeover switches A1 to A4 of the first connection device 14 in the printed circuit board inspection device 11 of the first embodiment are summarized as a single changeover switch A1 is provided. This configuration can also be applied to the printed circuit board inspection device of the second embodiment (FIG. 8), the third embodiment (FIG. 10), the fourth embodiment (FIG. 12), and the fifth embodiment (FIG. 19). The first connecting device 14.

[第7實施形態] [Seventh embodiment]

繼而,參照圖30及圖31,對第7實施形態之印刷基板檢查裝置81進行說明。 Next, the printed circuit board inspection device 81 of the seventh embodiment will be described with reference to FIGS. 30 and 31.

第7實施形態之印刷基板檢查裝置81具有將第1實施形態之印刷基板檢查裝置11中之第2連接裝置15之切換開關B1~B4概括為單一之切換開關B1之第2連接裝置15'。即,複數個第2探針P5~P8並聯地連接於切換開關B1。藉由關閉該切換開關B1,可使複數個第2探針P5~P8同時接地。 The printed circuit board inspection device 81 of the seventh embodiment has the second connection device 15' in which the change switches B1 to B4 of the second connection device 15 in the printed circuit board inspection device 11 of the first embodiment are summarized as a single changeover switch B1. That is, a plurality of second probes P5 to P8 are connected in parallel to the changeover switch B1. By closing the changeover switch B1, the plurality of second probes P5 to P8 can be grounded at the same time.

根據該構成,藉由依序關閉第1連接裝置14之切換開關A1~A4之任一個,而選擇導電圖案E1~E4之任一個,每次係使第2連接裝置15'之切換開關B1作動,且藉由測量電路16檢測此時之電位之變化,藉 此可檢查導電圖案E1、E2、E3或E4之導通狀態。 According to this configuration, any one of the conductive patterns E1 to E4 is selected by sequentially closing any one of the switches A1 to A4 of the first connecting device 14, and the switching switch B1 of the second connecting device 15' is activated each time. And detecting, by the measuring circuit 16, the change of the potential at this time, borrowing This can check the conduction state of the conductive pattern E1, E2, E3 or E4.

於上述之第7實施形態中,具有將第1實施形態之印刷基板檢查裝置11中之第2連接裝置15之切換開關B1~B4概括為單一之切換開關B1之第2連接裝置15'。該構成亦可適用於上述之第2實施形態(圖8)、第3實施形態(圖10)、第4實施形態(圖12)、及第5實施形態(圖19)之印刷基板檢查裝置之第2連接裝置15。 In the seventh embodiment, the second connection device 15' in which the change switches B1 to B4 of the second connection device 15 in the printed circuit board inspection device 11 of the first embodiment are summarized as a single changeover switch B1 is provided. This configuration can also be applied to the printed circuit board inspection device of the second embodiment (FIG. 8), the third embodiment (FIG. 10), the fourth embodiment (FIG. 12), and the fifth embodiment (FIG. 19). The second connecting device 15.

進而,於對第2實施形態之印刷基板檢查裝置適用具有單一之切換開關B1之第2連接裝置15'之情形時,可將複數個電容器C1~C4作為1個電容器而配置於第2探針P5~P8與第2連接裝置15'之間。同樣,於對第3實施形態之印刷基板檢查裝置適用具有單一之切換開關B1之第2連接裝置15'之情形時,可將複數個電容器C5~C8作為1個電容器而配置於第2連接裝置15'與地線之間。 Further, when the second connection device 15' having the single changeover switch B1 is applied to the printed circuit board inspection apparatus according to the second embodiment, the plurality of capacitors C1 to C4 can be placed as one capacitor on the second probe. Between P5~P8 and the second connecting device 15'. Similarly, when the second connection device 15' having the single changeover switch B1 is applied to the printed circuit board inspection apparatus according to the third embodiment, the plurality of capacitors C5 to C8 can be disposed as one capacitor in the second connection device. Between 15' and the ground.

以上,對本發明之各實施形態進行了說明,但本發明並非限定於該等實施形態者,可於不脫離本發明之主旨之範圍內施加各種變更。 The embodiments of the present invention have been described above, but the present invention is not limited to the embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

關於特定時間t12、t31、t14、tu,可設定符合印刷基板之電特性之最佳之時間,藉由其調整,可更迅速且確實地檢測導體圖案E1~E4之一端之電位位移量之變化,可迅速地實施準確之基板檢查。 With respect to the specific times t12, t31, t14, and tu, an optimum time to match the electrical characteristics of the printed substrate can be set, and by adjusting, the change in the potential displacement amount at one end of the conductor patterns E1 to E4 can be detected more quickly and surely. Accurate substrate inspection can be performed quickly.

又,關於電容器C1~C4、C5~C8之靜電電容,亦係藉由設定符合印刷基板之電特性之最佳值,而更迅速且確實地檢測導體圖案E1~E4之一端之電位位移量之變化,可迅速地實施準確之基板檢查。 Further, regarding the capacitances of the capacitors C1 to C4 and C5 to C8, the potential displacement amount at one end of the conductor patterns E1 to E4 is detected more quickly and surely by setting an optimum value in accordance with the electrical characteristics of the printed circuit board. Changes can quickly perform accurate substrate inspections.

1‧‧‧印刷基板 1‧‧‧Printing substrate

2‧‧‧絕緣層 2‧‧‧Insulation

11‧‧‧印刷基板檢查裝置 11‧‧‧Printed substrate inspection device

12‧‧‧定電流源 12‧‧‧Constant current source

13‧‧‧絕緣體 13‧‧‧Insulator

14‧‧‧第1連接裝置 14‧‧‧1st connection device

15‧‧‧第2連接裝置 15‧‧‧2nd connection device

16‧‧‧測量電路 16‧‧‧Measurement circuit

17‧‧‧定電流源控制部 17‧‧‧Constant current source control unit

18‧‧‧連接裝置控制部 18‧‧‧Connected Device Control Department

19‧‧‧A/D轉換部 19‧‧‧A/D conversion department

20‧‧‧電位測量部 20‧‧‧ Potential Measurement Department

21‧‧‧主控制裝置 21‧‧‧Main control unit

22‧‧‧顯示裝置 22‧‧‧ display device

A1~A4‧‧‧切換開關 A1~A4‧‧‧Toggle switch

B1~B4‧‧‧切換開關 B1~B4‧‧‧Toggle switch

E1~E4‧‧‧導體圖案 E1~E4‧‧‧ conductor pattern

P1~P4‧‧‧第1探針 P1~P4‧‧‧1st probe

P5~P8‧‧‧第2探針 P5~P8‧‧‧2nd probe

Claims (9)

一種印刷基板檢查裝置,其係對形成於印刷基板之導體圖案施加電信號而檢查導體圖案之良否之印刷基板之電性檢測裝置,其特徵在於具備:第1探針,其接觸於上述導體圖案之一端;第2探針,其介隔絕緣體配置於上述導體圖案之另一端;定電流源;第1連接裝置,其用以將上述第1探針連接於上述定電流源;第2連接裝置,其用以使相對於上述定電流源之基準電位的上述第2探針之電性連接狀態變化;及測量電路,其用以測量相對於上述定電流源之基準電位之上述第1探針之電位。 A printed circuit board inspection device which is an electrical detection device for a printed circuit board that applies an electrical signal to a conductor pattern of a printed circuit board to inspect a conductor pattern, and includes a first probe that is in contact with the conductor pattern. a second probe, wherein the isolation barrier is disposed at the other end of the conductor pattern; a constant current source; a first connection device for connecting the first probe to the constant current source; and a second connection device And a measuring circuit for measuring the first probe of the reference potential with respect to the constant current source; and a measuring circuit for measuring the first probe with respect to a reference potential of the constant current source The potential. 如請求項1之印刷基板檢查裝置,其中具有特定之靜電電容之電容器連接於上述第2探針與上述第2連接裝置之間、或上述第2探針與上述定電流源之基準電位之間之任一者或兩者。 The printed circuit board inspection apparatus according to claim 1, wherein a capacitor having a specific electrostatic capacitance is connected between the second probe and the second connection device or between the second probe and a reference potential of the constant current source Either or both. 如請求項2之印刷基板檢查裝置,其具有第3連接裝置,該第3連接裝置用以將上述第1探針經由上述第1連接裝置連接於上述定電流源之基準電位。 A printed circuit board inspection device according to claim 2, further comprising: a third connection device for connecting the first probe to a reference potential of the constant current source via the first connection device. 如請求項1之印刷基板檢查裝置,其具有第3連接裝置,該第3連接裝置用以將上述第1探針經由上述第1連接裝置連接於上述定電流源之基準電位。 A printed circuit board inspection apparatus according to claim 1, further comprising: a third connection device for connecting the first probe to a reference potential of the constant current source via the first connection device. 如請求項1至3中任一項之印刷基板檢查裝置,其中對於上述印刷基板之上述導體圖案隔著絕緣體而與之接觸之導體板連接於上述定電流源之基準電位。 The printed circuit board inspection apparatus according to any one of claims 1 to 3, wherein a conductor plate that is in contact with the conductor pattern of the printed circuit board via an insulator is connected to a reference potential of the constant current source. 如請求項4之印刷基板檢查裝置,其中對於上述印刷基板之上述導體圖案隔著絕緣體而與之接觸之導體板連接於上述定電流源之基準電位。 The printed circuit board inspection apparatus according to claim 4, wherein a conductor plate that is in contact with the conductor pattern of the printed circuit board via an insulator is connected to a reference potential of the constant current source. 一種印刷基板檢查方法,其特徵在於:使第1探針直接接觸導體 圖案之一端,將第2探針介隔絕緣體配置於上述導體圖案之另一端,於時刻T1,開始使電流自定電流源流向上述第1探針,於自時刻T1經過特定之時間t12後之時刻T2,使相對於上述定電流源之基準電位之上述第2探針之電性連接狀態變化,根據該變化時之相對於上述定電流源之基準電位之上述第1探針之電位之測量結果來判定上述導體圖案之良否。 A printed substrate inspection method characterized in that a first probe is directly in contact with a conductor At one end of the pattern, the second probe isolation barrier is disposed at the other end of the conductor pattern, and at time T1, a current self-current source is started to flow to the first probe, and a predetermined time t12 elapses from time T1. At time T2, the electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, and the potential of the first probe relative to the reference potential of the constant current source is measured according to the change. As a result, it is judged whether or not the above conductor pattern is good or not. 如請求項7之印刷基板檢查方法,其中當相對於上述定電流源之基準電位之上述第2探針之電性連接狀態變化時,於每特定之單位時間tu之上述導體圖案之一端之電位位移量變化之情形時,判定導體圖案為良品。 The printed circuit board inspection method according to claim 7, wherein when the electrical connection state of the second probe with respect to the reference potential of the constant current source is changed, the potential of one end of the conductor pattern at each specific unit time tu When the displacement amount changes, it is determined that the conductor pattern is a good product. 如請求項7或8之印刷基板檢查方法,其中於自上述時刻T1起特定之時間t31前之時刻T3,將上述第1探針連接於上述定電流源之基準電位,於自上述時刻T1經過較上述時間t12更短之時間t14而在上述時刻T2之前之時刻T4,將上述第1探針與上述基準電位設為遮斷狀態。 The method of inspecting a printed circuit board according to claim 7 or 8, wherein the first probe is connected to a reference potential of the constant current source at a time T3 before a predetermined time t31 from the time T1, and passes through the time T1. At a time t14 shorter than the time t12 and at a time T4 before the time T2, the first probe and the reference potential are set to an off state.
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JP6474362B2 (en) * 2016-04-04 2019-02-27 ファナック株式会社 Printed circuit board deterioration detection device
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Family Cites Families (14)

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JP2670655B2 (en) * 1992-11-04 1997-10-29 株式会社アドテックエンジニアリング Circuit pattern inspection device and inspection method
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JP2002156399A (en) * 2000-11-17 2002-05-31 Oht Inc Device and method for inspecting circuit board
US7250781B2 (en) * 2002-12-19 2007-07-31 Fuji Xerox Co., Ltd. Circuit board inspection device
JP4825083B2 (en) * 2006-08-28 2011-11-30 株式会社アドテックエンジニアリング Trace type circuit board inspection equipment
CN201014993Y (en) * 2006-12-04 2008-01-30 杨世光 Testing circuit improvement for PCB tester
JP2008232963A (en) * 2007-03-23 2008-10-02 Hioki Ee Corp Probe, probe device, and inspection apparatus
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