TWI586531B - Moisture-impermeable Unit,Moisture-impermeable Structure, and Lighting Device - Google Patents

Description

Water vapor barrier laminate, water vapor barrier structure, and light emitting device

The present invention relates to a laminate and a light-emitting device, and more particularly to a water vapor barrier laminate and a light-emitting device including the water-gas barrier laminate.

The organic electroluminescent device includes two flexible substrates disposed at intervals between the upper and lower sides, and is disposed between the flexible substrates and connected to the flexible substrates to define an accommodation. The moisture of the space blocks the surrounding wall, and an organic electroluminescent element housed in the accommodating space. The organic electroluminescence device can prevent the organic electroluminescence element from coming into contact with the moisture by the moisture barrier wall, thereby shortening the service life. However, the moisture barrier wall can only be used for the moisture entering the surrounding area. Blocking, but not blocking the moisture entering from the flexible substrate, further, the flexible substrate is not effective in blocking moisture, and therefore, the organic electro-active element is still exposed to moisture, so that the organic electricity The life of the excitation device is still not in line with industry demand.

Referring to Fig. 1, an organic electroluminescent device is disclosed in Taiwan Patent Publication No. 200829070. The organic electroluminescent device comprises a flexible substrate 4, a lower barrier film unit 5 disposed on the flexible substrate 4, and an organic electroluminescent device disposed on the lower barrier film unit 5 at intervals 6. An absorbing layer 7 disposed on the organic electroluminescent device 6, and an upper barrier film unit 8 covering the organic electroluminescent device 6 and the absorbing layer 7. The lower barrier film unit 5 includes a first barrier film 51 and a second barrier film 52 disposed on the first barrier film 51. The upper barrier film unit 8 includes a third barrier film 81 and a fourth barrier film 82 disposed on the third barrier film 81. The first barrier film 51 includes an organic layer 511 and an inorganic layer 512 disposed on the organic layer 511. The second barrier film 52 includes an organic layer 521 and an inorganic layer 522 disposed on the organic layer 521. The third barrier film 81 includes an organic layer 811 and an inorganic layer 812 disposed on the organic layer 811. The fourth barrier film 82 includes an organic layer 821 and an inorganic layer 822 disposed on the organic layer 821. The organic layer is, for example, an ultraviolet light curing type, a thermosetting type or a parylene polymer. The inorganic layer such as cerium oxide (SiO ₂ ), tri-n-triazine (Si ₃ N ₄ ), aluminum oxide (Al ₂ O ₃ ), aluminum nitride (A1N), titanium dioxide (TiO ₂ ), nitriding Titanium (TiN), chromium oxide (Cr ₂ O ₃ ), tantalum carbide (SiC), or diamond-like carbon (DLC).

Although the organic electroluminescent device can assist the substrate to block moisture through the barrier film, the organic electroluminescent device only considers the water vapor barrier effect. However, as an organic electroluminescent device, it is still necessary to consider such a design. Whether it will affect the luminous intensity, it is still necessary to find an organic electroluminescent device that can have both moisture barrier and light penetration.

Accordingly, a first object of the present invention is to provide a water vapor barrier laminate having light penetrability and water vapor barrier properties.

Thus, the water vapor barrier laminate of the present invention comprises a poly(α,α,α',α'-tetrafluorop-xylene) layer and a poly(α,α,α',α'-tetrafluoro pair An inorganic layer of a layer of xylene), wherein the poly(α,α,α',α'-tetrafluorop-xylene) layer is comprised of one including 1, 1, 2, 2, 9, 9, 10, 10- An organic component of octafluoro[2.2]diparylene is formed, and the composition of the inorganic layer includes at least one selected from the group consisting of aluminum oxide and tantalum nitride.

A second object of the present invention is to provide a water vapor barrier structure having light penetrability and water vapor barrier properties.

The water vapor barrier structure of the present invention comprises a substrate unit and a water vapor barrier laminate connected to the substrate unit. The water vapor barrier laminate comprises a poly(α,α,α',α'-tetrafluoro-p-xylene) layer and a layer of the poly(α,α,α',α'-tetrafluoro-p-xylene) The inorganic layer, wherein the poly(α,α,α',α'-tetrafluorop-xylene) layer is composed of one including 1,1,2,2,9,9,10,10-octafluoro[2.2 The organic component of the dimeric p-xylene is formed, and the composition of the inorganic layer includes at least one selected from the group consisting of aluminum oxide and tantalum nitride.

A third object of the present invention is to provide a light-emitting device having a long life and high luminous intensity.

The light-emitting device of the invention comprises a two-phase water vapor barrier structure, a water gas barrier wall and a light-emitting element. Each moisture barrier structure comprises a substrate unit and a water vapor barrier laminate connected to the substrate unit. The water vapor barrier laminate comprises a poly(α,α,α',α'-tetrafluoro-p-xylene) layer, and a poly(α,α,α',α'-tetrafluoro-p-xylene) An inorganic layer of a layer, wherein the poly(α,α,α',α'-tetrafluoro-p-xylene) layer is composed of one including 1,1,2,2,9,9,10,10-octafluoro[ 2.2] An organic component of dimerized p-xylene formed, and the composition of the inorganic layer comprises at least one selected from the group consisting of aluminum oxide and tantalum nitride. The moisture barrier wall is located between the water vapor barrier structures, and is connected to the inorganic layer of the water vapor barrier laminate of one of the water vapor barrier structures and the substrate unit of the other moisture barrier structure, and The inorganic layer and the substrate unit cooperate to define an accommodation space. The illuminating element is received in the accommodating space.

The effect of the present invention is to form a poly(α,α,α',α'-tetrafluoro-pair by using 1,1,2,2,9,9,10,10-octafluoro[2.2]di-p-xylene. The xylene) layer is combined with an inorganic layer of aluminum oxide or tantalum nitride to form the water vapor barrier laminate, so that the water vapor barrier structure using the water vapor barrier laminate has high light transmittance and high moisture. The barrier property, that is, the water vapor barrier laminate improves the light transmittance and water vapor barrier properties of the substrate unit.

The invention is further described in the following examples, but it should be understood that these examples are for illustrative purposes only and are not to be construed as limiting.

Referring to Fig. 2, a first embodiment of a light-emitting device of the present invention comprises two water-gas barrier structures 1, a water-gas barrier wall 2, and a light-emitting element 3, which are spaced apart from each other. The arrows indicate the direction of the light.

Each moisture barrier structure 1 includes a substrate unit 11 and a moisture barrier laminate 12 connected to the substrate unit 11. The substrate unit 11 includes a flexible substrate 111 and a conductive layer 112 disposed on the flexible substrate 111. The flexible substrate 111 is, for example but not limited to, a polyethylene terephthalate (PET) substrate, a polyether sulfone (PES) substrate, or a polyimide (PI). Substrate, etc. The conductive layer 112 is, for example, an electrode layer or a transparent conductive layer or the like. The transparent conductive layer is, for example but not limited to, an indium tin oxide (ITO) layer or an Indium Zinc Oxide (IZO) layer. The electrode layer is, for example but not limited to, an aluminum electrode layer, an aluminum-magnesium alloy electrode layer, an aluminum-lithium alloy electrode layer, or an aluminum-calcium alloy electrode layer or the like. In the first embodiment of the present invention, the flexible substrate 111 of the substrate unit 11 of the water vapor barrier structure 1 is a polyethylene terephthalate substrate, and a substrate unit of the water vapor barrier structure 1 The conductive layer 112 of 11 is an indium tin oxide layer, and the conductive layer 112 of the substrate unit 11 of the other moisture barrier structure 1 is an aluminum electrode layer.

The moisture barrier laminate 12 of the water vapor barrier structure 1 includes a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 connected to the conductive layer 112 of the substrate unit 11, and An inorganic layer 122 of the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 is attached. The water vapor barrier laminate 12 of the other moisture barrier structure 1 includes a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 connected to the flexible substrate 111 of the substrate unit 11. And an inorganic layer 122 connecting the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121.

The poly(α,α,α',α'-tetrafluoro-p-xylene) (also known as parylene HT or parylene AF4) layer 121 is comprised of one including 1, 1, 2, 2, 9, 9, 10, 10- An organic component of octafluoro[2.2]di-p-xylene (1,1,2,2,9,9,10,10-octafluoro[2.2]paracyclophane) is formed. The poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 forming step comprises the 1,1,2,2,9,9,10,10-octafluoro[2.2] dimerization pair The xylene is heated to a temperature of 90 ° C to 160 ° C for gasification, and then heated to 650 ° C to 750 ° C for cracking, followed by chemical vapor deposition (CVD) at a deposition pressure ranging from 1 mTorr to 100 mTorr. And polymerizing to form the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121. In the first embodiment of the present invention, the gasification temperature of the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 forming step is 150 ° C, the cracking temperature is 720 ° C, and the The polymerization temperature was 32 ° C and the deposition pressure was 25 mTorr.

The composition of the inorganic layer 122 includes at least one selected from the group consisting of aluminum oxide and tantalum nitride. The inorganic layer 122 forming step includes depositing and forming the inorganic layer 122 by performing an RF Magnetron Sputtering process on an inorganic target. The inorganic target is a alumina target or a ruthenium target. When the inorganic layer 122 is tantalum nitride, it is formed by performing the radio frequency magnetron sputtering treatment in an environment containing nitrogen as a reaction gas. The RF magnetron sputtering process operates at a pressure in the range of 0.1 mTorr to 20 mTorr. The RF magnetron sputtering process operates at temperatures ranging from 10 ° C to 110 ° C. In the first embodiment of the present invention, the RF power of the inorganic layer 122 forming step is 100 W, and the operating temperature is 24 °C. In the first embodiment of the present invention, the inorganic layer 122 of the water vapor barrier laminate 12 is made of tantalum nitride.

The moisture barrier wall 2 is located between the water vapor barrier structures 1. The bottom edge and the top edge of the moisture barrier wall 2 are respectively connected to the inorganic layer 122 of the water vapor barrier laminate 12 of the water vapor barrier structure 1 and the substrate unit 11 of the other moisture barrier structure 1 Conductive layer 112. The moisture barrier wall 2 and the inorganic layer 122 and the conductive layer 112 can cooperate to define an accommodating space 20 . The moisture barrier wall 2 includes two inorganic layers 122 respectively connecting the water vapor barrier laminate 12 of the one water vapor barrier structure 1 and two conductive layers 112 of the substrate unit 11 of the other water vapor barrier structure 1. a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 and an inorganic layer connected between the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 Layer 22. The poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 is composed of a 1,1,2,2,9,9,10,10-octafluoro[2.2] dimerized pair. An organic component of toluene is formed, and the composition of the inorganic layer 22 includes at least one selected from the group consisting of aluminum oxide and tantalum nitride. The poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 may contribute to the water vapor barrier effect, because the inorganic layer 122 of the water vapor barrier structure 1 and the conductive layer 112 and the inorganic layer 22 of the moisture barrier wall 2 are of a hard material, and when they are directly superposed on each other, stress is generated, which causes a problem of cracking or growth defects, so that the poly (α, α, The α',α'-tetrafluoro-p-xylene) layer 21 serves as a buffer layer to avoid stress generation. The poly (α,α,α',α'-tetrafluoro-p-xylene) layer 21 of the moisture barrier wall 2 and the inorganic layer 22 are formed in such a manner as to form the polycondensation of the water vapor barrier laminate 12 ( The α, α, α', α'-tetrafluorop-xylene) layer 121 and the inorganic layer 122 are not described again. In the first embodiment of the present invention, the inorganic layer 22 of the moisture barrier wall 2 is made of tantalum nitride.

The light-emitting element 3 is housed in the accommodating space 20 of the moisture barrier wall 2 . The light-emitting element 3 is, for example but not limited to, an organic light-emitting diode.

Referring to Table 1, a second embodiment to an eighth embodiment of the light-emitting device of the present invention differs from the first embodiment in that the film thickness of the inorganic layer 122 of the water vapor barrier laminate 12 is changed and the inorganic layer 122 is formed. Operating pressure. Referring to Table 1, Comparative Examples 1 to 3 were designed as comparison objects in order to highlight the technical effects in the embodiments of the present invention. This Comparative Example 1 differs from the first embodiment in that the moisture barrier structure 1 does not have a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121. This Comparative Example 2 differs from the first embodiment in that the moisture barrier structure 1 has no inorganic layer 122. This Comparative Example 3 differs from the first embodiment in that the water vapor barrier laminate 12 is not provided.

Referring to FIG. 3, a ninth embodiment of the light-emitting device of the present invention is different from the first embodiment in that each moisture barrier structure 1 further comprises a poly(α) located in the substrate unit 11 and the water vapor barrier laminate 12. The α, α', α'-tetrafluorop-xylene) layer 121, and the substrate unit 11 and the water vapor barrier laminate 12 are joined together to form the bonding layer 13. Each of the moisture barrier laminates 12 further includes a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 and the inorganic layer 122, and the poly(α,α,α The connection layer 123 of the ', α'-tetrafluoro-p-xylene) layer 121 and the inorganic layer 122 are bonded together. The moisture barrier wall 2 further includes four tie layers 23. Two of the bonding layers 23 are respectively located between the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 and the inorganic layer 22, and the poly(α,α,α', The α'-tetrafluoro-p-xylene) layer 21 and the inorganic layer 22 are joined together. The remaining two connecting layers 23 are respectively connected to the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 21 to connect the water-gas barrier surrounding wall 2 to the water-gas barrier structures 1 Fixed together.

The material of the bonding layer 13, the connecting layer 123, and the connecting layer 23 is an aromatic hydroxy decane compound. The aromatic hydroxy decane compound is formed by hydrolysis of a component comprising an arylalkoxy decane compound. The arylalkoxy decane compound such as, but not limited to, phenyltrimethoxysilane, phenyltriethoxysilane, or N-[2-N-(vinylbenzylamino)B 5-aminopropyltrimethoxydecane {N-[2-(N-vinylbenzylamino)ethyl]-3-aminopropyltrimethoxysilane}. The interface layer 13 can be made by the compatibility between the aromatic group in the aromatic hydroxy decane compound and the phenyl group in the poly(α,α,α',α'-tetrafluoro-p-xylene) layer. The connecting layer 123, and the connecting layer 23 are stably adsorbed on the poly(α,α,α',α'-tetrafluoro-p-xylene) layer, and the hydroxyl group in the aromatic hydroxy decane compound and the The inorganic layer or the conductive layer forms a bond, so that the bonding layer 13, the connecting layer 123, and the connecting layer 23 are stably combined with the inorganic layer or the conductive layer, and then the water vapor barrier layer 12 is aggregated (α). , α, α', α'-tetrafluoro-p-xylene) layer 121 and inorganic layer 122 are joined together to make the water vapor barrier wall 2 poly(α,α,α',α'-tetrafluoro-ply The toluene layer 21 and the inorganic layer 22 are joined and fixed together, and the substrate unit 11 is connected and fixed to the water vapor barrier laminate 12. The bonding layer 13, the connecting layer 123, and the manner in which the connecting layers 23 are formed may be formed by a method of immersion film formation. In the case of the bonding layer 13, the substrate unit 11 is washed and dried, and then the dried substrate unit 11 is immersed in a solution containing an aromatic hydroxy decane compound, wherein the aryl hydroxy decane compound The solution is formed by subjecting an aromatic alkoxydecane compound to an aqueous acetic acid solution for hydrolysis. Then, the substrate unit 11 is taken out and dried to form the bonding layer 13 on the substrate unit 11. The reagents used for the cleaning are acetone, methanol and deionized water. The connection layer 123 and the connection layer 23 are formed in the same manner as the formation of the connection layer 13, and therefore will not be described again.

Referring to Tables 1 and 2, a tenth embodiment of the light-emitting device of the present invention differs from the first embodiment in the composition of the inorganic layer 122 of the water vapor barrier laminate 12 and the inorganic layer 22 of the moisture barrier wall 2. All are aluminum oxide. Referring to Table 2, an eleventh embodiment to a seventeenth embodiment of the light-emitting device of the present invention differs from the tenth embodiment in that the film thickness of the inorganic layer 122 of the water vapor barrier laminate 12 is changed and the inorganic layer is formed. Operating pressure of 122. Referring to Tables 1 and 2, an eighteenth embodiment of the light-emitting device of the present invention differs from the ninth embodiment in that the inorganic layer 122 of the water vapor barrier laminate 12 and the inorganic layer 22 of the moisture barrier wall 2 The composition is aluminum oxide. Referring to Table 2, in order to highlight the technical effects in the embodiments of the present invention, Comparative Example 4 was designed as a comparison object. This Comparative Example 4 differs from the tenth embodiment in that the moisture barrier structure 1 does not have a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121.

Evaluation project

Water vapor barrier property measurement: Water vapor barrier structure 1 of the first embodiment, water vapor barrier structure 1 of Comparative Examples 1, 2 and 4, and substrate unit 11 of Comparative Example 3 were subjected to moisture gas using a calcium test method. Measurement of permeability (unit: g/m ² /day).

Average light transmittance (unit: %): Water vapor barrier structure 1 of Comparative Example 1, Comparative Example 1, using Ultraviolet-Visible Spectroscopy (label: PerkinElmer; Model: Lambda 25) The water vapor barrier structure 1 of 2 and 4, and the substrate unit 11 of Comparative Example 3 were measured, and the detection wavelength was 400 nm to 800 nm.

Adhesion test (unit: %, percentage of peeling): Poly (α) of the water-gas barrier structure 1 of the first embodiment, the ninth embodiment, the tenth embodiment, and the eighteenth embodiment, respectively, using a hundred-knife knife The α, α', α'-tetrafluorop-xylene) layer 121 and the inorganic layer 122 are respectively patterned with a grid line to form 100 lattice points. A tape was adhered to the lattice dots, and then the tape was torn to observe the peeling of the poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 and the inorganic layer 122.

Table 1         <TABLE border="1" borderColor="#000000" width="_0003"><TBODY><tr><td> Thickness</td><td> Example </td><td> Comparative Example </td ></tr><tr><td> one</td><td> two</td><td> three</td><td> four</td><td> five</td><td > six</td><td> seven</td><td> eight</td><td> nine</td><td> 1 </td><td> 2 </td><td> 3 </td></tr><tr><td> substrate unit 11 </td><td> flexible substrate 111(μm) </td><td> 175 </td><td> 175 </ Td><td> 175 </td><td> 175 </td></tr><tr><td> Transparent Conductive Layer (nm) </td><td> 12 </td><td> 12 </td><td> 12 </td><td> 12 </td></tr><tr><td> Adapter layer 13 </td><td> None</td><td> None< /td><td> None</td><td> None</td><td> None</td><td> None</td><td> None</td><td> No</td ><td> Yes</td><td> -- </td><td> -- </td><td> -- </td></tr><tr><td> Poly (α, α,α',α'-tetrafluoro-p-xylene) layer 121 (nm) </td><td> 75 </td><td> -- </td><td> 75 </td><td > -- </td></tr><tr><td> Connection Layer 123 </td><td> None</td><td> None</td><td> None</td><td > None</td><td> None</td><td> None</td><td> None</td><td> None</td><td> Yes</td><td> - - </td><t d> -- </td><td> -- </td></tr><tr><td> inorganic layer 122 </td><td> tantalum nitride</td><td> film thickness ( Nm) </td><td> 100 </td><td> 50 </td><td> 150 </td><td> 200 </td><td> 300 </td><td> 400 </td><td> 100 </td><td> 100 </td><td> 100 </td><td> 100 </td><td> -- </td><td> -- </td></tr><tr><td> Pressure (mTorr) </td><td> 1 </td><td> 1 </td><td> 1 </td><td> 1 </td><td> 1 </td><td> 1 </td><td> 5 </td><td> 9 </td><td> 1 </td><td> 1 </ Td><td> -- </td><td> -- </td></tr><tr><td> Al2O3</td><td> Film Thickness (nm) </td> <td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td>< Td> -- </td></tr><tr><td> Pressure (mTorr) </td><td> -- </td><td> -- </td><td> -- < /td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td > -- </td><td> -- </td><td> -- </td><td> -- </td></tr><tr><td> Water vapor permeability (× 10^-3,g/m²/day) </td><td> 5.7 </td><td> 7.7 </td><td> 6.9 < /td><td> 7.6 </td><td> 8.7 </td><td> 13 </ Td><td> 8.2 </td><td> 10 </td><td> 5.2 </td><td> 9.6 </td><td> 13 </td><td> 17 </td> </tr><tr><td> Average light transmittance (%) </td><td> 95.9 </td><td> - </td><td> 94.06 </td><td> 93.54 </td><td> 92.63 </td><td> - </td><td> - </td><td> - </td><td> 95.6 </td><td> 94.5 </ Td><td> 83.7 </td><td> 79.4 </td></tr><tr><td> Adhesion (%) (% of flaking) </td><td> 30 </td>< Td> - </td><td> - </td><td> - </td><td> - </td><td> - </td><td> - </td><td> - </td><td> 0 </td><td> - </td><td> 60 </td><td> - </td></tr><tr height="0">< Td></td><td></td><td></td><td></td><td></td><td></td><td></td><td ></td><td></td><td></td><td></td><td></td><td></td><td></td><td> </td><td></td></tr></TBODY></TABLE>

From the experimental data of the first embodiment and the comparative examples 1 to 3 of Table 1, it is understood that the present invention uses 1,1,2,2,9,9,10,10-octafluoro[2.2] two under the same film thickness. The poly(p-xylene) forms a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 and is combined with an inorganic layer 122 of tantalum nitride to form the water-gas barrier laminate 12, so that the water vapor is utilized. The moisture barrier structure 1 which blocks the laminated body 12 has high light transmittance and high moisture barrier property as compared with Comparative Examples 1 to 3.

Furthermore, it can be seen from the first embodiment and the ninth embodiment that the present invention can enhance the poly(α,α,α',α'-tetrafluoroethylene through the bonding layer 13 and the connecting layers 123. Adhesion between the p-xylene) layer 121 and the substrate unit 11 and the inorganic layer 122.

Table 2         <TABLE border="1" borderColor="#000000" width="_0004"><TBODY><tr><td> Thickness</td><td> Example </td><td> Comparative Example </td ></tr><tr><td> ten</td><td> eleven</td><td> twelve</td><td> thirteen</td><td> fourteen</ Td><td> fifteen</td><td> sixteen</td><td> seventeen</td><td> eighteen</td><td> 4 </td></tr> <tr><td> Substrate unit 11 </td><td> Flexible substrate 111(μm) </td><td> 175 </td><td> 175 </td></tr><tr ><td> Transparent Conductive Layer (nm) </td><td> 12 </td><td> 12 </td></tr><tr><td> Interfacing Layer 13 </td><td> No </td><td> no</td><td> no</td><td> no</td><td> no</td><td> no</td><td> no< /td><td> None</td><td> Yes</td><td> -- </td></tr><tr><td> Poly(α,α,α',α'- Tetrafluorop-xylene) layer 121 (nm) </td><td> 75 </td><td> -- </td></tr><tr><td> connection layer 123 </td>< Td> none</td><td> no</td><td> no</td><td> no</td><td> no</td><td> no</td><td> No </td><td> None</td><td> Yes </td><td> -- </td></tr><tr><td> Inorganic layer 122 </td><td> Tantalum nitride</td><td> film thickness (nm) </td><td> -- </td><td> -- </td><td> -- < /td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td > -- </td><td> -- </td></tr><tr><td> Pressure (mTorr) </td><td> -- </td><td> -- </ Td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td><td> -- </td></tr><tr><td> Al2O3</td><td> Film Thickness (nm) </td><td> 25 </td><td> 8 </td><td> 16 </td><td> 50 </td><td> 100 </td><td> 200 </ Td><td> 25 </td><td> 25 </td><td> 25 </td><td> 25 </td></tr><tr><td> pressure (mTorr) </ Td><td> 9 </td><td> 9 </td><td> 9 </td><td> 9 </td><td> 9 </td><td> 9 </td> <td> 11 </td><td> 13 </td><td> 9 </td><td> 9 </td></tr><tr><td> WVTR (×10^{- 3},g/m²/day) </td><td> 2.6 </td><td> 5.3 </td><td> 3.5 </td><td > 3 </td><td> 5 </td><td> 4.9 </td><td> 3.7 </td><td> 4.2 </td><td> 2.1 </td><td> 5.9 </td></tr><tr><td> Average Light Penetration (%) </td><td> 92.6 </td><td> 93.3 </td><td> - </td> <td> - </td><td> - </td><td> 92.3 </td><td> 92.8 </td><td> 95.1 </td><td> 92.4 </td><td > 84.7 </td></tr><tr> <td> Adhesion (%) (% of flaking) </td><td> 40 </td><td> - </td><td> - </td><td> - </td><td > - </td><td> - </td><td> - </td><td> - </td><td> 0 </td><td> </td></tr>< Tr height="0"><td></td><td></td><td></td><td></td><td></td><td></td>< Td></td><td></td><td></td><td></td><td></td><td></td><td></td><td ></td></tr></TBODY></TABLE>

From the experimental data of the tenth embodiment and the comparative examples 2 to 4 of Tables 1 and 2, it is understood that the present invention uses 1,1,2,2,9,9,10,10-octafluorofluorene under the same film thickness [ 2.2] dimerized p-xylene forms a poly(α,α,α',α'-tetrafluoro-p-xylene) layer 121 and is combined with an inorganic layer 122 of aluminum oxide to form the water-gas barrier laminate 12, The moisture barrier structure 1 using the water vapor barrier laminate 12 has high light transmittance and high moisture barrier property as compared with Comparative Examples 2 to 4.

Furthermore, it can be seen from the ninth embodiment and the eighteenth embodiment that the present invention can enhance the poly(α,α,α',α'-four by the connecting layer 13 and the connecting layer 123. Adhesion between the fluoro-p-xylylene layer 121 and the substrate unit 11 and the inorganic layer 122.

In summary, the present invention forms poly(α,α,α',α'-tetrafluoroethylene by using 1,1,2,2,9,9,10,10-octafluoro[2.2]dimerized p-xylene. The p-xylene) layer 121 is used in combination with the inorganic layer 122 of aluminum oxide or tantalum nitride to form the water vapor barrier laminate 12, so that the moisture barrier structure 1 using the water vapor barrier laminate 12 has high light penetration. The permeability and high moisture barrier property, that is, the water vapor barrier laminate 12 enhances the light transmittance and water vapor barrier properties of the substrate unit 11, so that the object of the present invention can be achieved.

However, the above is only the embodiment of the present invention, and the scope of the invention is not limited thereto, and all the equivalent equivalent changes and modifications according to the scope of the patent application and the patent specification of the present invention are still The scope of the invention is covered.

1‧‧‧Water-gas barrier structure
11‧‧‧Substrate unit
111‧‧‧Flexible substrate
112‧‧‧ Conductive layer
12‧‧‧Water vapor barrier laminate
121‧‧‧Poly(α,α,α',α'-tetrafluoro-p-xylene) layer
122‧‧‧Inorganic layer
123‧‧‧Connection layer
13‧‧‧Connecting layer
2‧‧‧Water and gas barrier wall
21‧‧‧Poly(α,α,α',α'-tetrafluoro-p-xylene) layer
22‧‧‧Inorganic layer
23‧‧‧Linking layer
20‧‧‧ accommodating space
3‧‧‧Lighting elements

Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: Figure 1 is a schematic view of an organic electro-excitation device of Taiwan Patent Publication No. 200829070; A perspective exploded view of a first embodiment; and FIG. 3 is a perspective exploded view of a ninth embodiment of a light emitting device of the present invention.

1‧‧‧Water-gas barrier structure

11‧‧‧Substrate unit

111‧‧‧Flexible substrate

112‧‧‧ Conductive layer

12‧‧‧Water vapor barrier laminate

121‧‧‧Poly(α,α,α',α'-tetrafluoro-p-xylene) layer

122‧‧‧Inorganic layer

2‧‧‧Water and gas barrier wall

21‧‧‧Poly(α,α,α',α'-tetrafluoro-p-xylene) layer

22‧‧‧Inorganic layer

20‧‧‧ accommodating space

3‧‧‧Lighting elements

Claims (10)

A water vapor barrier laminate comprising: a poly(α,α,α',α'-tetrafluoro-p-xylene) layer; and an inorganic layer connecting the poly(α,α,α',α'-four a layer of fluoro-p-xylene); wherein the layer of poly(α,α,α',α'-tetrafluoro-p-xylene) is composed of one, 1, 2, 2, 9, 9, 10, 10-8 The organic component of fluorine [2.2] di-p-xylene is formed, and the composition of the inorganic layer includes at least one selected from the group consisting of aluminum oxide and tantalum nitride. The water vapor barrier laminate according to claim 1, further comprising a layer between the poly(α,α,α',α'-tetrafluorop-xylene) and the inorganic layer, and the poly(α,α The α', α'-tetrafluoro-p-xylene) layer and the connecting layer to which the inorganic layer is bonded and fixed, and the material of the connecting layer is an aromatic hydroxy decane compound. A water vapor barrier structure comprising: a substrate unit and a water vapor barrier laminate connected to the substrate unit, the water vapor barrier laminate comprising a poly(α,α,α',α'-tetrafluoro-p-xylene a layer and an inorganic layer connecting the poly(α,α,α',α'-tetrafluoro-p-xylene) layer, wherein the poly(α,α,α',α'-tetrafluoro-p-xylene) The layer is formed of an organic component comprising 1,1,2,2,9,9,10,10-octafluoro[2.2]diparylene, and the composition of the inorganic layer comprises aluminum oxide And at least one material selected from the group consisting of tantalum nitride. The moisture barrier structure according to claim 3, wherein the moisture barrier layer further comprises a layer of the poly(α,α,α',α'-tetrafluorop-xylene) and the inorganic layer. And the poly(α,α,α',α'-tetrafluoro-p-xylene) layer and the inorganic layer are bonded and fixed together, and the material of the connection layer is an aromatic hydroxy decane compound. The moisture barrier structure according to claim 3, wherein the substrate unit comprises a flexible substrate, and a conductive layer disposed on the flexible substrate. The moisture barrier structure according to claim 5, wherein the conductive layer is a transparent conductive layer. The moisture barrier structure according to claim 6, further comprising a poly(α,α,α',α'-tetrafluoro-p-xylene) located in the transparent conductive layer of the substrate unit and the water vapor barrier laminate. An interlayer of the substrate unit and the water vapor barrier laminate are fixed together, and the material of the interface layer is an aromatic hydroxydecane compound. A light-emitting device comprising: two spaced-apart water-gas barrier structures, each water-gas barrier structure comprising a substrate unit and a moisture barrier layer connected to the substrate unit, the moisture barrier layer body comprising a poly(α,α,α',α'-tetrafluoro-p-xylene) layer and an inorganic layer connecting the poly(α,α,α',α'-tetrafluoro-p-xylene) layer, wherein the poly layer The (α,α,α',α'-tetrafluoro-p-xylene) layer is composed of an organic organic compound including 1,1,2,2,9,9,10,10-octafluoro[2.2]di-p-xylene. a component formed, and the inorganic layer component comprises at least one selected from the group consisting of aluminum oxide and tantalum nitride; a moisture barrier wall located between the water vapor barrier structures, and And an inorganic layer of the moisture barrier layer of the water vapor barrier structure and a substrate unit of the other moisture barrier structure, and cooperate with the inorganic layer and the substrate unit to define an accommodation space; A light-emitting element is received in the accommodating space. The illuminating device of claim 8, wherein the substrate unit comprises a flexible substrate, and a conductive layer disposed on the flexible substrate. The illuminating device of claim 9, wherein one of the conductive layers of the substrate units of the water vapor barrier structures is a transparent conductive layer.