TWI583499B - A disc with internal supply of fluid structure - Google Patents

Description

Grinding disc with internal fluid supply structure

The present invention relates to a grinding disc having an internal supply fluid structure.

The grinding process is a processing technique that uses a grinding disc to contact the surface of the workpiece to remove the workpiece material to make the surface of the workpiece flat. For example, in the semiconductor manufacturing process, after the semiconductor substrate is cut by the wire saw, the substrate is polished by the grinding disc. Surface to remove cuts and establish a datum. In the process of the grinding disc contacting the surface of the friction workpiece, the chip and the high temperature are generated. Therefore, during the grinding process, the cutting liquid is provided at the contact position between the grinding disc and the surface of the workpiece, so that the cutting fluid takes away the chips and achieves the cooling effect.

In the prior art, some grinding disc structures are disclosed. For example, the new patent application of the Republic of China Patent Publication No. M492522 discloses a polishing and polishing apparatus comprising a base having a through hole and a grinding wheel having a hole, the grinding wheel system is connected. At the pedestal, the through hole of the pedestal provides liquid or gas entry during the polishing operation and flows from the pores of the grinding wheel to the surface of the workpiece. Wherein, the through holes on the base are evenly distributed and each through hole is connected to provide a pipe of liquid or gas to uniformly supply the cutting fluid to the surface of the grinding wheel in contact with the workpiece, however, since the size of the workpiece is not necessarily The surface area of the grinding wheel is the same, or the surface quality of the workpiece is not necessarily uniform, and the consumption of each part of the surface of the grinding wheel is different due to grinding. The surface of the grinding wheel will be deformed and not flattened, so it needs frequent maintenance and repair.

In addition, the invention patent case of the Republic of China Patent Publication No. I391208 discloses a grinding wheel with adjustable dynamic balance and chip removal, wherein the grinding wheel is sleeved on a rotary bearing, and the rotary bearing has a cutting fluid outlet. For supplying the cutting fluid to the grinding wheel, however, since the rotary bearing is installed in the shaft hole of the center of the grinding wheel in this case, that is, the grinding wheel is located around the rotating shaft, and the cutting fluid is rotated by the rotation The cutting fluid outlet at the bottom of the bearing flows out, so when the grinding wheel rotates and grinds the workpiece, the cutting fluid is easily discharged, making it difficult for the cutting fluid to be properly supplied to the surface where all the grinding wheels are in contact with the workpiece, and it is impossible to adjust the surface of the grinding wheel differently. The amount of cutting fluid in the position, resulting in poor heat dissipation, and the surface of the grinding wheel is easily flattened due to different consumption.

In addition, Japanese Patent Laid-Open Publication No. 1996-118239 discloses a grinding wheel comprising a base and a plurality of abrasive segments, the abrasive segments being arranged on the surface of the base, and the abrasive segments are spaced apart Forming a drainage groove, the center of the base has a shaft hole communicating with the drainage grooves, and the cutting fluid flows in the drainage grooves to take away heat energy and chips generated during grinding, however, in the case There is no mention of how the cutting fluid is supplied between the drainage channels, but whether the cutting fluid is provided by the rotating shaft in the shaft hole or provided by the pipeline provided near the grinding wheel and the workpiece, the cutting fluid is In the means provided by the rotating shaft in the shaft hole, since the shaft hole is located at the center of the grinding wheel, it is difficult for the cutting fluid to be properly supplied to the surface where all the grinding wheels are in contact with the workpiece, and the amount of cutting fluid at different positions on the surface of the grinding wheel cannot be adjusted. Not only does the heat dissipation effect be poor, but the surface of the grinding wheel is easily uneven due to different consumption; and the cutting fluid is provided by the pipeline provided near the grinding wheel and the workpiece. The additional pipeline is too close to the contact position of the grinding wheel with the surface of the workpiece, which may hinder the operation of the grinding wheel. When the grinding wheel is running, airflow is generated, and the cutting fluid is discharged, resulting in a cutting fluid that can enter the contact position between the grinding wheel and the surface of the workpiece. Limited, thus causing the heat generated by the grinding to be removed immediately; Further, in the manner of forming the drainage grooves between the abrasive segments, it is necessary to make room for forming the drainage grooves, resulting in a reduction in the area available for polishing.

Accordingly, the cutting fluid supply modes of the above-mentioned conventional disc structure each have disadvantages, and the common disadvantage is that the existing disc structure is in the grinding process, the consumption of each part of the grinding surface of the disc cannot be controlled, and thus it is necessary to frequently The polished surface is trimmed to ensure its flatness to maintain good processing quality.

The object of the present invention is to disclose a grinding disc having an internal fluid supply structure. The flow system can be directly supplied between the grinding surface and the workpiece through the porous polishing layer, and the fluid outlet amount at different positions of the polishing surface can be adjusted, thereby solving the problem. In the known technology, since the consumption of each part of the grinding surface of the grinding disc cannot be controlled, it is necessary to frequently trim the grinding surface to ensure the flatness.

To achieve the above and other objects, the present invention discloses a grinding disc having an internal fluid supply structure for mounting on a drive shaft having a plurality of liquid supply lines, comprising a porous polishing layer and a susceptor. The layer includes a bonding surface and a polishing surface; the pedestal is coupled to the bonding surface, the pedestal includes a plurality of channels extending through the channels, and the channels are arranged in a concentric or radial manner, and At least a portion of the channels extend to the edge of the bonding surface, each channel being configured to configure the liquid supply lines.

The above-mentioned grinding disc, wherein when the channels are arranged in a concentric form, the pedestal has a sea-land ratio of 28 to 75%, wherein the sea-land ratio is a percentage of the total volume of the channel to the total volume of the susceptor.

The above-mentioned grinding disc, wherein when the channels are arranged in a radial form, the pedestal has a sea-land ratio of 4 to 40%, wherein the sea-land ratio is a percentage of the total volume of the channel to the total volume of the susceptor.

The above-mentioned grinding disc, wherein each channel is curved.

In the above disc, wherein the channels are arranged in a plurality of turns around the center of the base, and the number of channels in the outer ring is greater than the number of channels in the inner ring.

In the above grinding disc, the base is adhered to the bonding surface by a water-impermeable adhesive layer.

The above-mentioned grinding disc, wherein the width of each of the channels is different.

In the above grinding disc, the material of the porous abrasive layer is selected from the group consisting of resin, metal, ceramic and combinations thereof.

In the above grinding disc, the material of the porous abrasive layer is ceramic.

In the above grinding disc, the porosity of the porous abrasive layer is 30 to 60%.

In the above grinding disc, the porosity of the porous abrasive layer is 45 to 55%.

Therefore, the above-mentioned grinding disc can adjust the fluid outlet amount at different positions of the grinding surface of the porous polishing layer by controlling the supply or the flow of the fluid in each channel or the flow rate, thereby affecting the consumption of different positions on the polishing surface. In order to effectively slow the deformation of the grinding surface to reduce the number of trimming.

1‧‧‧ grinding disc

2‧‧‧liquid supply pipeline

3‧‧‧Workpiece

10‧‧‧Porous abrasive layer

11‧‧‧ joint surface

12‧‧‧Grinding surface

20,20’,20”,20'''‧‧‧ pedestal

21, 21’, 21”, 21'''‧‧‧ channels

22‧‧‧impermeable layer

FIG. 1 is an exploded perspective view of a grinding disc having an internal fluid supply structure according to the present embodiment.

2 is a schematic view showing the combination of a grinding disc having an internal fluid supply structure according to an embodiment of the present invention.

Fig. 3 is a schematic cross-sectional view showing the end face A-A of Fig. 2.

FIG. 4 is a schematic view showing a state in which the grinding disc is used in the embodiment of the present invention.

FIG. 5 is a schematic view showing the first aspect of the base of the grinding disc in the embodiment of the present invention.

FIG. 6 is a schematic view showing a second aspect of the base of the grinding disc in the embodiment of the present invention.

FIG. 7 is a schematic view showing a third aspect of the base of the grinding disc in the embodiment of the present invention.

FIG. 8 is a schematic view showing a fourth aspect of the base of the grinding disc in the embodiment of the present invention.

In order to fully understand the object, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings, which are illustrated as follows: Referring to Figures 1 to 3, this creation The abrasive disc 1 having an internal supply fluid structure of the embodiment comprises a porous abrasive layer 10 and a susceptor 20, the porous abrasive layer 10 comprising a back bonding surface 11 and a polishing surface 12 (Fig. 3); The base 20 is coupled to the joint surface 11 , and the base 20 includes a plurality of passages 21 extending through the channels 21 , and the passages 21 are arranged in a concentric manner, and at least a portion of the passages 21 extend to the joint surface 11 . The edge. The above "fluid" may be a cutting fluid, a cooling liquid (such as cooling water), a cooling gas (such as an inert gas), or a combination thereof; wherein the fluid is preferably a cutting fluid.

In this embodiment, the porous abrasive layer 10 is a porous structure, and the material thereof is selected from the group consisting of a resin, a metal, a ceramic, and a combination thereof. For example, the material of the porous abrasive layer 10 can be The material of the porous abrasive layer 10 may be a composite material of a resin and a ceramic, a composite of a resin and a metal, or a composite of a metal and a ceramic, wherein the porous grinding is performed. The layer 10 can have an abrasive. Moreover, it is preferable that the porosity of the porous polishing layer 10 is 30 to 60%, and if the porosity is less than 30%, the flow rate of the fluid is lowered; If the porosity is higher than 60%, the strength of the porous abrasive layer 10 is lowered to be easily broken. More preferably, the porosity of the porous abrasive layer 10 is 45 to 55%.

As shown in FIG. 4, in the embodiment, the grinding disc 1 is used for mounting on a driving shaft (not shown) having a plurality of liquid supply lines 2, and each channel 21 is used for arranging the liquid supply lines 2 The liquid supply lines 2 are arranged in the shape of the channels 21, and the outlets of the liquid supply lines 2 are separated from the bonding surface 11 of the porous polishing layer 10 by a distance, so that the fluid flows first to each The passage 21 is distributed by the centrifugal force when the grinding disc 1 rotates, and then penetrates into the porous polishing layer 10. Since the passages 21 are annular and extend concentrically to the edge of the joint surface 11, and the passages 21 of each turn are closed and not in communication with each other, the flow system in the passage 21 of each turn is used The centrifugal force of the grinding disc 1 is distributed and distributed, so that it can be uniformly supplied to the grinding surface 12 of the porous polishing layer 10.

The grinding disc 1 grinds the workpiece 3 with the grinding surface 12 of the porous polishing layer 10, and the flow system is permeated from the porous polishing layer 10 to exist on the surface of the polishing surface 12 and the workpiece 3, thereby taking away the grinding The heat generated by the process and the elimination of chips.

In addition, each liquid supply line 2 can open, close or adjust the liquid supply flow rate according to requirements, and the fluid flow rate at the outlet of the passage 21 can be different, thereby affecting the vicinity of the corresponding position on the grinding surface 12 of the porous abrasive layer 10. The fluid flow rate creates an effect of localized water supply on the abrasive surface whereby the consumption of the porous abrasive layer 10 can be controlled. For example, in a grinding process, if it is found that the middle of the grinding surface 12 is concave, so as to affect the appearance of the workpiece 3, the switch corresponding to the liquid supply line 2 in the passage 21 of the outer ring and the inner ring can be closed. So that the portion of the grinding surface 12 near the corresponding position increases the depth of cut into the workpiece, thereby increasing the consumption; or, when the outer wear of the grinding disc is found to be significantly larger than the inner side, the fluid flow corresponding to the outer side of the grinding surface can be temporarily increased, or reduced or even closed. The corresponding fluid supply on the inside of the grinding surface, thereby adjusting the disc consumption in a particular area.

After the inner and outer consumption of the grinding surface 12 of the grinding disc is the same or the polishing surface 12 and the workpiece shape are flattened, the corresponding switch of the liquid supply line 2 in the outer ring and the inner ring passage 21 is opened, so that all the liquid supply lines are made. The flow rate at the outlet 2 is the same so that the entire surface of the abrasive surface 12 can uniformly distribute the fluid.

Therefore, the grinding disc of the present embodiment can have the effect of local water supply on the grinding surface by the arrangement of the channels 21 arranged in a concentric circular shape and the adjustment and switching of the fluid supply flow rate of the liquid supply line 2. The problem of uneven wear such as unevenness of the inner side and the outer side on the polished surface 12 of the grinding disc is improved. Accordingly, the grinding disc 1 of the present embodiment can effectively reduce the deformation of the abrasive surface 12 and reduce the number of times the polishing surface has to be trimmed.

In this embodiment, the susceptor 20 is adhered to the bonding surface 11 by the water-impermeable adhesive layer 22, and the water-impermeable adhesive layer 22 is coated on the surface of the susceptor 20 facing the bonding surface 11, and It is impervious to avoid fluid penetration between the channels 21.

In the above embodiment, the channel 21 having a concentric arrangement is exemplified as a top view of the susceptor 20 as shown in FIG. 5, and the channels 21 are annular and arranged in a concentric manner, and The width of each of the channels is the same, that is, the widths of the channels are the same; wherein, when the channel 21 is arranged in a concentric manner and the susceptor 20 has a sea-to-land ratio of 28 to 75%, the disk 1 And under the processing parameters of the grinding disc 1 and the workpiece 3 which are set at a lower rotation speed, the channel 21 arranged in a concentric manner and the high sea-land ratio grinding disc 1 system can have a large water discharge effect, so the abrasive layer of the grinding disc 1 or The abrasive cut into the workpiece 3 has a shallow depth, and can achieve high surface quality (ie, low surface roughness) and high surface flatness. The above-described sea-land ratio is the percentage of the total volume of the channel to the total volume of the pedestal (i.e., the sum of the total volume of the channel and the total volume of the non-channel portion of the susceptor).

In addition, the shape of the channel arrangement in the present invention is not limited to this aspect, as shown in FIG. 6, the pedestal 20', the channels 21' are arranged in a concentric shape and each of the channels 21' Width is Differently, that is, the widths or depths of the channels 21' are different, and the number of the liquid supply lines 2 that can be accommodated is different, and therefore, corresponding to the width or depth of the channels 21', The amount of water discharged at different positions of the grinding surface is different, and the grinding layer of the grinding disc 1 or the depth of the abrasive into the workpiece 3 can be affected, so that the different positions of the grinding surface are differently consumed.

In addition, as shown in FIG. 7 , in another embodiment of the susceptor of the present embodiment, the channels 21 ′′ in the pedestal 20 ′′ are arranged in a radial form, and each channel 21′′ is curved. Continuously extending from the center adjacent to the joint surface to the adjacent edge, and the distance between the passages 21 adjacent to the center of the joint surface is relatively close, and the distance between the passages 21 at the adjacent edges is relatively long. The landscaping of the susceptor 20 is preferably 4 to 40% of the grinding disc 1, and the inner and outer wear speeds of the grinding surface of the grinding disc 1 can be nearly uniform. The above-mentioned sea-land ratio is the total volume of the channel occupies the total of the pedestal. The percentage of the volume (i.e., the sum of the total volume of the channel and the total volume of the non-channel portion of the susceptor).

Please refer to FIG. 8 , which illustrates another embodiment of the susceptor. The pedestals 20 ′′′ are arranged in a radial manner, and each channel 21′′′ is Curved, the channels 21"' are arranged in a plurality of turns around the center of the base 20"" (exemplified by 2 circles in Fig. 8), and the number of channels 21"' in the outer ring is greater than The number of channels 21''' of the inner ring, preferably the channel 21''' of the outer ring is distributed at a higher density than the channel 21''' of the inner ring, and the inner and outer ring channels 21''' It is not connected. Wherein, the channel 21 is arranged in a radial arrangement, and the land 20 of the susceptor 20 is preferably 4 to 40% of the grinding disc 1 for processing under high material removal rate demand, because the sea-land ratio is low, Therefore, the disc can withstand high processing loads while maintaining a certain surface quality.

Therefore, when the grinding disc 1 disclosed in the embodiment of the present invention is applied to the grinding process, the bases 20, 20', 20", 20''' can be selected according to different processing requirements or different sizes of the workpiece 3. Grinding disc 1 for the best grinding results.

Accordingly, the grinding disc 1 of the embodiment of the present invention can adjust the fluid outlet amount at different positions of the grinding surface 12 of the porous polishing layer 10 by controlling the supply or the flow of the fluid in each channel 21, thereby affecting the grinding. The consumption of the surface 12 at different positions is effective to slow the deformation of the abrasive surface 12 to reduce the number of times the grinding disc 1 is trimmed.

The invention has been described above in terms of the preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.

1‧‧‧ grinding disc

10‧‧‧Porous abrasive layer

11‧‧‧ joint surface

20‧‧‧ Pedestal

21‧‧‧ channel

22‧‧‧impermeable layer

Claims (9)

A grinding disc having an internal supply fluid structure for mounting on a drive shaft having a plurality of liquid supply lines, comprising: a porous abrasive layer comprising a combined surface and a polishing surface; and a pedestal Attached to the bonding surface, the pedestal includes a plurality of channels extending through the channels, and the channels are arranged in a concentric or radial manner, and at least a portion of the channels extend to the edge of the bonding surface, each channel For arranging the liquid supply pipelines, when the channels are arranged in a concentric manner, the pedestal has a sea-land ratio of 28 to 75%, wherein the sea-land ratio is the total volume of the channels occupying the pedestal The percentage of the total volume, and when the channels are arranged in a radial form, the pedestal has a sea to land ratio of 4 to 40%, wherein the sea to land ratio is the percentage of the total volume of the channel to the total volume of the susceptor. The grinding disc of claim 1, wherein the base is bonded to the bonding surface by a water-impermeable adhesive layer. A grinding disc according to claim 1, wherein the width of each of the channels is different. The grinding disc of claim 1, wherein the porous abrasive layer is made of a material selected from the group consisting of a resin, a metal, a ceramic, and combinations thereof. The grinding disc of claim 4, wherein the porous abrasive layer is made of ceramic. The grinding disc of claim 1, wherein the porous abrasive layer has a porosity of 30 to 60%. The grinding disc of claim 1, wherein the porous abrasive layer has a porosity of 45 to 55%. A grinding disc according to claim 1, wherein each passage is curved. The grinding disc of claim 8, wherein the channels are arranged in a plurality of turns around the center of the base, and the number of channels in the outer ring is greater than the number of channels in the inner ring.