TWI581479B - Metal hood manufacturing method - Google Patents

Metal hood manufacturing method Download PDF

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Publication number
TWI581479B
TWI581479B TW105126682A TW105126682A TWI581479B TW I581479 B TWI581479 B TW I581479B TW 105126682 A TW105126682 A TW 105126682A TW 105126682 A TW105126682 A TW 105126682A TW I581479 B TWI581479 B TW I581479B
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metal piece
mask
frame
metal
intermediate metal
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TW105126682A
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TW201712918A (en
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Katsumi Kohno
Motoharu Takaya
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Sinto S-Precision Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Laser Beam Processing (AREA)

Description

金屬罩幕製造方法Metal mask manufacturing method

本發明是有關於一種將金屬片（metal sheet）雷射焊接於罩幕框（mask frame）而製造金屬罩幕的金屬罩幕製造方法。The present invention relates to a method of manufacturing a metal mask for fabricating a metal mask by laser welding a metal sheet to a mask frame.

先前，作為製造有機電致發光（electroluminescence，EL）平板顯示器等時於蒸鍍步驟中使用的金屬罩幕的製造方法，已知有如下方法，即，將金屬片架設在罩幕框上，藉由自該罩幕框的上表面進行焊接而將金屬片焊接於罩幕框的指定的固定位置，從而完成金屬罩幕（例如參照專利文獻1）。 [先前技術文獻] [專利文獻]Conventionally, as a method of manufacturing a metal mask used in an evaporation step in the production of an organic electroluminescence (EL) flat panel display or the like, a method is known in which a metal sheet is placed on a mask frame, The metal mask is welded to the predetermined fixed position of the mask frame by welding from the upper surface of the mask frame, thereby completing the metal mask (see, for example, Patent Document 1). [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本專利特開2005-005070號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-005070

[發明所欲解決之課題] 且說，近年來，伴隨有機EL平板顯示器等高精細化，而金屬片的薄膜化不斷發展。在金屬片已薄膜化的情況下，金屬片與罩幕框的導熱量之差增大，因而產生難以使金屬片焊接於罩幕框的問題。[Problems to be Solved by the Invention] In recent years, in recent years, with the high definition of organic EL flat panel displays and the like, thin film formation of metal sheets has been progressing. In the case where the metal piece has been thinned, the difference in the amount of heat conduction between the metal piece and the mask frame is increased, so that it is difficult to weld the metal piece to the mask frame.

例如，如圖10所示，對載置於罩幕框40的薄膜金屬片80照射焊接用的雷射光140。該情況下，因較之薄膜金屬片80，罩幕框40的導熱量極小，故在罩幕框40達到熔點之前薄膜金屬片80便達到熔點，從而成為在被照射雷射光140的位置開孔的狀態。因此，無法配合薄膜金屬片80熔解的時機來使罩幕框40熔解，從而無法使薄膜金屬片80焊接於罩幕框40。For example, as shown in FIG. 10, the thin film metal piece 80 placed on the mask frame 40 is irradiated with the laser light 140 for welding. In this case, since the amount of heat conduction of the mask frame 40 is extremely small compared to the film metal sheet 80, the film metal sheet 80 reaches the melting point before the mask frame 40 reaches the melting point, thereby opening the hole at the position where the laser light 140 is irradiated. status. Therefore, the mask frame 40 cannot be melted in accordance with the timing at which the film metal sheet 80 is melted, so that the film metal sheet 80 cannot be welded to the mask frame 40.

而且，為了在罩幕框40熔解之前不會使薄膜金屬片80的被照射雷射光140的位置開孔，亦考慮使雷射光140的熱量降低，但該情況下，罩幕框40變得更不易熔解。因此，即便在該情況下，亦無法配合薄膜金屬片80熔解的時機來使罩幕框40熔解，從而無法使薄膜金屬片80焊接於罩幕框40。Further, in order to prevent the position of the thin film metal piece 80 from being irradiated with the laser light 140 before the mask frame 40 is melted, it is also considered to reduce the heat of the laser light 140, but in this case, the mask frame 40 becomes more Not easy to melt. Therefore, even in this case, the mask frame 40 cannot be melted in accordance with the timing at which the film metal sheet 80 is melted, and the film metal sheet 80 cannot be welded to the mask frame 40.

如此，所述方法中，存在無法準確地使薄膜的金屬片焊接於罩幕框，從而無法容易地製造高精細度的金屬罩幕的問題。As described above, in the above method, there is a problem that the metal piece of the film cannot be accurately welded to the mask frame, and the high-definition metal mask cannot be easily manufactured.

而且，除所述方法外，亦存在下述焊接方法，即，在藉由利用焊接噴嘴擠壓金屬片而使罩幕框與金屬片之間的間隙量為0的狀態下進行焊接，但若利用焊接噴嘴擠壓金屬片則金屬片的位置會偏移，從而難以製造高精細度的金屬罩幕。Further, in addition to the above method, there is a welding method in which the welding is performed in a state where the gap between the mask frame and the metal piece is 0 by pressing the metal piece by the welding nozzle, but if When the metal piece is pressed by the welding nozzle, the position of the metal piece is shifted, making it difficult to manufacture a high-definition metal mask.

本發明的目的在於提供一種可容易地製造高精細度的金屬罩幕的金屬罩幕製造方法。 [解決課題之手段]It is an object of the present invention to provide a metal mask manufacturing method which can easily manufacture a high-definition metal mask. [Means for solving the problem]

本發明的金屬罩幕製造方法是將薄膜金屬片雷射焊接於罩幕框而製造金屬罩幕，所述金屬罩幕製造方法的特徵在於包括：第1載置步驟，將厚度較所述薄膜金屬片厚且為所述薄膜金屬片的厚度的5倍以下的厚度的中間金屬片載置於所述罩幕框；第1焊接步驟，將已載置在所述罩幕框的所述中間金屬片雷射焊接於所述罩幕框；第2載置步驟，將所述薄膜金屬片載置於已載置在所述罩幕框的所述中間金屬片之上；以及第2焊接步驟，將已載置在所述中間金屬片的所述薄膜金屬片雷射焊接於所述中間金屬片。The metal mask manufacturing method of the present invention is to manufacture a metal mask by laser welding a thin film metal sheet to a mask frame, and the metal mask manufacturing method is characterized by comprising: a first mounting step of thicknessing the film An intermediate metal piece having a thickness of the metal sheet and having a thickness of less than 5 times the thickness of the thin film metal piece is placed on the mask frame; and the first welding step is placed in the middle of the mask frame a metal sheet is laser-welded to the mask frame; a second mounting step of placing the thin film metal sheet on the intermediate metal sheet that has been placed on the mask frame; and a second soldering step The thin film metal piece that has been placed on the intermediate metal piece is laser welded to the intermediate metal piece.

而且，本發明的金屬罩幕製造方法的特徵在於：所述罩幕框包括構成相向的兩邊的第1框部，及於與所述第1框部正交的方向上構成相向的兩邊的第2框部，所述中間金屬片載置於所述罩幕框的相向的兩邊的所述第1框部或相向的兩邊的所述第2框部。Further, in the method of manufacturing a metal mask according to the present invention, the mask frame includes a first frame portion constituting two opposite sides, and a first frame portion facing each other in a direction orthogonal to the first frame portion. In the second frame portion, the intermediate metal piece is placed on the first frame portion on the opposite sides of the mask frame or the second frame portion on the opposite sides.

而且，本發明的金屬罩幕製造方法的特徵在於：所述中間金屬片具有長條狀的形狀，以長邊方向與所述第1框部或所述第2框部的長邊方向平行的方式載置於所述第1框部或所述第2框部。Further, in the method of manufacturing a metal mask according to the present invention, the intermediate metal piece has an elongated shape and is parallel to a longitudinal direction of the first frame portion or the second frame portion in a longitudinal direction. The method is placed on the first frame portion or the second frame portion.

而且，本發明的金屬罩幕製造方法的特徵在於：所述薄膜金屬片具有長條狀的形狀，使長邊方向與所述中間金屬片的長邊方向正交，且長邊方向的兩端部以在跨越由所述第1框部與所述第2框部所形成的所述罩幕框的開口部的狀態下載置於所述中間金屬片。Further, the metal mask manufacturing method of the present invention is characterized in that the thin film metal sheet has an elongated shape such that the longitudinal direction is orthogonal to the longitudinal direction of the intermediate metal piece, and both ends in the longitudinal direction. The portion is placed in the intermediate metal piece in a state of crossing the opening of the mask frame formed by the first frame portion and the second frame portion.

而且，本發明的金屬罩幕製造方法的特徵在於：所述薄膜金屬片的厚度為20 μm以下的厚度，所述中間金屬片的厚度為30 μm以上且40 μm以下的厚度。Further, the metal mask manufacturing method of the present invention is characterized in that the thickness of the thin metal foil is 20 μm or less, and the thickness of the intermediate metal foil is 30 μm or more and 40 μm or less.

而且，本發明的金屬罩幕製造方法的特徵在於：所述薄膜金屬片的厚度為20 μm以下的厚度，所述中間金屬片的厚度為60 μm以上且100 μm以下的厚度，且於在所述中間金屬片的被雷射焊接的位置的所述薄膜金屬片側的表面形成著凹狀部。Further, the metal mask manufacturing method of the present invention is characterized in that the thickness of the thin metal foil is 20 μm or less, and the thickness of the intermediate metal foil is 60 μm or more and 100 μm or less. The surface of the intermediate metal piece on the side of the thin film metal piece at the position where the laser is welded forms a concave portion.

而且，本發明的金屬罩幕製造方法的特徵在於：所述凹狀部的深度為如下深度，即，較藉由所述雷射焊接形成於所述中間金屬片的表面的焊接塊金（nugget）的高度深，且為所述中間金屬片的厚度的一半以下。 [發明的效果]Moreover, the metal mask manufacturing method of the present invention is characterized in that the depth of the concave portion is a depth, that is, a solder nugget formed by the laser welding on the surface of the intermediate metal piece (nugget) The height is deep and is less than half of the thickness of the intermediate metal piece. [Effects of the Invention]

根據本發明的金屬罩幕製造方法，可容易地製造高精細度的金屬罩幕。According to the metal mask manufacturing method of the present invention, a high-definition metal mask can be easily manufactured.

以下，參照圖式，對本發明的實施形態的金屬罩幕製造方法，以製造有機EL元件的製造步驟中進行真空蒸鍍時所使用的金屬罩幕的情況為例進行說明。圖1是從上方觀察藉由實施形態的金屬罩幕製造方法製造的金屬罩幕的立體圖。如圖1所示，金屬罩幕2包含罩幕框4、中間金屬片6、薄膜金屬片8、及間隙金屬片10。In the following, a metal mask manufacturing method according to an embodiment of the present invention will be described as an example of a metal mask used for vacuum vapor deposition in the manufacturing process of manufacturing an organic EL element. Fig. 1 is a perspective view of a metal mask manufactured by the metal mask manufacturing method of the embodiment as seen from above. As shown in FIG. 1, the metal cover 2 includes a mask frame 4, an intermediate metal piece 6, a film metal piece 8, and a gap metal piece 10.

如圖2所示，罩幕框4為中央具有矩形狀的開口部4c（參照圖3）的金屬製框。此處，開口部4c由沿罩幕框4的短邊方向延伸的兩根短邊框部4a與沿罩幕框4的長邊方向延伸的兩根長邊框部4b而包圍。而且，短邊框部4a配置於與長邊框部4b正交的方向上，兩根短邊框部4a及兩根長邊框部4b分別隔著開口部4c而相向。另外，與中間金屬片6、薄膜金屬片8及間隙金屬片10相比，罩幕框4具有充分的厚度。As shown in FIG. 2, the mask frame 4 is a metal frame having a rectangular opening portion 4c (see FIG. 3) at the center. Here, the opening portion 4c is surrounded by two short frame portions 4a extending in the short side direction of the mask frame 4 and two long frame portions 4b extending in the longitudinal direction of the mask frame 4. Further, the short frame portion 4a is disposed in a direction orthogonal to the long frame portion 4b, and the two short frame portions 4a and the two long frame portions 4b face each other via the opening portion 4c. Further, the mask frame 4 has a sufficient thickness as compared with the intermediate metal piece 6, the film metal piece 8, and the gap metal piece 10.

中間金屬片6是於製造金屬罩幕2時，為了使薄膜金屬片8容易焊接而使用的長條的金屬板。中間金屬片6具有60 μm～100 μm的厚度，以長邊方向與長邊框部4b的長邊方向平行的方式載置於長邊框部4b上。而且，對成為焊接對象的位置即焊接位置6a（參照圖5）的載置薄膜金屬片8一側的面實施蝕刻加工，藉由該蝕刻加工而在焊接位置6a形成著凹狀部。此處，形成於焊接位置6a的凹狀部的深度為如下深度，即，較藉由雷射焊接形成於中間金屬片6的表面的焊接塊金7d（參照圖6）的高度深，且為中間金屬片6的厚度的一半以下。The intermediate metal piece 6 is a long metal plate used to facilitate the welding of the film metal piece 8 when the metal cover 2 is manufactured. The intermediate metal piece 6 has a thickness of 60 μm to 100 μm, and is placed on the long frame portion 4b so that the longitudinal direction thereof is parallel to the longitudinal direction of the long frame portion 4b. Then, the surface on which the film metal piece 8 is placed at the welding position 6a (see FIG. 5) which is the position to be welded is etched, and the concave portion is formed at the welding position 6a by the etching. Here, the depth of the concave portion formed at the welding position 6a is a depth which is deeper than the height of the welded gold 7d (refer to FIG. 6) formed by laser welding on the surface of the intermediate metal piece 6, and is Less than half of the thickness of the intermediate metal piece 6.

薄膜金屬片8為厚度20 μm以下的長條的金屬薄板，以長邊方向與中間金屬片6的長邊方向正交的方式載置於中間金屬片6。另外，於製造金屬罩幕2的過程中，薄膜金屬片8的長邊方向的兩端部8a焊接於中間金屬片6。The thin film metal piece 8 is a long thin metal plate having a thickness of 20 μm or less, and is placed on the intermediate metal piece 6 so that the longitudinal direction thereof is orthogonal to the longitudinal direction of the intermediate metal piece 6. Further, in the process of manufacturing the metal mask 2, both end portions 8a of the thin film metal piece 8 in the longitudinal direction are welded to the intermediate metal piece 6.

間隙金屬片10為配置於薄膜金屬片8與薄膜金屬片8的間隙的長條的金屬板。另外，間隙金屬片10的長邊方向的長度形成得較薄膜金屬片8的長邊方向的長度短。The gap metal piece 10 is a long metal plate disposed in the gap between the film metal piece 8 and the film metal piece 8. Further, the length of the gap metal piece 10 in the longitudinal direction is formed to be shorter than the length of the thin film metal piece 8 in the longitudinal direction.

其次，參照圖式對實施形態的金屬罩幕製造方法進行說明。首先，如圖3所示，間隙金屬片10載置於罩幕框4。此處，間隙金屬片10以長邊方向的兩端部位於構成罩幕框4的長邊框部4b的位置的方式跨越罩幕框4的開口部4c而載置於罩幕框4。Next, a method of manufacturing a metal mask according to an embodiment will be described with reference to the drawings. First, as shown in FIG. 3, the gap metal piece 10 is placed on the mask frame 4. Here, the gap metal piece 10 is placed on the mask frame 4 across the opening 4c of the mask frame 4 so that both end portions in the longitudinal direction are located at positions of the long frame portion 4b constituting the mask frame 4.

其次，自未圖示的金屬罩幕製造裝置中具備的未圖示的焊接用噴嘴射出雷射光，而將各間隙金屬片10的兩端部焊接於長邊框部4b。Then, the welding nozzles (not shown) provided in the metal curtain manufacturing apparatus (not shown) emit laser light, and both end portions of the gap metal sheets 10 are welded to the long frame portion 4b.

其次，如圖4所示，以中間金屬片6的長邊方向與長邊框部4b的長邊方向平行的方式，將中間金屬片6載置於罩幕框4的長邊框部4b（第1載置步驟）。另外，間隙金屬片10的端部位於較載置中間金屬片6的位置更靠開口部4c側，因而即便將中間金屬片6載置於長邊框部4b，間隙金屬片10的端部的位置與中間金屬片6的位置亦不會重複。Next, as shown in FIG. 4, the intermediate metal piece 6 is placed on the long frame portion 4b of the mask frame 4 so that the longitudinal direction of the intermediate metal piece 6 is parallel to the longitudinal direction of the long frame portion 4b (first Placement step). Further, the end portion of the gap metal piece 10 is located closer to the opening portion 4c than the position at which the intermediate metal piece 6 is placed, so that even if the intermediate metal piece 6 is placed on the long frame portion 4b, the position of the end portion of the gap metal piece 10 is The position of the intermediate metal piece 6 is also not repeated.

接下來，金屬罩幕製造裝置將焊接用噴嘴的位置對準中間金屬片6的焊接位置6a的正上方而自焊接用噴嘴射出雷射光，如圖5所示，對焊接位置6a照射雷射光14（第1焊接步驟）。另外，圖5是將長邊框部4b及中間金屬片6沿長邊方向切斷的情況下的剖視圖。藉此，如圖6所示，焊接位置6a的被照射雷射光14的部分熔解而向下方變形，變形的熔解部分7的下方與罩幕框4接觸，從而於熔解部分7的上方形成焊接塊金7d。Next, the metal mask manufacturing apparatus irradiates the laser beam from the welding nozzle with the position of the welding nozzle aligned with the welding position 6a of the intermediate metal piece 6, and irradiates the welding position 6a with the laser beam 14 as shown in FIG. (1st welding step). In addition, FIG. 5 is a cross-sectional view of the case where the long frame portion 4b and the intermediate metal piece 6 are cut along the longitudinal direction. Thereby, as shown in FIG. 6, the portion of the welding position 6a to be irradiated with the laser light 14 is melted and deformed downward, and the lower portion of the deformed melting portion 7 is in contact with the mask frame 4, thereby forming a soldering block above the melting portion 7. Gold 7d.

若熔解部分7的下方與罩幕框4接觸，則與熔解部分7的下方接觸的罩幕框4的接觸位置4f因自中間金屬片6的熔解部分7傳遞的熱而熔解，從而使得中間金屬片6的熔解部分7與罩幕框4的接觸位置4f被焊接。If the lower portion of the melting portion 7 is in contact with the mask frame 4, the contact position 4f of the mask frame 4 that is in contact with the lower portion of the melting portion 7 is melted by heat transferred from the melting portion 7 of the intermediate metal piece 6, thereby making the intermediate metal The contact portion 4f of the melted portion 7 of the sheet 6 and the mask frame 4 is welded.

另外，如所述般，形成於焊接位置6a的凹狀部的深度因形成得較焊接塊金7d的高度深，故於藉由雷射光14而焊接位置6a熔解並形成焊接塊金7d的情況下，焊接塊金7d的高度不會超過焊接位置6a以外的位置的金屬片表面的高度。因此，即便在例如將寬幅的薄膜金屬片8載置於中間金屬片6，而薄膜金屬片8的寬度方向的端部覆蓋形成於焊接位置6a的焊接塊金7d的部分的情況下，亦可維持載置於中間金屬片6的薄膜金屬片8的平面度。Further, as described above, since the depth of the concave portion formed at the welding position 6a is deeper than the height of the welded gold 7d, the welding position 6a is melted by the laser light 14 and the welded gold 7d is formed. Next, the height of the welded gold 7d does not exceed the height of the surface of the metal sheet at a position other than the welding position 6a. Therefore, even if, for example, a wide film metal sheet 8 is placed on the intermediate metal piece 6, and the end portion in the width direction of the film metal piece 8 covers the portion of the welded gold 7d formed at the welding position 6a, The flatness of the film metal sheet 8 placed on the intermediate metal piece 6 can be maintained.

其次，如圖7所示，將薄膜金屬片8載置於已於罩幕框4的長邊框部4b焊接的中間金屬片6之上（第2載置步驟）。此處，薄膜金屬片8以長邊方向的兩端部8a位於中間金屬片6的位置的方式跨越罩幕框4的開口部4c而載置於中間金屬片6（參照圖1）。接下來，金屬罩幕製造裝置使焊接噴嘴的位置對準薄膜金屬片8的焊接位置的正上方而將雷射光14照射至焊接位置（第2焊接步驟）。藉此，如圖8所示，被照射雷射光14的部分熔解而向下方變形，變形的熔解部分9的下方與中間金屬片6接觸，從而於熔解部分9的上方形成焊接塊金9d。Next, as shown in Fig. 7, the film metal piece 8 is placed on the intermediate metal piece 6 which has been welded to the long frame portion 4b of the mask frame 4 (second mounting step). Here, the film metal piece 8 is placed on the intermediate metal piece 6 (see FIG. 1) across the opening 4c of the mask frame 4 so that both end portions 8a in the longitudinal direction are located at the position of the intermediate metal piece 6. Next, the metal mask manufacturing apparatus irradiates the laser beam 14 to the welding position by aligning the position of the welding nozzle with the welding position of the film metal sheet 8 (second welding step). As a result, as shown in FIG. 8, the portion irradiated with the laser light 14 is melted and deformed downward, and the lower portion of the deformed molten portion 9 comes into contact with the intermediate metal piece 6, whereby the welded gold 9d is formed above the molten portion 9.

若熔解部分9的下方與中間金屬片6接觸，則與熔解部分9的下方接觸的中間金屬片6的接觸位置6f，因自中間金屬片6的熔解部分9傳遞的熱而熔解。藉此，薄膜金屬片8的熔解部分9與中間金屬片6的接觸位置6f被焊接，從而完成圖1所示的金屬罩幕2。When the lower portion of the molten portion 9 is in contact with the intermediate metal piece 6, the contact position 6f of the intermediate metal piece 6 which is in contact with the lower side of the molten portion 9 is melted by the heat transmitted from the molten portion 9 of the intermediate metal piece 6. Thereby, the contact position 6f of the molten portion 9 of the thin film metal piece 8 and the intermediate metal piece 6 is welded, thereby completing the metal cover 2 shown in Fig. 1.

圖9是表示將薄膜金屬片8焊接於中間金屬片6的情況下的導熱狀態的概念圖，圖10表示如先前般將薄膜金屬片80直接焊接於罩幕框40的情況下的導熱狀態的概念圖。Fig. 9 is a conceptual view showing a heat conduction state in the case where the thin film metal piece 8 is welded to the intermediate metal piece 6, and Fig. 10 shows a heat conduction state in the case where the film metal piece 80 is directly welded to the mask frame 40 as before. Concept map.

此處，將雷射光14、雷射光140照射至薄膜金屬片8、薄膜金屬片80的情況下的被焊接構件的導熱量E由以下的數式（1）表示。Here, the heat transfer amount E of the member to be welded in the case where the laser light 14 and the laser light 140 are irradiated to the thin film metal piece 8 and the thin film metal piece 80 is represented by the following formula (1).

導熱量E（W）＝被焊接的部分的面積A（mm 2）/被焊接構件的厚度B（μm）×被焊接構件的導熱率C（W/mK）×雷射光的溫度D（℃）…（1） 另外，在將薄膜金屬片8焊接於中間金屬片6的情況下、及將薄膜金屬片80直接焊接於罩幕框40的情況下的任一情況下，被焊接的部分的面積A（mm 2）、雷射光的溫度D（℃）均不會發生變化。而且，被焊接構件的導熱率C（W/mK）無論於被焊接構件為中間金屬片6還是罩幕框40均不會發生變化。因此，僅被焊接構件的厚度B（μm）對被焊接構件的導熱量E（W）造成影響。具體而言，被焊接構件的厚度B（μm）越厚，被焊接構件的導熱量E（W）越小，被焊接構件達到熔點為止的時間延長。另一方面，被焊接構件的厚度B（μm）越薄，被焊接構件的導熱量E（W）越大，被焊接構件達到熔點為止的時間縮短。 The heat transfer amount E(W) = the area A (mm 2 ) of the portion to be welded / the thickness B (μm) of the member to be welded × the thermal conductivity C (W/mK) of the member to be welded × the temperature D (°C) of the laser light (1) Further, in the case where the thin film metal piece 8 is welded to the intermediate metal piece 6, and the case where the thin film metal piece 80 is directly welded to the mask frame 40, the area of the portion to be welded A (mm 2 ), the temperature D (°C) of the laser light does not change. Further, the thermal conductivity C (W/mK) of the member to be welded does not change regardless of whether the member to be welded is the intermediate metal piece 6 or the mask frame 40. Therefore, only the thickness B (μm) of the member to be welded affects the heat transfer amount E (W) of the member to be welded. Specifically, the thicker the thickness B (μm) of the member to be welded, the smaller the heat transfer amount E(W) of the member to be welded, and the longer the time until the welded member reaches the melting point. On the other hand, the thinner the thickness B (μm) of the member to be welded, the larger the heat transfer amount E (W) of the member to be welded, and the shorter the time until the welded member reaches the melting point.

因此，如圖9所示，將厚度較罩幕框4薄的中間金屬片6作為薄膜金屬片8的被焊接構件的情況下直至中間金屬片6的接觸位置6f達到熔點為止的時間，要較如圖10所示將罩幕框40直接作為薄膜金屬片80的被焊接構件的情況下直至罩幕框40的接觸位置40f達到熔點的時間短。由此，藉由使薄膜金屬片8與罩幕框4之間夾著厚度較罩幕框4薄的中間金屬片6，並將中間金屬片6作為薄膜金屬片8的被焊接構件，而可縮小從薄膜金屬片8的被照射雷射光14的部分熔解開始到中間金屬片6的接觸位置6f達到熔點為止的時間上的間隔。Therefore, as shown in Fig. 9, when the intermediate metal piece 6 having a thickness smaller than that of the mask frame 4 is used as the member to be welded of the film metal piece 8, until the contact position 6f of the intermediate metal piece 6 reaches the melting point, As shown in FIG. 10, when the mask frame 40 is directly used as the member to be welded of the film metal sheet 80, the time until the contact position 40f of the mask frame 40 reaches the melting point is short. Thereby, the intermediate metal piece 6 having a thickness thinner than the mask frame 4 is sandwiched between the thin film metal piece 8 and the mask frame 4, and the intermediate metal piece 6 is used as the welded member of the film metal piece 8. The time interval from the partial melting of the irradiated laser light 14 of the thin film metal piece 8 to the contact position 6f of the intermediate metal piece 6 to the melting point is reduced.

由此，不會如先前般，於被焊接構件熔解前在薄膜金屬片開孔，且可配合薄膜金屬片8的熔解而使中間金屬片6熔解，從而可於準確的時機將薄膜金屬片8焊接於中間金屬片6。Thereby, the film metal sheet is not opened before the member to be welded is melted as before, and the intermediate metal sheet 6 can be melted by the melting of the film metal sheet 8, so that the film metal sheet 8 can be formed at an accurate timing. Soldered to the intermediate metal sheet 6.

根據本實施形態的金屬罩幕製造方法，將中間金屬片6暫時焊接於罩幕框4，進而將薄膜金屬片8焊接於中間金屬片6，藉此可準確地焊接罩幕框4、中間金屬片6、薄膜金屬片8，因而可容易地製造高精細度的金屬罩幕。According to the metal mask manufacturing method of the present embodiment, the intermediate metal piece 6 is temporarily welded to the mask frame 4, and the thin film metal piece 8 is welded to the intermediate metal piece 6, whereby the mask frame 4 and the intermediate metal can be accurately welded. The sheet 6, the film metal sheet 8, can thus easily produce a high-definition metal mask.

而且，所述實施形態中，中間金屬片6只要可將薄膜金屬片8焊接，則亦可不必為長條狀。Further, in the above-described embodiment, the intermediate metal piece 6 may not necessarily have a long shape as long as the film metal piece 8 can be welded.

而且，所述實施形態中，中間金屬片6的厚度亦可不必為60 μm～100 μm的厚度，只要其厚度較薄膜金屬片8厚且為薄膜金屬片8的厚度的5倍以下即可。Further, in the above-described embodiment, the thickness of the intermediate metal piece 6 does not need to be a thickness of 60 μm to 100 μm, and the thickness thereof may be thicker than the thin film metal piece 8 and may be five times or less the thickness of the thin film metal piece 8.

而且，所述實施形態中，亦可不必對中間金屬片6實施蝕刻加工。該情況下，中間金屬片6的厚度較佳為30 μm以上且40 μm以下的厚度。Further, in the above embodiment, it is not necessary to perform etching processing on the intermediate metal piece 6. In this case, the thickness of the intermediate metal piece 6 is preferably 30 μm or more and 40 μm or less.

而且，所述實施形態中，罩幕框4具備兩根短邊框部4a及兩根長邊框部4b，亦可具備相同長度的四根框。Further, in the above-described embodiment, the mask frame 4 includes two short frame portions 4a and two long frame portions 4b, and may have four frames of the same length.

而且，所述實施形態中，中間金屬片6亦可以長邊方向與短邊框部4a的長邊方向平行的方式載置於短邊框部4a上。Further, in the above-described embodiment, the intermediate metal piece 6 may be placed on the short frame portion 4a so that the longitudinal direction thereof is parallel to the longitudinal direction of the short frame portion 4a.

2：金屬罩幕 4、40：罩幕框 4a：短邊框部 4b：長邊框部 4c：開口部 4f、6f、40f：接觸位置 6：中間金屬片 6a：焊接位置 7、9：熔解部分 7d、9d：焊接塊金 8、80：薄膜金屬片 8a：兩端部 10：間隙金屬片 14、140：雷射光 A：被焊接的部分的面積 B：被焊接構件的厚度2: metal mask 4, 40: mask frame 4a: short frame portion 4b: long frame portion 4c: opening portions 4f, 6f, 40f: contact position 6: intermediate metal piece 6a: welding position 7, 9: melting portion 7d , 9d: Welded nugget gold 8, 80: film metal sheet 8a: both end portions 10: gap metal sheet 14, 140: laser light A: area of the portion to be welded B: thickness of the member to be welded

圖1是從上方觀察藉由實施形態的金屬罩幕製造方法製造的金屬罩幕的立體圖。 圖2是從上方觀察實施形態的金屬罩幕製造方法中使用的罩幕框的立體圖。 圖3是表示實施形態的金屬罩幕製造方法中將間隙金屬片載置於罩幕框的狀態的立體圖。 圖4是表示實施形態的金屬罩幕製造方法中將中間金屬片載置於罩幕框的狀態的立體圖。 圖5是表示實施形態的金屬罩幕製造方法中對載置於罩幕框的中間金屬片照射雷射光的狀態的剖視圖。 圖6是表示實施形態的金屬罩幕製造方法中載置於罩幕框的中間金屬片藉由雷射光而熔解後的狀態的剖視圖。 圖7是表示實施形態的金屬罩幕製造方法中對載置於中間金屬片的薄膜金屬片照射雷射光後的狀態的剖視圖。 圖8是表示實施形態的金屬罩幕製造方法中載置於中間金屬片的薄膜金屬片藉由雷射光而熔解後的狀態的剖視圖。 圖9是表示實施形態的金屬罩幕製造方法中將薄膜金屬片焊接於中間金屬片的情況下的導熱狀態的概念圖。 圖10是表示現有的金屬罩幕製造方法中將薄膜金屬片直接焊接於金屬框的情況下的導熱狀態的概念圖。Fig. 1 is a perspective view of a metal mask manufactured by the metal mask manufacturing method of the embodiment as seen from above. Fig. 2 is a perspective view of the mask frame used in the method of manufacturing a metal mask of the embodiment as seen from above. 3 is a perspective view showing a state in which a gap metal piece is placed on a mask frame in the method of manufacturing a metal mask according to the embodiment. 4 is a perspective view showing a state in which an intermediate metal piece is placed on a mask frame in the method of manufacturing a metal mask according to the embodiment. Fig. 5 is a cross-sectional view showing a state in which the intermediate metal piece placed on the mask frame is irradiated with laser light in the method of manufacturing a metal mask according to the embodiment. Fig. 6 is a cross-sectional view showing a state in which an intermediate metal piece placed on a mask frame is melted by laser light in the method of manufacturing a metal mask according to the embodiment. Fig. 7 is a cross-sectional view showing a state in which a thin film metal piece placed on an intermediate metal piece is irradiated with laser light in the method of manufacturing a metal mask according to the embodiment. 8 is a cross-sectional view showing a state in which a thin film metal piece placed on an intermediate metal piece is melted by laser light in the method of manufacturing a metal mask according to the embodiment. Fig. 9 is a conceptual view showing a heat conduction state in the case where a thin metal foil is welded to an intermediate metal piece in the method of manufacturing a metal mask according to the embodiment. Fig. 10 is a conceptual view showing a heat conduction state in a case where a thin film metal piece is directly welded to a metal frame in the conventional metal mask manufacturing method.

2：金屬罩幕 4：罩幕框 6：中間金屬片 6a：焊接位置 8：薄膜金屬片 8a：兩端部 10：間隙金屬片2: metal cover 4: mask frame 6: intermediate metal piece 6a: welding position 8: film metal piece 8a: both ends 10: gap metal piece

Claims (6)

一種金屬罩幕製造方法，其將薄膜金屬片雷射焊接於罩幕框而製造金屬罩幕，所述金屬罩幕製造方法的特徵在於包括：第1載置步驟，將中間金屬片載置於所述罩幕框，其中所述中間金屬片是厚度較所述薄膜金屬片厚，且為所述薄膜金屬片的厚度的3倍以上且5倍以下的厚度，且形成著較焊接塊金的高度深的凹狀部，其中所述焊接塊金是藉由雷射焊接形成於所述中間金屬片的被雷射焊接於所述罩幕框的焊接位置的所述薄膜金屬片側的表面；第1焊接步驟，將已載置在所述罩幕框的所述中間金屬片的焊接位置雷射焊接於所述罩幕框；第2載置步驟，將所述薄膜金屬片載置於已載置在所述罩幕框的所述中間金屬片之上；以及第2焊接步驟，將已載置在所述中間金屬片的所述薄膜金屬片雷射焊接於所述中間金屬片。 A metal mask manufacturing method for manufacturing a metal mask by laser welding a thin film metal sheet to a mask frame, the metal mask manufacturing method comprising: a first mounting step of placing the intermediate metal sheet The mask frame, wherein the intermediate metal piece is thicker than the thin film metal piece and is 3 times or more and 5 times or less thinner than the thickness of the thin film metal piece, and is formed by soldering gold a highly deep concave portion, wherein the solder nugget is formed by laser welding on a surface of the intermediate metal piece that is laser welded to the film metal sheet side of the welding position of the mask frame; a welding step of laser welding the welding position of the intermediate metal piece placed on the mask frame to the mask frame; and a second mounting step of loading the film metal piece on the loaded And disposed on the intermediate metal piece of the mask frame; and a second welding step of laser welding the thin film metal piece placed on the intermediate metal piece to the intermediate metal piece. 如申請專利範圍第1項所述的金屬罩幕製造方法，其中所述罩幕框包括：構成相向的兩邊的第1框部，以及於與所述第1框部正交的方向上構成相向的兩邊的第2框部，所述中間金屬片載置於所述罩幕框的相向的兩邊的所述第1框部或相向的兩邊的所述第2框部。 The method of manufacturing a metal mask according to claim 1, wherein the mask frame includes: a first frame portion constituting opposite sides, and a direction facing the first frame portion In the second frame portion on both sides, the intermediate metal piece is placed on the first frame portion on the opposite sides of the mask frame or the second frame portion on the opposite sides. 如申請專利範圍第2項所述的金屬罩幕製造方法，其中所述中間金屬片具有長條狀的形狀，以長邊方向與所述第1框 部或所述第2框部的長邊方向平行的方式載置於所述第1框部或所述第2框部。 The method of manufacturing a metal mask according to claim 2, wherein the intermediate metal piece has an elongated shape with a longitudinal direction and the first frame. The first frame portion or the second frame portion is placed on the first frame portion or the second frame portion in such a manner that the longitudinal direction of the second frame portion is parallel. 如申請專利範圍第2項或第3項所述的金屬罩幕製造方法，其中所述薄膜金屬片具有長條狀的形狀，在使長邊方向與所述中間金屬片的長邊方向正交，且長邊方向的兩端部以跨越由所述第1框部與所述第2框部所形成的所述罩幕框的開口部的狀態下載置於所述中間金屬片。 The method of manufacturing a metal mask according to claim 2, wherein the thin film metal sheet has a strip shape in which a longitudinal direction is orthogonal to a longitudinal direction of the intermediate metal sheet. Both end portions in the longitudinal direction are downloaded and placed on the intermediate metal piece in a state of crossing the opening of the mask frame formed by the first frame portion and the second frame portion. 如申請專利範圍第1項至第3項中任一項所述的金屬罩幕製造方法，其中所述薄膜金屬片的厚度為20μm以下的厚度，所述中間金屬片的厚度為60μm以上且100μm以下的厚度。 The metal mask manufacturing method according to any one of claims 1 to 3, wherein the thickness of the thin metal sheet is 20 μm or less, and the thickness of the intermediate metal sheet is 60 μm or more and 100 μm. The thickness below. 如申請專利範圍第1項至第3項中任一項所述的金屬罩幕製造方法，其中所述凹狀部的深度為較藉由所述雷射焊接形成於所述中間金屬片的表面的焊接塊金的高度深，且為所述中間金屬片的厚度的一半以下的深度。 The metal mask manufacturing method according to any one of claims 1 to 3, wherein a depth of the concave portion is formed on a surface of the intermediate metal sheet by the laser welding. The height of the solder nugget is deep and is less than half the thickness of the intermediate metal piece.
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