TWI580925B - Method and apparatus for measuring thickness using color camera - Google Patents
Method and apparatus for measuring thickness using color camera Download PDFInfo
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- TWI580925B TWI580925B TW105103523A TW105103523A TWI580925B TW I580925 B TWI580925 B TW I580925B TW 105103523 A TW105103523 A TW 105103523A TW 105103523 A TW105103523 A TW 105103523A TW I580925 B TWI580925 B TW I580925B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
Description
本發明係關於：用於使用彩色攝像機來測量厚度的方法和設備，及本發明係更為特定地關於：用於使用彩色攝像機來測量厚度的方法和設備，其中複數個波長被同時地掃描以快速地測量薄膜層的厚度。 The present invention relates to a method and apparatus for measuring thickness using a color camera, and more particularly to a method and apparatus for measuring thickness using a color camera in which a plurality of wavelengths are simultaneously scanned The thickness of the film layer is measured quickly.
隨著在所有的最近的工業領域中的技術的快速的發展，已經需要將微型製造用於：半導體、微機電系統(MEMS)、平板顯示器、光學元件和類似者，以及目前需要：奈米級的超精度製造。此外，所需要的製造模式已經變得複雜，因而強調：測量細薄膜層的厚度的重要性。 With the rapid development of technology in all of the recent industrial fields, there is a need to use microfabrication for: semiconductors, microelectromechanical systems (MEMS), flat panel displays, optical components and the like, as well as current needs: nanoscale Ultra precision manufacturing. Furthermore, the required manufacturing mode has become complicated, thus emphasizing the importance of measuring the thickness of the thin film layer.
已經廣泛地用於測量薄膜層的厚度和反射率的設備係根據：反射測量術。反射計(該反射計在廣義上被稱為：薄膜層測量系統)係：可測量多層薄膜的特性和直接地測量目標物體而無需特定的準備或程序的非接觸式的和非破壞性的測量設備。 Equipment that has been widely used to measure the thickness and reflectivity of a film layer is based on: reflectometry. A reflectometer (referred to in a broad sense as a thin film layer measurement system) is a non-contact and non-destructive measurement that measures the properties of a multilayer film and directly measures the target object without the need for specific preparation or procedures. device.
第1圖係用於解釋使用傳統的反射計來測量厚度的方法的示圖。 Fig. 1 is a diagram for explaining a method of measuring a thickness using a conventional reflectometer.
參照至第1圖，傳統的反射計執行與就來自白色光源的光且於預先決定的間隔處的波長的數目相同的次數的掃描和經由黑白攝像機來獲取：位於分別的波長處的光強度訊號11、12，及13。然後，在分別的波長處獲取的該等複數個光強度訊號11、12，及13被合成以繪製：反射率相對於整個光譜的曲線圖，因此根據反射曲線圖來測量薄膜層的厚度係可能的。 Referring to Figure 1, a conventional reflectometer performs a scan of the same number of times as the number of wavelengths at a predetermined interval from light from a white source and is acquired via a black and white camera: light intensity signals at respective wavelengths 11, 12, and 13. Then, the plurality of light intensity signals 11, 12, and 13 acquired at the respective wavelengths are synthesized to plot a reflectance with respect to the entire spectrum, and thus the thickness of the film layer may be measured according to the reflection curve. of.
然而，傳統的厚度-測量方法具有：獲取該等複數個光強度訊號所耗用的時間被延遲的問題(因為該等複數個光強度訊號在許多的波長處被獲取且同時相對於從白色光源發射的光的整個光譜來執行掃描)。獲取光強度訊號的時間的延遲直接地與厚度-測量設備的效能相關，因而使得厚度-測量設備具有每次的低測量-效能。 However, the conventional thickness-measurement method has the problem that the time taken to acquire the plurality of light intensity signals is delayed (because the plurality of light intensity signals are acquired at a plurality of wavelengths and simultaneously with respect to the slave white light source The entire spectrum of the emitted light is used to perform the scan). The delay in the time to obtain the light intensity signal is directly related to the performance of the thickness-measuring device, thus making the thickness-measuring device have a low measurement-efficiency each time.
從而，構想本發明以解決前述的問題，及本發明的態樣提供：用於使用彩色攝像機來測量厚度的方法和設備，其中複數個波長在白色光的該等複數個波長範圍中被濾除，及光強度訊號同時地在分別的該等波長範圍內被獲取，藉此顯著地改善：厚度測量設備的測量速度。 Accordingly, the present invention is conceived to solve the foregoing problems, and aspects of the present invention provide a method and apparatus for measuring thickness using a color camera in which a plurality of wavelengths are filtered out in the plurality of wavelength ranges of white light And the light intensity signals are simultaneously acquired in the respective wavelength ranges, thereby significantly improving the measurement speed of the thickness measuring device.
根據本發明的實施例，其中提供有使用彩色攝像機來測量厚度的方法，該方法利用一白色光源、用於自從白色光源發射的光中濾除複數個離散波長的一聲-光可調濾光器(AOTF)，及該彩色攝像機用於獲取從一 物體反射的光強度訊號，及該方法包含：一濾除操作，該濾除操作用於經由該聲-光可調濾光器濾除在從該白色光源發射的光的複數個波長範圍內的複數個波長；一光強度獲取操作，該光強度獲取操作用於經由該彩色攝像機來同時地獲取在該等複數個波長範圍內的該等複數個波長的光強度訊號；一掃描操作，該掃描操作用於藉由重覆地執行濾除操作和光強度獲取操作且同時執行與在位於每一波長範圍內的預先決定的間隔處的波長的數目相同的次數的掃描來同時地獲取在該等波長範圍的每一波長範圍內的該等複數個光強度訊號；及一曲線圖繪製操作，該曲線圖繪製操作用於將該等複數個光強度訊號合成以繪製反射率相對於整個光譜的曲線圖。 According to an embodiment of the present invention, there is provided a method of measuring thickness using a color camera, which utilizes a white light source, an audible-light tunable filter for filtering out a plurality of discrete wavelengths from light emitted from a white light source (AOTF), and the color camera is used to get from one a light intensity signal reflected by the object, and the method comprising: a filtering operation for filtering out a plurality of wavelength ranges of light emitted from the white light source via the acousto-optic tunable filter a plurality of wavelengths; a light intensity acquisition operation for simultaneously acquiring light intensity signals of the plurality of wavelengths in the plurality of wavelength ranges via the color camera; a scanning operation, the scanning Operation for simultaneously acquiring the wavelengths at the same time by performing a filtering operation and a light intensity acquisition operation repeatedly while performing the same number of times as the number of wavelengths at a predetermined interval within each wavelength range The plurality of light intensity signals in each wavelength range of the range; and a graph drawing operation for synthesizing the plurality of light intensity signals to plot a reflectance versus the entire spectrum .
濾除操作可包含：同時地濾除在紅色波長範圍、綠色波長範圍，及藍色波長範圍內的波長。 The filtering operation may include simultaneously filtering out wavelengths in the red wavelength range, the green wavelength range, and the blue wavelength range.
根據本發明的另一實施例，其中提供有一種用於使用攝像機來測量厚度的設備，該設備包含：一白色光源；一聲-光可調濾光器(AOTF)，該聲-光可調濾光器濾除在從該白色光源發射的光的複數個波長範圍內的複數個波長；一光束分離器，該光束分離器使得由該聲-光可調濾光器濾除的光行進至一物體；一彩色攝像機，該彩色攝像機同時地獲取在從該物體反射的光的複數個波長範圍內的複數個波長的光強度訊號；一聲-光可調濾光器控制器，該聲-光可調濾光器控制器傳送用於執行與在位於分別的該等波長範圍內的預先決定的間隔處 的波長的數目相同的次數的掃描的聲-光可調濾光器濾除訊號，以獲取在分別的該等波長範圍內的複數個光強度訊號；及一圖像處理器，該圖像處理器用於將該等複數個光強度訊號合成以繪製反射率相對於整個光譜的曲線圖。 According to another embodiment of the present invention, there is provided an apparatus for measuring thickness using a camera, the apparatus comprising: a white light source; an acousto-optic tunable filter (AOTF), the sound-light adjustable The filter filters a plurality of wavelengths in a plurality of wavelength ranges of light emitted from the white light source; a beam splitter that causes light filtered by the acousto-optic tunable filter to travel to An object; a color camera that simultaneously acquires a plurality of wavelengths of light intensity signals in a plurality of wavelength ranges of light reflected from the object; an acoustic-light tunable filter controller, the sound An optically tunable filter controller transmits for execution at predetermined intervals within the respective wavelength ranges The number of wavelengths is the same number of times the scanned acousto-optic tunable filter filters the signals to obtain a plurality of light intensity signals in the respective wavelength ranges; and an image processor that processes the image The device is configured to synthesize the plurality of light intensity signals to plot a plot of reflectance relative to the entire spectrum.
聲-光可調濾光器可同時地濾除在紅色波長範圍、綠色波長範圍，及藍色波長範圍內的波長。 The acousto-optic tunable filter simultaneously filters out wavelengths in the red, green, and blue wavelength ranges.
1‧‧‧基材 1‧‧‧Substrate
2‧‧‧薄膜層 2‧‧‧film layer
3‧‧‧物體 3‧‧‧ objects
11、12、13‧‧‧光強度訊號 11,12,13‧‧‧Light intensity signal
100‧‧‧設備 100‧‧‧ Equipment
110‧‧‧白色光源 110‧‧‧White light source
120‧‧‧聲-光可調濾光器 120‧‧‧Acoustic-light tunable filter
130‧‧‧聲-光可調濾光器控制器 130‧‧‧Acoustic-light tunable filter controller
140‧‧‧光束分離器 140‧‧‧beam splitter
150‧‧‧彩色攝像機 150‧‧‧Color camera
160‧‧‧圖像處理器 160‧‧‧Image Processor
20‧‧‧波長範圍 20‧‧‧wavelength range
21‧‧‧波長 21‧‧‧ wavelength
22‧‧‧光強度訊號 22‧‧‧Light intensity signal
30‧‧‧波長範圍 30‧‧‧wavelength range
31‧‧‧波長 31‧‧‧ wavelength
32‧‧‧光強度訊號 32‧‧‧Light intensity signal
40‧‧‧波長範圍 40‧‧‧wavelength range
41‧‧‧波長 41‧‧‧ wavelength
42‧‧‧光強度訊號 42‧‧‧Light intensity signal
本發明的上述的及/或其他的態樣將從示例性的實施例的後續的描述(其中該描述與隨附的圖式相結合)中變得明顯的和更為容易地理解的，其中： 第1圖係用於解釋使用反射計來測量厚度的傳統的方法的示圖。 The above and/or other aspects of the present invention will become apparent and more readily understood from the following description of the exemplary embodiments, in which the description and the accompanying drawings. : Fig. 1 is a diagram for explaining a conventional method of measuring a thickness using a reflectometer.
第2圖係根據本發明的實施例的一示圖，該示圖顯示：用於使用彩色攝像機來測量厚度的設備。 Figure 2 is a diagram showing an apparatus for measuring thickness using a color camera, in accordance with an embodiment of the present invention.
第3圖係根據本發明的實施例的一示圖，該示圖顯示：使用彩色攝像機來測量厚度的方法；及第4圖係一示圖，該示圖顯示藉由使用第3圖的彩色攝像機來測量厚度的方法所繪製的反射曲線圖。 Figure 3 is a diagram showing a method of measuring thickness using a color camera; and Figure 4 is a diagram showing color by using Figure 3, in accordance with an embodiment of the present invention; The reflection curve drawn by the camera to measure the thickness.
在下文中，根據本發明的用於使用彩色攝像機來測量厚度的方法和設備的實施例將參照隨附的圖式詳細地被描述。 In the following, embodiments of a method and apparatus for measuring thickness using a color camera according to the present invention will be described in detail with reference to the accompanying drawings.
第2圖係根據本發明的實施例的一示圖，該示圖顯示：用於使用彩色攝像機來測量厚度的設備，第3圖係根據本發明的實施例的一示圖，該示圖顯示：使用彩色攝像機來測量厚度的方法，及第4圖係一示圖，該示圖顯示：藉由使用第3圖的彩色攝像機來測量厚度的方法所繪示的反射曲線圖。 2 is a view showing an apparatus for measuring a thickness using a color camera according to an embodiment of the present invention, and FIG. 3 is a view showing an embodiment according to an embodiment of the present invention, the diagram showing : A method of measuring a thickness using a color camera, and a diagram showing a reflection diagram of a method of measuring thickness by using the color camera of FIG.
參照第2圖至第4圖，根據本發明的一種用於使用彩色攝像機來測量厚度的設備100包含：白色光源110、聲-光可調濾光器120、聲-光可調濾光器控制器130、光束分離器140、彩色攝像機150，及圖像處理器160。在此示例性的實施例中，將藉由示例的方式來描述：待由設備100測量而用以測量厚度的物體3包含：基材1和被施用至基材1的薄膜層2。 Referring to Figures 2 through 4, an apparatus 100 for measuring thickness using a color camera according to the present invention includes: a white light source 110, an acousto-optic tunable filter 120, and an acousto-optic tunable filter control The device 130, the beam splitter 140, the color camera 150, and the image processor 160. In this exemplary embodiment, it will be described by way of example that the object 3 to be measured by the device 100 to measure the thickness comprises: a substrate 1 and a film layer 2 applied to the substrate 1.
白色光源110係用於發射白色光的光源，及可包含鹵素燈、發光二極體(LED)等等。在白色光源110的背面，用於準直從白色光源110發射的白色光的準直透鏡，或類似者可被排置。 The white light source 110 is a light source for emitting white light, and may include a halogen lamp, a light emitting diode (LED), or the like. On the back side of the white light source 110, a collimating lens for collimating white light emitted from the white light source 110, or the like, may be arranged.
聲-光可調濾光器(AOTF)120可濾除：在從白色光源110發射的光的複數個波長範圍20、30，及40內的複數個波長21、31，及41。一般而言，聲-光可調濾光器120可濾除：相對於整個光譜的光的某個波長，或可濾除：在涉及於光中的複數個波長範圍內的複數個離散波長。 An acousto-optic tunable filter (AOTF) 120 can filter out a plurality of wavelengths 21, 31, and 41 within a plurality of wavelength ranges 20, 30, and 40 of light emitted from the white light source 110. In general, the acousto-optic tunable filter 120 can filter out: a certain wavelength of light relative to the entire spectrum, or can filter out: a plurality of discrete wavelengths in a plurality of wavelength ranges involved in the light.
參照第3圖，根據此實施例的聲-光可調濾光器120可同時地濾除：在紅色波長範圍20內的一個波長21、在綠色波長範圍30內的一個波長31，及在藍色波長範圍40內的一個波長41。因此，具有由聲-光可調濾光器120分別地從紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40中濾除的3個離散波長21、31，及41的光行進至物體3。 Referring to FIG. 3, the acousto-optic tunable filter 120 according to this embodiment can simultaneously filter out: one wavelength 21 in the red wavelength range 20, one wavelength 31 in the green wavelength range 30, and in the blue One wavelength 41 within the color wavelength range 40. Therefore, the light having the three discrete wavelengths 21, 31, and 41 filtered by the acousto-optic tunable filter 120 from the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40, respectively, proceeds to Object 3.
光束分離器140使得具有由聲-光可調濾光器120濾除的3個離散波長21、31，及41的光行進至物體3。再者，從物體3反射的光藉由光束分離器140進入彩色攝像機150，以及前述者將隨後被描述。 The beam splitter 140 causes light having three discrete wavelengths 21, 31, and 41 filtered by the acousto-optic tunable filter 120 to travel to the object 3. Furthermore, the light reflected from the object 3 enters the color camera 150 by the beam splitter 140, and the foregoing will be described later.
彩色攝像機150被排置在物體3的上方和同時地獲取：具有在從物體3反射的光的該等複數個波長範圍20、30，及40內的該等複數個波長21、31，及41的光強度訊號。 The color camera 150 is disposed above the object 3 and simultaneously acquired: the plurality of wavelengths 21, 31, and 41 within the plurality of wavelength ranges 20, 30, and 40 of the light reflected from the object 3. Light intensity signal.
當具有分別地在紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40內被濾除的3個離散波長21、31，及41的光從物體3反射和進入彩色攝像機150，彩色攝像機150可經由3個通道(意即：紅色通道、綠色通道，及藍色通道)同時地獲取：3個波長21、31，及41的光強度訊號。 When the light having three discrete wavelengths 21, 31, and 41 filtered out in the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40, respectively, is reflected from the object 3 and enters the color camera 150, the color camera 150 can simultaneously acquire three light intensity signals of wavelengths 21, 31, and 41 via three channels (ie, red channel, green channel, and blue channel).
一般而言，具有用於待進行測量的區域的適當數目的像素的電荷耦合裝置(CCD)攝像機被使用以 作為：彩色攝像機150。在彩色攝像機150的前面，聚光鏡可被排置以聚集來自光束分離器140的入射光。 In general, a charge coupled device (CCD) camera having an appropriate number of pixels for the area to be measured is used As: color camera 150. In front of the color camera 150, the concentrating mirrors can be arranged to collect incident light from the beam splitter 140.
聲-光可調濾光器控制器130傳送用於執行與在位於分別的波長範圍20、30，及40內的預先決定的間隔處的波長的數目相同的次數的掃描的濾除訊號至聲-光可調濾光器120。 The acousto-optic tunable filter controller 130 transmits a filtered signal to the sound for performing the same number of times as the number of wavelengths at predetermined intervals within the respective wavelength ranges 20, 30, and 40. - Light tunable filter 120.
參照第3圖，聲-光可調濾光器控制器130傳送用於同時地濾除在紅色波長範圍20內的一個波長21、在綠色波長範圍30內的一個波長31，及在藍色波長範圍40內的一個波長41的濾除訊號給聲-光可調濾光器120。然後，聲-光可調濾光器控制器130傳送用於藉由位於紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40的每一波長範圍內的預先決定的間隔來增加或減少波長的濾除訊號以為了掃描在相對應的波長範圍內的波長給聲-光可調濾光器120。 Referring to FIG. 3, the acousto-optic tunable filter controller 130 transmits for simultaneously filtering out one wavelength 21 in the red wavelength range 20, one wavelength 31 in the green wavelength range 30, and the blue wavelength. A filtered signal of wavelength 41 within range 40 is applied to acousto-optic tunable filter 120. The acousto-optic tunable filter controller 130 then transmits for increasing or decreasing by a predetermined interval in each of the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40. The wavelength filtering signal is applied to the acousto-optic tunable filter 120 for scanning wavelengths in the corresponding wavelength range.
舉例而言，令700~610nm為紅色波長範圍20、令570~500nm為綠色波長範圍30，及令500~450nm為藍色波長範圍40。在此情況中，聲-光可調濾光器控制器130可傳送用於同時地濾除在紅色波長範圍20內的610nm的波長21、在綠色波長範圍30內的500nm的波長31，及在藍色波長範圍40內的450的波長41的濾除訊號給聲-光可調濾光器120。然後，聲-光可調濾光器控制器130傳送用於藉由在波長範圍20、30，及40的每一波長範圍內將波長增加10nm的濾除訊 號以為了執行在波長範圍20、30，及40的每一波長範圍內的整個波長的掃描給聲-光可調濾光器120。 For example, let 700~610nm be the red wavelength range 20, 570~500nm be the green wavelength range 30, and 500~450nm be the blue wavelength range 40. In this case, the acousto-optic tunable filter controller 130 can transmit a wavelength 21 of 610 nm in the red wavelength range 20, a wavelength 31 of 500 nm in the green wavelength range 30, and The filtered signal of wavelength 41 of 450 in the blue wavelength range 40 is supplied to the acousto-optic tunable filter 120. The acousto-optic tunable filter controller 130 then transmits a filtering signal for increasing the wavelength by 10 nm in each of the wavelength ranges 20, 30, and 40. The signal is tuned to the acousto-optic tunable filter 120 in order to perform a scan of the entire wavelength in each of the wavelength ranges 20, 30, and 40.
利用此些程序，同時地獲取相對於在波長範圍20、30，及40的每一波長範圍中且在紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40內的10nm的間隔處的整個波長的該等複數個光強度訊號22、32，及42係可能的。 With such a procedure, simultaneous acquisition is obtained at intervals of 10 nm in each of the wavelength ranges 20, 30, and 40 and in the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40. The plurality of light intensity signals 22, 32, and 42 of the entire wavelength are possible.
圖像處理器160將該等複數個光強度訊號22、32，及42合成以繪製：反射率相對於整個光譜的曲線圖50。 Image processor 160 synthesizes the plurality of light intensity signals 22, 32, and 42 to plot a plot 50 of reflectivity relative to the entire spectrum.
因為3個波長範圍20、30，及40的光強度訊號22、32，及42係同時地經由彩色攝像機150的紅色通道、綠色通道，及藍色通道獲取的，根據本發明的實施例的用於測量厚度的設備相較於傳統的設備可更為快速地獲取光強度訊號。 Since the light intensity signals 22, 32, and 42 of the three wavelength ranges 20, 30, and 40 are simultaneously acquired via the red channel, the green channel, and the blue channel of the color camera 150, the use according to an embodiment of the present invention Devices that measure thickness can acquire light intensity signals more quickly than traditional devices.
像這樣地，若從分別的波長範圍20、30，及40獲取的光強度訊號22、32，及42被合成，繪製光強度相對於從物體3反射的光的整個光譜的曲線圖係可能的。然後，若將相對於從物體3反射的光的整個光譜的光強度訊號除以相對於入射物體3的光的整個光譜的光強度訊號，繪製反射率相對於整個光譜的曲線圖50係可能的。 In this manner, if the light intensity signals 22, 32, and 42 obtained from the respective wavelength ranges 20, 30, and 40 are combined, it is possible to plot a curve of the light intensity with respect to the entire spectrum of the light reflected from the object 3. . Then, if the light intensity signal of the entire spectrum of the light reflected from the object 3 is divided by the light intensity signal of the entire spectrum of the light incident on the object 3, it is possible to plot the reflectance with respect to the entire spectrum. .
在繪製前述的在位於薄膜層2上的分別的位置處的反射曲線圖50之後，根據反射曲線圖50來測量薄 膜層2的位於相對應的位置的厚度係可能的。因為根據反射曲線圖50來測量薄膜層2的厚度的方法對於習知技藝者而言為熟知的，將忽略其詳細的描述。 After drawing the aforementioned reflection graph 50 at the respective positions on the film layer 2, the thin film is measured according to the reflection graph 50. The thickness of the film layer 2 at the corresponding position is possible. Since the method of measuring the thickness of the film layer 2 according to the reflection profile 50 is well known to those skilled in the art, a detailed description thereof will be omitted.
利用前述的用於使用彩色攝像機來測量厚度的設備100，根據本發明而使用彩色攝像機來測量厚度的方法將於後文中描述。 With the aforementioned apparatus 100 for measuring the thickness using a color camera, a method of measuring the thickness using a color camera according to the present invention will be described later.
參照第2圖至第4圖，根據此實施例的測量彩色攝像機的方法包含：濾除操作、光強度獲取操作、掃描操作，及曲線圖繪製操作。 Referring to FIGS. 2 to 4, the method of measuring a color camera according to this embodiment includes: a filtering operation, a light intensity obtaining operation, a scanning operation, and a graph drawing operation.
濾除操作利用聲-光可調濾光器120以濾除在從白色光源110發射的光的該等複數個波長範圍20、30，及40內的該等複數個波長21、31，及41。 The filtering operation utilizes an acousto-optic tunable filter 120 to filter out the plurality of wavelengths 21, 31, and 41 within the plurality of wavelength ranges 20, 30, and 40 of the light emitted from the white source 110. .
參照第3圖，根據此實施例的濾除操作同時地濾除在紅色波長範圍20內的一個波長21、在綠色波長範圍30內的一個波長31，及在藍色波長範圍40內的一個波長41。因此，具有由聲-光可調濾光器120分別地從紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40濾除的3個離散波長21、31，及41的光行進至物體3。 Referring to FIG. 3, the filtering operation according to this embodiment simultaneously filters out one wavelength 21 in the red wavelength range 20, one wavelength 31 in the green wavelength range 30, and one wavelength in the blue wavelength range 40. 41. Therefore, light having three discrete wavelengths 21, 31, and 41 filtered by the acousto-optic tunable filter 120 from the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40, respectively, travels to the object. 3.
光強度獲取操作利用彩色攝像機150以同時地獲取在該等複數個波長範圍20、30，及40內的該等複數個波長21、31，及41的光強度訊號。 The light intensity acquisition operation utilizes a color camera 150 to simultaneously acquire the light intensity signals of the plurality of wavelengths 21, 31, and 41 within the plurality of wavelength ranges 20, 30, and 40.
若具有分別地從紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40濾除的3個離散波長21、31，及41的光係從物體3反射和入射彩色攝像機150， 彩色攝像機150經由3個通道(意即：紅色通道、綠色通道，及藍色通道)同時地獲取3個波長21、31，及41的光強度訊號。 If the light systems having the three discrete wavelengths 21, 31, and 41 filtered out from the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40, respectively, are reflected from the object 3 and incident on the color camera 150, The color camera 150 simultaneously acquires light intensity signals of three wavelengths 21, 31, and 41 via three channels (ie, a red channel, a green channel, and a blue channel).
掃描操作同時地獲取在波長範圍20、30，及40的每一波長範圍內的該等複數個光強度訊號22、32，及42。 The scanning operation simultaneously acquires the plurality of light intensity signals 22, 32, and 42 in each of the wavelength ranges 20, 30, and 40.
聲-光可調濾光器控制器130傳送用於藉由在紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40的每一波長範圍內的預先決定的間隔來增加或減少波長以藉此掃描在相對應的波長範圍內的波長的濾除訊號給聲-光可調濾光器120。 The acousto-optic tunable filter controller 130 transmits for increasing or decreasing the wavelength by a predetermined interval in each of the red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40. Thereby, the filtering signal of the wavelength in the corresponding wavelength range is scanned for the acousto-optic tunable filter 120.
若重覆地執行濾除操作和光強度獲取操作且同時分別地掃描在3個波長範圍20、30，及40中的波長，該等複數個光強度訊號22、32，及42係同時地從在紅色波長範圍20、綠色波長範圍30，及藍色波長範圍40(特定地，從在整個波長中選擇的離散波長)內的所有的波長獲取的。 If the filtering operation and the light intensity obtaining operation are repeatedly performed while simultaneously scanning the wavelengths in the three wavelength ranges 20, 30, and 40, the plurality of light intensity signals 22, 32, and 42 are simultaneously The red wavelength range 20, the green wavelength range 30, and the blue wavelength range 40 (specifically, from discrete wavelengths selected throughout the wavelength) are acquired.
曲線圖繪製操作將該等複數個光強度訊號22、32，及42合成以繪製反射率相對於整個光譜的曲線圖50。 The graph plotting operation synthesizes the plurality of light intensity signals 22, 32, and 42 to plot a plot 50 of reflectance versus the entire spectrum.
藉由將在分別的波長範圍20、30，及40內獲取的光強度訊號22、32，及42合成的方式，繪製光強度相對於從物體3反射的光的整個光譜的曲線圖係可能的。然後，若將相對於從物體3反射的光的整個光譜的 光強度訊號除以相對於入射物體3的光的整個光譜的光強度訊號，繪製反射率相對於整個光譜的曲線圖50係可能的。 By synthesizing the light intensity signals 22, 32, and 42 acquired in the respective wavelength ranges 20, 30, and 40, it is possible to plot a curve of the light intensity with respect to the entire spectrum of the light reflected from the object 3. . Then, if it is relative to the entire spectrum of light reflected from the object 3 The light intensity signal is divided by the light intensity signal of the entire spectrum of light relative to the incident object 3, and it is possible to plot the reflectance relative to the entire spectrum.
於繪製前述的在位於薄膜層2上的分別的位置處的反射曲線圖50之後，根據反射曲線圖50來測量薄膜層2的位於相對應的位置處的厚度係可能的。因為根據反射曲線圖50來測量薄膜層2的厚度的方法對於習知技藝者為熟知的，將忽略其詳細的描述。 After drawing the aforementioned reflection profile 50 at the respective positions on the film layer 2, it is possible to measure the thickness of the film layer 2 at the corresponding position according to the reflection profile 50. Since the method of measuring the thickness of the film layer 2 according to the reflection profile 50 is well known to those skilled in the art, a detailed description thereof will be omitted.
利用前述的用於使用彩色攝像機來測量厚度的方法和設備，該等複數個波長在白色光的該等複數個波長範圍中被濾除，及光強度訊號同時地在分別的波長範圍內被獲取，藉此顯著地改善：測量薄膜層的厚度的速度。 Using the foregoing method and apparatus for measuring thickness using a color camera, the plurality of wavelengths are filtered out in the plurality of wavelength ranges of white light, and the light intensity signals are simultaneously acquired in separate wavelength ranges Thereby, the speed of measuring the thickness of the film layer is significantly improved.
如同前文所描述者，用於使用彩色攝像機來測量厚度的方法和設備可顯著地改善：測量薄膜層的厚度的速度。 As described above, the method and apparatus for measuring thickness using a color camera can significantly improve the speed of measuring the thickness of the film layer.
雖然本發明的一些示例性的實施例已經被顯示和描述，將由彼些習知技藝者理解到：可在此些實施例中作出改變而不偏離本發明的原理和精神，本發明的範疇被界定在隨附的申請專利範圍和其等效者中。 While a few exemplary embodiments of the invention have been shown and described, it will be understood by those skilled in the art It is defined in the scope of the accompanying patent application and its equivalent.
1‧‧‧基材 1‧‧‧Substrate
2‧‧‧薄膜層 2‧‧‧film layer
3‧‧‧物體 3‧‧‧ objects
100‧‧‧設備 100‧‧‧ Equipment
110‧‧‧白色光源 110‧‧‧White light source
120‧‧‧聲-光可調濾光器 120‧‧‧Acoustic-light tunable filter
130‧‧‧聲-光可調濾光器控制器 130‧‧‧Acoustic-light tunable filter controller
140‧‧‧光束分離器 140‧‧‧beam splitter
150‧‧‧彩色攝像機 150‧‧‧Color camera
160‧‧‧圖像處理器 160‧‧‧Image Processor
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