CN105937882B - Method and apparatus for using colour TV camera measurement thickness - Google Patents
Method and apparatus for using colour TV camera measurement thickness Download PDFInfo
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- CN105937882B CN105937882B CN201610122109.1A CN201610122109A CN105937882B CN 105937882 B CN105937882 B CN 105937882B CN 201610122109 A CN201610122109 A CN 201610122109A CN 105937882 B CN105937882 B CN 105937882B
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- light
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- wavelength
- light intensity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of method and apparatus using colour TV camera measurement thickness, this method includes filtering operation, luminous intensity acquisition operation, scan operation and curve graph production operation.Filtering operation is filtered by acousto-optic tunable filter to from multiple wavelength in the multiple wave-length coverages for the light that white light source emits.Luminous intensity obtains the light intensity signal for multiple wavelength that operation is obtained by colour TV camera simultaneously in multiple wave-length coverages.Scan operation executed at a predetermined interval in each wave-length coverage in the case where wavelength scanning as much by repeating filtering operation and luminous intensity obtains to operate and obtains multiple light intensity signals in each wave-length coverage in wave-length coverage.Curve graph production operation synthesizes multiple light intensity signals to make curve graph of the reflectivity about whole spectrum.
Description
Technical field
The present invention relates to for use colour TV camera measurement thickness method and apparatus, and more particularly, to
In the method and apparatus using colour TV camera measurement thickness, wherein scanning multiple wavelength simultaneously with the thickness of rapid survey film layer
Degree.
Background technique
With the rapid development of the technology throughout current all industrial circles, for semiconductor, microelectromechanical systems
(MEMS), flat-panel monitor, optical component etc. require microfabrication, and need nanoscale Ultra-precision Turning now.This
Outside, required processing graphic pattern becomes complicated, and therefore, the importance for measuring the thickness of fine film layer becomes prominent.
It is widely used in and reflectometry is based on to the device that the thickness and reflectivity of film layer measure.Broadly by
The reflectometer of referred to as film layer measuring system is contactless and lossless measuring device, which can be to plural layers
Characteristic measure and not special preparation or processing in the case where directly measure target object.
Fig. 1 is the diagram by illustrating to measure the method for thickness based on using typical reflection.
Referring to Fig.1, typical reflection meter is carried out and the scanning of wavelength as much at a predetermined interval using the light from white light source
And light intensity signal 11, light intensity signal 12 and light intensity signal 13 are obtained at each wavelength by B/W camera.So
Afterwards, multiple light intensity signals 11, light intensity signal 12 and the light intensity signal 13 that synthesis obtains at each wavelength are anti-to draw
Curve graph of the rate about whole spectrum (whole spectra) is penetrated, and therefore can be measured based on reflectance curve figure thin
The thickness of film layer.
However, conventional method for measuring thickness has following problems: due in the whole about the light emitted from white light source
Spectrum obtains multiple light intensity signals in the case where executing scanning at multiple wavelength, so obtaining multiple light intensity signal institutes
The time of cost is delayed by.The delay for obtaining the time of light intensity signal is directly related to the performance of measurer for thickness, and
Therefore cause measurer for thickness that there is the low measurement performance in the unit time.
Summary of the invention
Therefore, present invention seek to address that the above problem, and it is an aspect of the present invention to provide for using colored camera shooting
The method and apparatus that machine measures thickness, wherein being filtered in multiple wave-length coverages of white light to multiple wavelength, and each
Light intensity signal is obtained simultaneously in wave-length coverage, to significantly improve the measuring speed of measurer for thickness.
Embodiment according to the present invention, provides a kind of method using colour TV camera measurement thickness, and this method is adopted
With white light source, acousto-optic tunable filter (AOTF) and colour TV camera, the acousto-optic tunable filter (AOTF) be used for come since
Multiple discrete wavelengths of the light of white light source transmitting are filtered, which is used to obtain the luminous intensity letter reflected from object
Number, and this method comprises: filtering operation, the filtering operation are used for through acousto-optic tunable filter to the light emitted from white light source
Multiple wave-length coverages in multiple wavelength be filtered；Luminous intensity obtains operation, which obtains operation for passing through coloured silk
Color video camera obtains the light intensity signal of multiple wavelength in above-mentioned multiple wave-length coverages simultaneously；Scan operation, the scan operation
Filtering is repeated in the case where for by being executed at a predetermined interval in each wave-length coverage with wavelength scanning as much
Operation and luminous intensity obtain the multiple light intensity signals operated in each wave-length coverage to obtain wave-length coverage simultaneously；And it is bent
Line chart production operation, curve graph production operation is for synthesizing multiple light intensity signals to make reflectivity about whole spectrum
Curve graph.
Filtering operation may include simultaneously to the wave in red wavelength range, green color wavelength range and blue wavelength region
Length is filtered.
It is according to the present invention it is another embodiment there is provided it is a kind of for use video camera measurement thickness device, the dress
Setting includes: white light source；Acousto-optic tunable filter (AOTF), the acousto-optic tunable filter (AOTF) are used for emitting from white light source
Multiple wavelength in multiple wave-length coverages of light are filtered；Beam splitter, the beam splitter for make by acousto-optic tunable filter into
The light of row filtering advances to object；Colour TV camera, the colour TV camera are used for while obtaining the multiple of the light reflected from object
The light intensity signal of multiple wavelength in wave-length coverage；Acousto-optic tunable filter controller, the acousto-optic tunable filter controller
For to acousto-optic tunable filter send in each wave-length coverage at a predetermined interval execute with the scanning of wavelength as much with
Obtain the filtering signal of multiple light intensity signals in each wave-length coverage；And image processor, the image processor is for closing
At multiple light intensity signals to make curve graph of the reflectivity about whole spectrum.
Acousto-optic tunable filter can be simultaneously in red wavelength range, green color wavelength range and blue wavelength region
Wavelength is filtered.
Detailed description of the invention
In conjunction with attached drawing according to the description of following illustrative embodiments, above-mentioned and/or other aspects of the invention will become
Understand and it is more readily appreciated that in the accompanying drawings:
Fig. 1 is the diagram for illustrating the conventional method using reflectometry thickness；
Fig. 2 is the figure for the device using colour TV camera measurement thickness for showing embodiment according to the present invention
Show；
Fig. 3 is the diagram for showing the method using colour TV camera measurement thickness of embodiment according to the present invention；With
And
Fig. 4 is to show the reflectance curve figure drawn by the method for measuring thickness using colour TV camera of Fig. 3
Diagram.
Specific embodiment
Hereinafter, it will be described in detail with reference to the accompanying drawings the method according to the present invention for using colour TV camera measurement thickness
With the embodiment of device.
Fig. 2 is the figure for the device using colour TV camera measurement thickness for showing embodiment according to the present invention
Show, Fig. 3 is the diagram and Fig. 4 for showing the method using colour TV camera measurement thickness of embodiment according to the present invention
It is the diagram for showing the reflectance curve figure drawn by the method for measuring thickness using colour TV camera of Fig. 3.
Referring to Figure 2 to Figure 4, the device 100 according to the present invention for using colour TV camera measurement thickness includes white light
Source 110, acousto-optic tunable filter 120, acousto-optic tunable filter controller 130, beam splitter 140, colour TV camera 150 and figure
As processor 160.In this illustrative embodiments, it can describe by way of example by the device for measuring thickness
Object 3 measured by 100 includes substrate 1 and the film layer 2 being applied on substrate 1.
White light source 110 is that the light source and white light source 110 for emitting white light may include halogen lamp, light emitting diode
(LED) etc..The collimation for being collimated to the white light emitted from white light source 110 can be disposed with behind white light source 110
Lens etc..
Acousto-optic tunable filter (AOTF) 120 can multiple wave-length coverages 20 to the light emitted from white light source 110, wavelength
Multiple wavelength 21, wavelength 31 and wavelength 41 in range 30 and wave-length coverage 40 are filtered.Generally, the adjustable filter of acousto-optic
Wave device 120 can be filtered the specific wavelength relative to whole spectrum of light, or can be to multiple waves involved in light
Multiple discrete wavelengths in long range are filtered.
Referring to Fig. 3, acousto-optic tunable filter 120 according to the present embodiment can be simultaneously in red wavelength range 20
A wavelength 31 in one wavelength 21, green color wavelength range 30 and a wavelength 41 in blue wavelength region 40 are filtered
Wave.Therefore, have through acousto-optic tunable filter 120 respectively from red wavelength range 20, green color wavelength range 30 and blue
The light of three discrete wavelengths 21, discrete wavelength 31 and discrete wavelength 41 that wave-length coverage 40 is filtered advances to object 3.
Beam splitter 140 makes with three discrete wavelengths 21, discrete wavelengths being filtered by acousto-optic tunable filter 120
31 and the light of discrete wavelength 41 advance to object 3.In addition, the light reflected from object 3 enters colored camera shooting via beam splitter 140
Machine 150, this will be explained hereinafter.
Colour TV camera 150 is arranged in the top of object 3 and at the same time obtaining light intensity signal, and the light intensity signal has
Have from multiple wavelength 21, the wave in the multiple wave-length coverages 20, wave-length coverage 30 and wave-length coverage 40 of the light that object 3 is reflected
Length 31 and wavelength 41.
It is filtered in red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 respectively when having
Three discrete wavelengths 21, discrete wavelength 31 and discrete wavelength 41 light reflected from object 3 and enter colour TV camera 150
When, colour TV camera 150 can obtain simultaneously three waves by three channel, that is, red channels, green channel and blue channel
Long 21, the light intensity signal of wavelength 31 and wavelength 41.
Generally, having is suitble to charge-coupled device (CCD) video camera of the pixel number in region to be measured to be used as colour
Video camera 150.Collector lens can be disposed with before colour TV camera 150 to gather the incident light from beam splitter 140.
Acousto-optic tunable filter controller 130 is transmitted to acousto-optic tunable filter 120 in respective wavelength range 20, wave
The filtering signal with the scanning of wavelength as much is executed in long range 30 and wave-length coverage 40 at a predetermined interval.
Referring to Fig. 3, acousto-optic tunable filter controller 130 is sent to acousto-optic tunable filter 120 for simultaneously to red
One in the wavelength 31 and blue wavelength region 40 in a wavelength 21, green color wavelength range 30 in wave-length coverage 20
The filtering signal that a wavelength 41 is filtered.Then, acousto-optic tunable filter controller 130 is sent out to acousto-optic tunable filter 120
Send in each wave-length coverage in red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 with pre-
Fixed interval increaseds or decreases wavelength, so that the filtering signal being scanned to the wavelength within the scope of respective wavelength.
For example, it is assumed that 700nm~610nm be red wavelength range 20,570nm~500nm be green color wavelength range 30 with
And 500nm~450nm is blue wavelength region 40.In this case, acousto-optic tunable filter controller 130 can be to acousto-optic
Tunable filter 120 is sent for simultaneously in the wavelength 21 of the 610nm in red wavelength range 20, green color wavelength range 30
The filtering signal that the wavelength 31 of 500nm and the wavelength 41 of the 450nm in blue wavelength region 40 are filtered.Then, acousto-optic
Tunable filter controller 130 is sent to acousto-optic tunable filter 120 in wave-length coverage 20, wave-length coverage 30 and wavelength
Wavelength is increased into 10nm in each wave-length coverage in range 40, so as to wave-length coverage 20, wave-length coverage 30 and wavelength
The filtering signal that the entire wavelength in each wave-length coverage in range 40 is scanned.
It, can be in red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 using these processing
With the interval of 10nm relative to the entire wave in each wave-length coverage of wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
It grows while obtaining multiple light intensity signals 22, light intensity signal 32 and light intensity signal 42.
Image processor 160 synthesizes multiple light intensity signals 22, light intensity signal 32 and light intensity signal 42 to make
Curve graph 50 of the reflectivity about whole spectrum.
Since red channel, green channel and the blue channel by colour TV camera 150 obtain three wavelength simultaneously
Light intensity signal 22, light intensity signal 32 and the light intensity signal 42 of range 20, wave-length coverage 30 and wave-length coverage 40, institute
Light intensity can be obtained more quickly with the device for measuring thickness compared to conventional equipment, embodiment according to the present invention
Spend signal.
In this way, if the light intensity signal 22, the light that are obtained from each wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
Strength signal 32 and light intensity signal 42 are synthesized, then the luminous intensity of the light reflected from object 3 can be drawn out about complete
The curve graph of portion's spectrum.Then, if the light intensity signal about whole spectrum of the light reflected from object 3 is divided by being incident on object
The light intensity signal about whole spectrum of the light of body 3, then curve graph 50 of the reflectivity about whole spectrum can be drawn out.
After reflectance curve Figure 50 above-mentioned to the corresponding position in film layer 2 makes, it can be based on
Reflectance curve Figure 50 measures film layer 2 in the thickness of corresponding position.Because to those skilled in the art based on anti-
The method for penetrating rate curve graph 50 to measure the thickness of film layer 2 is well known, so omitting detailed description.
It will be described below using the device 100 being previously described for using colour TV camera measurement thickness, according to the present invention
Using colour TV camera measurement thickness method.
Referring to Figure 2 to Figure 4, the method using colour TV camera measurement thickness according to the present embodiment includes filtering behaviour
Make, luminous intensity obtains operation, scan operation and curve graph production operate.
Filtering operation is using multiple wave-length coverages 20 of the acousto-optic tunable filter 120 to the light emitted from white light source 110, wave
Multiple wavelength 21, wavelength 31 and wavelength 41 in long range 30 and wave-length coverage 40 are filtered.
Referring to Fig. 3, filtering operation according to the present embodiment is simultaneously to the wavelength 21, green in red wavelength range 20
A wavelength 31 in color wave-length coverage 30 and a wavelength 41 in blue wavelength region 40 are filtered.Therefore, have
By acousto-optic tunable filter 120 respectively from red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 into
The light of three discrete wavelengths 21, discrete wavelength 31 and discrete wavelength 41 that row filters advances to object 3.
Luminous intensity obtain operation using colour TV camera 150 simultaneously obtain multiple wave-length coverages 20, wave-length coverage 30 and
The light intensity signal of multiple wavelength 21, wavelength 31 and wavelength 41 in wave-length coverage 40.
It is filtered respectively from red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 if had
Three discrete wavelengths 21, discrete wavelength 31 and discrete wavelength 41 light reflected from object 3 and be incident on colour TV camera
150, then colour TV camera 150 obtains three by three channel, that is, red channels, green channel and blue channel simultaneously
The light intensity signal of wavelength 21, wavelength 31 and wavelength 41.
Scan operation is obtained simultaneously in each wave-length coverage of wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
Multiple light intensity signals 22, light intensity signal 32 and light intensity signal 42.
Acousto-optic tunable filter controller 130 is sent to acousto-optic tunable filter 120 in red wavelength range 20, green
In each wave-length coverage in color wave-length coverage 30 and blue wavelength region 40 at a predetermined interval by wavelength increased or decrease from
And to the filtering signal that the wavelength within the scope of respective wavelength is scanned.
If in the case where scanning the wavelength in three wave-length coverages 20, wave-length coverage 30 and wave-length coverage 40 respectively
It repeats filtering operation and luminous intensity obtains operation, then from red wavelength range 20, green color wavelength range 30 and blue
Multiple luminous intensity letters are obtained simultaneously in all wavelengths (particularly, from the discrete wavelength selected from whole wavelength) in wave-length coverage 40
Numbers 22, light intensity signal 32 and light intensity signal 42.
Curve graph production operation synthesizes multiple light intensity signals 22, light intensity signal 32 and light intensity signal 42 to make
Curve graph 50 of the reflectivity about whole spectrum.
By synthesize obtained in each wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40 light intensity signal 22,
Light intensity signal 32 and light intensity signal 42 can make song of the luminous intensity of the light reflected from object 3 about whole spectrum
Line chart.Then, if the light intensity signal about whole spectrum of the light reflected from object 3 is divided by the light for being incident on object 3
About the light intensity signal of whole spectrum, then curve graph 50 of the reflectivity about whole spectrum can be produced.
After reflectance curve Figure 50 above-mentioned to the corresponding position in film layer 2 makes, it can be based on
Reflectance curve Figure 50 measures film layer 2 in the thickness of corresponding position.Because to those skilled in the art based on anti-
The method for penetrating rate curve graph 50 to measure the thickness of film layer 2 is well known, so omitting detailed description.
Using the method and apparatus for being previously described for measuring thickness using colour TV camera, in multiple wave-length coverages of white light
In multiple wavelength are filtered, and in each wave-length coverage simultaneously obtain light intensity signal, to significantly improve to film
The speed that the thickness of layer measures.
As described above, for that can be significantly improved using the method and apparatus of colour TV camera measurement thickness to film layer
The speed that thickness measures.
Although some illustrative embodiments of the invention have shown and described, it will be understood by a person skilled in the art that,
It can modify to these embodiments under the premise of not departing from the principle of the invention and spirit, the scope of the present invention is by appended
Claim and its equivalent limit.
Claims (2)
1. a kind of method using colour TV camera measurement thickness, the method use white light source, acousto-optic tunable filter and institute
State colour TV camera, the acousto-optic tunable filter be used for multiple discrete wavelengths of the light for emit since the white light source into
Row filtering, the colour TV camera be used for obtains from object reflection light intensity signal, and the described method includes:
Filtering operation, the filtering operation are used for through the acousto-optic tunable filter simultaneously to the light emitted from the white light source
Red wavelength range, three discrete wavelengths in green color wavelength range and blue wavelength region are filtered respectively；
Luminous intensity obtains operation, the luminous intensity obtain operation for make with filtered out as the acousto-optic tunable filter described in
The corresponding light of three discrete wavelengths is to the object, and is obtained from the object and reflected simultaneously by the colour TV camera
Light respectively at three discrete wavelengths in the red wavelength range, green color wavelength range and blue wavelength region
Light intensity signal；
Scan operation, the scan operation pass through in the red wavelength range, green color wavelength range and blue wavelength region
Each of in increased or decrease repeat the filtering operation under wavelength case and the luminous intensity obtains at a predetermined interval
Multiple light intensity signals of entire wavelength in each wave-length coverage of the extract operation to obtain the wave-length coverage；And
Curve graph production operation, the curve graph production operation is for synthesizing in the red wavelength range, green color wavelength range
And the multiple light intensity signal of whole of the entire wavelength of blue wavelength region acquisition is to make reflectivity about whole light
The curve graph of spectrum；
Wherein the curve graph production operation is to be made by synthesizing acquired the multiple light intensity signal of whole from institute
State curve graph of the luminous intensity about whole spectrum of the light of object reflection, and the light by will be reflected from the object about
The light intensity signal of whole spectrum is divided by the light intensity signal about whole spectrum for the light for being incident on the object to make
State curve graph of the reflectivity about whole spectrum.
2. a kind of for using the device of video camera measurement thickness, described device includes:
White light source；
Acousto-optic tunable filter, the acousto-optic tunable filter is for the red wavelength simultaneously to the light emitted from the white light source
Three discrete wavelengths in range, green color wavelength range and blue wavelength region are filtered respectively；
Beam splitter, the beam splitter are used for the three discrete wave appearance for making with being filtered by the acousto-optic tunable filter
Corresponding light advances to object；
Colour TV camera, the colour TV camera are used for while obtaining the red wavelength model of the light reflected from the object
It encloses, the light intensity signal of three discrete wavelengths in green color wavelength range and blue wavelength region；
Acousto-optic tunable filter controller, the acousto-optic tunable filter controller are used for acousto-optic tunable filter transmission
Increase at a predetermined interval in each of the red wavelength range, green color wavelength range and blue wavelength region and adds deduct
Small wavelength executes the entire length scanning in each wave-length coverage to obtain the letter of multiple luminous intensities in each wave-length coverage
Number filtering signal；And
Image processor, described image processor is for synthesizing in the red wavelength range, green color wavelength range and blue
The multiple light intensity signal of whole for the entire wavelength that wave-length coverage obtains is to make curve of the reflectivity about whole spectrum
Figure；
Wherein described image processor is to be made by synthesizing acquired the multiple light intensity signal of whole from the object
Curve graph of the luminous intensity about whole spectrum of the light of body reflection, and the light by will be reflected from the object about whole
The light intensity signal of spectrum makes described anti-divided by the light intensity signal about whole spectrum for the light for being incident on the object
Penetrate curve graph of the rate about whole spectrum.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0031810 | 2015-03-06 | ||
| KR1020150031810A KR101650319B1 (en) | 2015-03-06 | 2015-03-06 | Method and Apparatus for measuring thickness using color camera |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105937882A CN105937882A (en) | 2016-09-14 |
| CN105937882B true CN105937882B (en) | 2019-11-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610122109.1A Expired - Fee Related CN105937882B (en) | 2015-03-06 | 2016-03-03 | Method and apparatus for using colour TV camera measurement thickness |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101650319B1 (en) |
| CN (1) | CN105937882B (en) |
| TW (1) | TWI580925B (en) |
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- 2016-03-03 CN CN201610122109.1A patent/CN105937882B/en not_active Expired - Fee Related
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| US5541413A (en) * | 1992-04-24 | 1996-07-30 | Thiokol Corporation | Acousto-optic tunable filter-based surface scanning system and process |
| CN1556914A (en) * | 2001-09-21 | 2004-12-22 | Kmac株式会社 | Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same |
| TW200842319A (en) * | 2007-04-25 | 2008-11-01 | Academia Sinica | Method for characterizing transparent thin-films using differential optical sectioning interference microscopy |
| CN102027315A (en) * | 2008-01-31 | 2011-04-20 | 株式会社Snu精密 | Method for measuring thickness |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI580925B (en) | 2017-05-01 |
| CN105937882A (en) | 2016-09-14 |
| TW201632828A (en) | 2016-09-16 |
| KR101650319B1 (en) | 2016-08-24 |
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