TWI575117B - Electroplating equipment - Google Patents

Electroplating equipment Download PDF

Info

Publication number
TWI575117B
TWI575117B TW104110174A TW104110174A TWI575117B TW I575117 B TWI575117 B TW I575117B TW 104110174 A TW104110174 A TW 104110174A TW 104110174 A TW104110174 A TW 104110174A TW I575117 B TWI575117 B TW I575117B
Authority
TW
Taiwan
Prior art keywords
power supply
anode
shunt
plating
conductive member
Prior art date
Application number
TW104110174A
Other languages
Chinese (zh)
Other versions
TW201634759A (en
Inventor
Chu-Rong Ye
Original Assignee
Ampoc Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ampoc Equipment Co Ltd filed Critical Ampoc Equipment Co Ltd
Priority to TW104110174A priority Critical patent/TWI575117B/en
Publication of TW201634759A publication Critical patent/TW201634759A/en
Application granted granted Critical
Publication of TWI575117B publication Critical patent/TWI575117B/en

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)

Description

電鍍設備Plating equipment

本發明是關於一種電鍍設備,特別是一種對每一個被鍍物提供獨立陰極電流之電鍍設備。This invention relates to an electroplating apparatus, and more particularly to an electroplating apparatus that provides independent cathode current for each object to be plated.

在印刷電路板之製造過程中,需要經由電鍍製程形成基板之間的導電通路,再進行後續表面處理,以使印刷電路板得以成型。如圖1所示,一般印刷電路板之固定式電鍍設備80,在設計上是將連接電源供應器81陽極之電鍍材料B設置在電鍍槽82之兩側,並將連接電源供應器81陰極之被鍍物A置入電鍍槽82內之兩側電鍍材料B之間,使被鍍物A保持固定狀態;之後藉由控制電源供應器81之電流輸出狀態,使得來自電鍍材料B之金屬離子能沉積在被鍍物A上。In the manufacturing process of the printed circuit board, it is necessary to form a conductive path between the substrates via an electroplating process, and then perform subsequent surface treatment to form the printed circuit board. As shown in FIG. 1, a conventional plating apparatus 80 for a printed circuit board is designed to have plating materials B connected to the anode of the power supply 81 on both sides of the plating tank 82, and to be connected to the cathode of the power supply 81. The object A is placed between the plating materials B on both sides of the plating tank 82 to keep the object A in a fixed state; then, by controlling the current output state of the power supply 81, the metal ions from the plating material B can be made. Deposited on the object A to be plated.

而針對此固定式電鍍設備80之電源供應器81之基本設置,是將所有被鍍物A固定在同一支已連接陰極之導電銅排83,而將所有電鍍材料B固定在同一支並連接至相同陽極之導電銅排84,再由電源供應器81控制電流輸出功率以執行電鍍製程。The basic arrangement of the power supply 81 for the fixed plating apparatus 80 is to fix all the objects A to be fixed to the same conductive copper strip 83 of the connected cathode, and to fix all the plating materials B in the same branch and connect to The conductive copper busbar 84 of the same anode is controlled by the power supply 81 to perform an electroplating process.

另一種連續移動式電鍍設備90,如圖2及圖3所示,在設計上與前述固定式電鍍設備相似,差異在於連續移動式電鍍設備90是將被鍍物A於電鍍槽92中能相對於電鍍材料B連續移動。各個夾持被鍍物A之移動件93能藉由滑動部931沿著導電銅排94滑動,而移動件93電性連接電源供應器91之陰極,使得被鍍物A及導電銅排94都帶陰極電。複數電鍍材料B則是分為不同區域,各區域分別電性連接電源供應器91之不同陽極。Another continuous mobile plating apparatus 90, as shown in FIG. 2 and FIG. 3, is similar in design to the above-described fixed plating apparatus, with the difference that the continuous moving plating apparatus 90 is capable of opposing the object A in the plating tank 92. The plating material B is continuously moved. The moving member 93 for holding the object A can be slid along the conductive copper strip 94 by the sliding portion 931, and the moving member 93 is electrically connected to the cathode of the power supply 91, so that the object A and the conductive copper tube 94 are both With cathode electricity. The plurality of plating materials B are divided into different regions, and each region is electrically connected to a different anode of the power supply 91.

而針對此連續移動式電鍍設備90之電源供應器91之設置,是將所有被鍍物A藉由導電銅排94連接相同之陰極並使其於電鍍槽92中沿一方向連續移動,而將所有電鍍材料B固定但連接不同之陽極,再由電源供應器91控制電流輸出功率以執行電鍍製程。The power supply 91 for the continuous mobile plating apparatus 90 is arranged such that all of the objects A are connected to the same cathode by the conductive copper strips 94 and continuously moved in one direction in the plating tank 92. All of the plating materials B are fixed but connected to different anodes, and then the power supply 91 controls the current output power to perform the plating process.

而不論前述任一種控制方式,所有被鍍物都是共用相同之陰極,如此當被鍍物本身導電性有差異時,不同被鍍物會相互搶電而導致被鍍物之間受電不平均,影響被鍍物上鍍膜厚度之均勻性。Regardless of any of the foregoing control methods, all of the objects to be plated share the same cathode, so that when the conductivity of the object to be plated is different, different objects to be plated will collide with each other and cause uneven electric power between the objects to be plated. Affects the uniformity of the thickness of the coating on the object to be plated.

本發明之主要目的是提供一種對每一個被電鍍物提供獨立陰極電流之電鍍設備,以解決習知共用陰極電流之電鍍設備容易對被鍍物產生鍍層厚度不均之缺點。SUMMARY OF THE INVENTION A primary object of the present invention is to provide an electroplating apparatus for providing a separate cathode current for each of the electroplated materials to solve the disadvantage that the electroplating apparatus of the conventional common cathode current is susceptible to uneven plating thickness of the object to be plated.

為達到上述之目的,電鍍設備包括主電源供應器、複數移動掛架組及第一陽極導電件。複數移動掛架組用以帶動複數被鍍物連續移動,各移動掛架組包括掛架及結合掛架之分流電源供應器,掛架包括接觸部及用以夾持被鍍物之夾持部,且分流電源供應器電性連接主電源供應器;其中分流電源供應器以陰極連接夾持部,且以陽極連接接觸部。第一陽極導電件電性連接複數電鍍材料,其中各移動掛架組藉由接觸部與第一陽極導電件保持電性連接並沿著第一陽極導電件移動。其中複數被鍍物藉由複數移動掛架組之各分流電源供應器分配到相同之陰極電流,且複數電鍍材料藉由第一陽極導電件共用各分流電源供應器之陽極。To achieve the above objectives, the electroplating apparatus includes a main power supply, a plurality of movable pylons, and a first anode conductive member. The plurality of moving pylons are used for driving the plurality of objects to be continuously moved. Each of the moving pylons includes a pylon and a shunt power supply combined with the pylon. The pylon includes a contact portion and a clamping portion for holding the object to be plated. And the shunt power supply is electrically connected to the main power supply; wherein the shunt power supply is connected to the clamping portion by a cathode, and the contact portion is connected by an anode. The first anode conductive member is electrically connected to the plurality of plating materials, wherein each of the moving rack groups is electrically connected to the first anode conductive member by the contact portion and moves along the first anode conductive member. The plurality of substrates are distributed to the same cathode current by the respective split power supplies of the plurality of moving rack groups, and the plurality of plating materials share the anodes of the respective split power supplies by the first anode conductive members.

在本發明之一實施例中,更包括至少一第二陽極導電件,至少一第二陽極導電件用以設置複數電鍍材料,且各電鍍材料藉由至少一第二陽極導電件電性連接第一陽極導電件。In an embodiment of the present invention, the method further includes at least one second anode conductive member, wherein the at least one second anode conductive member is configured to provide a plurality of plating materials, and each plating material is electrically connected by at least one second anode conductive member. An anode conductive member.

在本發明之一實施例中,分流電源供應器包括無線控制模組,用以接受無線控制訊號以控制電源輸出。In an embodiment of the invention, the shunt power supply includes a wireless control module for receiving wireless control signals to control the power output.

在本發明之一實施例中,電鍍設備更包括導電組件,主電源供應器藉由導電組件電性連接至各分流電源供應器,用以將直流電源經導電組件傳輸至各分流電源供應器。In an embodiment of the invention, the electroplating apparatus further includes a conductive component, and the main power supply is electrically connected to each of the shunt power supplies by the conductive components for transmitting the DC power to the shunt power supplies via the conductive components.

在本發明之一實施例中,各分流電源供應器更包括滑動部,滑動部與導電組件形成可滑動地連接。In an embodiment of the invention, each of the shunt power supplies further includes a sliding portion that is slidably coupled to the conductive component.

在本發明之一實施例中,接觸部為至少一滑動組件。In an embodiment of the invention, the contact portion is at least one slide assembly.

在本發明之一實施例中,主電源供應器之輸出電壓大於各分流電源供應器之輸出電壓。In an embodiment of the invention, the output voltage of the main power supply is greater than the output voltage of each of the shunt power supplies.

藉此設計,每個被鍍物都能由獨立之分流電源供應器單獨控制,使得每個被鍍物具有相同陰極電流,提高被鍍物之鍍膜均勻性。By this design, each object to be plated can be individually controlled by a separate shunt power supply, so that each object to be plated has the same cathode current, and the coating uniformity of the object to be plated is improved.

為讓本創作之上述和其他目的、特徵和優點能更明顯易懂,下文特舉出本發明之具體實施例,並配合所附圖式,作詳細說明如下。The above and other objects, features and advantages of the present invention will become more apparent and understood.

以下請先參考圖4。如圖4所示,電鍍設備1包括主電源供應器10及複數移動掛架組20。主電源供應器10用以將交流電源轉換成直流電源,並將直流電源輸出至複數移動掛架組20以供後續應用。複數移動掛架組20依序排列,且能夠被驅動裝置(例如馬達等,圖未示)帶動以沿著一個設定方向L連續移動。Please refer to Figure 4 below. As shown in FIG. 4, the electroplating apparatus 1 includes a main power supply 10 and a plurality of mobile pylon groups 20. The main power supply 10 is used to convert the AC power into a DC power source and output the DC power to the plurality of mobile rack groups 20 for subsequent applications. The plurality of moving pylon groups 20 are sequentially arranged and can be driven by a driving device (for example, a motor or the like, not shown) to continuously move in a set direction L.

各移動掛架組20包括掛架21及分流電源供應器22,且分流電源供應器22結合於掛架21。主電源供應器10電性連接各移動掛架組20之分流電源供應器22,以藉由各分流電源供應器22取得較小之輸出電流。在本發明之一實施例中,主電源供應器10能夠將高電壓之交流電源轉換成較低電壓之直流電源,再經輸出分配至各分流電源供應器22,以使各分流電源供應器22取得較小之輸出直流電源,但前述直流電源設計不以本實施例為限。Each of the mobile rack sets 20 includes a pylon 21 and a shunt power supply 22, and the shunt power supply 22 is coupled to the pylon 21. The main power supply 10 is electrically connected to the shunt power supply 22 of each mobile rack set 20 to obtain a smaller output current by each shunt power supply 22. In an embodiment of the present invention, the main power supply 10 is capable of converting a high-voltage AC power source into a lower-voltage DC power source, and then distributing the output to each of the shunt power supplies 22 so that each of the shunt power supplies 22 A smaller output DC power supply is obtained, but the DC power supply design described above is not limited to this embodiment.

需注意的是,移動掛架組20之數量視電鍍需求及設備大小而增減;而當移動掛架組20之數量較多時,在電鍍設備1之設置上也能視情況增加主電源供應器10之數量,以因應分配輸出電源至複數移動掛架組20之分流電源供應器22。It should be noted that the number of the mobile rack groups 20 increases or decreases depending on the plating requirements and the size of the equipment; and when the number of the mobile rack groups 20 is large, the main power supply can be increased depending on the situation in the setting of the plating apparatus 1. The number of the devices 10 is such that the output power is distributed to the shunt power supply 22 of the plurality of mobile pylon groups 20.

在本實施例中,分流電源供應器22包括無線控制模組221。無線控制模組221用以接受來自外界之無線控制訊號,並依據該無線控制訊號以控制本身電源輸出。此處無線控制模組221能採用藍芽模組、紅外線模組、Wi-Fi模組、3G/4G網路通訊模組或其他具無線訊號傳輸功能之無線控制模組。因此,使用者藉由遙控器、手機、電腦等控制裝置,就能在遠端控制各移動掛架組20之分流電源供應器22之電源輸出,達到即時控制之效果,並增加操作便利性。In the present embodiment, the shunt power supply 22 includes a wireless control module 221. The wireless control module 221 is configured to receive a wireless control signal from the outside and control the power output of the wireless control signal according to the wireless control signal. Here, the wireless control module 221 can adopt a Bluetooth module, an infrared module, a Wi-Fi module, a 3G/4G network communication module, or other wireless control module with wireless signal transmission function. Therefore, the user can remotely control the power output of the shunt power supply 22 of each mobile pylon group 20 by remote control, mobile phone, computer, etc., to achieve the effect of immediate control and increase the convenience of operation.

以下請一併參考圖5及圖6。如圖5及圖6所示,電鍍設備1更包括第一陽極導電件30,且第一陽極導電件30電性連接複數電鍍材料B。各移動掛架組20之掛架21包括接觸部211及夾持部212。接觸部211用以與第一陽極導電件30保持電性連接,並使掛架21能沿著第一陽極導電件30移動。在本實施例中,第一陽極導電件30是採用一支陽極銅排,接觸部211是採用至少一滑動組件,例如滾輪組等,藉由滑動組件與陽極銅排可滑動地結合,使得掛架21藉由接觸部211不但能較穩定且平順地沿著第一陽極導電件30移動,又能確保接觸部211與第一陽極導電件30之電性連接,但接觸部211之設計不以此為限。Please refer to Figure 5 and Figure 6 below. As shown in FIG. 5 and FIG. 6, the electroplating apparatus 1 further includes a first anode conductive member 30, and the first anode conductive member 30 is electrically connected to the plurality of electroplating materials B. The hanger 21 of each of the moving pylons 20 includes a contact portion 211 and a clamping portion 212. The contact portion 211 is used to maintain electrical connection with the first anode conductive member 30 and to enable the hanger 21 to move along the first anode conductive member 30. In this embodiment, the first anode conductive member 30 is an anode copper row, and the contact portion 211 is formed by at least one sliding component, such as a roller set, and is slidably coupled to the anode copper row by the sliding assembly. The contact portion 211 can not only be stably and smoothly moved along the first anode conductive member 30, but also ensure the electrical connection between the contact portion 211 and the first anode conductive member 30, but the contact portion 211 is not designed. This is limited.

夾持部212用以夾持被鍍物A,使得移動掛架組20移動時,能帶動被鍍物A一併移動。在本實施例中,夾持部212是採用至少一夾固件,例如金屬夾等,藉由手動或電動方式夾持或鬆脫被鍍物A。The clamping portion 212 is configured to clamp the object to be plated A, so that when the moving hanger group 20 moves, the object to be plated A can be moved together. In the present embodiment, the clamping portion 212 is used to clamp or loosen the object A by manual or electric means using at least one clamp, such as a metal clip or the like.

各移動掛架組20之分流電源供應器22包括陰極222及陽極223。其中分流電源供應器22之陰極222電性連接夾持部212,且分流電源供應器22之陽極223連接接觸部211。藉此,分流電源供應器22之陰極222能輸出陰極電流至夾持部212所夾持之被鍍物A,使得被鍍物A帶陰極電荷;而分流電源供應器22之陽極223則藉由接觸部211電性連接至第一陽極導電件30,使得電鍍材料B帶陽極電荷。The shunt power supply 22 of each mobile rack set 20 includes a cathode 222 and an anode 223. The cathode 222 of the shunt power supply 22 is electrically connected to the clamping portion 212, and the anode 223 of the shunt power supply 22 is connected to the contact portion 211. Thereby, the cathode 222 of the shunt power supply 22 can output the cathode current to the object A held by the clamping portion 212, so that the object A is charged with a cathode; and the anode 223 of the shunt power supply 22 is The contact portion 211 is electrically connected to the first anode conductive member 30 such that the plating material B carries an anode charge.

在本發明之一實施例中,電鍍設備1更包括至少一第二陽極導電件40,用以做為第一陽極導電件30及複數電鍍材料B之間之電性連接媒介。也就是說,至少一第二陽極導電件40能用以設置複數電鍍材料B,且各電鍍材料B也能藉由至少一第二陽極導電件40電性連接第一陽極導電件30。此處至少一第二陽極導電件40是採用兩支陽極銅排,分別設置在電鍍槽50之兩側,而每支陽極銅排均供設置複數電鍍材料B。需注意的是,至少一第二陽極導電件40之設置數量及型式不以此為限。In an embodiment of the present invention, the electroplating apparatus 1 further includes at least one second anode conductive member 40 for use as an electrical connection medium between the first anode conductive member 30 and the plurality of plating materials B. That is, at least one second anode conductive member 40 can be used to provide a plurality of plating materials B, and each plating material B can also be electrically connected to the first anode conductive member 30 by at least one second anode conductive member 40. Here, at least one of the second anode conductive members 40 is provided with two anode copper rows respectively disposed on both sides of the plating tank 50, and each anode copper row is provided with a plurality of plating materials B. It should be noted that the number and type of the at least one second anode conductive member 40 are not limited thereto.

藉此,各分流電源供應器22之陰極222能獨立輸出陰極電流至夾持部212所對應夾持之被鍍物A,也就是說,每個被鍍物A都會對應到一個獨立之分流電源供應器22;而各分流電源供應器22之陽極223則藉由接觸部211電性連接至第一陽極導電件30,形成各陽極223並聯之效果,以使陽極223形成共陽迴路。Thereby, the cathode 222 of each of the shunt power supplies 22 can independently output the cathode current to the object A to be clamped by the clamping portion 212, that is, each object A is corresponding to an independent shunt power source. The anode 22 of each of the shunt power supplies 22 is electrically connected to the first anode conductive member 30 via the contact portion 211 to form an effect of connecting the anodes 223 in parallel, so that the anode 223 forms a common anode circuit.

如圖5及圖6所示,在本實施例中,電鍍設備1更包括導電組件60。此導電組件60是做為主電源供應器10與各移動掛架組20之分流電源供應器22之間之導電媒介,以便於各移動掛架組20相對於主電源供應器10移動時仍能與主電源供應器10保持電性連接。主電源供應器10藉由導電組件60電性連接至各分流電源供應器22,用以將主電源供應器10所輸出之直流電源經導電組件60傳輸至各分流電源供應器22。As shown in FIGS. 5 and 6, in the present embodiment, the plating apparatus 1 further includes a conductive member 60. The conductive component 60 is a conductive medium between the main power supply 10 and the shunt power supply 22 of each mobile pylon group 20, so that each mobile pylon group 20 can still move relative to the main power supply 10 It is electrically connected to the main power supply 10. The main power supply 10 is electrically connected to each of the shunt power supplies 22 via the conductive component 60 for transmitting the DC power output from the main power supply 10 to the shunt power supply 22 via the conductive component 60.

在設計上,導電組件60包括二支導電銅排,分別連接主電源供應器10之陽極DC端子及陰極RTN端子;而各分流電源供應器22更包括滑動部224,滑動部224能以套環、卡勾或其他可導電之滑動結構等分別與二支導電銅排形成可滑動地連接,使得各移動掛架組20在移動過程中仍然能與主電源供應器10保持電性連接,但本發明不以此為限。In the design, the conductive component 60 includes two conductive copper bars respectively connected to the anode DC terminal and the cathode RTN terminal of the main power supply 10; and each of the shunt power supplies 22 further includes a sliding portion 224, and the sliding portion 224 can be a collar The hooks or other electrically conductive sliding structures are respectively slidably connected to the two conductive copper strips, so that the moving rack groups 20 can still be electrically connected to the main power supply 10 during the movement, but The invention is not limited to this.

在實際執行電鍍製程時,電鍍設備1會驅動複數移動掛架組20沿著第一陽極導電件30朝設定方向L連續移動;此時各移動掛架組20所夾持之各複數被鍍物A會被帶動,並於電鍍槽50兩側之複數電鍍材料B之間連續移動。當然,各分流電源供應器22也會被各移動掛架組20帶動而隨之連續移動。藉由各分流電源供應器22之電源輸出,各電鍍材料B會成為陽極,而各被鍍物A會成為陰極。When the electroplating process is actually performed, the electroplating apparatus 1 drives the plurality of moving pylon groups 20 to continuously move along the first anode conductive member 30 toward the set direction L; at this time, each of the plurality of substrates to be sandwiched by each of the moving pylon groups 20 A will be driven and continuously moved between the plurality of plating materials B on both sides of the plating bath 50. Of course, each of the shunt power supplies 22 is also driven by each of the mobile rack groups 20 to continuously move. By the power output of each of the shunt power supplies 22, each of the plating materials B becomes an anode, and each of the objects A is a cathode.

由於各移動掛架組20均有獨立之分流電源供應器22,使得各被鍍物A都能藉由對應分流電源供應器22單獨控制,使其能分配到相同且穩定之陰極電流,不會因為被鍍物A之間可能具有導電性差異而造成受電不平均;而複數電鍍材料B則藉由第一陽極導電件30共用各分流電源供應器22之陽極,形成同一陽極迴路。Since each of the mobile rack groups 20 has separate shunt power supplies 22, each of the objects A can be individually controlled by the corresponding shunt power supply 22 so that it can be distributed to the same and stable cathode current. Because the electroplated materials A may have a difference in electrical conductivity, the electrolessness is uneven; and the plurality of electroplating materials B share the anodes of the shunt power supplies 22 by the first anode conductive members 30 to form the same anode loop.

藉此,由於各被鍍物A所分配到之陰極電流相同,在執行電鍍時即能保持其鍍層膜厚之均勻性,大幅改良了習知電鍍設備之缺點。使用者也能藉由遙控裝置即時監控電鍍設備之狀態,以確保電鍍製程之良率及效果。Thereby, since the cathode currents to which the respective objects A are distributed are the same, the uniformity of the plating film thickness can be maintained when the plating is performed, and the disadvantages of the conventional plating apparatus are greatly improved. The user can also monitor the status of the electroplating equipment in real time by means of a remote control device to ensure the yield and effect of the electroplating process.

綜上所陳,本發明無論就目的、手段及功效,均顯示其迥異於習知技術之特徵。惟應注意的是,上述諸多實施例僅係為了便於說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。In summary, the present invention, regardless of its purpose, means, and efficacy, exhibits characteristics that are different from conventional techniques. It should be noted that the various embodiments described above are merely illustrative for ease of explanation, and the scope of the invention is intended to be limited by the scope of the claims.

1‧‧‧電鍍設備
10‧‧‧主電源供應器
20‧‧‧移動掛架組
21‧‧‧掛架
211‧‧‧接觸部
212‧‧‧夾持部
22‧‧‧分流電源供應器
221‧‧‧無線控制模組
222‧‧‧陰極
223‧‧‧陽極
224‧‧‧滑動部
30‧‧‧第一陽極導電件
40‧‧‧第二陽極導電件
50‧‧‧電鍍槽
60‧‧‧導電組件
A‧‧‧被鍍物
B‧‧‧電鍍材料
L‧‧‧設定方向
(習知技術)
80‧‧‧固定式電鍍設備
81‧‧‧電源供應器
82‧‧‧電鍍槽
83‧‧‧導電銅排
84‧‧‧導電銅排
90‧‧‧連續移動式電鍍設備
91‧‧‧電源供應器
92‧‧‧電鍍槽
93‧‧‧移動件
931‧‧‧滑動部
94‧‧‧導電銅排
A‧‧‧被鍍物
B‧‧‧電鍍材料
L‧‧‧設定方向
1‧‧‧Electroplating equipment
10‧‧‧Main power supply
20‧‧‧Mobile rack group
21‧‧‧ hanging rack
211‧‧‧Contacts
212‧‧‧ gripping department
22‧‧‧Split power supply
221‧‧‧Wireless Control Module
222‧‧‧ cathode
223‧‧‧Anode
224‧‧ ‧Sliding section
30‧‧‧First anode conductive parts
40‧‧‧Second anode conductive parts
50‧‧‧ plating bath
60‧‧‧ Conductive components
A‧‧‧ plating
B‧‧‧Electroplating materials
L‧‧‧Set direction
(known technology)
80‧‧‧Fixed plating equipment
81‧‧‧Power supply
82‧‧‧ plating bath
83‧‧‧ Conductive copper bars
84‧‧‧ Conductive copper bars
90‧‧‧Continuous mobile plating equipment
91‧‧‧Power supply
92‧‧‧ plating bath
93‧‧‧Mobile parts
931‧‧‧Sliding section
94‧‧‧ Conductive copper bars
A‧‧‧ plating
B‧‧‧Electroplating materials
L‧‧‧Set direction

圖1是習知固定式電鍍設備之側剖視圖。 圖2是習知連續式電鍍設備之側剖視圖。 圖3是習知連續式電鍍設備之俯視圖。 圖4是電鍍設備之主電源供應器與複數移動掛架組之組成示意圖。 圖5是電鍍設備之側剖視圖。 圖6是電鍍設備之俯視圖。1 is a side cross-sectional view of a conventional stationary plating apparatus. 2 is a side cross-sectional view of a conventional continuous plating apparatus. Figure 3 is a top plan view of a conventional continuous plating apparatus. 4 is a schematic diagram of the composition of a main power supply and a plurality of mobile pylons of an electroplating apparatus. Figure 5 is a side cross-sectional view of an electroplating apparatus. Figure 6 is a plan view of an electroplating apparatus.

1‧‧‧電鍍設備 1‧‧‧Electroplating equipment

10‧‧‧主電源供應器 10‧‧‧Main power supply

20‧‧‧移動掛架組 20‧‧‧Mobile rack group

21‧‧‧掛架 21‧‧‧ hanging rack

211‧‧‧接觸部 211‧‧‧Contacts

212‧‧‧夾持部 212‧‧‧ gripping department

22‧‧‧分流電源供應器 22‧‧‧Split power supply

222‧‧‧陰極 222‧‧‧ cathode

223‧‧‧陽極 223‧‧‧Anode

30‧‧‧第一陽極導電件 30‧‧‧First anode conductive parts

40‧‧‧第二陽極導電件 40‧‧‧Second anode conductive parts

50‧‧‧電鍍槽 50‧‧‧ plating bath

60‧‧‧導電組件 60‧‧‧ Conductive components

A‧‧‧被鍍物 A‧‧‧ plating

B‧‧‧電鍍材料 B‧‧‧Electroplating materials

Claims (6)

一種電鍍設備,用以將複數被鍍物鍍上電鍍材料,該電鍍設備包括:一主電源供應器;複數移動掛架組,用以帶動該複數被鍍物連續移動,各該移動掛架組包括一掛架及結合該掛架之一分流電源供應器,該掛架包括一接觸部及用以夾持該被鍍物之一夾持部,且該分流電源供應器電性連接該主電源供應器;其中該分流電源供應器以一陰極連接該夾持部,且該分流電源供應器以一陽極連接該接觸部;以及一第一陽極導電件,電性連接複數電鍍材料;其中各該移動掛架組藉由該接觸部與該第一陽極導電件保持電性連接並沿著該第一陽極導電件移動;其中該複數被鍍物藉由該複數移動掛架組之各該分流電源供應器分配到相同之陰極電流,且該複數電鍍材料藉由該第一陽極導電件共用各該分流電源供應器之該陽極;以及一導電組件,該主電源供應器藉由該導電組件電性連接至各該分流電源供應器,用以將直流電源經該導電組件傳輸至各該分流電源供應器。 An electroplating apparatus for plating a plurality of objects to be plated with a plating material, the electroplating apparatus comprising: a main power supply unit; and a plurality of moving rack groups for driving the plurality of objects to be continuously moved, each of the moving rack groups The utility model comprises a pylon and a shunt power supply connected to the pylon, the pylon includes a contact portion and a clamping portion for clamping the object to be plated, and the shunt power supply is electrically connected to the main power source a supply device; wherein the shunt power supply is connected to the clamping portion by a cathode, and the shunt power supply is connected to the contact portion by an anode; and a first anode conductive member electrically connecting the plurality of electroplating materials; The movable pylon group is electrically connected to the first anode conductive member and moved along the first anode conductive member; wherein the plurality of substrates are filtered by the plurality of mobile pylon groups The supply is distributed to the same cathode current, and the plurality of plating materials share the anode of each of the shunt power supplies by the first anode conductive member; and a conductive component, the main power supply is guided by the lead Assembly electrically connected to each of the shunt power supply to the DC power supply transmission to each of the power supply through the shunt conductive elements. 如請求項1所述之電鍍設備,更包括至少一第二陽極導電件,該至少一第二陽極導電件用以設置該複數電鍍材料,且各該電鍍材料藉由該至少一第二陽極導電件電性連接該第一陽極導電件。 The electroplating apparatus of claim 1, further comprising at least one second anode conducting member, wherein the at least one second anode conducting member is configured to dispose the plurality of electroplating materials, and each of the plating materials is electrically conductive by the at least one second anode The piece is electrically connected to the first anode conductive member. 如請求項1所述之電鍍設備,其中該分流電源供應器包括一無線控制模組,用以接受一無線控制訊號以控制電源輸出。 The electroplating apparatus of claim 1, wherein the shunt power supply comprises a wireless control module for receiving a wireless control signal to control the power output. 如請求項1所述之電鍍設備,其中各該分流電源供應器更包括滑動部,該滑動部與該導電組件形成可滑動地連接。 The plating apparatus of claim 1, wherein each of the shunt power supplies further comprises a sliding portion that is slidably coupled to the conductive component. 如請求項1所述之電鍍設備,其中該接觸部為至少一滑動組件。 The electroplating apparatus of claim 1, wherein the contact portion is at least one sliding component. 如請求項1所述之電鍍設備,其中該主電源供應器之輸出電壓大於各該分流電源供應器之輸出電壓。 The electroplating apparatus of claim 1, wherein an output voltage of the main power supply is greater than an output voltage of each of the shunt power supplies.
TW104110174A 2015-03-30 2015-03-30 Electroplating equipment TWI575117B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104110174A TWI575117B (en) 2015-03-30 2015-03-30 Electroplating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104110174A TWI575117B (en) 2015-03-30 2015-03-30 Electroplating equipment

Publications (2)

Publication Number Publication Date
TW201634759A TW201634759A (en) 2016-10-01
TWI575117B true TWI575117B (en) 2017-03-21

Family

ID=57847254

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104110174A TWI575117B (en) 2015-03-30 2015-03-30 Electroplating equipment

Country Status (1)

Country Link
TW (1) TWI575117B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090090633A1 (en) * 2005-03-30 2009-04-09 Technic Inc. Electroplating system with movable support structure providing cathode potential
TWM504102U (en) * 2015-03-30 2015-07-01 Applied Equipment Ltd Electroplating equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090090633A1 (en) * 2005-03-30 2009-04-09 Technic Inc. Electroplating system with movable support structure providing cathode potential
TWM504102U (en) * 2015-03-30 2015-07-01 Applied Equipment Ltd Electroplating equipment

Also Published As

Publication number Publication date
TW201634759A (en) 2016-10-01

Similar Documents

Publication Publication Date Title
CN103590092B (en) Device and method used for electrochemical polishing/electroplating
JP2017043815A5 (en)
JP2009132999A5 (en)
EA023794B1 (en) Apparatus for use in electrorefining and electrowinning
CN204982125U (en) Cathode current segmentation adjusting mechanism for perpendicular continuous electroplating production line of PCB
TWM504102U (en) Electroplating equipment
JPWO2015104951A1 (en) Electric field processing method and electric field processing apparatus
JP2015004124A (en) Electrolytic treatment method and electrolytic treatment apparatus
CN104838484A (en) Electrostatic chuck and power supply system
TWI575117B (en) Electroplating equipment
RU2013145708A (en) DEVICE FOR CONTINUOUS THERMAL PROCESSING OF ELECTRICALLY CONDUCTING CONTINUOUS PREPARATIONS AND INSTALLATION WITH A SLIDING CONTACT ELEMENT
CN205529122U (en) Electroplating system
CN204714932U (en) electroplating device
CN106149039B (en) electroplating device
CN211848180U (en) Electroplating device
CN110760918B (en) Electroplating system with controllable plating layer
CN115505996B (en) Electroplating device
CN217973454U (en) Battery piece electroplating device and electroplating equipment
CN204342906U (en) A kind of electroplanting device of tool dual output rectifier
CN207904395U (en) A kind of anode conducting seat and electroplanting device
CA2687313A1 (en) Work electrodeposition coating method and work electrodeposition coating device
US20170298529A1 (en) Electroplating system
WO2021260201A3 (en) Apparatus for heating aerosolisable material
NZ608174A (en) Electrical connection device, for connecting between two successive cells of a series of cells for the production of aluminum
CN211142212U (en) Contact type upper electrode conducting device for horizontal electroplating equipment