TWI574283B - Organic and inorganic mixed particles, conductive particles, conductive materials and connecting structures - Google Patents

Organic and inorganic mixed particles, conductive particles, conductive materials and connecting structures Download PDF

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TWI574283B
TWI574283B TW102148524A TW102148524A TWI574283B TW I574283 B TWI574283 B TW I574283B TW 102148524 A TW102148524 A TW 102148524A TW 102148524 A TW102148524 A TW 102148524A TW I574283 B TWI574283 B TW I574283B
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organic
particles
conductive
inorganic hybrid
inorganic
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TW201430865A (en
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Hiroshi Yamauchi
Hiroyuki Morita
Satoshi Haneda
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Sekisui Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/12Powdering or granulating
    • C08J3/128Polymer particles coated by inorganic and non-macromolecular organic compounds
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13398Spacer materials; Spacer properties
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector

Description

有機無機混合粒子、導電性粒子、導電材料及連接構造體 Organic-inorganic hybrid particles, conductive particles, conductive materials, and bonded structures

本發明係關於一種具備有機核、與配置於該有機核之表面上之無機殼的核殼型有機無機混合粒子。又,本發明係關於一種使用上述有機無機混合粒子之導電性粒子、導電材料及連接構造體。 The present invention relates to a core-shell type organic-inorganic hybrid particle comprising an organic core and an inorganic shell disposed on a surface of the organic core. Further, the present invention relates to a conductive particle, a conductive material, and a bonded structure using the above-described organic-inorganic hybrid particles.

各向異性導電膏及各向異性導電膜等各向異性導電材料已廣為人知。於上述各向異性導電材料中,於黏合劑樹脂中分散有導電性粒子。 Anisotropic conductive materials such as an anisotropic conductive paste and an anisotropic conductive film are widely known. In the anisotropic conductive material described above, conductive particles are dispersed in the binder resin.

上述各向異性導電材料係用以將軟性印刷基板(FPC)、玻璃基板、玻璃環氧基板及半導體晶片等各種連接對象構件之電極間電性連接而獲得連接構造體。又,有時可使用具有基材粒子、與配置於該基材粒子之表面上之導電層之導電性粒子作為上述導電性粒子。 The anisotropic conductive material is used to electrically connect electrodes of various connection target members such as a flexible printed circuit board (FPC), a glass substrate, a glass epoxy substrate, and a semiconductor wafer to obtain a connection structure. Further, as the conductive particles, conductive particles having a substrate particle and a conductive layer disposed on the surface of the substrate particle may be used.

作為上述導電性粒子所使用之基材粒子之一例,於下述專利文獻1中揭示有殼為無機化合物(A),核為有機聚合物(b),且核由殼被覆之有機聚合物粒子(B)(有機無機混合粒子)。又,於專利文獻1中亦揭示有有機聚合物粒子(B)由導電性金屬(C)被覆之導電性粒子。 An example of the substrate particles used for the conductive particles is disclosed in Patent Document 1 below, in which the shell is an inorganic compound (A), the core is an organic polymer (b), and the core is coated with an organic polymer particle. (B) (organic-inorganic hybrid particles). Further, Patent Document 1 also discloses conductive particles in which the organic polymer particles (B) are coated with a conductive metal (C).

又,液晶顯示元件係於2片玻璃基板間配置液晶而構成。於該液晶顯示元件中,為了保持2片玻璃基板之間隔(間距)均勻且固定,而使用間隔物作為間距控制材料。通常使用樹脂粒子作為該間隔物。 Further, the liquid crystal display element is configured by disposing a liquid crystal between two glass substrates. In the liquid crystal display device, in order to keep the interval (pitch) of the two glass substrates uniform and fixed, a spacer is used as the pitch control material. Resin particles are generally used as the spacer.

作為上述導電性粒子或上述液晶顯示元件用間隔物所使用之粒子之一例,於下述專利文獻2中,揭示有藉由使具有聚合性不飽和基 之多官能性矽烷化合物於界面活性劑之存在下進行水解及聚縮合而獲得之有機質無機質複合體粒子(有機無機混合粒子)。於專利文獻2中,上述多官能性矽烷化合物為選自下述式(X)所表示之化合物及其衍生物之含有至少1個自由基聚合性基之第1矽化合物。 An example of the particles used in the above-mentioned conductive particles or the spacer for a liquid crystal display device is disclosed in Patent Document 2 below, which has a polymerizable unsaturated group. The organic-inorganic composite particles (organic-inorganic hybrid particles) obtained by subjecting the polyfunctional decane compound to hydrolysis and polycondensation in the presence of a surfactant. In the patent document 2, the polyfunctional decane compound is a first fluorene compound containing at least one radical polymerizable group selected from the compounds represented by the following formula (X) and derivatives thereof.

上述式(X)中,R1表示氫原子或甲基,R2表示可具有取代基之碳數1~20之2價之有機基,R3表示碳數1~5之烷基或苯基,R4表示選自由氫原子、碳數1~5之烷基、及碳數2~5之醯基所組成之群中之至少一個1價基。 In the above formula (X), R1 represents a hydrogen atom or a methyl group, R2 represents a divalent organic group having 1 to 20 carbon atoms which may have a substituent, R3 represents an alkyl group having 1 to 5 carbon atoms or a phenyl group, and R4 represents At least one monovalent group of a group consisting of a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, and a fluorenyl group having 2 to 5 carbon atoms is selected.

又,作為上述導電性粒子所使用之基材粒子之其他例,於下述專利文獻3、4中,揭示有具有球狀核粒子、與設置於該球狀核粒子之表面之彈性被覆層之基材粒子。又,於專利文獻3、4中,亦揭示有具有上述基材粒子、與配置於上述基材粒子中之上述彈性被覆層之表面上之導電性薄膜層的導電性粒子。 Further, as another example of the substrate particles used for the conductive particles, Patent Literatures 3 and 4 disclose a spherical core particle and an elastic coating layer provided on the surface of the spherical core particle. Substrate particles. Further, in Patent Documents 3 and 4, conductive particles having the substrate particles and a conductive thin film layer disposed on the surface of the elastic coating layer in the substrate particles are also disclosed.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2006-156068號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-156068

[專利文獻2]日本專利特開2000-204119號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-204119

[專利文獻3]日本專利特開2001-11503號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-11503

[專利文獻4]日本專利特開2008-117759號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2008-117759

關於有機無機混合粒子,由於通常使用有機材料故而柔軟性一定程度上較為優異,且於施加較高荷重進行壓縮時充分地變形。因此,於使用上述有機無機混合粒子作為液晶顯示元件用間隔物配置於基板間而獲得液晶顯示元件的情形時,液晶顯示元件用間隔物充分接觸於基板。又,於使用在上述有機無機混合粒子之表面形成有導電層之導電性粒子將電極間電性連接而獲得連接構造體的情形時,導電性粒子充分接觸於電極。 Regarding the organic-inorganic hybrid particles, since the organic material is usually used, the flexibility is excellent to some extent, and it is sufficiently deformed when a high load is applied for compression. Therefore, when the liquid crystal display element is obtained by disposing the organic-inorganic hybrid particles as a spacer for a liquid crystal display element between the substrates, the spacer for the liquid crystal display element is in sufficient contact with the substrate. In the case where the conductive particles are formed by electrically connecting the conductive particles formed on the surface of the organic-inorganic hybrid particles to each other to obtain a bonded structure, the conductive particles are in sufficient contact with the electrode.

然而,若使用如專利文獻1、2所記載之先前之有機無機混合粒子作為液晶顯示元件用間隔物並配置於基板間,則存在液晶顯示元件用間隔物對基板之密接性較差之情況。又,於如專利文獻1、2所記載之先前之有機無機混合粒子之表面形成有導電層的情形時,存在有機無機混合粒子與導電層之密接性較差之情況。因此,存在導電層自有機無機混合粒子之表面剝離之情況。 However, when the organic-inorganic hybrid particles described in Patent Documents 1 and 2 are used as spacers for liquid crystal display elements and disposed between the substrates, the adhesion of the spacers for liquid crystal display elements to the substrates may be inferior. In the case where a conductive layer is formed on the surface of the conventional organic-inorganic hybrid particles described in Patent Documents 1 and 2, the adhesion between the organic-inorganic hybrid particles and the conductive layer may be inferior. Therefore, there is a case where the conductive layer is peeled off from the surface of the organic-inorganic hybrid particles.

又,於專利文獻3、4所記載之基材粒子中,雖核使用有機材料,但上述殼所含有之矽原子之含量遠遠小於50重量%。因此,即便使用如專利文獻3、4所記載之先前之基材粒子作為液晶顯示元件用間隔物並配置於基板間,亦有液晶顯示元件用間隔物對基板之密接性較差之情況。又,於如專利文獻3、4所記載之先前之基材粒子之表面形成有導電層的情形時,有基材粒子與導電層之密接性較差之情況。因此,有導電層自基材粒子之表面剝離之情況。 Further, in the substrate particles described in Patent Documents 3 and 4, the organic material is used as the core, but the content of the ruthenium atoms contained in the shell is much less than 50% by weight. Therefore, even if the substrate particles of the prior art described in Patent Documents 3 and 4 are used as a spacer for a liquid crystal display element and disposed between the substrates, the adhesion of the spacer for the liquid crystal display element to the substrate may be inferior. In the case where a conductive layer is formed on the surface of the prior substrate particles described in Patent Documents 3 and 4, the adhesion between the substrate particles and the conductive layer may be inferior. Therefore, there is a case where the conductive layer is peeled off from the surface of the substrate particles.

又,若有機無機混合粒子與導電層之密接性較差,則於黏合劑樹脂中之導電性粒子之分散性下降,而導電性粒子變得容易凝集。進而,於使用於黏合劑樹脂中分散有導電性粒子之導電材料將電極間電性連接之情形時,有因導電材料中之導電性粒子之分散密度不同故連接電阻變高之情況。進而,有由於凝集之導電性粒子而產生絕緣不良之情況。 Further, when the adhesion between the organic-inorganic hybrid particles and the conductive layer is inferior, the dispersibility of the conductive particles in the binder resin is lowered, and the conductive particles are easily aggregated. Further, when a conductive material in which conductive particles are dispersed in a binder resin is used to electrically connect the electrodes, the connection resistance may become high because the dispersion density of the conductive particles in the conductive material is different. Further, there is a case where insulation defects occur due to the aggregated conductive particles.

另一方面,有為了提高基材粒子與導電層之密接性而使用二氧化矽粒子作為基材粒子之情況。於二氧化矽粒子之表面上形成有導電層之情形時,二氧化矽粒子與導電層之密接性變高。然而,導電性粒子之柔軟性降低。因此,於使用於二氧化矽粒子之表面上形成有導電層之導電性粒子將電極間電性連接的情形時,導電性粒子與電極之接觸面積變小。若導電性粒子與電極之接觸面積較小,則連接電阻變高或容易產生連接不良。 On the other hand, in order to improve the adhesion between the substrate particles and the conductive layer, cerium oxide particles are used as the substrate particles. When a conductive layer is formed on the surface of the cerium oxide particles, the adhesion between the cerium oxide particles and the conductive layer becomes high. However, the flexibility of the conductive particles is lowered. Therefore, when the conductive particles in which the conductive layer is formed on the surface of the ceria particle are electrically connected between the electrodes, the contact area between the conductive particles and the electrode is small. When the contact area between the conductive particles and the electrode is small, the connection resistance is high or connection failure is likely to occur.

本發明之目的在於提供一種可提高無機殼與接觸於無機殼之接觸對象物之密接性的有機無機混合粒子。又,本發明之目的在於提供一種使用上述有機無機混合粒子之導電性粒子、導電材料及連接構造體。 An object of the present invention is to provide an organic-inorganic hybrid particle which can improve the adhesion between an inorganic shell and a contact object which is in contact with the inorganic shell. Moreover, an object of the present invention is to provide a conductive particle, a conductive material, and a bonded structure using the above-described organic-inorganic hybrid particles.

本發明之有限目的在於提供一種可提高無機殼與導電層之密接性之有機無機混合粒子,以及使用該有機無機混合粒子之導電性粒子、導電材料及連接構造體。 A limited object of the present invention is to provide an organic-inorganic hybrid particle which can improve the adhesion between an inorganic shell and a conductive layer, and conductive particles, a conductive material and a bonded structure using the organic-inorganic hybrid particle.

本發明之進而有限目的在於提供一種於將電極間電性連接之情形時可有效降低連接電阻、且可提高絕緣可靠性之有機無機混合粒子,以及使用該有機無機混合粒子之導電性粒子、導電材料及連接構造體。 A further limited object of the present invention is to provide an organic-inorganic hybrid particle which can effectively reduce the connection resistance and improve the insulation reliability when the electrodes are electrically connected to each other, and conductive particles and conductive materials using the organic-inorganic hybrid particles. Materials and connection structures.

根據本發明之較廣態樣,提供一種有機無機混合粒子,其具備有機核、與配置於上述有機核之表面上之無機殼,且上述有機核100重量%中,上述有機核所含有之矽原子之含量為10重量%以下且上述有機核所含有之碳原子之含量為50重量%以上,上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為50重量%以上且上述無機殼所含有之碳原子之含量為30重量%以下,且上述無機殼之厚度相對於上述有機核之半徑之比為0.05以上且0.70以下。 According to a broader aspect of the present invention, there is provided an organic-inorganic hybrid particle comprising an organic core and an inorganic shell disposed on a surface of the organic core, wherein the organic core contains 100% by weight of the organic core The content of the ruthenium atom is 10% by weight or less, and the content of the carbon atom contained in the organic nucleus is 50% by weight or more, and the content of the ruthenium atom contained in the inorganic shell is 50% by weight based on 100% by weight of the inorganic shell. The content of the carbon atoms contained in the inorganic shell is 30% by weight or less, and the ratio of the thickness of the inorganic shell to the radius of the organic core is 0.05 or more and 0.70 or less.

本發明之有機無機混合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,或用作液晶顯示元件用間隔物。本發明之有機無機混合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子。 The organic-inorganic hybrid particles of the present invention are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer, or to be used as a spacer for a liquid crystal display element. The organic-inorganic hybrid particles of the present invention are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer.

於本發明之有機無機混合粒子之一特定態樣中,上述有機核與上述無機核之間未進行化學鍵結。 In a specific aspect of the organic-inorganic hybrid particle of the present invention, the organic core and the inorganic core are not chemically bonded.

於本發明之有機無機混合粒子之一特定態樣中,上述無機殼之厚度為50nm以上且2000nm以下。 In a specific aspect of the organic-inorganic hybrid particle of the present invention, the inorganic shell has a thickness of 50 nm or more and 2000 nm or less.

於本發明之有機無機混合粒子之一特定態樣中,上述有機核之粒徑為0.5μm以上且100μm以下。 In one specific aspect of the organic-inorganic hybrid particles of the present invention, the organic core has a particle diameter of 0.5 μm or more and 100 μm or less.

上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例為50%以上。 Among the total number of ruthenium atoms contained in the inorganic shell, four -O-Si groups are directly bonded and a ruthenium atom of four oxygen atoms of four of the above-mentioned -O-Si groups is directly bonded. The ratio of the number is 50% or more.

根據本發明之較廣態樣,提供一種導電性粒子,其具備上述有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層。 According to a broader aspect of the present invention, there is provided an electroconductive particle comprising the above-described organic-inorganic hybrid particles and a conductive layer disposed on a surface of the organic-inorganic hybrid particles.

根據本發明之較廣態樣,提供一種導電材料,其含有導電性粒子與黏合劑樹脂,且上述導電性粒子具備上述有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層。 According to a broad aspect of the present invention, there is provided a conductive material comprising conductive particles and a binder resin, wherein the conductive particles comprise the organic-inorganic hybrid particles and a conductive layer disposed on a surface of the organic-inorganic hybrid particles .

根據本發明之較廣態樣,提供一種連接構造體,其具備:於表面具有第1電極之第1連接對象構件、於表面具有第2電極之第2連接對象構件、及將上述第1連接對象構件與上述第2連接對象構件連接之連接部,且上述連接部由導電性粒子形成,或者由含有上述導電性粒子與黏合劑樹脂之導電材料形成,上述導電性粒子具備上述之有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層,且上述第1電極與上述第2電極由上述導電性粒子電性連接。 According to a broad aspect of the present invention, a connection structure including: a first connection member having a first electrode on a surface thereof, a second connection member having a second electrode on a surface thereof, and the first connection are provided a connection portion between the target member and the second connection target member, wherein the connection portion is formed of conductive particles or a conductive material containing the conductive particles and a binder resin, and the conductive particles are provided with the above-described organic-inorganic hybrid The particles and the conductive layer disposed on the surface of the organic-inorganic hybrid particles, wherein the first electrode and the second electrode are electrically connected to each other by the conductive particles.

於本發明之有機無機混合粒子中,於有機核之表面上配置有無機殼,進而上述有機核100重量%中,上述有機核所含有之矽原子之含量為10重量%以下且上述有機核所含有之碳原子之含量為50重量%以上,上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為50重量%以上且上述無機殼所含有之碳原子之含量為30重量%以下,上述無機殼之厚度相對於上述有機核之半徑之比為0.05以上且0.70以下,因此可提高無機殼與接觸於無機殼之接觸對象物之密接性。 In the organic-inorganic hybrid particles of the present invention, an inorganic shell is disposed on the surface of the organic core, and in the 100% by weight of the organic core, the content of the ruthenium atom contained in the organic nucleus is 10% by weight or less and the organic nucleus The content of the carbon atom contained is 50% by weight or more, and the content of the ruthenium atom contained in the inorganic shell is 50% by weight or more and the content of the carbon atom contained in the inorganic shell is 100% by weight of the inorganic shell. 30% by weight or less, the ratio of the thickness of the inorganic shell to the radius of the organic core is 0.05 or more and 0.70 or less, so that the adhesion between the inorganic shell and the contact object in contact with the inorganic shell can be improved.

1‧‧‧導電性粒子 1‧‧‧Electrical particles

2‧‧‧導電層 2‧‧‧ Conductive layer

11‧‧‧有機無機混合粒子 11‧‧‧Organic and inorganic mixed particles

12‧‧‧有機核 12‧‧‧Organic core

13‧‧‧無機殼 13‧‧‧Inorganic shell

21‧‧‧導電性粒子 21‧‧‧Electrical particles

22‧‧‧導電層 22‧‧‧ Conductive layer

22A‧‧‧第1導電層 22A‧‧‧1st conductive layer

22B‧‧‧第2導電層 22B‧‧‧2nd conductive layer

31‧‧‧導電性粒子 31‧‧‧Electrical particles

31a‧‧‧突起 31a‧‧‧ Protrusion

32‧‧‧導電層 32‧‧‧ Conductive layer

32a‧‧‧突起 32a‧‧‧ Protrusion

33‧‧‧芯物質 33‧‧‧ core material

34‧‧‧絕緣性物質 34‧‧‧Insulating substances

51‧‧‧連接構造體 51‧‧‧Connection structure

52‧‧‧第1連接對象構件 52‧‧‧1st connection object component

52a‧‧‧第1電極 52a‧‧‧1st electrode

53‧‧‧第2連接對象構件 53‧‧‧2nd connection object component

53a‧‧‧第2電極 53a‧‧‧2nd electrode

54‧‧‧連接部 54‧‧‧Connecting Department

81‧‧‧液晶顯示元件 81‧‧‧Liquid display components

82‧‧‧透明玻璃基板 82‧‧‧Transparent glass substrate

83‧‧‧透明電極 83‧‧‧Transparent electrode

84‧‧‧配向膜 84‧‧‧Alignment film

85‧‧‧液晶 85‧‧‧LCD

86‧‧‧密封劑 86‧‧‧Sealant

圖1係表示本發明之第1實施形態之導電性粒子的剖面圖。 Fig. 1 is a cross-sectional view showing conductive particles according to a first embodiment of the present invention.

圖2係表示本發明之第2實施形態之導電性粒子的剖面圖。 Fig. 2 is a cross-sectional view showing conductive particles according to a second embodiment of the present invention.

圖3係表示本發明之第3實施形態之導電性粒子的剖面圖。 Fig. 3 is a cross-sectional view showing conductive particles according to a third embodiment of the present invention.

圖4係模式性地表示使用本發明之第1實施形態之導電性粒子之連接構造體的前視剖面圖。 Fig. 4 is a front cross-sectional view schematically showing a connection structure using conductive particles according to the first embodiment of the present invention.

圖5係模式性地表示本發明之一實施形態之使用有機無機混合粒子作為液晶顯示元件用間隔物之液晶顯示元件的剖面圖。 FIG. 5 is a cross-sectional view schematically showing a liquid crystal display element using an organic-inorganic hybrid particle as a spacer for a liquid crystal display element according to an embodiment of the present invention.

以下,對本發明之詳細內容進行說明。 Hereinafter, the details of the present invention will be described.

(有機無機混合粒子) (organic and inorganic mixed particles)

本發明之有機無機混合粒子具備有機核、與配置於該有機核之表面上之無機殼。於本發明之有機無機混合粒子中,上述有機核100重量%中,上述有機核所含有之矽原子之含量為10重量%以下且上述有機核所含有之碳原子之含量為50重量%以上。進而,於本發明之有機無機混合粒子中,上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為50重量%以上且上述無機殼所含有之碳原子之含量為 30重量%以下。 The organic-inorganic hybrid particles of the present invention comprise an organic core and an inorganic shell disposed on the surface of the organic core. In the organic-inorganic hybrid particles of the present invention, the content of the ruthenium atom contained in the organic nucleus is 10% by weight or less and the content of the carbon atom contained in the organic nucleus is 50% by weight or more in 100% by weight of the organic nucleus. Further, in the organic-inorganic hybrid particles of the present invention, the content of the ruthenium atoms contained in the inorganic shell is 50% by weight or more and the content of the carbon atoms contained in the inorganic shell is 100% by weight of the inorganic shell. 30% by weight or less.

上述有機核含有50重量%以上之碳原子,因此其為含有碳原子作為主成分之有機核。上述有機核亦可含有矽原子,但於含有矽原子之情形時,由於碳原子為主成分故稱為有機核。上述無機殼含有50重量%以上之矽原子,因此其為含有矽原子作為主成分之無機殼。上述無機殼亦可含有碳原子,但於含有碳原子之情形時,由於矽原子為主成分,故稱為無機殼。 The organic core contains 50% by weight or more of carbon atoms, and therefore it is an organic core containing a carbon atom as a main component. The organic nucleus may also contain a ruthenium atom, but in the case of a ruthenium atom, since the carbon atom is a main component, it is called an organic nucleus. The inorganic shell contains 50% by weight or more of a ruthenium atom, and therefore it is an inorganic shell containing a ruthenium atom as a main component. The above inorganic shell may also contain carbon atoms, but in the case of containing carbon atoms, since the ruthenium atom is a main component, it is called an inorganic shell.

又,於本發明之有機無機混合粒子中,上述無機殼之厚度相對於上述有機核之半徑之比(無機殼之厚度/有機核之半徑)為0.05以上且0.70以下。 Further, in the organic-inorganic hybrid particles of the present invention, the ratio of the thickness of the inorganic shell to the radius of the organic core (the thickness of the inorganic shell/the radius of the organic core) is 0.05 or more and 0.70 or less.

於本發明之有機無機混合粒子中,於有機核之表面上配置有無機殼,因此尤其是於核殼型之粒子中,核為有機核,且上述有機核所含有之矽原子之含量為10重量%以下且上述有機核所含有之碳原子之含量為50重量%以上,藉此可提高有機無機混合粒子之柔軟性。因此,於使用上述有機無機混合粒子作為液晶顯示元件用間隔物並配置於基板間,或使用在有機無機混合粒子之表面形成有導電層之導電性粒子將電極間電性連接之情形時,將液晶顯示元件用間隔物或導電性粒子有效率地配置於基板間或電極間。進而,可使液晶顯示元件用間隔物或導電性粒子、與基板或電極之接觸面積增大。因此,例如,液晶顯示元件之顯示品質變良好,進而電極間之連接電阻變低。 In the organic-inorganic hybrid particles of the present invention, an inorganic shell is disposed on the surface of the organic core, and therefore, especially in the core-shell type particles, the core is an organic core, and the content of the germanium atom contained in the organic core is 10 When the content of the carbon atoms contained in the organic core is 50% by weight or more, the flexibility of the organic-inorganic hybrid particles can be improved. Therefore, when the organic-inorganic hybrid particles are used as a spacer for a liquid crystal display element and disposed between the substrates, or when electrically conductive particles having a conductive layer formed on the surface of the organic-inorganic hybrid particles are used to electrically connect the electrodes, The spacer or the conductive particles for the liquid crystal display element are efficiently disposed between the substrates or between the electrodes. Further, the contact area of the liquid crystal display element spacer or the conductive particles and the substrate or the electrode can be increased. Therefore, for example, the display quality of the liquid crystal display element is improved, and the connection resistance between the electrodes is lowered.

進而,於本發明之有機無機混合粒子中,於有機核之表面上配置有無機殼,進而上述有機核及上述無機殼中之矽原子及碳原子之含量滿足上述關係,且上述無機殼之厚度相對於上述有機核之半徑之比為0.05以上且0.70以下,藉此可提高無機殼與接觸於無機殼之接觸對象物之密接性。例如,若使用有機無機混合粒子作為液晶顯示元件用間隔物並配置於基板間,則液晶顯示元件用間隔物對基板之密接性變 高。又,於有機無機混合粒子之表面形成有導電層之情形時,有機無機混合粒子與導電層之密接性變高。因此,導電層變得難以自有機無機混合粒子之表面剝離,而由導電性粒子連接之電極間之連接電阻變低。 Further, in the organic-inorganic hybrid particles of the present invention, an inorganic shell is disposed on the surface of the organic core, and the content of the ruthenium atom and the carbon atom in the organic nucleus and the inorganic shell satisfies the above relationship, and the inorganic shell The ratio of the thickness to the radius of the organic core is 0.05 or more and 0.70 or less, whereby the adhesion between the inorganic shell and the contact object in contact with the inorganic shell can be improved. For example, when the organic-inorganic hybrid particles are used as a spacer for a liquid crystal display element and disposed between the substrates, the adhesion of the spacer for the liquid crystal display element to the substrate is changed. high. Further, when a conductive layer is formed on the surface of the organic-inorganic hybrid particles, the adhesion between the organic-inorganic hybrid particles and the conductive layer becomes high. Therefore, the conductive layer becomes difficult to peel off from the surface of the organic-inorganic hybrid particles, and the connection resistance between the electrodes connected by the conductive particles becomes low.

進而,有機無機混合粒子與導電層之密接性變高,因此黏合劑樹脂中之導電性粒子之分散性變良好,導電性粒子變得難以凝集。進而,於使用在黏合劑樹脂中分散有導電性粒子之導電材料將電極間電性連接之情形時,導電材料中之導電性粒子之分散密度之差異較少,故連接電阻難以變高。進而,難以產生凝集之導電性粒子,因此可提高連接構造體中之絕緣可靠性。 Further, since the adhesion between the organic-inorganic hybrid particles and the conductive layer is increased, the dispersibility of the conductive particles in the binder resin is improved, and the conductive particles are less likely to aggregate. Further, when the electrodes are electrically connected by using a conductive material in which conductive particles are dispersed in the binder resin, the difference in dispersion density of the conductive particles in the conductive material is small, so that it is difficult to increase the connection resistance. Further, since it is difficult to generate aggregated conductive particles, the insulation reliability in the bonded structure can be improved.

上述無機殼之厚度相對於上述有機核之半徑之比(無機殼之厚度/有機核之半徑)為0.05以上且0.70以下。上述比(無機殼之厚度/有機核之半徑)較佳為0.10以上,且較佳為0.60以下。若上述比為上述下限以上及上述上限以下,則無機殼與接觸於無機殼之接觸對象物之密接性有效地變高。又,可降低由導電性粒子電性連接之電極間之連接電阻,可提高絕緣可靠性。 The ratio of the thickness of the inorganic shell to the radius of the organic core (the thickness of the inorganic shell/the radius of the organic core) is 0.05 or more and 0.70 or less. The above ratio (thickness of the inorganic shell / radius of the organic core) is preferably 0.10 or more, and preferably 0.60 or less. When the ratio is not less than the above lower limit and not more than the above upper limit, the adhesion between the inorganic shell and the contact object in contact with the inorganic shell is effectively increased. Moreover, the connection resistance between the electrodes electrically connected by the conductive particles can be reduced, and the insulation reliability can be improved.

上述有機核100重量%中,上述有機核所含有之矽原子之含量為10重量%以下,較佳為5重量%以下。上述有機核亦可不含矽原子。上述有機核較佳為不含矽原子。上述有機核100重量%中,上述有機核所含有之碳原子之含量為50重量%以上,較佳為60重量%以上,更佳為65重量%以上。上述有機核中之矽原子之含量越少,又上述有機核中之碳原子之含量越多,無機殼與接觸於無機殼之接觸對象物之密接性越進一步變高,進而,源自有機核之有機無機混合粒子之柔軟性進一步變高。 In 100% by weight of the organic core, the content of the ruthenium atom contained in the organic nucleus is 10% by weight or less, preferably 5% by weight or less. The above organic core may also be free of germanium atoms. The above organic core is preferably free of germanium atoms. The content of the carbon atom contained in the organic core in 100% by weight of the organic core is 50% by weight or more, preferably 60% by weight or more, and more preferably 65% by weight or more. The smaller the content of the ruthenium atom in the organic nucleus, the more the content of the carbon atom in the organic nucleus is, and the adhesion between the inorganic shell and the contact object in contact with the inorganic shell is further increased, and further, The softness of the organic-inorganic hybrid particles of the organic core is further increased.

上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為50重量%以上,較佳為54重量%以上,更佳為56重量%以上,進而較 佳為60重量%以上。上述無機殼亦可不含碳原子。上述無機殼較佳為不含碳原子。上述無機殼100重量%中,上述無機殼所含有之碳原子之含量為30重量%以下,較佳為20重量%以下,更佳為10重量%以下。上述無機殼中之矽原子之含量越多,又上述無機殼中之碳原子之含量越少,無機殼與接觸於無機殼之接觸對象物之密接性越進一步變高,進而源自無機殼之壓縮初期之硬度進一步變良好。 In 100% by weight of the inorganic shell, the content of the ruthenium atom contained in the inorganic shell is 50% by weight or more, preferably 54% by weight or more, more preferably 56% by weight or more, and further Preferably, it is 60% by weight or more. The above inorganic shell may also contain no carbon atoms. The above inorganic shell preferably contains no carbon atoms. In 100% by weight of the inorganic shell, the content of carbon atoms contained in the inorganic shell is 30% by weight or less, preferably 20% by weight or less, and more preferably 10% by weight or less. The more the content of the ruthenium atoms in the inorganic shell, the smaller the content of the carbon atoms in the inorganic shell, and the higher the adhesion between the inorganic shell and the contact object in contact with the inorganic shell, and further the source The hardness from the initial stage of compression of the inorganic shell is further improved.

若上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為54重量%以上,則無機殼與導電層之密接性進一步變高,若為60重量%以上,則無機殼與導電層之密接性變得相當高。又,若上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為54重量%以上,則液晶顯示元件用間隔物對基板之密接性進一步變高,若為60重量%以上,則液晶顯示元件用間隔物對基板之密接性變得相當高。 When the content of the ruthenium atom contained in the inorganic shell is 54% by weight or more in 100% by weight of the inorganic shell, the adhesion between the inorganic shell and the conductive layer is further increased, and if it is 60% by weight or more, no The adhesion between the casing and the conductive layer becomes quite high. In addition, when the content of the ruthenium atom contained in the inorganic shell is 54% by weight or more in 100% by weight of the inorganic shell, the adhesion of the spacer for a liquid crystal display element to the substrate is further increased, and is 60% by weight. As described above, the adhesion of the spacer for the liquid crystal display element to the substrate is relatively high.

上述有機無機混合粒子中之有機核及無機殼中之矽原子及碳原子的含量可藉由利用TEM/EDS法之線分析進行測定。 The content of the ruthenium atom and the carbon atom in the organic nucleus and the inorganic shell in the above organic-inorganic hybrid particles can be measured by line analysis by TEM/EDS method.

上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例較佳為50%以上。於該情形時,壓縮10%時之壓縮彈性模數相對變高,壓縮30%時之壓縮彈性模數相對變低,有機無機混合粒子具有進一步良好之壓縮變形特性。 Among the total number of ruthenium atoms contained in the inorganic shell, four -O-Si groups are directly bonded and a ruthenium atom of four oxygen atoms of four of the above-mentioned -O-Si groups is directly bonded. The ratio of the number is preferably 50% or more. In this case, the compression elastic modulus at a compression of 10% is relatively high, and the compression elastic modulus at a compression of 30% is relatively low, and the organic-inorganic hybrid particles have further excellent compression deformation characteristics.

上述有機無機混合粒子之用途並無特別限定。上述有機無機混合粒子可較佳地用於各種用途。上述有機無機混合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,或用作液晶顯示元件用間隔物。本發明之有機無機混合粒子較佳為用以於表面上形成導電層而獲得具有上述導電層之導電性粒子。上述有機無機混合粒子較佳為用作液晶顯示元件用間隔物。於上述有機無機混合粒子中,無機殼與接觸於無機殼之接觸對象物之密接性較高,因此於使用 上述有機無機混合粒子作為液晶顯示元件用間隔物並配置於基板間,或於表面形成導電層而用作導電性粒子從而將電極間電性連接之情形時,將液晶顯示元件用間隔物或導電性粒子有效率地配置於基板間或電極間。進而,對使用上述液晶顯示元件用間隔物之液晶顯示元件及使用上述導電性粒子之連接構造體施加衝擊時,對應基板或電極之間隔變動,液晶顯示元件用間隔物或導電性粒子充分追隨且容易變形。因此,基板間或電極間之間隔不均難以產生,而電極間之連接不良變得難以產生。 The use of the above organic-inorganic hybrid particles is not particularly limited. The above organic-inorganic hybrid particles can be preferably used in various applications. The organic-inorganic hybrid particles are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer, or to be used as a spacer for a liquid crystal display element. The organic-inorganic hybrid particles of the present invention are preferably used to form a conductive layer on the surface to obtain conductive particles having the above-mentioned conductive layer. The organic-inorganic hybrid particles are preferably used as a spacer for a liquid crystal display element. In the above-mentioned organic-inorganic hybrid particles, the adhesion between the inorganic shell and the contact object in contact with the inorganic shell is high, so that it is used. When the organic-inorganic hybrid particles are disposed between the substrates as a spacer for a liquid crystal display element, or when a conductive layer is formed on the surface and used as conductive particles to electrically connect the electrodes, the spacer for the liquid crystal display element or the conductive material is used. The particles are efficiently disposed between the substrates or between the electrodes. Further, when an impact is applied to the liquid crystal display element using the spacer for a liquid crystal display element and the connection structure using the conductive particles, the interval between the substrate and the electrode fluctuates, and the spacer for the liquid crystal display element or the conductive particles sufficiently follows easily transformed. Therefore, unevenness in spacing between the substrates or between the electrodes is hard to occur, and connection failure between the electrodes becomes difficult to occur.

進而,上述有機無機混合粒子亦可較佳地用作無機填充材、色劑之添加劑、衝擊吸收劑或振動吸收劑。例如,可使用上述有機無機混合粒子作為橡膠或彈簧等之代替品。 Further, the above-mentioned organic-inorganic hybrid particles can also be preferably used as an inorganic filler, an additive for a toner, an impact absorber or a vibration absorber. For example, the above-mentioned organic-inorganic hybrid particles can be used as a substitute for rubber or a spring or the like.

將上述有機無機混合粒子進行10%壓縮變形時之壓縮彈性模數(10%K值)較佳為2000N/mm2以上,更佳為3000N/mm2以上,進而較佳為4000N/mm2以上,尤佳為5000N/mm2以上,最佳為6000N/mm2以上,且較佳為15000N/mm2以下,更佳為10000N/mm2以下,進而較佳為8500N/mm2以下。上述10%K值為上述下限以上及上述上限以下之有機無機混合粒子具有良好之壓縮變形特性。 The compression elastic modulus (10% K value) when the organic-inorganic hybrid particles are subjected to 10% compression deformation is preferably 2000 N/mm 2 or more, more preferably 3,000 N/mm 2 or more, and still more preferably 4,000 N/mm 2 or more. , particularly preferably 5000N / mm 2 or more, most preferably 6000N / mm 2 or more, and preferably 15000N / mm 2 or less, more preferably 10000N / mm 2 or less, and further preferably 8500N / mm 2 or less. The organic-inorganic hybrid particles having a 10% K value and not less than the above lower limit and not more than the above upper limit have good compression set characteristics.

將上述有機無機混合粒子進行30%壓縮變形時之壓縮彈性模數(30%K值)較佳為300N/mm2以上,更佳為600N/mm2以上,進而較佳為800N/mm2以上,尤佳為1000N/mm2以上,且較佳為5000N/mm2以下,更佳為4500N/mm2以下,進而較佳為4000N/mm2以下。上述30%K值為上述下限以上及上述上限以下之有機無機混合粒子具有良好之壓縮變形特性。 The organic-inorganic hybrid particles 30% compression modulus of compressive elasticity (30% K value) is preferably 300N / mm 2 or more when deformed, more preferably 600N / mm 2 or more, and further preferably 800N / mm 2 or more , particularly preferably 1000N / mm 2 or more, and preferably 5000N / mm 2 or less, more preferably 4500N / mm 2 or less, and further preferably 4000N / mm 2 or less. The organic-inorganic hybrid particles having a 30% K value and not less than the above lower limit and not more than the above upper limit have good compression set characteristics.

就可獲得良好之壓縮變形特性而言,將上述有機無機混合粒子壓縮10%時之壓縮彈性模數(10%K值)相對於將上述有機無機混合粒子壓縮30%時之壓縮彈性模數(30%K值)之比(10%K值/30%K值)較佳為1 以上,更佳為1.3以上,進而較佳為1.8以上,尤佳為2.0以上,且較佳為10.0以下,更佳為5.0以下,進而較佳為4.4以下。 The compression elastic modulus (10% K value) when the organic-inorganic hybrid particles are compressed by 10% with respect to the compression elastic modulus when the organic-inorganic hybrid particles are compressed by 30% in terms of obtaining good compression deformation characteristics ( 30% K value) ratio (10% K value / 30% K value) is preferably 1 The above is more preferably 1.3 or more, still more preferably 1.8 or more, still more preferably 2.0 or more, and still more preferably 10.0 or less, more preferably 5.0 or less, still more preferably 4.4 or less.

上述有機無機混合粒子中之上述壓縮彈性模數(10%K值及30%K值)可以下述方式進行測定。 The above-mentioned compression elastic modulus (10% K value and 30% K value) in the above organic-inorganic hybrid particles can be measured in the following manner.

使用微小壓縮試驗機,於圓柱(直徑100μm,金剛石製)之平滑壓頭端面,於25℃、壓縮速度0.3mN/sec、及最大試驗荷重20mN之條件下對有機無機混合粒子進行壓縮。測定此時之荷重值(N)及壓縮位移(mm)。可自獲得之測定值,並藉由下述式而求出上述壓縮彈性模數。例如可使用Fischer公司製造之「Fischerscope H-100」等作為上述微小壓縮試驗機。 The organic-inorganic hybrid particles were compressed on a smooth indenter end face of a cylinder (100 μm in diameter, made of diamond) at 25 ° C, a compression speed of 0.3 mN/sec, and a maximum test load of 20 mN using a micro compression tester. The load value (N) and the compression displacement (mm) at this time were measured. The measured value can be obtained from the measured value, and the above-described compression elastic modulus can be obtained by the following formula. For example, "Fischerscope H-100" manufactured by Fischer Co., Ltd. or the like can be used as the above-described micro compression tester.

K值(N/mm2)=(3/21/2)‧F‧S-3/2‧R-1/2 K value (N/mm 2 )=(3/2 1/2 )‧F‧S -3/2 ‧R -1/2

F:將有機無機混合粒子進行10%或30%壓縮變形時之荷重值(N) F: load value when the organic-inorganic hybrid particles are subjected to 10% or 30% compression deformation (N)

S:將有機無機混合粒子進行10%或30%壓縮變形時之壓縮位移(mm) S: Compressive displacement (mm) when the organic-inorganic hybrid particles are subjected to 10% or 30% compression deformation

R:有機無機混合粒子之半徑(mm) R: radius of organic-inorganic hybrid particles (mm)

上述壓縮彈性模數普遍且定量表示有機無機混合粒子之硬度。藉由使用上述壓縮彈性模數,可定量且單一地表示有機無機混合粒子之硬度。 The above-mentioned compression elastic modulus generally and quantitatively indicates the hardness of the organic-inorganic hybrid particles. By using the above-described compression elastic modulus, the hardness of the organic-inorganic hybrid particles can be quantitatively and singly expressed.

上述有機核較佳為有機粒子。可較佳地使用各種有機物作為用以形成上述有機核之材料。例如可使用聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、聚偏二氯乙烯、聚丙烯、聚異丁烯、聚丁二烯等等聚烯烴樹脂;聚甲基丙烯酸甲酯、聚丙烯酸甲酯等丙烯酸系樹脂;聚對苯二甲酸烷二酯、聚碸、聚碳酸酯、聚醯胺、酚甲醛樹脂、三聚氰胺甲醛樹脂、苯并胍胺甲醛樹脂、脲甲醛樹脂、及使1種或2種以上具有乙烯性不飽和基之各種聚合性單體聚合而獲得之聚合物等作為用以形成上述有機核之材料。藉由使1種或2種以上具有乙烯性不飽和基之各種聚 合性單體聚合,而容易設計及合成適合導電材料之具有任意壓縮時之物性之有機無機混合粒子。 The organic core is preferably an organic particle. Various organic substances can be preferably used as the material for forming the above organic core. For example, polyolefin resins such as polyethylene, polypropylene, polystyrene, polyvinyl chloride, polyvinylidene chloride, polypropylene, polyisobutylene, polybutadiene, etc.; polymethyl methacrylate, polymethyl acrylate can be used; Acrylic resin; polyalkylene terephthalate, polyfluorene, polycarbonate, polyamide, phenol formaldehyde resin, melamine formaldehyde resin, benzoguanamine formaldehyde resin, urea formaldehyde resin, and one or two A polymer obtained by polymerizing various polymerizable monomers having an ethylenically unsaturated group or the like is used as a material for forming the organic core. By using one or two or more kinds of polyunsaturated groups The merging monomer is polymerized, and it is easy to design and synthesize an organic-inorganic hybrid particle suitable for a conductive material having any physical properties at the time of compression.

於使具有乙烯性不飽和基之單體聚合而獲得上述有機核之情形時,作為上述具有乙烯性不飽和基之單體,可列舉非交聯性之單體與交聯性之單體。 When the monomer having an ethylenically unsaturated group is polymerized to obtain the organic nucleus, the monomer having an ethylenically unsaturated group may be a non-crosslinkable monomer and a crosslinkable monomer.

作為上述非交聯性之單體,例如可列舉:苯乙烯、α-甲基苯乙烯等苯乙烯系單體;(甲基)丙烯酸、順丁烯二酸、順丁烯二酸酐等含羧基單體;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸鯨蠟酯、(甲基)丙烯酸硬脂酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸異酯等(甲基)丙烯酸烷基酯類;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸甘油酯、聚氧乙烯(甲基)丙烯酸酯、(甲基)丙烯酸縮水甘油酯等含氧原子之(甲基)丙烯酸酯類;(甲基)丙烯腈等含腈單體;甲基乙烯基醚、乙基乙烯基醚、丙基乙烯基醚等乙烯基醚類;乙酸乙烯酯、丁酸乙烯酯、月桂酸乙烯酯、硬脂酸乙烯酯等酸乙烯酯類;乙烯、丙烯、異戊二烯、丁二烯等不飽和烴;(甲基)丙烯酸三氟甲酯、(甲基)丙烯酸五氟乙酯、氯乙烯、氟乙烯、氯苯乙烯等含鹵素單體等。 Examples of the non-crosslinkable monomer include a styrene monomer such as styrene or α-methylstyrene, and a carboxyl group such as (meth)acrylic acid, maleic acid or maleic anhydride. Monomer; methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, (methyl) ) lauryl acrylate, cetyl (meth) acrylate, stearyl (meth) acrylate, cyclohexyl (meth) acrylate, (meth) acrylate Alkyl (meth) acrylate such as ester; 2-hydroxyethyl (meth) acrylate, glyceryl (meth) acrylate, polyoxyethylene (meth) acrylate, glycidyl (meth) acrylate, etc. (meth) acrylate containing oxygen atom; nitrile containing monomer such as (meth) acrylonitrile; vinyl ether such as methyl vinyl ether, ethyl vinyl ether or propyl vinyl ether; vinyl acetate , vinyl acetate such as vinyl butyrate, vinyl laurate, vinyl stearate; unsaturated hydrocarbons such as ethylene, propylene, isoprene, butadiene; trifluoromethyl (meth)acrylate, A halogen-containing monomer such as pentafluoroethyl methacrylate, vinyl chloride, vinyl fluoride or chlorostyrene.

作為上述交聯性之單體,例如可列舉:四羥甲基甲烷四(甲基)丙烯酸酯、四羥甲基甲烷三(甲基)丙烯酸酯、四羥甲基甲烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、(聚)乙二醇二(甲基)丙烯酸酯、(聚)丙二醇二(甲基)丙烯酸酯、(聚)1,4-丁二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯類;(異)氰尿酸三烯丙酯、偏苯三酸三烯丙酯、二乙烯苯、鄰苯二甲酸二烯丙酯、二烯丙基丙烯醯胺、 二烯丙醚、γ-(甲基)丙烯醯氧基丙基三甲氧基矽烷、三甲氧基矽烷基苯乙烯、乙烯基三甲氧基矽烷等含矽烷單體等。 Examples of the crosslinkable monomer include tetramethylol methane tetra(meth)acrylate, tetramethylol methane tri(meth)acrylate, and tetramethylolmethane di(meth)acrylate. Ester, trimethylolpropane tri(meth) acrylate, dipentaerythritol hexa(meth) acrylate, dipentaerythritol penta (meth) acrylate, glycerol tri(meth) acrylate, glycerol di(methyl) Acrylate, (poly)ethylene glycol di(meth)acrylate, (poly)propylene glycol di(meth)acrylate, (poly)1,4-butanediol di(meth)acrylate, 1,4 - Polyfunctional (meth) acrylates such as butanediol di(meth) acrylate; triallyl (iso) cyanurate, triallyl trimellitate, divinyl benzene, phthalic acid Allyl ester, diallyl acrylamide, A decane-containing monomer such as diallyl ether, γ-(meth)acryloxypropyltrimethoxydecane, trimethoxydecylstyrene or vinyltrimethoxydecane.

利用公知之方法使上述具有乙烯性不飽和基之聚合性單體聚合,藉此可獲得上述有機核。作為該方法,例如可列舉:於自由基聚合起始劑之存在下進行懸浮聚合之方法、以及使用非交聯之種粒子與自由基聚合起始劑一起使單體膨潤而聚合之方法等。 The above organic nucleus can be obtained by polymerizing the above polymerizable monomer having an ethylenically unsaturated group by a known method. Examples of the method include a method in which suspension polymerization is carried out in the presence of a radical polymerization initiator, and a method in which a non-crosslinked seed particle is swollen with a radical polymerization initiator to polymerize the monomer.

就於形成無機殼時及使用有機無機混合粒子時抑制有機核變形之觀點而言,上述有機核之分解溫度較佳為超過200℃,更佳為超過250℃,進而更佳為超過300℃。上述有機核之分解溫度亦可超過400℃,亦可超過500℃,亦可超過600℃,亦可超過800℃。 The decomposition temperature of the organic core is preferably more than 200 ° C, more preferably more than 250 ° C, and even more preferably more than 300 ° C from the viewpoint of forming an inorganic shell and suppressing deformation of the organic core when the organic-inorganic hybrid particles are used. . The decomposition temperature of the above organic core may also exceed 400 ° C, may exceed 500 ° C, may exceed 600 ° C, and may exceed 800 ° C.

上述有機核之粒徑較佳為0.5μm以上,更佳為1μm以上,且較佳為500μm以下,更佳為100μm以下,進而較佳為50μm以下,尤佳為20μm以下,最佳為10μm以下。若上述有機核之粒徑為上述下限以上及上述上限以下,則10%K值及30%K值顯示進一步較佳之值,而可較佳地將有機無機混合粒子用於導電性粒子及液晶顯示元件用間隔物之用途。例如,若上述有機核之粒徑為上述下限以上及上述上限以下,則於使用上述導電性粒子而將電極間連接之情形時,導電性粒子與電極之接觸面積充分變大,且於形成導電層時變得難以形成凝集之導電性粒子。又,經由導電性粒子連接之電極間之間隔不會變得過大,且導電層變得難以自有機無機混合粒子之表面剝離。 The particle diameter of the organic core is preferably 0.5 μm or more, more preferably 1 μm or more, further preferably 500 μm or less, more preferably 100 μm or less, still more preferably 50 μm or less, still more preferably 20 μm or less, and most preferably 10 μm or less. . When the particle diameter of the organic core is not less than the above lower limit and not more than the above upper limit, the 10% K value and the 30% K value show further preferable values, and the organic-inorganic hybrid particles can be preferably used for the conductive particles and the liquid crystal display. The use of spacers for components. For example, when the particle diameter of the organic core is not less than the above lower limit and not more than the above upper limit, when the electrodes are connected by using the conductive particles, the contact area between the conductive particles and the electrode is sufficiently increased, and the conductive layer is formed. At the time of the layer, it becomes difficult to form agglomerated conductive particles. Moreover, the interval between the electrodes connected via the conductive particles does not become excessively large, and the conductive layer becomes difficult to peel off from the surface of the organic-inorganic hybrid particles.

上述有機核之粒徑於上述有機核為真球狀之情形時意指直徑,於上述有機核為真球狀以外之形狀之情形時意指最大徑。又,於本發明中,所謂粒徑,意指使用掃描式電子顯微鏡對有機核進行觀察,以游標卡尺對任意選擇之50個有機核之粒徑進行測定而獲得之平均值。 The particle diameter of the organic nucleus means a diameter when the organic nucleus is a true spherical shape, and means a maximum diameter when the organic nucleus has a shape other than a true spherical shape. Further, in the present invention, the particle diameter means an average value obtained by observing an organic nucleus using a scanning electron microscope and measuring the particle diameter of arbitrarily selected 50 organic nuclei by a vernier caliper.

上述有機無機混合粒子為核殼粒子。上述無機殼係配置於上述有機核之表面上。上述無機殼較佳為被覆上述有機核之表面。 The above organic-inorganic hybrid particles are core-shell particles. The inorganic shell is disposed on the surface of the organic core. The inorganic shell preferably covers the surface of the organic core.

上述無機殼較佳為藉由在上述有機核之表面上利用溶膠凝膠法將金屬烷氧化物製成殼狀物後對該殼狀物進行焙燒而形成。於溶膠凝膠法中,容易於上述有機核之表面上配置殼狀物。於進行上述焙燒之情形時,上述有機無機混合粒子中,焙燒後上述有機核未藉由揮發等被去除而殘存。上述有機無機混合粒子於焙燒後具備上述有機核。再者,若假設於焙燒後上述有機核藉由揮發等被去除,則上述10%K值變得相當低。 The inorganic shell is preferably formed by baking a metal alkoxide on a surface of the organic core by a sol-gel method and then baking the shell. In the sol-gel method, a shell is easily disposed on the surface of the above organic core. In the case of performing the above calcination, in the organic-inorganic hybrid particles, the organic core is not removed by volatilization or the like after calcination. The organic-inorganic hybrid particles have the organic core after firing. Further, if the organic nucleus is removed by volatilization or the like after firing, the 10% K value becomes relatively low.

作為上述溶膠凝膠法之具體方法,可列舉:使四乙氧基矽烷等無機單體共存於含有有機核、水或醇等溶劑、界面活性劑、及氨水溶液等觸媒之分散液中而進行界面溶膠反應之方法;以及藉由與水或醇等溶劑、及氨水溶液共存之四乙氧基矽烷等無機單體而進行溶膠凝膠反應後,使溶膠凝膠反應物異凝集於有機核之方法等。於上述溶膠凝膠法中,上述金屬烷氧化物較佳為進行水解及聚縮合。 Specific examples of the sol-gel method include that an inorganic monomer such as tetraethoxysilane is present in a dispersion containing a solvent such as an organic nucleus, water or an alcohol, a surfactant, or a catalyst such as an aqueous ammonia solution. a method of performing an interfacial sol reaction; and performing a sol-gel reaction by an inorganic monomer such as tetraethoxy decane coexisting with a solvent such as water or an alcohol or an aqueous ammonia solution, and then causing the sol-gel reactant to be agglutinated in the organic nucleus Method and so on. In the above sol-gel method, the metal alkoxide is preferably subjected to hydrolysis and polycondensation.

於上述溶膠凝膠法中,較佳為使用界面活性劑。較佳為於界面活性劑之存在下,藉由溶膠凝膠法而將上述金屬烷氧化物製成殼狀物。上述界面活性劑並無特別限定。上述界面活性劑可適當選擇使用以形成良好之殼狀物。作為上述界面活性劑,可列舉:陽離子性界面活性劑、陰離子性界面活性劑及非離子性界面活性劑等。其中,就可形成良好之無機殼而言,較佳為陽離子性界面活性劑。 In the above sol-gel method, a surfactant is preferably used. Preferably, the metal alkoxide is formed into a shell by a sol-gel method in the presence of a surfactant. The above surfactant is not particularly limited. The above surfactant can be appropriately selected for use to form a good shell. Examples of the surfactant include a cationic surfactant, an anionic surfactant, and a nonionic surfactant. Among them, a cationic surfactant is preferred in that a good inorganic shell can be formed.

作為上述陽離子性界面活性劑,可列舉:四級銨鹽及四級鏻鹽等。作為上述陽離子性界面活性劑之具體例,可列舉:十六烷基溴化銨等。 Examples of the cationic surfactant include a quaternary ammonium salt and a quaternary phosphonium salt. Specific examples of the above cationic surfactant include cetyl ammonium bromide and the like.

為了於上述有機核之表面上,形成上述無機殼,較佳為焙燒上述殼狀物。可利用焙燒條件而調整無機殼中之交聯度。又,藉由進行焙燒,而與未進行焙燒之情形相比,上述有機無機混合粒子之10%K值及30%K值顯示進一步較佳之值。尤其是藉由提高交聯度,可使 10%K值充分變高。 In order to form the above inorganic shell on the surface of the above organic core, it is preferred to calcine the above shell. The degree of crosslinking in the inorganic shell can be adjusted by using the firing conditions. Further, by performing the calcination, the 10% K value and the 30% K value of the above-mentioned organic-inorganic hybrid particles showed a further preferable value as compared with the case where the calcination was not performed. Especially by increasing the degree of crosslinking, The 10% K value is sufficiently high.

上述無機殼較佳為藉由在上述有機核之表面上利用溶膠凝膠法將金屬烷氧化物製成殼狀物後,將該殼狀物於100℃以上(焙燒溫度)下進行焙燒而形成。上述焙燒溫度更佳為150℃以上,進而較佳為200℃以上。若上述焙燒溫度為上述下限以上,則無機殼中之交聯度進一步變適度,而10%K值及30%K值顯示進一步較佳之值,從而可進一步較佳地將有機無機混合粒子用於導電性粒子及液晶顯示元件用間隔物之用途。 Preferably, the inorganic shell is formed by baking a metal alkoxide on a surface of the organic core by a sol-gel method, and then baking the shell at 100 ° C or higher (baking temperature). form. The calcination temperature is more preferably 150 ° C or higher, and still more preferably 200 ° C or higher. When the calcination temperature is at least the above lower limit, the degree of crosslinking in the inorganic shell is further moderated, and the 10% K value and the 30% K value show further preferable values, so that the organic-inorganic hybrid particles can be further preferably used. Use for conductive particles and spacers for liquid crystal display elements.

上述無機殼較佳為藉由在上述有機核之表面上利用溶膠凝膠法將金屬烷氧化物製成殼狀物後,將該殼狀物於上述有機核之分解溫度以下(焙燒溫度)進行焙燒而形成。上述焙燒溫度較佳為比上述有機核之分解溫度低5℃以上之溫度,更佳為比上述有機核之分解溫度低10℃以上之溫度。又,上述焙燒溫度較佳為800℃以下,更佳為600℃以下,進而較佳為500℃以下。若上述焙燒溫度為上述上限以下,則可抑制上述有機核之熱劣化及變形,而可獲得10%K值及30%K值顯示良好之值之有機無機混合粒子。 Preferably, the inorganic shell is formed by forming a metal alkoxide into a shell by a sol-gel method on the surface of the organic core, and the shell is below a decomposition temperature of the organic core (baking temperature). It is formed by baking. The calcination temperature is preferably a temperature lower than the decomposition temperature of the organic core by 5 ° C or higher, and more preferably a temperature lower than the decomposition temperature of the organic core by 10 ° C or higher. Further, the baking temperature is preferably 800 ° C or lower, more preferably 600 ° C or lower, and still more preferably 500 ° C or lower. When the calcination temperature is at most the above upper limit, thermal deterioration and deformation of the organic core can be suppressed, and organic-inorganic hybrid particles having a 10% K value and a 30% K value which exhibits a good value can be obtained.

作為上述金屬烷氧化物,可列舉:矽烷氧化物、鈦烷氧化物、鋯烷氧化物及鋁烷氧化物等。就形成良好之無機殼之觀點而言,上述金屬烷氧化物較佳為矽烷氧化物、鈦烷氧化物、鋯烷氧化物或鋁烷氧化物,更佳為矽烷氧化物、鈦烷氧化物或鋯烷氧化物,進而較佳為矽烷氧化物。就形成良好之無機殼之觀點而言,上述金屬烷氧化物中之金屬原子較佳為矽原子、鈦原子、鋯原子或鋁原子,更佳為矽原子、鈦原子或鋯原子,進而較佳為矽原子。上述金屬烷氧化物可僅使用1種,亦可併用2種以上。 Examples of the metal alkoxide include a decane oxide, a titanium alkoxide, a zirconium alkoxide, and an aluminoxane. The metal alkoxide is preferably a decane oxide, a titanium alkoxide, a zirconium alkoxide or an aluminum alkoxide, more preferably a decane oxide or a titanium alkoxide, from the viewpoint of forming a good inorganic shell. Or a zirconium alkoxide, more preferably a decane oxide. From the viewpoint of forming a good inorganic shell, the metal atom in the above metal alkoxide is preferably a ruthenium atom, a titanium atom, a zirconium atom or an aluminum atom, more preferably a ruthenium atom, a titanium atom or a zirconium atom, and further Jia is a scorpion atom. The metal alkoxide may be used alone or in combination of two or more.

就形成良好之無機殼之觀點而言,上述金屬烷氧化物較佳為下述式(1)所表示之金屬烷氧化物。 The metal alkoxide is preferably a metal alkoxide represented by the following formula (1) from the viewpoint of forming a good inorganic shell.

M(R1)n(OR2)4-n 式(1) M(R1) n (OR2) 4-n (1)

上述式(1)中,M為矽原子、鈦原子或鋯原子,R1表示苯基、碳數1~30之烷基、具有聚合性雙鍵之碳數1~30之有機基或具有環氧基之碳數1~30之有機基,R2表示碳數1~6之烷基,n表示0~2之整數。n為2時,複數個R1可相同,亦可不同。複數個R2可相同,亦可不同。 In the above formula (1), M is a halogen atom, a titanium atom or a zirconium atom, and R1 represents a phenyl group, an alkyl group having 1 to 30 carbon atoms, an organic group having a carbon number of 1 to 30 having a polymerizable double bond, or an epoxy group. The organic group having a carbon number of 1 to 30, R2 represents an alkyl group having 1 to 6 carbon atoms, and n represents an integer of 0 to 2. When n is 2, a plurality of R1s may be the same or different. A plurality of R2s may be the same or different.

就形成良好之無機殼之觀點而言,上述金屬烷氧化物較佳為下述式(1A)所表示之矽烷氧化物。 The metal alkoxide is preferably a decane oxide represented by the following formula (1A) from the viewpoint of forming a good inorganic shell.

Si(R1)n(OR2)4-n 式(1A) Si(R1) n (OR2) 4-n (1A)

上述式(1A)中,R1表示苯基、碳數1~30之烷基、具有聚合性雙鍵之碳數1~30之有機基或具有環氧基之碳數1~30之有機基,R2表示碳數1~6之烷基。n為2時,複數個R1可相同,亦可不同。複數個R2可相同,亦可不同。為了有效提高無機殼所含有之矽原子之含量,上述式(1A)中之n較佳為表示0或1,更佳為表示0。若無機殼所含有之矽原子之含量較高,則本發明之效果進一步優異。 In the above formula (1A), R1 represents a phenyl group, an alkyl group having 1 to 30 carbon atoms, an organic group having a carbon number of 1 to 30 having a polymerizable double bond, or an organic group having 1 to 30 carbon atoms having an epoxy group. R2 represents an alkyl group having 1 to 6 carbon atoms. When n is 2, a plurality of R1s may be the same or different. A plurality of R2s may be the same or different. In order to effectively increase the content of the ruthenium atom contained in the inorganic shell, n in the above formula (1A) preferably represents 0 or 1, more preferably 0. When the content of the ruthenium atoms contained in the inorganic shell is high, the effects of the present invention are further excellent.

於上述R1為碳數1~30之烷基之情形時,作為R1之具體例,可列舉:甲基、乙基、丙基、異丙基、異丁基、正己基、環己基、正辛基、及正癸基等。該烷基之碳數較佳為10以下,更佳為6以下。再者,烷基包含環烷基。 In the case where R1 is an alkyl group having 1 to 30 carbon atoms, specific examples of R1 include methyl group, ethyl group, propyl group, isopropyl group, isobutyl group, n-hexyl group, cyclohexyl group, and n-octyl group. Base, and positive base. The carbon number of the alkyl group is preferably 10 or less, more preferably 6 or less. Further, the alkyl group contains a cycloalkyl group.

作為上述聚合性雙鍵,可列舉碳-碳雙鍵。於上述R1為具有聚合性雙鍵之碳數1~30之有機基之情形時,作為R1之具體例,可列舉乙烯基、烯丙基、異丙烯基、及3-(甲基)丙烯醯氧基烷基等。作為上述(甲基)丙烯醯氧基烷基,可列舉:(甲基)丙烯醯氧基甲基、(甲基)丙烯醯氧基乙基及(甲基)丙烯醯氧基丙基等。上述具有聚合性雙鍵之碳數1~30之有機基之碳數較佳為2以上,且較佳為30以下,更佳為10以下。上述「(甲基)丙烯醯氧基」意指甲基丙烯醯氧基或丙烯醯氧基。 The polymerizable double bond may, for example, be a carbon-carbon double bond. In the case where the above R1 is an organic group having a carbon number of 1 to 30 having a polymerizable double bond, examples of R1 include a vinyl group, an allyl group, an isopropenyl group, and a 3-(meth)acryl oxime. Oxyalkyl and the like. Examples of the (meth)acryloxyalkylene group include (meth)acryloxymethyl group, (meth)acryloxyethyl group, and (meth)acryloxypropyl group. The carbon number of the organic group having 1 to 30 carbon atoms having a polymerizable double bond is preferably 2 or more, and is preferably 30 or less, more preferably 10 or less. The above "(meth)acryloxy group" means a methacryloxy group or an acryloxy group.

於上述R1為具有環氧基之碳數1~30之有機基之情形時,作為R1之具體例,可列舉:1,2-環氧基乙基、1,2-環氧基丙基、2,3-環氧基丙基、3,4-環氧基丁基、3-縮水甘油氧基丙基、及2-(3,4-環氧基環己基)乙基等。上述具有環氧基之碳數1~30之有機基之碳數較佳為8以下,更佳為6以下。再者,上述具有環氧基之碳數1~30之有機基係除含有碳原子及氫原子外,亦含有源自環氧基之氧原子之基。 In the case where the above R1 is an organic group having an epoxy group having 1 to 30 carbon atoms, specific examples of R1 include 1,2-epoxyethyl group and 1,2-epoxypropyl group. 2,3-epoxypropyl, 3,4-epoxybutyl, 3-glycidoxypropyl, and 2-(3,4-epoxycyclohexyl)ethyl, and the like. The carbon number of the organic group having 1 to 30 carbon atoms having an epoxy group is preferably 8 or less, more preferably 6 or less. Further, the organic group having 1 to 30 carbon atoms having an epoxy group contains a group derived from an oxygen atom derived from an epoxy group in addition to a carbon atom and a hydrogen atom.

作為上述R2之具體例,可列舉:甲基、乙基、正丙基、異丙基、正丁基、及異丁基等。為了有效提高殼所含有之矽原子之含量,上述R2較佳為表示甲基或乙基。 Specific examples of the above R2 include a methyl group, an ethyl group, a n-propyl group, an isopropyl group, an n-butyl group, and an isobutyl group. In order to effectively increase the content of the ruthenium atoms contained in the shell, the above R2 preferably represents a methyl group or an ethyl group.

作為上述矽烷氧化物之具體例,可列舉:四甲氧基矽烷、四乙氧基矽烷、甲基三甲氧基矽烷、甲基三乙氧基矽烷、乙基三甲氧基矽烷、乙基三乙氧基矽烷、異丙基三甲氧基矽烷、異丁基三甲氧基矽烷、環己基三甲氧基矽烷、正己基三甲氧基矽烷、正辛基三乙氧基矽烷、正癸基三甲氧基矽烷、苯基三甲氧基矽烷、二甲基二甲氧基矽烷、及二異丙基二甲氧基矽烷等。亦可使用該等以外之矽烷氧化物。 Specific examples of the above decane oxide include tetramethoxy decane, tetraethoxy decane, methyl trimethoxy decane, methyl triethoxy decane, ethyl trimethoxy decane, and ethyl triethyl ethane. Oxy decane, isopropyl trimethoxy decane, isobutyl trimethoxy decane, cyclohexyl trimethoxy decane, n-hexyl trimethoxy decane, n-octyl triethoxy decane, n-decyl trimethoxy decane And phenyltrimethoxydecane, dimethyldimethoxydecane, and diisopropyldimethoxydecane. It is also possible to use decane oxides other than these.

為了有效提高無機殼所含有之矽原子之含量,較佳為使用四甲氧基矽烷或四乙氧基矽烷作為上述無機殼之材料。上述無機殼之材料之100重量%中,四甲氧基矽烷與四乙氧基矽烷之合計含量較佳為50重量%以上(亦可為總量)。上述無機殼100重量%中,源自四甲氧基矽烷之骨架與源自四乙氧基矽烷之骨架之合計含量較佳為50重量%以上(亦可為總量)。 In order to effectively increase the content of the ruthenium atom contained in the inorganic shell, it is preferred to use tetramethoxy decane or tetraethoxy decane as the material of the above inorganic shell. The total content of tetramethoxy decane and tetraethoxy decane in 100% by weight of the material of the inorganic shell is preferably 50% by weight or more (may also be the total amount). In 100% by weight of the inorganic shell, the total content of the skeleton derived from tetramethoxynonane and the skeleton derived from tetraethoxysilane is preferably 50% by weight or more (may also be the total amount).

作為上述鈦烷氧化物之具體例,可列舉:鈦四甲氧化物、鈦四乙氧化物、鈦四異丙氧化物、及鈦四丁氧化物等。亦可使用該等以外之鈦烷氧化物。 Specific examples of the titanium alkoxide include titanium tetramethoxide, titanium tetraethoxy oxide, titanium tetraisopropyl oxide, and titanium tetrabutyl oxide. Titanium alkoxides other than these may also be used.

作為上述鋯烷氧化物之具體例,可列舉:鋯四甲氧化物、鋯四乙氧化物、鋯四異丙氧化物、及鋯四丁氧化物等。亦可使用該等以外 之鋯烷氧化物。 Specific examples of the zirconium alkoxide include zirconium tetramethoxide, zirconium tetraethoxy oxide, zirconium tetraisopropoxide, and zirconium tetrabutoxide. Can also use other than these Zirconium alkoxide.

上述金屬烷氧化物較佳為包含具有於金屬原子直接鍵結有4個氧原子之結構之金屬烷氧化物。上述金屬烷氧化物較佳為包含下述式(1a)所表示之金屬烷氧化物。 The metal alkoxide is preferably a metal alkoxide having a structure in which four oxygen atoms are directly bonded to a metal atom. The metal alkoxide preferably contains a metal alkoxide represented by the following formula (1a).

M(OR2)4 式(1a) M(OR2) 4 (1a)

上述式(1a)中,M為矽原子、鈦原子或鋯原子,R2表示碳數1~6之烷基,n表示0~2之整數。複數個R2可相同,亦可不同。 In the above formula (1a), M is a halogen atom, a titanium atom or a zirconium atom, R2 represents an alkyl group having 1 to 6 carbon atoms, and n represents an integer of 0 to 2. A plurality of R2s may be the same or different.

上述金屬烷氧化物較佳為包含具有於矽原子直接鍵結有4個氧原子之結構之矽烷氧化物。於該矽烷氧化物中,通常4個氧原子藉由單鍵而鍵結於矽原子。上述金屬烷氧化物較佳為包含下述式(1Aa)所表示之矽烷氧化物。 The metal alkoxide preferably contains a decane oxide having a structure in which a halogen atom is directly bonded to four atoms. In the decane oxide, usually four oxygen atoms are bonded to a ruthenium atom by a single bond. The metal alkoxide preferably contains a decane oxide represented by the following formula (1Aa).

Si(OR2)4 (1Aa) Si(OR2) 4 (1Aa)

上述式(1Aa)中,R2表示碳數1~6之烷基。複數個R2可相同,亦可不同。 In the above formula (1Aa), R2 represents an alkyl group having 1 to 6 carbon atoms. A plurality of R2s may be the same or different.

就有效使10%K值變高,且有效使30%K值變低之觀點而言,上述用以形成無機殼之金屬烷氧化物100莫耳%中,上述具有於金屬原子直接鍵結有4個氧原子之結構之金屬烷氧化物、上述式(1a)所表示之金屬烷氧化物、上述具有於矽原子直接鍵結有4個氧原子之結構之矽烷氧化物、或上述式(1Aa)所表示之矽烷氧化物之各含量較佳為20莫耳%以上,更佳為40莫耳%以上,進而較佳為50莫耳%以上,進而更佳為55莫耳%以上,尤佳為60莫耳%以上,且為100莫耳%以下。上述用以形成無機殼之金屬烷氧化物之總量亦可為上述具有於金屬原子直接鍵結有4個氧原子之結構之金屬烷氧化物、上述式(1a)所表示之金屬烷氧化物、上述具有於矽原子直接鍵結有4個氧原子之結構之矽烷氧化物、或上述式(1Aa)所表示之矽烷氧化物。 In view of the fact that the 10% K value is effectively increased and the 30% K value is effectively lowered, in the above 100 mol% of the metal alkoxide for forming an inorganic shell, the above has a direct bond to the metal atom. a metal alkoxide having a structure of four oxygen atoms, a metal alkoxide represented by the above formula (1a), a decane oxide having a structure in which a halogen atom is directly bonded to four oxygen atoms, or the above formula ( The content of the decane oxide represented by 1Aa) is preferably 20 mol% or more, more preferably 40 mol% or more, still more preferably 50 mol% or more, and still more preferably 55 mol% or more. Preferably, it is 60% by mole or more, and is 100% by mole or less. The total amount of the metal alkoxide to form the inorganic shell may be the metal alkoxide having a structure in which four oxygen atoms are directly bonded to the metal atom, and the metal alkoxide represented by the above formula (1a) And a decane oxide having a structure in which a ruthenium atom is directly bonded to four oxygen atoms or a decane oxide represented by the above formula (1Aa).

就有效使10%K值變高,且有效使30%K值變低之觀點而言,源自 上述無機殼所含有之上述金屬烷氧化物之金屬原子之總個數100%中,直接鍵結有4個氧原子之金屬原子之個數之比例、直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例分別較佳為20%以上,更佳為40%以上,進而較佳為50%以上,進而更佳為55莫耳%以上,尤佳為60%以上。 From the viewpoint of effectively making the 10% K value high and effectively making the 30% K value lower, In the total number of metal atoms of the metal alkoxide contained in the inorganic shell, the ratio of the number of metal atoms directly bonded to four oxygen atoms is directly bonded to four -O-Si The ratio of the number of the ruthenium atoms directly bonded to the four oxygen atoms of the four -O-Si groups is preferably 20% or more, more preferably 40% or more, and still more preferably 50% or more. More preferably, it is 55 mol% or more, and more preferably 60% or more.

又,就有效使10%K值變高,且有效使30%K值變低之觀點而言,上述無機殼所含有之金屬原子之總個數100%中,直接鍵結有4個氧原子之金屬原子之個數之比例較佳為20%以上,更佳為40%以上,進而較佳為50%以上,進而更佳為55莫耳%以上,尤佳為60%以上。就有效使10%K值變高,且有效使30%K值變低之觀點而言,上述金屬烷氧化物為矽烷氧化物,且上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例較佳為20%以上,更佳為40%以上,進而較佳為50%以上,尤佳為60%以上。 Further, in terms of effectively increasing the 10% K value and effectively lowering the 30% K value, in the total number of metal atoms contained in the inorganic shell, 100% of the oxygen is directly bonded. The ratio of the number of metal atoms of the atom is preferably 20% or more, more preferably 40% or more, further preferably 50% or more, further preferably 55 % by mole or more, and particularly preferably 60% or more. The metal alkoxide is a decane oxide and the total number of ruthenium atoms contained in the inorganic shell is 100% from the viewpoint of effectively increasing the 10% K value and effectively lowering the 30% K value. In the above, the ratio of the number of the argon atoms directly bonded to the four -O-Si groups and directly bonded to the four oxygen atoms of the four -O-Si groups is preferably 20% or more, more preferably 40% or more, further preferably 50% or more, and particularly preferably 60% or more.

再者,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子例如為下述式(11)所表示之結構中的矽原子。具體而言,係下述式(11X)所表示之結構中之附箭頭A進行表示之矽原子。 Further, a germanium atom directly bonded to four -O-Si groups and directly bonded to four of the above-mentioned -O-Si groups is, for example, a structure represented by the following formula (11) Helium atom. Specifically, it is a germanium atom represented by an arrow A in the structure represented by the following formula (11X).

再者,上述式(11)中之氧原子通常與鄰接之矽原子形成矽氧烷鍵。 Further, the oxygen atom in the above formula (11) usually forms a decane bond with an adjacent ruthenium atom.

作為對直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例(Q4之個數之比例(%))進行測定之方法,例如可列舉:使用NMR光譜解析裝置,將Q4(直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子)之峰面積、與Q1~Q3(直接鍵結有1~3個-O-Si基且直接鍵結有1~3個上述-O-Si基中之1~3個氧原子之矽原子)之峰面積進行比較之方法。藉由該方法,可求出上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例(Q4之個數之比例)。再者,於求出了下述實施例之Q4之個數之比例的NMR測定結果中,對源自直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子的波峰進行評價。 The ratio (number of the number of Q4) of the number of 矽 atoms which have four -O-Si groups directly bonded and four of the above-mentioned -O-Si groups are directly bonded. For the method of performing the measurement, for example, Q4 (4 -O-Si groups directly bonded and directly bonded to 4 of the above-mentioned -O-Si groups) may be used. The peak area of the ruthenium atom is the same as Q1~Q3 (1~3 -O-Si groups are directly bonded and 1~3 oxygen atoms in the above -O-Si group are directly bonded) The method of comparing the peak areas of atoms. By this method, it is found that 100% of the total number of germanium atoms contained in the inorganic shell is directly bonded to four -O-Si groups and directly bonded to four of the above -O-Si groups. The ratio of the number of 矽 atoms of the four oxygen atoms (the ratio of the number of Q4). Further, in the NMR measurement results obtained by determining the ratio of the number of Q4 in the following examples, there were four -O-Si groups derived from direct bonding and four above-mentioned -O-Si were directly bonded. The peaks of the ruthenium atoms of the four oxygen atoms in the group were evaluated.

上述無機殼之厚度較佳為1nm以上,更佳為10nm以上,進而較佳為50nm以上,尤佳為100nm以上,且較佳為100000nm以下,更佳為10000nm以下,進而較佳為2000nm以下。若上述無機殼之厚度為上述下限以上及上述上限以下,則10%K值及30%K值顯示進一步較佳之值,而可較佳地將有機無機混合粒子用於導電性粒子及液晶顯示元件用間隔物之用途。上述無機殼之厚度係有機無機混合粒子每個之平 均厚度。可藉由控制溶膠凝膠法而控制上述無機殼之厚度。 The thickness of the inorganic shell is preferably 1 nm or more, more preferably 10 nm or more, further preferably 50 nm or more, particularly preferably 100 nm or more, and more preferably 100000 nm or less, more preferably 10000 nm or less, still more preferably 2,000 nm or less. . When the thickness of the inorganic shell is not less than the above lower limit and not more than the above upper limit, the 10% K value and the 30% K value show further preferable values, and the organic-inorganic hybrid particles can be preferably used for the conductive particles and the liquid crystal display. The use of spacers for components. The thickness of the above inorganic shell is the level of each of the organic-inorganic hybrid particles Average thickness. The thickness of the above inorganic shell can be controlled by controlling the sol-gel method.

於本發明中,無機殼之厚度係可使用掃描式電子顯微鏡對有機無機混合粒子進行觀察,自利用游標卡尺對任意選擇之50個有機無機混合粒子之粒徑進行測定而獲得之平均值、與有機核之粒徑之平均值的差而求出。上述有機無機混合粒子之粒徑於上述有機無機混合粒子為真球狀之情形時意指直徑,於上述有機無機混合粒子為真球狀以外之形狀之情形時意指最大徑。 In the present invention, the thickness of the inorganic shell can be observed by scanning electron microscopy, and the average value obtained by measuring the particle diameter of arbitrarily selected 50 organic-inorganic hybrid particles by using a vernier caliper is obtained. The difference between the average values of the particle diameters of the organic nuclei was obtained. The particle size of the organic-inorganic hybrid particles means a diameter when the organic-inorganic hybrid particles are in a true spherical shape, and means a maximum diameter when the organic-inorganic hybrid particles have a shape other than a true spherical shape.

上述有機無機混合粒子之縱橫比較佳為2以下,更佳為1.5以下,進而較佳為1.2以下。上述縱橫比係表示長徑/短徑。 The aspect ratio of the organic-inorganic hybrid particles is preferably 2 or less, more preferably 1.5 or less, still more preferably 1.2 or less. The above aspect ratio means long diameter/short diameter.

較佳為於上述有機核與上述無機殼之間不進行化學鍵結。於上述有機核與上述無機殼之間未進行化學鍵結之情形時,無機殼變得難以過度破裂,進而可使電極與導電性粒子對連接對象構件之接觸面積變大,而可使電極間之連接電阻進一步變低。 Preferably, no chemical bonding is performed between the organic core and the inorganic shell. When the organic core and the inorganic shell are not chemically bonded, the inorganic shell becomes difficult to be excessively broken, and the contact area between the electrode and the conductive particles to the connecting member can be increased, and the electrode can be made. The connection resistance between the two is further lowered.

較佳為於上述有機核與上述無機殼之間不進行化學鍵結,但亦可進行化學鍵結。作為於上述有機核與上述無機殼之間進行化學鍵結之方法,可列舉:於有機核之表面導入可與構成無機殼之材料之官能基進行反應之官能基後,於有機核之表面上藉由上述構成無機殼之材料形成無機殼之方法等。具體而言,藉由偶合劑對有機核之表面進行表面處理後,於上述有機核之表面上,藉由溶膠凝膠法而將金屬烷氧化物製成殼狀物之方法等。 Preferably, chemical bonding is not performed between the organic core and the inorganic shell, but chemical bonding may also be performed. The method of chemically bonding the organic nucleus to the inorganic shell may be a method of introducing a functional group reactive with a functional group of a material constituting the inorganic shell on the surface of the organic nucleus, and then on the surface of the organic nucleus. A method of forming an inorganic shell by the above-described material constituting the inorganic shell. Specifically, a method of subjecting the surface of the organic core to a surface of the organic core by a coupling agent to form a metal alkoxide into a shell by a sol-gel method.

(導電性粒子) (conductive particles)

上述導電性粒子具備:上述有機無機混合粒子、與配置於該有機無機混合粒子之表面上之導電層。 The conductive particles include the organic-inorganic hybrid particles and a conductive layer disposed on a surface of the organic-inorganic hybrid particles.

於圖1中以剖面圖表示本發明之第1實施形態之導電性粒子。 The conductive particles according to the first embodiment of the present invention are shown in cross section in Fig. 1 .

圖1所示之導電性粒子1具有有機無機混合粒子11、與配置於有機無機混合粒子11之表面上之導電層2。導電層2被覆有機無機混合粒子 11之表面。導電性粒子1係有機無機混合粒子11之表面由導電層2被覆之被覆粒子。 The conductive particles 1 shown in FIG. 1 have organic-inorganic hybrid particles 11 and a conductive layer 2 disposed on the surface of the organic-inorganic hybrid particles 11. Conductive layer 2 coated with organic-inorganic hybrid particles 11 surface. The conductive particles 1 are coated particles in which the surface of the organic-inorganic hybrid particles 11 is covered with the conductive layer 2 .

有機無機混合粒子11具備有機核12、與配置於有機核12之表面上之無機殼13。無機殼13被覆有機核12之表面。導電層2係配置於無機殼13之表面上。導電層2係被覆無機殼13之表面。 The organic-inorganic hybrid particles 11 include an organic core 12 and an inorganic shell 13 disposed on the surface of the organic core 12 . The inorganic shell 13 coats the surface of the organic core 12. The conductive layer 2 is disposed on the surface of the inorganic shell 13. The conductive layer 2 coats the surface of the inorganic shell 13.

於圖2中以剖面圖表示本發明之第2實施形態之導電性粒子。 The conductive particles of the second embodiment of the present invention are shown in cross section in Fig. 2 .

圖2所示之導電性粒子21具有有機無機混合粒子11、與配置於有機無機混合粒子11之表面上之導電層22。導電層22具有作為內層之第1導電層22A與作為外層之第2導電層22B。於有機無機混合粒子11之表面上配置有第1導電層22A。於無機殼13之表面上配置有第1導電層22A。於第1導電層22A之表面上配置有第2導電層22B。 The conductive particles 21 shown in FIG. 2 have organic-inorganic hybrid particles 11 and a conductive layer 22 disposed on the surface of the organic-inorganic hybrid particles 11. The conductive layer 22 has a first conductive layer 22A as an inner layer and a second conductive layer 22B as an outer layer. The first conductive layer 22A is disposed on the surface of the organic-inorganic hybrid particles 11. The first conductive layer 22A is disposed on the surface of the inorganic shell 13. The second conductive layer 22B is disposed on the surface of the first conductive layer 22A.

於圖3中以剖面圖表示本發明之第3實施形態之導電性粒子。 Fig. 3 is a cross-sectional view showing conductive particles according to a third embodiment of the present invention.

圖3所示之導電性粒子31具有有機無機混合粒子11、導電層32、複數個芯物質33、及複數個絕緣性物質34。 The conductive particles 31 shown in FIG. 3 have organic-inorganic hybrid particles 11, a conductive layer 32, a plurality of core materials 33, and a plurality of insulating materials 34.

導電層32係配置於有機無機混合粒子11之表面上。於無機殼13之表面上配置有導電層32。 The conductive layer 32 is disposed on the surface of the organic-inorganic hybrid particles 11. A conductive layer 32 is disposed on the surface of the inorganic shell 13.

導電性粒子31係於導電性之表面具有複數個突起31a。導電層32係於外表面具有複數個突起32a。如上所述,上述導電性粒子可於導電性之表面具有突起,亦可於導電層之外表面具有突起。於有機無機混合粒子11之表面上配置有複數個芯物質33。於無機殼13之表面上配置有複數個芯物質33。複數個芯物質33係被嵌入導電層32內。芯物質33係配置於突起31a、32a之內側。導電層32被覆複數個芯物質33。由於複數個芯物質33而使導電層32之外表面隆起,而形成有突起31a、32a。 The conductive particles 31 have a plurality of protrusions 31a on the surface of the conductivity. The conductive layer 32 has a plurality of protrusions 32a on the outer surface. As described above, the conductive particles may have protrusions on the surface of the conductive layer, or may have protrusions on the outer surface of the conductive layer. A plurality of core materials 33 are disposed on the surface of the organic-inorganic hybrid particles 11. A plurality of core materials 33 are disposed on the surface of the inorganic shell 13. A plurality of core materials 33 are embedded in the conductive layer 32. The core material 33 is disposed inside the protrusions 31a and 32a. The conductive layer 32 is coated with a plurality of core materials 33. The outer surfaces of the conductive layer 32 are embossed by the plurality of core materials 33, and the projections 31a, 32a are formed.

導電性粒子31具有配置於導電層32之外表面上之絕緣性物質34。導電層32之外表面之至少一部分區域由絕緣性物質34被覆。絕緣 性物質34係由具有絕緣性之材料形成,且為絕緣性粒子。如上所述,上述導電性粒子亦可具有配置於導電層之外表面上之絕緣性物質。 The conductive particles 31 have an insulating material 34 disposed on the outer surface of the conductive layer 32. At least a portion of the outer surface of the conductive layer 32 is covered with an insulating material 34. insulation The substance 34 is formed of an insulating material and is an insulating particle. As described above, the conductive particles may have an insulating material disposed on the outer surface of the conductive layer.

用以形成上述導電層之金屬並無特別限定。作為該金屬,例如可列舉:金、銀、鈀、銅、鉑、鋅、鉄、錫、鉛、鋁、鈷、銦、鎳、鉻、鈦、銻、鉍、鉈、鍺、鎘、矽及該等之合金等。又,作為上述金屬,可列舉:摻錫氧化銦(ITO)及焊錫等。其中,由於可使電極間之連接電阻進一步變低,故較佳為含有錫之合金、鎳、鈀、銅或金,較佳為鎳或鈀。 The metal for forming the above conductive layer is not particularly limited. Examples of the metal include gold, silver, palladium, copper, platinum, zinc, antimony, tin, lead, aluminum, cobalt, indium, nickel, chromium, titanium, ruthenium, osmium, iridium, osmium, cadmium, and antimony. Such alloys and the like. Further, examples of the metal include tin-doped indium oxide (ITO), solder, and the like. Among them, since the connection resistance between the electrodes can be further lowered, an alloy containing tin, nickel, palladium, copper or gold is preferable, and nickel or palladium is preferable.

可如導電性粒子1、31般,上述導電層由1層形成。亦可如導電性粒子21般,導電層由複數層形成。即,導電層亦可具有2層以上之積層結構。於導電層由複數層形成之情形時,最外層較佳為金層、鎳層、鈀層、銅層或含有錫與銀之合金層,更佳為金層。於最外層為該等較佳之導電層之情形時,電極間之連接電阻進一步變低。又,於最外層為金層之情形時,耐腐蝕性進一步變高。 The conductive layer may be formed of one layer as in the case of the conductive particles 1 and 31. The conductive layer may be formed of a plurality of layers as in the case of the conductive particles 21. That is, the conductive layer may have a laminated structure of two or more layers. In the case where the conductive layer is formed of a plurality of layers, the outermost layer is preferably a gold layer, a nickel layer, a palladium layer, a copper layer or an alloy layer containing tin and silver, more preferably a gold layer. In the case where the outermost layer is such a preferred conductive layer, the connection resistance between the electrodes is further lowered. Further, when the outermost layer is a gold layer, the corrosion resistance is further increased.

於上述有機無機混合粒子之表面上形成導電層之方法並無特別限定。作為形成導電層之方法,例如可列舉:利用無電電鍍之方法、利用電鍍之方法、利用物理蒸鍍之方法、以及將金屬粉末或包含金屬粉末與黏合劑之膏塗佈於有機無機混合粒子之表面之方法等。其中,利用無電電鍍之方法因導電層之形成簡便,故而較佳。作為上述利用物理蒸鍍之方法,可列舉:真空蒸鍍、離子鍍著及離子濺鍍等方法。 The method of forming the conductive layer on the surface of the above-described organic-inorganic hybrid particles is not particularly limited. Examples of the method of forming the conductive layer include a method using electroless plating, a method using electroplating, a method using physical vapor deposition, and a method of applying a metal powder or a paste containing a metal powder and a binder to an organic-inorganic hybrid particle. Surface method, etc. Among them, the method of electroless plating is preferred because the formation of the conductive layer is simple. Examples of the method using physical vapor deposition include vacuum deposition, ion plating, and ion sputtering.

上述導電性粒子之粒徑較佳為0.5μm以上,更佳為1μm以上,且較佳為520μm以下,更佳為500μm以下,進而較佳為100μm以下,進而更佳為50μm以下,尤佳為20μm以下。若導電性粒子之粒徑為上述下限以上及上述上限以下,則於使用導電性粒子而將電極間連接之情形時,導電性粒子與電極之接觸面積充分變大,且於形成導電層時變得難以形成凝集之導電性粒子。又,經由導電性粒子連接之電極間 之間隔不會變得過大,且導電層變得難以自有機無機混合粒子之表面剝離。又,若導電性粒子之粒徑為上述下限以上及上述上限以下,則可較佳地將導電性粒子用於導電材料之用途。 The particle diameter of the conductive particles is preferably 0.5 μm or more, more preferably 1 μm or more, further preferably 520 μm or less, more preferably 500 μm or less, still more preferably 100 μm or less, still more preferably 50 μm or less, and particularly preferably 20 μm or less. When the particle diameter of the conductive particles is not less than the above lower limit and not more than the above upper limit, when the electrodes are connected by using the conductive particles, the contact area between the conductive particles and the electrode is sufficiently increased, and the conductive layer is changed. It is difficult to form agglomerated conductive particles. Moreover, the electrodes are connected via conductive particles The interval does not become excessive, and the conductive layer becomes difficult to peel off from the surface of the organic-inorganic hybrid particles. Further, when the particle diameter of the conductive particles is not less than the above lower limit and not more than the above upper limit, the conductive particles can be preferably used for the use of the conductive material.

上述導電性粒子之粒徑於導電性粒子為真球狀之情形時意指直徑,於導電性粒子為真球狀以外之形狀之情形時意指最大徑。 The particle diameter of the conductive particles means a diameter when the conductive particles are in a true spherical shape, and means a maximum diameter when the conductive particles have a shape other than a true spherical shape.

上述導電層之厚度較佳為0.005μm以上,更佳為0.01μm以上,且較佳為10μm以下,更佳為1μm以下,進而較佳為0.5μm以下,尤佳為0.3μm以下。上述導電層之厚度於導電層為多層之情形時係導電層整體之厚度。若導電層之厚度為上述下限以上及上述上限以下,則獲得充分之導電性,且導電性粒子不會變得過硬,而於連接電極間時導電性粒子充分變形。 The thickness of the conductive layer is preferably 0.005 μm or more, more preferably 0.01 μm or more, and is preferably 10 μm or less, more preferably 1 μm or less, further preferably 0.5 μm or less, and particularly preferably 0.3 μm or less. The thickness of the conductive layer is the thickness of the entire conductive layer when the conductive layer is a plurality of layers. When the thickness of the conductive layer is not less than the above lower limit and not more than the above upper limit, sufficient conductivity is obtained, and the conductive particles are not excessively hard, and the conductive particles are sufficiently deformed when the electrodes are connected.

於上述導電層由複數層形成之情形時,最外層之導電層之厚度較佳為0.001μm以上,更佳為0.01μm以上,且較佳為0.5μm以下,更佳為0.1μm以下。若上述最外層之導電層之厚度為上述下限以上及上述上限以下,則利用最外層之導電層之被覆變得均勻,耐腐蝕性充分變高,且電極間之連接電阻進一步變低。又,於上述最外層為金層之情形時,金層之厚度越薄,成本越低。 When the conductive layer is formed of a plurality of layers, the thickness of the outermost conductive layer is preferably 0.001 μm or more, more preferably 0.01 μm or more, and is preferably 0.5 μm or less, more preferably 0.1 μm or less. When the thickness of the outermost conductive layer is not less than the above lower limit and not more than the above upper limit, the coating of the outermost conductive layer is uniform, the corrosion resistance is sufficiently increased, and the connection resistance between the electrodes is further lowered. Further, in the case where the outermost layer is a gold layer, the thinner the thickness of the gold layer, the lower the cost.

上述導電層之厚度例如可藉由使用透過型電子顯微鏡(TEM),觀察導電性粒子之剖面而測定。 The thickness of the conductive layer can be measured, for example, by observing a cross section of the conductive particles using a transmission electron microscope (TEM).

上述導電性粒子亦可於導電性之表面具有突起。上述導電性粒子亦可於上述導電層之外表面具有突起。該突起較佳為複數個。多數情況下,於由導電性粒子連接之電極之表面形成有氧化被膜。於使用具有突起之導電性粒子之情形時,於電極間配置導電性粒子並進行壓接,藉此藉由突起而有效地去除上述氧化被膜。因此,可使電極與導電性粒子之導電層進一步確實地接觸,而可使電極間之連接電阻降低。進而,於導電性粒子於表面具備絕緣性物質之情形時,或將導電 性粒子分散於黏合劑樹脂中而用作導電材料之情形時,藉由導電性粒子之突起,可有效地去除導電性粒子與電極之間之絕緣性物質或黏合劑樹脂。因此,可提高電極間之導通可靠性。 The conductive particles may have protrusions on the surface of the conductivity. The conductive particles may have protrusions on the outer surface of the conductive layer. The protrusions are preferably plural. In many cases, an oxide film is formed on the surface of the electrode to which the conductive particles are connected. When the conductive particles having protrusions are used, the conductive particles are placed between the electrodes and pressure-bonded, whereby the oxide film is effectively removed by the protrusions. Therefore, the electrode and the conductive layer of the conductive particles can be further reliably contacted, and the connection resistance between the electrodes can be lowered. Further, when the conductive particles have an insulating material on the surface, they may be electrically conductive. When the particles are dispersed in the binder resin and used as a conductive material, the insulating material or the binder resin between the conductive particles and the electrode can be effectively removed by the protrusion of the conductive particles. Therefore, the conduction reliability between the electrodes can be improved.

作為於上述導電性粒子之表面形成突起之方法,可列舉:使芯物質附著於有機無機混合粒子之表面後,藉由無電電鍍而形成導電層之方法;以及於有機無機混合粒子之表面藉由無電電鍍而形成導電層後,使芯物質附著,進而藉由無電電鍍而形成導電層之方法等。又,為了形成突起,亦可不使用上述芯物質。 The method of forming a protrusion on the surface of the conductive particles includes a method of forming a conductive layer by electroless plating after attaching a core substance to a surface of the organic-inorganic hybrid particle, and a surface of the organic-inorganic hybrid particle. A method of forming a conductive layer by electroless plating, forming a conductive layer, and forming a conductive layer by electroless plating. Moreover, in order to form a protrusion, the above-mentioned core substance may not be used.

上述導電性粒子亦可具備配置於上述導電層之外表面上之絕緣性物質。於該情形時,若將導電性粒子用於電極間之連接,則可防止鄰接之電極間之短路。具體而言,於複數個導電性粒子接觸時,於複數個電極間存在絕緣性物質,因此可防止於橫方向鄰接之電極間之短路,而並非上下電極間之短路。再者,於連接電極間時,利用2個電極對導電性粒子進行加壓,藉此可容易地去除導電性粒子之導電層與電極之間之絕緣性物質。於導電性粒子於上述導電層之表面具有突起之情形時,可進一步容易地去除導電性粒子之導電層與電極之間之絕緣性物質。上述絕緣性物質較佳為絕緣性樹脂層或絕緣性粒子,更佳為絕緣性粒子。上述絕緣性粒子較佳為絕緣性樹脂粒子。 The conductive particles may further include an insulating material disposed on the outer surface of the conductive layer. In this case, when the conductive particles are used for the connection between the electrodes, the short circuit between the adjacent electrodes can be prevented. Specifically, when a plurality of conductive particles are in contact with each other, an insulating material is present between the plurality of electrodes. Therefore, it is possible to prevent short-circuiting between the electrodes adjacent in the lateral direction, and is not a short circuit between the upper and lower electrodes. Further, when the electrodes are connected, the conductive particles are pressurized by the two electrodes, whereby the insulating material between the conductive layers of the conductive particles and the electrodes can be easily removed. When the conductive particles have protrusions on the surface of the conductive layer, the insulating material between the conductive layer of the conductive particles and the electrode can be further easily removed. The insulating material is preferably an insulating resin layer or insulating particles, and more preferably insulating particles. The insulating particles are preferably insulating resin particles.

(導電材料) (conductive material)

上述導電材料含有上述之導電性粒子、與黏合劑樹脂。上述導電性粒子較佳為分散於黏合劑樹脂中而用作導電材料。上述導電材料較佳為各向異性導電材料。上述導電材料可較佳地用於電極之電性連接。上述導電材料較佳為電路連接材料。 The conductive material contains the above-mentioned conductive particles and a binder resin. The conductive particles are preferably dispersed in a binder resin and used as a conductive material. The above conductive material is preferably an anisotropic conductive material. The above conductive material can be preferably used for electrical connection of electrodes. The above conductive material is preferably a circuit connecting material.

上述黏合劑樹脂並無特別限定。可使用公知之絕緣性之樹脂作為上述黏合劑樹脂。作為上述黏合劑樹脂,例如可列舉:乙烯基樹脂、熱塑性樹脂、硬化性樹脂、熱塑性嵌段共聚物及彈性體等。上述 黏合劑樹脂可僅使用1種,亦可併用2種以上。 The above binder resin is not particularly limited. As the above-mentioned binder resin, a known insulating resin can be used. Examples of the binder resin include a vinyl resin, a thermoplastic resin, a curable resin, a thermoplastic block copolymer, and an elastomer. Above The binder resin may be used alone or in combination of two or more.

作為上述乙烯基樹脂,例如可列舉:乙酸乙烯酯樹脂、丙烯酸系樹脂及苯乙烯樹脂等。作為上述熱塑性樹脂,例如可列舉:聚烯烴樹脂、乙烯-乙酸乙烯酯共聚物及聚醯胺樹脂等。作為上述硬化性樹脂,例如可列舉:環氧樹脂、胺基甲酸酯樹脂、聚醯亞胺樹脂及不飽和聚酯樹脂等。再者,上述硬化性樹脂亦可為常溫硬化型樹脂、熱硬化型樹脂、光硬化型樹脂或濕氣硬化型樹脂。上述硬化性樹脂亦可與硬化劑併用。作為上述熱塑性嵌段共聚物,例如可列舉:苯乙烯-丁二烯-苯乙烯嵌段共聚物、苯乙烯-異戊二烯-苯乙烯嵌段共聚物、苯乙烯-丁二烯-苯乙烯嵌段共聚物之氫化物、及苯乙烯-異戊二烯-苯乙烯嵌段共聚物之氫化物等。作為上述彈性體,例如可列舉:苯乙烯-丁二烯共聚合橡膠、及丙烯腈-苯乙烯嵌段共聚合橡膠等。 Examples of the vinyl resin include a vinyl acetate resin, an acrylic resin, and a styrene resin. Examples of the thermoplastic resin include a polyolefin resin, an ethylene-vinyl acetate copolymer, and a polyamide resin. Examples of the curable resin include an epoxy resin, a urethane resin, a polyimide resin, and an unsaturated polyester resin. Further, the curable resin may be a room temperature curing resin, a thermosetting resin, a photocurable resin or a moisture curing resin. The curable resin may be used in combination with a curing agent. Examples of the above thermoplastic block copolymer include a styrene-butadiene-styrene block copolymer, a styrene-isoprene-styrene block copolymer, and a styrene-butadiene-styrene. a hydride of a block copolymer, a hydride of a styrene-isoprene-styrene block copolymer, and the like. Examples of the elastomer include a styrene-butadiene copolymer rubber and an acrylonitrile-styrene block copolymer rubber.

上述導電材料除含有上述導電性粒子及上述黏合劑樹脂外,例如亦可含有填充劑、增量劑、軟化劑、塑化劑、聚合觸媒、硬化觸媒、著色劑、抗氧化劑、熱穩定劑、光穩定劑、紫外線吸收劑、潤滑劑、抗靜電劑及阻燃劑等各種添加劑。 The conductive material may contain, in addition to the conductive particles and the binder resin, a filler, a bulking agent, a softener, a plasticizer, a polymerization catalyst, a curing catalyst, a colorant, an antioxidant, and a heat stabilizer. Various additives such as agents, light stabilizers, ultraviolet absorbers, lubricants, antistatic agents and flame retardants.

使上述導電性粒子分散於上述黏合劑樹脂中之方法可使用先前公知之分散方法,並無特別限定。作為使上述導電性粒子分散於上述黏合劑樹脂中之方法,例如可列舉:於上述黏合劑樹脂中添加上述導電性粒子後,利用行星式混合機等進行混練而使之分散的方法;使用均質器等使上述導電性粒子均勻地分散於水或有機溶劑中後,添加於上述黏合劑樹脂中,利用行星式混合機等進行混練而使之分散的方法;以及利用水或有機溶劑等稀釋上述黏合劑樹脂後,添加上述導電性粒子,利用行星式混合機等進行混練而使之分散的方法等。 The method of dispersing the above-mentioned conductive particles in the above-mentioned binder resin can be a conventionally known dispersion method, and is not particularly limited. As a method of dispersing the above-mentioned conductive particles in the above-mentioned binder resin, for example, a method in which the conductive particles are added to the binder resin and then kneaded by a planetary mixer or the like is dispersed, and homogenization is used. a method in which the conductive particles are uniformly dispersed in water or an organic solvent, and then added to the binder resin, kneaded by a planetary mixer or the like, and dispersed, and diluted with water or an organic solvent. After the binder resin, the above-mentioned conductive particles are added, and a method of kneading by a planetary mixer or the like is dispersed.

上述導電材料可用作導電膏及導電膜等。於本發明之導電材料為導電膜之情形時,亦可於該含有導電性粒子之導電膜上積層不含導 電性粒子之膜。上述導電膏較佳為各向異性導電膏。上述導電膜較佳為各向異性導電膜。 The above conductive material can be used as a conductive paste, a conductive film, or the like. When the conductive material of the present invention is a conductive film, the conductive film containing the conductive particles may be laminated without a guide. A film of electrical particles. The above conductive paste is preferably an anisotropic conductive paste. The above conductive film is preferably an anisotropic conductive film.

上述導電材料100重量%中,上述黏合劑樹脂之含量較佳為10重量%以上,更佳為30重量%以上,進而較佳為50重量%以上,特佳為70重量%以上,且較佳為99.99重量%以下,更佳為99.9重量%以下。若上述黏合劑樹脂之含量為上述下限以上及上述上限以下,則導電性粒子有效率地配置於電極間,而由導電材料連接之連接對象構件之連接可靠性進一步變高。 The content of the binder resin is preferably 10% by weight or more, more preferably 30% by weight or more, still more preferably 50% by weight or more, particularly preferably 70% by weight or more, and more preferably 100% by weight of the conductive material. It is 99.99% by weight or less, more preferably 99.9% by weight or less. When the content of the binder resin is not less than the above lower limit and not more than the above upper limit, the conductive particles are efficiently disposed between the electrodes, and the connection reliability of the member to be joined connected by the conductive material is further increased.

上述導電材料100重量%中,上述導電性粒子之含量較佳為0.01重量%以上,更佳為0.1重量%以上,且較佳為40重量%以下,更佳為20重量%以下,進而較佳為10重量%以下。若上述導電性粒子之含量為上述下限以上及上述上限以下,則電極間之導通可靠性進一步變高。 The content of the conductive particles in 100% by weight of the conductive material is preferably 0.01% by weight or more, more preferably 0.1% by weight or more, and is preferably 40% by weight or less, more preferably 20% by weight or less, and further preferably It is 10% by weight or less. When the content of the conductive particles is not less than the above lower limit and not more than the above upper limit, the conduction reliability between the electrodes is further increased.

(連接構造體及液晶顯示元件) (connection structure and liquid crystal display element)

使用上述之導電性粒子,或使用含有上述之導電性粒子與黏合劑樹脂之導電材料,而將連接對象構件進行連接,藉此可獲得連接構造體。 The connection structure can be obtained by using the above-described conductive particles or by using a conductive material containing the above-described conductive particles and a binder resin to connect the connection member.

上述連接構造體較佳為具備第1連接對象構件、第2連接對象構件、及將第1連接對象構件與第2連接對象構件連接之連接部,且該連接部由上述之導電性粒子形成,或者由含有上述之導電性粒子與黏合劑樹脂之導電材料形成。於單獨使用導電性粒子之情形時,連接部本身為導電性粒子。即,第1、第2連接對象構件由導電性粒子連接。用以獲得上述連接構造體之上述導電材料較佳為各向異性導電材料。 Preferably, the connection structure includes a first connection target member, a second connection target member, and a connection portion that connects the first connection target member and the second connection target member, and the connection portion is formed of the conductive particles. Alternatively, it may be formed of a conductive material containing the above-described conductive particles and a binder resin. In the case where the conductive particles are used alone, the connecting portion itself is a conductive particle. In other words, the first and second connection target members are connected by conductive particles. The above conductive material for obtaining the above-mentioned connection structure is preferably an anisotropic conductive material.

上述第1連接對象構件較佳為於表面具有第1電極。上述第2連接對象構件較佳為於表面具有第2電極。較佳為上述第1電極與上述第2電極由上述導電性粒子而電性連接。 Preferably, the first connection target member has a first electrode on the surface. Preferably, the second connection target member has a second electrode on the surface. Preferably, the first electrode and the second electrode are electrically connected by the conductive particles.

圖4係模式性地表示使用有圖1所示之導電性粒子1之連接構造體的前視剖面圖。 Fig. 4 is a front cross-sectional view schematically showing a connection structure using the conductive particles 1 shown in Fig. 1 .

圖4所示之連接構造體51具備第1連接對象構件52、第2連接對象構件53、及將第1連接對象構件52與第2連接對象構件53連接之連接部54。連接部54係由含有導電性粒子1與黏合劑樹脂之導電材料形成。圖4中,導電性粒子1係為了圖示之方便而簡略地表示。除導電性粒子1外,亦可使用導電性粒子21、31等其他導電性粒子。 The connection structure body 51 shown in FIG. 4 includes the first connection object member 52, the second connection object member 53, and the connection portion 54 that connects the first connection object member 52 and the second connection object member 53. The connecting portion 54 is formed of a conductive material containing the conductive particles 1 and a binder resin. In Fig. 4, the conductive particles 1 are simply shown for convenience of illustration. In addition to the conductive particles 1, other conductive particles such as conductive particles 21 and 31 may be used.

第1連接對象構件52於表面(上表面)具有複數個第1電極52a。第2連接對象構件53於表面(下表面)具有複數個第2電極53a。第1電極52a與第2電極53a由1個或複數個導電性粒子1電性連接。因此,第1、第2連接對象構件52、53由導電性粒子1電性連接。 The first connection target member 52 has a plurality of first electrodes 52a on the front surface (upper surface). The second connection target member 53 has a plurality of second electrodes 53a on the front surface (lower surface). The first electrode 52a and the second electrode 53a are electrically connected to one or a plurality of conductive particles 1. Therefore, the first and second connection object members 52 and 53 are electrically connected by the conductive particles 1 .

上述連接構造體之製造方法並無特別限定。作為連接構造體之製造方法之一例,可列舉:於第1連接對象構件與第2連接對象構件之間配置上述導電材料而獲得積層體後,對該積層體進行加熱及加壓之方法等。上述加壓之壓力為9.8×104~4.9×106Pa左右。上述加熱之溫度為120~220℃左右。用以連接軟性印刷基板之電極、配置於樹脂膜上之電極及觸控面板之電極的上述加壓之壓力為9.8×104~1.0×106Pa左右。 The method for producing the above-described connection structure is not particularly limited. An example of the method of manufacturing the connection structure is a method in which the conductive material is placed between the first connection target member and the second connection target member to obtain a laminate, and the laminate is heated and pressurized. The pressure of the above pressurization is about 9.8 × 10 4 to 4.9 × 10 6 Pa. The heating temperature is about 120 to 220 °C. The pressure of the pressurization of the electrode for connecting the flexible printed circuit board, the electrode disposed on the resin film, and the electrode of the touch panel is about 9.8×10 4 to 1.0×10 6 Pa.

作為上述連接對象構件,具體而言,可列舉:半導體晶片、電容器及二極體等電子零件、以及印刷基板、軟性印刷基板、環氧玻璃基板及玻璃基板等電路基板等電子零件等。上述導電材料較佳為用以連接電子零件之導電材料。上述導電膏較佳為膏狀之導電材料,且以膏狀之狀態塗佈於連接對象構件上。 Specific examples of the connection target member include electronic components such as a semiconductor wafer, a capacitor, and a diode, and electronic components such as a printed circuit board, a flexible printed circuit board, a glass substrate such as a glass substrate, and a glass substrate. The conductive material is preferably a conductive material for connecting electronic components. The conductive paste is preferably a paste-like conductive material and is applied to the member to be joined in a paste state.

上述導電性粒子及上述導電材料亦可較佳地用於觸控面板。因此,上述連接對象構件亦較佳為軟性印刷基板、或於樹脂膜之表面上配置有電極之連接對象構件。上述連接對象構件較佳為軟性印刷基 板,且較佳為於樹脂膜之表面上配置有電極之連接對象構件。上述軟性印刷基板通常於表面具有電極。 The conductive particles and the conductive material described above can also be preferably used for a touch panel. Therefore, the connection target member is preferably a flexible printed circuit board or a connection target member in which an electrode is disposed on the surface of the resin film. The connecting object member is preferably a flexible printing base The plate is preferably a member to be connected to which an electrode is disposed on the surface of the resin film. The above flexible printed substrate usually has electrodes on its surface.

作為設置於上述連接對象構件之電極,可列舉:金電極、鎳電極、錫電極、鋁電極、銅電極、鉬電極及鎢電極等金屬電極。於上述連接對象構件為軟性印刷基板之情形時,上述電極較佳為金電極、鎳電極、錫電極或銅電極。於上述連接對象構件為玻璃基板之情形時,上述電極較佳為鋁電極、銅電極、鉬電極或鎢電極。再者,於上述電極為鋁電極之情形時,可為僅由鋁形成之電極,亦可為於金屬氧化物層之表面積層鋁層而成之電極。作為上述金屬氧化物層之材料,可列舉:摻雜有3價之金屬元素之氧化銦及摻雜有3價之金屬元素之氧化鋅等。作為上述3價之金屬元素,可列舉Sn、Al及Ga等。 Examples of the electrode provided in the connection target member include metal electrodes such as a gold electrode, a nickel electrode, a tin electrode, an aluminum electrode, a copper electrode, a molybdenum electrode, and a tungsten electrode. In the case where the connection target member is a flexible printed circuit board, the electrode is preferably a gold electrode, a nickel electrode, a tin electrode or a copper electrode. In the case where the connection target member is a glass substrate, the electrode is preferably an aluminum electrode, a copper electrode, a molybdenum electrode or a tungsten electrode. Further, in the case where the electrode is an aluminum electrode, it may be an electrode formed only of aluminum, or an electrode formed of an aluminum layer on a surface layer of a metal oxide layer. Examples of the material of the metal oxide layer include indium oxide doped with a trivalent metal element and zinc oxide doped with a trivalent metal element. Examples of the trivalent metal element include Sn, Al, Ga, and the like.

又,上述有機無機混合粒子可較佳地用作液晶顯示元件用間隔物。即,上述有機無機混合粒子可較佳地用以獲得液晶顯示元件,該液晶顯示元件具備:構成液晶單元之一對基板、被封入該一對基板間之液晶、及配置於上述一對基板間之液晶顯示元件用間隔物。 Further, the organic-inorganic hybrid particles can be preferably used as a spacer for a liquid crystal display element. In other words, the organic-inorganic hybrid particles are preferably used to obtain a liquid crystal display device comprising: a pair of substrates constituting the liquid crystal cell, a liquid crystal sealed between the pair of substrates, and disposed between the pair of substrates A spacer for a liquid crystal display element.

於圖5中以剖面圖表示本發明之一實施形態之將有機無機混合粒子用作液晶顯示元件用間隔物之液晶顯示元件。 Fig. 5 is a cross-sectional view showing a liquid crystal display element in which an organic-inorganic hybrid particle is used as a spacer for a liquid crystal display element according to an embodiment of the present invention.

圖5所示之液晶顯示元件81具有一對之透明玻璃基板82。透明玻璃基板82於相對向之面具有絕緣膜(未圖示)。作為絕緣膜之材料,例如可列舉SiO2等。於透明玻璃基板82之絕緣膜上形成有透明電極83。作為透明電極83之材料,可列舉ITO等。透明電極83例如可藉由光微影法進行圖案化而形成。於透明玻璃基板82之表面上之透明電極83上形成有配向膜84。作為配向膜84之材料,可列舉聚醯亞胺等。 The liquid crystal display element 81 shown in FIG. 5 has a pair of transparent glass substrates 82. The transparent glass substrate 82 has an insulating film (not shown) on the opposite surface. Examples of the material of the insulating film include SiO 2 and the like. A transparent electrode 83 is formed on the insulating film of the transparent glass substrate 82. As a material of the transparent electrode 83, ITO etc. are mentioned. The transparent electrode 83 can be formed, for example, by patterning by photolithography. An alignment film 84 is formed on the transparent electrode 83 on the surface of the transparent glass substrate 82. The material of the alignment film 84 is, for example, polyimine.

於一對透明玻璃基板82間封入有液晶85。於一對透明玻璃基板82間配置有複數個有機無機混合粒子11。有機無機混合粒子11係用作液晶顯示元件用間隔物。藉由複數個有機無機混合粒子11而控制一對 透明玻璃基板82之間隔。於一對透明玻璃基板82之邊緣部間配置有密封劑86。藉由密封劑86而防止液晶85向外部流出。 The liquid crystal 85 is sealed between the pair of transparent glass substrates 82. A plurality of organic-inorganic hybrid particles 11 are disposed between the pair of transparent glass substrates 82. The organic-inorganic hybrid particles 11 are used as spacers for liquid crystal display elements. Controlling a pair by a plurality of organic-inorganic hybrid particles 11 The spacing of the transparent glass substrates 82. A sealant 86 is disposed between the edge portions of the pair of transparent glass substrates 82. The liquid crystal 85 is prevented from flowing out to the outside by the sealant 86.

於上述液晶顯示元件中,每1mm2之液晶顯示元件用間隔物之配置密度較佳為10個/mm2以上,且較佳為1000個/mm2以下。若上述配置密度為10個/mm2以上,則單元間距進一步變均勻。若上述配置密度為1000個/mm2以下,則液晶顯示元件之對比度進一步變良好。 In the liquid crystal display device, the arrangement density of the spacer for liquid crystal display elements per 1 mm 2 is preferably 10 pieces/mm 2 or more, and preferably 1000 pieces/mm 2 or less. When the above-described arrangement density is 10 pieces/mm 2 or more, the cell pitch is further uniformized. When the above-described arrangement density is 1000/mm 2 or less, the contrast of the liquid crystal display element is further improved.

以下,列舉實施例及比較例對本發明具體地進行說明。本發明並不僅限於以下之實施例。 Hereinafter, the present invention will be specifically described by way of examples and comparative examples. The invention is not limited to the following examples.

(1)有機無機混合粒子之製作 (1) Production of organic-inorganic hybrid particles

(實施例1) (Example 1)

準備積水化學工業公司製造之「Micropearl EYP-00375」(丙烯酸系聚合物,平均粒徑3.75μm)作為有機核。使該有機核100重量份、與作為界面活性劑之溴化十六烷基三甲基鋁40重量份分散於乙醇1800重量份與水200重量份之混合溶劑中,放入可分離式燒瓶內。加入25重量%氨水溶液80重量份,一面施加超音波一面進行攪拌。加入使四乙氧基矽烷600重量份溶解於乙醇1200重量份而成之液,一面施加超音波一面於25℃下攪拌24小時。抽出反應液,利用PTFE(聚四氟乙烯)製之薄膜過濾器進行抽氣過濾,反覆進行使用乙醇之洗淨2次後,利用50℃之真空乾燥機進行24小時乾燥,而獲得有機無機混合粒子。 "Micropearl EYP-00375" (acrylic polymer, average particle diameter 3.75 μm) manufactured by Sekisui Chemical Industry Co., Ltd. was prepared as an organic core. 100 parts by weight of the organic core and 40 parts by weight of cetyltrimethylaluminum bromide as a surfactant are dispersed in a mixed solvent of 1800 parts by weight of ethanol and 200 parts by weight of water, and placed in a separable flask. . 80 parts by weight of a 25 wt% aqueous ammonia solution was added, and the mixture was stirred while applying ultrasonic waves. A solution obtained by dissolving 600 parts by weight of tetraethoxy decane in 1200 parts by weight of ethanol was added, and the mixture was stirred at 25 ° C for 24 hours while applying ultrasonic waves. The reaction solution was taken out, and subjected to suction filtration using a membrane filter made of PTFE (polytetrafluoroethylene), and washed twice with ethanol, and then dried by a vacuum dryer at 50 ° C for 24 hours to obtain an organic-inorganic hybrid. particle.

(2)導電性粒子之製作 (2) Production of conductive particles

將獲得之有機無機混合粒子進行洗淨並乾燥後,藉由無電電鍍法,於獲得之有機無機混合粒子之表面形成鎳層,而製作導電性粒子。再者,鎳層之厚度為0.1μm。 After the obtained organic-inorganic hybrid particles were washed and dried, a nickel layer was formed on the surface of the obtained organic-inorganic hybrid particles by electroless plating to prepare conductive particles. Further, the thickness of the nickel layer was 0.1 μm.

(實施例2) (Example 2)

將有機核變更為積水化學工業公司製造之「Micropearl EX-00375」(苯乙烯系聚合物,平均粒徑3.75μm),將四乙氧基矽烷之添 加量變更為300重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 The organic core was changed to "Micropearl EX-00375" (styrene polymer, average particle diameter 3.75 μm) manufactured by Sekisui Chemical Co., Ltd., and the addition of tetraethoxy decane was added. The organic-inorganic hybrid particles and the conductive particles were obtained in the same manner as in Example 1 except that the amount was changed to 300 parts by weight.

(實施例3) (Example 3)

將有機核變更為積水化學工業公司製造之「Micropearl ELP-00375」(苯乙烯-丙烯酸酯共聚物,平均粒徑3.75μm),將乙醇變更為異丙醇,將四乙氧基矽烷之添加量變更為900重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 The organic core was changed to "Micropearl ELP-00375" (styrene-acrylate copolymer, average particle diameter 3.75 μm) manufactured by Sekisui Chemical Co., Ltd., and ethanol was changed to isopropanol to add tetraethoxydecane. The organic-inorganic hybrid particles and the conductive particles were obtained in the same manner as in Example 1 except that the amount was changed to 900 parts by weight.

(實施例4) (Example 4)

將有機核變更為積水化學工業公司製造之「Micropearl ELP-00375」(苯乙烯-丙烯酸酯共聚物,平均粒徑3.75μm),將乙醇變更為異丙醇,將四乙氧基矽烷之添加量變更為1200重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 The organic core was changed to "Micropearl ELP-00375" (styrene-acrylate copolymer, average particle diameter 3.75 μm) manufactured by Sekisui Chemical Co., Ltd., and ethanol was changed to isopropanol to add tetraethoxydecane. The organic-inorganic hybrid particles and the conductive particles were obtained in the same manner as in Example 1 except that the amount was changed to 1200 parts by weight.

(實施例5) (Example 5)

將有機核變更為積水化學工業公司製造之「Micropearl EX-00375」(苯乙烯系聚合物,平均粒徑3.75μm),將四乙氧基矽烷之添加量變更為100重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 In addition, the organic nucleus was changed to "Micropearl EX-00375" (styrene-based polymer, average particle diameter: 3.75 μm) manufactured by Sekisui Chemical Co., Ltd., and the amount of tetraethoxy decane was changed to 100 parts by weight. Organic-inorganic hybrid particles and conductive particles were obtained in the same manner as in Example 1.

(實施例6) (Example 6)

(1)鈀附著步驟 (1) Palladium attachment step

準備於實施例1中獲得之有機無機混合粒子。對該有機無機混合粒子進行蝕刻並水洗。繼而,於包含鈀觸媒8重量%之鈀觸媒化液100mL中添加有機無機混合粒子並進行攪拌。其後,進行過濾、洗淨。於pH值6之0.5重量%二甲胺硼烷液中添加有機無機混合粒子,而獲得附著有鈀之有機無機混合粒子。 The organic-inorganic hybrid particles obtained in Example 1 were prepared. The organic-inorganic hybrid particles were etched and washed with water. Then, the organic-inorganic hybrid particles were added to 100 mL of a palladium catalyst solution containing 8 wt% of a palladium catalyst and stirred. Thereafter, it was filtered and washed. The organic-inorganic hybrid particles were added to a 0.5 wt% dimethylamine borane solution having a pH of 6, to obtain an organic-inorganic hybrid particle to which palladium was attached.

(2)芯物質附著步驟 (2) Core substance attachment step

將附著有鈀之有機無機混合粒子於離子交換水300mL中攪拌3分 鐘,進行分散而獲得分散液。繼而,將金屬鎳粒子膏(平均粒徑100nm)1g歷時3分鐘添加於上述分散液中,而獲得附著有芯物質之有機無機混合粒子。 The organic-inorganic hybrid particles to which palladium is attached are stirred for 3 minutes in 300 mL of ion-exchanged water. The bell was dispersed to obtain a dispersion. Then, 1 g of a metal nickel particle paste (average particle diameter: 100 nm) was added to the above dispersion liquid for 3 minutes to obtain an organic-inorganic hybrid particle to which a core substance was attached.

(3)無電鍍鎳步驟 (3) Electroless nickel plating step

以與實施例1相同之方式於有機無機混合粒子之表面上形成鎳層,而製作導電性粒子。再者,鎳層之厚度為0.1μm。 A nickel layer was formed on the surface of the organic-inorganic hybrid particles in the same manner as in Example 1 to prepare conductive particles. Further, the thickness of the nickel layer was 0.1 μm.

(實施例7) (Example 7)

(1)絕緣性粒子之製作 (1) Production of insulating particles

向安裝有4口可分離式蓋、攪拌葉、三向旋塞、冷卻管及溫度探針之1000mL之可分離式燒瓶中,將含有甲基丙烯酸甲酯100mmol、N,N,N-三甲基-N-2-甲基丙烯醯氧基乙基氯化胺1mmol、及2,2'-偶氮雙(2-脒基丙烷)二鹽酸鹽1mmol之單體組合物以固形物成分率成為5重量%的方式稱取至離子交換水中後,以200rpm進行攪拌,於氮氣環境下以70℃進行聚合24小時。反應結束後,進行冷凍乾燥,而獲得於表面具有銨基、且平均粒徑220nm及CV值10%之絕緣性粒子。 To a 1000 mL separable flask equipped with four separable caps, stirring blades, three-way cocks, cooling tubes and temperature probes, 100 mmol of methyl methacrylate, N, N, N-trimethyl a monomer composition of 1 mmol of -N-2-methylpropenyloxyethylamine chloride and 1 mmol of 2,2'-azobis(2-amidinopropane) dihydrochloride was obtained as a solid component ratio After weighing into 5 parts by weight of the ion-exchanged water, the mixture was stirred at 200 rpm, and polymerization was carried out at 70 ° C for 24 hours under a nitrogen atmosphere. After completion of the reaction, lyophilization was carried out to obtain insulating particles having an ammonium group on the surface and having an average particle diameter of 220 nm and a CV value of 10%.

於超音波照射下使絕緣性粒子分散於離子交換水中,而獲得絕緣性粒子之10重量%水分散液。 The insulating particles were dispersed in ion-exchanged water under ultrasonic irradiation to obtain a 10% by weight aqueous dispersion of the insulating particles.

使於實施例6中獲得之導電性粒子10g分散於離子交換水500mL中,添加絕緣性粒子之水分散液4g,於室溫下攪拌6小時。利用3μm之篩網過濾器進行過濾後,進而利用甲醇進行洗淨,並進行乾燥,而獲得附著有絕緣性粒子之導電性粒子。 10 g of the conductive particles obtained in Example 6 was dispersed in 500 mL of ion-exchanged water, 4 g of an aqueous dispersion of insulating particles was added, and the mixture was stirred at room temperature for 6 hours. After filtering with a 3 μm mesh filter, it was further washed with methanol and dried to obtain conductive particles to which insulating particles were attached.

利用掃描式電子顯微鏡(SEM)進行觀察,結果,於導電性粒子之表面僅形成有1層利用絕緣性粒子之被覆層。藉由圖像解析,算出絕緣性粒子對於距導電性粒子中心2.5μm處之面積的被覆面積(即,絕緣性粒子之粒徑之投影面積),結果被覆率為30%。 Observation by a scanning electron microscope (SEM) revealed that only one coating layer using insulating particles was formed on the surface of the conductive particles. The coverage area of the insulating particles with respect to the area of 2.5 μm from the center of the conductive particles (that is, the projected area of the particle diameter of the insulating particles) was calculated by image analysis, and as a result, the coverage ratio was 30%.

(實施例8) (Example 8)

將四乙氧基矽烷600重量份變更為四乙氧基矽烷550重量份與甲基三甲氧基矽烷50重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 Organic-inorganic hybrid particles and conductivity were obtained in the same manner as in Example 1 except that 650 parts by weight of tetraethoxy decane was changed to 550 parts by weight of tetraethoxy decane and 50 parts by weight of methyltrimethoxy decane. particle.

(實施例9) (Example 9)

將四乙氧基矽烷600重量份變更為四乙氧基矽烷500重量份與甲基三甲氧基矽烷100重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 Organic-inorganic hybrid particles and conductivity were obtained in the same manner as in Example 1 except that 600 parts by weight of tetraethoxy decane was changed to 500 parts by weight of tetraethoxy decane and 100 parts by weight of methyltrimethoxy decane. particle.

(實施例10) (Embodiment 10)

將25重量%氨水溶液之添加量自80重量份變更為20重量份,除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 The organic-inorganic hybrid particles and the conductive particles were obtained in the same manner as in Example 1 except that the amount of the addition of the 25% by weight aqueous ammonia solution was changed from 80 parts by weight to 20 parts by weight.

(實施例11) (Example 11)

將有機核變更為積水化學工業公司製造之「Micropearl EYP-0025」(丙烯酸系聚合物,平均粒徑2.5μm),而代替積水化學工業公司製造之「Micropearl EYP-00375」(丙烯酸系聚合物,平均粒徑3.75μm),除此以外,以與實施例1相同之方式獲得有機無機混合粒子及導電性粒子。 "Micropearl EYP-0025" (acrylic polymer, average particle size: 2.5 μm) manufactured by Sekisui Chemical Co., Ltd., and replaced by "Micropearl EYP-00375" (acrylic polymer, manufactured by Sekisui Chemical Co., Ltd.). The organic-inorganic hybrid particles and the conductive particles were obtained in the same manner as in Example 1 except that the average particle diameter was 3.75 μm.

(比較例1) (Comparative Example 1)

以作為二氧化矽粒子之積水化學工業公司製造之「Micropearl SI-GH038」(二氧化矽、平均粒徑3.80μm)為比較例1之粒子(無機粒子)。使用該粒子,以與實施例1相同之方式獲得導電性粒子。 "Micropearl SI-GH038" (cerium oxide, average particle diameter 3.80 μm) manufactured by Sekisui Chemical Co., Ltd., which is a cerium oxide particle, is a particle (inorganic particle) of Comparative Example 1. Using the particles, conductive particles were obtained in the same manner as in Example 1.

(比較例2) (Comparative Example 2)

以積水化學工業公司製造之「Micropearl ELP-00375」(粒徑3.75μm)為比較例2之粒子(有機聚合物粒子)。使用該粒子,以與實施例1相同之方式獲得導電性粒子。 "Micropearl ELP-00375" (particle diameter: 3.75 μm) manufactured by Sekisui Chemical Co., Ltd. was used as the particles (organic polymer particles) of Comparative Example 2. Using the particles, conductive particles were obtained in the same manner as in Example 1.

(比較例3) (Comparative Example 3)

將離子交換水1600重量份加入可分離式燒瓶。加入25重量%氨水溶液10重量份,慢慢地攪拌。於其上層,以界面不錯亂之方式緩慢地添加甲基三甲氧基矽烷100重量份。油水界面消失後,加入25重量%氨水溶液30重量份,進而攪拌24小時。抽出反應液,利用PTFE製造之薄膜過濾器進行抽氣過濾,反覆進行使用乙醇之洗淨2次後,利用50℃之真空乾燥機進行24小時乾燥,而獲得非核殼型之有機無機混合粒子。使用獲得之有機無機混合粒子,以與實施例1相同之方式獲得導電性粒子。 1600 parts by weight of ion-exchanged water was placed in a separable flask. 10 parts by weight of a 25 wt% aqueous ammonia solution was added and stirred slowly. On the upper layer, 100 parts by weight of methyltrimethoxydecane was slowly added in such a manner that the interface was good. After the oil-water interface disappeared, 30 parts by weight of a 25 wt% aqueous ammonia solution was added, and the mixture was further stirred for 24 hours. The reaction solution was taken out, and subjected to suction filtration using a membrane filter made of PTFE, and washed twice with ethanol, and then dried by a vacuum dryer at 50 ° C for 24 hours to obtain non-core-shell type organic-inorganic hybrid particles. Conductive particles were obtained in the same manner as in Example 1 using the obtained organic-inorganic hybrid particles.

(比較例4) (Comparative Example 4)

於聚對苯二甲酸乙二酯6.5重量份中添加甲苯10重量份,進而添加二苯基甲烷二異氰酸酯1.42重量份,於甲苯回流下,於120℃下進行反應5小時。其後,冷卻至室溫,添加乙二胺0.35重量份、胺基系矽烷偶合劑(信越化學工業公司製造之「KBM-9103」)0.1重量份,於60℃下進行反應5小時。繼而,於減壓下蒸餾去除甲苯,而獲得兩末端具有羥基,且具有胺基甲酸酯鍵及脲鍵之聚胺基甲酸酯樹脂。 10 parts by weight of toluene was added to 6.5 parts by weight of polyethylene terephthalate, and further 1.42 parts by weight of diphenylmethane diisocyanate was added, and the reaction was carried out at 120 ° C for 5 hours under reflux of toluene. Thereafter, the mixture was cooled to room temperature, and 0.15 parts by weight of ethylenediamine and 0.1 part by weight of an amine-based decane coupling agent ("KBM-9103" manufactured by Shin-Etsu Chemical Co., Ltd.) were added, and the reaction was carried out at 60 ° C for 5 hours. Then, toluene was distilled off under reduced pressure to obtain a polyurethane resin having a hydroxyl group at both terminals and having a urethane bond and a urea bond.

將獲得之聚胺基甲酸酯樹脂400重量份、氧化鐵黃12重量份、及乙酸乙酯380重量份進行混合而獲得混合物。將獲得之混合物滴加於聚乙烯醇0.5重量%水溶液2000重量份中並且進行分散,而獲得樹脂。藉由濾紙過濾獲得之樹脂,自水中取出,利用50℃之真空乾燥機乾燥24小時,而獲得結合有矽烷偶合劑之聚胺基甲酸酯微粒子。 400 parts by weight of the obtained polyurethane resin, 12 parts by weight of iron oxide yellow, and 380 parts by weight of ethyl acetate were mixed to obtain a mixture. The obtained mixture was added dropwise to 2000 parts by weight of a polyvinyl alcohol 0.5% by weight aqueous solution and dispersed to obtain a resin. The resin obtained by filtration through a filter paper was taken out from the water and dried by a vacuum dryer at 50 ° C for 24 hours to obtain a polyurethane microparticle fine particle incorporating a decane coupling agent.

將獲得之聚胺基甲酸酯微粒子100重量份放入1L之燒瓶內,加入包含甲醇75重量份、水25重量份、四乙氧基矽烷2重量份、及25重量%氨水溶液10重量份之四乙氧基矽烷液,於攪拌下反應2小時。於過濾及洗淨後,進而再次利用與上述四乙氧基矽烷液同樣之處理液,對獲得之粒子進行相同之處理。抽出反應液,利用PTFE製造之薄膜過濾器進行抽氣過濾,反覆進行使用乙醇之洗淨2次後,利用50℃之真 空乾燥機乾燥24小時,而獲得有機無機混合粒子。使用該有機無機混合粒子,以與實施例1相同之方式獲得導電性粒子。 100 parts by weight of the obtained polyurethane microparticles were placed in a 1 L flask, and 75 parts by weight of methanol, 25 parts by weight of water, 2 parts by weight of tetraethoxydecane, and 10 parts by weight of a 25% by weight aqueous ammonia solution were added. The tetraethoxy decane solution was reacted for 2 hours with stirring. After the filtration and washing, the same treatment liquid as the above-mentioned tetraethoxysilane liquid was used again, and the obtained particles were subjected to the same treatment. The reaction solution was taken out, and the membrane filter made of PTFE was used for suction filtration, and the washing was repeated twice with ethanol, and then 50 ° C was used. The air dryer was dried for 24 hours to obtain organic-inorganic hybrid particles. Conductive particles were obtained in the same manner as in Example 1 using the organic-inorganic hybrid particles.

(比較例5) (Comparative Example 5)

將四乙氧基矽烷之添加量變更為20重量份,除此以外,以與比較例4相同之方式獲得有機無機混合粒子。使用該有機無機混合粒子,以與實施例1相同之方式獲得導電性粒子。 The organic-inorganic hybrid particles were obtained in the same manner as in Comparative Example 4 except that the amount of the tetraethoxy decane was changed to 20 parts by weight. Conductive particles were obtained in the same manner as in Example 1 using the organic-inorganic hybrid particles.

(評價) (Evaluation)

(1)有機無機混合粒子(其他粒子)中之有機核及無機殼中之矽原子及碳原子之含量 (1) Content of germanium atoms and carbon atoms in organic and inorganic shells in organic-inorganic hybrid particles (other particles)

藉由利用TEM/EDS法之線分析,對有機無機混合粒子中之有機核及無機殼中之矽原子、碳原子、氧原子及氮原子之含量進行測定。將相對於矽原子、碳原子、氧原子及氮原子之合計100重量%之各原子的重量%設為含量。再者,於實施例中之有機無機混合粒子中,於有機核及無機殼中不含有矽原子、碳原子、氧原子及氮原子以外之原子。又,對其他粒子中之矽原子、碳原子、氧原子及氮原子之含量進行測定。 The content of the ruthenium atom, the carbon atom, the oxygen atom and the nitrogen atom in the organic nucleus and the inorganic shell in the organic-inorganic hybrid particles was measured by line analysis by the TEM/EDS method. The weight % of each atom in an amount of 100% by weight based on the total of a halogen atom, a carbon atom, an oxygen atom, and a nitrogen atom is defined as a content. Further, in the organic-inorganic hybrid particles in the examples, atoms other than a halogen atom, a carbon atom, an oxygen atom, and a nitrogen atom are not contained in the organic core and the inorganic shell. Further, the content of the ruthenium atom, the carbon atom, the oxygen atom and the nitrogen atom in the other particles was measured.

(2)有機無機混合粒子(其他粒子)之粒徑、有機核之粒徑及無機殼之厚度 (2) Particle size of organic-inorganic hybrid particles (other particles), particle size of organic core, and thickness of inorganic shell

利用掃描式電子顯微鏡(Hitachi High-Technologies公司製造之「S-3500N」),針對獲得之有機無機混合粒子(其他粒子),拍攝3000倍之粒子圖像,利用游標卡尺對獲得之圖像中之粒子50個之粒徑進行測定,求出個數平均而求出有機無機混合粒子(其他粒子)之粒徑。 Using a scanning electron microscope ("S-3500N" manufactured by Hitachi High-Technologies Co., Ltd.), a particle image of 3000 times was taken for the obtained organic-inorganic hybrid particles (other particles), and particles in the obtained image were obtained by vernier calipers. The particle diameters of 50 were measured, and the number average was determined to determine the particle diameter of the organic-inorganic hybrid particles (other particles).

針對製作有機無機混合粒子時所使用之有機核,亦藉由與上述相同之方法測定粒徑。自有機無機混合粒子之粒徑與有機核之粒徑之差求出無機殼的厚度。 The particle diameter of the organic nucleus used in the production of the organic-inorganic hybrid particles was also measured by the same method as described above. The thickness of the inorganic shell was determined from the difference between the particle diameter of the organic-inorganic hybrid particles and the particle diameter of the organic core.

(3)有機無機混合粒子(其他粒子)之上述壓縮彈性模數(10%K值及 30%K值) (3) The above-mentioned compressive elastic modulus of organic-inorganic hybrid particles (other particles) (10% K value and 30% K value)

藉由上述之方法,使用微小壓縮試驗機(Fischer公司製造之「Fischerscope H-100」),對獲得之有機無機混合粒子(其他粒子)之上述壓縮彈性模數(10%K值及30%K值)進行測定。 The above-mentioned compression elastic modulus (10% K value and 30% K) of the obtained organic-inorganic hybrid particles (other particles) by a micro compression tester (Fischerscope H-100 manufactured by Fischer Co., Ltd.) by the above method Value) The measurement was performed.

(4)直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例(Q4之個數之比例(%)) (4) The ratio of the number of Q4 atoms (4%) directly bonded to four O-Si groups and directly bonded to four of the above-mentioned -O-Si groups ))

於獲得之有機無機混合粒子中之無機殼中,使用NMR光譜解析裝置(JEOL、ECX400),將藉由固體29Si NMR光譜解析(測定頻率:79.4254MHz、脈衝寬度:3.7、試樣保持器:8mm、試樣轉數:7kHz、累計次數:3600、測定溫度、25℃、等待時間:60秒)獲得之Q4(直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子)之峰面積與Q1~Q3(直接鍵結有1~3個-O-Si基且直接鍵結有1~3個上述-O-Si基中之1~3個氧原子之矽原子)之峰面積進行比較,藉此求出上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例(Q4之個數之比例)。 The inorganic shell in the obtained organic-inorganic hybrid particles was analyzed by solid 29 Si NMR spectrum using an NMR spectrum analyzer (JEOL, ECX400) (measurement frequency: 79.4254 MHz, pulse width: 3.7, sample holder) : 8mm, sample rotation number: 7kHz, cumulative number of times: 3600, measurement temperature, 25 ° C, waiting time: 60 seconds) Q4 obtained (direct bonding has 4 -O-Si groups and direct bonding has 4 above) The peak area of the four oxygen atoms in the -O-Si group is Q1~Q3 (1~3 -O-Si groups are directly bonded and 1~3 above-O-Si are directly bonded) Comparing the peak areas of the ruthenium atoms of 1 to 3 oxygen atoms in the base, thereby obtaining 100% of the total number of ruthenium atoms contained in the inorganic shell, and directly bonding 4 -O-Si And the ratio of the number of the argon atoms of the four oxygen atoms of the four -O-Si groups (the ratio of the number of Q4) is directly bonded.

(5)分散性1 (5) Dispersibility 1

使用獲得之有機無機混合粒子(其他粒子)作為液晶顯示元件用間隔物。再者,未對於實施例6、7中獲得之有機無機混合粒子進行分散性1之評價。於含有異丙醇70重量份與水30重量份之分散媒中,以獲得之間隔物分散液100重量%中固形物成分濃度成為2重量%之方式添加液晶顯示元件用間隔物,並進行攪拌,而獲得液晶顯示元件用間隔物分散液。 The obtained organic-inorganic hybrid particles (other particles) were used as a spacer for a liquid crystal display element. Further, the evaluation of the dispersibility 1 was not performed on the organic-inorganic hybrid particles obtained in Examples 6 and 7. In the dispersion medium containing 70 parts by weight of isopropyl alcohol and 30 parts by weight of water, the spacer for a liquid crystal display element is added and stirred in such a manner that the concentration of the solid content component is 2% by weight in the obtained spacer dispersion liquid. Further, a spacer dispersion liquid for a liquid crystal display element was obtained.

將獲得之液晶顯示元件用間隔物分散液於25℃下放置1分鐘。觀察於放置後之分散液中,液晶顯示元件用間隔物是否沈澱。利用下述之基準判定分散性1。 The obtained liquid crystal display element spacer dispersion was allowed to stand at 25 ° C for 1 minute. It was observed whether or not the spacer for the liquid crystal display element was precipitated in the dispersion liquid after standing. The dispersibility 1 was determined by the following criteria.

[分散性1之判定基準] [Determination of Dispersion 1]

○:於放置後之分散液中,於容器底部未發現液晶顯示元件用間隔物之沈澱物 ○: In the dispersion after the placement, no precipitate of the spacer for the liquid crystal display element was found at the bottom of the container.

×:於放置後之分散液中,於容器底部可確認液晶顯示元件用間隔物之沈澱物 ×: In the dispersion liquid after standing, the precipitate of the spacer for the liquid crystal display element can be confirmed at the bottom of the container

(6)分散性2 (6) Dispersibility 2

將雙酚A型環氧樹脂(三菱化學公司製造之「Epikote1009」)10重量份、丙烯酸系橡膠(重量平均分子量約80萬)40重量份、甲基乙基酮200重量份、微膠囊型硬化劑(旭化成化學公司製造之「HX3941HP」)50重量份、及矽烷偶合劑(Dow Corning Toray silicone公司製造之「SH6040」)2重量份進行混合,將獲得之導電性粒子以含量成為3重量%之方式進行添加,並使其分散,而獲得導電材料(樹脂組合物)。 10 parts by weight of bisphenol A type epoxy resin ("Epikote 1009" manufactured by Mitsubishi Chemical Corporation), 40 parts by weight of acrylic rubber (weight average molecular weight: about 800,000), 200 parts by weight of methyl ethyl ketone, and microcapsule type hardening 50 parts by weight of the agent ("HX3941HP" manufactured by Asahi Kasei Chemicals Co., Ltd.) and 2 parts by weight of a decane coupling agent ("SH6040" manufactured by Dow Corning Toray Silicon Co., Ltd.) were mixed, and the obtained conductive particles were 3% by weight. The addition is carried out in a manner and dispersed to obtain a conductive material (resin composition).

將獲得之導電材料於25℃下放置1小時。觀察放置後之分散液中,導電性粒子是否沈澱。利用下述之基準判定分散性1。 The obtained conductive material was allowed to stand at 25 ° C for 1 hour. Whether or not the conductive particles were precipitated in the dispersion after standing was observed. The dispersibility 1 was determined by the following criteria.

[分散性2之判定基準] [Determination of Dispersion 2]

○:於放置後之分散液中,導電性粒子未沈澱且未凝集 ○: Conductive particles were not precipitated and not agglomerated in the dispersion after standing

×:於放置後之分散液中,導電性粒子沈澱或凝集 ×: Conductive particles precipitate or agglomerate in the dispersion after standing

(7)連接電阻 (7) Connection resistance

連接構造體之製作:準備於上述(6)分散性2之評價中獲得之樹脂組合物(導電材料)(放置前)。將該導電材料於25℃下放置1小時。 Production of the connection structure: A resin composition (conductive material) obtained before the evaluation of the above (6) Dispersibility 2 (before standing). The conductive material was allowed to stand at 25 ° C for 1 hour.

將該放置後之導電材料塗佈於單面經脫模處理之厚度50μm之PET(聚對苯二甲酸乙二酯)膜,利用70℃之熱風進行5分鐘乾燥,而製作各向異性導電膜。獲得之各向異性導電膜之厚度為12μm。 The placed conductive material was applied to a PET (polyethylene terephthalate) film having a thickness of 50 μm which was subjected to release treatment on one side, and dried by hot air at 70 ° C for 5 minutes to prepare an anisotropic conductive film. . The thickness of the anisotropic conductive film obtained was 12 μm.

將獲得之各向異性導電膜切割成5mm×5mm之尺寸。將經切割 之各向異性導電膜貼附於一面設置有具有電阻測定用之環繞線之ITO電極(高度0.1μm、L/S=20μm/20μm)之PET基板(寬度3cm、長度3cm)之ITO電極側的大致中央。繼而,將設置有相同金電極之2層軟性印刷基板(寬度2cm、長度1cm)以電極彼此重疊之方式進行位置對準後進行貼合。將該PET基板與2層軟性印刷基板之積層體於10N、180℃、及20秒鐘之壓接條件下進行熱壓接而獲得連接構造體。再者,使用於聚醯亞胺膜形成有銅電極,且於銅電極表面鍍有Au之2層軟性印刷基板。 The obtained anisotropic conductive film was cut into a size of 5 mm × 5 mm. Will be cut The anisotropic conductive film was attached to the ITO electrode side of a PET substrate (width: 3 cm, length: 3 cm) on which an ITO electrode (height of 0.1 μm, L/S = 20 μm / 20 μm) having a surrounding line for resistance measurement was attached. Basically central. Then, two flexible printed boards (width: 2 cm, length: 1 cm) provided with the same gold electrode were aligned so that the electrodes overlap each other, and then bonded. The laminate of the PET substrate and the two-layer flexible printed substrate was thermocompression bonded under pressure bonding conditions of 10 N, 180 ° C, and 20 seconds to obtain a bonded structure. Further, a two-layer flexible printed circuit board in which a copper electrode is formed on a polyimide film and Au is plated on the surface of the copper electrode is used.

藉由4端子法,對獲得之連接構造體之相對向之電極間的連接電阻進行測定。利用下述之基準判定連接電阻。 The connection resistance between the electrodes of the obtained connection structure was measured by a four-terminal method. The connection resistance was determined using the following criteria.

[連接電阻之評價基準] [Evaluation criteria for connection resistance]

○○:連接電阻為3.0Ω以下 ○○: The connection resistance is 3.0 Ω or less

○:連接電阻超過3.0Ω且為4.0Ω以下 ○: The connection resistance exceeds 3.0 Ω and is 4.0 Ω or less.

△:連接電阻超過4.0Ω且為5.0Ω以下 △: The connection resistance exceeds 4.0 Ω and is 5.0 Ω or less.

×:連接電阻超過5.0Ω ×: The connection resistance exceeds 5.0Ω

(8)絕緣可靠性 (8) Insulation reliability

將於上述(7)連接電阻之評價中獲得之連接構造體於85℃、及85%之環境中放置100小時。其後,於25處測定鄰接之電極間為絕緣狀態還是導通狀態。利用下述之基準判定絕緣可靠性。 The bonded structure obtained in the evaluation of the above (7) connection resistance was allowed to stand in an environment of 85 ° C and 85% for 100 hours. Thereafter, at 25 points, it was measured whether the adjacent electrodes were in an insulated state or a conductive state. The insulation reliability was determined using the following criteria.

[絕緣可靠性之判定基準] [Determination of insulation reliability]

○○:絕緣狀態之電極間為25處 ○○: 25 places between the electrodes in the insulated state

○:絕緣狀態之電極間為20處以上且未達25處 ○: There are 20 or more electrodes in the insulated state and less than 25 places.

△:絕緣狀態之電極間為15處以上且未達20處 △: 15 or more electrodes and less than 20 places in the insulated state

×:絕緣狀態之電極間未達15處 ×: less than 15 between the electrodes in the insulated state

(9)無機殼與導電層之密接性1 (9) Adhesion between inorganic shell and conductive layer 1

將獲得之導電性粒子1.0g、直徑1mm之氧化鋯球(AS ONE公司 製造之「YTZ-10」)45g、及甲苯17g放入200mL之燒杯(內徑6.7cm)中,使用三一馬達攪拌機(HEIDON公司製造之「BL1200」),於25℃下以400rpm攪拌6分鐘。繼而,將攪拌後之有機無機混合粒子以攪拌後之有機無機混合粒子之無機殼不破裂的方式進行分別。其後,利用掃描式電子顯微鏡對導電性粒子進行觀察。 1.0 g of conductive particles and zirconia balls of 1 mm in diameter (AS ONE) 45 g of the manufactured "YTZ-10" and 17 g of toluene were placed in a 200 mL beaker (inner diameter: 6.7 cm), and stirred at 400 rpm for 6 minutes at 25 ° C using a Sany motor mixer ("BL1200" manufactured by HEIDON Corporation). . Then, the agitated organic-inorganic hybrid particles are each dispersed so that the inorganic shell of the organic-inorganic hybrid particles after stirring does not break. Thereafter, the conductive particles were observed by a scanning electron microscope.

藉由上述觀察,計數攪拌後之導電性粒子100個中,發現導電層剝離之導電性粒子之個數。利用下述之基準判定無機殼與導電層之密接性1。 From the above observation, 100 pieces of the conductive particles after stirring were counted, and the number of conductive particles from which the conductive layer was peeled off was found. The adhesion between the inorganic shell and the conductive layer was determined by the following criteria.

[無機殼與導電層之密接性1之判定基準] [Criteria for judging the adhesion of the inorganic shell to the conductive layer 1]

○:發現導電層剝離之導電性粒子之個數未達5個 ○: The number of conductive particles in which the conductive layer was peeled off was found to be less than five

△:發現導電層剝離之導電性粒子之個數為5個以上且未達10個 △: The number of conductive particles in which the conductive layer was peeled off was found to be 5 or more and less than 10

×:發現導電層剝離之導電性粒子之個數為10個以上 ×: The number of conductive particles in which the conductive layer was peeled off was found to be 10 or more

(10)無機殼與導電層之密接性2 (10) Adhesion between inorganic shell and conductive layer 2

於無機殼與導電層之密接性1之評價中,將使用三一馬達攪拌機之攪拌條件變更為於25℃下以600rpm攪拌12分鐘,除此以外,以相同方式對無機殼與導電層之密接性2進行評價。利用與上述無機殼與導電層之密接性1之判定基準相同之基準,判定無機殼與導電層之密接性2。 In the evaluation of the adhesion 1 of the inorganic shell and the conductive layer, the stirring condition of the Sany motor mixer was changed to be stirred at 600 rpm for 12 minutes at 25 ° C, and the inorganic shell and the conductive layer were treated in the same manner. The adhesion 2 was evaluated. The adhesion between the inorganic shell and the conductive layer 2 was determined on the same basis as the criterion for determining the adhesion between the inorganic shell and the conductive layer.

將結果示於下述之表1、2。再者,於實施例1~5、8~11中獲得之有機無機混合粒子之縱橫比均為1.2以下。再者,實施例1、3、4、6~9、11中之連接電阻之評價結果均為「○」,但實施例1、3、4、6、7、9、11中之連接電阻之值低於實施例8中之連接電阻之值。 The results are shown in Tables 1 and 2 below. Further, the aspect ratio of the organic-inorganic hybrid particles obtained in Examples 1 to 5 and 8 to 11 was 1.2 or less. In addition, the evaluation results of the connection resistances in Examples 1, 3, 4, 6 to 9, and 11 were all "○", but the connection resistances in Examples 1, 3, 4, 6, 7, 9, and 11 were The value is lower than the value of the connection resistance in the embodiment 8.

又,實施例6、7中之連接電阻之值低於實施例1、3、4、9、11中之連接電阻之值,實施例6中之連接電阻之值低於實施例7中之連接電阻之值。可認為受到突起之影響。 Further, the values of the connection resistances in the embodiments 6 and 7 are lower than the values of the connection resistances in the first, third, fourth, ninth, and eleventh embodiments, and the value of the connection resistance in the embodiment 6 is lower than that in the seventh embodiment. The value of the resistor. It can be considered to be affected by the protrusions.

(11)作為液晶顯示元件用間隔物之使用例 (11) Example of use as a spacer for a liquid crystal display element

STN型液晶顯示元件之製作:於含有異丙醇70重量份與水30重量份之分散媒中,以獲得之間隔物分散液100重量%中固形物成分濃度成為2重量%之方式添加實施例1~5、8~11之液晶顯示元件用間隔物(有機無機混合粒子),並進行攪拌,而獲得液晶顯示元件用間隔物分散液。 Preparation of STN-type liquid crystal display device: In the dispersion medium containing 70 parts by weight of isopropyl alcohol and 30 parts by weight of water, the solid content component concentration was 2% by weight in 100% by weight of the obtained spacer dispersion liquid. A spacer (organic-inorganic hybrid particle) for a liquid crystal display element of 1 to 5 and 8 to 11 is stirred and a spacer dispersion liquid for a liquid crystal display element is obtained.

藉由CVD法,於一對透明玻璃板(長50mm、寬50mm、厚0.4mm)之一面蒸鍍SiO2膜後,藉由濺鍍而於SiO2膜之表面整體形成ITO膜。藉由旋轉塗佈法,將聚醯亞胺配向膜組合物(日產化學公司製造,SE3510)塗佈於獲得之附ITO膜之玻璃基板,於280℃下焙燒90分鐘,藉此形成聚醯亞胺配向膜。對配向膜實施摩擦處理後,於一基板之配向膜側將液晶顯示元件用間隔物以每1mm2成為100~200個之方式進行濕式散佈。於另一基板之周邊形成密封劑後,使該基板與散佈有間隔物之基板以摩擦方向成為90°之方式對向配置,並將兩者貼合。其後,於160℃下進行90分鐘處理,使密封劑硬化而獲得空單元(未注入液晶之顯示器)。於獲得之空單元中,注入加入有手性劑之STN型液晶(DIC公司製造),繼而利用密封劑堵住注入口後,於120℃下進行30分鐘熱處理而獲得STN型液晶顯示元件。 An SiO 2 film was deposited on one surface of a pair of transparent glass plates (length 50 mm, width 50 mm, thickness 0.4 mm) by a CVD method, and then an ITO film was formed on the entire surface of the SiO 2 film by sputtering. The polyimine alignment film composition (manufactured by Nissan Chemical Co., Ltd., SE3510) was applied onto the obtained glass substrate with an ITO film by a spin coating method, and baked at 280 ° C for 90 minutes to form a polyfluorene. Amine alignment film. After the rubbing treatment is applied to the alignment film, the spacer for the liquid crystal display element is wet-laid so as to be 100 to 200 per 1 mm 2 on the alignment film side of the substrate. After the sealant is formed on the periphery of the other substrate, the substrate and the substrate on which the spacer is dispersed are disposed to face each other with the rubbing direction at 90°, and the two are bonded together. Thereafter, the treatment was carried out at 160 ° C for 90 minutes to harden the sealant to obtain an empty cell (display without liquid crystal injection). In the obtained empty cell, STN-type liquid crystal (manufactured by DIC Corporation) containing a chiral agent was injected, and then the injection port was blocked with a sealant, and then heat-treated at 120 ° C for 30 minutes to obtain an STN-type liquid crystal display device.

於獲得之液晶顯示元件中,藉由實施例1~5、8~11之液晶顯示元件用間隔物而良好地控制基板間之間隔。又,液晶顯示元件顯示良好之顯示品質。 In the obtained liquid crystal display device, the spacers for the liquid crystal display devices of Examples 1 to 5 and 8 to 11 were used to favorably control the interval between the substrates. Moreover, the liquid crystal display element exhibits good display quality.

1‧‧‧導電性粒子 1‧‧‧Electrical particles

2‧‧‧導電層 2‧‧‧ Conductive layer

11‧‧‧有機無機混合粒子 11‧‧‧Organic and inorganic mixed particles

12‧‧‧有機核 12‧‧‧Organic core

13‧‧‧無機殼 13‧‧‧Inorganic shell

Claims (10)

一種有機無機混合粒子,其具備有機核與配置於上述有機核之表面上之無機殼,且上述有機核100重量%中,上述有機核所含有之矽原子之含量為10重量%以下且上述有機核所含有之碳原子之含量為50重量%以上,上述無機殼100重量%中,上述無機殼所含有之矽原子之含量為50重量%以上且上述無機殼所含有之碳原子之含量為30重量%以下,上述無機殼之厚度相對於上述有機核之半徑之比為0.05以上且0.70以下。 An organic-inorganic hybrid particle comprising an organic core and an inorganic shell disposed on a surface of the organic core, wherein the content of the ruthenium atom contained in the organic nucleus is 10% by weight or less and 100% by weight or more of the organic core The content of the carbon atom contained in the organic nucleus is 50% by weight or more, and the content of the ruthenium atom contained in the inorganic shell is 50% by weight or more and the carbon atom contained in the inorganic shell is 100% by weight of the inorganic shell. The content is 30% by weight or less, and the ratio of the thickness of the inorganic shell to the radius of the organic core is 0.05 or more and 0.70 or less. 如請求項1之有機無機混合粒子,其係用以於表面上形成導電層而獲得具有上述導電層之導電性粒子,或者用作液晶顯示元件用間隔物。 The organic-inorganic hybrid particle of claim 1, which is used for forming a conductive layer on a surface to obtain conductive particles having the above-mentioned conductive layer, or as a spacer for a liquid crystal display element. 如請求項2之有機無機混合粒子,其係用以於表面上形成導電層而獲得具有上述導電層之導電性粒子。 The organic-inorganic hybrid particle of claim 2, which is used for forming a conductive layer on a surface to obtain conductive particles having the above-mentioned conductive layer. 如請求項1至3中任一項之有機無機混合粒子,其中於上述有機核與上述無機殼之間未進行化學鍵結。 The organic-inorganic hybrid particle according to any one of claims 1 to 3, wherein no chemical bonding is carried out between the organic core and the inorganic shell. 如請求項1至3中任一項之有機無機混合粒子,其中上述無機殼之厚度為50nm以上且2000nm以下。 The organic-inorganic hybrid particle according to any one of claims 1 to 3, wherein the inorganic shell has a thickness of 50 nm or more and 2000 nm or less. 如請求項1至3中任一項之有機無機混合粒子,其中上述有機核之粒徑為0.5μm以上且100μm以下。 The organic-inorganic hybrid particle according to any one of claims 1 to 3, wherein the organic core has a particle diameter of 0.5 μm or more and 100 μm or less. 如請求項1至3中任一項之有機無機混合粒子,其中上述無機殼所含有之矽原子之總個數100%中,直接鍵結有4個-O-Si基且直接鍵結有4個上述-O-Si基中之4個氧原子之矽原子之個數的比例 為50%以上。 The organic-inorganic hybrid particle according to any one of claims 1 to 3, wherein 100% of the total number of germanium atoms contained in the inorganic shell is directly bonded with 4 -O-Si groups and directly bonded Proportion of the number of germanium atoms of four oxygen atoms in the above four -O-Si groups More than 50%. 一種導電性粒子,其具備:如請求項1至7中任一項之有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層。 An electroconductive particle comprising the organic-inorganic hybrid particle according to any one of claims 1 to 7 and a conductive layer disposed on a surface of the organic-inorganic hybrid particle. 一種導電材料,其含有導電性粒子與黏合劑樹脂,且上述導電性粒子具備如請求項1至7中任一項之有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層。 A conductive material comprising a conductive particle and a binder resin, wherein the conductive particle comprises the organic-inorganic hybrid particle according to any one of claims 1 to 7, and a conductive layer disposed on a surface of the organic-inorganic hybrid particle . 一種連接構造體,其具備:於表面具有第1電極之第1連接對象構件、於表面具有第2電極之第2連接對象構件、及將上述第1連接對象構件與上述第2連接對象構件連接之連接部,且上述連接部由導電性粒子形成,或者由含有上述導電性粒子與黏合劑樹脂之導電材料形成,且上述導電性粒子具備如請求項1至7中任一項之有機無機混合粒子、與配置於上述有機無機混合粒子之表面上之導電層,且上述第1電極與上述第2電極由上述導電性粒子電性連接。 A connection structure including: a first connection target member having a first electrode on a surface thereof, a second connection target member having a second electrode on a surface thereof, and a connection between the first connection target member and the second connection target member a connection portion formed of conductive particles or formed of a conductive material containing the conductive particles and a binder resin, and the conductive particles having the organic-inorganic hybrid according to any one of claims 1 to 7. The particles and the conductive layer disposed on the surface of the organic-inorganic hybrid particles, wherein the first electrode and the second electrode are electrically connected to each other by the conductive particles.
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