TWI573219B - A flow path holder and an image sensing device using the flow path holder - Google Patents
A flow path holder and an image sensing device using the flow path holder Download PDFInfo
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- TWI573219B TWI573219B TW104126642A TW104126642A TWI573219B TW I573219 B TWI573219 B TW I573219B TW 104126642 A TW104126642 A TW 104126642A TW 104126642 A TW104126642 A TW 104126642A TW I573219 B TWI573219 B TW I573219B
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Description
本發明係有關於一種流道軌座及使用該流道軌座的影像檢測裝置,尤指一種提供盛載複數電子元件呈矩陣排列之載盤於其上作輸送之流道軌座及使用該流道軌座的影像檢測裝置。 The present invention relates to a flow path rail seat and an image detecting device using the same, and more particularly to a flow path rail seat for carrying a carrier on which a plurality of electronic components are arranged in a matrix, and using the same Image detection device for the flow rail seat.
按,一般電子元件由於微細及量大屬性,常在進行加工製程時採用可盛載複數電子元件呈矩陣排列之載盤作為治具,此類載盤通常呈矩形片狀,為了自動化操作,通常被輸送於一流道軌座中,該流道軌座除提供輸送載盤的功能,也提供載盤定位其上進行加工製程的定位功能;一般的流道軌座會具有形成軌道的二平行軌架,二軌架相隔間距並設有延設整個軌道長度的流道皮帶,使被輸送的載盤位於流道皮帶上於二軌道入口及出口端間被移送或定位;而一般載盤在流道皮帶中定位時,通常在二軌架間設有一治具,藉由治具之操作,使載盤在治具上被定位,以便進行載盤上盛載的複數電子元件加工。 According to the general micro-components, the electronic components are often used in the processing process to use a carrier tray in which a plurality of electronic components are arranged in a matrix. The carrier is usually in the form of a rectangular sheet, which is usually used for automation. It is conveyed in a first-class rail seat. In addition to providing the function of transporting the carrier, the runner rail seat also provides a positioning function for the processing of the carrier on the carrier; the general runner rail has two parallel rails forming a track. The shelf and the two rails are spaced apart from each other and are provided with a flow path belt extending the length of the entire track, so that the transported carrier is located on the flow path belt and is transferred or positioned between the entrance and exit ends of the two tracks; When positioning in the belt, a fixture is usually arranged between the two rails, and the carrier is positioned on the fixture by the operation of the fixture to process the plurality of electronic components carried on the carrier.
該先前技術中,當載盤依加工需要而與下方治具在長、寬、面積上必須幾乎相當時,一般位於流道皮帶輸送表面下方用以感測載盤被輸送到位的感測器,其感測訊號將被治具所阻擋而不易偵測到載盤已到位,以致經常造成載盤過度輸送而移出治具外才被偵測到,使在對載盤上盛載的複數電子元件加工時,精度容易出現誤差而必須增加校正之程序;另,先前技術在載盤到位時,常須以一彈性元件自一側軌架外朝二軌架間所停 置的載盤腹側中央進行推抵,以使載盤定位穩固俾便加工,但該單點定位不僅在穩定性上容易受機台其它機構位移震動而移位,彈性推抵的鬆緊度亦易因操作次數過多而出現彈性疲乏之鬆弛;由於上述檢測、定位的精度難以有效掌控,現有流道軌座應用在例如點膠、封裝上尚可,但對於將該流道軌座應用在AOI的影像檢測上,將困難達到檢測的穩定及精度。 In the prior art, when the carrier is required to be almost equal in length, width and area according to the processing needs, it is generally located below the flow path of the flow path belt to sense the sensor in which the carrier is transported into position. The sensing signal will be blocked by the fixture and it is not easy to detect that the carrier is in place, so that the carrier is often over-transported and removed from the fixture, so that the plurality of electronic components carried on the carrier are detected. When processing, the accuracy is prone to errors and the correction procedure must be added. In addition, the prior art often requires an elastic element to be stopped from the side of the rail to the rail between the two rails when the carrier is in place. The center of the ventral side of the carrier is pushed to make the carrier position stable and easy to process. However, the single point positioning is not only easily displaced by the displacement and vibration of other mechanisms of the machine, but also the elasticity of the elastic pushing. It is easy to loosen the elastic fatigue due to too many operations; because the accuracy of the above detection and positioning is difficult to control effectively, the existing flow rail seat can be applied to, for example, dispensing and packaging, but the flow rail is applied to the AOI. In the image detection, it will be difficult to achieve the stability and accuracy of the detection.
爰是,本發明的目的,在於提供一種可精確偵測到載盤已到位的流道軌座。 Accordingly, it is an object of the present invention to provide a flow path rail that accurately detects that the carrier is in place.
本發明的另一目的,在於提供一種使用該本發明的目的之流道軌座的影像檢測裝置。 Another object of the present invention is to provide an image detecting apparatus using the flow path rail of the object of the present invention.
依據本發明目的之流道軌座,包括:具有形成軌道的二平行軌架,二軌架相隔間距並各於內側分別設有延設整個軌道長度的流道皮帶,二軌架內側之二流道皮帶間藉一連動軸及連動軸兩端之驅動輪連動,該連動軸並受一在軌架外的馬達所驅動,藉此使軌架內側的流道皮帶同步但不同向轉動,以將置於二者間的流道皮帶上一載盤移入或移出二平行軌架所形成的軌道;該其中一軌架內側設有一檢測元件,其位於靠一出口端的一側,且位於該載盤由一入口端朝出口端搬送的輸送流路經過的下方,並以朝上並傾斜發射檢測訊號的方式設置;該設置檢測元件的該軌架上設有一止擋驅動件,該止擋驅動件驅動一止擋部凸伸置於載盤由入口端朝出口端搬送的輸送流路。 The flow path rail seat according to the object of the present invention comprises: two parallel rails having a track formed, and the two rail frames are spaced apart from each other and respectively provided on the inner side with a flow path belt extending the length of the entire track, and two flow paths on the inner side of the two rail frames The belt is connected by a linkage shaft and a driving wheel at both ends of the linkage shaft, and the linkage shaft is driven by a motor outside the rail frame, so that the flow belt belt inside the rail frame is synchronized but rotated in different directions to be placed A track on the flow path belt between the two moves into or out of the track formed by the two parallel rails; one of the inner sides of the rail is provided with a detecting component located on one side of the outlet end, and the carrier is located on the carrier a conveying flow path that is conveyed toward the outlet end of the inlet end passes, and is disposed upwardly and obliquely to emit a detection signal; the rail frame on which the detecting element is disposed is provided with a stopper driving member, and the stopper driving member drives A stop portion protrudes from the conveying flow path in which the carrier is conveyed from the inlet end toward the outlet end.
依據本發明另一目的之影像檢測裝置,使用如所述流道軌座,一檢測裝置設於一具有X軸向滑軌的第一軌座上,該第一軌座被二立柱所架高在一適當之高度;檢測裝置以Z軸向設置於第一軌座的一滑座上,可被驅動而受滑座連動在第一軌座的X軸向滑軌作位移,並可對Z軸向下方的物件進行檢視;該流道軌座,設於一具有Y軸向滑軌之第二軌座上,流 道軌座呈X軸向設置於該檢測裝置下方,並提供一X軸向之輸送流路,以承載並搬送位其中之載盤。 According to another aspect of the present invention, an image detecting apparatus is used, such as the flow path rail seat, a detecting device is disposed on a first rail seat having an X-axis slide rail, and the first rail seat is elevated by two columns At a suitable height; the detecting device is disposed on a sliding seat of the first rail seat in the Z-axis direction, and can be driven to be displaced by the sliding seat in the X-axis sliding rail of the first rail seat, and can be aligned with Z The object below the axial direction is inspected; the flow rail seat is disposed on a second rail seat having a Y-axis slide rail, and flows The rail seat is disposed X below the detecting device and provides an X-axis conveying flow path for carrying and transporting the carrier therein.
本發明實施例之流道軌座及使用該流道軌座的影像檢測裝置,其傾斜發射檢測訊號方式設置的檢測元件可避免載盤輸送逾位;而抵推單元以二相隔間距設置的抵推組件可避免彈性元件之鬆緊不確定性外,二抵推組件雙點抵觸之定位穩定性可以減少受機台其它機構位移震動而移位;而吸盤上複數個以矩陣排列佈設的吸嘴除可吸附整個載盤防止部份翹曲外,對於在表面度仍存在翹曲的部份,可藉由微調座上的該微調單元來進行微調,使對於將該流道軌座應用在AOI的影像檢測上,更容易達到檢測的穩定及精度。 The flow path rail seat of the embodiment of the present invention and the image detecting device using the flow path rail seat, the detecting element provided by the tilt emission detecting signal mode can avoid the carrier plate over-positioning; and the resisting unit is disposed at a two-phase spacing The pushing component can avoid the elastic uncertainty of the elastic component, and the positioning stability of the two-point resisting component of the two-pushing component can be reduced by the displacement vibration of other mechanisms of the machine; and the plurality of suction nozzles arranged in a matrix are arranged on the suction cup. The entire carrier can be adsorbed to prevent partial warpage. For the portion where the surface is still warped, the fine adjustment unit on the fine adjustment seat can be fine-tuned to apply the flow rail to the AOI. In image detection, it is easier to achieve stability and accuracy of detection.
A‧‧‧檢測裝置 A‧‧‧Detection device
A1‧‧‧第一軌座 A1‧‧‧First rail seat
A2‧‧‧立柱 A2‧‧‧ column
A3‧‧‧滑座 A3‧‧‧ slide
B‧‧‧流道軌座 B‧‧‧Railway
B1‧‧‧入口端 B1‧‧‧ entrance end
B2‧‧‧出口端 B2‧‧‧export end
B3‧‧‧軌架 B3‧‧‧rail
B31‧‧‧流道皮帶 B31‧‧‧Flower belt
B32‧‧‧連動軸 B32‧‧‧ linkage axis
B321‧‧‧驅動輪 B321‧‧‧ drive wheel
B33‧‧‧凹設區間 B33‧‧‧ recessed interval
B4‧‧‧馬達 B4‧‧‧Motor
B5‧‧‧檢測元件 B5‧‧‧Detection components
B51‧‧‧檢測訊號 B51‧‧‧Detection signal
B6‧‧‧止擋驅動件 B6‧‧‧stop drive
B61‧‧‧止擋部 B61‧‧‧stop
B7‧‧‧抵推單元 B7‧‧‧Resistance unit
B71‧‧‧抵推組件 B71‧‧‧Resist the component
B711‧‧‧固定座 B711‧‧‧ Fixed seat
B712‧‧‧抵推部 B712‧‧‧Remove the Ministry
B713‧‧‧抵推驅動件 B713‧‧‧Resistance drive
B8‧‧‧治具 B8‧‧‧ fixture
B81‧‧‧底座 B81‧‧‧Base
B82‧‧‧置座 B82‧‧‧Place
B83‧‧‧滑軌 B83‧‧‧rails
B831‧‧‧滑座 B831‧‧‧Slide
B84‧‧‧底部固定座 B84‧‧‧Bottom mount
B841‧‧‧樞軸 B841‧‧‧ pivot
B842‧‧‧揚昇驅動件 B842‧‧‧ Lifting drive
B843‧‧‧缸桿 B843‧‧‧Cylinder rod
B85‧‧‧揚昇座 B85‧‧‧扬升座
B86‧‧‧微調座 B86‧‧‧ fine tuning seat
B861‧‧‧微調單元 B861‧‧‧ fine tuning unit
B862‧‧‧彈性元件 B862‧‧‧Flexible components
B863‧‧‧扣件 B863‧‧‧ Fasteners
B864‧‧‧外螺紋 B864‧‧‧ external thread
B865‧‧‧螺抵件 B865‧‧‧ Screws
B866‧‧‧鏤空區間 B866‧‧‧Small space
B87‧‧‧吸盤 B87‧‧‧Sucker
B871‧‧‧吸嘴 B871‧‧ ‧ nozzle
C‧‧‧第二軌座 C‧‧‧Second rail seat
D‧‧‧載盤 D‧‧‧ Carrier
圖1係本發明實施例中影像檢測裝置之立體示意圖。 1 is a perspective view of an image detecting device in an embodiment of the present invention.
圖2係本發明實施例中流道軌座配合載盤之立體分解示意圖。 2 is a perspective exploded view of a flow path rail seat mating carrier in an embodiment of the present invention.
圖3係本發明實施例中載盤及流道軌座之立體分解示意圖。 3 is a perspective exploded view of the carrier and the runner rail seat in the embodiment of the present invention.
圖4係本發明實施例中檢測元件與止擋驅動件之構造示意圖。 4 is a schematic structural view of a detecting element and a stopper driving member in the embodiment of the present invention.
圖5係本發明實施例中抵推單元的抵推組件構造示意圖。 FIG. 5 is a schematic structural view of an anti-push component of the anti-pushing unit in the embodiment of the present invention.
圖6係本發明實施例中治具底部構造之立體示意圖。 Figure 6 is a perspective view showing the bottom structure of the jig in the embodiment of the present invention.
圖7係本發明實施例中流道軌座出口端之示意圖。 Figure 7 is a schematic view of the outlet end of the runner rail seat in the embodiment of the present invention.
圖8係本發明實施例中微調座上微調單元之構造示意圖。 FIG. 8 is a schematic structural view of a fine adjustment unit on a fine adjustment seat in an embodiment of the present invention.
請參閱圖1、2,本發明實施例流道軌座及使用該流道軌座的影像檢測裝置可以圖中之使用在AOI影像檢測之裝置為例,包括: 一檢測裝置A,例如CCD鏡頭之影像檢測裝置,其設於一具有X軸向滑軌的第一軌座A1上,該第一軌座A1被二立柱A2所架高在一適當之高度;檢測裝置A以Z軸向設置於第一軌座A1的一滑座A3上,可被驅動而受滑座A3連動在第一軌座A1的X軸向滑軌作位移,本身之CCD鏡頭並可對Z軸向下方的物件進行檢視;一流道軌座B,設於一具有Y軸向滑軌之第二軌座C上,流道軌座B呈X軸向設置於該檢測裝置A下方,並提供一X軸向之輸送流路,以承載並搬送位其中之載盤D,該載盤D可由流道軌座B的X軸向入口端B1外之一入料裝置(LOAD,圖中未示)輸入,並於完成檢測後,由流道軌座B的X軸向出口端B2排出至外部一卸載裝置(UNLOAD,圖中未示)進行收集;並在操作人員擬作單一載盤D檢測時,使流道軌座B被驅動經該具有Y軸向滑軌之第二軌座C移送至操作人員前,以進行載盤D的人工置放,並再使之被驅動移至該檢測裝置A下方進行檢測。 Referring to FIG. 1 and FIG. 2, the flow path rail seat of the embodiment of the present invention and the image detecting device using the same are used in the AOI image detecting device as an example, including: a detecting device A, such as an image detecting device for a CCD lens, is disposed on a first rail seat A1 having an X-axis slide rail, and the first rail seat A1 is elevated by a two-column A2 at an appropriate height; The detecting device A is disposed on a sliding seat A3 of the first rail seat A1 in the Z-axis direction, and can be driven to be displaced by the slide rail A3 in the X-axis slide rail of the first rail seat A1, and the CCD lens itself is The object below the Z-axis can be inspected; the first-class rail seat B is disposed on a second rail seat C having a Y-axis slide rail, and the runner rail seat B is disposed X below the detecting device A in the X-axis direction. And providing an X-axis conveying flow path for carrying and transporting the carrier D therein, which can be fed by one of the X-axis inlet ends B1 of the flow channel rail B (LOAD, figure) Input (not shown), and after completion of the test, is discharged from the X-axis outlet end B2 of the flow path rail B to an external unloading device (UNLOAD, not shown) for collection; and the operator intends to make a single carrier During the D detection, the flow path rail B is driven to be transported to the operator via the second rail base C having the Y-axis slide rail to perform manual placement of the carrier D, and then The drive is moved to the bottom of the detecting means A detects.
請參閱圖3,該流道軌座B具有形成軌道的二平行軌架B3,二軌架B3相隔間距並各於內側分別設有延設整個軌道長度的流道皮帶B31,二軌架B3內側之二流道皮帶B31間藉一連動軸B32及連動軸B32兩端之驅動輪B321連動,該連動軸B32並受一在軌架B3外的馬達B4所驅動,藉此使軌架B3內側的流道皮帶B31同步轉動,以將置於二者間的流道皮帶B31上載盤D帶移入或移出二平行軌架B3所形成的軌道。 Referring to FIG. 3, the flow path rail base B has two parallel rails B3 forming a track, and the two rails B3 are spaced apart from each other and are respectively provided on the inner side with a flow path belt B31 extending the length of the entire track, and the inner side of the two rails B3 The second flow path belt B31 is linked by a linkage shaft B32 and a drive wheel B321 at both ends of the linkage shaft B32. The linkage shaft B32 is driven by a motor B4 outside the rail frame B3, thereby causing the flow inside the rail frame B3. The belt B31 is rotated synchronously to move the flow belt B31 placed between the two to the track formed by the two parallel rails B3.
請參閱圖3、4,在其中一軌架B3內側設有一檢測元件B5,其位於靠該出口端B2的一側,且位於載盤D由入口端B1朝出口端B2搬送的輸送流路經過的下方;並以朝上並朝入口端B1方向傾斜發射檢測訊號B51的方式設置;在設置檢測元件B5的該軌架B3上設有一與軌架B3垂直方向設置的止擋驅動件B6,該止擋驅動件B6驅動一止擋部B61凸伸 置於載盤D由入口端B1朝出口端B2搬送的輸送流路經過的檢測元件B5後方,即載盤D朝出口端B2搬送時,將先經過止擋部件B61再經過檢測元件B5,該止擋驅動件B6可為一汽壓缸,該止擋部B61可為該汽壓缸之缸桿。 Referring to Figures 3 and 4, a detecting element B5 is disposed inside one of the rails B3, which is located on the side opposite the outlet end B2, and is located at a conveying flow path in which the carrier D is transported from the inlet end B1 toward the outlet end B2. The lower side is disposed in such a manner that the detection signal B51 is tilted upward and toward the entrance end B1; and the rail B3 on which the detecting element B5 is disposed is provided with a stop driving member B6 disposed in a direction perpendicular to the rail B3. The stopper driving member B6 drives a stop portion B61 to protrude When the carrier D is transported toward the outlet end B2, the carrier D is placed behind the detecting element B5 through which the transport path of the carrier D is transported from the inlet end B1 to the outlet end B2, and then passes through the detecting member B61 and passes through the detecting element B5. The stop drive member B6 can be a steam pressure cylinder, and the stop portion B61 can be a cylinder rod of the steam pressure cylinder.
請參閱圖3、5,在設置檢測元件B4、止擋元件B6的該軌架B3上,設有一組與軌架B3垂直方向設置的抵推單元B7,該抵推單元B7約略位於載盤D停置於流道軌座B上時的腹側中央部位,其包括二相隔間距設置的抵推組件B71,每一抵推組件B71各設有一固設位於軌架B3外側的ㄇ型固定座B711,以及設於該固定座B711上並以一抵推部B712樞經軌架B3至軌架B3內側對載盤D推抵的抵推驅動件B713,該抵推驅動件B713可為一汽壓缸,該抵推部B712可為該汽壓缸之缸桿。 Referring to FIGS. 3 and 5, on the rail B3 on which the detecting element B4 and the stopping element B6 are disposed, a set of abutting unit B7 disposed in a direction perpendicular to the rail frame B3 is provided, and the pushing unit B7 is located approximately on the carrier D. The ventral central portion of the ventral side is placed on the flow path rail base B. The yoke assembly B71 is disposed at two spaced apart intervals. Each of the urging assemblies B71 is provided with a ㄇ-shaped fixed seat B711 fixed to the outside of the rail frame B3. And an anti-pushing driving member B713 disposed on the fixing base B711 and pivoting the rail frame B3 to the inner side of the rail frame D by an urging portion B712. The anti-pushing driving member B713 can be a steam pressure cylinder. The urging portion B712 can be a cylinder rod of the steam cylinder.
請參閱圖3、6,該流道軌座B的二平行軌架B3間設有一治具B8,該治具B8設有一底座B81,底座B81上方兩側相互對應分別各設有一置座B82及一滑軌B83,滑軌B83上設有一滑座B831,可供二平行軌架B3其中之一固定置設於底座B81兩側的二置座B82,另一軌架B3置於底座B81兩側的二滑座B831上,俾置設於滑座B831上的軌架B3可藉滑座B831在滑軌B83上滑移,而調整二平行軌架B3間之間距寬度;底座B81下方兩側相互對應分別各設有一ㄩ型的底部固定座B84,兩側的底部固定座B84相隔一間距,該間距寬度小於該二滑軌B83間之間距寬度,每一底部固定座B84上兩端各設有樞軸B841,樞軸B841伸經底座B81而於底座B81上共同固設及連動位於二滑軌B82間的一揚昇座B85,底部固定座B84的兩端樞軸B841間同時設有一汽壓缸構成的揚昇驅動件B842,其以一缸桿B843(圖7)一端伸經底座B81並驅動揚昇座B85上、下位移;該揚昇座B85上設有一微調座B86,微調座B86上設有一吸盤B87,揚昇座 B85被驅動上、下位移時,微調座B86及吸盤B87將同步被連動上、下位移。 Referring to FIGS. 3 and 6, a jig B8 is disposed between the two parallel rails B3 of the flow channel rail base B. The fixture B8 is provided with a base B81, and the upper sides of the base B81 are respectively provided with a seat B82 and A slide rail B83 is provided with a slide B831 on the slide rail B83, wherein one of the two parallel rail brackets B3 is fixedly disposed on two sides of the base B81, and the other rail frame B3 is placed on both sides of the base B81. On the second sliding block B831, the rail frame B3 disposed on the sliding block B831 can be slid on the sliding rail B83 by the sliding seat B831, and the width between the two parallel rails B3 can be adjusted; Correspondingly, each of the bottom fixing brackets B84 is provided, and the bottom fixing brackets B84 on the two sides are separated by a spacing, the spacing width is smaller than the width between the two sliding rails B83, and each end of each bottom fixing bracket B84 is provided The pivot B841, the pivot B841 extends through the base B81 to fix and interlock a lifting seat B85 between the two sliding rails B82 on the base B81, and a steam pressure is simultaneously provided between the two ends pivot B841 of the bottom fixing base B84. a lifting drive member B842 composed of a cylinder, which extends through a base B81 at one end of a cylinder rod B843 (Fig. 7) and drives the lift base B85. Displacement; B85 is provided on a seat of the ascension seat trim B86, B87 has a spinner chuck base B86, rose seat When the B85 is driven up and down, the fine adjustment base B86 and the suction cup B87 will be synchronously moved up and down.
請參閱圖3、8,該微調座B86上設有微調單元B861,其包括一樞設有彈簧構成之彈性元件B862的扣件B863,以及設有外螺紋B864的螺抵件B865,該扣件B863扣抵微調座B86上緣而限制微調座B86上移,而螺抵件B865則藉外螺紋B864向下螺抵至揚昇座B85,使微調座B86受抵撐上移擠壓該扣件B863外樞套的彈性元件B862,令彈性元件B862被壓縮蓄積彈行回復力來使微調座B86具有一微調段差,由於吸盤B87設於微調座B86上,故該微調效果將用以微調吸盤B87表面各部位之水平程度;該吸盤B87上設有複數個以矩陣排列佈設的吸嘴B871,微調座B86上設有一鏤空區間B866,該微調單元B861以三組呈角形方位配置於該鏤空區間B866外的微調座B86上,並以朝操作人員方向的吸盤B87前側配置兩組,吸盤B87後側配置一組;該微調座B86之寬度大於二平行軌架B3間之間距寬度,為提供該微調座B86被連動上移之位移段差,該二平行軌架B3於對應該微調座B86之軌架B3下方形成一凹設區間B33。 Referring to FIGS. 3 and 8, the fine adjustment base B86 is provided with a fine adjustment unit B861, which comprises a fastener B863 pivoted with a spring-shaped elastic member B862, and a screw member B865 provided with an external thread B864, the fastener The B863 buckles against the upper edge of the fine adjustment seat B86 and restricts the fine adjustment seat B86 to move up, and the screw abutment B865 is screwed down to the lift base B85 by the external thread B864, so that the fine adjustment seat B86 is pushed up and pressed to press the fastener. The elastic member B862 of the B863 outer sleeve is such that the elastic member B862 is compressed and accumulated to restore the elastic force to make the fine adjustment base B86 have a fine adjustment step. Since the suction cup B87 is disposed on the fine adjustment base B86, the fine adjustment effect is used to fine tune the suction cup B87. The level of each part of the surface is horizontal; the suction cup B87 is provided with a plurality of nozzles B871 arranged in a matrix, and the fine adjustment seat B86 is provided with a hollow section B866, and the fine adjustment unit B861 is arranged in the angular direction of the three sets of angular positions B866. On the outer fine adjustment seat B86, two sets are arranged on the front side of the suction cup B87 in the direction of the operator, and one set is arranged on the rear side of the suction cup B87; the width of the fine adjustment base B86 is larger than the width between the two parallel rails B3, in order to provide the fine adjustment Block B86 is moved up and down The two parallel rails B3 form a recessed section B33 below the rail frame B3 corresponding to the fine adjustment base B86.
本發明實施例之流道軌座及使用該流道軌座的影像檢測裝置,其在實施時,載盤D朝出口端B2搬送時,將先經過止擋部件B61受其止擋,再經過以朝上並朝入口端B1方向傾斜發射檢測訊號B51方式設置的檢測元件B5,故可避免載盤D輸送逾位,且即使下方治具B8在長、寬、面積上與載盤D相當,傾斜發射的檢測訊號B51仍可閃過下方的治具B8,而偵測到上方的載盤D已到位並傳遞控制指令;而抵推單元B7以二相隔間距設置的抵推組件B71,利用汽壓缸之缸桿構成的抵推部B712對載盤D推抵,除可避免彈性元件之鬆緊不確定性外,二抵推組件B71雙點抵觸之定位穩定性可以減少受機台其它機構位移震動而移位;而吸盤B87上複數 個以矩陣排列佈設的吸嘴B871除可吸附整個載盤D防止部份翹曲外,對於在表面度仍存在翹曲的部份,可藉由微調座B86上的該微調單元B861來進行微調,使對於將該流道軌座B應用在AOI的影像檢測上,更容易達到檢測的穩定及精度。 In the embodiment of the present invention, the flow path rail seat and the image detecting device using the flow path rail seat, when the carrier D is transported toward the outlet end B2, will be stopped by the stop member B61 first, and then passed. The detection element B5 provided by the detection signal B51 is tilted upwards toward the entrance end B1, so that the carrier D can be prevented from being over-transferred, and even if the lower fixture B8 is equal in length, width and area to the carrier D, The tilting detection signal B51 can still flash through the lower fixture B8, and the upper carrier D is detected to be in place and the control command is transmitted; and the thrusting unit B7 is provided with the two-phase spacing component B71, utilizing the steam The urging portion B712 of the cylinder rod of the pressure cylinder pushes against the carrier D. In addition to avoiding the elastic uncertainty of the elastic member, the positioning stability of the two-point urging component B71 can reduce the displacement of other mechanisms of the machine. Shifted by vibration; and the number of suction cups B87 The nozzles B871 arranged in a matrix arrangement can not only partially warp the entire carrier D, but can also be fine-tuned by the fine adjustment unit B861 on the fine adjustment seat B86 for the portion where the warpage is still present on the surface. Therefore, it is easier to achieve the stability and accuracy of the detection for applying the flow path rail B to the image detection of the AOI.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.
A‧‧‧檢測裝置 A‧‧‧Detection device
A1‧‧‧第一軌座 A1‧‧‧First rail seat
A2‧‧‧立柱 A2‧‧‧ column
A3‧‧‧滑座 A3‧‧‧ slide
B‧‧‧流道軌座 B‧‧‧Railway
C‧‧‧第二軌座 C‧‧‧Second rail seat
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TWM436166U (en) * | 2011-12-30 | 2012-08-21 | Fittech Co Ltd | Defect inspection device of solar cell module |
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