TWI570419B - Device and method for forcing temperature of ic - Google Patents
Device and method for forcing temperature of ic Download PDFInfo
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Description
本發明係關於一種IC升溫裝置及方法,更精確的說,係關於一種適用於IC效能測試過程中,對IC進行加熱並偵測溫度的IC升溫裝置及方法。特定而言,在可攜式裝置(如手機)的電路板上,為了增加電池可用空間,小尺寸IC可用空間減少,進而導致小尺寸IC設置的密度增加,因此在操作時容易受到電池發熱及CPU的溫度影響,且難以散熱,而常使小尺寸IC處於高溫下。因此,需要測試小尺寸IC在高溫(例如,工規:Tc(Case Temperature)85℃)下的運作是否正常。其中,小尺寸IC定義為尺寸在8mm*8mm以下,針腳間距(pin-to-pin pitch)在0.65mm以下。與傳統大尺寸IC重視降溫不同,小尺寸IC的需求係著重於能在高溫環境下操作,本發明的IC升溫裝置及方法可將小尺寸IC快速升溫至特定溫度,並確保小尺寸IC能維持恆溫且其溫度精確以進行測試。 The present invention relates to an IC warming device and method, and more particularly to an IC warming device and method suitable for IC performance testing, heating an IC and detecting temperature. In particular, on a circuit board of a portable device (such as a mobile phone), in order to increase the available space of the battery, the available space of the small-sized IC is reduced, which leads to an increase in the density of the small-sized IC, and thus is susceptible to battery heat during operation. The temperature of the CPU is affected, and it is difficult to dissipate heat, and the small-sized IC is often kept at a high temperature. Therefore, it is necessary to test whether the small-sized IC operates normally at a high temperature (for example, a gauge temperature of 85 ° C). Among them, the small-sized IC is defined as having a size of 8 mm*8 mm or less and a pin-to-pin pitch of 0.65 mm or less. Unlike traditional large-size ICs that focus on cooling, the requirements for small-sized ICs are focused on operation in high-temperature environments. The IC temperature-increasing devices and methods of the present invention can rapidly heat small-sized ICs to specific temperatures and ensure that small-sized ICs can be maintained. The temperature is constant and the temperature is accurate for testing.
一般而言,在封裝完成之積體電路元件(IC)的測試中,常見為最終測試(Final Test),以及可靠度測試(Reliability Test)。在IC的最終測試中,會對受測IC進行加溫,在受測IC到達預定溫度時,測試受測IC是否能在高溫下進行運作,其測試時間較短。而可靠度測試(Reliability Test)係在使受測IC維持在高溫 下,持續操作並進行測試,藉以瞭解其穩定度,此程序通常稱之為燒機(Burn-in)。在燒機程序進行期間,需要長時間對受測IC進行烘烤,且受測IC需要維持在預定溫度下,長時間(例如二至三週)操作並進行測試。 In general, in the testing of packaged integrated circuit components (ICs), the final test (Final Test) and the reliability test (Reliability Test) are common. In the final test of the IC, the IC under test is warmed, and when the IC under test reaches a predetermined temperature, the test IC can be operated at a high temperature, and the test time is short. The Reliability Test is to maintain the IC under test at a high temperature. Next, continue to operate and test to understand its stability, this program is usually called Burn-in. During the burning process, it is necessary to bake the IC under test for a long time, and the IC under test needs to be maintained at a predetermined temperature for a long time (for example, two to three weeks) to operate and test.
以目前的現有IC加熱手段,其一為採用加熱板加熱,需依賴人力將IC於加熱板上加熱至預定溫度,從加熱板移動至插座(socket),再安裝至插座上進行效能測試,此時,受測IC離開加熱板後,由於無法以加熱板繼續對受測IC加熱,從加熱板移動至插座(socket)的速度,插座與受測IC之間的接觸以及空氣對流會使受測IC溫度降低,無法使受測IC恆溫,因而導致受測IC無法在相同的溫度下進行測試,導致測試結果不一。 In the current existing IC heating method, one of them is heated by a heating plate, and it is necessary to rely on manpower to heat the IC to a predetermined temperature on the heating plate, move from the heating plate to a socket, and then install it on the socket for performance test. When the IC under test leaves the heating plate, the contact between the socket and the IC under test and the air convection will be measured because the heating IC cannot continue to heat the IC under test, and the speed of moving from the heating panel to the socket. The IC temperature is lowered and the IC under test cannot be thermostated, which results in the IC under test being unable to test at the same temperature, resulting in different test results.
另一種IC加熱手段,係採用熱風槍針對IC進行加熱,然其具有以下缺點:(1)由於熱風槍係以熱風針對特定範圍進行加熱,其受熱不均,且無法控制加熱溫度,容易過熱或未達目標溫度,即便以隔熱設計將受測IC阻擋並隔熱,亦難以避免熱風槍影響周圍元件溫度;(2)即便IC達到特定溫度,當熱風槍停止加熱,對IC測試時難以使IC保持恆溫;(3)熱風槍加熱時,同時會對周圍元件以及PCB板進行加熱,使得測試IC效能時,測試結果會受到周圍元件升溫影響而不精確;(4)小尺寸IC測試時,需要放置於插座內並以手測蓋覆蓋以保持電性接觸,然而,熱風槍對小尺寸IC進行加熱時,會受到手測蓋及插座阻隔,熱風槍難以對小尺寸IC加熱;(5)進行測試時,無法判定IC本身溫度,更難以得知需要加熱的時間。 Another type of IC heating method uses a heat gun to heat the IC. However, it has the following disadvantages: (1) Since the heat gun is heated by a hot air for a specific range, it is unevenly heated, and the heating temperature cannot be controlled, and it is easy to overheat or If the target temperature is not reached, even if the IC under test is blocked and insulated by the heat insulation design, it is difficult to prevent the heat gun from affecting the temperature of the surrounding components. (2) Even if the IC reaches a certain temperature, when the heat gun stops heating, it is difficult to test the IC. The IC maintains a constant temperature; (3) When the heat gun is heated, the surrounding components and the PCB board are heated at the same time, so that when the performance of the IC is tested, the test result is affected by the temperature rise of the surrounding components and is inaccurate; (4) When testing the small-sized IC, It needs to be placed in the socket and covered with a hand cover to maintain electrical contact. However, when the heat gun heats the small size IC, it will be blocked by the hand cover and the socket, and the heat gun is difficult to heat the small size IC; (5) When testing, it is impossible to determine the temperature of the IC itself, and it is more difficult to know when heating is required.
再一種IC加熱手段為採用流動式冷暖氣(thermal stream)設備,然而此設備昂貴,體積龐大,且耗電量極高,需要配合壓縮氣及壓縮機才能操作,其溫度感測器常設置在冷暖氣之流動路線上,因此,溫度感測器難以精確反應 個別IC的溫度。此外,雖然流動式冷暖氣可與受測IC本身的熱電耦(Thermal couple)連接以獲得受測IC的溫度,然而測試階段的IC多半不具有熱電耦,若欲獲得受測IC之溫度,需要以流動式冷暖氣連接溫度感測器,再與受測IC接觸或貼附以感測其溫度,此方法極為不便,且獲得的溫度並不精確。由於流動式冷暖氣類似於熱風槍,係採用氣流流動針對IC加熱並維持恆溫,然而,受到前述手測蓋及插座之阻隔,同樣難以對小尺寸IC進行加熱及恆溫,且類似的,亦會產生上述使用熱風槍產生的各種問題。即便針對多個IC設置個別的溫度感測器,然而此方法在後續對其他IC升溫測試中,仍需再次設置個別的溫度感測器,因此嚴重造成不便且影響IC的測試效率。 Another type of IC heating method is a mobile type of thermal stream device. However, this device is expensive, bulky, and consumes a large amount of electricity. It needs to be operated with a compressed gas and a compressor. The temperature sensor is often disposed at The flow path of the cold and warm air, therefore, the temperature sensor is difficult to accurately respond The temperature of individual ICs. In addition, although the flow heating and cooling system can be connected to the thermal couple of the IC under test to obtain the temperature of the IC under test, most of the ICs in the test phase do not have a thermocouple. To obtain the temperature of the IC under test, It is extremely inconvenient to connect the temperature sensor to the temperature sensor and then contact or attach it to the IC under test to measure the temperature. The temperature obtained is not accurate. Since the flow type cold air heating is similar to the heat air gun, the air flow is used to heat and maintain the constant temperature of the IC. However, it is also difficult to heat and thermostat the small size IC by the above-mentioned hand cover and socket blocking, and similarly, The above problems arising from the use of the heat gun are generated. Even if individual temperature sensors are provided for multiple ICs, this method still needs to set individual temperature sensors again in other IC temperature rising tests, which is seriously inconvenient and affects the testing efficiency of the IC.
為了解決上述問題,本發明的目的在於提供一種IC升溫裝置,用於將一被測裝置加熱至特定溫度之下進行測試,其包含壓塊、熱感元件、加熱片、絕緣片、輸入/出端及溫度控制器。其中,壓塊具有基底及表面,表面用於直接接觸該被測裝置。熱感元件設置在壓塊內部,加熱片設置於壓塊上並接觸基底,絕緣片設置在加熱片上,輸入/出端,係設置於絕緣片上,至少包含電源線及訊號線,且電源線與加熱片電性連接,訊號線與熱感元件電性連接。溫度控制器與電源線及訊號線連接,用於將電源供應至電源線並控制加熱片之溫度,且透過訊號線量測熱感元件之電性以計算獲得被測裝置之溫度,其中,壓塊用於將加熱片之熱能傳導至被測裝置。 In order to solve the above problems, an object of the present invention is to provide an IC temperature increasing device for testing a device under test to a specific temperature, which comprises a briquetting block, a thermal sensing element, a heating sheet, an insulating sheet, and an input/output. Terminal and temperature controller. Wherein, the pressure block has a base and a surface for directly contacting the device under test. The heat sensing element is disposed inside the pressing block, the heating piece is disposed on the pressing block and contacting the substrate, the insulating sheet is disposed on the heating sheet, and the input/output end is disposed on the insulating sheet, at least including the power line and the signal line, and the power line and the power line The heating plate is electrically connected, and the signal line is electrically connected to the thermal sensing element. The temperature controller is connected to the power line and the signal line, and is used for supplying power to the power line and controlling the temperature of the heating piece, and measuring the electrical property of the thermal sensing element through the signal line to calculate the temperature of the device under test, wherein the voltage is obtained. The block is used to conduct the thermal energy of the heater chip to the device under test.
較佳的,溫度控制器可包含使用者介面,用於供使用者控制加熱片之溫度並顯示被測裝置之溫度。 Preferably, the temperature controller can include a user interface for the user to control the temperature of the heater chip and display the temperature of the device under test.
較佳的,絕緣片可包含基座及設置在基座上之複數個隔熱壁,其中複數個隔熱壁之配置可包含環狀配置、片狀配置及塊狀配置。 Preferably, the insulating sheet may include a base and a plurality of insulating walls disposed on the base, wherein the plurality of insulating walls may be configured in an annular configuration, a sheet configuration, and a block configuration.
較佳的,絕緣片更可包含通孔,供電源線及訊號線分別與加熱片及熱感元件連接。 Preferably, the insulating sheet further comprises a through hole for connecting the power line and the signal line to the heating piece and the heat sensing element, respectively.
根據本發明的另一個態樣,提供一種IC升溫裝置,用於將一被測裝置(Device under test,DUT)加熱並測試該被測裝置之溫度,係包含壓塊、熱感元件、加熱片、絕緣片及輸入/出端。壓塊具有基底及表面,表面用於直接接觸被測裝置;熱感元件設置在壓塊內部;加熱片設置於壓塊上並接觸基底;絕緣片設置在加熱片上;輸入/出端設置於絕緣片上,至少包含電源線及訊號線,且電源線與加熱片電性連接,訊號線與熱感元件電性連接,被配置以透過電源線供給電源使加熱片加熱,且透過訊號線偵測熱感元件之電性。 According to another aspect of the present invention, an IC temperature increasing device for heating a device under test (DUT) and testing the temperature of the device under test includes a compact, a thermal sensing element, and a heating sheet. , insulation sheet and input / output. The pressing block has a base and a surface, the surface is for directly contacting the device under test; the thermal sensing element is disposed inside the pressing block; the heating piece is disposed on the pressing block and contacting the substrate; the insulating sheet is disposed on the heating sheet; and the input/output end is disposed on the insulating layer The chip includes at least a power line and a signal line, and the power line is electrically connected to the heating piece. The signal line is electrically connected to the thermal element, and is configured to supply power through the power line to heat the heating piece and detect the heat through the signal line. The electrical properties of the component.
較佳的,更可包含溫度控制器,與電源線及訊號線連接,用於將電源供應至電源線並控制加熱片之溫度,且透過訊號線量測熱感元件之電性以計算獲得被測裝置之溫度,其中壓塊用於將加熱片之熱能傳導至被測裝置。 Preferably, the method further comprises a temperature controller connected to the power line and the signal line for supplying power to the power line and controlling the temperature of the heating piece, and measuring the electrical property of the thermal element through the signal line to calculate the obtained The temperature of the device, wherein the compact is used to conduct thermal energy from the heater chip to the device under test.
較佳的,溫度控制器可包含使用者介面,用於供使用者控制加熱片之溫度並顯示被測裝置之溫度。 Preferably, the temperature controller can include a user interface for the user to control the temperature of the heater chip and display the temperature of the device under test.
較佳的,絕緣片可包含基座及設置在基座上之複數個隔熱壁,其中複數個隔熱壁之配置包含環狀配置、片狀配置及塊狀配置。 Preferably, the insulating sheet may comprise a base and a plurality of insulating walls disposed on the base, wherein the plurality of insulating walls are disposed in an annular configuration, a sheet configuration and a block configuration.
較佳的,絕緣片更可包含通孔,供電源線及訊號線分別與加熱片及熱感元件連接。 Preferably, the insulating sheet further comprises a through hole for connecting the power line and the signal line to the heating piece and the heat sensing element, respectively.
根據本發明的再一個態樣,提供一種IC升溫方法,適用於上述之IC升溫裝置,其包含下列步驟:將溫度控制器連接輸入/出端之電源線及訊號線 以分別電性連接加熱片及熱感元件;使用溫度控制器透過電源線控制加熱片加熱;以壓塊接觸被測裝置,將加熱片之熱能傳導至被測裝置;控制溫度控制器透過訊號線檢測熱感元件之電性;使用溫度控制器根據電阻值計算獲得被測裝置之溫度。 According to still another aspect of the present invention, an IC heating method is provided, which is applicable to the above IC temperature increasing device, and includes the following steps: connecting a temperature controller to an input/output power line and a signal line The heating piece and the thermal sensing element are electrically connected respectively; the heating device is used to control the heating piece heating through the power line; the pressing block contacts the device under test, and the thermal energy of the heating piece is transmitted to the device under test; and the temperature controller is controlled to pass through the signal line. Detecting the electrical properties of the thermal sensing component; using a temperature controller to calculate the temperature of the device under test based on the resistance value.
承上所述,根據本發明提供之IC升溫裝置及方法,相較於現有技術,其中採用接觸式熱傳導之壓塊,可在IC升溫性能測試過程中,對IC採用直接接觸式加熱及溫度量測,較習知技術通過風扇進行熱對流之方法具有快速、方便、簡單、便宜、省電及環保等特性。此外,透過具有複數個隔熱牆之隔熱片所建立之複數個隔熱空氣壁,可有效阻絕加熱時熱能不必要的散失,以提昇熱感元件升溫的速度。再者,本發明溫度測量器通過電源線及訊號線之封閉迴路,在壓塊與被測裝置達成熱平衡的同時,可精確量測被測裝置之溫度,且可針對小尺寸被測裝置隨時採用不同設置,達成高度的適應性並加速量測效率。 According to the above, the IC heating device and method provided by the present invention can adopt direct contact heating and temperature for the IC in the IC heating performance test process compared with the prior art, wherein the contact heat conduction pressing block is used. Compared with the conventional technology, the method of heat convection by a fan is fast, convenient, simple, inexpensive, power-saving and environmentally friendly. In addition, a plurality of insulated air walls formed by the heat insulating sheets having a plurality of heat insulating walls can effectively prevent unnecessary loss of heat energy during heating, thereby increasing the speed of heating the heat sensing elements. Furthermore, the temperature measuring device of the invention can accurately measure the temperature of the device under test through the closed loop of the power line and the signal line, and can accurately measure the temperature of the device under test while being used for the small-sized device under test. Different settings enable a high degree of adaptability and speed up measurement efficiency.
10‧‧‧壓塊 10‧‧‧Clamps
100‧‧‧基底 100‧‧‧Base
102‧‧‧表面 102‧‧‧ surface
104‧‧‧突起部 104‧‧‧Protruding
12‧‧‧熱感元件 12‧‧‧Thermal components
122、142‧‧‧電極 122, 142‧‧‧ electrodes
14‧‧‧加熱片 14‧‧‧ heating film
142‧‧‧電極 142‧‧‧electrode
146‧‧‧通孔 146‧‧‧through hole
16、16’、16”‧‧‧絕緣片 16, 16', 16" ‧ ‧ insulating sheets
162‧‧‧基座 162‧‧‧Base
164、164’、164”‧‧‧隔熱壁 164, 164', 164" ‧ ‧ insulation wall
166‧‧‧通孔 166‧‧‧through hole
18、72a、72b‧‧‧溫度控制器 18, 72a, 72b‧‧‧ temperature controller
181‧‧‧使用者介面 181‧‧‧User interface
182‧‧‧顯示螢幕 182‧‧‧display screen
I/O‧‧‧輸入/出端 I/O‧‧‧Input/Output
PLUG‧‧‧插座 PLUG‧‧‧ socket
DUT‧‧‧被測裝置 DUT‧‧‧Device under test
PL‧‧‧電源線 PL‧‧‧Power cord
SL‧‧‧訊號線 SL‧‧‧ signal line
20‧‧‧殼體 20‧‧‧shell
6、71a、71b‧‧‧IC升溫性能測試設備 6, 71a, 71b‧‧‧IC heating performance test equipment
61‧‧‧鎖定構造 61‧‧‧Lock construction
62‧‧‧IC插座蓋體 62‧‧‧IC socket cover
63‧‧‧連接介面 63‧‧‧Connection interface
64‧‧‧IC插座 64‧‧‧IC socket
65‧‧‧卡合構造 65‧‧‧Clamping structure
66、73‧‧‧印刷電路板 66, 73‧‧‧ Printed circuit boards
67‧‧‧突起構造 67‧‧‧Protruding structures
68‧‧‧鎖孔 68‧‧‧Keyhole
DUT1、DUTa、DUTb、DUTc‧‧‧被測IC裝置 DUT1, DUTa, DUTb, DUTc‧‧‧Measured IC devices
本發明之上述及其他特徵及優勢將藉由參照附圖詳細說明其例示性實施例而變得更顯而易知,其中:第1圖為根據本發明之IC升溫裝置之實施例之剖視圖。 The above and other features and advantages of the present invention will become more apparent from the detailed description of the embodiments illustrated in the appended claims.
第2圖為根據本發明之IC升溫裝置之壓塊之俯視示意圖。 Fig. 2 is a schematic plan view showing a compact of an IC warming device according to the present invention.
第3A圖為根據本發明之IC升溫裝置之絕緣片之第一實施例之俯視示意圖。 Fig. 3A is a top plan view showing the first embodiment of the insulating sheet of the IC temperature increasing device according to the present invention.
第3B圖為根據本發明之IC升溫裝置之絕緣片之第二實施例之俯視示意圖。 Fig. 3B is a top plan view showing a second embodiment of the insulating sheet of the IC temperature increasing device according to the present invention.
第3C圖為根據本發明之IC升溫裝置之絕緣片之第三實施例之俯視示意圖。 Fig. 3C is a top plan view showing a third embodiment of the insulating sheet of the IC temperature increasing device according to the present invention.
第4圖為根據本發明之IC升溫裝置之溫度控制器之示意圖。 Figure 4 is a schematic illustration of a temperature controller of an IC warming device in accordance with the present invention.
第5圖為根據本發明之IC升溫方法之實施例繪示之流程圖。 Fig. 5 is a flow chart showing an embodiment of an IC heating method according to the present invention.
第6A及6B圖為根據本發明之IC升溫方法之實施例之操作示意圖。 6A and 6B are schematic views showing the operation of an embodiment of the IC temperature raising method according to the present invention.
第7圖為根據本發明之IC升溫方法之另一實施例之操作示意圖。 Fig. 7 is a schematic view showing the operation of another embodiment of the IC temperature raising method according to the present invention.
為利 貴審查員瞭解本發明之技術特徵、內容與優點及其所能達成之功效,茲將本發明配合附圖,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本發明實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本發明於實際實施上的權利範圍,合先敘明。 The technical features, contents, and advantages of the present invention, as well as the advantages thereof, can be understood by the present inventors, and the present invention will be described in detail with reference to the accompanying drawings. The subject matter is only for the purpose of illustration and description. It is not intended to be a true proportion and precise configuration after the implementation of the present invention. Therefore, the scope and configuration relationship of the attached drawings should not be interpreted or limited. First described.
於此使用,詞彙“與/或”包含一或多個相關條列項目之任何或所有組合。當“至少其一”之敘述前綴於一元件清單前時,係修飾整個清單元件而非修飾清單中之個別元件。 As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. When the phrase "at least one of" is preceded by a list of elements, the entire list of elements is modified instead of the individual elements in the list.
第1圖為根據本發明之IC升溫裝置之實施例之剖視圖。如第1圖所示,本發明之IC升溫裝置1,用於將一被測裝置DUT加熱並測試被測裝置DUT之溫度,係包含壓塊10、熱感元件12、加熱片14、絕緣片16、輸入/出端I/O、溫度控制器18。 Fig. 1 is a cross-sectional view showing an embodiment of an IC temperature increasing apparatus according to the present invention. As shown in FIG. 1, the IC temperature increasing device 1 of the present invention is for heating a device under test DUT and testing the temperature of the device under test DUT, comprising a compact 10, a thermal sensing element 12, a heating sheet 14, and an insulating sheet. 16. Input/Output I/O, Temperature Controller 18.
其中,壓塊10具有基底100及表面102,表面102用於直接接觸待測裝置DUT。表面102可由基底100突起,且包含複數個突起部104可用於 接觸被測裝置DUT時,保留空隙避免被測裝置DUT與壓塊10過度密合,而導致測量結束後,當被測裝置DUT與壓塊10分離時,被測裝置DUT被壓塊10吸附。。此處,壓塊10可例如由一導熱材料諸如銅或類似物製成,並以快速導熱作為設計取向。而被測裝置DUT可預先與印刷電路板(PCB)電性接觸,並與IC性能檢測裝置連接,此係為本領域具有通常知識者熟知之技術,故不在此贅述。 Wherein, the compact 10 has a substrate 100 and a surface 102 for directly contacting the device under test DUT. Surface 102 may be raised by substrate 100 and includes a plurality of protrusions 104 that may be used When contacting the device under test DUT, the gap is reserved to prevent the device under test DUT from being excessively adhered to the pressure block 10, and after the measurement is completed, when the device under test DUT is separated from the pressure block 10, the device under test DUT is adsorbed by the compact 10. . Here, the compact 10 can be made, for example, of a thermally conductive material such as copper or the like, and has a rapid thermal conductivity as a design orientation. The device under test DUT can be electrically contacted with a printed circuit board (PCB) in advance and connected to the IC performance detecting device. This is a technique well known to those skilled in the art, and therefore will not be described herein.
請參閱第2圖,其繪示根據本發明的IC升溫裝置的壓塊俯視圖。如第2圖所示,此處壓塊10包含有四個突起部104,其間留有空隙,但不以此為限,當針對極小尺寸之IC時,亦可不設置此突起部104。較佳者,壓塊10除了可針對IC進行升溫之外,亦可針對以晶圓級晶片封裝(Wafer-Level Chip Scale Packaging)方式之IC進行測試,其面積大小可為少於8mmX8mm大小之晶片。 Please refer to FIG. 2, which shows a top view of the compact of the IC warming device according to the present invention. As shown in FIG. 2, the press block 10 includes four protrusions 104 with gaps therebetween, but not limited thereto. When the IC is of a very small size, the protrusions 104 may not be provided. Preferably, the compact 10 can be tested for ICs in a Wafer-Level Chip Scale Packaging manner, and can be used for wafers of less than 8 mm×8 mm in size. .
再者,熱感元件12,設置在壓塊10內部,熱感元件12具有兩個電極122,較佳的,電極122可設置在熱感元件12的一端,以方便後續與訊號線連接。通常而言,熱感元件12可為主動或被動元件,包含電阻、電容及電感,熱感元件12亦可由多層具有不同熱膨脹係數之材料構成,也可為熱感IC、電晶體或二極體。較佳者,溫度改變會造成熱感元件12的電性改變,且熱感元件12係能與被測裝置DUT及壓塊10快速達到熱平衡。此處,熱感元件12可為感應器電阻,電阻值隨著溫度的變化而改變,且形變程度隨溫度的變化較一般的固定電阻要大很多,其通常廣泛應用於各種電子元件中,例如湧流電流限制器、溫度感應器、可復式保險絲、及自動調節的加熱器等。熱感元件12可使用純金屬、陶瓷或聚合物,並適用於不同的溫度響應範圍,且具有不同的溫度響應性質。 Furthermore, the thermal sensing element 12 is disposed inside the compact 10, and the thermal sensing element 12 has two electrodes 122. Preferably, the electrode 122 can be disposed at one end of the thermal sensing element 12 to facilitate subsequent connection with the signal line. Generally, the thermal sensing component 12 can be an active or passive component, including a resistor, a capacitor, and an inductor. The thermal sensing component 12 can also be composed of multiple layers of materials having different thermal expansion coefficients, or can be a thermal IC, a transistor, or a diode. . Preferably, the temperature change causes an electrical change in the thermal sensing element 12, and the thermal sensing element 12 is capable of rapidly achieving thermal equilibrium with the device under test DUT and the compact 10. Here, the thermal sensing element 12 can be an inductor resistance, the resistance value changes with temperature, and the degree of deformation varies greatly with temperature compared to a general fixed resistance, and is generally widely used in various electronic components, for example, Inrush current limiter, temperature sensor, double fuse, and self-regulating heater. The thermal element 12 can be a pure metal, ceramic or polymer and is suitable for different temperature response ranges and has different temperature response properties.
加熱片14係設置於壓塊10之基底102上方,並直接接觸壓塊10。加熱片14亦設置有電極142,可供後續與電源線連接,以達成加熱之目的。加熱 片14之設置可採用將電熱阻絲貼附於PCB上,並採用絕緣設計。較佳的,加熱片14至少可加熱至85℃以上,其中可包含通孔,用於允許與熱感元件12連接的電源線PL通過。 The heater chip 14 is disposed above the substrate 102 of the compact 10 and directly contacts the compact 10. The heating sheet 14 is also provided with an electrode 142 for subsequent connection with the power line for heating purposes. heating The arrangement of the sheet 14 can be performed by attaching an electric resistance wire to the PCB and adopting an insulation design. Preferably, the heater chip 14 can be heated to at least 85 ° C or higher, and may include a through hole for allowing the power line PL connected to the thermal sensing element 12 to pass.
絕緣片16設置在加熱片14上方,用於阻絕加熱片14與上方元件之間的熱傳導。請參閱第3A圖,其為根據本發明的IC升溫裝置的實施例繪示的絕緣片之第一實施例之俯視圖。如第3A圖所示,絕緣片16除了將加熱片14與其他上方元件絕緣之外,還可包含基座162及設置在基座上的複數個隔熱壁164,其中,隔熱壁164之設置係為了阻絕空氣之熱對流,透過經由隔熱壁164所產生之複數個空氣壁,利用空氣導熱較差之特性,進而可降低加熱片14對壓塊10加熱時,熱對流造成的熱量散失,因此,隔熱壁164可進一步減少加熱時間,使被測裝置DUT快速達到預定溫度。較佳者,隔熱壁164可如第3A圖所示,採用環狀隔熱壁設置,但不以此為限。此環狀隔熱壁除可防止複數個隔熱壁164之間之空氣之熱對流,還可平均分配壓塊10按壓至被測裝置DUT時的壓力,且絕緣片16可例如由工業塑膠等隔熱絕緣材料製成。此外,絕緣片16還包含通孔166,用於允許電源線PL與訊號線SL通過以分別與加熱片14及熱感元件12電性連接,進而避免額外佈線造成的成本及所需空間的增加。 An insulating sheet 16 is disposed above the heater chip 14 for blocking heat conduction between the heater chip 14 and the upper member. Please refer to FIG. 3A, which is a plan view of a first embodiment of an insulating sheet according to an embodiment of an IC temperature increasing device according to the present invention. As shown in FIG. 3A, the insulating sheet 16 may include a susceptor 162 and a plurality of insulating walls 164 disposed on the pedestal, in addition to insulating the heating sheet 14 from other upper elements, wherein the insulating wall 164 In order to prevent the heat convection of the air, the plurality of air walls generated through the heat insulating wall 164 can utilize the characteristics of poor heat conduction of the air, thereby reducing the heat loss caused by the heat convection when the heating piece 14 heats the compact block 10, Therefore, the heat insulating wall 164 can further reduce the heating time so that the device under test DUT quickly reaches a predetermined temperature. Preferably, the heat insulating wall 164 can be disposed by using an annular heat insulating wall as shown in FIG. 3A, but is not limited thereto. In addition to preventing thermal convection of air between the plurality of insulating walls 164, the annular insulating wall can evenly distribute the pressure when the pressing block 10 is pressed to the DUT of the device under test, and the insulating sheet 16 can be, for example, industrial plastic. Made of thermal insulation. In addition, the insulating sheet 16 further includes a through hole 166 for allowing the power line PL and the signal line SL to pass through to be electrically connected to the heating sheet 14 and the thermal sensing element 12, respectively, thereby avoiding the cost and space required for additional wiring. .
請參閱第3B圖,其為根據本發明的IC升溫裝置的實施例繪示的絕緣片之第二實施例之俯視圖。如第3B圖所示,絕緣片16’之複數個隔熱壁164’與前一實施例不同的是,係採用複數個平行片狀之隔熱壁設置,因而可防止複數個平行之隔熱壁164’之間之空氣進行熱對流,同時亦可平均分配壓塊10按壓至被測裝置DUT時的壓力。 Please refer to FIG. 3B, which is a plan view of a second embodiment of an insulating sheet according to an embodiment of an IC temperature increasing device according to the present invention. As shown in FIG. 3B, the plurality of insulating walls 164' of the insulating sheet 16' are different from the previous embodiment in that a plurality of parallel-plate insulating walls are provided, thereby preventing a plurality of parallel insulating layers. The air between the walls 164' is thermally convected while equally distributing the pressure at which the pressure block 10 is pressed against the device under test DUT.
請參閱第3C圖,其為根據本發明的IC升溫裝置的實施例繪示的絕緣片之第三實施例之俯視圖。如第3B圖所示,絕緣片16”之複數個隔熱壁164”與前一實施例不同的是,係採用複數個塊狀之隔熱壁設置,複數個塊狀之隔熱壁 164”除了可降低其間之空氣之熱對流,同樣可平均分配壓塊10按壓至被測裝置DUT時的壓力。但本發明之隔熱壁不限於3A-3C圖之配置,也可為環狀配置、片狀配置及塊狀配置中之任意組合。 Please refer to FIG. 3C, which is a plan view of a third embodiment of an insulating sheet according to an embodiment of an IC temperature increasing device according to the present invention. As shown in FIG. 3B, the plurality of insulating walls 164" of the insulating sheet 16" are different from the previous embodiment in that a plurality of block-shaped insulating walls are provided, and a plurality of block-shaped insulating walls are provided. In addition to reducing the thermal convection of the air therebetween, the pressure at which the compact 10 is pressed against the DUT of the device under test can be equally distributed. However, the insulating wall of the present invention is not limited to the configuration of the 3A-3C, and may be annular. Any combination of configuration, tile configuration, and block configuration.
請復參考第1圖,本發明的IC升溫裝置1還包含輸入/出端I/O,其設置於絕緣片16上,並可進一步內設於殼體20中。輸入/出端I/O至少包含電源線PL及訊號線SL,且電源線PL與加熱片14電性連接,訊號線SL與熱感元件12電性連接。亦即,電源線PL可穿過通孔166與加熱片14之電極142連接,且訊號線SL可通過通孔166及通孔144與熱感元件12之電極122電性連接。較佳者,輸入/出端I/O可採用通用序列匯流排(USB)之插座PLUG,且電源線PL及訊號線SL可透過USB規格之插座。此處採用USB插座之敘述僅為舉例,實質應用並不以此為限。 Referring to FIG. 1, the IC temperature increasing device 1 of the present invention further includes input/output I/Os which are disposed on the insulating sheet 16 and can be further disposed in the housing 20. The input/output I/O includes at least a power line PL and a signal line SL, and the power line PL is electrically connected to the heater chip 14, and the signal line SL is electrically connected to the thermal element 12. That is, the power line PL can be connected to the electrode 142 of the heater chip 14 through the through hole 166, and the signal line SL can be electrically connected to the electrode 122 of the thermal sensor 12 through the through hole 166 and the through hole 144. Preferably, the input/output I/O can be a universal serial bus (USB) socket PLUG, and the power line PL and the signal line SL can pass through a USB specification socket. The description of the USB socket here is only an example, and the actual application is not limited thereto.
此外,溫度控制器18與電源線PL及訊號線SL連接,形成封閉迴路(close loop),用於將電源供應至該電源線PL,以控制該加熱片14之溫度。溫度控制器18還透過訊號線SL量測熱感元件12之電性,特定而言,溫度控制器18量測被測裝置DUT之電壓及電流,並加以計算以獲得被測裝置DUT之溫度。具體而言,溫度控制器18可包含控制單元,例如中央處理器(Central Processing Unit,CPU)或微控制器(Micro Controlling Unit,MCU),或實現上述控制及計算之韌體、硬體或軟體,其可外接電源或由內部蓄電池供應本發明的IC升溫裝置所需之電能。 Further, the temperature controller 18 is connected to the power line PL and the signal line SL to form a close loop for supplying power to the power line PL to control the temperature of the heater chip 14. The temperature controller 18 also measures the electrical properties of the thermal sensing element 12 through the signal line SL. Specifically, the temperature controller 18 measures the voltage and current of the device under test DUT and calculates it to obtain the temperature of the device under test DUT. Specifically, the temperature controller 18 may include a control unit, such as a Central Processing Unit (CPU) or a Micro Controlling Unit (MCU), or a firmware, hardware, or software that implements the above control and calculation. It can be supplied with an external power source or by the internal battery to supply the electric energy required for the IC temperature increasing device of the present invention.
請參閱第4圖,係為根據本發明之IC升溫裝置之溫度控制器之示意圖。較佳者,溫度控制器18還可進一步包含使用者介面181及顯示其之顯示螢幕182,供使用者控制加熱片14之溫度以及顯示所計算的熱感元件12所感測之溫度。 Please refer to FIG. 4, which is a schematic diagram of a temperature controller of an IC warming device according to the present invention. Preferably, the temperature controller 18 further includes a user interface 181 and a display screen 182 for displaying the temperature of the heater chip 14 and displaying the temperature sensed by the calculated thermal sensor element 12.
此外,根據本發明的較佳實施例,溫度控制器18可具有反饋控制功能,使用者可透過使用者介面設定被測裝置DUT之測試溫度,當被測裝置DUT 達到預定之測試溫度,溫度控制器18自動停止控制加熱片14進行升溫。相反的,當IC降溫超過一閾值時,溫度控制器18亦可偵測被測裝置DUT未達預定溫度,其控制加熱片14繼續加熱,使IC可達測試溫度。此外,此閾值係為可設定的,舉例而言,閾值可設定為1℃,當受測裝置DUT降溫超過1℃時,溫度控制器18控制加熱片14繼續進行加熱。此設置可免除使用者需對溫度隨時監測之不便,並使被測裝置DUT能始終維持在穩定之測試溫度。 In addition, according to a preferred embodiment of the present invention, the temperature controller 18 can have a feedback control function, and the user can set the test temperature of the device under test DUT through the user interface, when the device under test DUT Upon reaching the predetermined test temperature, the temperature controller 18 automatically stops controlling the heater chip 14 for temperature rise. Conversely, when the temperature of the IC exceeds a threshold, the temperature controller 18 can also detect that the device under test DUT has not reached the predetermined temperature, and control the heating sheet 14 to continue heating to make the IC reach the test temperature. In addition, the threshold is configurable. For example, the threshold can be set to 1 ° C. When the device under test DUT cools down by more than 1 ° C, the temperature controller 18 controls the heating sheet 14 to continue heating. This setting eliminates the user's inconvenience of monitoring the temperature at any time and allows the DUT of the device under test to maintain a stable test temperature.
相較於現有技術,本發明的IC升溫裝置採用接觸式熱傳導之壓塊,可在IC升溫性能測試過程中,對晶片採用直接接觸式加熱及溫度量測,其耗電量低(約6W),相較於習知技術通過熱風槍(1500W)或冷暖機(4-5000W)進行熱對流的技術而言,具有快速、方便、簡易、便宜且省電,環保且不需壓縮氣等特性。此外,透過具有複數個隔熱牆之隔熱片,可有效阻絕熱能不必要的散失,以減少熱感元件到達預定溫度的時間,進而提昇測試效率。再者,本發明於特定實施例中,溫度測量器通過電源線及訊號線,在壓塊與被測裝置達成熱平衡的同時,可精確量測被測裝置之溫度,達成高度的適應性及加速量測效率。 Compared with the prior art, the IC temperature increasing device of the present invention adopts a contact heat conduction pressing block, and can adopt direct contact heating and temperature measurement on the wafer during the IC heating performance test, and the power consumption is low (about 6W). Compared with the prior art, the technology of heat convection by a hot air gun (1500W) or a warm air heater (4-5000W) is fast, convenient, simple, inexpensive, power-saving, environmentally friendly, and does not require compressed gas. In addition, through the heat insulation sheet with a plurality of heat insulation walls, the unnecessary loss of heat energy can be effectively prevented, so as to reduce the time when the heat sensitive element reaches the predetermined temperature, thereby improving the test efficiency. Furthermore, in the specific embodiment of the present invention, the temperature measuring device can accurately measure the temperature of the device under test through the power line and the signal line, and achieve a high degree of adaptability and acceleration while achieving a thermal balance between the pressure block and the device under test. Measurement efficiency.
現將參閱附圖進一步詳細說明根據本發明的IC升溫方法的流程。第5圖為根據本發明之IC升溫方法之實施例繪示之流程圖。本發明的IC升溫方法用於將一被測裝置加熱並測試該被測裝置之溫度,其同時適用於上述的IC升溫裝置,包含下列步驟: The flow of the IC heating method according to the present invention will now be described in further detail with reference to the accompanying drawings. Fig. 5 is a flow chart showing an embodiment of an IC heating method according to the present invention. The IC heating method of the present invention is for heating a device under test and testing the temperature of the device under test, which is applicable to the above-mentioned IC temperature increasing device, and includes the following steps:
S401:將溫度控制器連接輸入/出端之電源線及訊號線以分別電性連接加熱片及熱感元件。如前述實施例中所提到,溫度控制器可透過USB連接線連接至插座,以為了後續量測步驟所準備,且電源線及訊號線可透過絕緣片之通孔,分別與加熱片及熱感元件連接。此外,溫度控制器亦可以一包含處理器之晶片替代,與電腦設備連接,透過軟體端進行量測及加熱片溫度控制。此外,溫度控制器18可具有實施前述反饋控制功能之硬體、軟體或韌體,使用者 可透過使用者介面設定被測裝置DUT之測試溫度,當被測裝置DUT達到預定之測試溫度,溫度控制器18自動停止對加熱片14進行升溫。相反的,當IC降溫超過一閾值時,溫度控制器18亦可偵測被測裝置DUT未達預定溫度,其控制加熱片14繼續加熱,使IC可達測試溫度。此設置可免除使用者需對溫度隨時監測之不便,並使被測裝置DUT能始終維持在穩定之測試溫度。 S401: Connect the temperature controller to the power line and the signal line of the input/output terminal to electrically connect the heating piece and the thermal sensing element respectively. As mentioned in the foregoing embodiments, the temperature controller can be connected to the socket through the USB cable for the subsequent measurement steps, and the power line and the signal line can pass through the through holes of the insulating sheet, respectively, with the heating sheet and the heat. The sensing elements are connected. In addition, the temperature controller can also be replaced by a chip containing a processor, connected to a computer device, and measured by the software end and the temperature control of the heater chip. In addition, the temperature controller 18 may have a hardware, a soft body or a firmware that implements the aforementioned feedback control function, and the user The test temperature of the device under test DUT can be set through the user interface. When the device under test DUT reaches a predetermined test temperature, the temperature controller 18 automatically stops heating the heater chip 14. Conversely, when the temperature of the IC exceeds a threshold, the temperature controller 18 can also detect that the device under test DUT has not reached the predetermined temperature, and control the heating sheet 14 to continue heating to make the IC reach the test temperature. This setting eliminates the user's inconvenience of monitoring the temperature at any time and allows the DUT of the device under test to maintain a stable test temperature.
S402:使用溫度控制器透過電源線控制加熱片加熱。在本步驟中,透過使用者介面控制溫度控制器,使得加熱片達到欲測試之預定溫度。 S402: Control the heating piece heating through the power line by using a temperature controller. In this step, the temperature controller is controlled through the user interface such that the heater chip reaches the predetermined temperature to be tested.
S403:以壓塊接觸被測裝置,將加熱片之熱能傳導至被測裝置。並可以複數個突起部對應接觸被測裝置,使得在前述實施例中之被測裝置、熱感元件、壓塊及加熱片達到一熱平衡狀態。再者,在使用溫度控制器透過電源線控制加熱片加熱之步驟中,更包含使用絕緣片之複數個隔熱壁進行隔熱。 S403: contacting the device under test with a pressure block to conduct thermal energy of the heating piece to the device under test. And the plurality of protrusions correspondingly contact the device under test, so that the device under test, the thermal sensing element, the pressure block and the heating piece in the foregoing embodiment reach a thermal equilibrium state. Furthermore, in the step of controlling the heating of the heater chip through the power supply line using the temperature controller, the plurality of heat insulating walls using the insulating sheet are further insulated.
S404:控制溫度控制器透過訊號線檢測熱感元件之電阻值; S404: Control the temperature controller to detect the resistance value of the thermal sensing element through the signal line;
S405:使用溫度控制器根據電阻值計算獲得被測裝置之溫度。 S405: Calculate the temperature of the device under test according to the resistance value using a temperature controller.
請參閱第6A-6B圖,其為根據本發明之IC升溫方法之實施例之操作示意圖。如第6A圖所示,在IC升溫性能測試步驟前,被測IC裝置DUT1已放置在IC升溫性能測試設備6之IC插座64上,且第1圖中所述之IC升溫裝置1係設置在半開啟之可動式IC插座蓋體62內部,並透過連接介面63連接至溫度控制器。IC插座64透過印刷電路板66外接於IC性能檢測設備。較佳者,IC插座蓋體62係透過IC插座64周圍的鎖孔68固設於印刷電路板66之上。此外,IC插座蓋體62可包含一鎖定構造61,其位於IC升溫裝置1之上方,係在IC升溫裝置1與被測IC裝置DUT1接觸時能鎖緊,以確保IC升溫裝置1之壓塊能緊密貼合於被測IC裝置DUT1。IC插座蓋體62之開合部位還可包含一突起構造67,供位於IC插座蓋體62側邊之卡合構造65能勾住該突起構造57以使IC插座蓋體52能緊密蓋合。接著,進行IC升溫性能測試,如第6B圖所示,在進行IC升溫性能測試步驟的同時,壓 塊之複數個突出部直接接觸被測IC裝置DUT1。此時,執行本發明的IC升溫方法之實施例中的步驟S401至S405,可快速檢測出被測IC裝置DUT1之溫度,並同時透過性能檢測設備測試被測IC裝置DUT1之工作性能,檢測完畢後,僅需置換被測IC裝置DUT1便可進入次輪之檢測流程。 Please refer to FIGS. 6A-6B, which are schematic diagrams showing the operation of an embodiment of the IC heating method according to the present invention. As shown in FIG. 6A, before the IC temperature rise performance test step, the IC device DUT1 under test has been placed on the IC socket 64 of the IC temperature rise performance test device 6, and the IC temperature increase device 1 described in FIG. 1 is disposed at The inside of the semi-opening movable IC socket cover 62 is connected to the temperature controller through the connection interface 63. The IC socket 64 is externally connected to the IC performance detecting device through the printed circuit board 66. Preferably, the IC socket cover 62 is secured to the printed circuit board 66 through a locking hole 68 around the IC socket 64. In addition, the IC socket cover 62 can include a locking structure 61 located above the IC temperature increasing device 1 to be locked when the IC temperature increasing device 1 is in contact with the IC device under test DUT1 to ensure the clamping of the IC heating device 1. Can be closely attached to the IC device DUT1 under test. The opening and closing portion of the IC socket cover 62 may further include a protruding structure 67 for the engaging structure 65 on the side of the IC socket cover 62 to hook the protruding structure 57 to enable the IC socket cover 52 to be tightly fitted. Next, the IC temperature rise performance test is performed, as shown in FIG. 6B, while the IC temperature rise performance test step is performed, the pressure is simultaneously performed. The plurality of protrusions of the block directly contact the IC device DUT1 under test. At this time, steps S401 to S405 in the embodiment of the IC temperature raising method of the present invention can quickly detect the temperature of the IC device DUT1 under test, and simultaneously test the performance of the tested IC device DUT1 through the performance detecting device, and the detection is completed. After that, only the replacement of the IC device DUT1 to be tested can enter the detection process of the second round.
請參閱第7圖,其為根據本發明之IC升溫方法之另一實施例之操作示意圖。在第7圖中,複數個被測IC裝置DUTa、DUTb及DUTc被裝載在印刷電路板73上方。在本實施例中,將詳細說明採用IC升溫性能測試設備71a及71b進行選擇性升溫之實施例,其中,被測IC裝置DUTa及DUTc為欲進行升溫之標的物,而被測IC裝置DUTb係維持在常溫或正常工作溫度下。如圖所示,IC升溫性能測試設備71a及71b可分別被裝載在欲進行升溫之標的物上,即被測IC裝置DUTa及DUTc上方。此處,IC升溫性能測試設備71a及71b之細節類似於第6A-6B圖中所述之IC升溫性能測試設備6,故省略其重複描述。IC升溫性能測試設備71a及71b分別連接於個別之溫度控制器72a與72b,並設定不同之測試溫度,舉例而言,如圖中所示將溫度控制器72a設定為攝氏85度,以及將溫度控制器72a設定為攝氏95度。如此,可在將被測IC裝置DUTb維持在常溫或正常工作溫度之前提下,個別對被測IC裝置DUTa及DUTc以不同溫度升溫,並測試其工作效能。如此,可進一步達成對測試標的物進行選擇性升溫,而不會影響被測IC裝置DUTa及DUTc周圍元件或印刷電路板73之溫度,以進一步提昇測試的精確度與可靠度。 Please refer to FIG. 7, which is a schematic diagram of the operation of another embodiment of the IC heating method according to the present invention. In FIG. 7, a plurality of IC devices under test DUTa, DUTb, and DUTc are mounted on the printed circuit board 73. In the present embodiment, an embodiment in which the IC temperature rise performance test devices 71a and 71b are used for selective temperature rise will be described in detail, wherein the IC devices to be tested DUTa and DUTc are targets for temperature rise, and the IC device under test DUTb is used. Maintain at normal temperature or normal operating temperature. As shown in the figure, the IC heating performance test devices 71a and 71b can be respectively mounted on the target to be warmed up, that is, above the IC devices DUTa and DUTc to be tested. Here, the details of the IC warming performance test devices 71a and 71b are similar to those of the IC warming performance test device 6 described in Figs. 6A-6B, and a repetitive description thereof will be omitted. The IC warming performance test devices 71a and 71b are respectively connected to the individual temperature controllers 72a and 72b, and set different test temperatures. For example, the temperature controller 72a is set to 85 degrees Celsius as shown in the figure, and the temperature is set. The controller 72a is set to 95 degrees Celsius. In this way, before the IC device DUTb under test is maintained at normal temperature or normal operating temperature, the IC devices DUTa and DUTc are individually warmed at different temperatures, and the working efficiency is tested. In this way, the selective heating of the test target can be further achieved without affecting the temperature of the components around the tested IC device DUTa and DUTc or the printed circuit board 73, so as to further improve the accuracy and reliability of the test.
綜上所述,本發明的IC升溫裝置及方法採用直接接觸式熱傳導之壓塊,對IC採用接觸式加熱及溫度量測,除了可適用於小尺寸IC之外,相較於習知技術通過風扇進行熱對流之技術更具備有快速、方便、簡單、便宜、省電及環保等特性。此外,透過具有複數個隔熱牆之隔熱片,可有效阻絕熱能不必要的散失,以減少加熱時間,使受測裝置快速達到預定溫度,且隔熱片可以環 狀、片狀或塊狀分布以平均分散壓力。再者,本發明於特定實施例中,溫度測量器通過電源線及訊號線,在壓塊與被測裝置達成熱平衡的同時,可精確偵測被測裝置之溫度,達成高度的適應性及加速量測效率。 In summary, the IC temperature-increasing device and method of the present invention adopts a direct contact type heat conduction clamp, and adopts contact heating and temperature measurement for the IC, and is applicable to a small-sized IC, compared with the conventional technology. The technology of fan convection is more fast, convenient, simple, cheap, energy-saving and environmentally friendly. In addition, through the heat insulation sheet with a plurality of heat insulation walls, the unnecessary loss of heat energy can be effectively prevented, the heating time can be reduced, the device under test can reach the predetermined temperature quickly, and the heat insulation sheet can be looped. The shape, sheet or block distribution is evenly distributed. Furthermore, in the specific embodiment of the present invention, the temperature measuring device can accurately detect the temperature of the device under test through the power line and the signal line, and achieve a high degree of adaptability and acceleration while achieving a thermal balance between the pressure block and the device under test. Measurement efficiency.
當本發明的實施例參考其例示性實施例被特別顯示及描述時,其可為所屬技術領域具有通常知識者理解的是,在不脫離由以下申請專利範圍及其等效物所定義之本發明的精神及範疇內,可對其進行形式及細節上的各種變更。 While the embodiments of the present invention have been particularly shown and described with reference to the exemplary embodiments thereof, Various changes in form and detail may be made in the spirit and scope of the invention.
10‧‧‧壓塊 10‧‧‧Clamps
100‧‧‧基底 100‧‧‧Base
102‧‧‧表面 102‧‧‧ surface
104‧‧‧突起部 104‧‧‧Protruding
12‧‧‧熱感元件 12‧‧‧Thermal components
122‧‧‧電極 122‧‧‧ electrodes
14‧‧‧加熱片 14‧‧‧ heating film
142‧‧‧電極 142‧‧‧electrode
146‧‧‧通孔 146‧‧‧through hole
16‧‧‧絕緣片 16‧‧‧Insulation sheet
162‧‧‧基座 162‧‧‧Base
164‧‧‧隔熱壁 164‧‧‧Insulation wall
166‧‧‧通孔 166‧‧‧through hole
18‧‧‧溫度控制器 18‧‧‧ Temperature Controller
I/O‧‧‧輸入/出端 I/O‧‧‧Input/Output
PLUG‧‧‧插座 PLUG‧‧‧ socket
DUT‧‧‧被測裝置 DUT‧‧‧Device under test
PL‧‧‧電源線 PL‧‧‧Power cord
SL‧‧‧訊號線 SL‧‧‧ signal line
20‧‧‧殼體 20‧‧‧shell
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TW200933836A (en) * | 2008-01-31 | 2009-08-01 | King Yuan Electronics Co Ltd | IC heating apparatus for burning test |
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