TWI564133B - Broken wire processing device and broken wire processing method - Google Patents

Broken wire processing device and broken wire processing method Download PDF

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Publication number
TWI564133B
TWI564133B TW103121554A TW103121554A TWI564133B TW I564133 B TWI564133 B TW I564133B TW 103121554 A TW103121554 A TW 103121554A TW 103121554 A TW103121554 A TW 103121554A TW I564133 B TWI564133 B TW I564133B
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Taiwan
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roller
wire
fixing bracket
cutting
cutting line
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TW103121554A
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Chinese (zh)
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TW201600294A (en
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謝榮嘉
林福帝
楊鈺哲
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綠能科技股份有限公司
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Priority to TW103121554A priority Critical patent/TWI564133B/en
Priority to CN201410621472.9A priority patent/CN105196431B/en
Publication of TW201600294A publication Critical patent/TW201600294A/en
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Publication of TWI564133B publication Critical patent/TWI564133B/en

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
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Description

斷線處理裝置及斷線處理方法 Disconnection processing device and disconnection processing method

本發明是有關於一種斷線處理裝置及斷線處理方法,且特別是有關於一種線切割裝置的切割線的斷線處理裝置及斷線處理方法。 The present invention relates to a wire breakage processing device and a wire breakage processing method, and more particularly to a wire breakage processing device and a wire breakage processing method for a wire cutting device.

隨著環保意識抬頭,節能減碳的概念逐漸受眾人所重視,再生能源的開發與利用成為世界各國積極投入發展的重點。再生能源當中,由於太陽光隨處可得,且不像其他能源(如:石化能源、核能)一般會對地球產生污染,因此太陽能與可將太陽光轉換成電能的各種裝置是目前看好的明星產業。 With the rise of environmental awareness, the concept of energy conservation and carbon reduction has gradually attracted the attention of the audience. The development and utilization of renewable energy has become the focus of active development in all countries of the world. Among the renewable energy sources, because solar energy is available everywhere, and unlike other energy sources (such as petrochemical energy and nuclear energy), it will generally pollute the earth. Therefore, solar energy and various devices that can convert sunlight into electric energy are currently the star industry. .

在太陽能晶片的製程中,長條型的晶棒會通過線切割裝置以切割出多片太陽能晶片。一般而言,線切割裝置包括多個滾輪以及均勻地纏繞於這些滾輪的一切割線,切割線在傳送的過程中,可能因為切割線與導輪之間發生磨損導致深溝等原因而造成一次斷線,甚至是在導輪的不同位置上重複斷線。在發生斷線之 後,切割線在斷線之後的部位會被抽開,而使得導輪只會在局部區段被切割線捲繞,其餘區段則未有切割線捲繞。因此,當晶棒通過線切割裝置中的剩下來的切割線時,晶棒中未通過切割線的部位並不會被切割,而使得此區段的晶棒須被捨棄,造成整體成本提高。 In the process of solar wafers, the elongated ingots are passed through a wire cutting device to cut a plurality of solar wafers. In general, the wire cutting device includes a plurality of rollers and a cutting line uniformly wound around the rollers. During the conveying process, the cutting wires may be broken due to wear and tear caused by abrasion between the cutting wires and the guide rollers. The line, even at different positions of the guide wheel, is broken. In the event of a disconnection After that, the cutting line will be pulled away after the broken line, so that the guide wheel will only be wound by the cutting line in the partial section, and the remaining section will not be wound by the cutting line. Therefore, when the ingot passes through the remaining cutting line in the wire cutting device, the portion of the ingot that does not pass through the cutting line is not cut, so that the ingot of this segment must be discarded, resulting in an overall cost increase.

本發明提供一種斷線處理裝置,適於設置在線切割裝置上。線切割裝置包括多個導輪以及纏繞於這些導輪的切割線。斷線處理裝置包括第一固定支架、第一出線滾輪、第二固定支架、第一張力提供滾輪、第三固定支架及第一入線滾輪。第一固定支架與第三固定支架適於固定於線切割裝置上且位於這些滾輪的一側。第一出線滾輪與第一入線滾輪分別可調整地配置於第一固定支架與第三固定支架上接近切割線的初次斷線處。第二固定支架適於固定於該線切割裝置上遠離這些導輪處。第一張力提供滾輪可調整地配置於第二固定支架上。初次斷線之後重新被連接的切割線繞過第一出線導輪、第一張力提供導輪及第一入線導輪,以維持切割線所需的張力。 The present invention provides a wire breakage processing apparatus adapted to be placed on an inline cutting device. The wire cutting device includes a plurality of guide wheels and a cutting line wound around the guide wheels. The wire breaking processing device includes a first fixing bracket, a first outgoing roller, a second fixing bracket, a first tension providing roller, a third fixing bracket and a first wire feeding roller. The first fixing bracket and the third fixing bracket are adapted to be fixed to the wire cutting device and located on one side of the rollers. The first outgoing roller and the first incoming roller are respectively adjustably disposed on the first fixed bracket and the third fixed bracket at a first disconnection of the cutting line. The second fixing bracket is adapted to be fixed to the wire cutting device away from the guide wheels. The first tension providing roller is adjustably disposed on the second fixing bracket. The re-connected cutting line after the initial disconnection bypasses the first outgoing guide pulley, the first tension providing guide pulley, and the first incoming guide pulley to maintain the required tension of the cutting line.

在本發明的一實施例中,更包括第二出線滾輪、第二張力提供滾輪及第二入線滾輪。第二出線滾輪與第二入線滾輪分別適於可調整地固定於線切割裝置上接近切割線的第二次斷線處。第二張力提供滾輪適於可調整地配置於線切割裝置上遠離這些導 輪處。第二次斷線之後重新被連接的切割線繞過第二出線導輪、第二張力提供滾輪及第二入線滾輪,以維持切割線所需的張力。 In an embodiment of the invention, the second outgoing roller, the second tension providing roller and the second incoming roller are further included. The second outlet roller and the second inlet roller are respectively adapted to be adjustably fixed to the second disconnection of the wire cutting device near the cutting line. a second tension providing roller adapted to be adjustably disposed on the wire cutting device away from the guides At the wheel. The re-connected cutting line after the second disconnection bypasses the second outgoing guide wheel, the second tension providing roller and the second incoming roller to maintain the required tension of the cutting line.

在本發明的一實施例中,更包括第四固定支架及第五固定支架。第四固定支架與第五固定支架分別固定於線切割裝置上且位於這些導輪的此側。第二出線滾輪與第二入線滾輪分別可調整地配置於第四固定支架與第五固定支架上。 In an embodiment of the invention, the fourth fixing bracket and the fifth fixing bracket are further included. The fourth fixing bracket and the fifth fixing bracket are respectively fixed on the wire cutting device and located on the side of the guiding wheels. The second outlet roller and the second inlet roller are respectively adjustably disposed on the fourth fixing bracket and the fifth fixing bracket.

在本發明的一實施例中,更包括多個固定條桿,垂直地固定於第一固定支架與第三固定支架中的至少一者,其中第四固定支架與第五固定支架的至少一者透過這些固定條桿配置在線切割裝置上。 In an embodiment of the invention, the method further includes a plurality of fixing bars vertically fixed to at least one of the first fixing bracket and the third fixing bracket, wherein at least one of the fourth fixing bracket and the fifth fixing bracket The inline cutting device is configured through these fixed bars.

在本發明的一實施例中,上述的各固定條桿包括螺桿及旋入螺桿的多個螺帽。 In an embodiment of the invention, each of the fixed bars includes a screw and a plurality of nuts that are screwed into the screw.

在本發明的一實施例中,上述的第二張力提供滾輪可調整地配置於第二固定支架上。 In an embodiment of the invention, the second tension providing roller is adjustably disposed on the second fixing bracket.

在本發明的一實施例中,上述的線切割裝置包括切割室及線軸室,這些導輪、第一出線滾輪及第一入線滾輪位於切割室,第一張力提供滾輪位於線軸室,重新被連接的切割線的一部分從切割室被拉至線軸室且繞過第一張力提供滾輪。 In an embodiment of the invention, the wire cutting device comprises a cutting chamber and a spool chamber, wherein the guide wheel, the first outgoing roller and the first incoming roller are located in the cutting chamber, and the first tension providing roller is located in the spool chamber, and is re- A portion of the connected cutting line is pulled from the cutting chamber to the spool chamber and bypasses the first tension providing roller.

在本發明的一實施例中,上述的線切割裝置包括固定於線切割裝置上且位於這些滾輪的此側的原始入線滾輪及原始出線滾輪,切割線在纏繞於導輪之前與之後分別經過原始入線滾輪及原始出線滾輪,第一入線滾輪平行於原始入線滾輪,且第一出線 滾輪平行於原始出線滾輪,以使重新被連接的切割線以特定角度繞入與離開導輪。 In an embodiment of the invention, the wire cutting device comprises an original incoming roller and an original outgoing roller fixed to the wire cutting device on the side of the roller, and the cutting wire passes before and after being wound around the guide wheel. The original incoming roller and the original outgoing roller, the first incoming roller is parallel to the original incoming roller, and the first outgoing line The roller is parallel to the original take-up roller to cause the re-connected cutting line to wrap around and exit the guide wheel at a particular angle.

在本發明的一實施例中,更包括第六固定支架,適於固定於線切割裝置上且位於導輪的此側,其中原始入線滾輪固定於第一固定支架,且原始出線滾輪固定於第六固定支架。 In an embodiment of the present invention, a sixth fixing bracket is further disposed on the wire cutting device and located on the side of the guide wheel, wherein the original wire feeding roller is fixed to the first fixing bracket, and the original wire roller is fixed to the wire. The sixth fixed bracket.

在本發明的一實施例中,上述的第一固定支架、第二固定支架及第三固定支架分別包括第一多向軸承、第二多向軸承及第三多向軸承,以調整第固定支架、第二固定支架及第三固定支架的角度。 In an embodiment of the invention, the first fixing bracket, the second fixing bracket and the third fixing bracket respectively comprise a first multidirectional bearing, a second multidirectional bearing and a third multidirectional bearing to adjust the first fixing bracket The angle of the second fixing bracket and the third fixing bracket.

本發明更提供一種斷線處理方法,適用於線切割裝置。線切割裝置包括多個導輪以及纏繞於這些導輪上且初次被斷開的切割線。斷線處理方法包括下列步驟:拉出切割線初次斷開的兩端且接合切割線的此兩端;固定斷線處理裝置的第一固定支架、第二固定支架、第三固定支架至線切割裝置上,其中第一固定支架與第三固定支架位於這些滾輪的一側,且第二固定支架位於遠離這些導輪處;可調整地配置斷線處理裝置的第一出線滾輪、第一張力提供滾輪及第一入線滾輪在第一固定支架、第二固定支架及第三固定支架上,其中第一出線滾輪及第一入線滾輪位在接近切割線的初次斷線處;以及將初次斷線之後重新被連接的切割線繞過第一出線滾輪、第一張力提供滾輪及第一入線滾輪,以使切割線能維持所需的張力。 The invention further provides a wire breaking processing method suitable for a wire cutting device. The wire cutting device includes a plurality of guide wheels and a cutting line wound on the guide wheels and initially disconnected. The wire breaking processing method comprises the following steps: pulling out the two ends of the cutting wire for the first time and engaging the two ends of the cutting wire; fixing the first fixing bracket, the second fixing bracket, and the third fixing bracket of the wire breaking processing device to the wire cutting In the device, the first fixing bracket and the third fixing bracket are located at one side of the rollers, and the second fixing bracket is located away from the guiding wheels; the first outgoing roller, the first tension of the disconnecting device is adjustably configured Providing a roller and a first inlet roller on the first fixing bracket, the second fixing bracket and the third fixing bracket, wherein the first outgoing roller and the first incoming roller are located at a first disconnecting line close to the cutting line; and the first breaking The re-connected cutting line after the wire bypasses the first outgoing roller, the first tension providing roller and the first incoming roller to maintain the desired tension of the cutting wire.

在本發明的一實施例中,切割線發生第二次斷開,斷線 處理方法更包括下列步驟:拉出切割線第二次斷開的兩端且接合切割線在第二次斷開的此兩端;可調整地配置斷線處理裝置的第二出線滾輪、第二張力提供滾輪及第二入線滾輪於線切割裝置上,其中第二出線滾輪及第二入線滾輪位在接近切割線的第二次斷線處;將第二次斷線之後重新被連接的切割線繞過第二出線滾輪、第二張力提供滾輪及第二入線滾輪,以使切割線能維持所需的張力。 In an embodiment of the invention, the cutting line is disconnected a second time, and the wire is broken. The processing method further comprises the steps of: pulling out the two ends of the cutting line for the second time and engaging the cutting line at the two ends of the second disconnection; adjusting the second outgoing roller of the disconnecting device, The two tension providing roller and the second incoming roller are on the wire cutting device, wherein the second outgoing roller and the second incoming roller are located at a second disconnection near the cutting line; the second disconnected wire is reconnected after being disconnected The cutting line bypasses the second take-up roller, the second tension providing roller and the second incoming roller to maintain the desired tension of the cutting line.

在本發明的一實施例中,更包括固定斷線處理裝置的第四固定支架、第五固定支架至線切割裝置上,以供第二出線導輪及第二入線導輪可調整地配置 In an embodiment of the invention, the fourth fixing bracket and the fifth fixing bracket of the fixed wire breaking processing device are further included on the wire cutting device, so that the second wire guide wheel and the second wire guide wheel are adjustably arranged.

在本發明的一實施例中,上述的斷線處理裝置更包括多個固定條桿,垂直地固定於第一固定支架與第三固定支架中的至少一者,其中第四固定支架與第五固定支架的至少一者透過這些固定條桿配置在線切割裝置上。 In an embodiment of the invention, the wire breaking processing device further includes a plurality of fixing bars vertically fixed to at least one of the first fixing bracket and the third fixing bracket, wherein the fourth fixing bracket and the fifth fixing bracket At least one of the fixing brackets is disposed on the inline cutting device through the fixing bars.

在本發明的一實施例中,上述的各固定條桿包括螺桿及旋入螺桿的多個螺帽。 In an embodiment of the invention, each of the fixed bars includes a screw and a plurality of nuts that are screwed into the screw.

在本發明的一實施例中,上述的第二張力提供滾輪可調整地配置於第二固定支架上。 In an embodiment of the invention, the second tension providing roller is adjustably disposed on the second fixing bracket.

在本發明的一實施例中,上述的線切割裝置包括切割室及線軸室,這些導輪、第一出線滾輪及第一入線滾輪位於切割室,第一張力提供滾輪位於線軸室,重新被連接的切割線的一部分從切割室被拉至線軸室且繞過第一張力提供滾輪。 In an embodiment of the invention, the wire cutting device comprises a cutting chamber and a spool chamber, wherein the guide wheel, the first outgoing roller and the first incoming roller are located in the cutting chamber, and the first tension providing roller is located in the spool chamber, and is re- A portion of the connected cutting line is pulled from the cutting chamber to the spool chamber and bypasses the first tension providing roller.

在本發明的一實施例中,上述的線切割裝置包括固定於線切割裝置上且位於這些導輪的此側的原始入線滾輪及原始出線滾輪,切割線在纏繞於導輪之前與之後分別經過原始入線滾輪及原始出線滾輪,第一入線滾輪平行於原始入線滾輪,且第一出線滾輪平行於原始出線滾輪,以使重新被連接的切割線以特定角度繞入與離開導輪。 In an embodiment of the invention, the wire cutting device comprises an original wire feeding roller and an original wire roller fixed on the wire cutting device on the side of the wire guide, and the cutting wire is respectively wound before and after being wound around the guide wheel. After the original incoming roller and the original outgoing roller, the first incoming roller is parallel to the original incoming roller, and the first outgoing roller is parallel to the original outgoing roller, so that the reconnected cutting wire is wound into and out of the guide wheel at a specific angle. .

在本發明的一實施例中,上述的斷線處理裝置更包括第六固定支架,適於固定於線切割裝置上且位於導輪的此側,其中原始入線滾輪固定於第三固定支架,且原始出線滾輪固定於第六固定支架。 In an embodiment of the present invention, the wire breaking device further includes a sixth fixing bracket adapted to be fixed to the wire cutting device and located on the side of the guide wheel, wherein the original wire feeding roller is fixed to the third fixing bracket, and The original take-up roller is fixed to the sixth fixed bracket.

在本發明的一實施例中,上述的第一固定支架、第二固定支架及第三固定支架分別包括第一多向軸承、第二多向軸承及第三多向軸承,以調整第一固定支架、第二固定支架及第三固定支架的角度。 In an embodiment of the invention, the first fixing bracket, the second fixing bracket and the third fixing bracket respectively comprise a first multidirectional bearing, a second multidirectional bearing and a third multidirectional bearing to adjust the first fixing The angle of the bracket, the second fixing bracket and the third fixing bracket.

基於上述,當切割線發生初次斷線時,將切割線斷線處的兩端拉出焊接,其後為了使整條切割線能夠維持特定的張力,本發明的斷線處理裝置透過第一、第三固定支架固定在線切割裝置上,且第一出線滾輪與第一入線滾輪分別配置於第一固定支架與第三固定支架上接近切割線的初次斷線處,再透過第二固定支架固定於線切割裝置上遠離導輪處(例如是線軸室),並搭配第二固定支架的第一張力提供滾輪作線張力的調整,第一張力提供滾輪視切割線的所需張力可調整遠近地配置於第二固定支架上,被 拉出的切割線繞過第一出線滾輪、第一張力提供滾輪與第一入線滾輪,而被提供足夠張力。同理,當切割線發生二次斷線時,本發明的斷線處理裝置可將第二出線滾輪與第二入線滾輪配置在接近切割線的二次斷線處,且第二張力提供滾輪視切割線的所需張力配置在較遠的位置,切割線在二次斷線後被接合的區段便能透過纏繞於第二出線滾輪、第二張力提供滾輪與第二入線滾輪,而被提供足夠張力。透過本發明的斷線處理裝置,線切割裝置不需捨棄斷線位置的切割線,切割線仍然均勻地分布在導輪上,使得通過線切割裝置的晶棒均能被切割,而不會浪費晶棒。 Based on the above, when the cutting line is broken for the first time, both ends of the broken line of the cutting line are pulled out and welded, and then the wire breaking processing device of the present invention passes through the first, in order to maintain a specific tension of the entire cutting line. The third fixing bracket is fixed on the online cutting device, and the first outlet roller and the first inlet roller are respectively disposed on the first fixing bracket and the third fixing bracket at the first breaking line of the cutting line, and then fixed by the second fixing bracket. The wire is cut away from the guide wheel (for example, the spool chamber), and the first tension of the second fixing bracket is used to provide the roller for adjusting the line tension. The first tension provides the roller to adjust the distance according to the required tension of the cutting line. Disposed on the second fixed bracket, The drawn cutting line bypasses the first take-up roller, the first tension providing roller and the first incoming roller, and is supplied with sufficient tension. Similarly, when the cutting line is broken twice, the wire breaking processing device of the present invention can dispose the second outgoing roller and the second incoming roller at a secondary breaking line close to the cutting line, and the second tension providing roller Depending on the required tension of the cutting line, it is disposed at a far position, and the section where the cutting line is joined after the second breaking can be entangled by the second outgoing roller, the second tension providing roller and the second incoming roller, and Being supplied with sufficient tension. Through the wire breaking processing device of the present invention, the wire cutting device does not need to discard the cutting line at the broken position, and the cutting line is evenly distributed on the guide wheel, so that the ingots passing through the wire cutting device can be cut without wasting Ingot.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

10‧‧‧線切割裝置 10‧‧‧Wire cutting device

11‧‧‧切割室 11‧‧‧ cutting room

12‧‧‧線軸室 12‧‧‧ spool room

13‧‧‧導輪 13‧‧‧guide wheel

14‧‧‧原始入線滾輪 14‧‧‧ Original incoming line wheel

15‧‧‧原始出線滾輪 15‧‧‧Original outlet roller

16‧‧‧切割線 16‧‧‧ cutting line

100‧‧‧斷線處理裝置 100‧‧‧Disconnection processing device

110‧‧‧第一固定支架 110‧‧‧First fixed bracket

112‧‧‧導溝 112‧‧‧ Guide groove

114‧‧‧第一多向軸承 114‧‧‧First multidirectional bearing

115‧‧‧第一出線滾輪 115‧‧‧First outlet roller

120‧‧‧第二固定支架 120‧‧‧Second fixed bracket

125‧‧‧第一張力提供滾輪 125‧‧‧First tension providing roller

130‧‧‧第三固定支架 130‧‧‧ third fixed bracket

135‧‧‧第一入線滾輪 135‧‧‧First entry wheel

140‧‧‧第二出線滾輪 140‧‧‧Second outlet roller

145‧‧‧第四固定支架 145‧‧‧Four fixed bracket

150‧‧‧第二張力提供滾輪 150‧‧‧Second tension supply roller

160‧‧‧第二入線滾輪 160‧‧‧Second entry roller

165‧‧‧第五固定支架 165‧‧‧Fix fixed bracket

170‧‧‧固定條桿 170‧‧‧Fixed bars

172‧‧‧螺桿 172‧‧‧ screw

174‧‧‧螺帽 174‧‧‧ Nuts

180‧‧‧第六固定支架 180‧‧‧6th fixed bracket

200‧‧‧斷線處理方法 200‧‧‧Wire breaking method

210~270‧‧‧步驟 210~270‧‧‧Steps

圖1是依照本發明的一實施例的一種斷線處理裝置的其中一部分配置在線切割裝置的切割室的示意圖。 1 is a schematic diagram of a portion of a wire breakage processing device configured with a cutting chamber of an inline cutting device, in accordance with an embodiment of the present invention.

圖2是依照本發明的一實施例的一種斷線處理裝置的另一部分配置在線切割裝置的線軸室的示意圖。 2 is a schematic diagram of another portion of a wire breakage processing device configured with a spool chamber of an inline cutting device in accordance with an embodiment of the present invention.

圖3是圖1的斷線處理裝置的第一固定支架的示意圖。 3 is a schematic view of a first fixing bracket of the wire breaking processing device of FIG. 1.

圖4是圖3的爆炸示意圖。 Figure 4 is a schematic exploded view of Figure 3.

圖5是圖1的斷線處理裝置的第一固定支架、第四固定支架與固定條桿的示意圖。 5 is a schematic view of the first fixing bracket, the fourth fixing bracket and the fixing bar of the wire breaking processing device of FIG. 1.

圖6是依照本發明的一實施例的一種斷線處理方法的流程示意圖。 FIG. 6 is a schematic flow chart of a disconnection processing method according to an embodiment of the invention.

圖1是依照本發明的一實施例的一種斷線處理裝置的其中一部分配置在線切割裝置的切割室的示意圖。圖2是依照本發明的一實施例的一種斷線處理裝置的另一部分配置在線切割裝置的線軸室的示意圖。 1 is a schematic diagram of a portion of a wire breakage processing device configured with a cutting chamber of an inline cutting device, in accordance with an embodiment of the present invention. 2 is a schematic diagram of another portion of a wire breakage processing device configured with a spool chamber of an inline cutting device in accordance with an embodiment of the present invention.

請參閱圖1與圖2,本實施例的斷線處理裝置100適於設置在線切割裝置10上。在本實施例中,線切割裝置10具有如圖1所示的切割室11及如圖2所示的線軸室12。在切割室11中,線切割裝置10包括多個導輪13、原始入線滾輪14、原始出線滾輪15及繞過原始入線滾輪14、這些導輪13及原始出線滾輪15的切割線16。詳細而言,成捲的切割線16從一出捲裝置(未繪示)拉出之後,通過原始入線滾輪14以特定角度從圖1的左方開始均勻地纏繞於這些導輪13,再從圖1的右方通過原始出線滾輪15之後,捲入一收捲裝置(未繪示)。在切割過程中,切割線16會持續地從上述的出捲裝置放出並收回至上述的收捲裝置,而使通過切割線16的晶棒(未繪示)被切割成多片晶片(未繪示)。 Referring to FIG. 1 and FIG. 2, the wire breaking processing device 100 of the present embodiment is adapted to be disposed on the wire cutting device 10. In the present embodiment, the wire cutting device 10 has a cutting chamber 11 as shown in Fig. 1 and a spool chamber 12 as shown in Fig. 2. In the cutting chamber 11, the wire cutting device 10 includes a plurality of guide wheels 13, an original incoming roller 14, an original take-up roller 15, and a cutting line 16 that bypasses the original incoming roller 14, the guide wheels 13, and the original take-up roller 15. In detail, after the roll cutting line 16 is pulled out from a take-up device (not shown), the original wire feed roller 14 is evenly wound around the guide wheels 13 from the left side of FIG. 1 at a specific angle, and then The right side of Fig. 1 passes through the original take-up roller 15, and is then wound into a winding device (not shown). During the cutting process, the cutting line 16 is continuously discharged from the above-described unwinding device and retracted to the winding device described above, so that the ingot (not shown) passing through the cutting line 16 is cut into a plurality of wafers (not drawn) Show).

在線切割裝置10的運作過程中,由於切割線16與導輪13或是晶棒發生磨耗,可能使得切割線16發生斷線的狀況。在本實施例中,當切割線16斷線時,可將切割線16斷線處的兩端拉 出焊接,使斷線被接合之後能繼續使用。然而,由於切割線16在原斷線處的區段已被拉出,而使得整條切割線16無法維持原有的張力來進行切割作業。在本實施例中,透過在線切割裝置10上配置斷線處理裝置100,以使接合後的整條切割線16能夠維持所需的張力,而能夠進行原來的切割作業。 During the operation of the wire cutting device 10, the cutting wire 16 may be broken due to wear of the cutting wire 16 and the guide wheel 13 or the ingot. In this embodiment, when the cutting line 16 is broken, the ends of the cutting line 16 can be pulled at the broken ends. The welding is performed so that the broken wire can be used after being joined. However, since the section of the cutting line 16 at the original broken line has been pulled out, the entire cutting line 16 cannot maintain the original tension to perform the cutting operation. In the present embodiment, the disconnection processing device 100 is disposed on the in-line cutting device 10 so that the entire cutting line 16 after the bonding can maintain the required tension, and the original cutting operation can be performed.

下面將對斷線處理裝置100進行詳細地介紹。請同時參閱圖1與圖2,斷線處理裝置100包括第一固定支架110、第一出線滾輪115、第二固定支架120、第一張力提供滾輪125、第三固定支架130及第一入線滾輪135。 The disconnection processing apparatus 100 will be described in detail below. Referring to FIG. 1 and FIG. 2 simultaneously, the wire breaking processing device 100 includes a first fixing bracket 110, a first outgoing roller 115, a second fixing bracket 120, a first tension providing roller 125, a third fixing bracket 130, and a first access line. Roller 135.

第一固定支架110與第三固定支架130適於固定在切割室11內的線切割裝置10上且位於這些導輪13的一側。第一出線滾輪115與第一入線滾輪135分別可調整地配置於第一固定支架110與第三固定支架130上接近切割線16的初次斷線處。 The first fixing bracket 110 and the third fixing bracket 130 are adapted to be fixed on the wire cutting device 10 in the cutting chamber 11 and on one side of the guide wheels 13. The first outgoing roller 115 and the first incoming roller 135 are respectively adjustably disposed on the first fixing bracket 110 and the third fixing bracket 130 at a first disconnection of the cutting line 16 .

圖3是圖1的斷線處理裝置的第一固定支架的示意圖。在本實施例中,第一固定支架110具有導溝112,以供第一出線滾輪115滑設並固定於其上。在本實施例中,第二固定支架120與第三固定支架130也是透過與第一固定支架110相同的方式來供第一張力提供滾輪125與第一入線滾輪135滑設至所需位置後固定,此處便不再多加贅述。 3 is a schematic view of a first fixing bracket of the wire breaking processing device of FIG. 1. In the embodiment, the first fixing bracket 110 has a guiding groove 112 for the first outgoing roller 115 to slide and be fixed thereon. In this embodiment, the second fixing bracket 120 and the third fixing bracket 130 are also fixed in the same manner as the first fixing bracket 110 for the first tension providing roller 125 and the first threading roller 135 to be slid to a desired position. I will not repeat them here.

請回到圖1,操作者可視初次斷線的所在位置,將第一出線滾輪115與第一入線滾輪135設置在靠近原斷線處,來導引出此區段的切割線16。此外,在本實施例中,第一入線滾輪135平 行於原始入線滾輪14,且第一出線滾輪115平行於原始出線滾輪15,以使切割線16在重新被連接的區段能夠以與其他區段相同的角度繞入與離開導輪13,降低因角度不同而造成對晶棒切割時的影響。 Referring back to FIG. 1, the operator can set the first outgoing roller 115 and the first incoming roller 135 to be close to the original broken line, depending on the position of the first disconnection, to guide the cutting line 16 of the segment. In addition, in this embodiment, the first incoming roller 135 is flat. The original take-up roller 14 is run, and the first outgoing roller 115 is parallel to the original outgoing roller 15 so that the cutting line 16 can be wound into and out of the guide wheel 13 at the same angle as the other segments. , to reduce the impact on the cutting of the ingot due to different angles.

此外,第二固定支架120適於固定於線切割裝置10上遠離導輪13處,例如是圖2所示的線軸室12。第一張力提供滾輪125可調整遠近地配置於第二固定支架120上。由於要接合斷開的切割線16時,會需要將切割線16拉離導輪13一定的長度,為了提供切割線16足夠的張力,本實施例的第二固定支架120特意設置在切割室11旁的線軸室12,且第一張力提供滾輪125再依據切割線16所需的張力調整在第二固定支架120上的相對位置。如此一來,重新被連接且被拉出於導輪13一小段的切割線16繞過第一出線滾輪115、第一張力提供滾輪125及第一入線滾輪135時,而使得此區段的切割線16能夠達到所需的緊繃程度,進而讓整條切割線16具有足夠的張力。 Furthermore, the second fixing bracket 120 is adapted to be fixed to the wire cutting device 10 away from the guide wheel 13, such as the spool chamber 12 shown in FIG. The first tension providing roller 125 is disposed on the second fixing bracket 120 to be adjusted far and near. Since the cutting line 16 is to be pulled away from the cutting wheel 16 for a certain length, in order to provide sufficient tension of the cutting line 16, the second fixing bracket 120 of the present embodiment is intentionally disposed in the cutting chamber 11 Next to the spool chamber 12, and the first tension providing roller 125 adjusts the relative position on the second fixed bracket 120 according to the required tension of the cutting line 16. In this way, the cutting line 16 that is reconnected and pulled out of the guide wheel 13 bypasses the first outgoing roller 115, the first tension providing roller 125 and the first incoming roller 135, so that the section is The cutting line 16 is capable of achieving the desired degree of tightness, thereby providing the entire cutting line 16 with sufficient tension.

當然,在其他實施例中,第二固定支架120與第一張力提供滾輪125也可以位於切割室11中較遠離導輪13的位置,不一定需要配置在切割室11以外的區域,只要切割線16在繞過第一出線滾輪115、第一張力提供滾輪125及第一入線滾輪135之後能夠達到所需的張力即可。 Of course, in other embodiments, the second fixing bracket 120 and the first tension providing roller 125 may also be located at a position farther away from the guide wheel 13 in the cutting chamber 11, and need not be disposed in an area other than the cutting chamber 11, as long as the cutting line After the first outgoing roller 115, the first tension providing roller 125, and the first incoming roller 135 are bypassed, the required tension can be achieved.

在本實施例中,斷線處理裝置100更包括第二出線滾輪140、第二張力提供滾輪150及第二入線滾輪160。由於線切割裝 置10在運作時,也可能會有其他部位的切割線16發生斷線的狀況,當發生這種二次斷線的狀況時,同樣地,操作者可將第二出線滾輪140與第二入線滾輪160配置在線切割裝置10上接近切割線16在第二次斷線的位置,以導引出接近第二次斷線處的切割線16。並且,視切割線16所需的張力來調整第二張力提供滾輪150配置於線軸室12的位置。第二次斷線之後重新被連接的切割線16繞過第二出線滾輪140、第二張力提供滾輪150及第二入線滾輪160,以維持切割線所需的張力。 In the embodiment, the disconnection processing device 100 further includes a second outlet roller 140, a second tension providing roller 150, and a second incoming roller 160. Due to wire cutting When the device 10 is in operation, there may be a situation in which the cutting line 16 of other parts is broken. When such a secondary disconnection occurs, the operator can similarly use the second outgoing roller 140 and the second. The incoming roller 160 is disposed on the inline cutting device 10 proximate to the position where the cutting line 16 is at the second broken line to guide the cutting line 16 near the second broken line. Further, the position at which the second tension providing roller 150 is disposed in the spool chamber 12 is adjusted in accordance with the tension required for the cutting line 16. The re-connected cutting line 16 after the second disconnection bypasses the second take-up roller 140, the second tension providing roller 150, and the second incoming roller 160 to maintain the tension required for the cutting line.

在本實施例中,如圖1所示,斷線處理裝置100更包括第四固定支架145及第五固定支架165。第四固定支架145與第五固定支架165分別固定於線切割裝置10上且位於這些導輪13的此側。第二出線滾輪140與第二入線滾輪160分別可調整地配置於第四固定支架145與第五固定支架165上,以設置在接近切割線16在第二次斷線的位置。此外,如圖2所示,在本實施例中,在線軸室12內的第二張力提供滾輪150則是與第一張力提供滾輪125同樣地固定於第二固定支架120上。 In this embodiment, as shown in FIG. 1 , the wire breaking processing device 100 further includes a fourth fixing bracket 145 and a fifth fixing bracket 165 . The fourth fixing bracket 145 and the fifth fixing bracket 165 are respectively fixed to the wire cutting device 10 and located on the side of the guide wheels 13. The second outgoing roller 140 and the second incoming roller 160 are respectively adjustably disposed on the fourth fixing bracket 145 and the fifth fixing bracket 165 to be disposed at a position close to the cutting line 16 at the second disconnection. Further, as shown in FIG. 2, in the present embodiment, the second tension providing roller 150 in the spool chamber 12 is fixed to the second fixing bracket 120 in the same manner as the first tension providing roller 125.

當然,在其他實施例中,操作者可視初次斷線與二次斷線的位置、固定支架的支撐性等因素,來決定是否讓第一出線滾輪115與第二出線滾輪140共用第一固定支架110,或是第一入線滾輪135與第二入線滾輪160共用第三固定支架130。換句話說,在切割室中,固定支架的數量不一定要與滾輪數量相同或不同。此外,在線軸室12中的第一張力提供滾輪125與第二張力提供滾 輪150也可以設置在不同的固定支架上,並不以上述為限制。 Of course, in other embodiments, the operator can determine whether to let the first outgoing roller 115 and the second outgoing roller 140 share the first one, depending on factors such as the position of the first disconnection and the secondary disconnection, and the supportability of the fixed bracket. The fixing bracket 110 or the first wire feeding roller 135 and the second wire feeding roller 160 share the third fixing bracket 130. In other words, in the cutting chamber, the number of fixing brackets does not have to be the same or different from the number of rollers. In addition, the first tension in the spool chamber 12 provides the roller 125 and the second tension provides a roll The wheel 150 can also be placed on a different fixed bracket and is not limited to the above.

值得一提的是,在本實施例中,由於第二張力提供滾輪150與第一張力提供滾輪125均固定於第二固定支架120上,為了避免勾繞於第一張力提供滾輪125與第二張力提供滾輪150的切割線16相互干擾,第一張力提供滾輪125與第二張力提供滾輪150分別配置在第二固定支架120的不同側上,更精確地說,在本實施例中,第一張力提供滾輪125配置於第二固定支架120在圖面上左側的位置,第二張力提供滾輪150則配置於第二固定支架120在圖面上右側的位置,以使勾繞於兩者的切割線16能夠間隔一段距離。 It is to be noted that, in this embodiment, since the second tension providing roller 150 and the first tension providing roller 125 are both fixed on the second fixing bracket 120, in order to avoid hooking the first tension providing roller 125 and the second The cutting lines 16 of the tension providing roller 150 interfere with each other, and the first tension providing roller 125 and the second tension providing roller 150 are respectively disposed on different sides of the second fixing bracket 120, more precisely, in this embodiment, the first The tension providing roller 125 is disposed on the left side of the second fixing bracket 120 on the left side of the drawing, and the second tension providing roller 150 is disposed on the right side of the second fixing bracket 120 on the drawing surface to cut the two Lines 16 can be separated by a distance.

此外,當多個固定支架配置在導輪13的此側時,由於空間上的限制,為了避免在結構上相互干擾,圖4是圖3的爆炸示意圖。請參閱圖4,第一固定支架110包括第一多向軸承114,在本實施例中,第一多向軸承114為球軸承,其可提供萬向轉動,以調整第一固定支架110的角度。同理,第二固定支架120及第三固定支架130也可分別包括第二多向軸承(未繪示)及第三多向軸承(未繪示),以使得第二固定支架120與第三固定支架130的角度可視需求而被調整,此處便不多加贅述。 Further, when a plurality of fixing brackets are disposed on this side of the guide wheel 13, FIG. 4 is an exploded view of FIG. 3 in order to avoid structural interference with each other due to space constraints. Referring to FIG. 4, the first fixing bracket 110 includes a first multidirectional bearing 114. In the embodiment, the first multidirectional bearing 114 is a ball bearing, which can provide universal rotation to adjust the angle of the first fixing bracket 110. . Similarly, the second fixing bracket 120 and the third fixing bracket 130 may also include a second multi-directional bearing (not shown) and a third multi-directional bearing (not shown), respectively, so that the second fixing bracket 120 and the third The angle of the fixed bracket 130 can be adjusted as needed, and will not be described here.

此外,由於空間上的限制,線切割裝置10在導輪13的此側可能未有足夠的空間來讓這些固定支架直接鎖固於其上,下面提供一種其他的方式來設置固定支架。圖5是圖1的斷線處理裝置的第一固定支架、第四固定支架與固定條桿的示意圖。請同 時參閱圖1與圖5,斷線處理裝置100更包括多個固定條桿170,垂直地固定於第一固定支架110與第三固定支架130中的至少一者。其中第四固定支架145與第五固定支架165的至少一者透過這些固定條桿170配置在線切割裝置10上。 In addition, due to space limitations, the wire cutting device 10 may not have sufficient space on this side of the guide wheel 13 to directly lock the mounting brackets thereto, and another way to provide the mounting bracket is provided below. 5 is a schematic view of the first fixing bracket, the fourth fixing bracket and the fixing bar of the wire breaking processing device of FIG. 1. Please Referring to FIG. 1 and FIG. 5 , the wire breaking processing device 100 further includes a plurality of fixing bars 170 vertically fixed to at least one of the first fixing bracket 110 and the third fixing bracket 130 . At least one of the fourth fixing bracket 145 and the fifth fixing bracket 165 is disposed on the inline cutting device 10 through the fixing bars 170.

詳細而言,在本實施例中,斷線處理裝置10包括兩個固定條桿170,各固定條桿170包括螺桿172及旋入螺桿172的多個螺帽174。螺桿172可穿入第一固定支架110的導溝112中且透過上下的螺帽174固定住螺桿172相對於第一固定支架110的位置。此外,螺桿172可再穿過第四固定支架145的導溝,並透過導溝上下的螺帽174固定第四固定支架145相對於螺桿172的位置。透過上述方式,第四固定支架145便可透過固定條桿170固定在第一固定支架110上。 In detail, in the present embodiment, the wire breaking processing device 10 includes two fixing bars 170, and each fixing bar 170 includes a screw 172 and a plurality of nuts 174 screwed into the screw 172. The screw 172 can penetrate into the guide groove 112 of the first fixing bracket 110 and fix the position of the screw 172 relative to the first fixing bracket 110 through the upper and lower nuts 174. In addition, the screw 172 can pass through the guide groove of the fourth fixing bracket 145 and fix the position of the fourth fixing bracket 145 relative to the screw 172 through the nut 174 above and below the guiding groove. In the above manner, the fourth fixing bracket 145 can be fixed to the first fixing bracket 110 through the fixing bar 170.

當然,在其他實施例中,第四固定支架145的形式也可以與第一固定支架110的形式相同,直接鎖固在線切割裝置10上,而不需透過固定條桿170、第一固定支架110來固定至線切割裝置10,第四固定支架145的形式並不以上述為限制。 Of course, in other embodiments, the fourth fixing bracket 145 can also be in the same form as the first fixing bracket 110 to directly lock the inline cutting device 10 without passing through the fixing bar 170 and the first fixing bracket 110. To be fixed to the wire cutting device 10, the form of the fourth fixing bracket 145 is not limited to the above.

請回到圖1,在本實施例中,第一固定支架110與第三固定支架130位於不同的水平面,也就是說,第一出線滾輪115與第一入線滾輪135位於不同水平面。此外,原始入線滾輪14與第一入線滾輪135固定於第三固定支架130上的不同位置,以使得原始入線滾輪14與第一入線滾輪135實質上位於相同水平面。第二入線滾輪160則因為空間限制而位在較低的水平面。另外,第 一固定支架110與一第六固定支架180實質上位於相同水平面,原始出線滾輪15固定於第六固定支架180,因此,原始出線滾輪15與第一出線滾輪115實質上位於相同水平面。第二出線滾輪140則受限於空間而位在較高的水平面。 Returning to FIG. 1 , in the embodiment, the first fixing bracket 110 and the third fixing bracket 130 are located at different horizontal planes, that is, the first outgoing roller 115 and the first incoming roller 135 are located at different horizontal planes. In addition, the original incoming roller 14 and the first incoming roller 135 are fixed at different positions on the third fixed bracket 130 such that the original incoming roller 14 and the first incoming roller 135 are substantially at the same horizontal plane. The second incoming roller 160 is located at a lower level due to space constraints. In addition, the first A fixing bracket 110 and a sixth fixing bracket 180 are substantially at the same horizontal plane, and the original outgoing roller 15 is fixed to the sixth fixing bracket 180. Therefore, the original outgoing roller 15 and the first outgoing roller 115 are substantially at the same horizontal plane. The second outlet roller 140 is limited to the space and is located at a higher level.

當然,在其他實施例中,原始入線滾輪14、第一入線滾輪135與第二入線滾輪160之間的相對位置以及原始出線滾輪15、第一出線滾輪115與第二出線滾輪140之間的相對位置可視實際空間調整,並不以上述為限制。此外,若第一固定支架110的長度足夠,原始出線滾輪15也可以固定在第一固定支架110上,原始出線滾輪15固定於線切割裝置10上的方式並不以上述為限制。 Of course, in other embodiments, the relative position between the original incoming roller 14, the first incoming roller 135 and the second incoming roller 160, and the original outgoing roller 15, the first outgoing roller 115 and the second outgoing roller 140 The relative position between the two can be adjusted according to the actual space, and is not limited to the above. In addition, if the length of the first fixing bracket 110 is sufficient, the original outgoing roller 15 can also be fixed on the first fixing bracket 110, and the manner in which the original outgoing roller 15 is fixed to the wire cutting device 10 is not limited to the above.

圖6是依照本發明的一實施例的一種斷線處理方法的流程示意圖。請參閱圖6,本實施例的斷線處理方法200適用於上述的線切割裝置10,但不以此為限。斷線處理方法200包括下列步驟:拉出切割線16初次斷開的兩端且接合切割線16的此兩端(步驟210)。固定斷線處理裝置100的第一固定支架110、第二固定支架120、第三固定支架130至線切割裝置10上,其中第一固定支架110與第三固定支架130位於這些導輪13的一側,且第二固定支架120位於遠離這些導輪13處(步驟220)。接著,可調整地配置斷線處理裝置100的第一出線滾輪115、第一張力提供滾輪125及第一入線滾輪135在第一固定支架110、第二固定支架120及第三固定支架130上,其中第一出線滾輪115及第一入線滾輪 135位在接近切割線16的初次斷線處(步驟230)。其後,將初次斷線之後重新被連接的切割線16繞過第一出線滾輪115、第一張力提供滾輪125及第一入線滾輪135,以使切割線16能維持所需的張力(步驟240)。 FIG. 6 is a schematic flow chart of a disconnection processing method according to an embodiment of the invention. Referring to FIG. 6 , the wire break processing method 200 of the present embodiment is applicable to the above-described wire cutting device 10 , but is not limited thereto. The wire break processing method 200 includes the steps of pulling out both ends of the cutting wire 16 for the first time and engaging the two ends of the cutting line 16 (step 210). The first fixing bracket 110, the second fixing bracket 120, and the third fixing bracket 130 of the wire breaking device 100 are fixed to the wire cutting device 10, wherein the first fixing bracket 110 and the third fixing bracket 130 are located at one of the guiding wheels 13 The side, and the second fixing bracket 120 is located away from the guide wheels 13 (step 220). Then, the first outgoing roller 115, the first tension providing roller 125, and the first incoming roller 135 of the disconnection processing device 100 are adjustably disposed on the first fixing bracket 110, the second fixing bracket 120, and the third fixing bracket 130. , wherein the first outgoing roller 115 and the first incoming roller The 135th position is near the first break of the cutting line 16 (step 230). Thereafter, the re-connected cutting line 16 after the initial disconnection bypasses the first outgoing roller 115, the first tension providing roller 125 and the first incoming roller 135, so that the cutting line 16 can maintain the required tension (steps) 240).

在其他實施例中,當切割線16發生第二次斷開時,斷線處理方法更包括下列步驟:拉出切割線16第二次斷開的兩端且接合切割線16在第二次斷開的此兩端(步驟250)。接著,可調整地配置斷線處理裝置100的第二出線滾輪140、第二張力提供滾輪150及第二入線滾輪160於線切割裝置10上,其中第二出線滾輪140及第二入線滾輪160位在接近切割線16的第二次斷線處(步驟260)。在步驟260中,更包括下列步驟:固定斷線處理裝置100的第四固定支架145、第五固定支架165至線切割裝置10上,以供第二出線滾輪140及第二入線滾輪160可調整地配置(步驟265)。最後,將第二次斷線之後重新被連接的切割線16繞過第二出線滾輪140、第二張力提供滾輪150及第二入線滾輪160,以使切割線16能維持所需的張力(步驟270)。 In other embodiments, when the cutting line 16 is broken a second time, the wire breaking processing method further comprises the steps of: pulling out the two ends of the cutting wire 16 for the second time and engaging the cutting line 16 for the second time. Both ends of the opening (step 250). Then, the second outgoing roller 140, the second tension providing roller 150 and the second incoming roller 160 of the disconnection processing device 100 are adjustably disposed on the wire cutting device 10, wherein the second outgoing roller 140 and the second incoming roller The 160th position is near the second break of the cutting line 16 (step 260). In step 260, the method further includes the following steps: fixing the fourth fixing bracket 145 and the fifth fixing bracket 165 of the wire breaking processing device 100 to the wire cutting device 10, so that the second wire roller 140 and the second wire roller 160 can be Adjusted configuration (step 265). Finally, the re-connected cutting line 16 after the second disconnection bypasses the second outgoing roller 140, the second tension providing roller 150 and the second incoming roller 160 to maintain the required tension of the cutting line 16 ( Step 270).

需說明的是,步驟210中接合切割線16的順序可先於步驟220與步驟230,或是晚於步驟220與步驟230,並且,步驟250中接合切割線16的順序可先於步驟260與步驟265,或是晚於步驟260與步驟265,順序上並不受限制。此外,上述雖僅以初次斷線、二次斷線為例,但即便是三次以上的斷線,也可使用相同的方式操作,換句話說,本案中的斷線處理裝置100與斷線處理方 法200可適用於多次斷線,斷線次數並不以上述為限制。 It should be noted that the order of joining the cutting lines 16 in step 210 may precede steps 220 and 230, or later than steps 220 and 230, and the order of joining the cutting lines 16 in step 250 may precede step 260. Step 265, or later than steps 260 and 265, is not limited in order. Further, although the first disconnection and the secondary disconnection are taken as an example, the same operation can be performed even in the case of three or more disconnections. In other words, the disconnection processing apparatus 100 and the disconnection processing in the present case are handled. square The method 200 can be applied to multiple disconnections, and the number of disconnections is not limited by the above.

綜上所述,當切割線發生初次斷線時,將切割線斷線處的兩端拉出焊接,其後為了使整條切割線能夠維持特定的張力,本發明的斷線處理裝置透過第一、第三固定支架固定在線切割裝置上,且第一出線滾輪與第一入線滾輪分別配置於第一固定支架與第三固定支架上接近切割線的初次斷線處,再透過第二固定支架固定於線切割裝置上遠離導輪處(例如是線軸室),第一張力提供滾輪視切割線的所需張力可調整遠近地配置於第二固定支架上,被拉出的切割線繞過第一出線滾輪、第一張力提供滾輪與第一入線滾輪,而被提供足夠張力。同理,當切割線發生二次斷線時,本發明的斷線處理裝置可將第二出線滾輪與第二入線滾輪配置在接近切割線的二次斷線處,且第二張力提供滾輪視切割線的所需張力配置在較遠的位置,切割線在二次斷線後被接合的區段便能透過纏繞於第二出線滾輪、第二張力提供滾輪與第二入線滾輪,而被提供足夠張力。透過本發明的斷線處理裝置,線切割裝置不需捨棄斷線位置的切割線,切割線仍然均勻地分布在導輪上,使得通過線切割裝置的晶棒均能被切割,而不會浪費晶棒。此外,為了使在原斷開處附近的切割線能以特定角度(與切割線纏繞在導輪上的其他部分相同的角度)被拉出與進入導輪,以使第一入線滾輪平行於原始入線滾輪,且第一出線滾輪平行於原始出線滾輪,以使切割線在重新被連接的部位能與其他部位以相同的角度繞入與離開導輪,以提供晶棒一致的切削角度。 In summary, when the cutting line is broken for the first time, both ends of the broken line of the cutting line are pulled out and welded, and thereafter, in order to maintain a specific tension of the entire cutting line, the wire breaking processing device of the present invention transmits the first First, the third fixing bracket is fixed on the online cutting device, and the first outgoing roller and the first incoming roller are respectively disposed on the first fixing bracket and the third fixing bracket near the first breaking line of the cutting line, and then through the second fixing The bracket is fixed on the wire cutting device away from the guide wheel (for example, a spool chamber), and the first tension providing roller adjusts the required tension of the cutting line to be disposed on the second fixing bracket, and the drawn cutting wire bypasses The first take-up roller, the first tension providing roller and the first incoming roller are provided with sufficient tension. Similarly, when the cutting line is broken twice, the wire breaking processing device of the present invention can dispose the second outgoing roller and the second incoming roller at a secondary breaking line close to the cutting line, and the second tension providing roller Depending on the required tension of the cutting line, it is disposed at a far position, and the section where the cutting line is joined after the second breaking can be entangled by the second outgoing roller, the second tension providing roller and the second incoming roller, and Being supplied with sufficient tension. Through the wire breaking processing device of the present invention, the wire cutting device does not need to discard the cutting line at the broken position, and the cutting line is evenly distributed on the guide wheel, so that the ingots passing through the wire cutting device can be cut without wasting Ingot. In addition, in order to enable the cutting line near the original break to be pulled out and enter the guide wheel at a specific angle (the same angle as the other portions of the cutting wire wound on the guide wheel), so that the first incoming roller is parallel to the original incoming line The roller, and the first outlet roller is parallel to the original outlet roller, so that the cutting line can be wound into and out of the guide wheel at the same angle as other parts at the reconnected portion to provide a uniform cutting angle of the ingot.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

10‧‧‧線切割裝置 10‧‧‧Wire cutting device

11‧‧‧切割室 11‧‧‧ cutting room

13‧‧‧導輪 13‧‧‧guide wheel

14‧‧‧原始入線滾輪 14‧‧‧ Original incoming line wheel

15‧‧‧原始出線滾輪 15‧‧‧Original outlet roller

16‧‧‧切割線 16‧‧‧ cutting line

100‧‧‧斷線處理裝置 100‧‧‧Disconnection processing device

110‧‧‧第一固定支架 110‧‧‧First fixed bracket

112‧‧‧導溝 112‧‧‧ Guide groove

115‧‧‧第一出線滾輪 115‧‧‧First outlet roller

130‧‧‧第三固定支架 130‧‧‧ third fixed bracket

135‧‧‧第一入線滾輪 135‧‧‧First entry wheel

140‧‧‧第二出線滾輪 140‧‧‧Second outlet roller

145‧‧‧第四固定支架 145‧‧‧Four fixed bracket

160‧‧‧第二入線滾輪 160‧‧‧Second entry roller

165‧‧‧第五固定支架 165‧‧‧Fix fixed bracket

170‧‧‧固定條桿 170‧‧‧Fixed bars

172‧‧‧螺桿 172‧‧‧ screw

174‧‧‧螺帽 174‧‧‧ Nuts

180‧‧‧第六固定支架 180‧‧‧6th fixed bracket

Claims (18)

一種斷線處理裝置,適於設置在一線切割裝置上,該線切割裝置包括多個導輪以及纏繞於該些導輪的一切割線,該斷線處理裝置包括:一第一固定支架,適於固定於該線切割裝置上且位於該些導輪的一側;一第一出線滾輪,可調整地配置於該第一固定支架上接近該切割線的初次斷線處;一第二固定支架,適於固定於該線切割裝置上遠離該些導輪處;一第一張力提供滾輪,可調整地配置於該第二固定支架上;一第三固定支架,適於固定於該線切割裝置上且位於該些導輪的該側;一第一入線滾輪,可調整地配置於該第三固定支架上接近該切割線的初次斷線處,其中初次斷線之後重新被連接的該切割線繞過該第一出線滾輪、該第一張力提供滾輪及該第一入線滾輪,以維持該切割線所需的張力;一第二出線滾輪,適於可調整地固定於該線切割裝置上接近該切割線的第二次斷線處;一第二張力提供滾輪,適於可調整地配置於該線切割裝置上遠離該些導輪處;以及一第二入線滾輪,適於可調整地固定於該線切割裝置上接近 該切割線的第二次斷線處,其中第二次斷線之後重新被連接的該切割線繞過該第二出線滾輪、該第二張力提供滾輪及該第二入線滾輪,以維持該切割線所需的張力。 A wire breakage processing device is adapted to be disposed on a wire cutting device, the wire cutting device comprising a plurality of guide wheels and a cutting wire wound around the guide wheels, the wire breakage processing device comprising: a first fixing bracket, suitable for Fixed on the wire cutting device and located on one side of the guide wheels; a first wire take-up roller is adjustably disposed on the first fixing bracket near the first break of the cutting line; a second fixing The bracket is adapted to be fixed on the wire cutting device away from the guide wheels; a first tension providing roller is adjustably disposed on the second fixing bracket; and a third fixing bracket is adapted to be fixed to the wire cutting a first access roller disposed on the third fixing bracket near the first disconnection of the cutting line, wherein the cutting is reconnected after the initial disconnection a wire bypassing the first wire take-up roller, the first tension providing roller and the first wire feed roller to maintain a tension required for the cutting line; and a second wire take-up roller adapted to be adjustably fixed to the wire cutting Close to the device a second break line of the secant line; a second tension providing roller adapted to be adjustably disposed on the wire cutting device away from the guide wheels; and a second wire entry roller adapted to be adjustably fixed to the wire Close on the wire cutting device a second disconnection of the cutting line, wherein the re-connected cutting line after the second disconnection bypasses the second outgoing roller, the second tension providing roller and the second incoming roller to maintain the The tension required to cut the line. 如申請專利範圍第1項所述的斷線處理裝置,更包括:一第四固定支架,固定於該線切割裝置上且位於該些導輪的該側,其中該第二出線滾輪可調整地配置於該第四固定支架上;以及一第五固定支架,固定於該線切割裝置上且位於該些導輪的該側,其中該第二入線滾輪可調整地配置於該第五固定支架上。 The wire breaking device of claim 1, further comprising: a fourth fixing bracket fixed to the wire cutting device and located on the side of the guiding wheels, wherein the second wire roller is adjustable The second fixing bracket is disposed on the wire fixing device and is located on the side of the wire guiding device, wherein the second wire feeding roller is adjustably disposed on the fifth fixing bracket on. 如申請專利範圍第2項所述的斷線處理裝置,更包括:多個固定條桿,垂直地固定於該第一固定支架與該第三固定支架中的至少一者,其中該第四固定支架與該第五固定支架的至少一者透過該些固定條桿配置在該線切割裝置上。 The wire breaking processing device of claim 2, further comprising: a plurality of fixing bars vertically fixed to at least one of the first fixing bracket and the third fixing bracket, wherein the fourth fixing At least one of the bracket and the fifth fixing bracket is disposed on the wire cutting device through the fixing bars. 如申請專利範圍第3項所述的斷線處理裝置,其中各該固定條桿包括一螺桿及旋入該螺桿的多個螺帽。 The wire breaking device of claim 3, wherein each of the fixing bars comprises a screw and a plurality of nuts screwed into the screw. 如申請專利範圍第1項所述的斷線處理裝置,其中該第二張力提供滾輪可調整地配置於該第二固定支架上。 The disconnection processing device of claim 1, wherein the second tension providing roller is adjustably disposed on the second fixing bracket. 如申請專利範圍第1項所述的斷線處理裝置,其中該線切割裝置包括一切割室及一線軸室,該些導輪、該第一出線滾輪及該第一入線滾輪位於該切割室,該第一張力提供滾輪位於該線軸室,重新被連接的該切割線的一部分從該切割室被拉至該線軸室且繞過該第一張力提供滾輪。 The wire breaking device of claim 1, wherein the wire cutting device comprises a cutting chamber and a spool chamber, wherein the guide wheels, the first outlet roller and the first incoming roller are located in the cutting chamber The first tension providing roller is located in the spool chamber, and a portion of the re-connected cutting line is pulled from the cutting chamber to the spool chamber and bypasses the first tension providing roller. 如申請專利範圍第1項所述的斷線處理裝置,其中該線切割裝置包括固定於該線切割裝置上且位於該些導輪的該側的一原始入線滾輪及一原始出線滾輪,該切割線在纏繞於該些導輪之前與之後分別經過該原始入線滾輪及該原始出線滾輪,該第一入線滾輪平行於該原始入線滾輪,且該第一出線滾輪平行於該原始出線滾輪,以使重新被連接的該切割線以特定角度繞入與離開該些導輪。 The wire breaking device of claim 1, wherein the wire cutting device comprises an original wire feeding roller and an original wire roller fixed to the wire cutting device on the side of the wire guides, The cutting line passes through the original incoming roller and the original outgoing roller before and after being wound around the guide wheels, the first incoming roller is parallel to the original incoming roller, and the first outgoing roller is parallel to the original outgoing line Rollers to cause the re-connected cutting line to wrap around and exit the guide wheels at a particular angle. 如申請專利範圍第7項所述的斷線處理裝置,更包括:一第六固定支架,適於固定於該線切割裝置上且位於該些導輪的該側,其中該原始入線滾輪固定於該第一固定支架,且該原始出線滾輪固定於該第六固定支架。 The wire breaking processing device of claim 7, further comprising: a sixth fixing bracket adapted to be fixed on the wire cutting device and located on the side of the guiding wheels, wherein the original wire feeding roller is fixed to The first fixing bracket is fixed to the sixth fixing bracket. 如申請專利範圍第1項所述的斷線處理裝置,其中該第一固定支架、該第二固定支架及該第三固定支架分別包括一第一多向軸承、一第二多向軸承及一第三多向軸承,以調整該第一固定支架、該第二固定支架及該第三固定支架的角度。 The wire breaking device of claim 1, wherein the first fixing bracket, the second fixing bracket and the third fixing bracket respectively comprise a first multidirectional bearing, a second multidirectional bearing and a a third multi-directional bearing to adjust an angle of the first fixing bracket, the second fixing bracket and the third fixing bracket. 一種斷線處理方法,適用於一線切割裝置,該線切割裝置包括多個導輪以及纏繞於該些導輪上且斷開的一切割線,該斷線處理方法包括:當該切割線發生初次斷開時,拉出該切割線初次斷開的兩端且接合該切割線的該兩端;固定一斷線處理裝置的一第一固定支架、一第二固定支架、一第三固定支架至該線切割裝置上,其中該第一固定支架與該第 三固定支架位於該些導輪的一側,且該第二固定支架位於遠離該些導輪處;可調整地配置該斷線處理裝置的一第一出線滾輪、一第一張力提供滾輪及一第一入線滾輪在該第一固定支架、該第二固定支架及該第三固定支架上,其中該第一出線滾輪及該第一入線滾輪位在接近該切割線的初次斷線處;將初次斷線之後重新被連接的該切割線繞過該第一出線滾輪、該第一張力提供滾輪及該第一入線滾輪,以使該切割線能維持所需的張力;當該切割線發生第二次斷開時,拉出該切割線第二次斷開的兩端且接合該切割線在第二次斷開的該兩端;可調整地配置該斷線處理裝置的一第二出線滾輪、一第二張力提供滾輪及一第二入線滾輪於該線切割裝置上,其中該第二出線滾輪及該第二入線滾輪位在接近該切割線的第二次斷線處;以及將第二次斷線之後重新被連接的該切割線繞過該第二出線滾輪、該第二張力提供滾輪及該第二入線滾輪,以使該切割線能維持所需的張力。 A wire breaking processing method is applicable to a wire cutting device, comprising: a plurality of guide wheels; and a cutting line wound on the guide wheels and disconnected, the wire breaking processing method comprises: when the cutting line occurs for the first time When disconnected, pull out the first ends of the cutting line and engage the two ends of the cutting line; fix a first fixing bracket, a second fixing bracket and a third fixing bracket of the wire breaking device to The wire cutting device, wherein the first fixing bracket and the first The third fixing bracket is located at one side of the guiding wheels, and the second fixing bracket is located away from the guiding wheels; an first outgoing roller of the disconnecting processing device, a first tension providing roller and a first wire feeding roller is disposed on the first fixing bracket, the second fixing bracket and the third fixing bracket, wherein the first outgoing roller and the first incoming roller are located at a first breaking point close to the cutting line; The cutting line reconnected after the first disconnection bypasses the first outgoing roller, the first tension providing roller and the first incoming roller to enable the cutting line to maintain a desired tension; when the cutting line When the second disconnection occurs, both ends of the second disconnection of the cutting line are pulled out and the two ends of the cutting line are engaged at the second disconnection; a second of the disconnection processing device is adjustably disposed An output roller, a second tension providing roller and a second incoming roller are disposed on the wire cutting device, wherein the second outgoing roller and the second incoming roller are located at a second disconnection near the cutting line; And will be reconnected after the second disconnection The second cut line bypass line roller, the second roller to provide tension in wire and said second roller, so that the cutting line to maintain a desired tension. 如申請專利範圍第10項所述的斷線處理方法,在配置該斷線處理裝置的該第二出線滾輪及該第二入線滾輪的步驟中,更包括:固定該斷線處理裝置的一第四固定支架、一第五固定支架至 該線切割裝置上,以供該第二出線滾輪及該第二入線滾輪可調整地配置。 The disconnection processing method according to claim 10, wherein the step of disposing the second outgoing roller and the second incoming roller of the disconnection processing device further comprises: fixing one of the disconnection processing devices a fourth fixing bracket and a fifth fixing bracket to The wire cutting device is configured to adjustably adjust the second outgoing roller and the second incoming roller. 如申請專利範圍第11項所述的斷線處理方法,其中該斷線處理裝置更包括多個固定條桿,垂直地固定於該第一固定支架與該第三固定支架中的至少一者,其中該第四固定支架與該第五固定支架的至少一者透過該些固定條桿配置在該線切割裝置上。 The wire breaking processing method of claim 11, wherein the wire breaking processing device further comprises a plurality of fixing bars vertically fixed to at least one of the first fixing bracket and the third fixing bracket, The at least one of the fourth fixing bracket and the fifth fixing bracket are disposed on the wire cutting device through the fixing bars. 如申請專利範圍第12項所述的斷線處理方法,其中各該固定條桿包括一螺桿及旋入該螺桿的多個螺帽。 The wire breaking method of claim 12, wherein each of the fixing bars comprises a screw and a plurality of nuts screwed into the screw. 如申請專利範圍第10項所述的斷線處理方法,其中該第二張力提供滾輪可調整地配置於該第二固定支架上。 The disconnection processing method of claim 10, wherein the second tension providing roller is adjustably disposed on the second fixing bracket. 如申請專利範圍第10項所述的斷線處理方法,其中該線切割裝置包括一切割室及一線軸室,該些導輪、該第一出線滾輪及該第一入線滾輪位於該切割室,該第一張力提供滾輪位於該線軸室,重新被連接的該切割線的一部分從該切割室被拉至該線軸室且繞過該第一張力提供滾輪。 The wire breaking method of claim 10, wherein the wire cutting device comprises a cutting chamber and a spool chamber, wherein the guide wheels, the first outlet roller and the first incoming roller are located in the cutting chamber The first tension providing roller is located in the spool chamber, and a portion of the re-connected cutting line is pulled from the cutting chamber to the spool chamber and bypasses the first tension providing roller. 如申請專利範圍第10項所述的斷線處理方法,其中該線切割裝置包括固定於該線切割裝置上且位於該些導輪的該側的一原始入線滾輪及一原始出線滾輪,該切割線在纏繞於該些導輪之前與之後分別經過該原始入線滾輪及該原始出線滾輪,該第一入線滾輪平行於該原始入線滾輪,且該第一出線滾輪平行於該原始出線滾輪,以使重新被連接的該切割線以特定角度繞入與離開該些導輪。 The wire breaking device of claim 10, wherein the wire cutting device comprises an original wire feeding roller and an original wire roller fixed to the wire cutting device on the side of the wire guides, The cutting line passes through the original incoming roller and the original outgoing roller before and after being wound around the guide wheels, the first incoming roller is parallel to the original incoming roller, and the first outgoing roller is parallel to the original outgoing line Rollers to cause the re-connected cutting line to wrap around and exit the guide wheels at a particular angle. 如申請專利範圍第16項所述的斷線處理方法,其中該斷線處理裝置更包括一第六固定支架,適於固定於該線切割裝置上且位於該些導輪的該側,其中該原始入線滾輪固定於該第一固定支架,且該原始出線滾輪固定於該第六固定支架。 The wire breaking processing method of claim 16, wherein the wire breaking processing device further comprises a sixth fixing bracket adapted to be fixed on the wire cutting device and located on the side of the guiding wheels, wherein The original incoming roller is fixed to the first fixing bracket, and the original outgoing roller is fixed to the sixth fixing bracket. 如申請專利範圍第10項所述的斷線處理方法,其中該第一固定支架、該第二固定支架及該第三固定支架分別包括一第一多向軸承、一第二多向軸承及一第三多向軸承,以調整該第一固定支架、該第二固定支架及該第三固定支架的角度。 The disconnection processing method of claim 10, wherein the first fixing bracket, the second fixing bracket and the third fixing bracket respectively comprise a first multidirectional bearing, a second multidirectional bearing and a a third multi-directional bearing to adjust an angle of the first fixing bracket, the second fixing bracket and the third fixing bracket.
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