TWI562387B - High breakdown voltage metal-insulator-metal capcitor - Google Patents

High breakdown voltage metal-insulator-metal capcitor

Info

Publication number
TWI562387B
TWI562387B TW103115596A TW103115596A TWI562387B TW I562387 B TWI562387 B TW I562387B TW 103115596 A TW103115596 A TW 103115596A TW 103115596 A TW103115596 A TW 103115596A TW I562387 B TWI562387 B TW I562387B
Authority
TW
Taiwan
Prior art keywords
metal
capcitor
insulator
breakdown voltage
high breakdown
Prior art date
Application number
TW103115596A
Other languages
English (en)
Other versions
TW201541650A (zh
Inventor
Chang Hwang Hua
Winson Shao
Ben Hsu
Wen Chu
Original Assignee
Win Semiconductors Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Win Semiconductors Corp filed Critical Win Semiconductors Corp
Priority to TW103115596A priority Critical patent/TWI562387B/zh
Priority to US14/333,814 priority patent/US9178007B1/en
Publication of TW201541650A publication Critical patent/TW201541650A/zh
Application granted granted Critical
Publication of TWI562387B publication Critical patent/TWI562387B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW103115596A 2014-04-30 2014-04-30 High breakdown voltage metal-insulator-metal capcitor TWI562387B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW103115596A TWI562387B (en) 2014-04-30 2014-04-30 High breakdown voltage metal-insulator-metal capcitor
US14/333,814 US9178007B1 (en) 2014-04-30 2014-07-17 High breakdown voltage metal-insulator-metal capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103115596A TWI562387B (en) 2014-04-30 2014-04-30 High breakdown voltage metal-insulator-metal capcitor

Publications (2)

Publication Number Publication Date
TW201541650A TW201541650A (zh) 2015-11-01
TWI562387B true TWI562387B (en) 2016-12-11

Family

ID=54352810

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103115596A TWI562387B (en) 2014-04-30 2014-04-30 High breakdown voltage metal-insulator-metal capcitor

Country Status (2)

Country Link
US (1) US9178007B1 (zh)
TW (1) TWI562387B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180206334A1 (en) * 2017-01-16 2018-07-19 Innolux Corporation Metal-laminated structure and high-frequency device comprising the same
KR102469793B1 (ko) * 2017-12-29 2022-11-22 삼성디스플레이 주식회사 표시 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201025619A (en) * 2008-09-29 2010-07-01 Sandisk 3D Llc MIIM diodes
TW201030780A (en) * 2008-11-25 2010-08-16 Kovio Inc Tunable capacitors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5742471A (en) * 1996-11-25 1998-04-21 The Regents Of The University Of California Nanostructure multilayer dielectric materials for capacitors and insulators
JP2008112956A (ja) * 2006-08-03 2008-05-15 Sony Corp キャパシタおよびその製造方法、ならびに、半導体デバイスおよび液晶表示装置
JP2009059889A (ja) * 2007-08-31 2009-03-19 Elpida Memory Inc キャパシタ及びその製造方法
KR20100041179A (ko) * 2008-10-13 2010-04-22 매그나칩 반도체 유한회사 유전체, 이를 구비한 캐패시터 및 그 제조방법, 반도체 소자 제조방법
KR20100079557A (ko) * 2008-12-31 2010-07-08 주식회사 동부하이텍 반도체 소자 및 그의 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201025619A (en) * 2008-09-29 2010-07-01 Sandisk 3D Llc MIIM diodes
TW201030780A (en) * 2008-11-25 2010-08-16 Kovio Inc Tunable capacitors

Also Published As

Publication number Publication date
US9178007B1 (en) 2015-11-03
TW201541650A (zh) 2015-11-01
US20150318342A1 (en) 2015-11-05

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees