TWI554469B - A hydrogen purifying apparatus and a hydrogen purifying system using the same - Google Patents

Description

Hydrogen purification device and hydrogen purification system using same

The invention relates to a hydrogen selection using a palladium alloy film A selective hydrogen purification apparatus and a hydrogen purification system using the same, and more particularly, the present invention relates to a hydrogen purification apparatus capable of efficiently heating an impurity-containing raw material hydrogen introduced into a primary side space of a cell chamber, and using the same Hydrogen purification system.

High-purity hydrogen gas has been used in large quantities as an ambient gas in semiconductor manufacturing engineering. With regard to such hydrogen gas, the concentration of the impurity is required to be an extremely low concentration (below the ppb level) due to an increase in the degree of integration of the semiconductor.

On the other hand, as a method for industrially producing high-purity hydrogen in large quantities, a known method is as follows: a rehydration reaction of methanol, dimethyl ether, natural gas, liquefied petroleum gas, or the like is carried out by a cryogenic adsorption method, a pressure swing method, or the like ( The reformed gas obtained by the steam reforming reaction is separated into a gas other than hydrogen and hydrogen to obtain hydrogen.

The cryogenic adsorption method is a purification method in which a hydrogen-containing gas is circulated to an adsorption tube to remove impurities other than hydrogen, and the adsorption tube is filled with an adsorption material that is extremely low temperature by using liquefied nitrogen as a coolant. The pressure transformation method is a purification method in which a hydrogen-containing gas is sequentially circulated to a plurality of adsorption cartridges.

And each operation of boosting, adsorption of impurities, desorption of impurities, and regeneration of adsorbed material is repeated, thereby removing impurities other than hydrogen. In addition to hydrogen, the above-mentioned reformed gas contains carbon monoxide, carbon dioxide, methane, nitrogen, water, etc., and in the cryogenic adsorption method and the pressure transformation method, it is difficult to achieve extremely low concentrations of these impurities (below ppb). ) and removed.

In this regard, as a relatively small amount of way to obtain extremely high purity As a method of hydrogen gas, a known method is as follows: a hydrogen-containing raw material hydrogen is supplied to a hydrogen separation membrane made of a thin film of a palladium alloy, and only hydrogen is permeated and taken out by selective permeability of hydrogen gas. The apparatus for purifying such hydrogen is a hydrogen purifying apparatus having a palladium alloy in the inlet of the impurity-containing raw material hydrogen, the outlet of pure hydrogen, and the gas flow path between the inlet and the outlet. The film is a hydrogen purification device having a structure in which a plurality of palladium alloy thin tubes (hydrogen separation membrane) sealed at one end are supported by a tube sheet at the opening of the other end, as shown in Patent Documents 1 to 3. The inside of the tank is partitioned into a primary side space (supply side space of the raw material hydrogen containing impurities) and a secondary side space (the extraction side space of pure hydrogen) by the palladium alloy thin tube and the tube sheet. ) These two spaces.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. 62-128903

[Patent Document 2] Japanese Patent Laid-Open No. 1-145302

[Patent Document 3] Japanese Patent Laid-Open No. 1-145303

The hydrogen purification method using a hydrogen separation membrane of a palladium alloy has a disadvantage that the amount of pure hydrogen taken out per unit time is small as compared with the cryogenic adsorption method and the pressure transformation method. However, in addition to the above-described high purity hydrogen gas, it is possible to The device is miniaturized and simplified. However, when the hydrogen containing the impurity-containing raw material is passed through the thin tube of the palladium alloy and is passed through the thin tube, it is necessary to sufficiently heat the thin tube and the raw material hydrogen, and in addition to the heater for heating the inside of the chamber, it is necessary to preheat the raw material hydrogen. Equipment such as heaters.

In the hydrogen purification of the hydrogen separation membrane using the palladium alloy thin film, in order to increase the amount of pure hydrogen extracted per unit time, for example, when the hydrogen purification apparatus is increased in size, a heater for preheating the raw material hydrogen or the like is provided. In addition, when the hydrogen purification device is added, the number of devices such as piping increases and becomes complicated, and the problem of miniaturization and simplification is weakened. Therefore, the problem to be solved by the present invention is to provide a hydrogen purification apparatus and a hydrogen purification system using a plurality of the hydrogen purification apparatuses, which can perform impurity-containing raw material hydrogen introduced into the primary side space of the chamber. Efficient heating.

The present inventors have conducted intensive studies to solve the above problems, and as a result, have found the following results, and have achieved the hydrogen purification apparatus of the present invention, that is, in the above-described hydrogen purification apparatus, the primary side of the cell The shape of the space is set to an elongated shape, and the introduction pipe of the raw material hydrogen containing impurities is disposed in such a manner as to pass through a gap between the elongated side wall of the chamber and a heater for heating the chamber, and the heating is used. The heat of the device sufficiently heats the raw material flowing inside the introduction pipe Hydrogen can maintain the device in a small and simplified form even when the hydrogen purification device is large or when a plurality of hydrogen purification devices are used.

That is, the present invention is a hydrogen purification device, which has a a plurality of palladium alloy thin tubes sealed at one end and a tube sheet supporting the thin tube in the open end of the thin tube, and the inside of the chamber having the heating portion on the outer circumference is partitioned into a primary side space and a secondary side space, wherein The raw material hydrogen containing impurities is introduced from the primary side space, and is passed through a palladium alloy thin tube to extract pure hydrogen from the secondary side space. The hydrogen purification apparatus is characterized in that the length of the palladium alloy thin tube is 15 times or more the diameter of the tube sheet. The introduction piping of the raw material hydrogen containing impurities is provided in such a manner as to pass through a gap between the side wall of the chamber and the heater.

Moreover, the present invention is a hydrogen purification system in which a plurality of the above-described hydrogen purification apparatuses are arranged in parallel, and a plurality of raw material hydrogen introduction pipes of the plurality of hydrogen purification apparatuses are connected to one external raw material hydrogen supply pipe, and the plural Each of the pure hydrogen extraction pipes of the hydrogen purification device is connected to an external pure hydrogen recovery pipe.

In the hydrogen purification apparatus of the present invention, the primary side space of the tank chamber is set to an elongated shape, and the introduction piping of the raw material hydrogen containing impurities is passed through the elongated side wall of the chamber and the heater for heating the chamber. The way between the two. In other words, in the present invention, the introduction piping for sufficiently heating the raw material hydrogen by the heater for heating the inside of the tank can reduce or eliminate equipment such as a heater for heating the raw material hydrogen in advance. Especially in the case where the hydrogen purification device is large, the hydrogen purification device is complex In a few cases, it is possible to achieve an effect in miniaturization and simplification of the device.

1‧‧‧Palladium alloy thin tube

2‧‧‧ tube plate

3‧‧‧heater

4‧‧‧Slot room

4'‧‧‧ one-side space of the trough

4"‧‧‧Second side space of the chamber

5‧‧‧Introduction of raw material hydrogen

6‧‧‧ Side wall of the chamber

7‧‧‧Open end

8‧‧‧Closed end

9‧‧‧ Raw material hydrogen supply port

10‧‧‧Extracted gas containing impurities

11‧‧‧ Pure hydrogen is exported

12‧‧‧ Thermal medium

13‧‧‧heating line

14‧‧‧ Raw material hydrogen supply piping

15‧‧‧Gas recovery piping containing impurities

16‧‧‧Pure hydrogen extraction piping

17‧‧‧Pure hydrogen recovery piping

Fig. 1 is a view showing the configuration of an example of a hydrogen purifying apparatus of the present invention.

Fig. 2 is a view showing the configuration of an example of a hydrogen purifying apparatus other than Fig. 1 of the present invention.

Fig. 3 (1) is a structural view showing an example of a cross section at the position of the tube sheet of the hydrogen purification apparatus of Fig. 1. Fig. 3 (2) is a structural view showing an example of a cross section of the palladium alloy capillary tube position of the hydrogen purification device of Fig. 1.

Fig. 4 is a view showing the configuration of an example of the hydrogen purification system of the present invention.

[Formation of the Invention]

The present invention is applicable to a hydrogen purifying apparatus in which the inside of the tank chamber is partitioned into a primary side space and a secondary side space by a palladium alloy thin tube sealed at one end and a tube sheet supporting the open end of the thin tube Hydrogen containing impurities is introduced from the primary side space, and is passed through a palladium alloy capillary tube to take out pure hydrogen from the secondary side space. Further, examples of the raw material hydrogen to be used in the present invention include a reformed gas obtained by recombination reaction of methanol, dimethyl ether, natural gas, and liquefied petroleum gas by steam; and preliminary purification by a cryogenic adsorption method or a pressure swing method. High purity hydrogen obtained by the reformed gas. The hydrogen obtained by this method is usually stored in a storage device such as a gas cylinder or a storage tank. The extremely high purity purified hydrogen obtained according to the present invention is used, for example, as an ambient gas (carrier gas) in semiconductor manufacturing engineering.

Hereinafter, the hydrogen purification device of the present invention will be described based on FIGS. 1 to 4 . The hydrogen purification system using the same will be described in detail, but the present invention is not limited thereto. 1 and 2 are structural views showing an example of a hydrogen purifying apparatus of the present invention, and FIG. 3 (1) is a structural view showing an example of a cross section at the tube sheet position of the hydrogen purifying apparatus of FIG. 3(2) is a structural view showing an example of a cross section at the position of the palladium alloy capillary tube of Fig. 1, and Fig. 4 is a configuration diagram showing an example of the hydrogen purification system of the present invention.

The hydrogen purification device of the present invention is shown in Fig. 1 and Fig. 2, There is a plurality of palladium alloy thin tubes 1 sealed at one end and a tube sheet 2 supporting the thin tubes in the open end of the thin tubes, and the inside of the chamber 4 having the heater 3 on the outer circumference is partitioned into the primary side space 4' And the secondary side space 4", the raw material hydrogen containing impurities is introduced from the raw material hydrogen supply port 9 of the primary space 4', and is passed through the palladium alloy thin tube to take out the pure hydrogen from the secondary side space 4". Hydrogen, the hydrogen purification apparatus is characterized in that the length of the palladium alloy thin tube 1 is 15 times or more the diameter of the tube sheet 2, and as shown in FIGS. 1 to 3, the introduction piping 5 of the raw material hydrogen containing impurities passes through the tank chamber 4. The gap between the side wall 6 and the heater 3 is provided.

Hereinafter, each component of the hydrogen purification device of the present invention Detailed instructions are given.

The shape of the tank chamber of the hydrogen purification device of the present invention is shown in Figs. As shown in the figure, the front surface has a U-shape, a U-shape or a shape similar thereto, and a cover having a pure hydrogen take-out port is provided on the opening of the container having a circular cross section. In the hydrogen purification apparatus of the present invention, the raw material hydrogen flowing inside the introduction pipe 5 through which the raw material hydrogen flows is sufficiently heated by the heater 3 until reaching the raw material hydrogen supply port 9, and the groove chamber 4 (especially the 4' side) is disposed in this manner. It is set to an elongated shape (in such a manner that the diameter of the tube sheet becomes smaller). In addition, the heater 3 is disposed across At least the outer periphery of the side wall of the portion where the palladium alloy thin tube is disposed in the side wall of the tank chamber is entirely. Therefore, in the present invention, it is preferable to set the length of the palladium alloy thin tube 1 to be much longer than the diameter of the tube sheet 2, and is usually 15 times or more, preferably 20 times or more the diameter of the tube sheet. Further, the secondary side space 4" side of the tank chamber 4 is preferably small in terms of miniaturization of the apparatus, so that the volume of the space on the upstream side of the tube sheet of the tank chamber is relatively larger than the downstream side of the tube sheet of the tank chamber. The volume of the space is large, and is usually 10 times or more, preferably 15 times or more, more preferably 20 times or more, the volume of the space on the downstream side of the tube sheet of the chamber. However, the above volume is not considered in the above-mentioned palladium alloy thin tube. The situation exists.

In the hydrogen purification device of the present invention, the impurity-containing raw material hydrogen As described above, the introduction pipe 5 is set so as to pass through the gap between the side wall 6 of the tank chamber 4 and the heater 3. However, as shown in Fig. 3, the introduction pipe 5 and the groove chamber of the raw material hydrogen are preferably used. The gap between the side wall 6 and the heater 3 is filled with a solid heat transfer medium 12 such as a cement, and the heat derived from the heater 3 is efficiently transmitted to the introduction pipe 5 of the raw material hydrogen. The length of the raw material hydrogen introduction pipe (the introduction pipe of the raw material hydrogen having the structure shown in FIG. 3) which is set to pass through the gap between the side wall of the tank chamber and the heater via the heat transfer medium is usually the side wall of the tank chamber 4 The length of 6 is 50% or more, preferably 80% or more, more preferably 90% or more. Further, the length of the side wall 6 of the above-described tank chamber 4 is the length of the straight portion of the side wall 6 of the tank chamber 4 in Figs. 1 and 2 .

In addition, in the hydrogen purification device of the present invention, the raw material hydrogen The introduction pipe 5 is usually provided in parallel with the palladium alloy thin tube, but may be provided in a spiral shape. In the case where it is disposed in parallel with the palladium alloy thin tube, the material of the structure passing through the gap between the side wall of the chamber and the heater The length of the hydrogen introduction pipe is usually 30 cm or more, preferably 40 cm or more. Moreover, the inner diameter of the raw material hydrogen introduction pipe 5 is usually 6 mm or less. When the inner diameter of the introduction pipe 5 exceeds 6 mm, the raw material hydrogen flowing into the inside of the introduction pipe 5 may not be sufficiently heated.

As shown in Fig. 1, the palladium alloy capillary tube 1 used in the hydrogen purification apparatus of the present invention comprises a tube having an open end portion 7 at one end on the tube sheet 2 side and a closed end portion 8 at one end on the opposite side. As described above, the palladium alloy thin tube 1 has a length of 15 times or more, specifically 20 to 200 cm, of the diameter of the tube sheet. Further, the outer diameter is usually 1.0 to 5.0 mm, and the thickness is usually 30 to 100 μm. Further, the palladium alloy thin tube 1 is used in an amount of 3 to 100 with respect to one palladium alloy film unit. Their configuration is not particularly limited, and the interval between adjacent palladium alloy thin tubes is usually set to 1.0 to 2.5 mm.

As a structural component of the above-mentioned palladium alloy thin tube 1, it can be exemplified An alloy mainly composed of palladium and copper, an alloy mainly composed of palladium and silver, and an alloy mainly composed of palladium, silver and gold. When these alloys are used, an alloy of palladium 50 to 70 wt% and copper 30 to 50 wt%, an alloy of palladium 60 to 90 wt% and silver 10 to 40 wt%, palladium 60 to 80 wt%, and silver 10 to 37 wt% and gold 3 are preferable. ~10wt% alloy. The palladium alloy may also contain other metals, but the above metal is usually 95% by weight or more, preferably 99% by weight or more.

The tube sheet 2 used in the present invention is usually 3 to 30 mm in thickness. disc. In addition, the diameter of the tube sheet 2 is 1/15 or less, preferably 1/20 or less, and is different from the diameter and the number of the palladium alloy thin tubes 1, and is usually 10 to 40 mm. In the tube sheet 2, as shown in Fig. 3 (1), a through hole through which the palladium alloy thin tube 1 is attached is inserted in advance. The support of the palladium alloy thin tube 1 to the tube sheet 2 is performed by welding. at this time, In order to secure a flow path space of pure hydrogen permeating through the hydrogen separation membrane, a spiral spring may be inserted into the inside of the palladium alloy thin tube 1 as needed. Further, the tube sheet 2 is preferably made of nickel.

Regarding the heater 3 used in the present invention, if it can be specified The temperature of the palladium alloy thin tube 1 and the raw material hydrogen in the inside of the tank chamber 4 and the raw material hydrogen flowing inside the introduction pipe 5 of the raw material hydrogen are efficiently heated, for example, as shown in FIGS. The heating wire 13 can be wound around the outer circumference of the side wall 6 of the chamber 4 in a spiral shape, and the heating wire 13 can be covered with the heat transfer medium 12 such as heat conductive cement having excellent heat conductivity, and the heater of the side wall 6 of the chamber 4 can be fixed. The heater 3 is preferably set so as to cover at least the entire side wall of the tank chamber on the upstream side of the tube sheet.

In the hydrogen purification device of the present invention, in order to recover The gas of the palladium alloy thin tube 1 is provided with an impurity-containing gas take-out port 10 in the primary side space of the chamber. The position of the raw material hydrogen supply port 9 and the impurity-containing gas take-out port 10 is not particularly limited as long as it is located on the upstream side of the tube sheet 2, and is preferably set so as to be distant from each other. For example, as shown in FIG. 1, when the raw material hydrogen supply port 9 is disposed at a position away from the tube sheet 2, the impurity-containing gas take-out port 10 is disposed at a position close to the tube sheet 2, as shown in FIG. When the supply port 9 is provided at a position close to the tube sheet 2, the impurity-containing gas take-out port 10 is provided at a position away from the tube sheet 2. In addition, in order to collect hydrogen which has passed through the palladium alloy capillary tube 1, a pure hydrogen take-out port 11 is provided in the secondary side space of the cell chamber, and a pure hydrogen take-out pipe 16 for recovering pure hydrogen reaching the pure hydrogen take-out port 11 is further provided.

Next, the hydrogen purification system of the present invention will be described.

The hydrogen purification system of the present invention is the following hydrogen purification system: as shown in FIG. In the same manner, a plurality of the above-described hydrogen purification devices are arranged in parallel, and a plurality of raw material hydrogen introduction pipes 5 of the hydrogen purification device are connected to one external raw material hydrogen supply pipe 14 to take out a plurality of pure hydrogen extraction pipes of the hydrogen purification device. 16 is a pure hydrogen recovery pipe 17 connected to the outside. In the hydrogen purification system of the present invention, the impurity-containing gas recovered from the impurity-containing gas take-out port 10 of the plurality of hydrogen purification devices is connected to the external impurity-containing gas recovery pipe 15 so as to be connected to the pipe.

When performing hydrogen purification according to the present invention, a method of the present invention The hydrogen purifying apparatus or the plurality of hydrogen purifying apparatuses of the present invention, which are provided as shown in FIG. 4, are connected to the respective external pipes, and then the inside of the raw material hydrogen introduction pipe 5 and the inside of the tank chamber 4 are heated by the heater 3, and Purification of hydrogen is carried out by supplying raw material hydrogen from a raw material hydrogen supply pipe. The temperature of the palladium alloy thin tube 1 at the time of hydrogen purification is usually 250 to 500 ° C, preferably 300 to 450 ° C. The raw material hydrogen is brought into contact with the heated palladium alloy thin tube 1 , and only hydrogen is transmitted through the palladium alloy thin tube 1 , and is recovered through the pure hydrogen take-out port 11 , the pure hydrogen take-out pipe 16 , and the pure hydrogen recovery pipe 17 .

[Examples]

Next, the invention will be specifically described by way of examples, but the invention is not limited thereto.

[Example 1] (Production of hydrogen purification device)

In a disk-shaped nickel tube sheet 2 having a diameter of 20 mm and a thickness of 5 mm, a palladium alloy thin tube 1 composed of an alloy of palladium, silver and gold as a main component was welded to a plurality of concentric circles (outer diameter 1.8 mm, thickness) 70 μm, length 600 mm). Next, at the position shown in Figure 1, there is a raw material hydrogen The tube plate 2 and the palladium alloy thin tube 1 are housed in the tank chamber 4 made of SUS316L having an inner diameter of 20 mm and a length of 700 mm, which are the supply port 9, the impurity-containing gas take-out port 10, and the pure hydrogen take-out port 11. Further, the volume of the space on the upstream side of the tube sheet 2 of the tank chamber is approximately 35 times the volume of the space on the downstream side of the tube sheet 2 of the tank chamber.

A linear piping unit having an inner diameter of 4.3 mm and a length of 800 mm The raw material hydrogen introduction pipe 5 made of SUS316L is provided so that the linear pipe portion comes into contact with the side wall 6 of the tank chamber, and is connected to the raw material hydrogen supply port 9 of the tank chamber 4. In addition, the heating wire 13 is spirally wound around the outer circumference of the side wall 6 of the tank chamber and the outer circumference of the straight piping portion of the introduction pipe 5, and the gap is filled with the heat transfer cement so as to constitute a structure as shown in FIG. Thus, a hydrogen purifying apparatus having the form shown in Fig. 1 was produced. Moreover, the length of the raw material hydrogen introduction pipe 5 set so as to pass through the gap between the side wall 6 of the tank chamber and the heater 3 via the heat conductive cement is 95% of the length of the side wall 6 of the tank chamber. Further, the pure hydrogen extraction pipe 16 and the like are connected.

(hydrogen purification test)

The temperature inside the primary side space 4' of the cell chamber of the hydrogen purification apparatus was raised to 600 °C, and hydrogen was introduced thereto, followed by heat treatment for 10 hours. Next, the temperature inside the primary side space 4' of the tank chamber of the hydrogen purification apparatus is lowered to 420 ° C, and the pressure difference between the primary side space 4' of the tank chamber and the secondary side space 4" of the tank chamber is 1.0 MPa. By controlling the method, hydrogen is purified by introducing a raw material hydrogen containing approximately 400 ppm of impurities (nitrogen, oxygen, carbon dioxide, etc.) from the raw material hydrogen introduction pipe 5. At this time, the temperature of the raw material hydrogen of the raw material hydrogen supply port 9 is about At 400 ° C. After 1 hour of treatment, 900 L of pure hydrogen was obtained by taking out the piping from pure hydrogen.

[Embodiment 2]

In the production of the hydrogen purification apparatus of the first embodiment, a tank chamber in which the raw material hydrogen supply port 9 and the outlet port 10 containing the impurity gas were exchanged was used, and a sample as shown in FIG. 2 was produced in the same manner as in the first embodiment. Form hydrogen purification unit. Moreover, the length of the raw material hydrogen introduction pipe 5 set so as to pass through the gap between the side wall 6 of the tank chamber 4 and the heater 3 via the heat transfer cement is 85% of the length of the side wall 6 of the tank chamber 4.

A hydrogen purification test was carried out in the same manner as in Example 1 except that the above hydrogen purification apparatus was used. As a result, the temperature of the raw material hydrogen of the raw material hydrogen supply port 9 was about 390 °C. Further, after one hour of treatment, 900 L of pure hydrogen was obtained by taking out the piping from pure hydrogen.

[Example 3] (Production of hydrogen purification system)

Three hydrogen purification apparatuses identical to those of Example 1 were produced, and a plurality of hydrogen purification apparatuses were arranged in parallel. The raw material hydrogen supply pipe 5 of the hydrogen purification device is connected to the external raw material hydrogen supply pipe 14 , and the pure hydrogen extraction pipe 16 of the hydrogen purification device is connected to one of the external pure hydrogen recovery pipes 17 , and The outlet port 10 containing the impurity gas was connected to the external recovery pipe 15 containing the impurity gas via a pipe in the middle, and a hydrogen purification system was produced as shown in FIG.

(hydrogen purification test)

The temperature inside the primary side space 4' of the tank chamber of each hydrogen purification apparatus was raised to 600 °C, and hydrogen was introduced thereto, followed by heat treatment for 10 hours. Next, the temperature inside the primary side space 4' of the cell chamber of each hydrogen purification device is lowered to 420 ° C, and the pressure difference between the primary side space 4' of the cell chamber and the secondary side space 4" of the cell chamber is 1.0. Mpa way to control, while from The raw material hydrogen supply pipe 14 introduces a total of hydrogen which contains approximately 400 ppm of impurities (nitrogen, oxygen, carbon dioxide, etc.) to purify the hydrogen. As a result of the treatment for one hour, a total of 2,600 L of pure hydrogen was obtained from the pure hydrogen recovery pipe 17.

As described above, the hydrogen purifying apparatus and the hydrogen purifying system of the present invention can provide a heater for preheating the raw material hydrogen as shown in the embodiment. Therefore, it is possible to reduce the size and simplification of the device and the system.

1‧‧‧Palladium alloy thin tube

2‧‧‧ tube plate

3‧‧‧heater

4‧‧‧Slot room

4'‧‧‧ one-side space of the trough

4"‧‧‧Second side space of the chamber

5‧‧‧Introduction of raw material hydrogen

6‧‧‧ Side wall of the chamber

7‧‧‧Open end

8‧‧‧Closed end

9‧‧‧ Raw material hydrogen supply port

10‧‧‧Extracted gas containing impurities

11‧‧‧ Pure hydrogen is exported

13‧‧‧heating line

Claims (8)

A hydrogen purifying apparatus having a plurality of palladium alloy thin tubes sealed at one end and a tube sheet supporting the thin tubes in an open end portion of the thin tubes, and dividing the inside of the chamber having the heating portion on the outer circumference into one time a side space and a secondary side space, wherein the raw material hydrogen containing impurities is introduced from the primary side space, and the pure hydrogen is taken out from the secondary side space through the palladium alloy thin tube, and the hydrogen purification device is characterized by the palladium alloy thin tube The length is 15 times or more the diameter of the tube sheet, and the introduction piping of the raw material hydrogen containing impurities is provided so as to pass through the gap between the side wall of the chamber and the heater. The hydrogen purifying apparatus according to claim 1, wherein the raw material hydrogen introduction pipe and the palladium alloy thin pipe are parallel to each other. The hydrogen purifying apparatus according to claim 1, wherein a solid heat transfer medium is filled in a gap between the raw material hydrogen introduction pipe and the side wall of the tank chamber and the heater. The hydrogen purifying apparatus according to claim 1, wherein the volume of the space on the upstream side of the tube sheet of the tank chamber is 10 times or more the volume of the space on the downstream side of the tube sheet of the tank chamber. The hydrogen purifying apparatus according to claim 1, wherein the length of the introduction pipe of the raw material hydrogen passing through the gap between the side wall of the chamber and the heater is 30 cm or more. The hydrogen purification device according to claim 1, wherein the inner diameter of the introduction pipe of the raw material hydrogen passing through the gap between the side wall of the chamber and the heater is 6 mm or less. The hydrogen purifying apparatus of claim 1, wherein the heater is a heater that spirally winds the heating wire around the outer circumference of the side wall of the chamber. A hydrogen purification system characterized by juxtaposing a plurality of hydrogen purification devices as in claim 1, and each of the plurality of hydrogen purification devices The raw material hydrogen introduction pipe is connected to one external raw material hydrogen supply pipe, and each of the plurality of pure hydrogen extraction pipes of the hydrogen purification device is connected to one external pure hydrogen recovery pipe.