TWI550822B - Apparatus and package with localized high density substrate routing and method of making same - Google Patents
Apparatus and package with localized high density substrate routing and method of making same Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Description
本案大致關係於電子晶片架構。 This case is roughly related to the electronic chip architecture.
例如電子裝置的半導體裝置可以包含基板繞線,其密度係較附著在該基板上的晶片中之一些繞線密度為低。一些裝置可以包含複雜繞線方案,特別是在被附著的晶片包含較該基板中的繞線為高的密度繞線的區域。 A semiconductor device such as an electronic device may include a substrate winding having a lower density than some of the wafers attached to the substrate. Some devices may include complex winding schemes, particularly where the attached wafer contains a higher density winding than the windings in the substrate.
100‧‧‧設備 100‧‧‧ Equipment
102A‧‧‧介質 102A‧‧‧Media
102B‧‧‧介質 102B‧‧‧Media
104‧‧‧高密度互連元件 104‧‧‧High-density interconnect components
106‧‧‧導電構件 106‧‧‧Electrical components
108‧‧‧介電層 108‧‧‧ dielectric layer
110A‧‧‧第一電路元件 110A‧‧‧First circuit component
110B‧‧‧第二電路元件 110B‧‧‧Second circuit components
112‧‧‧導電黏劑 112‧‧‧ Conductive adhesive
114A‧‧‧晶粒 114A‧‧‧ grain
114B‧‧‧晶粒 114B‧‧‧ grain
116‧‧‧導電黏劑 116‧‧‧ Conductive adhesive
118‧‧‧低密度互連元件 118‧‧‧Low-density interconnect components
120‧‧‧匯流排 120‧‧‧ busbar
122‧‧‧黏著層 122‧‧‧Adhesive layer
224‧‧‧導電墊 224‧‧‧Electrical mat
226‧‧‧頂面 226‧‧‧ top surface
238A‧‧‧末端 End of 238A‧‧
238B‧‧‧末端 End of 238B‧‧‧
328‧‧‧低密度互連墊 328‧‧‧Low density interconnect pads
332‧‧‧導電墊 332‧‧‧Electrical mat
334‧‧‧黏著層 334‧‧‧Adhesive layer
336‧‧‧金屬墊 336‧‧‧Metal pad
500‧‧‧電子裝置 500‧‧‧Electronic devices
502‧‧‧系統匯流排 502‧‧‧System Bus
510‧‧‧電子組件 510‧‧‧Electronic components
512‧‧‧處理器 512‧‧‧ processor
514‧‧‧通訊電路 514‧‧‧Communication circuit
516‧‧‧顯示裝置 516‧‧‧ display device
518‧‧‧喇叭 518‧‧‧ Horn
520‧‧‧外部記憶體 520‧‧‧External memory
522‧‧‧主記憶體 522‧‧‧ main memory
524‧‧‧硬碟機 524‧‧‧hard disk drive
526‧‧‧可移除媒體 526‧‧‧Removable media
530‧‧‧鍵盤/控制器 530‧‧‧Keyboard/Controller
圖1顯示依據一或更多實施例的包含局部高密度基板繞線的設備的例子。 1 shows an example of an apparatus including a local high density substrate winding in accordance with one or more embodiments.
圖2為依據一或更多實施例的高密度互連元件的例子。 2 is an illustration of a high density interconnect element in accordance with one or more embodiments.
圖3顯示依據一或更多實施例的包含局部高密度基板繞線的另一設備的例子。 3 shows an example of another device including a local high density substrate winding in accordance with one or more embodiments.
圖4顯示製作具有依據一或更多實施例的局 部化高密度基板繞線的設備的技術例子。 Figure 4 shows the fabrication with a bureau in accordance with one or more embodiments A technical example of a device for winding a high-density substrate.
圖5顯示依據一或更多實施例的電子裝置的例子。 FIG. 5 shows an example of an electronic device in accordance with one or more embodiments.
以下說明及圖式足夠顯示特定實施例,其使得熟習於本技藝者可以實施它們。其他實施例可以包含結構、邏輯、電氣、程序或其他變化。一些實施例的部份與特性可以包含在其他實施例中之這些實施例或取代之。在申請專利範圍中所述之實施例包含這些請求項的所有可得等效。 The following description and the drawings are sufficient to show specific embodiments that may be practiced by those skilled in the art. Other embodiments may incorporate structural, logical, electrical, procedural or other changes. Portions and features of some embodiments may be included or substituted for those embodiments in other embodiments. The embodiments described in the scope of the claims contain all available equivalents of these claims.
於此大致描述用以局部化高密度基板繞線的系統與方法實施例。在一或更多實施例中,一種設備包含介質、第一及第二電路元件、一或更多互連元件、及介電層。該介質中可以包含低密度繞線。互連元件可以內藏於該介質中,並其中可以包含多數導電構件,該等導電構件的一導電構件可以電耦接至該第一電路元件及第二電路元件。該互連元件其中可以包含高密度繞線。該介電層可以在該互連元件上,該介電層可以包含該第一及第二電路元件通過其間。 Embodiments of systems and methods for localizing high density substrate windings are generally described herein. In one or more embodiments, an apparatus includes a medium, first and second circuit elements, one or more interconnect elements, and a dielectric layer. The medium can contain low density windings. The interconnecting component can be embedded in the medium and can include a plurality of electrically conductive members, and a conductive member of the electrically conductive members can be electrically coupled to the first and second circuit components. The interconnect element can include a high density winding therein. The dielectric layer can be on the interconnect element, and the dielectric layer can include the first and second circuit elements therethrough.
基板解決方案可以用以提供晶片至晶片互連。在封裝基板中之I/O(輸入/輸出)密度可以為該基板的最小軌跡及空間尺寸所決定。最小軌跡及空間尺寸可以為用於基板製程中之微影及電鍍製程的解析度所限制。此限制可以為完成解析度的經濟成本的函數。在多晶片基板中 的繞線密度可以約一百(100)倍低於在晶片級繞線製程中之繞線密度。有關於使用較低繞線密度的問題可以包含基板的專屬於I/O的面積較大及降低之系統及功率效能。 A substrate solution can be used to provide a wafer to wafer interconnect. The I/O (input/output) density in the package substrate can be determined by the minimum trajectory and spatial size of the substrate. The minimum trace and space size can be limited by the resolution of the lithography and plating processes used in the substrate process. This limit can be a function of the economic cost of completing the resolution. In a multi-wafer substrate The wire density can be about one hundred (100) times lower than the wire density in the wafer level winding process. Problems with the use of lower wire densities can include larger and reduced system and power performance of the substrate's dedicated I/O.
有關於先前多晶片封裝基板的問題可以是,其不能以符合成本效益或方便製造的方式,利用晶片級繞線密度,於基板繞線。此問題的解決方案可以包含使用高密度互連元件(例如,互連晶粒或互連晶片),其包含晶片級繞線(例如,高密度繞線)內藏於介質(例如基板)中。此解決方案可以提供局部化高密度繞線元件,其允許建立局部化高頻寬(例如密度)晶片至晶片互連或能修改封裝設計的能力並加入可以由高頻寬晶片至晶片互連獲得利益的功能,而不需要對製程有重大改變。此解決方案也可以只在高密度互連有用的區域提供高密度互連,因此,允許較便宜微影及電鍍製程被使用於傳統封裝繞線(例如低密度繞線)在基板中不使用或不想要高密度互連的區域。此解決方案也可以當互連元件被內藏在該N-1層(例如,在基板(該N層)的上層之下的一層)或以下時,於放置高密度互連元件時,提供尺寸上的變化。在包含一個以上互連元件的實施例中,一互連元件的對準可以與另一互連元件無關。包含內藏在該基板的頂層下的高密度互連的實施例可以統一封裝核心繞線及高頻寬互連繞線成為用於後續晶片附著的基板上的單一成像凸塊欄上。同時,此解決方案也可以提供多數晶片作不同繞線,並可能更符經濟效益。高頻寬互連繞線可以隔離至該晶片的一部份在將實體發生高 頻寬互連耦接的位置或附近,因此,留下其餘的晶片空間,作低密度繞線。藉由在互連元件上包含被作成大小或整形為大於電路元件(例如,導電導孔)的墊,則可以忍受電路元件位置上的變動。 A problem with previous multi-wafer package substrates may be that they cannot be wound on the substrate using wafer level winding density in a cost effective or convenient manner. A solution to this problem may include the use of high density interconnect elements (eg, interconnected dies or interconnected wafers) that include wafer level windings (eg, high density windings) embedded in a medium (eg, a substrate). This solution can provide localized high-density winding components that allow for the creation of localized high-bandwidth (eg, density) wafer-to-wafer interconnects or the ability to modify package designs and the ability to benefit from high-bandwidth wafer-to-wafer interconnects. There is no need to make major changes to the process. This solution also provides high-density interconnects only in areas where high-density interconnects are useful, thus allowing less expensive lithography and electroplating processes to be used in conventional package windings (eg, low-density windings) that are not used in the substrate or Areas where high density interconnections are not desired. This solution may also provide dimensions when the interconnect element is built into the N-1 layer (eg, a layer below the upper layer of the substrate (the N layer)) or below when placing the high density interconnect component The change on. In embodiments that include more than one interconnect element, the alignment of one interconnect element can be independent of the other interconnect element. Embodiments comprising a high density interconnect built into the top layer of the substrate can unify the package core windings and the high frequency wide interconnect windings onto a single imaging bump bar on the substrate for subsequent wafer attachment. At the same time, this solution can also provide most wafers for different windings and may be more economical. The high frequency wide interconnect winding can be isolated to a portion of the wafer where the entity will be high The bandwidth interconnect is coupled to or near the location, thus leaving the remaining wafer space for low density winding. Variations in the position of the circuit components can be tolerated by including pads on the interconnect elements that are sized or shaped to be larger than circuit elements (e.g., conductive vias).
圖1顯示設備100的例子,其可以包含局部高密度基板繞線。設備100可以包含介質102A、一或更多高密度互連元件104、選用介電層108、一或更多第一電路元件110A、一或更多第二電路元件110B、選用黏著層122、或一或更多晶粒114A-B。 FIG. 1 shows an example of a device 100 that may include a local high density substrate winding. Apparatus 100 can include a medium 102A, one or more high density interconnect elements 104, an optional dielectric layer 108, one or more first circuit elements 110A, one or more second circuit elements 110B, an optional adhesion layer 122, or One or more grains 114A-B.
介質102A中可以包含低密度互連繞線。介質102A可以為基板,例如半導體基板(例如,矽、鎵、銦、鍺或其組合或變化,及其他基板)、一或更多絕緣層,例如,玻璃補強環氧樹脂,例如,FR-4、聚四氟乙烯(鐵氟龍)、銅-紙補強環氧樹脂(CEM-3)、酚-玻璃(G3)、紙-酚類(FR-1或FR-2)、聚脂-玻璃(CEM-5)、任何其他介電材料,例如,玻璃或例如可以用於印刷電路板(PCB)者之組合。介質102A可以使用無凸塊增建層製程(BBUL)或建立介質102A的其他技術加以完成。BBUL製程包含形成在一元件,例如高密度互連元件104或晶粒114下的一或更多增建層。例如雷射鑽孔的微導孔形成製程也可以在增建層與晶粒或晶粒黏合墊間形成連接。增建層可以使用高密度積集圖案化技術加以形成。晶粒114或多數晶粒114及高密度互連元件104可以內藏在基板內,使用BBUL或其他製程作電連接。 A low density interconnect winding can be included in the medium 102A. The medium 102A can be a substrate, such as a semiconductor substrate (eg, germanium, gallium, indium, germanium or combinations or variations thereof, and other substrates), one or more insulating layers, such as glass-reinforced epoxy, eg, FR-4 , polytetrafluoroethylene (Teflon), copper-paper reinforced epoxy resin (CEM-3), phenol-glass (G3), paper-phenols (FR-1 or FR-2), polyester-glass ( CEM-5), any other dielectric material, such as glass or a combination of, for example, those that can be used in printed circuit boards (PCBs). The medium 102A can be completed using a bumpless build-up layer process (BBUL) or other techniques for creating the medium 102A. The BBUL process includes one or more build-up layers formed under a component, such as high density interconnect component 104 or die 114. For example, a micro-via formation process for laser drilling can also form a connection between the build-up layer and the die or die bond pads. The build-up layer can be formed using high density accumulation patterning techniques. The die 114 or majority of the die 114 and the high density interconnect component 104 can be embedded within the substrate for electrical connection using BBUL or other processes.
高密度互連元件104可以包含多數導電構件106,配置、置放、形成或定位在其中。導電構件106可以定位在高密度互連元件104內,在導電構件106間的間隙可以小於例如藉由使用晶粒繞線技術的傳統基板繞線技術所可能完成者(例如,小到約100分之一),以建立高密度互連元件104(例如高密度互連元件104可以在其中包含高密度基板繞線)。高密度互連元件104可以為半導體晶粒,例如矽晶粒。高密度互連元件104可以包含至少一層玻璃、陶瓷、或有機材料。 The high density interconnect element 104 can include a plurality of conductive members 106 that are configured, placed, formed, or positioned therein. The conductive members 106 can be positioned within the high density interconnect elements 104, and the gap between the conductive members 106 can be less than, for example, by conventional substrate winding techniques using die winding techniques (eg, as small as about 100 points) One) to create a high density interconnect element 104 (eg, the high density interconnect element 104 can include a high density substrate winding therein). The high density interconnect element 104 can be a semiconductor die, such as a germanium die. The high density interconnect element 104 can comprise at least one layer of glass, ceramic, or organic material.
高密度互連元件104可以定位於在該介質102A內的表面下的一層(例如N-1層或以下),或者可以定位在介質102A的頂面(例如N層)上,例如於圖3所示。 The high density interconnect element 104 can be positioned one layer below the surface within the medium 102A (eg, N-1 layer or less), or can be positioned on the top surface (eg, N layer) of the medium 102A, such as in FIG. Show.
高密度互連元件104可以包含導電墊224,定位在高密度互連元件104上或至少部份在高密度互連元件104之中,例如,在高密度互連元件104的頂面226上或至少部份在高密度互連元件104的頂面226之下,如於圖2所示。導電墊224可以例如圖2所示電耦接於導電構件106與電路元件110A-B之間。導電墊224可以包含導電金屬,例如銅、金、銀、鋁、鋅、鎳、黃銅、青銅、鐵等等。導電墊224(例如高密度導電墊224)可以具有佔用面積,其面積大於電路元件110的對應佔用面積。此一架構允許在製造或在將高密度互連元件104定位在介質102內時的尺寸變化。導電墊224可以包含為圓形、正方形、長 方形、三角形、或其組合等等的佔用面積。導電墊224的佔用面積可以於約175μm2至10000μm2之間,例如導電墊224可以包含50μm的佔用面積尺寸、例如導電墊224為具有約2500μm2佔用面積的正方形,或具有約1963μm2佔用面積的圓形。在一些實施例中,導電墊224可以包含於約1900μm2至2550μm2間的佔用面積。 The high density interconnect element 104 can include a conductive pad 224 positioned on the high density interconnect element 104 or at least partially within the high density interconnect element 104, for example, on the top surface 226 of the high density interconnect element 104 or At least partially below the top surface 226 of the high density interconnect element 104, as shown in FIG. Conductive pad 224 can be electrically coupled between conductive member 106 and circuit elements 110A-B, such as shown in FIG. Conductive pad 224 may comprise a conductive metal such as copper, gold, silver, aluminum, zinc, nickel, brass, bronze, iron, and the like. The conductive pads 224 (eg, high density conductive pads 224) may have a footprint that is larger than the corresponding footprint of the circuit component 110. This architecture allows for dimensional changes in manufacturing or when positioning the high density interconnect element 104 within the medium 102. The conductive pads 224 may comprise footprints that are circular, square, rectangular, triangular, or combinations thereof, and the like. The footprint of conductive pads 224 may be between about 175μm 2 to 10000μm 2, such as a conductive pad 224 may comprise the footprint size of 50μm, such as a conductive pad 224 having a square footprint of about 2500μm 2, or with a footprint of about 1963μm 2 Round shape. In some embodiments, the conductive pads 224 can comprise a footprint of between about 1900 μm 2 and 2550 μm 2 .
介電層108可以定位在高密度互連元件104之上(介電層108的下邊界例係被在介質102A中的水平虛線所表示)。介電層108可以包含電路元件110通過於其間。包含介電層108可以協助允許在至少部份在介質102A內或之上置放、內藏或定位高密度互連元件104的尺寸變化。介電層108可以包含氧化物,或其他材料,例如絕緣材料。 Dielectric layer 108 can be positioned over high density interconnect element 104 (the lower boundary of dielectric layer 108 is represented by a horizontal dashed line in medium 102A). Dielectric layer 108 can include circuit elements 110 therethrough. The inclusion of the dielectric layer 108 can assist in allowing dimensional changes in the high density interconnect element 104 to be placed, built, or positioned at least partially within or over the medium 102A. Dielectric layer 108 may comprise an oxide, or other material, such as an insulating material.
高密度互連元件104可以包含互連電路,例如第一與第二電路元件110A-B,其可以為高密度電路元件110。電路元件110A-B可以被架構以電耦接至導電構件106,例如,藉由電耦接晶粒114A-B的高密度導電墊224至高密度互連元件104的高密度導電墊224。電路元件110A-B可以為導電導孔。電路元件110可以包含於約175μm2至3600μm2間的佔用面積,例如,電路元件110可以包含約30μm的佔用面積尺寸,例如電路元件110實質圓形,具有約707μm2的佔用面積,或者,實質正方形,具有900μm2的佔用面積。在一些實施例中,電路元件110可以包含於約600μm2至1000μm2間的佔用面積。 The high density interconnect element 104 can include interconnect circuitry, such as first and second circuit components 110A-B, which can be high density circuit components 110. Circuit elements 110A-B can be configured to be electrically coupled to conductive member 106, for example, by electrically coupling high density conductive pads 224 of die 114A-B to high density conductive pads 224 of high density interconnect element 104. Circuit elements 110A-B can be conductive vias. The circuit component 110 can comprise a footprint of between about 175 μm 2 and 3600 μm 2 . For example, the circuit component 110 can comprise a footprint size of about 30 μm, such as the circuit component 110 being substantially circular, having a footprint of about 707 μm 2 , or substantially Square, with a footprint of 900 μm 2 . In some embodiments, circuit component 110 can comprise a footprint of between about 600 μm 2 and 1000 μm 2 .
一或更多晶粒114A-B可以定位在介質102之上。晶粒114A-B可以透過導電黏劑112,例如銲錫、帶、膠或其他導電黏劑,而電耦接至電路元件110A-B。導電黏劑112可以例如藉由電耦接在第一晶粒114A上或至少在其中的高密度導電墊224A至在第二晶粒114B上或至少在其中的導電墊224B,而電耦接第一晶粒114A至第二晶粒114B。第一或第二晶粒114A-B可以為邏輯、記憶體、中央處理單元(CPU)、圖形、無線電、或任意其他類型的晶粒或封裝。高密度互連元件104的導電墊224可以定位在電路元件110與導電構件106的末端238A-B之間。 One or more of the dies 114A-B can be positioned over the medium 102. The die 114A-B can be electrically coupled to the circuit components 110A-B through a conductive adhesive 112, such as solder, tape, glue or other conductive adhesive. The conductive adhesive 112 can be electrically coupled, for example, by electrically coupling the high-density conductive pad 224A on the first die 114A or at least in the second die 114B or at least the conductive pad 224B therein. A die 114A to a second die 114B. The first or second die 114A-B can be logic, memory, central processing unit (CPU), graphics, radio, or any other type of die or package. The conductive pads 224 of the high density interconnect elements 104 can be positioned between the circuit elements 110 and the ends 238A-B of the conductive members 106.
第一及第二晶粒114A-B可以包含低密度互連墊328,例如用於電源、接地或者其他電耦接或連接至其上者。低密度互連墊328可以例如透過低密度互連元件118電耦接至例如電力、接地或資料匯流排的匯流排120。低密度互連墊328可以例如透過導電黏劑116電耦接至導電墊332。導電黏劑116可以為銲錫(例如,錫膏)、電鍍、或微球、例如架構用於倒裝晶片互連(例如受控崩潰晶片連接(C4)互連)的微球。 The first and second dies 114A-B can include low density interconnect pads 328, such as for power, ground, or other electrical coupling or connection thereto. The low density interconnect pads 328 can be electrically coupled to the busbars 120, such as power, ground, or data busses, for example, through low density interconnect elements 118. The low density interconnect pads 328 can be electrically coupled to the conductive pads 332, for example, via the conductive adhesive 116. Conductive adhesive 116 can be solder (eg, solder paste), electroplated, or microspheres, such as microspheres that are architected for flip chip interconnects, such as controlled crash wafer bonding (C4) interconnects.
黏著層122可以操作以防止導電黏劑116橋接於導體之間,例如,協助防止短路。黏著層122可以為銲錫阻劑(例如,銲錫罩)、導電膠阻劑、充滿矽石毛細底填、或其他類型絕緣體,其可以操作以防止於導體間之橋接。黏著層122可以定位在介電層108之上並然後選擇地 移除,以至少部份曝露出電路元件110或導電墊332或224;或者,黏著層122可以選擇地定位在介電層108之上,使得例如電路元件110的導電元件並未全部為黏著層122所覆蓋。黏著層122可以分佈在晶粒114的邊緣或接近邊緣,並例如,藉由使用空氣壓力或毛細作用,例如,以至少部份填入於晶粒114下的導體間之空間,而在晶粒114下流動。 Adhesive layer 122 can operate to prevent conductive adhesive 116 from bridging between the conductors, for example, to help prevent short circuits. Adhesive layer 122 can be a solder resist (eg, a solder mask), a conductive adhesive, a vermiculite-filled underfill, or other type of insulator that can operate to prevent bridging between the conductors. Adhesive layer 122 can be positioned over dielectric layer 108 and then selectively Removed to at least partially expose circuit component 110 or conductive pad 332 or 224; or, adhesive layer 122 may be selectively positioned over dielectric layer 108 such that, for example, conductive elements of circuit component 110 are not all adhesive layers Covered by 122. The adhesive layer 122 may be distributed at or near the edge of the die 114 and may be, for example, by using air pressure or capillary action, for example, at least partially filling the space between the conductors under the die 114, in the die Flowing under 114.
圖2顯示在置放第一或第二電路元件110或高密度互連元件104中之尺寸變動例。藉由包括有佔用面積大於予以耦接至其上的電路元件110的佔用面積的高密度導電墊224,將可以容忍在置放電路元件110、高密度導電墊224、在其中形成有電路元件110的洞的誤差,或者置放高密度互連元件104的誤差。 FIG. 2 shows an example of dimensional variations in the placement of the first or second circuit component 110 or the high density interconnect component 104. By including a high density conductive pad 224 having a footprint greater than the footprint of the circuit component 110 to be coupled thereto, the placement of the circuit component 110, the high density conductive pad 224, and the formation of the circuit component 110 therein can be tolerated. The error of the hole, or the error of placing the high density interconnect element 104.
高密度互連元件104可以同時電耦接至兩個以上晶粒114,例如,耦接至一或多者的記憶體、邏輯、圖形、其他CPU晶粒、或其他類型的晶粒的CPU晶粒。 The high density interconnect element 104 can be electrically coupled to more than two dies 114 at the same time, for example, CPU crystals coupled to one or more of memory, logic, graphics, other CPU dies, or other types of dies. grain.
圖3顯示設備300的例子,其可以包含高密度互連元件104在介質102B的頂層上。在此實施例中,高密度互連元件104可以透過例如銲錫層的黏著層334固定於定位。黏著層334可以將高密度互連元件104固定至例如銅墊的選用金屬墊336,或直接固定至介質102B。金屬墊336可以作動為雷射散熔穿過黏著層334的停止層,例如,停止雷射穿透該介質102B。此一架構可以允許對高密度互連元件104的置放或附著有較佳控制。 3 shows an example of a device 300 that can include a high density interconnect element 104 on the top layer of media 102B. In this embodiment, the high density interconnect component 104 can be secured to the location by an adhesive layer 334, such as a solder layer. Adhesive layer 334 can secure high density interconnect component 104 to an optional metal pad 336, such as a copper pad, or directly to media 102B. The metal pad 336 can be actuated to scatter the laser through the stop layer of the adhesive layer 334, for example, to stop the laser from penetrating the medium 102B. This architecture may allow for better control over the placement or attachment of the high density interconnect elements 104.
圖4顯示作出可以包含高密度互連元件104的裝置的技術400的例子。在402,高密度互連元件104可以內藏於介質102內。高密度互連元件104可以包含一或更多導電構件106。在404,介電層108可以定位在高密度互連元件104之上。在406,電路元件110可以電耦接至高密度互連元件104,例如,以彼此電耦接兩電路元件110A-B。 FIG. 4 shows an example of a technique 400 for making a device that can include a high density interconnect element 104. At 402, the high density interconnect element 104 can be built into the medium 102. The high density interconnect element 104 can include one or more conductive members 106. At 404, the dielectric layer 108 can be positioned over the high density interconnect element 104. At 406, circuit component 110 can be electrically coupled to high density interconnect component 104, for example, to electrically couple two circuit components 110A-B to each other.
使用一或更多高密度互連元件104的電子裝置例係被包含以顯示本案的裝置應用例。圖5顯示加入一或更多高密度互連元件104的電子裝置500的例子。電子裝置500只為一裝置例,其中可以使用本發明之實施例。電子裝置500的例子可以包含但並不限於個人電腦、平板電腦、超級電腦、伺服器、電信開關、路由器、行動電話、個人資料助理、MP3或其他數位音樂播放器、無線電等等。在此例子中,電子裝置500包含資料處理系統,其包含系統匯流排502,以耦接系統的各種元件。系統匯流排502提供於電子裝置500的各種元件間之通訊鏈路並可以實施為單一匯流排、匯流排的組合、或以任何其他適當方式實施。 An electronic device example using one or more high density interconnect elements 104 is included to illustrate a device application example of the present application. FIG. 5 shows an example of an electronic device 500 incorporating one or more high density interconnect elements 104. The electronic device 500 is merely an example of a device in which embodiments of the invention may be used. Examples of electronic device 500 may include, but are not limited to, personal computers, tablets, supercomputers, servers, telecommunications switches, routers, mobile phones, personal data assistants, MP3 or other digital music players, radios, and the like. In this example, electronic device 500 includes a data processing system that includes a system bus 502 to couple various components of the system. System bus 502 provides a communication link between the various components of electronic device 500 and can be implemented as a single bus, a combination of bus bars, or in any other suitable manner.
電子組件510係耦接至系統匯流排502。電子組件510可以包含電路或電路的組合。在一實施例中,電子組件510包含可以為任意類型之處理器512。於此所用,“處理器”表示任何類型的計算電路,例如但並不限於微處理器、微控制器、複雜指令集計算(CISG)微處理 器、精簡指令集計算(RISC)微處理器、特長指令字元(VLIW)微處理器、圖形處理器、數位信號處理器(DSP)、多核心處理器、或任意其他類型處理器或處理電路。 Electronic component 510 is coupled to system bus 502. Electronic component 510 can include circuitry or a combination of circuits. In an embodiment, electronic component 510 includes a processor 512 that can be any type. As used herein, "processor" means any type of computing circuit such as, but not limited to, a microprocessor, a microcontroller, a complex instruction set computing (CISG) microprocessor. , Reduced Instruction Set Computing (RISC) microprocessor, Very Long Instruction Character (VLIW) microprocessor, graphics processor, digital signal processor (DSP), multi-core processor, or any other type of processor or processing circuit .
可以包含於電子組件510中之其他類型的電路為客製電路、特殊應用積體電路(ASIC)、或類似物,例如,用於無線裝置,如行動電話、呼叫器、個人資料助理、行動電腦、雙向無線電及類似電子系統的一或更多電路(例如通訊電路514)。IC可以執行任何其他類型功能。 Other types of circuitry that may be included in electronic component 510 are custom circuits, special application integrated circuits (ASICs), or the like, for example, for wireless devices such as mobile phones, pagers, personal data assistants, mobile computers. One or more circuits (e.g., communication circuit 514) of a two-way radio and similar electronic system. The IC can perform any other type of function.
電子裝置500可以包含外部記憶體520、其隨後可以包含一或更多適用以特定應用的記憶體元件,例如為隨機存取記憶體(RAM)形式的主記憶體522、一或更多硬碟機524、及/或一或更多驅動器,其處理可移除媒體526,例如光碟(CD)、數位視訊碟片(DVD)及類似物。 The electronic device 500 can include external memory 520, which can then include one or more memory components suitable for a particular application, such as main memory 522 in the form of random access memory (RAM), one or more hard drives. Machine 524, and/or one or more drivers that process removable media 526, such as compact discs (CDs), digital video discs (DVDs), and the like.
電子裝置500也可以包含顯示裝置516、一或更多喇叭518、及鍵盤及/或控制器530,其可以包含滑鼠、軌跡球、觸控螢幕、語音辨識裝置、或任何其他可以允許系統使用者輸入資訊進入電子裝置500並由該處接收資訊的裝置。 The electronic device 500 can also include a display device 516, one or more speakers 518, and a keyboard and/or controller 530, which can include a mouse, a trackball, a touch screen, a voice recognition device, or any other system that can be used. The device inputs information into the electronic device 500 and receives information from there.
在例子1中,一設備包含其中具有低密度互連繞線的介質。 In Example 1, an apparatus includes a medium having a low density interconnect winding therein.
在例子2中,例子1的設備包含第一電路元件及第二電路元件。 In Example 2, the device of Example 1 includes a first circuit component and a second circuit component.
在例子3中,例子1至2中的至少之一的設備包含互連元件。 In Example 3, the device of at least one of Examples 1 to 2 includes an interconnection element.
在例子4中,例子1至3中的至少之一的互連元件係被內藏於介質中。 In Example 4, the interconnection elements of at least one of Examples 1 to 3 are embedded in the medium.
在例子5中,例子1至4中的至少之一的互連元件其中包含高密度基板繞線。 In Example 5, the interconnection element of at least one of Examples 1 to 4 includes a high density substrate winding therein.
在例子6中,例子1至5中的至少之一的互連元件包含多數導電構件。 In Example 6, the interconnection element of at least one of Examples 1 to 5 includes a plurality of conductive members.
在例子7中,例子1至6中的至少之一的多數導電構件的導電構件為電耦接至第一電路元件及第二電路元件。 In Example 7, the conductive members of the plurality of conductive members of at least one of Examples 1 to 6 are electrically coupled to the first circuit element and the second circuit element.
在例子8中,例子1至7中的至少之一的設備包含介電層、該介電層在該互連晶粒之上、該介電層包含第一及第二電路元件通過其間。 In Example 8, the apparatus of at least one of Examples 1 to 7 includes a dielectric layer over the interconnect die, the dielectric layer including first and second circuit elements therethrough.
在例子9中,例子1至8中的至少之一的介質為基板。 In Example 9, the medium of at least one of Examples 1 to 8 is a substrate.
在例子10中,例子1至9中的至少之一的介質為半導體(例如矽)基板。 In Example 10, the medium of at least one of Examples 1 to 9 is a semiconductor (for example, germanium) substrate.
在例子11中,例子1至10中的至少之一的互連元件為互連晶粒。 In Example 11, the interconnection elements of at least one of Examples 1 to 10 are interconnected dies.
在例子12中,例子1至11中的至少之一的設備包含第一晶粒。 In Example 12, the apparatus of at least one of Examples 1 to 11 includes the first die.
在例子13中,例子1至12中的至少之一的第一晶粒為電耦接至該第一電路元件。 In Example 13, the first die of at least one of Examples 1 through 12 is electrically coupled to the first circuit component.
在例子14中,例子1至13中的至少之一的第一晶粒為配置在該介質上。 In Example 14, the first die of at least one of Examples 1 to 13 is disposed on the medium.
在例子15中,例子1至14中的至少之一的設備包含第二晶粒。 In Example 15, the apparatus of at least one of Examples 1 to 14 includes the second die.
在例子16中,例子1至15中的至少之一的第二晶粒被電耦接至第二電路元件。 In Example 16, the second die of at least one of Examples 1 through 15 is electrically coupled to the second circuit component.
在例子17中,例子1至16中的至少之一的第二晶粒配置在該介質上。 In Example 17, the second die of at least one of Examples 1 to 16 is disposed on the medium.
在例子18中,例子1至17中的至少之一的第一晶粒為邏輯晶粒。 In Example 18, the first die of at least one of Examples 1 to 17 is a logic die.
在例子19中,例子1至18中的至少之一的第二晶粒為記憶體晶粒。 In Example 19, the second crystal grains of at least one of Examples 1 to 18 are memory crystal grains.
在例子20中,例子1至19的至少之一的第一電路元件為第一導電導孔。 In Example 20, the first circuit component of at least one of Examples 1 to 19 is a first conductive via.
在例子21中,例子1至20的至少之一的第二電路元件為第二導電導孔。 In Example 21, the second circuit component of at least one of Examples 1 to 20 is a second conductive via.
在例子22中,例子1至21的至少之一的第一導電導孔為電耦接至第一墊。 In Example 22, the first conductive via of at least one of Examples 1 through 21 is electrically coupled to the first pad.
在例子23中,例子1至22的至少之一的第一墊為在該互連晶粒的頂面上或至少部份在該互連晶粒的頂面之中。 In Example 23, the first pad of at least one of Examples 1 through 22 is on the top surface of the interconnect die or at least partially in the top surface of the interconnect die.
在例子24中,例子1至23的至少之一的第一墊為定位在(1)第一導電導孔及(2)該導電構件的第一端之間。 In Example 24, the first pad of at least one of Examples 1 to 23 is positioned between (1) the first conductive via and (2) the first end of the conductive member.
在例子25中,例子1至24的至少之一的第二電路元件被電耦接至第二墊。 In Example 25, the second circuit component of at least one of Examples 1 through 24 is electrically coupled to the second pad.
在例子26中,例子1至25的至少之一的第二墊係在該互連晶粒的頂面上或至少部份在該互連晶粒的頂面之中。 In Example 26, the second pad of at least one of Examples 1 through 25 is on the top surface of the interconnect die or at least partially in the top surface of the interconnect die.
在例子27中,例子1至26的至少之一的第二墊係定位在(1)第二導電導孔及(2)該導電構件的第二端之間。 In Example 27, the second pad of at least one of Examples 1 to 26 is positioned between (1) the second conductive via and (2) the second end of the conductive member.
在例子28中,例子1至27的至少之一的第一墊包含50微米的佔用面積尺寸。 In Example 28, the first mat of at least one of Examples 1 through 27 comprised a footprint size of 50 microns.
在例子29中,例子1至28的至少之一的第一電路元件包含約30微米的佔用面積尺寸。 In Example 29, the first circuit component of at least one of Examples 1 through 28 comprised a footprint size of about 30 microns.
在例子30中,例子1至29中的至少之一的設備包含黏劑。 In Example 30, the apparatus of at least one of Examples 1 to 29 contains an adhesive.
在例子31中,例子1至30中的至少之一的黏劑為銲錫阻劑。 In Example 31, the adhesive of at least one of Examples 1 to 30 was a solder resist.
在例子32中,例子1至31中的至少之一的黏劑係在介電層之上。 In Example 32, the adhesive of at least one of Examples 1 to 31 was over the dielectric layer.
在例子33中,例子1至32中的至少之一的黏劑並未整個覆蓋該第一及第二電路元件。 In Example 33, the adhesive of at least one of Examples 1 to 32 did not entirely cover the first and second circuit elements.
在例子34中,例子1至33中的至少之一的設備可以定位在一封裝中。 In Example 34, the device of at least one of Examples 1 to 33 can be positioned in a package.
在例子35中,例子1至34中的至少之一的第一晶粒係透過第一導電導孔及第二導電導孔電耦接至第 二晶粒。 In the example 35, the first die of at least one of the examples 1 to 34 is electrically coupled to the first through the first conductive via and the second conductive via Two grains.
在例子36中,例子1至35中的至少之一的第二墊包含具有50微米的尺寸的佔用面積。 In Example 36, the second pad of at least one of Examples 1 to 35 comprises a footprint having a size of 50 microns.
在例子37中,例子1至36中的至少之一的第二電路元件包含具有約30微米尺寸的佔用面積。 In Example 37, the second circuit component of at least one of Examples 1 through 36 includes a footprint having a size of about 30 microns.
在例子38中,例子1至37中的至少之一的互連元件為矽互連晶粒。 In Example 38, the interconnecting elements of at least one of Examples 1 through 37 are germanium interconnected dies.
在例子39中,一種方法包含在介質102中,內藏高密度互連元件104。 In Example 39, a method is included in the medium 102 in which the high density interconnect element 104 is embedded.
在例子40中,例子1至39中的至少之一的方法包含電耦接第一及第二電路元件110至互連元件的導電構件106。 In Example 40, the method of at least one of Examples 1 to 39 includes electrically coupling the first and second circuit elements 110 to the conductive members 106 of the interconnect elements.
在例子41中,例子1至40中的至少之一的方法包含定位介電層108於互連元件之上。 In Example 41, the method of at least one of Examples 1 to 40 includes positioning the dielectric layer 108 over the interconnect element.
在例子42中,例子1至41中的至少之一的方法包含定位第一晶粒114A於介質之上。 In Example 42, the method of at least one of Examples 1 to 41 includes positioning the first die 114A over the medium.
在例子43中,例子1至42中的至少之一的方法包含電耦接該第一晶粒至該第一電路元件。 In Example 43, the method of at least one of Examples 1 to 42 includes electrically coupling the first die to the first circuit component.
在例子44中,例子1至43中的至少之一的方法包含定位第二晶粒114B於介質之上。 In Example 44, the method of at least one of Examples 1 to 43 includes positioning the second die 114B over the medium.
在例子45中,例子1至44中的至少之一的方法包含電耦接該第二晶粒至該第二電路元件。 In Example 45, the method of at least one of Examples 1 to 44 includes electrically coupling the second die to the second circuit component.
在例子46中,例子1至45中的至少之一的將該第一晶粒定位在該介質之上包含定位邏輯晶粒在該基 板之上。 In Example 46, positioning the first die on the medium at least one of Examples 1 through 45 includes positioning logic grains at the base Above the board.
在例子47中,例子1至46中的至少之一的定位第二晶粒至該基板之上包含定位記憶體晶粒在該基板之上。 In Example 47, at least one of Examples 1 through 46 positions the second die onto the substrate comprising a locating memory die over the substrate.
在例子48中,例子1至47中的至少之一的電耦接第一及第二電路元件包含電耦接第一及第二導電導孔至該導電構件。 In Example 48, electrically coupling the first and second circuit components of at least one of Examples 1 to 47 includes electrically coupling the first and second conductive vias to the conductive member.
在例子49中,例子1至48中的至少之一的方法包含定位第一墊在該互連元件的頂面上或至少部份在該互連元件的頂面之中。 In Example 49, the method of at least one of Examples 1 to 48 includes positioning the first pad on a top surface of the interconnecting component or at least partially in a top surface of the interconnecting component.
在例子50中,例子1至49中的至少之一的定位該第一墊包含定位該第一墊於(1)第一導電導孔及(2)導電構件的第一端之間。 In Example 50, positioning the first pad of at least one of Examples 1 to 49 includes positioning the first pad between (1) the first conductive via and (2) the first end of the conductive member.
在例子51中,例子1至50中的至少之一的電耦接該第一及第二導電導孔包含電耦接該第一導電導孔至該第一墊。 In the example 51, electrically coupling the at least one of the examples 1 to 50 to the first and second conductive vias to electrically couple the first conductive via to the first pad.
在例子52中,例子1至51中的至少之一的方法包含定位第二墊在互連元件的頂面上,或至少部份在該互連元件的頂面中。 In Example 52, the method of at least one of Examples 1 to 51 includes positioning the second pad on a top surface of the interconnecting member, or at least partially in a top surface of the interconnecting component.
在例子53中,定位第二墊包含定位該第二墊在(1)第二導電導孔及(2)導電構件的第二端之間。 In Example 53, positioning the second pad includes positioning the second pad between (1) the second conductive via and (2) the second end of the conductive member.
在例子54中,例子1至53的至少之一的電耦接第一及第二導電導孔包含電耦接該第二導電導孔至該第二墊。 In Example 54, the electrically coupling the first and second conductive vias of at least one of the examples 1 to 53 includes electrically coupling the second conductive via to the second pad.
在例子55中,例子1至54的至少之一的定位該第一墊包含定位包含約50微米的佔用面積尺寸的第一墊。 In Example 55, positioning the first pad of at least one of Examples 1 to 54 includes positioning a first pad comprising a footprint size of about 50 microns.
在例子56中,例子1至55的至少之一的電耦接第一及第二電路元件包含電耦接包含約30微米的佔用面積尺寸的第一電路元件。 In Example 56, electrically coupling the first and second circuit elements of at least one of Examples 1 through 55 includes electrically coupling a first circuit component comprising a footprint size of about 30 microns.
在例子57中,例子1至56中的至少之一的方法包含定位黏著層122在該介電層之上。 In Example 57, the method of at least one of Examples 1 to 56 includes positioning the adhesive layer 122 over the dielectric layer.
上述實施例的說明包含參考形成實施例說明的一部份的附圖。例示用的附圖顯示本發明可以實施於其中的特定實施例。這些實施例於此也稱為“例子”。一些例子可以包含於此所示或所述以外的元件。然而,本案發明人也想出只有提供所示或所述的這些元件的例子。再者,本案發明人也想出有關於特定例子(或其一或更多態樣)、或其他在此所示或所述的例子(或其一或更多態樣)的這些所示或所述(或其一或更多態樣)的元件的組合或替換的例子。 The description of the above embodiments contains reference to the drawings which form a part of the description of the embodiments. The drawings used in the exemplification show specific embodiments in which the invention can be implemented. These embodiments are also referred to herein as "examples." Some examples may include elements other than those shown or described. However, the inventors of the present invention have also exemplified the examples of providing only those elements shown or described. Furthermore, the inventors of the present invention have also come up with these specific examples (or one or more aspects thereof), or other examples shown or described herein (or one or more aspects thereof) or An example of a combination or replacement of the elements (or one or more aspects thereof).
在此文件中,如在專利文件中所常用的“一”被用以表示包含一或一個以上,而無關於其他“至少一”或“一或更多”的例子或用法。在此文件中,用語“或”係用以表示非排除,或者例如,“A或B”包含“A,但不是B”、“B但不是A”、及除非特別指明“A及B”。在此文件中,用語“包含”及“其中”係被使用作為個別用語“包括”及“其中”的等 效。同時,在以下申請專利範圍中,用語“包括”及“包含”為開放式,即,一系統、裝置、物品、組成物、配方或製造包含在一請求項中的此用語所列出的元件外,也包含其他元件,係被視為落入該請求項的範圍內。再者,在以下的申請專利範圍內,於此所用的用語“第一”、“第二”及“第三”等只作標示,並不想要以表示該等物品的數量要求。 In this document, the use of "a" or "an" or "an" or "an" In this document, the term "or" is used to mean that it is not excluded, or, for example, "A or B" includes "A, but not B", "B but not A", and unless otherwise specified "A and B". In this document, the terms "including" and "where" are used as the individual terms "including" and "where", etc. effect. Also, in the scope of the following claims, the terms "comprises" and "comprising" are open, that is, a system, device, article, composition, formulation, or manufacture of the components listed in the term in a claim. In addition, other components are included and are considered to fall within the scope of the claim. Furthermore, the terms "first", "second", and "third", etc., as used herein, are used in the context of the following claims, and are not intended to indicate the quantity of the items.
上述說明係想要例示並不是限制。例如,上述例子(或其一或更多態樣)可以被彼此組合使用。其他實施例也可以例如為熟習於本技藝者在觀看來上述說明後所使用。摘要係依專利法加以提供,以允許讀者能迅速確認本技術揭示的本質。更強調,其並不用以解釋或限制申請專利範圍或意義。同時,在實施例的上述說明中,各種特性可以集合在一起,以合理化本案。這應不被解釋為想要未主張的揭露特性為任一請求項的必要特徵。相反地,本發明標的係在於較特定所揭露的實施例為少的所有特徵。因此,以下的請求項係被併入實施例的說明中,各個請求項表示本身為分開實施例,並想要了解此等實施例可以在各種組合或替代中被彼此組合。本發明之範圍應參考隨附的申請專利範圍,與這些申請專利範圍的等效範圍加以決定。 The above description is intended to be illustrative and not limiting. For example, the above examples (or one or more aspects thereof) may be used in combination with each other. Other embodiments may also be used, for example, by those skilled in the art after viewing the above description. The Abstract is provided by way of patent law to allow the reader to quickly ascertain the nature of the present disclosure. It is emphasized that it is not intended to explain or limit the scope or meaning of the patent application. Also, in the above description of the embodiments, various features may be grouped together to rationalize the case. This should not be interpreted as an unneeded disclosure feature that is an essential feature of any claim. On the contrary, the subject matter of the invention lies in all features that are less than the specific disclosed embodiments. Accordingly, the following claims are incorporated in the description of the embodiments, each of which is a separate embodiment and is intended to be understood that the embodiments can be combined in various combinations or alternatives. The scope of the invention should be determined by reference to the appended claims and the equivalent scope of the claims.
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