TWI549145B - Tunable three dimentional inductor - Google Patents

Description

Adjustable three-dimensional inductance component

The present invention relates to an electrical component, and more particularly to an adjustable three-dimensional inductive component.

Electronic packages often require passive components such as inductors, capacitors, and resistors to perform specific circuit tuning. For example, in many radio frequency (RF) applications, tuning of a particular circuit is often accomplished by adding an inductor to the electronic package. The addition of discrete passive components to electronic packages often results in an increase in the size and weight of the package. In addition, the inclusion of discrete passive components in electronic packaging often requires a dedicated production line, and additional equipment and processes may be required. These additional equipment and processes can result in higher production costs and may increase process time.

For example, the prior art solves these problems by fabricating passive components over the active circuitry of an integrated circuit device. However, integrating passive components also requires a variety of additional processes, such as the need to form a via over the upper protective layer of the integrated circuit device, thereby allowing the passive components to be connected to the underlying integrated circuit components. Moreover, in these prior art embodiments, at least two dies stacked on each other are required to complete the passive component.

Embodiments of the present invention provide an adjustable three-dimensional inductor component that penetrates a first trace embedded in a substrate and combines a pound line located above the substrate to implement a three-dimensionally shaped three-dimensional inductor.

Embodiments of the present invention provide an adjustable three-dimensional inductor component, including a substrate, a plurality of conductive contacts, a plurality of conductive members, a first trace, and a pound line. The substrate has An upper surface, the plurality of conductive contacts are formed on the upper surface of the substrate. The plurality of conductive members are embedded in the substrate, and each of the conductive members is electrically connected to one of the plurality of conductive contacts. The first trace is embedded in the substrate, and the first trace is electrically connected to the two conductive members of the plurality of conductive members. The two ends of the pound line are joined between two conductive contacts of the plurality of conductive contacts, and the pound line, the plurality of conductive members and the first trace jointly form a three-dimensional inductance path.

Another embodiment of the present invention further provides an adjustable three-dimensional inductor component, including a substrate, a plurality of conductive contacts, a plurality of conductive members, a plurality of first traces, and a plurality of pound lines. The substrate has an upper surface, and the plurality of conductive contacts are formed on the upper surface of the substrate. The plurality of conductive members are embedded in the substrate, and each of the conductive members is electrically connected to one of the plurality of conductive contacts. The plurality of first traces are embedded in the substrate, and each of the first traces is electrically connected to two of the plurality of conductive members. Two ends of each of the plurality of pound lines are bonded between two of the plurality of conductive contacts, the plurality of pound lines, the plurality of conductive members, and the The plurality of first traces together form a three-dimensional inductance path.

The adjustable three-dimensional inductor component provided by the embodiment of the invention enables the first trace to be vertically buried by being electrically connected to the conductive member embedded in the substrate. The adjustable three-dimensional inductor component can realize a three-dimensionally shaped three-dimensional inductor path through a first trace embedded in the substrate and a pound line located above the substrate.

In order to further understand the technology, method and effect of the present invention in order to achieve the intended purpose, reference should be made to the detailed description and drawings of the present invention. The drawings and the annexed drawings are intended to be illustrative and not to limit the invention.

W1, W2‧‧‧ adjustable three-dimensional inductance components

100‧‧‧Substrate

100S‧‧‧ upper surface of the substrate

T‧‧‧Tongkong

101‧‧‧Base

102‧‧‧First circuit layer

104‧‧‧Second circuit layer

106‧‧‧ third circuit layer

1021‧‧‧First dielectric layer

1041‧‧‧Second dielectric layer

1061‧‧‧ Third dielectric layer

1022‧‧‧First conductive pattern

1042‧‧‧Second conductive pattern

1062‧‧‧ Third conductive pattern

1022P, 1042P, 1062P‧‧‧ pads

103‧‧‧First lining

105‧‧‧Second lining

107‧‧‧ Third lining

201‧‧‧First conductive contact

202‧‧‧Second conductive contacts

203‧‧‧ Third conductive contact

311‧‧‧First conductive component

312‧‧‧Second conductive component

313‧‧‧ Third conductive component

301‧‧‧First conductive parts

302‧‧‧Second conductive parts

500‧‧ ‧ pound line

400‧‧‧ first line

600‧‧‧Second line

700‧‧‧ third line

A1A1~A5A5, B1B1~B3B3‧‧‧

1 is a perspective view of an adjustable three-dimensional inductor component according to an embodiment of the present invention after a pound line is removed.

2 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 1 taken along line A1-A1.

3 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 1 taken along line A2-A2.

4 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 1 taken along line A3-A3.

FIG. 5 is a top plan view of the adjustable three-dimensional inductor component of FIG. 1. FIG.

6 is a perspective view of an adjustable three-dimensional inductor component according to an embodiment of the invention.

7 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 6 taken along line A4-A4.

8 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 6 taken along line A5-A5.

Figure 9 is a top plan view of the adjustable three-dimensional inductor component of Figure 6.

10 to 14 are schematic top views of an adjustable three-dimensional inductor component according to another embodiment of the present invention.

FIG. 15 is a schematic perspective view of the adjustable three-dimensional inductor element according to another embodiment of the present invention after the pound line is removed.

Figure 16 is a cross-sectional view of the adjustable three-dimensional inductor element of Figure 15 taken along line B1-B1.

17 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 15 taken along line B2-B2.

Figure 18 is a top plan view of the adjustable three-dimensional inductor component of Figure 15.

19 is a perspective view of an adjustable three-dimensional inductor component according to another embodiment of the present invention.

Figure 20 is a cross-sectional view of the adjustable three-dimensional inductor component of Figure 19 taken along line B3-B3.

21 is a top plan view of the adjustable three-dimensional inductor component of FIG.

Please refer to FIG. 6 to FIG. 8 . FIG. 6 is a schematic perspective view of an adjustable three-dimensional inductor component according to an embodiment of the present invention, and FIG. 7 is a cross-sectional view of the adjustable three-dimensional inductor component of FIG. 6 along line A4-A4. 8 is a schematic cross-sectional view of the adjustable three-dimensional inductor component of FIG. 6 along the line A5-A5. The adjustable three-dimensional inductive component W1 includes a substrate 100, a plurality of conductive contacts (including, for example, a first conductive contact 201 and a second conductive contact 202), and a plurality of conductive members (including, for example, a first conductive member 301 and a second conductive member). 302), a first trace 400 and a pound line 500, wherein the conductive contacts are formed on the upper surface 100S of the substrate 100, and the conductive member and the first trace 400 are embedded in the substrate 100. Both ends of the pound line 500 are bonded between the two conductive contacts of the conductive contacts 201, 202.

First, please refer to FIG. 1 to FIG. 3 together. FIG. 1 is an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the adjustable three-dimensional inductor component along the line A1-A1, and FIG. 3 is a schematic diagram of the adjustable three-dimensional inductor component along the line A2-A2. Schematic diagram of the section. The substrate 100 can be a Printed Wiring Board (PWB). The substrate 100 can be used to support electronic components (not shown) and can be used to provide electrical connection of the electronic components. In other embodiments, the substrate 100 can be any carrier such as a semiconductor substrate, a flex-rigid wiring board, or a ceramic substrate (eg, Low Temperature Co-fired Ceramics (LTCC)).

It should be noted that, in the embodiment shown in FIG. 2, the substrate 100 may be a multilayer printed circuit board, and the substrate 100 may be composed of a substrate 101 and a plurality of circuit layers (eg, including the first circuit layer 102, the second circuit layer 104, and the a three-circuit layer 106) and a multi-layer liner (including, for example, a first liner 103, a second liner 105, and a third liner 107), wherein the multilayer circuit layers 102, 104, 106 and the multilayer liners 103, 105, 107 are formed on top of each other on the substrate 101.

In detail, the second circuit layer 104 is formed over the first circuit layer 102, and the third circuit layer 106 is formed over the second circuit layer 104. The first liner 103 is between the first circuit layer 102 and the second circuit layer 104, and the second liner 105 is between the second circuit layer 104 and the third circuit layer 106. The third liner 107 is formed over the third circuit layer 106, while the upper liner 100S of the third liner 107 is exposed to the environment.

The first circuit layer 102 may include a first dielectric layer 1021 and a first conductive pattern 1022, the second circuit layer 104 may include a second dielectric layer 1041 and a second conductive pattern 1042, and the third circuit layer 106 may include a third The dielectric layer 1061 and the third conductive pattern 1062. Each conductive pattern includes, for example, a plurality of traces and connection points (not shown) required for other lines. The first conductive pattern 1022, the second conductive pattern 1042, and the third conductive pattern 1062 may further include at least one pad 1022P, 1042P, and 1062P. The pads 1022P, 1042P, and 1062P are made of a conductive material to provide an electrical connection. .

In the illustrated embodiment, each of the lining layers 103, 105, 107 can have multiple The through holes T, and both ends of the respective through holes T may extend to one of the multilayer circuit layers 102, 104, 106. The two ends of the through hole T of the first lining layer 103 extend to the first circuit layer 102 and the second circuit layer 104, respectively, and the two ends of the through hole T of the second lining layer 105 extend to the second circuit layer 104 and the third respectively. The circuit layer 106 extends from one end of the through hole T of the third liner 107 to the third circuit layer 106, and the other end of the through hole T of the third liner 107 is exposed to the upper surface 100S of the substrate 100.

The conductive contacts 201, 202 are made of a conductive material to provide an electrical connection. The structure of the conductive contacts 201, 202 is, for example, a metal pad, a solder ball or a silver paste. The conductive contacts 201, 202 may be metal pads formed on the upper surface 100S of the substrate 100. In other embodiments not shown, the conductive contacts 201, 202 may be portions of the conductive members 301, 302 exposed to the upper surface 100S of the substrate 100, so the shapes of the conductive contacts 201, 202 in the figure are merely illustrative. The invention is not limited. In addition, the structure and the number of the conductive contacts 201 and 202 can be designed according to actual needs, and the embodiment of the present invention is not limited. In the adjustable three-dimensional inductance element W1 of the present embodiment, the number of the conductive contacts 201, 202 may correspond to the number of the conductive members 301, 302.

The conductive members 301 and 302 are electrically connected to one of the plurality of conductive contacts 201 and 202. In the embodiment shown, each of the conductive members 301, 302 can be composed of a plurality of conductive members (for example, the first conductive member 311, the second conductive member 312, and the third conductive member 313) and a plurality of pads. (for example, the pad 1022P, the pad 1042P, and the pad 1062P).

In detail, each of the through holes T of each of the lining layers 103, 105, and 107 is formed with conductive members 311, 312, and 313, and both ends of the respective conductive members 311, 312, and 313 are in contact with the plurality of conductive patterns. One of 1022, 1042, 1062. A first conductive sub-member 311 is formed in the through hole T of the first lining layer 103. The two ends of the first conductive sub-member 311 are respectively in contact with the first conductive pattern 1022 pad 1022P and the second conductive pattern 1042 pad 1042P. A second conductive sub-member 312 is formed in the through hole T of the second lining layer 105. The two ends of the second conductive sub-member 312 are respectively in contact with the second conductive pattern 1042 pad 1042P and the third conductive pattern 1062 pad 1062P. Third lining layer 107 A third conductive sub-member 313 is formed in the through hole T, and one end of the third conductive sub-member 313 is in contact with the third conductive pattern 1062 pad 1062P. The other end of the third conductive sub-member 313 is in contact with the first conductive contact 210 to be electrically connected to the first conductive contact 210.

The first conductive member 301 can be composed of the first conductive sub-member 311, the second conductive sub-member 312, the third conductive sub-member 313, the second conductive pattern 1042 pad 1042P, and the third conductive pattern 1062 pad 1062P. The second conductive member 302 can be composed of the second conductive sub-member 312, the third conductive sub-member 313, and the third conductive pattern 1062 pad 1062P.

The electron guiding members 311, 312, and 313 are composed of a conductive material filled in the through holes T. In practice, the conductive sub-members 311, 312, and 313 are, for example, conductive plugs. The conductive material can be filled in the through-holes T to form the conductive sub-members 311, 312, and 313. The tungsten plug process, the aluminum plug process, and the copper can be used. The plug process, the telluride plug process or other suitable filling process, the invention is not limited herein. In addition, in other embodiments, the conductive sub-members 311, 312, 313 may also be formed by a layer of conductive material formed on the inner wall of the through-hole T, and the layer of conductive material may be conformally covered. The inner wall of the through hole T.

The first trace 400 is embedded in the substrate 100, and the first trace 400 is electrically connected to the two conductive members of the plurality of conductive members. For example, the first trace 400 is electrically connected to the first trace 400. Two of the plurality of conductive members are the first conductive members 301. In addition, in the embodiment, the adjustable three-dimensional inductor component W1 may further include a second trace 600, the second trace 600 is embedded in the substrate 100, and the second trace 600 is electrically connected to the plurality of wires. Two of the conductive members, for example, the second trace 600 may be electrically connected to the two second conductive members 302 of the plurality of conductive members.

As shown in FIGS. 2 and 3, the first trace 400 is composed of one conductive layer, and the second trace 600 is composed of another conductive layer. For example, a conductive layer (not shown) may be formed on the substrate 101. Then, the conductive layer may be patterned, wherein a portion of the patterned conductive layer may serve as the first conductive pattern 1022, and the patterned Another portion of the conductive layer can serve as the first trace 400. Then, another conductive layer can be formed (not shown) on the first liner 103, and then the other conductive layer can be patterned, wherein a portion of the patterned other conductive layer can be used as the second conductive pattern 1042, while the patterned other Another portion of a conductive layer can serve as the second trace 600. Wherein, the patterns of the conductive layers are generally known to those skilled in the art and can be designed according to actual use requirements.

Referring to FIG. 1 , FIG. 4 and FIG. 5 , FIG. 4 is a schematic cross-sectional view of the adjustable three-dimensional inductor component of FIG. 1 along line A3-A3, and FIG. 5 is a top view of the adjustable three-dimensional inductor component of FIG. In this embodiment, the first trace 400 and the second trace 600 both have a strip shape. The first trace 400 and the second trace 600 may each be formed by depositing a single layer or a plurality of layers of conductive material, for example, a metal material, an alloy material, a conductive polymer material, or a combination thereof. In addition, the shape and size of the first trace 400 and the second trace 600 are generally applicable to those skilled in the art, and the embodiments of the present invention are not limited herein.

In an embodiment of the invention, the first trace 400 may be formed by a method of patterning a conductive layer or a damascene method. The method for patterning a conductive layer may include the following steps: first, depositing a conductive layer (not shown) On the substrate 101, afterwards, the conductive layer is patterned by photolithography to form the first conductive pattern 1022 and the first trace 400. Thereafter, a dielectric material (not shown) is deposited on the first conductive pattern 1022, the first trace 400, and the substrate 101 to form the first dielectric layer 1021. The above damascene forming the first trace 400 may include the following steps: First, a dielectric layer (not shown) is formed on the substrate 101. Next, the dielectric layer is patterned to form a plurality of openings that are intended to form the first conductive pattern 1022 and the first trace 400, and subsequently, a conductive material such as tungsten or copper is deposited on the first dielectric layer 1021 and filled in the above In the opening. Thereafter, the conductive material is ground by, for example, chemical mechanical polishing to form the first conductive pattern 1022 and the first trace 400. The manner of depositing the metal conductive material is, for example, spray coating, electroplating, electroless plating, evaporation or sputtering. Similarly, the second trace 600 can also be patterned by a conductive layer The method is formed by mosaic method.

The first trace 400 is electrically connected to the first conductive member 301 through the pad 1022P of the first conductive pattern 1022, and the second trace 600 is electrically connected to the second via conductive pad 1042. Two conductive members 302. Thereby, the first conductive member 301 can be electrically connected to the first trace 400 and the first conductive contact 201 located on the upper surface 100S of the substrate 100, and the second conductive member 302 can be electrically connected to the second trace 600 and located The second conductive contact 202 of the upper surface 100S of the substrate 100 moves the electrical conductivity of the first trace 400 or the second trace 600 upward. In other embodiments not shown, the first trace 400 may also directly contact the first conductive member 301 to complete the electrical connection, or the second trace 600 may also directly contact the second conductive member 302 to complete the electrical connection. Sexual connection, so the shape of the first trace 400 or the second trace 600 in the figure, the connection relationship between the first trace 400 and the first conductive member 301, and the connection relationship between the second trace 600 and the second conductive member 302 It is merely illustrative and not limiting of the invention.

It is worth mentioning that the adjustable three-dimensional inductance component W1 includes a plurality of first traces 400 and a plurality of second traces 600. Each of the plurality of first traces 400 is arranged side by side with each other, and each of the plurality of second traces 600 is also arranged side by side with each other. The plurality of first traces 400 are embedded in the same layer of the substrate 100 , and the plurality of second traces 600 are also buried in the same layer of the substrate 100 , and the first traces 400 and the second traces 600 are located on the substrate 100 . Different layers, wherein the second trace 600 can be located above or below the first trace 400. In addition, the first trace 400 and the second trace 600 do not overlap each other, that is, the projection of the first trace 400 on the upper surface 100S and the projection of the second trace 600 on the upper surface 100S do not overlap each other. A plurality of first traces 400 may be formed on the substrate 101 of the substrate 100, for example. That is, each of the first conductive patterns 1022 and the plurality of first traces 400 may be a portion of the patterned conductive material layer on the substrate 101. A plurality of second traces 600 may be formed, for example, on the first liner 103. That is, each of the second conductive patterns 1042 and the plurality of second traces 600 may be a portion of the patterned conductive material layer on the first liner layer 103, respectively.

As shown in FIG. 4, each of the traces can be separated by the structure of the substrate 100. In detail, each of the plurality of first traces 400 can be separated by a first dielectric layer 1021. In isolation, each of the plurality of second traces 600 can be separated by a second dielectric layer 1041, and the first trace 400 and the second trace 600 can be separated by a first liner. 103 phase isolation. It should be noted that although the various lining layers 103, 105, 107 of the substrate 100 are only shown as a single deposited layer, it should be apparent to those skilled in the art that the various lining layers 103, 105, 107 can also be used. Represents a layer of composite dielectric material overlying a plurality of dielectric layers.

As shown in FIG. 2 and FIG. 3, a pair of first conductive members 301 are respectively connected to both ends of the first trace 400, and a pair of second conductive members 302 are respectively connected to both ends of the second trace 600. . In other embodiments, the first conductive member 301 can be connected to the middle portion of the first trace 400, and the second conductive member 302 can also be connected to the middle portion of the second trace 600.

Some of the plurality of conductive contacts (eg, the first conductive contacts 201) respectively correspond to the plurality of first conductive members 301, and some of the plurality of conductive contacts (eg, the second conductive contacts) Point 202) corresponds to a plurality of second conductive members 302, respectively. For example, a pair of first conductive contacts 201 respectively correspond to a pair of first conductive members 301, and a pair of second conductive contacts 202 respectively correspond to a pair of second conductive members 302. As shown in FIG. 4, the first conductive contacts 201 are arranged in two rows of straight lines, and the second conductive contacts 202 are also arranged in two rows of straight lines, and the first conductive contacts 201 and the second conductive contacts 202 are alternately arranged. .

Please refer to FIG. 6 to FIG. 9, which is a top view of the adjustable three-dimensional inductor component of FIG. Referring to FIG. 7, when both ends of a pound line 500 are bonded between two conductive contacts (for example, the first conductive contact 201 and the second conductive contact 202) of the plurality of conductive contacts, the pound line 500 The conductive members (eg, the first conductive member 301) and the first trace 400 may collectively form a three-dimensional inductance path. That is, the pound line 500 can be used as a part of the three-dimensional inductance path, and the three-dimensional inductance path is composed of the pound line 500, the first trace 400, and the two first conductive lines electrically connected to the first trace 400. The component 301 is composed of. Similarly, referring to FIG. 8, the pound line 500 and the second trace 600 may form another three-dimensional inductance path. Further, referring to FIG. 9, when one end of each of the plurality of pound lines 500 is joined to a first conductive contact 201, and the other end of the pound line 500 is joined to a second conductive contact 202, that is, each A pound line 500 can be diagonally joined between the first conductive contact 201 and the adjacent second conductive contact 202, and the first trace 400 is electrically connected to the second trace 600, which can form another Stereoductive path. The adjustable three-dimensional inductor component W1 of the embodiment of the present invention can be implemented by using any of the three-dimensional inductor paths. In other words, the adjustable three-dimensional inductor component W1 of the embodiment of the present invention can be implemented by changing the design of any of the foregoing three-dimensional inductor paths. It can be characterized as Tunable.

In this embodiment, when the two ends of the pound line 500 are bonded between the two conductive contacts of the plurality of conductive contacts, the adjustable three-dimensional inductor component W1 can be located above the substrate 100 and has a Z direction (ie, The pound line in the normal direction of the upper surface 100S of the substrate 100 is combined with the first trace 400 or the second trace 600 vertically embedded in the substrate 100 to realize the three-dimensional inductance path of the XYZ dimension molding. And the adjustable stereo inductance element W1 can have various configuration changes by adjusting the configuration of the pound line. Specifically, the first trace 400 or the second trace 600 embedded in the substrate 100 can be vertically buried by being electrically connected to the conductive member having the Z direction.

The size of the first trace 400 and the second trace 600 and the depth of their configuration can change the area of the three-dimensional inductance path. That is to say, the stereoscopic inductance path can be better stabilized by adjusting the first trace 400 or the second trace 600. Furthermore, the first trace 400 and the second trace 600 embedded in the substrate 100 are less likely to cause collapse or the like due to external environmental influences. In addition, in the subsequent component packaging process (eg, film encapsulation process) or pound line process, the first trace 400 and the second trace 600 are also better stabilized by being embedded in the substrate 100. In general, the inductance value of the three-dimensional inductance path may increase as the size of the first trace 400 and the second trace 600 and the depth of their configuration increase.

In addition, the parallel adjacent continuous three-dimensional inductance paths may form a spiral inductor, and the inductance value may be increased by adjusting the density between the first trace 400 and/or the second trace 600. At the same time, the plurality of first traces 400 and/or the second traces 600 in the substrate 100 are permeable to each other through the structure of the substrate 100 to avoid parasitic capacitance.

Please refer to FIG. 10 to FIG. 14 . FIG. 10 to FIG. 14 are respectively top views of the adjustable three-dimensional inductor component according to another embodiment of the present invention. The adjustable three-dimensional inductor component W1 not only has a three-dimensional structure, but also can realize its Tunable characteristics by adjusting the position of the pound line 500. In detail, referring to FIG. 10 and FIG. 13 , when both ends of the pound line 500 are joined between the two first conductive contacts 201 of the plurality of conductive contacts, the pound line 500 may form with the first trace 400 Two stereo inductive paths. Referring to FIG. 11 and FIG. 14, when the two ends of the pound line 500 are joined between the two second conductive contacts 202 of the plurality of conductive contacts, the pound line 500 and the second trace 600 form two other three-dimensional shapes. Inductance path. Referring to FIG. 12, when both ends of the pound line 500 are bonded between a first conductive contact 201 and a second conductive contact 202 of the plurality of conductive contacts, the pound line 500 may be the first trace 400. Electrically connected to the second trace 600, a further three-dimensional inductive path can be formed.

Referring to FIG. 15 , FIG. 16 , FIG. 17 and FIG. 18 , FIG. 15 is a perspective view of the adjustable three-dimensional inductor component after removing the pound line according to another embodiment of the present invention, and FIG. 16 is an adjustable stereo inductor of FIG. 15 . FIG. 17 is a schematic cross-sectional view of the adjustable three-dimensional inductor component of FIG. 15 along the line B2-B2, and FIG. 18 is a top view of the adjustable three-dimensional inductor component of FIG. The similarities between the adjustable three-dimensional inductive component W2 of the present embodiment and the adjustable three-dimensional inductive component W1 of the foregoing embodiment are not described, and only the differences between the present embodiment and the foregoing embodiments will be described in detail below. As shown in the figure, the adjustable three-dimensional inductor component W2 of the present embodiment further includes a third trace 700, the third trace 700 is formed on the upper surface 100S of the substrate 100, and the third trace 700 is electrically connected to the Two of the plurality of conductive contacts (eg, the third conductive contact 203). In addition, the embodiment can The modulated three-dimensional inductive component W2 may not have the second trace 600 (see FIG. 8).

The third trace 700 and the conductive contacts (eg, the first conductive contact 201 and the third conductive contact 203) are composed of the same conductive layer. As shown in FIG. 16, the upper surface 100S of the substrate 100 may first form a conductive layer (not shown). Then, the conductive layer may be patterned, wherein a portion of the patterned conductive layer may serve as the third trace 700. Another portion of the patterned conductive layer can serve as a conductive contact. The pattern of the conductive layer is generally known to those skilled in the art and can be designed according to actual use requirements. Both ends of the third trace 700 may contact two of the plurality of conductive contacts to complete the electrical connection.

The third trace 700 has a strip shape, and the third trace 700 may be formed of, for example, a metal material, an alloy material, a conductive polymer material, or a combination of the above materials to deposit a single layer or a plurality of layers of conductive material. In addition, the shape and size of the third routing 700 are generally applicable to those skilled in the art, and the embodiments of the present invention are not limited herein.

It is to be noted that, in this embodiment, the adjustable three-dimensional inductor component W2 includes a plurality of first traces 400 and a plurality of third traces 700. Each of the plurality of first traces 400 is arranged side by side with each other, and each of the plurality of third traces 700 is also arranged side by side with each other. The first trace 400 and the third trace 700 do not overlap each other, that is, the projection of the first trace 400 on the upper surface 100S and the projection of the third trace 700 on the upper surface 100S do not overlap each other. In addition, as shown in FIG. 17, the first trace 400 and the third trace 700 can be isolated from each other by the structure of the substrate 100.

A pair of third conductive contacts 203 are respectively connected to both end portions of the third trace 700. As shown in FIG. 18, the first conductive contact 201 is arranged in two rows of straight lines, and the third conductive contact 203 is also arranged in two rows of straight lines, and the first conductive contact 201 and the third conductive contact 203 are alternately arranged. .

Please refer to FIG. 19, FIG. 20 and FIG. 21 together. FIG. 19 is a perspective view of an adjustable three-dimensional inductor component according to another embodiment of the present invention, and FIG. 20 is a schematic diagram of FIG. A schematic cross-sectional view of the three-dimensional inductor component along the line B3-B3, and FIG. 21 is a top view of the adjustable three-dimensional inductor component of FIG. The similarities between the adjustable three-dimensional inductive component W2 of the present embodiment and the adjustable three-dimensional inductive component W1 of the foregoing embodiment are not described, and only the differences between the present embodiment and the foregoing embodiments will be described in detail below. Referring to FIG. 20, when both ends of a pound line 500 are bonded between two conductive contacts 201, 203 of the plurality of conductive contacts, the pound line 500 can electrically connect the first trace 400 to the third Trace 700 lines form a three-dimensional inductive path.

Referring to FIG. 21, when one end of each of the plurality of pound lines 500 is joined to a first conductive contact 201, and the other end of the pound line 500 is joined to a third conductive contact 203, the first The trace 400 is electrically connected to the third trace 700 to form a continuous three-dimensional inductance path. The adjustable three-dimensional inductor component W2 of the embodiment of the invention can be implemented by any of the foregoing three-dimensional inductor paths. For example, each pound line 500 can be diagonally joined between a pair of first conductive contacts 201 and a pair of adjacent third conductive contacts 203. The remaining process details in FIGS. 15 to 18 and FIGS. 19 to 21 are as described in FIGS. 1 to 5, 6 to 9, and 10 to 14, and those skilled in the art can easily infer the implementation thereof. The way is not mentioned here.

The above is only an embodiment of the present invention, and is not intended to limit the scope of the invention. It is still within the scope of patent protection of the present invention to make any substitutions and modifications of the modifications made by those skilled in the art without departing from the spirit and scope of the invention.

W1‧‧‧Adjustable Stereo Inductive Components

100‧‧‧Substrate

100S‧‧‧ upper surface of the substrate

101‧‧‧Base

102‧‧‧First circuit layer

104‧‧‧Second circuit layer

106‧‧‧ third circuit layer

1022P‧‧‧ pads

103‧‧‧First lining

105‧‧‧Second lining

107‧‧‧ Third lining

201‧‧‧First conductive contact

202‧‧‧Second conductive contacts

301‧‧‧First conductive parts

400‧‧‧ first line

500‧‧ ‧ pound line

Claims (10)

An adjustable three-dimensional inductor component comprises: a substrate having an upper surface; a plurality of conductive contacts formed on the upper surface; a plurality of conductive members embedded in the substrate, and each of the conductive members is electrically Connected to one of the conductive contacts; a first trace is embedded in the substrate, and the first trace is electrically connected to the two conductive members of the conductive members; a second trace The second trace is embedded in the substrate, and the second trace is electrically connected to the two conductive members of the conductive members; and a pound line, the two ends of the pound line are bonded to the conductive The two conductive contacts are connected to each other to form a three-dimensional inductance path. The adjustable three-dimensional inductor component of claim 1, wherein the first trace and the second trace are embedded in different layers of the substrate. The adjustable three-dimensional inductor component of claim 2, wherein the first trace and the second trace do not overlap each other. The adjustable three-dimensional inductor component of claim 1, wherein the first trace is electrically connected to the two first conductive members of the conductive members, and the first trace is respectively transmitted through the two first conductive The first electrical contact is electrically connected to one of the conductive contacts, and one end of the pound wire is bonded to one of the two first conductive contacts. The adjustable three-dimensional inductor component of claim 4, wherein the second trace is electrically connected to the two second conductive members of the conductive members, and the second trace is respectively transmitted through the two second conductive The second electrical contact is electrically connected to one of the conductive contacts, and the other end of the pound wire is bonded to one of the two second conductive contacts. The adjustable three-dimensional inductor component of claim 1, further comprising a third trace formed on the upper surface of the substrate, and the third trace is electrically connected to the The two conductive contacts of the conductive contacts, wherein when the two ends of the pound line are joined between the two conductive contacts of the conductive contacts, the pound line electrically connects the first trace to the first Three traces are formed to form the three-dimensional inductance path. The adjustable three-dimensional inductor component of claim 6, wherein the first trace and the third trace do not overlap each other. The adjustable three-dimensional inductor component of claim 6, wherein the first trace is electrically connected to the two first conductive members of the conductive members, and the first trace is respectively transmitted through the two first conductive The first wire is electrically connected to the two first conductive contacts of the conductive contacts, and the third wire is electrically connected to the two third conductive contacts of the conductive contacts. And one of the two first conductive contacts, and the other end of the pound line is bonded to one of the two third conductive contacts. The tunable three-dimensional inductor component of claim 1, wherein the substrate is at least one selected from the group consisting of a semiconductor substrate, a printed circuit board, and a ceramic substrate. An adjustable three-dimensional inductor component includes a substrate having an upper surface; a plurality of conductive contacts are formed on the upper surface; a plurality of conductive members are embedded in the substrate, and each of the conductive members is electrically connected One of the conductive contacts; the plurality of first traces are embedded in the substrate, and each of the first traces is electrically connected to the two conductive members of the conductive members; The wires are embedded in the substrate, and each of the second traces is electrically connected to the two conductive members of the conductive members; and a plurality of pound wires, each of which is coupled to the conductive wires The two conductive contacts are connected to each other to form a three-dimensional inductance path.