TWI548526B - Method for manufacturing laminated sheet and apparatus therefor - Google Patents

Description

Manufacturing method and manufacturing device of laminated sheet

The present invention relates to a method and apparatus for producing a laminated sheet.

A laminate sheet in which a metal foil or a resin sheet and a prepreg sheet are integrated is used for the production of a multilayer printed wiring board (see, for example, Patent Documents 1 to 4).

Here, such a laminated sheet is produced as follows. A resin varnish is coated on the metal foil or the resin sheet, and then the fiber substrate is laminated to impregnate the above resin varnish.

Further, the background art of the present invention also has Patent Document 5.

[Advanced technical literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2009-126917

Patent Document 2: Japanese Patent Laid-Open Publication No. 2010-47706

Patent Document 3: Japanese Patent Laid-Open Publication No. 2004-82687

Patent Document 4: Japanese Patent Laid-Open Publication No. 2003-249739

Patent Document 5: Japanese Patent Laid-Open Publication No. 2003-147172

In the production method disclosed in Patent Documents 1 to 4, after the resin varnish is applied onto a metal foil or a resin sheet, the fiber base material is laminated and the resin varnish is impregnated, so that the impregnation amount of the resin varnish to the fiber base material is adjusted. More difficult. For example, in Patent Document 3, a copper foil, a resin, and a woven fabric (or a non-woven fabric) are sandwiched by a pair of pressure rollers, and the resin is impregnated into the woven fabric (or non-woven fabric) in a certain amount. According to the method disclosed in Patent Document 3, when the impregnation amount of the resin is to be adjusted, it is necessary to finely adjust the pressure contact force of the pressure roller, which makes it difficult to adjust the impregnation amount of the resin.

According to the present invention, there is provided a method of producing a laminated sheet, wherein a first resin composition is supplied between a continuously fed support and a continuously fed fibrous substrate, and the support is separated from the fibrous substrate. A method for producing a laminated sheet in which the first resin composition is pressure-bonded to produce a laminated sheet, comprising: supplying a liquid first resin to one of the support body and at least one of the fiber base materials; And a second step of pressure-bonding one of the one surface of the support and the one of the fibrous base materials via the first resin composition; wherein, in the first step, After adjusting the supply position of the supply means for supplying the liquid first resin composition, the liquid first resin composition is supplied to at least one of one side of the support and one of the fiber base materials.

According to the invention, in the first step, after the supply position of the liquid first resin composition by the supply means is adjusted, at least one of the one side of the support body and one of the fiber base materials is supplied with the liquid. A first resin composition.

Thereby, the impregnation amount of the first resin composition to the fiber base material can be adjusted. Thereby, a laminated sheet of the desired impregnation amount can be obtained.

Furthermore, the present invention also provides a manufacturing apparatus for a laminated sheet, comprising: means for continuously feeding out a support; means for continuously feeding out a fibrous base material; and supplying a liquid to the support body and the fibrous base material a means for supplying a resin composition; and a pressure bonding means for pressure-bonding the support body and the fiber base material via the first resin composition; and an adjustment means for adjusting a supply position of the supply means .

Here, the "adjustment of the supply position of the supply means" includes a case where the position of the supply means itself is moved to adjust the supply position, and when the supply means itself is not moved, the first change is made. Both the supply port (discharge port) of the resin composition and the supply position of the supply means are adjusted.

As described above, according to the present invention, a desired laminated sheet can be obtained.

The above and other objects, features, and advantages of the invention will be apparent from

Hereinafter, the method for producing a laminated sheet of the present invention and the laminated sheet will be described in detail based on preferred embodiments of the drawings. In the drawings, the same components are denoted by the same reference numerals, and the description is omitted as appropriate.

1 is a cross-sectional view showing an embodiment of a laminated sheet of the present invention, and FIG. 2 is a schematic cross-sectional view showing another structural example of the laminated sheet of the present invention, and FIGS. 3 to 5 are views showing a method of manufacturing the laminated sheet of the present invention. An example of the structure of a laminated sheet manufacturing apparatus used in the form.

<Laminated film>

First, an embodiment of the laminated sheet of the present invention will be described. Further, the prepreg can be obtained by cutting the laminated sheet into a predetermined size.

In the following description, the upper side in FIG. 1 (the same applies to the following drawings) will be referred to as "upper" and the lower side will be referred to as "lower". Further, Fig. 1 (the same applies to the following drawings) is exaggerated in the thickness direction (vertical direction in the drawing).

The laminated sheet 1 shown in Fig. 1 has a strip shape as a whole, and includes a thin plate-like (flat-plate) support 5, a thin plate-like (flat-plate) fiber base material 2, a first resin layer 3, and a second resin layer 4. The first resin layer 3 is coated on one side (upper surface) side of the fiber base material 2, and is composed of a first resin composition, and the second resin layer 4 is coated on the other surface (lower surface) side of the fiber base material 2, and It is composed of a second resin composition. The support 5 and the fiber base 2 are joined together via the first resin layer 3 (first resin composition). Further, the laminated sheet 1 is used by being cut into a predetermined size.

The support 5 is made of, for example, a metal foil (metal layer) or a resin film.

The metal foil is, for example, subsequently processed into a portion such as a wiring portion (circuit). The metal material constituting the metal foil may, for example, be copper or a copper alloy, an aluminum or aluminum alloy, an iron or iron alloy, or stainless steel. The metal material constituting the metal foil is preferably a copper or copper alloy from the viewpoint of excellent conductivity, easy circuit formation by etching, and low cost. Further, the support 5 may be an extremely thin metal foil (for example, having a thickness of 2 to 5 μm). However, from the viewpoint of handleability, the support 5 may be formed by providing the above-mentioned ultra-thin metal foil on a carrier material.

In addition, examples of the resin material constituting the resin film include a polyester resin such as a fluorine resin, a polyimide resin, a polybutylene terephthalate or a polyethylene terephthalate. Further, among these, the resin material constituting the resin film is preferably polyethylene terephthalate from the viewpoint of excellent heat resistance and low cost. Moreover, it is preferable that the resin film is subjected to a peelable treatment on the surface of the resin film on the side of the first resin layer 3. Thereby, the support body 5 and the first resin layer 3 can be easily separated later.

The average thickness of the support 5 is not particularly limited, but is preferably about 8 to 70 μm, more preferably about 12 to 40 μm.

The fibrous base material 2 has a function of enhancing the mechanical strength of the laminated sheet 1.

The fiber base material 2 may be, for example, a glass fiber base material such as a glass woven fabric or a glass nonwoven fabric; a polyamide resin such as a polyamide resin fiber, an aromatic polyamide resin fiber, or a wholly aromatic polyamide resin fiber; Resin fiber; polyester resin fiber such as polyester resin fiber, aromatic polyester resin fiber, or wholly aromatic polyester resin fiber; woven fabric or non-woven fabric as a main component such as polyimine resin fiber or fluororesin fiber A synthetic fiber base material, or a fibrous base material such as an organic fiber base material such as a paper fiber base material containing kraft paper, cotton linter paper, a mixed paper of short-hair fiber and kraft pulp, or the like as a main component.

Among these, the fibrous base material 2 is preferably a glass fiber base material. By using the glass fiber substrate, the mechanical strength of the laminated sheet 1 can be further improved. Further, the effect of reducing the thermal expansion coefficient of the laminated sheet 1 can be achieved.

Examples of the glass constituting the glass fiber base material include E glass, C glass, A glass, S glass, D glass, NE glass, T glass, and H glass. Among these, the glass is preferably S glass or T glass. Thereby, the coefficient of thermal expansion of the glass fiber base material can be made relatively small, so that the thermal expansion coefficient of the laminated sheet 1 can be minimized.

The average thickness of the fibrous base material 2 is not particularly limited, but is preferably 100 μm or less, more preferably 50 μm or less, and particularly preferably 10 to 30 μm. By using the fiber base material 2 of this thickness, it is possible to reduce the thickness of the laminated sheet 1 while ensuring the mechanical strength of the laminated sheet 1. Moreover, the workability and dimensional stability of the laminated sheet 1 can be improved.

The first resin layer 3 is provided on one surface side of the fiber base material 2, and the second resin layer 4 is provided on the other surface side. In addition, the first resin layer 3 is composed of a first resin composition, and the second resin layer 4 is composed of a second resin composition having a composition different from that of the first resin composition.

According to this configuration, the composition of the resin composition can be appropriately set in response to the characteristics required for each resin layer.

Further, of course, the first resin composition and the second resin composition may have the same composition.

In the present embodiment, since the wiring portion (conductor pattern) is formed on the first resin layer 3, the first resin composition is set to have a composition excellent in adhesion to the metal. Further, in the second resin layer 4 of the prepreg obtained from the laminated sheet 1, the wiring portion or other fibrous substrate of the other prepreg obtained by the laminated sheet 1 can be surely embedded, and the second resin is composed. The system is set such that the flexibility (flexibility) of the second resin layer 4 is higher than that of the first resin layer 3. Such respective resin compositions are described in detail later.

As shown in Fig. 1, in the present embodiment, a part of the thickness direction of the fiber base material 2 is impregnated with a first resin composition (first resin layer 3) (hereinafter referred to as "first impregnation portion 31"). The second resin composition (second resin layer 4) is impregnated into the remaining portion of the fibrous base material 2 in which the first resin composition is not impregnated (hereinafter referred to as "second impregnation portion 41"). Thereby, a part of the first impregnation portion 31 of the first resin layer 3 and a part of the second impregnation portion 41 of the second resin layer 4 are located in the fiber base material 2. In the fiber base material 2, the first impregnation portion 31 (the lower surface of the first resin layer 3) is in contact with the second impregnation portion 41 (the upper surface of the second resin layer 4). In other words, the first resin composition is impregnated into the fiber base material 2 from the upper surface side of the fiber base material 2, and the second resin composition is impregnated into the fiber base material 2 from the lower surface side of the fiber base material 2, and the resin is used. The composition fills the voids in the fibrous substrate 2.

With this configuration, the fiber base material 2 can be protected by the first resin layer 3 and the second resin layer 4. As a result, even when an impact from the outside is applied to the laminated sheet 1, the fiber base material 2 itself can be prevented from being damaged, and the effect of improving the mechanical strength of the laminated sheet 1 by the fiber base material 2 can be surely exhibited.

Further, when the interface 20 between the first impregnation portion 31 and the second impregnation portion 41 in the fiber base material 2 is microscopically observed, the interface 20 is formed with irregularities (see an enlarged detailed view in Fig. 1). Thereby, not only the anchor effect of each resin layer on the fiber base material 2 but also the adhesiveness between the resin layers can be improved, and the peeling of each resin layer from the fiber base material 2 can be prevented more reliably. Thereby, the durability of the laminated sheet 1 can be improved.

As described above, the flexibility of the second resin layer 4 is higher than that of the first resin layer 3. Upon obtaining such a magnitude relation, the preferred system setting the average thickness of the first portion 31 is impregnated t _a1 [μm] greater than the average thickness of the second portion 41 is impregnated _{t b1 [μm] (t a1} > t b1). The reasons are as follows.

When the flexibility of the second resin layer 4 is higher than that of the first resin layer 3, the thermal expansion coefficient (linear expansion coefficient) of the second resin layer 4 tends to be larger than that of the first resin layer 3. Therefore, if the set of "t _a1> t _b1" opposite size relationship "t _a1 <t _b1" when the laminated sheet 1 is heated, the inside of the fiber substrate 2, the second portion 41 there will be more impregnation of 1 The deformation of the impregnation portion 31 is greater, and there is a possibility that warpage may occur at a portion of the fibrous base material 2. The warpage at the portion of the fiber base material 2 has a considerable influence on the entire laminated sheet 1, and there is a possibility that warpage of the laminated sheet 1 itself is caused.

On the other hand, when "t _a1 > t _b1 " is set, the occurrence of the above-described problem can be solved, and the warpage of the laminated sheet 1 can be prevented or suppressed.

In addition, the "linear expansion coefficient of the second resin layer 4 is higher than the linear expansion coefficient of the first resin layer 3" means that the average linear expansion coefficient in the plane direction and/or the thick direction at 25 ° C to 300 ° C is high.

Specifically, when the maximum thickness of the fiber base material 2 is T [μm], the average thickness t _{a1 is} preferably 0.7T to 0.95T, more preferably 0.8T to 0.9T. By setting the average thickness t _a1 within this range, it is possible to surely prevent the peeling of the respective resin layers from the fiber base material 2 while more reliably preventing or suppressing the warpage of the laminated sheet 1.

In addition, the average thickness of the portion (the first non-impregnated portion 32) in which the first resin layer 3 is removed from the first impregnation portion 31 is t _a2 [μm], and the second resin layer 4 is removed from the second impregnation portion 41. When the average thickness of the (second non-impregnated portion 42) is t _b2 [μm], it is preferable to satisfy the relationship of t _a2 ≦t _b2 and more preferably satisfy the relationship of 1.5 × t _a2 < t _b2 . By satisfying such a relationship, it is possible to impart high rigidity to the upper portion of the laminated sheet 1, so that the upper surface of the laminated sheet 1 (the support 5 on the first non-impregnated portion 32) can be formed with high workability. Wiring department. On the other hand, since the second resin layer 4 can have high flexibility and a sufficient thickness, it is in the second resin layer 4 (second non-impregnated portion 42) of the prepreg obtained from the laminated sheet 1. When the wiring portion or other fiber substrate of the other prepreg obtained by the laminated sheet 1 is buried, the burying can be surely performed. That is, the embedding property of the wiring portion of the other prepreg obtained by the laminated sheet 1 and other fibrous substrates can be improved.

Specifically, the average thickness t _{a2 is} preferably 2 to 15 μm, more preferably 3 to 10 μm. On the other hand, the average thickness t _{b2 is} preferably 3 to 20 μm, more preferably 5 to 15 μm.

Further, in the configuration shown in FIG. 1, the laminated sheet 1 has a magnitude relationship between the average thickness t _a2 and the average thickness t _b2 as t _a2 <t _b2 , but is not limited thereto, and may be, for example, t _a2 >t _b2 . Can be t _a2 =t _b2 .

In addition, in order to obtain the first resin layer 3 and the second resin layer 4 having the above characteristics, the first resin composition and the second resin composition are preferably formed as follows.

The first resin composition contains, for example, a curable resin, and may contain at least one of a curing aid (for example, a curing agent, a curing accelerator, and the like) and an inorganic filler.

In order to improve the adhesion to the metal (support 5) constituting the wiring portion, for example, a method of using a curable resin excellent in adhesion to metal and a curing aid for improving adhesion to metal (for example, for example) The method of the hardening agent, the hardening accelerator, etc.), the inorganic filler used, the method of being soluble in an acid, the method of using the inorganic filler and the organic filler, and the like.

The curable resin is preferably, for example, a urea (urea) resin, a melamine resin, a bismaleimide resin, a polyurethane resin, and a benzoate. A thermosetting resin such as a ring resin, a cyanate resin, a bisphenol S type epoxy resin, a bisphenol F type epoxy resin, and a copolymerized epoxy resin of bisphenol S and bisphenol F. Among these, a curable resin (a prepolymer including a cyanate resin) is particularly preferably used as the curable resin.

By using a thermosetting resin (particularly a cyanate resin), the coefficient of thermal expansion of the laminated sheet 1 (hereinafter also referred to as "low thermal expansion") can be reduced. Further, an improvement in electrical characteristics (low dielectric constant, low dielectric loss) of the laminated sheet 1 can be achieved.

The cyanate resin is obtained by, for example, reacting a halogenated cyanide compound with a phenol, and if necessary, prepolymerizing by a method such as heating.

Specific examples of the cyanate resin include a bisphenol type such as a novolac type cyanate resin, a bisphenol A type cyanate resin, a bisphenol E type cyanate resin, and a tetramethyl bisphenol F type cyanate resin. Cyanate resin and the like. Among these, the cyanate resin is preferably a novolac type cyanate resin.

When the phenolic-type cyanate resin is used, after the substrate 10 (see FIG. 7) described later is produced, the crosslinking density of the first resin layer 3 after curing increases, so that the cured first resin layer 3 can be obtained. The heat resistance and flame retardancy of the substrate are improved.

Here, the improvement in heat resistance is considered to be due to the formation of three phenolic cyanate resins after the hardening reaction. The reason for the ring. Further, the improvement of the flame retardancy is considered to be that the phenolic type cyanate resin has a high proportion of the benzene ring in the structure, so that the benzene ring is easily carbonized (graphitized), resulting in carbonization in the hardened first resin layer 3. Part of the reason.

Further, when the phenolic-type cyanate resin is used, even if the laminated sheet 1 is made thinner (for example, having a thickness of 35 μm or less), the laminated sheet 1 can be provided with excellent rigidity. Moreover, since the cured product is excellent in rigidity at the time of heating, the obtained substrate 10 is also excellent in reliability when the semiconductor element 500 (see FIG. 8) is mounted.

Specifically, a novolac type cyanate resin represented by the formula (I) can be used.

[Chemical 1]

In the phenolic cyanate resin represented by the formula (I), the average repeating unit number "n" is not particularly limited, but is preferably 1 to 10, more preferably 2 to 7. When the average repeating unit number "n" is less than the above lower limit value, since the novolac type cyanate resin is easily crystallized, the solubility in a general-purpose solvent is lowered. Therefore, depending on factors such as the content of the phenolic cyanate resin, the varnish of the first resin composition may be difficult to obtain. Further, when the laminated sheet 1 is produced, stickiness occurs, and when the prepreg obtained by the laminated sheet 1 comes into contact with each other, adhesion occurs, or the first resin composition of one of the prepreg sheets moves to another The phenomenon of a prepreg (transfer). On the other hand, when the average number of repeating units "n" exceeds the above upper limit value, the varnish viscosity of the first resin composition becomes too high, and the efficiency in producing the laminated sheet 1 (formability of the first resin layer 3) ) Reduce the situation.

When a curing agent or a curing accelerator for improving the adhesion to the metal is used in combination, a phenolic phenol resin, a cresol novolac resin, or a phenolic phenol resin such as a bisphenol A phenol resin may be used in addition to the curable resin. Phenolic resin; unmodified phenolic phenol resin, or phenolic resin such as phenolic phenolic resin modified by tung oil, linseed oil, walnut oil, etc.; bisphenol A epoxy resin, double Bisphenol type epoxy resin such as phenol F epoxy resin; phenolic epoxy resin such as phenolic epoxy resin and cresol novolac epoxy resin; epoxy resin such as biphenyl type epoxy resin; unsaturated polyester resin, ortho benzene Other thermosetting resins such as diallyl dicarboxylate resin and polyfluorene oxide resin.

Further, in the curable resin, for example, an ultraviolet curable resin, an anaerobic resin, or the like can be used in addition to the thermosetting resin.

The content of the curable resin is not particularly limited, but is preferably 5 to 50% by weight, more preferably 10 to 40% by weight based on the total of the first resin composition. When the content of the curable resin is less than the above lower limit, the varnish viscosity of the first resin composition may be too low depending on the type of the curable resin, etc., and it may be difficult to form the laminated sheet 1. On the other hand, when the content of the curable resin is more than the above-mentioned upper limit, the amount of the other component is too small, and the mechanical strength of the laminated sheet 1 may be lowered depending on the type of the curable resin or the like.

The above-mentioned curing aid (for example, a curing agent, a curing accelerator, etc.) may, for example, be a tertiary amine such as triethylamine, tributylamine or diazabicyclo[2,2,2]octane; 2-ethyl- 4-ethylimidazole, 2-phenyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, 2 ,4-diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-three 2,4-Diamino-6-(2'-undecylimidazolyl)-ethyl-s-three 2,4-Diamino-6-[2'-ethyl-4-methylimidazolyl-(1')]-ethyl-s-three An imidazole compound such as 1-benzyl-2-phenylimidazole.

Among these, the curing aid is preferably an imidazole compound having two or more functional groups selected from the group consisting of an aliphatic hydrocarbon group, an aromatic hydrocarbon group, a hydroxyalkyl group, and a cyanoalkyl group, and more preferably a 2-phenyl-4 group. , 5-dimethylol imidazole.

Further, in the first resin composition, for example, zinc naphthenate, cobalt naphthenate, tin octylate, cobalt octoate, cobalt (II) acetoacetate, and cobalt (III) acetyl acetonate may be used in combination. And other organic metal salts; phenolic compounds such as phenol, bisphenol A, and indophenol; and organic acids such as acetic acid, benzoic acid, salicylic acid, p-toluenesulfonic acid, and the like.

When a curing aid is used, the content thereof is preferably from 0.01 to 3% by weight, more preferably from 0.1 to 1% by weight based on the total of the first resin composition.

Further, the first resin composition preferably contains an inorganic filler. Thereby, even if the laminated sheet 1 is made thin (for example, the thickness is 35 μm or less), the laminated sheet 1 excellent in mechanical strength can be obtained. Moreover, the low thermal expansion of the laminated sheet 1 can also be improved.

Examples of the inorganic filler include cerium oxide such as talc, alumina, glass, and molten cerium oxide, or mica, aluminum hydroxide, magnesium hydroxide, or the like. Further, in accordance with the purpose of use of the inorganic filler, a crushed shape or a spherical shape can be appropriately selected. Among these, from the viewpoint of excellent low thermal expansion property, the inorganic filler is preferably cerium oxide, more preferably molten cerium oxide (especially spherical molten cerium oxide).

The average particle diameter of the inorganic filler is preferably 0.01 to 5.0 μm, more preferably 0.2 to 2.0 μm. In addition, the average particle diameter can be measured, for example, by a particle size distribution meter ("LA-500" manufactured by HORIBA).

In particular, the inorganic filler is preferably a spherical molten cerium oxide having an average particle diameter of 5.0 μm or less, more preferably a spherical molten cerium oxide having an average particle diameter of 0.01 to 2.0 μm (particularly 0.1 to 0.5 μm). Thereby, the varnish of the first resin composition can be more reliably impregnated into the fiber base material 2, and the inside of the fiber base material 2 of the first resin layer 3 (first impregnation portion 31) to be formed can be formed. On the upper side, the unevenness is formed more reliably.

Further, in order to improve the adhesion between the first resin layer 3 and the wiring portion, an inorganic filler which is soluble in an acid may be used as the inorganic filler. By this, when the wiring portion (conductor layer) is formed on the first resin layer 3 by a plating method, the adhesion (plating adhesion) of the wiring portion to the first resin layer 3 can be improved. The inorganic filler which is soluble in an acid may, for example, be a metal oxide such as calcium carbonate, zinc oxide or iron oxide.

Further, in order to improve the adhesion between the first resin layer 3 and the wiring portion, an inorganic filler and an organic filler may be used in combination. The organic filler is, for example, a resin-based filler such as a liquid crystal polymer or a polyimide.

In the case of using an inorganic filler, the content thereof is not particularly limited, but is preferably 20 to 70% by weight, more preferably 30 to 60% by weight based on the total of the first resin composition.

When a curable resin is used as the curable resin (particularly a phenolic cyanate resin), it is preferred to use an epoxy resin (substantially free of halogen atoms). Examples of the epoxy resin include a phenol novolak type epoxy resin, a bisphenol type epoxy resin, a naphthalene type epoxy resin, and an aromatic alkylene type epoxy resin.

Among these, the epoxy resin is preferably an aromatic alkylene type epoxy resin. By using an aromatic paraffin-type epoxy resin, the cured first resin layer 3 (the obtained substrate) can improve the heat resistance of the moisture-absorbing solder (solder heat resistance after moisture absorption) and the flame retardancy.

The "aromatic alkylene type epoxy resin" refers to an epoxy resin having one or more arylalkylene groups in a repeating unit, and examples thereof include a benzoyl type epoxy resin and a biphenyl dimethylene type epoxy resin. Resin, etc. Among these, the aromatic alkylene type epoxy resin is preferably a biphenyl dimethylene type epoxy resin.

Specifically, a biphenyl dimethylene type epoxy resin represented by the formula (II) can be used.

[Chemical 2]

The average repeating unit number "n" of the biphenyl dimethylene type epoxy resin represented by the formula (II) is not particularly limited, but is preferably 1 to 10, more preferably 2 to 5. When the average repeating unit number "n" is less than the above lower limit value, since the biphenyl dimethylene type epoxy resin is easily crystallized, the solubility in a general-purpose solvent is lowered. Therefore, there is a case where the varnish of the first resin layer composition is difficult to access. On the other hand, when the average repeating unit number "n" exceeds the above upper limit value, the varnish viscosity of the first resin composition may increase depending on the solvent to be used. In this case, the first resin composition cannot be sufficiently impregnated into the fiber base material 2, and as a result, the molding failure of the laminated sheet 1 and the mechanical strength are lowered.

In the case of using an epoxy resin, the content thereof is not particularly limited, and is preferably from 1 to 55% by weight, more preferably from 2 to 40% by weight, based on the total of the first resin composition.

Further, a component (including a resin or the like) for improving the adhesion to the metal may be added to the first resin composition. The component may, for example, be a phenoxy resin, a polyvinyl alcohol resin, a coupling agent or the like.

Examples of the phenoxy resin include a phenoxy resin having a bisphenol skeleton, a phenoxy resin having a naphthalene skeleton, and a phenoxy resin having a biphenyl skeleton. Further, a phenoxy resin having a structure of a plurality of skeletons may be used.

Among these, a phenoxy resin preferably uses a phenoxy resin having a biphenyl skeleton and a bisphenol S skeleton. Thereby, the glass transition temperature of the phenoxy resin can be increased by the rigidity of the biphenyl skeleton, and the adhesion between the phenoxy resin and the metal can be improved by utilizing the presence of the bisphenol S skeleton. As a result, the heat resistance of the first resin layer 3 can be improved, and the adhesion of the wiring portion (metal) to the first resin layer 3 can be improved when the multilayer substrate is manufactured.

Further, the phenoxy resin is preferably a phenoxy resin having a bisphenol A skeleton and a bisphenol F skeleton. Thereby, in the production of the multilayer substrate, the adhesion of the wiring portion to the first resin layer 3 can be further improved.

The molecular weight of the phenoxy resin is not particularly limited, and the weight average molecular weight is preferably 5,000 to 70,000, more preferably 10,000 to 60,000.

In the case of using a phenoxy resin, the content thereof is not particularly limited, and is preferably from 1 to 40% by weight, more preferably from 5 to 30% by weight based on the total of the first resin composition.

The coupling agent is preferably one or more selected from the group consisting of, for example, an epoxy decane coupling agent, a titanate coupling agent, an amino decane coupling agent, and a polyoxygen oxy-type coupling agent.

In the case of using a coupling agent, the content thereof is not particularly limited, and is preferably 0.05 to 3 parts by weight, more preferably 0.1 to 2 parts by weight, per 100 parts by weight of the inorganic filler.

Further, the first resin composition may contain additives such as an antifoaming agent, a leveling agent, a pigment, and an antioxidant, in addition to the components described above.

The second resin layer 4 is different in composition from the first resin composition. Specifically, the second resin layer 4 is set to have a higher flexibility than the first resin layer 3 . In addition, the "different composition" means that the first resin composition and the second resin composition are not composed of the same resin composition, and for example, at least one of the components constituting the first resin composition is different from the second resin composition. And the case where the component content of the first resin composition is different from that of the second resin composition. More specifically, the composition of the second resin composition is different from that of the first resin composition by at least one of the type and content of the resin, the filler, and the like, and the molecular weight (average number of repeating units) of the resin. Things. As a result, the second resin layer 4 has characteristics different from those of the first resin layer 3.

The thermal expansion coefficient of the surface direction of the second resin layer 4, that is, the longitudinal direction (X direction) and the width direction (Y direction) of the laminated sheet 1 is not particularly limited, but is preferably 20 ppm/° C. or less, and more preferably 5 ~16ppm/°C. When the thermal expansion coefficient of the second resin layer 4 is within the above range, the laminated sheet 1 can have high connection reliability, and the obtained substrate is excellent in mounting reliability to a semiconductor element or the like.

Further, the thermal expansion coefficient in the plane direction of the entire laminated sheet 1 is not particularly limited, but is preferably 16 ppm/° C. or less, more preferably 12 ppm/° C. or less, and particularly preferably 5 to 10 ppm/° C. If the thermal expansion coefficient of the laminated sheet 1 is within the above range, the crack resistance of the obtained substrate against repeated thermal shock can be improved.

The thermal expansion coefficient in the surface direction can be evaluated, for example, by using a TMA apparatus (manufactured by TA Instruments Co., Ltd.) at a temperature rise of 10 ° C /min.

In addition, the laminated sheet 1 may be provided with, for example, a resin film (not shown) on the surface of the second resin layer 4 opposite to the fiber base material 2. In this case, the laminated sheet 1 is used after peeling off the resin film. Further, the resin film can be the same as those described for the resin film as the support 5 .

Next, another structural example of the laminated sheet will be described. In addition, the description will be made focusing on the difference from the laminated sheet 1, and the same matters will be omitted.

As shown in Fig. 2 (a), the laminated sheet 1A is not impregnated with the first resin composition (first resin layer 3) and the second resin composition (second resin layer 4) in the thickness direction of the fiber base material 2. For example, by adjusting the position at which the first resin composition is supplied, the first resin composition is dried, and a structure in which the first resin composition is hardly impregnated as shown in Fig. 2(a) can be formed. In addition, when the viscosity of the varnish-like second resin composition is extremely high, or as shown in FIG. 5, when the heating is performed by the bonding device 65, the melt viscosity of the flaky second resin composition is extremely high. Thus, the structure in which the second resin composition is hardly impregnated as shown in Fig. 2(a) can be obtained.

As shown in Fig. 2 (b), the laminated sheet 1B is impregnated with the first resin composition as a whole in the thickness direction of the fibrous base material 2, but the second resin composition is not impregnated.

As shown in Fig. 2 (c), the laminated sheet 1C is impregnated with the second resin composition as a whole in the thickness direction of the fibrous base material 2, but the first resin composition is not impregnated. For example, by adjusting the position at which the first resin composition is supplied, the first resin composition is dried, and the first resin composition is hardly impregnated as shown in FIG. 2(c).

As shown in Fig. 2(d), the laminated sheet 1D is partially impregnated with the first resin composition in the thickness direction of the fibrous base material 2, but is not impregnated with the second resin composition.

As shown in Fig. 2(e), the laminated sheet 1E is partially impregnated with the second resin composition in the thickness direction of the fibrous base material 2, but is not impregnated with the first resin composition. For example, by adjusting the position at which the first resin composition is supplied, the first resin composition is dried, and the first resin composition may be hardly impregnated as shown in FIG. 2(e).

As shown in FIG. 2(f), the laminated sheet 1F omits the second resin layer (second resin composition). Moreover, the structure shown in the figure is not impregnated with the first resin composition in the thickness direction of the fiber base material 2. For example, by adjusting the position at which the first resin composition is supplied, the first resin composition is dried, and the first resin composition may be hardly impregnated as shown in FIG. 2(f).

In addition, the first resin composition is impregnated in the entire thickness direction of the fiber base material 2, or the first resin composition is partially impregnated in the thickness direction of the fiber base material 2.

Similarly to the laminated sheet 1 described above, the laminated sheets 1A to 1E described above may have the same composition of the first resin composition and the second resin composition, or may have the same composition.

<Laminar sheet manufacturing apparatus>

Next, the laminated sheet manufacturing apparatus used in the embodiment of the method for producing a laminated sheet of the present invention, that is, the structural example of the laminated sheet manufacturing apparatus used in the production of the laminated sheet will be described. Description will be made with reference to Figs. 3 to 5 .

The outline of the manufacturing apparatus of the present invention is as follows.

The manufacturing apparatus includes: means 621 for continuously feeding out the support 5; means 623 for continuously feeding out the fibrous base material 2; and supplying a liquid first resin composition between the support 5 and the fibrous base 2 Means 611 to 613 (or 611); and a pressure bonding means 625 for pressing the support 5 and the fiber base material 2 via the first resin composition. Further, the manufacturing apparatus includes adjustment means 661 to 663 (or means for changing the position of the supply means 611) for adjusting the supply position of the liquid first resin composition by the supply means.

The laminated sheet manufacturing apparatus 6 shown in Fig. 3, the laminated sheet manufacturing apparatus 6a shown in Fig. 4, and the laminated sheet manufacturing apparatus 6b shown in Fig. 5 are apparatuses for continuously producing a laminated sheet. The laminated sheet manufacturing apparatuses 6 and 6a can correspond to the first embodiment and the second embodiment of the method for producing a laminated sheet to be described later. Further, the laminated sheet manufacturing apparatus 6b can correspond to the third embodiment and the fourth embodiment of the method for producing a laminated sheet to be described later.

(Laminated sheet manufacturing apparatus 6)

First, the laminated sheet manufacturing apparatus 6 will be described.

As shown in FIG. 3, the laminated sheet manufacturing apparatus 6 is equipped with rolls 621-628, nozzles (slit coater) 611-614, and drying apparatus 64.

The roller 621 is a means for feeding out (circling) the object, and the support 5 is wound around the roller 621. The roller 621 is configured to be rotated by a motor (drive source) (not shown), and when the roller 621 is rotated, the support 5 is fed from the roller 621 (continuous supply).

Further, the roller 623 is a means for feeding out an object, and the fiber base material 2 is wound around the roller 623. The roller 623 is configured to be rotated by a motor (not shown), and when the roller 623 is rotated, the fiber base material 2 is fed from the roller 623 (continuous supply).

Further, the roller 622 is a means for regulating the moving direction of the support 5, and is provided at the rear stage of the roller 621.

Further, the roller 624 is a means for regulating the moving direction of the fiber base material 2, and is provided in the rear stage of the roller 623.

Further, the roller 625 is a means for guiding the moving direction of the object, and the means for bonding the objects to each other (that is, the support 5 and the fiber base material 2) are provided in the rear stage of the rollers 622 and 624.

The support body 5 is conveyed along the outer peripheral surface of the roller 625 so as to directly contact the outer peripheral surface. At this time, the support body 5 is in contact with the 1/4 or more of the circumference of the roller 625.

Further, the fiber base material 2 is also conveyed so as to be in contact with the outer peripheral surface along the outer peripheral surface of the roller 625. The fiber base material 2 is in a position where the roller 625 contacts the support body 5, and contacts the roller 625 via the support body 5. Among them, the fiber substrate The contact area between the 2 and the roller 625 is smaller than the contact area between the support 5 and the roller 625. Specifically, the support 5 is in surface contact with 1/4 to 1/2 of the circumference of the roller 625, whereas the fiber substrate 2 is in surface contact with 1/6 to 1/4 of the circumference of the roller 625. . Thereby, the tension applied to the fiber base material 2 can be reduced, and the deformation of the fiber base material 2 can be suppressed.

Further, although detailed later, the fibrous base material 2 and the support 5 are stretched in the feeding direction, and tension is applied thereto.

Thereby, the support body 5 and the fiber base material 2 can be pressure-bonded via the 1st resin composition by the outer peripheral surface of the roll 625. Further, in the present embodiment, the roller which is disposed opposite to the roller 625 and which presses the support 5 and the fiber base material 2 is not disposed.

Here, the roller 625 is a metal roller whose surface is made of at least metal. Such a metal roll has high surface smoothness and can stably support the support 5, the first resin composition, and the fiber base 2. Therefore, the weight distribution of the fiber base material 2 in the width direction of the first resin composition can be made uniform.

Further, the roller 626 and the roller 627 are means for regulating the moving direction of the object, respectively, and are disposed in this order in the subsequent stage of the roller 625.

Further, the roller 628 is a means for winding up the object (that is, the laminated sheet 1). The roller 628 is configured to rotate by a motor (not shown), and when the roller 628 rotates, the laminated sheet 1 is wound up on the roller 628.

Each of the nozzles 611 to 613 is a means for discharging (supplying) a first resin composition which is liquid (varnish-like) at normal temperature (25 ° C) (for example, a slit coater). This supply means can adjust the supply position of the liquid first resin composition. That is, the supply means can select at least one of the one side of the support body 5, or one of the fiber base materials 2, or one of the support body 5 and one of the fiber base materials 2, and supply A liquid first resin composition. More specifically, the supply means is provided with nozzles 611 to 613, and the nozzle 611 discharges the liquid first resin composition toward one side of the support body 5, and the nozzle 612 discharges the first resin composition toward one side of the fiber base material 2. The nozzle 613 discharges a liquid first resin composition between one surface of the support 5 and one side of the fiber base material 2. When the laminated sheet 1 is produced, at least one nozzle that discharges the first resin composition is selected from the nozzles 611 to 613. Thereby, the supply position of the supply means (that is, the position of the discharge port) is adjusted. This selection is performed by opening and closing the valves (adjustment means) 661 to 663 provided in the flow paths on the downstream side of the nozzles 611 to 613.

In addition, the term "liquid" is not limited to liquids, but also covers the concept of fluidity.

Further, the nozzle 614 is a means for discharging (supplying) a second resin composition in a liquid state (varnish-like) at a normal temperature (25 ° C) toward the surface of the support 5 opposite to the first resin composition (for example, a slit type) Coating machine).

Drying device 64 is disposed between nozzle 614 (roller 625) and roller 626. In the present embodiment, the drying device 64 is configured to dry the object while the object (the second resin composition, the fiber base material 2, the first resin composition, and the support 5) is conveyed horizontally. Thereby, the tension applied to the fibrous base material 2 can be made relatively small, and the internal strain can be prevented or suppressed.

Further, the drying device 64 is configured to dry the object by heating the object. In the dried laminated sheet, both the first resin layer 3 and the second resin layer 4 are in a B-stage state, and are in a sheet form.

(Laminated sheet manufacturing apparatus 6a)

Next, the laminated sheet manufacturing apparatus 6a will be described. In addition, the description of the difference from the laminated sheet manufacturing apparatus 6 will be mainly described, and the description of the same matters will be omitted.

As shown in FIG. 4, in the laminated sheet manufacturing apparatus 6a, the nozzles 612 and 613 are omitted from the laminated sheet manufacturing apparatus 6, and the nozzle 611 which is a supply means of the liquid first resin composition is provided so as to be unillustrated. The actuator (adjustment means) changes the position. That is, the nozzle 611 is moved or moved in such a manner that one of the support body 5, one of the fiber base materials 2, or the support body 5 and the fiber base material 2 can be moved to one of the support bodies 5, or the like. change. When the laminated sheet 1 is produced, the discharge port position and orientation of the nozzle 611 are selected, and one of the support body 5, one of the fiber base materials 2, or the support body 5 and the fiber base material 2 is at least one of The second resin composition was discharged.

More specifically, the liquid first resin composition is supplied from one of the nozzles 611 toward the support 5 .

When the liquid first resin composition is supplied from one of the nozzles 611 to the fiber base material 2, the liquid first resin composition is supplied toward the space supported by the roller 624. According to this, the degree of impregnation of the first resin composition with respect to the fibrous base material 2 can be improved.

When the liquid first resin composition is supplied from the nozzle 611 toward the support 5 and the fiber base material 2, the first resin composition is supplied to the space surrounded by the fiber base material 2 and the support body 5. . More specifically, the liquid first resin composition is supplied from the nozzle 611 between the support body 5 that is in contact with the roller 625 and the fiber base material 2 that is opposite to the support body 5 and that is opposite to the roller 625. In the present embodiment, the first resin composition is supplied to the support 5 supported by the roller 625.

Further, the nozzle 611 can adjust the supply position of one side of the support body 5, that is, the supply position of the first resin composition in the feed direction of the support body 5, by changing its position.

Similarly, the nozzle 611 can adjust the supply position of one side of the fiber base material 2, that is, the supply position of the first resin composition in the direction in which the fiber base material 2 is fed, by changing its position.

(Laminated sheet manufacturing apparatus 6b)

Next, the laminated sheet manufacturing apparatus 6b will be described. In addition, the description of the difference from the laminated sheet manufacturing apparatus 6 will be mainly described, and the description of the same matters will be omitted.

As shown in Fig. 5, in the laminated sheet manufacturing apparatus 6b, the nozzle 614 is omitted for the laminated sheet manufacturing apparatus 6, but the bonding apparatus 65 and the roller 629 are provided.

The bonding device 65 is disposed between the roller 627 and the roller 629. The bonding apparatus 65 includes a pair of rollers 651 and 652 that are opposed to each other, and a heating unit (not shown) that heats the pair of rollers 651 and 652. The object is sandwiched between the roller 651 and the roller 652. The object is subjected to a pressurized and heated state.

The roller 629 is disposed in the front stage of the bonding device 65. The roller 629 is a means for feeding out an object, and a sheet 7 to be described later is wound around the roller 629. The roller 629 is configured to be rotated by a motor (not shown), and when the roller 629 is rotated, the sheet 7 is fed from the roller 629 (continuous supply).

<Method of Manufacturing Laminate Sheet>

First, an outline of a method of manufacturing a laminated sheet of the following embodiment will be described.

In the manufacturing method of the laminated sheet 1, the first resin composition is supplied between the continuously fed support 5 and the continuously fed fibrous base material 2, and the support 5 and the fibrous base 2 are interposed between the first resin. A method in which a composition is pressure-bonded to produce a laminated sheet.

The manufacturing method of the laminated sheet includes a first step of supplying a liquid first resin composition to at least one of one of the support body 5 and one of the fiber base materials 2; and the above-described support body 5 One of the one surface of the fibrous base material 2 is subjected to a second step of pressure-bonding through the first resin composition. In the first step, at least one of one side of the support body 5 and one side of the fiber base material 2 is adjusted after the supply position of the supply means for supplying the liquid first resin composition is adjusted. A liquid first resin composition was supplied.

<First embodiment>

Next, a first embodiment of a method for producing a laminated sheet according to the present invention will be described. Further, in the first embodiment, the laminated sheet manufacturing apparatus 6 is used.

(Step 1)

As shown in FIG. 3, the roller 621 of the laminated sheet manufacturing apparatus 6 is rotated, the support 5 is fed (continuously supplied) from the roller 621, and the roller 623 is rotated to feed (continuously supply) the fibrous substrate from the roller 623. 2, and the roller 628 is rotated, and the roller 628 is wound up to form a laminated sheet containing the support 5 and the fibrous base material 2.

The support body 5 fed from the roller 621 and the fiber base material 2 fed from the roller 623 are supplied toward the outer peripheral surface of the roller 625, and the distance between the fiber base material 2 and the support body 5 is narrower toward the roller 625. .

Further, at least one of the nozzles 611 to 613 is selected, and a liquid first resin composition is discharged from the selected nozzle. Thereby, the position (discharge position) at which the supply means supplies the first resin composition is adjusted. Further, the selection of the nozzle may be any one of the nozzles 611 to 613, or any two, or any three. Further, when the first resin composition is to be applied thickly, a plurality of nozzles may be selected.

When the nozzle 611 is selected, the first resin composition is discharged (supplied) from one of the nozzles 611 toward one side of the support body 5. Here, the liquid first resin composition is supplied from the nozzle 611 toward the space where the roller 625 is not in contact with the support body 5.

Further, when the nozzle 612 is selected, the first resin composition is discharged from one side of the fiber base material 2 from the nozzle 612. Here, towards the fiber substrate 2 In the space supported by the roller 624, the liquid first resin composition is supplied from the nozzle 612. Thereby, the degree of impregnation of the first resin composition with respect to the fiber base material 2 can be improved.

Further, when the nozzle 613 is selected, the first resin composition is discharged from the nozzle 613 toward the support 5 and the fibrous base material 2. The first resin composition is supplied from the nozzle 613 toward the space surrounded by the fiber base material 2 and the support body 5. More specifically, the liquid first resin is supplied from the nozzle 613 toward the space formed between the support 5 contacting the roller 625 and the fibrous base material 2 facing away from the support 5 and facing the roller 625. Composition. The liquid first resin composition from the nozzle 613 is in a state of being supplied to both the support 5 and the fiber base 2. The supply position of the liquid first resin composition from the nozzle 611 to the support 5 is higher than the supply position of the liquid first resin composition supplied from the nozzle 613, and further to the supply direction of the support 5 (feed from the roller 621) Outward direction) Front end side. Similarly, the supply position of the liquid first resin composition from the nozzle 612 to the fiber base material 2 is higher than the supply position of the liquid first resin composition supplied from the nozzle 613, and further to the supply direction of the fiber base material 2 ( The front end side is from the feeding direction of the roller 623.

Further, the composition of the first resin composition discharged from the nozzles 611 to 613 may be the same as each other in the present embodiment, but it is not limited thereto or may be different.

(Step 2)

Next, in the roller 625, the support 5 and the fibrous substrate 2 are separated by the first The resin composition is crimped.

First, the support 5 comes into contact with the outer peripheral surface of the roller 625. At this time, the fiber base material 2 does not contact the outer peripheral surface of the support body 5, and a space is formed between the fiber base material 2 and the support body 5. Then, the fibrous base material 2 is in contact with the liquid first resin composition via the support 5 to the outer peripheral surface of the roller 625, whereby the fibrous base material 2 and the support 5 are pressure-bonded. The angle between the support body 5 and the fiber base material 2 at this time (the angle of attachment: the angle between the support body 5 contacting the roller 625 and the fiber base material 2 facing the support body 5 and away from the support body 5 θ is preferably an acute angle. Thereby, strain of the fiber base material 2 can be prevented or suppressed.

Further, the tension on the side of the fibrous base material 2 is preferably smaller than the tension on the side of the support 5 . Specifically, the tension on the side of the fiber base material 2 is preferably 30 N or less, more preferably about 15 to 25 N. Thereby, dimensional change and internal strain of the fibrous base material 2 can be prevented or suppressed.

(Step 3)

Then, the liquid second resin composition is discharged from the nozzle 614, and the second resin composition is supplied to the surface of the fiber base material 2 opposite to the first resin composition.

The first resin composition and the second resin composition are different in composition from each other. Thereby, the composition of the resin composition can be appropriately set in accordance with the characteristics required for the first resin layer 3 and the second resin layer 4.

Further, when the second resin composition is to be applied thickly, for example, a nozzle for discharging the second resin composition may be provided in a plurality of places.

(Step 4 (drying step))

Next, the first resin composition and the second resin composition are dried by the drying device 64. Thereby, the laminated sheet 1 is obtained. The laminated sheet 1 is taken up on a roller 628.

The drying conditions are not particularly limited, and are appropriately set in accordance with the composition and conditions of the first resin composition and the second resin composition, and are preferably volatile components in the first resin composition and the second resin composition. The resin is set to be 1.5 wt% or less, more preferably 0.8 to 1.0 wt%, respectively. Specifically, the drying temperature is preferably about 60 to 180 ° C, more preferably about 80 to 150 ° C. Further, the drying time is preferably about 2 to 10 minutes, more preferably about 2 to 5 minutes.

According to the embodiment as described above, the following effects can be obtained.

In the present embodiment, at least one of the nozzles 611 to 613 is selected when the liquid first resin composition is supplied. For example, when the liquid first resin composition is supplied from one of the nozzles 611 to the support 5, the liquid first resin composition is dried, and the fiber base 2 and the support 5 are pressure-bonded to form a fiber-based base. The degree of impregnation of the material 2 becomes less. On the other hand, when the liquid first resin composition is supplied from one of the nozzles 612 to one side of the fiber base material 2, the liquid resin-like first resin composition is impregnated until the fiber base material 2 and the support body 5 are pressure-bonded. The degree of impregnation of the fibrous base material 2 becomes relatively large.

When the liquid first resin composition is supplied from the nozzle 613 to the fiber base material 2 and the support 5, the degree of impregnation of the fiber base material 2 can be set to be supplied from the nozzle 613 or to be supplied from the nozzle 612. between.

Accordingly, the degree of impregnation of the first resin composition with respect to the fibrous base material 2 can be adjusted. Therefore, the impregnation ratio of the second resin composition and the first resin composition can be adjusted, and the desired prepreg can be produced.

Further, in the present embodiment, the pressure contact between the fiber base material 2 and the support 5 is performed using the roller 625. When the fiber base material 2 and the support body 5 are sandwiched by a pair of rolls, there is a possibility that the first resin composition is oozing out from the fiber base material 2. However, in the present embodiment, the roll 625 is used and adjusted. The fiber substrate 2 is in contact with the area of the roller 625 and the area is made small, whereby the first resin composition is oozing out from the fiber base material 2.

In the first embodiment, all of the laminated sheets 1, 1A, 1B, 1C, 1D, and 1E can be manufactured. The second embodiment to the fourth embodiment to be described later are also the same.

<Second embodiment>

In the present embodiment, the laminated sheet manufacturing apparatus 6a shown in Fig. 4 is used. In this case, the nozzle 611 is changed in position, and the position (discharge position) at which the first resin composition is supplied from the nozzle 611 is adjusted, and the nozzle 611 faces one side of the support body 5, or one side of the fiber base material 2, or the support body 5 At least one of the fiber substrate 2 and the like is discharged to discharge the first resin composition. Accordingly, the number of nozzles can be reduced. Further, the third embodiment to be described later can be changed to the nozzle structure of the laminated sheet manufacturing apparatus 6b shown in Fig. 5, and the same can be applied.

First, as in the first embodiment, the support 5 is fed out from the roller 621, and the fibrous base material 2 is fed out from the roller 623.

Next, the position of the nozzle 611 is adjusted to adjust the supply position of the first resin composition from the nozzle 611. For example, the nozzle 611 is changed to the right side in FIG. 4, and the liquid first resin composition is supplied to the support 5 supported by the roller 622. Moreover, the nozzle 611 can be changed to the left side in FIG. 4, and the liquid-like first resin composition can be supplied to the fiber base material 2 supported by the roller 624. Further, a liquid first resin composition may be supplied to the support 5 supported by the roller 625.

Further, the position of the nozzle can be adjusted, the supply position of one side of the support body 5 can be adjusted, and the supply place of the first resin composition in the feeding direction of the support body 5 can be adjusted.

Similarly, the position of the nozzle 611 can be adjusted, the supply position of one side of the fiber base material 2 can be adjusted, and the supply position of the first resin composition in the feeding direction of the fiber base material 2 can be adjusted.

Accordingly, the degree of impregnation of the fibrous base material 2 by the first resin composition can be highly controlled.

The subsequent steps are the same as in the first embodiment. Specifically, in the roll 625, the support 5 and the fibrous base material 2 are pressure-bonded via the liquid first resin composition, and the liquid second resin composition is discharged from the nozzle 614, and the drying device 64 is used. 1 The resin composition and the second resin composition are dried. Further, the laminated sheet 1 is taken up on the roller 628.

According to this embodiment, the same effects as those of the first embodiment can be obtained.

<Third embodiment>

Next, a third embodiment of the method for producing a laminated sheet of the present invention will be described. In the third embodiment, the differences from the first embodiment will be mainly described, and the same matters will be omitted.

In the third embodiment, the laminated sheet manufacturing apparatus 6 or 6a is used. In the second embodiment, the first resin composition and the second resin composition have the same mutual composition, and the rest are the same as those in the first embodiment.

<Fourth embodiment>

Next, a fourth embodiment of the method for producing a laminated sheet of the present invention will be described. In the fourth embodiment, the differences from the first embodiment will be mainly described, and the same matters will be omitted.

In the fourth embodiment, the laminated sheet manufacturing apparatus 6b is used. The first step and the second step of the laminated sheet manufacturing apparatus 6b are the same as those of the first embodiment. Further, the drying step is the same as that of the first embodiment except that the drying step is performed between the second step and the third step described later.

(Step 3)

The roller 629 of the laminated sheet manufacturing apparatus 6b is rotated, and the sheet 7 is fed (continuously supplied) from the roller 629.

As shown in FIG. 5, the sheet 7 is provided with a resin film 8 and a second resin layer (resin layer) 4 composed of a solid resin or a semi-solid second resin composition provided on one surface of the resin film 8. The second resin layer 4 is in a state of being processed into a sheet shape and is in a B-stage state.

The resin film 8 can be the same as that described for the resin film as the support 5 .

In this step, the sheet 7 and the layered system of the fibrous base material 2 and the support 5 pass between the roll 651 of the bonding device 65 and the roll 652, at which time the sheet 7, and the fibrous substrate 2 and the support 5 are The laminate is pressurized and heated by the bonding device 65. Thereby, the sheet 7 is pressure-bonded to the surface of the fiber base material 2 and the side opposite to the first resin composition via the second resin layer 4, whereby the laminated sheet 1 is obtained. The laminated sheet 1 is taken up on a roller 628.

The conditions at the time of the pressure bonding are not particularly limited, and are appropriately set in accordance with the composition of the second resin composition of the second resin layer 4 and the conditions, and the pressure is preferably about 0.1 to 1.0 MPa/cm ² , more preferably 0.3. ~0.5MPa/cm ² or so. Further, the heating temperature is preferably about 40 to 100 ° C, more preferably about 60 to 80 ° C.

In the fourth embodiment, since the sheet material 7 having the second resin layer 4 composed of the solid or semi-solid second resin composition is provided on one surface side, it is suitable for being impregnated in the thickness direction of the fiber base material 2. The case of the second resin composition.

In addition to the effects similar to those of the first embodiment, the fourth embodiment can achieve the following effects.

By using the sheet material 7 provided with the second resin layer 4 processed into a sheet shape, it is possible to prevent the first resin composition from being mixed with the second resin composition in the fiber base material 2. Thereby, a prepreg having desired characteristics can be surely obtained.

In particular, since the first resin composition is bonded to the second resin layer 4 after being dried by the drying device 64, it is possible to surely prevent the first resin composition from being mixed with the second resin composition.

<Substrate>

Next, a substrate manufactured by using the laminated sheet of the present invention will be described with reference to Fig. 6 . The substrate 10 shown in FIG. 6 includes two prepreg sheets 1g that are disposed to face the second resin layer 4 inward, and an inner layer circuit board 13 that is sandwiched between the second resin layers 4. Further, the prepreg 1g is obtained by cutting the laminated sheet 1 into a predetermined size.

The inner layer circuit board 13 can be the same as the fiber base material 2 described above. Further, in the present embodiment, since the second resin layer 4 has the above-described characteristics (flexibility), at least a part of the inner layer circuit board 13 is surely embedded (embedded) in the second resin layer 4.

The pair of second resin layers 4 may be coated on the front and back surfaces of the inner layer circuit board 13, and the pair of second resin layers 4 may be in contact with each other inside the inner layer circuit board 13, so that the inner layer of the inner layer circuit board 13 is completely covered. The second resin layer 4 is buried. In addition, the pair of second resin layers 4 may cover the front and back surfaces of the fiber base material 2, and a gap may be formed between the pair of second resin layers 4, and a void may be formed inside the inner layer circuit board 13.

The metal layer 12 provided on the surface of the first resin layer 3 opposite to the fiber base material 2 may have a support 5 formed of a metal foil. In the present embodiment, since the first resin layer 3 has the above-described characteristics, the metal layer 12 can be held with high adhesion, and the metal layer 12 can be formed in the wiring portion with high processing precision.

The peeling strength between the metal layer 12 and the first resin layer 3 is preferably 0.5 kN/m or more, more preferably 0.6 kN/m or more. Thereby, the metal layer 12 is processed into a wiring portion, and the connection reliability of the obtained semiconductor device 100 (see FIG. 7) can be further improved.

In the substrate 10, two prepreg sheets 1g can be prepared, and the inner layer circuit board 13 is sandwiched between the prepreg sheets 1g, for example, by vacuum lamination, vacuum pressing, or the like.

Further, the substrate 10 can omit the inner layer circuit board 13, and the two prepreg sheets 1g include a layered body in which the second resin layers 4 are directly joined to each other, and the metal layer 12 can be omitted.

<semiconductor device>

Next, a semiconductor device manufactured by using the laminated sheet of the present invention will be described with reference to FIG. In FIG. 7, the fiber base material 2 and the inner layer circuit board 13 are omitted, and the first resin layer 3 and the second resin layer 4 are integrally shown.

The semiconductor device 100 shown in FIG. 7 includes a multilayer substrate 200 on which a pad portion 300 is provided on the upper surface, and a wiring portion 400 on the lower surface. The semiconductor device 500 is connected to the solder by bumps 501. The pad portion 300 is mounted on the multilayer substrate 200.

The multilayer substrate 200 is provided with a substrate 10 provided as a core substrate, three prepreg sheets 1a, 1b, and 1c provided on the upper side of the substrate 10, and three prepreg sheets 1d and 1e provided on the lower side of the substrate 10. , 1f. The prepreg sheets 1a to 1f are each formed by cutting the laminated sheet 1 into a predetermined size. Moreover, the arrangement order of the fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepreg sheets 1a to 1c from the substrate 10 is formed. The order of arrangement of the fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepreg sheets 1d to 1f from the substrate 10 is the same. That is, the prepreg sheets 1a to 1c and the prepreg sheets 1d to 1f are formed in an upside down state.

Further, the pad portion 300 is formed by processing the support 5 composed of the metal foil of the prepreg 1c into a predetermined pattern, and the wiring portion 400 is formed by processing the support 5 composed of the metal foil of the prepreg 1f. The original pattern.

Further, the circuit portions 201a and 201b disposed on the upper surface side of the prepreg sheets 1a and 1b are formed by processing the support 5 made of a metal foil into a predetermined pattern, and are disposed on the lower side of the prepreg sheets 1d and 1e, respectively. Each of the circuit portions 201d and 201e is formed by processing a support 5 made of a metal foil into a predetermined pattern.

Further, the multilayer substrate 200 is provided with a conductor portion 202 that is provided to penetrate each of the prepreg sheets 1a to 1f, and to electrically connect the adjacent circuit portions or the circuit portion and the pad portion.

Further, each of the metal layers 12 of the substrate 10 is processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by a conductor portion 203 provided through the substrate 10.

Further, in the semiconductor device 100 (multilayer substrate 200), four or more prepreg sheets may be provided on one side of the substrate 10. Further, the semiconductor device 100 may contain a prepreg other than the prepreg obtained from the laminated sheet.

Further, the present invention is not limited to the above-described embodiments, and modifications, improvements, etc. within the scope of the purpose of the invention are encompassed by the present invention.

The method for producing a laminated sheet of the present invention and the laminated sheet are described above based on the embodiments shown in the drawings, but the present invention is not limited thereto, and the structure of each portion may be replaced by any structure having the same function. Further, the present invention may be added with any other structure and steps.

For example, as shown in FIG. 8, a suction means 67 may be provided in the apparatus 6.

The suction means 67 is for impregnating the first resin composition with the fibrous base material 2. By sucking air by the suction means 67, the first resin composition is pulled, and the degree of impregnation with the fiber base material 2 can be surely adjusted. A suction means 67 can also be provided in the devices 6a, 6b.

In the second embodiment, the supply position of the first resin composition from the nozzle 611 is adjusted along the feeding direction of the support 5 or the fiber base material 2, but it is not limited thereto. For example, the supply position of the support body 5 or the fiber base material 2 in the width direction (orthogonal direction of the feed direction) may be adjusted. Thereby, the impregnation amount of the first resin composition in the width direction of the fiber base material 2 can be adjusted.

The present application claims priority on the basis of Japanese Patent Application No. 2010-195494, filed on Sep. 1, 2010, the disclosure of which is incorporated herein.

1. . . Laminate

1A~1D. . . Laminate

1a~1g. . . Prepreg

2. . . Fiber substrate

3. . . First resin layer

4. . . Second resin layer

5. . . Support

6. . . Laminate manufacturing device

6a. . . Laminate manufacturing device

6b. . . Laminate manufacturing device

7. . . Sheet

8. . . Resin film

10. . . Substrate

12. . . Metal layer

13. . . Inner circuit board

20. . . interface

31. . . First impregnation

41. . . 2nd impregnation

64. . . Drying device

65. . . Laminating device

67. . . Suction means

100. . . Semiconductor device

200. . . Multilayer substrate

201a, 201b, 201d, 201e. . . Circuit department

202, 203. . . Conductor

300. . . Solder pad

400. . . Wiring department

500. . . Semiconductor component

501. . . Bump

611~614. . . Nozzle (slit coater)

621~628. . . Roll

629. . . Roll

651, 652. . . Roll

661~663. . . Adjustment means

Fig. 1 is a cross-sectional view showing an embodiment of a laminated sheet.

Fig. 2 is a schematic cross-sectional view showing another structural example of the embodiment of the laminated sheet.

Fig. 3 is a view showing a device for manufacturing a laminated sheet used in an embodiment of a method for producing a laminated sheet of the present invention.

Fig. 4 is a view showing a device for manufacturing a laminated sheet used in an embodiment of a method for producing a laminated sheet according to the present invention.

Fig. 5 is a view showing a device for manufacturing a laminated sheet used in an embodiment of a method for producing a laminated sheet according to the present invention.

Fig. 6 is a cross-sectional view of the substrate.

Fig. 7 is a cross-sectional view showing an embodiment of a semiconductor device.

Fig. 8 is a view showing a manufacturing apparatus of a modification of the present invention.

1. . . Laminate

2. . . Fiber substrate

5. . . Support

6. . . Laminate manufacturing device

64. . . Drying device

611~614. . . Nozzle (slit coater)

621~628. . . Roll

661. . . Adjustment means

662. . . Adjustment means

Claims (14)

A method for producing a laminated sheet, wherein a first resin composition is supplied between a continuously fed support and a continuously fed fibrous base material, and the support and the fibrous base material are interposed between the first resin The method of producing a laminated sheet by pressure bonding the composition includes: a first step of supplying a liquid first resin composition to at least one of the support body and one of the fiber base materials; and the supporting a second step of pressing one of the one surface of the body and the one of the fiber base materials via the first resin composition; wherein, in the first step, the liquid first resin composition is supplied to the first resin composition After the supply position of the supply means is adjusted, a liquid first resin composition is supplied to one of the support body and one of the fiber base materials; and in the second step, the support body is placed in the surface Continuously transporting along the outer circumferential surface of the laminating roller in contact with the circumference of the laminating roller; the laminating roller does not have a roller disposed oppositely; and the laminating roller and the support The fiber substrate is continuously conveyed toward the laminating roller so as to be in contact with the laminating roller so as to be in contact with the first resin composition via the support, and the fiber substrate and the fiber substrate are The support is pressure-bonded through the first resin composition. For example, the manufacturing method of the laminated sheet of the first application of the patent scope, wherein In the first step, the supply position of the supply means is adjusted such that one of the support members and at least one of the ones of the fiber base materials are supplied, and the liquid first resin composition is supplied to the selected surface. The method of manufacturing a laminated sheet according to the second aspect of the invention, wherein in the first step, the supply means comprises: a nozzle that discharges the first resin composition toward one of the support bodies; a nozzle that discharges the first resin composition toward one of the fiber base materials; and a space that is formed between one of the opposing support bodies and one of the fiber base materials, and that faces the support body a nozzle for discharging the first resin composition on one of the fiber base materials; and selecting at least one nozzle for discharging the first resin composition from the plurality of nozzles to adjust a supply position of the supply means; The liquid first resin composition was supplied. The manufacturing method of the laminated sheet according to the first aspect of the invention, wherein the supply means is a nozzle; the discharge port of the nozzle faces the one side of the support body, and the fiber substrate is the same In a manner of at least one of the surfaces, the nozzle is changed in position to adjust the supply position of the supply means, and the first resin composition is discharged from the nozzle. The method of manufacturing a laminated sheet according to claim 1, wherein in the first step, the nozzle belonging to the supply means is changed in position, and the support is adjusted. The liquid first resin composition is supplied to the supply position of the supply means in the feeding direction of the support or to the supply position of the supply means in the fiber substrate feeding direction. The method for producing a laminated sheet according to the first aspect of the invention, comprising the third step of supplying the liquid second resin composition to the surface of the fibrous substrate opposite to the first resin composition. The method for producing a laminated sheet according to the sixth aspect of the invention, wherein the supply of the second resin composition is performed by discharging the second resin composition from a nozzle. The method for producing a laminated sheet according to the first aspect of the invention, wherein the sheet-like resin layer composed of the second resin composition is provided on one side thereof, and the sheet is continuously supplied, and the fiber base is The third step of pressure-bonding the resin layer on the surface of the material opposite to the first resin composition via the resin layer of the sheet. The method for producing a laminated sheet according to the eighth aspect of the invention, wherein the step of drying is performed between the second step and the third step. The method for producing a laminated sheet according to the sixth aspect of the invention, wherein the first resin composition and the second resin composition are different in composition from each other. The method for producing a laminated sheet according to the first aspect of the invention, wherein the supporting system is a metal foil or a resin film. A manufacturing device for a laminated sheet, comprising: a means for continuously feeding out a support; means for continuously feeding the fibrous base material; means for supplying a liquid first resin composition between the support and the fibrous base material; and a first resin composition interposed therebetween a pressure bonding means for pressing the support body and the fiber base material; wherein the pressure bonding means is constituted by a laminating roller having no oppositely disposed rolls; and the adjusting means is provided for the supply means The supply position of the liquid first resin composition to be carried out is adjusted. The apparatus for manufacturing a laminated sheet according to claim 12, wherein the supply means comprises: a nozzle for discharging the first resin composition toward one of the support members; and the fiber substrate a nozzle for discharging the first resin composition; and a space formed between one of the opposing support members and one of the fiber substrates, and facing one side of the support body and the fiber substrate A nozzle for discharging the first resin composition on both sides; and the adjustment means is a valve that is connected to each of the nozzles and that opens and closes each nozzle. The manufacturing apparatus of the laminated sheet of claim 12, wherein the supply means is a nozzle; and the adjusting means causes the nozzle to be discharged by changing the position of the nozzle Orienting the discharge port of the nozzle to a position of the one or more of the one of the fiber base materials, or adjusting the position of the nozzle to adjust the position of the nozzle to adjust the position of the nozzle to the support body The support body on one side feeds the supply position of the above-described liquid supply means in the direction, or adjusts the supply position of the supply means in the fiber substrate feed direction on one side of the fiber base material.