TW201215506A - Method for manufacturing laminated sheet and apparatus therefor - Google Patents

Abstract

The present invention relates to a method for manufacturing a laminated sheet, comprising the following first and second steps. The first step is to supply a liquid first resin composition to at least one of one side of the support body (5) and one side of the fiber substrate (2). The second step is to press and contact the side of the support body (5) and the side of the fiber substrate (2) with the first resin composition disposed therebetween. In the first step, after the supply positions of the supply means (611-613) for supplying the liquid first resin composition are adjusted, the liquid first resin composition is supplied to at least one of one side of the support body (5) and one side of the fiber substrate (2).

Description

201215506 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method and apparatus for manufacturing a laminated sheet. [Prior Art] A laminated sheet in which a metal foil or a resin sheet and a prepreg are integrated is used for the production of a multilayer printed wiring board (see, for example, Patent Documents 1 to 4). Here, such a laminated sheet is produced as follows. A resin varnish is coated on a metal foil or a resin sheet, and then the fiber substrate is superposed to make the above-mentioned resin varnish contain. Further, the background art of the present invention is also disclosed in Patent Document 5. [PRIOR ART DOCUMENT] [Patent Document] Patent Document 1: Japanese Laid-Open Patent Publication No. 2009-126917, Patent Document 2: Japanese Patent Laid-Open No. 2010-47706, Patent Document 3: Japanese Patent Laid-Open No. 2004-82687 Patent Document 4: Japanese Laid-Open Patent Publication No. 2003-249739 (Patent Document No. 2003-147172) SUMMARY OF THE INVENTION In the manufacturing method disclosed in Patent Documents 1 to 4, a resin varnish is applied. After being laid on the metal knot or the resin sheet, the fibrous base material is overlapped and the resin varnish is impregnated. The impregnation amount of the m varnish to the fibrous base material is adjusted: as in Patent Document 3, it is difficult to use it. Example f C-roller is sandwiched between copper foil, resin and woven fabric (go 100131446 201215506 non-woven fabric), and then the resin is immersed in the patented 3 W method. According to the micro-adjustment of the crimping force of the crimping roller, it is necessary to provide a support body and a continuously fed fiber substrate according to the present invention. On the above-mentioned fiber substrate, the first = composition is connected to (four), (four) the build-up layer W is formed on the material 4, the support is at least one of the surface, and the surface of the fiber substrate is supplied with the liquid i-th resin. The i-th step of the composition; and the second step of the above-mentioned surface of the support and the above-mentioned fiber substrate being pressure-bonded to the first resin composition; 4 wherein the above-mentioned first step After adjusting the supply position of the means for supplying the liquid first resin composition, the liquid i-th resin composition is supplied to at least one of the upper surface of the upper support substrate. According to the fourth step of the present invention, in the first step, after adjusting the supply position of the liquid first tree sap through the supply means, at least one of the one side of the support body is escaping the fiber substrate. One of them supplies a liquid ib decant composition. Thereby, the impregnation amount of the first resin composition to the fiber base material was adjusted for 5 weeks. Thereby, a laminated sheet of the desired impregnation amount can be obtained. ^00131446 201215506 Furthermore, the present invention also provides a manufacturing device for laminating sheets, which is a means for continuously feeding out a support; a means for continuously feeding out a fibrous substrate; 1 a resin grade to the above-mentioned support and the above fibrous substrate And a supply means for supplying the liquid first product; and the first resin composition of the fiber substrate, the pressure-receiving means for pressing the support body and the pressure-receiving means; and means for supplying the supply means Adjustment of Position Adjustment Here, "the so-called "adjustment of the supply position of the supply means" includes: a situation in which the position of the hand/amp; itself is moved to adjust the supply position, and the supply means itself is not moved. In this case, both of the supply σ (discharge port) position of the first resin composition are changed, and the supply position of the supply means is adjusted. As described above, according to the present invention, a desired laminated sheet can be obtained. The above and other objects, features and advantages will be more apparent from the following description of the preferred embodiments. [Embodiment] Hereinafter, a method for producing a laminated sheet according to the present invention and a laminated sheet will be described in detail based on preferred embodiments of the drawings. In the drawings, the same components are denoted by the same reference numerals, and the description is omitted as appropriate. 1 is a cross-sectional view showing an embodiment of a laminated sheet according to the present invention, and FIG. 2 is a schematic cross-sectional view showing another structural example of the laminated sheet according to the present invention, and FIGS. 3 to 5 show a manufacturing method of the laminated sheet of the present invention. An example of the structure of a laminated sheet manufacturing apparatus used in the embodiment. <Laminated sheet> First, an embodiment of the laminated sheet of the present invention will be described. Further, the prepreg can be obtained by cutting the laminated sheet into a predetermined size. In the following description, the upper side in Fig. 1 (the same applies to the following figures) will be referred to as "upper" and the lower side will be referred to as "lower". Further, Fig. 1 (the same applies to the drawings below) is exaggerated in the thickness direction (up and down direction in the drawing). The laminated sheet 1 shown in Fig. 1 has a strip shape as a whole, and includes a thin plate-like (flat-plate) support 5, a thin plate-like (flat-plate) fiber base material 2, a first resin layer 3, and a second resin layer 4. The i-th resin layer 3 is coated on one side (upper surface) side of the fiber base material 2, and is composed of a first resin composition, and the second resin layer 4 is coated on the other surface (lower surface) side of the fiber base material 2, and It is composed of a second resin composition. The support 5 and the fiber base material 2 are bonded via the second resin layer 3 (the first resin composition). Further, the laminated sheet 1 is used by being cut into a predetermined size. The branch body 5 is made of, for example, a metal case (metal layer) or a resin film. The metal box side will be added with H (four) (circuit) and the like as follows. The metal (tetra) metal material may be, for example, a copper alloy, a metal or iron alloy, or stainless steel. The metal material constituting the metal falling is excellent in conductivity such as β, and it is easy to form a circuit by contact, and it is preferable to use a copper-based alloy from the viewpoint of low cost of 100131446 201215506. Further, the support body is made of an extremely thin metal foil (for example, the thickness of the support material). The support body 5 may be a resin material in which the ultrathin metal case is provided on the carrier material and the resin film is formed. For example, a gas-based resin-based imine resin, a poly-p-m, a poly-p-benzene: a formic acid, a second-stranded water, etc., and a resin material constituting a resin film, among which heat is excellent and low in price. In view of the above, it is preferred to use polyethylene terephthalate. The resin film is preferably a releaser for the resin film on the side of the i-th resin layer 3. Thus, the subsequent process can be easily performed. The branch body 5 is separated from the first secret layer 3. The average thickness of the branch body 5 is not particularly limited, but is preferably about 8 to 7 〇 _, more preferably about 12 to 40 # m. The material 2 has the function of improving the mechanical strength of the laminated sheet 1. The fiber base material 2 is, for example, a glass fiber substrate such as glass woven fabric or glass non-woven fabric; "Qingzhi fiber, _^_ shouting, full aromatic Polyamide-based resin such as polyamidamide resin fiber; (4) Resin fiber, aromatic polymerization The synthetic fiber substrate 4 of the woven fabric or the non-woven fabric which is mainly composed of the phenolic resin fiber such as the fat fiber, the whole material group, the tree, and the polyester fiber, and the knit paper, the cotton woven paper, A fiber base material such as an organic fiber base material such as a paper fiber base material such as a short-fiber fiber or a kraft paper (4) mixed paper, etc. 100131446 8 201215506 Among these, the fiber base material 2 is preferably a glass fiber base material. By using the glass fiber substrate, the mechanical strength of the laminated sheet can be further enhanced, and the effect of reducing the thermal expansion coefficient of the laminated sheet 1 can be achieved. The glass system constituting the glass fiber substrate can be, for example, E-glass. , c glass, A glass, s glass, D glass, NE glass, T glass, H glass, etc. Among these, the glass is preferably S glass or τ glass. Thereby, the glass fiber substrate can be thermally expanded. Since the coefficient is relatively small, the thermal expansion coefficient of the laminated sheet can be minimized. The average thickness of the fibrous base material 2 is not particularly limited, but is preferably 1 〇〇//m or less, and more preferably 50 Å or less. Good system is about 1~30/zm. By using this thickness The fiber base material 2 can be made thinner while ensuring the mechanical strength of the laminated sheet 1. The workability and dimensional stability of the laminated sheet i can also be improved. In the resin layer 3, the second resin layer 4 is provided on the other surface side. Further, the first resin layer 3 is composed of the first resin composition, and the second resin layer 4 is in the present embodiment. The second resin composition having a different composition of the first resin composition is configured. With this configuration, the composition of the resin composition can be appropriately set in response to the characteristics required for each resin layer. Further, of course, the first resin composition and the first resin composition In the present embodiment, the first resin composition is set to have excellent adhesion to the metal, because the wiring portion (conductor pattern) is formed on the first resin layer 3 in the present embodiment. 9 The composition of 201215506. Further, in order to reliably embed the wiring portion or other fibrous substrate of the other prepreg obtained by the laminated sheet 1 in the second tree layer 4 of the prepreg obtained from the laminated sheet 1, the second portion The resin composition is set such that the flexibility (flexibility) of the second resin layer 4 is higher than that of the first resin layer 3. Such various resin compositions are described in detail later. As shown in Fig. 1, in the present embodiment, a part of the thickness direction of the fiber base material 2 is impregnated with a first resin composition (first resin layer 3) (hereinafter referred to as "first impregnation portion 31"). The second resin composition is impregnated into the remaining portion of the fibrous base material 2 in which the first resin composition is not impregnated (the second resin layer is referred to as "the second impregnation portion 41" hereinafter). Thereby, a part of the first impregnation portion 31 of the first resin layer 3 and a part of the second impregnation portion 41 of the second resin layer 4 are located in the fiber base material 2. In the fiber base material 2, the first impregnation portion 31 (the lower surface of the first resin layer 3) is in contact with the second impregnation portion 41 (the upper surface of the second resin layer 4). In other words, the second resin composition is impregnated into the fiber base material 2 from the upper surface side of the fiber base material 2, and the second resin composition is impregnated into the fiber base material 2 from the lower surface side of the fiber base material 2, and the resin is used. The composition fills the voids in the fibrous substrate 2. According to this configuration, the fiber base material 2 can be protected by the first resin layer 3 and the second resin layer 4. As a result, even when an impact from the outside is applied to the laminated sheet i, the fibrous base material 2 itself can be prevented from being damaged. The effect of improving the mechanical strength of the laminated sheet 1 by the fibrous base material 2 can be surely exhibited. Further, when the interface between the second impregnation portion 31 100131446 201215506 and the second impregnation portion 41 inside the fibrous base material 2 is preferably microscopically observed, the interface 2〇 is formed with irregularities (refer to the enlarged detailed view in FIG. 1). . Thereby, not only the anchor effect of each resin layer lining substrate 2 but also the adhesion between the resin layers can be improved, and the peeling of each resin layer from the fiber base material 2 can be more reliably prevented. Thereby, the product of the product can be improved. As described above, the exchangeability of the second resin layer 4 is higher than that of the i-th resin layer 3. When such a size relationship is obtained, the average thickness of the impregnation portion 31 is preferably larger than the average thickness center of the second impregnation portion 41 [(4) (6) > tbi). The reasons are as follows. When the flexibility of the second resin layer 4 is higher than that of the first resin layer 3, the coefficient of thermal expansion (linear expansion coefficient) of the second resin layer 4 tends to be larger than that of the i-th resin layer 3. Therefore, when the laminated sheet 1 is heated, when the laminated sheet 1 is heated, the second impregnation portion 41 will appear to be the first impregnation in the inside of the fibrous base material 2 as long as it is set to the same size as "tal > tbi". The larger deformation of the portion 31 causes the possibility of warpage at the portion of the fibrous substrate 2. The distortion of the portion of the fibrous base material 2 may cause an influence on the laminate layer as a whole, and may cause warpage of the laminated sheet bundle itself. If this is set to "tal> tbl", the above-mentioned problem can be solved, and the warpage of the laminated sheet can be prevented or suppressed. Further, the term "the linear expansion coefficient of the second resin layer 4 is higher than the linear expansion coefficient of the j-th resin layer 3" means that the average linear expansion coefficient in the plane direction and/or the thickness direction at 25t to 3〇〇t is high. . 100131446 11 201215506 Specifically, when the maximum thickness of the fibrous base material 2 is set to be squeezing, the average thickness tal is preferably 0.7T to 0.95T, more preferably 88T to 〇.9τ. By setting the average thickness tal within this range, it is possible to surely prevent the peeling of the respective resin layers from the fiber substrate 2, and more reliably prevent or suppress the occurrence of warpage of the laminated sheets. In addition, the average thickness of the portion (the j-th non-impregnated portion 32) in which the first impregnation portion 31 is removed from the crucible 1 resin layer 3 is ta2 [/zm], and the portion of the second impregnation portion 41 is removed from the second resin layer 4 When the average thickness of the (second non-impregnated portion 42) is tb2 [ // m], it is preferable to satisfy the relationship of taZ $ tb2 and more preferably satisfy the relationship of 1 $ xta2 < " by satisfying such a relationship. On the other hand, the upper portion of the laminated sheet i can be made highly rigid, so that the wiring portion can be formed on the upper surface of the laminated sheet (the support 5 on the i-th non-impregnated portion 32) with high workability. Since the second resin layer 4 can have high flexibility and a sufficient thickness, it is buried in the second resin layer 4 (second non-reverse portion 42) of the prepreg obtained from the laminated sheet 1. When the wiring portion of the other prepreg obtained by the laminated sheet or other fibrous substrate is used, the burying can be surely performed. That is, the wiring portion of the other prepreg obtained by the laminated sheet 1 can be improved. The embedding property of other fiber substrates. With 驵 and θ, the average thickness h is preferably 2 to 15 μm, more preferably 3 to 10 μm. On the other hand, the average thickness h is preferably 3 20//m, more preferably 5 to 15 μm. In addition, in the configuration shown in Fig. ,, the average thickness "is related to the average value of 100131446 12 201215506 thickness tb2, which is ta2 < tb2, but not limited Here, for example, ta2 > tb2 ' may also be ta2=tb2. Further, it is preferable that the resin layer 3 and the second resin layer 4' having the above-described characteristics are respectively obtained from the resin composition and the second resin layer. The first resin composition contains, for example, a curable resin, and may contain at least one of a curing aid (for example, a curing agent, a curing accelerator, and the like) and an inorganic filler. In order to improve the adhesion to the metal (support 5) constituting the wiring portion, for example, a method using a curable resin excellent in adhesion to metal and a hardening aid using k-lift and adhesion between metals (for example) For example, a method of a curing agent, a curing accelerator, or the like, an inorganic filler to be used, a method of dissolving in an acid, a method of using an inorganic filler and an organic filler, and the like. The curable resin is preferably, for example, a urea (urea) resin, a melamine resin, a bismaleimide resin, a polyamino phthalate resin, a resin having a benzoxanthene ring, a cyanate resin, and a double expectation. A thermosetting resin such as an s-type epoxy resin, a biguanide F-type epoxy resin, and a copolymerized epoxy resin of bisphenol S and bisphenol F. Among these, the curable resin is particularly preferably a cyanate resin (prepolymer including a cyanate resin). The laminated sheet 1 can be reduced by using a thermosetting resin (particularly a cyanate resin). The coefficient of thermal expansion (hereinafter also referred to as "low thermal expansion"). Further, the electrical characteristics (low dielectric constant, low dielectric loss) of the laminated sheet 1 can be improved. 100131446 13 201215506 The cyanic acid anhydride resin is obtained by, for example, reacting a cyanohydrin compound with a phenol, and prepolymerizing it by a method such as heating, if necessary. Specific examples of the cyanate resin include phenolic cyanate resin, bisphenol A type cyanate resin, bisphenol E type cyanate resin, and tetradecyl bisphenol F type cyanate resin. Acid lyophile, etc. Among the materials, the grade is preferably a phenolic acid type cyanate resin. When the cyanate vinegar resin is used, the crosslinking density of the first resin layer 3 after curing is increased after the substrate 1 (see FIG. 7) described later is produced, so that the cured first resin layer 3 can be obtained. The heat resistance and flame retardancy of the substrate are improved. Here, the increase in the heat efficiency is considered to be due to the formation of three (four) of the secret type cyanate resin after the hardening reaction. It is considered that the heterogeneous cyanate-ester has a higher proportion of the benzene ring in the structure. The benzene ring is easily carbonized (graphitized) to cause a carbonized portion to appear in the hardened second resin layer 3. When the laminated sheet 1 is applied to the laminated sheet 1, it is preferable to use a phenolic type cyanate resin even when it is molded (for example, a thickness of 35/m or less). Further, since the cured product is excellent in rigidity during heating, the reliability of the obtained substrate 10 when mounting a semiconductor element (see Fig. 8) is also excellent. Further, a phenolic type cyanate resin represented by the formula (I) can be specifically used. [Chemical 1] 100131446 14 201215506

In the phenolic cyanate resin represented by the formula (1), the average repeating unit number "n" is not particularly limited, and is preferably (7), more preferably 2 to 7. When the average number of repeating units "n" is less than the above lower limit value, since the secret type cyanic acid s is intended to be easily crystallized, the solubility in a general-purpose solvent is lowered. Therefore, it is difficult to obtain a varnish of the second resin composition in accordance with factors such as the content of the KOH type vinegar resin. Also, making a layered piece! Viscosity occurs when the prepreg obtained by the laminated sheet 1 comes into contact with each other, or in which the prepreg is the first! The phenomenon in which the resin composition is transferred to another prepreg (transfer). On the other hand, when the average repeating unit number "n" exceeds the above upper limit value, the varnish viscosity of the first resin composition is too high, and the efficiency in producing the laminated sheet 1 (formability of the first resin layer 3) ) Reduce the situation. Furthermore, the hardener or hardening = in addition to the adhesion between the metals (4) will be described later. In addition to the above-mentioned curable resin, for example, __ modified secrets (four) fat, double-sided A secret resin, etc. The secret type is resin; the second type is changed, or the secret type such as tung oil, linseed oil, walnut oil, etc. is changed to epoxy tree/fat, etc. _ ring _ Μ epoxy resin equivalent epoxy resin; biphenyl type epoxy resin 100131446 15 201215506 and other epoxy resin; unsaturated poly s resin, phthalic acid diisopropyl vinegar resin, polyoxet Other thermosetting resins. Further, in the curable resin, for example, an ultraviolet curable resin, an anaerobic resin, or the like can be used in addition to the thermosetting resin. The content of the curable resin is not particularly limited, but is preferably in the first place! Resin, and 5 to 50 weights of the entire product. More preferably, the weight is 1〇~4〇. When the content of the curable resin is less than the above-mentioned lower limit, the varnish viscosity of the first resin composition may be too low depending on the type of the curable resin, etc., and it may be difficult to form the laminated sheet 1. On the other hand, when the content of the curable resin is more than the above-mentioned upper limit, the amount of the other component is too small, and the mechanical strength of the laminated sheet 1 may be lowered depending on the type of the curable resin or the like. Examples of the above-mentioned curing aid (for example, a curing agent, a curing accelerator, etc.) include tertiary amines such as triethylamine, dibutylamine, and diazabicyclo[2,2,2]octane; 2-ethyl- 4-ethylimidazole, 2-phenyl-4-mercaptoimidazole, 2-phenyl-4-mercapto-5-hydroxydecylimidazole, 2-phenyl-4,5-dimethylolimidazole, 2 ,4-diamino-6-[2,-methylimidazolyl-(indenyl)]-ethyl-s-tris, 2,4-diamino-6-(2,-undecylimidazole Base)-ethyl-s-three tillage, 2,4-diamino-6·[2,-ethyl-4-mercaptoimidazolyl-(indenyl)]-ethyl-s_ bis, 1-benzyl Base 2 - phenyl imino saliva and other sodium saliva compounds. The hardening aid in shai or the like is preferably an imidazole compound having two or more functional groups selected from an aliphatic hydrocarbon group, an aromatic hydrocarbon group, a hydroxyalkyl group, and a cyanoalkyl group, and more preferably a 2-phenyl group. 4,5·dihydroxydecyl imidazole. Further, in the first resin composition, for example, an organic metal salt such as zinc naphthenate, 100131446 201215506 cobalt 'lithium octoate, octyl (10), diacetyl acetonate or ginseng pyruvate (ΙΠ) may be used in combination. ; 5, double A, brewing and other compounds ', acetic acid, alum acid 'salicylic acid, p-toluene, such as organic acids and so on. In the case where the hardening aid is used in the field, the content thereof is preferably 0.01 to 3% by weight, more preferably 0.1 to 1% by weight based on the total of the i-th resin composition. Further, the first resin composition preferably contains an inorganic filler. Thereby, even if the layer #1 is formed (for example, the thickness is 35 " m or less), the laminated sheet i excellent in mechanical strength can be obtained. Moreover, it is also possible to increase the low thermal expansion of the laminated sheet W. Examples of the inorganic fillers include talc, alumina, glass, oxygen dioxide, or mica, oxyhydroxide, and hydrazine. Further, for the purpose of use of the inorganic filler, the crushed shape or the spherical shape can be appropriately selected. From the viewpoint of excellent low thermal friction, the inorganic filler is preferably 糸 糸 夕 、 、 、 、 、 、 、 、 炫 炫 炫 炫 炫 炫 炫 炫 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别 特别Zm, more preferably 2.2~2. 〇" $外的斜均均粒(四), for example, can be measured by a particle size distribution meter ("LA-pass" manufactured by Riba). Preferably, the Ub machine filler is a spherical melt TM having an average particle diameter of 50 Å or less, preferably having an average particle diameter of 0.01 to 2.0 #m (particularly 0.1 to 0·5 2: east-like molten dioxide)矽 矽 借此 借此 ' 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 , , , , , , More specifically, 100131446 17 201215506 The surface is formed with irregularities. In addition, in order to improve the second resin refill material, it is also possible to use the acid-soluble _ and the line portion 'intimate 'inorganic filler layer'. U filler. Therefore, when the wiring portion is used, the inorganic filler in the acid can be lifted (plating adhesion) in the case where the wiring portion is applied to the first layer 3/lip layer. This is soluble in oxidation. , etc., '*acid, zinc oxide, iron oxide, etc., are added to enhance the second! The inorganic filler and the organic filler are used for the adhesion between the resin layer 3 and the wiring portion. In the case of a resin-based material or a material such as a poly-imine, for example, when an inorganic filler is used for a liquid crystal, it is a 〇 、 、 、 、 、 、 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋Preferably, the amount of % is reset. /., more preferably 30 to 6 〇 when the curable resin is a cyanide-based resin, and it is preferred to use an epoxy resin. The sputum resin may be, for example, a scorpion-type shell which does not contain 4 atoms. The ring-shaped epoxy resin, the aromatic stretch-burning epoxy tree=type epoxy resin, the Tsai, etc., the epoxy resin, the good (4) fragrance, the aromatic stretch-type epoxy resin, and the hardened Wet tan tin heat resistance (after the moisture absorption _ = base called "Fang Nen Saki _" butterfly her, the upper aryl base to discuss epoxy resin' can be, for example, exophthalene: 100131446 201215506 fat, biphenyl dimethine A base type epoxy resin, etc. Among them, the aromatic stretch-type epoxy resin is preferably a biphenyl dimethylene type epoxy resin. Specifically, a biphenyl diazinium group type represented by the formula (II) can be used. Epoxy resin.

_CHr

Style <11) η-form arbitrary integer The number of average repeating units of the biphenyl dimethylene type epoxy resin represented by the formula (II) "η" is not particularly limited. It is preferably (7), more preferably w. If the average repeating unit number "η" is less than the above lower limit value, the biphenyl dihydrazinyl type cyclic latex resin is easily crystallized, so that the solubility in the listening layer is lowered. Therefore, there is a case where the varnish of the first resin layer composition is difficult to use. On the other hand, if the average repeating unit number "η" exceeds the above upper limit value, the varnish viscosity of the first resin composition may increase depending on the solvent to be used. In this case, the first resin composition cannot be sufficiently impregnated into the fibrous base material 2, and as a result, the molding failure of the laminated sheet 1 and the mechanical strength are lowered. In the case of using an epoxy resin, the content thereof is not particularly limited, and is preferably 1 to 55% by weight, more preferably 2 to 4% by weight based on the total of the first resin composition. Further, in the first resin composition, it is also possible to add and enhance the adhesion to the gold system. The component may, for example, be a phenoxy resin, a polyethylene oxime resin, a coupling agent or the like. Examples of the phenoxy resin include a phenoxy resin having a double time frame, a 100131446 201215506 phenoxy resin having a Cai skeleton, a phenoxy resin having a biphenyl skeleton, and the like. Further, a phenoxy resin having a structure of a plurality of skeletons may be used. Among these, the phenoxy resin is preferably a phenoxy resin having a biphenyl skeleton and a bisphenol s skeleton. Thereby, the glass transition temperature of the phenoxy resin can be increased by the rigidity of the biphenyl skeleton, and the adhesion between the phenoxy resin and the metal can be improved by utilizing the existence of the bisphenol s skeleton. As a result, the heat resistance of the first resin layer 3 can be improved, and the adhesion of the wiring portion (metal) to the first resin layer 3 can be improved when the multilayer substrate is manufactured. Further, the phenoxy resin is preferably a phenoxy resin having a bisphenol A skeleton and a bisphenol F skeleton. Thereby, in the production of the multilayer substrate, the adhesion of the wiring portion to the first resin layer 3 can be further improved. The molecular weight of the phenoxy resin is not particularly limited, and the weight average molecular weight is preferably 5,000 to 70,000, more preferably 10,000 to 60,000. In the case of using a phenoxy resin, the content thereof is not particularly limited, and is preferably from 1 to 40% by weight, more preferably from 5 to 30% by weight based on the total of the first resin composition. The coupling agent is preferably one selected from the group consisting of, for example, an epoxy decane coupling agent, a titanate coupling agent, an amino decane coupling agent, and a polyoxygen oxy-type coupling agent. In the case of using a coupling agent, the content thereof is not particularly limited, and is preferably 0.05 to 3 parts by weight, more preferably 0.1 to 2 parts by weight, based on 100 parts by weight of the inorganic i-filled material. Further, the first resin composition may contain, for example, an antifoaming agent, a leveling agent, a pigment, and an antioxidant, in addition to the above-described components, as needed, 100131446 20 201215506. The composition of the second resin composition is different from that of the second resin composition, and the second resin layer 4 is set to have higher flexibility than the first! Tree and J J group. In addition, the "different composition" means that the first resin composition and the second month t are not composed of the same resin composition, and for example, at least one of the components constituting the second eucalyptus is different from the second. In the case of the resin composition, the component content of the resin composition of the product 1 is different from that of the second resin composition. More specifically, at least one of the types of the resin, the filler, and the like, the molecular weight of the resin (the average number of repeating units), and the like are different from the eucalyptus remainder. As a result, the second resin layer 4 has characteristics different from those of the first resin layer 3. . The thermal expansion coefficient of the second surface of the second resin layer 4, that is, the longitudinal direction of the laminated sheet 1 and the width direction (Y direction) is not particularly limited to the following: L6ppmrc. When the second resin layer = the thermal expansion coefficient is within the above range, the laminated sheet 1 can have high connection reliability. The obtained semiconductor material is excellent in mounting reliability. Further, the thermal expansion coefficient in the plane direction of the entire laminated sheet 1 is not particularly limited, but is preferably 16 ppm/t or less, more preferably 12 ppm/t: or less, and particularly preferably 5 to 10 ppm/C. If the coefficient of thermal expansion of the laminated sheet 1 is within the above range, the crack resistance of the obtained substrate against repeated thermal shock can be improved. The coefficient of thermal expansion in the plane direction can be evaluated, for example, by using a temperature rise of a TMA device (ΤΑ100131446 21 201215506::2). On the side of the side, for example, not shown in the figure t, after the resin film is peeled off, the resin film is peeled off. In the case of the resin film, the resin film can be used in the same manner as the resin film as the filler 5. Next, another example of the structure of the laminated sheet will be described. The difference between the first and the second is the same as the case where the same thing is omitted. As shown in Fig. 2 (4), the laminated sheet 1A is not impregnated with the i-th resin composition in the thickness direction of the fibrous base material 2 (first The resin layer 3) and the second resin composition (second resin layer 4). For example, by adjusting the position at which the first resin composition is supplied, the first resin composition may be formed, and the second resin composition may be formed as shown in Fig. 2 (4). The structure of the i-th resin composition. Further, by setting the viscosity of the varnish-like second resin composition to be extremely high or as shown in Fig. 5, when the heating is performed, the flaky second resin is used. The composition's smelting viscosity is set to As shown in Fig. 2(a), the laminated sheet 1B is impregnated with the entire thickness of the fibrous base material 2 as shown in Fig. 2(a). 1. The resin composition is not impregnated with the second resin composition. As shown in Fig. 2(c), the laminated sheet 1 c is impregnated with the second resin composition in the thickness direction of the fibrous base material 2 as a whole, but is not impregnated. For example, by adjusting the position at which the first resin composition is supplied, the first resin composition is dried, and the first resin composition may be impregnated as shown in Fig. 2(c). 100131446 22 201215506 As shown in Fig. 2(d), the laminated sheet 1D is partially impregnated with the first resin composition in the thickness direction of the fibrous base material 2, but is not impregnated with the second resin composition. The laminated sheet 1E is partially impregnated with the second resin composition in the thickness direction of the fibrous base material 2, but is not impregnated with the i-th resin composition. For example, by adjusting the position at which the second resin composition is supplied, the first resin composition is formed. Drying, it can also become almost impregnated with the first elm tree as shown in Figure 2(e) As shown in Fig. 2 (f), the second resin layer is omitted from the laminated sheet 1F (the second resin composition is further infiltrated in the thickness direction of the fibrous base material 2 without impregnating the first secret grease). For example, by adjusting the position at which the first resin composition is supplied and the first first resin composition is dried, it may have a structure in which the first resin composition is hardly impregnated as shown in Fig. 2. In the thickness direction of the fiber base material 2, the first resin composition is impregnated, and the first resin composition is partially impregnated in the thickness direction of the fiber base material 2, etc. Similarly to the laminated sheet i, the first layer composition and the second resin composition may be the same composition or the same level. <Laminating sheet manufacturing apparatus> - The laminated manufacturing apparatus used in the embodiment of the manufacturing method of the laminated sheet of the present invention, that is, the laminated sheet manufacturing apparatus used in the production of the laminated sheet, is described. Description will be made with reference to Figs. 3 to 5 . The outline of the manufacturing apparatus of the present invention is as follows. The manufacturing apparatus includes: means 621 for continuously feeding out the support 5; means 623 for continuously feeding out the fibrous base material 2; and supplying a liquid resin composition to the support 5 and the fibrous base 2 Means 611 to 613 (or 6 ιι); and a pressure bonding means 625 for pressing the support 5 and the fiber base material 2 via the first resin composition. Further, the manufacturing apparatus includes adjustment means 661 to 663 (or means for changing the position of the supply means 611) for adjusting the supply position of the liquid second resin composition by the supply means. The laminated sheet manufacturing apparatus 6 shown in Fig. 3, the laminated sheet manufacturing apparatus 6a shown in Fig. 4, and the laminated sheet manufacturing apparatus 6b shown in Fig. 5 are apparatuses for continuously producing a laminated sheet. The laminated sheet manufacturing apparatuses 6 and 6a can correspond to the first embodiment and the second embodiment of the method for manufacturing a laminated sheet to be described later. Further, the laminated sheet manufacturing apparatus 6b can correspond to the third embodiment and the fourth embodiment of the method for producing a laminated sheet to be described later. (Laminated sheet manufacturing apparatus 6) First, the laminated sheet manufacturing apparatus 6 will be described. As shown in Fig. 3, the laminated sheet manufacturing apparatus 6 is provided with rolls 621 to 628, nozzles (slot coaters) 611 to 614, and drying apparatus 100131446 24 201215506 64 ° rolls and 621 series feeds ( The slave of the object is circumvented, and the support 5 is wound on the roller 021. The roller 621 is configured to be rotated by a motor (drive source) that is not in the figure, and if the roller 621 is rotated, it is supplied from a more than six. The branch body 5 is fed out (the means for feeding the object is wound on the _: the 2-1" is configured to rotate the right nip roller 623 by a motor (not shown), and then the roller 623 is rotated. Supply). 'Finished fiber substrate 2 (continuously further) 'the rear section of the transfer roller 621 of the 622 series specification support 5. The means of the direction is set, and the roller 624 is the standard fiber substrate 2 at the rear of the roller 622. The means for moving the direction is provided, and the roller 625 is a means for arranging the object to be placed between the rollers (that is, the support body 5 and the fiber substrate are in a direction, and the objects 622 and 624 are attached to the rear section - 乂, The outer peripheral surface of the roller 625 is supported by the support body 5. At this time, the outer peripheral surface of the roller 625 is conveyed to the tooth surface of the tooth month a 5 surface contact or more. The base material 2 valence θ + is also entangled along the & outer peripheral surface of the roll 625, and the peripheral surface 'contacts the enthalpy. The fiber substrate 2 is the space of the body 5, and is placed on the roll with the branch m interposed therebetween. 625 contacted the support octopus 5 contact 辍100131446 t46 b 625. Among them, the contact between the fiber substrate 25 201215506 2 and the light 6M The product system is smaller than the contact area between the support body 5 and the viewing body. Specifically, the support body 5 is in surface contact with 1/4 to 1/2 of the circumference of the roller 625, whereas the fiber substrate 2 is roller-dependent. 1/6 to 1/4 of the circumference of 625 is in surface contact, whereby the tension applied to the fiber base material 2 can be reduced, and deformation of the fiber base material 2 can be suppressed. Further, although detailed later, The fiber base material 2 and the support body 5 are stretched in the feeding direction, and tension is applied thereto. Thereby, the support body 5 and the fiber base material 2 can be separated by the first surface by the outer peripheral surface of the roll 625. The resin composition is pressure-bonded. Further, in the present embodiment, a roller that is disposed opposite to the roller 625 and that presses the ball body 5 and the fiber base material 2 is not disposed. Here, the roller 625 A metal roll having at least a surface made of a metal. The metal roll has a high surface smoothness and stably supports the support 5, the first resin composition, and the fiber base 2. Therefore, the first resin composition can be used. The weight distribution of the fiber base material 2 in the width direction is uniform. Further, the 'roller 626 and the roll 627 are the moving directions of the standard object, respectively. The means is provided in this order in the rear stage of the roller 625. Further, the "pro-628" is a means for winding up the object (that is, the laminated sheet 1). The pro-628 system is configured to be rotated by a motor (not shown), and the roller 628 Rotating 'the laminated sheet 1 is taken up on the roll 628. The nozzles 611 to 613 are means for discharging (supplying) the first resin composition which is liquid (varnished) at normal temperature (25 ° C). Sewing coater. The supply hand 100131446 26 201215506 section can adjust the supply position of the liquid first resin composition. That is, the supply means may select at least one of the one side of the support body 5, or one of the fiber base materials 2, or one of the support body 5 and one of the fiber base materials 2, and supply A liquid first resin composition. More specifically, the "supply means" are provided with nozzles 611 to 613, and the nozzle 611 discharges a liquid first resin composition toward one side of the branch body 5, and the nozzle 612 discharges the third layer toward one side of the fiber base material 2. In the resin composition, the nozzle 613 discharges a liquid resin composition between one surface of the support 5 and one side of the fiber base material 2. In the production of the laminated sheet i, at least one nozzle that discharges the first resin composition is selected from the nozzles 611 to 613. Thereby, the supply position of the supply means (i.e., the position at which π is discharged) is adjusted. This selection is performed by opening and closing the valve (the adjustment means 1 "a) provided in the flow path on the downstream side of the nozzles 611 to 613. Further, the "liquid" is not limited to liquid, but also includes fluidity. Further, the nozzle 614 is a means for discharging (supplying) a second resin composition at a normal temperature (pit) toward the surface on the opposite side of the support member 5 from the i-th resin composition (for example, a slit) The slitting machine 64 is disposed between the nozzle 614 (reported 625) and the newspaper 626. In the present embodiment, the drying device 64 uses the object (the second resin composition, the fiber substrate 2). The first resin composition and the branch body 5) are dried while being horizontally conveyed. #This allows the tension applied by the Vivian 2 to be smaller than 100131446 27 201215506, which prevents or suppresses internal strain. The drying device 64 dries the object by heating the object. In the dried laminated sheet, the first resin layer 3 and the second resin layer 4 are both in a B-stage (B-stage). The state 'becomes a sheet shape. (Laminar sheet manufacturing apparatus 6a) Next, the laminated sheet manufacturing apparatus 6a will be described. The description of the same items as the center of the laminated sheet manufacturing apparatus 6 will be omitted. As shown in Fig. 4, the laminated sheet manufacturing apparatus 6 & The nozzle 611 which is a means for supplying the liquid first resin composition to the laminated sheet manufacturing apparatus 6 is provided so that the nozzle 611 which is a supply means of the liquid first resin composition can be changed in position by an actuator (adjustment means) (not shown). In other words, the nozzle 611 can be moved or changed in posture such that one of the support body 5, one of the fiber base materials 2, or the support body 5 and the fiber base material 2 can be moved in accordance with the discharge port. When the laminated sheet 1 is produced, the discharge port position and orientation of the nozzle 611 are selected, and one of the support body 5, one of the fiber base materials 2, or the support body 5 and the fiber base material 2 is at least In one embodiment, a liquid first resin composition is supplied from one of the nozzles 611 to one side of the branch body 5. Further, when the liquid is supplied from one of the nozzles 611 toward one side of the fiber base material 2 In the case of the first resin composition, the liquid first resin composition is supplied to the space supported by the newspaper 624. Accordingly, the degree of impregnation of the first resin composition with respect to the fiber base 100131446 28 201215506 material 2 can be improved. When the liquid first resin composition is supplied from the nozzle 611 toward the support 5 and the fiber base material 2, the first resin composition is supplied to the space surrounded by the fiber base material 2 and the branch body 5. More specifically, the liquid is supplied from the nozzle 611 between the support body 5 that is in contact with the roll 62:5 and the fiber base material 2 that is relatively far away from the support body 5 and the roll 625. In the first resin composition, in the present embodiment, the first resin composition is supplied to the support 5 supported by the roller 625. Further, the nozzle 611 can adjust the supply position of one side of the branch body 5, that is, the supply position of the first resin composition in the feeding direction of the support body 5, by changing its position. Similarly, the nozzle 611 can adjust the supply position of one side of the fiber base material 2, i.e., the supply position of the first resin composition in the direction in which the fiber base material 2 is fed, by changing its position. (Laminated sheet manufacturing apparatus 6b) Next, the laminated sheet manufacturing apparatus 6b will be described. In addition, the description will be made focusing on the difference from the above-described laminated sheet manufacturing apparatus 6, and the same matters will be omitted. As shown in Fig. 5, in the laminated sheet manufacturing apparatus 6b, the nozzle 614 is omitted for the laminated sheet manufacturing apparatus 6, but the bonding apparatus 65 and the roller 629 are provided. The bonding device 65 is disposed between the roller 627 and the roller 629. The bonding device 65 includes a pair of rollers 651 and 652 that are opposed to each other, and a heating unit (not shown) that heats the pair of rollers 651 and 652 100131446 29 201215506. The object is sandwiched between the roller 651 and the roller 652. The object is subjected to pressurization and heating. The roller 629 is disposed in the front stage of the bonding device 65. The roller 629 is a means for feeding out an object, and a sheet 7 to be described later is wound around the roller 629. The roller 629 is configured to rotate by a motor not shown, and if the roller 629 is rotated, the sheet 7 is fed from the roller 629 (continuous supply). <Manufacturing Method of Laminate Sheet> First, the outline of the method for producing a laminated sheet of the following embodiment will be described. The manufacturing method of the laminated sheet 1 is to supply the first resin composition yarn between the continuously fed support body $ and the continuously fed fiber base material 2, and the support body 5 and the fiber base material 2 are interposed between the above-mentioned second resin. A method in which a composition is pressure-bonded to produce a laminated sheet. The manufacturing method of the laminated sheet includes: an i-th step of supplying a liquid first resin composition to at least one of one of the support body 5 and one of the fiber base materials 2; and the above-described support body 5 One of the steps is to adhere to the above-mentioned "mean surface" of the fibrous base material 2 via the second resin composition. Wherein, in the step i, after the supply position of the supply means for supplying the liquid second resin composition is completed, at least the surface of the support body 5 and the surface of the fibrous substrate 2 are at least Among them, the liquid i-th resin composition is supplied. <First Embodiment> 100131446 30 201215506 ▲ Secondly, the first embodiment of the (four) layered manufacturing method is carried out. In addition, in the first embodiment, the laminated sheet manufacturing apparatus 6 is used. (1st step) ° * As shown in Fig. 3, the roller 621 of the integrated sheet manufacturing apparatus 6 is rotated, and the prosthesis body 5 is fed (continuously supplied) from the pro-621, and the pro (2) is rotated from the The fiber substrate 2 is fed (continuously supplied) and the roller 628 is rotated, and the roller 628 is taken up to take up the laminated sheet containing the branch (4) 5 and the fibrous substrate 2. The support 5 fed from the roller 621 and the fibrous substrate .2 fed from the parent 623 are supplied toward the outer peripheral surface of the roller 625, and the distance between the fibrous substrate 2 and the support is more toward the roller 625. narrow. Further, at least one of the nozzles 611 to 613 is selected, and a liquid first resin composition is discharged from the selected nozzle. Thereby, the position (discharge position) at which the supply means supplies the i-th resin composition is adjusted. Further, the selection of the nozzle may be any one of the nozzles 611 to 613, or any two of the nozzles, or any three. Further, when the first resin composition is intended to be thickly coated, a plurality of nozzles may be selected. When the nozzle 611 is selected, the first resin composition is discharged (supplied) from the nozzle 611 toward the support body. Here, the liquid second resin composition is supplied from the nozzle 611 toward the space in the support body 5 where there is no contact with the roller 625. Further, when the nozzle 612 is selected, the first resin composition is discharged from the nozzle 612 toward the center surface of the fiber base material 2. Here, the liquid second resin composition is supplied from the nozzle 612 toward the space supported by the fiber substrate 2 100131446 31 201215506. Thereby, the degree of impregnation of the first substrate to the fibrous substrate 2 can be improved. Further, in the case where the spray violet 6U is selected, the (four) 1 tree test product is projected from the nozzle (1) toward the support 5 and the fibrous base material 2. The resin composition is supplied from the mouth 613 to the space covered by the fibrous base material 2 and the support body 5. More specifically, the liquid is supplied from the nozzle 613 toward the space formed between the support body 5 that is in contact with the pro-625 and the fiber base material 2 that is relatively distant from the "Haizhilou body 5 and the opposite roller 65". The first resin composition. The liquid first filament from the nozzle 613 is supplied to both the yoke 5 and the filament 2 (4). The liquid supply of the liquid repeller 613 is a supply space of the liquid resin of the first resin composition supplied by the nozzle, and is supplied by the support body 5 (from the feeding direction of the light 621). ) Front end side. Similarly, the supply of the liquid enamel resin composition from the nozzle (1) to the fiber substrate 2 is more than the supply of the first constitutive (four) supply space by the nozzle, and the supply direction of the fiber base (from the pro (2) Feed out direction) Front end side. In addition, the first spit from the mouth 611~(1)! The composition of the resin composition may be the same as each other in the present embodiment, but it is not limited thereto or may be different. (Second Step) "In the surface 625, the support 5 and the fibrous base material 2 are pressure-bonded via the first 100131446 32 201215506 resin composition. 2 The ruthenium support 5 is brought into contact with the outer peripheral surface of the 625. At the time of the fiber substrate, the surface of the support body 5 of the m (four) support body forms a space between the fiber core 2 and the support body 5. Then, the fiber, the crucible, and the quasi-substrate 2 are separated from the support body 5 and the liquid first tree. The lunar composition is in contact with the roller 625 and the outer peripheral surface. Otherwise, the fibrous base material 2 and the support 5 are crimped. At this time, the angle between the body 5 and the fibrous base material 2 is at an angle (contact angle: contact to丨丨1 喊 的 的 的 支 、 、 、 、 、 的 的 的 的 的 的 的 的 的 的 的 的 的 的 的 的 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 支 的Or suppressing the strain of the fiber base material 2. Further, the tension on the side of the fiber base material 2 is preferably the tension on the side of the cast support body 5. Specifically, the tension on the side of the fiber base material 2 is preferably less than the surface area, and more preferably It is about 15 to 25 N. Thereby, the dimensional change and the internal strain of the fiber base material 2 can be prevented or suppressed. (Step 3) Next, the liquid is discharged from the nozzle 614. The second resin composition is supplied to the surface of the fiber substrate 2 opposite to the (four) lipid composition, and the second resin composition and the second resin composition are different in composition from each other. Therefore, the composition of the resin composition can be appropriately set in accordance with the characteristics required for the first resin layer 3 and the second resin wind/w 曰W 曰 layer 4. Further, when the second resin composition is intended to be thicker In the case of the main species, for example, a nozzle for discharging the second resin composition may be provided in a plurality of places. (Step 4 (drying step)) 100131446 33 201215506 Next, the i-th resin composition and the second resin are made by the drying device 64. The composition is dried, whereby a laminated sheet is obtained. The laminated sheet is wound up on the Kokon 628. The drying conditions are not particularly limited, and the composition of the second resin composition and the second resin composition are combined. It is preferable to set the conditions, and it is preferable that the volatility of the second resin group and the second resin group are set to be 1.5 wt/〇 or less, more preferably about 8 to about 1. /The degree of melon is preferably about 60~18〇〇C Further, the drying time is preferably about 8 to 15 Torr. Further, the drying time is preferably about 2 to 1 G minutes, more preferably about 2 to 5 minutes. According to the present embodiment as described above, the following effects can be obtained. In the case of the liquid resin, the first resin composition is supplied, and at least one of the nozzles 611 to 613 is selected. For example, from the nozzle 613 to one side of the support body 5 (the liquid resin is used as the first resin composition) The first resin composition is dried until the fibrous base material 2 and the support 5 are pressure-bonded, so that the degree of inclusion of the fibrous base material 2 is reduced. On the other hand, the nozzle is directed toward the fibrous base material 2 When the liquid-like first composition is supplied to the surface of the towel, the impregnation liquid-like first resin composition 'the straight-dimensional base material 2 and the support 5 are pressure-bonded, so that the degree of impregnation of the fibrous base material 2 can be changed. bigger. Furthermore, 'the liquid resin first resin composition is supplied from the Heming 611 to the fiber base material." The branch body 5's impregnation degree to the fiber base #2 can be determined as the supply from the nozzle (1), and the nozzle is supplied. In the case of the supply of 612, the impregnation degree of the first resin composition to the fiber base material 2 can be adjusted. 100131446 201215506 Therefore, the impregnation ratio of the second resin composition and the first resin composition can be adjusted, and the crucible can be produced. Further, in the present embodiment, the pressure contact between the fiber base material 2 and the support 5 is performed using the roller 025. When the fiber base material 2 and the support 5 are sandwiched by a pair of rolls, ' There is a possibility that the first resin composition is oozing out from the fibrous base material 2, but as in the present embodiment, by using the roller 625, the area of the fibrous base material 2 in contact with the roller 625 is adjusted and the area is changed. In this case, it is possible to suppress the bleed out of the first resin composition from the fiber base material 2. In the first embodiment, all of the laminated sheets 1, 1A, IB, lc, ID, and 1E can be produced. The fourth embodiment is also the same. <Second Embodiment> In the present embodiment, the laminated sheet manufacturing apparatus 6a shown in Fig. 4 is used. In this case, the nozzle 611 is changed in position, and the position (discharge position) at which the second resin composition is supplied from the nozzle 611 is adjusted, from the nozzle 611 toward one side of the support body 5, or one side of the fiber base material 2, or the branch body At least one of the fifth and the fibrous base material 2 ejects the first resin composition. According to this, the number of nozzles can be reduced. Further, the third embodiment to be described later can be similarly changed to the nozzle structure of the laminated sheet manufacturing apparatus 6b shown in Fig. 5, and is similarly implemented. • First, as in the first embodiment, the support 5 is fed out from the roller 621, and the fibrous base material 2 is fed out from the roller 623. Next, the position of the nozzle 611 is adjusted to adjust the supply position of the first resin composition from the nozzle 611. For example, the nozzle 611 is changed to the right side in Fig. 4 by the position 100131446 35 201215506, and the liquid first resin composition is supplied to the branch body 5 supported by the roller 622. Further, the nozzle 611 can be changed to the left side in Fig. 4, and the liquid first resin composition can be supplied to the fibrous base material 2 supported by the light 624. Further, a liquid first resin composition may be supplied to the branch body 5 of the building 625. Further, the position of the mouth can be adjusted, and the supply space of the center surface of the support body 5 can be adjusted to adjust the supply position of the second resin composition in the direction in which the cut body 5 is fed. Similarly, the position of the nozzle 611 can be adjusted, the supply space of one side of the fiber base material 2 can be adjusted, and the supply position of the second resin composition in the direction in which the fiber base material 2 is fed can be adjusted. According to this, the degree of impregnation of the first resin composition with respect to the fibrous base material 2 can be controlled. The subsequent steps are the same as in the first embodiment. Specifically, in the pro-625, the support 5 and the fibrous base material 2 are pressure-bonded via the liquid first resin composition, and the liquid second resin composition is discharged from the nozzle 614, and the drying device 64 is used. 1 The resin composition and the second resin composition are dried. Further, the laminated sheet 1 is taken up on the roller 628. According to this embodiment, the same effects as those of the first embodiment can be obtained. <Third Embodiment> Next, a third embodiment of the method for producing a laminated sheet according to the present invention will be described. In the third embodiment, the description will be focused on the differences from the above-described first embodiment of 100131446 36 201215506, and the same matters will be omitted. In the third embodiment, the laminated sheet manufacturing apparatus 6 or 6a is used. In the second embodiment, the first resin composition and the second resin composition have the same composition, and the rest are the same as those in the first embodiment. • <Fourth Embodiment> • Next, a fourth embodiment of the method for producing a laminated sheet according to the present invention will be described. In the fourth embodiment, the differences from the first embodiment will be mainly described, and the same matters will be omitted. In the fourth embodiment, the laminated sheet manufacturing apparatus 6b is used. The first step and the second step of the laminated sheet manufacturing apparatus 6b are the same as those of the first embodiment. Further, the drying step is the same as that of the first embodiment except that the drying step is performed between the second step and the third step described later. (Third Step) The roller 629 of the laminated sheet manufacturing apparatus 6b is rotated, and the sheet 7 is fed (continuously supplied) from the roller 629. As shown in FIG. 5, the sheet 7 is provided with a resin film 8 and a second resin layer (resin layer) composed of a solid resin or a semi-solid second resin composition provided on one surface of the resin film 8. 4. The second resin layer 4 is in a state of being processed into a thin sheet shape and is in a B-stage state. The resin film 8 can be used in the same manner as the resin film as the support 5, and the sheet 7 and the laminated body 100131446 37 201215506 of the fiber base material 2 and the support 5 are passed through the roll of the bonding device 65. Between 651 and the roller 652, the sheet 7 and the laminate of the fibrous base material 2 and the branch body 5 are pressurized and heated by the bonding device 65. Thereby, the sheet material 7 is pressed against the surface of the fiber base material 2 opposite to the first resin composition via the second resin layer 4, whereby the laminated sheet 1 is obtained. The laminated sheet 1 is taken up on the pro 628. The conditions at the time of the pressure bonding are not particularly limited, and are appropriately set in accordance with the composition of the second resin composition of the second resin layer 4 and the conditions, and the pressure is preferably about 〜1 to 1.0 MPa/cm 2 , more preferably The system is about 3 to 〇5 MPa/cm2. Further, the heating temperature is preferably about 40 to 1003⁄4, more preferably 60 to 80. In the fourth embodiment, since the sheet 7 having the second resin layer 4 composed of the solid or semi-solid second resin composition is provided on one side, it is applied to the fiber substrate 2. In the case where the thickness of the second resin composition is not impregnated in the thickness direction, the fourth embodiment can achieve the following effects in addition to the effects of the third embodiment. The sheet material 7 of the second resin layer 4 prevents the fiber base material 2 (four) from being mixed with the second resin composition and the second resin composition. Thus, it is possible to surely obtain a prepreg having desired characteristics. (1) After the resin composition is dried by the drying device 64, the second resin layer 4 is bonded, so that the second resin composition can be surely prevented from being mixed with the second resin composition. <Substrate> Next, a substrate manufactured using the laminated sheet of the present invention will be described with reference to Fig. 6 100131446 38 201215506. The substrate 1 shown in Fig. 6 includes two prepreg sheets lg which are disposed to face the second resin layer 4 toward each other, and an inner layer circuit board 13 which is sandwiched between the second resin layers 4. Further, the prepreg is cut into a predetermined size by the laminated sheet 1. The inner layer circuit board 13 can be the same as the fiber base material 2 described above. Further, in the present embodiment, since the second resin layer 4 has the above-described characteristics (flexibility), at least a part of the inner layer circuit board 13 is surely embedded (embedded) in the second resin layer 4. The pair of second resin layers 4 may be coated on the front and back surfaces of the fiber base material 13, and the pair of second resin layers 4 may be in contact with each other inside the fiber base material 13, so that the inside of the fiber base material 13 is completely paired with the second one. The resin layer 4 is buried. Further, the pair of second resin layers 4 can cover the front and back surfaces of the fiber base material 2, and a gap is formed between the pair of second resin layers 4, and a void is formed inside the fiber base material 13. The metal layer 12' provided on the surface of the first resin layer 3 opposite to the fiber base material 2 may have a support 5 formed of a metal foil. In the present embodiment, since the first resin layer 3 has the above-described characteristics, it can be made to have high adhesion. The metal layer 12' can be held and the metal layer 12 can be formed in the wiring portion with high processing precision. The peeling strength between the metal layer 12 and the first resin layer 3 is preferably 55 kN/m or more, more preferably 66 kN/m or more. Thereby, the metal layer 12 is processed into a wiring portion, and the connection reliability of the obtained semiconductor device 1 (see Fig. 7) can be further improved. 100131446 39 201215506 The b-type substrate 10 is prepared by preparing two prepreg sheets 1g, and is manufactured by, for example, a vacuum lamination method, a vacuum press method, or the like in a state in which the circuit board 13 is held by the above. Further, the substrate W can omit the inner layer circuit board 13, and the two prepreg sheets lg 3 have a laminated body in which the second resin layers 4 are directly joined to each other, and the metal layer 12 can be omitted. <Semiconductor Dunhuang>/, Human's poetry The semiconductor device manufactured by laminating month of the present invention is referred to in Fig. 7. In Fig. 7, the fiber base materials 2 and 13 are omitted, and the first resin layer 3 and the second resin layer 4 are integrally shown. The semiconductor device 100 shown in FIG. 7 includes a multilayer substrate 200 and a semiconductor device 500. The multilayer substrate 200 is provided with a pad portion 300 on the upper surface and a wiring portion 400 on the lower surface. The semiconductor device 500 is connected by bumps 5〇1. The pad portion 300 is mounted on the multilayer substrate 2A. The multilayer substrate 200 includes a substrate provided as a core substrate, three prepreg sheets la, lb, and lc provided on the upper side of the substrate 10, and three prepreg sheets id and le provided on the lower side of the substrate 10. If. The prepreg ia~1 £ is divided into a predetermined size by the laminated sheet 1. Further, the order of arrangement of the fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepreg sheets la to lc from the substrate 10 is formed. The fiber substrate 2, the first resin layer 3, and the second resin layer 4, which constitute the prepreg sheets Id to If, are arranged in the same order from the substrate 10. That is, the prepreg sheets la to lc and the prepreg sheets Id to If are formed upside down with each other up to the state of 100131446 40 201215506. Further, the above-described pad portion 300 is formed by processing a support 5 made of a metal foil of a prepreg sheet 1 into a predetermined pattern, and the wiring portion 4 is a support body composed of a metal foil of the prepreg sheet If. 5 processing is a given pattern. Further, in the circuit portions 2〇1 &, 201b disposed on the upper side of the prepreg sheets 1a and 1b, respectively, the support 5 made of a metal foil is processed into a predetermined pattern, and the prepreg Id, The circuit portions 2〇1 and 2〇ie disposed on the lower side of the le are processed into a predetermined pattern by the support 5 made of a metal foil. Further, the multilayer substrate 200 is provided with each of the prepreg sheets ia to lf. <1 is further disposed, and the conductor portion 202 is electrically connected between adjacent circuit portions or between the circuit portion and the solder joint portion. Further, each of the metal layers 12 of the substrate 10 is processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by a conductor portion 203 provided through the substrate 10. Further, in the semiconductor device 100 (multilayer substrate 200), four or more prepreg sheets may be provided on one side of the substrate 10. Further, the semiconductor device 1A may further contain a prepreg other than the prepreg obtained from the laminated sheet. Further, the present invention is not limited to the above-described embodiments, and modifications, improvements, etc. within the scope of the object of the present invention are encompassed by the present invention. The above description of the method for producing a laminated sheet of the present invention and the laminated sheet will be described based on the embodiments shown in the drawings, but the present invention is not limited thereto, and the structure of each portion may be replaced by any structure having the same function. Further, the present invention is also possible to add any other structure and steps to 100131446 41 201215506. For example, as shown in FIG. 8, a suction means 67 may be provided in the apparatus 6. The 抽吸 抽吸 suction means 67 is used to impregnate the first resin composition into the fibrous base material 2. By sucking air by the suction means 67, the first resin composition is pulled, and the degree of impregnation with the fibrous base material 2 can be surely adjusted. A suction means 67 can also be provided in the devices 6a, 6b. Further, in the second embodiment, the supply position of the first resin composition from the nozzle 611 is adjusted along the feeding direction of the support 5 or the fiber base material 2, but this is not limited thereto. For example, the supply position of the support 5 or the fiber substrate 2 in the width direction (orthogonal direction of the feed direction) can be adjusted. Thereby, the impregnation amount of the first resin composition in the width direction of the fiber base material 2 can be adjusted. The present application claims priority on the basis of Japanese Patent Application No. 2010-195494, filed on Sep. 1, 2010, and the disclosure of which is incorporated herein. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an embodiment of a laminated sheet. Fig. 2 is a schematic cross-sectional view showing another structural example of the embodiment of the laminated sheet. Fig. 3 is a view showing a device for manufacturing a laminated sheet used in an embodiment of a method for producing a laminated sheet according to the present invention. Fig. 4 is a view showing a device for manufacturing a laminated sheet used in an embodiment of a method for producing a laminated sheet according to the present invention. Fig. 5 is a view showing a manufacturing apparatus of a laminated sheet using 100131446 42 201215506 used in the embodiment of the method for producing a laminated sheet of the present invention. Fig. 6 is a cross-sectional view of the substrate. Fig. 7 is a cross-sectional view showing an embodiment of a semiconductor device. Fig. 8 is a view showing a manufacturing apparatus of a modification of the present invention. * [Description of main component symbols] 1 laminated sheet 1A to 1D laminated sheet 1 a~ 1 g prepreg 2 fibrous base material 3 first resin layer 4 second resin layer 5 support 6 laminated sheet manufacturing apparatus 6a laminated sheet manufacturing apparatus 6b Laminate manufacturing apparatus 7 Sheet 8 Resin film 10 Substrate 12 Metal layer 13 Inner layer circuit board 20 Interface 31 First impregnation unit 100131446 43 201215506 41 Second impregnation unit 64 Drying device 65 Bonding device 67 Suction means 100 Semiconductor device 200 Multilayer substrate 201a, 201b, 201d, 201e Circuit portion 202, 203 Conductor portion 300 Pad portion 400 Wiring portion 500 Semiconductor element 501 Bumps 611 to 614 Nozzles (slit coater) 621 to 628 Roller 629 Roller 651 '652 Roller 661~663 Adjustment means 100131446 44

Claims (1)

201215506 VII. Patent application scope: 1. A method for manufacturing a laminated sheet, which is a method for supplying a second resin composition between a continuously fed support and a continuously fed fibrous substrate, and the above support and the above The fiber base material is laminated by the above-mentioned second resin composition to produce a laminated sheet, and includes: • supplying a liquid i-th resin to one of the support body and at least one of the fiber base materials a second step of the composition; and a second step of pressing one of the one surface of the support and the one of the fiber base materials via the first [resin composition]; wherein, in the first step, After adjusting the supply position of the supply means for supplying the liquid second resin composition, the liquid i-th resin composition is supplied to at least one of the surface of the support and one of the fiber base materials. 2. The method of manufacturing a laminated sheet according to the ninth aspect of the invention, wherein, in the first step, one side of the support body and at least one of the one side of the fiber substrate are selected, and the selected surface is supplied. The supply position of the above-mentioned supply means is adjusted in the manner of the liquid resin composition. 3. The method of manufacturing a laminated sheet according to the second aspect of the invention, wherein in the first step, the supply means comprises: discharging the first resin toward one of the one side of the support; a nozzle of the composition; a nozzle for discharging the second resin composition toward the surface of the fiber substrate; and a surface of the opposite support body and the fiber substrate 100131446 45 201215506 The formed space is discharged, and one of the above-mentioned support bodies is discharged to the surface of the fiber substrate, and the second layer is discharged from the plurality of nozzles; and the second resin composition and one of the plurality of nozzles are selectively discharged. The supply position of the means is measured by spraying t' and I, and the liquid first resin composition is supplied. 4. In the step of the first aspect of the patent application scope, the above-mentioned method of supplying the hand '=', wherein the upper side of the above-mentioned support is fed; according to the discharge port of the nozzle, δ ψ 5 , the above One of the above-mentioned fiber substrates is changed in position, whereby the supply position of the supply means is adjusted, and the resin composition of the escaped year 1 is discharged from the nozzle. The manufacturing method of the laminated sheet of the item, wherein, in the first step of the patent application scope, the nozzle belonging to the supply means is changed in position, and one side of the branch body is adjusted to be in contact with the feeding side (four) The supply position of the supply means, or "the liquid-like resin composition of the above-mentioned supply means in the direction in which the filament material is fed out, is supplied to the surface of the substrate." 6. The method of manufacturing a laminated sheet according to the first aspect of the invention, wherein in the second step, the branch is in contact with the range of 1/4 or more of the lamination_week. _Continuously transporting the circumferential surface; the fiber is contacted by the above-mentioned laminating roller and the above-mentioned support material, and (4) the support of the above-mentioned support 100101446 46 201215506 and the first resin composition, and the fiber is contacted The base material is continuously conveyed toward the laminating roller, whereby the fiber base material and the support body are pressure-bonded via the second resin composition. 7. The method for producing a laminated sheet according to the first aspect of the invention, comprising: a surface facing the fiber substrate and the surface opposite to the first resin composition, and a third liquid resin composition. step. 8. The method for producing a laminated sheet according to the seventh aspect of the invention, wherein the supply of the above-mentioned composition is carried out by discharging the second resin composition from a nozzle. 9. If you apply for the manufacturing method of the laminated sheet of the first item, the Lizhong, including: the flaky resin composed of the second resin composition on the side of the surface, and the supply of the continuation supply. A third step of pressure-bonding the resin layer interposed between the upper sheet and the surface of the upper side of the i-th resin composition. T1〇·If applying for the manufacturing method of the laminated sheet of the ninth item, in the pot, between the second step and the third step, there is a layer 11 which is subjected to drying. In the method for producing a sheet, the first resin composition and the second resin composition are not related to each other. The manufacturing method of the laminate of the first aspect of the patent range, in the pot, the support system described above A metal foil or a resin film. 13. A manufacturing apparatus for a laminated sheet, comprising: 100131446 201215506 means for continuously feeding out a support of a support; continuously feeding out a fibrous base material; and the above-mentioned support body and said fibrous base material And a supply means for supplying the liquid first product; and s a pressure bonding means for pressure-bonding the support body to the fiber via the first resin composition; and adjusting the adjustment of the soil material The means for supplying the above-mentioned supply means. 14. The apparatus for manufacturing a laminated sheet according to claim 13 of the patent application, wherein the supply means is constituted by the first resin group facing the support body a nozzle for forming a product; a nozzle for discharging the first resin composition toward the fiber substrate; and a surface formed between the opposite side of the floor body and the fiber substrate; a nozzle that discharges the above-mentioned first resin composition to both the surface of the above-mentioned support and the fiber substrate. The adjustment means is connected to each of the nozzles, and the opening and closing of each nozzle is performed. The manufacturing apparatus of the laminated sheet of the thirteenth item, wherein the supply means is a nozzle; wherein the adjusting means changes the position of the nozzle so that the discharge opening of the nozzle faces the above-mentioned surface of the baffle body, the fiber A method of changing at least one of one of the ones of the bases of the substrate to change the position of the spout of the nozzle, 100131446 48 201215506 or, by changing the position of the nozzle, adjusting the feeding direction of the support on one side of the support a supply position of the above-mentioned liquid supply means, or the above-mentioned fiber substrate feeding direction on one side of the fiber substrate Supply location of supply means. 100131446 49